Crimping method and apparatus

Abstract

To provide a crimping method and a device capable of accurately controlling applied pressure.SOLUTION: The method comprises the steps of: providing a to-be-bonded object; providing a lower press die having a support for placing the to-be-bonded object; providing an upper press die capable of being driven to move up and down relative to the lower press die; providing a plunger capable of being driven to move up and down relative to the upper press die and a pressing block mechanism capable of being pressed by the plunger, wherein a load measuring unit is located between the plunger and the pressing block mechanism; and when bonding the to-be-bonded object, first lowering the upper press die until the pressing block mechanism contacts the to-be-bonded object, and then pressing the plunger against the load measuring unit to detect a pressure applied to the to-be-bonded object by the plunger.SELECTED DRAWING: Figure 9

Description

TECHNICAL FIELD

[0001] The present invention relates to a crimping method and apparatus, and in particular, to a crimping method and apparatus for crimping an integrated circuit element covered with a top lid.

BACKGROUND ART

[0002] In a general chip packaging process, it is often necessary to cover an integrated circuit (IC) element with a top lid. The integrated circuit element usually has at least one die or chip disposed on a substrate, and the top lid is generally made of a metal material and has a heat dissipation function, so some are called a heat dissipation lid or a heat dissipation sheet. In the chip packaging process, a liquid thermosetting adhesive is applied to the peripheral edge of the substrate, and a thermal interface material (TIM) such as a thermal interface film (Film TIM), a metal thermal interface material (Metal TIM), or a liquid metal thermal interface material (Liquid Metal TIM) is formed on the die or the chip, and then the top lid is placed over the integrated circuit, whereby the central portion of the top surface of the top lid is brought into contact with the thermal interface material, and the peripheral edge portion of the bottom surface of the top lid is brought into contact with the liquid thermosetting adhesive. After the top lid covers the integrated circuit, the top lid and the integrated circuit element are further pressurized and bonded via the upper pressing die and the lower pressing die of the crimping apparatus. The lower pressing die is provided with a horizontal support surface capable of supporting the substrate, the upper pressing die is provided with a horizontal contact surface capable of contacting the top lid, and the upper pressing die can be driven to descend to contact the top lid to perform the crimping operation.

[0003] As science and technology advance rapidly, the structure of integrated circuit elements is becoming increasingly complex. This necessitates stacking and arranging various electronic elements of different shapes and sizes, such as dies, chips, optical communication elements, and passive elements, on a substrate in different combinations. Consequently, the shape of the top cover also has different heights and steps to accommodate the various electronic elements. In Patent Document 1, pressure can be applied only to the highest region of the top cover by contacting it with a single horizontal contact surface. However, pressure cannot be applied to other lower regions of the top cover simultaneously. Furthermore, because the top cover itself is flexible, when the highest region of the top cover receives pressure, different height and step areas receive different pressures, potentially affecting the packaged object on the underside of the top cover in different ways. On the other hand, since different height and step areas receive different pressures, there is no solution in the conventional technology for determining the magnitude of the applied load, indicating that there is still room for improvement. [Prior art documents] [Patent Documents]

[0004] [Patent Document 1] Taiwan Patent No. I804790. [Overview of the project]

[0005] Therefore, an object of the present invention is to provide a crimping method that can improve upon at least one drawback of the prior art.

[0006] Another object of the present invention is to provide a crimping device that can improve upon at least one drawback of the prior art.

[0007] Another object of the present invention is to provide a crimping device that can be used to carry out the crimping method described above.

[0008] A method for crimping according to the object of the present invention includes providing an object to be crimped, providing a lower pressure type on which a support base for placing the object to be crimped is provided, providing an upper pressure type that can be moved up and down relative to the lower pressure type, providing the upper pressure type with a plunger that can be moved up and down by a drive and a pressure block mechanism that can be pressed by the plunger, a load measuring unit positioned between the plunger and the pressure block mechanism, and detecting the pressure applied to the object to be crimped by the plunger by the drive when the plunger presses against the load measuring unit.

[0009] A crimping device according to another object of the present invention comprises a lower pressure type provided with a support base for placing an object to be crimped, an upper pressure type provided with a plunger that can be displaced vertically by drive, a drive mechanism provided with the plunger, and a pressure block mechanism that can be pressed by the plunger, with a load measuring unit positioned between the plunger and the pressure block mechanism, and a lifting mechanism that drives the upper pressure type to displace vertically relative to the lower pressure type, thereby causing the pressure block mechanism to contact or move away from the object to be crimped, wherein the plunger can press the load measuring unit by drive.

[0010] A crimping device according to yet another object of the present invention can perform the crimping method described above. [Effects of the Invention]

[0011] In the crimping method and apparatus according to an embodiment of the present invention, since the load measuring unit is located between the plunger and the pressure block mechanism, the driving force received by the plunger is measured by the load measuring unit before it pushes down the pressure block mechanism, thereby enabling precise control of the magnitude of the pressurizing load. [Brief explanation of the drawing]

[0012] [Figure 1] This is a perspective view illustrating the object to be compressed in an embodiment of the present invention. [Figure 2]This is an exploded perspective view illustrating that the object to be pressed is an integrated circuit element covered by a top cover. [Figure 3] This is a cross-sectional view illustrating section AA in Figure 1. [Figure 4] This is a cross-sectional view illustrating the BB cross section in Figure 1. [Figure 5] This is a perspective view illustrating a crimping device in an embodiment of the present invention. [Figure 6] This is a schematic diagram illustrating the correspondence between the upper pressure type of the crimping device and the object to be crimped. [Figure 7] This is an exploded perspective view illustrating the first, second, and third pressure-type pressure-blocking modules described above. [Figure 8] This is a partial cross-sectional view corresponding to the third pressure block module, illustrating the upper pressure type of the crimping device. [Figure 9] This is an exploded perspective view illustrating the structure of the upper surface of each pressure block assembly in the aforementioned upward pressure type. [Figure 10] This is a side view illustrating how the object to be crimped is positioned in the crimping device. [Figure 11] This is a side view illustrating the upward pressure mechanism being driven to descend. [Figure 12] This is a partial cross-sectional view along the AA cross-sectional line in Figure 1, illustrating how the upper pressure type performs the crimping operation on the object to be crimped. [Modes for carrying out the invention]

[0013] As shown in Figures 1, 2, 3, and 4, the crimping method and apparatus of the embodiment of the present invention are applied to crimping an object W to be crimped as shown in the drawings, wherein the object W to be crimped is covered by an upper cover W2 on the upper side of an integrated circuit element W1. The aforementioned integrated circuit element W1 has a first electronic element W11 and a plurality of second electronic elements W12 provided on the upper side of the substrate W13. On the upper surface W21 of the top cover W2, a plurality of crimp segments of different heights are provided, including a first crimp segment W211, a second crimp segment W212, and a third crimp segment W213, respectively, to match the heights of the first electronic element W11, the second electronic element W12, and the substrate W13. On the lower surface W22 of the upper cover W2 corresponding to the integrated circuit element W1, a first contact surface W221, a second contact surface W222, and a third contact surface W223 are provided, each having a different height to match the heights of the first electronic element W11, the second electronic element W12, and the substrate W13. In an embodiment of the present invention, the first crimping segment W211, the second crimping segment W212, and the third crimping segment W213 are classified by height, so that areas of the same height on the upper surface W21 are classified as the same type of crimping segment. As seen in Figure 2, the first crimping segment W211 is a single substantially rectangular area located in the center of the upper surface W21, the second crimping segment W212 is four substantially L-shaped areas located at the four corners of the upper surface W21, and the third crimping segment W213 is four substantially rectangular areas located in the center of the outer peripheral edge side of the first crimping segment W211 on the upper surface W21. Since the first contact surface W221, the second contact surface W222, and the third contact surface W223 are also classified by height, areas of the same height on the lower surface W22 are classified as the same type of contact surface, the first contact surface W221 is one area located in the center of the lower surface W22, the second contact surface W222 is four areas located at the four corners of the lower surface W22, and the third contact surface W223 is four areas located in the center of the periphery of the lower surface W22. In other words, the first contact surface W221, the second contact surface W222, and the third contact surface W223 are provided correspondingly below the first crimping segment W211, the second crimping segment W212, and the third crimping segment W213, respectively. The first electronic element W11 may be, for example, an electronic element such as a chip or a die that is mainly responsible for data operation, and the second electronic element W12 may be, for example, an electronic element such as a silicon photonics device or other optical communication element that is mainly responsible for data transmission. The first electronic element W11 and the second electronic element W12 can be fixed to the substrate W13 with an adhesive. A portion of the first electronic element W11 corresponding to the first abutting surface W221 may be coated with a thermal interface material (not shown). A portion of the second electronic element W12 corresponding to the second abutting surface W222 may be coated with a thermal interface material (not shown). A liquid adhesive (not shown) can be applied to the peripheral edge of the substrate W13, whereby the upper cover W2 is adhered and fixed at the third abutting surface W223. In this case, the first abutting surface W221 of the upper cover W2 is adhered to the first electronic element W11, and the second abutting surface W222 of the upper cover W2 is adhered to the second electronic element W12.

[0014] As shown in Figures 5 and 6, the crimping method according to the embodiment of the present invention will be described by taking the process of the crimping apparatus as shown in the drawings as an example. The crimping apparatus comprises a lower crimping die A provided with a support base A1 for placing the object W to be crimped, and an upper crimping die B provided with a driving mechanism C, and a pressurizing block mechanism D located below the driving mechanism C and drivable by the driving mechanism C, wherein the pressurizing block mechanism D is provided with a plurality of independently separated pressurizing block modules including a first pressurizing block module D1 corresponding to the first crimping segment W211, a second pressurizing block module D2 corresponding to the second crimping segment W212, and a third pressurizing block module D3 corresponding to the third crimping segment W213, and an elevating mechanism E that drives the upper crimping die B to displace up and down relative to the lower crimping die A, so that the pressurizing block mechanism D comes into contact with or separates from the upper cover W2.

[0015] ​As shown in Figures 6 to 8, in the embodiment of the present invention, the first pressure block module D1, the second pressure block module D2, and the third pressure block module D3 are classified by the corresponding crimping segments. Therefore, as viewed from Figure 7, the first pressure block module D1 is a substantially rectangular first pressure block assembly D11 located at the central portion of the pressure block mechanism D. The second pressure block module D2 is composed of four L-shaped, corner-block-shaped second pressure block assemblies D21 located at the four corners of the pressure block mechanism D. The third pressure block module D3 is composed of four substantially rectangular third pressure block assemblies D31 located at the central portion on the outer peripheral side of the first pressure block assembly D11 in the pressure block mechanism D. The first pressure block module D1, the second pressure block module D2, and the third pressure block module D3 are members that are spaced apart from each other, separated from one another, and independent of each other. Each pressure block assembly in each pressure block module is also independently separated from one another. The first pressure block assembly D11 has a three-layer structure in the up-down direction, wherein the uppermost layer is a fixing member D111 made of a metal material such as an aluminum alloy, the middle layer is a fine adjustment member D112 made of a metal material such as iron, and the lowermost layer is a contact member D113 which is made of a non-metallic material such as engineering plastic, is fixed under the fine adjustment member D112, and has a lower surface that abuts against the object to be crimped. The second pressure block assembly D21 has a three-layer structure in the up-down direction, wherein the uppermost layer is a fixing member D211 made of a metal material such as an aluminum alloy, the middle layer is a fine adjustment member D212 made of a metal material such as iron, and the lowermost layer is a contact member D213 which is made of a non-metallic material such as engineering plastic, is fixed under the fine adjustment member D212, and has a lower surface that abuts against the object to be crimped. The third pressure block assembly D31 has a two-layer structure, with the upper layer being a fixing member D311 made of a metal material such as an aluminum alloy, and the lower layer being a contact member D312 made of a non-metallic material such as an engineering plastic, fixed below the fixing member D311, and having an inverted "convex" shape on its lower surface that contacts the object to be pressed. Furthermore, the fine adjustment member D112 in the middle layer of the first pressure block assembly D11 is screwed under the fixing member D111 by a plurality of screw fixing members D4 (see Figure 8), and the horizontality of its lower surface is adjusted by screwing in the screw fixing members D4. The fine adjustment member D212 in the middle layer of the second pressure block assembly D21 is screwed under the fixing member D211 by a plurality of screw fixing members D5 (not shown, but can be inferred in the same way as screw fixing member D4), and the horizontality of its lower surface is adjusted by screwing in the screw fixing members D5.

[0016] As shown in Figure 8, the drive mechanism C is provided with a chamber C111 capable of containing fluid S within the main body C1, a piston C2 that changes the pressure of the fluid S in the chamber C111 by displacement, and a plurality of plungers C3 that are driven by the pressure of the fluid S in the chamber C111 and are capable of vertical displacement. The fluid S is, for example, a liquid or hydraulic oil. The main body C1 is provided with a base C11 and a cover C12, and the chamber C111 is a space formed by being surrounded by the base C11 and the cover C12. The main body C1 has a piston passage C121 within a bearing base C122 that rises at the center of the cover C12, in which the piston C2 can be displaced. The piston passage C121 is arranged in the vertical axis direction, and the piston C2 is not connected to any member vertically, and can be freely displaced vertically within the piston passage C121 when subjected to an external force. The piston passage C121 communicates with the chamber C111, and the displacement of the piston C2 can change the pressure of the fluid S in the chamber C111. The height of the piston C2 is lower than the length of the piston passage C121, and the piston C2 is provided with an upper end C21 and a lower end C22. The upper end C21 is provided with a groove-shaped pressing portion C211, and the lower end of the drive rod C41 is pressed into the pressing portion C211, causing it to contact and move in conjunction with the piston C2. The upper end of the piston passage C121 has an open port C123, and the lower end is blocked by a stopper member C125 having a through hole C124, and the fluid S in the chamber C111 communicates with the piston passage C121 through the through hole C124. The main body C1 is provided with a plurality of vertically erected plunger passages C112 at the bottom of the chamber C111 of the base C11, which are spaced apart from each other and parallel to each other, for displacing a plurality of plungers C3. The upper part of each plunger passage C112 is blocked by a stopper member C114 having a through hole C113, and the fluid S in the chamber C111 communicates with the plunger passage C112 through the through hole C113. The stopper member C114 is provided with a plurality of through holes C113, each of which corresponds to one of the plunger passages C112. The vertical displacement of the plungers C3 can be linked by the pressure change of the fluid S in the chamber C111. Each plunger C3 is provided with a force receiving part C31 that can receive the pressure of the fluid S, and a pressurizing rod C32 that extends integrally downward from the force receiving part C31 and protrudes from the base C11. The pressure block mechanism D can be directly pressed by the pressure rod C32 by the plunger C3. The force receiving portion C31 has a large cross-sectional diameter and is located above, while the pressure rod C32 has a small rod diameter and is located below the force receiving portion C31. The base C11 is provided with a contact base C115 that protrudes outward. The contact base C115 has a circular outer diameter in the upper base C116 portion which forms the chamber C111 inside, and a rectangular outer diameter in the lower base C117 portion which forms a plurality of plunger passages C112 inside, with the outer diameters of the corresponding parallel sides narrowing. The main body C1 is placed together with the lower base C117 in the hollow section F341 of the lower slide base F34 and is fixed and placed on the upper edge of the lower slide base F34 on the circumferential side of the hollow section F341 by the contact base C115. The main body C1 comprises a plurality of bushes C13, each corresponding to one of the plungers C3, and a plurality of bush fixing members C14 that fix the bushes C13 below the base C11. The lower end opening of the plunger passage C112 is sealed by the bush fixing member C14. The bush fixing member C14 is provided with a shaft hole C141, and the bushes C13 are provided in the shaft hole C141. The pressure rod C32 passes through the bushes C13 and is guided by the bushes C13. The upper end edge of the bushes C13 limits the bottom dead center of the descent of the plunger C3.

[0017] As shown in Figures 7, 8, and 9, each bush fixing member C14 is substantially rectangular (with slight arcs on both sides) and is arranged at a 45-degree angle to the rectangular lower base C117. The multiple pressure rods C32 and bush fixing members C14 protruding outward from below the bush fixing member C14 are arranged in three groups with the same center, including a first group C32A, a second group C32B, and a third group C32C located in the center of the rectangular lower surface of C117 on the lower base C117, which are spaced apart in a rectangular frame-like "revolving" shape. In the first group C32A, which has a small rectangular frame shape, the pressure rod C32 is used to connect and fix the first pressure block assembly D11; in the second group C32B, which has a large rectangular frame shape, the pressure rod C32 is used to connect and fix the second pressure block assembly D21 and the third pressure block assembly D31; and the third group C32C has only one independent pressure rod C32. Each pressure rod C32 is a round bar, and at the lower end of each, two positioning portions C321 are provided, which are parallel to each other by cutting off both sides of the cross-section of the round bar. The first pressure block assembly D11, the second pressure block assembly D21, and the third pressure block assembly D31 of the pressure block mechanism D are provided with positioning grooves D114, D214, and D313, which are long grooves recessed in the direction perpendicular to each other, in the fixing member D111, D211, and D311, respectively. This allows the positioning portion C321 at the lower end of each pressure rod C32 to be fitted. In addition, connecting members C322 such as screws screw the fixing members D111, D211, and D311 of the pressure block mechanism D from bottom to top onto the respective positioning portions C321 of each pressure rod C32, and prevent slippage of the first pressure block assembly D11, the second pressure block assembly D21, or the third pressure block assembly D31.A load measuring unit D115 is provided between one plunger C3 and a corresponding pressure block assembly within one pressure block mechanism D, and the pressure block mechanism D can be indirectly pressed by the plunger C3 via the pressure rod C32 through the load measuring unit D115. In its installation configuration, for example, a mounting section D116 for housing the load measuring unit D115 is recessed in the center of the fixing member D111 of the first pressure block assembly D11. The pressure rod C32 of the plunger C3 of the third group C32C, which is independently installed in the central part of the "revolving" shape, abuts the load measuring unit D115 downward, thereby the fluid S changes the volume of the chamber C111 by the piston C2, thereby applying force to the plunger C3, and the plunger C3 is driven by the force of the fluid S to press against the load measuring unit D115. The positioning portion C321 at the lower end of the pressure rod C32, which corresponds to the load measuring unit D115, may omit the screw hole structure corresponding to the screw fixing member and the structure in which both sides of the cross-section of the round bar are shaved down to make them parallel to each other, and instead have only the bottom of the pressure rod C32 contact the load measuring unit D115.

[0018] In this embodiment of the present invention, the fluid S is hydraulic oil. Since the horizontal cross-section of each plunger passage C112 is circular and their horizontal cross-sectional areas are all the same, and the horizontal cross-section of the force-receiving portion C31 of each plunger C3 is circular and their horizontal cross-sectional areas are all the same, the pressure of the fluid S received by each plunger C3 is also the same. In other viable embodiments, the horizontal cross-sectional areas of the force-receiving portion C31 of multiple plungers C3 may be changed as needed, thereby allowing different plungers C3 to withstand different pressures. In this embodiment, since the horizontal cross-sectional areas of the force-receiving portion C31 of each plunger C3 are all the same, the load measuring unit D115 can be installed on the plunger C3 corresponding to the third group C32C, which is independently installed in the central part of the "reverse" shape, to measure the force acting on each force-receiving portion C31 with the same horizontal cross-sectional area and the force acting on the pressurizing block mechanism D by the pressurizing rod C32. In another embodiment, when changing the horizontal cross-sectional area of ​​the force-receiving portion C31 of multiple plungers C3, the number of load measuring units D115 can be increased and installed at corresponding locations on the plungers C3 of the force-receiving portion C31 with different horizontal cross-sectional areas.

[0019] As shown in Figures 6-9, the pressure block mechanism D is provided at one end of the plunger C3, and the first pressure block module D1, the second pressure block module D2, and the third pressure block module D3 are each connected to the corresponding pressure rod C32 of the plunger C3. In addition, the positioning portions C321 of the lower ends of multiple pressure rods C32 are fitted into each of the positioning grooves D114, D214, and D313, respectively, and it is preferable that at least two of the positioning portions C321 of the lower ends of the pressure rods C32 are fitted. Since the horizontal cross-sections of each plunger passage C112 and the force receiving portion C31 of the plunger C3 are all circular, the plunger C3 may be pivotally supported in the plunger passage C112 by the force receiving portion C31. To avoid angular offset of the first pressure block module D1, the second pressure block module D2, and the third pressure block module D3 due to the pivoting of the plunger C3, each of the first pressure block assemblies D11, D21, and D31 is connected to the positioning portion C321 of the pressure rod C32 of at least two plungers C3. In this way, not only is the first pressure block assembly D11, D21, and D31 provided with favorable support, but the pivoting of the plunger C3 can also be restricted.

[0020] As shown in Figures 8 and 10, the crimping device is provided with a frame F on which a lower base F1 and an upper base F2 are provided, which are parallel to each other and maintain a constant distance apart. A plurality of support rods F4 are provided between the lower base F1 and the upper base F2 to maintain the distance between the lower base F1 and the upper base F2. The frame F is provided with a lifting frame F3 pivotally supported by the support rods F4, and the lifting frame F3 is provided with a plurality of guide rods F5, one end of which is fixed to the lifting frame F3 and the other end of which is pivotally supported by the upper base F2. The lifting mechanism E is provided with a lifting drive device E1, such as an air cylinder, on the upper base F2, and the lifting drive device E1 can drive the lifting frame F3 to move up and down. The lifting frame F3 is provided with a mounting base F31 fixed to one end of the guide rod F5, and vertically erected side bases F32 are provided on both sides below the mounting base F31. Between the two side bases F32, an upper sliding base F33 is provided, positioned horizontally above, and a lower sliding base F34 is provided, positioned horizontally below, with a gap between them. The upper sliding base F33 and the lower sliding base F34 can slide horizontally in and out between the two side bases F32. The upper pressure type B is provided on the lifting frame F3 and is linked to it. The upper pressure type B is provided on the lower sliding base F34, and the lower pressure type A is provided on the lower base F1 and is located below the upper pressure type B. The lower pressure type A is provided on the support base A1 with a heating element A2 and a temperature sensor A3 that can be detected. The drive mechanism C is provided with a piston drive device C4, such as an air cylinder, located outside the main body C1. One end of the drive device C41 is fixed below the upper slide base F33, and the other end extends downward, forming a drive rod C41. The drive rod C41 and the piston C2 are separated and maintain a distance from each other, but when driven and extended downward, it presses against and displaces the piston C2, thereby changing the pressure of the fluid S in the chamber C111. The upper end of the bearing base C122 at the upper end of the piston passage C121 and the lower end of the drive rod C41 are separated while maintaining a distance from each other under normal conditions.

[0021] As shown in Figures 6, 7, 11, and 12, in an embodiment of the present invention, when the object to be crimped W is crimped, the object to be crimped W is placed on the support base A1 of the lower pressure type A. Then, the lifting drive device E1 of the lifting mechanism E drives the lifting frame F3 to move the upper pressure type B in conjunction with the lower pressure type A, displacing it downwards toward the lower pressure type A. First, the upper pressure type B is lowered until the pressure block mechanism D contacts the upper surface W21 of the upper cover W2 of the object to be crimped W. Since the object to be compressed W is provided with multiple compression segments of different heights, the upward-pressure type B descends so that the lowest contact member D113 of the first compression block assembly D11 of the first compression block module D1 comes into contact with the first compression segment W211 of the top cover W2, the lowest contact members D213 of the four second compression block assemblies D21 of the second compression block module D2 come into contact with the second compression segment W212 of the top cover W2, and the four third compression block assemblies D31 of the third compression block module D3 come into contact with the third compression segment W213 of the top cover W2. In this case, the first compression block module D1, the second compression block module D2, and the third compression block module D3 are located at different heights, and the compression block mechanism D applies upward pressure to the plunger C3, causing the corresponding plunger C3 to move upward. If the volume of fluid S does not change, fluid S pushes the piston C2 upward. The pressure block mechanism D lowers the upper pressure type B until it contacts the upper lid W2 of the object to be compressed W, and then the drive rod C41 of the piston drive device C4 of the drive mechanism C pushes down the piston C2 to move downward (as shown in Figure 11) and acts on the fluid S in the chamber C111. If the volume of the fluid S does not change, the fluid S indirectly applies a downward pressure in the opposite direction to the plunger C3, and the plunger C3 applies pressure to the object to be compressed W, and each plunger C3 is pushed down and moves downward simultaneously by the pressure of the fluid S, and the drive mechanism C drives the first pressure block module D1, the second pressure block module D2, and the third pressure block module D3 of the pressure block mechanism D to apply the same pressure to the first compression segment W211, the second compression segment W212, and the third compression segment W213 of the upper lid W2, respectively. This pressure is sensed when the pressure rod C32 of the third group C32C, which is independently installed in the central part of the "rotary" shape, contacts the load measuring unit D115 in a downward direction. Referring also to Figure 2, in this case, the first contact surface W221 corresponding to the bottom of the first crimping segment W211 is attached to the first electronic element W11, causing the first electronic element W11 to contact the substrate W13, the second contact surface W222 corresponding to the bottom of the second crimping segment W212 is attached to the second electronic element W12, causing the second electronic element W12 to contact the substrate W13, and the third contact surface W223 corresponding to the bottom of the third crimping segment W213 contacts the substrate W13, thereby pressurizing the top cover W2 and bonding it to the integrated circuit element W1.

[0022] In the crimping method and apparatus according to the embodiment of the present invention, since the load measuring unit D115 is located between the plunger C3 and the pressure blocking mechanism D, the driving force received by the plunger C3 is measured by the load measuring unit D115 before it presses down on the pressure blocking mechanism D, thereby enabling precise control of the magnitude of the pressurizing load.

[0023] The above description is merely an embodiment of the present invention and does not limit the scope of implementation. Simple equivalent changes and modifications made based on the claims and specification of the present invention all remain within the scope of the patent of the present invention. [Explanation of Symbols]

[0024] A: Lower pressure type A1: Support stand A2: Heater A3: Temperature sensor B: Top pressure type C: Drive mechanism C1: Main unit C11: Base C111: Chamber C112: Plunger passage C113:Through hole C114: Stopper component C115: Contact stand C116: Upper base C117: Lower base C12: Cover C121: Piston passage C122: Bearing base C123: Port C124:Through hole C125: Stopper component C13: Bush C14: Bush fixing member C141: Shaft hole C2: Piston C21: Upper end C211: Pushing part C22: Bottom end C3: Plunger C31: Force receiving part C32: Pressure Rod C321: Positioning section C32A: Group 1 C32B: Group 2 C32C: Group 3 C4: Piston drive mechanism C41: Drive Rod D: Pressure blocking mechanism D1: First pressurization block module D11: First pressure block assembly D111: Fixing member D112: Fine adjustment component D113: Contact member D114: Positioning groove D115: Load measurement unit D116: Support section D2: Second pressurized block module D21: Second Pressurized Block Assembly D211: Fixing member D212: Fine adjustment component D213: Contact member D214: Positioning groove D3: Third pressurized block module D31: Third pressure block assembly D311: Fixing member D312: Contact member D313: Positioning groove D4: Screw fixing component D5: Screw fixing component (not shown) E: Lifting mechanism E1: Lifting drive device F: Stand F1: Lower stand F2: Upper stand F3: Lifting frame F31: Mounting platform F32: Side stand F33: Upper sliding base F34: Lower sliding platform F341: Hollow section F4: Support rod F5: Guide Rod S:Fluid W: Compressed material W1: Integrated circuit element W11: First electron links W12: Second electron elements W13: Circuit board W2: Top lid W21:Top surface W211: First crimp segment W212: Second crimp segment W213: Third crimp segment W22:Bottom side W221: 1st contact surface W222: Second contact surface W223: 3rd contact surface

Claims

1. To provide an object to be compressed, To provide a downward pressure type that is provided with a support base for placing the object to be compressed, To provide an upward pressure type that can be displaced vertically relative to the downward pressure type by driving, The upward-pressure type is provided with a plunger that can be displaced vertically by drive, and a pressure block mechanism that can be pressed by the plunger, and a load measuring unit is located between the plunger and the pressure block mechanism, and there are multiple plungers, and the pressure block mechanism is provided with multiple pressure block modules that are each independently separated, and the load measuring unit is provided between one of the plungers and the corresponding pressure block module in the pressure block mechanism, The plunger presses against the load measuring unit, thereby detecting the pressure applied to the object being pressed by the plunger through its drive. A crimping method including a crimping method.

2. The crimping method according to claim 1, wherein when the object to be crimped is to be crimped, the upper pressure type is first lowered until the pressure block mechanism contacts the object to be crimped, and then the plunger is driven to press against the load measuring unit.

3. The crimping method according to claim 1, wherein the plunger is driven by the force of a fluid and pressed against the load measuring unit.

4. The crimping method according to claim 3, wherein the fluid is applied to the plunger by changing the pressure of the fluid in the chamber due to the displacement of the piston.

5. The piston drive device is provided with a drive rod having one end extending downward and separating from the piston to maintain a distance, and the crimping method according to claim 4, wherein when the drive rod is driven and extends downward, it presses against and displaces the piston, thereby changing the pressure of the fluid in the chamber.

6. The crimping method according to claim 1, wherein the object to be crimped is provided with a plurality of crimping segments of different heights.

7. A downward pressure type is provided, which has a support base for placing the object to be compressed, An upward-pressure type is provided, comprising a plunger that can be displaced vertically by drive, a drive mechanism on which the plunger is provided, and a pressure block mechanism that can be pressed by the plunger, wherein a load measuring unit is located between the plunger and the pressure block mechanism, and there are multiple plungers, and the pressure block mechanism is provided with multiple pressure block modules that are each independently separated, and the load measuring unit is provided between one of the plungers and the corresponding pressure block module in the pressure block mechanism, A lifting mechanism that drives the upper pressure type to displace vertically relative to the lower pressure type, thereby causing the pressure block mechanism to come into contact with or separate from the object to be pressed, Equipped with, The plunger is a crimping device that can press the load measuring unit by driving it.

8. The crimping device according to claim 7, wherein the pressure block module includes a first pressure block module, a second pressure block module, and a third pressure block module, the first pressure block module being a substantially rectangular first pressure block assembly located in the center of the pressure block mechanism, the second pressure block module being composed of four substantially "L" shaped rectangular second pressure block assemblies located at the four corners of the pressure block mechanism, and the third pressure block module being composed of four substantially rectangular third pressure block assemblies located in the center of the peripheral outer edge of the first pressure block assembly, with each pressure block assembly being independently separated.

9. The crimping device according to claim 8, wherein the first pressure block assembly has a three-layer structure, the uppermost layer being a fixing member made of metal, the middle layer being made of metal and screwed in below the fixing member by a screw fixing member, and the screw fixing member is screwed in to adjust the horizontality of the surface below it, and the lowermost layer being made of a non-metallic material and fixed below the fine adjustment member, with the lower surface in contact with the object to be crimped.

10. The crimping device according to claim 9, wherein the fixing member of the first pressure block assembly has a mounting section for housing the load measuring unit.

11. The crimping device according to claim 8, wherein the second pressure block assembly has a three-layer structure, the uppermost layer being a fixing member made of metal, the middle layer being made of metal and screwed in below the fixing member by a screw fixing member, and a fine adjustment member that adjusts the horizontality of the surface below by screwing in the screw fixing member, and the lowermost layer being made of a non-metallic material and fixed below the fine adjustment member, with its lower surface in contact with the object to be crimped.

12. The crimping device according to claim 8, wherein the third pressure block assembly has a two-layer structure, the upper layer being a fixing member made of a metal material, and the lower layer being made of a non-metallic material, fixed below the fixing member, and having a contact member on its lower surface that resists the object to be crimped.

13. The crimping device according to claim 8, wherein the crimping device is provided with a frame on which a lifting frame is mounted, the lifting mechanism is provided with a lifting drive device capable of driving the vertical displacement of the lifting frame, and the upper pressure type is provided on the lifting frame and is interlocked with the lifting frame.

14. The crimping device according to claim 13, wherein the lifting frame comprises an upper slide base installed above and below at a distance from each other, the upper slide base and the lower slide base can slide horizontally between the two side bases, and the upper pressure type is provided on the lower slide base.

15. The crimping device according to claim 7, wherein the vertical displacement of the plunger is linked to a change in the pressure of the fluid in the chamber of the drive mechanism.

16. The crimping device according to claim 15, wherein the pressure of the fluid in the chamber is changed by the displacement of the piston of the drive mechanism.

17. The crimping device according to claim 16, wherein the drive mechanism is provided with a piston drive device that includes a drive rod capable of displacing the piston when it is driven and extends downward.

18. The crimping device according to claim 7, wherein the drive mechanism comprises a chamber capable of containing fluid within the main body, the main body comprises a plurality of bushes corresponding to each of the plungers, and a plurality of bush fixing members for fixing the bushes below a base, and each of the bush fixing members is arranged in three groups having the same center, including a first group, a second group, and a third group located in the center of the rectangular frame-shaped "revolving" shape, and the pressure rod of the plunger of the third group, which is independently installed in the center of the "revolving" shape, abuts the load measuring unit downward.

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