Coin slot and ball lock ceramic lift pin holder

Abstract

To provide a ceramic lift pin holder and a retainer mechanism that can be fabricated entirely from a ceramic material.SOLUTION: A first lift pin holder assembly 200 includes a base portion 202, and a stem portion including a ball lock 206 to hold a lift pin. A second lift pin holder assembly includes a base portion, and a stem portion including a fork lock mechanism to hold a lift pin. A slotted ring with coin-slot type slots is arranged on a base of a substrate support assembly. A plurality of the first or second lift pin holder assemblies is retained in the slots using retainers that surround the base portions of the lift pin holder assemblies. Each slot includes an aperture into which a T-shaped retainer is inserted. The top portion of the T-shaped retainer prevents the retainer and the lift pin holder assembly from sliding out of the slot.SELECTED DRAWING: Figure 3A

Description

Technical Field

[0001] Cross-references to related applications The present application claims benefit based on U.S. Provisional Application No. 62 / 939,252 filed on November 22, 2019, the entire disclosure of which is incorporated herein by reference.

[0002] The present disclosure generally relates to substrate processing systems, and in particular to a lift pin holder assembly for a substrate support assembly used in a processing chamber of a substrate processing system.

Background Art

[0003] The description of the background art provided herein is for the purpose of generally presenting the background of the present disclosure. To the extent described in this background art, the work of the inventors named herein, together with any aspects of the description that would not normally be regarded as prior art at the time of filing, are not expressly or implicitly admitted as prior art to the present disclosure.

[0004] A substrate processing system can be used to perform film deposition, etching, ashing, cleaning, or other processing on a substrate such as a semiconductor wafer. A substrate processing system typically includes a processing chamber, a gas distribution device, and a substrate support assembly. During processing, the substrate is placed on the substrate support assembly. Various gas mixtures can be introduced into the processing chamber. Radio frequency (RF) plasma and / or heat can be used to activate chemical reactions.

[0005] Lift pins can be used to enable the transport and removal of substrates from a processing chamber using a robotic arm. Typically, the upper end of the lift pin is located coplanar with or below the top surface of the substrate support assembly. During substrate transport or removal, the lift pin is raised relative to the top surface of the substrate support assembly to lift the substrate and provide a gap between the substrate and the substrate support assembly. This gap allows the end effect of the robotic arm to be inserted or withdrawn.

[0006] The base of the lift pin is positioned and held by a lift pin holder. The lift pin holder is typically made of metal. The metal in the lift pin holder can cause metallic contamination of the substrate during high-temperature processing and / or the use of certain processing chemicals. [Overview of the Initiative]

[0007] The lift pin holder assembly comprises a base portion, a stem portion, and a top portion. The base portion has a cavity in its center. The cavity extends along the height of the base portion. The stem portion extends perpendicularly from the base portion along the height of the base portion. The cavity extends along the height of the stem portion through the center of the stem portion. The centers of the base portion and the stem portion are collinear. The stem portion includes a ball lock located at the distal end of the stem portion, adjacent to the portion of the cavity adjacent to the distal end of the stem portion. The top portion surrounds and is held around the stem portion, and has an opening adjacent to the distal end of the stem portion that coincides with the cavity.

[0008] In other features, the base, stem, and top are made of ceramic material.

[0009] In other features, the lift pin holder assembly further comprises a lift pin having a first end inserted into the cavity of the stem through an opening in the top section. The first end is provided with a circular groove. The lift pin is held within the cavity of the stem by a ball lock being locked into the circular groove. The lift pin has a second end extending outward from the opening in the top section along the height of the stem section.

[0010] In other features, the base is cylindrical and has a first diameter, and the stem comprises a first cylindrical section, a second cylindrical section, and a ring-shaped structure. The first cylindrical section extends vertically from the base along the height of the stem and has a second diameter smaller than the first diameter. The second cylindrical section extends vertically from the first cylindrical section along the height of the stem and has a third diameter larger than the second diameter and smaller than the first diameter. The ring-shaped structure surrounds the second cylindrical section.

[0011] In other features, the second cylindrical section includes a slot for ball locking. The slot is located on the opposite side of the first cylindrical section, across a ring-shaped structure.

[0012] In another feature, the ring-shaped structure is arranged around the middle portion of the second cylindrical section.

[0013] In other features, the top section comprises a circular section and a hollow cylindrical section. The circular section has an opening in its center. The hollow cylindrical section extends vertically from the circular section along the height of the stem section. The hollow cylindrical section engages with the second cylindrical section, and the ring-shaped structure surrounds the second cylindrical section.

[0014] In other features, the base has a first height, and the stem has a second height which is greater than the first height.

[0015] In other features, the base is cylindrical and has a first diameter. The top is cylindrical and has a second diameter less than or equal to the first diameter, and a third height that is less than the second height and greater than the first height.

[0016] In other features, the cavity is cylindrical and has a first diameter. The opening is circular and has a second diameter substantially equal to the first diameter. The cavity and opening are aligned along the height of the stem.

[0017] In other features, the cavity is cylindrical and has a first diameter. The opening is circular and has a second diameter. The cavity and opening are aligned along the height of the stem. The lift pin is cylindrical and has a third diameter smaller than the first and second diameters.

[0018] In other features, the lift pin holder assembly comprises a base portion, a stem portion, and a top portion. The base portion has a cavity in its center. The cavity extends along the height of the base portion. The stem portion extends perpendicularly from the base portion along the height of the base portion. The stem portion is C-shaped. The stem portion defines a hollow portion that extends along the height of the stem portion through the center of the stem portion. The hollow portion coincides with the cavity. The centers of the base portion and the stem portion are collinear. The top portion surrounds the stem portion and has an opening adjacent to the distal end of the stem portion that coincides with the cavity.

[0019] In other features, the base, stem, and top are made of ceramic material.

[0020] In other features, the lift pin holder assembly further comprises a lift pin having a first end inserted into the hollow portion of the stem through an opening in the top portion. The first end is provided with a circular groove. The lift pin is held within the hollow portion by an inner radial portion at the distal end of the stem being locked into the circular groove. The lift pin has a second end extending outward from the opening in the top portion along the height of the stem.

[0021] In other features, the base is cylindrical, and the top comprises a circular section, a cylindrical section, and a second cavity. The circular section has an opening in its center. The cylindrical section extends vertically from the circular section along the height of the stem. The second cavity in the cylindrical section engages with the stem.

[0022] In another feature, the base portion is cylindrical and has a first diameter and a first height. The stem portion has a second diameter smaller than the first diameter, and a second height greater than the first height.

[0023] In another feature, the top portion is cylindrical, has a third diameter that is equal to or smaller than the first diameter and substantially equal to the second diameter, and has a third height that is smaller than the second height and greater than the first height.

[0024] In another feature, the cavity is cylindrical and has a first diameter. The opening is circular and has a second diameter substantially equal to the first diameter. The cavity and the opening are aligned along the height of the stem portion.

[0025] In another feature, the cavity is cylindrical and has a first diameter. The opening is circular and has a second diameter. The cavity and the opening are aligned along the height of the stem portion. The lift pin is cylindrical and has a third diameter smaller than the first diameter and the second diameter.

[0026] In still another feature, the apparatus includes an annular ring, and a plurality of slots disposed on the upper surface of the annular ring. The annular ring has an outer diameter and an inner diameter. The annular ring has a top surface and a bottom surface that define a thickness of the annular ring. Each of the slots has a depth smaller than the thickness of the annular ring. Each of the slots is defined by two parallel lines and an arcuate element. The two parallel lines extend at the depth from the outer diameter of the annular ring toward the inner diameter of the annular ring in a plane parallel to the upper surface of the annular ring. Distal ends of the two parallel lines are bent toward each other at an acute angle. The arcuate element extends at the depth in the plane from the distal ends of the two parallel lines toward the inner diameter of the annular ring.

[0027] In another feature, the top of each of the slots is flush with the upper surface of the annular ring.

[0028] In another feature, the annular ring is made of a ceramic material.

[0029] In another feature, the apparatus further comprises a lift pin holder assembly disposed within one of the plurality of slots. The lift pin holder assembly includes a cylindrical base portion and a step portion. The cylindrical base portion is disposed within the slot. A stem portion extends vertically from the cylindrical base portion along the height of the lift pin holder assembly, and holds a lift pin inserted into the stem portion.

[0030] In another feature, the stem portion comprises at its distal end a ball lock that locks into a circular groove on the lift pin.

[0031] In another feature, the stem portion comprises at its distal end an inner radial portion that locks into a circular groove on the front lift pin.

[0032] In another feature, the apparatus further comprises a retainer surrounding the cylindrical base portion to hold the lift pin holder assembly within the slot. The retainer is cylindrical, having a diameter equal to the distance between two parallel lines of the slot, and an outer circumference engaging an arcuate element of the slot.

[0033] In another feature, the retainer comprises a circular portion and a cylindrical portion. The circular portion is parallel to an upper surface of an annular ring. The circular portion is provided with an opening at the center through which the stem portion of the lift pin holder assembly and the lift pin pass, wherein the stem portion extends vertically away from the upper surface of the annular ring along the height of the lift pin holder assembly. The cylindrical portion extends vertically from the circular portion toward the upper surface of the annular ring, and surrounds the cylindrical base portion of the lift pin holder assembly.

[0034] In other features, the apparatus further comprises a hole and a T-shaped element. The hole is located in a slot adjacent to the intersection of one of two parallel lines and the outer diameter of the annular ring. The T-shaped element comprises a first portion perpendicular to the front upper surface of the annular ring and inserted into the hole. The T-shaped element comprises a second portion parallel to the upper surface of the annular ring and perpendicular to the first portion, extending into a radially outward path of a retainer that holds the lift pin holder assembly in the slot.

[0035] In other features, the first part of the T-shaped element is cylindrical. The second part of the T-shaped element is rectangular.

[0036] In another feature, the device further comprises a substrate support assembly. The annular ring is positioned on the base of the substrate support assembly.

[0037] The detailed description, claims, and drawings will reveal further areas to which this disclosure may apply. The detailed description and specific examples are for illustrative purposes only and are not intended to limit the scope of this disclosure. [Brief explanation of the drawing]

[0038] This disclosure can be better understood from the detailed description and the accompanying drawings described below.

[0039] [Figure 1A] A diagram showing an example of a substrate processing system. [Figure 1B] A diagram showing an example of a substrate processing system.

[0040] [Figure 2] Figures 1A and 1B show an example of a substrate support assembly used in the substrate processing system.

[0041] [Figure 3A] This figure shows a ball-lock type ceramic lift pin holder assembly used in conjunction with the substrate support assembly shown in Figure 2. [Figure 3B]This figure shows a ball-lock type ceramic lift pin holder assembly used in conjunction with the substrate support assembly shown in Figure 2. [Figure 3C] This figure shows a ball-lock type ceramic lift pin holder assembly used in conjunction with the substrate support assembly shown in Figure 2. [Figure 3D] This figure shows a ball-lock type ceramic lift pin holder assembly used in conjunction with the substrate support assembly shown in Figure 2.

[0042] [Figure 4A] Figure 2 shows a fork-lock type ceramic lift pin holder assembly used with the substrate support assembly. [Figure 4B] Figure 2 shows a fork-lock type ceramic lift pin holder assembly used with the substrate support assembly.

[0043] [Figure 5A] Figure 2 shows a ring-shaped platform with a coin-slot type structure that can accommodate ball-lock type and fork-lock type lift pin holder assemblies, which are used in conjunction with the substrate support assembly. [Figure 5B] Figure 2 shows a ring-shaped platform with a coin-slot type structure that can accommodate ball-lock type and fork-lock type lift pin holder assemblies, which are used in conjunction with the substrate support assembly. [Figure 5C] Figure 2 shows a ring-shaped platform with a coin-slot type structure that can accommodate ball-lock type and fork-lock type lift pin holder assemblies, which are used in conjunction with the substrate support assembly.

[0044] [Figure 6A] Figures 5A to 5C show examples of retainers that can be used to hold a ball-lock type lift pin holder assembly within a coin-slot type structure. [Figure 6B]Figures 5A to 5C show examples of retainers that can be used to hold a fork-lock type lift pin holder assembly within a coin-slot type structure.

[0045] [Figure 7] Figures 6A and 6B show a T-shaped retainer that prevents the retainers from slipping out of the coin slot-type structure shown in Figures 5A to 5C.

[0046] In drawings, the same reference numeral may be used to identify similar and / or identical elements. [Modes for carrying out the invention]

[0047] This disclosure provides a ceramic lift pin holder and retaining mechanism that can be manufactured entirely from ceramic material, eliminating the need for any flexible material. Specifically, this disclosure provides a mechanical design that allows the lift pin holder to be mounted by touch using only one hand, without needing to see the parts and their engagement mechanism. One of the designs described fits into a standard-sized engagement holder, creating a puzzle-like retaining lock on the lift pin holder.

[0048] Current mechanical designs used for this purpose employ a flexible metal spring retaining design to enable a one-handed mounting process. The metal composition of these springs is prone to severe corrosion when exposed to processing chemicals commonly present in the processing chamber. Protective coatings applied to these springs and metal parts can delay the onset of this corrosion, but typically they are consumed over time, only slowing down the corrosive degradation. The resulting corrosion forms metal-containing frames and particles that can contaminate the deposited film or lead to mechanical defects on the wafer. Continued use can eventually lead to more serious failures, where the wafer handling pins are no longer held, preventing wafer placement or movement.

[0049] The new design in accordance with this disclosure replaces all metal components with ceramic components. The new design replicates the one-handed mounting function with ceramic components. The new design allows the interference locking mechanism to work together with a non-sliding mechanism that locks in place by expanding and locking in place as described below.

[0050] This disclosure is structured as follows: First, an example of a substrate processing system is illustrated and described with reference to Figures 1A and 1B. An example of a substrate support assembly with a lift pin holder assembly is illustrated and described with reference to Figure 2. A ball-lock type ceramic lift pin holder assembly is illustrated and described with reference to Figures 3A to 3D. A fork-lock type ceramic lift pin holder assembly is illustrated and described with reference to Figures 4A and 4B. A ring-shaped platform with a coin-slot type structure to which ball-lock type and fork-lock type lift pin holder assemblies can be mounted is illustrated and described with reference to Figures 5A to 5C. An example of a retainer that can be used to hold ball-lock type and fork-lock type lift pin holder assemblies within a coin-slot type structure is illustrated and described with reference to Figures 6A and 6B. A T-shaped retainer that can prevent the retainer from slipping out of the coin-slot type structure is illustrated and described with reference to Figure 7.

[0051] Figure 1A shows a substrate processing system 10 that includes a processing chamber 12 which houses other components of the substrate processing system 10 and (if used) confines RF plasma. The substrate processing system 10 comprises a shower head 14 and a substrate support assembly 16. A substrate 18 is placed on the substrate support assembly 16. The shower head 14 introduces and distributes processing gas during processing of the substrate 18.

[0052] When plasma is used, it can be direct plasma or remote plasma. In this example, the RF generation system 30 generates an RF voltage and outputs it to either the showerhead 14 or the substrate support assembly 16 (the other being DC grounded, AC grounded, or floating). Simply as an example, the RF generation system 30 may include an RF voltage generator 32 that generates the RF voltage supplied to the showerhead 14 or the substrate support assembly 16 by a matching network 34. Alternatively, the plasma may be supplied by a remote plasma source 36.

[0053] The gas supply system 40 comprises one or more gas sources 42-1, 42-2, ..., and 42-N (collectively, gas source 42), where N is a positive integer. The gas sources 42 supply one or more etching gas mixtures, precursor gas mixtures, cleaning gas mixtures, ashing gas mixtures, etc., to the processing chamber 12. Vaporized precursors may also be used. The gas sources 42 are connected to a manifold 48 by valves 44-1, 44-2, ..., and 44-N (collectively, valve 44) and mass flow controllers 46-1, 46-2, ..., and 46-N (collectively, mass flow controller 46). The output of the manifold 48 is supplied to the processing chamber 12. For example, the output of the manifold 48 is supplied to a showerhead 14.

[0054] A heater 50 may be connected to a heater coil (not shown) located within the substrate support assembly 16. The heater 50 may be used to control the temperature of the substrate support assembly 16 and the substrate 18. A valve 60 and a pump 62 may be used to evacuate the reactants from the processing chamber 12. A controller 70 may be used to control the components of the substrate processing system 10. For example, the controller 70 may be used to control the flow rate of the processing gas, monitor processing parameters (temperature, pressure, power, etc.), ignite and extinguish the plasma, remove reactants, etc.

[0055] Figure 1B shows another example of a substrate processing chamber 80 comprising an upper chamber 82 and a lower chamber 84 containing a substrate support assembly 16. An induction coil 86 is positioned around the upper chamber 82. An RF generation system 30 outputs RF power to the induction coil 86 to generate plasma 88 within the upper chamber 82. A showerhead 90 filters ions and supplies radicals to the lower chamber 84. The showerhead 90 may also be used to supply a secondary gas (such as a precursor gas) to the lower chamber 84 from a gas supply system 40-2.

[0056] Although two examples of substrate processing systems are shown herein, the lift pin holder assemblies described herein can be used in any other type of substrate processing system.

[0057] Figure 2 shows the substrate support assembly 16 in more detail. The substrate support assembly 16 may be located within a processing chamber (the chamber shown in Figures 1A and 1B or any other substrate processing chamber). The substrate support assembly 16 comprises a substrate support plate 110, a support column 112, and a base 114. The base 114 may include a ring-shaped platform (also called a lift ring) with a coin-slot type structure (shown in Figures 5A to 5C) on which the ball lock holder assembly and fork lock holder assembly of this disclosure can be mounted. In some examples, the support column 112 moves relative to the base 114.

[0058] A lift pin holder assembly 120 (shown here generally and later specifically in Figures 3A to 4B) is positioned on a base 114 beneath a substrate support plate 110. The lift pin holder assembly 120 comprises a base portion 126, a lift pin 130, and a lift pin holder 134. In some examples, the lift pin holder assembly 120 and the lift pin 130 are substantially cylindrical. The lift pin 130 is provided with a circular groove 131, which is useful for locking the lift pin 130 into the lift pin holder assembly, which will be described later with reference to Figures 3A to 4B.

[0059] One or more guide elements 140 may be used to assist in guiding the lift pins 130. In some examples, the guide element 140 comprises a cylindrical support 143 attached to the bottom surface of the substrate support plate 110. The cylindrical support 143 has a hole 145 for receiving the central portion of the lift pins 130. Similarly, the substrate support plate 110 has a hole 141 for receiving the upper portion of the lift pins 130.

[0060] During use, the support columns 112 and / or base 114 may be raised or lowered relative to the substrate support plate 110 to change the height of the upper ends of the lift pins 130 relative to the upper surface of the substrate support plate 110. As a result, the lift pins 130 are positioned to lift the substrate 122 above the substrate support plate 110 or to receive the substrate 122 when it is loaded onto the substrate support plate 110. A gap is provided between the substrate 122 and the upper surface of the substrate support plate 110, as shown in 148.

[0061] Figures 3A to 3D show in detail various examples and components of the lift pin holder assembly 120 and retainer. Figures 3A to 3D show the ball lock holder assembly. Figures 4A and 4B show the fork lock holder assembly. Figures 5A to 5C show a ring-shaped platform (also called a lift ring) with a coin slot-type structure to which the ball lock holder assembly and fork lock holder assembly can be mounted. Figures 6A and 6B show a retainer that can hold the ball lock holder assembly and fork lock holder assembly within the coin slot-type structure. Figure 7 shows a T-shaped retainer structure that can prevent the retainer from slipping out of the coin slot-type structure.

[0062] The structures, assemblies, and components shown in Figures 3A to 7 are all made of non-metallic materials. For example, the structures, assemblies, and components shown in Figures 3A to 7 are all made of ceramic materials. Furthermore, the lift pin 130 is also made of a non-metallic material.

[0063] Figures 3A to 3D show the ball lock holder assembly 200. In Figures 3A and 3B, the ball lock holder assembly 200 comprises a base portion 202 and a top portion (also called a cap) 204. The base portion 202 includes a ball lock 206 for locking the lift pin 130 when the lift pin 130 is inserted into the base portion 202, as will be described later. The top portion 204 is attached to the base portion 202 by sliding the top portion 204 downward over the ball lock 206. As the top portion 204 slides over the ball lock 206, the top portion 204 protrudes radially from the stem of the base portion and is locked to the base portion 202 by a ring-shaped structure (element 218, described later) that engages with a corresponding element 234 in the top portion 204, as will be described later.

[0064] Figure 3A shows the ball lock holder assembly 200 with the top portion 204 not fully attached to the base portion 202 (i.e., not locked). Figure 3B shows the ball lock holder assembly 200 with the top portion 204 fully attached to the base portion 202 (i.e., locked).

[0065] With the top portion 204 fully attached to the base portion 202 (i.e., locked) (i.e., when the elements 218 and 234 of the base portion 202 and the top portion 204 are engaged), the lift pin 130 can be inserted into the ball lock holder assembly 200 through the opening 208 in the top portion 204. After the lift pin 130 is inserted downward toward the base portion 202 through the opening 208, it is locked into the ball lock holder assembly 200 by slightly lifting the top portion 204. A ring-shaped groove 131 (shown in Figure 2) around the lift pin 130 slides over the ball lock 206 and locks into the ball lock 206. To unlock and release the lift pin 130 from the ball lock holder assembly 200, the top portion 204 is slightly lifted and the lift pin 130 is removed from the ball lock holder assembly 200. The ring-shaped groove 131 around the lift pin 130 is unlocked and released from the ball lock 206.

[0066] Figure 3C shows the base portion 202 of the ball lock holder assembly 200 in more detail. Figure 3C shows various views of the base portion 202. The base portion 202 is described geometrically below in terms of various parts and structures (i.e., as comprising them), but the base portion 202 is a single part (i.e., a single, integrated structure).

[0067] The base portion 202 comprises a first cylindrical portion 210 having a first diameter d1. The first cylindrical portion 210 defines the lower portion (or base) of the base portion 202. The base portion 202 further comprises a second cylindrical portion 212 having a second diameter d2, which extends vertically from the first cylindrical portion 210 (i.e., along the height of the base portion 202 or the height of the ball lock holder assembly 200), where d2 <d1である。

[0068] The base portion 202 further includes a third cylindrical portion 214 with a diameter d3 extending coaxially from the second cylindrical portion 212 (i.e., perpendicular to the first cylindrical portion 210 and along the height of the base portion 202 or the height of the ball lock holder assembly 200), where d1 > d3 > d2. The third cylindrical portion 214 is longer than the second cylindrical portion 212 (i.e., has a greater height).

[0069] The base portion 202 further includes a container (or slot) 216 for the ball lock 206 at the distal end of the third cylindrical portion 214. That is, the third cylindrical portion 214 has a container 216 at its distal end. The container 216 is shown in detail in 222. The ball lock 206 is located within the container 216.

[0070] The base portion 202 further includes a ring-shaped structure 218 with a diameter d4 surrounding the central portion of the third cylindrical portion 214, where d1 > d4 > d3. The ring-shaped structure 218 extends or protrudes substantially radially outward from the midpoint of the third cylindrical portion 214 (i.e., perpendicular to the height of the base portion 202 or the height of the ball lock holder assembly 200). The ring-shaped structure 218 is adjacent to the container 216. The first and second cylindrical portions 210 and 212 are on the opposite side of the container 216, with the ring-shaped structure 218 in between.

[0071] The base portion 202 is hollow in the center and has a cylindrical cavity (i.e., hole) 220 in the center along the length (i.e., height) of the base portion 202. That is, the cylindrical cavity 220 passes through the centers of elements 210, 212, 214, and 218 of the base portion 202 along the length (i.e., height) of the base portion 202.

[0072] The ball lock 206 is located within the container 216 and is adjacent to or near a portion of the cylindrical cavity 220 located near the distal end of the third cylindrical portion 214 of the base portion 202. The cylindrical cavity 220 receives the lift pin 130 when it is inserted into the ball lock holder assembly 200 through the opening 208 in the top portion 204 (shown in Figures 3A and 3B).

[0073] Therefore, the base portion 202 may generally be described as comprising a first cylindrical portion 210 and a stem portion 211 including elements 212-218. That is, elements 212-218 may collectively be called the stem portion 211 of the base portion 202. The stem portion 211 extends vertically from the first cylindrical portion 210 along the height of the base portion 202. The cylindrical cavity 220 extends along the height of the base portion 202 through the centers of elements 210 and 211. The ball lock 206 and its container 216 are located at the distal end of the stem portion 211 and are close to the portion of the cylindrical cavity 220 near the distal end of the stem portion 211. Again, elements 210-220 are integrated into the base portion 202, defining the base portion 202 as a single molded product.

[0074] Figure 3D shows the top portion 204 of the ball lock holder assembly 200 in more detail. The top portion 204 is cylindrical and comprises several hollow structures that engage with the third cylindrical portion 214 and the ring-shaped structure 218 of the base portion 202. Again, although the top portion 204 is described geometrically below in terms of various parts and structures (i.e., as comprising them), the top portion 204 is a single part (i.e., a single, integrated structure).

[0075] The outer diameter of the top portion 204 may be smaller than d1. The height of the top portion 204 is greater than the height of the first cylindrical portion 210 of the base portion 202, but smaller than the combined height of the second and third cylindrical portions 212 and 214 of the base portion 202 (i.e., smaller than the height of the stem portion 211).

[0076] The top portion 204 includes an opening 208, the opening 208 having a diameter a1 that matches the diameter of the lift pin 130. The top portion 204 includes a first cylindrical hollow portion 230 with a diameter a1 that extends from the opening 208 along the center of the top portion 204 (i.e., along the cylindrical axis or height). The top portion 204 further includes a second cylindrical hollow portion 232 with a diameter a2 that extends from a distance x1 from the opening 208 along the center of the top portion 204 (i.e., along the cylindrical axis or height).

[0077] The top portion 204 further comprises a third cylindrical hollow portion 234 with a diameter a3, which is an enlargement of the middle portion of the second cylindrical hollow portion 232 (i.e., extending radially or perpendicular to the height of the top portion 204), where a3 > a2. The third cylindrical hollow portion 234 engages with and surrounds the ring-shaped structure 218 of the base portion 202 when the top portion 204 is attached to and locked on the base portion 202. The opening 208 aligns with the cylindrical cavity (i.e., hole) 220 near the top of the base portion 202 when the top portion 204 is attached to and locked on the base portion 202.

[0078] The first, second, and third cylindrical hollow sections 230, 232, and 234 of the top section 204 define a single hollow section or cavity of the top section 204. The single hollow section or cavity of the top section 204 extends from the opening 208 at one end (upper end) of the top section 204 to the other end (lower end) of the top section 204.

[0079] Figures 4A and 4B show the fork lock holder assembly 300. In Figures 4A and 4B, the fork lock holder assembly 300 comprises a base portion 302 and a top portion (also called a cap) 304. Before attaching the top portion 304 to the base portion 302, a lift pin 130 is inserted through an opening 306 in the center of the top portion 304. The top portion 304 is attached to the base portion 302 by sliding the top portion 304 downward toward the base portion 302 together with the lift pin 130. The top portion 304 is then slid downward toward the base portion 302 on the lift pin 130. The lift pin 130 locks into the base portion 302 and remains locked in place, as will be described later.

[0080] After the top portion 304 is attached to the base portion 302, the fork lock holder assembly 300 looks similar externally to the ball lock holder assembly 200 shown in Figure 3B. Therefore, for simplicity, a diagram of the fork lock holder assembly 300 with the top portion 304 attached to the base portion 302 is not shown again.

[0081] To remove the lift pin 130 from the fork lock holder assembly 300, the top portion 304 is pulled upward from the base portion 302. Once the top portion 304 is pulled upward from the base portion 302, the lift pin 130 is unlocked from the base portion 302 (i.e., from the fork lock holder assembly 300) and can be removed from the base portion 302.

[0082] Figure 4A shows the base portion 302 of the fork lock holder assembly 300 in more detail. Figure 4A shows various views of the base portion 302. The base portion 302 is described geometrically below in terms of various elements (i.e., as comprising them), but the base portion 302 is a single part (i.e., a single, integrated structure).

[0083] The base portion 302 comprises a cylindrical portion 310 having a diameter b1. The cylindrical portion 310 defines the lower portion (or base) of the base portion 302. The base portion 302 comprises a slot 312 for receiving the lift pin 130. The slot 312 extends vertically from the cylindrical portion 310 (i.e., along the height of the base portion 302 or the height of the fork lock holder assembly 300). The slot 312 is generally a C-shaped structure that defines a cavity 314 into which the lift pin 130 is received and held. The slot 312 is generally a hollow, circular or elliptical tubular structure, with a portion of the tubular structure cut along the length (i.e., height) of the slot 312 so that the slot 312 has a C-shaped structure. The cavity 314 extends through the slot 312 into the cylindrical portion 310. The height of the slot 312 is greater than the height of the cylindrical portion 310. The circle drawn around the slot 312 has a diameter b2 that is smaller than the diameter b1 of the cylindrical portion 310 of the base portion 302.

[0084] Detail B of Figure 4A shows the design of a slot 312 that allows the lift pin 130 to be inserted into and held in the base portion 302 (i.e., in the fork lock holder assembly 300). The slot 312 has a series of radii so that the lift pin 130 can be inserted offset from the centerline of the base portion 302 and then slid toward the centerline. At the distal end (i.e., the end opposite to the cylindrical portion 310), the slot 312 has a smaller (inner) radius, i.e., an inner radial portion, that locks against the ring-shaped groove 131 around the lift pin 130 (shown in Figure 2). The inner radius, i.e., the inner radial portion near the upper end of the slot 312, engages with the ring-shaped groove 131 on the lift pin 130, locking the lift pin 130 in the slot 312 and in the base portion 302. The sliding surface of the slot 312 has a radius that matches the insertion portion of the slot 312 and is chamfered on both the top and bottom to guide the lift pin 130 to lock against the base portion 302. The outer radius of slot 312 matches the inner radius of top portion 304, so that top portion 304 slides down slot 312 and holds the lift pin 130 within the cavity 314 in slot 312. Again, elements 310-314 are integrated into base portion 302, defining base portion 302 as a single molded product.

[0085] Figure 4B shows the top portion 304 of the fork lock holder assembly 300 in more detail. The top portion 304 is cylindrical and has a hollow structure that engages with the slot 312 of the base portion 302. Again, although the top portion 304 is described geometrically below in terms of various elements (i.e., as comprising them), the top portion 304 is a single part (i.e., a single, integrated structure).

[0086] The outer diameter of the top portion 304 may be smaller than the diameter b1 of the cylindrical portion 310. The height of the top portion 304 is smaller than the height of the slot 312 of the base portion 302.

[0087] The top portion 304 includes an opening 306. The opening 306 has a diameter a1 that matches the diameter of the lift pin 130. The top portion 304 includes a first cylindrical hollow portion 330 with a diameter a1 that extends from the opening 306 along the center of the top portion 304 (i.e., along the cylindrical axis or height). The top portion 304 further includes a second cylindrical hollow portion 332 with a diameter p1 that extends from a distance y1 from the opening 306 along the center of the top portion 304 (i.e., along the cylindrical axis or height), where p1 > a1 and p1 = b2. The second cylindrical hollow portion 332 engages with and surrounds the slot 312 of the base portion 302 when the top portion 304 is attached to the base portion 302. The opening 306 aligns with the portion of the hollow portion 314 near the top of the slot 312 when the top portion 304 is attached to the base portion 302.

[0088] The first and second cylindrical hollow portions 330 and 332 of the top portion 304 define a single hollow portion or cavity of the top portion 304. The single hollow portion or cavity of the top portion 304 extends from the opening 306 at one end (upper end) of the top portion 304 to the other end (lower end) of the top portion 304.

[0089] Figures 5A to 5C show a slotted ring (also called a lift ring) 400 that may be included in the base 114 of the substrate support assembly 16 shown in Figure 2. In Figure 5A, the slotted ring 400 has a plurality of coin-slot type structures 402. The coin-slot type structures 402 are designed to hold the lift pin holder assembly shown in Figures 3A to 4B and will be referred to as slots 402 hereafter. The number of slots 402 is equal to the number of lift pins 130 used in the substrate support assembly 16. Figure 5B shows details for attaching the slotted ring 400 to the base 114 of the substrate support assembly 16 in detail A. Figure 5C shows the slots 402 in further detail.

[0090] The slotted ring 400 is annular and has an inner diameter and an outer diameter. Each slot 402 is defined by two parallel lines extending inward from the outer diameter of the slotted ring 400 to about half the distance between the inner and outer diameters of the slotted ring 400 (i.e., to the midpoint). The distal ends of the two parallel lines (i.e., the ends extending inward) are the ends opposite to the ends ending in the outer diameter of the slotted ring 400 and are bent inward toward each other at an acute angle. Each slot 402 is further defined by an arcuate or C-shaped element having ends ending in the bent ends of the two parallel lines. The curved portion of the arcuate or C-shaped element extends toward the inner diameter of the slotted ring 400.

[0091] For each slot 402, a slot 402 of uniform depth is formed by removing (engraving or carving out) portions of the slotted ring 400 that form the boundary between two parallel lines, an arc-shaped or C-shaped element, and the outer diameter portion between the two parallel lines. For example, a slot 402 can be formed by removing the portion within the boundary from the top surface of the slotted ring 400 by machining or etching. The depth h of each slot 402 is less than the thickness of the slotted ring 400. The top of each slot 402 is coplanar with the top surface of the slotted ring 400. The slots 402 are coplanar with the slotted ring 400.

[0092] As will be explained later, the retainers shown in Figures 6A and 6B, which can hold the lift pin holder assemblies shown in Figures 3A to 4B, are slid radially into these slots 402 from the outer diameter to the inner diameter of the slotted ring 400.

[0093] In each slot 402, the hole 404 is formed close to one of the two parallel lines and close to the outer diameter of the slotted ring 400. The hole 404 is formed close to the intersection, i.e., the corner, between one of the two parallel lines and the outer diameter of the slotted ring 400.

[0094] As will be described later, in order to prevent the retainers shown in FIGS. 6A and 6B from sliding radially outward (from the inner diameter toward the outer diameter of the slotted ring 400) and disengaging from the slot 402, the T-shaped retainer shown in FIG. 7 may be inserted into the hole 404.

[0095] FIGS. 6A and 6B show retainers that can hold the lift pin holder assemblies shown in FIGS. 3A to 4B when these assemblies together with the retainers are slid into the slot 402. FIG. 6A shows a retainer 500 for the ball lock holder assembly 200 shown in FIGS. 3A to 3D. FIG. 6B shows a retainer 550 for the fork lock holder assembly 300 shown in FIGS. 4A and 4B.

[0096] In FIG. 6A, the retainer 500 for the ball lock holder assembly 200 is cylindrical. FIG. 6A shows various views of the base retainer 500. Although the retainer 500 is geometrically described below in terms of various elements (i.e., as comprising said elements), the retainer 500 is a single component (i.e., a single unitary structure).

[0097] The retainer 500 is defined by a hollow cylinder 502 having a diameter c1 that extends perpendicularly from an annular upper surface 504 (i.e., along the height of the retainer 500). The annular upper surface 504 is perpendicular to the hollow cylinder 502 (i.e., perpendicular to the height of the retainer 500) and comprises a circular opening 506. The annular upper surface 504 has an outer diameter c1 and an inner diameter c2, where c1>d1>c2. That is, the hollow cylinder 502 has an outer diameter c1>d1, and the circular opening 506 has a diameter c2<d1.

[0098] The retainer 500 is provided with an annular ring 508 at the distal end of the hollow cylinder 502. The annular ring 508 extends radially (i.e., perpendicular to the height of the retainer 500) from the distal end of the hollow cylinder 502 opposite to the end extending from the annular top surface 504. The annular ring 508 has an inner diameter c1 and an outer diameter that precisely matches the distance between two parallel lines defining each of the slots 402. The annular ring 508 has a thickness, i.e., height t, that precisely matches the depth h of the slot 402. Thus, the retainer 500 can slide radially into the slot 402. The annular ring 508 (and the retainer 500) has an outer circumference that engages with the arcuate or C-shaped elements of the slot 402.

[0099] Again, elements 502-508 are integrated into the retainer 500, defining the retainer 500 as a single molded product. The height of the retainer 500 (i.e., the height of the hollow cylinder 502) is greater than the height of the base portion 202 of the ball lock holder assembly 200. The height of the retainer 500 is less than the height of the ball lock holder assembly 200.

[0100] Since c1 > d1 > c2, the retainer 500 can slide down from the top portion 204 of the ball lock holder assembly 200 after the top portion 204 has been attached to the base portion 202 of the ball lock holder assembly 200 (i.e., after the ball lock holder assembly 200 has been fully assembled). Furthermore, since c1 > d1 > c2, after sliding the retainer 500 down into the slot 402, the base portion 202 cannot be pulled out of the circular opening 506 by pulling the top portion 204 protruding from the circular opening 506. Within the slot 402, the retainer 500 covers the base portion 202 of the ball lock holder assembly 200. The height of the retainer 500 is greater than the depth h of the slot 402 and the height of the base portion 202.

[0101] In FIG. 6B, the retainer 550 for the fork lock holder assembly 300 is also cylindrical. FIG. 6B shows various views of the base retainer 550. Although retainer 550 is geometrically described below in terms of (i.e., as comprising) various elements, retainer 550 is a single part (i.e., a single unitary structure).

[0102] Retainer 550 is defined by a hollow cylinder 552 of diameter q1 extending vertically (i.e., along the height of retainer 550) from an annular upper surface 554. The annular upper surface 554 is perpendicular to the hollow cylinder 552 (i.e., perpendicular to the height of retainer 550) and comprises a circular opening 556. The annular upper surface 554 has an outer diameter q1 and an inner diameter q2, where q1 > b1 > q2. That is, the hollow cylinder 502 has an outer diameter q1 > b1, and the circular opening 556 has a diameter q2 < b1.

[0103] Retainer 550 comprises an annular ring 558 at the distal end of hollow cylinder 552. The annular ring 558 extends radially (i.e., perpendicular to the height of retainer 550) from the distal end of hollow cylinder 552 opposite the end extending from annular upper surface 554. The annular ring 558 has an inner diameter q1 and an outer diameter that exactly matches the distance between the two parallel lines defining each of the slots 402. The annular ring 558 has a thickness or height t that exactly matches the depth h of the slot 402. Accordingly, retainer 550 can be slid radially into slot 402. The annular ring 558 (and retainer 550) has an outer perimeter that engages the arcuate or C-shaped element of the slot 402.

[0104] Again, elements 552 to 558 are integrated into retainer 550 and define retainer 550 as an integrally molded article. The height of retainer 550 (i.e., the height of hollow cylinder 552) is greater than the height of the base portion 302 of the fork lock holder assembly 300. The height of retainer 550 is less than the height of the fork lock holder assembly 300.

[0105] Before the fork lock holder assembly 300 is placed in slot 402, and before the top portion 304 of the fork lock holder assembly 300 is attached to the base portion 302, the retainer 550 is positioned on top of the base portion 302 so as to surround (i.e., cover) the base portion 302, since q1 > b1. Then, before the top portion 304 is attached to the base portion 302, the retainer 550 is slid into slot 402 together with the base portion 302. The top portion 304 is then attached to the base portion 302 with the lift pin 130 inserted into the top portion 304. Since the diameter b1 of the base portion 302 is greater than the diameter q2 of the circular opening 556, the base portion 302 cannot be pulled out of the circular opening 556 by pulling the top portion 304 that protrudes from the circular opening 556. Within slot 402, the retainer 550 covers the base portion 302 of the fork lock holder assembly 300. The height of the retainer 550 is greater than the depth h of the slot 402 and the height of the base portion 302.

[0106] When the retainer 500 is in the slot 402 together with the ball lock holder assembly 200, the annular top surface (may be called the circular portion) 504 of the retainer 500 is parallel to the top surface of the slotted ring 400. The stem portion 211 of the ball lock holder assembly 200 and the lift pin 130 held therein extend through the circular opening 506 of the retainer 500 in a direction perpendicular to the top surface of the slotted ring 400. The cylindrical portion (i.e., the hollow cylinder 502) of the retainer 500 extends perpendicularly from the annular top surface (i.e., the circular portion) 504 of the retainer 500 toward the top surface of the slotted ring 400 and surrounds the cylindrical base portion 202 of the ball lock holder assembly 200.

[0107] When the retainer 550 is in the slot 402 together with the fork lock holder assembly 300, the annular top surface (may be called the circular portion) 554 of the retainer 550 is parallel to the top surface of the slotted ring 400. The slot 312 (may be called the stem portion) of the fork lock holder assembly 300 and the lift pin 130 held therein extend through the circular opening 556 of the retainer 550 in a direction perpendicular to the top surface of the slotted ring 400. The cylindrical portion (i.e., the hollow cylinder 552) of the retainer 550 extends perpendicularly from the annular top surface (i.e., the circular portion) 554 of the retainer 550 toward the top surface of the slotted ring 400 and surrounds the cylindrical portion 310 of the fork lock holder assembly 300.

[0108] Figure 7 shows a T-shaped retainer 600 that can be inserted into the hole 404 after the retainers 500 and 550 shown in Figures 6A and 6B have been slid into the slot 402 along with their respective lift pin holder assemblies 200 and 300. The T-shaped retainer 600 is a single molded piece including an upper part 602 and a bottom part 604. The upper part may be rectangular, while the bottom part may be cylindrical. The bottom part 604 extends vertically from the upper part 602. The bottom part 604 is inserted into the hole 404. The T-shaped retainer 600 is then rotated such that the upper part 602 prevents the retainers 500 and 550 from sliding radially outward (from the inner diameter to the outer diameter of the slotted ring 400) and coming out of the slot 402. The height of the T-shaped retainer 600 is less than the height of each of the retainers 500 and 550.

[0109] When the T-shaped retainer 600 is attached to the slotted ring (i.e., inserted into the hole 404), the bottom 604 becomes perpendicular to the plane in which the slotted ring 400 resides, and the top 602 becomes parallel to the plane in which the slotted ring 400 resides. The top 602 extends into the radially outward path of the retainers 500, 550. By thus obstructing the radially outward path of the retainers 500, 550, the T-shaped retainer 600 secures the retainers 500, 550 together with their respective pin holder assemblies 200, 300 within the slot 402. In other words, the T-shaped retainer 600 prevents the retainers 500, 550 and their respective pin holder assemblies 200, 300 from slipping out of the slot 402.

[0110] When mounted in the slotted ring (i.e., inserted into slot 402), the heights of elements 200, 300, 500, and 550 are parallel to an axis perpendicular to the plane on which the slotted ring 400 resides. The plane on which the slotted ring 400 resides is parallel to the plane on which the substrate rests during processing.

[0111] Throughout this disclosure, the shapes of elements 130 and 200-604 are described as substantially circular and cylindrical. However, at least some of these elements may have other shapes.

[0112] The foregoing statements are merely illustrative and are not intended to limit the Disclosure, its applications, or its uses. The broad teachings of this Disclosure can be implemented in various forms. Therefore, while this Disclosure includes certain examples, the true scope of this Disclosure is not limited to those examples, as other modifications will become apparent upon study of the drawings, specification, and the claims below.

[0113] It should be understood that one or more steps included in the method may be performed in a different order (or simultaneously) without altering the principles of the disclosure. Furthermore, although each embodiment is described as having a particular feature, any one or more features described in relation to any embodiment of the disclosure may be implemented in any of the other embodiments and / or combined with any feature of any of the other embodiments, even if the combination is not explicitly described. In other words, the embodiments described above are not mutually exclusive, and substituting one or more embodiments for one another is within the scope of the disclosure.

[0114] The spatial and functional relationships between elements (e.g., between modules, between circuit elements, between semiconductor layers) are described using a variety of terms, such as “connected,” “engaged,” “joined,” “adjacent,” “near,” “above,” “above,” “below,” and “positioned.” When describing a relationship between a first and a second element in this disclosure, unless it is explicitly stated to be “direct,” that relationship may be a direct relationship in which no other intervening elements exist between the first and second elements, or it may be an indirect relationship in which one or more intervening elements exist (spatially or functionally) between the first and second elements.

[0115] As used herein, the expression “A, B, and at least one of C” should be interpreted as meaning a logic (A or B or C) using a non-exclusive OR, and not as meaning “at least one of A, at least one of B, and at least one of C.”

[0116] In some embodiments, the controller is part of the system, and the system may be part of the examples described above. Such a system may comprise a semiconductor processing apparatus, including one or more processing tools, one or more chambers, one or more platforms for processing, and / or specific processing components (such as a wafer pedestal or gas flow system). These systems may be integrated with electronic equipment for controlling the operation of the system before, during, and after processing of semiconductor wafers or substrates. The electronic equipment may be called a “controller” and may control various components or sub-components of the system.

[0117] The controller may be programmed to control any of the processes disclosed herein, depending on the processing requirements and / or the type of system, including the supply of processing gas, temperature settings (e.g., heating and / or cooling), pressure settings, vacuum settings, power settings, radio frequency (RF) generator settings, RF matching circuit settings, frequency settings, flow rate settings, fluid supply settings, position and operation settings, and wafer movement in and out of a load lock connected to or coupled with tools and other moving tools and / or a particular system.

[0118] Generally, a controller may be defined as an electronic device having various integrated circuits, logic, memory, and / or software that receive instructions, issue instructions, control operations, enable cleaning operations, enable endpoint measurements, and so on. Integrated circuits may include chips in the form of firmware that store program instructions, chips defined as digital signal processors (DSPs), application-specific integrated circuits (ASICs), and / or one or more microprocessors or microcontrollers that execute program instructions (e.g., software).

[0119] Program instructions may be instructions that are communicated to the controller in the form of various individual settings (or program files) and define operating parameters for performing specific processing on or for a semiconductor wafer, or operating parameters for the system. In some embodiments, the operating parameters may be part of a recipe defined by a process engineer to achieve one or more processing steps during the processing of one or more layers, materials, metals, oxides, silicon, silicon dioxide, surfaces, circuits, and / or dies of a wafer.

[0120] In some embodiments, the controller may be part of a computer integrated with the system, connected to the system, networked with the system in other ways, or a combination thereof, or connected to such a computer. For example, the controller may reside in the “cloud” or be all or part of a fab host computer system that enables remote access to wafer processing. The computer may enable remote access to the system to monitor the current progress of manufacturing operations, examine the history of past manufacturing operations, or examine trends or performance indicators from multiple manufacturing operations, in order to change the parameters of the current process, set up processing steps according to the current process, or start a new process.

[0121] In some examples, a remote computer (e.g., a server) may provide processing recipes to the system over a network (which may include a local network or the internet). The remote computer may have a user interface that allows input or programming of parameters and / or settings, which are communicated from the remote computer to the system.

[0122] In some examples, the controller receives instructions in data form, and the instructions specify parameters for each of the processing steps performed during one or more operations. It should be understood that the parameters may be specific to the type of processing performed and the type of tool the controller is configured to interface with or control.

[0123] Therefore, as described above, the controller may be distributed by including one or more separate controllers that are networked and operate toward a common purpose (such as processing and control as described herein). An example of a distributed controller for such purposes is one or more integrated circuits on the chamber that communicate with one or more remotely located integrated circuits (located at the platform level or as part of a remote computer, etc.) that cooperate to control processing in the chamber.

[0124] Examples of systems, though not limited to them, may include plasma etching chambers or modules, deposition chambers or modules, spin rinse chambers or modules, metal plating chambers or modules, cleaning chambers or modules, bevel edge etching chambers or modules, physical vapor deposition (PVD) chambers or modules, chemical vapor deposition (CVD) chambers or modules, atomic layer deposition (ALD) chambers or modules, atomic layer etching (ALE) chambers or modules, ion implantation chambers or modules, track chambers or modules, and any other semiconductor processing systems that may be related to or used in the processing and / or manufacturing of semiconductor wafers.

[0125] As described above, depending on the one or more processing steps performed by the tool, the controller may communicate with one or more of the following: other tool circuits or modules, other tool components, cluster tools, other tool interfaces, adjacent tools, nearby tools, tools located throughout the factory, the main computer, another controller, or tools used for material transport to and from the tool locations and / or load ports within the semiconductor manufacturing plant.

Claims

1. An apparatus used with at least one lift pin holder assembly, An annular ring having an outer diameter, an inner diameter, and an upper and lower surface that define the thickness of the annular ring, A plurality of slots arranged on the upper surface of the annular ring to support the at least one lift pin holder assembly, Equipped with, Each of the plurality of slots has a depth smaller than the thickness of the annular ring, Two parallel lines extend from the outer diameter of the annular ring toward the inner diameter of the annular ring in a plane parallel to the upper surface of the annular ring at the depth, and the distal ends of the two parallel lines are bent toward each other at an acute angle. A device defined by an arc-shaped element extending in the plane at the depth described above from the distal ends of the two parallel lines toward the inner diameter of the annular ring.

2. The apparatus according to claim 1, wherein the upper part of each of the plurality of slots is at the same height as the upper surface of the annular ring.

3. The apparatus according to claim 1, wherein the annular ring is made of a ceramic material.

4. The apparatus according to claim 1, further comprising a substrate support assembly, The device wherein the annular ring is positioned on the base of the substrate support assembly.

5. The apparatus according to claim 1, further, The at least one lift pin holder assembly comprises the at least one lift pin holder assembly, A base portion having a cavity in its center, and the cavity extends along the height of the base portion, The base portion comprises a stem portion extending vertically from the base portion along its height, and the cavity extending along the height of the stem portion through the center of the stem portion, the centers of the base portion and the stem portion being on the same line, and the stem portion comprising a ball lock positioned at the distal end of the stem portion, adjacent to the portion of the cavity adjacent to the distal end of the stem portion. A top portion that surrounds the stem portion and is held around the stem portion, the top portion having an opening adjacent to the distal end of the stem portion and coinciding with the cavity, A device equipped with the following features.

6. The apparatus according to claim 5, The base portion is configured to receive the lift pin, The ball lock is configured to lock the lift pin to the stem portion of the device.

7. The apparatus according to claim 6, wherein the top portion locks the lift pin to the stem portion when it moves toward the base portion.

8. The apparatus according to claim 6, The at least one lift pin holder assembly is positioned in one of the plurality of slots, The base portion is placed within the slot, The stem portion is a device that holds the lift pin inserted into the stem portion.

9. The apparatus according to claim 8, wherein the ball lock locks into a circular groove on the lift pin.

10. The apparatus according to claim 8, wherein the stem portion is provided with an inner radial portion at its distal end that locks into a circular groove on the lift pin.

11. The apparatus according to claim 8, further comprising a retainer surrounding the base portion and holding the at least one lift pin holder assembly in the slot, The retainer is cylindrical and has a diameter equal to the distance between the two parallel lines of the slot and an outer circumference that engages with the arc-shaped element of the slot.

12. The apparatus according to claim 11, wherein the retainer is A circular portion of the annular ring parallel to the upper surface, which extends vertically away from the upper surface of the annular ring along the height of the at least one lift pin holder assembly, and which has a circular portion centered on an opening through which the stem portion of the at least one lift pin holder assembly and the lift pin pass, A cylindrical portion extends perpendicularly from the circular portion toward the upper surface of the annular ring and surrounds the base portion of the at least one lift pin holder assembly, A device equipped with the following features.

13. The apparatus according to claim 11, further, A hole is located within the slot, adjacent to the intersection point of one of the two parallel lines and the outer diameter of the annular ring, T-shaped element and, Equipped with, The aforementioned T-shaped element is, The first portion is perpendicular to the upper surface of the annular ring and is inserted into the hole, A second portion is parallel to the upper surface of the annular ring and perpendicular to the first portion, and extends into a radially outward path of the retainer that holds the at least one lift pin holder assembly within the slot, A device equipped with the following features.

14. The apparatus according to claim 13, The first portion of the T-shaped element is cylindrical, The device wherein the second portion of the T-shaped element is rectangular.

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