Electrical contacts and electrical connection devices

Abstract

To enable tips of a plurality of electrical contacts to be joined in parallel with a substrate surface by reducing the effect of deflection on the substrate surface when joining the electrical contacts to the substrate surface in aligning the height of the tips, even when the substrate surface has slight deflection.SOLUTION: A tabular electrical contact mounted on a substrate surface includes: a contact part in electrical contact with an electrode of an object to be inspected; a beam part connected to one end of the contact part; a main body supporting part supporting the beam part; and a joint part jointed to the substrate surface while being in contact with a wiring formed on the substrate surface. The joint part is elastic in a direction perpendicular to the substrate surface under load at joining, and can adjust a posture of the body part including the main body supporting part, the beam part, and the contact part, and can maintain the posture of the body part at joining.SELECTED DRAWING: Figure 1

Description

Technical Field

[0001] The present invention relates to an electrical contact and an electrical connection device, and can be applied to, for example, an electrical contact used in an inspection apparatus that performs electrical inspection of semiconductor integrated circuits and the like formed on a semiconductor wafer.

Background Art

[0002] When inspecting the electrical characteristics of a semiconductor integrated circuit (hereinafter also referred to as "object to be inspected") formed on a semiconductor wafer, an inspection apparatus (also referred to as "tester") is used in which an electrical connection device such as a probe card is attached to a test head.

[0003] A plurality of electrical contacts (hereinafter also referred to as "probes") are mounted on one surface (for example, the lower surface) of the probe card, and during inspection of the object to be inspected, the tip of each electrical contact electrically contacts the corresponding electrode terminal of the object to be inspected. Thereafter, an electrical signal from the inspection apparatus is supplied to each object to be inspected via each electrical contact, and a signal from each object to be inspected is taken into the inspection apparatus side via each electrical contact, whereby the electrical inspection of each object to be inspected is performed.

[0004] Conventionally, when mounting a plurality of electrical contacts on one surface of a probe card, as illustrated in FIG. 9, the joint portion of the electrical contact 91, which is the portion to be attached to the substrate 95 of the probe card, is oriented toward the surface side of the substrate 95, and the electrical contact 91 is placed on the surface of the substrate 95 such that the electrical contact 91 stands upright in the vertical direction with respect to the surface of the substrate 95 of the probe card. Then, in a state where a constant load is applied from the upper side to the lower side in the drawing (that is, in the direction from the electrical contact 91 side toward the substrate 95 side), the joint portion of the electrical contact 91 is covered with solder or the like, so that the space between the joint portion of the electrical contact 91 and the surface of the substrate 95 of the probe card is fixed with solder or the like.

Prior Art Documents

Patent Documents

[0005]

Patent Document 1

[0006] However, the surface of the probe card substrate on which multiple electrical contacts are mounted is not always flat; the substrate is slightly warped, curving, or undulating. If one attempts to align the height of the tip of each electrical contact with the alignment reference plane SF (see Figure 9) and then join each electrical contact to the probe card substrate in order to ensure proper alignment with the electrode terminals of the object under test, the joint of the electrical contact may float or tilt relative to the substrate surface. If the electrical contact is then joined to the probe card substrate in this state, the joint becomes unstable. For example, in high-temperature tests, the solder softens due to the heat, making the joint unstable and causing misalignment with the electrode terminals of the object under test and tilting of the electrical contact.

[0007] Therefore, in view of the above-mentioned problems, the present invention aims to provide an electrical contact and an electrical connection device that can reliably bond multiple electrical contacts to a substrate surface by aligning the height positions of their tips, even when there is a slight deflection on the substrate surface, while mitigating the effect of the deflection on the substrate surface. [Means for solving the problem]

[0008] To solve these problems, the first invention provides a plate-shaped electrical contact mounted on the surface of a substrate, comprising: a main support portion; a beam portion connected to the main support portion on the side of the object to be inspected and supported by the main support portion; a contact portion at the tip of the beam portion that electrically contacts the electrode of the object to be inspected; and a joint portion connected to the main support portion on the substrate side that joins to the substrate surface while in contact with wiring formed on the substrate surface, wherein the joint portion has a base end portion connected to the main support portion and a portion connected to the base end portion in the longitudinal direction of the electrical contact. and parallel to the substrate plane A base portion that extends and has engaging portions at each of its ends, The longitudinal direction of the electrical contact extends parallel to the substrate plane,A substrate surface contact portion that contacts the substrate surface, and an elastic portion provided between the base portion and the substrate surface contact portion, which is elastic when subjected to the load during bonding to the substrate surface, Extending parallel to the plane of the substrate It is provided perpendicularly from one end of the contact portion with the substrate surface, in a direction away from the substrate surface. One end of the contact area with the substrate surface, on the same side A first retaining portion having an engaged portion that engages with an engaging portion at one end of the base, Extending parallel to the plane of the substrate It is provided perpendicularly from the other end of the contact portion with the substrate surface, in a direction away from the substrate surface, The other end of the contact portion with the substrate surface, on the same side The first retaining part has an engaged portion that engages with an engaging portion at the other end of the base, and the engaged portion of the first retaining part and the engaged portion of the second retaining part each have one or more recesses formed between projections on one or both of their inner and outer surfaces, and the base One end and the other end Each of the engaging parts is the first retaining part and Each of the engaged parts of the second retaining part any recess formed between the protrusions to Engage It is characterized by having a protruding portion.

[0009] The second aspect of the present invention relates to an electrical connection device for electrically connecting an inspection device and a plurality of contacts that contact electrodes of an object to be inspected, characterized in that it comprises a substrate and a plurality of contacts provided on one end side of the substrate and that contact electrodes of the object to be inspected, wherein the contacts have the electrical contacts of the first aspect of the present invention. [Effects of the Invention]

[0010] According to the present invention, when bonding multiple electrical contacts to a substrate surface by aligning the height of their tips, even when there is slight deflection on the substrate surface, the effect of the deflection on the substrate surface can be mitigated, ensuring reliable bonding. [Brief explanation of the drawing]

[0011] [Figure 1] This is a configuration diagram showing an example of the configuration of an electrical contact to be placed on the wiring board of a probe substrate in an embodiment. [Figure 2] This is a configuration diagram showing the configuration of an electrical connection device according to an embodiment. [Figure 3] This is an explanatory diagram illustrating the connection of an electrical contact to a wiring board according to an embodiment. [Figure 4] FIG. 3 is an enlarged configuration diagram showing a configuration of a posture holding unit according to an embodiment. [Figure 5] FIG. 4 is a configuration diagram showing a first modified example of the electrical contact according to the embodiment. [Figure 6] FIG. 5 is a configuration diagram showing a second modified example of the electrical contact according to the embodiment. [Figure 7] FIG. 6 is a configuration diagram showing a third modified example of the electrical contact according to the embodiment. [Figure 8] FIG. 7 is a configuration diagram showing a fourth modified example of the electrical contact according to the embodiment. [Figure 9] FIG. 8 is an explanatory diagram illustrating joining of an electrical contact to a slightly deflected conventional substrate surface. [Figure 10] FIG. 9 is an explanatory diagram illustrating joining of an electrical contact to a slightly deflected substrate surface in the embodiment. [Mode for Carrying Out the Invention]

[0012] (A) Embodiment Hereinafter, an embodiment of the electrical contact and the electrical connection device according to the present invention will be described in detail with reference to the drawings.

[0013] (A-1) Configuration of the embodiment (A-1-1) Electrical connection device First, a configuration example of an electrical connection device on which a plurality of electrical contacts according to the embodiment are mounted will be described with reference to FIG. 2.

[0014] FIG. 2 is a configuration diagram showing the configuration of the electrical connection device according to the embodiment. Although the main constituent members of the electrical connection device 3 are illustrated in FIG. 2, the electrical connection device is not limited to these constituent members, and an actual electrical connection device also has constituent members not illustrated in FIG. 2.

[0015] In Figure 2, the electrical connection device 3 according to this embodiment comprises a flat wiring board 41, an electrical connection unit 42 electrically connected to the wiring board 41, and a probe board 43 on which a plurality of electrical contacts 1 are mounted, which are electrically connected to the electrical connection unit 42 and also electrically connected to the electrode terminals 51 of the object to be inspected 2.

[0016] The electrical connection device 3 is mounted on the test head of an inspection device (tester) (not shown). The object under test 2 is pressed toward the probe substrate 43, and the tips 161 of each electrical contact 1 on the probe substrate 43 are brought into electrical contact with the electrode terminals 51 of the object under test 2. During the inspection, an electrical signal from the inspection device (tester) (not shown) is supplied to the electrode terminals 51 of the object under test 2 via each electrical contact 1, and an electrical signal from the electrode terminals 51 of the object under test 2 is supplied to the tester via each electrical contact 1. In this way, the tester performs an electrical inspection of the object under test 2 by capturing its electrical characteristics.

[0017] The object to be inspected, 2, is placed on the upper surface of the chuck top 5. The chuck top 5 can be adjusted in position along the horizontal X-axis, the Y-axis perpendicular to the X-axis on the horizontal plane, and the Z-axis perpendicular to the horizontal plane (XY plane), and its rotational orientation can be adjusted in the θ direction around the Z-axis. When performing an electrical inspection of the object to be inspected, the chuck, which can be raised and lowered in the vertical direction (Z-axis direction), is moved so that the electrode terminals 51 of the object to be inspected 2 make electrical contact with the tips of each electrical contact 1 on the probe substrate 43. In this way, the lower surface of the probe substrate 43 of the electrical connection device 3 and the object to be inspected 2 on the chuck top 5 are moved relatively closer together.

[0018] [Wiring board] The wiring board 41 is made of a resin material such as polyimide, and is, for example, a printed circuit board formed in a roughly circular plate shape. Numerous electrode terminals (not shown) that electrically connect to the test head (not shown) of the tester are arranged on the peripheral edge of the upper surface of the wiring board 41. A wiring pattern (not shown) is formed on the lower surface of the wiring board 41, and the connection terminals of the wiring pattern are electrically connected to the upper ends of a plurality of connectors (not shown) provided on the electrical connection unit 42.

[0019] The wiring board 41 can take on various configurations, but for example, it can take on the following configuration. For example, electrode terminals that electrically connect to the test head are formed on the upper surface of the wiring board 41, a wiring pattern that electrically connects to each connector of the electrical connection unit 42 is formed on the lower surface of the wiring board 41, and a wiring circuit is formed inside the wiring board 41. The wiring pattern on the lower surface of the wiring board 41 and the electrode terminals on the upper surface of the wiring board 41 can be connected via the wiring circuit inside the wiring board 41. Therefore, electrical signals can be conducted between each connector of the electrical connection unit 42 and the test head via the wiring circuit inside the wiring board 41. In addition, several electronic components necessary for the electrical inspection of the object under test 2 are also arranged on the upper surface of the wiring board 41.

[0020] [Electrical connection unit] The electrical connection unit 42 has multiple connectors, such as pogo pins. In the assembled state of the electrical connection device 3, the upper end of each connector is electrically connected to the connection terminals of the wiring pattern on the lower surface of the wiring board 41, and the lower end of each connector is connected to a pad provided on the upper surface of the probe board 43. Since the tip of the electrical contact 1 electrically contacts the electrode terminals 51 of the object under test 2, the electrode terminals 51 of the object under test 2 are electrically connected to the tester through the electrical contact 1 and the connectors.

[0021] [Probe substrate] The probe substrate 43 is a substrate having a plurality of electrical contacts 1, and is formed in a substantially circular or polygonal shape (for example, a 16-sided polygon). When the probe substrate 43 is mounted on the electrical connection device 3, the probe substrate 43 is supported by the probe substrate support portion 18 at its periphery. The electrical contacts 1 incorporated into the probe substrate 43 can be, for example, cantilever-type probes, but are not limited to these. The number of electrical contacts 1 incorporated into the probe substrate 43 corresponds to the number of objects under test (semiconductor integrated circuits) 2, the number of electrode terminals 51 of each object under test 2, etc.

[0022] The probe substrate 43 can take on various configurations, but Figure 2 shows one example. For example, the probe substrate 43 has a substrate member 431 formed of, for example, a ceramic plate, and a wiring substrate 432 formed on the lower surface of the substrate member 431.

[0023] The substrate member 431, which is a ceramic substrate, may have numerous conductive paths (not shown) that penetrate in the thickness direction. A pad is formed on the upper surface of the substrate member 431, and one end of the conductive path within the substrate member 431 is formed to connect to a connection terminal of the corresponding wiring pattern on the upper surface of the substrate member 431. On the lower surface of the substrate member 431, the other end of the conductive path within the substrate member 431 is formed to connect to a connection terminal provided on the upper surface of the wiring board 432.

[0024] The wiring board 432 is a substrate formed from a synthetic resin material such as polyimide. One side of the wiring board 432 (for example, the bottom side) is bonded to each of the multiple electrical contacts 1. The electrical contacts 1 connected to one side of the wiring board 432 are electrically connected to the corresponding connection terminals of the wiring board 41 via the electrical connection unit 42.

[0025] (A-1-2) Configuration of electrical contacts Next, the configuration of the electrical contactor 1 according to the embodiment will be described with reference to the drawings.

[0026] Figure 1 is a configuration diagram showing an example of the configuration of an electrical contact 1 to be placed on the wiring board 432 of the probe substrate 43 in an embodiment.

[0027] In Figure 1, the electrical contactor 1 according to the embodiment has a joint portion 10, a main body support portion 11, a first arm portion 13, a second arm portion 14, a base portion 15, and a contact portion 16.

[0028] The electrical contact 1 is made of a conductive material such as metal, and conducts electrical signals between the wiring 45 formed on the surface of the wiring board 432 and the electrode terminals 51 of the object under test 2. For example, the electrical contact 1 is mounted on the wiring board 432 by joining the joint 10 of the electrical contact 1 so that it contacts the wiring 45 of the wiring board 432. During the inspection of the object under test 2, the tip 161 of the contact portion 16 of the electrical contact 1 makes electrical contact with the electrode terminals 51 of the object under test 2, and the electrical contact 1 conducts electrical signals between the wiring 45 and the electrode terminals 51 of the object under test 2.

[0029] The electrical contact 1 can be formed, for example, by MEMS process technologies such as plating, etching, and lithography, and the electrical contact 1 is a plate-like member formed with the same or similar overall thickness. The dimensions of the electrical contact 1 are not particularly limited, as they are determined according to the size of the electrode terminals 51 of the object under inspection 2 and the spacing between the electrode terminals 51, but for example, the dimension (length) of the electrical contact 1 in the left-right direction (longitudinal direction) can be several millimeters.

[0030] The electrical contactor 1 is a cantilever-type probe. That is, when the contact portion 16 electrically contacts the electrode terminal 51 of the object under inspection 2, a contact load acts from the electrode terminal 51 side toward the contact portion 16 side. This contact load causes the first arm portion 13 and the second arm portion 14, which are connected to the main body support portion 11, to elastically deform, and the first arm portion 13 and the second arm portion 14 elastically support the contact portion 16. In this way, the cantilever-type electrical contactor 1 can reliably make electrical contact between the contact portion 16 and the electrode terminal 51 while suppressing the contact load between the contact portion 16 and the electrode terminal 51.

[0031] [Body support part] The main support portion 11 is the part that extends upward from the joint portion 10 side (from the wiring board 432 toward the object under test 2 side). The main support portion 11 is the part that supports the first arm portion 13 and the second arm portion 14, which are elastically deformed by the contact load generated when the contact portion 16 comes into contact with the electrode terminals 51 of the object under test 2.

[0032] [First arm section and second arm section] One end of the first arm portion 13 and the second arm portion 14 are connected to the main body support portion 11, and the other ends of the first arm portion 13 and the second arm portion 14 are connected to the base portion 15. The first arm portion 13 and the second arm portion 14 are parts that elastically support the contact portion 16 when the contact portion 16 makes contact with the electrode terminal 51. The first arm portion 13 and the second arm portion 14 are parts that adjust the amount of vertical movement of the contact portion 16 due to the contact load and the amount of horizontal scrubbing due to overdrive.

[0033] Figure 1 illustrates a case where the electrical contact 1 has two arm portions (a first arm portion 13 and a second arm portion 14), but the number of arm portions is not limited to this, and the shape of the arm portions is not limited as long as they can elastically support the contact portion 16.

[0034] [Base] The base portion 15 is connected to the other ends of the first arm portion 13 and the second arm portion 14, and is also equipped with a contact portion 16.

[0035] [Contact area] The contact portion 16 is provided on the upper part of the base portion 15, and the tip portion 161 of the contact portion 16 makes electrical contact with the electrode terminal 51 of the object to be inspected 2.

[0036] [Joint part] The joint portion 10 is the part of the probe substrate 43 that is attached to the wiring substrate 432.

[0037] When joining the electrical contact 1 to the wiring board 432, the joining portion 10 of the electrical contact 1 is positioned with the board surface of the wiring board 432 facing the board surface, so that the electrical contact 1 is standing perpendicular to the board surface of the wiring board 432, and the joining portion 10 is placed on the board surface. At this time, the joining portion 10 is in contact with the wiring 45 on the wiring board 432.

[0038] Subsequently, in order to ensure that the joint 10 and the wiring 45 are in secure contact, the joint 10 of the electrical contact 1 is pressed against the substrate surface from top to bottom (from the contact portion 16 side of the electrical contact 1 towards the wiring board 432 side) so that the height position of the tip 161 of the electrical contact 1 is aligned with the alignment reference plane SF (see Figure 3). In this state, the joint 10 of the electrical contact 1 and the substrate surface of the wiring board 432 are joined using a bonding material S such as solder.

[0039] At this time, as illustrated in Figure 3, the joint portion 10 of the electrical contact 1 is covered with a bonding material S such as solder, thereby joining the joint portion 10 of the electrical contact 1 to the wiring board 432.

[0040] Here, as shown in Figure 1, the joint portion 10 of the electrical contactor 1 has a base end portion 106, a base portion 103 extending in the longitudinal direction of the electrical contactor 1, a substrate surface contact portion 104 that contacts the substrate surface of the wiring board 432, an elastic portion 105 located between the base portion 103 and the substrate surface contact portion 104, a first holding portion 101 that stands perpendicular to the substrate surface at one end of the substrate surface contact portion 104, and a second holding portion 102 that stands perpendicular to the substrate surface at the other end of the substrate surface contact portion 104.

[0041] The base end portion 106 is the part that connects the lower side of the main body support portion 11 (the board surface side of the wiring board 432) to the base portion 103. When viewed from the side of the plate-shaped electrical contact 1, the base end portion 106 has a roughly trapezoidal shape.

[0042] The base portion 103 is a plate-like portion that extends longitudinally from the base end portion 106 to the lower side (the substrate surface side of the wiring board 432). The base portion 103 is the part that holds the orientation of each element located above the base end portion 106 (i.e., the contact portion 16, the base portion 15, the first arm portion 13 and the second arm portion 14, and the main body support portion 11). Three elastic portions 105 are provided on the lower side of the base portion 103 (the substrate surface side of the wiring board 432) along the longitudinal direction of the base portion 103.

[0043] Each elastic portion 105 has one end (upper end) connected to the base portion 103 and the other end (lower end) connected to the substrate surface contact portion 104. Each elastic portion 105 is formed in a bellows shape by being pulled out vertically downward from one end, then bent to extend a predetermined length in the longitudinal direction, and then bent again to extend a predetermined length in the opposite direction, repeating this process multiple times.

[0044] Each elastic portion 105 is bellows-shaped, as illustrated in Figure 1. When a uniform load is applied from top to bottom during the joining of the electrical contact 1, the three elastic portions 105 deform independently in response to the warping or undulation of the wiring board 432, and each elastic portion 105 absorbs the warping or undulation of the board surface.

[0045] Therefore, when joining multiple electrical contacts 1 to the wiring board 432 while aligning the height positions of the respective tip portions 161 of each electrical contact 1, the base portion 103 and the substrate surface of the wiring board 432 become parallel, and each electrical contact 1 can be joined in an upright position perpendicular to the substrate surface of the wiring board 432.

[0046] The shape of the elastic portion 105 is not limited to the example shown in Figure 1, as long as it has elasticity in the vertical direction (perpendicular to the wiring board 432 and in the opposite direction). Also, the number of elastic portions 105 may be one, two, or four or more.

[0047] The first retaining portion 101 is provided vertically at one end of the substrate surface contact portion 104, and the second retaining portion 102 is provided vertically at the other end of the substrate surface contact portion 104. The substrate surface contact portion 104, the first retaining portion 101, and the second retaining portion 102 form a substantially U-shape. In other words, the upper part of the member that stands vertically relative to the substrate surface of the wiring board 432 is open.

[0048] Multiple engaging recesses (hereinafter referred to as "engaged portions") 110 are provided at a constant pitch on the inner surface of the first retaining portion 101. Similarly, multiple engaging recesses 111 are provided at a constant pitch on the inner surface of the second retaining portion 102.

[0049] Furthermore, the first end portion 103a of the base portion 103 has an engaging projection 108 that engages with the engaging recess 110 of the first retaining portion 101. Similarly, the second end portion 103b of the base portion 103 has an engaging projection 109 that engages with the engaging recess 111 of the second retaining portion 102.

[0050] Here, the configuration having an engaging projection 108 on the first end portion 103a and an engaging recess 110 on the first holding portion 101, and the configuration having an engaging recess 111 on the second holding portion 102 and an engaging projection 109 on the second end portion 103b, are also referred to as "posture holding portions 150".

[0051] Figure 1 illustrates a case where multiple engagement recesses 110 are arranged downwards (towards the substrate surface side of the wiring board 432) from near the center of the vertically standing first retaining portion 101. However, it is sufficient that the engagement recesses 110 are positioned in a location where they can engage with the engagement projections 108. For example, since there is little possibility of the engagement projections 108 and engagement recesses 110 engaging at the lower end of the first retaining portion 101, engagement recesses 110 do not need to be present at the lower end of the first retaining portion 101. The same applies to engagement recesses 111.

[0052] Figure 10 is an explanatory diagram illustrating the connection of an electrical contact to a slightly curved substrate surface in an embodiment. Figure 10(A) is an explanatory diagram illustrating the state before load application, and Figure 10(B) is an explanatory diagram illustrating the state when load is applied.

[0053] Figure 4 is an enlarged diagram showing the configuration of the attitude-holding part 150 according to the embodiment. Figure 4 illustrates the attitude-holding part 150 provided on the second end 103b side of the base part 103. The attitude-holding part 150 on the first end 103a side is based on a similar concept.

[0054] For example, in Figures 10(A) and 10(B), when an electrical contact 1 is joined to the wiring board 432, if a load is applied from above to below, the base portion 103 is pushed towards the substrate surface of the wiring board 432. At this time, the elastic portion 105 deforms to absorb the warping of the substrate surface and maintains a parallel state between the alignment reference surface and the plane formed by the tips 161 of the multiple electrical contacts 1 provided on the electrical connection device (probe card). However, if the warping of the substrate surface is large, one of the elastic portions 105 deforms significantly, and one of the ends of the base portion 103 (for example, the second end portion 103b) is pushed deeply towards the substrate surface. At that time, as shown in Figure 4, for example, the engaging projection 109 of the second end portion 103b fits into the engaging recess 111, and the orientation of the electrical contact 1 can be maintained.

[0055] In other words, when a load is applied during the joining of the electrical contactor 1, the engaging projections 108 and 109 at both ends of the base portion 103 engage with the engaging recesses 110 and 111, respectively, thereby maintaining the orientation of the electrical contactor 1.

[0056] Furthermore, with the engaging projection 108 and the engaging projection 109 engaged with the engaging recess 110 and the engaging recess 111, respectively, that is, with the orientation of the electrical contact 1 being maintained, the electrical contact 1 can be joined to the wiring board 432 using a bonding material S such as solder, thus enabling stable and reliable joining.

[0057] Furthermore, the gaps between each elastic portion 105 in the joint 10 are through-holes that penetrate the plate-like member. Therefore, as the joining material S solidifies while filling the gaps between each elastic portion 105, the joint 10 can be firmly joined while maintaining the elastically deformed state of each elastic portion 105.

[0058] As a result, even if the substrate surface of the wiring board 432 is warped or undulating, the electrical contact 1 can be reliably joined to the wiring board 432 while suppressing any lifting or tilting of the wiring board 432 relative to the substrate surface.

[0059] Furthermore, even if the bonding material S, such as solder, softens due to high-temperature testing, misalignment of the tip portion 161 relative to the electrode terminal 51 of the object under test 2, and tilting of the electrical contact 1 can be suppressed.

[0060] In the example described above, we illustrated the case where one end of the base is deeply pressed in, but it is not limited to this, and depending on the condition of the substrate surface of the wiring board 432, both ends of the base 103 may be deeply pressed in, so that the engaging projection 108 of the first end 103a fits into the engaging recess 110 of the first retaining part 101, and at the same time, the engaging projection 109 of the second end 103b fits into the engaging recess 111 of the second retaining part 102.

[0061] Furthermore, since the inner surfaces of the first retaining portion 101 and the second retaining portion 102 are provided with engaging recesses 110 and 111 of different heights, the engaging projections 108 and 109 may fit into the engaging recesses 110 and 111 of different heights, respectively, depending on the sinking of the end of the base portion 103. Even in this case, the wiring board 432 can be maintained in a state where it is less likely to float or tilt relative to the board surface.

[0062] (A-2) Variation (A-2-1) First variation Figure 5 is a diagram showing a first modified example of the electrical contact according to the embodiment.

[0063] In Figure 5, the configuration of the elastic portion 105A of the joint 10A of the first modified electrical contact 1A differs from that of the elastic portion 105 of the joint 10 of the electrical contact 1 in Figure 1.

[0064] In the electrical contactor 1A shown in Figure 5, the joint portion 10A comprises four elastic portions 105A arranged at approximately equal intervals, and each elastic portion 105A is formed of a leaf spring. That is, one end (upper end) of each elastic portion 105A is connected to the base portion 103, and the other end (lower end) of each elastic portion 105A is connected to the substrate surface contact portion 104.

[0065] Of the four elastic parts 105A, the two elastic parts 105A on the right side (first holding part 101 side) are curved diagonally from the upper left to the lower right, convex downwards, and the two elastic parts 105A on the left side (second holding part 102 side) are curved diagonally from the upper right to the lower left, convex downwards. This allows the orientation of the electrical contact 1 to be maintained.

[0066] The wire diameter of each elastic part 105A in Figure 5 can be appropriately determined according to the amount of elastic deformation. For example, by making the wire diameter at one end (upper end) of each elastic part 105A relatively thicker and the wire diameter at the other end (lower end) relatively thinner, the amount of deformation of each elastic part 105A can be increased.

[0067] (A-2-2) Second variation Figure 6 is a diagram showing a second modified example of the electrical contact of the embodiment.

[0068] In Figure 6, the configuration of the joint 10B of the electrical contact 1B in the second modified example differs from the joint 10 of the electrical contact 1 in Figure 1.

[0069] In the electrical contact 1B of Figure 6, the configuration of the attitude holding section 150B differs from the configuration of the attitude holding section 150 in Figure 1. Below, we will illustrate using the attitude holding section 150B on the first holding section 101B side, but the same applies to the second holding section 102B side.

[0070] For example, the engaging recess 110B provided on the inner surface of the first retaining portion 101B in Figure 6 has two adjacent protrusions that are each formed to be large, and the depth (i.e., length in the X direction) of the engaging recess 110B that engages with the engaging projection 108 is formed to be deep. This allows for a firm engagement with the engaging projection 108.

[0071] Furthermore, for example, the inner surface of the first retaining portion 101B is provided with only one engaging recess 110B formed by two protrusions. The number of engaging recesses 110B may be two or three or more. Also, when there are multiple engaging recesses 110B, the pitch between the engaging recesses 110B may be a constant value or not. In the latter case, for example, the pitch length between the engaging recesses 110B may decrease as it moves towards the lower side of the first retaining portion 101B. This makes it possible to make fine height adjustments even when there are fine undulations on the substrate surface of the wiring board 432.

[0072] Furthermore, for example, the upper part of the first retaining portion 101 illustrated in Figures 1 and 5 has a portion that is bent inward, whereas the first retaining portion 101B in Figure 6 does not have a bent portion at its upper part. This makes the structure of the electrical contact 1B simpler.

[0073] In the electrical contact 1B of Figure 6, the joint 10B is provided with two elastic parts 105A as described in the first modification. Since the two elastic parts 105A were described in the first modification, a detailed explanation is omitted here.

[0074] (A-2-3) Third variation Figure 7 is a diagram showing a third modified example of the electrical contact of the embodiment.

[0075] In Figure 7, the configuration of the attitude-holding portion 150C of the third modified electrical contact 1C differs from the configuration of the attitude-holding portions 150 and 150B in Figures 1 and 5-6. In the following examples, the attitude-holding portion 150C on the first holding portion 101C side will be used, but the same applies to the second holding portion 102C side.

[0076] In Figure 7, the attitude holding portion 150C on the first holding portion 101C side has an engagement recess 110C provided on the outer surface of the first holding portion 101C.

[0077] Furthermore, the first end 103a side of the base 103 is formed in an inverted U shape, and an engaging projection 108C that engages with the engaging recess 110C is provided on the inner surface of the tip end (right side in Figure 7) of the inverted U shape.

[0078] Thus, the structure may also be such that the engaging projection 108C engages with the engaging recess 110C on the outer surface of the first retaining portion 101C from the outside, and in this case as well, the same effects as in the embodiment described above can be obtained.

[0079] (A-2-4) Fourth variation Figure 8 is a diagram showing a fourth modified example of the electrical contact of the embodiment.

[0080] In Figure 8, the electrical contactor 1D of the fourth modified example has a different configuration of the attitude holding portion 150D compared to the attitude holding portions 150, 150B, and 150C in Figures 1 and 5 to 7. In the following examples, the attitude holding portion 150D on the first holding portion 101D side will be used, but the same applies to the one on the second holding portion 102D side.

[0081] In Figure 8, the attitude holding portion 150D on the first holding portion 101D side has engagement recesses 110D provided on both the inner and outer surfaces of the first holding portion 101D.

[0082] Furthermore, the first end 103a side of the base 103 is formed in an inverted U shape, and engaging projections 108D that engage with the engaging recess 110D are provided on the inner surfaces of the right and left ends of the inverted U shape shown in Figure 8.

[0083] Thus, the structure may be such that the first end portion 103a, which is inverted U-shaped, fits from above onto the first retaining portion 101D, which stands perpendicular to the substrate surface, and the engaging projection 108C engages with the engaging recess 110C provided on both the inner and outer surfaces of the first retaining portion 101D. In this case as well, the same effects as in the embodiment described above can be obtained.

[0084] (A-3) Effects of the Embodiment As described above, according to this embodiment, when joining electrical contacts to a substrate surface while aligning the height of the tip positions of the electrical contacts, even if the substrate surface is warped or undulating, a load is applied to the electrical contact, and an elastic part that follows minute undulations of the substrate surface and absorbs the effects of such undulations, and a posture-holding part that maintains the posture of the electrical contact that has sunk in due to the load is provided, thereby reducing lifting of the joint with respect to the substrate surface and allowing the electrical contact to stand upright on the substrate surface. As a result, variations in the tip positions of the electrical contacts can be reduced, and the electrical contacts can be reliably joined to the substrate surface.

[0085] (B) Other embodiments Although various modifications have been mentioned in the embodiments described above, the present invention can also be applied to the following modified embodiments.

[0086] (B-1) In the above-described embodiment, the posture-holding portion is exemplified as having a recessed shape for the engaging recess and a convex shape for the engaging portion that fits into the engaging recess. However, as long as the two fit together and can hold the posture of the electrical contact, the engaging portion may be recessed and the engaging recess may be convex. [Explanation of Symbols]

[0087] 1 (1A, 1B, 1C, 1D)...Electrical contactor, 2...Object under inspection, 3...Electrical connection device, 5...Chuck top, 10 (10A, 10B)...Joint, 11...Main body support, 13...First arm, 14...Second arm, 15...Base, 16...Contact part, 161...Tip, 18...Probe substrate support, 41...Wiring board, 42...Electrical connection unit, 43...Probe board, 45...Wiring, 51...Electrode terminal, 431...Board component, 432...Wiring board, 101 (101B, 101C, 101D)...First holding part, 102 (102B, 102C, 102D)...Second holding part, 103...Base part, 103a...First end part, 103b...Second end part, 104...Substrate surface contact part, 105 (105A)...Elastic part, 106...Base end part, 108 (108C, 108D)...Engaging projection part, 109 (109C, 109D)...Engaging projection part, 110 (110B, 110C, 110D)...Engaging recess part, 111 (111B, 111C, 111D)...Engaging recess part, 150 (150B, 150C, 150D)...Position holding part.

Claims

1. A plate-shaped electrical contact that is mounted on the surface of a substrate, Main support section, A beam portion connected to the main body support portion on the side of the object under inspection, and supported by the main body support portion, The beam portion has a contact portion that electrically contacts the electrode of the object under inspection at its tip, A joint portion that connects to the main body support portion on the substrate side and is bonded to the substrate surface while in contact with the wiring formed on the substrate surface. Equipped with, The aforementioned joint portion The base end portion is connected to the main body support portion, A base portion connected to the aforementioned base end, extending in the longitudinal direction of the electrical contact parallel to the substrate plane, and having engaging portions at each of its ends, The electrical contact comprises a substrate surface contact portion that extends in the longitudinal direction of the electrical contact parallel to the substrate plane and contacts the substrate surface, An elastic portion is provided between the base and the substrate surface contact portion, and which is elastic when subjected to the load during bonding to the substrate surface, A first holding portion is provided perpendicularly from one end of the substrate surface contact portion that extends parallel to the substrate plane, in a direction away from the substrate surface, and has an engaged portion that engages with the engaging portion of one end of the base portion on the same side as the one end of the substrate surface contact portion, A second holding portion is provided perpendicularly from the other end of the substrate surface contact portion that extends parallel to the substrate plane, in a direction away from the substrate surface, and has an engaged portion that engages with the engaging portion of the other end of the base portion on the same side as the other end of the substrate surface contact portion. It has, The engaged portion of the first retaining part and the engaged portion of the second retaining part each have one or more recesses formed between projections on one or both of their inner and outer surfaces, The engaging portions at one end and the other end of the base each have a protrusion that engages with either of the recesses formed between the protrusions, which are the engaged portions of the first and second holding portions, respectively. An electrical contact characterized by the following features.

2. The electrical contact according to claim 1, characterized in that when the engaged portion of the first retaining portion and the engaged portion of the second retaining portion each have a plurality of recesses, the plurality of recesses are formed at a constant pitch.

3. The electrical contact according to claim 1, characterized in that, when the engaged portion of the first retaining portion and the engaged portion of the second retaining portion each have a plurality of recesses, the plurality of recesses are formed such that the pitch decreases as they move toward the substrate surface.

4. If the engaged portion of the first retaining portion and the engaged portion of the second retaining portion have a plurality of recesses on their inner surfaces, The tip portions of the first and second holding portions have a portion that is bent inward. The electrical contactor according to feature 1.

5. In an electrical connection device that electrically connects an inspection device and a plurality of contacts that come into contact with electrodes of an object under inspection, circuit board and A plurality of contacts are provided on one end side of the substrate and contact the electrodes of the object to be inspected. Equipped with, An electrical connection device characterized in that the contact has an electrical contact as described in any one of claims 1 to 4.

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