Liquid dispensing device, imprinting device, and dispensing method

Abstract

To provide a liquid discharge device that can acquire a preferable discharge condition, and to provide an imprint device and a method of discharge.SOLUTION: In a discharge material use step, a water head difference (reference height) between a discharge port surface and a liquid level of a working fluid 35 in a sub-tank 26 is changed.SELECTED DRAWING: Figure 6

Description

Technical Field

[0001] The present invention relates to a liquid ejection apparatus that ejects liquid, an imprint apparatus, and an ejection method.

Background Art

[0002] There is a liquid ejection apparatus that ejects liquid stored in a storage container from an ejection head. Patent Document 1 describes a configuration in which the interior of a sub-tank communicating with the ejection head is divided into an ink chamber and a buoyancy generation chamber by a flexible member, in order to maintain the pressure inside the sub-tank at a negative pressure. Further, a float bag with a small specific gravity is connected and attached to the flexible member inside the buoyancy generation chamber, and a technique is described in which the inside of the ejection head communicating with the ink chamber is maintained at a negative pressure by the buoyancy of the float bag.

[0003] Further, Patent Document 2 describes a configuration in which a storage container is provided with a liquid chamber that stores the ejection liquid to be ejected from the ejection head, and a liquid chamber that stores a liquid filler, and the two liquid chambers are partitioned by a flexible film. In addition, as the ejection liquid in the storage container decreases due to ejection, the pressure of the liquid chamber storing the liquid filler changes. A technique is described in which the inside of the ejection head is maintained at a negative pressure by controlling the pressure of the liquid chamber storing the liquid filler within an allowable range.

Prior Art Documents

Patent Documents

[0004]

Patent Document 1

Patent Document 2

Summary of Invention

Problems to be Solved by the Invention

[0005] As the extrusion material in the container is consumed by the extrusion process, the flexible member deforms in accordance with the consumption of the extrusion material. When deformation occurs, a resistance force is generated in the flexible member, and the pressure in the ink chamber changes. Furthermore, the resistance force of the flexible member increases with the use of the extrusion material. However, Patent Documents 1 and 2 do not mention the resistance force of the flexible member.

[0006] Considering the resistance of the flexible member, the pressure at the discharge head can be expressed by the following formula.

[0007] Pressure at the discharge head = Pressure in the buoyancy generation chamber (pressure in the liquid chamber containing the liquid filler) (negative pressure A) + resistance force due to deformation of the flexible member (negative pressure B) Here, as the discharge material is consumed, the negative pressure B increases, so even if negative pressure A is adjusted to be approximately constant, the pressure at the discharge head will change. As a result, the discharge performance will also change, and there is a risk that a good discharge state cannot be obtained.

[0008] Therefore, the present invention provides a liquid dispensing device, an imprinting device, and a dispensing method that can achieve a good dispensing state. [Means for solving the problem]

[0009] Therefore, the liquid discharge device of the present invention comprises: a discharge head having a discharge port surface formed with a discharge port for discharging a discharge material; a storage container having a first storage space that houses the discharge material and communicates with the discharge head; a second storage space that is separated from the first storage space by a flexible member and houses working fluid; a sub-tank that communicates with the second storage space and can supply the working fluid from the second storage space; and a main tank that can supply working fluid to the sub-tank. A control unit configured to control the liquid level of the working fluid in the sub-tank, A liquid discharge device comprising the above, wherein the discharge port surface is positioned higher than the liquid level of the working fluid in the sub-tank, The control unit controls the liquid level so that the liquid level of the working fluid in the sub-tank is maintained within a control range defined with respect to a reference liquid level. When the difference between the height of the discharge port surface and the liquid level of the working fluid in the sub-tank is defined as the head difference, the control unit is configured to shift the control range by changing the reference liquid level from a first reference liquid level corresponding to a first head difference to a second reference liquid level corresponding to a second head difference when the amount of discharge material used reaches a predetermined amount. It is characterized by the following: [Effects of the Invention]

[0010] According to the present invention, it is possible to provide a liquid dispensing device, an imprinting device, and a dispensing method that can achieve a good dispensing state. [Brief explanation of the drawing]

[0011] [Figure 1] This is a schematic diagram showing the configuration of an imprint device. [Figure 2] This is a schematic diagram showing a discharge unit that functions as a liquid dispensing device. [Figure 3] This is an enlarged view showing the vicinity of the discharge port in the discharge head. [Figure 4] This is a diagram showing the negative pressure characteristic curve generated in the first containment space. [Figure 5] This diagram shows the cleaning process for the first containment space and the first film. [Figure 6] This is a diagram showing the negative pressure characteristic curve generated in the first containment space. [Figure 7] This figure shows a table illustrating the negative pressure characteristic curve and reference height generated in the first containment space. [Figure 8] This figure shows a table illustrating the negative pressure characteristic curve and reference height generated in the first containment space. [Modes for carrying out the invention]

[0012] (First embodiment) A first embodiment of the present invention will be described below with reference to the drawings.

[0013] FIG. 1 is a schematic diagram showing the configuration of an imprint apparatus 101 applicable to the present embodiment. The imprint apparatus 101 is used for manufacturing various devices such as semiconductor devices. The imprint apparatus 101 includes a discharge unit 10. The discharge unit 10 discharges a discharge material 8 (resist) onto a medium 61. The discharge material 8 is a photocurable resin having a property of being cured by receiving ultraviolet light 108. The discharge material 8 is appropriately selected according to various conditions such as a semiconductor device manufacturing process. In addition to photocurable materials, for example, a discharge material that is a thermosetting resist may be used, and the imprint apparatus may be an apparatus that performs an imprint process by curing the resist with heat. The discharge material 8 may also be referred to as an imprint material.

[0014] The imprint apparatus 101 performs an imprint process including the following series of processes. That is, the imprint apparatus 101 causes the discharge unit 10 to discharge the discharge material 8 onto the medium 61. Then, a mold 107 having a molding pattern is pressed against the discharge material 8 discharged onto the medium 61, and in that state, the discharge material 8 is cured by irradiation with light (ultraviolet rays). Thereafter, the pattern of the mold 107 is transferred onto the medium 61 by separating the mold 107 from the cured discharge material 8.

[0015] The imprint apparatus 101 includes a light irradiation unit 102, a mold holding mechanism 103, a conveyance unit 62, a discharge unit 10, a control unit 106, a measurement unit 122, and a housing 123.

[0016] The light irradiation unit 102 has a light source 109 and an optical element 110 for correcting the ultraviolet light 108 emitted from the light source 109. The light source 109 is, for example, a halogen lamp that generates i-line or g-line. The ultraviolet light 108 is applied to the discharge material 8 through the mold 107. The wavelength of the ultraviolet light 108 is a wavelength corresponding to the discharge material 8 to be cured. In the case of an imprint apparatus using a thermosetting resist as the resist, a heat source unit for curing the thermosetting resist is installed instead of the light irradiation unit 102.

[0017] The mold holding mechanism 103 includes a mold chuck 115 and a mold drive mechanism 116. The mold 107 held by the mold holding mechanism 103 has a rectangular outer peripheral shape, and has a pattern portion 107a in which a concavo-convex pattern such as a circuit pattern to be transferred is three-dimensionally formed on the surface facing the medium 61. The material of the mold 107 in the present embodiment is a material that allows ultraviolet light 108 to pass through, and for example, quartz is used.

[0018] The mold chuck 115 holds the mold 107 by vacuum suction or electrostatic force. The mold drive mechanism 116 moves the mold 107 by holding and moving the mold chuck 115. The mold drive mechanism 116 can move the mold 107 in the -Z direction to press the mold 107 against the discharged material 8. Further, the mold drive mechanism 116 can move the mold 107 in the +Z direction to separate the mold 107 from the discharged material 8. Examples of actuators that can be adopted for the mold drive mechanism 116 include a linear motor or an air cylinder.

[0019] The mold chuck 115 and the mold drive mechanism 116 have an opening region 117 at the center. Further, the mold 107 has a concave-shaped cavity 107b on the surface irradiated with the ultraviolet light 108. A light transmitting member 113 is installed in the opening region 117 of the mold drive mechanism 116, and a sealed space 112 surrounded by the light transmitting member 113, the cavity 107b, and the opening region 117 is formed. The pressure in the space 112 is controlled by a pressure correction device (not shown). When the pressure correction device sets the pressure in the space 112 higher than the outside, the pattern portion 107a bends in a convex shape toward the medium 61. As a result, the central portion of the pattern portion 107a comes into contact with the discharged material 8. Therefore, when the mold 107 is pressed against the discharged material 8, gas (air) is prevented from being trapped between the pattern portion 107a and the discharged material 8, and the discharged material 8 can be filled into every corner of the concavo-convex portion of the pattern portion 107a. The depth of the cavity 107b that determines the size of the space 112 is appropriately changed according to the size or material of the mold 107.

[0020] The transport unit 62 includes a substrate chuck 119, a substrate stage housing 120, and a stage reference mark 121. The medium 61 held on the substrate stage is a single-crystal silicon substrate or an SOI (Silicon on Insulator) substrate, and the extrusion material 8 is extruded onto the surface of the medium 61 to form a pattern.

[0021] The substrate chuck 119 holds the medium 61 by vacuum suction. The substrate stage housing 120 moves the medium 61 by moving in the X and Y directions while mechanically holding the substrate chuck 119. The stage reference mark 121 is used to set the reference position of the medium 61 in the alignment of the medium 61 with the mold 107.

[0022] For example, a linear motor can be used as the actuator for the circuit board stage housing 120. Alternatively, the actuator for the circuit board stage housing 120 may be configured to include multiple drive systems, such as a coarse drive system or a fine drive system.

[0023] The discharge unit 10 discharges the uncured material 8 in liquid form from a nozzle and applies it onto the medium 61. In this embodiment, a method is employed in which the material 8 is pushed out from the discharge port using the piezoelectric effect of a piezoelectric element. The control unit 106, which will be described later, generates a drive waveform to drive the piezoelectric element and applies it to the piezoelectric element, driving it to deform into a shape suitable for discharge. Multiple nozzles are provided, and each can be controlled independently. The amount of material 8 discharged from the nozzle of the discharge unit 10 is appropriately determined based on the desired thickness of the material 8 formed on the medium 61, the density of the pattern formed, and so on.

[0024] The measurement unit 122 includes an alignment measuring instrument 127 and an observation measuring instrument 128. The alignment measuring instrument 127 measures the positional displacement in the X and Y directions between the alignment marks formed on the medium 61 and the alignment marks formed on the mold 107. The observation measuring instrument 128 is an imaging device such as a CCD camera, which captures the pattern of the extruded material 8 ejected onto the medium 61 and outputs the image information to the control unit 106.

[0025] The control unit 106 controls the operation of each component of the imprint device 101. The control unit 106 is composed of, for example, a computer having a CPU, ROM, and RAM. The control unit 106 is connected to each component of the imprint device 101 via a line, and the CPU controls each component according to a control program stored in the ROM.

[0026] The control unit 106 controls the operation of the mold holding mechanism 103, the transport unit 62, and the discharge unit 10 based on the measurement information from the measurement unit 122. The control unit 106 may be integrated with other parts of the imprint device 101, or it may be implemented as a separate device from the imprint device. Furthermore, the control unit 106 may be composed of multiple computers rather than a single computer.

[0027] The housing 123 comprises a base plate 63 on which the transport unit 62 is placed, a bridge platen 125 for fixing the mold holding mechanism 103, and support columns 126 extending from the base plate 63 to support the bridge platen 125.

[0028] The imprint apparatus 101 includes a mold transport mechanism (not shown) that transports the mold 107 from outside the apparatus to the mold holding mechanism 103, and a substrate transport mechanism (not shown) that transports the medium 61 from outside the apparatus to the transport section 62.

[0029] Figure 2 is a schematic diagram showing a liquid discharge unit 10 that functions as a liquid discharge device. The liquid discharge unit (hereinafter also referred to as the liquid discharge device) 10 comprises a main tank 34 that is in communication with the atmosphere and stores working fluid 35 inside, and a sub-tank 26 that is in communication with the atmosphere and can communicate with the main tank 34 and stores working fluid 35 inside. Furthermore, the liquid discharge device 10 comprises a discharge material storage unit 100 that communicates with the sub-tank 26.

[0030] The discharge material storage unit 100 includes a storage container 13 for storing the discharge material 8 and a discharge head 14 attached to the storage container 13. The storage container 13 and the discharge head 14 may be configured as separate components or as an integral part. The storage container 13 may be of cartridge type. The discharge head 14 is capable of discharging the discharge material 8 from discharge ports 15 that open on the outer surface (discharge surface) of the discharge head. In this embodiment, the discharge ports 15 are arranged on the discharge surface of the discharge head 14 at a density of 500 to 1000 per inch.

[0031] The liquid dispensing device 10 has a transport unit 62 mounted on a base plate 63, positioned opposite the dispensing surface of the dispensing head 14. The transport unit 62 uses an adsorption means (not shown) to adsorb and hold the medium 61, which is the object to which the dispensing material 8 will be applied, and moves along the base plate 63, thereby moving the medium 61 relative to the dispensing head 14. The dispensing material 8 contained in the containment container 13 is dispensed from the dispensing port 15 of the dispensing head 14 onto the dispensing material application area of ​​the medium 61, which has been transported to a position opposite the dispensing port 15. This forms a desired dispensing material pattern (e.g., a recorded image).

[0032] The extrusion material 8 is, for example, a liquid or a liquid substance. Unlike a solid, the extrusion material 8 has fluidity without a fixed shape when contained in the containment container 13 and when extruded from the extrusion head 14, and its volume change is not as large as that of a gas. The extrusion material 8 may be a paste-like substance or a polymer material. In this embodiment, ink may be used as the extrusion material 8. Non-limiting examples of ink include a variety of inks such as inks for image recording, conductive inks for electronic circuit manufacturing, or UV-curable inks. An example of a conductive ink is an ink containing metal particles, in particular a metal nanoink in which metal nanoparticles of several to tens of nanometers dispersed in a liquid.

[0033] Examples of metal nanoinks include silver nanoink. Another example of an extrusion material 8 is an imprint material. In the manufacturing process of semiconductor devices and the like, there is a so-called imprint technique in which a mold with a pattern formed on it is brought into contact with an imprint material on a substrate, and the shape of the mold is transferred to the imprint material to form a pattern. As the imprint material, a resist such as a photocurable resin or a thermosetting resin is used. Such an extrusion material 8 is housed in the first storage space 5 inside the storage container 13.

[0034] Imprint materials typically have smaller tolerances for foreign matter size and metal ions compared to liquids, and are required to be dispensed while maintaining a high level of cleanliness. Therefore, it is desirable that the imprint material, which is initially managed and sealed in the containment container 13, be consumed without contact with the outside or with equipment such as pressure sensors, thereby suppressing the increase of foreign matter and metal ions.

[0035] The working fluid 35 is an incompressible substance whose density (volume) changes due to external temperature and pressure are negligibly small compared to a gas. Therefore, even if the temperature or pressure around the discharge device changes, the volume of the working fluid 35 hardly changes. As the working fluid 35, a substance selected from liquids such as water and gel-like substances can be used. Typically, the difference between the density of the discharge material and the density of the working fluid 35 is smaller than the difference between the density of the discharge material 8 and the density of a gas.

[0036] When the liquid ejection device 10 is used as an ink ejection device for a printing device, ink is naturally used as the ejection material 8. However, it is not necessary to use expensive ink as the working fluid 35; water with a specific gravity close to that of ink can be used. More specifically, water to which an additive with preservative properties has been added can be used as the working fluid 35 to prevent water spoilage and the growth of bacteria. The working fluid 35 is contained in the second containment space 6 within the containment container 13.

[0037] Figure 3 is an enlarged view showing the vicinity of the discharge port 15 in the discharge head 14. In the discharge head 14, actuators (not shown) are mounted in pressure chambers 19 corresponding to each of the discharge ports 15. The actuators can be any type that can generate enough energy to discharge the discharge material 8 as fine droplets, for example, 1 pL (picoliters) or so. Specific examples include piezoelectric elements or heat-generating resistor elements.

[0038] When using a piezoelectric element, the effect of temperature changes (heat rise) on the discharge characteristics is smaller compared to when using a heat-generating resistor element, making it possible to use it at high temperatures. Therefore, a wide range of discharge materials, such as highly viscous resins, can be used. Also, when using a heat-generating resistor element, the manufacturing cost can generally be relatively low. In this embodiment, the actuator is a piezoelectric element, and by driving and controlling the piezoelectric element, the volume in the pressure chamber 19 is changed, causing the discharge material in the pressure chamber 19 to be discharged from the discharge port 15. The piezoelectric element may be implemented using MEMS (Micro Electro Mechanical System) technology.

[0039] Each pressure chamber 19 is in communication with a common liquid chamber 20. The common liquid chamber 20 is in communication with the first containment space 5 of the containment container 13. The discharge material 8 discharged from the discharge port 15 is supplied from the first containment space 5 through the common liquid chamber 20 to the pressure chamber 19. The discharge head 14 does not have a control valve between itself and the first containment space 5. Therefore, the internal pressure of the first containment space 5 is controlled to be negative pressure compared to the atmospheric pressure (external air pressure) outside the discharge port 15 of the discharge head 14. This negative pressure control causes the discharge material 8 inside the discharge port 15 to form a meniscus 17 at the interface with the outside air, preventing leakage (dripping) of the discharge material 8 from the discharge port 15 at unintended timings. In this embodiment, the internal pressure of the first containment space 5 is controlled to be 0.40 ± 0.04 kPa negative pressure compared to the external air pressure.

[0040] The containment container 13 (see Figure 2) has its outer casing and internal volume defined by housing 11 and housing 12. Between housing 11 and housing 12, a flexible member (flexible film) 3 consisting of a first film 1 and a second film 2 is arranged as a partition member that vertically divides the internal space of the containment container 13 into a first containment space 5 and a second containment space 6. The flexible member 3 has a multilayer structure including a layered film configuration. The first and second films are thin films with a thickness of 10 to 100 micrometers each.

[0041] The housing 11 has a first opening that opens on the side facing the housing 12 and a second opening that opens on the side facing the discharge head 14. The first opening that opens on the side facing the housing 12 is completely covered and sealed by a first film 1, and a first containment space 5 is formed between the inner surface of the housing 11 and the first film 1. The second opening communicates with the common liquid chamber 20 of the discharge head 14, thereby allowing the first containment space 5 to communicate with the outside space via the discharge head 14. The first containment space 5 is filled with discharge material 8, and the interface between the discharge material 8 and the outside air is located inside the discharge port 15 as shown in Figure 3.

[0042] Returning to Figure 2, the housing 12 has an opening that opens on the side facing the housing 11. This opening is completely covered and sealed by the second film 2, and a second containment space 6 is formed between the inner surface of the housing 12 and the second film 2. The second containment space 6 is filled with working fluid 35. The second containment space 6 is also configured to communicate with the inside of the sub-tank 26 via a pipe 24, and also via a pipe 23 equipped with a control valve 21 and a pump 22. The sub-tank 26 is a liquid containment section that stores the working fluid 35 and is configured to supply the working fluid 35 to the communicating second containment space 6. The working fluid 35 functions as a liquid filler within the second containment space 6. The first film 1 and the second film 2 each function as partitions between the first containment space 5 and the second containment space 6.

[0043] The material of the films used for the first film 1 and the second film 2 should be resistant to the discharge material 8 and the working fluid 35, from the viewpoint of wetted surfaces and other factors. For example, Teflon®-based fluororesins such as PFA (tetrafluoroethylene-perfluoroalkyl vinyl ether copolymer), ETFE (ethylene tetrafluoroethylene), and PTFE (polytetrafluoroethylene) can be used. Other examples include polyamide synthetic resins such as PE (polyethylene), PVC (polyvinyl chloride), PET (polyethylene terephthalate), PVAL (polyvinyl alcohol), PVDC (polyvinylidene chloride), and nylon. The first film 1 and the second film 2 may be made of the same material (material, thickness) or different materials. For example, the first film 1 may be made of a material such as PFA that is resistant to the discharge material 8, and the second film 2 may be made of a nylon-based material that is resistant to the working fluid 35.

[0044] A film gap plate 9 is provided between the first film 1 and the second film 2. The film gap plate 9 has a through-hole that communicates with the gap between the first film 1 and the second film 2, and a film gap discharge pipe 41 is connected to it in a connected state. The pressure in the film gap is monitored by a pressure sensor 42 located in the middle of the piping to which the film gap discharge pipe 41 and the negative pressure generating means 43 are connected, and the pressure is controlled to become a desired negative pressure that is less than or equal to the pressure in the first containment space 5 and the second containment space 6. Specifically, the pressure in the film gap is preferably lower than the internal pressure of the first containment space 5, and the pressure is controlled to become a constant negative pressure by selecting from a pressure range of -5kPa to -30kPa.

[0045] When a pressure difference occurs between the first containment space 5 and the second containment space 6, the flexible first film 1 and second film 2 move together to the side with lower pressure, and ideally, they stop moving when the pressure difference disappears, repeating this movement. As a result, the internal pressures of the first containment space 5 and the second containment space 6 can be kept approximately equal.

[0046] Let's describe the internal state of the containment container 13 in more detail. When the discharge material 8 is discharged from the discharge head 14, the volume of the discharge material 8 in the first containment space 5 decreases by the amount of the discharged discharge material 8, and the internal pressure of the first containment space 5 decreases. At this time, the internal pressure of the second containment space 6 becomes relatively higher than the internal pressure of the first containment space 5. The flexible first film 1 and second film 2 form a negative pressure by the negative pressure generating means 43, where the internal pressure in the gap between the films is lower than the internal pressure of the first containment space 5. Therefore, as the internal pressure of the first containment space 5 decreases, the first film 1 and second film 2 move together toward the first containment space 5. At the same time, the working fluid 35 is drawn up from the sub-tank 26 into the second containment space 6 via the pipe 24. As a result, ideally, the internal pressures of the first containment space 5 and the second containment space 6 become approximately equal again, reaching an equilibrium state.

[0047] As shown in Figure 2, the sub-tank 26 is connected to the outside space by a pipe 24, and its internal pressure is equal to atmospheric pressure. The pipe 24 connecting the sub-tank 26 and the second containment space 6 is filled with working fluid 35, and the liquid level of the working fluid 35 in the sub-tank 26 in the vertical direction (hereinafter also referred to as "liquid level height") is set to a position lower than the discharge port 15 of the discharge head 14. Let ΔH be the difference in height (distance in the vertical direction) between the liquid level of the working fluid 35 in the sub-tank 26 and the position of the discharge surface where the discharge port 15 opens. In this embodiment, the difference ΔH is set so as to maintain a state in which a meniscus 17 of the discharge material 8 is formed inside the discharge port 15 (the state shown in Figure 3). In other words, the difference ΔH is set so that the discharge material 8 does not leak or drip out of the discharge port 15 to the outside, and the meniscus 17 does not retract excessively to the back (for example, near the common liquid chamber). Specifically, the height difference ΔH is set to 40±4mm so that the internal pressure of the first containment space 5 is controlled to a value 0.40±0.04kPa lower than the external atmospheric pressure.

[0048] The height difference ΔH can be set as appropriate. As described above, this embodiment is an ejection device applicable to a printing device capable of ejecting a liquid volume of about 1 pL or less. For example, when the ejection material 8 is ink for image recording, the diameter of the ejection port 15 is about 10 μm (microns). In this embodiment, the ejection material 8 and the working fluid 35 are assumed to have approximately the same density as water. In this embodiment, under these conditions, the height difference ΔH is set to the range of 40 mm ± 4 mm as described above in order to form a meniscus 17 of the ejection material 8 inside the ejection port 15. For example, the diameter of the ejection port 15 in a low-resolution printing device is several tens of μm, and the diameter of the ejection port in a 3D printer that uses resin or the like as the ejection material 8 is several hundred μm. Thus, the diameter of the discharge port 15 differs depending on the model of the liquid discharge device, and the physical properties of the discharge material 8 (e.g., density, viscosity, etc.) also differ. Therefore, the height difference ΔH (reference height) is appropriately set depending on the application of the discharge device due to the influence of gravity, capillary force, surface tension, etc.

[0049] In this embodiment, a correction operation is performed when the liquid level of the working fluid 35 in the sub-tank 26 falls outside a predetermined range relative to a reference liquid level (reference height). To explain using the above example, a correction operation is performed when the liquid level of the working fluid 35 in the sub-tank 26 falls outside a predetermined range (in this embodiment, the reference liquid level ±4 mm) relative to the reference liquid level of the working fluid 35 (40 mm lower than the discharge port 15). The correction operation is a "liquid level adjustment" operation that brings the liquid level of the working fluid 35 in the sub-tank 26 within a predetermined range by moving the working fluid 35 between the main tank 34 and the sub-tank 26.

[0050] A liquid level sensor 44 (liquid level detection means) is installed in the sub-tank 26. In this embodiment, the liquid level sensor 44 can detect the liquid level height of the working fluid 35 in the sub-tank 26 and its changes (displacement). The main tank 34 and the sub-tank 26 are connected via a pipe 33 equipped with a control valve 31 and a pump 32. The liquid discharge device 10 controls the liquid level height of the working fluid 35 in the sub-tank 26 to a desired range (liquid level adjustment) by driving the control valve 31 and the pump 32 via the control unit 36. Specifically, when the liquid level sensor 44 detects that the liquid level height of the working fluid 35 in the sub-tank 26 has fallen below a predetermined range, the control valve 31 is opened and the pump 32 is driven to supply the working fluid 35 from the main tank 34 to the sub-tank 26.

[0051] Furthermore, when the liquid level sensor 44 detects that the liquid level of the working fluid 35 in the sub-tank 26 is within a predetermined range, the pump 32 is stopped, the control valve 31 is closed, and the supply of working fluid 35 from the main tank 34 to the sub-tank 26 is stopped. It is also possible to return the working fluid 35 from the sub-tank 26 to the main tank 34 by controlling the control valve 31 and the pump 32. In this way, the liquid level in the sub-tank 26 is maintained within a predetermined range.

[0052] A weighing scale 37 is positioned at the bottom of the main tank 34 to measure changes in the weight of the working fluid 35 inside the main tank. The control unit 36 ​​obtains the amount of discharge material 8 discharged from the discharge port 15 of the discharge head 14 based on the measurement results of the weighing scale 37. Alternatively, instead of using a weighing scale 37, the control unit 36 ​​may obtain the cumulative value of the liquid delivered by the pump 32 to calculate the remaining amount of discharge material 8 in the first containment space 5. When the remaining amount of discharge material 8 reaches a standard amount, the control unit 36 ​​displays a message prompting the user to replace the containment container 13 or issues an alarm to inform the user that it is time to replace the containment container 13. This prevents the liquid discharge device from stopping due to a shortage of discharge material 8 in the first containment space 5.

[0053] It is preferable that the sub-tank 26 is positioned such that its internal ceiling surface (the uppermost part in the vertical direction) is lower vertically than the discharge port 15 of the discharge head 14. With this arrangement, even if the working fluid 35 is supplied from the main tank 34 until the sub-tank 26 is full due to the liquid level adjustment described above, the liquid level of the working fluid 35 in the sub-tank 26 will not rise higher than the discharge surface of the discharge port 15. In other words, the ceiling surface of the sub-tank 26 limits the liquid level of the working fluid 35 in the sub-tank 26, thus maintaining the vertical relative positional relationship (height relationship) between the liquid level of the working fluid 35 and the discharge port 15, and the height difference ΔH will not reach 0 (zero). Therefore, it is possible to maintain a negative pressure in the first containment space 5 and the second containment space 6 relative to the outside air pressure, and leakage and dripping of the discharge material 8 from the discharge port 15 can be prevented.

[0054] The second containment space 6 and the sub-tank 26 are connected via pipe 24, and can also be connected via pipe 23, which is equipped with a control valve 21 and a pump 22. If the containment container 13 is removed from and then reinstalled to the liquid discharge device 10, bubbles may enter pipe 24. In this case, the bubbles in pipe 24 can be removed by opening the control valve 21 and operating the pump 22, circulating the working fluid 35 through pipe 24, the second containment space 6, and pipe 23, and sending the working fluid 35 to the sub-tank 26. The control valve 21 is closed when the pump 22 is not in use and opened when the pump 22 is in use.

[0055] Examples of pumps 22 and 32 include syringe pumps, tubular pumps, diaphragm pumps, and gear pumps. However, pumps 22 and 32 are not limited to pumps, as they only need to have the function of a liquid delivery means, and it is possible to select a liquid delivery means suitable for the liquid discharge device.

[0056] Figure 4 shows the negative pressure characteristic curve generated in the first containment space 5 when the height difference (vertical distance) ΔH between the liquid level of the working fluid 35 in the sub-tank 26 and the position of the discharge surface where the discharge port 15 opens is kept constant. In this figure, the horizontal axis shows the amount of discharge material 8 used in the first containment space 5, and the vertical axis shows the pressure inside the first containment space 5.

[0057] The negative pressure characteristics are broadly divided into three pressure fluctuation regions: A, B, and C. In pressure fluctuation region A, the system starts with a positive pressure greater than the negative pressure (hydrohead pressure) generated in the first containment space 5, due to the difference between the liquid level of the working fluid 35 in the sub-tank 26 and the position of the discharge surface of the discharge port 15. Pressure fluctuation region A is the region where the pressure drops sharply (negative pressure increases) in the initial stages of using the discharge material 8. Initially, the discharge material 8 fills the first containment space 5 (initial filling), and the first film 1 and second film 2, which are positioned towards the first containment space 5, move towards the second containment space 6, increasing the resistance due to the initial deformation of the first film 1 and second film 2. Therefore, a large positive pressure is temporarily generated in the first containment space 5 in the initial stages. As the discharge material 8 is discharged (discharge for adjustment), the pressure decreases towards a pressure P1 that is approximately equal to the negative pressure (hydrohead pressure).

[0058] Pressure fluctuation region B is a region where the change in negative pressure associated with the discharge of the discharge material 8 is small, and the pressure change with respect to the amount of discharge material 8 used behaves in a nearly linear manner. The deformation of the first film 1 and the second film 2 occurs slowly, and the resistance force is small. Furthermore, pressure fluctuation region C is a region where the pressure drops rapidly (negative pressure increases). Near the point where the first film 1 and the second film 2 have completed their movement toward the second containment space 6, the volume of the containment space 6 becomes small, restricting movement, and the deformation of the first film 1 and the second film 2 becomes difficult, resulting in a large resistance force.

[0059] The liquid discharge device 10 adjusts the amount of discharge material 8 contained in the first containment space 5 so that the timing of the start of discharge operation coincides with the initial position V1 of the pressure fluctuation region b1. The end position V2 of the pressure fluctuation region b1 is in the range of pressure P2 which is 0.2 kPa lower than pressure P1 which is approximately equal to the negative pressure (hydrohead pressure) generated in the first containment space 5 due to the difference between the position of the discharge surface of the discharge port 15 and the liquid level of the working fluid in the sub-tank 26. Outside the range of pressure P1 to pressure P2 (outside the predetermined range), stable discharge may not be possible. Therefore, it is desirable to keep the negative pressure generated in the first containment space 5 within the predetermined range of pressure P1 to pressure P2 and to perform discharge at a pressure within that predetermined range. Depending on the combination of the first film 1 and the second film 2, the end position V2 may be wider than the pressure fluctuation region B and overlap with a part of the pressure fluctuation region C.

[0060] Furthermore, it is preferable that pressure P2 is not limited to a pressure 0.2 kPa lower than pressure P1, but rather set as appropriate.

[0061] In typical liquid discharge devices that generate negative pressure due to head difference, the liquid level of the working fluid in the sub-tank is initially fixed within a predetermined range. When the pressure fluctuation falls outside the range where stable discharge is possible, the discharge material is replenished in the discharge container regardless of the remaining volume. However, this method does not take into account the resistance of the flexible member that deforms as the discharge material is used, and stable discharge may not be achieved.

[0062] Therefore, in this embodiment, the relationship between the pressure P3 in the first storage space 5, including the resistance force of the flexible member corresponding to the storage volume, is obtained in advance, and the liquid level height (reference height) of the working fluid 35 in the sub-tank 26 is changed based on the amount of discharge material 8 used (pressure in the first storage space 5). The method is described below.

[0063] In the liquid dispensing device 10 of this embodiment, the amount of discharge material 8 used in the first containment space 5 (remaining amount) is calculated from the amount V3 used in the first containment space 5, and the relationship between this and the pressure P3 in the first containment space 5, including the resistance force (deformation amount) of the flexible member corresponding to the containment amount, is obtained in advance. The acquisition of information on the relationship between the amount of discharge material contained in the first containment space 5 and the pressure is performed, for example, when performing a cleaning process for the purpose of removing particles adhering to the first containment space 5 and the surface of the first film 1, before filling the liquid dispensing device 10 with the discharge material 8.

[0064] Figure 5 shows the cleaning process for the first containment space 5 and the first film 1. The housing 11 is connected to the inside of the cleaning fluid tank 57, which contains the cleaning fluid, by pipes 51 and 54. A control valve 52 and a pump 53 are located along the path of pipe 51. A pressure sensor 55 and a control valve 56 are located along the path of pipe 54. To supply cleaning fluid to the first containment space 5, control valves 52 and 56 are opened, and the liquid from the cleaning fluid tank 57 is pumped by the pump 53. At this time, any gas present in the first containment space 5 is sent to the cleaning fluid tank 57 via pipe 54 and escapes through an atmospheric vent provided on the ceiling of the cleaning fluid tank 57. When supplying cleaning fluid to the first containment space 5, the amount of working fluid contained in the second containment space 6 is adjusted according to the amount of cleaning fluid contained in the first containment space 5.

[0065] The second containment space 6 is filled with working fluid, and the liquid filled into the first containment space 5 is preferably ultrapure water or similar with a metal ion concentration of 1 ppm or less. Furthermore, the liquid used for cleaning is subjected to a particle removal filter or the like to remove foreign matter of several tens of nanometers or larger immediately before being filled into the first containment space 5. In the cleaning process, the pressure in the gap between the first film 1 and the second film 2 is controlled by the negative pressure generating means 43 so that it is the same pressure (negative pressure) as when the liquid discharge device 10 is in use. The liquid level of the working fluid 35 in the sub-tank 26 is also adjusted to a desired position. The amount of liquid contained in the state where the first film 1 and the second film 2 are closer to the second containment space 6 side (initial filling state) is measured, and the cleaning liquid is discharged by the discharge head 14. In this way, the first containment space 5 and the first film 1 are cleaned.

[0066] In this cleaning process, the pressure in the first containment space 5 is measured by a pressure sensor 55. The amount of discharge material 8 used (contained amount) is obtained when the first film 1 and the second film 2 have moved from the second containment space 6 to the first containment space 5 side, near the point where the discharge material has been used up, and the relationship between the amount used and the pressure is measured multiple times. The measurement information obtained in this way is stored in a control unit 36 ​​that adjusts the liquid level of the working fluid 35 in the sub-tank 26.

[0067] The cleaning process may be performed before attaching the discharge head 14 to the containment container 13. In that case, the second opening of the housing 11 is sealed, the control valve 56 is closed, the control valve 52 is opened, and the liquid in the first containment space 5 is discharged with the pump 53 to obtain information on the relationship between the volume and pressure in the first containment space.

[0068] Implementing such a cleaning process also acts as a leveling (aging) process, suppressing the reduction and variation in resistance during the movement of the first film 1 and the second film 2, and also has the effect of increasing the amount of discharge material used in the pressure fluctuation region b1.

[0069] In this embodiment, the control unit 36 ​​obtains the pressure in the first containment space 5 from the remaining amount (usage) of the discharge material 8 measured in the first containment space 5. Based on the obtained pressure in the first containment space 5, the liquid level (reference height) of the working fluid in the sub-tank 26 is changed to widen the pressure fluctuation range in which stable discharge is possible (increase the usable amount of discharge material). This can also be described as changing the head difference (changing the head difference).

[0070] Furthermore, the liquid level of the working fluid 35 in the sub-tank 26 fluctuates by ±4 mm, up to a maximum of 8 mm, resulting in a maximum change in hydrostatic pressure of 0.08 kPa within the first containment space 5. When changing the liquid level of the working fluid 35 in the sub-tank 26 to increase the usable amount of discharge material, it is preferable to take into account the fluctuations in liquid level.

[0071] Figure 6 shows the negative pressure characteristic curve generated in the first containment space 5. In the liquid discharge device 10 of this embodiment, based on previously acquired information on the relationship between the remaining amount of discharge material 8 in the first containment space 5 and the pressure, the liquid level of the working fluid 35 in the sub-tank 26 is appropriately raised so that the pressure change gradient in the pressure fluctuation region B becomes gentler (see solid line in Figure 6). In other words, when the liquid level of the working fluid 35 in the sub-tank 26 falls outside a predetermined range, the liquid level of the working fluid 35 in the sub-tank 26 is changed based on the remaining amount of discharge material 8 in the first containment space 5 at that time.

[0072] As a result, as shown in Figure 6, the rise in liquid level increases the hydrostatic pressure, which weakens the negative pressure generated in the first containment space 5. Compared to the usable discharge area b1 when the liquid level of the working fluid 35 in the sub-tank 26 shown by the dashed line in Figure 6 is not changed, the usable discharge area can be expanded to area b2, enabling stable discharge.

[0073] In this embodiment, an example of changing the head difference by changing the liquid level in the sub-tank 26 has been described, but the invention is not limited to this, and a configuration in which the head difference is changed by changing the position (height) of the sub-tank 26 is also acceptable.

[0074] The ejection method according to this embodiment is suitable for manufacturing articles such as microdevices, semiconductor devices, and elements having fine structures. The ejection method according to this embodiment also includes a pattern formation step of forming a pattern on a substrate by bringing a mold into contact with a resin on the substrate using an imprint apparatus. Furthermore, the manufacturing method may include other well-known steps for processing the substrate on which the pattern has been formed (such as oxidation, film formation, vapor deposition, doping, planarization, etching, resist stripping, dicing, bonding, and packaging).

[0075] Furthermore, the discharge method in this embodiment is advantageous compared to conventional methods in at least one of the performance, quality, productivity, and production cost of the manufactured articles.

[0076] In this way, the difference in water head (reference height) between the discharge port surface and the liquid level of the working fluid 35 in the sub-tank 26 is changed during the discharge material usage process. This makes it possible to provide a liquid discharge device, imprint device, and discharge method that can obtain a good discharge state.

[0077] (Second embodiment) A second embodiment of the present invention will be described below with reference to the drawings. Since the basic configuration of this embodiment is the same as that of the first embodiment, only the characteristic configurations will be described below.

[0078] Figure 7(a) is a diagram of the negative pressure characteristic curve generated in the first containment space 5 in this embodiment. In the liquid discharge device 10 of this embodiment, the timing for raising the liquid level of the working fluid 35 in the sub-tank 26 is different from that of the first embodiment.

[0079] In the liquid discharge device 10 of this embodiment, the discharge of the discharge material 8 is started from a pressure P1 state at position V1 in the pressure fluctuation region b1, and when the pressure reaches P2 at the end position V2 of the pressure fluctuation region b1, the liquid level of the working fluid 35 in the sub-tank 26 is raised. In this embodiment, as shown in Figure 7(b), the level is raised by 10 mm relative to the reference height (40 mm), and the head difference ΔH is set to 30 mm. As a result, the pressure in the first containment space 5 becomes P1.

[0080] As a result, even after the amount of discharge material 8 used reaches the end position V2 of the pressure fluctuation region b1, the pressure in the first containment space 5 remains within the pressure fluctuation region where stable discharge is possible. Therefore, the usage region of the discharge material 8 can be expanded to b3, and the amount of discharge material used can be increased to V4. In this embodiment, the number of times the liquid level of the working fluid 35 in the sub-tank 26 is changed during the period in which the discharge material 8 is used (the period in which the discharge material 8 can be discharged at a suitable pressure) is only once. Therefore, the time during which discharge is stopped (downtime) due to the change in liquid level can be minimized.

[0081] Furthermore, the amount of rise in the liquid level is not limited to an amount equivalent to the pressure difference between pressure P1 and pressure P2. The liquid level may be changed to any amount equivalent to or less than the pressure difference between P1 and P2, such that the pressure in the first containment space 5 after the rise in the liquid level is less than or equal to pressure P1.

[0082] (Third embodiment) A third embodiment of the present invention will be described below with reference to the drawings. Since the basic configuration of this embodiment is the same as that of the first embodiment, only the characteristic configurations will be described below.

[0083] Figure 8(a) is a diagram of the negative pressure characteristic curve generated in the first containment space 5 in this embodiment. In the liquid discharge device 10 of this embodiment, the timing for raising the liquid level of the working fluid 35 in the sub-tank 26 differs from that of the first and second embodiments.

[0084] In the liquid discharge device 10 of this embodiment, the discharge of the discharge material 8 is started from a pressure P1 state at the starting position V1 of the pressure fluctuation region b1. When a certain amount (determined amount) of the discharge material 8 is discharged (determined amount discharged) and the device reaches position Va, the liquid level of the working fluid 35 in the sub-tank 26 is raised so that the pressure in the first containment space 5 becomes pressure P1. When the amount of discharge material used changes from Va to Vb (Va-V1=Vb-Va), the liquid level of the working fluid 35 in the sub-tank 26 is raised again so that the pressure in the first containment space 5 becomes pressure P1. The same operation is repeated until the amount of discharge material used becomes Vz. This expands the pressure fluctuation region in which stable discharge is possible to b4, and makes it possible to increase the amount of discharge material used up to V5.

[0085] As described above, in this embodiment, the liquid level of the working fluid 35 in the sub-tank 26 is changed when the amount of discharge material 8 used reaches a certain amount (a predetermined amount). As explained in Figure 4, in the pressure fluctuation region B starting from the starting position V1 of the discharge material 8, the relationship between the pressure in the first containment space 5 and the amount of discharge material 8 used changes in a nearly linear manner. Therefore, the trend of pressure change from raising the liquid level of the working fluid 35 in the sub-tank 26 to raising the liquid level again is almost constant. Furthermore, a state of small pressure fluctuation can be maintained from V1 to Vy, making it possible to reduce variations in discharge performance, such as discharge speed and discharge volume.

[0086] This embodiment includes the following configurations and methods.

[0087] (Composition 1) A discharge head having a discharge port surface formed with a discharge port for discharging material, A containment container having a first containment space that houses the discharge material and communicates with the discharge head, and a second containment space that is separated from the first containment space by a flexible member and houses the working fluid, A sub-tank that communicates with the second containment space and is capable of supplying the working fluid from the second containment space, The system comprises a main tank capable of supplying working fluid to the aforementioned sub-tank, The discharge port surface is a liquid discharge device provided at a position higher than the liquid level of the working fluid in the sub-tank, A liquid discharge device characterized by having a head difference changing means that changes the height between the discharge port surface and the liquid level of the working fluid in the sub-tank in conjunction with the discharge of the discharge material from the discharge port.

[0088] (Configuration 2) The liquid discharge device according to configuration 1, characterized in that the head difference changing means changes the height of the liquid level of the working fluid in the sub-tank by supplying working fluid from the main tank to the sub-tank.

[0089] (Composition 3) The liquid dispensing device according to configuration 1 or 2, further comprising a storage means for storing the relationship between the pressure in the first containment space and the amount of discharge material discharged from the discharge port.

[0090] (Composition 4) The system further includes an acquisition means for acquiring the amount of discharge material discharged from the discharge port, The liquid discharge device according to configuration 3, characterized in that the head difference changing means changes the height of the working fluid in the sub-tank based on the amount of discharge material acquired by the acquisition means and the relationship between the pressure in the first containment space and the amount of discharge material discharged from the discharge port, which is stored in the storage means.

[0091] (Composition 5) The liquid discharge device according to any one of configurations 1 to 4, characterized in that the head difference changing means changes the height of the working fluid in the sub-tank so that when the amount of liquid in the first containment space changes and the pressure in the first containment space reaches an amount of liquid that falls outside a predetermined range, the pressure in the first containment space falls outside a predetermined range.

[0092] (Composition 6) The liquid discharge device according to configuration 5, characterized in that, during the period in which the discharge material in the first containment space can be discharged at a suitable pressure, the head difference changing means changes the height of the liquid level of the working fluid in the sub-tank once.

[0093] (Composition 7) The liquid discharge device according to configuration 5, characterized in that when a predetermined amount of discharge material in the first containment space is discharged from the discharge port, the head difference changing means changes the height of the liquid level of the working fluid in the sub-tank.

[0094] (Composition 8) The liquid dispensing device according to any one of configurations 1 to 7, characterized in that the sub-tank is provided with a liquid level detection means for detecting the liquid level.

[0095] (Composition 9) The liquid dispensing device according to any one of configurations 1 to 8, characterized in that the flexible member has a first film that forms part of the first containment space and a second film that forms part of the second containment space.

[0096] (Composition 10) The liquid dispensing apparatus according to any one of configurations 1 to 9, characterized in that the dispensing material is an imprint material which is a thermosetting resin resist.

[0097] (Composition 11) A discharge head having a discharge port surface formed with a discharge port for discharging material, A containment container having a first containment space that houses the discharge material and communicates with the discharge head, and a second containment space that is separated from the first containment space by a flexible member and houses the working fluid, A sub-tank that communicates with the second containment space and is capable of supplying the working fluid from the second containment space, The system comprises a main tank capable of supplying working fluid to the aforementioned sub-tank, The discharge port surface is a liquid discharge device provided at a position higher than the liquid level of the working fluid in the sub-tank, A liquid dispensing device characterized by changing the liquid level of the working fluid in the sub-tank based on the amount of deformation of the deformed flexible member and the pressure in the first containment space corresponding to that amount.

[0098] (Composition 12) A discharge head having a discharge port surface formed with a discharge port for discharging material, A containment container having a first containment space that houses the discharge material and communicates with the discharge head, and a second containment space that is separated from the first containment space by a flexible member and houses the working fluid, A sub-tank that communicates with the second containment space and is capable of supplying the working fluid from the second containment space, A main tank capable of supplying working fluid to the aforementioned sub-tank, A liquid dispensing unit comprising a pattern forming means for forming a pattern corresponding to the uneven pattern of a mold, The discharge port surface is an imprint device provided at a position higher than the liquid level of the working fluid in the sub-tank, An imprinting apparatus characterized by comprising a head difference changing means that changes the height between the discharge port surface and the liquid level of the working fluid in the sub-tank in conjunction with the discharge of the discharge material from the discharge port.

[0099] (Method 1) A discharge process in which the discharge material is discharged from a discharge port formed on the discharge port surface of the discharge head, A storage step involves storing the discharge material in a first storage space that communicates with the discharge head, and storing the working fluid in a second storage space that is separated from the first storage space by a flexible member. A first supply step involves supplying working fluid to the second containment space from a sub-tank that is in communication with the second containment space, A second supply step of supplying working fluid from the main tank to the sub-tank, A discharge method comprising the step of positioning the discharge port surface at a position higher than the liquid level of the working fluid in the sub-tank, A discharge method characterized by changing the height between the discharge port surface and the liquid level of the working fluid in the sub-tank as the discharge material is discharged from the discharge port. [Explanation of Symbols]

[0100] 1. Film 1 2. Second film 5. First containment space 6. Second Containment Space 8 Discharge material 10 Liquid dispensing device 13 Containment container 14 Discharge head 15 Outlet 26 Sub-tank 34 Main Tank 35. Working fluid

Claims

1. A discharge head having a discharge port surface formed with a discharge port for discharging material, A container having a first storage space that houses the discharge material and communicates with the discharge head, and a second storage space that is separated from the first storage space by a flexible member and houses the working fluid, A sub-tank that communicates with the second containment space and is capable of supplying the working fluid from the second containment space, A main tank capable of supplying working fluid to the aforementioned sub-tank, The system includes a control unit configured to control the liquid level of the working fluid in the sub-tank, The discharge port surface is a liquid discharge device provided at a position higher than the liquid level of the working fluid in the sub-tank, The control unit controls the liquid level so that the liquid level of the working fluid in the sub-tank is maintained within a control range defined with respect to a reference liquid level. A liquid dispensing device characterized in that, when the difference between the height of the discharge port surface and the liquid level of the working fluid in the sub-tank is defined as the head difference, the control unit is configured to shift the control range by changing the reference liquid level from a first reference liquid level corresponding to a first head difference to a second reference liquid level corresponding to a second head difference when the amount of discharge material used reaches a predetermined amount.

2. The liquid dispensing device according to Claim 1, characterized in that when the amount of discharged material used reaches a predetermined amount, the control unit raises the second reference liquid level height higher than the first reference liquid level height so that the second head difference is smaller than the first head difference.

3. The liquid dispensing device according to claim 1, characterized in that the control range defined with respect to the first reference liquid level height and the control range defined with respect to the second reference liquid level height do not overlap.

4. The liquid dispensing device according to claim 1, characterized in that the control unit changes the height of the working fluid level in the sub-tank by supplying working fluid from the main tank to the sub-tank.

5. The liquid dispensing device according to claim 1, characterized in that the control unit has a storage means for storing the relationship between the pressure in the first containment space and the amount of discharge material discharged from the discharge port.

6. The control unit has an acquisition means for acquiring the amount of discharge material discharged from the discharge port, The liquid dispensing device according to claim 5, characterized in that the control unit changes the height of the working fluid in the sub-tank based on the amount of discharge material acquired by the acquisition means and the relationship between the pressure in the first containment space and the amount of discharge material discharged from the discharge port, which is stored in the storage means.

7. The liquid dispensing device according to claim 1, characterized in that the control unit changes the reference liquid level height only once during the period in which the discharge material in the first containment space can be discharged at a suitable pressure.

8. The liquid dispensing device according to claim 1, characterized in that the sub-tank is provided with a liquid level detection means for detecting the liquid level.

9. The liquid dispensing device according to claim 1, characterized in that the flexible member has a first film that forms a part of the first containment space and a second film that forms a part of the second containment space.

10. The liquid dispensing apparatus according to claim 1, characterized in that the dispensing material is an imprint material which is a thermosetting resin resist.

11. A discharge head having a discharge port surface formed with a discharge port for discharging material, A container having a first storage space that houses the discharge material and communicates with the discharge head, and a second storage space that is separated from the first storage space by a flexible member and houses the working fluid, A sub-tank that communicates with the second containment space and is capable of supplying the working fluid from the second containment space, A main tank capable of supplying working fluid to the aforementioned sub-tank, A control unit configured to control the liquid level of the working fluid in the sub-tank, A liquid dispensing unit equipped with, It has a pattern forming means for forming a pattern corresponding to the uneven pattern of the mold, The discharge port surface is an imprint device provided at a position higher than the liquid level of the working fluid in the sub-tank, The control unit controls the liquid level so that the liquid level of the working fluid in the sub-tank is maintained within a control range defined with respect to a reference liquid level. An imprinting device characterized in that, when the difference between the height of the discharge port surface and the liquid level of the working fluid in the sub-tank is defined as the head difference, the control unit is configured to change the position of the control range by changing the reference liquid level from a first reference liquid level corresponding to a first head difference to a second reference liquid level corresponding to a second head difference when the amount of discharge material used reaches a predetermined amount.

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