Method for manufacturing resist compositions and resist patterns

Abstract

To provide a compound which allows a resist pattern having good line edge roughness (LER) to be produced, a resin, and a resist composition containing the same.SOLUTION: There are provided a compound represented by formula (I), a resin, and a resist composition containing the same. [In the formula, R2 represents a group represented by formula (1a) or the like.]SELECTED DRAWING: None

Description

[Technical Field]

[0001] The present invention relates to a compound, a resin containing structural units derived from the compound, a resist composition containing the resin, and a method for producing a resist pattern using the resist composition. [Background technology]

[0002] Patent Document 1 describes a resist composition containing a resin that includes structural units derived from the following compounds. TIFF0007933518000001.tif4944 [Prior art documents] [Patent Documents]

[0003] [Patent Document 1] Japanese Patent Publication No. 2017-095688 [Overview of the Initiative] [Problems that the invention aims to solve]

[0004] The present invention provides a compound that forms a resist pattern with better line edge roughness (LER) than a resist pattern formed by a resist composition containing a resin that includes structural units derived from the above-mentioned compound. [Means for solving the problem]

[0005] This invention includes the following inventions. [1] A resist composition containing a resin comprising a structural unit represented by formula (IA) and an acid generator. TIFF0007933518000002.tif46120[In formula (IA), R 0 This represents an alkyl group having 1 to 6 carbon atoms, which may contain a halogen atom, a hydrogen atom, or a halogen atom. X 1represents *-O-**, *-CO-O-**, *-O-CO-O-** or *-Ax-Ph-Ay-**. Ph represents a phenylene group which may have a substituent. Ax represents one type of bond selected from the group consisting of a single bond, an ether bond, an ester bond and a carbonate bond. Ay represents one type of bond selected from the group consisting of a single bond, an ether bond, an ester bond and a carbonate bond. * represents a bonding site to the carbon atom to which R 0 is bonded, and ** represents a bonding site to L 1 . L 1 represents a single bond or a C1-C60 hydrocarbon group which may have a substituent, and -CH2- contained in the hydrocarbon group may be replaced by -O-, -S-, -SO2- or -CO-. Ring W represents a C3-C36 alicyclic hydrocarbon group, and -CH2- contained in the alicyclic hydrocarbon group may be replaced by -O-, -S-, -CO- or -SO2-. R 1 each independently represents a halogen atom, a hydroxy group, a C1-C12 haloalkyl group or a C1-C12 alkyl group, and -CH2- contained in the haloalkyl group and the alkyl group may be replaced by -O- or -CO-. X 2 represents *-CO-O-, *-O-CO-, *-O-CO-O- or *-O-, and * represents a bonding site to Ring W. L 4 represents a single bond or a C1-C6 alkanediyl group, and -CH2- contained in the alkanediyl group may be replaced by -O- or -CO-. R 2 represents a group represented by formula (1a) or a group represented by formula (2a). m1 represents any integer of 0 to 6, and when m1 is 2 or more, a plurality of R 1 may be the same as or different from each other. m2 represents any integer of 2 to 6, and a plurality of X 2 , L4 and R 2 They may be identical or different from one another. TIFF0007933518000003.tif2161 [In formula (1a), R aa1 , R aa2 and R aa3 Each of these independently represents an alkyl group having 1 to 8 carbon atoms, an alkenyl group having 2 to 8 carbon atoms, an alicyclic hydrocarbon group having 3 to 20 carbon atoms, an aromatic hydrocarbon group having 6 to 18 carbon atoms, or a group combining these, or R aa1 and R aa2 These atoms bond with each other to form alicyclic hydrocarbon groups with 3 to 20 carbon atoms, along with the carbon atoms to which they are bonded. * indicates a connection site. TIFF0007933518000004.tif2161 [In formula (2a), R aa1’ and R aa2’ Each of these independently represents a hydrogen atom or a hydrocarbon group having 1 to 12 carbon atoms, and R aa3’ represents a hydrocarbon group with 1 to 20 carbon atoms, or R aa2’ and R aa3’ They combine with each other and they join together -CX a - Together with the hydrocarbon group, it forms a heterocyclic group having 3 to 20 carbon atoms, and the -CH2- contained in the hydrocarbon group and the heterocyclic group may be replaced with -O- or -S-. X a This represents an oxygen atom or a sulfur atom. * indicates a connection site. [2] X 1 However, equation (X 1 -1)~Formula(X 1 The resist composition according to [1], wherein the group is represented by any of the following (-7). TIFF0007933518000005.tif49158[Formula(X 1 -1)~Formula(X 1 -7) Medium, * and ** are binding sites, and ** is L 1 This represents the connection point with [the other element]. [3] X 1 However, equation (X 1 -1), formula (X 1 -3) or formula (X 1The resist composition described in [2], wherein the group is represented by -4). [4] L 1 The resist composition according to any one of [1] to [3], wherein the resist is a single bond, a chain hydrocarbon group having 1 to 10 carbon atoms which may have substituents (however, the -CH2- contained in the chain hydrocarbon group may be replaced with -O- or -CO-), a cyclic hydrocarbon group having 3 to 24 carbon atoms which may have substituents (however, the -CH2- contained in the cyclic hydrocarbon group may be replaced with -O-, -S-, -CO- or -SO2-), or a group formed by combining a chain hydrocarbon group having 1 to 8 carbon atoms which may have substituents and a cyclic hydrocarbon group having 3 to 24 carbon atoms which may have substituents (however, the -CH2- contained in the chain hydrocarbon group may be replaced with -O- or -CO-, and the -CH2- contained in the cyclic hydrocarbon group may be replaced with -O-, -S-, -SO2- or -CO-). [5] L 1 The resist composition according to any one of [1] to [4], wherein the group is a single bond or a group represented by any of formulas (L1-1) to (L1-4). TIFF0007933518000006.tif59140 [Formula (L1-1) to (L1-4), L 2 This represents a chain hydrocarbon group having 1 to 10 carbon atoms which may have substituents, a cyclic hydrocarbon group having 3 to 24 carbon atoms which may have substituents, or a group formed by combining a cyclic hydrocarbon group having 3 to 24 carbon atoms which may have substituents and a chain hydrocarbon group having 1 to 8 carbon atoms which may have substituents, wherein the -CH2- contained in the cyclic hydrocarbon group may be replaced with -O-, -S-, -CO- or -SO2-, and the -CH2- contained in the chain hydrocarbon group may be replaced with -O- or -CO-. L 3 and L 4 Each of these independently represents a chain hydrocarbon group having 1 to 8 carbon atoms, which may have single bonds or substituents, and the -CH2- contained in the chain hydrocarbon group may be replaced with -O- or -CO-. L 5 and L 6Each of these independently represents a chain hydrocarbon group having 1 to 10 carbon atoms, which may have single bonds or substituents, and the -CH2- contained in the chain hydrocarbon group may be replaced with -O- or -CO-. Ring W3 represents a cyclic hydrocarbon group having 3 to 24 carbon atoms, which may have substituents, and the -CH2- contained in the cyclic hydrocarbon group may be replaced with -O-, -S-, -CO-, or -SO2-. Ring W4 represents a cyclic hydrocarbon group having 3 to 18 carbon atoms, which may have substituents, and the -CH2- contained in the cyclic hydrocarbon group may be replaced with -O-, -S-, -CO-, or -SO2-. X 3 This represents *3-CO-O-, *3-O-CO-, *3-O-CO-O-, or *3-O-. X a and X b These represent either -O- or -S- independently. X 01 represents a hydrocarbon group having 1 to 40 carbon atoms, which may have substituents, and the -CH2- contained in the hydrocarbon group may be replaced with -O-, -S-, -CO-, or -SO2-. R 21 and R 22 Each of these independently represents a halogen atom, a hydroxyl group, a C1-C12 haloalkyl group, or a C1-C12 alkyl group, and the -CH2- contained in the haloalkyl group and the alkyl group may be replaced with -O- or -CO-. m21 represents an integer from 0 to 6, and when m21 is 2 or greater, multiple R 21 They may be identical or different from one another. m22 represents an integer from 0 to 6, and when m22 is 2 or greater, multiple R 22 They may be identical or different from one another. *1 is X 1 *2 represents the bonding site with ring W. *3 represents L 2 This represents the connection point with [the other element]. [6] The resist composition according to any one of [1] to [5], wherein ring W is a group derived from a ring represented by formula (w1-1), a group derived from a ring represented by formula (w1-2), a group derived from a ring represented by formula (w1-3), a group derived from a ring represented by formula (w1-6), or a group derived from a ring represented by formula (w1-15). TIFF0007933518000007.tif2699[In formulas (w1-1), (w1-2), (w1-3), (w1-6), and (w1-15), The -CH2- group may be replaced by -O-, -S-, -CO-, or -SO2-. The bonding site can be at any position. [7] A resist composition according to any one of [1] to [6], wherein m2 is 2 or 3. [8] The resist composition according to any one of [1] to [7], wherein the resin further comprises structural units having acid-unstable groups. [9] The resist composition according to [8], wherein the structural unit having an acid-unstable group is at least one selected from the group consisting of a structural unit represented by formula (a1-0), a structural unit represented by formula (a1-1), and a structural unit represented by formula (a1-2). TIFF0007933518000008.tif44148[In formulas (a1-0), (a1-1), and (a1-2), L a01 , L a1 and L a2 These are, independently, -O- or *-O-(CH2) k1 -CO-O- represents a bond, where k1 is an integer from 1 to 7, and * represents the bond site with -CO-. R a01 , R a4 and R a5 Each of these independently represents a hydrogen atom, a halogen atom, or an alkyl group having 1 to 6 carbon atoms that may contain a halogen atom. R a02 , R a03 and R a04 Each of these independently represents an alkyl group having 1 to 8 carbon atoms, an alicyclic hydrocarbon group having 3 to 18 carbon atoms, an aromatic hydrocarbon group having 6 to 18 carbon atoms, or a group combining these. Ra6 and R a7 Each of these independently represents an alkyl group having 1 to 8 carbon atoms, an alkenyl group having 2 to 8 carbon atoms, an alicyclic hydrocarbon group having 3 to 18 carbon atoms, an aromatic hydrocarbon group having 6 to 18 carbon atoms, or a group formed by a combination of these. m1 represents an integer between 0 and 14. n1 represents an integer between 0 and 10. n1' represents an integer between 0 and 3.

[10] A resist composition according to any one of [1] to [9], further comprising a structural unit represented by formula (a2-A). TIFF0007933518000009.tif4651[In formula (a2-A), R a50 This represents a hydrogen atom, a halogen atom, or an alkyl group having 1 to 6 carbon atoms that may contain a halogen atom. R a51 This represents a halogen atom, a hydroxyl group, a C1-C6 alkyl group, a C1-C6 alkoxy group, a C2-C12 alkoxyalkyl group, a C2-C12 alkoxyalkoxy group, a C2-C4 alkylcarbonyl group, a C2-C4 alkylcarbonyloxy group, an acryloyloxy group, or a methacryloyloxy group. A a50 is a single bond or * -X a51 -(A a52 -X a52 ) nb - represents -R a50 This represents the bonding site with the carbon atom to which it is bonded. A a52 This represents an alkanediyl group with 1 to 6 carbon atoms. X a51 and X a52 These represent -O-, -CO-O-, or -O-CO- independently. nb represents either 0 or 1. mb represents an integer between 0 and 4. If mb is an integer greater than or equal to 2, multiple R a51 They may be the same or different from each other.

[11] A resist composition according to any one of [1] to

[10] , wherein the acid generator comprises a salt represented by formula (B1). TIFF0007933518000010.tif2862[In formula (B1), Q b1 and Q b2 Each of these independently represents a hydrogen atom, a fluorine atom, a perfluoroalkyl group having 1 to 6 carbon atoms, or an alkyl group having 1 to 6 carbon atoms. L b1 This represents a divalent saturated hydrocarbon group having 1 to 24 carbon atoms, and the -CH2- contained in the divalent saturated hydrocarbon group may be replaced with -O- or -CO-, and the hydrogen atom contained in the divalent saturated hydrocarbon group may be substituted with a fluorine atom or a hydroxyl group. Y represents a methyl group which may have substituents or an alicyclic hydrocarbon group having 3 to 24 carbon atoms which may have substituents, and the -CH2- contained in the alicyclic hydrocarbon group may be replaced with -O-, -SO2-, or -CO-. Z1 + This represents an organic cation.

[12] The resist composition according to any one of [1] to

[11] , further comprising a salt that generates an acid with a lower acidity than the acid generated from the acid generator.

[13] (1) A step of applying a resist composition described in any of [1] to

[12] onto a substrate, (2) A step of drying the applied composition to form a composition layer, (3) A step of exposing the composition layer, (4) A step of heating the composition layer after exposure, (5) A step of developing the composition layer after heating, A method for manufacturing a resist pattern that includes [the specified element].

[14] A compound represented by formula (I). TIFF0007933518000011.tif46110 [In formula (I), R 0 This represents an alkyl group having 1 to 6 carbon atoms, which may contain a halogen atom, a hydrogen atom, or a halogen atom. X 1represents *-O-**, *-CO-O-**, *-O-CO-O-** or *-Ax-Ph-Ay-**. Ph represents a phenylene group which may have a substituent. Ax represents one type of bond selected from the group consisting of a single bond, an ether bond, an ester bond and a carbonate ester bond. Ay represents one type of bond selected from the group consisting of a single bond, an ether bond, an ester bond and a carbonate ester bond. * represents the bonding site to the carbon atom to which R 0 is bonded, and ** represents the bonding site to L 1 . L 1 represents a single bond or a hydrocarbon group having 1 to 60 carbon atoms which may have a substituent, and -CH2- contained in the hydrocarbon group may be replaced by -O-, -S-, -SO2- or -CO-. Ring W represents an alicyclic hydrocarbon group having 3 to 36 carbon atoms, and -CH2- contained in the alicyclic hydrocarbon group may be replaced by -O-, -S-, -CO- or -SO2-. R 1 each independently represents a halogen atom, a hydroxy group, a haloalkyl group having 1 to 12 carbon atoms or an alkyl group having 1 to 12 carbon atoms, and -CH2- contained in the haloalkyl group and the alkyl group may be replaced by -O- or -CO-. X 2 represents *-CO-O-, *-O-CO-, *-O-CO-O- or *-O-, and * represents the bonding site to Ring W. L 4 represents a single bond or an alkanediyl group having 1 to 6 carbon atoms, and -CH2- contained in the alkanediyl group may be replaced by -O- or -CO-. R 2 represents a group represented by formula (1a) or a group represented by formula (2a). m1 represents any integer of 0 to 6, and when m1 is 2 or more, a plurality of R 1 may be the same as or different from each other. m2 represents any integer of 2 to 6, and a plurality of X 2 , L4 and R 2 may be the same as or different from each other.] TIFF0007933518000012.tif2161[In formula (1a), R aa1 , R aa2 and R aa3 each independently represent an alkyl group having 1 to 8 carbon atoms, an alkenyl group having 2 to 8 carbon atoms, an alicyclic hydrocarbon group having 3 to 20 carbon atoms, an aromatic hydrocarbon group having 6 to 18 carbon atoms, or a group formed by combining these; or R aa1 and R aa2 are bonded to each other to form an alicyclic hydrocarbon group having 3 to 20 carbon atoms together with the carbon atoms to which they are bonded.] * represents a bonding site.] TIFF0007933518000013.tif2161[In formula (2a), R aa1’ and R aa2’ each independently represent a hydrogen atom or a hydrocarbon group having 1 to 12 carbon atoms, R aa3’ represents a hydrocarbon group having 1 to 20 carbon atoms, or R aa2’ and R aa3’ are bonded to each other to form a heterocyclic group having 3 to 20 carbon atoms together with the -C-X a - to which they are bonded, and -CH2- contained in the hydrocarbon group and the heterocyclic group may be replaced with -O- or -S-.] X a represents an oxygen atom or a sulfur atom.] * represents a bonding site.]

[15] The compound according to

[14] , wherein X 1 is a group represented by any one of formula (X 1 -1) to formula (X 1 -7). TIFF0007933518000014.tif49158[In formula (X 1 -1) to formula (X 1 -7], * and ** are bonding sites, and ** represents the bonding site to L 1 .]

[16] The compound according to

[15] , wherein X 1 is formula (X 1 -1), formula (X 1 -3) or formula (X 1The compound according to claim

[15] , wherein the group is represented by -4).

[17] L 1 The compound according to any one of

[14] to

[16] , wherein the compound is a single bond, a chain hydrocarbon group having 1 to 10 carbon atoms which may have substituents (however, the -CH2- contained in the chain hydrocarbon group may be replaced with -O- or -CO-), a cyclic hydrocarbon group having 3 to 24 carbon atoms which may have substituents (however, the -CH2- contained in the cyclic hydrocarbon group may be replaced with -O-, -S-, -CO- or -SO2-), or a group formed by combining a chain hydrocarbon group having 1 to 8 carbon atoms which may have substituents and a cyclic hydrocarbon group having 3 to 24 carbon atoms which may have substituents (however, the -CH2- contained in the chain hydrocarbon group may be replaced with -O- or -CO-, and the -CH2- contained in the cyclic hydrocarbon group may be replaced with -O-, -S-, -SO2- or -CO-).

[18] L 1 The compound described in any of

[14] to

[17] , wherein the group is represented by a single bond or by any of formulas (L1-1) to (L1-4). TIFF0007933518000015.tif59142 [Formula (L1-1) to (L1-4), L 2 This represents a chain hydrocarbon group having 1 to 10 carbon atoms which may have substituents, a cyclic hydrocarbon group having 3 to 24 carbon atoms which may have substituents, or a group formed by combining a cyclic hydrocarbon group having 3 to 24 carbon atoms which may have substituents and a chain hydrocarbon group having 1 to 8 carbon atoms which may have substituents, wherein the -CH2- contained in the cyclic hydrocarbon group may be replaced with -O-, -S-, -CO- or -SO2-, and the -CH2- contained in the chain hydrocarbon group may be replaced with -O- or -CO-. L 3 and L 4 Each of these independently represents a chain hydrocarbon group having 1 to 8 carbon atoms, which may have single bonds or substituents, and the -CH2- contained in the chain hydrocarbon group may be replaced with -O- or -CO-. L 5 and L 6Each of these independently represents a chain hydrocarbon group having 1 to 10 carbon atoms, which may have single bonds or substituents, and the -CH2- contained in the chain hydrocarbon group may be replaced with -O- or -CO-. Ring W3 represents a cyclic hydrocarbon group having 3 to 24 carbon atoms, which may have substituents, and the -CH2- contained in the cyclic hydrocarbon group may be replaced with -O-, -S-, -CO-, or -SO2-. Ring W4 represents a cyclic hydrocarbon group having 3 to 18 carbon atoms, which may have substituents, and the -CH2- contained in the cyclic hydrocarbon group may be replaced with -O-, -S-, -CO-, or -SO2-. X 3 This represents *3-CO-O-, *3-O-CO-, *3-O-CO-O-, or *3-O-. X a and X b These represent either -O- or -S- independently. X 01 represents a hydrocarbon group having 1 to 40 carbon atoms, which may have substituents, and the -CH2- contained in the hydrocarbon group may be replaced with -O-, -S-, -CO-, or -SO2-. R 21 and R 22 Each of these independently represents a halogen atom, a hydroxyl group, a C1-C12 haloalkyl group, or a C1-C12 alkyl group, and the -CH2- contained in the haloalkyl group and the alkyl group may be replaced with -O- or -CO-. m21 represents an integer from 0 to 6, and when m21 is 2 or greater, multiple R 21 They may be identical or different from one another. m22 represents an integer from 0 to 6, and when m22 is 2 or greater, multiple R 22 They may be identical or different from one another. *1 is X 1 *2 represents the bonding site with ring W. *3 represents L 2 This represents the connection point with [the other element].

[19] A compound according to any of

[14] to

[18] , wherein ring W is a group derived from a ring represented by formula (w1-1), a group derived from a ring represented by formula (w1-2), a group derived from a ring represented by formula (w1-3), a group derived from a ring represented by formula (w1-6), or a group derived from a ring represented by formula (w1-15). TIFF0007933518000016.tif2699[In formulas (w1-1), (w1-2), (w1-3), (w1-6), and (w1-15), The -CH2- group may be replaced by -O-, -S-, -CO-, or -SO2-. The bonding site can be at any position.

[20] A compound according to any of

[14] to

[19] , wherein m2 is 2 or 3. A resin containing structural units derived from any of the compounds described in

[21] ,

[14] , to

[20] .

[22] The resin according to

[21] , further comprising a structural unit having an acid-unstable group.

[23] The resin according to

[22] , wherein the structural unit having an acid-unstable group is at least one selected from the group consisting of a structural unit represented by formula (a1-0), a structural unit represented by formula (a1-1), and a structural unit represented by formula (a1-2). TIFF0007933518000017.tif46150[In formulas (a1-0), (a1-1), and (a1-2), L a01 , L a1 and L a2 These are, independently, -O- or *-O-(CH2) k1 -CO-O- represents a bond, where k1 is an integer from 1 to 7, and * represents the bond site with -CO-. R a01 , R a4 and R a5 Each of these independently represents a hydrogen atom, a halogen atom, or an alkyl group having 1 to 6 carbon atoms that may contain a halogen atom. R a02 , R a03 and R a04Each of these independently represents an alkyl group having 1 to 8 carbon atoms, an alicyclic hydrocarbon group having 3 to 18 carbon atoms, an aromatic hydrocarbon group having 6 to 18 carbon atoms, or a group combining these. R a6 and R a7 Each of these independently represents an alkyl group having 1 to 8 carbon atoms, an alkenyl group having 2 to 8 carbon atoms, an alicyclic hydrocarbon group having 3 to 18 carbon atoms, an aromatic hydrocarbon group having 6 to 18 carbon atoms, or a group formed by a combination of these. m1 represents an integer between 0 and 14. n1 represents an integer between 0 and 10. n1' represents an integer between 0 and 3.

[24] A resin according to any one of

[21] to

[23] , further comprising a structural unit represented by formula (a2-A). TIFF0007933518000018.tif4651[In formula (a2-A), R a50 This represents a hydrogen atom, a halogen atom, or an alkyl group having 1 to 6 carbon atoms that may contain a halogen atom. R a51 This represents a halogen atom, a hydroxyl group, a C1-C6 alkyl group, a C1-C6 alkoxy group, a C2-C12 alkoxyalkyl group, a C2-C12 alkoxyalkoxy group, a C2-C4 alkylcarbonyl group, a C2-C4 alkylcarbonyloxy group, an acryloyloxy group, or a methacryloyloxy group. A a50 is a single bond or * -X a51 -(A a52 -X a52 ) nb - represents -R a50 This represents the bonding site with the carbon atom to which it is bonded. A a52 This represents an alkanediyl group with 1 to 6 carbon atoms. X a51 and X a52 These represent -O-, -CO-O-, or -O-CO- independently. nb represents either 0 or 1. mb represents an integer between 0 and 4. If mb is an integer greater than or equal to 2, multiple R a51 They may be identical or different from one another. [Effects of the Invention]

[0006] By using a resist composition containing a resin that includes structural units derived from the compound of the present invention, a resist pattern with good line edge roughness (LER) can be produced. [Modes for carrying out the invention]

[0007] In this specification, "(meth)acrylic monomer" means "at least one of acrylic monomers and methacrylic monomers." The notations "(meth)acrylate" and "(meth)acrylic acid" have the same meaning. For groups described herein that can take both linear and branched structures, either is acceptable. When a -CH2- contained in a hydrocarbon group, etc., is replaced by -O-, -S-, -CO-, or -SO2-, the same example shall apply to each group. "Combined group" means a group formed by bonding two or more of the exemplified groups, and the valences of these groups may be appropriately changed depending on the bonding configuration. "Derived from" or "derived from" means that a polymerizable C=C bond contained in the molecule becomes a -CC- group through polymerization. If stereoisomers exist, all stereoisomers are included. In this specification, "solid content of the resist composition" means the total amount of the components of the resist composition excluding the solvent (E) described later.

[0008] [Compounds represented by formula (I)] The present invention relates to a compound represented by formula (I) (hereinafter sometimes referred to as "compound (I)"). TIFF0007933518000019.tif51105[In formula (I), all symbols have the same meaning as described above.]

[0009] In equation (I), R 0Examples of alkyl groups include methyl, ethyl, n-propyl, isopropyl, n-butyl, sec-butyl, tert-butyl, n-pentyl, and n-hexyl groups, preferably alkyl groups having 1 to 4 carbon atoms, more preferably alkyl groups having 1 to 3 carbon atoms, and even more preferably methyl or ethyl groups. The number of carbon atoms in the alkyl group is preferably 1 to 4, more preferably 1 to 3, and even more preferably 1 or 2. R 0 Examples of halogen atoms include fluorine, chlorine, bromine, and iodine. R 0 Examples of alkyl groups having halogen atoms include alkyl fluorides, alkyl chlorides, alkyl bromides, and alkyl iodides. Specifically, examples include trifluoromethyl, perfluoroethyl, perfluoropropyl, perfluoroisopropyl, perfluorobutyl, perfluorosec-butyl, perfluorotert-butyl, perfluoropentyl, perfluorohexyl, perchloromethyl, perbromomethyl, and periodomethyl groups. R 0 It is preferably a hydrogen atom, a halogen atom, or a C1-C3 alkyl group which may have a halogen atom, more preferably a hydrogen atom, a methyl group, or an ethyl group, and even more preferably a hydrogen atom or a methyl group.

[0010] In equation (I), X 1 However, if it is *-Ax-Ph-Ay-**, it is preferable that the linking group is represented by the following formula (X10). In formula (X10) of TIFF0007933518000020.tif2844, Ax is R 0 This represents the type of bond that bonds to the carbon atom to which it is bonded, and it represents one type of bond selected from the group consisting of single bonds, ether bonds, ester bonds, and carbonate ester bonds. Ay is L 1 This represents the type of bond that binds to a given element, and is selected from the group consisting of single bonds, ether bonds, ester bonds, and carbonate ester bonds. If either Ax or Ay is a single bond, the other is preferably one selected from the group consisting of ether bonds, ester bonds, and carbonate ester bonds. Rx represents a halogen atom, a hydroxyl group, a C1-C6 alkyl fluoride group, a C1-C18 alkyl group, or a C1-C6 alkoxy group. Among these, a fluorine atom, an iodine atom, a trifluoromethyl group, a methyl group, or an ethyl group is preferred. mx represents an integer between 0 and 4, preferably 0, 1, or 2. If mx is an integer greater than or equal to 2, multiple Rx values ​​may be the same or different from one another. The bonding position of Ay on the phenylene group is preferably at the m-position or p-position relative to the bonding position of Ax, and more preferably at the p-position. X 1 For example, the following equation (X 1 -1), formula (X 1 -2')~expression(X 1 -7') and equation (X 1 The group represented by -8) is an example. 0 This represents the bonding site with the carbon atom to which it is bonded. ** indicates L 1 This represents the connection point. TIFF0007933518000021.tif51155 formula (X 1 -2')~expression(X 1 The following are specific examples of groups represented by -7'): TIFF0007933518000022.tif79122 Among them, X 1 is the equation (X 1 -1)~Formula(X 1 It is preferable that the group is represented by any of the formulas (X 1 -1), formula (X 1 -3), formula (X 1 -4) or formula (X 1 It is more preferable that the group is represented by formula (X 1 -1), formula (X 1 -3) or formula (X 1 It is even more preferable that the group is represented by formula (X 1-1) or formula (X 1 It is even more preferable that the group is represented by (-3). L 1 Examples of hydrocarbon groups in this context include cyclic hydrocarbon groups such as chain hydrocarbon groups, monocyclic or polycyclic (including spiro rings, fused rings, or bridged rings) alicyclic hydrocarbon groups, and aromatic hydrocarbon groups. Groups formed by combining two or more of these groups (for example, hydrocarbon groups formed from an alicyclic hydrocarbon group or an aromatic hydrocarbon group and a chain hydrocarbon group) are also acceptable. The number of carbon atoms in the hydrocarbon group is preferably 1 to 54, more preferably 1 to 48, even more preferably 1 to 42, even more preferably 1 to 38, even more preferably 1 to 36, even more preferably 1 to 32, and even more preferably 1 to 28. Examples of chain-like hydrocarbon groups include divalent chain-like hydrocarbon groups such as alkanediyl groups, alkenediyl groups, and alkynediyl groups. Examples of alkanediyl groups include linear alkanediyl groups such as methylene group, ethylene group, propane-1,3-diyl group, butane-1,4-diyl group, pentane-1,5-diyl group, hexane-1,6-diyl group, heptane-1,7-diyl group, octane-1,8-diyl group, nonane-1,9-diyl group, decane-1,10-diyl group, undecane-1,11-diyl group, dodecane-1,12-diyl group, tridecane-1,13-diyl group, tetradecane-1,14-diyl group, pentadecane-1,15-diyl group, hexadecane-1,16-diyl group and heptadecane-1,17-diyl group, and Examples of branched alkanediyl groups include ethane-1,1-diyl group, propane-1,1-diyl group, propane-1,2-diyl group, propane-2,2-diyl group, pentane-2,4-diyl group, 2-methylpropane-1,3-diyl group, 2-methylpropane-1,2-diyl group, pentane-1,4-diyl group, and 2-methylbutane-1,4-diyl group. Examples of alkenediyl groups include ethendiyl group, propendiyl group, isopropendiyl group, butendiyl group, isobutendiyl group, tert-butendiyl group, pentendiyl group, hexendiyl group, heptendiyl group, octendiyl group, isooctenediyl group, and nonenindiyl group. Examples of alkynediyl groups include ethindiyl group, propindiyl group, isopropindiyl group, butindiyl group, isobutindiyl group, tert-butindiyl group, pentindiyl group, hexindiyl group, octindiyl group, and nonindiyl group. The number of carbon atoms in the chain-like hydrocarbon group is preferably 1 to 18, more preferably 1 to 12, even more preferably 1 to 10, even more preferably 1 to 8, even more preferably 1 to 7, even more preferably 1 to 6, even more preferably 1 to 5, and particularly preferably 1 to 4. Examples of monocyclic or polycyclic alicyclic hydrocarbon groups include the following alicyclic hydrocarbon groups. The bonding site can be at any position. TIFF0007933518000023.tif46168 For example, divalent alicyclic hydrocarbon groups such as cycloalkanediyl groups can be mentioned. Specifically, monocyclic alicyclic hydrocarbon groups such as cycloalkanediyl groups, cyclobutane-1,3-diyl group, cyclopentane-1,3-diyl group, cyclohexane-1,4-diyl group, and cyclooctane-1,5-diyl group, and Examples of polycyclic alicyclic hydrocarbon groups include norbornane-1,4-diyl group, norbornane-2,5-diyl group, adamantane-1,5-diyl group, adamantane-2,6-diyl group, decahydronaphthalenediyl group, and bicyclo[3.3.0]octanediyl group. The number of carbon atoms in the alicyclic hydrocarbon group is preferably 3 to 36, more preferably 3 to 24, even more preferably 3 to 20, even more preferably 3 to 18, even more preferably 3 to 16, and even more preferably 3 to 12. Examples of aromatic hydrocarbon groups include divalent aromatic hydrocarbon groups such as arenediyl groups. Specifically, examples include aromatic hydrocarbon groups such as phenylene groups, naphthylene groups, anthrylene groups, biphenylene groups, and phenanthrylene groups. The number of carbon atoms in the aromatic hydrocarbon group is preferably 3 to 36, more preferably 6 to 24, even more preferably 6 to 20, even more preferably 6 to 18, even more preferably 6 to 14, and even more preferably 6 to 10.

[0011] Examples of groups combining two or more types include groups combining an alicyclic hydrocarbon group and a chain hydrocarbon group, groups combining an aromatic hydrocarbon group and a chain hydrocarbon group, groups combining an alicyclic hydrocarbon group and an aromatic hydrocarbon group, and groups combining an alicyclic hydrocarbon group, a chain hydrocarbon group, and an aromatic hydrocarbon group. In the combinations, two or more types of alicyclic hydrocarbon groups, aromatic hydrocarbon groups, and chain hydrocarbon groups may be combined. Also, any of the groups may be X 1 They may be bound together. Examples of groups combining alicyclic hydrocarbon groups and chain hydrocarbon groups include groups in which an alicyclic hydrocarbon group is bonded to a chain hydrocarbon group (e.g., *-chain hydrocarbon group-alicyclic hydrocarbon group-, etc.), groups in which a chain hydrocarbon group is bonded to an alicyclic hydrocarbon group (e.g., *-alicyclic hydrocarbon group-chain hydrocarbon group-, etc.), groups in which an alicyclic hydrocarbon group and a chain hydrocarbon group are bonded to a chain hydrocarbon group (e.g., *-chain hydrocarbon group-alicyclic hydrocarbon group-chain hydrocarbon group-, etc.), and groups in which an alicyclic hydrocarbon group and a chain hydrocarbon group are bonded to an alicyclic hydrocarbon group. Examples include groups to which a hydrogenated group is bonded (e.g., *-alicyclic hydrocarbon group-chain hydrocarbon group-alicyclic hydrocarbon group-, etc.), groups to which a chain hydrocarbon group is bonded with a chain hydrocarbon group and a chain hydrocarbon group and a chain hydrocarbon group (e.g., *-chain hydrocarbon group-alicyclic hydrocarbon group-chain hydrocarbon group-alicyclic hydrocarbon group-, etc.), and groups to which a chain hydrocarbon group is bonded with a chain hydrocarbon group and a chain hydrocarbon group and a chain hydrocarbon group (e.g., *-alicyclic hydrocarbon group-chain hydrocarbon group-alicyclic hydrocarbon group-chain hydrocarbon group-, etc.). Examples of groups combining aromatic hydrocarbon groups and chain hydrocarbon groups include groups in which an aromatic hydrocarbon group is bonded to a chain hydrocarbon group (e.g., *-chain hydrocarbon group-aromatic hydrocarbon group-, etc.), groups in which a chain hydrocarbon group is bonded to an aromatic hydrocarbon group (e.g., *-aromatic hydrocarbon group-chain hydrocarbon group-, etc.), and groups in which an aromatic hydrocarbon group and a chain hydrocarbon group are bonded to a chain hydrocarbon group (e.g., *-chain hydrocarbon group-aromatic hydrocarbon group-chain hydrocarbon group-, etc.). Groups combining alicyclic hydrocarbon groups and aromatic hydrocarbon groups include groups in which an aromatic hydrocarbon group is bonded to an alicyclic hydrocarbon group (e.g., *-alicyclic hydrocarbon group-aromatic hydrocarbon group-, etc.), groups in which an alicyclic hydrocarbon group is bonded to an aromatic hydrocarbon group (e.g., *-aromatic hydrocarbon group-alicyclic hydrocarbon group-, etc.), and groups in which an alicyclic hydrocarbon group and an aromatic hydrocarbon group are condensed (e.g., the following groups (the bonding site is at any position)). TIFF0007933518000024.tif23165 Examples of groups that combine alicyclic hydrocarbon groups, chain hydrocarbon groups, and aromatic hydrocarbon groups include groups in which an aromatic hydrocarbon group and a chain hydrocarbon group are bonded to an alicyclic hydrocarbon group (for example, *-alicyclic hydrocarbon group-aromatic hydrocarbon group-chain hydrocarbon group-, etc.) and groups in which an alicyclic hydrocarbon group and a chain hydrocarbon group are bonded to an aromatic hydrocarbon group (for example, *-aromatic hydrocarbon group-alicyclic hydrocarbon group-chain hydrocarbon group-, etc.). * is X 1 This represents the connection point. In the case of combined groups or groups with substituents, the above-mentioned groups may include groups with different valencies (alkyl groups, alkanediyl groups, alkanetriyl groups, cycloalkyl groups, cycloalkanediyl groups, cycloalkanetriyl groups, etc.). L 1 The -CH2- group in the hydrocarbon group having 1 to 60 carbon atoms may be replaced with -O-, -S-, -SO2-, or -CO-. L 1 If a -CH2- group in a hydrocarbon group having 1 to 60 carbon atoms is replaced by -O-, -S-, -SO2-, or -CO-, the number of carbon atoms before the replacement shall be considered the number of carbon atoms in the hydrocarbon group. Groups in which the -CH2- contained in a hydrocarbon group is replaced with -O-, -S-, -SO2-, or -CO- include: hydroxyl group (a group in which the -CH2- contained in a methyl group is replaced with -O-), carboxyl group (a group in which the -CH2-CH2- contained in an ethyl group is replaced with -O-CO-), thiol group (a group in which the -CH2- contained in a methyl group is replaced with -S-), and alkoxy group (a group in which the -CH2- at any position in an alkyl group is replaced with -O-). (A split group), alkylthio group (a group in which -CH2- at any position in an alkyl group is replaced with -S-), alkoxycarbonyl group (a group in which -CH2-CH2- at any position in an alkyl group is replaced with -O-CO-), alkylcarbonyl group (a group in which -CH2- at any position in an alkyl group is replaced with -CO-), alkylsulfonyl group (a group in which -CH2- at any position in an alkyl group is replaced with -SO2-), alkylcarbonyloxy group (a group in which -CH2-CH2- at any position in the alkyl group is replaced with -CO-O-), oxy group (a group in which -CH2- in the methylene group is replaced with -O-), carbonyl group (a group in which -CH2- in the methylene group is replaced with -CO-), alkanediyloxy group (a group in which -CH2- at any position in the alkanediyl group is replaced with -O-), alkanediyloxycarbonyl group (a group in which -CH2-CH2- at any position in the alkanediyl group is replaced with -O-CO-), alkanediylcarbonyl group (a group in which -CH2- at any position in the alkanediyl group is replaced with -CO- Examples include groups in which a hydrogen atom of one of these groups is replaced by a carbonyl group, such as an alkanediylcarbonyloxy group (a group in which a -CH2-CH2- at any position in the alkanediyl group is replaced by a -CO-O-), an alkanediylsulfonyl group (a group in which a -CH2- at any position in the alkanediyl group is replaced by a -SO2-), an alkanediylthio group (a group in which a -CH2- at any position in the alkanediyl group is replaced by a -S-), a cycloalkoxy group, a cycloalkylalkoxy group, an alkoxycarbonyloxy group, an aromatic hydrocarbon group-carbonyloxy group, an aromatic hydrocarbon group-carbonyl group, an aromatic hydrocarbon group-oxy group, and groups formed by combining two or more of these groups. Groups in which one or more hydrogen atoms of these groups are replaced by a bond site are also examples.

[0012] Examples of alkoxy groups include alkoxy groups having 1 to 17 carbon atoms, such as methoxy, ethoxy, propoxy, butoxy, pentyloxy, hexyloxy, octyloxy, 2-ethylhexyloxy, nonyloxy, decyloxy, and undecyloxy groups. The number of carbon atoms in the alkoxy group is preferably 1 to 11, more preferably 1 to 6, even more preferably 1 to 4, and even more preferably 1 to 3. Alkoxycarbonyl groups, alkylcarbonyl groups, and alkylcarbonyloxy groups represent groups in which a carbonyl group or carbonyloxy group is bonded to an alkyl group or alkoxy group as described above. Examples of alkoxycarbonyl groups include alkoxycarbonyl groups having 2 to 17 carbon atoms, such as methoxycarbonyl, ethoxycarbonyl, and butoxycarbonyl groups. Examples of alkylcarbonyl groups include alkylcarbonyl groups having 2 to 18 carbon atoms, such as acetyl, propionyl, and butyryl groups. Examples of alkylcarbonyloxy groups include alkylcarbonyloxy groups having 2 to 17 carbon atoms, such as acetyloxy, propionyloxy, and butyryloxy groups. The number of carbon atoms in the alkoxycarbonyl group is preferably 2 to 11, more preferably 2 to 6, even more preferably 2 to 4, and even more preferably 2 or 3. The number of carbon atoms in the alkylcarbonyl group is preferably 2 to 12, more preferably 2 to 6, even more preferably 2 to 4, and even more preferably 2 or 3. The number of carbon atoms in the alkylcarbonyloxy group is preferably 2 to 11, more preferably 2 to 6, even more preferably 2 to 4, and even more preferably 2 or 3. Examples of alkanediyloxy groups include alkanediyloxy groups having 1 to 17 carbon atoms, such as methyleneoxy, ethyleneoxy, propanediyloxy, butanediyloxy, and pentanediyloxy groups. The number of carbon atoms in the alkanediyloxy group is preferably 1 to 11, more preferably 1 to 6, even more preferably 1 to 4, and even more preferably 1 to 3. Examples of alkanediyloxycarbonyl groups include alkanediyloxycarbonyl groups having 2 to 17 carbon atoms, such as methyleneoxycarbonyl groups, ethyleneoxycarbonyl groups, propanediyloxycarbonyl groups, and butanediyloxycarbonyl groups. Examples of alkanediylcarbonyl groups include alkanediylcarbonyl groups having 2 to 18 carbon atoms, such as methylenecarbonyl groups, ethylenecarbonyl groups, propanediylcarbonyl groups, butanediylcarbonyl groups, and pentanediylcarbonyl groups. Examples of alkanediylcarbonyloxy groups include alkanediylcarbonyloxy groups having 2 to 17 carbon atoms, such as methylenecarbonyloxy groups, ethylenecarbonyloxy groups, propanediylcarbonyloxy groups, and butanediylcarbonyloxy groups. The number of carbon atoms in the alkanediyloxycarbonyl group is preferably 2 to 11, more preferably 2 to 6, even more preferably 2 to 4, and even more preferably 2 or 3. The number of carbon atoms in the alkanediylcarbonyl group is preferably 2 to 12, more preferably 2 to 6, even more preferably 2 to 4, and even more preferably 2 or 3. The number of carbon atoms in the alkanediylcarbonyloxy group is preferably 2 to 11, more preferably 2 to 6, even more preferably 2 to 4, and even more preferably 2 or 3. Examples of alkylthio groups include alkylthio groups having 1 to 17 carbon atoms, such as methylthio groups, ethylthio groups, propylthio groups, and butylthio groups. The number of carbon atoms in the alkylthio group is preferably 1 to 11, more preferably 1 to 6, even more preferably 1 to 4, and even more preferably 1 to 3. Examples of alkylsulfonyl groups include alkylsulfonyl groups having 1 to 17 carbon atoms, such as methylsulfonyl groups, ethylsulfonyl groups, and propylsulfonyl groups. The number of carbon atoms in the alkylsulfonyl group is preferably 1 to 11, more preferably 1 to 6, even more preferably 1 to 4, and even more preferably 1 to 3. Examples of alkanediylsulfonyl groups include alkanediylsulfonyl groups having 1 to 17 carbon atoms, such as methylenesulfonyl groups, ethylenesulfonyl groups, and propylenesulfonyl groups. The number of carbon atoms in the alkanediylsulfonyl group is preferably 1 to 11, more preferably 1 to 6, even more preferably 1 to 4, and even more preferably 1 to 3. Examples of alkanediylthio groups include alkanediylthio groups having 1 to 17 carbon atoms, such as methylenethio groups, ethylenethio groups, and propylenethio groups. The number of carbon atoms in the alkanediylthio group is preferably 1 to 11, more preferably 1 to 6, even more preferably 1 to 4, and even more preferably 1 to 3. Examples of cycloalkoxy groups include cycloalkoxy groups having 3 to 17 carbon atoms, such as the cyclohexyloxy group. Examples of cycloalkylalkoxy groups include cycloalkylalkoxy groups having 4 to 17 carbon atoms, such as the cyclohexylmethoxy group. Examples of alkoxycarbonyloxy groups include alkoxycarbonyloxy groups having 2 to 16 carbon atoms, such as the butoxycarbonyloxy group. Examples of aromatic hydrocarbon group-carbonyloxy groups include aromatic hydrocarbon group-carbonyloxy groups having 7 to 17 carbon atoms, such as the benzoyloxy group. Examples of aromatic hydrocarbon group-carbonyl groups include aromatic hydrocarbon group-carbonyl groups having 7 to 17 carbon atoms, such as the benzoyl group. Examples of aromatic hydrocarbon group-oxy groups include aromatic hydrocarbon group-oxy groups having 6 to 16 carbon atoms, such as the phenyloxy group. Furthermore, the following groups are examples of groups in which the -CH2- contained in an alicyclic hydrocarbon group is replaced with -O-, -S-, -CO-, or -SO2-. The -O- or -CO- in the groups shown below may be replaced with -S- or -SO2-, respectively. The bonding site can be at any position. TIFF0007933518000025.tif46168 Examples of groups in which the -CH2- contained in the combined group is replaced with -O-, -S-, -CO-, or -SO2- include the following groups. The bonding site can be at any position. TIFF0007933518000026.tif36165

[0013] L 1 Substituents that may be present include hydroxyl groups, carboxyl groups, halogen atoms, cyano groups, C1-C12 alkyl groups, C1-C12 alkoxy groups, C2-C13 alkoxycarbonyl groups, C2-C13 alkylcarbonyl groups, C2-C13 alkylcarbonyloxy groups, or groups combining these. Examples of halogen atoms include fluorine, chlorine, bromine, and iodine atoms. Examples of alkyl groups having 1 to 12 carbon atoms include methyl, ethyl, propyl, isopropyl, butyl, isobutyl, tert-butyl, pentyl, hexyl, octyl, and nonyl groups. Examples of alkoxy groups having 1 to 12 carbon atoms include methoxy, ethoxy, propoxy, butoxy, pentyloxy, hexyloxy, octyloxy, 2-ethylhexyloxy, nonyloxy, decyloxy, undecyloxy, and dodecyloxy groups. The alkoxycarbonyl groups having 2 to 13 carbon atoms, the alkylcarbonyl groups having 2 to 13 carbon atoms, and the alkylcarbonyloxy groups having 2 to 13 carbon atoms represent groups in which a carbonyl group or carbonyloxy group is bonded to the alkyl or alkoxy group described above. Examples of alkoxycarbonyl groups having 2 to 13 carbon atoms include methoxycarbonyl, ethoxycarbonyl, and butoxycarbonyl groups. Examples of alkylcarbonyl groups having 2 to 13 carbon atoms include acetyl, propionyl, and butyryl groups. Examples of alkylcarbonyloxy groups having 2 to 13 carbon atoms include acetyloxy, propionyloxy, and butyryloxy groups. The substituent is preferably an alkyl group having 1 to 4 carbon atoms, a hydroxyl group, a halogen atom, or a group combining these.

[0014] L 1This refers to a single bond, a chain hydrocarbon group having 1 to 10 carbon atoms which may have substituents (however, the -CH2- contained in the chain hydrocarbon group may be replaced with -O- or -CO-), a cyclic hydrocarbon group having 3 to 24 carbon atoms which may have substituents (however, the -CH2- contained in the cyclic hydrocarbon group may be replaced with -O-, -S-, -CO- or -SO2-), or a group formed by combining a chain hydrocarbon group having 1 to 8 carbon atoms which may have substituents and a cyclic hydrocarbon group having 3 to 24 carbon atoms which may have substituents (however, the -CH2- contained in the chain hydrocarbon group may be replaced with -O-, -S-, -CO- or -SO2-). - may be replaced by -O- or -CO-, and the -CH2- contained in the cyclic hydrocarbon group may be replaced by -O-, -S-, -SO2- or -CO-.) Preferably, a single bond, a chain hydrocarbon group having 1 to 8 carbon atoms which may have substituents (however, the -CH2- contained in the chain hydrocarbon group may be replaced by -O- or -CO-), a cyclic hydrocarbon group having 3 to 20 carbon atoms which may have substituents (however, the -CH2- contained in the cyclic hydrocarbon group may be replaced by -O-, -S-, -CO- or -SO2-). . ) or a group formed by combining a chain hydrocarbon group having 1 to 6 carbon atoms which may have substituents and a cyclic hydrocarbon group having 3 to 20 carbon atoms which may have substituents (however, the -CH2- contained in the chain hydrocarbon group may be replaced with -O- or -CO-, and the -CH2- contained in the cyclic hydrocarbon group may be replaced with -O-, -S-, -SO2- or -CO-), more preferably a single bond, or a chain hydrocarbon group having 1 to 7 carbon atoms which may have substituents (however, the -CH2- contained in the chain hydrocarbon group may be replaced with -O- or -CO-) It is more preferable that the group is a cyclic hydrocarbon group having 3 to 18 carbon atoms that may have substituents (however, the -CH2- contained in the cyclic hydrocarbon group may be replaced with -O- or -CO-), or a group formed by combining a chain hydrocarbon group having 1 to 5 carbon atoms that may have substituents and a cyclic hydrocarbon group having 3 to 18 carbon atoms that may have substituents (however, the -CH2- contained in the chain hydrocarbon group may be replaced with -O- or -CO-, and the -CH2- contained in the cyclic hydrocarbon group may be replaced with -O- or -CO-). Also, L1 It is also preferable that the group be a single bond or a group represented by any of the formulas (L1-1) to (L1-4). TIFF0007933518000027.tif59140[Formula (L1-1) to (L1-4), L 2 This represents a chain hydrocarbon group having 1 to 10 carbon atoms which may have substituents, a cyclic hydrocarbon group having 3 to 24 carbon atoms which may have substituents, or a group formed by combining a cyclic hydrocarbon group having 3 to 24 carbon atoms which may have substituents and a chain hydrocarbon group having 1 to 8 carbon atoms which may have substituents, wherein the -CH2- contained in the cyclic hydrocarbon group may be replaced with -O-, -S-, -CO- or -SO2-, and the -CH2- contained in the chain hydrocarbon group may be replaced with -O- or -CO-. L 3 and L 4 Each of these independently represents a chain hydrocarbon group having 1 to 8 carbon atoms, which may have single bonds or substituents, and the -CH2- contained in the chain hydrocarbon group may be replaced with -O- or -CO-. L 5 and L 6 Each of these independently represents a chain hydrocarbon group having 1 to 10 carbon atoms, which may have single bonds or substituents, and the -CH2- contained in the chain hydrocarbon group may be replaced with -O- or -CO-. Ring W3 represents a cyclic hydrocarbon group having 3 to 24 carbon atoms, which may have substituents, and the -CH2- contained in the cyclic hydrocarbon group may be replaced with -O-, -S-, -CO-, or -SO2-. Ring W4 represents a cyclic hydrocarbon group having 3 to 18 carbon atoms, which may have substituents, and the -CH2- contained in the cyclic hydrocarbon group may be replaced with -O-, -S-, -CO-, or -SO2-. X 3 This represents *3-CO-O-, *3-O-CO-, *3-O-CO-O-, or *3-O-. X a and X b These represent either -O- or -S- independently. X 01represents a hydrocarbon group having 1 to 40 carbon atoms, which may have substituents, and the -CH2- contained in the hydrocarbon group may be replaced with -O-, -S-, -CO-, or -SO2-. R 21 and R 22 Each of these independently represents a halogen atom, a hydroxyl group, a C1-C12 haloalkyl group, or a C1-C12 alkyl group, and the -CH2- contained in the haloalkyl group and the alkyl group may be replaced with -O- or -CO-. m21 represents an integer from 0 to 6, and when m21 is 2 or greater, multiple R 21 They may be identical or different from one another. m22 represents an integer from 0 to 6, and when m22 is 2 or greater, multiple R 22 They may be identical or different from one another. *1 is X 1 *2 represents the bonding site with ring W. *3 represents L 2 This represents the connection point with [the other element]. The total number of carbon atoms in the groups represented by formulas (L1-1) to (L1-4) (excluding substituents) is 60 or less. The combinations of chain hydrocarbon groups and cyclic hydrocarbon groups used here include: *-chain hydrocarbon group-alicyclic hydrocarbon group or aromatic hydrocarbon group-, *-alicyclic hydrocarbon group or aromatic hydrocarbon group-chain hydrocarbon group-, *-chain hydrocarbon group-alicyclic hydrocarbon group or aromatic hydrocarbon group-chain hydrocarbon group-, *-alicyclic hydrocarbon group or aromatic hydrocarbon group-chain hydrocarbon group-alicyclic hydrocarbon group or aromatic hydrocarbon group-, *-chain hydrocarbon group-group formed by the condensation of an alicyclic hydrocarbon group and an aromatic hydrocarbon group-, *-group formed by the condensation of an alicyclic hydrocarbon group and an aromatic hydrocarbon group-chain hydrocarbon group-, *-chain hydrocarbon group-group formed by the condensation of an alicyclic hydrocarbon group and an aromatic hydrocarbon group-chain hydrocarbon group-, etc. * represents X 1 This represents the connection point.

[0015] The substituents that each group may have are L 1 The substituents that may be present are similar to those listed above. L2 Examples of cyclic hydrocarbon groups include alicyclic hydrocarbon groups, aromatic hydrocarbon groups, or groups formed by the condensation of these, L 1 Examples similar to the bases exemplified above can be given. L 2 As for the chain-like hydrocarbon group, L 1 Examples similar to the bases exemplified above can be given. Among them, L 2 Preferably, the derivative is a chain hydrocarbon group having 1 to 8 carbon atoms that may have substituents (the -CH2- contained in the chain hydrocarbon group may be replaced with -O- or -CO-), a cyclic hydrocarbon group having 3 to 20 carbon atoms that may have substituents (the -CH2- contained in the cyclic hydrocarbon group may be replaced with -O-, -S-, -CO- or -SO2-), or a group formed by combining a cyclic hydrocarbon group having 3 to 20 carbon atoms that may have substituents and a chain hydrocarbon group having 1 to 6 carbon atoms that may have substituents (the -CH2- contained in the cyclic hydrocarbon group may be replaced with -O-, -S-, -CO- or -SO2-, and the -CH2- contained in the chain hydrocarbon group may be replaced with -O- or -CO-). More preferably are groups consisting of a cyclic hydrocarbon group having 3 to 18 carbon atoms (where -CH2- is replaced by -O-, -S-, -CO-, or -SO2-), which may have substituents (where -CH2- in the cyclic hydrocarbon group may be replaced by -O-, -S-, -CO-, or -SO2-), or a combination of a cyclic hydrocarbon group having 3 to 18 carbon atoms (where -CH2- is replaced by -O-, -S-, -CO-, or -SO2-), which may have substituents, and a chain hydrocarbon group having 1 to 4 carbon atoms (where -CH2- in the cyclic hydrocarbon group may be replaced by -O-, -S-, -CO-, or -SO2-, and where -CH2- in the chain hydrocarbon group may be replaced by -O-, or -CO-), and even more preferably a chain hydrocarbon group having 1 to 5 carbon atoms (where at least one of the -CH2- in the chain hydrocarbon group is replaced by -O- or -CO-), or a group represented by any of the following: * represents a bonding site. TIFF0007933518000028.tif89168L 3 , L 4, L 5 and L 6 As for the chain-like hydrocarbon group, L 1 Examples similar to the bases exemplified above can be given. Among them, L 3 The carbon group is preferably a chain hydrocarbon group having 1 to 6 carbon atoms, which may have single bonds or substituents; more preferably a chain hydrocarbon group having 1 to 4 carbon atoms, even more preferably a single bond, a methylene group, or an ethylene group; and even more preferably a single bond or a methylene group. L 4 The carbon group is preferably a chain hydrocarbon group having 1 to 6 carbon atoms, which may have single bonds or substituents; more preferably a chain hydrocarbon group having 1 to 4 carbon atoms, even more preferably a single bond, a methylene group, or an ethylene group; and even more preferably a single bond or a methylene group. L 5 Preferably, the group is a single bond or a chain hydrocarbon group having 1 to 8 carbon atoms (where the -CH2- contained in the chain hydrocarbon group may be replaced with -O- or -CO-), more preferably a single bond or a chain hydrocarbon group having 1 to 6 carbon atoms (where the -CH2- contained in the chain hydrocarbon group may be replaced with -O- or -CO-), and even more preferably a single bond or a chain hydrocarbon group having 1 to 4 carbon atoms (where the -CH2- contained in the chain hydrocarbon group may be replaced with -O- or -CO-). L 6 Preferably, the group is a single bond or a chain hydrocarbon group having 1 to 8 carbon atoms (where the -CH2- contained in the chain hydrocarbon group may be replaced with -O- or -CO-), more preferably a single bond or a chain hydrocarbon group having 1 to 6 carbon atoms (where the -CH2- contained in the chain hydrocarbon group may be replaced with -O- or -CO-), and even more preferably a single bond or a chain hydrocarbon group having 1 to 4 carbon atoms (where the -CH2- contained in the chain hydrocarbon group may be replaced with -O- or -CO-).

[0016] Examples of cyclic hydrocarbon groups in rings W3 and W4 include alicyclic hydrocarbon groups, aromatic hydrocarbon groups, or groups obtained by condensing these, L 1 Examples similar to the bases exemplified above can be given. Examples of alicyclic hydrocarbon groups include trivalent alicyclic hydrocarbon groups such as cycloalkanetriyl groups. Specifically, examples include monocyclic alicyclic hydrocarbon groups such as cyclopropanetriyl, cyclobutanetriyl, cyclopentanetriyl, cyclohexanetriyl, cycloheptanetriyl, cyclooctanetriyl, and cyclodecanetriyl groups, as well as polycyclic alicyclic hydrocarbon groups such as norbornanetriyl, adamantanetriyl, decahydronaphthalentriyl, and bicyclo[3.3.0]octanetriyl groups. Examples of aromatic hydrocarbon groups include trivalent aromatic hydrocarbon groups such as arenetriyl groups. Specifically, examples include aromatic hydrocarbon groups such as benzenetriyl groups, naphthalentriyl groups, anthracenatetriyl groups, biphenylentriyl groups, and phenanthrentriyl groups. Ring W3 is connected to Ring W4 and X a and X b and X 01 It can also be represented as a ring containing and . Examples of rings W3 and W4 include groups derived from the following rings. TIFF0007933518000029.tif74161 [Formula (w1-1) to formula (w1-26), The group may have substituents, and the -CH2- contained in the group may be replaced with -O-, -S-, -CO-, or -SO2-. The bonding site is at any position. Here, a ring-derived group means a group that has a bonding site at any position in the ring, and in which the -CH2- contained in the ring may be replaced by -O-, -S-, -CO-, or -SO2-. Ring W3 is preferably a cyclic hydrocarbon group having 3 to 20 carbon atoms, which may have substituents (the -CH2- contained in the cyclic hydrocarbon group may be replaced with -O-, -S-, -CO-, or -SO2-), more preferably a group derived from a ring represented by any of formulas (w1-1) to (w1-26), even more preferably a group derived from a ring represented by any of formulas (w1-1) to (w1-3), (w1-6), (w1-12) to (w1-18), and (w1-22) to (w1-26), and still more preferably a group derived from a ring represented by any of formulas (w1-1), (w1-2), (w1-13), (w1-15) to (w1-18), (w1-22), (w1-24), and (w1-26). Ring W4 is preferably an alicyclic hydrocarbon group having 3 to 18 carbon atoms, which may have substituents (the -CH2- contained in the alicyclic hydrocarbon group may be replaced with -O-, -S-, -CO-, or -SO2-), more preferably a group derived from a ring represented by any of formulas (w1-1) to (w1-21), even more preferably a group derived from a ring represented by formula (w1-1), formula (w1-2), formula (w1-3), or formula (w1-6), and even more preferably a group derived from a ring represented by formula (w1-1) or formula (w1-2).

[0017] X 01 Examples of hydrocarbon groups include cyclic hydrocarbon groups such as chain hydrocarbon groups, alicyclic hydrocarbon groups, and aromatic hydrocarbon groups, and may also be a group formed by combining two or more of these groups. 1 Examples similar to the bases exemplified above can be given. Examples of chain-like hydrocarbon groups include trivalent chain-like hydrocarbon groups such as alkanetriyl groups, alkenetriyl groups, and alkyntriyl groups. Examples of alkanetriyl groups include methanetriyl, ethanetriyl, propanetriyl, butanetriyl, pentanetriyl, hexanetriyl, heptanetriyl, octantriyl, nonanetriyl, decantriyl, undecanetriyl, dodecanetriyl, tridecanetriyl, tetradecanetriyl, pentadecanetriyl, hexadecantriyl, and heptadecantriyl. Examples of alkenetriyl groups include ethentriyl group, propentriyl group, isopropentriyl group, butentriyl group, isobutentriyl group, tert-butentriyl group, pententriyl group, hexentriyl group, heptentriyl group, octentriyl group, isooctentriyl group, and nonenintriyl group. Examples of alkynetriyl groups include ethintriyl group, propynetriyl group, isopropynetriyl group, butyntriyl group, isobutyntriyl group, tert-butyntriyl group, pentintriyl group, hexyntriyl group, octintriyl group, and noninetriyl group. Examples of alicyclic hydrocarbon groups include trivalent alicyclic hydrocarbon groups such as cycloalkanetriyl groups, which are the same as the groups exemplified in rings W3 and W4. Examples of aromatic hydrocarbon groups include trivalent aromatic hydrocarbon groups such as arenetriyl groups, which are the same as the groups exemplified in rings W3 and W4. X 01 For example, the following equation (X 1 -1), formula (X 1 -3), formula (X 1 -5)~Formula(X 1 -7) and formula (X 1 -12)~Formula(X 1 One example is the base represented by equation (X 1 -1), formula (X 1 -3), formula (X 1 -5)~Formula(X 1 -7), formula (X 1 -12) and formula (X 1 It is preferable that the group is represented by any of the formulas (X -13), and is represented by formula (X 1 -1), formula (X 1 -3) and equation (X 1 -5)~Formula(X 1 It is more preferable that the group be one of the groups represented by -7). * represents a binding site, and any * is X a and X b They may be bound together. TIFF0007933518000030.tif54155[Formula(X1 -1), formula (X 1 -3), formula (X 1 -5)~Formula(X 1 -7) and formula (X 1 -12)~Formula(X 1 -15) Middle, L 11 represents a hydrocarbon group having 1 to 18 carbon atoms, which may have single bonds or substituents, and the -CH2- contained in the hydrocarbon group may be replaced with -O-, -S-, -SO2-, or -CO-. * indicates a joining site. The total number of carbon atoms in each of the above groups (excluding substituents) is 40 or less. L 11 Examples of hydrocarbon groups include cyclic hydrocarbon groups such as chain hydrocarbon groups, alicyclic hydrocarbon groups, and aromatic hydrocarbon groups, and may also be a group formed by combining two or more of these groups. 1 Examples similar to the bases exemplified above can be given. L 11 Preferably, the group is a single bond, a chain hydrocarbon group having 1 to 8 carbon atoms which may have substituents, a cyclic hydrocarbon group having 3 to 12 carbon atoms which may have substituents, or a group formed by combining a cyclic hydrocarbon group having 3 to 12 carbon atoms which may have substituents and a chain hydrocarbon group having 1 to 6 carbon atoms which may have substituents (the -CH2- contained in the cyclic hydrocarbon group may be replaced with -O-, -S-, -CO- or -SO2-, and the -CH2- contained in the chain hydrocarbon group may be replaced with -O- or -CO-).

[0018] X 01 Among them, equation (X 2 -1), formula (X 2 -3), formula (X 2 -5)~Formula(X 2 -7), formula (X 2 -21), formula (X 2 -23) and formula (X 2 It is more preferable that the group be one of the groups represented by -25). TIFF0007933518000031.tif54153[Formula(X 2 -1), formula (X 2-3), formula (X 2 -5)~Formula(X 2 -7), formula (X 2 -21), formula (X 2 -23) and formula (X 2 -25) Medium, * indicates a joining site.

[0019] X 3 *3-CO-O-, *3-O-CO-, or *3-O-CO-O- are preferred. X a and X b It is preferable that they are the same atom, and more preferably that they are both oxygen atoms. R 21 and R 22 The halogen atoms, haloalkyl groups, and alkyl groups are R 1 Examples similar to the bases exemplified below can be given. R 21 and R 22 Preferably, the element is a halogen atom, a hydroxyl group, a C1-C6 haloalkyl group, or a C1-C6 alkyl group (the -CH2- contained in the haloalkyl group and the alkyl group may be replaced with -O- or -CO-). m21 is preferably an integer between 0 and 3, more preferably 0, 1, or 2, and even more preferably 0 or 1. m22 is preferably an integer between 0 and 3, more preferably 0, 1, or 2, and even more preferably 0 or 1.

[0020] The alicyclic hydrocarbon group in ring W may be monocyclic or polycyclic (including spiro rings, fused rings, or bridged rings), and may be saturated or unsaturated. Examples of alicyclic hydrocarbon groups include the following. The bonding site can be at any position. TIFF0007933518000032.tif46168 For example, 3- to 7-valent alicyclic hydrocarbon groups such as cycloalkanetriyl groups, cycloalkanetetrayl groups, cycloalkanepentile groups, cycloalkanehexile groups, and cycloalkaneheptile groups are examples. Specifically, examples of monocyclic alicyclic hydrocarbon groups include cyclopropanetriyl, cyclobutanetriyl, cyclopentanetriyl, cyclohexanetriyl, cycloheptanetriyl, cyclooctanetriyl, cyclodecanetriyl, cyclopropanetetrayl, cyclobutanetetrayl, cyclopentanetetrayl, cyclohexanetetrayl, cycloheptanetetrayl, cyclooctanetetrayl, and cyclodecanetetrayl. Examples of polycyclic alicyclic hydrocarbon groups include decahydronaphthalenetriyl, adamantanetriyl, norbornanetriyl, bicyclo[3.3.0]octanetriyl, decahydronaphthalenetetrayl, adamantanetetrayl, norbornanetetrayl, and bicyclo[3.3.0]octanetetrayl. Other examples include groups in which one or more hydrogen atoms of the aforementioned group are replaced by bonding sites. The following are examples of groups in which the -CH2- group in an alicyclic hydrocarbon group is replaced with -O-, -S-, -CO-, or -SO2-. The -O- or -CO- in the groups shown below may be replaced with -S- or -SO2-. The bonding site can be at any position. TIFF0007933518000033.tif46168 The number of carbon atoms in the alicyclic hydrocarbon group is preferably 3 to 24, more preferably 3 to 20, even more preferably 3 to 18, even more preferably 3 to 16, and even more preferably 3 to 12. Ring W is preferably an alicyclic hydrocarbon group having 3 to 20 carbon atoms (the -CH2- contained in the alicyclic hydrocarbon group may be replaced with -O-, -S-, -CO-, or -SO2-), more preferably an alicyclic hydrocarbon group having 3 to 18 carbon atoms (the -CH2- contained in the alicyclic hydrocarbon group may be replaced with -O-, -S-, -CO-, or -SO2-), even more preferably a group derived from a ring represented by any of formulas (w1-1) to (w1-21), even more preferably a group derived from a ring represented by formula (w1-1), a group derived from a ring represented by formula (w1-2), a group derived from a ring represented by formula (w1-3), a group derived from a ring represented by formula (w1-6), or a group derived from a ring represented by formula (w1-15), and even more preferably a group derived from a ring represented by formula (w1-1) or a group derived from a ring represented by formula (w1-2). TIFF0007933518000034.tif49165 [Formula (w1-1) to formula (w1-21), The -CH2- group may be replaced by -O-, -S-, -CO-, or -SO2-. The bonding site can be at any position. Here, a ring-derived group means a group that has a bonding site at any position in the ring, and in which the -CH2- contained in the ring may be replaced by -O-, -S-, -CO-, or -SO2-.

[0021] R 1 Examples of halogen atoms include fluorine, chlorine, bromine, and iodine atoms. R 1In this context, a C1-C12 haloalkyl group refers to an alkyl group having a halogen atom and having C1-C12 atoms, such as a C1-C12 fluoride alkyl group, a C1-C12 chloride alkyl group, a C1-C12 bromide alkyl group, or a C1-C12 iodide alkyl group. Examples of haloalkyl groups include C1-C12 perfluoroalkyl groups (trifluoromethyl group, pentafluoroethyl group, heptafluoropropyl group, nonafluorobutyl group, etc.), 2,2,2-trifluoroethyl group, 3,3,3-trifluoropropyl group, 4,4,4-trifluorobutyl group, and 3,3,4,4,4-pentafluorobutyl group, chloromethyl group, bromomethyl group, and iodomethyl group. The number of carbon atoms in the haloalkyl group is preferably 1-9, more preferably 1-6, even more preferably 1-4, and even more preferably 1-3. R 1 Examples of alkyl groups having 1 to 12 carbon atoms include methyl, ethyl, propyl, isopropyl, butyl, isobutyl, tert-butyl, pentyl, hexyl, octyl, and nonyl groups. The number of carbon atoms in the alkyl group is preferably 1 to 9, more preferably 1 to 6, even more preferably 1 to 4, and even more preferably 1 to 3. R 1If a haloalkyl group or an alkyl group represented by is replaced with -O- or -CO-, the number of carbon atoms before replacement shall be the total number of carbon atoms in the haloalkyl group or alkyl group. The replaced groups include: hydroxyl group (a group in which a -CH2- contained in a methyl group is replaced with -O-), carboxyl group (a group in which a -CH2-CH2- contained in an ethyl group is replaced with -O-CO-), alkoxy group (a group in which a -CH2- at any position in an alkyl group is replaced with -O-), alkoxycarbonyl group (a group in which a -CH2-CH2- at any position in an alkyl group is replaced with -O-CO-), alkylcarbonyl group (a group in which a -CH2- at any position in an alkyl group is replaced with -CO-), and alkylcarbonyloxy group (a group in which a -C at any position in an alkyl group is replaced with -O-). Examples include groups in which H2-CH2- is replaced by -CO-O-, haloalkoxy groups (groups in which -CH2- at any position within a haloalkyl group is replaced by -O-), haloalkoxycarbonyl groups (groups in which -CH2-CH2- at any position within a haloalkyl group is replaced by -O-CO-), haloalkylcarbonyl groups (groups in which -CH2- at any position within a haloalkyl group is replaced by -CO-), haloalkylcarbonyloxy groups (groups in which -CH2-CH2- at any position within a haloalkyl group is replaced by -CO-O-), and groups that combine two or more of these groups. Examples of alkoxy groups include alkoxy groups having 1 to 11 carbon atoms, such as methoxy, ethoxy, propoxy, butoxy, pentyloxy, hexyloxy, octyloxy, 2-ethylhexyloxy, nonyloxy, decyloxy, and undecyloxy groups. The number of carbon atoms in the alkoxy group is preferably 1 to 6, more preferably 1 to 4, and even more preferably 1 to 3. Alkoxycarbonyl groups, alkylcarbonyl groups, and alkylcarbonyloxy groups represent groups in which a carbonyl group or carbonyloxy group is bonded to an alkyl group or alkoxy group as described above. Examples of alkoxycarbonyl groups include alkoxycarbonyl groups having 2 to 11 carbon atoms, such as methoxycarbonyl, ethoxycarbonyl, and butoxycarbonyl groups. Examples of alkylcarbonyl groups include alkylcarbonyl groups having 2 to 12 carbon atoms, such as acetyl, propionyl, and butyryl groups. Examples of alkylcarbonyloxy groups include alkylcarbonyloxy groups having 2 to 11 carbon atoms, such as acetyloxy, propionyloxy, and butyryloxy groups. The number of carbon atoms in the alkoxycarbonyl group is preferably 2 to 6, more preferably 2 to 4, and even more preferably 2 or 3. The number of carbon atoms in the alkylcarbonyl group is preferably 2 to 6, more preferably 2 to 4, and even more preferably 2 or 3. The number of carbon atoms in the alkylcarbonyloxy group is preferably 2 to 6, more preferably 2 to 4, and even more preferably 2 or 3. Examples of haloalkoxy groups, haloalkoxycarbonyl groups, haloalkylcarbonyl groups, and haloalkylcarbonyloxy groups include haloalkoxy groups having 1 to 11 carbon atoms, haloalkoxycarbonyl groups having 2 to 11 carbon atoms, haloalkylcarbonyl groups having 2 to 12 carbon atoms, and haloalkylcarbonyloxy groups having 2 to 11 carbon atoms. For example, groups obtained by replacing one or more hydrogen atoms of the above-mentioned groups with halogen atoms are also included. R 1 The C1-C4 alkyl group is preferably a hydroxyl group, a C1-C6 haloalkyl group, or a C1-C6 alkyl group (the C1-C4 alkyl group and the C1-C4 alkyl group may be replaced with C2- or C3-), more preferably a hydroxyl group, a C1-C4 alkyl group, a C1-C4 haloalkyl group, or a C1-C3 alkoxy group, even more preferably a hydroxyl group or a C1-C3 alkoxy group, and even more preferably a hydroxyl group. m1 is preferably an integer from 0 to 5, more preferably an integer from 0 to 4, even more preferably an integer from 0 to 3, even more preferably 0, 1, or 2, and even more preferably 0 or 1.

[0022] X 2 It is preferably *-CO-O-, *-O-CO-O-, or *-O-, and more preferably *-CO-O- or *-O- (* represents the bonding site with ring W). L 4 The alkanediyl groups in this include linear alkanediyl groups such as methylene group, ethylene group, propane-1,3-diyl group, butane-1,4-diyl group, pentane-1,5-diyl group, and hexane-1,6-diyl group; and Examples of branched alkanediyl groups include ethane-1,1-diyl group, propane-1,1-diyl group, propane-1,2-diyl group, propane-2,2-diyl group, pentane-2,4-diyl group, 2-methylpropane-1,3-diyl group, 2-methylpropane-1,2-diyl group, pentane-1,4-diyl group, and 2-methylbutane-1,4-diyl group. The number of carbon atoms in the alkanediyl group is preferably 1 to 4, and more preferably 1 to 3. L 4 The -CH2- group in the alkanediyl group may be replaced with -O- or -CO-. L 4If the -CH2- contained in the alkanediyl group is replaced with -O- or -CO-, the number of carbon atoms before the replacement shall be the number of carbon atoms in the alkanediyl group. Examples of replaced groups include: hydroxyl group (a group in which the -CH2- contained in the methyl group is replaced with -O-), carboxyl group (a group in which the -CH2-CH2- contained in the ethyl group is replaced with -O-CO-), alkoxy group (a group in which the -CH2- at any position in the alkyl group is replaced with -O-), alkoxycarbonyl group (a group in which the -CH2-CH2- at any position in the alkyl group is replaced with -O-CO-), alkylcarbonyl group (a group in which the -CH2- at any position in the alkyl group is replaced with -CO-), alkylcarbonyloxy group (a group in which the -CH2-CH2- at any position in the alkyl group is replaced with -CO-O-), and oxy group (a group in which the -CH2- contained in the methylene group is replaced with -O-). Examples include groups in which -2- is replaced by -O-, carbonyl groups (groups in which -CH2- contained in a methylene group is replaced by -CO-), alkanediyloxy groups (groups in which -CH2- at any position in an alkanediyl group is replaced by -O-), alkanediyloxycarbonyl groups (groups in which -CH2-CH2- at any position in an alkanediyl group is replaced by -O-CO-), alkanediylcarbonyl groups (groups in which -CH2- at any position in an alkanediyl group is replaced by -CO-), alkanediylcarbonyloxy groups (groups in which -CH2-CH2- at any position in an alkanediyl group is replaced by -CO-O-), and groups that combine two or more of these groups. Examples of alkoxy groups include methoxy, ethoxy, propoxy, butoxy, and pentyloxy groups. The number of carbon atoms in the alkoxy group is preferably 1 to 4, and more preferably 1 to 3. Alkoxycarbonyl groups, alkylcarbonyl groups, and alkylcarbonyloxy groups represent groups in which a carbonyl group or carbonyloxy group is bonded to an alkyl group or alkoxy group as described above. Examples of alkoxycarbonyl groups include methoxycarbonyl, ethoxycarbonyl, and butoxycarbonyl groups; examples of alkylcarbonyl groups include acetyl, propionyl, and butyryl groups; and examples of alkylcarbonyloxy groups include acetyloxy, propionyloxy, and butyryloxy groups. The number of carbon atoms in the alkoxycarbonyl group is preferably 2 to 4, and more preferably 2 to 3. The number of carbon atoms in the alkylcarbonyl group is preferably 2 to 4, and more preferably 2 to 3. The number of carbon atoms in the alkylcarbonyloxy group is preferably 2 to 4, and more preferably 2 to 3. Examples of alkanediyloxy groups include methyleneoxy, ethyleneoxy, propanediyloxy, butanediyloxy, and pentanediyloxy groups. The number of carbon atoms in the alkanediyloxy group is preferably 1 to 4, and more preferably 1 to 3. Examples of alkanediyloxycarbonyl groups include methyleneoxycarbonyl groups, ethyleneoxycarbonyl groups, propanediyloxycarbonyl groups, and butanediyloxycarbonyl groups. The number of carbon atoms in the alkanediyloxycarbonyl group is preferably 2 to 4, and more preferably 2 to 3. Examples of alkanediylcarbonyl groups include methylenecarbonyl group, ethylenecarbonyl group, propanediylcarbonyl group, butanediylcarbonyl group, and pentanediylcarbonyl group. The number of carbon atoms in the alkanediylcarbonyl group is preferably 2 to 4, and more preferably 2 to 3. Examples of alkanediylcarbonyloxy groups include methylenecarbonyloxy groups, ethylenecarbonyloxy groups, propanediylcarbonyloxy groups, and butanediylcarbonyloxy groups. The number of carbon atoms in the alkanediylcarbonyloxy group is preferably 2 to 4, and more preferably 2 to 3.

[0023] L 4It is preferably a single bond or an alkanediyl group having 1 to 4 carbon atoms (the -CH2- contained in the alkanediyl group may be replaced with -O- or -CO-), more preferably a single bond or a methylene group, and even more preferably a methylene group.

[0024] R 2 This represents the group represented by formula (1a) (hereinafter, as may be referred to as "acid-unstable group (1a)") and the group represented by formula (2a) (hereinafter, as may be referred to as "acid-unstable group (2a)"). TIFF0007933518000035.tif2161 [In formula (1a), R aa1 , R aa2 and R aa3 Each of these independently represents an alkyl group having 1 to 8 carbon atoms, an alkenyl group having 2 to 8 carbon atoms, an alicyclic hydrocarbon group having 3 to 20 carbon atoms, an aromatic hydrocarbon group having 6 to 18 carbon atoms, or a group combining these, or R aa1 and R aa2 These atoms bond with each other to form alicyclic hydrocarbon groups with 3 to 20 carbon atoms, along with the carbon atoms to which they are bonded. * indicates a connection site. TIFF0007933518000036.tif2161 [In formula (2a), R aa1’ and R aa2’ Each of these independently represents a hydrogen atom or a hydrocarbon group having 1 to 12 carbon atoms, and R aa3’ represents a hydrocarbon group with 1 to 20 carbon atoms, or R aa2’ and R aa3’ They combine with each other and they join together -CX a - Together with the hydrocarbon group, it forms a heterocyclic group having 3 to 20 carbon atoms, and the -CH2- contained in the hydrocarbon group and the heterocyclic group may be replaced with -O- or -S-. X a This represents an oxygen atom or a sulfur atom. * indicates a connection site.

[0025] R aa1 , R aa2 and R aa3Examples of alkyl groups include methyl, ethyl, propyl, n-butyl, n-pentyl, n-hexyl, n-heptyl, and n-octyl groups. aa1 , R aa2 and R aa3 The number of carbon atoms in the alkyl group is preferably 1 to 6, more preferably 1 to 4, and even more preferably 1 to 3. R aa1 , R aa2 and R aa3 Examples of alkenyl groups include ethenyl, propenyl, isopropenyl, butenyl, isobutenyl, tert-butenyl, pentenyl, hexenyl, heptenyl, octenyl, isooctenyl, and nonenyl groups. R aa1 , R aa2 and R aa3 The alicyclic hydrocarbon group may be monocyclic or polycyclic. Examples of monocyclic alicyclic hydrocarbon groups include cycloalkyl groups such as cyclopentyl, cyclohexyl, cycloheptyl, and cyclooctyl. Examples of polycyclic alicyclic hydrocarbon groups include decahydronaphthyl, adamantyl, norbornyl, and the following groups (* indicates a bonding site). aa1 , R aa2 and R aa3 The number of carbon atoms in the alicyclic hydrocarbon group is preferably 3 to 16, and more preferably 3 to 12. TIFF0007933518000037.tif9159R aa1 , R aa2 and R aa3 Examples of aromatic hydrocarbon groups include aryl groups such as phenyl, naphthyl, anthryl, biphenyl, and phenanthryl groups. aa1 , R aa2 and R aa3 The number of carbon atoms in the aromatic hydrocarbon group is preferably 6 to 14, and more preferably 6 to 10.

[0026] Examples of combined groups include groups that combine the alkyl group and alicyclic hydrocarbon group as described above (for example, alkylcycloalkyl groups or cycloalkylalkyl groups such as methylcyclohexyl group, dimethylcyclohexyl group, methylnorbornyl group, cyclohexylmethyl group, adamantylmethyl group, adamantyldimethyl group, norbornylethyl group, etc.), aralkyl groups such as benzyl group, aromatic hydrocarbon groups having alkyl groups (p-methylphenyl group, p-tert-butylphenyl group, tolyl group, xylyl group, cumenyl group, mesityl group, 2,6-diethylphenyl group, 2-methyl-6-ethylphenyl group, etc.), aromatic hydrocarbon groups having alicyclic hydrocarbon groups (p-cyclohexylphenyl group, p-adamantylphenyl group, etc.), and aryl-cycloalkyl groups such as phenylcyclohexyl group.

[0027] R aa1 and R aa2 -C(R aa1 )(R aa2 )(R aa3 Examples of such groups include the following: The alicyclic hydrocarbon group preferably has 3 to 16 carbon atoms, and more preferably 3 to 12 carbon atoms. * indicates a bond site with -O-. TIFF0007933518000038.tif30140

[0028] The group represented by formula (1a) is a 1,1,1-trialkyl group (where R is in formula (1a)). aa1 , R aa2 and R aa3 A group in which R is an alkyl group, preferably a tert-butyl group, or a 2-alkyladamantan-2-yl group (in formula (1a), R aa1 , R aa2 And the carbon atoms to which these are bonded form an adamantyl group, R aa3 (a group in which R is an alkyl group) and 1-(adamantan-1-yl)-1,1-dialkyl group (in formula (1a), R aa1 and R aa2 is an alkyl group, R aa3 Examples include groups that are adamantyl groups.

[0029] R aa1' , R aa2' and R aa3' Examples of hydrocarbon groups include alkyl groups, alicyclic hydrocarbon groups, aromatic hydrocarbon groups, and groups formed by combining these. Alkyl and alicyclic hydrocarbon groups are R aa1 , R aa2 and R aa3 The same elements mentioned above can be cited. Examples of aromatic hydrocarbon groups include phenyl groups, naphthyl groups, anthryl groups, biphenyl groups, phenanthryl groups, and other aryl groups. Examples of combined groups include groups that combine the alkyl group and alicyclic hydrocarbon group as described above (for example, cycloalkylalkyl groups or alkylcycloalkyl groups such as methylcyclohexyl group, dimethylcyclohexyl group, methylnorbornyl group, cyclohexylmethyl group, adamantylmethyl group, adamantyldimethyl group, norbornylethyl group, etc.), aralkyl groups such as benzyl group, aromatic hydrocarbon groups having alkyl groups (p-methylphenyl group, p-tert-butylphenyl group, tolyl group, xylyl group, cumenyl group, mesityl group, 2,6-diethylphenyl group, 2-methyl-6-ethylphenyl group, etc.), aromatic hydrocarbon groups having alicyclic hydrocarbon groups (p-cyclohexylphenyl group, p-adamantylphenyl group, etc.), and aryl-cycloalkyl groups such as phenylcyclohexyl group. R aa2' and R aa3' They bond with each other, and the carbon atoms and X that they bond to are bonded together. a When forming a heterocyclic group with -C(R aa1' )(R aa2' )-X a -(R aa3' The following groups are examples of such groups. * indicates a bonding site. TIFF0007933518000039.tif21143R aa1' and R aa2' Preferably, at least one of them is a hydrogen atom.

[0030] Specific examples of acid-unstable groups (1a) include the following groups. * indicates a bonding site. TIFF0007933518000040.tif72168

[0031] Specific examples of acid-unstable groups (2a) include the following groups. * indicates a bonding site. TIFF0007933518000041.tif84161R 2 The acid-unstable group (1a) is preferred. m2 is preferably an integer between 2 and 5, more preferably an integer between 2 and 4, even more preferably 2 or 3, and even more preferably 2.

[0032] Examples of compound (I) include the following compounds. TIFF0007933518000042.tif252155

[0033] TIFF0007933518000043.tif244150

[0034] TIFF0007933518000044.tif254148

[0035] TIFF0007933518000045.tif92168

[0036] In the compounds represented by formulas (I-1) to (I-34), the R of formula (I) 0 Compounds in which the methyl group corresponding to (I) is replaced by a hydrogen atom, a halogen atom, a haloalkyl group (an alkyl group having a halogen atom), or another alkyl group can also be given as specific examples of compound (I). Among these, compounds represented by formulas (I-1) to (I-3), formulas (I-5) to (I-10), formulas (I-12), formulas (I-13), formulas (I-15), formulas (I-16), formulas (I-21), formulas (I-22), and formulas (I-27) to (I-34) are preferred.

[0037] <Method for producing compound (I)> In compound (I), X 1 However, equation (X 1 -1), formula (X 1 -3) or formula (X 1 A compound that is a group represented by any of the following (hereinafter sometimes referred to as compound (I1)) can be produced by reacting a compound represented by formula (I1-a) with a compound represented by formula (I1-b) in a solvent in the presence of a catalyst. TIFF0007933518000046.tif67160(In this formula, all signs have the same meaning as above. X 1A This is a single bond, -Ar 1 - or-CO-O-Ar 1 -* represents Ar 1 (* represents the 1,4-phenylene group. * represents the bonding site with the carbon atom of the carbonyl group.)

[0038] Examples of catalysts for this reaction include carbonyldiimidazole and 1-ethyl-3-(3-dimethylaminopropyl)carbodiimide hydrochloride. Examples of solvents include tetrahydrofuran, chloroform, and acetonitrile. The reaction temperature is typically between 0°C and 80°C, and the reaction time is typically between 0.5 hours and 24 hours. Compounds represented by formula (I1-a) include those represented by the following formulas, and are readily available from the market. TIFF0007933518000047.tif36127

[0039] Compounds represented by formula (I1-b) include those represented by the following formulas, which are readily available on the market and can also be easily manufactured by known methods. TIFF0007933518000048.tif127161

[0040] In compound (I), X 1 However, equation (X 1 -2) or formula (X 1The compound representing the group (-5) (the compound represented by formula (I2)) can be obtained by reacting the compound represented by formula (I2-a) and the compound represented by formula (I1-b) in a solvent in the presence of a base. TIFF0007933518000049.tif69163(In this formula, all signs have the same meaning as above. X 1B is, -Ar 1 - or-CO-O-Ar 1 -* represents the bond site with the oxygen atom.

[0041] Examples of solvents include tetrahydrofuran, chloroform, and acetonitrile. Examples of bases include potassium hydroxide. The reaction temperature is typically between 0°C and 80°C, and the reaction time is typically between 0.5 hours and 24 hours. Compounds represented by formula (I2-a) include those represented by the following formulas, and are readily available from the market. TIFF0007933518000050.tif3489

[0042] In compound (I), X 1 However, equation (X 1 -6) or formula (X 1 The compound representing the group (-7) (the compound represented by formula (I3)) can be obtained by reacting the compound represented by formula (I2-a) with carbonyldiimidazole in a solvent, and then further reacting it with the compound represented by formula (I1-b). TIFF0007933518000051.tif72148(In the formula, all signs have the same meaning as above. X 1B is, -Ar 1 - or-CO-O-Ar 1 -* represents the bond site with the oxygen atom.

[0043] Examples of solvents include tetrahydrofuran, chloroform, and acetonitrile. The reaction temperature is typically between 0°C and 80°C, and the reaction time is typically between 0.5 hours and 24 hours.

[0044] In compound (I), L 1 However, compounds that are groups formed by combining an alkanediyl group having 1 to 4 carbon atoms and an alicyclic hydrocarbon group having 3 to 18 carbon atoms (however, the -CH2- contained in the alkanediyl group may be replaced with -O- or -CO-, and the -CH2- contained in the alicyclic hydrocarbon group may be replaced with -O-, -S-, -SO2- or -CO-) can be produced by replacing the compound represented by formula (I1-a) or the compound represented by formula (I2-a) when synthesizing the compounds represented by formulas (I1) to (I3) with the compounds represented below. TIFF0007933518000052.tif28148

[0045] [Resin containing structural units represented by formula (IA)] The resin of the present invention is a resin (hereinafter sometimes referred to as "resin (A)") that contains structural units derived from compound (I) (hereinafter sometimes referred to as "structural units (IA)"). TIFF0007933518000053.tif46120[In formula (I), all signs have the same meaning as described above.] Resin (A) may be a homopolymer of structural unit (IA), a copolymer consisting only of structural unit (IA), or a copolymer containing one or more structural units other than structural unit (IA). Examples of structural units other than structural unit (IA) include structural units having acid-unstable groups other than structural unit (IA) (hereinafter sometimes referred to as "structural unit (a1)"), structural units other than those having acid-unstable groups that have halogen atoms (hereinafter sometimes referred to as "structural unit (a4)"), structural units that do not have acid-unstable groups (hereinafter sometimes referred to as "structural unit (s)"), structural units having non-leaving hydrocarbon groups (hereinafter sometimes referred to as "structural unit (a5)"), etc. Here, an acid-unstable group means a group that has a leaving group and, upon contact with an acid, the leaving group is removed to form a hydrophilic group (for example, a hydroxyl group or a carboxyl group). The content of structural units (IA) is typically 1 mol% or more, preferably 2 mol% or more, and more preferably 3 mol% or more, relative to the total structural units in the resin (A). Furthermore, it is typically 90 mol% or less, preferably 80 mol% or less, and more preferably 50 mol% or less. Also, it is typically 1 to 90 mol%, preferably 1 to 80 mol%, and more preferably 3 to 50 mol%.

[0046] <Structural unit (a1)> The structural unit (a1) is derived from a monomer having an acid-unstable group (hereinafter sometimes referred to as "monomer (a1)"). The acid-unstable group contained in resin (A) is preferably the group represented by formula (1) (hereinafter also referred to as group (1)) and / or the group represented by formula (2) (hereinafter also referred to as group (2)). TIFF0007933518000054.tif1988[In formula (1), R a1 , R a2 and R a3 Each of these independently represents an alkyl group having 1 to 8 carbon atoms, an alkenyl group having 2 to 8 carbon atoms, an alicyclic hydrocarbon group having 3 to 20 carbon atoms, an aromatic hydrocarbon group having 6 to 18 carbon atoms, or a group combining these. a1 and R a2 These atoms bond with each other, forming a non-aromatic hydrocarbon ring with 3 to 20 carbon atoms, along with the carbon atoms to which they bond. ma and na each independently represent either 0 or 1, and at least one of ma and na represents 1. * indicates a connection site. TIFF0007933518000055.tif2171 [In formula (2), R a1’ and R a2’ Each of these independently represents a hydrogen atom or a hydrocarbon group having 1 to 12 carbon atoms, and R a3’ R represents a hydrocarbon group with 1 to 20 carbon atoms. a2’ and R a3’ These atoms bond to each other, forming a heterocycle with 3 to 20 carbon atoms together with the carbon atoms to which they are bonded and X, and the -CH2- contained in the hydrocarbon group and the heterocycle may be replaced with -O- or -S-. X represents either an oxygen atom or a sulfur atom. 'na' represents either 0 or 1. * indicates a connection site.

[0047] R a1 , R a2 and R a3 Examples of alkyl groups in this context include methyl, ethyl, propyl, butyl, pentyl, hexyl, heptyl, and octyl groups. R a1 , R a2 and R a3 Examples of alkenyl groups in this context include ethenyl, propenyl, isopropenyl, butenyl, isobutenyl, tert-butenyl, pentenyl, hexenyl, heptenyl, octenyl, isooctenyl, and nonenyl groups. R a1 , R a2 and R a3 The alicyclic hydrocarbon group in may be monocyclic or polycyclic. Examples of monocyclic alicyclic hydrocarbon groups include cycloalkyl groups such as cyclopentyl, cyclohexyl, cycloheptyl, and cyclooctyl. Examples of polycyclic alicyclic hydrocarbon groups include decahydronaphthyl, adamantyl, norbornyl, and the following groups (* indicates a bonding site). a1 , R a2 and R a3 The number of carbon atoms in the alicyclic hydrocarbon group is preferably 3 to 16. TIFF0007933518000056.tif10150R a1 , R a2 and R a3 Examples of aromatic hydrocarbon groups in this context include aryl groups such as phenyl, naphthyl, anthryl, biphenyl, and phenanthryl groups. Examples of combined groups include groups that combine the alkyl group and alicyclic hydrocarbon group as described above (for example, alkylcycloalkyl groups or cycloalkylalkyl groups such as methylcyclohexyl group, dimethylcyclohexyl group, methylnorbornyl group, cyclohexylmethyl group, adamantylmethyl group, adamantyldimethyl group, norbornylethyl group, etc.), aralkyl groups such as benzyl group, aromatic hydrocarbon groups having alkyl groups (p-methylphenyl group, p-tert-butylphenyl group, tolyl group, xylyl group, cumenyl group, mesityl group, 2,6-diethylphenyl group, 2-methyl-6-ethylphenyl group, etc.), aromatic hydrocarbon groups having alicyclic hydrocarbon groups (p-cyclohexylphenyl group, p-adamantylphenyl group, etc.), and aryl-cycloalkyl groups such as phenylcyclohexyl group. Preferably, ma is 0 and na is 1. R a1 and R a2 -C(R a1 )(R a2 )(R a3 Examples of non-aromatic hydrocarbon rings include the following rings. The non-aromatic hydrocarbon rings preferably have 3 to 12 carbon atoms. * indicates a bond site with -O-. TIFF0007933518000057.tif30138

[0048] R a1’ , R a2’ and R a3’ Examples of hydrocarbon groups in this context include alkyl groups, alicyclic hydrocarbon groups, aromatic hydrocarbon groups, and groups formed by combining these. Alkyl and alicyclic hydrocarbon groups are R a1 , R a2 and R a3 The same types of elements mentioned above can be cited. Examples of aromatic hydrocarbon groups include aryl groups such as phenyl, naphthyl, anthryl, biphenyl, and phenanthryl groups. Examples of combined groups include groups that combine the alkyl group and alicyclic hydrocarbon group as described above (for example, alkylcycloalkyl groups or cycloalkylalkyl groups such as methylcyclohexyl group, dimethylcyclohexyl group, methylnorbornyl group, cyclohexylmethyl group, adamantylmethyl group, adamantyldimethyl group, norbornylethyl group, etc.), aralkyl groups such as benzyl group, aromatic hydrocarbon groups having alkyl groups (p-methylphenyl group, p-tert-butylphenyl group, tolyl group, xylyl group, cumenyl group, mesityl group, 2,6-diethylphenyl group, 2-methyl-6-ethylphenyl group, etc.), aromatic hydrocarbon groups having alicyclic hydrocarbon groups (p-cyclohexylphenyl group, p-adamantylphenyl group, etc.), and aryl-cycloalkyl groups such as phenylcyclohexyl group. R a2’ and R a3’ When they bond with each other and form a heterocycle with the carbon atoms and X to which they are bonded, -C(R a1’ )(R a2’ )-XR a3’ The following rings are examples. * indicates a bonding site. TIFF0007933518000058.tif18130R a1’ and R a2’ Preferably, at least one of them is a hydrogen atom. na' is preferably 0.

[0049] The following are examples of base (1): In equation (1), R a1 , R a2 and R a3 A group in which the parentheses is an alkyl group, ma=0, and na=1. A tert-butoxycarbonyl group is preferred as the group. In equation (1), R a1 , R a2 However, these combine with the carbon atoms to which they bond to form an adamantyl group, R a3 A group that is an alkyl group, with ma=0 and na=1. In equation (1), R a1 and R a2Each of them is an alkyl group independently, and R a3 This is an adamantyl group with ma=0 and na=1. The following are specific examples of group (1). * indicates a bonding site. TIFF0007933518000059.tif153163

[0050] The following are specific examples of group (2). * indicates a bonding site. TIFF0007933518000060.tif56153

[0051] The monomer (a1) is preferably a monomer having an acid-unstable group and an ethylenically unsaturated bond, and more preferably a (meth)acrylic monomer having an acid-unstable group.

[0052] Among (meth)acrylic monomers having acid-unstable groups, those having alicyclic hydrocarbon groups with 5 to 20 carbon atoms are preferred. If a resin (A) having structural units derived from a monomer (a1) having a bulky structure such as an alicyclic hydrocarbon group is used in the resist composition, the resolution of the resist pattern can be improved.

[0053] Structural units derived from (meth)acrylic monomers having group (1) include structural units represented by formula (a1-0) (hereinafter sometimes referred to as structural unit (a1-0)), structural units represented by formula (a1-1) (hereinafter sometimes referred to as structural unit (a1-1)), or structural units represented by formula (a1-2) (hereinafter sometimes referred to as structural unit (a1-2)). Preferably, it is at least one structural unit selected from the group consisting of structural unit (a1-0), structural unit (a1-1), and structural unit (a1-2), and more preferably, it is at least one or two structural units selected from the group consisting of structural unit (a1-1) and structural unit (a1-2). These may be used individually or in combination of two or more. TIFF0007933518000061.tif47153[In formulas (a1-0), (a1-1), and (a1-2), L a01 , L a1 and L a2 These are, independently, -O- or *-O-(CH2) k1 -CO-O- represents a bond, where k1 is an integer from 1 to 7, and * represents the bond site with -CO-. R a01 , R a4 and R a5 Each of these independently represents a hydrogen atom, a halogen atom, or an alkyl group having 1 to 6 carbon atoms that may contain a halogen atom. R a02 , R a03 and R a04 Each of these independently represents an alkyl group having 1 to 8 carbon atoms, an alicyclic hydrocarbon group having 3 to 18 carbon atoms, an aromatic hydrocarbon group having 6 to 18 carbon atoms, or a group combining these. R a6 and R a7 Each of these independently represents an alkyl group having 1 to 8 carbon atoms, an alkenyl group having 2 to 8 carbon atoms, an alicyclic hydrocarbon group having 3 to 18 carbon atoms, an aromatic hydrocarbon group having 6 to 18 carbon atoms, or a group formed by a combination of these. m1 represents an integer between 0 and 14. n1 represents an integer between 0 and 10. n1' represents an integer between 0 and 3.

[0054] R a01 , R a4 and R a5 This is preferably a hydrogen atom or a methyl group, and more preferably a methyl group. L a01 , L a1 and L a2 Preferably, an oxygen atom or *-O-(CH2) k01 It is -CO-O- (where k01 is preferably an integer from 1 to 4, more preferably 1), and more preferably an oxygen atom. R a02 , R a03 , R a04 , R a6 and R a7The alkyl groups, alkenyl groups, alicyclic hydrocarbon groups, aromatic hydrocarbon groups, and combinations thereof in group (1) are R a1 , R a2 and R a3 Similar groups to those listed above can be cited. R a02 , R a03 , and R a04 The alkyl group in is preferably an alkyl group having 1 to 6 carbon atoms, more preferably a methyl group or an ethyl group, and even more preferably a methyl group. R a6 and R a7 The alkyl group in is preferably an alkyl group having 1 to 6 carbon atoms, more preferably a methyl group, an ethyl group, an isopropyl group, or a t-butyl group, and even more preferably an ethyl group, an isopropyl group, or a t-butyl group. R a6 and R a7 The alkenyl group in is preferably an alkenyl group having 2 to 6 carbon atoms, and more preferably an ethenyl group, a propenyl group, an isopropenyl group, or a butenyl group. R a02 , R a03 , R a04 , R a6 and R a7 The number of carbon atoms in the alicyclic hydrocarbon group is preferably 5 to 12, and more preferably 5 to 10. R a02 , R a03 , R a04 , R a6 and R a7 The number of carbon atoms in the aromatic hydrocarbon group is preferably 6 to 12, and more preferably 6 to 10. In groups formed by combining an alkyl group and an alicyclic hydrocarbon group, it is preferable that the total number of carbon atoms in the combined alkyl group and alicyclic hydrocarbon group is 18 or less. In groups formed by combining an alkyl group and an aromatic hydrocarbon group, it is preferable that the total number of carbon atoms in the combined alkyl group and aromatic hydrocarbon group is 18 or less. R a02 and R a03The group is preferably an alkyl group having 1 to 6 carbon atoms or an aromatic hydrocarbon group having 6 to 12 carbon atoms, and more preferably a methyl group, an ethyl group, a phenyl group, or a naphthyl group. R a04 The group is preferably an alkyl group having 1 to 6 carbon atoms or an alicyclic hydrocarbon group having 5 to 12 carbon atoms, and more preferably a methyl group, an ethyl group, a cyclohexyl group, or an adamantyl group. R a6 and R a7 Each of these groups is independently preferably a C1-C6 alkyl group, a C2-C6 alkenyl group, or a C6-C12 aromatic hydrocarbon group, more preferably a methyl group, ethyl group, isopropyl group, t-butyl group, ethenyl group, phenyl group, or naphthyl group, and even more preferably an ethyl group, isopropyl group, t-butyl group, ethenyl group, or phenyl group. m1 is preferably an integer between 0 and 3, and more preferably 0 or 1. n1 is preferably an integer between 0 and 3, and more preferably 0 or 1. n1' is preferably 0 or 1.

[0055] Examples of structural units (a1-0) include structural units represented by any of the formulas (a1-0-1) to (a1-0-18) and R in structural unit (a1-0). a01 Examples of structural units in which the corresponding methyl group is replaced by a hydrogen atom, a halogen atom, a haloalkyl group (an alkyl group having a halogen atom), or another alkyl group are given, with structural units represented by any of the formulas (a1-0-1) to (a1-0-10), (a1-0-13), or (a1-0-14) being preferred. TIFF0007933518000062.tif98164

[0056] Examples of structural units (a1-1) include structural units derived from monomers described in Japanese Patent Publication No. 2010-204646. In particular, structural units represented by any of formulas (a1-1-1) to (a1-1-7) and R in structural unit (a1-1) a4A structural unit in which the corresponding methyl group is replaced by a hydrogen atom, a halogen atom, a haloalkyl group, or another alkyl group is preferred, and a structural unit represented by any of formulas (a1-1-1) to (a1-1-4) is more preferred. TIFF0007933518000063.tif38168

[0057] The structural unit (a1-2) is a structural unit represented by any of the formulas (a1-2-1) to (a1-2-14) and R in the structural unit (a1-2). a5 Examples of structural units in which the corresponding methyl group is replaced by a hydrogen atom, a halogen atom, a haloalkyl group, or another alkyl group include structural units represented by any of the formulas (a1-2-2), (a1-2-5), (a1-2-6), and (a1-2-10) to (a1-2-14). TIFF0007933518000064.tif71169

[0058] When resin (A) contains structural units (a1-0), the content is usually 5 mol% or more, preferably 10 mol% or more, relative to the total structural units of resin (A). It is also usually 80 mol% or less, preferably 75 mol% or less, and more preferably 70 mol% or less. Furthermore, it is usually 5 to 80 mol%, preferably 5 to 75 mol%, and more preferably 10 to 70 mol%. If resin (A) contains structural unit (a1-1) and / or structural unit (a1-2), the total content of these is usually 10 mol% or more, preferably 15 mol% or more, and more preferably 20 mol% or more, relative to the total structural units of resin (A). Also, it is usually 90 mol% or less, preferably 85 mol% or less, more preferably 80 mol% or less, even more preferably 75 mol% or less, and even more preferably 70 mol% or less. Also, it is usually 10 to 90 mol%, preferably 15 to 85 mol%, more preferably 20 to 80 mol%, even more preferably 20 to 75 mol%, and even more preferably 20 to 70 mol%.

[0059] Examples of structural units having a base (2) in structural unit (a1) include the structural unit represented by formula (a1-4) (hereinafter sometimes referred to as "structural unit (a1-4)"). TIFF0007933518000065.tif4868[In formula (a1-4), R a32 This represents a hydrogen atom, a halogen atom, or a C1-C6 alkyl group which may have a halogen atom. R a33 This represents a halogen atom, a hydroxyl group, a C1-C6 alkyl group, a C1-C6 alkoxy group, a C2-C12 alkoxyalkyl group, a C2-C12 alkoxyalkoxy group, a C2-C4 alkylcarbonyl group, a C2-C4 alkylcarbonyloxy group, an acryloyloxy group, or a methacryloyloxy group. A a30 is a single bond or * -X a31 -(A a32 -X a32 ) nc - represents -R a32 This represents the bonding site with the carbon atom to which it is bonded. A a32 This represents an alkanediyl group with 1 to 6 carbon atoms. X a31 and X a32 These represent -O-, -CO-O-, or -O-CO- independently. nc represents 0 or 1. la represents an integer between 0 and 4. If la is an integer greater than or equal to 2, multiple R a33 They may be the same or different from each other. R a34 and R a35 Each of these independently represents a hydrogen atom or a hydrocarbon group having 1 to 12 carbon atoms, and R a36 R represents a hydrocarbon group with 1 to 20 carbon atoms. a35 and R a36 These atoms bond with each other to form a divalent hydrocarbon group having 2 to 20 carbon atoms, and the -CH2- contained in this hydrocarbon group and the divalent hydrocarbon group may be replaced with -O- or -S-.

[0060] R a32 and R a33 Examples of halogen atoms in this context include fluorine atoms, chlorine atoms, and bromine atoms. R a32 Examples of C1-C6 alkyl groups that may have halogen atoms include trifluoromethyl, difluoromethyl, methyl, perfluoroethyl, 2,2,2-trifluoroethyl, 1,1,2,2-tetrafluoroethyl, ethyl, perfluoropropyl, 2,2,3,3,3-pentafluoropropyl, propyl, perfluorobutyl, 1,1,2,2,3,3,4,4-octafluorobutyl, butyl, perfluoropentyl, 2,2,3,3,4,4,5,5,5-nonafluoropentyl, pentyl, hexyl, and perfluorohexyl groups. R a32 The hydrogen atom or an alkyl group having 1 to 4 carbon atoms is preferred, a hydrogen atom, a methyl group, or an ethyl group is more preferred, and a hydrogen atom or a methyl group is even more preferred. R a33 Examples of alkyl groups in this context include methyl, ethyl, propyl, isopropyl, butyl, sec-butyl, tert-butyl, pentyl, and hexyl groups. The alkyl group is preferably a C1-C4 alkyl group, more preferably a methyl or ethyl group, and even more preferably a methyl group. R a33 Examples of alkoxy groups in this compound include methoxy, ethoxy, propoxy, isopropoxy, butoxy, sec-butoxy, tert-butoxy, pentyloxy, and hexyloxy groups. The alkoxy group is preferably a carbon-1 to carbon-4 alkoxy group, more preferably a methoxy or ethoxy group, and even more preferably a methoxy group. R a33Examples of alkoxyalkyl groups in this context include methoxymethyl, ethoxyethyl, propoxymethyl, isopropoxymethyl, butoxymethyl, sec-butoxymethyl, and tert-butoxymethyl groups. The alkoxyalkyl group is preferably a carbon-2 to carbon-8 alkoxyalkyl group, more preferably a methoxymethyl or ethoxyethyl group, and even more preferably a methoxymethyl group. R a33 Examples of alkoxyalkoxy groups in this context include methoxymethoxy, methoxyethoxy, ethoxymethoxy, ethoxyethoxy, propoxymethoxy, isopropoxymethoxy, butoxymethoxy, sec-butoxymethoxy, and tert-butoxymethoxy. The alkoxyalkoxy group is preferably one having 2 to 8 carbon atoms, with methoxyethoxy or ethoxyethoxy being more preferred. R a33 Examples of alkylcarbonyl groups in this compound include acetyl, propionyl, and butyryl groups. The alkylcarbonyl group is preferably one having 2 to 3 carbon atoms, with acetyl being more preferred. R a33 Examples of alkylcarbonyloxy groups in this context include acetyloxy groups, propionyloxy groups, and butyryloxy groups. The alkylcarbonyloxy group is preferably one having 2 to 3 carbon atoms, and more preferably an acetyloxy group. R a33 The group is preferably a halogen atom, a hydroxyl group, a C1-C4 alkyl group, a C1-C4 alkoxy group, or a C2-C8 alkoxyalkoxy group; more preferably a fluorine atom, an iodine atom, a hydroxyl group, a methyl group, a methoxy group, an ethoxy group, an ethoxyethoxy group, or an ethoxymethoxy group; and even more preferably a fluorine atom, an iodine atom, a hydroxyl group, a methyl group, a methoxy group, or an ethoxyethoxy group.

[0061] *-X a31 -(A a32 -X a32 ) nc- for example, *-O-, *-CO-O-, *-O-CO-, *-CO-OA a32 -CO-O-, *-O-CO-A a32 -O-, *-OA a32 -CO-O-, *-CO-OA a32 -O-CO-, *-O-CO-A a32 -O-CO- is one example. In particular, *-CO-O- and *-CO-OA are good examples. a32 -CO-O- or *-OA a32 -CO-O- is preferred.

[0062] A a32 Examples of alkanediyl groups in this compound include methylene, ethylene, propane-1,3-diyl, propane-1,2-diyl, butane-1,4-diyl, pentane-1,5-diyl, hexane-1,6-diyl, butane-1,3-diyl, 2-methylpropane-1,3-diyl, 2-methylpropane-1,2-diyl, pentane-1,4-diyl, and 2-methylbutane-1,4-diyl. A a32 It is preferable that this is a methylene group or an ethylene group.

[0063] A a30 These are single bonds, *-CO-O- or *-CO-OA a32 It is preferably -CO-O-, more preferably a single bond, *-CO-O- or *-CO-O-CH2-CO-O-, and even more preferably a single bond or *-CO-O-.

[0064] la is preferably 0, 1, or 2, more preferably 0 or 1, and even more preferably 0. R a34 , R a35 and R a36 Examples of hydrocarbon groups in this context include alkyl groups, alicyclic hydrocarbon groups, aromatic hydrocarbon groups, and groups combining these. Examples of alkyl groups include methyl, ethyl, propyl, butyl, pentyl, hexyl, heptyl, and octyl groups. Alicyclic hydrocarbon groups may be monocyclic or polycyclic. Examples of monocyclic alicyclic hydrocarbon groups include cycloalkyl groups such as cyclopentyl, cyclohexyl, cycloheptyl, and cyclooctyl groups. Examples of polycyclic alicyclic hydrocarbon groups include decahydronaphthyl, adamantyl, norbornyl, and the following groups (* indicates a bonding site). TIFF0007933518000066.tif10151 Examples of aromatic hydrocarbon groups include aryl groups such as phenyl, naphthyl, anthryl, biphenyl, and phenanthryl groups. Examples of combined groups include groups that combine alkyl groups and alicyclic hydrocarbon groups as described above (for example, alkylcycloalkyl groups or cycloalkylalkyl groups such as methylcyclohexyl group, dimethylcyclohexyl group, methylnorbornyl group, cyclohexylmethyl group, adamantylmethyl group, adamantyldimethyl group, norbornylethyl group, etc.), aralkyl groups such as benzyl group, aromatic hydrocarbon groups having alkyl groups (p-methylphenyl group, p-tert-butylphenyl group, tolyl group, xylyl group, cumenyl group, mesityl group, 2,6-diethylphenyl group, 2-methyl-6-ethylphenyl group, etc.), aromatic hydrocarbon groups having alicyclic hydrocarbon groups (p-cyclohexylphenyl group, p-adamantylphenyl group, etc.), and aryl-cycloalkyl groups such as phenylcyclohexyl group. In particular, R a36 Examples include alkyl groups having 1 to 18 carbon atoms, alicyclic hydrocarbon groups having 3 to 18 carbon atoms, aromatic hydrocarbon groups having 6 to 18 carbon atoms, or groups formed by combining these.

[0065] R a34 Preferably, it is a hydrogen atom. R a35 Preferably, this is a hydrogen atom, an alkyl group having 1 to 12 carbon atoms, or an alicyclic hydrocarbon group having 3 to 12 carbon atoms, and more preferably a methyl group or an ethyl group. R a36The hydrocarbon group is preferably an alkyl group having 1 to 18 carbon atoms, an alicyclic hydrocarbon group having 3 to 18 carbon atoms, an aromatic hydrocarbon group having 6 to 18 carbon atoms, or a group formed by a combination thereof, and more preferably an alkyl group having 1 to 18 carbon atoms, an alicyclic hydrocarbon group having 3 to 18 carbon atoms, or an aralkyl group having 7 to 18 carbon atoms. a36 The alkyl groups and alicyclic hydrocarbon groups in R are preferably unsubstituted. a36 In this context, the aromatic hydrocarbon group is preferably an aromatic ring having an aryloxy group with 6 to 10 carbon atoms. -OC(R) in structural units (a1-4) a34 )(R a35 )-OR a36 It is eliminated upon contact with an acid (e.g., p-toluenesulfonic acid) to form a hydroxyl group. -OC(R a34 )(R a35 )-OR a36 It is preferable that the atom is bonded to the ortho- or para-position of the benzene ring, and more preferably to the para-position.

[0066] Examples of structural units (a1-4) include monomer-derived structural units described in Japanese Patent Publication No. 2010-204646. Preferably, structural units represented by formulas (a1-4-1) to (a1-4-24) and R in structural unit (a1-4). a32 Examples of structural units in which the hydrogen atom corresponding to is replaced by a halogen atom, a haloalkyl group, or an alkyl group are given, and more preferably, structural units represented by formulas (a1-4-1) to (a1-4-5), (a1-4-10), (a1-4-13), (a1-4-14), (a1-4-19), and (a1-4-20), respectively. TIFF0007933518000067.tif132165

[0067] If resin (A) contains structural units (a1-4), the content of these units is preferably 3 to 80 mol%, more preferably 5 to 75 mol%, even more preferably 7 to 70 mol%, even more preferably 7 to 65 mol%, and particularly preferably 10 to 60 mol%, relative to the total amount of all structural units of resin (A).

[0068] Structural units derived from (meth)acrylic monomers having group (2) include the structural unit represented by formula (a1-5) (hereinafter sometimes referred to as "structural unit (a1-5)"). TIFF0007933518000068.tif4558 formula (a1-5), R a8 This represents an alkyl group having 1 to 6 carbon atoms, which may contain a halogen atom, a hydrogen atom, or a halogen atom. Z a1 This is a single bond or *-(CH2) h3 -CO-L 54 - represents, h3 represents an integer from 1 to 4, and * represents L 51 This represents the connection point. L 51 , L 52 , L 53 and L 54 These represent either -O- or -S- independently. s1 represents an integer between 1 and 3. s1' represents an integer between 0 and 3.

[0069] Examples of halogen atoms include fluorine atoms and chlorine atoms, with fluorine atoms being preferred. Examples of C1-C6 alkyl groups that may contain halogen atoms include methyl, ethyl, propyl, butyl, pentyl, hexyl, heptyl, octyl, fluoromethyl, and trifluoromethyl groups. In equation (a1-5), R a8 The preferred element is a hydrogen atom, a methyl group, or a trifluoromethyl group. L 51 An oxygen atom is preferred. L52 and L 53 Preferably, one of them is -O- and the other is -S-. s1 is preferably 1. s1' is preferably an integer between 0 and 2. Z a1 A single bond or *-CH2-CO-O- is preferred.

[0070] Examples of structural units (a1-5) include monomer-derived structural units described in Japanese Patent Publication No. 2010-61117. Among these, structural units represented by formulas (a1-5-1) to (a1-5-4) are preferred, and structural units represented by formula (a1-5-1) or (a1-5-2) are more preferred. TIFF0007933518000069.tif33133

[0071] If resin (A) contains structural units (a1-5), the content of these units is preferably 1 to 50 mol%, more preferably 3 to 45 mol%, even more preferably 5 to 40 mol%, and even more preferably 5 to 30 mol%, relative to the total structural units of resin (A).

[0072] In addition, the following structural units (a1) can also be listed. TIFF0007933518000070.tif31162

[0073] If resin (A) contains structural units such as (a1-3-1) to (a1-3-7) above, the content of these structural units is preferably 10 to 95 mol%, more preferably 15 to 90 mol%, even more preferably 20 to 85 mol%, even more preferably 20 to 70 mol%, and particularly preferably 20 to 60 mol% relative to the total structural units of resin (A).

[0074] In addition, the following structural units (a1) can also be listed. TIFF0007933518000071.tif5195 When resin (A) contains structural units such as (a1-6-1) to (a1-6-3) above, the content thereof is preferably 10 to 60 mol%, more preferably 15 to 55 mol%, even more preferably 20 to 50 mol%, even more preferably 20 to 45 mol%, and particularly preferably 20 to 40 mol% relative to the total structural units of resin (A).

[0075] <Structural unit (s)> Structural units (s) are derived from monomers that do not have acid-unstable groups (hereinafter sometimes referred to as "monomers (s)"). Monomers that do not have acid-unstable groups and are known in the field of photoresists can be used to derive structural units (s). The structural unit (s) preferably has a hydroxyl group or a lactone ring. If a resin containing a structural unit having a hydroxyl group and not having an acid-unstable group (hereinafter sometimes referred to as "structural unit (a2)") and / or a structural unit having a lactone ring and not having an acid-unstable group (hereinafter sometimes referred to as "structural unit (a3)") is used in the resist composition of the present invention, the resolution of the resist pattern and the adhesion to the substrate can be improved.

[0076] <Structural Unit (a2)> The hydroxyl group in structural unit (a2) may be either an alcoholic hydroxyl group or a phenolic hydroxyl group. When manufacturing a resist pattern from the resist composition of the present invention, if a high-energy beam such as a KrF excimer laser (248 nm), electron beam, or EUV (ultra-ultraviolet light) is used as the exposure light source, a structural unit (a2) having a phenolic hydroxyl group is preferred, and it is more preferable to use the structural unit (a2-A) described later. Furthermore, if an ArF excimer laser (193 nm) or the like is used, a structural unit (a2) having an alcoholic hydroxyl group is preferred, and it is more preferable to use the structural unit (a2-1) described later. The structural unit (a2) may consist of one type alone, or it may consist of two or more types.

[0077] A structural unit having a phenolic hydroxyl group in structural unit (a2) is the structural unit represented by formula (a2-A) (hereinafter sometimes referred to as "structural unit (a2-A)"). TIFF0007933518000072.tif4753[In formula (a2-A), R a50 This represents a hydrogen atom, a halogen atom, or an alkyl group having 1 to 6 carbon atoms that may contain a halogen atom. R a51 This represents a halogen atom, a hydroxyl group, a C1-C6 alkyl group, a C1-C6 alkoxy group, a C2-C12 alkoxyalkyl group, a C2-C12 alkoxyalkoxy group, a C2-C4 alkylcarbonyl group, a C2-C4 alkylcarbonyloxy group, an acryloyloxy group, or a methacryloyloxy group. A a50 This is a single bond or *-X a51 -(A a52 -X a52 ) nb - represents -R a50 This represents the bonding site with the carbon atom to which it is bonded. A a52 This represents an alkanediyl group with 1 to 6 carbon atoms. X a51 and X a52 These represent -O-, -CO-O-, or -O-CO- independently. nb represents either 0 or 1. mb represents an integer between 0 and 4. If mb is an integer greater than or equal to 2, multiple R a51 They may be the same or different from each other.

[0078] R a50 and R a51 Examples of halogen atoms in this context include fluorine atoms, chlorine atoms, and bromine atoms. R a50Examples of C1-C6 alkyl groups that may have halogen atoms include trifluoromethyl, difluoromethyl, methyl, perfluoroethyl, 2,2,2-trifluoroethyl, 1,1,2,2-tetrafluoroethyl, ethyl, perfluoropropyl, 2,2,3,3,3-pentafluoropropyl, propyl, perfluorobutyl, 1,1,2,2,3,3,4,4-octafluorobutyl, butyl, perfluoropentyl, 2,2,3,3,4,4,5,5,5-nonafluoropentyl, pentyl, hexyl, and perfluorohexyl groups. R a50 The hydrogen atom or an alkyl group having 1 to 4 carbon atoms is preferred, a hydrogen atom, a methyl group, or an ethyl group is more preferred, and a hydrogen atom or a methyl group is even more preferred. R a51 Examples of alkyl groups in this context include methyl, ethyl, propyl, isopropyl, butyl, sec-butyl, tert-butyl, pentyl, and hexyl groups. The alkyl group is preferably a C1-C4 alkyl group, more preferably a methyl or ethyl group, and even more preferably a methyl group. R a51 Examples of alkoxy groups in this compound include methoxy, ethoxy, propoxy, isopropoxy, butoxy, sec-butoxy, and tert-butoxy groups. The alkoxy group is preferably a carbon-1 to carbon-4 alkoxy group, more preferably a methoxy or ethoxy group, and even more preferably a methoxy group. R a51 Examples of alkoxyalkyl groups in this context include methoxymethyl, ethoxyethyl, propoxymethyl, isopropoxymethyl, butoxymethyl, sec-butoxymethyl, and tert-butoxymethyl groups. The alkoxyalkyl group is preferably a carbon-2 to carbon-8 alkoxyalkyl group, more preferably a methoxymethyl or ethoxyethyl group, and even more preferably a methoxymethyl group. R a51Examples of alkoxyalkoxy groups in this context include methoxymethoxy, methoxyethoxy, ethoxymethoxy, ethoxyethoxy, propoxymethoxy, isopropoxymethoxy, butoxymethoxy, sec-butoxymethoxy, and tert-butoxymethoxy. The alkoxyalkoxy group is preferably one having 2 to 8 carbon atoms, with methoxyethoxy or ethoxyethoxy being more preferred. R a51 Examples of alkylcarbonyl groups in this compound include acetyl, propionyl, and butyryl groups. The alkylcarbonyl group is preferably one having 2 to 3 carbon atoms, with acetyl being more preferred. R a51 Examples of alkylcarbonyloxy groups in this context include acetyloxy groups, propionyloxy groups, and butyryloxy groups. The alkylcarbonyloxy group is preferably one having 2 to 3 carbon atoms, and more preferably an acetyloxy group. R a51 The group is preferably a halogen atom, a hydroxyl group, a C1-C4 alkyl group, a C1-C4 alkoxy group, or a C2-C8 alkoxyalkoxy group; more preferably a fluorine atom, an iodine atom, a hydroxyl group, a methyl group, a methoxy group, an ethoxy group, an ethoxyethoxy group, or an ethoxymethoxy group; and even more preferably a fluorine atom, an iodine atom, a hydroxyl group, a methyl group, a methoxy group, or an ethoxyethoxy group.

[0079] *-X a51 -(A a52 -X a52 ) nb - for example, *-O-, *-CO-O-, *-O-CO-, *-CO-OA a52 -CO-O-, *-O-CO-A a52 -O-, *-OA a52 -CO-O-, *-CO-OA a52 -O-CO-, *-O-CO-A a52 -O-CO- is one example. In particular, *-CO-O- and *-CO-OA are good examples. a52 -CO-O- or *-OA a52-CO-O- is preferred.

[0080] A a52 Examples of alkanediyl groups in this compound include methylene, ethylene, propane-1,3-diyl, propane-1,2-diyl, butane-1,4-diyl, pentane-1,5-diyl, hexane-1,6-diyl, butane-1,3-diyl, 2-methylpropane-1,3-diyl, 2-methylpropane-1,2-diyl, pentane-1,4-diyl, and 2-methylbutane-1,4-diyl. A a52 It is preferable that this is a methylene group or an ethylene group.

[0081] A a50 These are single bonds, *-CO-O- or *-CO-OA a52 It is preferably -CO-O-, more preferably a single bond, *-CO-O- or *-CO-O-CH2-CO-O-, and even more preferably a single bond or *-CO-O-.

[0082] mb is preferably 0, 1, or 2, more preferably 0 or 1, and even more preferably 0. The hydroxyl group is preferably bonded to the m- or p-position of the benzene ring, and more preferably to the m-position. If the phenyl group has two or more hydroxyl groups, it is preferable that the two hydroxyl groups are bonded to the m- and p-positions, respectively.

[0083] Examples of structural units (a2-A) include monomer-derived structural units described in Japanese Patent Publication No. 2010-204634 and Japanese Patent Publication No. 2012-12577.

[0084] As for the structural unit (a2-A), the structural unit represented by formulas (a2-2-1) to (a2-2-24) and the R in the structural unit (a2-A) in the structural unit (a2-A) represented by formulas (a2-2-1) to (a2-2-24) a50Examples of structural units in which the methyl group corresponding to is replaced by a hydrogen atom, a halogen atom, a haloalkyl group, or another alkyl group. Structural unit (a2-A) is a structural unit represented by formulas (a2-2-1) to (a2-2-4), a structural unit represented by formula (a2-2-6), a structural unit represented by formula (a2-2-8), and a structural unit represented by formulas (a2-2-12) to (a2-2-18), in which R in structural unit (a2-A) a50 Preferably, the structural unit is one in which the corresponding methyl group is replaced by a hydrogen atom, and in the structural unit represented by formula (a2-2-3), the structural unit represented by formula (a2-2-4), the structural unit represented by formula (a2-2-8), the structural unit represented by formulas (a2-2-12) to (a2-2-14), the structural unit represented by formula (a2-2-18), and the structural unit represented by formula (a2-2-3), the structural unit represented by formula (a2-2-4), the structural unit represented by formula (a2-2-8), the structural unit represented by formulas (a2-2-12) to (a2-2-14), and the structural unit represented by formula (a2-2-18), the R in structural unit (a2-A) a50 It is more preferable that the corresponding methyl group is replaced by a hydrogen atom in the structural unit represented by formula (a2-2-3), formula (a2-2-4), formula (a2-2-8), and in the structural unit represented by formula (a2-2-3), formula (a2-2-4), and formula (a2-2-8), the R in structural unit (a2-A) a50 It is even more preferable that the corresponding methyl group is replaced by a hydrogen atom in the structural unit. TIFF0007933518000073.tif79168

[0085] When the resin (A) contains structural units (a2-A), the content of structural units (a2-A) is preferably 5 mol% or more, more preferably 10 mol% or more, even more preferably 15 mol% or more, and even more preferably 20 mol% or more, relative to the total structural units. Furthermore, it is preferably 80 mol% or less, more preferably 70 mol% or less, and even more preferably 65 mol% or less. Furthermore, it is preferably 5 to 80 mol%, more preferably 10 to 70 mol%, even more preferably 15 to 65 mol%, and even more preferably 20 to 65 mol%. The structural unit (a2-A) can be incorporated into resin (A) by polymerizing using structural unit (a1-4), for example, and then treating with an acid such as p-toluenesulfonic acid. Alternatively, the structural unit (a2-A) can be incorporated into resin (A) by polymerizing using acetoxystyrene, for example, and then treating with an alkali such as tetramethylammonium hydroxide.

[0086] A structural unit having an alcoholic hydroxyl group in structural unit (a2) is the structural unit represented by formula (a2-1) (hereinafter sometimes referred to as "structural unit (a2-1)"). TIFF0007933518000074.tif4461 formula (a2-1), L a3 is -O- or *-O-(CH2) k2 -CO-O- represents, k2 represents an integer between 1 and 7. * represents a connection site with -CO-. R a14 represents a hydrogen atom or a methyl group. R a15 and R a16 Each of these independently represents a hydrogen atom, a methyl group, or a hydroxyl group. o1 represents an integer between 0 and 10.

[0087] In equation (a2-1), L a3 Preferably, -O-, -O-(CH2) f1The result is -CO-O- (where f1 represents any integer from 1 to 4), and more preferably -O-. R a14 The group is preferably a methyl group. R a15 Preferably, it is a hydrogen atom. R a16 This is preferably a hydrogen atom or a hydroxyl group. o1 is preferably an integer between 0 and 3, more preferably 0 or 1.

[0088] Examples of structural units (a2-1) include structural units derived from monomers described in Japanese Patent Publication No. 2010-204646. Structural units represented by any of formulas (a2-1-1) to (a2-1-6) are preferred, structural units represented by any of formulas (a2-1-1) to (a2-1-4) are more preferred, and structural units represented by formula (a2-1-1) or (a2-1-3) are even more preferred. TIFF0007933518000075.tif50139

[0089] If resin (A) contains structural units (a2-1), the content is usually 1 mol% or more relative to the total structural units of resin (A). Furthermore, it is usually 45 mol% or less, preferably 40 mol% or less, more preferably 35 mol% or less, even more preferably 20 mol% or less, and even more preferably 10 mol% or less. Furthermore, it is usually 1 to 45 mol%, preferably 1 to 40 mol%, more preferably 1 to 35 mol%, even more preferably 1 to 20 mol%, and even more preferably 1 to 10 mol%.

[0090] <Structural unit (a3)> The lactone ring of the structural unit (a3) ​​may be a monocyclic ring such as a β-propiolactone ring, a γ-butyrolactone ring, or a δ-valerolactone ring, or it may be a fused ring of a monocyclic lactone ring and another ring. Preferably, it may be a γ-butyrolactone ring, an adamantane lactone ring, or a bridging ring containing a γ-butyrolactone ring structure (for example, a structural unit represented by the following formula (a3-2)).

[0091] The structural unit (a3) ​​is preferably a structural unit represented by formula (a3-1), formula (a3-2), formula (a3-3), or formula (a3-4). One of these may be included alone, or two or more may be included. TIFF0007933518000076.tif51163[In formulas (a3-1), (a3-2), (a3-3), and (a3-4), L a4 , L a5 and L a6 These are, independently, -O- or *-O-(CH2) k3 This represents a base represented by -CO-O-(where k3 is an integer from 1 to 7). L a7 is -O-, *-OL a8 -O-, *-OL a8 -CO-O-, *-OL a8 -CO-OL a9 -CO-O- or *-OL a8 -O-CO-L a9 Represents -O- L a8 and L a9 Each of these independently represents an alkanediyl group with 1 to 6 carbon atoms. * indicates a bonding site with a carbonyl group. R a18 , R a19 and R a20 Each of these independently represents either a hydrogen atom or a methyl group. R a24 This represents a hydrogen atom, a halogen atom, or an alkyl group having 1 to 6 carbon atoms that may contain a halogen atom. X a3 represents -CH2- or an oxygen atom. R a21 This represents an aliphatic hydrocarbon group with 1 to 4 carbon atoms. R a22 , R a23 and R a25 Each of these independently represents a carboxyl group, a cyano group, or an aliphatic hydrocarbon group having 1 to 4 carbon atoms. p1 represents an integer between 0 and 5. q1 represents an integer between 0 and 3. r1 represents an integer between 0 and 3. w1 represents an integer between 0 and 8. When p1, q1, r1 and / or w1 are 2 or more, multiple R a21 , R a22 , R a23 and / or R a25 They may be the same or different from each other.

[0092] R a21 , R a22 , R a23 and R a25 Examples of aliphatic hydrocarbon groups in this context include alkyl groups such as methyl, ethyl, propyl, isopropyl, butyl, sec-butyl, and tert-butyl groups. R a24 Examples of halogen atoms in this context include fluorine, chlorine, bromine, and iodine atoms. R a24 Examples of alkyl groups in this context include methyl, ethyl, propyl, isopropyl, butyl, sec-butyl, tert-butyl, pentyl, and hexyl groups, with alkyl groups having 1 to 4 carbon atoms being preferred, and methyl or ethyl groups being more preferred. R a24 Examples of alkyl groups having halogen atoms in this context include trifluoromethyl, perfluoroethyl, perfluoropropyl, perfluoroisopropyl, perfluorobutyl, perfluorosec-butyl, perfluorotert-butyl, perfluoropentyl, perfluorohexyl, trichloromethyl, tribromomethyl, and triiodomethyl groups.

[0093] L a8 and L a9Examples of alkanediyl groups in this compound include methylene, ethylene, propane-1,3-diyl, propane-1,2-diyl, butane-1,4-diyl, pentane-1,5-diyl, hexane-1,6-diyl, butane-1,3-diyl, 2-methylpropane-1,3-diyl, 2-methylpropane-1,2-diyl, pentane-1,4-diyl, and 2-methylbutane-1,4-diyl.

[0094] In equations (a3-1) to (a3-3), L a4 ~L a6 Each is independently, preferably -O- or *-O-(CH2) k3 In -CO-O-, k3 is an integer from 1 to 4, more preferably -O- and *-O-CH2-CO-O-, and even more preferably an oxygen atom. R a18 ~R a21 The group is preferably a methyl group. R a22 and R a23 Each of these is independently preferably a carboxyl group, a cyano group, or a methyl group. p1, q1, and r1 are each independently, preferably integers from 0 to 2, and more preferably 0 or 1.

[0095] In equation (a3-4), R a24 Preferably, it is a hydrogen atom or an alkyl group having 1 to 4 carbon atoms, more preferably a hydrogen atom, a methyl group, or an ethyl group, and even more preferably a hydrogen atom or a methyl group. R a25 The group is preferably a carboxyl group, a cyano group, or a methyl group. L a7 Preferably -O- or *-OL a8 It is -CO-O-, and more preferably -O-, -O-CH2-CO-O-, or -O-C2H4-CO-O-. w1 is preferably an integer between 0 and 2, and more preferably 0 or 1. In particular, formula (a3-4)' is preferred over formula (a3-4). TIFF0007933518000077.tif3848 (in the formula, R a24 , L a7 (This expresses the same meaning as above.)

[0096] Examples of structural units (a3) ​​include those derived from monomers described in Japanese Patent Publication No. 2010-204646, Japanese Patent Publication No. 2000-122294, and Japanese Patent Publication No. 2012-41274. Examples of structural units (a3) ​​include those represented by any of the formulas (a3-1-1), (a3-1-2), (a3-2-1), (a3-2-2), (a3-3-1), (a3-3-2), and (a3-4-1) to (a3-4-12), and in the said structural units, R in formulas (a3-1) to (a3-4). a18 , R a19 , R a20 and R a24 A structural unit in which the corresponding methyl group is replaced by a hydrogen atom is preferred.

[0097] TIFF0007933518000078.tif116165

[0098] When resin (A) contains structural units (a3), the total content is usually 1 mol% or more, preferably 3 mol% or more, and more preferably 5 mol% or more, relative to the total structural units of resin (A). Also, it is usually 70 mol% or less, preferably 65 mol% or less, and more preferably 60 mol% or less. Also, it is usually 1 to 70 mol%, preferably 3 to 65 mol%, and more preferably 5 to 60 mol%. Furthermore, the content of structural unit (a3-1), structural unit (a3-2), structural unit (a3-3), or structural unit (a3-4) is preferably 1 mol% or more, more preferably 3 mol% or more, and even more preferably 5 mol% or more, relative to the total structural units of resin (A). Also preferably 60 mol% or less, and more preferably 50 mol% or less. Furthermore, 1 to 60 mol% is preferred, 3 to 50 mol% is more preferred, and 5 to 50 mol% is even more preferred.

[0099] <Structural Unit (a4)> The following are examples of structural units (a4): TIFF0007933518000079.tif2962[In formula (a4), R 41 represents a hydrogen atom or a methyl group. R 42 This represents a saturated hydrocarbon group having a halogen atom with 1 to 24 carbon atoms, and the -CH2- contained in the saturated hydrocarbon group may be replaced with -O- or -CO-. R 42 The saturated hydrocarbon groups represented by include chain-type saturated hydrocarbon groups, monocyclic or polycyclic alicyclic saturated hydrocarbon groups, and groups formed by combining these.

[0100] Examples of chain-type saturated hydrocarbon groups include methyl, ethyl, propyl, butyl, pentyl, hexyl, heptyl, octyl, decyl, dodecyl, pentadecyl, hexadecyl, heptadecyl, and octadecyl groups. Examples of monocyclic or polycyclic alicyclic saturated hydrocarbon groups include cycloalkyl groups such as cyclopentyl, cyclohexyl, cycloheptyl, and cyclooctyl groups; and polycyclic alicyclic saturated hydrocarbon groups such as decahydronaphthyl, adamantyl, norbornyl, and the following groups (* indicates the bonding site). TIFF0007933518000080.tif10146 Examples of groups formed by combinations include groups formed by combining one or more alkyl groups or one or more alkanediyl groups with one or more alicyclic saturated hydrocarbon groups, such as -alkanediyl group-alicyclic saturated hydrocarbon group, -alicyclic saturated hydrocarbon group-alkyl group, and -alkanediyl group-alicyclic saturated hydrocarbon group-alkyl group.

[0101] Examples of structural units (a4) include the structural unit represented by formula (a4-0), the structural unit represented by formula (a4-1), and the structural unit represented by formula (a4-4). TIFF0007933518000081.tif4551[In formula (a4-0), R 54 represents a hydrogen atom or a methyl group. L 4a This represents a single bond or an alkanediyl group having 1 to 4 carbon atoms. L 3a This represents a perfluoroalkanediyl group having 1 to 8 carbon atoms or a perfluorocycloalkanediyl group having 3 to 12 carbon atoms. R 64 This represents a hydrogen atom or a fluorine atom.

[0102] L 4a Examples of alkanediyl groups in this context include linear alkanediyl groups such as methylene group, ethylene group, propane-1,3-diyl group, and butane-1,4-diyl group, and branched alkanediyl groups such as ethane-1,1-diyl group, propane-1,2-diyl group, butane-1,3-diyl group, 2-methylpropane-1,3-diyl group, and 2-methylpropane-1,2-diyl group.

[0103] L 3aThe perfluoroalkanediyl groups in this product include difluoromethylene, perfluoroethylene, perfluoroethylfluoromethylene, perfluoropropane-1,3-diyl, perfluoropropane-1,2-diyl, perfluoropropane-2,2-diyl, perfluorobutane-1,4-diyl, perfluorobutane-2,2-diyl, perfluorobutane-1,2-diyl, perfluoropentane-1,5-diyl, perfluoropentane-2,2-diyl, and perfluoropentane-3 Examples include 3-diyl group, perfluorohexane-1,6-diyl group, perfluorohexane-2,2-diyl group, perfluorohexane-3,3-diyl group, perfluoroheptane-1,7-diyl group, perfluoroheptane-2,2-diyl group, perfluoroheptane-3,4-diyl group, perfluoroheptane-4,4-diyl group, perfluorooctane-1,8-diyl group, perfluorooctane-2,2-diyl group, perfluorooctane-3,3-diyl group, and perfluorooctane-4,4-diyl group. L 3a Examples of perfluorocycloalkanediyl groups in this context include perfluorocyclohexanediyl group, perfluorocyclopentanediyl group, perfluorocycloheptanediyl group, and perfluoroadamantanediyl group.

[0104] L 4a Preferably, it is a single bond, a methylene group, or an ethylene group, and more preferably a single bond and a methylene group. L 3a The group is preferably a perfluoroalkanediyl group having 1 to 6 carbon atoms, and more preferably a perfluoroalkanediyl group having 1 to 3 carbon atoms.

[0105] The structural units (a4-0) are the structural units shown below and the R in the structural units (a4-0) within the structural units below. 54 One example is a structural unit in which the corresponding methyl group is replaced by a hydrogen atom. TIFF0007933518000082.tif96166

[0106] TIFF0007933518000083.tif4866[In formula (a4-1), R a41 represents a hydrogen atom or a methyl group. R a42 represents a saturated hydrocarbon group having 1 to 20 carbon atoms, which may have substituents, and the -CH2- contained in the saturated hydrocarbon group may be replaced with -O- or -CO-. A a41 This represents an alkanediyl group having 1 to 6 carbon atoms, which may have substituents, or a group represented by formula (a-g1). However, A a41 and R a42 At least one of these atoms has a halogen atom (preferably a fluorine atom) as a substituent. TIFF0007933518000084.tif1487 [In formula (a-g1), s represents either 0 or 1. A a42 and A a44 Each of these independently represents a divalent saturated hydrocarbon group having 1 to 5 carbon atoms, which may have substituents. A a43 This represents a divalent saturated hydrocarbon group having 1 to 5 carbon atoms, which may have single bonds or substituents. X a41 and X a42 These represent -O-, -CO-, -CO-O-, or -O-CO-, respectively, independently. However, A a42 , A a43 , A a44 , X a41 and X a42 The total number of carbon atoms is 7 or less. * indicates a binding site, and the * on the right is -O-CO-R a42 This is the junction site.

[0107] R a42 Examples of saturated hydrocarbon groups in this context include chain-type saturated hydrocarbon groups, monocyclic or polycyclic alicyclic saturated hydrocarbon groups, and groups formed by combining these.

[0108] Examples of chain-type saturated hydrocarbon groups include methyl, ethyl, propyl, butyl, pentyl, hexyl, heptyl, octyl, decyl, dodecyl, pentadecyl, hexadecyl, heptadecyl, and octadecyl groups. Examples of monocyclic or polycyclic alicyclic saturated hydrocarbon groups include cycloalkyl groups such as cyclopentyl, cyclohexyl, cycloheptyl, and cyclooctyl groups; and polycyclic alicyclic saturated hydrocarbon groups such as decahydronaphthyl, adamantyl, norbornyl, and the following groups (* indicates the bonding site). TIFF0007933518000085.tif10160 Examples of groups formed by combinations include groups formed by combining one or more alkyl groups or one or more alkanediyl groups with one or more alicyclic saturated hydrocarbon groups, such as -alkanediyl group-alicyclic saturated hydrocarbon group, -alicyclic saturated hydrocarbon group-alkyl group, and -alkanediyl group-alicyclic saturated hydrocarbon group-alkyl group.

[0109] R a42 The substituents on the compound include at least one selected from the group consisting of a halogen atom and a group represented by formula (a-g3). Examples of halogen atoms include fluorine, chlorine, bromine, and iodine atoms, with fluorine being preferred. TIFF0007933518000086.tif855[In formula (a-g3), X a43 * represents an oxygen atom, a carbonyl group, *-O-CO-, or *-CO-O-. A a45 This represents a saturated hydrocarbon group having 1 to 17 carbon atoms, which may contain a halogen atom. * is R a42 This represents the connection point with [the other element]. However, R a42 -X a43 -A a45 In R a42 If it does not have a halogen atom, then A a45 This represents a saturated hydrocarbon group having 1 to 17 carbon atoms and containing at least one halogen atom.

[0110] A a45 Examples of saturated hydrocarbon groups in this context include alkyl groups such as methyl, ethyl, propyl, butyl, pentyl, hexyl, heptyl, octyl, decyl, dodecyl, pentadecyl, hexadecyl, heptadecyl, and octadecyl groups; Examples include monocyclic alicyclic hydrocarbon groups such as cyclopentyl, cyclohexyl, cycloheptyl, and cyclooctyl groups, as well as polycyclic alicyclic hydrocarbon groups such as decahydronaphthyl, adamantyl, norbornyl, and the following groups (* indicates a bonding site). TIFF0007933518000087.tif10160 Examples of groups formed by combinations include groups formed by combining one or more alkyl groups or one or more alkanediyl groups with one or more alicyclic hydrocarbon groups, such as -alkanediyl group-alicyclic hydrocarbon group, -alicyclic hydrocarbon group-alkyl group, and -alkanediyl group-alicyclic hydrocarbon group-alkyl group.

[0111] R a42 A saturated hydrocarbon group which may have a halogen atom is preferred, and a saturated hydrocarbon group which has an alkyl group having a halogen atom and / or a group represented by formula (a-g3) is more preferred. R a42 When is a saturated hydrocarbon group having a halogen atom, it is preferably a saturated hydrocarbon group having a fluorine atom, more preferably a perfluoroalkyl group or a perfluorocycloalkyl group, even more preferably a perfluoroalkyl group having 1 to 6 carbon atoms, and particularly preferably a perfluoroalkyl group having 1 to 3 carbon atoms. Examples of perfluoroalkyl groups include perfluoromethyl group, perfluoroethyl group, perfluoropropyl group, perfluorobutyl group, perfluoropentyl group, perfluorohexyl group, perfluoroheptyl group, and perfluorooctyl group. Examples of perfluorocycloalkyl groups include perfluorocyclohexyl group. R a42However, if it is a saturated hydrocarbon group having a group represented by formula (a-g3), then R is calculated including the number of carbon atoms in the group represented by formula (a-g3). a42 The total number of carbon atoms is preferably 15 or less, and more preferably 12 or less. If the atom has a substituent represented by formula (a-g3), the number of substituents is preferably one.

[0112] R a42 If is a saturated hydrocarbon group having a group represented by formula (a-g3), then R a42 More preferably, the group is represented by formula (a-g2). TIFF0007933518000088.tif871[In formula (a-g2), A a46 This represents a divalent saturated hydrocarbon group having 1 to 17 carbon atoms, which may contain a halogen atom. X a44 This represents **-O-CO- or **-CO-O- (where ** is A a46 This represents the connection site. A a47 This represents a saturated hydrocarbon group having 1 to 17 carbon atoms, which may contain a halogen atom. However, A a46 , A a47 and X a44 The total number of carbon atoms is 18 or less, A a46 and A a47 At least one of them has at least one halogen atom. * indicates a bonding site with a carbonyl group.

[0113] A a46 The saturated hydrocarbon group preferably has 1 to 6 carbon atoms, and more preferably 1 to 3. A a47 The number of carbon atoms in the saturated hydrocarbon group is preferably 4 to 15, more preferably 5 to 12, A a47 A cyclohexyl group or an adamantyl group is more preferable.

[0114] The preferred structure of the group represented by formula (a-g2) is as follows (* indicates the bonding site with the carbonyl group). TIFF0007933518000089.tif14160

[0115] A a41 Examples of alkanediyl groups in this context include linear alkanediyl groups such as methylene group, ethylene group, propane-1,3-diyl group, butane-1,4-diyl group, pentane-1,5-diyl group, and hexane-1,6-diyl group; and branched alkanediyl groups such as propane-1,2-diyl group, butane-1,3-diyl group, 2-methylpropane-1,2-diyl group, 1-methylbutane-1,4-diyl group, and 2-methylbutane-1,4-diyl group. A a41 Examples of substituents on the alkanediyl group represented by include hydroxyl groups and alkoxy groups having 1 to 6 carbon atoms. A a41 The group is preferably an alkanediyl group having 1 to 4 carbon atoms, more preferably an alkanediyl group having 2 to 4 carbon atoms, and even more preferably an ethylene group.

[0116] A in the group represented by formula (a-g1) a42 , A a43 and A a44 Examples of divalent saturated hydrocarbon groups represented by include linear or branched alkanediyl groups and monocyclic divalent alicyclic saturated hydrocarbon groups, as well as divalent saturated hydrocarbon groups formed by combining alkanediyl groups and divalent alicyclic saturated hydrocarbon groups. Specifically, examples include methylene groups, ethylene groups, propane-1,3-diyl groups, propane-1,2-diyl groups, butane-1,4-diyl groups, 1-methylpropane-1,3-diyl groups, 2-methylpropane-1,3-diyl groups, and 2-methylpropane-1,2-diyl groups. A a42 , A a43 and A a44 Examples of substituents on the divalent saturated hydrocarbon group represented by include hydroxyl groups and alkoxy groups having 1 to 6 carbon atoms. s is preferably 0.

[0117] In the group represented by formula (a-g1), X a42The following are examples of groups whose -O-, -CO-, -CO-O-, or -O-CO-. In the following examples, * and ** represent the bonding site, and ** is -O-CO-R a42 This is the junction site. TIFF0007933518000090.tif47140

[0118] The structural units represented by formula (a4-1) are the structural units shown below and the R in the structural units represented by formula (a4-1) in the structural units below. a41 One example is a structural unit in which the corresponding methyl group is replaced by a hydrogen atom. TIFF0007933518000091.tif99145

[0119] TIFF0007933518000092.tif132150

[0120] Examples of structural units represented by formula (a4-1) include the structural units represented by formula (a4-2) and the structural units represented by formula (a4-3). TIFF0007933518000093.tif4356[In formula (a4-2), R f5 represents a hydrogen atom or a methyl group. L 44 This represents an alkanediyl group having 1 to 6 carbon atoms, and the -CH2- contained in the alkanediyl group may be replaced with -O- or -CO-. R f6 This represents a saturated hydrocarbon group having 1 to 20 fluorine atoms. However, L 44 and R f6 The upper limit for the total number of carbon atoms is 21.

[0121] L 44 The alkanediyl group with 1 to 6 carbon atoms is A a41 Similar to the examples given earlier, the same types of bases can be cited. R f6 The saturated hydrocarbon group is R 42 Similar to the examples given earlier, the same types of bases can be cited. L44 In this compound, an alkanediyl group having 2 to 4 carbon atoms is preferred, and an ethylene group is more preferred.

[0122] Examples of structural units represented by equation (a4-2) include those represented by equations (a4-1-1) to (a4-1-11), respectively. f5 A structural unit in which the corresponding methyl group is replaced by a hydrogen atom can also be cited as a structural unit represented by formula (a4-2).

[0123] TIFF0007933518000094.tif5671[In formula (a4-3), R f7 represents a hydrogen atom or a methyl group. L 5 This represents an alkanediyl group with 1 to 6 carbon atoms. A f13 This represents a divalent saturated hydrocarbon group having 1 to 18 carbon atoms, which may contain a fluorine atom. X f12 This represents *-O-CO- or *-CO-O- (* is A f13 This represents the connection site. A f14 This represents a saturated hydrocarbon group having 1 to 17 carbon atoms, which may contain a fluorine atom. However, A f13 and A f14 At least one of them has a fluorine atom, L 5 , A f13 and A f14 The upper limit for the total number of carbon atoms is 20.

[0124] L 5 The alkanediyl group in A is a41 Examples of groups similar to those exemplified by the alkanediyl group include the following.

[0125] A f13The divalent saturated hydrocarbon group which may have a fluorine atom is preferably a divalent chain saturated hydrocarbon group which may have a fluorine atom and a divalent alicyclic saturated hydrocarbon group which may have a fluorine atom, and more preferably a perfluoroalkanediyl group. Examples of divalent chain-type saturated hydrocarbon groups that may contain a fluorine atom include methylene groups, ethylene groups, propanediyl groups, butanediyl groups, and pentanediyl groups, as well as perfluoroalkanediyl groups such as difluoromethylene groups, perfluoroethylene groups, perfluoropropanediyl groups, perfluorobutanediyl groups, and perfluoropentanediyl groups. The divalent alicyclic saturated hydrocarbon group, which may contain a fluorine atom, may be monocyclic or polycyclic. Examples of monocyclic groups include cyclohexanediyl and perfluorocyclohexanediyl groups. Examples of polycyclic groups include adamantanediyl, norbornanediyl, and perfluoroadamantanediyl groups.

[0126] A f14 The saturated hydrocarbon group and the saturated hydrocarbon group which may have a fluorine atom are R a42The same groups as those exemplified above can be cited. Among them, trifluoromethyl group, difluoromethyl group, methyl group, perfluoroethyl group, 2,2,2-trifluoroethyl group, 1,1,2,2-tetrafluoroethyl group, ethyl group, perfluoropropyl group, 2,2,3,3,3-pentafluoropropyl group, propyl group, perfluorobutyl group, 1,1,2,2,3,3,4,4-octafluorobutyl group, butyl group, perfluoropentyl group, 2,2,3,3,4,4,5,5,5-nonafluoropentyl group, pentyl group, Preferred groups include alkyl fluorides such as hexyl group, perfluorohexyl group, heptyl group, perfluoroheptyl group, octyl group, and perfluorooctyl group, cyclopropylmethyl group, cyclopropyl group, cyclobutylmethyl group, cyclopentyl group, cyclohexyl group, perfluorocyclohexyl group, adamantyl group, adamantylmethyl group, adamantyldimethyl group, norbornyl group, norbornylmethyl group, perfluoroadamantyl group, and perfluoroadamantylmethyl group.

[0127] In equation (a4-3), L 5 An ethylene group is preferred. A f13 The divalent saturated hydrocarbon group is preferably a group containing a divalent chain saturated hydrocarbon group having 1 to 6 carbon atoms and a divalent alicyclic saturated hydrocarbon group having 3 to 12 carbon atoms, and more preferably a divalent chain saturated hydrocarbon group having 2 to 3 carbon atoms. A f14 The saturated hydrocarbon group is preferably a group containing a chain-type saturated hydrocarbon group having 3 to 12 carbon atoms and an alicyclic saturated hydrocarbon group having 3 to 12 carbon atoms, and more preferably a group containing a chain-type saturated hydrocarbon group having 3 to 10 carbon atoms and an alicyclic saturated hydrocarbon group having 3 to 10 carbon atoms. Among these, A f14 The group is preferably a group containing an alicyclic saturated hydrocarbon group having 3 to 12 carbon atoms, and more preferably a cyclopropylmethyl group, a cyclopentyl group, a cyclohexyl group, a norbornyl group, and an adamantyl group.

[0128] Examples of structural units represented by equation (a4-3) include those represented by equations (a4-1'-1) to (a4-1'-11), respectively. f7 A structural unit in which the corresponding methyl group is replaced by a hydrogen atom can also be cited as a structural unit represented by formula (a4-3).

[0129] Another example of a structural unit (a4) is the structural unit represented by formula (a4-4). TIFF0007933518000095.tif4466[In formula (a4-4), R f21 represents a hydrogen atom or a methyl group. A f21 is, -(CH2) j1 -,-(CH2) j2 -O-(CH2) j3 - or - (CH2) j4 -CO-O-(CH2) j5 - represents j1 through j5 each independently represent an integer from 1 to 6. R f22 This represents a saturated hydrocarbon group with 1 to 10 carbon atoms containing a fluorine atom.

[0130] R f22 The saturated hydrocarbon group is R a42 Examples include saturated hydrocarbon groups similar to those represented by R. f22 The C1-C10 alkyl group having a fluorine atom or the C1-C10 alicyclic saturated hydrocarbon group having a fluorine atom is preferred, the C1-C10 alkyl group having a fluorine atom is more preferred, and the C1-C6 alkyl group having a fluorine atom is even more preferred.

[0131] In equation (a4-4), A f21 As for, -(CH2) j1 - is preferred, an ethylene group or a methylene group is more preferred, and a methylene group is even more preferred.

[0132] As a structural unit represented by formula (a4-4), for example, the following structural unit and the structural unit represented by the following formula, R in structural unit (a4-4) f21 One example is a structural unit in which the corresponding methyl group is replaced by a hydrogen atom. TIFF0007933518000096.tif86160

[0133] If resin (A) has structural units (a4), the content of these units is preferably 1 to 20 mol%, more preferably 2 to 15 mol%, and even more preferably 3 to 10 mol%, relative to the total structural units of resin (A).

[0134] <Structural Unit (a5)> Examples of non-eliminating hydrocarbon groups in structural unit (a5) include groups having linear, branched, or cyclic hydrocarbon groups. Among these, structural unit (a5) is preferably a group having an alicyclic hydrocarbon group. An example of a structural unit (a5) is the structural unit represented by formula (a5-1). TIFF0007933518000097.tif3351 [In formula (a5-1), R 51 represents a hydrogen atom or a methyl group. R 52 This represents an alicyclic hydrocarbon group having 3 to 18 carbon atoms, and the hydrogen atoms contained in this alicyclic hydrocarbon group may be substituted with an aliphatic hydrocarbon group having 1 to 8 carbon atoms. L 55 This represents a single bond or a divalent saturated hydrocarbon group having 1 to 18 carbon atoms, and the -CH2- contained in the saturated hydrocarbon group may be replaced by -O- or -CO-.

[0135] R 52 The alicyclic hydrocarbon group in this compound may be either monocyclic or polycyclic. Examples of monocyclic alicyclic hydrocarbon groups include cyclopropyl, cyclobutyl, cyclopentyl, and cyclohexyl groups. Examples of polycyclic alicyclic hydrocarbon groups include adamantyl and norbornyl groups. Examples of aliphatic hydrocarbon groups having 1 to 8 carbon atoms include alkyl groups such as methyl, ethyl, propyl, isopropyl, butyl, sec-butyl, tert-butyl, pentyl, hexyl, octyl, and 2-ethylhexyl. Examples of substituted alicyclic hydrocarbon groups include the 3-methyladamantyl group. R 52 Preferably, it is an unsubstituted alicyclic hydrocarbon group having 3 to 18 carbon atoms, and more preferably, an adamantyl group, a norbornyl group, or a cyclohexyl group.

[0136] L 55 Examples of divalent saturated hydrocarbon groups in this context include divalent chain-type saturated hydrocarbon groups and divalent alicyclic saturated hydrocarbon groups, with divalent chain-type saturated hydrocarbon groups being preferred. Examples of divalent chain-type saturated hydrocarbon groups include methylene groups, ethylene groups, propanediyl groups, butanediyl groups, and pentanediyl groups, which are all types of alkanediyl groups. The divalent alicyclic saturated hydrocarbon group may be monocyclic or polycyclic. Examples of monocyclic alicyclic saturated hydrocarbon groups include cycloalkanediyl groups such as cyclopentanediyl and cyclohexanediyl. Examples of polycyclic divalent alicyclic saturated hydrocarbon groups include adamantanediyl and norbornanediyl.

[0137] L 55 Groups in which the -CH2- contained in the divalent saturated hydrocarbon group represented by is replaced with -O- or -CO- include, for example, the groups represented by formulas (L1-1) to (L1-4). In the following formulas, * and ** represent bonding sites, respectively, and * represents the bonding site with the oxygen atom. TIFF0007933518000098.tif18164 formula (L1-1), X x1 This represents *-O-CO- or *-CO-O- (* is L x1 This represents the connection site. L x1 This represents a divalent aliphatic saturated hydrocarbon group having 1 to 16 carbon atoms. L x2 This represents a single bond or a divalent aliphatic saturated hydrocarbon group having 1 to 15 carbon atoms. However, L x1 and L x2 The total number of carbon atoms is 16 or less. In formula (L1-2), L x3 This represents a divalent aliphatic saturated hydrocarbon group with 1 to 17 carbon atoms. L x4 This represents a single bond or a divalent aliphatic saturated hydrocarbon group having 1 to 16 carbon atoms. However, L x3 and L x4 The total number of carbon atoms is 17 or less. In formula (L1-3), L x5 This represents a divalent aliphatic saturated hydrocarbon group with 1 to 15 carbon atoms. L x6 and L x7 Each of these independently represents a single bond or a divalent aliphatic saturated hydrocarbon group having 1 to 14 carbon atoms. However, L x5 , L x6 and L x7 The total number of carbon atoms is 15 or less. In formula (L1-4), L x8 and L x9 This represents a single bond or a divalent aliphatic saturated hydrocarbon group having 1 to 12 carbon atoms. W x1 This represents a divalent alicyclic saturated hydrocarbon group with 3 to 15 carbon atoms. However, L x8 , L x9 and W x1 The total number of carbon atoms is 15 or less.

[0138] L x1 Preferably, this is a divalent aliphatic saturated hydrocarbon group having 1 to 8 carbon atoms, more preferably a methylene group or an ethylene group. L x2 Preferably, it is a single bond or a divalent aliphatic saturated hydrocarbon group having 1 to 8 carbon atoms, more preferably a single bond. L x3Preferably, it is a divalent aliphatic saturated hydrocarbon group having 1 to 8 carbon atoms. L x4 Preferably, it is a single bond or a divalent aliphatic saturated hydrocarbon group having 1 to 8 carbon atoms. L x5 Preferably, this is a divalent aliphatic saturated hydrocarbon group having 1 to 8 carbon atoms, more preferably a methylene group or an ethylene group. L x6 Preferably, it is a single bond or a divalent aliphatic saturated hydrocarbon group having 1 to 8 carbon atoms, more preferably a methylene group or an ethylene group. L x7 Preferably, it is a single bond or a divalent aliphatic saturated hydrocarbon group having 1 to 8 carbon atoms. L x8 Preferably, it is a single bond or a divalent aliphatic saturated hydrocarbon group having 1 to 8 carbon atoms, more preferably a single bond or a methylene group. L x9 Preferably, it is a single bond or a divalent aliphatic saturated hydrocarbon group having 1 to 8 carbon atoms, more preferably a single bond or a methylene group. W x1 Preferably, this is a divalent alicyclic saturated hydrocarbon group having 3 to 10 carbon atoms, more preferably a cyclohexanediyl group or an adamantanediyl group.

[0139] Examples of groups represented by formula (L1-1) include the divalent groups shown below. TIFF0007933518000099.tif53136

[0140] Examples of groups represented by formula (L1-2) include the divalent groups shown below. TIFF0007933518000100.tif23130

[0141] Examples of groups represented by formula (L1-3) include the divalent groups shown below. TIFF0007933518000101.tif15148

[0142] Examples of groups represented by formula (L1-4) include the divalent groups shown below. TIFF0007933518000102.tif26114

[0143] L 55 Preferably, it is a single bond or a group represented by formula (L1-1).

[0144] The structural units (a5-1) are the structural units shown below and the R in the structural unit (a5-1) within the structural units below. 51 One example is a structural unit in which the corresponding methyl group is replaced by a hydrogen atom. TIFF0007933518000103.tif111150 If resin (A) has structural units (a5), the content of these units is preferably 1 to 30 mol%, more preferably 2 to 20 mol%, and even more preferably 3 to 15 mol%, relative to the total structural units of resin (A).

[0145] <Structural Unit (a6)> Structural unit (a6) is a structural unit having an -SO2- group, and it is preferable that it has an -SO2- group in its side chain. A structural unit having an -SO2- group may have a linear structure having an -SO2- group, a branched structure having an -SO2- group, or a cyclic structure (monocyclic and polycyclic) having an -SO2- group. Preferably, it is a structural unit having a cyclic structure having an -SO2- group, and more preferably, it is a structural unit having a cyclic structure (sultone ring) containing -SO2-O-.

[0146] As a sultone ring, the following equation (T 1 -1), formula (T 1 -2), formula (T 1 -3) and formula (T 1 A ring represented by (T-4) is an example. The bonding site can be at any position. The sultone ring may be monocyclic, but it is preferably polycyclic. A polycyclic sultone ring means a bridging ring containing -SO2-O- as the atomic group constituting the ring, and is represented by formula (T 1 -1) and formula (T1 A ring represented by equation (T) is an example. A Sultone ring is given by equation (T 1 As shown in (2), the ring may contain heteroatoms in addition to -SO2-O- as a group of atoms constituting the ring. Examples of heteroatoms include oxygen atoms, sulfur atoms, or nitrogen atoms, with oxygen atoms being preferred. TIFF0007933518000104.tif3186

[0147] The sultone ring may have substituents, and examples of substituents include C1-C12 alkyl groups which may have a halogen atom or a hydroxyl group, halogen atoms, hydroxyl groups, cyano groups, C1-C12 alkoxy groups, C6-C12 aryl groups, C7-C12 aralkyl groups, glycidyloxy groups, C2-C12 alkoxycarbonyl groups, and C2-C4 alkylcarbonyl groups.

[0148] Examples of halogen atoms include fluorine, chlorine, bromine, and iodine. Examples of alkyl groups include methyl, ethyl, propyl, butyl, pentyl, hexyl, octyl, and decyl groups, preferably alkyl groups having 1 to 6 carbon atoms, and more preferably methyl groups. Examples of alkyl groups having a halogen atom include trifluoromethyl, perfluoroethyl, perfluoropropyl, perfluoroisopropyl, perfluorobutyl, perfluorosec-butyl, perfluorotert-butyl, perfluoropentyl, perfluorohexyl, trichloromethyl, tribromomethyl, and triiodomethyl, with trifluoromethyl being preferred. Examples of alkyl groups having a hydroxyl group include hydroxymethyl groups and 2-hydroxyethyl groups. Examples of alkoxy groups include methoxy, ethoxy, propoxy, butoxy, pentyloxy, hexyloxy, heptyloxy, octyloxy, decyloxy, and dodecyloxy groups. Examples of aryl groups include phenyl, naphthyl, anthryl, p-methylphenyl, p-tert-butylphenyl, p-adamantylphenyl, tolyl, xylyl, cumyl, mesityl, biphenyl, phenanthryl, 2,6-diethylphenyl, and 2-methyl-6-ethylphenyl. Examples of aralkyl groups include benzyl, phenethyl, phenylpropyl, naphthylmethyl, and naphthylethyl groups. Examples of alkoxycarbonyl groups include groups in which an alkoxy group such as a methoxycarbonyl group or an ethoxycarbonyl group is bonded to a carbonyl group, preferably an alkoxycarbonyl group having 6 or fewer carbon atoms, and more preferably a methoxycarbonyl group. Examples of alkylcarbonyl groups include acetyl, propionyl, and butyryl groups.

[0149] From the viewpoint of ease of production of monomers that lead to structural unit (a6), a sultone ring without substituents is preferred. As the sultone ring, the ring represented by the following formula (T1') is preferred. TIFF0007933518000105.tif3172[In formula (T1'), X 11 represents an oxygen atom, a sulfur atom, or a methylene group. R 41 This represents a C1-C12 alkyl group which may have a halogen atom or a hydroxyl group, a halogen atom, a hydroxyl group, a cyano group, a C1-C12 alkoxy group, a C6-C12 aryl group, a C7-C12 aralkyl group, a glycidyloxy group, a C2-C12 alkoxycarbonyl group, or a C2-C4 alkylcarbonyl group. ma represents an integer from 0 to 9. When ma is 2 or greater, multiple R 41 They may be the same or different. The connection point can be at any location. X 11 This is preferably an oxygen atom or a methylene group, and more preferably a methylene group. R41 Examples include substituents similar to those of a sultone ring, and C1-C12 alkyl groups which may have a halogen atom or a hydroxyl group are preferred.

[0150] As a sultone ring, the ring represented by formula (T1) is more preferable. TIFF0007933518000106.tif3148[In formula (T1), R 8 This represents a C1-C12 alkyl group which may have a halogen atom or a hydroxyl group, a halogen atom, a hydroxyl group, a cyano group, a C1-C12 alkoxy group, a C6-C12 aryl group, a C7-C12 aralkyl group, a glycidyloxy group, a C2-C12 alkoxycarbonyl group, or a C2-C4 alkylcarbonyl group. m represents an integer from 0 to 9. When m is 2 or greater, multiple R 8 They may be the same or different. The connection point can be at any location.

[0151] R 8 R 41 Similar examples include the above. In formula (T1'), ma and in formula (T1), m are preferably 0 or 1, and more preferably 0.

[0152] The following rings are examples of rings represented by formula (T1') and formula (T1). The bonding site is at an arbitrary position. TIFF0007933518000107.tif46145 The structural unit having a sultone ring preferably has the following groups. * in the following groups represents a bonding site. TIFF0007933518000108.tif46145

[0153] The structural unit having the -SO2- group preferably further has a group derived from a polymerizable group. Examples of polymerizable groups include vinyl group, acryloyl group, methacryloyl group, acryloyloxy group, methacryloyloxy group, acryloylamino group, methacryloylamino group, acryloylthio group, and methacryloylthio group. In particular, the monomer that leads to the structural unit (a6) is preferably a monomer having an ethylenically unsaturated bond, and more preferably a (meth)acrylic monomer.

[0154] The structural unit (a6) is preferably a structural unit represented by formula (Ix). TIFF0007933518000109.tif4956 [In formula (Ix), R x This represents an alkyl group having 1 to 6 carbon atoms, which may contain a halogen atom, a hydrogen atom, or a halogen atom. A xx is an oxygen atom, -N(R c )- or represents a sulfur atom. A x represents a divalent saturated hydrocarbon group having 1 to 18 carbon atoms, and the -CH2- contained in the saturated hydrocarbon group is -O-, -CO-, or -N(R d )- may be replaced with this. X 11 represents an oxygen atom, a sulfur atom, or a methylene group. R 41 This represents a C1-C12 alkyl group which may have a halogen atom or a hydroxyl group, a halogen atom, a hydroxyl group, a cyano group, a C1-C12 alkoxy group, a C6-C12 aryl group, a C7-C12 aralkyl group, a glycidyloxy group, a C2-C12 alkoxycarbonyl group, or a C2-C4 alkylcarbonyl group. ma represents an integer from 0 to 9. When ma is 2 or greater, multiple R 41 They may be the same or different. R c and R d Each of these independently represents either a hydrogen atom or an alkyl group having 1 to 6 carbon atoms.

[0155] R x Examples of halogen atoms include fluorine, chlorine, bromine, and iodine. R x Examples of alkyl groups include methyl, ethyl, n-propyl, isopropyl, n-butyl, sec-butyl, tert-butyl, n-pentyl, and n-hexyl groups, preferably alkyl groups having 1 to 4 carbon atoms, and more preferably methyl or ethyl groups. R x Examples of alkyl groups having a halogen atom include trifluoromethyl, perfluoroethyl, perfluoropropyl, perfluoroisopropyl, perfluorobutyl, perfluorosec-butyl, perfluorotert-butyl, perfluoropentyl, perfluorohexyl, trichloromethyl, tribromomethyl, and triiodomethyl. R x Preferably, it is a hydrogen atom or an alkyl group having 1 to 4 carbon atoms, more preferably a hydrogen atom, a methyl group, or an ethyl group, and even more preferably a hydrogen atom or a methyl group.

[0156] A x Examples of divalent saturated hydrocarbon groups include linear alkanediyl groups, branched alkanediyl groups, and monocyclic or polycyclic divalent alicyclic saturated hydrocarbon groups, and combinations of two or more of these groups are also acceptable. Specifically, methylene group, ethylene group, propane-1,3-diyl group, propane-1,2-diyl group, butane-1,4-diyl group, pentane-1,5-diyl group, hexane-1,6-diyl group, heptane-1,7-diyl group, octane-1,8-diyl group, nonane-1,9-diyl group, decane-1,10-diyl group, undecane-1,11-diyl group Linear alkanediyl groups such as dodecane-1,12-diyl group, tridecane-1,13-diyl group, tetradecane-1,14-diyl group, pentadecane-1,15-diyl group, hexadecane-1,16-diyl group, heptadecane-1,17-diyl group, ethane-1,1-diyl group, propane-1,1-diyl group, and propane-2,2-diyl group; Branched alkanediyl groups such as butane-1,3-diyl group, 2-methylpropane-1,3-diyl group, 2-methylpropane-1,2-diyl group, pentane-1,4-diyl group, and 2-methylbutane-1,4-diyl group; Monocyclic, divalent, alicyclic saturated hydrocarbon groups such as cycloalkanediyl groups, cyclobutane-1,3-diyl, cyclopentane-1,3-diyl, cyclohexane-1,4-diyl, and cyclooctane-1,5-diyl; Examples include polycyclic divalent alicyclic saturated hydrocarbon groups such as norbornane-1,4-diyl group, norbornane-2,5-diyl group, adamantane-1,5-diyl group, and adamantane-2,6-diyl group.

[0157] R 41 , X 11 And ma can be the same as in equation (T1'). Examples of sultone rings include those mentioned above, and among them, those with specified bonding positions are preferred.

[0158] The following are examples of structural units (a6): TIFF0007933518000110.tif92150

[0159] In particular, structural units represented by formulas (a6-1), (a6-2), (a6-6), (a6-7), (a6-8), and (a6-12) are preferred, and structural units represented by formulas (a6-1), (a6-2), (a6-7), and (a6-8) are more preferred. If resin (A) has structural units (a6), the content of these units is preferably 1 to 50 mol%, more preferably 2 to 40 mol%, and even more preferably 3 to 30 mol%, relative to the total structural units of resin (A).

[0160] <Structural Unit (II)> The resin (A) may further contain structural units that decompose upon exposure to generate acid (hereinafter sometimes referred to as "structural unit (II)"). Specifically, structural unit (II) is the structural unit described in Japanese Patent Application Publication No. 2016-79235, and is preferably a structural unit having a sulfonate group or carboxylate group and an organic cation in its side chain, or a structural unit having a sulfonio group and an organic anion in its side chain.

[0161] The structural unit having a sulfonate group or carboxylate group and an organic cation in its side chain is preferably the structural unit represented by formula (II-2-A'). TIFF0007933518000111.tif3089 [In formula (II-2-A'), X III3 represents a divalent saturated hydrocarbon group having 1 to 18 carbon atoms, and the -CH2- contained in the saturated hydrocarbon group may be replaced with -O-, -S-, or -CO-, and the hydrogen atom contained in the saturated hydrocarbon group may be replaced with a halogen atom, an alkyl group having 1 to 6 carbon atoms which may contain a halogen atom, or a hydroxyl group. A x1 This represents an alkanediyl group having 1 to 8 carbon atoms, and the hydrogen atoms contained in the alkanediyl group may be substituted with fluorine atoms or perfluoroalkyl groups having 1 to 6 carbon atoms. RA - This represents a sulfonate group or a carboxylate group. R III3This represents a hydrogen atom, a halogen atom, or an alkyl group having 1 to 6 carbon atoms that may contain a halogen atom. ZA + This represents an organic cation.

[0162] R III3 Examples of halogen atoms represented by this formula include fluorine, chlorine, bromine, and iodine atoms. R III3 A C1-C6 alkyl group which may have a halogen atom represented by R is: a8 Examples include alkyl groups having 1 to 6 carbon atoms that may contain a halogen atom represented by . A x1 Examples of C1-C8 alkanediyl groups represented by include methylene group, ethylene group, propane-1,3-diyl group, butane-1,4-diyl group, pentane-1,5-diyl group, hexane-1,6-diyl group, ethane-1,1-diyl group, propane-1,1-diyl group, propane-1,2-diyl group, propane-2,2-diyl group, pentane-2,4-diyl group, 2-methylpropane-1,3-diyl group, 2-methylpropane-1,2-diyl group, pentane-1,4-diyl group, and 2-methylbutane-1,4-diyl group. A x1 Examples of C1-C6 perfluoroalkyl groups that may be substituted include trifluoromethyl, perfluoroethyl, perfluoropropyl, perfluoroisopropyl, perfluorobutyl, perfluorosec-butyl, perfluorotert-butyl, perfluoropentyl, and perfluorohexyl groups.

[0163] X III3 Examples of divalent saturated hydrocarbon groups having 1 to 18 carbon atoms represented by include linear or branched alkanediyl groups, monocyclic or polycyclic divalent alicyclic saturated hydrocarbon groups, and combinations thereof. Specifically, linear alkanediyl groups such as methylene group, ethylene group, propane-1,3-diyl group, propane-1,2-diyl group, butane-1,4-diyl group, pentane-1,5-diyl group, hexane-1,6-diyl group, heptane-1,7-diyl group, octane-1,8-diyl group, nonane-1,9-diyl group, decane-1,10-diyl group, undecane-1,11-diyl group, dodecane-1,12-diyl group, etc.; branched alkanediyl groups such as butane-1,3-diyl group, 2-methylpropane-1,3-diyl group, 2-methylpropane-1,2-diyl group, pentane-1,4-diyl group, 2-methylbutane-1,4-diyl group, etc. Divalent monocyclic or alicyclic saturated hydrocarbon groups such as cycloalkanediyl groups including cyclobutane-1,3-diyl, cyclopentane-1,3-diyl, cyclohexane-1,4-diyl, and cyclooctane-1,5-diyl; Examples include divalent polycyclic alicyclic saturated hydrocarbon groups such as norbornane-1,4-diyl group, norbornane-2,5-diyl group, adamantane-1,5-diyl group, and adamantane-2,6-diyl group.

[0164] Examples of groups in which the -CH2- group in a saturated hydrocarbon group is replaced by -O-, -S-, or -CO- include the divalent groups represented by formulas (X1) to (X53). However, the number of carbon atoms before the -CH2- group in the saturated hydrocarbon group is replaced by -O-, -S-, or -CO- is 17 or less. In the following formulas, * and ** represent bonding sites, and * is A x1 This represents the connection point. TIFF0007933518000112.tif145161

[0165] X 3 This represents a divalent saturated hydrocarbon group with 1 to 16 carbon atoms. X 4 This represents a divalent saturated hydrocarbon group with 1 to 15 carbon atoms. X 5 This represents a divalent saturated hydrocarbon group with 1 to 13 carbon atoms. X 6 This represents a divalent saturated hydrocarbon group with 1 to 14 carbon atoms. X 7 This represents a trivalent saturated hydrocarbon group with 1 to 14 carbon atoms. X 8 This represents a divalent saturated hydrocarbon group with 1 to 13 carbon atoms.

[0166] ZA + Examples of organic cations represented by the formulas (b2-1) to (b2-4) described below include organic onium cations, organic sulfonium cations, organic iodonium cations, organic ammonium cations, benzothiazolium cations, and organic phosphonium cations. Among these, organic sulfonium cations and organic iodonium cations are preferred, and aryl sulfonium cations are more preferred. Specifically, examples include cations represented by any of the formulas (b2-1) to (b2-4) described below (hereinafter, these may be referred to as "cation (b2-1)" etc. depending on the formula number).

[0167] The structural unit represented by formula (II-2-A') is preferably the structural unit represented by formula (II-2-A). JPEG0007933518000113.jpg37109 [In formula (II-2-A), R III3 , X III3 and ZA + This expresses the same meaning as above. z represents an integer between 0 and 6. R III2 and R III4 Each of these independently represents a hydrogen atom, a fluorine atom, or a perfluoroalkyl group having 1 to 6 carbon atoms, and when z is 2 or greater, multiple R III2 and R III4 They may be the same or different from each other. Q a and Q b Each of these independently represents either a fluorine atom or a perfluoroalkyl group having 1 to 6 carbon atoms.

[0168] R III2 , R III4 Q a and Q bAs perfluoroalkyl groups having 1 to 6 carbon atoms, the following Q will be described later. b1 Examples include perfluoroalkyl groups with 1 to 6 carbon atoms, represented by [the formula shown].

[0169] The structural unit represented by formula (II-2-A) is preferably the structural unit represented by formula (II-2-A-1). TIFF0007933518000114.tif5576 [In formula (II-2-A-1), R III2 , R III3 , R III4 Q a Q b , z and ZA + This expresses the same meaning as above. R III5 This represents a saturated hydrocarbon group with 1 to 12 carbon atoms. X I2 This represents a divalent saturated hydrocarbon group having 1 to 11 carbon atoms, where the -CH2- group may be replaced with -O-, -S-, or -CO-, and the hydrogen atoms in the saturated hydrocarbon group may be substituted with halogen atoms or hydroxyl groups.

[0170] R III5 Examples of saturated hydrocarbon groups having 1 to 12 carbon atoms represented by include linear or branched alkyl groups such as methyl, ethyl, propyl, isopropyl, butyl, sec-butyl, tert-butyl, pentyl, hexyl, heptyl, octyl, nonyl, decyl, undecyl, and dodecyl groups. X I2 As a divalent saturated hydrocarbon group represented by , X III3 Examples include divalent saturated hydrocarbon groups represented by .

[0171] The structural unit represented by formula (II-2-A-2) is preferred over the structural unit represented by formula (II-2-A-1). TIFF0007933518000115.tif5491 [In formula (II-2-A-2), R III3 , RIII5 and ZA + represent the same meaning as described above. m and n each independently represent 1 or 2.]

[0172] Examples of the structural unit represented by formula (II-2-A') include the following structural units, R III3 structural units in which the group corresponding to the methyl group is replaced by a hydrogen atom, a halogen atom (for example, a fluorine atom), an alkyl group having 1 to 6 carbon atoms which may have a halogen atom (for example, a trifluoromethyl group and the like), and the like, and the structural units described in International Publication No. 2012 / 050015. ZA + represents an organic cation. TIFF0007933518000116.tif86163

[0173] The structural unit having a sulfonio group and an organic anion in its side chain is preferably a structural unit represented by formula (II-1-1). TIFF0007933518000117.tif3689[In formula (II-1-1), A II1 represents a single bond or a divalent linking group. R II1 represents a divalent aromatic hydrocarbon group having 6 to 18 carbon atoms. R II2 and R II3 each independently represent a hydrocarbon group having 1 to 18 carbon atoms, and R II2 and R II3 may be bonded to each other to form a ring together with the sulfur atom to which they are bonded. R II4 represents a hydrogen atom, a halogen atom, or an alkyl group having 1 to 6 carbon atoms which may have a halogen atom. A - represents an organic anion.] R II1 Examples of the divalent aromatic hydrocarbon group having 6 to 18 carbon atoms represented by include a phenylene group, a naphthylene group and the like. R II2 and R II3Examples of hydrocarbon groups represented by this symbol include alkyl groups, alicyclic hydrocarbon groups, aromatic hydrocarbon groups, and groups formed by combining these. Examples of alkyl groups and alicyclic hydrocarbon groups are the same as those described above. Examples of aromatic hydrocarbon groups include aryl groups such as phenyl, naphthyl, anthryl, biphenyl, and phenanthryl groups. Examples of combined groups include groups combining alkyl groups and alicyclic hydrocarbon groups as described above, aralkyl groups such as benzyl groups, aromatic hydrocarbon groups having alkyl groups (p-methylphenyl group, p-tert-butylphenyl group, tolyl group, xylyl group, cumenyl group, mesityl group, 2,6-diethylphenyl group, 2-methyl-6-ethylphenyl group, etc.), aromatic hydrocarbon groups having alicyclic hydrocarbon groups (p-cyclohexylphenyl group, p-adamantylphenyl group, etc.), and aryl-cycloalkyl groups such as phenylcyclohexyl group. R II4 Examples of halogen atoms represented by this formula include fluorine, chlorine, bromine, and iodine atoms. R II4 A C1-C6 alkyl group which may have a halogen atom represented by R is: a8 Examples include alkyl groups having 1 to 6 carbon atoms that may contain a halogen atom represented by . A II1 Examples of divalent linking groups represented by include divalent saturated hydrocarbon groups having 1 to 18 carbon atoms, and the -CH2- contained in the divalent saturated hydrocarbon group may be replaced with -O-, -S-, or -CO-. Specifically, X III3 Examples include divalent saturated hydrocarbon groups with 1 to 18 carbon atoms, represented by .

[0174] The cation-containing structural unit in formula (II-1-1) is the structural unit represented below, R II4Examples include structural units in which the group corresponding to the methyl group is replaced by a hydrogen atom, a halogen atom (e.g., a fluorine atom), or a C1-C6 alkyl group that may have a halogen atom (e.g., a trifluoromethyl group). TIFF0007933518000118.tif85130

[0175] A - Examples of organic anions represented by include sulfonic acid anions, sulfonylimide anions, sulfonylmethide anions, and carboxylic acid anions. - The organic anion represented by is preferably a sulfonate anion, and examples of sulfonate anions include those similar to the anion represented by formula (B1) described later.

[0176] A - Examples of sulfonylimid anions represented by the formula include the following: TIFF0007933518000119.tif36136

[0177] Examples of sulfonylmethide anions include the following: TIFF0007933518000120.tif29123

[0178] Examples of carboxylic acid anions include the following: TIFF0007933518000121.tif51152

[0179] Examples of structural units represented by formula (II-1-1) include the following structural units: TIFF0007933518000122.tif88149

[0180] When resin (A) contains structural unit (II), the content of structural unit (II) is preferably 1 to 20 mol%, more preferably 2 to 15 mol%, and even more preferably 3 to 10 mol%, relative to the total structural units of resin (A).

[0181] The resin (A) may have structural units other than those described above, and examples of such structural units include structural units well known in the art.

[0182] The resin (A) is preferably a resin consisting of structural unit (IA) and structural unit (a1), a resin consisting of structural unit (IA) and structural unit (s), a resin consisting of structural unit (IA) and structural unit (a1) and structural unit (s), a resin consisting of structural unit (IA) and structural unit (a1) and structural unit (s) and structural unit (a4) and / or structural unit (a5), a resin consisting only of structural unit (IA), or a resin consisting only of structural unit (IA) and structural unit (a4), and more preferably a resin consisting of structural unit (IA) and structural unit (a1) and structural unit (s), a resin consisting of structural unit (IA) and structural unit (s), or a resin consisting only of structural unit (IA) and structural unit (a4) and structural unit (a5), a resin consisting only of structural unit (IA) and structural unit (a4), or a resin consisting only of structural unit (IA) and structural unit (a1).

[0183] Structural unit (a1) is preferably at least one selected from the group consisting of structural unit (a1-0), structural unit (a1-1), and structural unit (a1-2) (preferably a structural unit having a cyclohexyl group or a cyclopentyl group), and more preferably at least two selected from the group consisting of structural unit (a1-0), structural unit (a1-1), and structural unit (a1-2) (preferably a structural unit having a cyclohexyl group or a cyclopentyl group). The structural unit (s) is preferably at least one selected from the group consisting of structural units (a2) and structural units (a3). The structural unit (a2) is preferably structural unit (a2-A) or structural unit (a2-1). The structural unit (a3) ​​is preferably at least one selected from the group consisting of structural units represented by formula (a3-1), structural units represented by formula (a3-2), and structural units represented by formula (a3-4).

[0184] Each structural unit constituting resin (A) may be used individually or in combination of two or more types, and these structural units can be produced by known polymerization methods (e.g., radical polymerization) using monomers that derive these structural units. The content of each structural unit in resin (A) can be adjusted by the amount of monomer used in polymerization. The weight-average molecular weight of resin (A) is preferably 2,000 or more (more preferably 2,500 or more, even more preferably 3,000 or more) and 50,000 or less (more preferably 30,000 or less, even more preferably 15,000 or less). In this specification, the weight-average molecular weight is the value obtained by gel permulation chromatography. Gel permulation chromatography can be performed using the analytical conditions described in the examples.

[0185] [Resist composition] The resist composition of the present invention preferably contains a resin (A) and an acid generator known in the resist field (hereinafter sometimes referred to as "acid generator (B)"). The resist composition of the present invention may further contain resins other than resin (A). The resist composition of the present invention preferably contains a quencher (hereinafter sometimes referred to as "quencher (C)") such as a salt that generates an acid with a lower acidity than the acid generated from the acid generator, and preferably contains a solvent (hereinafter sometimes referred to as "solvent (E)").

[0186] <Resins other than resin (A)> The resist composition of the present invention may also contain resins other than resin (A). Resins other than resin (A) are resins that do not contain structural units (IA), and examples of such resins include resins that have structural units having acid-unstable groups and do not contain structural units (IA) (hereinafter sometimes referred to as "resin (A2)"), resins consisting only of structural units (a4), and resins consisting of structural units (a4) and structural units (a5) (hereinafter sometimes referred to as resin (X) when referring to resins consisting only of structural units (a4) and resins consisting of structural units (a4) and structural units (a5) together). Resin (A2) may further contain the above-mentioned structural units (s), etc. In resin (X), the content of structural unit (a4) is preferably 30 mol% or more, more preferably 40 mol% or more, and even more preferably 45 mol% or more, relative to the total amount of all structural units in resin (X). Each structural unit constituting resin (A2) and resin (X) may be used individually or in combination of two or more types, and these structural units can be produced by known polymerization methods (e.g., radical polymerization) using monomers that induce these structural units. The content of each structural unit in resin (X) can be adjusted by the amount of monomer used in polymerization. The weight-average molecular weights of resin (A2) and resin (X) are preferably 6,000 or more (more preferably 7,000 or more) and 80,000 or less (more preferably 60,000 or less), respectively. The means for measuring the weight-average molecular weight of resin (A2) and resin (X) are the same as in the case of resin (A). When the resist composition of the present invention contains resin (A2), its content is typically 1 to 2,500 parts by mass (more preferably 10 to 1,000 parts by mass) per 100 parts by mass of resin (A). Furthermore, if the resist composition contains resin (X), its content is preferably 1 to 60 parts by mass, more preferably 1 to 50 parts by mass, even more preferably 1 to 40 parts by mass, even more preferably 1 to 30 parts by mass, and even more preferably 1 to 8 parts by mass, per 100 parts by mass of resin (A).

[0187] The content of resin (A) in the resist composition is preferably 80% to 99% by mass, and more preferably 90% to 99% by mass, relative to the solid content of the resist composition. Furthermore, if resins other than resin (A) are included, the total content of resin (A) and the other resins is preferably 80% to 99% by mass, and more preferably 90% to 99% by mass, relative to the solid content of the resist composition. The solid content of the resist composition and the resin content thereto can be measured by known analytical means such as liquid chromatography or gas chromatography.

[0188] <Acid Generator (B)> The acid generator (B) may be either nonionic or ionic. Examples of nonionic acid generators include sulfonate esters (e.g., 2-nitrobenzyl ester, aromatic sulfonate, oxime sulfonate, N-sulfonyloxiimide, sulfonyloxyketone, diazonaphthoquinone 4-sulfonate) and sulfones (e.g., disulfone, ketosulfone, sulfonyldiazomethane). Typical ionic acid generators include onium salts containing onium cations (e.g., diazonium salts, phosphonium salts, sulfonium salts, iodonium salts). Examples of onium salt anions include sulfonic acid anions, sulfonylimide anions, and sulfonylmethide anions. As the acid generator (B), compounds that generate acid by radiation as described in Japanese Patent Publication Nos. 63-26653, 55-164824, 62-69263, 63-146038, 63-163452, 62-153853, 63-146029, U.S. Patent Nos. 3,779,778 and 3,849,137, German Patent No. 3914407, European Patent No. 126,712, etc., can be used. Compounds manufactured by known methods may also be used. Two or more types of acid generators (B) may be used in combination.

[0189] The acid generator (B) is preferably a salt represented by formula (B1) (hereinafter sometimes referred to as "acid generator (B1)"). TIFF0007933518000123.tif2862[In formula (B1), Q b1 and Q b2 Each of these independently represents a hydrogen atom, a fluorine atom, a perfluoroalkyl group having 1 to 6 carbon atoms, or an alkyl group having 1 to 6 carbon atoms. L b1 This represents a divalent saturated hydrocarbon group having 1 to 24 carbon atoms, and the -CH2- contained in the divalent saturated hydrocarbon group may be replaced with -O- or -CO-, and the hydrogen atom contained in the divalent saturated hydrocarbon group may be substituted with a fluorine atom or a hydroxyl group. Y represents a methyl group which may have substituents or an alicyclic hydrocarbon group having 3 to 24 carbon atoms which may have substituents, and the -CH2- contained in the alicyclic hydrocarbon group may be replaced with -O-, -S-, -SO2- or -CO-. Z1 + This represents an organic cation.

[0190] Q b1 and Q b2 Examples of perfluoroalkyl groups include trifluoromethyl, perfluoroethyl, perfluoropropyl, perfluoroisopropyl, perfluorobutyl, perfluorosec-butyl, perfluorotert-butyl, perfluoropentyl, and perfluorohexyl groups. Q b1 and Q b2 Examples of alkyl groups include methyl, ethyl, propyl, isopropyl, butyl, sec-butyl, tert-butyl, pentyl, and hexyl groups. The acid generator (B) is preferably a fluorine-containing acid generator, Q b1 and Q b2 It is preferable that at least one of them contains a fluorine atom or a perfluoroalkyl group, more preferably at least one is a fluorine atom or a perfluoroalkyl group, even more preferably each is independently a fluorine atom or a trifluoromethyl group, and even more preferably both are fluorine atoms.

[0191] L b1 Examples of divalent saturated hydrocarbon groups in this context include linear alkanediyl groups, branched alkanediyl groups, and monocyclic or polycyclic divalent alicyclic saturated hydrocarbon groups. Groups formed by combining two or more of these groups may also be used. Specifically, linear alkane diyl groups such as methylene group, ethylene group, propane-1,3-diyl group, butane-1,4-diyl group, pentane-1,5-diyl group, hexane-1,6-diyl group, heptane-1,7-diyl group, octane-1,8-diyl group, nonane-1,9-diyl group, decane-1,10-diyl group, undecane-1,11-diyl group, dodecane-1,12-diyl group, tridecane-1,13-diyl group, tetradecane-1,14-diyl group, pentadecane-1,15-diyl group, hexadecane-1,16-diyl group, and heptadecane-1,17-diyl group; Branched alkanediyl groups such as ethane-1,1-diyl group, propane-1,1-diyl group, propane-1,2-diyl group, propane-2,2-diyl group, pentane-2,4-diyl group, 2-methylpropane-1,3-diyl group, 2-methylpropane-1,2-diyl group, pentane-1,4-diyl group, and 2-methylbutane-1,4-diyl group; Monocyclic, divalent, alicyclic saturated hydrocarbon groups such as cycloalkanediyl groups, cyclobutane-1,3-diyl, cyclopentane-1,3-diyl, cyclohexane-1,4-diyl, and cyclooctane-1,5-diyl; Examples include polycyclic divalent alicyclic saturated hydrocarbon groups such as norbornane-1,4-diyl group, norbornane-2,5-diyl group, adamantane-1,5-diyl group, and adamantane-2,6-diyl group.

[0192] L b1Examples of groups in which the -CH2- contained in the divalent saturated hydrocarbon group represented by is replaced with -O- or -CO- include the group represented by any of the formulas (b1-1) to (b1-3). In the groups represented by formulas (b1-1) to (b1-3) and their specific examples, the groups represented by formulas (b1-4) to (b1-11), * and ** represent bonding sites, and * represents the bonding site with -Y.

[0193] TIFF0007933518000124.tif26118[In formula (b1-1), L b2 This represents a single bond or a divalent saturated hydrocarbon group having 1 to 22 carbon atoms, and the hydrogen atoms contained in the saturated hydrocarbon group may be substituted with fluorine atoms. L b3 represents a single bond or a divalent saturated hydrocarbon group having 1 to 22 carbon atoms, wherein the hydrogen atoms in the saturated hydrocarbon group may be substituted with fluorine atoms or hydroxyl groups, and the -CH2- in the saturated hydrocarbon group may be replaced with -O- or -CO-. However, L b2 and L b3 The total number of carbon atoms is 22 or less. In formula (b1-2), L b4 This represents a single bond or a divalent saturated hydrocarbon group having 1 to 22 carbon atoms, and the hydrogen atoms contained in the saturated hydrocarbon group may be substituted with fluorine atoms. L b5 represents a single bond or a divalent saturated hydrocarbon group having 1 to 22 carbon atoms, wherein the hydrogen atoms in the saturated hydrocarbon group may be substituted with fluorine atoms or hydroxyl groups, and the -CH2- in the saturated hydrocarbon group may be replaced with -O- or -CO-. However, L b4 and L b5 The total number of carbon atoms is 22 or less. In formula (b1-3), L b6 This represents a single bond or a divalent saturated hydrocarbon group having 1 to 23 carbon atoms, and the hydrogen atoms contained in the saturated hydrocarbon group may be substituted with fluorine atoms or hydroxyl groups. L b7 represents a single bond or a divalent saturated hydrocarbon group having 1 to 23 carbon atoms, wherein the hydrogen atoms in the saturated hydrocarbon group may be substituted with fluorine atoms or hydroxyl groups, and the -CH2- in the saturated hydrocarbon group may be replaced with -O- or -CO-. However, L b6 and L b7 The total number of carbon atoms is 23 or less.

[0194] In groups represented by formulas (b1-1) to (b1-3), if the -CH2- contained in the saturated hydrocarbon group is replaced by -O- or -CO-, the number of carbon atoms before the replacement shall be the number of carbon atoms of the saturated hydrocarbon group. As for divalent saturated hydrocarbon groups, L b1 Examples include divalent saturated hydrocarbon groups.

[0195] L b2 These are preferably a single bond, a methylene group, -CH(CF3)-, and -C(CF3)2-. L b3 This is preferably a divalent saturated hydrocarbon group having 1 to 4 carbon atoms. L b4 Preferably, is a divalent saturated hydrocarbon group having 1 to 8 carbon atoms, and the hydrogen atoms in the divalent saturated hydrocarbon group may be substituted with fluorine atoms, and more preferably is a methylene group, -CH(CF3)-, or -C(CF3)2-. L b5 Preferably, it is a single bond or a divalent saturated hydrocarbon group having 1 to 8 carbon atoms. L b6 Preferably, it is a single bond or a divalent saturated hydrocarbon group having 1 to 4 carbon atoms, and the hydrogen atoms contained in the saturated hydrocarbon group may be substituted with fluorine atoms. L b7 Preferably, the saturated hydrocarbon group is a single bond or a divalent saturated hydrocarbon group having 1 to 18 carbon atoms, and the hydrogen atoms in the saturated hydrocarbon group may be substituted with fluorine atoms or hydroxyl groups, and the -CH2- groups in the divalent saturated hydrocarbon group may be replaced with -O- or -CO-.

[0196] L b1 As for the group in which the -CH2- contained in the divalent saturated hydrocarbon group represented by is replaced with -O- or -CO-, the group represented by formula (b1-1) or formula (b1-3) is preferred. The groups represented by formula (b1-1) include those represented by formulas (b1-4) to (b1-8), respectively. TIFF0007933518000125.tif48120[In formula (b1-4), L b8 This represents a single bond or a divalent saturated hydrocarbon group having 1 to 22 carbon atoms, and the hydrogen atoms contained in the saturated hydrocarbon group may be substituted with fluorine atoms or hydroxyl groups. In formula (b1-5), L b9 This represents a divalent saturated hydrocarbon group having 1 to 20 carbon atoms, and the -CH2- contained in the divalent saturated hydrocarbon group may be replaced with -O- or -CO-. L b10 This represents a single bond or a divalent saturated hydrocarbon group having 1 to 19 carbon atoms, and the hydrogen atoms in the divalent saturated hydrocarbon group may be substituted with fluorine atoms or hydroxyl groups. However, L b9 and L b10 The total number of carbon atoms is 20 or less. In formula (b1-6), L b11 This represents a divalent saturated hydrocarbon group with 1 to 21 carbon atoms. L b12 This represents a single bond or a divalent saturated hydrocarbon group having 1 to 20 carbon atoms, and the hydrogen atoms in the divalent saturated hydrocarbon group may be substituted with fluorine atoms or hydroxyl groups. However, L b11 and L b12 The total number of carbon atoms is 21 or less. In formula (b1-7), L b13 This represents a divalent saturated hydrocarbon group with 1 to 19 carbon atoms. L b14represents a single bond or a divalent saturated hydrocarbon group having 1 to 18 carbon atoms, and -CH2- contained in the divalent saturated hydrocarbon group may be replaced by -O- or -CO-. L b15 represents a single bond or a divalent saturated hydrocarbon group having 1 to 18 carbon atoms, and a hydrogen atom contained in the divalent saturated hydrocarbon group may be substituted with a fluorine atom or a hydroxy group. However, the total number of carbon atoms of L b13 to L b15 is 19 or less. In formula (b1-8), L b16 represents a divalent saturated hydrocarbon group having 1 to 18 carbon atoms, and -CH2- contained in the divalent saturated hydrocarbon group may be replaced by -O- or -CO-. L b17 represents a divalent saturated hydrocarbon group having 1 to 18 carbon atoms. L b18 represents a single bond or a divalent saturated hydrocarbon group having 1 to 17 carbon atoms, and a hydrogen atom contained in the divalent saturated hydrocarbon group may be substituted with a fluorine atom or a hydroxy group. However, the total number of carbon atoms of L b16 to L b18 is 19 or less.]

[0197] L b8 is preferably a divalent saturated hydrocarbon group having 1 to 4 carbon atoms. L b9 is preferably a divalent saturated hydrocarbon group having 1 to 8 carbon atoms. L b10 is preferably a single bond or a divalent saturated hydrocarbon group having 1 to 19 carbon atoms, and more preferably a single bond or a divalent saturated hydrocarbon group having 1 to 8 carbon atoms. L b11 is preferably a divalent saturated hydrocarbon group having 1 to 8 carbon atoms. L b12 is preferably a single bond or a divalent saturated hydrocarbon group having 1 to 8 carbon atoms. L b13 is preferably a divalent saturated hydrocarbon group having 1 to 12 carbon atoms. L b14This is preferably a single bond or a divalent saturated hydrocarbon group having 1 to 6 carbon atoms. L b15 Preferably, it is a single bond or a divalent saturated hydrocarbon group having 1 to 18 carbon atoms, and more preferably a single bond or a divalent saturated hydrocarbon group having 1 to 8 carbon atoms. L b16 This is preferably a divalent saturated hydrocarbon group having 1 to 12 carbon atoms. L b17 This is preferably a divalent saturated hydrocarbon group having 1 to 6 carbon atoms. L b18 Preferably, it is a single bond or a divalent saturated hydrocarbon group having 1 to 17 carbon atoms, and more preferably a single bond or a divalent saturated hydrocarbon group having 1 to 4 carbon atoms.

[0198] The groups represented by formula (b1-3) include those represented by formulas (b1-9) to (b1-11), respectively. TIFF0007933518000126.tif23140 formula (b1-9), L b19 This represents a single bond or a divalent saturated hydrocarbon group having 1 to 23 carbon atoms, and the hydrogen atoms contained in the saturated hydrocarbon group may be substituted with fluorine atoms. L b20 This represents a single bond or a divalent saturated hydrocarbon group having 1 to 23 carbon atoms, and the hydrogen atoms in the saturated hydrocarbon group may be substituted with a fluorine atom, a hydroxyl group, or an alkylcarbonyloxy group. The -CH2- in the alkylcarbonyloxy group may be replaced with -O- or -CO-, and the hydrogen atoms in the alkylcarbonyloxy group may be substituted with a hydroxyl group. However, L b19 and L b20 The total number of carbon atoms is 23 or less. In formula (b1-10), L b21 This represents a single bond or a divalent saturated hydrocarbon group having 1 to 21 carbon atoms, and the hydrogen atoms contained in the saturated hydrocarbon group may be substituted with fluorine atoms. L b22This represents a single bond or a divalent saturated hydrocarbon group having 1 to 21 carbon atoms. L b23 This represents a single bond or a divalent saturated hydrocarbon group having 1 to 21 carbon atoms, and the hydrogen atoms in the saturated hydrocarbon group may be substituted with a fluorine atom, a hydroxyl group, or an alkylcarbonyloxy group. The -CH2- in the alkylcarbonyloxy group may be replaced with -O- or -CO-, and the hydrogen atoms in the alkylcarbonyloxy group may be substituted with a hydroxyl group. However, L b21 , L b22 and L b23 The total number of carbon atoms is 21 or less. In formula (b1-11), L b24 This represents a single bond or a divalent saturated hydrocarbon group having 1 to 20 carbon atoms, and the hydrogen atoms contained in the saturated hydrocarbon group may be substituted with fluorine atoms. L b25 This represents a divalent saturated hydrocarbon group with 1 to 21 carbon atoms. L b26 This represents a single bond or a divalent saturated hydrocarbon group having 1 to 20 carbon atoms, and the hydrogen atoms in the saturated hydrocarbon group may be substituted with a fluorine atom, a hydroxyl group, or an alkylcarbonyloxy group. The -CH2- in the alkylcarbonyloxy group may be replaced with -O- or -CO-, and the hydrogen atoms in the alkylcarbonyloxy group may be substituted with a hydroxyl group. However, L b24 , L b25 and L b26 The total number of carbon atoms is 21 or less.

[0199] Furthermore, in the group represented by formula (b1-9) through the group represented by formula (b1-11), if a hydrogen atom in a saturated hydrocarbon group is substituted with an alkylcarbonyloxy group, the number of carbon atoms before the substitution shall be the number of carbon atoms in the saturated hydrocarbon group. Examples of alkylcarbonyloxy groups include acetyloxy group, propionyloxy group, butyryloxy group, cyclohexylcarbonyloxy group, and adamantylcarbonyloxy group.

[0200] The following are examples of bases represented by formula (b1-4): TIFF0007933518000127.tif16154

[0201] The following are examples of bases represented by formula (b1-5): TIFF0007933518000128.tif68152

[0202] The following are examples of bases represented by formula (b1-6): TIFF0007933518000129.tif29150

[0203] The following are examples of bases represented by formula (b1-7): TIFF0007933518000130.tif57146

[0204] The following are examples of bases represented by formula (b1-8): TIFF0007933518000131.tif23150

[0205] The following are examples of bases represented by formula (b1-2): TIFF0007933518000132.tif31161

[0206] The following are examples of bases represented by formula (b1-9): TIFF0007933518000133.tif44137

[0207] The following are examples of bases represented by formula (b1-10): TIFF0007933518000134.tif92165

[0208] The following are examples of bases represented by formula (b1-11): TIFF0007933518000135.tif84164

[0209] Examples of alicyclic hydrocarbon groups represented by Y in which the -CH2- contained in the alicyclic hydrocarbon group represented by Y is not replaced by -O-, -S-, -SO2-, or -CO- include the groups represented by formulas (Y1) to (Y11) and (Y36) to (Y38). When the -CH2- group in the alicyclic hydrocarbon group represented by Y is replaced by -O-, -S-, -SO2-, or -CO-, the number of replacements may be one or two or more. Examples of such groups include those represented by formulas (Y12) to (Y35) and (Y39) to (Y43). * represents L b1 This represents the bonding site. The -O- or -CO- in the groups shown below may be replaced with -S- or -SO2-.

[0210] The alicyclic hydrocarbon group represented by TIFF0007933518000136.tif83167Y is preferably a group represented by any of formulas (Y1) to (Y20), (Y26), (Y27), (Y30), (Y31), (Y39) to (Y43), and more preferably (Y11), (Y15), (Y16), (Y20), ( The group is represented by formula (Y26), formula (Y27), formula (Y30), formula (Y31), formula (Y39), formula (Y40), formula (Y42), or formula (Y43), and more preferably by formula (Y11), formula (Y15), formula (Y20), formula (Y26), formula (Y27), formula (Y30), formula (Y31), formula (Y39), formula (Y40), formula (Y42), or formula (Y43). When the alicyclic hydrocarbon group represented by Y is a spiro ring having oxygen atoms, such as those represented by formulas (Y28) to (Y35), (Y39), (Y40), (Y42), and (Y43), it is preferable that the alkanediyl group between the two oxygen atoms has one or more fluorine atoms. Furthermore, it is preferable that the methylene group adjacent to the oxygen atom among the alkanediyl groups contained in the ketal structure is not substituted with a fluorine atom.

[0211] The substituents of the methyl group represented by Y include halogen atoms, hydroxyl groups, alicyclic hydrocarbon groups with 3 to 16 carbon atoms, aromatic hydrocarbon groups with 6 to 18 carbon atoms, glycidyloxy groups, and -(CH2) ja -CO-OR b1 Base or -(CH2) ja -O-CO-R b1 group (in the formula, R b1 ) represents an alkyl group having 1 to 16 carbon atoms, an alicyclic hydrocarbon group having 3 to 16 carbon atoms, an aromatic hydrocarbon group having 6 to 18 carbon atoms, or a group combining these, and the -CH2- contained in the alkyl group and the alicyclic hydrocarbon group may be replaced with -O-, -SO2-, or -CO-, and the hydrogen atoms contained in the alkyl group, the alicyclic hydrocarbon group, and the aromatic hydrocarbon group may be replaced with a hydroxyl group or a fluorine atom. ja represents an integer from 0 to 4. ) are some examples. Substituents for the alicyclic hydrocarbon group represented by Y include halogen atoms, hydroxyl groups, C1-C16 alkyl groups that may be substituted with hydroxyl groups (the -CH2- contained in the alkyl group may be replaced with -O- or -CO-), C3-C16 alicyclic hydrocarbon groups, C6-C18 aromatic hydrocarbon groups, C7-C21 aralkyl groups, glycidyloxy groups, and -(CH2) ja -CO-OR b1 Base or -(CH2) ja -O-CO-R b1 group (in the formula, R b1 ) represents an alkyl group having 1 to 16 carbon atoms, an alicyclic hydrocarbon group having 3 to 16 carbon atoms, an aromatic hydrocarbon group having 6 to 18 carbon atoms, or a group combining these, and the -CH2- contained in the alkyl group and the alicyclic hydrocarbon group may be replaced with -O-, -SO2-, or -CO-, and the hydrogen atoms contained in the alkyl group, the alicyclic hydrocarbon group, and the aromatic hydrocarbon group may be replaced with a hydroxyl group or a fluorine atom. ja represents an integer from 0 to 4. ) are some examples.

[0212] Examples of halogen atoms include fluorine, chlorine, bromine, and iodine atoms. Examples of alicyclic hydrocarbon groups include cyclopentyl group, cyclohexyl group, methylcyclohexyl group, dimethylcyclohexyl group, cycloheptyl group, cyclooctyl group, norbornyl group, and adamantyl group. Alicyclic hydrocarbon groups may also have chain hydrocarbon groups, such as methylcyclohexyl group and dimethylcyclohexyl group. The number of carbon atoms in the alicyclic hydrocarbon group is preferably 3 to 12, and more preferably 3 to 10. Examples of aromatic hydrocarbon groups include phenyl groups, naphthyl groups, anthryl groups, biphenyl groups, phenanthryl groups, and other aryl groups. Aromatic hydrocarbon groups may have a chain-type hydrocarbon group or an alicyclic hydrocarbon group. Preferred aromatic hydrocarbon groups are those having a chain-type hydrocarbon group with 1 to 18 carbon atoms (e.g., tolyl group, xylyl group, cumenyl group, mesityl group, p-methylphenyl group, p-ethylphenyl group, p-tert-butylphenyl group, 2,6-diethylphenyl group, 2-methyl-6-ethylphenyl group), and aromatic hydrocarbon groups having an alicyclic hydrocarbon group with 3 to 18 carbon atoms (e.g., p-adamantylphenyl group, p-cyclohexylphenyl group). The number of carbon atoms in the aromatic hydrocarbon group is preferably 6 to 14, and more preferably 6 to 10. Examples of alkyl groups include methyl, ethyl, propyl, isopropyl, butyl, sec-butyl, tert-butyl, pentyl, hexyl, heptyl, 2-ethylhexyl, octyl, nonyl, decyl, undecyl, and dodecyl groups. The number of carbon atoms in the alkyl group is preferably 1 to 12, more preferably 1 to 6, and even more preferably 1 to 4. Examples of alkyl groups substituted with a hydroxyl group include hydroxymethyl groups, hydroxyethyl groups, and other hydroxyalkyl groups. Examples of aralkyl groups include benzyl groups, phenethyl groups, phenylpropyl groups, naphthylmethyl groups, and naphthylethyl groups. Groups in which the -CH2- group in an alkyl group is replaced with -O-, -SO2-, or -CO- include alkoxy groups, alkylsulfonyl groups, alkoxycarbonyl groups, alkylcarbonyl groups, alkylcarbonyloxy groups, or combinations thereof. Examples of alkoxy groups include methoxy, ethoxy, propoxy, butoxy, pentyloxy, hexyloxy, heptyloxy, octyloxy, decyloxy, and dodecyloxy groups. The number of carbon atoms in the alkoxy group is preferably 1 to 12, more preferably 1 to 6, and even more preferably 1 to 4. Examples of alkylsulfonyl groups include methylsulfonyl groups, ethylsulfonyl groups, and propylsulfonyl groups. The number of carbon atoms in the alkylsulfonyl group is preferably 1 to 12, more preferably 1 to 6, and even more preferably 1 to 4. Examples of alkoxycarbonyl groups include methoxycarbonyl groups, ethoxycarbonyl groups, and butoxycarbonyl groups. The number of carbon atoms in the alkoxycarbonyl group is preferably 2 to 12, more preferably 2 to 6, and even more preferably 2 to 4. Examples of alkylcarbonyl groups include acetyl groups, propionyl groups, and butyryl groups. The number of carbon atoms in the alkylcarbonyl group is preferably 2 to 12, more preferably 2 to 6, and even more preferably 2 to 4. Examples of alkylcarbonyloxy groups include acetyloxy groups, propionyloxy groups, and butyryloxy groups. The number of carbon atoms in the alkylcarbonyloxy group is preferably 2 to 12, more preferably 2 to 6, and even more preferably 2 to 4. Examples of combined groups include groups combining an alkoxy group and an alkyl group, groups combining two alkoxy groups, groups combining an alkoxy group and an alkylcarbonyl group, and groups combining an alkoxy group and an alkylcarbonyloxy group. Examples of groups combining an alkoxy group and an alkyl group include alkoxyalkyl groups such as methoxymethyl, methoxyethyl, ethoxyethyl, and ethoxymethyl groups. The number of carbon atoms in the alkoxyalkyl group is preferably 2 to 12, more preferably 2 to 6, and even more preferably 2 to 4. Examples of groups formed by combining alkoxy groups include alkoxyalkoxy groups such as methoxymethoxy, methoxyethoxy, ethoxymethoxy, and ethoxyethoxy. The number of carbon atoms in the alkoxyalkoxy group is preferably 2 to 12, more preferably 2 to 6, and even more preferably 2 to 4. Examples of groups combining an alkoxy group and an alkylcarbonyl group include alkoxyalkylcarbonyl groups such as methoxyacetyl group, methoxypropionyl group, ethoxyacetyl group, and ethoxypropionyl group. The number of carbon atoms in the alkoxyalkylcarbonyl group is preferably 3 to 13, more preferably 3 to 7, and even more preferably 3 to 5. Examples of groups combining an alkoxy group and an alkylcarbonyloxy group include alkoxyalkylcarbonyloxy groups such as methoxyacetyloxy group, methoxypropionyloxy group, ethoxyacetyloxy group, and ethoxypropionyloxy group. The number of carbon atoms in the alkoxyalkylcarbonyloxy group is preferably 3 to 13, more preferably 3 to 7, and even more preferably 3 to 5. Groups in which the -CH2- group in an alicyclic hydrocarbon group is replaced with -O-, -SO2-, or -CO-, etc., include the groups represented by formulas (Y12) to (Y35) and (Y39) to (Y43).

[0213] The following are examples of Y: TIFF0007933518000137.tif186165

[0214] Y is preferably a substituted alicyclic hydrocarbon group having 3 to 24 carbon atoms, more preferably a substituted alicyclic hydrocarbon group having 3 to 20 carbon atoms, even more preferably a substituted alicyclic hydrocarbon group having 3 to 18 carbon atoms, and even more preferably a substituted adamantyl group or a substituted norbornyl group, wherein the -CH2- constituting the alicyclic hydrocarbon group, adamantyl group or norbornyl group may be replaced with -O-, -SO2- or -CO-. Specifically, Y is preferably an adamantyl group, a hydroxyadamantyl group, an oxoadamantyl group, a norbornane lactone group, or a group represented by formula (Y42), formula (Y100) to formula (Y114), formula (Y134) to formula (Y139).

[0215] The anions in the salt represented by formula (B1) are preferably those represented by formulas (B1-A-1) to (B1-A-62) (hereinafter, they may be referred to as "anion (B1-A-1)" etc. depending on the formula number), and more preferably those represented by any of formulas (B1-A-1) to (B1-A-4), (B1-A-9), (B1-A-10), (B1-A-24) to (B1-A-33), (B1-A-36) to (B1-A-40), or (B1-A-47) to (B1-A-62). TIFF0007933518000138.tif231165

[0216] TIFF0007933518000139.tif239165

[0217] TIFF0007933518000140.tif211163 Here R i2 ~R i7 These are, independently of each other, for example, an alkyl group having 1 to 4 carbon atoms, preferably a methyl group or an ethyl group. i8 For example, a chain hydrocarbon group having 1 to 12 carbon atoms, preferably an alkyl group having 1 to 4 carbon atoms, an alicyclic hydrocarbon group having 5 to 12 carbon atoms, or a group formed by a combination thereof, more preferably a methyl group, an ethyl group, a cyclohexyl group, or an adamantyl group.A41 This is a single bond or an alkanediyl group having 1 to 4 carbon atoms. Q b1 and Q b2 This expresses the same meaning as above. Specific examples of anions in the salt represented by formula (B1) include those described in Japanese Patent Publication No. 2010-204646.

[0218] Preferred anions in the salt represented by formula (B1) are the anions represented by formulas (B1a-1) to (B1a-40), respectively. TIFF0007933518000141.tif239158

[0219] Among these, anions represented by any of the following formulas are preferred: (B1a-1) to (B1a-3), (B1a-7) to (B1a-16), (B1a-18), (B1a-19), and (B1a-22) to (B1a-40).

[0220] Z1 + Examples of organic cations include organic onium cations, organic sulfonium cations, organic iodonium cations, organic ammonium cations, benzothiazolium cations, and organic phosphonium cations. Among these, organic sulfonium cations and organic iodonium cations are preferred, and aryl sulfonium cations are more preferred. Specifically, examples include cations represented by any of formulas (b2-1) to (b2-4) (hereinafter, depending on the formula number, they may be referred to as "cation (b2-1)," etc.).

[0221] In formulas (b2-1) to (b2-4) of TIFF0007933518000143.tif48168, R b4 ~R b6Each of these independently represents a chain hydrocarbon group having 1 to 30 carbon atoms, an alicyclic hydrocarbon group having 3 to 36 carbon atoms, or an aromatic hydrocarbon group having 6 to 36 carbon atoms. The hydrogen atoms in the chain hydrocarbon group may be substituted with a hydroxyl group, an alkoxy group having 1 to 12 carbon atoms, an alicyclic hydrocarbon group having 3 to 12 carbon atoms, or an aromatic hydrocarbon group having 6 to 18 carbon atoms. The hydrogen atoms in the alicyclic hydrocarbon group may be substituted with a halogen atom, an aliphatic hydrocarbon group having 1 to 18 carbon atoms, an alkylcarbonyl group having 2 to 4 carbon atoms, or a glycidyloxy group. The hydrogen atoms in the aromatic hydrocarbon group may be substituted with a halogen atom, a hydroxyl group, an aliphatic hydrocarbon group having 1 to 18 carbon atoms, an alkyl fluoride group having 1 to 12 carbon atoms, or an alkoxy group having 1 to 12 carbon atoms. R b4 and R b5 These atoms may bond with each other and form a ring together with the sulfur atom to which they are bonded, and the -CH2- contained in the ring may be replaced with -O-, -S-, or -CO-. R b7 and R b8 Each of these independently represents a halogen atom, a hydroxyl group, an aliphatic hydrocarbon group having 1 to 12 carbon atoms, a fluorinated alkyl group having 1 to 12 carbon atoms, or an alkoxy group having 1 to 12 carbon atoms. m2 and n2 each independently represent an integer between 0 and 5. When m2 is 2 or more, multiple R b7 They may be the same or different, and when n2 is 2 or greater, multiple R b8 They may be the same or different. R b9 and R b10 Each of these independently represents either a chain-like hydrocarbon group having 1 to 36 carbon atoms or an alicyclic hydrocarbon group having 3 to 36 carbon atoms. R b9 and R b10 These atoms may bond with each other and form a ring together with the sulfur atom to which they are bonded, and the -CH2- contained in the ring may be replaced with -O-, -S-, or -CO-. R b11This represents a hydrogen atom, a chain hydrocarbon group having 1 to 36 carbon atoms, an alicyclic hydrocarbon group having 3 to 36 carbon atoms, or an aromatic hydrocarbon group having 6 to 18 carbon atoms. R b12 This represents a chain hydrocarbon group having 1 to 12 carbon atoms, an alicyclic hydrocarbon group having 3 to 18 carbon atoms, or an aromatic hydrocarbon group having 6 to 18 carbon atoms. The hydrogen atoms contained in the chain hydrocarbon group may be substituted with an aromatic hydrocarbon group having 6 to 18 carbon atoms, and the hydrogen atoms contained in the aromatic hydrocarbon group may be substituted with an alkoxy group having 1 to 12 carbon atoms or an alkylcarbonyloxy group having 1 to 12 carbon atoms. R b11 and R b12 These may be bonded to each other and form a ring including the -CH-CO- groups to which they are bonded, and the -CH2- groups included in the ring may be replaced by -O-, -S-, or -CO-. R b13 ~R b18 Each of these independently represents a halogen atom, a hydroxyl group, an aliphatic hydrocarbon group having 1 to 12 carbon atoms, a fluorinated alkyl group having 1 to 12 carbon atoms, or an alkoxy group having 1 to 12 carbon atoms. R b13 and R b14 These atoms may bond with each other and together with the benzene ring to which they are bonded, form a ring containing a sulfur atom, and the -CH2- contained in the ring may be replaced with -O-, -S-, or -CO-. L b31 This represents a sulfur atom or an oxygen atom. o2, p2, s2, and t2 each independently represent an integer between 0 and 5. q2 and r2 each independently represent an integer between 0 and 4. u2 represents either 0 or 1. When o2 is 2 or more, multiple R b13 They are the same or different, and when p2 is 2 or more, multiple R b14 They are the same or different, and when q2 is 2 or more, multiple R b15 They are the same or different, and when r2 is 2 or more, multiple R b16 They are the same or different, and when s2 is 2 or more, multiple R b17 They are the same or different, and when t2 is 2 or more, multiple Rb18 They are either the same or different. When u2 is 0, then at least one of o2, p2, q2, and r2 is 1 or greater, and R b13 ~R b16 Preferably, at least one of them is a halogen atom, and when u2 is 1, then one of o2, p2, s2, t2, q2 and r2 is 1 or more, and R b13 ~R b18 Preferably, at least one of them is a halogen atom. Furthermore, when u2 is 0, it is preferable that r2 is 1 or greater, and more preferably 1. Also, when u2 is 0 and r2 is 1 or greater, R b16 It is preferable that the atom is a halogen atom. Aliphatic hydrocarbon groups refer to both chain-type hydrocarbon groups and alicyclic hydrocarbon groups. Examples of chain-type hydrocarbon groups include alkyl groups such as methyl, ethyl, propyl, isopropyl, butyl, sec-butyl, tert-butyl, pentyl, hexyl, octyl, and 2-ethylhexyl. In particular, R b9 ~R b12 The chain-like hydrocarbon group preferably has 1 to 12 carbon atoms. The alicyclic hydrocarbon group may be monocyclic or polycyclic. Examples of monocyclic alicyclic hydrocarbon groups include cycloalkyl groups such as cyclopropyl, cyclobutyl, cyclopentyl, cyclohexyl, cycloheptyl, cyclooctyl, and cyclodecyl. Examples of polycyclic alicyclic hydrocarbon groups include decahydronaphthyl, adamantyl, norbornyl, and the following groups. TIFF0007933518000144.tif10158 In particular, R b9 ~R b12 The alicyclic hydrocarbon group preferably has 3 to 18 carbon atoms, more preferably 4 to 12 carbon atoms. Examples of alicyclic hydrocarbon groups in which a hydrogen atom is substituted with an aliphatic hydrocarbon group include methylcyclohexyl group, dimethylcyclohexyl group, 2-methyladamantan-2-yl group, 2-ethyladamantan-2-yl group, 2-isopropyladamantan-2-yl group, methylnorbornyl group, and isobornyl group. In alicyclic hydrocarbon groups in which a hydrogen atom is substituted with an aliphatic hydrocarbon group, the total number of carbon atoms in the alicyclic hydrocarbon group and the aliphatic hydrocarbon group is preferably 20 or less. A fluorinated alkyl group refers to an alkyl group having 1 to 12 carbon atoms and containing a fluorine atom, such as a fluoromethyl group, difluoromethyl group, trifluoromethyl group, or perfluorobutyl group. The number of carbon atoms in the fluorinated alkyl group is preferably 1 to 9, more preferably 1 to 6, and even more preferably 1 to 4. Examples of aromatic hydrocarbon groups include aryl groups such as phenyl, biphenyl, naphthyl, and phenanthryl groups. Aromatic hydrocarbon groups may have a chain-like hydrocarbon group or an alicyclic hydrocarbon group, and examples include aromatic hydrocarbon groups having a chain-like hydrocarbon group with 1 to 18 carbon atoms (tolyl, xylyl, cumenyl, mesityl, p-ethylphenyl, p-tert-butylphenyl, 2,6-diethylphenyl, 2-methyl-6-ethylphenyl, etc.) and aromatic hydrocarbon groups having an alicyclic hydrocarbon group with 3 to 18 carbon atoms (p-cyclohexylphenyl, p-adamantylphenyl, etc.). When the aromatic hydrocarbon group has a chain-like hydrocarbon group or an alicyclic hydrocarbon group, chain-like hydrocarbon groups with 1 to 18 carbon atoms and alicyclic hydrocarbon groups with 3 to 18 carbon atoms are preferred. Examples of aromatic hydrocarbon groups in which a hydrogen atom is substituted with an alkoxy group include the p-methoxyphenyl group. Examples of chain-like hydrocarbon groups in which a hydrogen atom is substituted with an aromatic hydrocarbon group include aralkyl groups such as benzyl, phenethyl, phenylpropyl, trityl, naphthylmethyl, and naphthylethyl groups. Examples of alkoxy groups include methoxy, ethoxy, propoxy, butoxy, pentyloxy, hexyloxy, heptyloxy, octyloxy, decyloxy, and dodecyloxy groups. Examples of alkylcarbonyl groups include acetyl, propionyl, and butyryl groups. Examples of halogen atoms include fluorine, chlorine, bromine, and iodine atoms. Examples of alkylcarbonyloxy groups include methylcarbonyloxy group, ethylcarbonyloxy group, propylcarbonyloxy group, isopropylcarbonyloxy group, butylcarbonyloxy group, sec-butylcarbonyloxy group, tert-butylcarbonyloxy group, pentylcarbonyloxy group, hexylcarbonyloxy group, octylcarbonyloxy group, and 2-ethylhexylcarbonyloxy group. R b4 and R b5 The ring formed by the bonding of these atoms to each other and the sulfur atoms to which they are bonded may be monocyclic, polycyclic, aromatic, non-aromatic, saturated, or unsaturated. Examples of such rings include those with 3 to 18 carbon atoms, preferably those with 4 to 18 carbon atoms. Furthermore, examples of sulfur atom-containing rings include those with 3 to 12 membered rings, preferably those with 3 to 7 membered rings, and the following rings are examples. * indicates a bonding site. TIFF0007933518000145.tif23144R b9 and R b10 The ring formed by the combination of these elements may be monocyclic, polycyclic, aromatic, non-aromatic, saturated, or unsaturated. This ring may be a 3-membered to 12-membered ring, preferably a 3-membered to 7-membered ring. Examples include a thiolan-1-ium ring (tetrahydrothiophenium ring), a thian-1-ium ring, and a 1,4-oxatian-4-ium ring. R b11 and R b12 The ring formed by the combination of these elements may be monocyclic, polycyclic, aromatic, non-aromatic, saturated, or unsaturated. This ring may be a 3-membered to 12-membered ring, preferably a 3-membered to 7-membered ring. Examples include oxocycloheptane rings, oxocyclohexane rings, oxonorbornane rings, and oxoadamantane rings.

[0222] Among cations (b2-1) to (b2-4), cation (b2-1) is preferred. The following cations can be considered as cations (b2-1): TIFF0007933518000146.tif80161

[0223] TIFF0007933518000147.tif107161

[0224] The following cations can be considered as cations (b2-2): TIFF0007933518000148.tif18150

[0225] The following cations can be considered as cations (b2-3): TIFF0007933518000149.tif26140

[0226] The following cations can be considered as cations (b2-4): TIFF0007933518000150.tif153161

[0227] The acid generator (B) is a combination of the anion and the organic cation described above, and these can be combined in any way. Preferred examples of the acid generator (B) include a combination of an anion represented by any of the formulas (B1a-1) to (B1a-3), (B1a-7) to (B1a-16), (B1a-18), (B1a-19), or (B1a-22) to (B1a-38) and a cation (b2-1), cation (b2-3), or cation (b2-4).

[0228] Preferably, the acid generator (B) is represented by formulas (B1-1) to (B1-60). Among these, those containing arylsulfonium cations are preferred, and those represented by formulas (B1-1) to (B1-3), (B1-5) to (B1-7), (B1-11) to (B1-14), (B1-20) to (B1-26), (B1-29), and (B1-31) to (B1-60) are particularly preferred. JPEG0007933518000151.jpg61150

[0229] TIFF0007933518000152.tif72163

[0230] TIFF0007933518000153.tif79150

[0231] TIFF0007933518000154.tif64150

[0232] TIFF0007933518000155.tif87145

[0233] TIFF0007933518000156.tif63157

[0234] TIFF0007933518000157.tif239165

[0235] In the resist composition of the present invention, the content of the acid generator is preferably 1 to 45 parts by mass, more preferably 1 to 40 parts by mass, and even more preferably 3 to 35 parts by mass, per 100 parts by mass of resin (A). The resist composition of the present invention may contain one type of acid generator (B) alone, or it may contain multiple types.

[0236] <Solvent (E)> The content of the solvent (E) in the resist composition is usually 90% by mass or more and 99.9% by mass or less, preferably 92% by mass or more and 99% by mass or less, more preferably 94% by mass or more and 99% by mass or less. The content of the solvent (E) can be measured by a known analytical means such as liquid chromatography or gas chromatography. Examples of the solvent (E) include glycol ether esters such as ethyl cellosolve acetate, methyl cellosolve acetate and propylene glycol monomethyl ether acetate; glycol ethers such as propylene glycol monomethyl ether; esters such as ethyl lactate, butyl acetate, amyl acetate and ethyl pyruvate; ketones such as acetone, methyl isobutyl ketone, 2-heptanone and cyclohexanone; cyclic esters such as γ-butyrolactone; and the like. One type of the solvent (E) may be used alone, or two or more types may be used in combination.

[0237] <Quencher (C)> Examples of the quencher (C) include salts that generate an acid having a lower acidity than the acid generated from the acid generator (B), and basic nitrogen-containing organic compounds. The content of the quencher (C) is preferably about 0.01 to 15% by mass, more preferably about 0.01 to 10% by mass, still more preferably about 0.1 to 8% by mass, and even more preferably about 0.1 to 7% by mass, based on the solid content of the resist composition.

[0238] <Salt that generates an acid having a lower acidity than the acid generated from the acid generator> The acidity of the salt that generates an acid having a lower acidity than the acid generated from the acid generator (B) is indicated by an acid dissociation constant (pKa). The salt that generates an acid having a lower acidity than the acid generated from the acid generator (B) is usually a salt in which the acid dissociation constant of the acid generated from the salt satisfies -3 < pKa, preferably a salt satisfying -1 < pKa < 7, and more preferably a salt satisfying 0 < pKa < 5. Examples of salts that generate an acid weaker in acidity than the acid generated from the acid generator (B) include the salt represented by the following formula, the salt represented by formula (D) described in Japanese Patent Publication No. 2015-147926 (hereinafter sometimes referred to as "weak acid intramolecular salt (D)"), and the salts described in Japanese Patent Publication Nos. 2012-229206, 2012-6908, 2012-72109, 2011-39502, and 2011-191745. Preferably, the salt that generates an acid weaker in acidity than the acid generated from the acid generator (B) is a salt that generates a carboxylic acid weaker in acidity than the acid generated from the acid generator (B) (a salt having a carboxylic acid anion), more preferably a weak acid intramolecular salt (D), and even more preferably a diphenyliodonium salt containing a phenyl group substituted with a carboxylic acid anion among the weak acid intramolecular salts (D). TIFF0007933518000158.tif115165

[0239] The weak acid intramolecular salt (D) is preferably a diphenyliodonium salt having an iodonium cation to which two phenyl groups are bonded and a carboxylic acid anion to which at least one of the two phenyl groups bonded to the iodonium cation is substituted, and examples of salts represented by the following formula include: TIFF0007933518000159.tif1694 [In formula (D), R D1 and R D2 Each of these independently represents a hydrocarbon group having 1 to 12 carbon atoms, an alkoxy group having 1 to 6 carbon atoms, an acyl group having 2 to 7 carbon atoms, an acyloxy group having 2 to 7 carbon atoms, an alkoxycarbonyl group having 2 to 7 carbon atoms, a nitro group, or a halogen atom. m' and n' each independently represent an integer from 0 to 4, and if m' is 2 or greater, multiple R D1 They may be the same or different, and if n' is 2 or more, there may be multiple R D2 They may be the same or different. R D1 and R D2Examples of hydrocarbon groups include chain hydrocarbon groups, alicyclic hydrocarbon groups, aromatic hydrocarbon groups, and groups formed by combining these. Examples of chain-type hydrocarbon groups include alkyl groups such as methyl, ethyl, propyl, isopropyl, butyl, isobutyl, tert-butyl, pentyl, hexyl, and nonyl groups. The alicyclic hydrocarbon group may be monocyclic or polycyclic, and may be saturated or unsaturated. Examples include cycloalkyl groups such as cyclopropyl, cyclobutyl, cyclopentyl, cyclohexyl, cyclononyl, and cyclododecyl groups, as well as norbonyl and adamantyl groups. Examples of aromatic hydrocarbon groups include phenyl group, 1-naphthyl group, 2-naphthyl group, 2-methylphenyl group, 3-methylphenyl group, 4-methylphenyl group, 4-ethylphenyl group, 4-propylphenyl group, 4-isopropylphenyl group, 4-butylphenyl group, 4-t-butylphenyl group, 4-hexylphenyl group, 4-cyclohexylphenyl group, anthryl group, p-adamantylphenyl group, tolyl group, xylyl group, cumenyl group, mesityl group, biphenyl group, phenanthryl group, 2,6-diethylphenyl group, 2-methyl-6-ethylphenyl group, and other aryl groups. Groups formed by combining these include alkyl-cycloalkyl groups, cycloalkyl-alkyl groups, and aralkyl groups (for example, phenylmethyl group, 1-phenylethyl group, 2-phenylethyl group, 1-phenyl-1-propyl group, 1-phenyl-2-propyl group, 2-phenyl-2-propyl group, 3-phenyl-1-propyl group, 4-phenyl-1-butyl group, 5-phenyl-1-pentyl group, 6-phenyl-1-hexyl group, etc.). Examples of alkoxy groups include methoxy groups and ethoxy groups. Examples of acyl groups include acetyl groups, propanoyl groups, benzoyl groups, and cyclohexanecarbonyl groups. Examples of acyloxy groups include groups in which an oxy group (-O-) is bonded to the above-mentioned acyl group. Examples of alkoxycarbonyl groups include groups in which a carbonyl group (-CO-) is bonded to the above-mentioned alkoxy group. Examples of halogen atoms include fluorine, chlorine, and bromine atoms. R D1 and R D2 Each of these is preferably an alkyl group having 1 to 8 carbon atoms, a cycloalkyl group having 3 to 10 carbon atoms, an alkoxy group having 1 to 6 carbon atoms, an acyl group having 2 to 4 carbon atoms, an acyloxy group having 2 to 4 carbon atoms, an alkoxycarbonyl group having 2 to 4 carbon atoms, a nitro group, or a halogen atom. m' and n' are each independently preferably integers between 0 and 2, and more preferably 0. If m' is 2 or greater, multiple R D1 They may be the same or different, and if n' is 2 or more, there may be multiple R D2 They may be the same or different. More specifically, the following salts are examples: TIFF0007933518000160.tif72165

[0240] Basic nitrogen-containing organic compounds include amines and ammonium salts. Amines include aliphatic amines and aromatic amines. Aliphatic amines include primary amines, secondary amines, and tertiary amines. Examples of amines include 1-naphthylamine, 2-naphthylamine, aniline, diisopropylaniline, 2-,3- or 4-methylaniline, 4-nitroaniline, N-methylaniline, N,N-dimethylaniline, diphenylamine, hexylamine, heptylamine, octylamine, nonylamine, decylamine, dibutylamine, dipentylamine, dihexylamine, diheptylamine, dioctylamine, dinonylamine, didecylamine, triethylamine, trimethylamine, tripropylamine, and tributylamine. Amine, tripentylamine, trihexylamine, triheptylamine, trioctylamine, trinonylamine, tridecylamine, methyldibutylamine, methyldipentylamine, methyldihexylamine, methyldicyclohexylamine, methyldiheptylamine, methyldioctylamine, methyldinonylamine, methylddecylamine, ethyldibutylamine, ethyldipentylamine, ethyldihexylamine, ethyldiheptylamine, ethyldioctylamine, ethyldinonylamine, ethylddecylamine Min, dicyclohexylmethylamine, tris[2-(2-methoxyethoxy)ethyl]amine, triisopropanolamine, ethylenediamine, tetramethylenediamine, hexamethylenediamine, 4,4'-diamino-1,2-diphenylethane, 4,4'-diamino-3,3'-dimethyldiphenylmethane, 4,4'-diamino-3,3'-diethyldiphenylmethane, 2,2'-methylenebisaniline, imidazole, 4-methylimidazole, pyridine, 4-methylpyridine, 1,2-di(2-pyridyl)ethanol Examples include 1,2-di(4-pyridyl)ethane, 1,2-di(2-pyridyl)ethene, 1,2-di(4-pyridyl)ethene, 1,3-di(4-pyridyl)propane, 1,2-di(4-pyridyloxy)ethane, di(2-pyridyl)ketone, 4,4'-dipyridyl sulfide, 4,4'-dipyridyl disulfide, 2,2'-dipyridylamine, 2,2'-dipicolylamine, bipyridine, and the like. Preferably, aromatic amines such as diisopropylaniline are included, and more preferably, 2,6-diisopropylaniline is included. Examples of ammonium salts include tetramethylammonium hydroxide, tetraisopropylammonium hydroxide, tetrabutylammonium hydroxide, tetrahexylammonium hydroxide, tetraoctylammonium hydroxide, phenyltrimethylammonium hydroxide, 3-(trifluoromethyl)phenyltrimethylammonium hydroxide, tetra-n-butylammonium salicylate, and choline.

[0241] <Other ingredients> The resist composition of the present invention may optionally contain components other than those described above (hereinafter sometimes referred to as "other components (F)"). There are no particular limitations on other components (F), and additives known in the resist field, such as sensitizers, dissolution inhibitors, surfactants, stabilizers, dyes, etc., can be used.

[0242] <Preparation of resist composition> The resist composition of the present invention can be prepared by mixing the resin (A) and acid generator (B) of the present invention, and optionally, resin (A2), resin (X), quencher (C), solvent (E), and other components (F). The mixing order is arbitrary and not particularly limited. The mixing temperature can be selected from 10 to 40°C, depending on the type of resin, etc., and the solubility of the resin, etc., in the solvent (E). The mixing time can be selected from 0.5 to 24 hours, depending on the mixing temperature. There are no particular restrictions on the mixing method, and stirring or other methods can be used. After mixing the components, it is preferable to filter the mixture using a filter with a pore size of approximately 0.003 to 0.2 μm.

[0243] <Method for manufacturing resist patterns> The method for manufacturing a resist pattern of the present invention is: (1) A step of applying the resist composition of the present invention onto a substrate, (2) A step of drying the applied composition to form a composition layer, (3) A step of exposing the composition layer, (4) A step of heating the composition layer after exposure, (5) Includes a step of developing the composition layer after heating.

[0244] The resist composition can be applied to a substrate using commonly used equipment such as a spin coater. Examples of substrates include inorganic substrates such as silicon wafers, and organic substrates with a resist film or the like formed on their surface. Before applying the resist composition, the substrate may be cleaned, or an anti-reflective film or the like may be formed on the substrate. The solvent is removed and a composition layer is formed by drying the coated composition. Drying is performed, for example, by evaporating the solvent using a heating device such as a hot plate (so-called pre-baking), or by using a vacuum device. The heating temperature is preferably 50 to 200°C, and the heating time is preferably 10 to 180 seconds. The pressure when drying under reduced pressure is 1 to 1.0 × 10⁻⁶. 5 It is preferable that the pressure be around Pa. The resulting composition layer is typically exposed using an exposure machine. The exposure machine may be an immersion exposure machine. Various types of exposure light sources can be used, including those that emit ultraviolet laser light such as KrF excimer lasers (wavelength 248 nm), ArF excimer lasers (wavelength 193 nm), and F2 excimer lasers (wavelength 157 nm), those that emit far-ultraviolet or vacuum-ultraviolet harmonic laser light by wavelength conversion of laser light from a solid-state laser light source (such as a YAG or semiconductor laser), electron beams, and those that irradiate with ultra-ultraviolet (EUV) light. In this specification, the irradiation of these radiations is sometimes collectively referred to as "exposure." During exposure, exposure is usually performed through a mask corresponding to the desired pattern. If the exposure light source is an electron beam, exposure may be performed by direct drawing without using a mask. The composition layer after exposure is subjected to heat treatment (so-called post-exposure bake) to promote the deprotection reaction at acid-unstable groups. The heating temperature is usually around 50 to 200°C, preferably around 70 to 150°C. After heating, a chemical treatment (silylation) may be performed to adjust the hydrophilicity or hydrophobicity of the resin on the surface side of the composition. Alternatively, before development, the process of coating the resist composition, drying, exposure, and heating may be repeated on the composition layer after exposure. The heated composition layer is typically developed using a developing apparatus and a developing solution. Development methods include the dip method, paddle method, spray method, and dynamic dispensing method. The development temperature is preferably, for example, 5 to 60°C, and the development time is preferably, for example, 5 to 300 seconds. By selecting the type of developing solution as described below, a positive-type resist pattern or a negative-type resist pattern can be manufactured. When producing a positive resist pattern from the resist composition of the present invention, an alkaline developer is used as the developer. The alkaline developer can be any alkaline aqueous solution used in this field. For example, aqueous solutions of tetramethylammonium hydroxide or (2-hydroxyethyl)trimethylammonium hydroxide (commonly known as choline) can be used. The alkaline developer may also contain a surfactant. It is preferable to wash the resist pattern with ultrapure water after development, and then remove any remaining water on the substrate and pattern. When manufacturing a negative-type resist pattern from the resist composition of the present invention, a developer containing an organic solvent (hereinafter sometimes referred to as "organic developer") is used as the developer. Examples of organic solvents contained in organic developers include ketone solvents such as 2-hexanone and 2-heptanone; glycol ether ester solvents such as propylene glycol monomethyl ether acetate; ester solvents such as butyl acetate; glycol ether solvents such as propylene glycol monomethyl ether; amide solvents such as N,N-dimethylacetamide; and aromatic hydrocarbon solvents such as anisole. In the organic developer, the content of the organic solvent is preferably 90% by mass or more and 100% by mass or less, more preferably 95% by mass or more and 100% by mass or less, and even more preferably substantially composed of only organic solvents. Among these, organic developers containing butyl acetate and / or 2-heptanone are preferred. The total content of butyl acetate and 2-heptanone in the organic developer is preferably 50% by mass or more and 100% by mass or less, more preferably 90% by mass or more and 100% by mass or less, and even more preferably substantially butyl acetate and / or 2-heptanone alone. Organic developers may contain surfactants. Furthermore, organic developers may contain trace amounts of water. During development, the development process may be stopped by substituting a different type of solvent for the organic developer. It is preferable to wash the developed resist pattern with a rinsing solution. The rinsing solution is not particularly limited as long as it does not dissolve the resist pattern, and a solution containing a general organic solvent can be used, preferably an alcohol solvent or an ester solvent. After cleaning, it is preferable to remove any remaining rinse solution from the substrate and patterns.

[0245] <Application> The resist composition of the present invention is suitable as a resist composition for KrF excimer laser exposure, an ArF excimer laser exposure, an electron beam (EB) exposure, or an EUV exposure, and is particularly suitable as a resist composition for ArF excimer laser exposure, an electron beam (EB) exposure, or an EUV exposure, and is useful for semiconductor microfabrication. [Examples]

[0246] The present invention will be described in more detail with reference to examples. In the examples, "%" and "parts" representing the content or amount used are based on mass unless otherwise specified. The weight-average molecular weight was determined by gel permeation chromatography under the following conditions. Equipment: HLC-8120GPC model (manufactured by Tosoh Corporation) Column: TSKgel Multipore H XL -M x 3 + guardcolumn (manufactured by Tosoh Corporation) Eluent: Tetrahydrofuran Flow rate: 1.0mL / min Detector: RI detector Column temperature: 40℃ Injection volume: 100μl Molecular weight standard: Standard polystyrene (manufactured by Tosoh Corporation) Furthermore, the structure of the compound was confirmed by measuring the molecular ion peak using mass spectrometry (LC using an Agilent 1100 model, and MASS using an Agilent LC / MSD model). In the following examples, the value of this molecular ion peak is indicated as "MASS".

[0247] Example 1: Synthesis of the compound represented by formula (I-1) TIFF0007933518000161.tif34155 4.77 parts of the compound represented by formula (I-1-a) and 25 parts of dimethylformamide were added and the mixture was stirred at 23°C for 30 minutes. 2.74 parts of potassium carbonate were added to the resulting mixed solution, and the temperature was raised to 80°C. 9.63 parts of the compound represented by formula (I-1-b) were added to the resulting mixed solution, and the mixture was stirred at 80°C for 3 hours, then cooled to 23°C. 100 parts of chloroform and 50 parts of deionized water were added to the resulting reaction mixture and the mixture was stirred at 23°C for 30 minutes. The organic layer was separated by liquid-liquid extraction. This procedure was repeated 5 times. By concentrating the obtained organic layer, 10.01 parts of the compound represented by formula (I-1-c) were obtained. TIFF0007933518000162.tif72161 0.86 parts of the compound represented by formula (I-1-d), 6.53 parts of the compound represented by formula (I-1-c), and 50 parts of acetonitrile were mixed and stirred at 23°C for 30 minutes, then cooled to 0°C. 3.25 parts of 1-ethyl-3-(3-dimethylaminopropyl)carbodiimide hydrochloride were added to the resulting mixed solution, and the temperature was raised to 23°C and stirred at 23°C for 6 hours. 100 parts of chloroform and 50 parts of deionized water were added to the resulting reaction mixture and stirred at 23°C for 30 minutes, then the organic layer was separated by liquid-liquid extraction. 50 parts of deionized water were added to the resulting organic layer and stirred at 23°C for 30 minutes, then the organic layer was separated by liquid-liquid extraction. This washing procedure was repeated 5 times. The resulting organic layer was concentrated, and the concentrated mass was fractionated using a column (Kanto Chemical Silica Gel 60N (spherical, neutral) 100-210 μm, developing solvent: n-heptane / ethyl acetate = 1 / 1) to obtain 0.92 parts of the compound represented by formula (I-1). MASS:721.4[M+H] +

[0248] Example 2: Synthesis of the compound represented by formula (I-2) TIFF0007933518000163.tif34158 5.12 parts of the compound represented by formula (I-2-b) and 25 parts of dimethylformamide were added and the mixture was stirred at 23°C for 30 minutes. To the resulting mixture, 3.32 parts of potassium carbonate and 1.68 parts of potassium iodide were charged and the mixture was stirred at 50°C for 1 hour. The resulting mixture was cooled to 40°C, and a solution of 1.81 parts of the compound represented by formula (I-2-a) dissolved in 25 parts of dimethylformamide was added dropwise over 1 hour and the mixture was stirred at 75°C for 5 hours. The resulting mixture was cooled to 23°C, 60 parts of chloroform and 60 parts of 1N hydrochloric acid were added and the mixture was stirred, and the organic layer was separated by liquid-liquid extraction. 60 parts of deionized water were added to the resulting organic layer and the mixture was stirred at 23°C for 30 minutes, and then the organic layer was separated by liquid-liquid extraction. This washing procedure was repeated 5 times. After concentrating the recovered organic layer, 4.22 parts of the compound represented by formula (I-2-c) were obtained by fractionation using a column (Kanto Chemical silica gel 60N (spherical, neutral) 100-210 μm, developing solvent: ethyl acetate) under the following conditions. TIFF0007933518000164.tif61165 0.86 parts of the compound represented by formula (I-1-d), 6.24 parts of the compound represented by formula (I-2-c), and 50 parts of acetonitrile were mixed and stirred at 23°C for 30 minutes, then cooled to 0°C. 3.25 parts of 1-ethyl-3-(3-dimethylaminopropyl)carbodiimide hydrochloride were added to the resulting mixed solution, and the temperature was raised to 23°C and stirred at 23°C for 6 hours. 100 parts of chloroform and 50 parts of deionized water were added to the resulting reaction mixture and stirred at 23°C for 30 minutes, then the organic layer was separated by liquid-liquid extraction. 50 parts of deionized water were added to the resulting organic layer and stirred at 23°C for 30 minutes, then the organic layer was separated by liquid-liquid extraction. This washing procedure was repeated 5 times. The resulting organic layer was concentrated, and the concentrated mass was fractionated using a column (Kanto Chemical Silica Gel 60N (spherical, neutral) 100-210 μm, developing solvent: n-heptane / ethyl acetate = 1 / 1) to obtain 0.92 parts of the compound represented by formula (I-2). MASS: 693.4 [M+H] +

[0249] Example 3: Synthesis of the compound represented by formula (I-5) TIFF0007933518000165.tif67165 1.93 parts of the compound represented by formula (I-1-c), 10 parts of tetrahydrofuran, and 0.28 parts of pyridine were added, and the mixture was stirred at 23°C for 30 minutes, then cooled to 5°C. 0.40 parts of the compound represented by formula (I-5-a) were added to the resulting mixed solution, and the mixture was heated to 23°C, then stirred at 23°C for 1 hour. 50 parts of chloroform and 2.58 parts of 5% hydrochloric acid were added to the resulting reaction mixture and stirred, and the organic layer was separated by liquid-liquid extraction. 20 parts of deionized water were added to the obtained organic layer and the mixture was stirred at 23°C for 30 minutes, and the organic layer was separated by liquid-liquid extraction. 1.47 parts of 10% potassium carbonate aqueous solution were added to the obtained organic layer and the mixture was stirred at 23°C for 30 minutes, and the organic layer was separated by liquid-liquid extraction. 20 parts of deionized water were added to the obtained organic layer and the mixture was stirred at 23°C for 30 minutes, and the organic layer was separated by liquid-liquid extraction. This procedure was repeated four times. By concentrating the resulting organic layer, 1.68 parts of the compound represented by formula (I-5-c) were obtained. TIFF0007933518000166.tif82161 0.16 parts of the compound represented by formula (I-1-d) and 10 parts of chloroform were added and the mixture was stirred at 23°C for 30 minutes. To the resulting mixed solution, 0.15 parts of potassium carbonate and 0.03 parts of potassium iodide were added, and 1.26 parts of the compound represented by formula (I-5-c) were added and the mixture was stirred at 23°C for 1 hour. To the resulting reaction product, 20 parts of chloroform and 10 parts of deionized water were added and the mixture was stirred at 23°C for 30 minutes, and the organic layer was separated by liquid-liquid extraction. 10 parts of deionized water were added to the obtained organic layer and the mixture was stirred at 23°C for 30 minutes, and the organic layer was separated by liquid-liquid extraction. This washing procedure was repeated 5 times. The resulting organic layer was concentrated, and the concentrated mass was fractionated using a column (Kanto Chemical Silica Gel 60N (spherical, neutral) 100-210 μm, developing solvent: n-heptane / ethyl acetate = 1 / 1) to obtain 1.15 parts of the compound represented by formula (I-5). MASS: 779.4 [M+H] +

[0250] Example 4: Synthesis of the compound represented by formula (I-12) TIFF0007933518000167.tif84161 1.62 parts of the compound represented by formula (I-12-a), 6.53 parts of the compound represented by formula (I-1-c), and 50 parts of acetonitrile were mixed and stirred at 23°C for 30 minutes, then cooled to 0°C. 3.25 parts of 1-ethyl-3-(3-dimethylaminopropyl)carbodiimide hydrochloride were added to the resulting mixed solution, and the temperature was raised to 23°C and stirred at 23°C for 6 hours. 100 parts of chloroform and 50 parts of deionized water were added to the resulting reaction mixture and stirred at 23°C for 30 minutes, then the organic layer was separated by liquid-liquid extraction. 50 parts of deionized water were added to the resulting organic layer and stirred at 23°C for 30 minutes, then the organic layer was separated by liquid-liquid extraction. This washing procedure was repeated 5 times. The resulting organic layer was concentrated, and the concentrated mass was fractionated using a column (Kanto Chemical Silica Gel 60N (spherical, neutral) 100-210 μm, developing solvent: n-heptane / ethyl acetate = 1 / 1) to obtain 1.23 parts of the compound represented by formula (I-12). MASS:797.4[M+H] +

[0251] Example 5: Synthesis of the compound represented by formula (I-22) TIFF0007933518000168.tif34155 4.77 parts of the compound represented by formula (I-1-a) and 25 parts of dimethylformamide were added and the mixture was stirred at 23°C for 30 minutes. 2.74 parts of potassium carbonate were added to the resulting mixed solution and the temperature was raised to 80°C. 5.97 parts of the compound represented by formula (I-22-b) were added to the resulting mixed solution and the mixture was stirred at 80°C for 3 hours, then cooled to 23°C. 100 parts of chloroform and 50 parts of deionized water were added to the resulting reaction mixture and the mixture was stirred at 23°C for 30 minutes. The organic layer was separated by liquid-liquid extraction. This procedure was repeated 5 times. The obtained organic layer was concentrated to obtain 6.22 parts of the compound represented by formula (I-22-c). TIFF0007933518000169.tif74150 Add 1.39 parts of the compound represented by formula (I-22-c), 10 parts of tetrahydrofuran, and 0.28 parts of pyridine, stir at 23°C for 30 minutes, and then cool to 5°C. Add 0.40 parts of the compound represented by formula (I-5-a) to the resulting mixed solution, raise the temperature to 23°C, and then stir at 23°C for 1 hour. Add 50 parts of chloroform and 2.58 parts of 5% hydrochloric acid to the resulting reaction mixture, stir, and separate to remove the organic layer. Add 20 parts of deionized water to the obtained organic layer, stir at 23°C for 30 minutes, and separate to remove the organic layer. Add 1.47 parts of 10% potassium carbonate aqueous solution to the obtained organic layer, stir at 23°C for 30 minutes, and separate to remove the organic layer. Twenty parts of deionized water were added to the obtained organic layer, and the mixture was stirred at 23°C for 30 minutes. The organic layer was then separated and removed. This procedure was repeated four times. By concentrating the obtained organic layer, 1.24 parts of the compound represented by formula (I-22-e) were obtained. TIFF0007933518000170.tif84158 0.16 parts of the compound represented by formula (I-1-d) and 10 parts of chloroform were added and the mixture was stirred at 23°C for 30 minutes. To the resulting mixed solution, 0.15 parts of potassium carbonate and 0.03 parts of potassium iodide were added, and 0.94 parts of the compound represented by formula (I-22-e) were added and the mixture was stirred at 23°C for 1 hour. To the resulting reaction product, 20 parts of chloroform and 10 parts of deionized water were added and the mixture was stirred at 23°C for 30 minutes, and the organic layer was separated by liquid-liquid extraction. 10 parts of deionized water were added to the obtained organic layer and the mixture was stirred at 23°C for 30 minutes, and the organic layer was separated by liquid-liquid extraction. This washing procedure was repeated 5 times. The obtained organic layer was concentrated, and the concentrated mass was fractionated using a column (Kanto Chemical Silica Gel 60N (spherical, neutral) 100-210 μm, developing solvent: n-heptane / ethyl acetate = 1 / 1) to obtain 0.95 parts of the compound represented by formula (I-22). MASS: 595.3 [M+H] +

[0252] Example 6: Synthesis of the compound represented by formula (I-33) TIFF0007933518000171.tif31161 4.77 parts of the compound represented by formula (I-1-a) and 25 parts of dimethylformamide were added and the mixture was stirred at 23°C for 30 minutes. 2.74 parts of potassium carbonate were added to the resulting mixed solution and the temperature was raised to 80°C. 8.19 parts of the compound represented by formula (I-33-b) were added to the resulting mixed solution and the mixture was stirred at 80°C for 3 hours, then cooled to 23°C. 100 parts of chloroform and 50 parts of deionized water were added to the resulting reaction mixture and the mixture was stirred at 23°C for 30 minutes. The organic layer was separated by liquid-liquid extraction. This procedure was repeated 5 times. The obtained organic layer was concentrated to obtain 8.34 parts of the compound represented by formula (I-33-c). TIFF0007933518000172.tif64142 1.73 parts of the compound represented by formula (I-33-c), 10 parts of tetrahydrofuran, and 0.28 parts of pyridine were added, and the mixture was stirred at 23°C for 30 minutes, then cooled to 5°C. 0.40 parts of the compound represented by formula (I-5-a) were added to the resulting mixed solution, and the mixture was heated to 23°C, then stirred at 23°C for 1 hour. 50 parts of chloroform and 2.58 parts of 5% hydrochloric acid were added to the resulting reaction mixture and stirred, and the organic layer was separated by liquid-liquid extraction. 20 parts of deionized water were added to the obtained organic layer and the mixture was stirred at 23°C for 30 minutes, and the organic layer was separated by liquid-liquid extraction. 1.47 parts of 10% potassium carbonate aqueous solution were added to the obtained organic layer and the mixture was stirred at 23°C for 30 minutes, and the organic layer was separated by liquid-liquid extraction. Twenty parts of deionized water were added to the obtained organic layer, and the mixture was stirred at 23°C for 30 minutes. The organic layer was then separated and removed. This procedure was repeated four times. By concentrating the obtained organic layer, 1.52 parts of the compound represented by formula (I-33-e) were obtained. TIFF0007933518000173.tif82165 0.16 parts of the compound represented by formula (I-1-d) and 10 parts of chloroform were added and the mixture was stirred at 23°C for 30 minutes. To the resulting mixed solution, 0.15 parts of potassium carbonate and 0.03 parts of potassium iodide were added, and 1.13 parts of the compound represented by formula (I-33-e) were added and the mixture was stirred at 23°C for 1 hour. To the resulting reaction product, 20 parts of chloroform and 10 parts of deionized water were added and the mixture was stirred at 23°C for 30 minutes, and the organic layer was separated by liquid-liquid extraction. 10 parts of deionized water were added to the obtained organic layer and the mixture was stirred at 23°C for 30 minutes, and the organic layer was separated by liquid-liquid extraction. This washing procedure was repeated 5 times. The resulting organic layer was concentrated, and the concentrated mass was fractionated using a column (Kanto Chemical Silica Gel 60N (spherical, neutral) 100-210 μm, developing solvent: n-heptane / ethyl acetate = 1 / 1) to obtain 1.03 parts of the compound represented by formula (I-33). MASS:707.3[M+H] +

[0253] Resin synthesis The compounds (monomers) used in the synthesis of the resin are shown below. Hereinafter, these compounds will be referred to as "monomers (a1-2-6)" etc., according to their formula numbers. (TIFF0007933518000174.tif171148)

[0254] Example 7 [Synthesis of Resin A1] p-acetoxystyrene, monomer (I-1), monomer (a1-2-6), monomer (a2-1-3), and monomer (a3-4-2) were used as monomers, and they were mixed in a molar ratio [p-acetoxystyrene:monomer (I-1):monomer (a1-2-6):monomer (a2-1-3):monomer (a3-4-2)] of 35:7:43:3:12. Furthermore, methyl isobutyl ketone was added to this monomer mixture in an amount equal to 1.5 times the total mass of all monomers. To the resulting mixture, azobisisobutyronitrile and azobis(2,4-dimethylvaleronitrile) were added as initiators at concentrations of 1.2 mol% and 3.6 mol%, respectively, relative to the total amount of monomers, and these were heated at 73°C for about 5 hours. After that, a 25% aqueous solution of tetramethylammonium hydroxide was added to the polymerization reaction solution, and after stirring for 12 hours, the solution was separated. The recovered organic layer is poured into a large amount of n-heptane to precipitate resin, which is then filtered and recovered, resulting in a weight-average molecular weight of approximately 5.2 × 10⁶. 3 Resin A1 was obtained with a yield of 68%. This resin A1 has the following structural units. TIFF0007933518000175.tif36165

[0255] Example 8 [Synthesis of Resin A2] p-acetoxystyrene, monomer (I-2), monomer (a1-2-6), monomer (a2-1-3), and monomer (a3-4-2) were used as monomers, and they were mixed in a molar ratio [p-acetoxystyrene:monomer (I-2):monomer (a1-2-6):monomer (a2-1-3):monomer (a3-4-2)] of 35:7:43:3:12. Furthermore, methyl isobutyl ketone was added to this monomer mixture in an amount equal to 1.5 times the total mass of all monomers. To the resulting mixture, azobisisobutyronitrile and azobis(2,4-dimethylvaleronitrile) were added as initiators at concentrations of 1.2 mol% and 3.6 mol%, respectively, relative to the total amount of monomers, and these were heated at 73°C for about 5 hours. After that, a 25% aqueous solution of tetramethylammonium hydroxide was added to the polymerization reaction solution, and after stirring for 12 hours, the solution was separated. The recovered organic layer is poured into a large amount of n-heptane to precipitate resin, which is then filtered and recovered, resulting in a weight-average molecular weight of approximately 5.6 × 10⁶. 3 Resin A2 was obtained with a yield of 63%. This resin A2 has the following structural units. TIFF0007933518000176.tif34165

[0256] Example 9 [Synthesis of Resin A3] p-acetoxystyrene, monomer (I-5), monomer (a1-2-6), monomer (a2-1-3), and monomer (a3-4-2) were used as monomers, and they were mixed in a molar ratio [p-acetoxystyrene:monomer (I-5):monomer (a1-2-6):monomer (a2-1-3):monomer (a3-4-2)] of 35:7:43:3:12. Furthermore, methyl isobutyl ketone was added to this monomer mixture in an amount equal to 1.5 times the total mass of all monomers. To the resulting mixture, azobisisobutyronitrile and azobis(2,4-dimethylvaleronitrile) were added as initiators at concentrations of 1.2 mol% and 3.6 mol%, respectively, relative to the total amount of monomers, and these were heated at 73°C for about 5 hours. After that, a 25% aqueous solution of tetramethylammonium hydroxide was added to the polymerization reaction solution, and after stirring for 12 hours, the solution was separated. The recovered organic layer is poured into a large amount of n-heptane to precipitate resin, which is then filtered and recovered, resulting in a weight-average molecular weight of approximately 5.3 × 10⁶. 3 Resin A3 was obtained with a yield of 75%. This resin A3 has the following structural units. TIFF0007933518000177.tif44165

[0257] Example 10 [Synthesis of Resin A4] p-acetoxystyrene, monomer (I-12), monomer (a1-2-6), monomer (a2-1-3), and monomer (a3-4-2) were used as monomers, and they were mixed in a molar ratio [acetoxystyrene:monomer (I-12):monomer (a1-2-6):monomer (a2-1-3):monomer (a3-4-2)] of 35:7:43:3:12. Furthermore, methyl isobutyl ketone was added to this monomer mixture in an amount equal to 1.5 times the total mass of all monomers. To the resulting mixture, azobisisobutyronitrile and azobis(2,4-dimethylvaleronitrile) were added as initiators at concentrations of 1.2 mol% and 3.6 mol%, respectively, relative to the total amount of monomers, and these were heated at 73°C for about 5 hours. After that, a 25% aqueous solution of tetramethylammonium hydroxide was added to the polymerization reaction solution, and after stirring for 12 hours, the solution was separated. The recovered organic layer is poured into a large amount of n-heptane to precipitate resin, which is then filtered and recovered, resulting in a weight-average molecular weight of approximately 5.4 × 10⁶. 3 Resin A4 was obtained with a yield of 70%. This resin A4 has the following structural units. TIFF0007933518000178.tif43170

[0258] Example 11 [Synthesis of Resin A5] p-acetoxystyrene, monomer (I-22), monomer (a1-2-6), monomer (a2-1-3), and monomer (a3-4-2) were used as monomers, and they were mixed in a molar ratio [acetoxystyrene:monomer (I-22):monomer (a1-2-6):monomer (a2-1-3):monomer (a3-4-2)] of 35:7:43:3:12. Furthermore, methyl isobutyl ketone was added to this monomer mixture in an amount equal to 1.5 times the total mass of all monomers. To the resulting mixture, azobisisobutyronitrile and azobis(2,4-dimethylvaleronitrile) were added as initiators at concentrations of 1.2 mol% and 3.6 mol%, respectively, relative to the total amount of monomers, and these were heated at 73°C for about 5 hours. After that, a 25% aqueous solution of tetramethylammonium hydroxide was added to the polymerization reaction solution, and after stirring for 12 hours, the solution was separated. The recovered organic layer is poured into a large amount of n-heptane to precipitate resin, which is then filtered and recovered, resulting in a weight-average molecular weight of approximately 5.7 × 10⁶. 3 Resin A5 was obtained with a yield of 78%. This resin A5 has the following structural units. TIFF0007933518000179.tif44165

[0259] Example 12 [Synthesis of Resin A6] m-acetoxystyrene, monomer (I-5), monomer (a1-2-6), monomer (a2-1-3), and monomer (a3-4-2) were used as monomers, and they were mixed in a molar ratio [m-acetoxystyrene:monomer (I-5):monomer (a1-2-6):monomer (a2-1-3):monomer (a3-4-2)] of 35:7:43:3:12. Furthermore, methyl isobutyl ketone was added to this monomer mixture in an amount equal to 1.5 times the total mass of all monomers. To the resulting mixture, azobisisobutyronitrile and azobis(2,4-dimethylvaleronitrile) were added as initiators at concentrations of 1.2 mol% and 3.6 mol%, respectively, relative to the total amount of monomers, and these were heated at 73°C for about 5 hours. After that, a 25% aqueous solution of tetramethylammonium hydroxide was added to the polymerization reaction solution, and after stirring for 12 hours, the solution was separated. The recovered organic layer is poured into a large amount of n-heptane to precipitate resin, which is then filtered and recovered, resulting in a weight-average molecular weight of approximately 5.1 × 10⁶. 3 Resin A6 was obtained in a yield of 71%. This resin A6 has the following structural units. TIFF0007933518000180.tif44165

[0260] Example 13 [Synthesis of Resin A7] 3,4-diacetoxystyrene, monomer (I-5), monomer (a1-2-6), monomer (a2-1-3), and monomer (a3-4-2) were used as monomers, and they were mixed in a molar ratio [3,4-diacetoxystyrene:monomer (I-5):monomer (a1-2-6):monomer (a2-1-3):monomer (a3-4-2)] of 35:7:43:3:12. Further, methyl isobutyl ketone was added to this monomer mixture in an amount equal to 1.5 times the total mass of all monomers. To the resulting mixture, azobisisobutyronitrile and azobis(2,4-dimethylvaleronitrile) were added as initiators at concentrations of 1.2 mol% and 3.6 mol%, respectively, relative to the total amount of monomers, and the mixture was heated at 73°C for approximately 5 hours. Subsequently, a 25% aqueous solution of tetramethylammonium hydroxide was added to the polymerization reaction solution, and after stirring for 12 hours, the mixture was separated. The recovered organic layer is poured into a large amount of n-heptane to precipitate resin, which is then filtered and recovered, resulting in a weight-average molecular weight of approximately 5.0 × 10⁶. 3 Resin A7 was obtained with a yield of 67%. This resin A7 has the following structural units. TIFF0007933518000181.tif44165

[0261] Example 14 [Synthesis of Resin A8] p-acetoxystyrene, monomer (I-33), monomer (a1-2-6), monomer (a2-1-3), and monomer (a3-4-2) were used as monomers, and they were mixed in a molar ratio [p-acetoxystyrene:monomer (I-33):monomer (a1-2-6):monomer (a2-1-3):monomer (a3-4-2)] of 35:7:43:3:12. Furthermore, methyl isobutyl ketone was added to this monomer mixture in an amount equal to 1.5 times the total mass of all monomers. To the resulting mixture, azobisisobutyronitrile and azobis(2,4-dimethylvaleronitrile) were added as initiators at concentrations of 1.2 mol% and 3.6 mol%, respectively, relative to the total amount of monomers, and these were heated at 73°C for about 5 hours. After that, a 25% aqueous solution of tetramethylammonium hydroxide was added to the polymerization reaction solution, and after stirring for 12 hours, the solution was separated. The recovered organic layer is poured into a large amount of n-heptane to precipitate resin, which is then filtered and recovered, resulting in a weight-average molecular weight of approximately 5.5 × 10⁶. 3 Resin A8 was obtained in a yield of 70%. This resin A8 has the following structural units. TIFF0007933518000182.tif41165

[0262] Synthesis Example 1 [Synthesis of Resin AX1] p-acetoxystyrene, monomer (IX-1), monomer (a1-2-6), monomer (a2-1-3), and monomer (a3-4-2) were used as monomers, and they were mixed in a molar ratio [p-acetoxystyrene:monomer (IX-1):monomer (a1-2-6):monomer (a2-1-3):monomer (a3-4-2)] of 35:7:43:3:12. Furthermore, methyl isobutyl ketone was added to this monomer mixture in an amount equal to 1.5 times the total mass of all monomers. To the resulting mixture, azobisisobutyronitrile and azobis(2,4-dimethylvaleronitrile) were added as initiators at concentrations of 1.2 mol% and 3.6 mol%, respectively, relative to the total amount of monomers, and these were heated at 73°C for about 5 hours. After that, a 25% aqueous solution of tetramethylammonium hydroxide was added to the polymerization reaction solution, and after stirring for 12 hours, the solution was separated. The recovered organic layer is poured into a large amount of n-heptane to precipitate resin, which is then filtered and recovered, resulting in a weight-average molecular weight of approximately 5.5 × 10⁶. 3 Resin AX1 was obtained in a yield of 69%. This resin AX1 has the following structural units. TIFF0007933518000183.tif46163

[0263] <Preparation of the resist composition> A resist composition was prepared by mixing and dissolving each component shown in Table 1, and then filtering the resulting mixture through a fluororesin filter with a pore size of 0.2 μm. [Table 1]

[0264] <Resin> A1~A8, AX1: Resin A1~Resin A8, Resin AX1 <Acid Generator> B1-43: Salt represented by formula (B1-43) (synthesized according to the examples in Japanese Patent Publication No. 2016-47815) TIFF0007933518000185.tif4482<Quencher(C)> C1: Synthesized by the method described in Japanese Patent Publication No. 2011-39502 TIFF0007933518000186.tif4446<solvent> Propylene glycol monomethyl ether acetate, 400 units Propylene glycol monomethyl ether, 100 parts γ-Butyrolactone 5 parts

[0265] (Electron beam exposure evaluation of resist compositions) A 6-inch silicon wafer was treated on a direct hot plate with hexamethyldisilazane at 90°C for 60 seconds. A resist composition was spin-coated onto this silicon wafer to a thickness of 0.04 μm. Subsequently, the composition layer was formed by pre-baking on a direct hot plate at the temperature shown in the "PB" column of Table 1 for 60 seconds. An electron beam lithography machine (ELS-F125 125keV, manufactured by Elionix Co., Ltd.) was used to directly write a line-and-space pattern (pitch 60 nm / line width 30 nm) on the composition layer formed on the wafer, by gradually changing the exposure amount after development. After exposure, post-exposure baking was performed on a hot plate at the temperature shown in the "PEB" column of Table 1 for 60 seconds. Next, the composition layer on the silicon wafer was developed using butyl acetate (manufactured by Tokyo Chemical Industry Co., Ltd.) as the developer by dynamic dispensing at 23°C for 20 seconds to obtain a resist pattern. The obtained resist pattern (line and space pattern) was observed with a scanning electron microscope, and the exposure level at which the line width and space width of a 60 nm pitch line and space pattern were in a 1:1 ratio was defined as the effective sensitivity.

[0266] Line edge roughness evaluation (LER): The amplitude of the surface irregularities on the sidewalls of the resist patterns manufactured with effective sensitivity was measured using a scanning electron microscope to determine the line edge roughness. The results are shown in Table 2. [Table 2] Compared to comparative composition 1, compositions 1-8 showed smaller fluctuations in the unevenness of the sidewall surface of the resist pattern, resulting in better line edge roughness evaluation. [Industrial applicability]

[0267] The resist composition containing the compound of the present invention and a resin containing structural units derived from the compound exhibits good line edge roughness (LER) and is useful for semiconductor microfabrication.

Claims

1. A resist composition containing a resin comprising a structural unit represented by formula (IA) and an acid generator. [In formula (IA), R ０ This represents an alkyl group having 1 to 6 carbon atoms, which may contain a halogen atom, a hydrogen atom, or a halogen atom. X １ This represents *-O-**, *-CO-O-**, *-O-CO-O-**, or *-Ax-Ph-Ay-**. Ph represents a phenylene group which may have substituents. Ax represents one type of bond selected from the group consisting of single bonds, ether bonds, ester bonds, and carbonate ester bonds. Ay represents one type of bond selected from the group consisting of single bonds, ether bonds, ester bonds, and carbonate ester bonds. * is R ０ This represents the bonding site with the bonded carbon atom, and ** indicates L １ This represents the connection point. L 1 This represents a hydrocarbon group having 1 to 60 carbon atoms, which may have single bonds or substituents, and the hydrocarbon group contains -CH 2 - is -O-, -S-, -SO ２ It may be replaced with - or -CO-. Ring W represents an alicyclic hydrocarbon group having 3 to 36 carbon atoms, and -CH contained in the alicyclic hydrocarbon group ２ - may be replaced with -O-, -S-, -CO- or -SO ２ -. R １ Each of these independently represents a halogen atom, a hydroxyl group, a C1-C12 haloalkyl group, or a C1-C12 alkyl group, and the -CH contained in the haloalkyl group and the alkyl group 2 The dash may be replaced by -O- or -CO-. X ２ * represents *-CO-O-, *-O-CO-, or *-O-CO-O-, where * represents the bonding site with ring W. L ４ This represents a single bond or an alkanediyl group having 1 to 6 carbon atoms, and the alkanediyl group contains -CH 2 The dash may be replaced by -O- or -CO-. R ２ This represents the group represented by formula (1a) or the group represented by formula (2a). m1 represents an integer from 0 to 6, and when m1 is 2 or greater, multiple R １ They may be identical or different from one another. m² represents an integer between 2 and 6, and multiple X ２ , L ４ and R ２ They may be identical or different from one another. [In formula (1a), R aa1 , R aa2 and R aa3 Each of these independently represents an alkyl group having 1 to 8 carbon atoms, an alkenyl group having 2 to 8 carbon atoms, an alicyclic hydrocarbon group having 3 to 20 carbon atoms, an aromatic hydrocarbon group having 6 to 18 carbon atoms, or a group consisting of a combination thereof, or R aa1 and R aa2 These atoms bond with each other to form alicyclic hydrocarbon groups with 3 to 20 carbon atoms, along with the carbon atoms to which they bond. * indicates a connection site. [In formula (2a), R aa1’ and R aa2’ Each of these independently represents a hydrogen atom or a hydrocarbon group having 1 to 12 carbon atoms, R aa3’ represents a hydrocarbon group having 1 to 20 carbon atoms, or R aa2’ and R aa3’ They combine with each other and they combine -C-X ａ - Together with the hydrocarbon group, it forms a heterocyclic group having 3 to 20 carbon atoms, and the -CH contained in the hydrocarbon group and the heterocyclic group ２ The dash (-) may be replaced with -O- or -S-. X a This represents an oxygen atom or a sulfur atom. * indicates a connection site.

2. X １ However, equation (X １ -1) ~Formula (X １ The resist composition according to claim 1, wherein the group is represented by any of the following (-7). [Formula (X)] １ -1) ~ Equation (X) １ -7) Middle * and ** are binding sites, and ** is L 1 This represents the connection point with [the other element].

3. X １ However, equation (X １ -1), formula (X １ -3) or formula (X １ The resist composition according to claim 2, wherein the group is represented by -4).

4. L １ However, a chain-like hydrocarbon group having 1 to 10 carbon atoms may have single bonds or substituents (provided that the chain-like hydrocarbon group contains -CH 2 - may be replaced by -O- or -CO-.), a cyclic hydrocarbon group having 3 to 24 carbon atoms which may have substituents (however, the cyclic hydrocarbon group may contain -CH 2 - stands for -O-, -S-, -CO-, or -SO ２ A group formed by combining a chain hydrocarbon group having 1 to 8 carbon atoms that may have substituents and a cyclic hydrocarbon group having 3 to 24 carbon atoms that may have substituents (however, the chain hydrocarbon group may contain -CH 2 The - may be replaced by -O- or -CO-, and the -CH contained in the cyclic hydrocarbon group 2 - is -O-, -S-, -SO ２ The resist composition according to any one of claims 1 to 3, wherein - or -CO- may be replaced.

5. L １ The resist composition according to any one of claims 1 to 4, wherein the group is a single bond or a group represented by any of formulas (L1-1) to (L1-4). [In formulas (L1-1) to (L1-4), L ２ This represents a chain hydrocarbon group having 1 to 10 carbon atoms which may have substituents, a cyclic hydrocarbon group having 3 to 24 carbon atoms which may have substituents, or a group formed by combining a cyclic hydrocarbon group having 3 to 24 carbon atoms which may have substituents and a chain hydrocarbon group having 1 to 8 carbon atoms which may have substituents, and the cyclic hydrocarbon group contains -CH 2 - stands for -O-, -S-, -CO-, or -SO ２ - may be replaced by -CH contained in the chain hydrocarbon group. 2 The dash may be replaced by -O- or -CO-. L ３ and L ４ Each of these independently represents a chain hydrocarbon group having 1 to 8 carbon atoms, which may have single bonds or substituents, and the chain hydrocarbon group contains -CH 2 The dash may be replaced by -O- or -CO-. L ５ and L ６ Each of these independently represents a chain-like hydrocarbon group having 1 to 10 carbon atoms, which may have single bonds or substituents, and the chain-like hydrocarbon group contains -CH 2 The dash may be replaced by -O- or -CO-. Ring W3 represents a cyclic hydrocarbon group having 3 to 24 carbon atoms, which may have substituents, and the cyclic hydrocarbon group contains -CH ２ - stands for -O-, -S-, -CO-, or -SO ２ It may be replaced with -. Ring W4 represents a cyclic hydrocarbon group having 3 to 18 carbon atoms, which may have substituents, and the cyclic hydrocarbon group contains -CH ２ - stands for -O-, -S-, -CO-, or -SO ２ It may be replaced with -. X ３ This represents *3-CO-O-, *3-O-CO-, *3-O-CO-O-, or *3-O-. X ａ and X ｂ These represent either -O- or -S- independently. X ０１ represents a hydrocarbon group having 1 to 40 carbon atoms, which may have substituents, and the hydrocarbon group contains -CH ２ - stands for -O-, -S-, -CO-, or -SO ２ It may be replaced with -. R ２１ and R ２２ Each of these independently represents a halogen atom, a hydroxyl group, a C1-C12 haloalkyl group, or a C1-C12 alkyl group, and the -CH contained in the haloalkyl group and the alkyl group 2 The dash may be replaced by -O- or -CO-. m21 represents an integer from 0 to 6, and when m21 is 2 or greater, multiple R ２１ They may be identical or different from one another. m22 represents an integer from 0 to 6, and when m22 is 2 or greater, multiple R ２２ They may be identical or different from one another. *1 is X 1 This represents the bonding site with ring W. *2 represents the bonding site with ring W. *3 represents L ２ This represents the connection point with [the other element].

6. The resist composition according to any one of claims 1 to 5, wherein ring W is a group derived from a ring represented by formula (w1-1), a group derived from a ring represented by formula (w1-2), a group derived from a ring represented by formula (w1-3), a group derived from a ring represented by formula (w1-6), or a group derived from a ring represented by formula (w1-15). [In formulas (w1-1), (w1-2), (w1-3), (w1-6), and (w1-15), -CH contained in the group ２ - stands for -O-, -S-, -CO-, or -SO ２ It may be replaced by -. The connection point is at any position.

7. The resist composition according to any one of claims 1 to 6, wherein m2 is 2 or 3.

8. The resist composition according to any one of claims 1 to 7, wherein the resin further comprises structural units having acid-unstable groups.

9. The resist composition according to claim 8, wherein the structural unit having an acid-unstable group is at least one selected from the group consisting of a structural unit represented by formula (a1-0), a structural unit represented by formula (a1-1), and a structural unit represented by formula (a1-2). [In formulas (a1-0), (a1-1), and (a1-2), L a01 , L ａ１ and L ａ２ These are, independently, -O- or *-O- (CH ２ ) ｋ１ This represents -CO-O-, where k1 is an integer from 1 to 7, and * represents the bonding site with -CO-. R a01 , R ａ４ and R ａ５ Each of these independently represents a hydrogen atom, a halogen atom, or a C1-C6 alkyl group which may have a halogen atom. R a02 , R a03 and R a04 each independently represent an alkyl group having 1 to 8 carbon atoms, an alicyclic hydrocarbon group having 3 to 18 carbon atoms, an aromatic hydrocarbon group having 6 to 18 carbon atoms, or a group formed by combining these groups. R ａ６ and R ａ７ Each of these independently represents an alkyl group having 1 to 8 carbon atoms, an alkenyl group having 2 to 8 carbon atoms, an alicyclic hydrocarbon group having 3 to 18 carbon atoms, an aromatic hydrocarbon group having 6 to 18 carbon atoms, or a group formed by a combination of these. m1 represents an integer between 0 and 14. n1 represents an integer between 0 and 10. n1' represents an integer between 0 and 3.

10. The resist composition according to any one of claims 1 to 9, wherein the resin further comprises a structural unit represented by formula (a2-A). [In formula (a2-A), R a50 This represents a hydrogen atom, a halogen atom, or an alkyl group having 1 to 6 carbon atoms that may contain a halogen atom. R a51 This represents a halogen atom, a hydroxyl group, a C1-C6 alkyl group, a C1-C6 alkoxy group, a C2-C12 alkoxyalkyl group, a C2-C12 alkoxyalkoxy group, a C2-C4 alkylcarbonyl group, a C2-C4 alkylcarbonyloxy group, an acryloyloxy group, or a methacryloyloxy group. A a50 represents a single bond or *-X a51 -(A a52 -X a52 ) nｂ -, and * represents the bonding site to the carbon atom to which R a50 is bonded. A a52 This represents an alkanediyl group with 1 to 6 carbon atoms. X a51 and X a52 These represent, independently, -O-, -CO-O-, or -O-CO-. nb represents either 0 or 1. mb represents an integer between 0 and 4. If mb is an integer greater than or equal to 2, then multiple R a51 They may be the same or different from each other.

11. The resist composition according to any one of claims 1 to 10, wherein the acid generator comprises a salt represented by formula (B1). [In formula (B1), Q ｂ１ and Q ｂ２ Each of these independently represents a hydrogen atom, a fluorine atom, a perfluoroalkyl group having 1 to 6 carbon atoms, or an alkyl group having 1 to 6 carbon atoms. L ｂ１ This represents a divalent saturated hydrocarbon group having 1 to 24 carbon atoms, and the -CH contained in this divalent saturated hydrocarbon group is ２ The - may be replaced by -O- or -CO-, and the hydrogen atom contained in the divalent saturated hydrocarbon group may be substituted with a fluorine atom or a hydroxyl group. Y represents a methyl group which may have substituents or an alicyclic hydrocarbon group having 3 to 24 carbon atoms which may have substituents, and the alicyclic hydrocarbon group contains -CH ２ - is -O-, -SO ２ It may be replaced with - or -CO-. Z1 ＋ This represents an organic cation.

12. The resist composition according to any one of claims 1 to 11, further comprising a salt that generates an acid with a lower acidity than the acid generated from the acid generator.

13. (1) A step of applying the resist composition according to any one of claims 1 to 12 onto a substrate, (2) A step of drying the coated composition to form a composition layer, (3) Exposure step of the composition layer, (4) A step of heating the composition layer after exposure, (5) A step of developing the composition layer after heating, A method for manufacturing a resist pattern that includes [the specified element].

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