Electronic component handling equipment and electronic component testing equipment

Abstract

To provide an electronic component handling device that can correctly determine the position of a DUT to a socket even when a test is run on the DUT on the condition that a test tray is in a vertical position.SOLUTION: A handler 10 has a pressing device 20 for pressing a DUT100 against a socket 5 on the condition that a test tray 50 having an insert 70 containing the DUT100 is in a vertical position. The pressing device 20 includes: a pusher 42 in contact with the DUT100; and a contact member 44 in contact with the insert 70.SELECTED DRAWING: Figure 12

Description

Technical Field

[0001] The present invention relates to an electronic component handling apparatus and an electronic component testing apparatus that are used for testing an electronic component under test (DUT: Device Under Test) such as a semiconductor integrated circuit element. Background Art

[0002] As an electronic component handling apparatus using a test tray accommodating DUTs, for example, the apparatus described in Patent Document 1 is known. In this electronic component handling apparatus, with the test tray held in a vertical state, a pressing device presses the DUT horizontally toward a socket. Prior Art Documents Patent Documents

[0003] Patent Document 1 Japanese Unexamined Patent Publication No. 2022-021239 Summary of Invention Problems to be Solved by the Invention

[0004] In the above test tray, an insert that accommodates the DUT is movably held by a frame. Here, when pressing the DUT against the socket, it is necessary to perform positioning with the DUT kept parallel to the socket. However, when the test tray is held in a vertical state, the insert tilts irregularly relative to the frame due to its own weight, which causes a problem that it may be difficult to accurately position the DUT with respect to the socket.

[0005] The problem to be solved by the present invention is to provide an electronic component handling apparatus and an electronic component testing apparatus capable of accurately positioning a DUT with respect to a socket even when testing the DUT with a test tray held in a vertical state. Means for Solving the Problems

[0006] [1] One aspect of the present invention is an electronic component handling device comprising a pressing device for pressing a DUT or the carrier into a socket while the test tray having a DUT or an insert containing a carrier containing the DUT is in an upright position, wherein the pressing device comprises a pusher that contacts the DUT or the carrier and a contact portion that abuts against the insert.

[0007] [2] Embodiment 2 of the present invention is an electronic component handling device according to Embodiment 1, wherein the contact portion contacts the insert before the pusher contacts the DUT or the carrier.

[0008] [3] A third aspect of the present invention is an electronic component handling device according to aspect 1 or 2, wherein the contact portion comprises a push pin that contacts the insert and a biasing member that biases the push pin toward the insert.

[0009] [4] A fourth aspect of the present invention is an electronic component handling device according to the third aspect, wherein the insert has an insertion opening into which the DUT or the carrier is inserted, and the insert body is made of a resin material.

[0010] [5] Embodiment 5 of the present invention is an electronic component handling device according to Embodiment 4, wherein the push pin contacts an area of ​​the insert body that includes the center of gravity of the insert body, or an area of ​​the insert body that is below the center of gravity.

[0011] [6] Embodiment 6 of the present invention is an electronic component handling device according to Embodiment 4 or 5, wherein the insert body has a plurality of insertion openings, and the push pin contacts the region between the plurality of insertion openings in the insert.

[0012] [7] Embodiment 7 of the present invention is an electronic component handling device in any one of embodiments 4 to 6, wherein the insert is mounted on the insert body so as to correspond to the insertion opening and the device holding part for holding the DUT further comprises the electronic component handling device.

[0013] [8] Embodiment 8 of the present invention is an electronic component handling device in any one of embodiments 3 to 7, wherein the push pin has an oval cross-sectional shape, and the push pin is arranged such that the longitudinal direction of the cross-section of the push pin is non-parallel to the vertical direction.

[0014] [9] Embodiment 9 of the present invention is an electronic component handling device in any one of embodiments 3 to 8, wherein the pressing device comprises a base holding the push pin, and the protruding portion of the push pin protruding from the base is of such length that the push pin contacts the insert before the pusher contacts the DUT or the carrier.

[0015]

[10] Embodiment 10 of the present invention is an electronic component handling device in any one of embodiments 3 to 9, wherein the pressing device further comprises a first guide pin that can be fitted into a first guide hole of the insert, and the push pin and the first guide pin are independent members.

[0016]

[11] Embodiment 11 of the present invention is an electronic component handling device according to Embodiment 10, wherein the pressing device comprises a base that holds the push pin, and the protruding portion of the push pin protruding from the base is of such length that the push pin contacts the insert before the first guide pin engages with the first guide hole.

[0017]

[12] Embodiment 12 of the present invention is an electronic component handling device in any one of embodiments 1 to 11, wherein the pressing device comprises a match plate having a plurality of pushers, and the match plate comprises a second guide pin that can be fitted into a second guide hole of the test tray.

[0018]

[13] A 13th aspect of the present invention is an electronic component handling device according to aspect 12, wherein the test tray comprises the insert, a frame having the second guide hole having an oval planar shape, and a fastener fixed to the frame and movably holding the insert, and the second guide hole is formed in the frame such that the longitudinal direction of the cross-section of the second guide hole is substantially parallel to the vertical direction when the pusher faces the DUT or carrier held in the test tray.

[0019]

[14] Aspect 14 of the present invention is an electronic component handling device in any one of aspects 1 to 12, wherein the test tray comprises the insert, a frame, a fastener fixed to the frame and holding the insert movably, and a centering mechanism that centers the insert as the contact portion contacts the insert.

[0020]

[15] Aspect 15 of the present invention is the electronic component handling apparatus according to any one of Aspects 1 to 12, wherein the test tray includes the insert, a frame, and a fastener fixed to the frame and holding the insert in a freely movable manner, the fastener holds the insert in a freely movable state by being inserted into a cutout portion of the insert, the fastener includes a shaft portion and a flange portion larger than the shaft portion, the cutout portion of the insert includes an insertion portion into which the shaft portion is inserted, and an enlarged portion that is larger than the insertion portion and in which the flange portion is accommodated, the enlarged portion has a bottom surface where the insertion portion is open and with which the flange portion can make contact, and the enlarged portion may have a shape that tapers toward the bottom surface in the electronic component handling apparatus.

[0021]

[16] Aspect 16 of the present invention is an electronic component testing apparatus for testing a DUT, which is an electronic component testing apparatus comprising the electronic component handling apparatus according to any one of Aspects 1 to 15, and a tester having the socket. [Effects of the Invention]

[0022] According to the present invention, since the pressing device includes the abutting portion that abuts against the insert, the posture of the insert that is inclined relative to the frame can be corrected to a vertical state, and the DUT can be accurately positioned relative to the socket. [Brief Description of the Drawings]

[0023] [Figure 1] FIG. 1 is a schematic cross-sectional view showing the overall configuration of an electronic component testing apparatus according to an embodiment of the present invention. [Figure 2] FIG. 2 is a front view showing a test tray used in the electronic component testing apparatus according to the embodiment of the present invention. [Figure 3] FIG. 3 is a rear view of the test tray shown in FIG. 2. [Figure 4] FIG. 4 is a cross-sectional view taken along line IV-IV in FIG. 2. [Figure 5] Figure 5 is a cross-sectional view taken along line V-V in Figure 2. [Figure 6A] Figure 6A is a cross-sectional view taken along line VI-VI in Figure 3, and is a diagram showing a state before centering of the insert. [Figure 6B] Figure 6B is a cross-sectional view taken along line VI-VI in Figure 3, and is a diagram showing a state after centering of the insert. [Figure 7] Figure 7 is a cross-sectional view taken along line VII-VII in Figure 2. [Figure 8] Figure 8 is a front view showing the insert main body of the test tray in the embodiment of the present invention. [Figure 9] Figure 9 is a perspective view of the insert main body shown in Figure 8 as viewed from the back side. [Figure 10] Figure 10 is a rear view showing the match plate in the embodiment of the present invention. [Figure 11] Figure 11 is a rear view showing the pressing unit in the embodiment of the present invention. [Figure 12] Figure 12 is a cross-sectional view taken along line XII-XII in Figure 11. [Figure 13A] Figure 13A is a cross-sectional view (part 1) showing the pressing operation of the DUT in the embodiment of the present invention. [Figure 13B] Figure 13B is a cross-sectional view (part 2) showing the pressing operation of the DUT in the embodiment of the present invention. [Figure 13C] Figure 13C is a cross-sectional view (part 3) showing the pressing operation of the DUT in the embodiment of the present invention. [Figure 13D] Figure 13D is a cross-sectional view (part 4) showing the pressing operation of the DUT in the embodiment of the present invention. [Figure 13E] Figure 13E is a cross-sectional view (part 5) showing the pressing operation of the DUT in the embodiment of the present invention. [Mode for Carrying Out the Invention]

[0024] Hereinafter, embodiments of the present invention will be described based on the drawings.

[0025] Figure 1 is a schematic cross-sectional view showing the overall configuration of the electronic component testing apparatus 1 in this embodiment.

[0026] The electronic component testing apparatus 1 of this embodiment is a device for testing the electrical characteristics of a DUT 100. As shown in Figure 1, this electronic component testing apparatus 1 comprises a tester 2 for testing the DUT 100 and a handler 10 for transporting the DUT 100 and pressing it into a socket 5. Although not particularly limited, examples of such an electronic component testing apparatus 1 and handler 10 can be found in Japanese Patent Application Publication No. 2022-021239 or Japanese Patent Application Publication No. 2022-021241. Specific examples of the DUT 100 to be tested (see Figures 4, 13D, and 13E) include memory devices, logic devices, or SoCs (System on a chip).

[0027] As shown in Figure 1, the tester 2 comprises a main frame (tester body) 3 and a test head 4. The main frame 3 is connected to the test head 4 via a cable 8. Multiple sockets 5 (256 in this example) are mounted on the top of the test head 4. The test head 4 is inserted into the opening 10a of the handler 10 with its orientation rotated 90 degrees, so that the multiple sockets 5 are positioned inside the handler 10 in a horizontal orientation.

[0028] In this embodiment, 256 sockets 5 are arranged in 16 rows and 16 columns on the top of the test head 4. The number of sockets 5 on the test head 4 is not particularly limited to the above, nor is the arrangement of the sockets 5 particularly limited. Each socket 5 is equipped with a contactor 6 (see Figure 13D) that contacts the terminals of the DUT 100. Examples of such contactors 6 are not particularly limited, but include pogo pins, cantilever-type probe needles, anisotropic conductive rubber sheets, or membrane-type contactors with bumps formed on an insulating film.

[0029] The handler 10 includes a pressing device 20 that presses the DUT 100 against the socket 5 while the DUT 100 is housed in the test tray 50. In this embodiment, the handler 10 presses the DUT 100 against the socket 5 using the pressing device 20 with the test tray 50 in a vertical position. In this state, the main frame 3 sends a test signal to the DUT 100 via the test head 4 to test the DUT 100. In this embodiment, "vertical position" means a state in which the main surface of the test tray 50 is substantially parallel to the vertical direction (the Z-axis direction in the figure).

[0030] Although not specifically shown in the diagram, the handler 10 may also include a function (loader unit) to transfer the untested DUT 100 from the customer tray (not shown) to the test tray 50 before testing the DUT 100. Furthermore, the handler 10 may also include a function (thermal stress application unit) to apply high or low temperature thermal stress to the DUT 100 while it is placed in the test tray 50.

[0031] Furthermore, although not specifically shown in the diagram, the handler 10 may also include a function (thermal stress removal unit) to remove thermal stress from the DUT 100 after it has been tested and is placed in the test tray 50. Additionally, the handler 10 may also include a function (unloader unit) to transfer the tested DUT 100 from the test tray 50 to the customer tray while classifying the DUT 100 according to the test results.

[0032] Here, the customer tray is a tray for transporting multiple DUTs 100 between the process using this electronic component testing apparatus 1 and other processes. This customer tray is, for example, a tray conforming to the JEDEC (Joint Electron Device Engineering Council) standard and is a plate-shaped tray made of resin material or the like. This customer tray has multiple pockets arranged in a matrix, and each pocket has a concave shape capable of accommodating a DUT 100. Untested DUTs 100 are transported from the previous process to the handler 10 while mounted on this customer tray. Tested DUTs 100 are transported from the handler 10 to the next process while mounted on this customer tray.

[0033] In contrast, the test tray 50 is a tray that circulates and transports within the handler 10 while containing multiple DUTs 100. The test tray 50 will be described below with reference to Figures 2 to 9.

[0034] Figure 2 is a front view showing the test tray 50 used in the electronic component testing apparatus 1 in this embodiment, Figure 3 is a rear view of the test tray 50 shown in Figure 2, Figure 4 is a cross-sectional view along line IV-IV in Figure 2, and Figure 5 is a cross-sectional view along line VV in Figure 2. Figures 6A and 6B are cross-sectional views along line VI-VI in Figure 3, Figure 6A shows the state of the insert 70 before centering, and Figure 6B shows the state of the insert 70 after centering. Figure 7 is a cross-sectional view along line VII-VII in Figure 2. Figure 8 is a front view showing the insert body 71 of the test tray 50 in this embodiment, and Figure 9 is a perspective view of the insert body 71 shown in Figure 8 from the rear side.

[0035] As shown in Figures 2 to 5, the test tray 50 comprises a frame member 60, a plurality of (64 in this example) inserts 70, and a plurality of fasteners 80.

[0036] The frame member 60 comprises a rectangular outer frame 61 and a grid-like inner frame 62 positioned inside the outer frame 61. The frame member 60 has rectangular openings 63 partitioned by the outer frame 61 and the inner frame 62. In this embodiment, 64 openings 63 are arranged in an 8x8 grid on the frame member 60. Multiple inserts 70 are arranged to correspond to the openings 63 of the frame member 60, and the outer periphery of each insert 70 overlaps with the outer frame 61 or inner frame 62 of the frame member 60. The number and arrangement of the openings 63 on the frame member 60 are not limited to the above and are set according to the number and arrangement of the inserts 70 on the test tray 50.

[0037] Each insert 70 is held in place at its four corners by fasteners 80, which are fixed to the frame member 60 at their ends. For this reason, the frame member 60 has multiple fixing holes 64 formed therein for fixing the fasteners 80.

[0038] Each fixing hole 64, as shown in Figures 6A and 6B, comprises an insertion portion 641 and a counterbore portion 642 having an inner diameter larger than the inner diameter of the insertion portion 641. The tip of the shaft portion 81 (described later) of the fastener 80 is inserted into the insertion portion 641 of the fixing hole 64, and the head portion 82 (described later) of the fastener 80 is inserted into the counterbore portion 642.

[0039] As shown in Figures 2 and 3, each fixing hole 64 is positioned to correspond to the corner of the opening 63, and a single fastener 80 holds together the corners of multiple adjacent inserts 70. Specifically, for fasteners 80 fixed to the inner frame 62, one fastener 80 holds together the corners of four or two inserts 70. For fasteners 80 fixed to the outer frame 61, one fastener 80 holds together the corners of two inserts 70. In other words, one fastener 80 is shared by multiple adjacent inserts 70. However, for some fasteners 80 fixed to the outer frame 61, one fastener 80 holds only one insert 70.

[0040] Furthermore, as shown in Figure 2, a guide hole 65 is formed in the inner frame 62 of the frame member 60. This guide hole 65 is located in the center of the longitudinal direction (Y-axis direction in the figure) of the frame member 60. As shown in Figure 7, this guide hole 65 comprises a hole body portion 651 and a tapered portion 652. The hole body portion 651 is open at one end (towards the insert 70; -X direction in the figure) and connected to the tapered portion 652 at the other end. The tapered portion 652 has a tapered inner diameter that widens from the hole body portion 651 toward the opposite side of the insert 70 (+X direction in the figure).

[0041] Furthermore, this guide hole 65 has an oval cross-sectional shape. Here, an oval means a shape consisting of a pair of straight sections extending parallel to each other and a pair of arc sections connecting the straight sections to each other. As shown in Figure 2, this guide hole 65 is formed in the inner frame 62 of the frame member 60 such that when the pressing device 20 is pressing the DUT 100 against the socket 5 (i.e., when the test tray 50 is in a vertical position), the longitudinal direction VL1 of the guide hole 65 is substantially parallel to the vertical direction (the Z-axis direction in the figure). A guide pin 352 (described later) of the pressing device 20 fits into this guide hole 65.

[0042] Each insert 70 comprises an insert body 71 and a plurality (four in this example) of device cores 72, as shown in Figures 2 to 5. In Figures 2 and 3, only some of the device cores 72 are shown with dashed lines to facilitate understanding of the configuration of the test tray 50. The device cores 72 correspond to an example of the "device holding portion" in an embodiment of the present invention.

[0043] As shown in Figures 8 and 9, the insert body 71 is a rectangular plate-shaped resin molded body. In this embodiment, four insertion openings 711 are formed in the insert body 71, and these four insertion openings 711 are arranged in two rows and two columns. Each insertion opening 711 faces an opening 63 of the frame member 60 when the insert 70 is attached to the frame member 60.

[0044] As shown in Figure 4, multiple device cores 72 are arranged so that each corresponds to one of these insertion slots 711. Thus, the entire test tray 50 has 256 device cores 72 arranged in 16 rows and 16 columns, and this arrangement of device cores 72 corresponds to the arrangement of sockets 5 on the test head 4 described above.

[0045] The number and arrangement of device cores 72 in each insert 70 are not limited to those described above. Similarly, the number and arrangement of device cores 72 in the test tray 50 are not limited to those described above and are set according to the number and arrangement of sockets 5 on the test head 4.

[0046] Each device core 72 is detachably fixed to the insert body 71 by a hook (not shown). Each device core 72 is a resin molded body having an opening 721 formed at the bottom of the device core 72, which allows the terminals of the DUT 100 to be exposed through the opening 721 while holding the DUT 100. In this way, each device core 72 can hold one DUT 100, so each insert 70 can hold four DUT 100s, and the entire test tray 50 can hold 256 DUT 100s.

[0047] This device core 72 is removed from the insert body 71 when the DUT 100 is changed in variety, and replaced with another device core 72 that is compatible with the DUT 100 after the variety change. Note that the insert 70 may have only one device core 72, in which case the device core 72 may be integrally formed with the insert body 71, making it impossible to attach or detach the device core 72 from the insert body 71.

[0048] Furthermore, as shown in Figures 5, 8, and 9, the insert body 71 has two guide holes 712 formed therein. These guide holes 712 are located on the upper and lower parts of the insert body 71, respectively, along the centerline of the insert body 71.

[0049] Each guide hole 712 comprises a hole body portion 713 and a tapered portion 714, as shown in Figures 5 and 8. The hole body portion 713 is open at one end (opposite the frame member 60; the -X direction in the figures) and connected to the tapered portion 714 at the other end. The tapered portion 714 has a tapered inner diameter that widens from the hole body portion 713 toward the opening 73 of the frame member 60. A guide pin 43 (described later) of the pressing device 20 is fitted into this guide hole 712.

[0050] Furthermore, as shown in Figures 8 and 9, the insert body 71 has four pairs of through holes 715. The four pairs of through holes 715 are arranged so as to sandwich the four insertion openings 711, with the two through holes 715 constituting each pair being located above and below the insertion openings 711. Each through hole 715 is positioned to correspond to, for example, the guide pins 7 (see Figures 13A to 13E) of a socket guide (not shown), and has an outer diameter that is sufficiently larger than the outer diameter of the guide pins 7.

[0051] Here, the device core 72 also has a guide hole (not shown) at a position corresponding to the through hole 715, and the guide pin 7 of the socket guide fits into this guide hole of the device core 72. At this time, the through hole 715 of the insert body 71 prevents interference between the part of the guide pin 7 that protrudes from the guide hole of the device core 72 toward the insert body 71 and the insert body 71. This socket guide is a component provided on the test head 4 so as to surround the socket 5.

[0052] Furthermore, as shown in Figure 9, notches 716 are formed at all four corners of the insert body 71. Each notch 716 includes an insertion portion 717 and an expansion portion 718, as shown in Figures 6A, 6B, and 9.

[0053] The insertion portion 717 has a shape similar to one of the quarters of a cylinder (approximately a quarter-cylindrical shape). This insertion portion 717 is open at one end (the frame member 60 side, the +X direction side in the figure) and connected to the enlarged portion 718 at the other end. This insertion portion 717 has a larger radius than the radius of the insertion portion 641 of the fixing hole 64 of the frame member 60 described above, so that the fastener 80 can hold the insert 70 movably.

[0054] The enlarged portion 718 has a shape similar to one of the quarters of a cup shape (approximately a quarter-cup shape). This enlarged portion 718 opens at the end opposite to the end to which the insertion portion 717 is connected (opposite to the frame member 60; the -X direction in the figure). This enlarged portion 718 has a radius that is larger than the radius of the insertion portion 717 and also larger than the radius of the flange portion 83 of the fastener 80. Furthermore, this enlarged portion 718 has a stepped shape that tapers gradually towards the insertion portion 717, and the bottom surface 719 of this enlarged portion 718 (the surface to which the insertion portion 717 opens) has a radius that is slightly larger than the radius of the flange portion 83. The enlarged portion 718 may also have a shape that tapers continuously towards the insertion portion 717 (for example, a curved shape).

[0055] As shown in Figures 6A and 6B, the fastener 80 comprises a shaft portion 81, a head portion 82, and a flange portion 83. The shaft portion 81 has a cylindrical shape with a radius smaller than the radius of the insertion portion 717 of the notch 716 of the insert body 71. The head portion 82 is connected to the tip of the shaft portion 81. The head portion 82 has an outer diameter larger than the outer diameter of the tip of the shaft portion 81 and larger than the inner diameter of the insertion portion 641 of the fixing hole 64 of the frame member 60. The flange portion 83 is connected to the rear end of the shaft portion 81. The flange portion 83 has a disc shape with a radius larger than the radius of the rear end of the shaft portion 81 and larger than the radius of the insertion portion 717 of the notch 716 of the insert body 71.

[0056] The fastener 80 is fixed to the frame member 60 and also holds the insert 70 in a movable manner. In this way, the insert 70 is held in a movable manner by the fastener 80, making it possible to position multiple inserts 70 independently of each other relative to the socket 5.

[0057] Specifically, the tip of the shaft portion 81 of the fastener 80 is inserted into the insertion portion 641 of the fixing hole 64 of the frame member 60, and the head portion 82 of the fastener 80 is inserted into the counterbore portion 642 of the fixing hole 64. As a result, the head portion 82 is locked into the step between the counterbore portion 642 and the insertion portion 641 in the fixing hole 64, thereby fixing the fastener 80 to the frame member 60.

[0058] Furthermore, the rear end of the shaft portion 81 of the fastener 80 is housed in the insertion portion 717 of the notch 716 of the insert body 71, and the flange portion 83 of the fastener 80 is housed in the enlarged portion 718 of the notch 716. Here, as described above, the insertion portion 717 has a radius larger than the radius of the shaft portion 81, and the enlarged portion 718 also has a radius larger than the radius of the flange portion 83. For this reason, as shown in Figure 6A, in the normal state (when no load other than gravity is applied to the insert 70), the insert 70 is held loosely by the fastener 80.

[0059] Furthermore, as described above, the bottom surface 719 of the enlarged portion 718 of the notch 716 has a radius slightly larger than the radius of the flange portion 83. Therefore, as shown in Figure 6B, when the insert 70 is pressed by the contact portion 44 (described later) of the pressing device 20, the flange portion 83 of the fastener 80 is guided along the enlarged portion 718 of the notch 716 and comes into contact with the bottom surface 719 of the enlarged portion 718, thereby centering the insert 70 with respect to the opening 63 of the frame member 60.

[0060] Next, the pressing device 20 of the electronic component handling device 10 in this embodiment will be described with reference to Figures 1 and 10 to 12.

[0061] Figure 10 is a rear view showing the match plate 30 in this embodiment, Figure 11 is a rear view showing the pressing unit 40 in this embodiment, and Figure 12 is a cross-sectional view along the line XII-XII in Figure 11.

[0062] As described above, with the socket 5 oriented horizontally, a portion of the test head 4 enters the inside of the handler 10 through the opening 10a. As shown in Figure 1, the pressing device 20 of the handler 10 is positioned opposite the socket 5.

[0063] Although not specifically shown in the diagram, the handler 10 also includes a transport device that transports the test tray 50 containing the DUT 100 between the socket 5 on the test head 4 and the pressing device 20. This transport device includes a tray transport rail that holds both ends of the test tray 50 in the longitudinal direction (Y-axis direction in the diagram) and transports the test tray 50. This tray transport rail is capable of moving toward the test head 4 along with the test tray 50 as the pressing device 20 presses the DUT 100.

[0064] When the test tray 50 containing the untested DUT100 is transported between the socket 5 and the pressing device 20 by this transport device, the pressing device 20 presses the DUT100 against the socket 5 while the DUT100 remains in the test tray 50. Then, once the testing of the DUT100 is complete, the test tray 50 containing the tested DUT100 is transported out from between the socket 5 and the pressing device 20 by this transport device.

[0065] The pressing device 20 comprises an actuator 25 and a match plate 30. The actuator 25 is a drive device that moves the match plate 30 along the X-axis direction in the figure, and is capable of moving the match plate 30 forward and backward on the test head 4 toward the socket 5. Although not particularly limited, an example of such an actuator 25 is a motor equipped with a ball screw mechanism.

[0066] As shown in Figure 10, the match plate 30 comprises a plate member 35 and a plurality (64 in this example) of pressing units 40. The plate member 35 has 64 retaining holes 351 formed therein, which are arranged in an 8x8 grid to correspond to the openings 63 of the frame member 60 of the test tray 50. A pressing unit 40 is mounted in each opening 63. The number and arrangement of the retaining holes 351 in the plate member 35 are not limited to the above and are set according to the number and arrangement of the pressing units 40 in the pressing device 20.

[0067] Furthermore, the plate member 35 is provided with guide pins 352. These guide pins 352 are positioned to correspond to the guide holes 65 in the frame member 60 of the test tray 50, and are located in the center of the match plate 30 in the longitudinal direction (Y-axis direction in the figure).

[0068] As shown in Figure 7 above, the guide pin 352 comprises a cylindrical pin body 353 and a tapered portion 354. The pin body 353 has an outer diameter slightly smaller than the width of the hole body 651 of the oval-shaped guide hole 65 in the short direction (Y-axis direction in the figure), allowing it to fit into the hole body 651. In contrast, the tapered portion 354 has a shape that tapers towards the tip from the pin body 353. When this guide pin 352 is fitted into the guide hole 65, the test tray 50 is positioned relative to the match plate 30 in the horizontal direction (Y-axis direction in the figure).

[0069] Guide pin 352 corresponds to an example of a "second guide pin" in an embodiment of the present invention, and guide hole 65 corresponds to an example of a "second guide hole" in an embodiment of the present invention.

[0070] Each pressing unit 40, as shown in Figures 11 and 12, comprises a base 41, a plurality (four in this example) of pushers 42, a guide pin 43, and a contact portion 44.

[0071] The base 41 is inserted into the holding hole 351 of the plate member 35 and is detachably fixed to the plate member 35. The pusher 42, guide pin 43, and contact portion 44 are provided on this base 41. The multiple pressing units 40 of this match plate 30 correspond to the multiple inserts 70 of the test tray 50 described above.

[0072] Furthermore, the base 41 has a housing hole 411 that accommodates the coil spring 46 (described later) of the contact portion 44. This housing hole 411 has a housing portion 412 having an inner diameter larger than the outer diameter of the coil spring 46, and a small-diameter portion 413 having an inner diameter smaller than the inner diameter of the housing portion 412.

[0073] The pushers 42 are arranged in a 2x2 grid on the base 41. This arrangement of pushers 42 corresponds to the arrangement of the four insertion openings 711 formed in the insert body 71 of the test tray 50. The pushers 42 enter the openings 63 of the frame member 60 of the test tray 50 and the insertion openings 711 of the insert body 71, making contact with the DUT 100 held by the device core 72 and pressing the DUT 100 into the socket 5. The entire match plate 30 has 256 pushers 42 arranged in a 16x16 grid, and this arrangement of pushers 42 corresponds to the arrangement of the sockets 5 on the test head 4 described above.

[0074] The number and arrangement of pushers 42 in each pressing unit 40 are not limited to those described above. Similarly, the number and arrangement of pushers 42 in the match plate 30 are not limited to those described above and are set according to the number and arrangement of sockets 5 on the test head 4.

[0075] The guide pin 43 is positioned to correspond to the guide hole 712 in the insert body 71 of the test tray 50. The guide pin 43 comprises a cylindrical pin body portion 431 and a tapered portion 432. The pin body portion 431 has an outer diameter slightly smaller than the inner diameter of the hole body portion 713 of the guide hole 712, allowing it to be fitted into the hole body portion 713. In contrast, the tapered portion 432 has a shape that tapers towards the tip from the pin body portion 431. When this guide pin 43 is fitted into the guide hole 712, the insert 70 is positioned relative to the pressing unit 40.

[0076] The guide pin 43 corresponds to an example of the "first guide pin" in an embodiment of the present invention, and the guide hole 712 corresponds to an example of the "first guide hole" in an embodiment of the present invention.

[0077] The contact portion 44 is a mechanism that contacts the insert body 71 as the pressing unit 40 moves forward due to the drive of the actuator 25. The configuration of the contact portion 44 is not limited to the configuration described below, as long as it contacts the insert body 71 as the pressing unit 40 moves forward.

[0078] In this embodiment, the contact portion 44 contacts the insert 70, thereby correcting the inclined position of the insert 70 relative to the frame member 60 to a vertical position. Furthermore, the contact of the contact portion 44 with the insert 70 and the guidance of the fastener 80 by the notch portion 716 described above allow the insert 70 to be centered relative to the opening 63 of the frame member 60.

[0079] This contact portion 44 includes a push pin 45 that contacts the insert body 71 and a coil spring 46 that biases the push pin 45.

[0080] The push pin 45 comprises a first pin portion 451, a flange portion 452, and a second pin portion 453. The first pin portion 451 is connected to one side of the flange portion 452, while the second pin portion 453 is connected to the other side of the flange portion 452.

[0081] The first pin portion 451 of the push pin 45 has an outer diameter smaller than the inner diameter of the small diameter portion 413 of the housing hole 411 of the base 41. This first pin portion 451 passes through the small diameter portion 413 and protrudes to the outside of the housing hole 411. The flange portion 452 has an outer diameter larger than the inner diameter of the small diameter portion 413 of the housing hole 411 of the base 41 and smaller than the inner diameter of the housing portion 412. The second pin portion 453 also has an outer diameter smaller than the inner diameter of the housing portion 412. This flange portion 452 and the second pin portion 453 are movably housed within the housing portion 412.

[0082] Furthermore, the second pin portion 453 of the push pin 45 is inserted into the inner hole of the coil spring 46, and the coil spring 46 is interposed in a compressed state between the flange portion 452 and the bottom surface of the housing portion 412. In other words, the push pin 45 is biased by the coil spring 46 toward the outside of the housing hole 411 (towards the insert 70; in the -X direction in the figure). Note that an elastic material such as rubber may be used instead of the coil spring 46.

[0083] In this embodiment, as shown in Figure 11, the push pin 45 is located in a region of the base 41 that does not include the center of gravity GP1, but is below the center of gravity GP1. Therefore, when the pressing device 20 presses the DUT 100 against the socket 5 (i.e., when the test tray 50 is in a vertical position), the push pin 45 contacts the region AR (see Figure 8 above) of the insert body 71 that does not include the center of gravity GP2, but is below the center of gravity GP2.

[0084] Here, the center of gravity GP1 of the base 41 in this embodiment means the center of gravity on the surface of the base 41 when the base 41 is viewed from the front (when the base 41 is viewed along the +X direction in the figure), as shown in Figure 11. Similarly, the center of gravity GP2 of the insert body 71 in this embodiment means the center of gravity on the surface of the insert body 71 when the insert body 71 is viewed from the front (when the insert body 71 is viewed along the -X direction in the figure), as shown in Figure 8 above.

[0085] This region AR may overlap with the center of gravity GP2 of the insert body 71 in the vertical direction. Furthermore, the center of the region AR may overlap with the center of gravity GP2 of the insert body 71 in the vertical direction.

[0086] This region AR is located between the four insertion openings 711 in the insert body 71. Alternatively, this region AR may be located between the two lower insertion openings 711 shown in Figure 8.

[0087] The push pin 45 may be positioned in the region of the base 41 that includes the center of gravity GP1. In this case, the push pin 45 will contact the region of the insert body 71 that includes the center of gravity GP2.

[0088] The first pin portion 451 of this push pin 45 has an oval cross-sectional shape. Here, an oval means a shape consisting of a pair of straight portions 451a extending parallel to each other and a pair of arc portions 451b connecting the straight portions 451a to each other. This push pin 45 is held on the base 41 such that the longitudinal direction VL2 of the cross-section of the first pin portion 451 of the push pin 45 is substantially perpendicular to the vertical direction (the Z-axis direction in the figure).

[0089] Furthermore, if the push pin 45 is held in the base 41 such that the longitudinal direction VL2 of the cross-section of the first pin portion 451 is non-parallel to the vertical direction (the Z-axis direction in the figure), the orientation of the cross-sectional shape of the push pin 45 with respect to the vertical direction is not particularly limited to the above.

[0090] Thus, because the push pin 45 has a non-circular planar shape and the longitudinal direction VL2 of the cross-section of the first pin portion 451 is non-parallel to the vertical direction (the Z-axis direction in the figure), it is possible to suppress the insert body 71 from rotating around the push pin 45 when the push pin 45 comes into contact with the insert body 71.

[0091] Furthermore, because the push pin 45 has an oval cross-sectional shape, the non-circular first pin portion 451 can be manufactured simply by partially cutting the cylindrical member, thus helping to suppress the increase in cost of the match plate 30.

[0092] The length L1 of the portion of the push pin 45 that protrudes from the base 41 is set such that the push pin 45 contacts the insert body 71 before the pusher 42 contacts the DUT 100 held in the device core 72 of the test tray 50. This allows the orientation of the insert 70 to be corrected to a vertical position before pressing the DUT 100 into the socket 5, and also allows the insert 70 to be centered relative to the opening 63 of the frame member 60.

[0093] Furthermore, the length L1 of the protruding portion of the push pin 45 is set such that the push pin 45 contacts the insert body 71 before the guide pin 43 of the pressing unit 40 engages with the guide hole 712 of the insert 70. This allows the orientation of the insert 70 to be corrected to a vertical position before positioning the insert 70 relative to the pressing unit 40, and also allows the insert 70 to be centered relative to the opening 63 of the frame member 60.

[0094] The pressing operation of the DUT100 by the pressing device 20 described above will be explained below with reference to Figures 13A to 13B. Figures 13A to 13E are cross-sectional views showing the pressing operation of the DUT100 in this embodiment.

[0095] When the test tray 50 containing the untested DUT 100 is transported between the socket 5 and the pressing device 20 by the transport device (not shown) described above, the multiple inserts 70 of the test tray 50 face the multiple pressing units 40 of the pressing device 20, as shown in Figure 13A. In this embodiment, the test tray 50 is transported vertically by the transport device described above.

[0096] Here, as described above, each insert 70 is held loosely by a fastener 80. Therefore, when the test tray 50 is in a vertical position, the inserts 70 may be tilted relative to the frame due to their own weight, as shown in the figure. Figure 6A, described above, is an enlarged view corresponding to the VIA section of Figure 13A.

[0097] Next, when the actuator 25 of the pressing device 20 is driven and the entire match plate 30 moves forward toward the test tray 50, as shown in Figure 13B, the push pins 45 of each pressing unit 40 first come into contact with the insert body 71, and the compression of the coil springs 46 begins. As a result, the insert 70 is pressed by the push pins 45, and the inclined position of the insert 70 is corrected to a vertical position. In this embodiment, the push pins 45 come into contact with the region AR (see Figure 8 above) of the insert body 71 that does not include the center of gravity GP2 but is below the center of gravity GP2, thereby increasing the certainty of correcting the position of the insert 70.

[0098] Furthermore, the pressure applied to the insert 70 by the push pin 45 guides the flange portion 83 of the fastener 80 along the enlarged portion 718 of the notch 716, and contacts the bottom surface 719 of the enlarged portion 718, thereby centering the insert 70 with respect to the opening 63 of the frame member 60. In other words, the center of the insert body 71 is positioned with respect to the center of the opening 63 of the frame member 60.

[0099] In other words, in this embodiment, the push pin 45 presses the insert 70, making it possible to correct the orientation of the insert 70 and center the insert 70. Figure 6B described above is an enlarged view corresponding to the VIB section of Figure 13C, which will be described later, showing the insert 70 after orientation correction and centering.

[0100] Furthermore, although not specifically shown in the figures, as the match plate 30 moves forward by the actuator 25, the guide pins 352 of the plate member 35 of the match plate 30 engage with the guide holes 65 of the frame member 60 of the test tray 50. This positions the test tray 50 relative to the match plate 30 in the horizontal direction (Y-axis direction in the figure).

[0101] In this embodiment, the match plate 30 and the multiple sockets 5 on the test head 4 are structurally aligned in advance. Therefore, when the test tray 50 is positioned relative to the match plate 30 by the guide pins 352 and guide holes 65 described above, the test tray 50 is consequently positioned relative to the sockets 5.

[0102] As described above, the guide pin 352 is located in the longitudinal center of the match plate 30, and the guide hole 65 is located in the longitudinal center of the test tray 50. Therefore, the effects of thermal stress (thermal expansion and contraction) applied to the test tray 50 by the handler 10 can be reduced.

[0103] Although not specifically shown in the diagram, the positioning of the test tray 50 relative to the socket 5 in the vertical direction (Z-axis direction in the diagram) can be achieved, for example, by fitting a positioning pin provided by the actuator of the transport device described above into a positioning hole formed on the short side of the frame member 60 of the test tray 50 (the side along the Z-axis direction in the diagram).

[0104] Next, as the actuator 25 of the pressing device 20 moves the entire match plate 30 further forward toward the test tray 50, the push pin 45 is pressed by the insert body 71, as shown in Figure 13C, and the coil spring 46 is further compressed. At the same time, the guide pin 43 of the pressing unit 40 is inserted into the guide hole 712 of the insert 70, and the pusher 42 of the pressing unit 40 enters the insertion opening 711 of the insert body 71 through the opening 63 of the test tray 50 frame member 60.

[0105] Then, as shown in Figure 13D, the guide pin 43 of the pressing unit 40 fits into the guide hole 712 of the insert 70, thereby positioning the insert 70 relative to the pressing unit 40. After the guide pin 43 has fitted into the guide hole 712, the pusher 42 makes contact with the DUT 100 held by the device core 72.

[0106] The timing of the pusher 42 contacting the DUT 100 is not particularly limited. For example, the pusher 42 may contact the DUT 100 after the guide pin 7 of the socket 5 has engaged with the guide hole (not shown) of the device core 72. Alternatively, the pusher 42 may contact the DUT 100 after the contact 6 of the socket 5 has contacted the terminals of the DUT 100.

[0107] Next, as the actuator 25 of the pressing device 20 advances the entire match plate 30 further toward the test tray 50, the pusher 42 presses the DUT 100, which is held by the device core 72, against the socket 5, as shown in Figure 13E. At this time, the guide pins 7 provided around the socket 5 engage with the guide holes (not shown) of the device core 72, thereby positioning the device core 72 relative to the socket 5.

[0108] Then, when the pusher 42 presses the DUT 100, which is held by the device core 72, against the socket 5, the contacts 6 of the socket 5 make contact with the terminals of the DUT 100, and the DUT 100 is electrically connected to the test head 4 via the socket 5. In this state, the main frame 3 tests the DUT 100 by sending a test signal to the DUT 100 via the test head 4.

[0109] As described above, in this embodiment, the pressing device 20 is equipped with a contact portion 44 that contacts the insert 70, so that the inclined position of the insert 70 relative to the frame member 60 of the test tray 50 can be corrected to a vertical position. Therefore, the DUT can be accurately positioned relative to the socket, thereby suppressing poor contact and damage between the DUT 100 and the socket 5, and extending the lifespan of the socket 5.

[0110] In particular, in this embodiment, the orientation of the insert 70, which is inclined with respect to the frame member 60 of the test tray 50, is corrected to a vertical position. Therefore, even when the DUT 100 is pressed into the socket 5 with the test tray 50 in a vertical position, the resistance force when the guide hole 712 of the insert 70 and the guide pin 43 of the pressing unit 40 are fitted together can be reduced, thereby reducing wear on the insert body 71 and the guide pin 43.

[0111] Furthermore, in this embodiment, the contact portion 44 with respect to the insert 70 and the guidance of the fastener 80 by the notch portion 716 allow the insert 70 to be centered with respect to the opening 63 of the frame member 60 and held by the fastener 80. Therefore, even when the DUT 100 is pressed against the socket 5 with the test tray 50 in a vertical position, uneven wear of the insert body 71 and guide pin 43 caused by the weight of the insert 70 can be reduced.

[0112] The embodiments described above are provided to facilitate understanding of the present invention and are not intended to limit it. Therefore, each element disclosed in the above embodiments is intended to include all design modifications and equivalents that fall within the technical scope of the present invention.

[0113] For example, the DUT100 may be tested using a device carrier 200 (see Figures 4, 13D, and 13E). In this case, the test tray 50 containing the device carrier 200 containing the DUT100 is transported by the handler 10, and the device carrier 200 is pressed against the socket 5, thereby electrically connecting the DUT100 and the socket 5 via the device carrier 200. As such a device carrier 200, the carrier described in Japanese Patent Publication No. 2019-197012, or Japanese Patent Publication No. 2013-79860, can be used. [Explanation of Symbols]

[0114] 1…Electronic component testing equipment 4…Test head 5...Socket 10…handler 20...Pressing device 25… Actuator 30…Match Plate 352... Guide pin 40...Pressure unit 41... Bass 42... Pusher 43... Guide pin 44...Contact part 45…Push pins 46… Coil spring 50…Test tray 60…Frame components 65… Guide hole 70… Insert 71… Insert body 711... Insertion port 712… Guide hole 716... Notch 717... Insertion part 718... Enlarged section AR... Area below the center of gravity 72…Device Cores 80...Fastener 81... Shaft section 83…Flange section 100...DUT

Claims

1. An electronic component handling device comprising a pressing device for pressing a DUT or the carrier into a socket while the test tray having a DUT or a plurality of inserts containing carriers containing the DUT is in a vertical position, The pressing device comprises a match plate having a plurality of pressing units arranged to correspond to the plurality of inserts, Each of the aforementioned inserts is The insert body, made of a resin material, has a plurality of insertion openings into which the DUT or the carrier is inserted, The insert body is fitted to the insert body so as to correspond to the insertion opening, and comprises a plurality of device holding parts that hold the DUT or the carrier, Each of the aforementioned pressing units is A plurality of pushers that contact the DUT or the carrier, It comprises a single contact portion that contacts the insert, The aforementioned contact portion contacts the region between the plurality of insertion openings in the insert body, The aforementioned contact portion is, A push pin that contacts the insert, The system includes a biasing member that biases the push pin toward the insert, The pressing unit further comprises a plurality of first guide pins that can be fitted into the first guide holes of the insert, The push pin and the first guide pin are mutually independent members. An electronic component handling device in which all of the first guide pins are located outside and away from the push pins.

2. An electronic component handling device according to claim 1, The contact portion is an electronic component handling device that contacts the insert before the pusher contacts the DUT or the carrier.

3. An electronic component handling device according to claim 1, The push pin is an electronic component handling device that contacts the insert body in a region including the center of gravity of the insert body, or in a region below the center of gravity of the insert body.

4. An electronic component handling device according to claim 1, The aforementioned push pin has an oval cross-sectional shape, The push pins are arranged in an electronic component handling device such that the longitudinal direction of the cross-section of the push pins is not parallel to the vertical direction.

5. An electronic component handling device according to claim 1, The pressing unit comprises a base that holds the push pin, An electronic component handling device in which the protruding portion of the push pin protruding from the base has a length such that the push pin contacts the insert before the pusher contacts the DUT or the carrier.

6. An electronic component handling device according to claim 1, The pressing unit comprises a base that holds the push pin, An electronic component handling device wherein the protruding portion of the push pin protruding from the base has a length such that the push pin contacts the insert before the first guide pin engages with the first guide hole.

7. An electronic component handling device according to claim 1, The matching plate is an electronic component handling device comprising a second guide pin that can be fitted into a second guide hole of the test tray.

8. An electronic component handling device according to claim 7, The aforementioned test tray is The aforementioned insert, A frame in which the second guide hole having an oval planar shape is formed, It comprises a fastener that is fixed to the frame and holds the insert movably, An electronic component handling device in which the second guide hole is formed in the frame such that, when the pusher faces the DUT or carrier held in the test tray, the longitudinal direction of the cross-section of the second guide hole is substantially parallel to the vertical direction.

9. An electronic component handling device according to claim 1, The aforementioned test tray is The aforementioned insert, Frame and, A fastener fixed to the frame and holding the insert movably, An electronic component handling device comprising: a centering mechanism that centers the insert upon contact of the contact portion with the insert; and

10. An electronic component handling device according to claim 1, The aforementioned test tray is The aforementioned insert, Frame and, The frame is fixed to the fastener that holds the insert movably, The fastener holds the insert movably by being inserted into a notch in the insert. The aforementioned fastener is, The shaft part, It comprises a flange portion that is larger than the shaft portion, The notch portion of the insert is The insertion portion into which the shaft portion is inserted, It comprises an enlarged portion that is larger than the insertion portion and houses the flange portion, The enlarged portion has an opening for the insertion portion and a bottom surface that can be contacted by the flange portion. The enlarged portion of the electronic component handling device has a shape that tapers towards the bottom surface.

11. An electronic component testing apparatus for testing DUT, An electronic component handling device according to any one of claims 1 to 10, An electronic component testing apparatus comprising a tester having the aforementioned socket.

Images