Conveying system

Abstract

To provide a conveyance system capable of reducing a vibration generated when lifting and elevating a cassette.SOLUTION: A conveyance system comprises: a conveyance vehicle that carries out / in a material to a workpiece processing device; a traveling route which is installed to an upper direction of the workpiece processing device, and where the conveyance vehicle is traveling; and a control unit. The control unit comprises: an image acquisition part that is imaged by an imaging unit of the conveyance vehicle, and acquires an image before and after a cassette 13 of the conveyance vehicle is positioned by a guide 122 installed to a cassette mounting stage of the workpiece processing device; a movement amount calculation part that calculates movement amounts 351 and 352 of a horizontal direction when the cassette 13 is positioned by the guide 122 from the image; and a stop position correction part that corrects a stop position when stopping the conveyance vehicle to a delivery region on the basis of the movement amounts 351 and 352.SELECTED DRAWING: Figure 10

Description

[Technical Field]

[0001] The present invention relates to a conveying system that conveys articles to a workpiece processing apparatus by a conveying vehicle. [Background Art]

[0002] Conveying systems have been proposed in which articles such as workpieces, consumables used in connection with workpiece processing, maintenance parts, and cleaning parts are conveyed by a conveying vehicle (see, for example, Patent Document 1). [Prior Art Literature] [Patent Literature]

[0003] [Patent Document 1] Japanese Unexamined Patent Application Publication No. 2021-163920 [Summary of the Invention] [Problem to be Solved by the Invention]

[0004] In such Patent Document 1, the conveying vehicle conveys a cassette that accommodates articles such as workpieces, and moves the cassette up and down with respect to the workpiece processing apparatus. This conveying system employs a mechanism in which, when the cassette lands on a cassette mounting table, the cassette comes into contact with positioning guides provided on the cassette mounting table and is positioned while moving in the horizontal direction, and there is a risk that articles such as workpieces may be damaged by vibration during positioning. Furthermore, when the cassette is lifted to be recovered by the conveying vehicle, if the stop position of the conveying vehicle is deviated, the cassette may come into contact with the guides, resulting in a large amount of movement in the horizontal direction and causing vibration.

[0005] The present invention has been made in view of such problems, and an object of the present invention is to provide a conveying system capable of reducing vibration generated when a cassette is moved up and down. [Means for Solving the Problem]

[0006] To solve the above-mentioned problems and achieve the objective, the present invention provides a transport system comprising: a workpiece processing device; a transport vehicle for loading and unloading articles into and out of the workpiece processing device; a travel path installed above the workpiece processing device on which the transport vehicle travels; and a control unit, wherein the transport vehicle includes a cassette for containing the articles; a lifting unit for raising and lowering the cassette relative to the cassette mounting table of the workpiece processing device; and an imaging unit for imaging the area below the transport vehicle, the workpiece processing device is installed on the cassette mounting table and has a guide that contacts the cassette being raised and lowered by the transport vehicle stopped in the transfer area and positions the cassette horizontally, and the control unit is characterized by comprising: an image acquisition unit that acquires images of the cassette before and after it is positioned by the guide, which are captured by the imaging unit; a movement amount calculation unit that calculates the amount of horizontal movement of the cassette when it is positioned by the guide from the images; and a stop position correction unit that corrects the stop position when the transport vehicle is next stopped in the transfer area based on the amount of movement.

[0007] The imaging unit may have a recording unit that captures images of the cassette as it moves up and down relative to the cassette mounting platform, and the control unit may have a recording unit that records at least one of the images or video of the cassette as it moves up and down.

[0008] The imaging unit may capture an image of at least one of the travel path and the cassette mounting platform, which have a mark that serves as a reference for the stopping position, when the transport vehicle stops in the transfer area, to acquire a positioning image, and the control unit may include a stopping position detection unit that detects the stopping position of the transport vehicle from the positioning image and stops the transport vehicle at the stopping position.

[0009] The stop position correction unit may correct the stop position detected by the stop position detection unit based on the amount of movement calculated by the amount of movement calculation unit. [Effects of the Invention]

[0010] This invention calculates, using image processing, how much the cassette moves horizontally when it is positioned on the cassette mounting platform, and corrects the stopping position of the next transport vehicle. This reduces the amount of horizontal movement of the cassette when it is positioned by the guide, and reduces vibrations generated in the cassette when it comes into contact with the guide during the raising and lowering of the cassette. [Brief explanation of the drawing]

[0011] [Figure 1] Figure 1 is a schematic diagram showing an example of the configuration of a transport system according to the embodiment. [Figure 2] Figure 2 is a perspective view showing a portion of the transport system and workpiece processing device shown in Figure 1. [Figure 3] Figure 3 is a top view showing the cassette mounting platform of the workpiece processing device shown in Figure 2. [Figure 4] Figure 4 is a perspective view showing an example of the configuration of the transport vehicle in the transport system shown in Figure 1. [Figure 5] Figure 5 is a side cross-sectional view showing the transport vehicle in Figure 4. [Figure 6] Figure 6 is a top view showing the travel path of the transport system in Figure 1. [Figure 7] Figure 7 is a cross-sectional view illustrating an example of guide positioning using the transport system shown in Figure 1. [Figure 8] Figure 8 shows an example of an image captured by the imaging unit of the transport vehicle shown in Figure 1. [Figure 9] Figure 9 shows an example of an image captured by the imaging unit of the transport vehicle shown in Figure 1. [Figure 10] Figure 10 is a diagram illustrating an example of the operation process of the transport system shown in Figure 1. [Modes for carrying out the invention]

[0012] Embodiments for carrying out the present invention will be described in detail with reference to the drawings. The present invention is not limited to the contents described in the following embodiments. Furthermore, the components described below include those that can be easily imagined by those skilled in the art, and those that are substantially the same. In addition, the components described below can be combined as appropriate. Furthermore, various omissions, substitutions, or modifications of the components can be made without departing from the spirit of the present invention.

[0013] [Embodiment] A transport system 1 according to an embodiment of the present invention will be described based on the drawings. Figure 1 is a schematic diagram showing an example of the configuration of the transport system 1 according to the embodiment. Figure 2 is a perspective view showing a part of the transport system 1 and workpiece processing device 100 in Figure 1. As shown in Figure 1, the transport system 1 comprises a plurality of workpiece processing devices 100 that process workpieces 201 (see Figure 2, etc.), transport vehicles 10 that load and unload articles 200 (see Figure 2, etc.) to and from each of the plurality of workpiece processing devices 100, a travel path 20 installed above the workpiece processing devices 100 and spanning between the workpiece processing devices 100 on which the transport vehicles 10 travel, and a control unit 30. In this embodiment, the transport system 1 includes a plurality of transport vehicles 10 (three in the example shown in Figure 1), but the present invention is not limited thereto, and may include one or two vehicles, or of course four or more vehicles. Note that, as appropriate, some components are omitted in the drawings, or some components are shown simply by their outlines, etc.

[0014] A work 201, which is a processing target of a work processing apparatus 100 and is an example of an article 200 to be transported by the transport system 1 according to the embodiment, will be described. As shown in FIG. 2, the work 201 is a wafer such as a disk-shaped semiconductor wafer or an optical device wafer that uses silicon, sapphire, silicon carbide (SiC), gallium arsenide, glass or the like as a base material. In the work 201, chip-shaped devices are respectively formed in regions partitioned by a plurality of planned dividing lines that intersect (are orthogonal in the present embodiment) on a flat surface. It should be noted that the work 201 is not limited thereto in the present invention, and no device may be formed thereon. In the present embodiment, an adhesive tape is attached to the back surface of the work 201, and an annular frame is attached to an outer edge portion of the adhesive tape. However, the present invention is not limited thereto, and the annular frame may not be attached, or the adhesive tape may not be attached.

[0015] It should be noted that the article 200 to be transported by the transport system 1 is not limited to the work 201, and there are no restrictions on the material, shape, structure, size, etc. For example, it may be a substrate made of other materials such as semiconductors, ceramics, resins, and metals, and may also be a processing tool for processing the work 201, a consumable used for processing the work 201, a cleaning tool for cleaning the work processing apparatus 100, or a maintenance component for maintaining the work processing apparatus 100. The processing tool for processing the work 201 is, for example, a cutting blade, a grinding wheel, or the like. Other consumables used for processing the work 201 are, for example, a dressing board, a precut board, a dummy work, an adhesive tape, a carbon piece, and the like. The cleaning tool is a cleaning article such as a cleaning grindstone for cleaning a support surface on which a processing tool is mounted. In addition, the maintenance component is a maintenance tool or the like for maintaining any mechanism provided in other work processing apparatuses 100. For the article 200 other than the work 201, in the present embodiment, as shown in FIG. 2, an adhesive tape is attached to the back surface, and an annular frame is attached to the outer edge of the adhesive tape. However, the present invention is not limited thereto, and the annular frame may not be attached, or the adhesive tape may not be attached.

[0016] A work processing apparatus 100 of a conveyance system 1 comprises a housing 110, a cassette mounting table 120, a conveyance unit 130, a processing unit 140, a receiver 160, a transmitter 170, and a control unit 180, as shown in Fig. 2. The housing 110 accommodates each component of the work processing apparatus 100 excluding the housing 110 itself. An opening 112 having a size and shape that allows the cassette 13 of the conveyance vehicle 10 accommodating an article 200 (a work 201) to pass through is formed in a ceiling 111 above the housing 110.

[0017] Fig. 3 is a top view showing the cassette mounting table 120 of the work processing apparatus 100 of Fig. 2. As shown in Fig. 3, the cassette mounting table 120 has a mounting area 121, a guide 122, and a mark 123. The mounting area 121 is an area where the cassette 13 lowered from the conveyance vehicle 10 by a lifting unit 15 lands and is mounted, and is provided on an upper surface of the cassette mounting table 120 with the same shape and size as the shape and size of the cassette 13 in a plan view.

[0018] The guides 122 are installed on the cassette mounting table 120. A plurality of (eight in the example shown in Fig. 3) guides 122 are provided upright from the upper surface of the cassette mounting table 120 on an outer peripheral side of the mounting area 121. The guides 122 are arranged on an inner peripheral side at positions where the outer peripheral side of the cassette 13 can be fitted. An inclined surface that inclines in a direction protruding toward the inner peripheral side as going downward is formed on an inner peripheral side surface of each guide 122 (see Fig. 5 and Fig. 7). Further, since the inclined surface is formed to be curved, the cassette 13 smoothly slides along the guides 122 and is positioned. Therefore, when the cassette 13 lifted / lowered from the conveyance vehicle 10 stopped at a delivery area 20 is lowered, even if a horizontal position of the cassette 13 is deviated with respect to the mounting area 121, the guides 122 contact the cassette 13 via the inclined surfaces, correct the position of the cassette 13 in the horizontal direction (a direction parallel to the XY plane in Fig. 2 and the like), position the cassette 13 in the horizontal direction, and allow the cassette 13 to accurately land on and be mounted in the mounting area 121.

[0019] Mark 123 is provided on the upper surface of the cassette mounting base 120, and in this embodiment, it is provided in the center of the mounting area 121. Mark 123 can be detected by imaging it from above with the imaging unit 16-3 of the transport vehicle 10 (see Figures 4 and 5), thereby detecting the horizontal position of the mounting area 121 relative to the transport vehicle 10. For this reason, when the transport vehicle 10 stops in the transfer area 22, mark 123 serves as a reference for the stopping position and can be used as an alignment mark when performing alignment to align the cassette 13, which is raised and lowered from the transport vehicle 10, with the mounting area 121 of the cassette mounting base 120 of the workpiece processing device 100. In this embodiment, mark 123 is provided so as to overlap vertically (in the Z-axis direction, as in Figure 2, etc.) with mark 13-2, which is provided in the center of the upper surface of the cassette 13, when the cassette 13 is accurately placed on the mounting area 121 of the cassette mounting base 120. The shape and position of the mark 123 are not limited and may be formed anywhere on the cassette mount 120 as long as it is within the range that can be imaged by the imaging unit 16-3.

[0020] As shown in Figure 2, the transport unit 130 is installed adjacent to the cassette mounting table 120. The transport unit 130 unloads the articles 200 (workpieces 201) contained in the cassette 13 that has landed on the mounting area 121 of the cassette mounting table 120 and places them in a predetermined position relative to the processing unit 140, and also transports the articles 200 (workpieces 201) that have been placed in a predetermined position around the processing unit 140 into the cassette 13 that has landed on the mounting area 121 of the cassette mounting table 120. Here, the predetermined position relative to the processing unit 140 is, in the example of this embodiment shown in Figure 2, on the holding tables (chuck tables) around processing unit 140-1 (cutting unit) and processing unit 140-3 (imaging unit, inspection unit), or on the spinner table of processing unit 140-2 (cleaning unit).

[0021] In this embodiment, the transport unit 130 includes, for example, a first transport arm 131, a second transport arm 132, and a pair of rails 133. The first transport arm 131 transports the article 200 (workpiece 201) between the cassette 13, which has landed on the mounting area 121 of the cassette mounting base 120, and the pair of rails 133. The second transport arm 132 transports the article 200 (workpiece 201) between the pair of rails 133 and a predetermined position around the processing unit 140. The pair of rails 133 can move closer together or further apart while maintaining a parallel state to each other, and the article 200 (workpiece 201) can be held between the pair of rails 133 via an annular frame.

[0022] The processing unit 140 processes the workpiece 201. In this embodiment, the processing unit 140 includes, for example, a storage unit that stores the workpiece 201 in any storage cassette, such as by swapping the workpiece 201 between cassette 130 and a different cassette; a processing unit that processes the workpiece 201; a cleaning unit that cleans the workpiece 201; an inspection unit that inspects the workpiece 201; an imaging unit that images the workpiece 201; a mounter unit that attaches or peels off support members such as adhesive tape to the workpiece 201; and a film forming unit that forms a film on the workpiece 201. In other words, the workpiece processing apparatus 100, which includes the processing units 140 other than the storage unit, can perform at least one of the following on the workpiece 201: processing, cleaning, inspection, imaging, attaching support members, peeling off support members, and film formation.

[0023] When the processing unit 140 is a storage unit, it stores various items 200 to be transported by the transport system 1, namely workpieces 201, substrates made of other materials such as semiconductors, ceramics, resins, and metals, processing tools for processing the workpieces 201 such as cutting blades and grinding wheels, consumables used for processing the workpieces 201 such as dressing boards, pre-cut boards, dummy workpieces, adhesive tape, and carbon pieces, cleaning tools for cleaning the workpiece processing device 100, and maintenance parts for maintaining the workpiece processing device 100. When the processing unit 140 is a storage unit, the workpiece processing device 100 is a so-called stocker that stores various items 200 to be transported by the transport system 1 in arbitrary cassettes within the processing unit 140, and loads items from arbitrary cassettes into and out of the transport vehicle 10 through an opening 112 in the ceiling 111 above the housing 110. In the example of this embodiment shown in Figure 1, the workpiece processing device 100-2 is the stocker.

[0024] If the processing unit 140 is a machining unit, it may be, for example, a cutting machine unit equipped with a spindle on which a cutting blade is rotatably mounted and which cuts the workpiece 201 with the cutting blade; a grinding machine unit equipped with a spindle on which a grinding wheel on which a grinding wheel is arranged is rotatably mounted and which grinds the workpiece 201 with the grinding wheel; a laser processing unit equipped with a laser beam irradiator that irradiates the workpiece 201 with a laser beam and which laser processes the workpiece 201 with a laser beam; a plasma processing unit that supplies plasma-formed gas to the workpiece 201 and etches it; an adhesive processing unit that attaches protective members such as adhesive tape to the workpiece 201 and performs protective member installation processing; or an ultraviolet processing unit equipped with an ultraviolet irradiator that irradiates the workpiece 201 with ultraviolet light and which ultraviolet irradiates the workpiece 201. If the processing unit 140 is a machining unit, the workpiece processing device 100 is a processing device that processes the workpiece 201. The workpiece processing apparatus 100 shown in Figure 2 has a processing unit 140-1 which is a cutting unit, and can perform cutting operations on the workpiece 201.

[0025] If the processing unit 140 is a cleaning unit, it is equipped with nozzles that supply cleaning liquid or cleaning gas to the workpiece 201 and performs a cleaning process on the workpiece 201. If the processing unit 140 is a cleaning unit, the workpiece processing device 100 is a cleaning device that performs a cleaning process on the workpiece 201. In the workpiece processing device 100 shown in Figure 2, the processing unit 140-2 is a cleaning unit and can perform a cleaning process on the workpiece 201.

[0026] When the processing unit 140 is an inspection unit, it includes a laser beam irradiator that irradiates the workpiece 201 with an inspection laser beam, an electromagnetic wave irradiator that irradiates the workpiece 201 with electromagnetic waves, an ultraviolet irradiator that irradiates the workpiece 201 with inspection ultraviolet light, an imager that captures an inspection image of the workpiece 201, and an inspection determination unit that makes an inspection determination of the workpiece 201 based on the results of irradiation and imaging, and performs inspection processing on the workpiece 201. When the processing unit 140 is an inspection unit, the workpiece processing device 100 is an inspection device that performs inspection processing on the workpiece 201. In the workpiece processing device 100 shown in Figure 2, the processing unit 140-3 has the function of an imager and the control unit 180 has the function of an inspection determination unit, so it is essentially equipped with an inspection unit and can perform inspection processing such as a so-called kerf check that automatically confirms whether the cutting process on the workpiece 201 was performed within a normal range.

[0027] If the processing unit 140 is an imaging unit, it includes an imaging device for imaging the workpiece 201 and a workpiece mover for moving the workpiece 201 to change and adjust its position and orientation relative to the imaging device, and performs imaging processing on the workpiece 201. If the processing unit 140 is an imaging unit, the workpiece processing device 100 is an imaging device that performs imaging processing on the workpiece 201. In the workpiece processing device 100 shown in Figure 2, the processing unit 140-3 is an imaging unit and can perform imaging processing on the workpiece 201.

[0028] If the processing unit 140 is a mounter unit, it includes a support member supply unit that supplies support members such as adhesive tape to the workpiece 201, an attachment unit that attaches the supplied support members to the workpiece 201, and a peeling unit that peels off the support members attached to the workpiece 201, and performs a support member attachment process or a support member peeling process on the workpiece 201. If the processing unit 140 is a mounter unit, the workpiece processing device 100 is a mounter device that performs a support member attachment process or a support member peeling process on the workpiece 201.

[0029] If the processing unit 140 is a film forming unit, it includes a film forming section for forming a film on the workpiece 201 and performs a film forming process on the workpiece 201. If the processing unit 140 is a film forming unit, the workpiece processing apparatus 100 is a film forming apparatus that performs a film forming process on the workpiece 201.

[0030] The processing unit 140 performs an exchange process to replace items 200 other than the workpiece 201, such as processing tools used to process the workpiece 201 and consumables used to process the workpiece 201. When the processing unit 140 performs an exchange process, the workpiece processing device 100 receives new processing tools and consumables through the opening 112, replaces the used processing tools and consumables in the processing unit 140 with new processing tools and consumables, and discharges the processing tools and consumables removed from the processing unit 140 through the opening 112.

[0031] The receiver 160 is connected to the control unit 30 of the transport system 1 so as to be able to communicate with information, receives information transmitted from the control unit 30, and outputs the received information to the control unit 180. In this embodiment, the receiver 160 is connected to the control unit 30 so as to be able to communicate with information wirelessly, but the present invention is not limited to this, and may also be connected to the control unit 30 so as to be able to communicate with information via a wire. In this embodiment, the information that the receiver 160 receives from the control unit 30 is, for example, command information for operations related to the processing of the workpiece processing device 100, and request information prompting the transmission of the processing status and processing history of the workpiece processing device 100, including the status of the workpiece 201 inside the workpiece processing device 100.

[0032] The transmitter 170 is connected to the control unit 30 for information communication and transmits information output from the control unit 180 to the control unit 30. In this embodiment, the transmitter 170 is connected to the control unit 30 wirelessly for information communication, but the present invention is not limited to this, and it may also be connected to the control unit 30 via a wired connection for information communication. In this embodiment, the information that the transmitter 170 transmits to the control unit 30 is, for example, the processing status and processing history of the workpiece processing device 100.

[0033] The control unit 180 controls the operation of each component of the workpiece processing device 100 to cause the workpiece processing device 100 to perform various processing operations on the item 200 (workpiece 201). The control unit 180 acquires information received by the receiver 160 from the control unit 30 and outputs information to be sent to the control unit 30 to the transmitter 170. The control unit 180 causes the workpiece processing device 100 to perform operations according to the command information received by the receiver 160 from the control unit 30. The control unit 180 causes the transmitter 170 to send information on the processing status and processing history of the workpiece processing device 100 to the control unit 30 in response to the request information received by the receiver 160 from the control unit 30. The control unit 180 can also spontaneously send information on the processing status and processing history of the workpiece processing device 100 to the control unit 30 from the transmitter 170 even if it has not received request information from the control unit 30.

[0034] In this embodiment, the control unit 180 includes a computer system similar to that of the control unit 30, which will be described later. The arithmetic processing unit of the control unit 180 performs calculations according to the computer program stored in the storage device of the control unit 180 and outputs control signals for controlling the workpiece processing device 100 to each component of the workpiece processing device 100 via the input / output interface device of the control unit 180.

[0035] Figure 4 is a perspective view showing an example configuration of the transport vehicle 10 of the transport system 1 in Figure 1. Figure 5 is a side cross-sectional view showing the transport vehicle 10 in Figure 4. The transport vehicle 10 is an automated guided vehicle (AGV) and, as shown in Figure 4, has a frame 11, wheels 12, a cassette 13, a belt 14, a lifting unit 15, an imaging unit 16, a receiver 17, a transmitter 18, and a control unit 19.

[0036] The frame 11 is formed in a rectangular shape and has a recess 11-1 that is open to the bottom and capable of accommodating the cassette 13. Multiple wheels 12 (two in the example shown in Figure 4) are mounted on each of two pairs of parallel sides of the frame 11, and are rotatable independently of each other around an axis perpendicular to this pair of sides. The outer surfaces of the wheels 12 are in contact with the passage area 21 or transfer area 22 of the travel path 20. Each wheel 12 is connected to a motor or the like (not shown), and rotational motion around the axis is applied by the motor or the like to make it travel on the passage area 21 or transfer area 22 of the travel path 20. In this embodiment, for example, Mecanum wheels are used as wheels 12, in which multiple inclined barrel-shaped (cylindrical) rotating bodies are attached to the outer surface.

[0037] The cassette 13 is rectangular in shape and contains an article 200 (workpiece 201). The cassette 13 has a pair of parallel sides with openings 13-1 formed on them, which are of a size and shape that allows the article 200 (workpiece 201) to pass through. The article 200 (workpiece 201) is removed from the cassette 13 through the openings 13-1 and placed back into the cassette 13 through the openings 13-1. The cassette 13 has a mark 13-2 in the center of its top surface. The mark 13-2 can be detected by imaging it from above with the imaging unit 16 of the transport vehicle 10, which allows for more accurate detection of the horizontal position of the cassette 13. In this embodiment, mark 13-2 is provided so as to overlap vertically (in the Z-axis direction) with mark 123, which is provided in the center of the mounting area 121 on the upper surface of the cassette mounting base 120, when the cassette 13 is accurately placed on the mounting area 121 of the cassette mounting base 120.

[0038] The belt 14 connects the frame 11 and the cassette 13. One end of the belt 14 is wound around a reel (not shown) of a lifting unit 15 provided inside the frame 11, and the other end is fixed to the upper surface of the cassette 13, as shown in Figures 4 and 5. The belt 14 comes in pairs. In the example of this embodiment shown in Figure 4, the transport vehicle 10 is provided with two pairs of belts 14, but the present invention is not limited to this, and may have one pair or three or more pairs.

[0039] The lifting unit 15 is located above the recess 11-1 in the frame 11. As shown in Figure 5, the lifting unit 15 uses a belt 14 to raise and lower the cassette 13 and the articles 200 (workpieces 201) contained in the cassette 13 relative to the cassette mounting table 120 of the workpiece processing device 100. The lifting unit 15 moves the cassette 13 and the articles 200 (workpieces 201) contained in the cassette 13 between the in-vehicle position where they are housed in the recess 11-1 of the frame 11 of the transport vehicle 10 and the landing position where they are placed on the mounting area 121 of the cassette mounting table 120 inside the housing 110 of the workpiece processing device 100, through the opening 24 of the travel path 20 and the opening 112 of the workpiece processing device 100.

[0040] In this embodiment, as shown in Figure 4, the imaging unit 16 includes a pair of imaging units 16-1, a pair of imaging units 16-2, and an imaging unit 16-3. Each imaging unit 16 is mounted on the frame 11 so as to face the travel path 20 on which the transport vehicle 10 travels in a vertical direction, and captures images of the area below the transport vehicle 10.

[0041] A pair of imaging units 16-1 are mounted on the front and rear ends of the frame 11. A pair of imaging units 16-2 are mounted on both ends of the frame 11. The pair of imaging units 16-1 and the pair of imaging units 16-2 detect the position of the transport vehicle 10 on the travel path 20 by imaging and detecting multiple types of marks 25 provided on the travel path 20 from above. In this embodiment, the pair of imaging units 16-1 image and detect all types of marks 25 from above, and the pair of imaging units 16-2 image and detect all marks 25 except for mark 25-1 (see Figure 6) from above. Furthermore, when the transport vehicle 10 stops in the transfer area 22, the pair of imaging units 16-1 and 16-2 capture images from above of the transfer area 22 of the travel path 20, which has reference marks 25 (marks 25-4, 25-5) that serve as the reference for the stopping position, and acquire positioning images 401, 402, 403, and 404 (see Figure 6) that serve as the reference for determining the stopping position. Positioning images 401, 402, 403, and 404 are, for example, images like the area enclosed by the dashed line in Figure 6. Note that in Figure 6, only one of the imaging units 16-1 and 16-2 may be provided at a position where it can capture positioning image 401 among the positioning images 401 to 404.

[0042] In this invention, the pair of imaging units 16-1 and the pair of imaging units 16-2 are not limited to being mounted on the front end, rear end, and both sides of the frame 11 as described above, but can be appropriately modified according to the shape of the marks 25 provided on the travel path 20, and any shape is acceptable as long as it is capable of imaging the marks 25 provided on the travel path 20.

[0043] The imaging unit 16-3 is located inside the pair of imaging units 16-1 and 16-2, and in the example of this embodiment shown in Figures 4 and 5, it is located inside imaging unit 16-1. As shown in Figure 5, the imaging unit 16-3 images the cassette 13, which moves up and down relative to the cassette mounting table 120, from above through the opening 24 of the travel path 20 and the opening 112 of the workpiece processing device 100, thereby acquiring a pre-guide image 301 and a post-guide image 302 (see Figures 8 and 9, respectively) before and after the cassette 13 is positioned in the mounting area 121 by the guide 122 of the cassette mounting table 120. The imaging unit 16 can more accurately detect the horizontal position of the cassette 13 by imaging and detecting the mark 13-2 provided on the cassette 13, which moves up and down relative to the cassette mounting table 120, from above.

[0044] Furthermore, the imaging unit 16-3 may, in conjunction with or instead of the marks 25 on the travel path 20, capture an image from above of the cassette mounting table 120, which has a mark 123 that serves as a reference for the stopping position, when the transport vehicle 10 stops in the transfer area 22, thereby obtaining a positioning image 405 (see Figure 3) that serves as a reference for determining the stopping position. In that case, the positioning image 405 will be, for example, an image like the area enclosed by the same solid line as the outer circumference of the cassette mounting table 120 in Figure 3.

[0045] Furthermore, the imaging unit 16-3 is not limited to the configuration in which it is provided inside the imaging unit 16-1 as described above, but can take any configuration as long as it is capable of imaging the mark 123 on the cassette mounting base 120, the cassette 13 that moves up and down relative to the cassette mounting base 120, and the mark 13-2 provided on the cassette 13 that moves up and down relative to the cassette mounting base 120. For example, it may be provided inside the imaging unit 16-2. Also, in the example of this embodiment shown in Figure 5, the imaging unit 16-3 is provided inside the frame 11, but the present invention is not limited to this, and may be provided outside below the frame 11. In addition, an imaging unit that images the cassette 13 that moves up and down relative to the cassette mounting base 120, and the mark 13-2 provided on the cassette 13 that moves up and down relative to the cassette mounting base 120 may be provided on the bottom surface of the recess 11-1.

[0046] Each imaging unit 16 is equipped with an image sensor, such as a CCD (Charge-Coupled Device) image sensor or a CMOS (Complementary MOS) image sensor. The imaging unit 16 is, for example, an infrared camera or a visible light camera. Multiple imaging units 16 are not required; as shown in Figure 5, one camera with a wide field of view (corresponding to imaging unit 16-3 in this embodiment) can be used, such that the entire cassette 13 can be captured within the imaging field of view from above when the cassette 13 descends.

[0047] When the transport vehicle 10 is first set on the travel path 20 of the transport system 1, the setting location and the type of transport vehicle 10 are registered in the control unit 19 and the control unit 30. The transport vehicle 10's position on the travel path 20 is detected, for example, by imaging and detecting multiple types of markers 25 provided on the travel path 20 with imaging units 16-1 and 16-2. However, the present invention is not limited to this configuration, and instead, the transport vehicle 10 may be configured to detect the markers 25 using line sensors, or to detect the position of the transport vehicle 10 using multiple sensors installed on the travel path 20, or the transport vehicle 10 may be connected to a GPS (Global Positioning System) wirelessly for information communication and the position of the transport vehicle 10 may be acquired using GPS, and any other configuration in which the position of the transport vehicle 10 can be acquired is acceptable.

[0048] The receiver 17 is connected to the control unit 30 for information communication, receives information transmitted from the control unit 30, and outputs the received information to the control unit 19. In this embodiment, the receiver 17 is connected to the control unit 30 wirelessly for information communication, but the present invention is not limited to this, and may be connected to the control unit 30 via a wired connection for information communication. In this embodiment, the information that the receiver 17 receives from the control unit 30 includes, for example, command information for operations related to the movement of the transport vehicle 10 and the raising and lowering of the cassette 13, and request information prompting the transmission of the transport status and transport history of the transport vehicle 10, including the position of the transport vehicle 10 and the position of the cassette 13.

[0049] The transmitter 18 is connected to the control unit 30 for information communication and transmits information output from the control unit 19 to the control unit 30. In this embodiment, the transmitter 18 is connected to the control unit 30 wirelessly for information communication, but the present invention is not limited to this, and may also be connected to the control unit 30 via a wired connection for information communication. In this embodiment, the information that the transmitter 18 transmits to the control unit 30 is, for example, information on the transport status and transport history of the transport vehicle 10, and images captured by the imaging unit 16.

[0050] The control unit 19 controls the operation of each component of the transport vehicle 10 to cause the transport vehicle 10 to move and to perform operations related to the raising and lowering of the cassette 13. The control unit 19 controls the movement of the transport vehicle 10 by controlling motors (not shown) connected to the wheels 12, as well as the angle of the wheels 12. The control unit 19 controls the raising and lowering movement of the cassette 13 by controlling motors (not shown) of the lifting unit 15.

[0051] The control unit 19 detects the mark 25 based on the images captured by the pair of imaging units 16-1 and 16-2 by performing pattern matching processing on the images captured by the pair of imaging units 16-1 and 16-2 and a reference image of the mark 25 that has been registered and stored in advance by the operator. However, the image processing for detecting the mark 25 based on the images captured by the pair of imaging units 16-1 and 16-2 is not limited to this in the present invention, and the control unit 30 may perform this processing instead of the control unit 19.

[0052] The control unit 19 acquires information received by the receiver 17 from the control unit 30 and outputs information to be sent to the control unit 30 to the transmitter 18. The control unit 19 causes the transport vehicle 10 to perform an action according to the command information received by the receiver 17 from the control unit 30. In response to the request information received by the receiver 17 from the control unit 30, the control unit 19 causes the transmitter 18 to transmit to the control unit 30 information on the transport status and transport history of the transport vehicle 10, as well as images captured by the imaging unit 16, including the pre-guide image 301 and post-guide image 302 acquired by the imaging unit 16-3. Even if the control unit 19 has not received a request information from the control unit 30, it can also voluntarily cause the transmitter 18 to transmit information on the transport status and transport history of the transport vehicle 10 to the control unit 30.

[0053] In this embodiment, the control unit 19 includes a computer system similar to that of the control unit 30, which will be described later. The arithmetic processing unit of the control unit 19 performs calculations according to the computer program stored in the storage device of the control unit 19 and outputs control signals for controlling the transport vehicle 10 to each component of the transport vehicle 10 via the input / output interface device of the control unit 19.

[0054] As shown in Figure 2, the transport system 1's travel path 20 comprises a passage area 21, a transfer area 22, and a guide section 23. The passage area 21 is arranged across the top of the housings 110 of multiple workpiece processing devices 100. One transfer area 22 is provided for each workpiece processing device 100, above the housing 110, adjacent to the passage area 21. In the transfer area 22, an opening 24 is formed directly above the opening 112 of the housing 110, which is of a size and shape that prevents the frame 11 of the transport vehicle 10 from passing through, but allows the cassette 13 to pass through.

[0055] The guide sections 23 are positioned at both ends in the width direction of the passage area 21 and the transfer area 22. The guide sections 23 are formed to be higher than the wheels 12 of the transport vehicle 10, thereby preventing the transport vehicle 10 from going over the guide sections 23 and falling out of the passage area 21 and the transfer area 22.

[0056] Figure 6 is a top view showing the travel path 20 of the transport system 1 in Figure 1. Multiple types of marks 25 are provided in the passage area 21 and the handover area 22 of the travel path 20. The marks 25 are provided on the upper surface of the passage area 21 and the handover area 22 of the travel path 20, and in this embodiment, as shown in Figure 6, there are marks 25-1, 25-2, 25-3, 25-4, and 25-5. The marks 25 can be detected by imaging them from above with the imaging unit 16 of the transport vehicle 10, thereby detecting the position of the transport vehicle 10 on the travel path 20. For this reason, similar to the marks 123 described above, the marks 25 can be used as alignment marks, serving as a reference for the stopping position when the transport vehicle 10 stops in the handover area 22. In this embodiment, the marks 25-4 and 25-5 provided around the opening 24 serve as a reference for the stopping position when the transport vehicle 10 stops in the transfer area 22, and can be used as alignment marks.

[0057] Mark 25 is formed in a straight line having a different color from other areas on the upper surface of the passage area 21 and the handover area 22, for example, but the present invention is not limited thereto, and may include curves, be composed of dashed lines, or use letters, numbers, patterns, etc.

[0058] As shown in Figure 6, the mark 25-1 is provided on the upper surface of the passage area 21, for example, at a predetermined position (e.g., the center) in the width direction of the passage area 21, along the direction in which the transport vehicle 10 travels within the passage area 21. The transport vehicle 10 travels while detecting the mark 25-1 by imaging and detecting it with a pair of imaging units 16-1, thereby detecting its position in the width direction of the passage area 21 and traveling along the predetermined position (e.g., the center) in the width direction of the passage area 21.

[0059] As shown in Figure 6, multiple markers 25-2 are provided on the upper surface of the passage area 21 at predetermined intervals, intersecting (orthogonal in this embodiment) the direction in which the transport vehicle 10 travels within the passage area 21. The transport vehicle 10 travels while detecting the markers 25-2 by imaging and detecting them with a pair of imaging units 16-1 and a pair of imaging units 16-2. Based on the number of markers 25-2 that have been imaged and detected, the transport vehicle 10 can travel while detecting its position in the direction of travel within the passage area 21.

[0060] As shown in Figure 6, the mark 25-3 is provided across the upper surfaces of the passage area 21 and each transfer area 22, intersecting (orthogonal in this embodiment) the direction in which the transport vehicle 10 moves in the passage area 21. The transport vehicle 10 can accurately detect the position and direction of entering the transfer area 22 on the desired workpiece processing device 100 by having a pair of imaging units 16-1 and a pair of imaging units 16-2 image and detect the mark 25-3 provided on the transfer area 22 on the desired workpiece processing device 100.

[0061] As shown in Figure 6, the marks 25-4 are provided on the upper surface of each transfer area 22, along the direction in which the transfer vehicle 10 moves within the transfer area 22, according to the position (stopping position) where the transfer vehicle 10 stops when it moves the cassette 13 up and down through the opening 24 of the travel path 20 and the opening 112 of the workpiece processing device 100. In this embodiment, for example, the marks 25-4 are provided at the stopping position of the transfer vehicle 10, facing the imaging units 16 provided at both ends of the frame 11. The transfer vehicle 10 can be suitably positioned at the stopping position by adjusting its position while a pair of imaging units 16-2 image and detect the marks 25-4.

[0062] As shown in Figure 6, the marks 25-5 are provided on the upper surface of each transfer area 22, intersecting (orthogonal in this embodiment) the direction in which the transport vehicle 10 moves within the transfer area 22, according to the stopping position of the transport vehicle 10. In this embodiment, the marks 25-2 are provided, for example, at the stopping position of the transport vehicle 10, at positions facing the imaging units 16 provided at the front and rear ends of the frame 11, and at a position a predetermined distance behind the imaging unit 16 provided at the rear end. The transport vehicle 10 can suitably start the stopping process and be suitably positioned at the stopping position by adjusting its position while a pair of imaging units 16-1 image and detect the marks 25-5.

[0063] The control unit 30 is connected to the receiver 160 and transmitter 170 of each workpiece processing device 100 for information communication, and is also connected to the receiver 17 and transmitter 18 of the transport vehicle 10 for information communication. By transmitting command information to the receivers 160 and 17, the control unit 30 can remotely control and operate each workpiece processing device 100 and the transport vehicle 10 via the control units 180 and 19. The control unit 30 can also receive and understand information on the processing status and processing history of each workpiece processing device 100 from the transmitter 170, and information on the transport status and transport history of each transport vehicle 10 from the transmitter 18. In addition, the control unit 30 receives images captured by the imaging unit 16 of each transport vehicle 10, including pre-guide images 301 and post-guide images 302 acquired by the imaging unit 16-3 of each transport vehicle 10, from the transmitter 18. In this way, the control unit 30 can comprehensively control and operate each workpiece processing device 100 and the transport vehicle 10, which are components of the transport system 1.

[0064] As shown in Figure 1, the control unit 30 includes an image acquisition unit 31, a recording unit 32, a movement amount calculation unit 33, a stop position correction unit 34, and a stop position detection unit 35. The image acquisition unit 31 acquires pre-guide image 301 and post-guide image 302, captured by the imaging unit 16-3, before and after the cassette 13 is positioned by the guide 122. The recording unit 32 records at least one of the images or video of the cassette 13 during its up and down movement, captured by the imaging unit 16-3. The movement amount calculation unit 33 calculates the horizontal movement amounts 351 and 352 (see Figure 10) of the cassette 13 when it is positioned by the guide 122 from the pre-guide image 301 and post-guide image 302. The stop position correction unit 34 corrects the stop position when the transport vehicle 10 is next stopped in the transfer area 22 based on the movement amounts 351 and 352. Specifically, when the next time the transport vehicle 10 is to be stopped in the handover area 22, the stop position correction unit 34 corrects the amount of movement 351, 352 from the stop position of the transport vehicle 10 detected by the stop position detection unit 35 from at least one of the positioning images 401, 402, 403, 404, 405, and stops the transport vehicle 10 at the stop position.

[0065] In this embodiment, the control unit 30 includes a computer system. The computer system included in the control unit 30 is a computer having an arithmetic processing unit with a microprocessor such as a CPU (Central Processing Unit), a storage device with memory such as ROM (Read Only Memory) or RAM (Random Access Memory), and an input / output interface device. The arithmetic processing unit of the control unit 30 performs arithmetic processing according to the computer program stored in the storage device of the control unit 30 and outputs control signals for controlling the transport system 1 to each component of the transport system 1 via the input / output interface device of the control unit 30.

[0066] In this embodiment, the functions of the image acquisition unit 31 and the recording unit 32 are realized by the storage device of the control unit 30. In this embodiment, the functions of the movement amount calculation unit 33, the stop position correction unit 34, and the stop position detection unit 35 are realized by the arithmetic processing unit of the control unit 30 executing a computer program stored in the storage device.

[0067] An example of the operation process of the transport system 1 according to the embodiment having the above configuration will be described. Figure 7 is a cross-sectional view illustrating an example of the positioning of the guide 122 by the transport system 1 of Figure 1. Figures 8 and 9 are diagrams showing an example of an image captured by the imaging unit 16 of the transport vehicle 10 of Figure 1, namely a pre-guide image 301 and a post-guide image 302, respectively. Figure 10 is a diagram illustrating an example of the operation process of the transport system 1 of Figure 1. The control unit 30 of the transport system 1 stops the transport vehicle 10 in the transfer area 22, and when the transport vehicle 10 lowers the cassette 13 onto the cassette mounting table 120 of the workpiece processing device 100 using the lifting unit 15, the descending cassette 13 is moved horizontally by the guide 122 installed on the cassette mounting table 120, as shown in Figure 7, to position it in the mounting area 121.

[0068] The control unit 30 of the transport system 1 uses the imaging unit 16-3 to capture a pre-guide image 301 shown in Figure 8, before the cassette 13 is positioned by the guide 122, and a post-guide image 302 shown in Figure 9, after the cassette 13 has been positioned by the guide 122. The control unit 30 receives the pre-guide image 301 and post-guide image 302 from the transmitter 18 and acquires them using the image acquisition unit 31. The recording unit 32 records the pre-guide image 301 and post-guide image 302 acquired by the image acquisition unit 31, associating them with the transport vehicle 10 that lowered the cassette 13 and the workpiece processing device 100. The recording unit 32 stores the pre-guide image 301 and post-guide image 302 for each combination of the transport vehicle 10 and the workpiece processing device 100.

[0069] The control unit 30 of the transport system 1 may capture images of the cassette 13 during its up and down movement, including before and after it is positioned by the guide 122, using the imaging unit 16-3, receive the images from the transmitter 18, record the images using the recording unit 32, process the images to extract the pre-guide image 301 and post-guide image 302, and acquire the pre-guide image 301 and post-guide image 302 using the image acquisition unit 31. Alternatively, the control unit 30 of the transport system 1 may acquire the images using the recording unit 32 separately from the acquisition of the pre-guide image 301 and post-guide image 302 by the image acquisition unit 31. By acquiring and recording the images using the recording unit 32 in this way, the transport system 1 can use this information to investigate the cause of any defects in the article 200, including the workpiece 201.

[0070] The control unit 30 of the transport system 1, using the movement amount calculation unit 33, generates a composite image 303 by combining the pre-guide image 301 and the post-guide image 302 by superimposing the guides 122 visible in the pre-guide image 301 and the post-guide image 302, as shown in Figure 10. The movement amounts 351 and 352 between the image 311 of the cassette 13 visible in the pre-guide image 301 and the image 312 of the cassette 13 visible in the post-guide image 302 are considered to be the horizontal movement amounts 351 and 352 of the cassette 13 when the cassette 13 is positioned by the guides 122, and are calculated. The movement amount 351 is calculated by the movement amount calculation unit 33 by subtracting the X coordinate of the center of the composite image 303 of the image 321 of the mark 13-2 on the cassette 13 as seen in the pre-guide image 301, which serves as the reference for the position of image 311, from the X coordinate of the center of the composite image 303 of the image 322 of the mark 13-2 formed on the upper surface of the cassette 13 as seen in the post-guide image 302, which serves as the reference for the position of image 312, and converting it to an actual length. The symbol represents the direction of movement of the cassette 13 when the cassette 13 is positioned by the guide 122. Similarly, the movement amount 352 is calculated by the movement amount calculation unit 33 by subtracting the Y coordinate of the center of the composite image 303 of the image 321 of the image 311 from the Y coordinate of the center of the composite image 303 of the image 322 of the image 312, and converting it to an actual length. The symbol represents the direction of movement of the cassette 13 when the cassette 13 is positioned by the guide 122.

[0071] The control unit 30 of the transport system 1 stores the movement amounts 351 and 352 calculated by the movement amount calculation unit 33, associating them with the transport vehicle 10 and workpiece processing device 100 that lowered the cassette 13. The control unit 30 of the transport system 1 can control the stopping position more accurately by calculating and storing the movement amounts 351 and 352 using the movement amount calculation unit 33 for each combination of the transport vehicle 10 and workpiece processing device 100.

[0072] When the control unit 30 of the transport system 1 next stops the transport vehicle 10 in the transfer area 22, if it has stored the movement amounts 351 and 352 associated with the same combination of transport vehicle 10 and transfer area 22, it refers to this storage and, using the stop position correction unit 34, corrects the stopping position of the transport vehicle 10 when it next stops in the transfer area 22 based on the movement amounts 351 and 352, in a direction that cancels out the movement amounts 351 and 352, and stops the transport vehicle 10 at the corrected stopping position. Specifically, when the stop position correction unit 34 stops the transport vehicle 10 in the transfer area 22, it corrects the stopping position of the transport vehicle 10 detected by the stop position detection unit 35 from at least one of the positioning images 401, 402, 403, 404, and 405, based on the movement amounts 351 and 352 that were calculated by the movement amount calculation unit 33 in the previous instance and stored in the control unit 30, and stops the transport vehicle 10 at the corrected stopping position. The transport system 1, by correcting the stopping position of the transport vehicle 10 with the stopping position correction unit 34, reduces the amount of horizontal movement 351,352 of the cassette 13 when the cassette 13 is positioned by the guide 122, and reduces vibrations generated in the cassette 13 when it comes into contact with the guide 122 when it is raised or lowered.

[0073] When stopping the transport vehicle 10 in the transfer area 22, the control unit 30 of the transport system 1 may perform the following actions only once for each combination of transport vehicle 10 and transfer area 22: acquiring pre-guide image 301 and post-guide image 302 by the image acquisition unit 31, calculating the movement amounts 351 and 352 by the movement amount calculation unit 33, correcting the stopping position by the stopping position correction unit 34, acquiring positioning images 401, 402, 403, 404, and 405 by the image acquisition unit 31, and adjusting the stopping position by the stopping position detection unit 35. Alternatively, these actions may be performed each time the transport vehicle 10 is stopped in the transfer area 22 to improve the accuracy of reducing the movement amounts 351 and 352 and reducing vibrations generated in the cassette 13.

[0074] The transport system 1 according to the embodiment having the above configuration calculates by image processing how much the cassette 13 moves horizontally when it is positioned on the cassette mounting table 120, and corrects the stopping position of the next transport vehicle 10. This reduces the amount of horizontal movement 351,352 of the cassette 13 when it is positioned by the guide 122, and has the effect of reducing vibrations generated in the cassette 13 when it comes into contact with the guide 122 when it is raised or lowered.

[0075] Furthermore, the transport system 1 according to this embodiment records at least one of images or videos of the cassette 13 being raised and lowered by the recording unit 32, so that the recorded images or videos can be used to investigate the cause of any defects in the article 200, including the workpiece 201.

[0076] Furthermore, the transport system 1 according to this embodiment can precisely position the transport vehicle 10 by imaging the travel path 20 having a mark 25 that serves as a reference for the stopping position of the transport vehicle 10, and the cassette mounting platform 120 having a mark 123 that serves as a reference for the stopping position of the transport vehicle 10, thereby positioning the stopping position of the transport vehicle 10.

[0077] Furthermore, in the transport system 1 according to this embodiment, the stop position correction unit 34 corrects the stop position detected by the stop position detection unit 35 based on the movement amounts 351 and 352 calculated by the movement amount calculation unit 33, so that the stopping position of the transport vehicle 10 can be corrected precisely and accurately.

[0078] Furthermore, the transport system 1 according to the embodiment acquires a pre-guide image 301 and a post-guide image 302 using an image acquisition unit 31, calculates the movement amounts 351 and 352 using a movement amount calculation unit 33, and corrects the stopping position using a stopping position correction unit 34, for each combination of transport vehicle 10 and workpiece processing device 100. Therefore, the transport system 1 according to the embodiment can precisely position the transport vehicle 10, taking into account individual differences between the transport vehicle 10 and the workpiece processing device 100.

[0079] It should be noted that the present invention is not limited to the embodiments described above. That is, it can be implemented with various modifications without departing from the core principles of the present invention. [Explanation of Symbols]

[0080] 10 Transport vehicles 13 cassettes 13-2,25,25-1,25-2,25-3,25-4,25-5,123 mark 15 Lifting Unit 16, 16-1, 16-2, 16-3 Imaging Unit 20 Roads 30 Control Units 31 Image acquisition unit 32 Records Section 33 Movement Amount Calculation Unit 34 Stop position correction section 35 Stop position detection unit 100,100-2 Workpiece Processing Equipment 120 Cassette Mounting Platform 122 Guide 200 Goods 201 Work 301 Pre-guide image 302 Post-guide image 401, 402, 403, 404, 405 Positioning images

Claims

1. Work processing equipment and A transport vehicle for loading and unloading articles into and from the work processing apparatus, A roadway is installed above the workpiece processing apparatus on which the transport vehicle travels, A transport system comprising a control unit, The transport vehicle is, A cassette for containing the item, A lifting unit for raising and lowering the cassette relative to the cassette mounting platform of the workpiece processing device, It has an imaging unit that images the area below the transport vehicle, The workpiece processing device is installed on the cassette mounting platform and has a guide that contacts the cassette as it is raised and lowered from the transport vehicle stopped in the transfer area, and positions the cassette horizontally. The control unit is, An image acquisition unit that acquires images of the cassette before and after it is positioned by the guide, captured by the imaging unit, A movement amount calculation unit calculates the amount of horizontal movement when the cassette is positioned by the guide from the image, A stopping position correction unit corrects the stopping position when the transport vehicle is next stopped in the transfer area based on the amount of movement, A transport system characterized by having the following features.

2. The imaging unit images the cassette as it moves up and down relative to the cassette mounting platform. The transport system according to claim 1, characterized in that the control unit has a recording unit that records at least one of images or video when the cassette is raised or lowered.

3. The imaging unit captures a positioning image by imaging at least one of the following: the travel path, which has a mark that serves as a reference for the stopping position, and the cassette mounting platform, when the transport vehicle stops in the transfer area. The transport system according to claim 1, characterized in that the control unit includes a stop position detection unit that detects the stopping position of the transport vehicle from the positioning image and stops the transport vehicle at the stopping position.

4. The transport system according to claim 3, characterized in that the stop position correction unit corrects the stop position detected by the stop position detection unit based on the amount of movement calculated by the amount of movement calculation unit.

Images