Stepping motor control system and stepping motor

Abstract

A stepping motor control system and a stepping motor are provided. The stepping motor control system includes a control circuit (1) for outputting a command signal, at least three isolation circuits (2) for receiving the command signal and performing photoelectric isolation transmission, and at least three driving circuits (3) including a power switch transistor (31) for connecting to the driving port of the stepping motor, receiving the command signal output by the photoelectric isolation circuit (2), driving the power switch transistor (31) to turn on and off according to the received command signal, and controlling the change in the level value of the driving port of the stepping motor by the power switch transistor (31), thereby improving interference resistance and stability in the control and driving process of the stepping motor.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of motor control, in particular to a control system for a stepping motor and a stepping motor.

BACKGROUND ART

[0002] A stepping motor driving device is a driving device that converts an electric pulse signal into an angular displacement, and upon receiving a command signal output by a control device, drives the stepping motor to rotate by a certain angle in a preset direction.

[0003] In the related art, after receiving the command signal output by the control device, the stepping motor driving device needs to convert the received command signal into a driving signal, and further drive the stepping motor to perform a corresponding operation, where the command signal is usually a direction signal, an enable signal and a pulse signal.

[0004] However, in actual use, different users may input different types of command signals or voltages through the control device. When various types of command signals are simultaneously input to the stepping motor driving device, mutual interference is prone to occur, which disturbs the driving signal output by the stepping motor driving device, causing the motor to perform erroneous operations.

SUMMARY OF THE INVENTION

PROBLEMS TO BE SOLVED BY THE INVENTION

[0005] An objective of the present application is to provide a control system for a stepping motor and a stepping motor, so as to improve the anti-interference performance and stability in the process of controlling and driving the stepping motor.

MEANS FOR SOLVING THE PROBLEMS

[0006] The embodiments of the present application provide a control system for a stepping motor, and the control system for the stepping motor comprises A control circuit used to output command signals, having at least a first port, a second port, and a third port, At least three sets of isolation circuits for receiving command signals and performing photoelectric isolation transmission, It includes a power switch transistor for connecting to the drive port of the stepping motor, and includes at least three sets of drive circuits for receiving command signals output by the photoelectric isolation circuit, and driving the power switch transistor to turn on and off according to the received command signals, thereby controlling the change in the level value of the drive port of the stepping motor by the power switch transistor, The first port, the first set of isolation circuits, and the first set of drive circuits are connected in sequence; the second port, the second set of isolation circuits, and the second set of drive circuits are connected in sequence; and the third port, the third set of isolation circuits, and the third set of drive circuits are connected in sequence.

[0007] Furthermore, the control circuit has a common port for outputting command signals, The isolation circuit includes a first optical coupling device and a first current limiting resistor. The anode of the light-emitting element of the first optical coupling device is connected to the common port via the first current-limiting resistor, the cathode of the light-emitting element of the first optical coupling device is connected to the first port, the second port, or the third port, the collector of the photodetector of the first optical coupling device is connected to the drive circuit, the emitter of the photodetector of the first optical coupling device is grounded, and the first optical coupling device is driven by the first port, the second port, or the third port to receive command signals.

[0008] Furthermore, the control circuit has a common port that is grounded, and the first port, the second port and the third port are used to output command signals. The isolation circuit includes a first optical coupling device and a first current limiting resistor. The anode of the light-emitting element of the first optical coupling device is connected to the first port, the second port, or the third port via the first current-limiting resistor; the cathode of the light-emitting element of the first optical coupling device is connected to the common port; the collector of the photodetector of the first optical coupling device is connected to the drive circuit; the emitter of the photodetector of the first optical coupling device is grounded; and the first optical coupling device is driven by the first port, the second port, or the third port to receive command signals.

[0009] Furthermore, the level value of the command signal received by the first optical coupling device is greater than 3.5V or less than 0.5V.

[0010] Furthermore, the drive circuit includes a power switch transistor, a second current limiting resistor, and a bias resistor. The gate of the power switch transistor is connected to the isolation circuit via the second current limiting resistor, the drain of the power switch transistor is used to connect to the stepping motor, the source of the power switch transistor is grounded, one end of the bias resistor is connected to the gate of the power switch transistor, and the other end of the bias resistor is connected to the source of the power switch transistor.

[0011] Furthermore, the power switch transistor is a BS123 series MOS transistor.

[0012] Furthermore, the control system for the stepping motor further includes an alarm circuit. The alarm circuit includes a second optical coupling device, a third current limiting resistor, and an alarm. The anode of the light-emitting element of the second photocoupler is connected to the control circuit, the cathode of the light-emitting element of the second photocoupler is grounded, and the collector and emitter of the photodetector of the second photocoupler are connected to the alarm.

[0013] Furthermore, the control circuit is a single-chip microcontroller.

[0014] The present embodiment further provides a stepping motor including the above-mentioned stepping motor control system.

[0015] Furthermore, a matching circuit is connected to the voltage input terminal of the stepping motor. The matching circuit includes a first adjustable capacitor, a second adjustable capacitor, and a first inductance. One end of the first inductance is connected to one end of the first adjustable capacitor and to a high-frequency power supply for external connection, the other end of the first inductance is grounded, and the other end of the first inductance is connected to the stepping motor via the second adjustable capacitor. [Effects of the Invention]

[0016] The beneficial effects of this invention are as follows: By using a separation circuit to receive command signals output by a control circuit and performing photoelectric separation transmission, and outputting the command signals output by photoelectric separation transmission to a drive circuit, the drive circuit drives a power switch transistor to turn on and off according to the received command signal, the power switch transistor controls the level value change of the drive port of the stepping motor, the signal input terminal and signal output terminal of the system are separated during the signal transmission process, and by driving with a power type switch device, the response speed and electromagnetic interference resistance of the system are improved, and the interference resistance and stability of the stepping motor control and drive process are improved. [Brief explanation of the drawing]

[0017] [Figure 1] This is a schematic diagram of the structure of a stepper motor control system according to one embodiment of the present invention. [Figure 2] This is a schematic diagram showing the connection relationships between the control circuit and the isolation circuit according to the first embodiment of the present application. [Figure 3] This is a schematic diagram showing the connection relationship between the control circuit and the isolation circuit according to the second embodiment of the present application. [Figure 4] This is a schematic diagram showing the connection relationship between the drive circuit and the stepping motor according to one embodiment of the present invention. [Figure 5] This is a schematic structural diagram of an alarm circuit according to an embodiment of the present application. [Figure 6] This is a schematic structural diagram of a matching circuit according to an embodiment of the present application. DETAILED DESCRIPTION OF EMBODIMENTS FOR IMPLEMENTING THE INVENTION

[0018] For a clearer understanding of the objectives, technical solutions and advantages of the present application, the present application will be described in further detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described in this specification are only used to explain the present application, and are not intended to limit the present application.

[0019] It should be noted that the terms "first", "second", "third", "fourth", etc. (if any) in the specification of the present application and the above accompanying drawings are used to distinguish similar objects, without the need to describe any specific order or priority. It is to be understood that the data used in this way are interchangeable where appropriate, such that the embodiments of the present application described in this specification can be implemented in an order other than those illustrated or described herein. Furthermore, the terms "comprising", "including" and any variations thereof are intended to cover non-exclusive inclusion. For example, a process, system, product or device comprising a series of steps or circuits is not necessarily limited to those steps or circuits explicitly listed, but may include other steps or circuits not explicitly listed or inherent to such process, method, product or device.

[0020] Unless otherwise specifically defined, all technical and scientific terms used herein have the same meaning as commonly understood by a person of ordinary skill in the art. The terms used in this specification are for the purpose of describing embodiments of the present application only, and are not intended to limit the present application.

[0021] This embodiment provides a control system for a stepping motor. Referring to Figure 1, in one embodiment, the control system for a stepping motor includes a control circuit 1, at least three sets of isolation circuits 2, and at least three sets of drive circuits 3. The control circuit 1 is used to output command signals and has at least a first port P1, a second port P2, and a third port P3. The isolation circuits 2 are used to receive command signals and perform photoelectric isolation transmission. The drive circuits 3 include a power switch transistor 31 for connection to the drive port of the stepping motor. The drive circuits 3 receive command signals output by the photoelectric isolation circuits 2 and drive the power switch transistor 31 on and off according to the received command signals, and are used to control the level value change of the drive port of the stepping motor by the power switch transistor 31. The first port P1, the first set of isolation circuits 2, and the first set of drive circuits 3 are connected in sequence. The second port P2, the second set of isolation circuits 2, and the second set of drive circuits 3 are connected in sequence. The third port P3, the third set of isolation circuits 2, and the third set of drive circuits 3 are connected in sequence.

[0022] In actual use, control circuit 1 generates a command signal, separation circuit 2 receives the command signal generated by control circuit 1 and outputs a command signal after separation and transmission conversion by performing photoelectric separation and transmission on the command signal, drive circuit 3 drives the power switch transistor 31 to turn on or off by receiving the command signal output by separation circuit 2, drives the power switch transistor 31 to turn on when the received command signal matches the ON condition of the power switch transistor 31, and drives the power switch transistor 31 to turn off when the received command signal matches the OFF condition of the power switch transistor 31, a DC voltage with a constant level value is connected to the drive port of the stepping motor, and the power switch transistor 31 changes the level value of the drive port of the stepping motor in the process of switching on and off alternately, thereby realizing drive control of the stepping motor.

[0023] More specifically, the control circuit 1 generates command signals through the first port P1, the second port P2, and the third port P3, respectively. For example, the command signal generated by the first port P1 can be a pulse command signal, the command signal generated by the second port P2 can be a direction command signal, and the command signal generated by the third port P3 can be an enable command signal. The separation circuit 2 receives the command signals generated by the first port P1, the second port P2, or the third port P3, performs photoelectric separation transmission, and outputs the command signal after separation transmission conversion to the corresponding drive circuit 3, thereby driving and controlling the drive port corresponding to the stepping motor by the corresponding drive circuit 3. For example, the first set of separation circuits 2 receives the command signal generated by the first port P1 and outputs the command signal after separation and transmission conversion by performing photoelectric separation and transmission on the command signal output by the first port P1. The first set of drive circuits 3 receives the command signal output by the first set of separation circuits 2 and drives the power switch transistor 31 to turn on and off, changing the level value of the pulse drive port of the stepping motor. In this way, the second set of drive circuits 3 changes the level value of the directional drive port of the stepping motor, and the third set of drive circuits 3 changes the level value of the enable drive port of the stepping motor.

[0024] Referring to Figure 2, in one embodiment, the control circuit 1 has a common port P0 for outputting a command signal, and the isolation circuit 2 includes a first optical coupling device 21 and a first current limiting resistor 22. The anode of the light-emitting element of the first optical coupling device 21 is connected to the common port P0 via the first current limiting resistor 22, the cathode of the light-emitting element of the first optical coupling device 21 is connected to the first port P1, the second port P2, or the third port P3, the collector of the photodetector of the first optical coupling device 21 is connected to the drive circuit 3, the emitter of the photodetector of the first optical coupling device 21 is grounded, and the first optical coupling device 21 is driven by the first port P1, the second port P2, or the third port P3 to receive a command signal.

[0025] Specifically, the control circuit 1 outputs a command signal (V1 in Figure 2) having a constant level value via the common port P0, the anode of the light-emitting element of the first optical coupling device 21 receives the command signal via the common port P0, the cathode of the light-emitting element of the first optical coupling device 21 is connected to the first port P1, the second port P2, or the third port P3, the control circuit 1 controls the change in the level value of the command signal received by the light-emitting element of the first optical coupling device 21 by changing the impedance state change of the first port P1, the second port P2, or the third port P3, the first optical coupling device 21 generates a photocurrent based on the photoelectric effect when it receives the command signal, the generated photocurrent is output to the drive circuit 3 as a command signal output by the photoelectric separation circuit 2, and there is a positive correlation between the current value of the photocurrent and the level value of the command signal received by the light-emitting element of the first optical coupling device 21.

[0026] More specifically, the control circuit 1 may be an internal transistor, the collector of which is connected to the anode of the light-emitting element of the first optical coupling device 21 as a first port P1, second port P2, or third port P3, the emitter of which is grounded, and the control circuit 1 controls the transistor to turn on and off by outputting a control signal to the base of the transistor, and further controls the change in the level value of the light-emitting element reception command signal of the first optical coupling device 21.

[0027] Referring to Figure 3, in another embodiment, the control circuit 1 has a common port P0 that is grounded, and the first port P1, second port P2 and third port P3 are used to output command signals, and the isolation circuit 2 includes a first optical coupling device 21 and a first current limiting resistor 22. The anode of the light-emitting element of the first optical coupling device 21 is connected to the first port P1, second port P2 or third port P3 via the first current limiting resistor 22, the cathode of the light-emitting element of the first optical coupling device 21 is connected to the common port P0, the collector of the photodetector of the first optical coupling device 21 is connected to the drive circuit 3, the emitter of the photodetector of the first optical coupling device 21 is grounded, and the first optical coupling device 21 is driven by the first port P1, second port P2 or third port P3 to receive command signals (V1 in Figure 3).

[0028] Specifically, the control circuit 1 outputs a command signal having a constant level value via the first port P1, the second port P2, and the third port P3. The anode of the light-emitting element of the first optical coupling device 21 receives the command signal via the first port P1, the second port P2, or the third port P3. The cathode of the light-emitting element of the first optical coupling device 21 is grounded via the common port P0. The control circuit 1 controls the change in the level value of the command signal received by the light-emitting element of the first optical coupling device 21 by changing the impedance state of the first port P1, the second port P2, or the third port P3. When the first optical coupling device 21 receives the command signal, it generates a photocurrent based on the photoelectric effect. The generated photocurrent is output to the drive circuit 3 as a command signal output by the photoelectric separation circuit 2. There is a positive correlation between the current value of the photocurrent and the level value of the command signal received by the light-emitting element of the first optical coupling device 21.

[0029] More specifically, the control circuit 1 may be an internal transistor, the collector of which is connected to a command signal having a constant level value, and the emitter of which is connected to the anode of the light-emitting element of the first optical coupling device 21 as the first port P1, second port P2, or third port P3. The control circuit 1 controls the transistor to turn on and off by outputting a control signal to the base of the transistor, and further controls the change in the level value of the command signal received by the light-emitting element of the first optical coupling device 21.

[0030] Preferably, in order to avoid false triggering due to the command signal level being too close during the control process, the level of the command signal received by the first optical coupling device 21 is greater than 3.5V or less than 0.5V.

[0031] Specifically, the control circuit 1 outputs a command signal to the first optical coupling device 21 and changes the impedance state of the first port P1, second port P2, or third port P3 so that the level value of the command signal received by the first optical coupling device 21 is greater than 3.5V or less than 0.5V. For example, when the control circuit 1 controls the transistors provided in the first port P1, second port P2, or third port P3 to turn off, the level value of the command signal received by the first optical coupling device 21 is less than 0.5V, and when the control circuit 1 controls the transistors provided in the first port P1, second port P2, or third port P3 to turn on, the level value of the command signal received by the first optical coupling device 21 is greater than 3.5V. As a result, the level values ​​of the command signals received by the first optical coupling device 21 are clearly distinguishable, making misidentification or false triggering less likely.

[0032] Referring to Figure 4, in another embodiment, the drive circuit 3 includes a power switch transistor 31, a second current limiting resistor 32, and a bias resistor 33. The gate of the power switch transistor 31 is connected to the isolation circuit 2 via the second current limiting resistor 32, the drain of the power switch transistor 31 is used to connect to a stepping motor, the source of the power switch transistor 31 is grounded, one end of the bias resistor 33 is connected to the gate of the power switch transistor 31, and the other end of the bias resistor 33 is connected to the source of the power switch transistor 31.

[0033] Specifically, when the power switch transistor 31 receives a command signal output by the isolation circuit 2 via the second current limiting resistor 32, if the received command signal matches the ON condition for the power switch transistor 31, the power switch transistor 31 is driven to turn ON, and if the received command signal matches the OFF condition for the power switch transistor 31, the power switch transistor 31 is driven to turn OFF. A DC voltage (V2 in Figure 4) with a constant level value is connected to the drive port of the stepping motor, and as the power switch transistor 31 alternately switches between ON and OFF, the level value of the drive port of the stepping motor is changed, thereby realizing drive control for the stepping motor. Specifically, when the power switch transistor 31 is turned ON, the drive port of the stepping motor is grounded and the level value of the drive port of the stepping motor is set to zero, and when the power switch transistor 31 is turned OFF, the drive port of the stepping motor is connected to the DC voltage and the stepping motor is made to perform the corresponding operation.

[0034] Preferably, the power switch transistor 31 is a BS123 series MOS transistor.

[0035] Referring to Figure 5, in another embodiment, the control system for the stepping motor further includes an alarm circuit 4. The alarm circuit 4 includes a second optical coupling device 41, a third current limiting resistor 42, and an alarm 43, wherein the anode of the light-emitting element of the second optical coupling device 41 is connected to the control circuit 1, the cathode of the light-emitting element of the second optical coupling device 41 is grounded, and the collector and emitter of the photodetector of the second optical coupling device 41 are connected to the alarm 43.

[0036] Specifically, when the control circuit 1 receives an external detection signal and determines that there is an abnormality, it outputs a control signal to the second optical coupling device 41 via the third current limiting resistor 42. The second optical coupling device 41 generates a photocurrent based on the photoelectric effect and outputs it to the alarm device 43, driving the alarm device 43 to sound an alarm.

[0037] In the above embodiment, the control circuit 1 is a single-chip microcontroller.

[0038] The present embodiment further provides a stepping motor, which includes a control system for the stepping motor, and the specific structure of the control system for the stepping motor will be described in the above embodiment.

[0039] Referring to Figure 6, in one embodiment, a matching circuit 5 is connected to the voltage input terminal of the stepping motor. The matching circuit 5 includes a first adjustable capacitor 51, a second adjustable capacitor 52, and a first inductance 53. One end of the first inductance 53 is connected to one end of the first adjustable capacitor 51 and to a high-frequency power supply for external connection. The other end of the first inductance 53 is grounded and connected to the stepping motor via the second adjustable capacitor 52.

[0040] Specifically, the end of the first inductance 53 away from the second adjustable capacitance 52 is connected to an external high-frequency power supply and is used to input the high-frequency power supply as the input terminal of the matching circuit 5, and the end of the second adjustable capacitance 52 away from the first inductance 53 is connected to the voltage input terminal of the stepping motor and is used to function as the output terminal of the matching circuit 5, thereby achieving matching between the load impedance and the characteristic impedance of the transmission line for the stepping motor using the first adjustable capacitance 51 and the second adjustable capacitance 52.

[0041] In summary, the stepping motor control system and stepping motor according to this embodiment receive command signals output by the control circuit using an isolation circuit and perform photoelectric isolation transmission. The command signals output after photoelectric isolation transmission are then output to the drive circuit. The drive circuit is driven to turn a power switch transistor on and off according to the received command signal. The power switch transistor controls the level change of the drive port of the stepping motor. By separating the signal input terminal and signal output terminal of the system during the signal transmission process and driving with a power-type switch device, the system's response speed and electromagnetic interference resistance are improved, and the interference resistance and stability of the stepping motor control and drive process are improved.

[0042] In this application, it should be understood that "at least one" means one or more, and "multiple" means two or more. "And / or" is used to describe the relationship between related objects and indicates that there may be three relationships. For example, "A and / or B" may represent three cases: A only exists, B only exists, or A and B exist simultaneously, and A and B may be singular or plural. The letter " / " generally indicates that the related objects before and after it are in an "or" relationship. "At least one of the following" or similar expressions refers to any combination of these objects, including any combination of a single object or multiple objects. For example, at least one of a, b, or c may represent "a, b, c," "a and b," "a and c," "b and c," or "a and b and c," where a, b, and c may be singular or plural. Preferred embodiments of the present invention have been described above with reference to the drawings, but this does not limit the scope of the claims of the present invention. Any modifications, equivalent substitutions, and improvements made by a person skilled in the art without departing from the scope and substance of the present invention should all fall within the scope of the claims of the present invention.

Claims

1. A control system for a stepping motor, A control circuit used to output command signals, having at least a first port, a second port, and a third port, At least three sets of isolation circuits for receiving command signals and performing photoelectric isolation transmission, The system includes at least three sets of drive circuits for controlling the level change of the drive port of the stepping motor by including a power switch transistor for connecting to the drive port of the stepping motor, receiving a command signal output by the isolation circuit, and driving the power switch transistor to turn on and off according to the received command signal, The first port, the first set of isolation circuits, and the first set of drive circuits are connected in this order. The second port, the second set of isolation circuits, and the second set of drive circuits are connected in this order. The third port, the third set of isolation circuits, and the third set of drive circuits are connected in this order. The drive circuit includes a power switch transistor, a second current limiting resistor, and a bias resistor. The gate of the power switch transistor is connected to the isolation circuit via the second current limiting resistor. The drain of the power switch transistor is used to connect to the stepping motor. The source of the aforementioned power switch transistor is grounded. One end of the bias resistor is connected to the gate of the power switch transistor. The other end of the bias resistor is connected to the source of the power switch transistor. The power switch transistor receives a command signal via the second current limiting resistor, and if the received command signal matches the ON condition of the power switch transistor, it is driven to turn on the power switch transistor, and if the received command signal matches the OFF condition of the power switch transistor, it is driven to turn off the power switch transistor, and in the process of the power switch transistor switching between ON and OFF alternately, the level value of the drive port of the stepping motor is changed. The control circuit has a common port for outputting command signals, The separation circuit includes a first optical coupling device and a first current limiting resistor. The anode of the light-emitting element of the first photocoupler is connected to the common port via the first current-limiting resistor. The cathode of the light-emitting element of the first photocoupler is connected to the first port, the second port, or the third port. The collector of the photodetector of the first optical coupling device is connected to the drive circuit, The emitter of the photodetector in the first optical coupling device is grounded. The first optical coupling device is driven by the first port, the second port, or the third port to receive command signals. A control system for a stepping motor characterized by the following features.

2. A control system for a stepping motor, A control circuit used to output command signals, having at least a first port, a second port, and a third port, At least three sets of isolation circuits for receiving command signals and performing photoelectric isolation transmission, The system includes at least three sets of drive circuits for controlling the level change of the drive port of the stepping motor by including a power switch transistor for connecting to the drive port of the stepping motor, receiving a command signal output by the isolation circuit, and driving the power switch transistor to turn on and off according to the received command signal, The first port, the first set of isolation circuits, and the first set of drive circuits are connected in this order. The second port, the second set of isolation circuits, and the second set of drive circuits are connected in this order. The third port, the third set of isolation circuits, and the third set of drive circuits are connected in this order. The drive circuit includes a power switch transistor, a second current limiting resistor, and a bias resistor. The gate of the power switch transistor is connected to the isolation circuit via the second current limiting resistor. The drain of the power switch transistor is used to connect to the stepping motor. The source of the aforementioned power switch transistor is grounded. One end of the bias resistor is connected to the gate of the power switch transistor. The other end of the bias resistor is connected to the source of the power switch transistor. The power switch transistor receives a command signal via the second current limiting resistor, and if the received command signal matches the ON condition of the power switch transistor, it is driven to turn on the power switch transistor, and if the received command signal matches the OFF condition of the power switch transistor, it is driven to turn off the power switch transistor, and in the process of the power switch transistor switching between ON and OFF alternately, the level value of the drive port of the stepping motor is changed. The control circuit has a common port that is grounded, and the first port, the second port and the third port are used to output command signals. The separation circuit includes a first optical coupling device and a first current limiting resistor. The anode of the light-emitting element of the first photocoupler is connected to the first port, the second port, or the third port via the first current-limiting resistor. The cathode of the light-emitting element of the first photocoupler is connected to the common port, The collector of the photodetector of the first optical coupling device is connected to the drive circuit, The emitter of the photodetector in the first optical coupling device is grounded. A stepping motor control system characterized in that the first optical coupling device is driven by the first port, the second port, or the third port to receive command signals.

3. The stepping motor control system according to claim 1, characterized in that the level value of the command signal received by the first optical coupling device is greater than 3.5V or less than 0.5V.

4. The stepping motor control system according to claim 1, characterized in that the power switch transistor is a BS123 series MOS transistor.

5. The control system for the stepping motor further includes an alarm circuit, The alarm circuit includes a second optical coupling device, a third current limiting resistor, and an alarm. The anode of the light-emitting element of the second photocoupler is connected to the control circuit. The cathode of the light-emitting element of the second photocoupler is grounded. The stepping motor control system according to claim 1, characterized in that the collector and emitter of the photodetector of the second optical coupling device are connected to the alarm.

6. The control system for a stepping motor according to claim 1, characterized in that the control circuit is a single-chip microcontroller.

7. A stepping motor, characterized in that it includes a stepping motor control system according to any one of claims 1 to 6.

8. A matching circuit is connected to the voltage input terminal of the stepping motor. The matching circuit includes a first adjustable capacitance, a second adjustable capacitance, and a first inductance. One end of the first inductance is connected to the other end of the first adjustable capacitance and to a high-frequency power supply for external connection. The stepping motor according to claim 7, characterized in that the other end of the first inductance is grounded, and the other end of the first inductance is connected to the stepping motor via the second adjustable capacitance.

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