Optical apparatus, processing apparatus, and method for manufacturing articles

Abstract

To provide an optical device capable of forming a machining beam close to a circular shape.SOLUTION: An optical device that guides a laser beam emitted from a light source to an object, includes a correction mechanism that corrects a rotationally asymmetric optical characteristic of the optical device; wherein the correction mechanism includes at least two optical elements that have rotationally asymmetric power and a mechanism that allows each of the at least two optical elements to rotate around an optical axis; wherein an amount in the rotationally asymmetric optical characteristic is changed by a rotation angle difference between the at least two optical elements; and wherein a direction of the rotationally asymmetric optical characteristic is changed by a common rotation angle of the at least two optical elements.SELECTED DRAWING: Figure 1

Description

Technical Field

[0001] The present invention relates to an optical device using laser, a processing apparatus, a method for manufacturing an article, and the like. Background Art

[0002] As a conventional optical device, there is the optical device shown in FIG. 6. FIG. 6 is a diagram showing a conventional processing apparatus. Laser light emitted from a laser light source LS passes through an optical device 500 and is then irradiated onto an object 10. The optical device 500 includes: a tilt adjustment mechanism 1 that tilts the inclination of the incident optical axis of the laser light with respect to the object to any angle; and a focal position adjustment mechanism 2 that shifts the focal position of the laser light to any position in the optical axis direction. The optical device 500 also includes: a position adjustment mechanism 3 that shifts the incident optical axis position of the laser light with respect to the object to any position; and a light condensing mechanism 4 having a function of condensing the laser light.

[0003] Furthermore, a technique is known for reducing the diameter of a processing spot by shortening the processing laser wavelength or increasing the NA of processing light in order to perform finer processing using the optical device 500.

[0004] In order to perform high-quality microfabrication, it is desirable not only to reduce the processing spot diameter, but also to irradiate the object with an ideal circular processing beam. However, rotationally asymmetric optical characteristics occur depending on the manufacturing accuracy of optical members such as lenses and mirrors and the method of holding the optical members. Rotationally asymmetric optical characteristics cause the problem that processing light becomes elliptical at the focal position and the defocus position.

[0005] There are methods that enforce stricter manufacturing accuracy for optical members and methods of holding optical members that prevent the generation of rotationally asymmetric optical characteristics. However, there are limits to both accuracy and cost, and the influence of rotationally asymmetric optical characteristics cannot be completely eliminated.

[0006] In contrast to this, for example, Patent Document 1 discloses correction using a cylindrical lens as a method for correcting rotationally asymmetric optical characteristics. Prior Art Documents [Patent Documents]

[0007] [Patent Document 1] Japanese Patent Publication No. 2002-273589 [Overview of the project] [Problems that the invention aims to solve]

[0008] However, the correction mechanism described in Patent Document 1 can determine the amount of rotationally asymmetric optical properties by adjusting the distance between two cylindrical elements, but it cannot determine the orientation of the rotationally asymmetric optical properties.

[0009] Therefore, in Patent Document 1, because the amount and direction of rotationally asymmetric optical properties cannot be determined, the processing beam at the focal position and defocus position does not become an ideal circle, and high-quality micro-machining cannot be performed.

[0010] Therefore, the present invention aims to provide an optical device capable of making the processing beam nearly circular. [Means for solving the problem]

[0011] Book Optical devices as one aspect of the invention are In an optical device that guides laser light emitted from a light source to an object, An optical mechanism having rotationally asymmetric optical properties, It has a correction mechanism for correcting the rotationally asymmetric optical properties of an optical device, The correction mechanism is, It has rotationally asymmetrical power at least two optical elements and, The system includes a mechanism that allows each of the at least two optical elements to rotate around its optical axis, The rotational asymmetric optical characteristic quantity changes due to the difference in the rotational angles of the at least two optical elements. The orientation of the rotationally asymmetric optical properties changes due to the common rotation angle of the at least two optical elements. death, The at least two optical elements are, A first cylindrical lens having a concave surface, A second cylindrical lens having a convex surface is included, The convex surface and the concave surface are arranged opposite each other. characterized by the above.

Effects of the Invention

[0012] According to the present invention, an optical device capable of making a processed beam close to circular can be realized.

Brief Description of Drawings

[0013] [Figure 1] 1 is a diagram showing a configuration example of the optical device according to Embodiment 1. [Figure 2] It is a diagram showing an example of typical astigmatism. [Figure 3] It is a diagram showing a configuration example of the correction mechanism according to Embodiment 1. [Figure 4] It is a view of a first cylindrical lens 21 and a second cylindrical lens 22 as seen from the optical axis direction. [Figure 5] It is a diagram showing a configuration example of the optical device according to Embodiment 2. [Figure 6] It is a diagram showing a conventional optical device.

Mode for Carrying Out the Invention

[0014] Hereinafter, embodiments of the present invention will be described with reference to the drawings. However, the present invention is not limited to the following embodiments. In each drawing, the same reference numerals are assigned to the same members or elements, and repeated explanations are omitted or simplified.

[0015] <Embodiment 1> Figure 1 shows an example of the configuration of the optical device of Embodiment 1. Laser light emitted from the laser light source LS passes through the optical device 100 and then irradiates the object 10. BC is, for example, a beam adjustment mechanism that changes the beam diameter and beam divergence angle of the laser light emitted from the laser light source LS, and 1 is a tilt adjustment mechanism that tilts the inclination of the incident optical axis of the laser light with respect to the object to an arbitrary angle.

[0016] Furthermore, 2 is a focal position adjustment mechanism that shifts the focal position of the laser beam to any position in the direction of the optical axis, 3 is a position adjustment mechanism that shifts the incident optical axis position of the laser beam relative to the object to any position, and 4 is a focusing mechanism 4 that has the function of focusing the laser beam.

[0017] Furthermore, the optical device 100 of this embodiment includes a beam adjustment mechanism BC, a tilt adjustment mechanism 1, a focal position adjustment mechanism 2, a position adjustment mechanism 3, a light-gathering mechanism 4, etc., but it may also have at least one of these.

[0018] Furthermore, in the optical device 100 of this embodiment 1, a correction mechanism 20 for correcting rotationally asymmetric optical characteristics is provided between the tilt adjustment mechanism 1 and the focus position adjustment mechanism 2. The CTL is a control device that includes a CPU as a computer and memory that stores computer programs. The drive amount and drive timing of the tilt adjustment mechanism 1, the focus position adjustment mechanism 2, the position adjustment mechanism 3, etc. are controlled by drive signals output from the control device CTL.

[0019] The tilt adjustment mechanism 1 and the position adjustment mechanism 3 are composed of multiple mirror members having reflective surfaces, and the tilt and position are adjusted by using either fixedly positioned mirror members or mirror members having an angle-adjustable mechanism. The fixedly positioned mirror members may be configured in a prism shape, or each may be configured independently.

[0020] The mirror member having an angle-adjustable mechanism has a galvanometer motor, and rotates the mirror member via an output shaft with a drive amount corresponding to the drive signal of the galvanometer motor. The mirror member having an angle-adjustable mechanism only needs to be able to set the mirror member to a desired rotation angle, and is not limited to a galvanometer motor.

[0021] The focal position adjustment mechanism 2 consists of a lens and a drive mechanism that drives the lens in the direction of the optical axis, and drives the lens according to the amount of focal position movement. However, the configuration is not limited to the above, as long as the focal position can be driven to a desired amount of movement. In addition, the optical device 100 may include measurement mechanisms such as a processing surface observation unit for observing the processed surface and an optical axis observation unit for observing the adjustment state of the optical axis.

[0022] The optical device 100 has rotationally asymmetric optical properties. Astigmatism is one such rotationally asymmetric optical property. Factors that cause astigmatism include the manufacturing precision of the lenses and mirror components, and surface distortion caused by the holding of the mirror components. In particular, the tilt adjustment mechanism 1 uses many mirror components, and surface distortion caused by the holding of the mirror components is a factor that causes astigmatism.

[0023] Figure 2 shows a typical example of astigmatism. Solid contour lines represent positive aberrations, and dashed contour lines represent negative aberrations. When astigmatism occurs as shown in Figure 2, a positive power is generated in the X-axis direction, and a negative power is generated in the Y-axis direction, which is perpendicular to it. The further the distance between the location of the astigmatism and the pupil plane, the narrower the beam diameter in the X-axis direction and the wider the beam diameter in the Y-axis direction.

[0024] As a result, at the light-gathering position, not only is there a difference in the focal point between the X and Y directions, causing image plane discrepancies, but there is also a difference in NA (Numerical Aperture) between the X and Y directions.

[0025] Figure 2 shows examples where image plane anomaly and NA difference occur in the X-axis and Y-axis directions, but astigmatism can occur in all directions with the optical axis as the axis of rotation. When the direction of astigmatism rotates around the optical axis, image plane anomaly and NA difference occur in two orthogonal axes in directions corresponding to the direction of astigmatism.

[0026] In order to correct image plane difference and NA difference, in Embodiment 1, for example, a correction mechanism 20 is placed between the tilt adjustment mechanism 1 and the focus position adjustment mechanism 2. That is, the correction mechanism 20 is placed immediately after the tilt adjustment mechanism 1, which, as described above, is composed of many mirror members and is prone to generating astigmatism.

[0027] This is because if the correction mechanism 20 is placed far from the location where astigmatism occurs, the beam will become elliptical by the time it enters the correction mechanism 20. In such a position, even if the correction mechanism 20 corrects the astigmatism, the difference in beam diameter in the X and Y directions will not be corrected, and the NA difference will remain. On the other hand, even if the correction mechanism 20 corrects the NA difference, the astigmatism will not be corrected, and the image plane difference will remain.

[0028] Therefore, in this embodiment, the correction mechanism 20 is positioned immediately after the tilt adjustment mechanism 1, for example, before the beam becomes elliptical, where astigmatism occurs, and by correcting astigmatism, both image plane difference and NA difference can be suppressed.

[0029] In this embodiment, the tilt adjustment mechanism 1 is an optical mechanism that generates astigmatism (has rotationally asymmetric optical characteristics), but the invention is not limited to this example. That is, other mechanisms may also generate astigmatism, and the correction mechanism 20 of this embodiment can be applied to such mechanisms as well.

[0030] Furthermore, in this embodiment, the optical system (e.g., focus position adjustment mechanism 2) is positioned immediately after the optical mechanism (e.g., tilt adjustment mechanism 1) that generates astigmatism (having rotationally asymmetric optical characteristics). A correction mechanism 20 is placed between the optical mechanism (e.g., tilt adjustment mechanism 1) and the above-mentioned optical mechanism. However, the example is not limited to this. That is, any configuration in which the amount and direction of astigmatism can be canceled out by the optical mechanism (e.g., tilt adjustment mechanism 1) that generates astigmatism and the correction mechanism 20 is acceptable.

[0031] Therefore, a correction mechanism 20 may be placed between the optical system (e.g., beam adjustment mechanism BC or other optical system) located immediately before the optical system that generates astigmatism (e.g., tilt adjustment mechanism 1) and the optical system (e.g., tilt adjustment mechanism 1).

[0032] In other words, the correction mechanism 20 can be placed between the optical system, which is located immediately before or after the optical mechanism that generates astigmatism (e.g., tilt adjustment mechanism 1), and the optical mechanism (e.g., tilt adjustment mechanism 1). Alternatively, the correction mechanism 20 may be placed inside the optical mechanism (e.g., tilt adjustment mechanism 1) that generates astigmatism (having rotationally asymmetric optical characteristics) (e.g., between multiple mirrors). It is desirable that the correction mechanism 20 be placed as close as possible (nearby) the location where astigmatism occurs.

[0033] Next, the correction mechanism 20 will be described with reference to Figure 3. Figure 3 is a diagram showing an example of the configuration of the correction mechanism of Embodiment 1. Figure 3 shows a cross-section of the correction mechanism 20 when it is cut by a plane including the optical axis. In this embodiment, the correction mechanism 20 includes at least two optical elements having rotationally asymmetric power, and in this embodiment, each optical element is a toric lens. Furthermore, the toric lenses include a first cylindrical lens 21 and a second cylindrical lens 22, each having one cylindrical surface and the other flat surface.

[0034] Furthermore, the first cylindrical lens 21 and the second cylindrical lens 22 are each provided with a first rotation mechanism 23 and a second rotation mechanism 24 that rotate them around the optical axis. In other words, at least two optical elements each have a mechanism that allows them to rotate around the optical axis as the axis of rotation.

[0035] Furthermore, the first rotation mechanism 23 and the second rotation mechanism 24 can each be adjusted manually or by the control device CTL. That is, by rotating the first rotation mechanism 23 and the second rotation mechanism 24 relative to each other, either manually or by a control signal from the control device CTL, they can be adjusted so that an angle difference is created. Alternatively, they can be adjusted so that the angle difference does not change by rotating both in the same direction by the same angle.

[0036] Thus, this embodiment includes a mechanism for relatively rotating at least two of the optical elements and a mechanism for rotating at least two of the optical elements together in the same direction by the same angle.

[0037] In the example shown in Figure 3, the first cylindrical lens 21 has negative power, and the second cylindrical lens 22 has positive power. The cylindrical surfaces of the first cylindrical lens 21 and the second cylindrical lens 22 are positioned opposite each other, and the two cylindrical lenses are arranged in series along the optical axis.

[0038] Furthermore, in this embodiment, when the focal length of the first cylindrical lens is F1, the focal length of the second cylindrical lens is F2, and the distance between the first cylindrical lens 21 and the second cylindrical lens 22 is D, they are arranged such that Equation 1 is obtained. F1+F2=D...(Formula 1)

[0039] Furthermore, the order in which the positive and negative cylindrical lenses are arranged along the optical axis does not matter. Also, the first cylindrical lens 21 and the second cylindrical lens 22 may both have positive power, or they may both have negative power.

[0040] In this embodiment, the output of the tilt adjustment mechanism 1 is made to be nearly parallel light. Therefore, by placing a correction mechanism 20 that satisfies the relationship in Equation 1 between the tilt adjustment mechanism 1 and the focal position adjustment mechanism 2 immediately following it, and by matching the direction of the generatrix of the first cylindrical lens 21 and the generatrix of the second cylindrical lens 22, the combined power of the correction mechanism 20 becomes zero. In this way, it is equivalent to arranging parallel plates, and the optical characteristics remain unchanged.

[0041] If, as a result of the correction performed by the correction mechanism 20, the position and angle of the incident beam on the object 10 deviate from the target position and angle, the deviation from the target position and angle can be adjusted using the tilt adjustment mechanism 1, the focal position adjustment mechanism 2, and the position adjustment mechanism 3. Also, if the spot diameter at the focusing position changes due to the correction mechanism 20, the beam diameter can be adjusted using the beam adjustment mechanism BC.

[0042] Next, an example of the rotation angles of the first cylindrical lens 21 and the second cylindrical lens 22 will be explained using Figure 4. Figure 4 is a view of the first cylindrical lens 21 and the second cylindrical lens 22 from the optical axis direction, and shows the rotation angles after the amount and direction of astigmatism have been corrected by the first cylindrical lens 21 and the second cylindrical lens 22.

[0043] Before adjusting the amount and direction of astigmatism, the generatrixes of the first cylindrical lens 21 and the second cylindrical lens 22 are assumed to coincide with the X-axis. In the process of adjusting the amount and direction of astigmatism, the optical axis is used as the axis of rotation, and the first cylindrical lens 21 is rotated by β degrees and the second cylindrical lens 22 is rotated by (α+β) degrees. After rotation, the generatrix of the first cylindrical lens 21 is L21 and the generatrix of the second cylindrical lens 22 is L22.

[0044] The process for determining the rotation angle will be described in detail. The first cylindrical lens 21 and the second cylindrical lens 22 have a relative rotation angle difference α. Astigmatism occurs according to this rotation angle difference α. The larger the rotation angle difference α, the greater the astigmatism, and the maximum astigmatism occurs when the generatrix L21 of the first cylindrical lens 21 and the generatrix L22 of the second cylindrical lens 22 are orthogonal to each other, with α = 90 degrees.

[0045] Therefore, the amount of astigmatism generated by the rotation angle difference α between the first cylindrical lens 21 and the second cylindrical lens 22 is rotated to match the amount of astigmatism to be corrected. In other words, in this embodiment, rotationally asymmetric optical characteristic quantities (amount of astigmatism, or image plane difference in the XY axes due to astigmatism, etc.) are corrected by the rotation angle difference of at least two optical elements.

[0046] Furthermore, since astigmatism has not only a quantity but also an orientation, it cannot be corrected by rotation angle difference α alone. Therefore, while maintaining the rotation angle difference α between the first cylindrical lens 21 and the second cylindrical lens 22, the first cylindrical lens 21 and the second cylindrical lens 22 are rotated simultaneously by a common rotation angle β. This allows the direction of astigmatism to be changed according to the common rotation angle β while maintaining the amount of astigmatism.

[0047] Therefore, the first cylindrical lens 21 and the second cylindrical lens 22 are rotated together by a common rotation angle β in the direction of canceling out the astigmatism to be corrected. In other words, in this embodiment, the orientation of rotationally asymmetric optical characteristics is corrected by the common rotation angle of at least two optical elements.

[0048] In this embodiment, the second cylindrical lens 22 is rotated α degrees relative to the first cylindrical lens 21, and then the first cylindrical lens 21 and the second cylindrical lens 22 are rotated simultaneously by a common rotation angle β degrees. However, the procedure is not limited to this.

[0049] For example, if the amount of astigmatism can be determined by the rotation angle difference α degrees between the first cylindrical lens 21 and the second cylindrical lens 22, and the direction of the astigmatism can be determined by a common rotation angle β degrees, then each lens can be rotated independently.

[0050] In this embodiment, we have shown a case where, for example, the only mechanism generating astigmatism is the tilt adjustment mechanism 1. However, we are not limited to this example, and if there are multiple mechanisms generating astigmatism, a correction mechanism can be placed, for example, immediately before or after each mechanism generating astigmatism.

[0051] Furthermore, in this embodiment, we have shown an optical element having rotationally asymmetric power, where one surface is cylindrical and the other is planar. However, we are not limited to this example, and any optical system configuration is acceptable as long as the optical element generates astigmatism when rotated relatively. Also, in this embodiment, we have shown an example in which two optical elements having rotationally asymmetric power are used in the correction mechanism, but we are not limited to this example, and the number of optical elements may be two or more.

[0052] As described above, according to this embodiment, the correction mechanism 20 is positioned near the location where astigmatism occurs due to the tilt adjustment mechanism 1, etc., the amount of astigmatism is determined by the difference in rotation angles of at least two optical elements, and the direction of astigmatism is adjusted by a common rotation angle. This makes it possible to realize an optical device that can correct astigmatism while suppressing image plane difference and NA difference.

[0053] <Embodiment 2> Figure 5 shows an example of the configuration of the optical device according to Embodiment 2. Embodiment 2 relates to a configuration that can correct astigmatism even when there is no space to place a correction mechanism near the mechanism that generates astigmatism, or when there are multiple mechanisms that generate astigmatism and it is difficult to place a correction mechanism for each mechanism that generates astigmatism. In other words, it shows an example of a configuration that can correct image plane difference and NA difference caused by astigmatism even in the above cases.

[0054] The laser light emitted from the laser light source LS passes through the optical device 200 and then irradiates the object 10. The optical device 200 includes a tilt adjustment mechanism 1 that tilts the inclination of the incident optical axis of the laser light relative to the object to an arbitrary angle, a focal position adjustment mechanism 2 that shifts the focal position of the laser light to an arbitrary position in the optical axis direction, and a position adjustment mechanism 3 that shifts the position of the incident optical axis of the laser light relative to the object to an arbitrary position. The optical device 200 also includes a focusing mechanism 4 that has the function of focusing the laser light.

[0055] The drive amount and drive timing of the tilt adjustment mechanism 1, the focus position adjustment mechanism 2, the position adjustment mechanism 3, etc., are controlled by drive signals output from the control device CTL. The optical device 200 of Embodiment 2 further includes correction mechanisms 30 and 40 for correcting rotationally asymmetric optical characteristics. The positions of the correction mechanisms 30 and 40 may be far from the position where astigmatism occurs due to the tilt adjustment mechanism 1, etc. Furthermore, the arrangement position and order of the correction mechanisms 30 and 40 are not limited to this example.

[0056] Furthermore, the optical device 200 may include a beam adjustment mechanism BC that changes the beam diameter of the laser light emitted from the laser light source LS. It may also include measurement mechanisms such as a processing surface observation unit and an optical axis observation unit.

[0057] Correction mechanism 30 includes a first cylindrical lens (not shown) and a second cylindrical lens. Similarly, correction mechanism 40 also includes a first cylindrical lens (not shown) and a second cylindrical lens. Correction mechanisms 30 and 40 have separate roles; correction mechanism 30 has the function of correcting NA difference, and correction mechanism 40 has the function of correcting image plane difference.

[0058] The correction mechanism 30 for correcting NA difference determines the amount of NA difference based on the rotation angle difference between the first cylindrical lens and the second cylindrical lens, and the direction in which the NA difference occurs based on a common rotation angle. The correction mechanism 40 for correcting image plane difference determines the amount of image plane difference based on the rotation angle difference between the first cylindrical lens and the second cylindrical lens, and the direction in which the image plane difference occurs based on a common rotation angle.

[0059] In this embodiment 2, adjustments are made by using a combination of a correction mechanism 30 (first correction mechanism) for correcting NA difference and a correction mechanism 40 (second correction mechanism) for correcting image plane difference.

[0060] Therefore, sufficient correction is possible even when there is no space to place a correction mechanism near the mechanism that generates astigmatism, or when it is difficult to place a correction mechanism for each mechanism that generates astigmatism due to the presence of multiple such mechanisms. In other words, it is possible to provide an optical device that reduces image plane difference and NA difference while allowing flexibility in the placement of the first and second correction mechanisms.

[0061] <Embodiment 3> An example of a processing apparatus that processes an object 10 using light emitted from an optical device according to Embodiment 1 or Embodiment 2 described above will now be explained.

[0062] In the processing apparatus using the optical device according to Embodiment 1, the light emitted from the laser light source LS is adjusted via a tilt adjustment mechanism 1, a correction mechanism 20, a focal position adjustment mechanism 2, and a position adjustment mechanism 3 to guide the light ray to the target position on the object 10. In the processing apparatus using the optical device according to Embodiment 2, the light emitted from the laser light source is adjusted via a correction mechanism 30, a tilt adjustment mechanism 1, a correction mechanism 40, a focal position adjustment mechanism 2, and a position adjustment mechanism 3 to guide the light ray to the target position on the object 10.

[0063] As a result, the correction mechanism determines the amount and direction of rotationally asymmetric optical properties, correcting the rotationally asymmetric optical properties and creating a processing beam that approaches an ideal circular shape at the focal and defocus positions. Therefore, a processing device capable of high-quality micro-machining (such as straight hole machining, tapered hole machining, free-form hole machining, or cutting) can be realized.

[0064] <Embodiment 4> An example of a method for manufacturing an article using the processing apparatus according to Embodiment 3 will be described. The method for manufacturing the article includes a processing step of processing an object (target) using the processing apparatus, and a processing step of processing the target processed in the processing step, and an article can be manufactured from the target processed in the processing step.

[0065] The above processing steps may include, for example, at least one of the following processes: processing other than the said processing, transport, inspection, sorting, assembly, and packaging. The article manufacturing method of this embodiment is advantageous in terms of article performance, quality, productivity, and production cost compared to conventional methods because the processing beam can be made circular.

[0066] Although the present invention has been described in detail above based on its preferred embodiments, the present invention is not limited to the above embodiments, and various modifications are possible in accordance with the spirit of the present invention, and these modifications are not excluded from the scope of the present invention. Furthermore, the present invention includes the following combinations.

[0067] (Configuration 1) An optical device that guides laser light emitted from a light source to an object, comprising a correction mechanism for correcting the rotationally asymmetric optical properties of the optical device, wherein the correction mechanism comprises at least two optical elements having rotationally asymmetric power, and a mechanism that makes each of the at least two optical elements rotatable around the optical axis, wherein the amount of the rotationally asymmetric optical property changes due to the difference in the rotation angles of the at least two optical elements, and the direction of the rotationally asymmetric optical property changes due to the common rotation angle of the at least two optical elements.

[0068] (Configuration 2) The optical device according to Configuration 1, characterized by having at least one of the following: a tilt adjustment mechanism that tilts the inclination of the incident optical axis of the laser beam with respect to the object to an arbitrary angle; a focal position adjustment mechanism that shifts the focal position of the laser beam to an arbitrary position in the optical axis direction; and a position adjustment mechanism that shifts the position of the incident optical axis of the laser beam with respect to the object to an arbitrary position.

[0069] (Configuration 3) The optical apparatus according to Configuration 2, characterized in that the correction mechanism is disposed inside the optical mechanism having rotationally asymmetric optical properties, or between the optical system which is located immediately before or after the optical mechanism and the optical mechanism.

[0070] (Configuration 4) The optical device according to Configuration 3, characterized in that the optical mechanism is the tilt adjustment mechanism.

[0071] (Configuration 5) The optical device according to any one of Configurations 1 to 4, characterized in that the correction mechanism includes a mechanism for relatively rotating the at least two optical elements and a mechanism for rotating both the at least two optical elements in the same direction by the same angle.

[0072] (Configuration 6) The optical device according to any one of Configurations 1 to 5, characterized in that at least two of the optical elements are each toric lenses.

[0073] (Configuration 7) The optical device according to Configuration 6, characterized in that the at least two optical elements each include a cylindrical lens having positive power and a cylindrical lens having negative power.

[0074] (Configuration 8) The optical device according to Configuration 7, characterized in that the distance D between the negative power cylindrical lens and the positive power cylindrical lens satisfies F1 + F2 = D when the focal lengths of the respective cylindrical lenses are F1 and F2.

[0075] (Configuration 9) The optical apparatus according to any one of Configurations 1 to 8, characterized in that the correction mechanism includes a first correction mechanism for correcting the NA difference of the optical characteristics and a second correction mechanism for correcting the image plane difference of the optical characteristics.

[0076] (Configuration 10) A processing apparatus comprising the optical device described in any one of Configurations 1 to 9, characterized in that it processes the object with light emitted from the optical device.

[0077] (Configuration 11) A method for manufacturing an article, comprising a processing step of processing the object using the processing apparatus described in Configuration 10, and a processing step of processing the processed object, wherein an article is manufactured from the object processed in the processing step. [Explanation of Symbols]

[0078] LS: Laser light source BC: Beam adjustment mechanism 1: Tilt adjustment mechanism 2: Focus position adjustment mechanism 3:Position adjustment mechanism 4: Light-gathering mechanism 10: Object 20, 30, 40: Correction mechanism 21, 22: Cylindrical lens 100, 200, 500: Optical device

Claims

1. In an optical device that guides laser light emitted from a light source to an object, An optical mechanism having rotationally asymmetric optical properties, It has a correction mechanism for correcting the rotationally asymmetric optical properties of an optical device, The correction mechanism is, At least two optical elements with rotationally asymmetric power, The system includes a mechanism that allows each of the at least two optical elements to rotate around its optical axis, The rotationally asymmetric optical characteristic quantity changes due to the difference in the rotational angles of the at least two optical elements. The orientation of the rotationally asymmetric optical properties changes depending on the common rotation angle of the at least two optical elements. The at least two optical elements are, A first cylindrical lens having a concave surface, A second cylindrical lens having a convex surface is included, An optical device characterized in that the convex surface and the concave surface are arranged opposite each other.

2. A tilt adjustment mechanism that tilts the angle of the incident optical axis of the laser beam relative to the object to any angle, A focal position adjustment mechanism that shifts the focal position of the laser beam to any position in the optical axis direction, The optical apparatus according to claim 1, further comprising at least one of the following: a position adjustment mechanism for shifting the incident optical axis position of the laser beam with respect to the object to an arbitrary position.

3. The correction mechanism is, The optical device according to claim 2, characterized in that it is disposed inside the optical mechanism having rotationally asymmetric optical properties, or between an optical system located immediately before or after the optical mechanism and the optical mechanism.

4. The optical device according to claim 3, characterized in that the optical mechanism is the tilt adjustment mechanism.

5. The correction mechanism is, A mechanism for rotating the at least two optical elements relative to each other, A mechanism for rotating at least two of the optical elements in the same direction by the same angle, The optical apparatus according to claim 1, characterized by having the following features.

6. The optical apparatus according to claim 1, characterized in that each of the at least two optical elements is a toric lens.

7. The optical device according to claim 6, characterized in that the at least two optical elements each include a cylindrical lens having negative power and a cylindrical lens having positive power.

8. The optical apparatus according to claim 7, characterized in that the distance D between the negative power cylindrical lens and the positive power cylindrical lens satisfies F1 + F2 = D, where F1 and F2 are the focal lengths of the respective cylindrical lenses.

9. The optical apparatus according to claim 1, characterized in that the correction mechanism includes a first correction mechanism for correcting the NA difference of the optical characteristics and a second correction mechanism for correcting the image plane difference of the optical characteristics.

10. The optical apparatus includes the one described in any one of claims 1 to 9, A processing apparatus characterized by processing an object with light emitted from the optical device.

11. A processing step of processing the object using the processing apparatus described in claim 10, The process includes a processing step for processing the processed object, A method for manufacturing an article, characterized by manufacturing an article from the object processed in the processing step.

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