Expanding device and expanding method

Abstract

To allow for good expansion of an expanded sheet without damage to an expanded sheet or lifting of an adhesive film.SOLUTION: An expander 1 is an expander that expands an expanded sheet of a frame unit supporting a workpiece by means of an expanded sheet laminated with DAF having an outer edge larger than the outer edge of the workpiece and smaller than the inner edge of the frame in an opening of the frame, and has a frame holding unit 10 holding the frame, and a pressing unit 20 that presses and expands the expanded sheet between the inner edge of the frame held by the frame holding unit 10 and the outer edge of the workpiece. The pressing unit 20 has a plurality of rollers 22, and the rollers 22 are installed on the side of the frame rather than on the outer edge of the DAF.SELECTED DRAWING: Figure 1

Description

[[Technical Field]]

[0001] The present invention relates to an expanding apparatus and an expanding method. [[Background Art]]

[0002] An expanding apparatus that expands an expand sheet, which is attached to the back surface of a workpiece disposed in an opening of a frame and whose outer edge is supported by the frame, has been conventionally used (see, for example, Patent Document 1). [[Prior Art Documents]] [[Patent Documents]]

[0003] [[Patent Document 1]] Japanese Patent No. 6700093 [[Summary of the Invention]] [[Problem to be Solved by the Invention]]

[0004] When the expanding apparatus disclosed in the aforementioned Patent Document 1 expands an expand sheet with an adhesive film laminated thereon, external force is particularly concentrated in a region in contact with a roller. Therefore, when pressing is started in a state where the roller is in contact with the outer edge of the adhesive film, there have been problems that the expand sheet may be torn, or the outer edge of the adhesive film is pressed by the roller, which makes the adhesive film easily lift from the expand sheet, and fragments of the broken adhesive film scatter after expansion.

[0005] The reason why the expand sheet tears is that if the expand sheet is manufactured by bonding an adhesive film thereto and then hollowing it out with a cutter or a die, the strength of the expand sheet is partially reduced.

[0006] An object of the present invention is to provide an expanding apparatus and an expanding method capable of satisfactorily expanding an expand sheet while suppressing damage to the expand sheet and lifting of the adhesive film. [Means for solving the problem]

[0007] To solve the above-mentioned problems and achieve the objective, the present invention provides an expanding device that expands an expanded sheet of a frame unit supporting a workpiece by laminating an expanded sheet made of adhesive film having an outer edge larger than the outer edge of the workpiece and smaller than the inner edge of the frame at the opening of the frame, comprising: a frame holding unit that holds the frame; and a pressing unit that presses and expands the expanded sheet between the inner edge of the frame held by the frame holding unit and the outer edge of the workpiece, wherein the pressing unit has a plurality of rollers. The system further comprises a support unit that movably supports the roller, and a control unit, the control unit including an information acquisition unit that acquires information regarding the position of the outer edge of the adhesive film, and a position adjustment unit that adjusts the position of the roller only in the radial direction by the support unit based on the information, The roller is characterized by being installed on the frame side of the outer edge of the adhesive film.

[0009] The present invention provides an expanding device for expanding an expanded sheet of a frame unit that supports a workpiece by laminating an expanded sheet made of adhesive film having an outer edge larger than the outer edge of the workpiece and smaller than the inner edge of the frame at an opening in the frame, comprising: a frame holding unit for holding the frame; and a pressing unit for pressing and expanding the expanded sheet between the inner edge of the frame held by the frame holding unit and the outer edge of the workpiece, wherein the pressing unit has a plurality of rollers. The system further comprises a support unit that movably supports the roller, an imaging unit that images a region including the outer edge of the adhesive film, and a control unit, the control unit including an image acquisition unit that acquires an image captured by the imaging unit, an outer edge detection unit that detects the outer edge of the adhesive film from the image, and a position adjustment unit that drives the support unit and adjusts the position of the roller based on the information from the outer edge detection unit. Furthermore, the roller is characterized in that it is installed on the outer periphery of the outer edge of the adhesive film.

[0010] The present invention provides an expanding method for a frame unit supporting a workpiece, wherein the expanding sheet is formed by laminating an expandable sheet having an outer shape larger than the outer edge of the workpiece and smaller than the inner edge of the frame into the opening of the frame that accommodates the workpiece, and the expanding step is to press and expand the expanding sheet between the inner edge of the frame held by the frame holding unit and the outer edge of the workpiece with a pressing unit having a plurality of rollers. The method includes, prior to the expansion step, a position adjustment step in which the position of the roller is adjusted only in the radial direction to position the roller on the outer periphery of the adhesive film, In this expansion step, the roller is positioned on the frame side of the outer edge of the adhesive film.

[0012] The expansion method further includes an information acquisition step prior to the expansion step, in which information is acquired regarding the position of the outer edge of the adhesive film, and the position adjustment step adjusts the roller based on the information acquired in the information acquisition step. Radial direction only You can adjust the position.

[0013] The expansion method further comprises, prior to the expansion step, an image acquisition step of capturing an image of a region including the outer edge of the adhesive film, and an outer edge detection step of detecting the position of the outer edge from the image, wherein the position adjustment step adjusts the roller based on the image acquired in the image acquisition step. Radial direction only You can adjust the position. [Effects of the Invention]

[0014] This invention has the effect of enabling the expansion of the expandable sheet to be expanded smoothly while suppressing damage to the expandable sheet and lifting of the adhesive film. [Brief explanation of the drawing]

[0015] [Figure 1] Figure 1 is a schematic side view showing a configuration example of an expander according to Embodiment 1 in a partial cross-sectional view. [Figure 2] Figure 2 is a perspective view showing an example configuration of a frame unit equipped with an expanded sheet to be expanded by the expander shown in Figure 1. [Figure 3] Figure 3 is a side view showing a partial cross-section of the pressing unit of the expander shown in Figure 1. [Figure 4] Figure 4 is a schematic plan view showing the support unit of the pressing unit shown in Figure 3. [Figure 5] Figure 5 is a flowchart showing the flow of the expansion method according to Embodiment 1. [Figure 6] Figure 6 is a schematic side view showing a partial cross-section of the holding step of the expansion method shown in Figure 5. [Figure 7]Fig. 7 is a side view schematically showing an expansion step of the expanding method shown in Fig. 5 in partial cross-section. [Figure 8] Fig. 8 is a side view schematically showing a configuration example of an expanding apparatus according to Embodiment 2 in partial cross-section. [Figure 9] Fig. 9 is a plan view schematically showing a support unit of a pressing unit of the expanding apparatus shown in Fig. 8. [Figure 10] Fig. 10 is a flowchart showing the flow of an expanding method according to Embodiment 2. [Figure 11] Fig. 11 is a side view schematically showing a holding step of the expanding method shown in Fig. 10 in partial cross-section. [Figure 12] Fig. 12 is a side view schematically showing an expansion step of the expanding method shown in Fig. 10 in partial cross-section. [Figure 13] Fig. 13 is a side view schematically showing a configuration example of an expanding apparatus according to Embodiment 3 in partial cross-section. [Figure 14] Fig. 14 is a flowchart showing the flow of an expanding method according to Embodiment 3. [Figure 15] Fig. 15 is a side view schematically showing an image acquisition step of the expanding method shown in Fig. 14 in partial cross-section. [Figure 16] Fig. 16 is a diagram schematically showing an example of an image acquired in the image acquisition step of the expanding method shown in Fig. 14. [Figure 17] Fig. 17 is a side view schematically showing an expansion step of the expanding method shown in Fig. 14 in partial cross-section. DETAILED DESCRIPTION OF THE INVENTION

[0016] Embodiments for carrying out the present invention will be described in detail with reference to the drawings. The present invention is not limited to the contents described in the following embodiments. Furthermore, the components described below include those that can be easily imagined by those skilled in the art, and those that are substantially the same. In addition, the components described below can be combined as appropriate. Furthermore, various omissions, substitutions, or modifications of the components can be made without departing from the spirit of the present invention.

[0017] [Embodiment 1] An expandable device 1 according to Embodiment 1 of the present invention will be described based on the drawings. Figure 1 is a schematic side view showing a configuration example of the expandable device according to Embodiment 1 in a partial cross-section. Figure 2 is a perspective view showing a configuration example of a frame unit having an expandable sheet to be expanded by the expandable device shown in Figure 1.

[0018] (Frame unit) The expandable device 1 shown in Figure 1 according to Embodiment 1 is a device for expanding the expandable sheet 203 of the frame unit 200 shown in Figure 2. As shown in Figure 2, the frame unit 200 comprises a workpiece 201, a die attach film (hereinafter referred to as DAF) 202 which is an adhesive film, an expandable sheet 203, and a frame 204.

[0019] In Embodiment 1, the workpiece 201 is a disc-shaped semiconductor wafer or optical device wafer, etc., with a substrate made of silicon, sapphire, gallium arsenide, or SiC (silicon carbide). As shown in Figure 2, the workpiece 201 has devices 207 formed in each region partitioned by a plurality of intersecting division lines 206 on its surface 205.

[0020] Device 207 is, for example, an integrated circuit such as an IC (Integrated Circuit) or LSI (Large Scale Integration), an image sensor such as a CCD (Charge Coupled Device) or CMOS (Complementary Metal Oxide Semiconductor), a MEMS (Micro Electro Mechanical Systems), or various types of memory (semiconductor memory devices).

[0021] In Embodiment 1, the workpiece 201 is divided into individual chips 210 by dividing grooves 209 formed along the division line 206. Each chip 210 comprises a portion of the substrate divided along the division line 206 and a device 207 formed on the surface of the substrate, with a portion of the divided DAF 202 attached to the back surface 208 of the substrate. The workpiece 201 does not necessarily have to be divided into multiple chips 210 before expansion, as long as a division starting point, or a division starting point and a crack extending from the division starting point, is formed along the division line 206.

[0022] DAF202 is an adhesive film for die bonding, used to fix individually divided chips 210 to other chips or substrates. DAF202 is formed in a disc shape with a diameter larger than the diameter of the workpiece 201. DAF202 has an outer edge that is larger than the outer edge of the workpiece 201 and smaller than the inner edge of the frame 204. DAF202 is attached to the back surface 208 of the workpiece 201 and is laminated on the expanded sheet 203, and is placed between the expanded sheet 203 and the workpiece 201.

[0023] The expanded sheet 203 is made of a stretchable resin and has heat-shrinkable properties, shrinking when heated. The expanded sheet 203 is formed in a disc shape with a diameter larger than the diameters of the workpiece 201 and DAF 202, and comprises a base layer made of a synthetic resin that is stretchable and heat-shrinkable, and an adhesive layer laminated on the base layer and attached to the workpiece 201, and made of a synthetic resin that is stretchable and heat-shrinkable. The surface of the adhesive layer is the surface to which the DAF 202 is attached, and the back surface 208 of the workpiece 201 is attached via the DAF 202.

[0024] In Embodiment 1, the expandable sheet 203 has a DAF 202 pre-attached to its surface, and is attached to the back surface 208 of the workpiece 201 via the DAF 202, thus being a so-called 2-in-1 tape. The expandable sheet 203 is arranged coaxially with the DAF 202.

[0025] The frame 204 is formed in an annular shape with an inner diameter larger than the diameters of the workpiece 201 and DAF 202, and the outer circumference of the expanded sheet 203 is attached to it, supporting the workpiece 201 in the inner opening 211.

[0026] The frame unit 200 with the above configuration is constructed such that the back surface 208 of the workpiece 201 is attached to the DAF 202 which is attached to the adhesive surface of the expanded sheet 203, and the frame 204 is attached to the outer circumference of the expanded sheet 203. In other words, the frame unit 200 supports the workpiece 201 with the expanded sheet 203, which is made up of laminated DAF 202, at the opening 211 of the frame 204. In addition, the DAF 202 is exposed all around the outer circumference of the workpiece 201 in the frame unit 200.

[0027] (Expanding device) Next, the expander 1 according to Embodiment 1 will be described. Figure 3 is a side view showing a partial cross-section of the pressing unit of the expander shown in Figure 1. Figure 4 is a schematic plan view showing the support unit of the pressing unit shown in Figure 3.

[0028] The expandable device 1 according to Embodiment 1 is a device for expanding the expandable sheet 203 of the frame unit 200. In Embodiment 1, the expandable device 1 is also a device for expanding the expandable sheet 203 to widen the spacing between the chips 210.

[0029] As shown in Figure 1, the expander 1 comprises a frame holding unit 10, a pressing unit 20, and a control unit 100. The frame holding unit 10 holds the frame 204 of the frame unit 200 and comprises a frame mounting plate 11 and a frame retaining plate 12.

[0030] The frame mounting plate 11 has a circular opening 111 in its planar shape, and its upper surface 112 is formed in an annular shape, flat and parallel to the horizontal direction. In Embodiment 1, the inner diameter of the opening 111 of the frame mounting plate 11 is equal to the inner diameter of the frame 204. The frame 204 of the frame unit 200 is placed on the upper surface 112 of the frame mounting plate 11 with the workpiece 201 positioned on the opening 111. In Embodiment 1, the frame mounting plate 11 is provided to be vertically movable by a cylinder (not shown).

[0031] The frame retaining plate 12 is fixed above the frame mounting plate 11. The frame retaining plate 12 is formed in an annular shape with a circular opening 121 in the center that is the same size as the opening 111. The opening 121 of the frame retaining plate 12 is arranged coaxially with the opening 111 of the frame mounting plate 11. In Embodiment 1, the outer diameter of the frame retaining plate 12 is larger than the outer diameter of the frame mounting plate 11.

[0032] The frame holding unit 10 receives the frame unit 200 by a transport unit (not shown) onto the upper surface 112 of the lowered frame mounting plate 11, and the frame 204 of the frame unit 200 is placed on the upper surface 112 of the frame mounting plate 11. The frame holding unit 10 raises the frame mounting plate 11 and holds the frame 204 of the frame unit 200 by sandwiching it between the frame retaining plate 12 and the raised frame mounting plate 11.

[0033] The pressing unit 20 presses the region 212 of the expanded sheet 203, including the outer edge of the DAF 202, between the inner edge of the frame 204 held by the frame holding unit 10 and the outer edge of the workpiece 201, thereby expanding the expanded sheet 203. As shown in Figure 3, the pressing unit 20 includes a support unit 21, a plurality of rollers 22, a holding table 23, and a lifting unit 24.

[0034] The support unit 21 comprises a support plate 25 and a fixing block 26. The support plate 25 is formed in a disc shape with an outer diameter smaller than the inner diameter of the frame mounting plate 11 and the frame retaining plate 12, and larger than the outer diameter of the workpiece 201 and the DAF 202. The support plate 25 is positioned coaxially with the frame mounting plate 11 and the frame retaining plate 12 of the frame holding unit 10, that is, on the inner circumference of the frame mounting plate 11 and the frame retaining plate 12 of the frame holding unit 10. In Embodiment 1, the upper surface 251 of the support plate 25 is formed flat along the horizontal direction.

[0035] The fixing block 26 rotatably supports the roller 22 around its axis and is fixed to the outer edge of the upper surface 251 of the support plate 25. As shown in Figure 4, the fixing block 26 is formed in an arc shape in which a ring-shaped member is divided into multiple parts, with an outer diameter smaller than the outer diameter of the support plate 25 and an inner diameter larger than the outer diameters of the workpiece 201 and DAF 202. In Embodiment 1, the fixing block 26 is formed in an arc shape in which the aforementioned ring-shaped member is divided into four parts, but in the present invention, the aforementioned ring-shaped member may be divided into five or more parts. The dotted line in Figure 4 indicates the position when the fixing block 26 has moved to the outer circumference. That is, Figure 4 shows that when the fixing blocks 26 are located on the inner circumference side, they come into contact with each other, and when they move to the outer circumference side, they move apart.

[0036] In Embodiment 1, the fixing block 26 is fixed to the outer edge of the support plate 25 by bolts 27 that are screwed into threaded holes 252 provided in the support plate 25 through through holes 261 that penetrate the fixing block 26. The through holes 261 provided in the fixing block 26 are positioned to be aligned along the radial direction of the support plate 25 when fixed to the support plate 25. The threaded holes 252 provided on the outer edge of the support plate 25 are positioned to be aligned along the radial direction of the support plate 25, and the number of threaded holes 252 aligned radially is greater than the number of through holes 261 aligned radially. In Embodiment 1, there are two through holes 261 aligned radially and three threaded holes 252 aligned radially.

[0037] In Embodiment 1, the fixing block 26 is fixed to the outer edge of the support plate 25 in such a way that the radial position of the support plate 25 can be freely changed by appropriately changing the screw hole 252 into which a bolt 27, which passes through a through hole 261 that penetrates the fixing block 26, is screwed. In Embodiment 1, the fixing block 26 can be freely changed between the position shown by the solid line in Figures 3 and 4 and the position shown by the dashed line in Figures 3 and 4. Regardless of whether the fixing block 26 is fixed at the position shown by the solid line in Figures 3 and 4 or the position shown by the dashed line in Figures 3 and 4, the radial direction at the center of the arc coincides with the radial direction of the support plate 25.

[0038] The rollers 22 are formed in a cylindrical shape with a constant outer diameter and are rotatably supported around their axis on the outer edge of the upper surface 251 of the support plate 25 via a fixing block 26. In Embodiment 1, the multiple rollers 22 have the same outer diameter. The multiple rollers 22 are arranged at equal intervals in the circumferential direction on the outer edge of the upper surface 251 of the support plate 25, and their axes are positioned parallel to the tangent to the outer edge of the fixing block 26. The multiple rollers 22 are positioned to overlap vertically with the area 212 of the expanded sheet 203 of the frame unit 200 held by the frame holding unit 10.

[0039] The lifting unit 24 raises and lowers the support plate 25 along the vertical direction. In Embodiment 1, the lifting unit 24 is a cylinder equipped with a rod 241 that is parallel to and extends along the vertical direction. In Embodiment 1, the central part of the support plate 25 is attached to the tip of the rod 241 of the lifting unit 24. The lifting unit 24 raises and lowers the support plate 25 and the roller 22 along the vertical direction by extending and retracting the rod 241.

[0040] In Embodiment 1, the lifting unit 24 moves the support plate 25 and the roller 22 vertically up and down between a position where the upper end of the roller 22 is on the same plane as the upper surface 112 of the frame mounting plate 11 of the frame holding unit 10 when it is lowered, and a position where the upper end of the roller 22 is raised and is located above the upper surface 112 of the frame mounting plate 11 of the frame holding unit 10 when it is holding the frame 204.

[0041] In Embodiment 1, when the support plate 25 and roller 22 are raised by the lifting unit 24, the upper end of the roller 22 is positioned above the upper surface 112 of the frame mounting plate 11 of the frame holding unit 10 which fixes the frame 204. As a result, the roller 22 contacts the region 212 between the inner edge of the frame 204 of the expanded sheet 203 of the frame unit 200 fixed by the frame holding unit 10 and the outer edge of the workpiece 201, and presses the region 212 upward.

[0042] The holding table 23 is formed in a disc shape with an outer diameter smaller than the outer diameter of the support plate 25, and is positioned coaxially with the support plate 25 inside a fixing block 26 fixed at the innermost radial position. The holding table 23 is fixed to the upper surface 251 of the support plate 25 and has a holding surface 231 that suction-holds the workpiece 201 of the frame unit 200 via the expanded sheet 203. The holding table 23 is disc-shaped with a diameter smaller than the inner diameter of the frame 204, and the holding surface 231 is formed flat along the horizontal direction.

[0043] The holding table 23 has a holding surface 231 made of a porous material such as porous ceramic and is connected to a suction source (not shown). The holding surface 231 of the holding table 23 is located on the same plane as the upper end of a roller that is rotatably supported by a fixing block 26 fixed to the outer edge of the upper surface 251 of the support plate 25.

[0044] The holding table 23 has the back surface 208 side of the workpiece 201 placed on its holding surface 231 via the expanded sheet 203 of the frame unit 200. The holding table 23 can hold the back surface 208 side of the workpiece 201 by suction from the holding surface 231 by a suction source.

[0045] The control unit 100 controls the aforementioned components of the expander 1 to cause the expander 1 to perform the expansion operation of the expander sheet 203 relative to the frame unit 200. The control unit 100 is a computer having an arithmetic processing unit with a microprocessor such as a CPU (central processing unit), a storage device with memory such as ROM (read-only memory) or RAM (random access memory), and an input / output interface device. The arithmetic processing unit of the control unit 100 performs arithmetic processing according to the computer program stored in the storage device and outputs control signals for controlling the expander 1 to the aforementioned components of the expander 1 via the input / output interface device.

[0046] The control unit 100 includes a machining control unit 101 that controls the above-described components of the expander 1 to perform the expansion operation of the expander sheet 203 relative to the frame unit 200. The function of the machining control unit 101 is realized by the arithmetic processing unit performing calculations according to a computer program stored in the memory device.

[0047] The control unit 100 is connected to a display unit (not shown) which consists of a liquid crystal display device that displays the status of the machining operation and images, and an input unit (not shown) which is used by the operator to register machining conditions for the expansion operation in which the expandable sheet 203 is expanded. The input unit consists of at least one of a touch panel provided on the display unit and an external input device such as a keyboard.

[0048] (Expanding method) Next, the expansion method according to Embodiment 1 will be described based on the drawings. Figure 5 is a flowchart showing the flow of the expansion method according to Embodiment 1. Figure 6 is a schematic side view showing a partial cross-section of the holding step of the expansion method shown in Figure 5. Figure 7 is a schematic side view showing a partial cross-section of the expansion step of the expansion method shown in Figure 5.

[0049] The expansion method according to Embodiment 1 is a method of expanding the expand sheet 203 of a frame unit 200 that supports a workpiece 201 by an expand sheet 203 into the opening 211 of a frame 204 having an opening 211 for accommodating a workpiece 201. The expansion method according to Embodiment 1 includes the expansion operation of an expansion device 1. As shown in Figure 5, the expansion method according to Embodiment 1 includes a position adjustment step 301, a holding step 302, and an expansion step 303.

[0050] (Position adjustment step) The position adjustment step 301 is a step to adjust the radial position of the support plate 25 of the roller 22 before the expansion step 303. In Embodiment 1, the position adjustment step 301 adjusts the radial position of the roller 22 relative to the support plate 25 so that the roller 22 is located radially outside the support plate 25, i.e., on the frame 204 side, depending on the position of the outer edge of the DAF 202 of the frame unit 200 to be expanded. In other words, the radial position of the roller 22 is adjusted so that when the roller 22 contacts the expanded sheet 203 to start the expansion step 303, the upper end of the roller 22 does not contact the outer edge of the DAF 202. Also, during the execution of the expansion step 303, depending on the amount of expansion, parts of the roller 22 other than the upper end may come into contact with the expanded sheet 203, or the area of ​​the expanded sheet 203 that comes into contact with the roller 22 may change as the expanded sheet 203 expands. Therefore, it is preferable to position the roller 22 so that, even during the extension step 303, the entire roller 22, not just its upper end, does not come into contact with the outer edge of the DAF 202.

[0051] Specifically, in Embodiment 1, in position adjustment step 301, the fixing block 26 is fixed to the support plate 25 such that the roller 22 is located radially outward of the support plate 25, i.e., on the frame 204 side, relative to the outer edge of the DAF 202 of the frame unit 200 to be expanded, by appropriately changing the screw hole 252 into which the bolt 27 is screwed. In this invention, when the roller 22 is located radially outward of the support plate 25, i.e., on the frame 204 side, relative to the outer edge of the DAF 202, it means that the upper end of the roller 22 is located radially outward of the DAF 202, i.e., on the frame 204 side, relative to the outer edge of the DAF 202, and preferably, the entire roller 22 is located radially outward of the DAF 202, i.e., on the frame 204 side.

[0052] (Holding step) The holding step 302 is the step in which the frame holding unit 10 of the expander 1 holds the frame 204 of the frame unit 200. In Embodiment 1, in the holding step 302, the expander 1 receives processing conditions via the input unit and stores them in the storage device. In Embodiment 1, in the holding step 302, when the control unit 100 receives a processing start instruction from the operator, the expander 1 starts the expansion operation.

[0053] In Embodiment 1, in the holding step 302, when the expansion operation is started, the expanding device 1 controls the cylinder via the machining control unit 101 of the control unit 100 to lower the frame mounting plate 11 of the frame holding unit 10, and also controls the lifting unit 24 to lower the support plate 25 and rollers 22. In Embodiment 1, in the holding step 302, the expanding device 1 receives the frame unit 200 from the frame holding unit 10, and the frame 204 of the frame unit 200 is placed on the upper surface 112 of the frame mounting plate 11.

[0054] In Embodiment 1, during the holding step 302, the expanding device 1, with the processing control unit 101 of the control unit 100 controlling the cylinder, raises the frame mounting plate 11, and holds the frame of the frame unit 200 by sandwiching the frame 204 between the frame retaining plate 12 and the frame mounting plate 11, as shown in Figure 6.

[0055] (Extension step) The expansion step 303 is a step in which the expanded sheet 203 is expanded by pressing the area 212 of the expanded sheet 203 between the inner edge of the frame 204 held by the frame holding unit 10 and the outer edge of the workpiece 201 with a pressing unit 20 having a plurality of rollers 22. In Embodiment 1, in the expansion step 303, the expanding device 1 is raised by the processing control unit 101 of the control unit 100, which controls the lifting unit 24 to raise the support plate 25 and the rollers 22, as shown in Figure 7.

[0056] Then, the roller 22 positioned on the upper surface 251 of the support plate 25 comes into contact with the region 212 of the expanded sheet 203, and the roller 22 presses the region 212 of the expanded sheet 203 from below upward, causing the expanded sheet 203 to expand in the planar direction. As a result of the expansion of the expanded sheet 203, tensile forces act radially on the expanded sheet 203.

[0057] When a tensile force is applied radially to the expanded sheet 203 attached to the back surface 208 of the workpiece 201, the workpiece 201 is divided into individual chips 210 along the planned division line 206, causing the spaces between the chips 210 to widen and creating gaps between them.

[0058] In Embodiment 1, in expansion step 303, after the expansion of the expand sheet 203, the processing control unit 101 of the control unit 100 uses suction to hold the back surface 208 of the workpiece 201 to the holding surface 231 of the holding table 23 via the expand sheet 203. After the support plate 25 and rollers 22, i.e., the holding table 23, are lowered, the processing control unit 101 of the control unit 100 maintains the spacing between the chips 210 by heating and shrinking the area 212 of the expand sheet 203. The processing control unit 101 of the control unit 100 releases the suction hold of the holding table 23 and releases the hold of the frame 204 of the frame unit 200 of the frame holding unit 10, thereby ending the expansion operation.

[0059] Furthermore, in Embodiment 1, since the roller 22 is adjusted in the position adjustment step 301 to a position closer to the frame 204 than the outer edge of the DAF 202, in the expansion step 303, the roller 22 is installed on the outer circumference side of the outer edge of the DAF 202, thereby preventing the roller 22 from pressing against the outer edge of the DAF 202 via the expanded sheet 203.

[0060] In the expansion device 1 and expansion method according to Embodiment 1 described above, in the expansion step 303, the roller 22 is installed on the frame 204 side of the outer edge of the DAF 202, so that the roller 22 does not press against the outer edge of the DAF 202 via the expansion sheet 203. For this reason, the expansion device 1 and expansion method according to Embodiment 1 can suppress damage to the expansion sheet 203 and lifting of the DAF 202 away from the expansion sheet 203.

[0061] As a result, the expandable device 1 and expandable method according to Embodiment 1 have the effect of suppressing damage to the expandable sheet 203 and lifting of the DAF 202 from the expandable sheet 203, and successfully expanding the expandable sheet 203.

[0062] [Embodiment 2] The expansion device 1-2 and the expansion method according to Embodiment 2 will be described based on the drawings. Figure 8 is a schematic side view showing a configuration example of the expansion device according to Embodiment 2 in a partial cross-section. Figure 9 is a schematic plan view showing the support unit of the pressing unit of the expansion device shown in Figure 8. Figure 10 is a flowchart showing the flow of the expansion method according to Embodiment 2. Figure 11 is a schematic side view showing the holding step of the expansion method shown in Figure 10 in a partial cross-section. Figure 12 is a schematic side view showing the expansion step of the expansion method shown in Figure 10 in a partial cross-section. Note that Figures 8, 9, 10, 11, and 12 use the same reference numerals as Embodiment 1 for the same parts and their descriptions are omitted.

[0063] The expandable device 1-2 according to Embodiment 2 is a device for expanding the expandable sheet 203 of the frame unit 200, similar to Embodiment 1. The expandable device 1-2 according to Embodiment 2 is the same as Embodiment 1 except that the configuration of the support unit 21 and control unit 100 of the pressing unit 20 is different.

[0064] As shown in Figures 8 and 9, the support unit 21 of the pressing unit 20 of the expander 1-2 according to Embodiment 2 includes a support plate 25, a fixed block 26, and a roller moving unit 28. The roller moving unit 28 supports the roller 22 so that it can move by supporting the fixed block 26 on the outer edge of the upper surface 251 of the support plate 25 so that it can move in the radial direction of the support plate 25.

[0065] The roller moving unit 28 moves the fixed block 26 radially along the outer edge of the upper surface 251 of the support plate 25, across positions shown by solid and dashed lines in Figures 8 and 9. The roller moving unit 28 includes a well-known ball screw 281 rotatably mounted on the outer edge of the upper surface 251 of the support plate 25 so as to be rotatable around an axis parallel to the radial direction of the support plate 25, a well-known motor (not shown) that rotates the ball screw 281 around its axis, and a nut (not shown) that is screwed onto the ball screw 281 and fixed to the fixed block 26, and that moves the fixed block 26 radially along the support plate 25 as the ball screw 281 rotates around its axis. Thus, in Embodiment 2, the support unit 21 supports the roller 22 so as to be movable along the outer edge of the upper surface 251 of the support plate 25 by including the roller moving unit 28. The dotted line in Figure 9 indicates the position where the fixed block 26 has moved to the outer circumference. In other words, Figure 9 shows that when the fixed blocks 26 are located on the inner circumference side, they come into contact with each other, and when they move toward the outer circumference side, they move apart.

[0066] As shown in Figure 8, the control unit 100 of the expander 1-2 according to Embodiment 2 includes, in addition to the processing control unit 101, an information acquisition unit 102 and a position adjustment unit 103. The information acquisition unit 102 acquires information regarding the position of the outer edge of the DAF 202 of the frame unit 200.

[0067] In Embodiment 2, the information acquisition unit 102 acquires information regarding the position of the outer edge of the DAF202 input by an operator or the like from an input unit. This information regarding the position of the outer edge of the DAF202 includes, for example, the distance of the outer edge of the DAF202 from the center of the DAF202 (i.e., the diameter of the DAF202), the type and part number of the expanded sheet 203, which is the DAF202, i.e., the 2-in-1 tape, and the distance from the center of the support plate 25 at the upper end of the roller 22, which is located on the outer circumference side of the DAF202 in the expansion step 303.

[0068] The position adjustment unit 103 adjusts the position of the rollers 22 by controlling the roller movement unit 28 of the support unit 21 based on the information acquired by the information acquisition unit 102 regarding the position of the outer edge of the DAF 202. Based on the information acquired by the information acquisition unit 102 regarding the position of the outer edge of the DAF 202, the position adjustment unit 103 calculates the radial position on the outer edge of the upper surface 251 of the support plate 25 of each fixed block 26 so that all the rollers 22 supported by each fixed block 26 are positioned on the side of the frame 204 that is closer to the outer edge of the DAF 202. The position adjustment unit 103 controls the roller movement unit 28 of the support unit 21 to adjust the radial position on the outer edge of the upper surface 251 of the support plate 25 of each fixed block 26 so that all the rollers 22 are positioned on the side of the frame 204 that is closer to the outer edge of the support plate 25

[0069] The functions of the information acquisition unit 102 and the position adjustment unit 103 are realized by the arithmetic processing unit performing calculations according to the computer program stored in the memory device.

[0070] (Expanding method) The expansion method according to Embodiment 2 is a method of expanding the expand sheet 203 of a frame unit 200 that supports the workpiece 201 by an expand sheet 203 into the opening 211 of a frame 204 that has an opening 211 for accommodating the workpiece 201, similar to Embodiment 1. The expansion method according to Embodiment 2 includes the expansion operation of the expansion device 1-2. As shown in Figure 10, the expansion method according to Embodiment 2 includes an information acquisition step 304, a position adjustment step 301-2, a holding step 302, and an expansion step 303.

[0071] (Information acquisition step) The information acquisition step 304 is a step in which information about the position of the outer edge of the DAF 202 is acquired before the expansion step 303. In Embodiment 1, in the information acquisition step 304, before the expansion device 1-2 performs the position adjustment steps 301-2, the holding step 302, and the expansion step 303, the information acquisition unit 102 of the control unit 100 receives information about the position of the outer edge of the DAF 202 via the input unit and stores it in the storage device.

[0072] (Position adjustment step) Position adjustment step 301-2 is a step to adjust the radial position of the support plate 25 of the roller 22 before the expansion step 303. In Embodiment 2, in position adjustment step 301-2, before the holding step 302 and the expansion step 303, the position adjustment unit 103 of the control unit 100 calculates the radial position on the outer edge of the upper surface 251 of the support plate 25 of each fixed block 26, based on the information acquired by the information acquisition unit 102 regarding the position of the outer edge of the DAF 202, so that all the rollers 22 supported by each fixed block 26 are installed on the outer circumference side of the outer edge of the DAF 202.

[0073] In Embodiment 2, in position adjustment step 301-2, the position adjustment unit 103 of the control unit 100 controls the roller movement unit 28 of the support unit 21 to position each fixed block 26 at the calculated radial position on the outer edge of the support plate 25. Thus, in Embodiment 2, in position adjustment step 301-2, the position adjustment unit 103 of the control unit 100 adjusts the position of the roller 22 to a position where it is installed on the frame 204 side of the outer edge of the DAF 202, based on the information acquired by the information acquisition unit 102 in information acquisition step 304.

[0074] (Holding step) In Embodiment 2, during the holding step 302, the expanding device 1-2, with the processing control unit 101 of the control unit 100, holds the frame of the frame unit 200 by sandwiching the frame 204 between the frame retaining plate 12 and the frame mounting plate 11, as shown in Figure 11, similar to Embodiment 1.

[0075] (Extension step) In Embodiment 2, in expansion step 303, the processing control unit 101 of the control unit 100 of the expander 1-2 raises the support plate 25 and roller 22 as shown in Figure 12, similar to Embodiment 1, to expand the expander sheet 203. In Embodiment 2, in expansion step 303, the processing control unit 101 of the control unit 100 of the expander 1-2 releases the suction holding of the holding table 23 by heating and shrinking the region 212 of the expander sheet 203, similar to Embodiment 1, and releases the holding of the frame 204 of the frame unit 200 of the frame holding unit 10, thereby ending the expansion operation.

[0076] In the expansion device 1-2 and expansion method according to Embodiment 2, in the expansion step 303, the roller 22 is installed on the frame 204 side of the outer edge of the DAF 202. Therefore, similar to Embodiment 1, it is possible to suppress the roller 22 from pressing the outer edge of the DAF 202 through the expansion sheet 203, thereby suppressing damage to the expansion sheet 203 and lifting of the DAF 202 away from the expansion sheet 203, and thus achieving the effect of successfully expanding the expansion sheet 203.

[0077] In addition, in the present invention, the expandable device 1-2 according to Embodiment 2 may perform the information acquisition step 304 and the position adjustment step 301-2 in order after the holding step 302 and before the expansion step 303.

[0078] Furthermore, in the present invention, the expandable device 1-2 according to Embodiment 2 may pre-record the position information of the outer edge of the DAF 202 in the storage device of the control unit 100, and adjust the position of the roller 22, i.e., the fixed block 26, in the position adjustment step 301 based on the position information of the outer edge of the DAF 202 recorded in the storage device.

[0079] [Embodiment 3] The expansion device 1-3 and the expansion method according to Embodiment 3 will be described based on the drawings. Figure 13 is a schematic side view showing a configuration example of the expansion device according to Embodiment 3 in a partial cross-section. Figure 14 is a flowchart showing the flow of the expansion method according to Embodiment 3. Figure 15 is a schematic side view showing the image acquisition step of the expansion method shown in Figure 14 in a partial cross-section. Figure 16 is a schematic diagram showing an example of an image acquired in the image acquisition step of the expansion method shown in Figure 14. Figure 17 is a schematic side view showing the expansion step of the expansion method shown in Figure 14 in a partial cross-section. Note that Figures 13, 14, 15, 16, and 17 use the same reference numerals for the same parts as Embodiments 1 and 2, and their descriptions are omitted.

[0080] The expander device 1-3 according to Embodiment 3 is a device for expanding the expand sheet 203 of the frame unit 200, similar to Embodiment 1. The expander device 1-3 according to Embodiment 3 is the same as Embodiment 1 except that the configuration of the support unit 21 and control unit 100 of the pressing unit 20 is different, and it includes an imaging unit 30.

[0081] As shown in Figure 13, the support unit 21 of the pressing unit 20 of the expander 1-3 according to Embodiment 3 includes a support plate 25 and a fixing block 26, as well as a roller moving unit 28, similar to Embodiment 2.

[0082] The imaging unit 30 of the expander 1-3 according to Embodiment 3 images a region 212 including the outer edge of the DAF 202 of the frame unit 200 in which the frame 204 is held by the frame holding unit 10.

[0083] In Embodiment 3, the imaging unit 30 is positioned above the region 212 of the expanded sheet 203, which includes the outer edge of the DAF 202 of the frame unit 200 in which the frame 204 is held by the frame holding unit 10, and facing the region 212 of the expanded sheet 203 in the vertical direction. The imaging unit 30 includes an image sensor such as a CCD (Charge Coupled Device) image sensor or a CMOS (Complementary MOS) image sensor that images the region 212 of the expanded sheet 203, which includes the outer edge of the DAF 202 of the frame unit 200 in which the frame 204 is held by the frame holding unit 10.

[0084] The imaging unit 30 images a region 212 of the expanded sheet 203 that includes the outer edge of the DAF 202 of the frame unit 200 in which the frame 204 is held by the frame holding unit 10, and outputs the image 400 (shown in Figure 16) obtained from the imaging unit 30 to the control unit 100. The image 400 acquired by the imaging unit 30 is a grayscale image in which the brightness of each pixel is defined by multiple levels of gradation (for example, 256 levels).

[0085] The control unit 100 of the expander 1-3 according to Embodiment 3, as shown in Figure 13, includes, in addition to the processing control unit 101, an image acquisition unit 104, an outer edge detection unit 105, and a position adjustment unit 103-3. The image acquisition unit 104 acquires the image 400 captured by the imaging unit 30. The image acquisition unit 104 acquires the image 400 from the imaging unit 30 and temporarily stores the acquired image 400 in a storage device.

[0086] The outer edge detection unit 105 detects the outer edge of the DAF202 from the image 400 acquired by the image acquisition unit 104. The outer edge detection unit 105 applies known image processing to the image 400 acquired by the image acquisition unit 104 to detect the outer edge of the DAF202 from the image 400. The outer edge detection unit 105 calculates the distance of the outer edge of the DAF202 from the center of the support plate 25 of the DAF202, which is information regarding the position of the outer edge of the DAF202, from the detected outer edge of the DAF202 and the position of pixels on the detected outer edge of the DAF202.

[0087] The position adjustment unit 103-3 adjusts the position of the rollers 22 by controlling the roller movement unit 28 of the support unit 21 based on the distance from the center of the support plate 25 of the outer edge of the DAF 202, which is information regarding the position of the outer edge of the DAF 202 detected by the outer edge detection unit 105. Based on the distance from the center of the support plate 25 of the outer edge of the DAF 202, which is information regarding the position of the outer edge of the DAF 202 detected by the outer edge detection unit 105, the position adjustment unit 103-3 calculates the radial position on the outer edge of the upper surface 251 of the support plate 25 of each fixed block 26, so that all the rollers 22 supported by each fixed block 26 are installed on the side of the frame 204 that is closer to the outer edge of the DAF 202.

[0088] The position adjustment unit 103-3 controls the roller movement unit 28 of the support unit 21 to adjust the radial position of the fixed block 26 on the outer edge of the upper surface 251 of the support plate 25, so that all rollers 22 are installed on the side of the frame 204 that is closer to the outer edge of the DAF 202, thereby positioning each fixed block 26 at the calculated radial position on the outer edge of the upper surface 251 of the support plate 25.

[0089] The functions of the image acquisition unit 104, the edge detection unit 105, and the position adjustment unit 103-3 are realized by the arithmetic processing unit performing calculations according to a computer program stored in the memory device.

[0090] (Expanding method) The expansion method according to Embodiment 3 is a method of expanding the expand sheet 203 of a frame unit 200 that supports the workpiece 201 by an expand sheet 203 into the opening 211 of a frame 204 that has an opening 211 for accommodating the workpiece 201, similar to Embodiments 1 and 2. The expansion method according to Embodiment 3 includes the expansion operation of the expansion device 1-3. As shown in Figure 14, the expansion method according to Embodiment 3 includes a holding step 302, an image acquisition step 305, an outer edge detection step 306, a position adjustment step 301-3, and an expansion step 303.

[0091] (Holding step) In Embodiment 3, during the holding step 302, the expanding device 1-3, with the processing control unit 101 of the control unit 100, holds the frame of the frame unit 200 by sandwiching the frame 204 between the frame retaining plate 12 and the frame mounting plate 11, similar to Embodiment 1.

[0092] (Image acquisition step) The image acquisition step 305 is a step in which, prior to the expansion step 303, an image is taken of the region 212 of the expanded sheet 203, including the outer edge of the DAF 202 of the frame unit 200 in which the frame 204 is held by the frame holding unit 10, and the region 212 of the expanded sheet 203 is imaged, and an image 400 is taken. In Embodiment 3, in the image acquisition step 305, the image acquisition unit 104 of the expander 1-3 causes the imaging unit 30 shown in Figure 15 to image the region 212 of the expanded sheet 203, including the outer edge of the DAF 202 of the frame unit 200 in which the frame 204 is held by the frame holding unit 10.

[0093] In Embodiment 3, during the image acquisition step 305, the expander 1-3 has the image acquisition unit 104 of the control unit 100 cause the imaging unit 30 to image one location of the region 212 of the expander sheet 203. During the image acquisition step 305, the expander 1-3 has the image acquisition unit 104 of the control unit 100 acquire the image 400 (shown in Figure 16) captured by the imaging unit 30, and stores the acquired image 400 in a storage device.

[0094] In Figure 16, Image 400 shows parallel diagonal lines becoming coarser as the brightness increases. Also, in Figure 16, Image 400 shows the case where the surface 205 of the workpiece 201 has a higher brightness than DAF 202, and DAF 202 has a higher brightness than the expanded sheet 203.

[0095] (Edge detection step) The outer edge detection step 306 is a step in which the position of the outer edge of the DAF202 is detected from the center of the support plate 25 of the outer edge of the DAF202, based on the image 400 acquired in the image acquisition step 305. In Embodiment 3, in the outer edge detection step 306, the expander 1-3 has an outer edge detection unit 105 of the control unit 100 that detects the outer edge of the DAF202 from the image 400 acquired by the image acquisition unit 104. In the outer edge detection step 306, the expander 1-3 has an outer edge detection unit 105 of the control unit 100 that calculates the distance of the outer edge of the DAF202 from the center of the support plate 25.

[0096] (Position adjustment step) Position adjustment steps 301-3 are steps to adjust the radial position of the support plates 25 of the rollers 22 before the expansion step 303. In Embodiment 3, in position adjustment steps 301-3, the position adjustment unit 103 of the control unit 100 calculates the radial position on the outer edge of the upper surface 251 of the support plate 25 of each fixed block 26, based on the distance from the center of the support plate 25 of the outer edge of the DAF 202 calculated by the outer edge detection unit 105 in the outer edge detection step 306, so that all the rollers 22 supported by each fixed block 26 are installed on the side of the frame 204 that is closer to the outer edge of the DAF 202.

[0097] In Embodiment 3, during position adjustment steps 301-3, the position adjustment unit 103 of the control unit 100 controls the roller movement unit 28 of the support unit 21 to position each fixed block 26 at the calculated radial position on the outer edge of the upper surface 251 of the support plate 25. Thus, in Embodiment 3, during position adjustment steps 301-3, the position adjustment unit 103 of the control unit 100 adjusts the position of the rollers 22 to a position where they are installed on the frame 204 side of the outer edge of the DAF 202, based on the image 400 acquired in the image acquisition step 305.

[0098] (Extension step) In Embodiment 3, in expansion step 303, the processing control unit 101 of the control unit 100 of the expander 1-3 raises the support plate 25 and roller 22 as shown in Figure 17, similar to Embodiment 1, to expand the expander sheet 203. In Embodiment 3, in expansion step 303, the processing control unit 101 of the control unit 100 of the expander 1-3 releases the suction holding of the holding table 23 by heating and shrinking the region 212 of the expander sheet 203, similar to Embodiment 1, and releases the holding of the frame 204 of the frame unit 200 of the frame holding unit 10, thereby ending the expansion operation.

[0099] In the expansion device 1-3 and expansion method according to Embodiment 3, in the expansion step 303, the roller 22 is installed on the frame 204 side of the outer edge of the DAF 202. Therefore, similar to Embodiments 1 and 2, it is possible to suppress the roller 22 from pressing the outer edge of the DAF 202 through the expand sheet 203, thereby suppressing damage to the expand sheet 203 and lifting of the DAF 202 away from the expand sheet 203, and thus achieving the effect of successfully expanding the expand sheet 203.

[0100] In Embodiment 3, the expanding device 1-3 uses the imaging unit 30 to image one location of the region 212 of the expanded sheet 203. For this reason, the expanding device 1-3 according to Embodiment 3 is suitable when adjustments are made assuming that the center of the DAF 202 in a plan view coincides with the center of the support plate 25 of the pressing unit 20 in a plan view. Furthermore, even if the centers do not coincide, the expanding device 1-3 according to Embodiment 3 can position all the rollers 22 on the frame 204 side of the outer edge of the DAF 202 if there is sufficient clearance to position the rollers 22 on the frame 204 side (i.e., when the distance from the outer edge of the DAF 202 to the outer edge of the workpiece 201 is short and the radial width of the region 212 is wide).

[0101] However, in the present invention, when the DAF202 is eccentric with respect to the support plate 25 of the pressing unit 20 (i.e., the centers are far apart), it is preferable for the expanding device 1-3 to change the radial position of the roller 22, i.e., the fixed block 26, depending on the location. In this case, the expanding device 1-3 images and detects the region 212 including the outer edge of the DAF202 at at least three locations, detects the point where the perpendicular bisectors of the lines connecting the outer edges of adjacent DAF202 intersect as the center of the DAF202, and simultaneously determines the size of the outer diameter of the DAF202. Then, it determines the coordinates of the outer edge of the DAF202 in each region and moves the roller 22, i.e., the fixed block 26, independently to position them appropriately.

[0102] Furthermore, in the present invention, the expanding device 1-3 may be configured such that the imaging unit 30 is positioned above the area 212 of the expanded sheet 203 as in Embodiment 3, or the imaging unit 30 may be installed on the path through which the frame unit 200 is transported to the chamber housing the expanding device 1-3.

[0103] Furthermore, in the present invention, the expanding device 1-3 may be configured such that the imaging unit 30 is supported by a moving mechanism equipped with a ball screw or cylinder, and can image any part of the frame unit 200.

[0104] It should be noted that the present invention is not limited to the embodiments described above. That is, it can be implemented with various modifications without departing from the core principles of the present invention.

[0105] Furthermore, in the present invention, the workpiece 201 is not limited to being divided into individual chips 210 along the division line 206, but a modified layer or processing groove may be formed along the division line 206 as a starting point for division, and the expanding device 1,1-2,1-3 may expand the expanded sheet 203 to divide the workpiece 201 into individual chips 210, and also divide the DAF 202 for each individual chip 210. [Explanation of Symbols]

[0106] 1,1-2,1-3 Expanding device 10 Frame holding unit 20 Pressing Units 21 Support Unit 22 rollers 30 imaging units 100 control units 102 Information acquisition department 103,103-3 Position adjustment section 104 Image acquisition unit 105 Outer edge detection unit 200 Frame Unit 201 Workpiece 202 DAF (Adhesive Film) 203 Expandable Sheet 204 frames 211 Aperture 212 areas 301, 301-2, 301-3 Position adjustment step 303 Extension Step 304 Information Acquisition Step 305 Image acquisition step 306 Edge detection step

Claims

1. An expandable device that expands an expandable sheet of a frame unit supporting a workpiece by laminating an expandable sheet with an adhesive film having an outer edge larger than the outer edge of the workpiece and smaller than the inner edge of the frame at the opening of the frame, A frame holding unit that holds the frame, The system comprises a pressing unit that presses and expands the expandable sheet between the inner edge of the frame held by the frame holding unit and the outer edge of the workpiece, The pressing unit has multiple rollers, A support unit that movably supports the roller, It also includes a control unit, The control unit is, An information acquisition unit that acquires information regarding the position of the outer edge of the adhesive film, Based on this information, the support unit adjusts the position of the roller only in the radial direction, and Includes, An expanding device characterized in that the roller is installed on the outer periphery of the outer edge of the adhesive film.

2. An expandable device that expands an expandable sheet of a frame unit supporting a workpiece by laminating an expandable sheet with an adhesive film having an outer edge larger than the outer edge of the workpiece and smaller than the inner edge of the frame at the opening of the frame, A frame holding unit that holds the frame, The system comprises a pressing unit that presses and expands the expandable sheet between the inner edge of the frame held by the frame holding unit and the outer edge of the workpiece, The pressing unit has multiple rollers, A support unit that movably supports the roller, An imaging unit that images the region including the outer edge of the adhesive film, It also includes a control unit, The control unit is, An image acquisition unit that acquires images captured by the imaging unit, An edge detection unit for detecting the outer edge of the adhesive film from the image, Based on the information from the outer edge detection unit, a position adjustment unit drives the support unit and adjusts the position of the roller only in the radial direction, Includes, An expanding device characterized in that the roller is installed on the outer periphery of the outer edge of the adhesive film.

3. An expanding method for expanding a frame unit that supports a workpiece, wherein the expanded sheet is made by laminating an adhesive film having an outer shape larger than the outer edge of the workpiece and smaller than the inner edge of the frame into the opening of the frame that accommodates the workpiece, An expansion step is to press and expand the expanded sheet between the inner edge of the frame held by the frame holding unit and the outer edge of the workpiece using a pressing unit having multiple rollers, Prior to the expansion step, the system includes a position adjustment step in which the position of the roller is adjusted only in the radial direction to position the roller on the outer periphery of the adhesive film, An expanding method characterized in that, in the expansion step, the roller is installed on the outer circumference side of the outer edge of the adhesive film.

4. Prior to the expansion step, the system further includes an information acquisition step to acquire information regarding the position of the outer edge of the adhesive film, The expansion method according to claim 3, characterized in that the position adjustment step adjusts the position of the roller only in the radial direction based on the information acquired in the information acquisition step.

5. Prior to the expansion step, an image acquisition step is performed to capture an image of the region including the outer edge of the adhesive film, The system further comprises an edge detection step for detecting the position of the outer edge from the image, The expansion method according to claim 3, characterized in that the position adjustment step adjusts the position of the roller only in the radial direction based on the image acquired in the image acquisition step.

Images