Sic semiconductor device

Abstract

This semiconductor device includes: a SiC chip that has a main surface; a trench structure that is formed on the main surface; an interlayer film that covers the trench structure; and a resistive film that is disposed on the interlayer film so as to partially face the trench structure with the interlayer film therebetween.

Description

SiC semiconductor device

[0001] This application claims priority to Japanese Patent Application No. 2022-178811 filed with the Japan Patent Office on November 8, 2022, the entire contents of which are incorporated herein by reference. The present disclosure relates to semiconductor devices, primarily wide bandgap semiconductor devices such as SiC semiconductor devices.

[0002] Patent Document 1 (US2020 / 0294989A1) discloses a semiconductor device including a semiconductor substrate, a MOS gate, a p-type region, an interlayer insulating film, a gate polysilicon layer, a gate pad, and a contact electrode. The MOS gate includes multiple gate electrodes embedded in multiple trenches formed in the semiconductor substrate. The p-type region is formed in a surface layer of the semiconductor substrate at a distance from the MOS gate. An interlayer insulating film covers the MOS gate and the p-type region on the semiconductor substrate.

[0003] The gate polysilicon layer is provided as a gate resistor. The gate polysilicon layer is disposed on a portion of the interlayer insulating film covering the p-type region at a distance from the MOS gate and faces the p-type region across the interlayer insulating film. The gate pad is disposed on the gate polysilicon layer and electrically connected to the gate polysilicon layer. The contact electrode is disposed on the gate polysilicon layer at a distance from the gate pad and electrically connected to the gate polysilicon layer.

[0004] US Patent Application Publication No. 2020 / 0294989

[0005] SUMMARY The present disclosure provides a semiconductor device having a novel layout associated with a resistor.

[0006] The present disclosure provides a semiconductor device including a chip having a main surface, a trench structure formed on the main surface, an interlayer film covering the trench structure, and a resistive film arranged on the interlayer film so as to partially face the trench structure across the interlayer film.

[0007] The present disclosure provides a semiconductor device including a chip having a main surface, a trench gate structure formed on the main surface, an interlayer film covering the trench gate structure, and a resistive film arranged on the interlayer film so as to partially face the trench gate structure with the interlayer film in between.

[0008] The present disclosure provides a semiconductor device including a chip having a main surface, a trench source structure formed on the main surface, an interlayer film covering the trench source structure, and a resistive film arranged on the interlayer film so as to partially face the trench source structure across the interlayer film.

[0009] The present disclosure provides a semiconductor device including: a chip having a main surface; a trench gate structure formed on the main surface; a trench source structure formed on the main surface adjacent to the trench gate structure; an interlayer film covering the trench gate structure and the trench source structure; and a resistive film disposed on the interlayer film so as to partially face the trench gate structure and the trench source structure with the interlayer film in between.

[0010] The present disclosure provides a semiconductor device including: a chip having a main surface; a first trench structure formed in a strip shape extending in a first direction on the main surface; a second trench structure formed on the main surface at a distance from the first trench structure in the first direction and facing the first trench structure in the first direction; an interlayer film covering the main surface; and a resistive film disposed on the interlayer film at a distance from the second trench structure in the first direction and facing the first trench structure across the interlayer film.

[0011] The present disclosure provides a semiconductor device including: a chip having a main surface; a trench gate structure formed in a strip shape extending in a first direction on the main surface; a trench source structure formed on the main surface at a distance from the trench gate structure in the first direction and facing the trench gate structure in the first direction; an interlayer film covering the main surface; and a resistive film disposed on the interlayer film at a distance from the trench source structure in the first direction and facing the trench gate structure with the interlayer film in between.

[0012] The present disclosure provides a semiconductor device including: a chip having a main surface; a first trench structure formed on the main surface; a second trench structure formed on the main surface spaced apart in one direction from the first trench structure and facing the first trench structure in the one direction; a third trench structure formed on the main surface spaced apart from the first trench structure in an orthogonal direction perpendicular to the one direction and facing the first trench structure in the orthogonal direction; an interlayer film covering the main surface; and a resistive film arranged on the interlayer film so as to face the first trench structure with the interlayer film in between.

[0013] The present disclosure provides a semiconductor device including: a chip having a main surface; a trench gate structure formed on the main surface; a first trench source structure formed on the main surface at a distance from the trench gate structure in one direction and facing the trench gate structure in the one direction; a second trench source structure formed on the main surface at a distance from the trench gate structure in an orthogonal direction perpendicular to the one direction and facing the trench gate structure in the orthogonal direction; an interlayer film covering the main surface; and a resistive film arranged on the interlayer film to face the trench gate structure with the interlayer film in between.

[0014] The present disclosure provides a semiconductor device including a chip having a main surface, a trench structure formed on the main surface, an interlayer film including an insulating film without added impurities and covering the trench structure, and a resistive film arranged on the interlayer film so as to face the trench structure across the interlayer film.

[0015] The present disclosure provides a semiconductor device including a chip having a main surface, an interlayer film covering the main surface, a resistor disposed inside the interlayer film, a pad electrode having a first pad portion as a pad body and a second pad portion that penetrates a portion of the interlayer film and is connected to the resistor, and a pad insulating film that has a pad opening that exposes the first pad portion of the pad electrode and has a portion that covers the resistor across the second pad portion of the pad electrode.

[0016] The present disclosure provides a semiconductor device including a chip having a main surface, a first surface portion located inside the main surface, a second surface portion recessed in the thickness direction outside the first surface portion, and a mesa portion defined on the main surface by a connection surface portion connecting the first surface portion and the second surface portion, an interlayer film covering the first surface portion, and a resistive film arranged on the interlayer film so as to face the first surface portion.

[0017] The chip according to the present disclosure is preferably a “SiC chip.” In other words, the semiconductor device according to the present disclosure is preferably a “SiC semiconductor device.” The above and other objects, features, and advantages will become apparent from the detailed description that refers to the accompanying drawings.

[0018] FIG. 1 is a plan view showing a semiconductor device according to a specific embodiment. FIG. 2 is a cross-sectional view taken along line II-II in FIG. 1 . FIG. 3 is a plan view showing an example layout of the first main surface. FIG. 4 is an enlarged plan view showing an example layout of the active region. FIG. 5 is an enlarged plan view showing an example layout of the first side end region. FIG. 6 is an enlarged plan view showing an example layout of the first termination region. FIG. 7 is a cross-sectional view taken along line VII-VII in FIG. 4 . FIG. 8 is a cross-sectional view taken along line VIII-VIII in FIG. 4 . FIG. 9 is a cross-sectional view taken along line IX-IX in FIG. 5 . FIG. 10 is a cross-sectional view taken along line XX in FIG. 5 . FIG. 11 is a cross-sectional view taken along line XI-XI in FIG. 5 . FIG. 12 is a cross-sectional view taken along line XII-XII in FIG. 5 . FIG. 13 is a cross-sectional view taken along line XIII-XIII in FIG. 6 . FIG. 14 is a cross-sectional view showing the structure of the peripheral region. FIG. 15 is a plan view showing an example layout of a gate electrode and a source electrode. 16 is an enlarged plan view showing a main portion of FIG. 15 . FIG. 17 is a further enlarged plan view of a main portion of FIG. 16 . FIG. 18 is a plan view showing an example layout of the first main surface of the region shown in FIG. 17 . FIG. 19 is an enlarged plan view showing an example layout of the inner side of the pad region. FIG. 20 is an enlarged plan view showing an example layout of the peripheral side of the pad region. FIG. 21 is a cross-sectional view taken along line XXI-XXI shown in FIG. 20 . FIG. 22 is a cross-sectional view taken along line XXII-XXII shown in FIG. 21 . FIG. 23 is a cross-sectional view taken along line XXIII-XXIII shown in FIG. 21 . FIG. 24 is an enlarged cross-sectional view showing a main portion of FIG. 21 . FIG. 25 is a view showing another example layout of the pad region. FIG. 26 is a view showing another example layout of the pad region. FIG. 27 is a view showing another example layout of the pad region. FIG. 28 is a view showing another example layout of the pad region. FIG. 29 is a cross-sectional view showing another example of a chip. FIG. 30 is a cross-sectional view showing another example of a chip. Fig. 31A is a cross-sectional view showing an example of a method for manufacturing a semiconductor device. Fig. 31B is a cross-sectional view showing a step after Fig. 31A. Fig. 31C is a cross-sectional view showing a step after Fig. 31B. Fig. 31D is a cross-sectional view showing a step after Fig. 31C. Fig. 31E is a cross-sectional view showing a step after Fig. 31D. Fig. 31F is a cross-sectional view showing a step after Fig. 31E.Figure 31G is a cross-sectional view showing a step after Figure 31F. Figure 31H is a cross-sectional view showing a step after Figure 31G. Figure 31I is a cross-sectional view showing a step after Figure 31H. Figure 31J is a cross-sectional view showing a step after Figure 31I. Figure 31K is a cross-sectional view showing a step after Figure 31J. Figure 31L is a cross-sectional view showing a step after Figure 31K. Figure 31M is a cross-sectional view showing a step after Figure 31L. Figure 31N is a cross-sectional view showing a step after Figure 31M. Figure 31O is a cross-sectional view showing a step after Figure 31N. Figure 31P is a cross-sectional view showing a step after Figure 31O.

[0019] [Detailed Description] Hereinafter, embodiments will be described in detail with reference to the accompanying drawings. The accompanying drawings are schematic diagrams, are not strictly illustrated, and are not necessarily to scale. Corresponding structures among the accompanying drawings are given the same reference numerals, and duplicated descriptions will be omitted or simplified. For structures whose descriptions are omitted or simplified, the descriptions given before the omission or simplification apply.

[0020] When the term "substantially equal" is used in a description in which a comparison target is present, this term includes a numerical value (form) equal to the numerical value (form) of the comparison target, as well as a numerical error (form error) within a range of ±10% based on the numerical value (form) of the comparison target. In the following description, terms such as "first," "second," and "third" are used, but these are symbols attached to the names of each structure to clarify the order of description, and are not intended to limit the names of each structure.

[0021] In the following description, the conductivity type of a semiconductor region (impurity region) is indicated using "p-type" or "n-type," but "p-type" may also be referred to as the "first conductivity type" and "n-type" as the "second conductivity type." Of course, "n-type" may also be referred to as the "first conductivity type" and "p-type" as the "second conductivity type." The "p-type" is a conductivity type resulting from a trivalent element, and the "n-type" is a conductivity type resulting from a pentavalent element. Unless otherwise specified, the trivalent element is at least one of boron, aluminum, gallium, and indium. Unless otherwise specified, the pentavalent element is at least one of nitrogen, phosphorus, arsenic, antimony, and bismuth.

[0022] FIG. 1 is a plan view showing a semiconductor device 1 according to a specific embodiment. FIG. 2 is a cross-sectional view taken along line II-II shown in FIG. 1. FIG. 3 is a plan view showing an example layout of a first main surface 3. The semiconductor device 1 is a semiconductor switching device including an insulated gate transistor structure. The transistor structure may be referred to as a MISFET (Metal Insulator Semiconductor Field Effect Transistor) structure.

[0023] 1 to 3, in this embodiment, a semiconductor device 1 includes a chip 2 that includes a single crystal of a wide bandgap semiconductor and is formed in a hexahedral shape (specifically, a rectangular parallelepiped shape). In other words, the semiconductor device 1 is a "wide bandgap semiconductor device." The chip 2 may also be referred to as a "semiconductor chip," a "wide bandgap semiconductor chip," or the like. A wide bandgap semiconductor is a semiconductor that has a bandgap that exceeds the bandgap of Si (silicon). Examples of wide bandgap semiconductors include GaN (gallium nitride), SiC (silicon carbide), and C (diamond).

[0024] In this embodiment, the chip 2 is a "SiC chip" that includes a hexagonal SiC single crystal as an example of a wide bandgap semiconductor. In other words, the semiconductor device 1 is a "SiC semiconductor device." The semiconductor device 1 may also be referred to as a "SiC-MISFET." The hexagonal SiC single crystal has multiple polytypes, including 2H (Hexagonal)-SiC single crystal, 4H-SiC single crystal, 6H-SiC single crystal, and the like. In this embodiment, an example is shown in which the chip 2 includes a 4H-SiC single crystal, but the chip 2 may include other polytypes.

[0025] The chip 2 has a first main surface 3 on one side, a second main surface 4 on the other side, and first to fourth side surfaces 5A to 5D connecting the first main surface 3 and the second main surface 4. The first main surface 3 and the second main surface 4 are formed in a quadrangular shape when viewed in a plan view from their normal direction Z (hereinafter simply referred to as "plan view"). The normal direction Z is also the thickness direction of the chip 2. The first main surface 3 and the second main surface 4 are preferably formed by the c-plane of a SiC single crystal.

[0026] In this case, it is preferable that the first main surface 3 is formed by the silicon surface ((0001) surface) of the SiC single crystal, and the second main surface 4 is formed by the carbon surface ((000-1) surface) of the SiC single crystal. The first main surface 3 and the second main surface 4 may have an off angle inclined at a predetermined angle in a predetermined off direction with respect to the c-plane. The off direction is preferably the a-axis direction ([11-20] direction) of the SiC single crystal. The off angle may be more than 0° and not more than 10°. The off angle is preferably not more than 5°.

[0027] The first side surface 5A and the second side surface 5B extend in a first direction X along the first main surface 3 and face a second direction Y that intersects (specifically, is perpendicular to) the first direction X. The third side surface 5C and the fourth side surface 5D extend in the second direction Y and face the first direction X. The first direction X may be the m-axis direction ([1-100] direction) of the SiC single crystal, and the second direction Y may be the a-axis direction of the SiC single crystal. Of course, the first direction X may be the a-axis direction of the SiC single crystal, and the second direction Y may be the m-axis direction of the SiC single crystal.

[0028] Hereinafter, the third side surface 5C side in the first direction X may be referred to as one side of the first direction X, and the fourth side surface 5D side in the first direction X may be referred to as the other side of the first direction X. Furthermore, the first side surface 5A side in the second direction Y may be referred to as one side of the second direction Y, and the second side surface 5B side in the second direction Y may be referred to as the other side of the second direction Y.

[0029] The chip 2 may have a thickness of 5 μm or more and 200 μm or less. The thickness of the chip 2 may be set to a value belonging to any one of the following ranges: 5 μm or more and 25 μm or less, 25 μm or more and 50 μm or less, 50 μm or more and 75 μm or less, 75 μm or more and 100 μm or less, 100 μm or more and 125 μm or less, 125 μm or more and 150 μm or less, 150 μm or more and 175 μm or less, and 175 μm or more and 200 μm or less. The thickness of the chip 2 is preferably 100 μm or less.

[0030] The first to fourth side surfaces 5A to 5D may have lengths of 0.5 mm or more and 20 mm or less in plan view. The lengths of the first to fourth side surfaces 5A to 5D may be set to a value belonging to any one of the ranges of 0.5 mm or more and 5 mm or less, 5 mm or more and 10 mm or less, 10 mm or more and 15 mm or less, and 15 mm or more and 20 mm or less. The lengths of the first to fourth side surfaces 5A to 5D are preferably 5 mm or more.

[0031] The semiconductor device 1 includes an n-type first semiconductor region 6 formed in a region (surface layer portion) on the first main surface 3 side of the chip 2. A drain potential as a high potential (first potential) is applied to the first semiconductor region 6. The first semiconductor region 6 may also be referred to as a "drain region," a "drift region," or the like. The first semiconductor region 6 is formed in a layer shape extending along the first main surface 3 and is exposed from the first main surface 3 and the first to fourth side surfaces 5A to 5D. In this embodiment, the first semiconductor region 6 is made of an epitaxial layer (specifically, a SiC epitaxial layer).

[0032] The first semiconductor region 6 may have a thickness of 1 μm or more and 50 μm or less. The thickness of the first semiconductor region 6 is preferably 3 μm or more and 30 μm or less. The thickness of the first semiconductor region 6 is particularly preferably 5 μm or more and 25 μm or less.

[0033] The semiconductor device 1 includes an n-type second semiconductor region 7 formed in a region (surface layer) on the second main surface 4 side within the chip 2. A drain potential is applied to the second semiconductor region 7. The second semiconductor region 7 may also be referred to as a "drain region." The second semiconductor region 7 has a higher n-type impurity concentration than the first semiconductor region 6, and is electrically connected to the first semiconductor region 6 within the chip 2. The second semiconductor region 7 is formed in a layer shape extending along the second main surface 4, and is exposed from the second main surface 4 and the first to fourth side surfaces 5A to 5D.

[0034] In this embodiment, the second semiconductor region 7 is made of a semiconductor substrate (specifically, a SiC semiconductor substrate). That is, the chip 2 has a layered structure including a semiconductor substrate and an epitaxial layer. The second semiconductor region 7 may have a thickness of 1 μm or more and 200 μm or less. The thickness of the second semiconductor region 7 may be 150 μm or less, 100 μm or less, 50 μm or less, or 40 μm or less. The thickness of the second semiconductor region 7 may be 5 μm or more. The thickness of the second semiconductor region 7 is preferably 10 μm or more. In this embodiment, the thickness of the second semiconductor region 7 is greater than the thickness of the first semiconductor region 6.

[0035] The semiconductor device 1 includes an active surface 8, an outer surface 9, and first to fourth connecting surfaces 10A to 10D formed on the first main surface 3. The active surface 8, outer surface 9, and first to fourth connecting surfaces 10A to 10D define an active plateau 11 on the first main surface 3.

[0036] The active surface 8 may be referred to as the “first surface portion,” the outer peripheral surface 9 may be referred to as the “second surface portion,” the first to fourth connecting surfaces 10A to 10D may be referred to as “connecting surface portions,” and the active plateau 11 may be referred to as the “mesa portion.” The active surface 8, the outer peripheral surface 9, and the first to fourth connecting surfaces 10A to 10D (i.e., the active plateau 11) may be considered to be components of the chip 2 (first main surface 3).

[0037] The active surface 8 is formed at a distance inward from the periphery (first to fourth side surfaces 5A to 5D) of the first main surface 3. The active surface 8 has a flat surface extending in the first direction X and the second direction Y. In this embodiment, the active surface 8 is formed by the c-plane (Si-plane). In this embodiment, the active surface 8 is formed in a quadrilateral shape having four sides parallel to the first to fourth side surfaces 5A to 5D in a plan view.

[0038] The outer peripheral surface 9 is located outside the active surface 8 and is recessed in the thickness direction of the chip 2 (toward the second main surface 4) relative to the active surface 8. Specifically, the outer peripheral surface 9 is recessed to a depth less than the thickness of the first semiconductor region 6 so as to expose the first semiconductor region 6. The outer peripheral surface 9 extends in a band shape along the active surface 8 in a plan view and is formed in a ring shape (specifically, a quadrangular ring) surrounding the active surface 8.

[0039] The outer peripheral surface 9 has a flat surface extending in the first direction X and the second direction Y, and is formed substantially parallel to the active surface 8. In this embodiment, the outer peripheral surface 9 is formed by the c-plane (Si-plane). The outer peripheral surface 9 is continuous with the first to fourth side surfaces 5A to 5D. The outer peripheral surface 9 has a circumferential depth DO. The circumferential depth DO may be 0.1 μm or more and 5 μm or less. The circumferential depth DO is preferably 2.5 μm or less.

[0040] The first to fourth connection surfaces 10A to 10D extend in the normal direction Z and connect the active surface 8 and the outer peripheral surface 9. The first connection surface 10A is located on the first side surface 5A side, the second connection surface 10B is located on the second side surface 5B side, the third connection surface 10C is located on the third side surface 5C side, and the fourth connection surface 10D is located on the fourth side surface 5D side. The first connection surface 10A and the second connection surface 10B extend in the first direction X and face the second direction Y. The third connection surface 10C and the fourth connection surface 10D extend in the second direction Y and face the first direction X.

[0041] The first to fourth connection surfaces 10A to 10D may extend substantially perpendicularly between the active surface 8 and the outer peripheral surface 9 so as to define a quadrangular pillar-shaped active plateau 11. The first to fourth connection surfaces 10A to 10D may be inclined obliquely downward from the active surface 8 toward the outer peripheral surface 9 so as to define a quadrangular pyramid-shaped active plateau 11. In this way, the active plateau 11 is defined in a protruding shape in the first semiconductor region 6 on the first main surface 3. The active plateau 11 is formed only in the first semiconductor region 6, and is not formed in the second semiconductor region 7.

[0042] 3, semiconductor device 1 includes, on first main surface 3, active region 12, first side end region 13, second side end region 14, first termination region 15, second termination region 16, and outer periphery region 17. Active region 12 is a region where the output current (drain current) of the transistor is generated. Active region 12 is provided in an inner portion of active surface 8 and spaced apart from the periphery of active surface 8 (first to fourth connection surfaces 10A to 10D). In this embodiment, active region 12 is provided in a quadrangular shape having four sides parallel to first to fourth side surfaces 5A to 5D in a plan view.

[0043] The proportion of the active region 12 in the active surface 8 is preferably 50% or more and 95% or less. The proportion of the active region 12 may be a value belonging to any one of the ranges of 50% or more and 60% or more, 60% or more and 70% or less, 70% or more and 80% or less, 80% or more and 90% or less, and 90% or more and 95% or less. The proportion of the active region 12 is preferably 70% or more.

[0044] The first side end region 13 is provided as a non-active region on one side (the third connection surface 10C side) in the first direction X with respect to the active region 12 on the active surface 8. The first side end region 13 is provided in a strip shape extending in the second direction Y in a plan view.

[0045] The second side end region 14 is provided as a non-active region on the active surface 8 on the other side in the first direction X (toward the fourth connection surface 10D) of the active region 12, and faces the first side end region 13 across the active region 12 in the first direction X. The second side end region 14 is provided in a strip shape extending in the second direction Y in a plan view.

[0046] The first termination region 15 is provided as an inactive region on one side in the second direction Y (the first connection surface 10A side) of the active region 12. In this embodiment, the first termination region 15 is provided in a strip shape extending in the first direction X in a plan view. The first termination region 15 faces the active region 12, the first side end region 13, and the second side end region 14 in the second direction Y.

[0047] The second termination region 16 is provided as an inactive region on the other side in the second direction Y (the second connection surface 10B side) of the active region 12. In this embodiment, the second termination region 16 is provided in a strip shape extending in the first direction X in a plan view. The second termination region 16 faces the active region 12, the first side end region 13, and the second side end region 14 in the second direction Y.

[0048] The outer peripheral region 17 is provided on the outer peripheral surface 9 as a non-active region. In this embodiment, the outer peripheral region 17 is provided in a ring shape (specifically, a rectangular ring shape) surrounding the active surface 8 (active plateau 11) in a plan view. That is, the outer peripheral region 17 surrounds the active region 12, the first side end region 13, the second side end region 14, the first termination region 15, and the second termination region 16 in a plan view.

[0049] 4 is an enlarged plan view showing an example layout of the active region 12. FIG. 5 is an enlarged plan view showing an example layout of the first side end region 13. FIG. 6 is an enlarged plan view showing an example layout of the first termination region 15. FIG. 7 is a cross-sectional view taken along line VII-VII in FIG. 4. FIG. 8 is a cross-sectional view taken along line VIII-VIII in FIG. 4.

[0050] Fig. 9 is a cross-sectional view taken along line IX-IX in Fig. 5. Fig. 10 is a cross-sectional view taken along line XX in Fig. 5. Fig. 11 is a cross-sectional view taken along line XI-XI in Fig. 5. Fig. 12 is a cross-sectional view taken along line XII-XII in Fig. 5. Fig. 13 is a cross-sectional view taken along line XIII-XIII in Fig. 6. Fig. 14 is a cross-sectional view showing the structure of the outer peripheral region 17.

[0051] 4 to 14 mainly show the layout on the third connecting surface 10C side (third side surface 5C side). Because the layout on the fourth connecting surface 10D side (fourth side surface 5D side) is substantially the same as the layout on the third side surface 5C side, the third connecting surface 10C side will be mainly described below. The layout on the fourth connecting surface 10D side can be obtained by replacing "first side end region 13" with "second side end region 14" and "third connecting surface 10C" with "fourth connecting surface 10D" in the following description.

[0052] 4 to 14 , semiconductor device 1 includes p-type body region 18 (first impurity region) formed in a surface layer portion of first main surface 3 (active surface 8). Body region 18 is formed at an interval from the bottom of first semiconductor region 6 toward active surface 8. Body region 18 is formed in a layer shape extending along active surface 8. Body region 18 is preferably formed over the entire active surface 8 and exposed from first to fourth connecting surfaces 10A to 10D.

[0053] The semiconductor device 1 includes an n-type source region 19 (second impurity region) formed in a surface layer portion of the body region 18 in the active region 12. The source region 19 is formed at a distance from the bottom of the body region 18 toward the active surface 8. In other words, the source region 19 is formed in a region on the active surface 8 side of the body region 18. The source region 19 has a higher n-type impurity concentration than the first semiconductor region 6. The source region 19 forms a transistor channel together with the first semiconductor region 6 in the body region 18.

[0054] In this embodiment, the source region 19 is not formed in the first side end region 13, the second side end region 14, the first termination region 15, or the second termination region 16. Of course, the source region 19 may be formed in at least one of the first side end region 13, the second side end region 14, the first termination region 15, and the second termination region 16, as long as the source region 19 does not affect the electrical characteristics of the channel. Alternatively, the source region 19 may be formed over the entire active surface 8.

[0055] The semiconductor device 1 includes a plurality of trench electrode type trench structures 20 formed on the first main surface 3 (active surface 8). In this embodiment, the plurality of trench structures 20 includes a plurality of trench gate structures 21, a plurality of trench source structures 22, a plurality of trench side edge structures 23, and a plurality of trench termination structures 24. In other words, the plurality of trench structures 20 includes a plurality of trench electrode type gate structures, a plurality of trench electrode type source structures, a plurality of trench electrode type side edge structures, and a plurality of trench electrode type termination structures.

[0056] A gate potential as a control potential is applied to the trench gate structure 21. A source potential as a low potential (a second potential lower than the drain potential) is applied to the trench source structure 22. A source potential is applied to the trench side end structure 23. A source potential is applied to the trench termination structure 24.

[0057] Trench source structure 22 may be referred to as a "first trench source structure," trench side edge structure 23 may be referred to as a "second trench source structure," and trench termination structure 24 may be referred to as a "third trench source structure." Trench side edge structure 23 may also be referred to as a "first dummy trench structure," and trench termination structure 24 may also be referred to as a "second dummy trench structure."

[0058] The plurality of trench gate structures 21 are arranged inwardly at intervals from the periphery (first to fourth connection surfaces 10A to 10D) of the active surface 8 in the active region 12, and define the active region 12 in the inner part of the active surface 8. The plurality of trench gate structures 21 are each formed in a strip shape extending in the first direction X in a plan view, and are arranged at intervals in the second direction Y.

[0059] The plurality of trench gate structures 21 penetrate the body region 18 and the source region 19 to reach the first semiconductor region 6. The plurality of trench gate structures 21 are formed at intervals from the bottom of the first semiconductor region 6 toward the active surface 8. The plurality of trench gate structures 21 control inversion and non-inversion of the channel in the body region 18 in response to a gate potential.

[0060] Each trench gate structure 21 has a first width W1 in the second direction Y and a first depth D1 in the normal direction Z. The first width W1 may be 0.1 μm or more and 3 μm or less. The first width W1 is preferably 0.5 μm or more and 2 μm or less. The first depth D1 is less than the aforementioned peripheral depth DO. The first depth D1 may be 0.1 μm or more and 3 μm or less. The first depth D1 is preferably 0.5 μm or more and 1.5 μm or less.

[0061] Each trench gate structure 21 includes a first trench 25, a first insulating film 26, and a first buried electrode 27. The first trench 25 is formed in the active surface 8 and defines the wall surface of the trench gate structure 21. The first insulating film 26 covers the wall surface of the first trench 25. The first insulating film 26 may include at least one of a silicon oxide film, a silicon nitride film, and a silicon oxynitride film.

[0062] In this embodiment, the first insulating film 26 has a single-layer structure made of a silicon oxide film. It is particularly preferable that the first insulating film 26 includes a silicon oxide film made of an oxide of the chip 2. The first buried electrode 27 is embedded in the first trench 25 across the first insulating film 26 and faces the channel across the first insulating film 26. The first buried electrode 27 may include p-type or n-type conductive polysilicon.

[0063] The plurality of trench source structures 22 are respectively formed in the active surface 8 so as to be adjacent to the plurality of trench gate structures 21 in the second direction Y in the active region 12. That is, the plurality of trench source structures 22 are respectively disposed in regions between pairs of adjacent trench gate structures 21 and face the plurality of trench gate structures 21 in the second direction Y. That is, the plurality of trench source structures 22 are arranged alternately with the plurality of trench gate structures 21 in the second direction Y.

[0064] The plurality of trench source structures 22 are each formed in a strip shape extending in the first direction X in a plan view. In this embodiment, the plurality of trench source structures 22 extend from the active region 12 to the first side end region 13 and the second side end region 14. The plurality of trench source structures 22 face the trench gate structure 21 in the second direction Y in the active region 12, but do not face the trench gate structure 21 in the second direction Y in the first side end region 13.

[0065] The plurality of trench source structures 22 are exposed from at least one of the third connection surface 10C and the fourth connection surface 10D. In this embodiment, the plurality of trench source structures 22 penetrate both the third connection surface 10C and the fourth connection surface 10D and are exposed from both the third connection surface 10C and the fourth connection surface 10D.

[0066] The plurality of trench source structures 22 penetrates the body region 18 and the source region 19 to reach the first semiconductor region 6 in the active region 12. The plurality of trench source structures 22 penetrates the body region 18 to reach the first semiconductor region 6 in the first side end region 13. The plurality of trench source structures 22 are formed at intervals from the bottom of the first semiconductor region 6 toward the active surface 8.

[0067] Each trench source structure 22 has a second width W2 in the second direction Y and a second depth D2 in the normal direction Z. The second width W2 may be approximately equal to the aforementioned first width W1. The second width W2 may be greater than the first width W1. The second width W2 may be 0.1 μm or more and 3 μm or less. Preferably, the second width W2 is 0.5 μm or more and 2 μm or less.

[0068] The second depth D2 is equal to or greater than the first depth D1 described above. In this embodiment, the second depth D2 is greater than the first depth D1. The second depth D2 is preferably 1.5 to 3 times the first depth D1. In this embodiment, the second depth D2 is approximately equal to the outer circumferential depth DO described above. The second depth D2 may be 0.1 μm to 5 μm. It is particularly preferable that the second depth D2 be 2.5 μm or less.

[0069] Each trench source structure 22 is disposed at a first interval I1 in the second direction Y from the trench gate structure 21. The first interval I1 is preferably 0.5 to 2 times the first width W1 (second width W2). It is particularly preferable that the first interval I1 be less than the first width W1 (second width W2). The first interval I1 may be 0.1 μm to 2.5 μm. The first interval I1 is preferably 0.5 μm to 1.5 μm.

[0070] Each trench source structure 22 includes a second trench 28, a second insulating film 29, and a second buried electrode 30. The second trench 28 is formed in the active surface 8 and defines the wall surface of the trench source structure 22. In this embodiment, the sidewall of the second trench 28 communicates with the third connection surface 10C and the fourth connection surface 10D. The bottom wall of the second trench 28 communicates with the outer peripheral surface 9.

[0071] The second insulating film 29 covers the wall surface of the second trench 28. The second insulating film 29 may include at least one of a silicon oxide film, a silicon nitride film, and a silicon oxynitride film. In this embodiment, the second insulating film 29 has a single-layer structure made of a silicon oxide film. It is particularly preferable that the second insulating film 29 includes a silicon oxide film made of an oxide of the chip 2. The second buried electrode 30 is buried in the second trench 28 with the second insulating film 29 sandwiched therebetween. The second buried electrode 30 may include p-type or n-type conductive polysilicon.

[0072] A plurality of trench side end structures 23 are formed on the first main surface 3 (active surface 8) in the first side end region 13. Although not specifically shown in the drawings, a plurality of trench side end structures 23 are also formed in the second side end region 14. The configuration on the second side end region 14 side is the same as the configuration on the first side end region 13 side. The description on the first side end region 13 side applies to the description on the second side end region 14 side.

[0073] The plurality of trench side end structures 23 are respectively arranged in the first side end region 13 on the periphery of the active surface 8 (third connection surface 10C) and in regions between the plurality of trench gate structures 21. The plurality of trench side end structures 23 face the plurality of trench gate structures 21 in a one-to-one correspondence in the first direction X.

[0074] Furthermore, the multiple trench side end structures 23 are respectively arranged in regions between pairs of trench source structures 22 adjacent to each other in the second direction Y, and face the multiple trench source structures 22 in the second direction Y. In other words, the multiple trench side end structures 23 are arranged alternately with the multiple trench source structures 22 in the second direction Y. The multiple trench side end structures 23 are each formed in a strip shape extending in the first direction X in a plan view.

[0075] In this embodiment, the plurality of trench end structures 23 on the first side end region 13 side penetrate through the third connection surface 10C and are exposed from the third connection surface 10C. The plurality of trench end structures 23 on the second side end region 14 side penetrate through the fourth connection surface 10D and are exposed from the fourth connection surface 10D. The plurality of trench end structures 23 penetrate through the body region 18 to reach the first semiconductor region 6. The plurality of trench end structures 23 are formed at intervals from the bottom of the first semiconductor region 6 toward the active surface 8.

[0076] Like the trench source structure 22, each trench side end structure 23 has a second width W2 in the second direction Y and a second depth D2 in the normal direction Z. Each trench side end structure 23 is disposed at a second distance I2 from the trench gate structure 21 in the first direction X, and at a third distance I3 from the trench source structure 22 in the second direction Y.

[0077] The second interval I2 is preferably 0.5 to 2 times the first width W1 (second width W2). The second interval I2 is preferably 0.5 to 2 times the first interval I1. It is particularly preferable that the second interval I2 be 1.5 times or less the first interval I1. The second interval I2 may be approximately equal to the first interval I1. The second interval I2 may be 0.1 μm to 2.5 μm. The second interval I2 is preferably 0.5 μm to 1.5 μm.

[0078] The third interval I3 is preferably 0.5 to 2 times the first width W1 (second width W2). The third interval I3 may be less than the second width W2. The third interval I3 is preferably approximately equal to the first interval I1. The third interval I3 may be 0.1 μm to 2.5 μm. The third interval I3 is preferably 0.5 μm to 1.5 μm.

[0079] Each trench side end structure 23 includes a third trench 31, a third insulating film 32, and a third buried electrode 33. The third trench 31 is formed in the active surface 8 and defines the wall surface of the trench side end structure 23. The sidewall of the third trench 31 communicates with the third connection surface 10C. The bottom wall of the third trench 31 communicates with the outer peripheral surface 9.

[0080] The third insulating film 32 covers the wall surface of the third trench 31. The third insulating film 32 may include at least one of a silicon oxide film, a silicon nitride film, and a silicon oxynitride film. In this embodiment, the third insulating film 32 has a single-layer structure made of a silicon oxide film. It is particularly preferable that the third insulating film 32 includes a silicon oxide film made of an oxide of the chip 2. The third buried electrode 33 is buried in the third trench 31 with the third insulating film 32 sandwiched therebetween. The third buried electrode 33 may include p-type or n-type conductive polysilicon.

[0081] A plurality of trench termination structures 24 are formed on the first major surface 3 (active surface 8) in the first termination region 15. Although not specifically shown, a plurality of trench termination structures 24 are also formed in the second termination region 16. The configuration on the second termination region 16 side is similar to the configuration on the first termination region 15 side. The description on the first termination region 15 side applies to the description on the second termination region 16 side.

[0082] The multiple trench termination structures 24 are each formed in a strip shape extending in the first direction X and are arranged at intervals in the second direction Y. The multiple trench termination structures 24 are arranged continuously at equal intervals in the second direction Y so as to face each other with a part of the chip 2 in between. In other words, the multiple trench termination structures 24 face each other without sandwiching the trench gate structure 21 between them.

[0083] The plurality of trench termination structures 24 face the plurality of trench gate structures 21 and the plurality of trench source structures 22 in the second direction Y. The plurality of trench termination structures 24 are exposed from at least one of the third connection surface 10C and the fourth connection surface 10D. In this embodiment, the plurality of trench termination structures 24 penetrate both the third connection surface 10C and the fourth connection surface 10D and are exposed from both the third connection surface 10C and the fourth connection surface 10D.

[0084] That is, the plurality of trench termination structures 24 face the plurality of trench gate structures 21, the plurality of trench source structures 22, and the plurality of trench side end structures 23 in the second direction Y. The plurality of trench termination structures 24 penetrate the body region 18 to reach the first semiconductor region 6. The plurality of trench termination structures 24 are formed at intervals from the bottom of the first semiconductor region 6 toward the active surface 8.

[0085] Each trench termination structure 24, like the trench source structures 22, has a second width W2 in the second direction Y and a second depth D2 in the normal direction Z. When the termination of the active region 12 is formed by the trench gate structure 21, the trench termination structure 24 is disposed at the first distance I1 described above from the trench gate structure 21. When the termination of the active region 12 is formed by the trench source structure 22, the trench termination structure 24 is disposed at the first distance I1 described above from the trench source structure 22.

[0086] Each trench termination structure 24 includes a fourth trench 34, a fourth insulating film 35, and a fourth buried electrode 36. The fourth trench 34 is formed in the active surface 8 and defines the wall surface of the trench termination structure 24. The sidewall of the fourth trench 34 communicates with the third connection surface 10C. The bottom wall of the fourth trench 34 communicates with the outer peripheral surface 9.

[0087] The fourth insulating film 35 covers the wall surface of the fourth trench 34. The fourth insulating film 35 may include at least one of a silicon oxide film, a silicon nitride film, and a silicon oxynitride film. In this embodiment, the fourth insulating film 35 has a single-layer structure made of a silicon oxide film. It is particularly preferable that the fourth insulating film 35 includes a silicon oxide film made of an oxide of the chip 2. The fourth buried electrode 36 is buried in the fourth trench 34 with the fourth insulating film 35 sandwiched therebetween. The fourth buried electrode 36 may include p-type or n-type conductive polysilicon.

[0088] The semiconductor device 1 includes a plurality of p-type first well regions 41 formed in regions along the plurality of trench gate structures 21 in the surface layer portion of the active surface 8 of the active region 12. In this embodiment, the first well regions 41 have a p-type impurity concentration higher than the p-type impurity concentration of the body region 18. Of course, the p-type impurity concentration of the first well regions 41 may be lower than the p-type impurity concentration of the body region 18.

[0089] The plurality of first well regions 41 cover the wall surfaces of the corresponding trench gate structures 21 at intervals from the adjacent trench source structures 22, and are electrically connected to the body region 18 in the surface layer portion of the active surface 8. The plurality of first well regions 41 are formed at intervals from the bottom of the first semiconductor region 6 toward the active surface 8, and face the second semiconductor region 7 with a part of the first semiconductor region 6 interposed therebetween. The plurality of first well regions 41 form pn junctions with the first semiconductor region 6.

[0090] The semiconductor device 1 includes a plurality of p-type second well regions 42 formed in regions along the plurality of trench source structures 22 in a surface layer portion of the active surface 8 of the active region 12. In this embodiment, the second well regions 42 have a p-type impurity concentration higher than the p-type impurity concentration of the body region 18. Of course, the p-type impurity concentration of the second well regions 42 may be lower than the p-type impurity concentration of the body region 18. It is preferable that the p-type impurity concentration of the second well regions 42 is approximately equal to the p-type impurity concentration of the first well region 41.

[0091] The plurality of second well regions 42 cover the wall surfaces of the corresponding trench source structures 22 at intervals from the adjacent trench gate structures 21, and are electrically connected to the body region 18 in the surface portion of the active surface 8. The plurality of second well regions 42 cover the wall surfaces of the corresponding trench source structures 22 in the active region 12, the first side end region 13, and the second side end region 14, and are exposed from the third connection surface 10C and the fourth connection surface 10D.

[0092] The second well regions 42 are formed at intervals from the bottom of the first semiconductor region 6 toward the active surface 8, and face the second semiconductor region 7 across a part of the first semiconductor region 6. The bottoms of the second well regions 42 are located closer to the bottom of the first semiconductor region 6 than the depth positions of the bottoms of the first well regions 41. The second well regions 42 form pn junctions with the first semiconductor region 6.

[0093] The semiconductor device 1 includes a plurality of p-type third well regions 43 formed in a surface layer portion of the active surface 8 of the first side end region 13 (second side end region 14) in a region along the plurality of trench side end structures 23. In this embodiment, the third well regions 43 have a p-type impurity concentration higher than the p-type impurity concentration of the body region 18. Of course, the p-type impurity concentration of the third well regions 43 may be lower than the p-type impurity concentration of the body region 18. It is preferable that the p-type impurity concentration of the third well regions 43 is approximately equal to the p-type impurity concentration of the first well region 41 (second well region 42).

[0094] The plurality of third well regions 43 cover the wall surfaces of the corresponding trench side end structures 23 at intervals from the adjacent trench gate structures 21 and trench source structures 22, and are electrically connected to the body region 18 in the surface layer portion of the active surface 8. Of course, the third well regions 43 may be integrated with the first well region 41 in the region between the trench gate structures 21 and the trench side end structures 23. The plurality of third well regions 43 are exposed from the third connection surface 10C.

[0095] The plurality of third well regions 43 are formed at intervals from the bottom of the first semiconductor region 6 toward the active surface 8, and face the second semiconductor region 7 across a part of the first semiconductor region 6. The bottoms of the plurality of third well regions 43 are located closer to the bottom of the first semiconductor region 6 than the depth positions of the bottoms of the plurality of first well regions 41. The bottoms of the plurality of third well regions 43 are formed at approximately the same depth as the bottoms of the plurality of second well regions 42. The plurality of third well regions 43 form pn junctions with the first semiconductor region 6.

[0096] Semiconductor device 1 includes at least one (in this embodiment, multiple) p-type fourth well region 44 formed in first termination region 15 (second termination region 16) in a region along multiple trench termination structures 24. In this embodiment, fourth well region 44 has a higher p-type impurity concentration than body region 18. Of course, the p-type impurity concentration of fourth well region 44 may be lower than that of body region 18. The p-type impurity concentration of fourth well region 44 is preferably approximately equal to the p-type impurity concentration of first well region 41 (second well region 42).

[0097] The plurality of fourth well regions 44 cover the wall surfaces of the corresponding trench termination structures 24 at intervals from adjacent trench termination structures 24, and are electrically connected to body region 18 in the surface portion of active surface 8. The plurality of fourth well regions 44 extend in a strip shape along the corresponding trench termination structures 24 in a plan view, and are exposed from third connection surface 10C and fourth connection surface 10D.

[0098] The multiple fourth well regions 44 are formed at intervals from the bottom of the first semiconductor region 6 toward the active surface 8, and face the second semiconductor region 7 across a part of the first semiconductor region 6. The bottoms of the multiple fourth well regions 44 are located closer to the bottom of the first semiconductor region 6 than the depth positions of the bottoms of the multiple first well regions 41. The bottoms of the multiple fourth well regions 44 are preferably formed at approximately the same depth as the bottoms of the multiple second well regions 42. The multiple fourth well regions 44 form pn junctions with the first semiconductor region 6.

[0099] The semiconductor device 1 includes a plurality of p-type contact regions 45 formed in regions along the plurality of trench source structures 22 in a surface layer portion of the active surface 8 of the active region 12. The contact regions 45 may also be referred to as "back gate regions." The contact regions 45 have a p-type impurity concentration higher than the p-type impurity concentration of the body region 18. The p-type impurity concentration of the contact regions 45 is higher than the p-type impurity concentration of the second well region 42.

[0100] The plurality of contact regions 45 cover the wall surfaces of the corresponding trench source structures 22 in the corresponding second well regions 42. The plurality of contact regions 45 are formed in a one-to-many correspondence with each trench source structure 22. The plurality of contact regions 45 are formed at intervals along the corresponding trench source structures 22.

[0101] The plurality of contact regions 45 extend from within the corresponding second well region 42 to the surface portion of the body region 18 along the wall surfaces of the corresponding trench source structures 22 and are exposed from the active surface 8. The plurality of contact regions 45 are formed in the active region 12, but are not formed in the first side end region 13, the second side end region 14, the first termination region 15, or the second termination region 16. In other words, the contact regions 45 are not formed in the third well region 43 or the fourth well region 44. Furthermore, the plurality of contact regions 45 face the trench gate structure 21 in the second direction Y, but do not face the trench side end structure 23 in the second direction Y.

[0102] In this embodiment, the plurality of contact regions 45 are each formed in a strip shape extending in the first direction X in a plan view. The length of each of the plurality of contact regions 45 in the first direction X is preferably equal to or greater than the second width W2. The length of each of the plurality of contact regions 45 is preferably greater than the distance between two adjacent contact regions 45 in the first direction X.

[0103] The plurality of contact regions 45 along one trench source structure 22 face the plurality of contact regions 45 along another trench source structure 22 in the second direction Y. That is, in this embodiment, the plurality of contact regions 45 are arranged in a matrix form at intervals in the first direction X and the second direction Y as a whole in a plan view.

[0104] The plurality of contact regions 45 along one trench source structure 22 may be arranged offset in the first direction X so as to face the regions between the plurality of contact regions 45 along another trench source structure 22 in the second direction Y. In other words, the plurality of contact regions 45 may be arranged in a staggered pattern as a whole in a plan view with intervals in the first direction X and the second direction Y.

[0105] 14 , the semiconductor device 1 includes a p-type outer well region 46 formed in a surface layer portion of the outer peripheral surface 9. The outer well region 46 has a p-type impurity concentration lower than the p-type impurity concentration of the contact region 45. In this embodiment, the p-type impurity concentration of the outer well region 46 is higher than the p-type impurity concentration of the body region 18. Of course, the p-type impurity concentration of the outer well region 46 may be lower than that of the body region 18. It is preferable that the outer well region 46 has a p-type impurity concentration approximately equal to that of the first well region 41 (second well region 42).

[0106] The outer well region 46 is formed in a plan view at a distance from the periphery of the outer peripheral surface 9 (first to fourth side surfaces 5A to 5D) toward the active surface 8, and extends in a band shape along the active surface 8. In this embodiment, the outer well region 46 is formed in a ring shape (specifically, a quadrangular ring) that surrounds the active surface 8 in a plan view. The outer well region 46 extends from the surface layer portion of the outer peripheral surface 9 toward the surface layer portions of the first to fourth connecting surfaces 10A to 10D, and covers the first to fourth connecting surfaces 10A to 10D.

[0107] The outer well region 46 is electrically connected to the body region 18 in a surface layer portion of the active surface 8. The outer well region 46 is also connected to the second well region 42, the third well region 43, and the fourth well region 44 at the third connection surface 10C (fourth connection surface 10D).

[0108] The outer well region 46 is formed at a distance from the bottom of the first semiconductor region 6 toward the outer circumferential surface 9, and faces the second semiconductor region 7 across a part of the first semiconductor region 6. The bottom of the outer well region 46 is located closer to the bottom of the first semiconductor region 6 than the bottom wall of the trench gate structure 21.

[0109] Specifically, the bottom of the outer well region 46 is located closer to the bottom of the first semiconductor region 6 than the bottom wall of the trench source structure 22. The bottom of the outer well region 46 is located closer to the bottom of the first semiconductor region 6 than the bottom of the contact region 45. The bottom of the outer well region 46 is preferably formed at a depth position substantially equal to the bottom of the second well region 42. The outer well region 46 forms a pn junction with the first semiconductor region 6.

[0110] The semiconductor device 1 includes a p-type outer contact region 47 formed in a surface layer portion of the outer peripheral surface 9. The outer contact region 47 has a higher p-type impurity concentration than the body region 18. The p-type impurity concentration of the outer contact region 47 is higher than the outer well region 46. It is preferable that the p-type impurity concentration of the outer contact region 47 is approximately equal to the p-type impurity concentration of the contact region 45.

[0111] The outer contact region 47 is formed in the surface layer portion of the outer well region 46 at a distance from the periphery of the active surface 8 (first to fourth connection surfaces 10A to 10D) and the periphery of the outer peripheral surface 9 (first to fourth side surfaces 5A to 5D) in plan view, and is formed in a band shape extending along the active surface 8. In this embodiment, the outer contact region 47 is formed in a ring shape (specifically, a square ring shape) surrounding the active surface 8 in plan view.

[0112] The outer contact region 47 is formed at a distance from the bottom of the outer well region 46 toward the outer peripheral surface 9, and faces the first semiconductor region 6 across a part of the outer well region 46. The outer contact region 47 is located closer to the bottom of the first semiconductor region 6 than the bottom wall of the trench source structure 22. The bottom of the outer contact region 47 is preferably formed at a depth position substantially equal to the bottom of the contact region 45.

[0113] Semiconductor device 1 includes at least one (preferably two to twenty) p-type field region 48 formed in the surface layer of outer peripheral surface 9. In this embodiment, semiconductor device 1 includes four field regions 48. The multiple field regions 48 are formed in an electrically floating state and relieve the electric field within chip 2 at outer peripheral surface 9.

[0114] The number, width, depth, p-type impurity concentration, etc. of the field regions 48 are arbitrary and can take various values ​​depending on the electric field to be relaxed. The field regions 48 may have a lower p-type impurity concentration than the outer contact region 47. The field regions 48 may have a higher p-type impurity concentration than the outer well region 46. The field regions 48 may have a lower p-type impurity concentration than the outer well region 46.

[0115] The plurality of field regions 48 are formed in a region between the periphery of the outer peripheral surface 9 and the outer well region 46. The plurality of field regions 48 are arranged at intervals from the outer well region 46 side toward the periphery of the outer peripheral surface 9. The plurality of field regions 48 are formed in a band shape extending along the active surface 8 in a plan view. In this embodiment, the plurality of field regions 48 are formed in a ring shape (specifically, a square ring) surrounding the active surface 8 in a plan view.

[0116] The plurality of field regions 48 are formed at intervals from the bottom of the first semiconductor region 6 toward the outer circumferential surface 9, and face the second semiconductor region 7 across a part of the first semiconductor region 6. The plurality of field regions 48 are located closer to the bottom of the first semiconductor region 6 than the bottom wall of the trench source structure 22. The bottoms of the plurality of field regions 48 are located closer to the bottom of the first semiconductor region 6 than the bottom of the contact region 45. The bottoms of the plurality of field regions 48 may be formed at a depth position substantially equal to the bottom of the second well region 42.

[0117] The semiconductor device 1 includes a main surface insulating film 50 covering the first main surface 3. The main surface insulating film 50 may include at least one of a silicon oxide film, a silicon nitride film, and a silicon oxynitride film. In this embodiment, the main surface insulating film 50 has a single-layer structure made of a silicon oxide film. It is particularly preferable that the main surface insulating film 50 include a silicon oxide film made of an oxide of the chip 2.

[0118] The main surface insulating film 50 selectively covers the active surface 8, the outer peripheral surface 9, and the first to fourth connecting surfaces 10A to 10D. The main surface insulating film 50 is connected to the first insulating film 26, the second insulating film 29, the third insulating film 32, and the fourth insulating film 35 on the active surface 8, and exposes the first buried electrode 27, the second buried electrode 30, the third buried electrode 33, and the fourth buried electrode 36.

[0119] The main surface insulating film 50 covers the outer well region 46, the outer contact region 47, and the plurality of field regions 48 on the outer peripheral surface 9. In this embodiment, the main surface insulating film 50 is continuous with the first to fourth side surfaces 5A to 5D. Of course, the main surface insulating film 50 may be formed at a distance inward from the periphery of the outer peripheral surface 9, exposing the first semiconductor region 6 from the periphery of the outer peripheral surface 9.

[0120] The main surface insulating film 50 is connected to the second insulating film 29, the third insulating film 32 and the fourth insulating film 35 at the first to fourth connecting surfaces 10A to 10D, and exposes the second buried electrode 30, the third buried electrode 33 and the fourth buried electrode 36.

[0121] The semiconductor device 1 includes a plurality of gate connection electrodes 51 that cover the plurality of trench gate structures 21 in the active region 12 in a film-like manner. The gate connection electrodes 51 may be referred to as "connection electrodes," "connection electrode films," "gate connection electrode films," etc. The gate connection electrodes 51 may be considered as one component of the trench gate structures 21.

[0122] The gate connection electrode 51 is formed as an external connection portion of the trench gate structure 21, and at least one gate connection electrode 51 is provided for each trench gate structure 21. In this embodiment, a plurality of gate connection electrodes 51 are provided at intervals in a one-to-many correspondence with each trench gate structure 21. In this embodiment, the plurality of gate connection electrodes 51 selectively cover the inner portions and both end portions of the corresponding trench gate structures 21.

[0123] Each gate connection electrode 51 is connected to the first buried electrode 27 at a portion covering the corresponding trench gate structure 21, and has a portion extending from above the first buried electrode 27 onto the main surface insulating film 50. In this embodiment, each gate connection electrode 51 is formed integrally with the corresponding first buried electrode 27. That is, each gate connection electrode 51 includes a portion where part of the first buried electrode 27 is extended in the form of a film to a region outside the trench gate structure 21 (above the main surface insulating film 50). Of course, the gate connection electrode 51 may be formed separately from the first buried electrode 27.

[0124] The plurality of gate connection electrodes 51 are formed at intervals in the first direction X from the plurality of trench side end structures 23 in a plan view, and are formed at intervals in the second direction Y from the plurality of trench source structures 22. In other words, the plurality of gate connection electrodes 51 expose the plurality of trench source structures 22 and the plurality of trench side end structures 23.

[0125] The multiple gate connection electrodes 51 are arranged alternately with the multiple trench source structures 22 in the second direction Y in plan view. In this embodiment, the multiple gate connection electrodes 51 are each formed in a strip shape extending in the first direction X. The multiple gate connection electrodes 51 do not face the multiple trench side end structures 23 in the second direction Y in plan view.

[0126] The gate connection electrode 51 has an electrode surface 51a extending along the active surface 8. In this embodiment, the gate connection electrode 51 is formed in a tapered shape (a truncated quadrangular pyramid shape) from the active surface 8 toward the electrode surface 51a in a cross-sectional view. The electrode surface 51a is preferably formed to be wider than the trench gate structure 21 in the second direction Y. In other words, the electrode surface 51a preferably has a portion facing the trench gate structure 21 in the normal direction Z and a portion facing a region outside the trench gate structure 21 (i.e., the main surface insulating film 50) in the normal direction Z.

[0127] In this embodiment, the gate connection electrode 51 includes p-type or n-type conductive polysilicon. The gate connection electrode 51 has an electrode thickness TE. The electrode thickness TE is preferably at least 0.5 times the first width W1 (second width W2) described above. The electrode thickness TE is preferably not more than the peripheral depth DO described above. The electrode thickness TE is preferably not more than the second depth D2 described above. It is particularly preferable that the electrode thickness TE be less than the second depth D2 (periphery depth DO).

[0128] The electrode thickness TE is preferably equal to or less than the first depth D1. Of course, the electrode thickness TE may be greater than the first depth D1. It is particularly preferable that the electrode thickness TE is less than the first depth D1. The electrode thickness TE may be equal to or greater than 0.05 μm and equal to or less than 2.5 μm. The electrode thickness TE is preferably equal to or greater than 0.5 μm and equal to or less than 1.5 μm.

[0129] The semiconductor device 1 includes a sidewall wiring 52 formed on the outer peripheral surface 9 so as to cover at least one of the first to fourth connecting surfaces 10A to 10D. Specifically, the sidewall wiring 52 is disposed on the main surface insulating film 50. The sidewall wiring 52 also functions as a "sidewall structure" that reduces the step formed between the active surface 8 and the outer peripheral surface 9.

[0130] The sidewall wiring 52 is preferably formed in a strip shape extending along at least one of the third connecting surface 10C and the fourth connecting surface 10D. In this embodiment, the sidewall wiring 52 is formed in a ring shape (specifically, a square ring shape) extending along the first to fourth connecting surfaces 10A to 10D so as to surround the active surface 8 in a plan view. The portions of the sidewall wiring 52 that cover the four corners of the active surface 8 are formed in a curved shape toward the outer peripheral surface 9.

[0131] The sidewall wiring 52 includes a portion extending in a film-like manner along the outer peripheral surface 9 and a portion extending in a film-like manner along the first to fourth connecting surfaces 10A to 10D. The portion of the sidewall wiring 52 located on the outer peripheral surface 9 may cover the outer peripheral surface 9 in a film-like manner in a region on the outer peripheral surface 9 side of the active surface 8. In other words, the portion of the sidewall wiring 52 located on the outer peripheral surface 9 may have a thickness less than the thickness of the active plateau 11 (peripheral depth DO).

[0132] The sidewall wiring 52 faces the outer well region 46 at the outer peripheral surface 9, with the main surface insulating film 50 therebetween. The sidewall wiring 52 may also face the outer contact region 47, with the main surface insulating film 50 therebetween. In this embodiment, the sidewall wiring 52 is formed at a distance from the field region 48 toward the active surface 8 in plan view.

[0133] The sidewall wiring 52 covers the first to fourth connecting surfaces 10A to 10D with the main surface insulating film 50 interposed therebetween. The sidewall wiring 52 faces the second well region 42, the third well region 43, the fourth well region 44, and the outer well region 46 at the first to fourth connecting surfaces 10A to 10D with the main surface insulating film 50 interposed therebetween. In this embodiment, the sidewall wiring 52 also faces the body region 18 with the main surface insulating film 50 interposed therebetween.

[0134] The sidewall wiring 52 covers the exposed portion (second buried electrode 30) of the trench source structure 22, the exposed portion (third buried electrode 33) of the trench side end structure 23, and the exposed portion (fourth buried electrode 36) of the trench termination structure 24 on the first to fourth connection surfaces 10A to 10D. This allows the sidewall wiring 52 to be electrically connected to the trench source structure 22, the trench side end structure 23, and the trench termination structure 24. In other words, the sidewall wiring 52 applies a source potential to a connection target from the outer circumferential surface 9 side.

[0135] The sidewall wiring 52 has an overlapping portion 52a that extends from at least one of the first to fourth connecting surfaces 10A to 10D onto the edge of the active surface 8. The overlapping portion 52a covers the active surface 8 in a film-like manner in plan view and is formed in a band shape that extends along the edge of the active surface 8. In this form, the overlapping portion 52a is formed in a ring shape (specifically, a quadrangular ring) that surrounds the inner portion of the active surface 8 in plan view.

[0136] The overlapping portions 52a are formed on the active surface 8 at intervals from the plurality of trench gate structures 21 toward the peripheral edge of the active surface 8, and cover the exposed portions (second buried electrodes 30) of the trench source structures 22, the exposed portions (third buried electrodes 33) of the trench side end structures 23, and the exposed portions (fourth buried electrodes 36) of the trench termination structures 24. In this way, the sidewall wiring 52 is electrically connected to the trench source structures 22, the trench side end structures 23, and the trench termination structures 24 on the active surface 8.

[0137] In this embodiment, the sidewall wiring 52 includes p-type or n-type conductive polysilicon and is formed integrally with the second buried electrode 30, the third buried electrode 33, and the fourth buried electrode 36. Of course, the sidewall wiring 52 may be formed separately from the second buried electrode 30, the third buried electrode 33, and the fourth buried electrode 36.

[0138] The semiconductor device 1 includes an insulating interlayer film 55 that covers the main surface insulating film 50. The interlayer film 55 may also be referred to as an "insulating film," an "interlayer insulating film," an "intermediate insulating film," or the like. The interlayer film 55 covers the active surface 8, the outer peripheral surface 9, and the first to fourth connecting surfaces 10A to 10D, sandwiching the main surface insulating film 50 therebetween.

[0139] The interlayer film 55 covers the trench gate structure 21 (first buried electrode 27), the trench source structure 22 (second buried electrode 30), the trench side end structure 23 (third buried electrode 33), and the trench termination structure 24 (fourth buried electrode 36) on the active surface 8. The interlayer film 55 also covers the gate connection electrode 51 on the active surface 8.

[0140] The interlayer film 55 covers the outer well region 46, the outer contact region 47, and the plurality of field regions 48 on the outer peripheral surface 9, sandwiching the main surface insulating film 50 therebetween. The interlayer film 55 covers the sidewall wirings 52 on the first to fourth connection surfaces 10A to 10D. In this embodiment, the interlayer film 55 is continuous with the first to fourth side surfaces 5A to 5D.

[0141] Of course, the interlayer film 55 may be formed at a distance inward from the periphery of the outer peripheral surface 9, exposing the first semiconductor region 6 from the periphery of the outer peripheral surface 9. The interlayer film 55 may include at least one of a silicon oxide film, a silicon nitride film, and a silicon oxynitride film. The interlayer film 55 preferably includes a silicon oxide film.

[0142] In this embodiment, the interlayer film 55 has a laminated structure including a lower interlayer film 56 and an upper interlayer film 57, which are laminated in this order from the main surface insulating film 50 side. The lower interlayer film 56 may include at least one of a silicon oxide film, a silicon nitride film, and a silicon oxynitride film. The lower interlayer film 56 preferably includes a silicon oxide film.

[0143] The lower interlayer film 56 directly covers the trench gate structure 21, the trench source structure 22, the trench side end structure 23, and the trench termination structure 24 on the active surface 8. That is, the lower interlayer film 56 directly covers the first buried electrode 27, the second buried electrode 30, the third buried electrode 33, and the fourth buried electrode 36. The lower interlayer film 56 also directly covers the gate connection electrode 51 on the active surface 8.

[0144] The lower interlayer film 56 covers the outer well region 46, the outer contact region 47, and the plurality of field regions 48 at the outer peripheral surface 9, with the main surface insulating film 50 sandwiched therebetween. The lower interlayer film 56 directly covers the sidewall wirings 52 at the first to fourth connecting surfaces 10A to 10D. In this embodiment, the lower interlayer film 56 is continuous with the first to fourth side surfaces 5A to 5D. Of course, the wall portion of the lower interlayer film 56 may be formed at a distance inward from the periphery of the outer peripheral surface 9, exposing the first semiconductor region 6 from the periphery of the outer peripheral surface 9.

[0145] The upper interlayer film 57 may include at least one of a silicon oxide film, a silicon nitride film, and a silicon oxynitride film. The upper interlayer film 57 preferably includes a silicon oxide film. The upper interlayer film 57 covers the active surface 8, the outer peripheral surface 9, and the first to fourth connecting surfaces 10A to 10D with the lower interlayer film 56 sandwiched therebetween.

[0146] The upper interlayer film 57 covers the trench gate structure 21, the trench source structure 22, the trench side end structure 23, and the trench termination structure 24 on the active surface 8, with the lower interlayer film 56 sandwiched therebetween. The upper interlayer film 57 covers the outer well region 46, the outer contact region 47, and the plurality of field regions 48 on the outer peripheral surface 9, with the lower interlayer film 56 sandwiched therebetween.

[0147] The upper interlayer film 57 covers the sidewall wiring 52 on the first to fourth connecting surfaces 10A to 10D, sandwiching the lower interlayer film 56 therebetween. In this embodiment, the upper interlayer film 57 is continuous with the first to fourth side surfaces 5A to 5D. Of course, the wall portion of the upper interlayer film 57 may be formed at a distance inward from the periphery of the outer circumferential surface 9, exposing the first semiconductor region 6 from the periphery of the outer circumferential surface 9.

[0148] Fig. 15 is a plan view showing an example layout of gate electrodes 80 and source electrodes 90. Fig. 16 is an enlarged plan view showing a main part of Fig. 15. Fig. 17 is a further enlarged plan view of a main part of Fig. 16. Fig. 18 is a plan view showing an example layout of the first main surface 3 in the region shown in Fig. 17.

[0149] Fig. 19 is an enlarged plan view showing an example of a layout on the inner side of the pad region 60. Fig. 20 is an enlarged plan view showing an example of a layout on the peripheral edge side of the pad region 60. Fig. 21 is a cross-sectional view taken along line XXI-XXI shown in Fig. 20. Fig. 22 is a cross-sectional view taken along line XXII-XXII shown in Fig. 21. Fig. 23 is a cross-sectional view taken along line XXIII-XXIII shown in Fig. 21.

[0150] 15 to 23, the semiconductor device 1 includes a pad region 60 set in the interlayer film 55. The pad region 60 is a region in which a part of an electrode (a gate electrode 80 described later) for the trench gate structure 21 is disposed. The pad region 60 is also a region that partially shields the current path of the output current generated in the active region 12. A structure located directly below the pad region 60 on the active surface 8 functions as a breakdown voltage structure for the pad region 60.

[0151] The pad region 60 is set in a portion of the interlayer film 55 that covers the active surface 8. Specifically, the pad region 60 is set on the active surface 8 at a distance from the outer peripheral surface 9 in a plan view. The pad region 60 is set in a region on one side in the second direction Y of an imaginary line that crosses the center of the active surface 8 in the first direction X in a plan view. In this embodiment, the pad region 60 is located on an imaginary line that crosses the center of the active surface 8 in the second direction Y in a plan view. In other words, the pad region 60 faces the center of the first side surface 5A (first connecting surface 10A) in the second direction Y in a plan view.

[0152] The pad region 60 has a planar area smaller than the planar area of ​​the active surface 8 (first main surface 3). The proportion of the pad region 60 in the active surface 8 (first main surface 3) is preferably 1% or more and 25% or less. The proportion of the pad region 60 may be a value belonging to any one of the ranges of 1% or more and 5% or more, 5% or more and 10% or less, 10% or more and 15% or less, 15% or more and 20% or less, and 20% or more and 25% or less. The proportion of the pad region 60 is preferably 10% or less.

[0153] The pad region 60 is set on the active region 12 in a plan view, and faces the plurality of trench structures 20 in the stacking direction (normal direction Z) of the interlayer film 55. Specifically, the pad region 60 faces the plurality of trench gate structures 21 and the plurality of trench source structures 22. The pad region 60 is set on the active region 12 at intervals from the first side end region 13, the second side end region 14, the first termination region 15, and the second termination region 16 in a plan view.

[0154] That is, the pad region 60 is set inward of the active surface 8 at a distance from the positions of the ends of the plurality of trench side end structures 23 in the first direction X in plan view, and faces the plurality of trench side end structures 23 in the first direction X. Furthermore, the pad region 60 is set at a distance from the plurality of trench termination structures 24 in the second direction Y in plan view, and faces the plurality of trench termination structures 24 in the second direction Y. The pad region 60 does not face the plurality of trench side end structures 23 or the plurality of trench termination structures 24 in the stacking direction of the interlayer film 55.

[0155] In this embodiment, the pad region 60 is set inward of the active surface 8 at a distance from the positions of both ends of the plurality of trench gate structures 21 in the first direction X in plan view. Therefore, the pad region 60 overlaps the inner parts of the plurality of trench gate structures 21 in plan view, exposing both ends of the plurality of trench gate structures 21.

[0156] The semiconductor device 1 includes a resistive film 61 disposed in an interlayer film 55. Specifically, the resistive film 61 is disposed on a lower interlayer film 56 and is covered by an upper interlayer film 57. The resistive film 61 constitutes a gate resistance R. The resistive film 61 may also be referred to as a "resistor," a "gate resistor," a "gate resistive film," or the like.

[0157] The resistive film 61 includes at least one of a conductive polysilicon film and an alloy crystal film. The alloy crystal film includes alloy crystals composed of a metal element and a nonmetal element. The alloy crystal film may include at least one of a CrSi film, a CrSiN film, a CrSiO film, a TaN film, and a TiN film.

[0158] In this embodiment, the resistive film 61 includes p-type or n-type conductive polysilicon. The resistive film 61 may include either or both of a trivalent element (p-type impurity) and a pentavalent element (n-type impurity). The resistive film 61 may include at least one of boron, aluminum, gallium, and indium as a trivalent element. The resistive film 61 may include at least one of phosphorus, arsenic, and antimony as a pentavalent element.

[0159] The resistive film 61 has an impurity concentration different from the impurity concentrations of the first to fourth buried electrodes 27, 30, 33, and 36. The impurity concentration of the resistive film 61 is preferably lower than the impurity concentrations of the first to fourth buried electrodes 27, 30, 33, and 36. The impurity concentration of the resistive film 61 is 1×10 １７ cm －３ 1x10 or more ２１ cm －３ The impurity concentration of the resistive film 61 may be 3×10 ２０ cm －３ It is preferable that:

[0160] The resistive film 61 preferably contains the same type of impurity as the impurities in the first to fourth buried electrodes 27, 30, 33, and 36. Of course, the resistive film 61 may contain impurities different from the impurities in the first to fourth buried electrodes 27, 30, 33, and 36. The resistance value of the resistive film 61 can also be adjusted by adjusting the impurity concentration of the resistive film 61.

[0161] The resistive film 61 is disposed in the pad region 60 on the lower interlayer film 56, and partially shields the current path of the output current generated in the active region 12. In other words, the resistive film 61 is disposed on a portion of the lower interlayer film 56 that covers the active surface 8. Specifically, the resistive film 61 is disposed on the lower interlayer film 56 at a distance inward from the outer peripheral surface 9 toward the active surface 8 in plan view.

[0162] In this embodiment, the resistive film 61 is arranged in a region on one side in the second direction Y (toward the first side surface 5A) of an imaginary line that crosses the center of the pad region 60 in the first direction X in a plan view. That is, the resistive film 61 is arranged in a region on one side in the second direction Y of an imaginary line that crosses the center of the active surface 8 in the first direction X in a plan view. The resistive film 61 is located on the imaginary line that crosses the center of the active surface 8 in the second direction Y in a plan view. That is, the resistive film 61 faces the center of the first side surface 5A (first connecting surface 10A) in the second direction Y in a plan view.

[0163] The resistive film 61 has a planar area smaller than the planar area of ​​the active surface 8 (first principal surface 3). The proportion of the pad region 60 in the active surface 8 (first principal surface 3) is preferably 0.1% or more and 5% or less. The proportion of the pad region 60 may be a value belonging to any one of the following ranges: 0.1% or more and 0.5% or more, 0.5% or more and 1% or less, 1% or more and 2% or less, 2% or more and 3% or less, 3% or more and 4% or less, and 4% or more and 5% or less. The proportion of the resistive film 61 is preferably 2.5% or less.

[0164] Resistive film 61 is disposed on active region 12 at a distance from first side end region 13, second side end region 14, first termination region 15, and second termination region 16 in plan view. That is, resistive film 61 is disposed at a distance inward of active surface 8 from the positions of the ends of multiple trench side end structures 23 in first direction X in plan view, and faces multiple trench side end structures 23 in first direction X.

[0165] Furthermore, the resistive film 61 is disposed at a distance from the plurality of trench termination structures 24 in the second direction Y in plan view, and faces the plurality of trench termination structures 24 in the second direction Y. The resistive film 61 does not face the plurality of trench side end structures 23 and the plurality of trench termination structures 24 in the stacking direction of the interlayer film 55.

[0166] Of course, a portion of resistive film 61 may be extended above first termination region 15 and face at least one trench termination structure 24 across interlayer film 55. In this case, resistive film 61 preferably exposes at least one (preferably multiple) trench termination structures 24 in plan view. In consideration of the voltage drop between resistive film 61 and trench termination structure 24 (first termination region 15), resistive film 61 preferably exposes all trench termination structures 24.

[0167] The resistive film 61 faces at least one trench structure 20 with the lower interlayer film 56 interposed therebetween. The resistive film 61 preferably partially faces at least one trench gate structure 21 with the lower interlayer film 56 interposed therebetween. In this embodiment, the resistive film 61 faces a plurality of trench gate structures 21 with the lower interlayer film 56 interposed therebetween. The resistive film 61 is disposed inward of the active surface 8 with a gap therebetween from both end positions of the plurality of trench gate structures 21 in the first direction X in plan view.

[0168] Therefore, the resistive film 61 covers the inner parts of the plurality of trench gate structures 21 with the lower interlayer film 56 sandwiched therebetween, and exposes both ends of the plurality of trench gate structures 21. The resistive film 61 is electrically connected to the plurality of trench gate structures 21, but does not have any mechanical connection to the plurality of trench gate structures 21.

[0169] The resistive film 61 preferably partially faces at least one trench source structure 22 with the lower interlayer film 56 interposed therebetween. In this embodiment, the resistive film 61 faces a plurality of trench source structures 22. The resistive film 61 covers the inner portions of the plurality of trench source structures 22 with the lower interlayer film 56 interposed therebetween, and exposes both ends of the plurality of trench source structures 22. The resistive film 61 is electrically isolated from the plurality of trench source structures 22 and does not have any mechanical connection to the plurality of trench source structures 22.

[0170] In addition, the resistive film 61 faces the body region 18, the source region 19, at least one (multiple in this embodiment) first well region 41, at least one (multiple in this embodiment) second well region 42, and at least one (multiple in this embodiment) contact region 45, with the lower interlayer film 56 sandwiched therebetween.

[0171] Resistive film 61 may be arranged inward of active region 12 at a distance from the boundary between active region 12 and first termination region 15 in plan view. That is, resistive film 61 may expose at least one trench gate structure 21 located near the boundary between active region 12 and first termination region 15. Resistive film 61 may also expose at least one trench source structure 22 located near the boundary between active region 12 and first termination region 15.

[0172] The resistive film 61 is arranged on a different layer (upper layer) from the plurality of gate connection electrodes 51. The resistive film 61 is arranged on the lower interlayer film 56 at a horizontal distance from the gate connection electrode 51, and does not face the gate connection electrode 51 across the lower interlayer film 56. In this embodiment, the resistive film 61 faces in the first direction X a region between at least two gate connection electrodes 51 arranged on both sides of the trench gate structure 21 in the first direction X in plan view.

[0173] Furthermore, the resistive film 61 faces in the second direction Y at least one gate connection electrode 51 arranged inside the trench gate structure 21 in a plan view. Of course, the resistive film 61 may be arranged shifted to one side or the other side in the first direction X with respect to an imaginary line that crosses in the second direction Y the gate connection electrode 51 arranged inside the trench gate structure 21 in a plan view.

[0174] The resistive film 61 is disposed on a different layer (upper layer) from the overlapping portion 52a of the sidewall wiring 52. The resistive film 61 is disposed on the lower interlayer film 56 at a horizontal distance from the overlapping portion 52a, and does not face the overlapping portion 52a across the lower interlayer film 56. In other words, the resistive film 61 is disposed on a region surrounded by the sidewall wiring 52 in a plan view.

[0175] In this embodiment, the resistive film 61 is formed in a strip shape (rectangular in this embodiment) extending in the direction in which the trench gate structure 21 (trench source structure 22) extends (i.e., the first direction X). The planar shape of the resistive film 61 is arbitrary and is not limited to a specific layout. For example, the resistive film 61 may be formed in a square shape, a polygonal shape other than a quadrangle, a circle, an ellipse, or the like. Of course, the resistive film 61 may also be formed in a strip shape extending in the second direction Y.

[0176] The resistive film 61 has a resistive length LR in the first direction X and a resistive width WR in the second direction Y. The resistive length LR is less than the length of the trench gate structure 21. The resistive length LR is preferably less than the exposed width of the trench gate structure 21. The exposed width of the trench gate structure 21 is the distance between one end (the other end) of the trench gate structure 21 in the first direction X and one end (the other end) of the resistive film 61 in the first direction X.

[0177] The resistor width WR is arbitrary and may take various values ​​depending on the resistance value to be achieved. The resistor width WR is preferably larger than the first width W1 of the trench gate structure 21. The resistor width WR is preferably larger than the second width W2 of the trench source structure 22. It is particularly preferable that the resistor width WR is larger than the sum of the first width W1 and the second width W2.

[0178] The resistive film 61 has a resistor thickness TR in the normal direction Z. The resistor thickness TR is adjusted as appropriate depending on the resistance value to be achieved. The resistor thickness TR is preferably equal to or less than the aforementioned peripheral depth DO. It is particularly preferable that the resistor thickness TR be less than the aforementioned peripheral depth DO. The resistor thickness TR is preferably equal to or less than the aforementioned second depth D2. It is particularly preferable that the resistor thickness TR be less than the aforementioned second depth D2.

[0179] The resistor thickness TR is preferably equal to or less than the first depth D1. It is particularly preferable that the resistor thickness TR is less than the first depth D1. The resistor thickness TR may be less than the electrode thickness TE. The resistor thickness TR may be greater than the electrode thickness TE. The resistor thickness TR may be approximately equal to the electrode thickness TE. The resistor thickness TR may be equal to or greater than 0.05 μm and equal to or less than 2.5 μm.

[0180] The resistor thickness TR may have a value belonging to any one of the following ranges: 0.05 μm to 0.1 μm, 0.1 μm to 0.25 μm, 0.25 μm to 0.5 μm, 0.5 μm to 0.75 μm, 0.75 μm to 1 μm, 1 μm to 1.25 μm, 1.25 μm to 1.5 μm, 1.5 μm to 1.75 μm, 1.75 μm to 2 μm, 2 μm to 2.25 μm, and 2.25 μm to 2.5 μm. The resistor thickness TR is preferably 0.1 μm to 1.5 μm. It is particularly preferable that the resistor thickness TR be 1 μm or less.

[0181] Of course, the resistor thickness TR may be greater than the outer circumferential depth DO (second depth D2). When the resistor film 61 is made of an alloy crystal film, the resistor thickness TR may be less than the first depth D1. In this case, the resistor thickness TR may be 0.1 nm or more and 100 nm or less.

[0182] 24 is an enlarged cross-sectional view showing a main portion of FIG. 21 . FIG. 24 is also a diagram for explaining a specific configuration example of the interlayer film 55 and a specific configuration example of the resistive film 61. Referring to FIG. 24 , in this embodiment, the lower interlayer film 56 has a layered structure including a first lower insulating film 62 and a second lower insulating film 63 layered in this order from the first main surface 3 side. The first lower insulating film 62 has a single-layer structure made of a silicon oxide film with no impurities added. The first lower insulating film 62 may also be referred to as an NSG film (nondoped silicate glass film).

[0183] The first lower insulating film 62 directly covers the trench gate structure 21, the trench source structure 22, the trench side end structure 23, and the trench termination structure 24 on the active surface 8. That is, the first lower insulating film 62 directly covers the first buried electrode 27, the second buried electrode 30, the third buried electrode 33, and the fourth buried electrode 36.

[0184] The first lower insulating film 62 covers the outer well region 46, the outer contact region 47, and the plurality of field regions 48 on the outer peripheral surface 9, sandwiching the main surface insulating film 50. The first lower insulating film 62 directly covers the sidewall wirings 52 on the first to fourth connecting surfaces 10A to 10D.

[0185] The first lower insulating film 62 has a plurality of first recesses 62R recessed toward the chip 2 in the portions covering the trench gate structure 21, the trench source structure 22, the trench side end structure 23 and the trench termination structure 24.

[0186] The second lower insulating film 63 may have a single-layer structure made of a silicon oxide film containing phosphorus, or a multilayer structure including a silicon oxide film containing phosphorus. The silicon oxide film containing phosphorus may contain boron. The silicon oxide film containing phosphorus may be called a PSG film (Phosphorus Silicon Glass Film). The silicon oxide film containing phosphorus and boron may be called a BPSG film (Boron Phosphorus Silicon Glass Film).

[0187] The second lower insulating film 63 may have a single layer structure made of a PSG film or a BPSG film laminated on the first lower insulating film 62. The second lower insulating film 63 may have a layered structure including a PSG film and a BPSG film laminated in this order on the first lower insulating film 62. The second lower insulating film 63 may have a layered structure including a BPSG film and a PSG film laminated in this order on the first lower insulating film 62. In this embodiment, the second lower insulating film 63 has a single layer structure made of a PSG film, for example.

[0188] The second lower insulating film 63 covers the first lower insulating film 62 in a film form. The second lower insulating film 63 covers the trench gate structure 21, the trench source structure 22, the trench side end structure 23, and the trench termination structure 24 on the active surface 8 with the first lower insulating film 62 sandwiched therebetween.

[0189] The second lower insulating film 63 covers the outer well region 46, the outer contact region 47, and the plurality of field regions 48 at the outer peripheral surface 9, with the first lower insulating film 62 sandwiched therebetween. The second lower insulating film 63 covers the sidewall wiring 52 at the first to fourth connecting surfaces 10A to 10D, with the first lower insulating film 62 sandwiched therebetween.

[0190] The second lower insulating film 63 has a plurality of second recesses 63R recessed toward the first lower insulating film 62 in portions covering the plurality of first recesses 62R of the first lower insulating film 62. The depth of the plurality of second recesses 63R is less than the depth of the plurality of first recesses 62R.

[0191] The flatness of the second lower insulating film 63 is improved by melting and re-hardening through a heat treatment process (reflow process). In other words, the second lower insulating film 63 reduces unevenness caused by the multiple first recesses 62R in the first lower insulating film 62. The first lower insulating film 62 functions as a barrier film between the chip 2 and the second lower insulating film 63, suppressing mutual diffusion (transfer) of impurities between the structures on the chip 2 side and the second lower insulating film 63.

[0192] The resistive film 61 is disposed on the second lower insulating film 63. The entire resistive film 61 is in direct contact with the second lower insulating film 63 (the lower interlayer film 56). Therefore, the resistive film 61 does not have a mechanical connection portion to the trench gate structure 21, a mechanical connection portion to the trench source structure 22, a mechanical connection portion to the gate connecting electrode 51, or a mechanical connection portion to the sidewall wiring 52.

[0193] The resistive film 61 faces the plurality of first buried electrodes 27 and the plurality of second buried electrodes 30, with the first lower insulating film 62 and the second lower insulating film 63 sandwiched therebetween. The resistive film 61 has a resistive main surface 61a extending along the insulating main surface of the second lower insulating film 63, and a resistive sidewall 61b located on the second lower insulating film 63.

[0194] The resistor main surface 61a is located higher than the electrode surface 51a of the gate connection electrode 51. In this embodiment, the resistor sidewall 61b slopes obliquely downward from the resistor main surface 61a toward the second lower insulating film 63. Of course, the resistor sidewall 61b may extend substantially perpendicular to the second lower insulating film 63.

[0195] The resistive film 61 (resistive main surface 61 a) has a plurality of third recesses 61R recessed toward the second lower insulating film 63 in portions covering the second recesses 63R of the second lower insulating film 63. The depth of the third recesses 61R is less than the depth of the second recesses 63R. Therefore, the flatness of the resistive film 61 is improved by the second lower insulating film 63.

[0196] The interdiffusion (transfer) of impurities between the chip 2 and the resistive film 61 is suppressed by the first lower insulating film 62. In particular, the interdiffusion (transfer) of impurities between the trench gate structure 21 (first buried electrode 27) and the resistive film 61 is suppressed by the first lower insulating film 62. This suppresses fluctuations in the electrical characteristics of the trench gate structure 21 (first buried electrode 27) caused by the resistive film 61, and also suppresses fluctuations in the electrical characteristics of the resistive film 61 caused by the trench gate structure 21 (first buried electrode 27).

[0197] Furthermore, the first lower insulating film 62 suppresses interdiffusion (transfer) of impurities between the trench source structure 22 (second buried electrode 30) and the resistive film 61. This suppresses fluctuations in the electrical characteristics of the trench source structure 22 (second buried electrode 30) caused by the resistive film 61, and suppresses fluctuations in the electrical characteristics of the resistive film 61 caused by the trench source structure 22 (second buried electrode 30). In other words, the lower interlayer film 56 suppresses fluctuations in the electrical characteristics of the active region 12 caused by the resistive film 61 and fluctuations in the electrical characteristics of the resistive film 61 caused by the active region 12.

[0198] On the other hand, the upper interlayer film 57 covers the resistive film 61 on the lower interlayer film 56. In this embodiment, the upper interlayer film 57 has a layered structure including a first upper insulating film 64 and a second upper insulating film 65, which are layered in this order from the lower interlayer film 56 side. The first upper insulating film 64 has a single-layer structure made of a silicon oxide film with no impurities added. The first upper insulating film 64 may also be called an NSG film.

[0199] The first upper insulating film 64 directly covers the lower interlayer film 56 (second lower insulating film 63). The first upper insulating film 64 covers the trench gate structure 21, the trench source structure 22, the trench side end structure 23, and the trench termination structure 24 on the active surface 8 with the lower interlayer film 56 sandwiched therebetween.

[0200] The first upper insulating film 64 covers the outer well region 46, the outer contact region 47, and the plurality of field regions 48 at the outer peripheral surface 9, with the lower interlayer film 56 sandwiched therebetween. The first upper insulating film 64 directly covers the sidewall wiring 52 at the first to fourth connecting surfaces 10A to 10D, with the lower interlayer film 56 sandwiched therebetween.

[0201] The first upper insulating film 64 has a portion that directly covers the resistive film 61. The first upper insulating film 64 covers either or both of the trench gate structure 21 and the trench source structure 22, with the resistive film 61 and the lower interlayer film 56 sandwiched therebetween. In this embodiment, the first upper insulating film 64 covers the plurality of trench gate structures 21 and the plurality of trench source structures 22, with the resistive film 61 and the lower interlayer film 56 sandwiched therebetween.

[0202] In this embodiment, the first upper insulating film 64 has a thickness less than that of the resistive film 61, and is formed in the form of a film that fits along the outer surfaces of the lower interlayer film 56 and the resistive film 61. The first upper insulating film 64 has a first insulating main surface 64a on the lower interlayer film 56 and a second insulating main surface 64b on the resistive film 61.

[0203] The first insulating main surface 64a is located below the resistor main surface 61a (toward the lower interlayer film 56), and the second insulating main surface 64b is located above the resistor main surface 61a. This defines a first step portion 64c between the first insulating main surface 64a and the second insulating main surface 64b, which is located along the resistor side wall 61b of the resistor film 61.

[0204] Of course, the first upper insulating film 64 may have a thickness equal to or greater than the thickness of the resistive film 61. In this case, the first insulating principal surface 64a is located above the resistive principal surface 61a, and the second insulating principal surface 64b is located above the resistive principal surface 61a and the first insulating principal surface 64a. Therefore, the first step portion 64c is defined along the resistive sidewall 61b in a region above the resistive principal surface 61a.

[0205] The second upper insulating film 65 may have a single-layer structure made of a silicon oxide film containing phosphorus, or a multilayer structure including a silicon oxide film containing phosphorus. The silicon oxide film containing phosphorus may contain boron. The silicon oxide film containing phosphorus may be called a PSG film. The silicon oxide film containing phosphorus and boron may be called a BPSG film.

[0206] The second upper insulating film 65 may have a single layer structure made of a PSG film or a BPSG film laminated on the first upper insulating film 64. The second upper insulating film 65 may have a layered structure including a PSG film and a BPSG film laminated in this order on the first upper insulating film 64. The second upper insulating film 65 may have a layered structure including a BPSG film and a PSG film laminated in this order on the first upper insulating film 64. In this embodiment, the second upper insulating film 65 has a single layer structure made of a PSG film, as an example.

[0207] The second upper insulating film 65 directly covers the first upper insulating film 64 and forms the outer surface of the interlayer film 55. The second upper insulating film 65 covers the trench gate structure 21, the trench source structure 22, the trench side end structure 23, and the trench termination structure 24 on the active surface 8, with the first upper insulating film 64 sandwiched therebetween.

[0208] The second upper insulating film 65 covers the outer well region 46, the outer contact region 47, and the plurality of field regions 48 at the outer peripheral surface 9, with the first upper insulating film 64 sandwiched therebetween. The second upper insulating film 65 covers the sidewall wiring 52 at the first to fourth connecting surfaces 10A to 10D, with the first upper insulating film 64 sandwiched therebetween.

[0209] The second upper insulating film 65 is formed in the shape of a film that follows the outer surface of the first upper insulating film 64. The second upper insulating film 65 has a third insulating main surface 65a on the first insulating main surface 64a of the first upper insulating film 64, and a fourth insulating main surface 65b on the second insulating main surface 64b of the first upper insulating film 64. The third insulating main surface 65a is located above the resistor main surface 61a, and the fourth insulating main surface 65b is located above the third insulating main surface 65a. This defines a second step portion 65c between the third insulating main surface 65a and the fourth insulating main surface 65b.

[0210] The second upper insulating film 65 may have a thickness equal to or greater than the thickness of the resistive film 61, or may have a thickness less than the thickness of the resistive film 61. The second upper insulating film 65 may have a thickness equal to or greater than the thickness of the first upper insulating film 64, or may have a thickness less than the thickness of the first upper insulating film 64.

[0211] The flatness of the second upper insulating film 65 is improved by melting and re-hardening through a heat treatment process (reflow process). That is, the second upper insulating film 65 reduces the unevenness caused by the first step portion 64c of the first upper insulating film 64. Specifically, the second step portion 65c of the second upper insulating film 65 has a slope angle that is gentler than the slope angle of the first step portion 64c of the first upper insulating film 64.

[0212] The inclination angle of the first step portion 64c is the angle between an imaginary line connecting the base end and tip end of the first step portion 64c and an imaginary horizontal line. The inclination angle of the second step portion 65c is the angle between an imaginary line connecting the base end and tip end of the second step portion 65c and an imaginary horizontal line. The adhesion of conductive residue to the second step portion 65c is suppressed by the softening of the second step portion 65c.

[0213] In this configuration, the first upper insulating film 64 functions as a barrier film interposed between the resistive film 61 and the second upper insulating film 65, and suppresses mutual diffusion (transfer) of impurities between the resistive film 61 and the second upper insulating film 65. This suppresses fluctuations in the electrical characteristics of the resistive film 61 caused by impurities in the second upper insulating film 65.

[0214] 24 shows an example in which the lower interlayer film 56 has a layered structure including the first lower insulating film 62 and the second lower insulating film 63. However, the lower interlayer film 56 may have a single-layer structure made of the first lower insulating film 62. That is, the lower interlayer film 56 may have a single-layer structure made of an NSG film. In this case, the resistive film 61 is disposed directly on the NSG film. Of course, the lower interlayer film 56 may also have an undoped third lower insulating film (NSG film) laminated on the second lower insulating film 63. In this case, the resistive film 61 is disposed on the undoped third lower insulating film.

[0215] 24 shows an example in which the upper interlayer film 57 has a layered structure including the first upper insulating film 64 and the second upper insulating film 65. However, the upper interlayer film 57 may have a single-layer structure made of the first upper insulating film 64. In other words, the upper interlayer film 57 may have a single-layer structure made of an NSG film.

[0216] 16 to 24 again, the semiconductor device 1 includes a plurality of resistor openings 70 formed in the interlayer film 55 so as to expose a portion of the resistor film 61. The plurality of resistor openings 70 include one or more (one in this embodiment) first resistor openings 70A and one or more (one in this embodiment) second resistor openings 70B.

[0217] The first resistor opening 70A is formed in the upper interlayer film 57 so as to expose a portion of the resistive film 61. The first resistor opening 70A exposes a portion of the resistive film 61 on the other side in the second direction Y (the second side surface 5B side). In this embodiment, the first resistor opening 70A is formed in a strip shape extending in the first direction X in a plan view.

[0218] That is, the first resistor opening 70A extends in the direction in which the resistive film 61 extends. The first resistor opening 70A also extends in the direction in which the trench gate structure 21 and the trench source structure 22 extend. The first resistor opening 70A has an opening width in the first direction X that is smaller than the resistive length LR of the resistive film 61, and exposes an inner portion of the resistive film 61 at a distance from the periphery of the resistive film 61.

[0219] The second resistor opening 70B is formed in the upper interlayer film 57 at a position different from the first resistor opening 70A so as to expose a portion of the resistor film 61. In this embodiment, the second resistor opening 70B exposes a portion of the resistor film 61 on one side in the second direction Y (the side of the first side surface 5A). The second resistor opening 70B is formed at a distance from the first resistor opening 70A in the second direction Y and faces the first resistor opening 70A in the second direction Y.

[0220] The second resistor opening 70B does not necessarily have to face the first resistor opening 70A in the second direction Y, and may be formed offset to one side or the other in the first direction X with respect to the first resistor opening 70A. In this embodiment, the second resistor opening 70B is formed in a strip shape extending in the first direction X in a plan view.

[0221] That is, in this embodiment, the second resistor opening 70B extends parallel to the first resistor opening 70A. The second resistor opening 70B also extends in the direction in which the resistor film 61 extends. The second resistor opening 70B also extends in the direction in which the trench gate structure 21 and the trench source structure 22 extend.

[0222] The second resistor opening 70B has an opening width in the first direction X that is smaller than the resistor length LR of the resistor film 61, and exposes an inner portion of the resistor film 61 at a distance from the periphery of the resistor film 61. The opening width of the second resistor opening 70B may be equal to or larger than the opening width of the first resistor opening 70A, or may be smaller than the opening width of the first resistor opening 70A.

[0223] When multiple first resistor openings 70A are formed, the multiple first resistor openings 70A are formed at intervals in the first direction X in a portion of the resistive film 61 on the other side in the second direction Y. In this case, each first resistor opening 70A may be formed in a rectangular, polygonal, circular, or elliptical shape in a plan view.

[0224] When multiple second resistor openings 70B are formed, the multiple second resistor openings 70B are formed at intervals in the first direction X in a portion of the resistive film 61 on one side in the second direction Y. In this case, each second resistor opening 70B may be formed in a rectangular, polygonal, circular, or elliptical shape in a plan view.

[0225] The second resistor openings 70B may be arranged to face the first resistor openings 70A in a one-to-one correspondence in the second direction Y in a plan view. Of course, the second resistor openings 70B may be arranged to face the regions between the first resistor openings 70A in a one-to-one correspondence in the second direction Y in a plan view.

[0226] Of course, the group of openings including the plurality of second resistor openings 70B may be formed spaced apart from the group of openings including the plurality of first resistor openings 70A on one side and / or the other side in the first direction X so as not to face the group of openings including the plurality of first resistor openings 70A in the second direction Y when viewed in a plane.

[0227] The resistance openings 70 have opening wall surfaces that have an inclination angle steeper than the inclination angle of the second step portion 65 c. The inclination angle of the opening wall surfaces is the angle between an imaginary line connecting the base end and the tip end of the opening wall surfaces and an imaginary horizontal line.

[0228] The semiconductor device 1 includes a plurality of resistor recesses 71 formed in portions of the resistor main surface 61a of the resistor film 61 that are exposed from the plurality of resistor openings 70. The plurality of resistor recesses 71 are recessed from the resistor main surface 61a toward the interlayer film 55. The bottoms of the plurality of resistor recesses 71 are formed at intervals from the middle of the thickness range of the resistor film 61 toward the resistor main surface 61a.

[0229] The resistor recesses 71 have planar shapes that match the planar shapes of the resistor openings 70 in a plan view. That is, the resistor recesses 71 exposed from the first resistor opening 70A are formed in a strip shape along the first resistor opening 70A. The resistor recesses 71 exposed from the second resistor opening 70B are formed in a strip shape along the second resistor opening 70B.

[0230] The semiconductor device 1 includes a plurality of gate openings 72 formed in the interlayer film 55. The plurality of gate openings 72 penetrate the interlayer film 55 so as to selectively expose the plurality of trench gate structures 21. Specifically, the plurality of gate openings 72 penetrate the lower interlayer film 56 and the upper interlayer film 57, and expose the plurality of gate connection electrodes 51, respectively.

[0231] That is, the multiple gate openings 72 expose portions of the multiple trench gate structures 21 via the multiple gate connection electrodes 51. The multiple gate openings 72 are provided in a one-to-one correspondence with the multiple gate connection electrodes 51. The multiple gate openings 72 have wall surfaces with an inclination angle steeper than the inclination angle of the second step portion 65c. The inclination angle of the wall surface of each gate opening 72 is the angle formed by an imaginary line connecting the base end and tip end of the wall surface of each gate opening 72 with an imaginary horizontal line.

[0232] The semiconductor device 1 includes a plurality of source openings 73 formed in the interlayer film 55. The plurality of source openings 73 penetrate the interlayer film 55 to selectively expose a plurality of trench source structures 22. Specifically, the plurality of source openings 73 penetrate the lower interlayer film 56 and the upper interlayer film 57 to expose the corresponding trench source structures 22 and the source regions 19 and contact regions 45 located on both sides of the trench source structures 22.

[0233] The multiple source openings 73 may be formed in a strip shape extending along the corresponding trench source structures 22. Of course, the multiple source openings 73 may be formed in a one-to-many correspondence with the corresponding trench source structures 22. In this case, the multiple source openings 73 may be formed at intervals along the corresponding trench source structures 22.

[0234] The at least one (plurality in this embodiment) source opening 73 exposes a portion of the at least one (plurality in this embodiment) trench source structure 22 located directly below the resistive film 61 that is exposed from the resistive film 61. In other words, the multiple source openings 73 include at least one (plurality in this embodiment) source opening 73 that faces the resistive film 61 in the first direction X in plan view.

[0235] The source openings 73 have opening wall surfaces with an inclination angle steeper than the inclination angle of the second step portion 65 c. The inclination angle of the opening wall surface of each source opening 73 is the angle between an imaginary line connecting the base end and tip end of the opening wall surface of each source opening 73 and an imaginary horizontal line.

[0236] The semiconductor device 1 includes an outer opening 74 formed in the interlayer film 55. The outer opening 74 penetrates the interlayer film 55 so as to selectively expose the outer contact region 47 and the sidewall interconnection 52. In other words, the outer opening 74 penetrates the main surface insulating film 50, the lower interlayer film 56, and the upper interlayer film 57. The outer opening 74 is formed in a strip or ring shape extending along the outer contact region 47 and the sidewall interconnection 52 so as to surround the active surface 8 (active plateau 11) in plan view.

[0237] The semiconductor device 1 includes a gate electrode 80 disposed on an interlayer film 55. Specifically, the gate electrode 80 is disposed on an upper interlayer film 57. Therefore, the gate electrode 80 is disposed in a layer above the resistive film 61.

[0238] The gate electrode 80 has a resistance value lower than that of the resistive film 61. The gate electrode 80 preferably has a thickness greater than that of the resistive film 61. The thickness of the gate electrode 80 is preferably greater than that of the interlayer film 55. The thickness of the gate electrode 80 may be 0.5 μm or more and 10 μm or less. The thickness of the gate electrode 80 is preferably 1 μm or more and 5 μm or less.

[0239] In this embodiment, the gate electrode 80 has a layered structure including a first electrode film 80a and a second electrode film 80b, which are layered in this order from the interlayer film 55 side. The first electrode film 80a is formed as a barrier electrode. The first electrode film 80a includes at least one of a Ti film, a TiN film, and a W film. In this embodiment, the first electrode film 80a includes a Ti film.

[0240] The second electrode film 80b has a thickness greater than that of the first electrode film 80a and forms the main body of the gate electrode 80. The second electrode film 80b includes at least one of an Al film, a Cu film, an Al alloy film, and a Cu alloy film. The second electrode film 80b may include at least one of a pure Cu film (a Cu film with a purity of 99% or more), a pure Al film (an Al film with a purity of 99% or more), an AlCu alloy film, an AlSi alloy film, and an AlSiCu alloy film. In this embodiment, the second electrode film 80b includes an Al alloy film (an AlSiCu alloy film).

[0241] The gate electrode 80 includes a gate pad 81 and a gate wiring 82. The gate pad 81 may be called a "pad electrode," a "control pad electrode," etc. The gate wiring 82 may be called a "wiring electrode," a "control wiring electrode," etc.

[0242] The gate pad 81 is an external terminal electrode to which a gate potential is applied from the outside. The gate pad 81 is arranged in the pad region 60 so as to be electrically connected to the resistive film 61. That is, the gate pad 81 is arranged in a portion of the interlayer film 55 that covers the active surface 8 (active region 12), and together with the resistive film 61, it partially shields the current path of the output current generated in the active region 12.

[0243] The gate pad 81 is arranged in a region on one side in the second direction Y of an imaginary line that crosses the center of the active surface 8 in the first direction X in a plan view. The gate pad 81 is located on the imaginary line that crosses the center of the active surface 8 in the second direction Y in a plan view. In other words, the gate pad 81 faces the center of the first side surface 5A (first connecting surface 10A) in the second direction Y in a plan view.

[0244] In this embodiment, the gate pad 81 is arranged on the other side in the second direction Y (toward the inner portion of the active region 12) of the resistive film 61 in a plan view. The gate pad 81 is arranged in a region on one side in the second direction Y (toward the first side surface 5A) and on the other side in the second direction Y (toward the second side surface 5B) of an imaginary line that crosses the center of the pad region 60 in the first direction X in a plan view.

[0245] In this embodiment, the gate pad 81 has a planar area larger than that of the resistive film 61. The planar area of ​​the gate pad 81 is smaller than that of the active surface 8 (first main surface 3). The proportion of the gate pad 81 in the active surface 8 (first main surface 3) is preferably 1% or more and 25% or less. The proportion of the gate pad 81 may be a value belonging to any one of the ranges of 1% or more and 5% or more, 5% or more and 10% or less, 10% or more and 15% or less, 15% or more and 20% or less, and 20% or more and 25% or less. The proportion of the gate pad 81 is preferably 10% or less.

[0246] Gate pad 81 is arranged on active region 12 at a distance from first side end region 13, second side end region 14, first termination region 15, and second termination region 16 in plan view. That is, gate pad 81 is arranged at a distance inward of active surface 8 from the positions of the ends of the plurality of trench side end structures 23 in first direction X in plan view, and faces the plurality of trench side end structures 23 in first direction X.

[0247] Furthermore, gate pad 81 is disposed at a distance from the plurality of trench termination structures 24 in the second direction Y in plan view, and faces the plurality of trench termination structures 24 in the second direction Y. Gate pad 81 does not face the plurality of trench side end structures 23 and the plurality of trench termination structures 24 in the stacking direction of interlayer film 55.

[0248] The gate pad 81 partially faces the plurality of trench gate structures 21 with the interlayer film 55 interposed therebetween, and partially faces the plurality of trench source structures 22 with the interlayer film 55 interposed therebetween. The gate pad 81 is disposed inward of the active surface 8 at intervals from both end positions of the plurality of trench gate structures 21 in the first direction X in plan view.

[0249] Therefore, the gate pad 81 covers the inner parts of the plurality of trench gate structures 21 with the interlayer film 55 interposed therebetween, and exposes both ends of the plurality of trench gate structures 21. The gate pad 81 is electrically connected to the plurality of trench gate structures 21, but does not have any mechanical connection to the plurality of trench gate structures 21.

[0250] The gate pad 81 also covers the inner parts of the trench source structures 22 with the interlayer film 55 interposed therebetween, and exposes both ends of the trench source structures 22. The gate pad 81 is electrically isolated from the trench source structures 22 and does not have any mechanical connection to the trench source structures 22.

[0251] The gate pad 81 faces the body region 18, the source region 19, the plurality of first well regions 41, the plurality of second well regions 42, and the plurality of contact regions 45, with the interlayer film 55 sandwiched therebetween. In this embodiment, the gate pad 81 is disposed on the interlayer film 55 at a distance from the gate connection electrode 51 in the horizontal direction, and does not face the gate connection electrode 51 across the interlayer film 55. In other words, the gate pad 81 faces a portion of the trench gate structure 21 that is exposed from the gate connection electrode 51.

[0252] In this embodiment, the gate pad 81 faces in the first direction X a region between at least two gate connection electrodes 51 arranged on both sides of the trench gate structure 21 in the first direction X in plan view. The gate pad 81 also faces in the second direction Y at least one gate connection electrode 51 arranged in an inner portion of the trench gate structure 21 in plan view. Of course, the gate pad 81 may be arranged shifted to one side or the other in the first direction X with respect to an imaginary line that crosses in the second direction Y the gate connection electrode 51 arranged in an inner portion of the trench gate structure 21 in plan view.

[0253] The gate pad 81 is disposed on the interlayer film 55 at a horizontal distance from the overlapping portion 52a of the sidewall wiring 52, and does not face the overlapping portion 52a across the interlayer film 55. In other words, the gate pad 81 is disposed on a region surrounded by the sidewall wiring 52 in a plan view.

[0254] The gate pad 81 has a first pad portion 81a (first portion) and a second pad portion 81b (second portion). The first pad portion 81a forms the main body of the gate pad 81 and is disposed in an area outside the resistive film 61 in a plan view. The first pad portion 81a faces the plurality of trench gate structures 21 and the plurality of trench source structures 22 with the interlayer film 55 interposed therebetween.

[0255] In this embodiment, the first pad portion 81a has a first pad width WP1 in the first direction X that is larger than the resistor length LR of the resistive film 61. Of course, the first pad width WP1 may be smaller than the resistor length LR. In this embodiment, the first pad portion 81a is formed in a quadrangular shape in a plan view. Of course, the first pad portion 81a may be formed in a polygonal shape other than a quadrangular shape, such as a circular shape or an elliptical shape.

[0256] The second pad portion 81b extends from the first pad portion 81a to a region above the resistive film 61 and covers the resistive film 61 with a part of the interlayer film 55 (upper interlayer film 57) sandwiched therebetween. The second pad portion 81b extends into the first resistor opening 70A from above the interlayer film 55 and is mechanically and electrically connected to the resistive film 61 within the first resistor opening 70A. In other words, the gate pad 81 penetrates the interlayer film 55 and is mechanically and electrically connected to a part (one end) of the resistive film 61.

[0257] The second pad portion 81b faces either one or both of the trench gate structure 21 and the trench source structure 22, with the interlayer film 55 and the resistive film 61 sandwiched therebetween. The second pad portion 81b may face one or more trench gate structures 21. The second pad portion 81b may face one or more trench source structures 22. In this embodiment, the second pad portion 81b faces a plurality of trench gate structures 21 and a plurality of trench source structures 22.

[0258] In this embodiment, the second pad portion 81b has a second pad width WP2 that is approximately equal to the first pad width WP1 of the first pad portion 81a, and is drawn out in a strip shape from the entire end of the first pad portion 81a that is on the resistive film 61 side toward the resistive film 61. The second pad portion 81b only needs to have the second pad width WP2 that is larger than the opening width of the first resistor opening 70A, and the value of the second pad width WP2 is arbitrary.

[0259] For example, the second pad portion 81b may have a second pad width WP2 that is less than the first pad width WP1, and may extend in a protruding (strip-like) shape from the first pad portion 81a toward the resistive film 61. Of course, the second pad portion 81b may have the second pad width WP2 that is greater than the first pad width WP1.

[0260] The following describes the configurations of the first electrode film 80a and the second electrode film 80b of the gate pad 81. The first electrode film 80a covers the interlayer film 55 (upper interlayer film 57) in the first pad portion 81a, and extends into the first resistor opening 70A from above the interlayer film 55 in the second pad portion 81b. The first electrode film 80a covers the opening wall surface of the first resistor opening 70A in a film-like manner, and also covers the resistor film 61 (resistor recess portion 71) in a film-like manner.

[0261] The first electrode film 80a covers the upper interlayer film 57 (the first upper insulating film 64 and the second upper insulating film 65) in the first resistor opening 70A. As a result, the first electrode film 80a defines a recess space in the first resistor opening 70A. The first electrode film 80a does not cover the lower interlayer film 56 in the first resistor opening 70A.

[0262] The second electrode film 80b covers the first electrode film 80a in the first pad portion 81a in a film-like manner, and faces the interlayer film 55 with the first electrode film 80a in between. The second electrode film 80b covers the first electrode film 80a in the second pad portion 81b in a film-like manner, and backfills the first resistor opening 70A and the resistor recess portion 71.

[0263] The second electrode film 80b covers the upper interlayer film 57 (the first upper insulating film 64 and the second upper insulating film 65) in the first resistor opening 70A, sandwiching the first electrode film 80a therebetween. The second electrode film 80b is electrically connected to the resistive film 61 via the first electrode film 80a in the first resistor opening 70A. The second electrode film 80b may have a portion located in the resistive recess 71, and may cover the resistive film 61 in the resistive recess 71, sandwiching the first electrode film 80a therebetween.

[0264] The gate wiring 82 is disposed on the interlayer film 55 at a distance from the gate pad 81. The gate wiring 82 is disposed on a portion of the interlayer film 55 that covers the active region 12 (active surface 8), and is selectively routed to the pad region 60 and a region outside the pad region 60. The gate wiring 82 has a first connection portion electrically connected to the resistive film 61 in the pad region 60, and a second connection portion electrically connected to the plurality of trench gate structures 21 in the active region 12 outside the pad region 60.

[0265] That is, the gate wiring 82 is electrically connected to the gate pad 81 via the resistive film 61, and transmits the gate potential applied to the gate pad 81 to the plurality of trench gate structures 21. The gate wiring 82 is also electrically connected to at least one (a plurality in this embodiment) trench gate structure 21 located directly below the resistive film 61.

[0266] That is, the gate wiring 82 is routed from the region above the resistive film 61 to the region outside the resistive film 61, and is also electrically connected to the portions of the plurality of trench gate structures 21 located directly below the resistive film 61 that are exposed from the resistive film 61. In this embodiment, the gate wiring 82 is electrically connected to all of the trench gate structures 21 located directly below the resistive film 61.

[0267] The gate wiring 82 is also electrically connected to at least one (in this embodiment, multiple) trench gate structures 21 located directly below the gate pad 81. In other words, the gate wiring 82 is also electrically connected to the portions of the multiple trench gate structures 21 located directly below the gate pad 81 that are exposed from the resistive film 61. In this embodiment, the gate wiring 82 is electrically connected to all of the trench gate structures 21 located directly below the gate pad 81.

[0268] In this embodiment, the gate wiring 82 is disposed on the inner portion of the active surface 8 at a distance from the periphery of the active surface 8, and is not disposed on the outer circumferential surface 9. The gate wiring 82 extends in a line shape so as to intersect (specifically, orthogonally intersect) the plurality of trench gate structures 21 in the active region 12, and is electrically connected to the plurality of trench gate structures 21 by penetrating the interlayer film 55.

[0269] In this embodiment, the gate wiring 82 includes a first wiring portion 83, a second wiring portion 84, a third wiring portion 85, a fourth wiring portion 86, and a fifth wiring portion 87. The first wiring portion 83 is provided as a first connection portion to the resistive film 61. The second wiring portion 84, the third wiring portion 85, the fourth wiring portion 86, and the fifth wiring portion 87 are provided as second connection portions to the plurality of trench gate structures 21.

[0270] The first wiring portion 83 is disposed in the pad region 60 at a distance from the gate pad 81 and is electrically connected to the resistive film 61 at a position different from that of the gate pad 81. The first wiring portion 83 is disposed in a region on one side in the second direction Y of an imaginary line that crosses the center of the active surface 8 in the first direction X in a plan view. The first wiring portion 83 is located on the imaginary line that crosses the center of the active surface 8 in the second direction Y in a plan view. In other words, the first wiring portion 83 faces the center of the first side surface 5A (first connecting surface 10A) in the second direction Y in a plan view.

[0271] In this embodiment, the first wiring portion 83 is arranged in a region on one side (first side surface 5A side) of the resistive film 61 in the second direction Y in plan view, and faces the gate pad 81 across a part of the resistive film 61 in the second direction Y. That is, the first wiring portion 83 is arranged on the peripheral edge side of the active region 12 with respect to the resistive film 61 in plan view. The first wiring portion 83 is arranged on the active surface 8 (active region 12) at a distance from the outer circumferential surface 9 (outer circumferential region 17) in plan view. The first wiring portion 83 is formed in a line shape extending in the first direction X.

[0272] The first wiring unit 83 is arranged on the active region 12 at a distance from the first side end region 13, the second side end region 14, the first termination region 15, and the second termination region 16 in plan view. That is, the first wiring unit 83 is arranged at a distance inward of the active surface 8 from the positions of the ends of the plurality of trench side end structures 23 in the first direction X in plan view, and faces the plurality of trench side end structures 23 in the first direction X.

[0273] Furthermore, the first wiring portion 83 is disposed at a distance from the plurality of trench termination structures 24 in the second direction Y in plan view, and faces the plurality of trench termination structures 24 in the second direction Y. The first wiring portion 83 does not face the plurality of trench side end structures 23 and the plurality of trench termination structures 24 in the stacking direction of the interlayer film 55.

[0274] Of course, a portion of first wiring portion 83 may be extended above first termination region 15 and face at least one trench termination structure 24 across interlayer film 55. In this case, first wiring portion 83 preferably exposes at least one (preferably multiple) trench termination structures 24 in plan view. In consideration of the voltage drop between first wiring portion 83 and trench termination structure 24 (first termination region 15), first wiring portion 83 preferably exposes all trench termination structures 24.

[0275] In this embodiment, the first wiring portion 83 has a wiring width less than the resistance width WR of the resistive film 61, and faces either one or both of the trench gate structure 21 and the trench source structure 22 in the stacking direction of the interlayer film 55. Of course, the wiring width of the first wiring portion 83 may be equal to or greater than the resistance width WR of the resistive film 61.

[0276] In this embodiment, the first wiring portion 83 covers inner portions of the plurality of trench gate structures 21 with the interlayer film 55 interposed therebetween, and covers inner portions of the plurality of trench source structures 22 with the interlayer film 55 interposed therebetween. The first wiring portion 83 also faces the body region 18, the source region 19, the plurality of first well regions 41, the plurality of second well regions 42, and the plurality of contact regions 45 with the interlayer film 55 interposed therebetween.

[0277] In this embodiment, the first wiring portion 83 is disposed on the interlayer film 55 at a horizontal distance from the gate connection electrode 51, and does not face the gate connection electrode 51 across the interlayer film 55. In other words, the first wiring portion 83 faces a portion of the trench gate structure 21 that is exposed from the gate connection electrode 51, and does not have a mechanical connection portion to the trench gate structure 21.

[0278] In this embodiment, the first wiring portion 83 is disposed on the interlayer film 55 at a horizontal distance from the overlapping portion 52 a of the sidewall wiring 52, and does not face the overlapping portion 52 a across the interlayer film 55. In this embodiment, the first wiring portion 83 is disposed on a region surrounded by the sidewall wiring 52 in plan view.

[0279] The first wiring portion 83 has a first portion 83a and a second portion 83b. The first portion 83a is disposed in a region outside the resistive film 61 in a plan view. The first portion 83a faces either one or both of the trench gate structure 21 and the trench source structure 22, with the interlayer film 55 sandwiched therebetween. The first portion 83a may face one or more trench gate structures 21. The first portion 83a may face one or more trench source structures 22.

[0280] The second portion 83b is a portion that extends from the first portion 83a to a region above the resistive film 61 and covers the resistive film 61 with a part of the interlayer film 55 (upper interlayer film 57) sandwiched therebetween. The second portion 83b extends from above the interlayer film 55 into the second resistor opening 70B and is mechanically and electrically connected to the resistive film 61 within the second resistor opening 70B. In other words, the gate wiring 82 (first wiring portion 83) penetrates the interlayer film 55 and is mechanically and electrically connected to a part (the other end) of the resistive film 61.

[0281] The second portion 83b faces either one or both of the trench gate structure 21 and the trench source structure 22, with the interlayer film 55 and the resistive film 61 sandwiched therebetween. The second portion 83b may face one or more trench gate structures 21. The second portion 83b may face one or more trench source structures 22.

[0282] The second wiring portion 84 is drawn out from the first wiring portion 83 to one side in the first direction X and is electrically connected to the resistive film 61 via the first wiring portion 83. The second wiring portion 84 is disposed within the active region 12 in a plan view and extends in a line along the periphery of the active region 12. The second wiring portion 84 has a first extension portion 84a and a second extension portion 84b.

[0283] The first extension portion 84a extends linearly in the first direction X from the first wiring portion 83 toward the first side end region 13, and faces the plurality of trench gate structures 21 and the plurality of trench source structures 22 across the interlayer film 55. The tip portion of the first extension portion 84a is formed at a distance inward from the positions of the ends of the plurality of trench side end structures 23 in the first direction X toward the active surface 8 in plan view, and faces the plurality of trench side end structures 23 in the first direction X.

[0284] The second extension portion 84b is drawn out from the tip end of the first extension portion 84a in the second direction Y and extends linearly along the third side surface 5C (third connection surface 10C). The second extension portion 84b is formed at a distance inward from the positions of the ends of the plurality of trench side end structures 23 in the first direction X toward the active surface 8 in plan view, and intersects (specifically, perpendicular to) one end of the plurality of trench gate structures 21 and one end of the plurality of trench source structures 22 in the second direction Y.

[0285] That is, in this embodiment, the second extension portion 84b does not face the plurality of trench side end structures 23 in the stacking direction. Of course, a portion of the second extension portion 84b may be drawn out from the active region 12 to the first side end region 13 and face the plurality of trench side end structures 23. The tip of the second extension portion 84b may be located above the active region 12 or above the second termination region 16.

[0286] The second extension portion 84b enters the plurality of gate openings 72 from above the interlayer film 55, and is electrically connected to one end of the plurality of trench gate structures 21 in the plurality of gate openings 72. Specifically, the second extension portion 84b is connected to the plurality of gate connection electrodes 51 in the plurality of gate openings 72. As a result, the second wiring portion 84 is electrically connected to one end of the plurality of trench gate structures 21 via the plurality of gate connection electrodes 51.

[0287] In this embodiment, the second wiring portion 84 (second extension portion 84b) is also electrically connected to one end of each of the plurality of trench gate structures 21 located directly below the resistive film 61. That is, the second wiring portion 84 is routed from the first wiring portion 83 to an area outside the resistive film 61, and is electrically connected to the portions of the plurality of trench gate structures 21 located directly below the resistive film 61 that are exposed from the resistive film 61. In addition, in this embodiment, the second wiring portion 84 (second extension portion 84b) is also electrically connected to one end of each of the plurality of trench gate structures 21 located directly below the gate pad 81.

[0288] The third wiring portion 85 is drawn out from the first wiring portion 83 to the other side in the first direction X and is electrically connected to the resistive film 61 via the first wiring portion 83. The third wiring portion 85 is disposed within the active region 12 in a plan view and extends in a line along the periphery of the active region 12. The third wiring portion 85 has a third extension portion 85a and a fourth extension portion 85b.

[0289] The third extension portion 85a extends linearly in the first direction X from the first wiring portion 83 toward the second side end region 14, and faces the plurality of trench gate structures 21 and the plurality of trench source structures 22 across the interlayer film 55. The tip portion of the third extension portion 85a is formed at a distance inward from the positions of the ends of the plurality of trench side end structures 23 in the first direction X toward the active surface 8 in plan view, and faces the plurality of trench side end structures 23 in the first direction X.

[0290] The fourth extension portion 85b is drawn out from the tip end of the third extension portion 85a in the second direction Y and extends linearly along the fourth side surface 5D (fourth connection surface 10D). The fourth extension portion 85b is formed at a distance inward from the positions of the ends of the plurality of trench side end structures 23 in the first direction X toward the active surface 8 in plan view, and intersects (specifically, perpendicular to) the other ends of the plurality of trench gate structures 21 and the other ends of the plurality of trench source structures 22 in the second direction Y.

[0291] That is, in this embodiment, the fourth extension portion 85b does not face the plurality of trench side end structures 23 in the stacking direction. Of course, a portion of the fourth extension portion 85b may be drawn out from the active region 12 to the second side end region 14 and face the plurality of trench side end structures 23. The tip of the fourth extension portion 85b may be located above the active region 12 or above the second termination region 16.

[0292] The fourth extension portion 85b enters the plurality of gate openings 72 from above the interlayer film 55, and is electrically connected to the other ends of the plurality of trench gate structures 21 within the plurality of gate openings 72. Specifically, the fourth extension portion 85b is connected to the plurality of gate connection electrodes 51 within the plurality of gate openings 72. As a result, the third wiring portion 85 is electrically connected to the other ends of the plurality of trench gate structures 21 via the plurality of gate connection electrodes 51.

[0293] In this embodiment, the third wiring portion 85 (fourth extension portion 85b) is also electrically connected to the other ends of the plurality of trench gate structures 21 located directly below the resistive film 61. That is, the third wiring portion 85 is routed from the first wiring portion 83 to an area outside the resistive film 61, and is electrically connected to the portions of the plurality of trench gate structures 21 located directly below the resistive film 61 that are exposed from the resistive film 61. In addition, in this embodiment, the third wiring portion 85 (fourth extension portion 85b) is also electrically connected to the other ends of the plurality of trench gate structures 21 located directly below the gate pad 81.

[0294] The fourth wiring portion 86 is routed in a line shape from the first wiring portion 83 around the gate pad 81, and is electrically connected to the resistive film 61 via the first wiring portion 83. In this embodiment, the fourth wiring portion 86 includes a first line portion 86a, a second line portion 86b, and a third line portion 86c.

[0295] The first line portion 86a is formed on one side (the third side surface 5C side) of the gate pad 81 in the first direction X, and is formed in a line shape extending in the second direction Y. The first line portion 86a intersects (specifically, is perpendicular to) the inner portions of the plurality of trench gate structures 21 and the inner portions of the plurality of trench source structures 22 in plan view.

[0296] The first line portion 86a extends from above the interlayer film 55 into the plurality of gate openings 72, and is electrically connected to inner portions of the plurality of trench gate structures 21 within the plurality of gate openings 72. Specifically, the first line portion 86a is connected to the plurality of gate connection electrodes 51 within the plurality of gate openings 72. As a result, the first line portion 86a is electrically connected to the inner portions of the plurality of trench gate structures 21 via the plurality of gate connection electrodes 51.

[0297] In this embodiment, the fourth wiring portion 86 (first line portion 86 a) is also electrically connected to inner portions of the plurality of trench gate structures 21 located directly below the resistive film 61. In other words, the fourth wiring portion 86 (first line portion 86 a) is routed from the first wiring portion 83 to an area outside the resistive film 61, and is electrically connected to portions of the plurality of trench gate structures 21 located directly below the resistive film 61 that are exposed from the resistive film 61.

[0298] The second line portion 86b is formed on the other side (the fourth side surface 5D side) in the first direction X with respect to the gate pad 81, and is formed in a line shape extending in the second direction Y. The second line portion 86b intersects (specifically, is perpendicular to) the inner portions of the plurality of trench gate structures 21 and the inner portions of the plurality of trench source structures 22 in plan view.

[0299] The second line portion 86b extends from above the interlayer film 55 into the plurality of gate openings 72, and is electrically connected to inner portions of the plurality of trench gate structures 21 within the plurality of gate openings 72. Specifically, the second line portion 86b is connected to the plurality of gate connection electrodes 51 within the plurality of gate openings 72. As a result, the second line portion 86b is electrically connected to the inner portions of the plurality of trench gate structures 21 via the plurality of gate connection electrodes 51.

[0300] In this embodiment, the fourth wiring portion 86 (second line portion 86b) is also electrically connected to the plurality of trench gate structures 21 located directly below the resistive film 61. In other words, the fourth wiring portion 86 (second line portion 86b) is routed from the first wiring portion 83 to an area outside the resistive film 61, and is electrically connected to the portions of the plurality of trench gate structures 21 located directly below the resistive film 61 that are exposed from the resistive film 61.

[0301] The third line portion 86c is formed on the other side in the second direction Y (the second side surface 5B side) of the gate pad 81, and faces the first wiring portion 83 across the gate pad 81 in the second direction Y. The third line portion 86c is formed in a line shape extending in the first direction X, and is connected to the first line portion 86a and the second line portion 86b. In other words, the fourth wiring portion 86, together with the first wiring portion 83, surrounds the gate pad 81. The third line portion 86c faces the multiple trench gate structures 21 and the multiple trench source structures 22 in the stacking direction.

[0302] The fifth wiring portion 87 is disposed in a region on the other side in the second direction Y (toward the second side surface 5B) of the gate pad 81, and extends in a line along the second direction Y in the region between the gate pad 81 and the second connecting surface 10B. Specifically, the fifth wiring portion 87 is drawn in a line from the fourth wiring portion 86 toward an inner portion of the active region 12, and is electrically connected to the resistance film 61 via the first wiring portion 83 and the fourth wiring portion 86. The fifth wiring portion 87 intersects (specifically, orthogonally) with inner portions of the plurality of trench gate structures 21 and inner portions of the plurality of trench source structures 22 in a plan view.

[0303] The fifth wiring portion 87 enters the plurality of gate openings 72 from above the interlayer film 55, and is electrically connected to inner portions of the plurality of trench gate structures 21 within the plurality of gate openings 72. Specifically, the fifth wiring portion 87 is connected to the plurality of gate connection electrodes 51 within the plurality of gate openings 72. As a result, the fifth wiring portion 87 is electrically connected to inner portions of the plurality of trench gate structures 21 via the plurality of gate connection electrodes 51.

[0304] The following describes the configuration of the first electrode film 80a and the second electrode film 80b of the gate wiring 82. The first electrode film 80a of the first wiring portion 83 covers the interlayer film 55 in a film-like manner at a first portion 83a, and extends into the second resistor opening 70B from above the interlayer film 55 in a second portion 83b. The first electrode film 80a of the first wiring portion 83 covers the opening wall surface of the second resistor opening 70B in a film-like manner, and also covers the resistor film 61 (resistor recess portion 71) in a film-like manner.

[0305] The first electrode film 80a of the first wiring portion 83 covers the upper interlayer film 57 (the first upper insulating film 64 and the second upper insulating film 65) in the second resistor opening 70B. As a result, the first electrode film 80a of the first wiring portion 83 defines a recess space in the second resistor opening 70B. The first electrode film 80a of the first wiring portion 83 does not cover the lower interlayer film 56 in the second resistor opening 70B.

[0306] The second electrode film 80b of the first wiring portion 83 covers the first electrode film 80a in a film-like manner in the first portion 83a, and faces the interlayer film 55 with the first electrode film 80a in between. The second electrode film 80b of the first wiring portion 83 covers the first electrode film 80a in a film-like manner in the second portion 83b, and backfills the second resistor opening 70B and the resistor recess portion 71.

[0307] The second electrode film 80b of the first wiring portion 83 covers the upper interlayer film 57 (the first upper insulating film 64 and the second upper insulating film 65) within the second resistor opening 70B, sandwiching the first electrode film 80a therebetween. The second electrode film 80b is electrically connected to the resistive film 61 via the first electrode film 80a within the second resistor opening 70B. The second electrode film 80b of the first wiring portion 83 may have a portion located within the resistive recess portion 71, and may cover the resistive film 61 within the resistive recess portion 71, sandwiching the first electrode film 80a therebetween.

[0308] The first electrode films 80a of the second to fifth wiring portions 84 to 87 coat the interlayer film 55 in a film-like manner and extend into the plurality of gate openings 72 from above the interlayer film 55. The first electrode films 80a of the second to fifth wiring portions 84 to 87 coat the wall surfaces of the plurality of gate openings 72 in a film-like manner and coat the electrode surfaces 51a of the plurality of gate connection electrodes 51 in a film-like manner. As a result, the first electrode films 80a of the second to fifth wiring portions 84 to 87 define recess spaces within the plurality of gate openings 72.

[0309] The second electrode films 80b of the second to fifth wiring portions 84 to 87 cover the first electrode film 80a in a film-like manner and face the interlayer film 55 with the first electrode film 80a in between. The second electrode films 80b of the second to fifth wiring portions 84 to 87 extend into the plurality of gate openings 72 from above the interlayer film 55 and backfill the plurality of gate openings 72. The second electrode films 80b are electrically connected to the plurality of gate connection electrodes 51 via the first electrode films 80a within the plurality of gate openings 72.

[0310] In this embodiment, the gate electrode 80 includes a gate subpad 88 disposed on the interlayer film 55 at a distance from the gate pad 81. The gate subpad 88 may also be referred to as a "subpad electrode," etc. The gate subpad 88 is an electrical test pad (dummy pad) for measuring the gate resistance R during the manufacturing process, and is electrically connected to the gate pad 81 via the resistive film 61. The presence or absence of the gate subpad 88 is optional, and it may be omitted as necessary.

[0311] In the electrical test, a test signal is applied between the gate pad 81 and the gate subpad 88. For example, a gate potential may be applied to one of the gate pad 81 and the gate subpad 88, and a ground potential may be applied to the other. In other words, the gate subpad 88 is a terminal to which a potential different from that of the gate pad 81 is applied. The gate subpad 88 is an open terminal after the manufacturing process, and is not connected to a conductive joining member such as a bonding wire.

[0312] For example, when the semiconductor device 1 is mounted in a semiconductor package, the entire area of ​​the gate subpad 88 is directly or indirectly covered with an insulator (e.g., a sealing resin containing a plurality of fillers and a matrix resin) to electrically insulate it from other structures. Of course, the gate subpad 88 may be electrically connected to a lead terminal of the semiconductor package via a bonding wire or the like so that a test signal can be input even after the semiconductor device 1 is mounted in the semiconductor package.

[0313] In this embodiment, the gate subpad 88 is disposed on a portion of the interlayer film 55 that covers the active region 12 (active surface 8), and is connected to the gate wiring 82. In other words, the gate subpad 88 is fixed to the same potential as the gate wiring 82, and is electrically connected to the resistive film 61 via the gate wiring 82. The gate subpad 88 only needs to be connected to at least one of the first to fifth wiring portions 83 to 87, and the location of the gate subpad 88 is arbitrary.

[0314] Therefore, the gate subpad 88 may be disposed on at least one of the first side end region 13, the second side end region 14, the first termination region 15, the second termination region 16, and the outer periphery region 17. However, in consideration of the wiring resistance of the gate wiring 82, it is preferable that the gate subpad 88 be connected to a portion of the gate wiring 82 that is located near the resistive film 61.

[0315] Therefore, it is preferable that the gate subpad 88 is connected to the first wiring portion 83, the first extension portion 84a of the second wiring portion 84, the third extension portion 85a of the third wiring portion 85, the first line portion 86a of the fourth wiring portion 86, the second line portion 86b of the fourth wiring portion 86, etc. In this embodiment, the gate subpad 88 is connected to the fourth wiring portion 86 (first line portion 86a).

[0316] In this embodiment, the gate subpad 88 is disposed in a region on one side in the second direction Y (toward the first side surface 5A) of an imaginary line that crosses the center of the active surface 8 in the first direction X in a plan view. In this embodiment, the gate subpad 88 is disposed shifted to one side or the other side in the first direction X with respect to the imaginary line that crosses the center of the active surface 8 in the second direction Y in a plan view.

[0317] In this embodiment, the gate subpad 88 is disposed at a distance from the gate pad 81 on one side in the first direction X (the side toward the third connection surface 10C), and faces the gate pad 81 in the first direction X. The gate subpad 88 has a planar area smaller than the planar area of ​​the gate pad 81. In addition, the gate subpad 88 is formed narrower than the gate pad 81 and wider than the gate wiring 82 (first wiring portion 83) in the second direction Y.

[0318] The gate subpad 88 is disposed on the active region 12 at a distance from the first side end region 13, the second side end region 14, the first termination region 15, and the second termination region 16 in a plan view. That is, the gate subpad 88 is disposed at a distance inward of the active surface 8 from the positions of the ends of the plurality of trench side end structures 23 in the first direction X in a plan view, and faces the plurality of trench side end structures 23 in the first direction X.

[0319] Furthermore, the gate subpad 88 is disposed at a distance from the plurality of trench termination structures 24 in the second direction Y in plan view, and faces the plurality of trench termination structures 24 in the second direction Y. The gate subpad 88 does not face the plurality of trench side end structures 23 and the plurality of trench termination structures 24 in the stacking direction of the interlayer film 55.

[0320] The gate subpad 88 partially faces the plurality of trench gate structures 21 with the interlayer film 55 interposed therebetween, and partially faces the plurality of trench source structures 22 with the interlayer film 55 interposed therebetween. The gate subpad 88 is arranged inward of the active surface 8 at a distance from both end positions of the plurality of trench gate structures 21 in the first direction X in plan view. Therefore, the gate subpad 88 covers the inner portions of the plurality of trench gate structures 21 with the interlayer film 55 interposed therebetween, and exposes both end positions of the plurality of trench gate structures 21.

[0321] The gate subpad 88 also covers the inner sides of the trench source structures 22 with the interlayer film 55 interposed therebetween, and exposes both ends of the trench source structures 22. The gate subpad 88 is electrically isolated from the trench source structures 22 and does not have any mechanical connection to the trench source structures 22.

[0322] The gate subpad 88 faces the body region 18, the source region 19, the plurality of first well regions 41, the plurality of second well regions 42, and the plurality of contact regions 45, with the interlayer film 55 sandwiched between them. In this embodiment, the gate subpad 88 is disposed at a distance in the horizontal direction from the gate connection electrode 51 (gate opening 72), and does not face the gate connection electrode 51 with the interlayer film 55 sandwiched between them. In other words, the gate subpad 88 faces a portion of the trench gate structure 21 that is exposed from the gate connection electrode 51.

[0323] In this embodiment, the gate subpad 88 faces, in plan view, a region between at least two gate connection electrodes 51 arranged on both sides of the trench gate structure 21 in the first direction X. In this embodiment, the gate subpad 88 does not face, in plan view, at least one gate connection electrode 51 arranged inside the trench gate structure 21 in the second direction Y.

[0324] In this embodiment, the gate subpad 88 is disposed at a distance in the horizontal direction from the overlapping portion 52 a of the sidewall wiring 52, and does not face the overlapping portion 52 a across the interlayer film 55. In this embodiment, the gate subpad 88 is disposed above a region surrounded by the sidewall wiring 52 in plan view.

[0325] In this way, the gate wiring 82 is electrically connected to the gate pad 81 via the resistive film 61. As a result, a gate resistor R made up of a part of the resistive film 61 is electrically interposed between the gate pad 81 and the gate wiring 82. The gate resistor R is formed by a part of the resistive film 61 that is located between the connection part of the gate pad 81 and the connection part of the gate wiring 82.

[0326] That is, in this embodiment, one gate resistor R is connected in series to the gate pad 81 and the gate wiring 82. The resistance value of the gate resistor R can also be adjusted by increasing or decreasing the distance between the connection portion of the gate pad 81 and the connection portion of the first wiring portion 83.

[0327] The resistive film 61 (gate resistor R) slows down the switching speed during switching operation to suppress surge currents. In other words, the resistive film 61 suppresses noise caused by surge currents. Because the resistive film 61 is disposed on the first main surface 3 (active surface 8), it is not externally connected to the semiconductor device 1. This reduces the number of components mounted on the circuit board. Furthermore, because the resistive film 61 is disposed on the active region 12, there is no need to provide a separate area for the resistive film 61 on the first main surface 3. This prevents the chip 2 from becoming larger in size.

[0328] The gate wiring 82 is also electrically connected to the plurality of trench gate structures 21 covered by the resistive film 61. Therefore, the plurality of trench gate structures 21 are controlled in the regions inside and outside the resistive film 61 in a plan view. This suppresses reduction of the active region 12 caused by the layout of the resistive film 61.

[0329] The plurality of trench gate structures 21 arranged directly below the resistive film 61 have the same configuration as the plurality of trench gate structures 21 arranged in the region outside the region directly below the resistive film 61, and are controlled by a gate potential. The plurality of trench source structures 22 arranged directly below the resistive film 61 have the same configuration as the plurality of trench source structures 22 arranged in the region outside the region directly below the resistive film 61, and are controlled by a source potential.

[0330] Therefore, the electric field distribution immediately below the resistive film 61 inside the chip 2 becomes the same as the electric field distribution in the region outside the region immediately below the resistive film 61 inside the chip 2. Therefore, a decrease in the breakdown voltage caused by the layout of the resistive film 61 is suppressed.

[0331] Similarly, the gate wiring 82 is electrically connected to the plurality of trench gate structures 21 covered by the gate pad 81 (gate subpad 88). Therefore, the plurality of trench gate structures 21 are controlled in the regions inside and outside the gate pad 81 in a plan view. This suppresses shrinkage of the active region 12 caused by the layout of the gate pad 81.

[0332] Furthermore, the plurality of trench gate structures 21 arranged directly below the gate pad 81 (gate subpad 88) have the same configuration as the plurality of trench gate structures 21 arranged in the region outside the region directly below the gate pad 81, and are controlled by the gate potential. Furthermore, the plurality of trench source structures 22 arranged directly below the gate pad 81 have the same configuration as the plurality of trench source structures 22 arranged in the region outside the region directly below the gate pad 81, and are controlled by the source potential.

[0333] Therefore, the electric field distribution immediately below the gate pad 81 (gate subpad 88) inside the chip 2 becomes the same as the electric field distribution in the region outside the region immediately below the gate pad 81 inside the chip 2. Therefore, a decrease in the breakdown voltage caused by the layout of the gate pad 81 is suppressed.

[0334] The semiconductor device 1 includes a source electrode 90 disposed on the interlayer film 55 at a distance from the gate electrode 80. Specifically, the source electrode 90 is disposed on the upper interlayer film 57. Therefore, the source electrode 90 is disposed in a layer above the resistive film 61.

[0335] The source electrode 90 has a resistance value lower than that of the resistive film 61. The source electrode 90 preferably has a thickness greater than that of the resistive film 61. The thickness of the source electrode 90 is preferably greater than that of the interlayer film 55. The thickness of the source electrode 90 is preferably approximately equal to that of the gate electrode 80. The thickness of the source electrode 90 may be 0.5 μm or more and 10 μm or less. The thickness of the source electrode 90 is preferably 1 μm or more and 5 μm or less.

[0336] In this embodiment, the source electrode 90 has a layered structure including a first electrode film 90a and a second electrode film 90b, which are layered in this order from the interlayer film 55 side. The first electrode film 90a is formed as a barrier electrode. The first electrode film 90a includes at least one of a Ti film, a TiN film, and a W film. In this embodiment, the first electrode film 90a includes a Ti film. It is preferable that the first electrode film 90a has approximately the same thickness as the first electrode film 80a of the gate electrode 80.

[0337] The second electrode film 90b has a thickness greater than that of the first electrode film 90a and forms the main body of the source electrode 90. The second electrode film 90b preferably has a thickness approximately equal to that of the second electrode film 80b of the gate electrode 80. The second electrode film 90b includes at least one of an Al film, a Cu film, an Al alloy film, and a Cu alloy film.

[0338] The second electrode film 90b may include at least one of a pure Cu film (a Cu film with a purity of 99% or more), a pure Al film (an Al film with a purity of 99% or more), an AlCu alloy film, an AlSi alloy film, and an AlSiCu alloy film. In this embodiment, the second electrode film 90b includes an Al alloy film (an AlSiCu alloy film in this embodiment).

[0339] In this embodiment, the source electrode 90 includes at least one (in this embodiment, multiple) source pads 91 and source wiring 92. The source pad 91 may be referred to as a "low potential pad electrode," a "source pad electrode," etc. The source wiring 92 may be referred to as a "low potential wiring electrode," a "source wiring electrode," etc.

[0340] The source pad 91 includes a first source pad 91A and a second source pad 91B. The first source pad 91A is disposed in a region on one side in the first direction X on a portion of the interlayer film 55 that covers the active region 12. Specifically, the first source pad 91A is disposed in a region between the second wiring portion 84 and the fifth wiring portion 87.

[0341] The first source pad 91A has a planar area larger than that of the resistive film 61. The planar area of ​​the first source pad 91A is also larger than that of the gate pad 81. The proportion of the active surface 8 (first main surface 3) occupied by the first source pad 91A is preferably 25% or more and 50% or less.

[0342] The first source pad 91A is disposed on the active region 12 at a distance from the first side end region 13 in plan view. That is, the first source pad 91A is disposed at a distance inward of the active surface 8 from the positions of the ends of the plurality of trench side end structures 23 in the first direction X in plan view, and faces the plurality of trench side end structures 23 in the first direction X. The first source pad 91A does not face the plurality of trench side end structures 23 across the interlayer film 55.

[0343] The first source pad 91A partially faces the plurality of trench gate structures 21 with the interlayer film 55 interposed therebetween, and partially faces the plurality of trench source structures 22 with the interlayer film 55 interposed therebetween. The resistive film 61 is disposed inward of the active surface 8 at intervals from both end positions of the plurality of trench gate structures 21 in the first direction X in plan view.

[0344] Therefore, the first source pad 91A covers the inner parts of the plurality of trench gate structures 21 with the interlayer film 55 therebetween, and exposes both ends of the plurality of trench gate structures 21. The first source pad 91A covers the inner parts of the plurality of trench source structures 22 with the interlayer film 55 therebetween, and exposes both ends of the plurality of trench source structures 22.

[0345] The first source pad 91A extends from above the interlayer film 55 into the plurality of source openings 73 and is electrically connected to the plurality of trench source structures 22 , the source regions 19 and the plurality of contact regions 45 in the plurality of source openings 73 .

[0346] In this embodiment, the first source pad 91A includes a first pad portion 91a and a second pad portion 91b. The first pad portion 91a is located in an area on the other side (the second side surface 5B side) of the gate pad 81 in the second direction Y and faces the gate pad 81 in the second direction Y. The second pad portion 91b is located in an area on one side (the third side surface 5C side) of the gate pad 81 in the first direction X and faces the gate pad 81 in the first direction X.

[0347] Specifically, the second pad portion 91b faces the gate pad 81 in the first direction X, with a part of the gate wiring 82 (fourth wiring portion 86) sandwiched therebetween. In this embodiment, the second pad portion 91b faces the gate pad 81 in a plan view, with the gate subpad 88 sandwiched therebetween. A portion of the second pad portion 91b that is aligned with the gate subpad 88 is recessed in a rectangular shape along the gate subpad 88 in a plan view. Furthermore, the second pad portion 91b faces the resistive film 61 in the first direction X in a plan view.

[0348] The second pad portion 91b may cover at least one trench gate structure 21 arranged directly below the resistive film 61. The second pad portion 91b may cover at least one trench source structure 22 arranged directly below the resistive film 61. In this embodiment, the second pad portion 91b covers a plurality of trench gate structures 21 and a plurality of trench source structures 22 arranged directly below the resistive film 61.

[0349] In this embodiment, the second pad portion 91b is connected to a portion of at least one (a plurality of) trench source structures 22 arranged directly below the resistive film 61 that is exposed from the resistive film 61, via at least one (a plurality of) source openings 73. The second pad portion 91b is also connected to the source region 19 and the contact region 45 that are located along the plurality of trench source structures 22 arranged directly below the resistive film 61. Therefore, the current path of the output current is extended by the first source pad 91A to a region on one side of the resistive film 61 in the first direction X.

[0350] The second source pad 91B is arranged in a region on the other side in the first direction X on a portion of the interlayer film 55 that covers the active region 12. Specifically, the second source pad 91B is arranged in a region between the third wiring portion 85 and the fifth wiring portion 87, and faces the first source pad 91A in the first direction X with the fifth wiring portion 87 interposed therebetween.

[0351] The second source pad 91B has a planar area larger than that of the resistive film 61. The planar area of ​​the second source pad 91B is also larger than that of the gate pad 81. The proportion of the active surface 8 (first main surface 3) occupied by the second source pad 91B is preferably 25% or more and 50% or less.

[0352] The second source pad 91B is disposed on the active region 12 at a distance from the second side end region 14 in plan view. That is, the second source pad 91B is disposed at a distance inward of the active surface 8 from the ends of the plurality of trench side end structures 23 in the first direction X in plan view, and faces the plurality of trench side end structures 23 in the first direction X. The second source pad 91B does not face the plurality of trench side end structures 23 across the interlayer film 55.

[0353] The second source pad 91B partially faces the plurality of trench gate structures 21 with the interlayer film 55 interposed therebetween, and partially faces the plurality of trench source structures 22 with the interlayer film 55 interposed therebetween. The resistive film 61 is disposed inward of the active surface 8 at intervals from both end positions of the plurality of trench gate structures 21 in the first direction X in plan view.

[0354] Therefore, the second source pad 91B covers the inner parts of the plurality of trench gate structures 21 with the interlayer film 55 therebetween, and exposes both ends of the plurality of trench gate structures 21. The second source pad 91B also covers the inner parts of the plurality of trench source structures 22 with the interlayer film 55 therebetween, and exposes both ends of the plurality of trench source structures 22.

[0355] The second source pad 91B extends from above the interlayer film 55 into the plurality of source openings 73 and is electrically connected to the plurality of trench source structures 22 , the source regions 19 and the plurality of contact regions 45 in the plurality of source openings 73 .

[0356] In this embodiment, the second source pad 91B includes a third pad portion 91c and a fourth pad portion 91d. The third pad portion 91c is located in an area on the other side (the second side surface 5B side) of the gate pad 81 in the second direction Y, faces the first pad portion 91a of the first source pad 91A in the first direction X, and faces the gate pad 81 in the second direction Y.

[0357] The fourth pad portion 91d is located in an area on the other side (the fourth side surface 5D side) of the gate pad 81 in the first direction X, and faces the second pad portion 91b of the first source pad 91A, with the gate pad 81 sandwiched between them in the first direction X. Specifically, the fourth pad portion 91d faces the gate pad 81 in the first direction X, with a part of the gate wiring 82 (fourth wiring portion 86) sandwiched between them. The fourth pad portion 91d also faces the resistive film 61 in the first direction X in a plan view. That is, the fourth pad portion 91d faces the second pad portion 91b in the first direction X, with the resistive film 61 and the gate pad 81 sandwiched between them in a plan view.

[0358] The fourth pad portion 91d may cover at least one trench gate structure 21 arranged directly below the resistive film 61. The fourth pad portion 91d may cover at least one trench source structure 22 arranged directly below the resistive film 61. In this embodiment, the fourth pad portion 91d covers a plurality of trench gate structures 21 and a plurality of trench source structures 22 arranged directly below the resistive film 61.

[0359] In this embodiment, the fourth pad portion 91d is connected to a portion of at least one (a plurality of) trench source structures 22 arranged directly below the resistive film 61 that is exposed from the resistive film 61, via at least one (a plurality of) source openings 73. The second source pad 91B is also connected to the source region 19 and the contact region 45 that are located along the plurality of trench source structures 22 arranged directly below the resistive film 61.

[0360] Therefore, the current path of the output current is extended by the second source pad 91B to a region on the other side in the first direction X with respect to the resistive film 61. In this embodiment, the fourth pad portion 91d is connected to at least one (in this embodiment, multiple) trench source structures 22 connected to the second pad portion 91b.

[0361] The source wiring 92 transmits the source potential applied to the source pad 91 to other regions. In this embodiment, the source wiring 92 is drawn out from the source pad 91 onto the interlayer film 55 so as to be located closer to the outer periphery region 17 than the gate wiring 82. The source wiring 92 is drawn out from the active surface 8 side to the outer periphery surface 9 side, passing through the first to fourth connecting surfaces 10A to 10D.

[0362] The source wiring 92 is formed in a strip shape extending along the first to fourth connecting faces 10A to 10D, and faces the sidewall wiring 52 across the interlayer film 55. In this embodiment, the source wiring 92 is formed in a ring shape (specifically, a square ring shape) extending along the first to fourth connecting faces 10A to 10D.

[0363] The source wiring 92 covers the first side end region 13, the second side end region 14, the first termination region 15, and the second termination region 16 on the active surface 8, and surrounds the active region 12. In other words, the source wiring 92 surrounds the resistive film 61, the gate pad 81, the gate wiring 82, and the plurality of source pads 91. The source wiring 92 is disposed closer to the outer peripheral surface 9 than the resistive film 61, and has a portion facing the resistive film 61 in the second direction Y, with a part of the gate wiring 82 (first wiring portion 83) sandwiched between them.

[0364] The source wiring 92 enters the outer opening 74 from above the interlayer film 55 in the peripheral region 17, and is electrically connected to the outer contact region 47 and the sidewall wiring 52 within the outer opening 74. The source potential applied to the source pad 91 is transmitted to the sidewall wiring 52 via the source wiring 92. The source potential applied to the sidewall wiring 52 is transmitted from the peripheral region 17 to the plurality of trench source structures 22, the plurality of trench side end structures 23, and the plurality of trench termination structures 24.

[0365] The semiconductor device 1 includes a pad insulating film 100 that selectively covers the gate electrode 80, the source electrode 90, and the interlayer film 55. With respect to the gate electrode 80, the pad insulating film 100 covers the periphery of the gate pad 81, the periphery of the gate subpad 88, and the entire area of ​​the gate wiring 82. The pad insulating film 100 has a gate pad opening 101 that exposes the inner part of the gate pad 81, and a gate subpad opening 102 that exposes the inner part of the gate subpad 88.

[0366] In this embodiment, the pad insulating film 100 covers the second pad portion 81b of the gate pad 81 and has a gate pad opening 101 that exposes the first pad portion 81a of the gate pad 81. In other words, the pad insulating film 100 covers the resistive film 61, sandwiching a part of the gate pad 81 (second pad portion 81b) and a part of the interlayer film 55 (upper interlayer film 57). The pad insulating film 100 also covers the resistive film 61, sandwiching a part of the gate wiring 82 (first wiring portion 83) and a part of the interlayer film 55 (upper interlayer film 57).

[0367] The pad insulating film 100 covers a gap portion of the interlayer film 55 that is exposed from a region between the gate pad 81 (second pad portion 81b) and the gate wiring 82 (first wiring portion 83), and covers the resistive film 61 across the gap. It is preferable that the pad insulating film 100 covers the entire resistive film 61. The gate pad opening 101 is formed in a quadrangular shape in a plan view. The gate pad opening 101 may be formed in a polygonal shape, a circle, an ellipse, or the like other than a quadrangular shape in a plan view.

[0368] The gate subpad opening 102 has a plane area smaller than the plane area of ​​the gate pad opening 101. The gate pad opening 101 is formed in a rectangular shape in a plan view. The gate subpad opening 102 is formed in a rectangular shape in a plan view. The gate subpad opening 102 may be formed in a polygonal shape other than a rectangular shape, a circular shape, an elliptical shape, or the like in a plan view.

[0369] With respect to the source electrode 90, the pad insulating film 100 covers the peripheral portion of the first source pad 91A, the peripheral portion of the second source pad 91B, and the entire area of ​​the source wiring 92. The pad insulating film 100 includes a first source pad opening 103 exposing the inner portion of the first source pad 91A, a second source pad opening 104 exposing the inner portion of the first source pad 91A, a third source pad opening 105 exposing the inner portion of the second source pad 91B, and a fourth source pad opening 106 exposing the inner portion of the second source pad 91B.

[0370] The first pad portion 91 a of the first source pad 91 A is exposed through the first source pad opening 103. A source potential for the main source may be applied to the first pad portion 91 a from the outside through the first source pad opening 103.

[0371] The second source pad opening 104 exposes the second pad portion 91b of the first source pad 91A. The plane area of ​​the second source pad opening 104 is preferably smaller than the plane area of ​​the first source pad opening 103. A source potential for source sensing may be applied to the second pad portion 91b from the outside via the second source pad opening 104. Of course, a source potential for the main source may also be applied to the second pad portion 91b from the outside via the second source pad opening 104.

[0372] The third source pad opening 105 exposes the third pad portion 91c of the second source pad 91B. The plane area of ​​the third source pad opening 105 is preferably larger than the plane area of ​​the second source pad opening 104. The plane area of ​​the third source pad opening 105 is preferably approximately equal to the plane area of ​​the first source pad opening 103. A source potential for the main source may be applied to the third pad portion 91c from the outside via the third source pad opening 105.

[0373] The fourth source pad opening 106 exposes the fourth pad portion 91d of the second source pad 91B. The plane area of ​​the fourth source pad opening 106 is preferably smaller than the plane area of ​​the third source pad opening 105. The plane area of ​​the fourth source pad opening 106 is preferably approximately equal to the plane area of ​​the second source pad opening 104. A source potential for source sensing may be applied to the fourth pad portion 91d from the outside via the fourth source pad opening 106. Of course, a source potential for main source sensing may also be applied to the fourth pad portion 91d from the outside via the fourth source pad opening 106.

[0374] The first to fourth source pad openings 103 to 106 are formed in a rectangular shape in a plan view. The first to fourth source pad openings 103 to 106 may be formed in a polygonal shape other than a rectangular shape, a circular shape, an elliptical shape, or the like in a plan view. The first to fourth source pad openings 103 to 106 preferably have a planar area larger than the planar area of ​​the gate subpad opening 102.

[0375] The planar areas of the first to fourth source pad openings 103 to 106 are preferably larger than the planar area of ​​the gate pad opening 101. Of course, the planar areas of the second source pad opening 104 and the fourth source pad opening 106 may be smaller than the planar area of ​​the gate pad opening 101.

[0376] In this embodiment, the second source pad opening 104 is formed spaced apart from the first source pad opening 103. However, the second source pad opening 104 may be connected to the first source pad opening 103 and form one pad opening together with the first source pad opening 103. Similarly, the fourth source pad opening 106 may be connected to the third source pad opening 105 and form one pad opening together with the third source pad opening 105.

[0377] The pad insulating film 100 covers the outer well region 46, the outer contact region 47, and the plurality of field regions 48 with the interlayer film 55 sandwiched therebetween in the peripheral region 17. The pad insulating film 100 covers the sidewall wiring 52 with the interlayer film 55 and the source wiring 92 sandwiched therebetween at the first to fourth connecting surfaces 10A to 10D.

[0378] The pad insulating film 100 is formed in the outer peripheral region 17 at a distance inward from the periphery (first to fourth side surfaces 5A to 5D) of the chip 2, and defines a dicing street 107 between the pad insulating film 100 and the periphery of the chip 2. The dicing street 107 is formed in a band shape extending along the periphery of the chip 2 in a plan view. In this embodiment, the dicing street 107 is formed in a ring shape (specifically, a quadrangular ring) surrounding the active surface 8 in a plan view. In this embodiment, the dicing street 107 exposes the interlayer film 55.

[0379] Of course, when the main surface insulating film 50 and the interlayer film 55 expose the outer peripheral surface 9, the dicing street 107 may also expose the outer peripheral surface 9. The dicing street 107 may have a width of 1 μm or more and 200 μm or less. The width of the dicing street 107 is the width in a direction perpendicular to the extension direction of the dicing street 107. The width of the dicing street 107 is preferably 5 μm or more and 50 μm or less.

[0380] The pad insulating film 100 preferably has a thickness greater than the thickness of the gate electrode 80 and the thickness of the source electrode 90. The thickness of the pad insulating film 100 is preferably greater than the total thickness of the gate electrode 80 and the source electrode 90. The thickness of the pad insulating film 100 is preferably less than the thickness of the chip 2. The thickness of the pad insulating film 100 may be 3 μm or more and 35 μm or less. The thickness of the pad insulating film 100 is preferably 25 μm or less.

[0381] In this embodiment, the pad insulating film 100 has a laminated structure including an inorganic insulating film 108 and an organic insulating film 109 laminated in this order from the chip 2 side (interlayer film 55 side). The pad insulating film 100 only needs to include at least one of the inorganic insulating film 108 and the organic insulating film 109, and does not necessarily need to include both the inorganic insulating film 108 and the organic insulating film 109 at the same time.

[0382] The inorganic insulating film 108 selectively covers the gate electrode 80, the source electrode 90, and the interlayer film 55, and defines a part of the gate pad opening 101, a part of the gate subpad opening 102, a part of the first source pad opening 103, a part of the second source pad opening 104, a part of the third source pad opening 105, a part of the fourth source pad opening 106, and a part of the dicing street 107.

[0383] The inorganic insulating film 108 may include at least one of a silicon oxide film, a silicon nitride film, and a silicon oxynitride film. The inorganic insulating film 108 preferably includes an insulating material different from that of the interlayer film 55. The inorganic insulating film 108 preferably includes a silicon nitride film. The inorganic insulating film 108 preferably has a thickness less than that of the interlayer film 55. The thickness of the inorganic insulating film 108 may be 0.1 μm or more and 5 μm or less.

[0384] The organic insulating film 109 selectively covers the inorganic insulating film 108 and defines a portion of the gate pad opening 101, a portion of the gate subpad opening 102, a portion of the first source pad opening 103, a portion of the second source pad opening 104, a portion of the third source pad opening 105, a portion of the fourth source pad opening 106, and a portion of the dicing street 107.

[0385] The organic insulating film 109 may expose the inorganic insulating film 108 at the wall surface of the gate pad opening 101. The organic insulating film 109 may expose the inorganic insulating film 108 at the wall surface of the gate subpad opening 102. The organic insulating film 109 may expose the inorganic insulating film 108 at the wall surface of the first source pad opening 103. The organic insulating film 109 may expose the inorganic insulating film 108 at the wall surface of the second source pad opening 104.

[0386] The organic insulating film 109 may expose the inorganic insulating film 108 at the wall surface of the third source pad opening 105. The organic insulating film 109 may expose the inorganic insulating film 108 at the wall surface of the fourth source pad opening 106. The organic insulating film 109 may expose the inorganic insulating film 108 at the wall surface of the dicing street 107. Of course, the organic insulating film 109 may cover the entire area of ​​the inorganic insulating film 108 so that the inorganic insulating film 108 is not exposed.

[0387] The organic insulating film 109 is preferably made of a resin film other than a thermosetting resin. The organic insulating film 109 may be made of a light-transmitting resin or a transparent resin. The organic insulating film 109 may be made of a negative-type or positive-type photosensitive resin film. The organic insulating film 109 is preferably made of a polyimide film, a polyamide film, or a polybenzoxazole film.

[0388] The organic insulating film 109 preferably has a thickness greater than that of the inorganic insulating film 108. The organic insulating film 109 preferably has a thickness greater than that of the interlayer film 55. The organic insulating film 109 particularly preferably has a thickness greater than that of the gate electrode 80 and that of the source electrode 90. The thickness of the organic insulating film 109 may be 3 μm or more and 30 μm or less. The thickness of the organic insulating film 109 is preferably 20 μm or less.

[0389] The semiconductor device 1 includes a drain electrode 110 covering the second main surface 4. The drain electrode 110 may be referred to as a "drain pad," "drain pad electrode," "high potential pad electrode," or the like. The drain electrode 110 forms an ohmic contact with the second semiconductor region 7 exposed from the second main surface 4. The drain electrode 110 may cover the entire second main surface 4 so as to be continuous with the periphery (first to fourth side surfaces 5A to 5D) of the chip 2. The drain electrode 110 may cover the second main surface 4 so as to partially expose the periphery of the chip 2.

[0390] The breakdown voltage that can be applied between the source electrode 90 and the drain electrode 110 (between the first main surface 3 and the second main surface 4) may be 500 V or more. The breakdown voltage may be 600 V or more. The breakdown voltage may be 1000 V or more. The breakdown voltage may be 3000 V or less.

[0391] As described above, the semiconductor device 1 includes the chip 2, the trench structure 20, the lower interlayer film 56, and the resistive film 61. The chip 2 has a first main surface 3. The trench structure 20 is formed on the first main surface 3. The lower interlayer film 56 covers the trench structure 20. The resistive film 61 is disposed on the lower interlayer film 56 and partially faces the trench structure 20 with the lower interlayer film 56 in between.

[0392] From another perspective, the semiconductor device 1 includes a chip 2, a trench gate structure 21, a lower interlayer film 56, and a resistive film 61. The chip 2 has a first main surface 3. The trench gate structure 21 is formed on the first main surface 3. The lower interlayer film 56 covers the trench gate structure 21. The resistive film 61 is disposed on the lower interlayer film 56 and partially faces the trench gate structure 21 with the lower interlayer film 56 interposed therebetween.

[0393] From another perspective, the semiconductor device 1 includes a chip 2, a trench source structure 22, a lower interlayer film 56, and a resistive film 61. The chip 2 has a first main surface 3. The trench source structure 22 is formed on the first main surface 3. The lower interlayer film 56 covers the trench source structure 22. The resistive film 61 is disposed on the lower interlayer film 56 and partially faces the trench source structure 22 with the lower interlayer film 56 in between.

[0394] From another perspective, the semiconductor device 1 includes a chip 2, a trench gate structure 21, a trench source structure 22, a lower interlayer film 56, and a resistive film 61. The chip 2 has a first main surface 3. The trench gate structure 21 is formed on the first main surface 3. The trench source structure 22 is formed on the first main surface 3 adjacent to the trench gate structure 21. The lower interlayer film 56 covers the trench gate structure 21 and the trench source structure 22. The resistive film 61 is disposed on the lower interlayer film 56 and partially faces the trench gate structure 21 and the trench source structure 22 with the lower interlayer film 56 in between.

[0395] From another perspective, the semiconductor device 1 includes a chip 2, a trench gate structure 21, a trench side end structure 23, a lower interlayer film 56, and a resistive film 61. The chip 2 has a first main surface 3. The trench gate structure 21 is formed in a strip shape extending in a first direction X on the first main surface 3. The trench side end structure 23 is formed on the first main surface 3 at a distance from the trench gate structure 21 in the first direction X and faces the trench gate structure 21 in the first direction X. The lower interlayer film 56 covers the first main surface 3. The resistive film 61 is disposed on the lower interlayer film 56 at a distance from the trench side end structure 23 in the first direction X and faces the trench gate structure 21 with the lower interlayer film 56 interposed therebetween.

[0396] From another perspective, the semiconductor device 1 includes a chip 2, a trench gate structure 21, a trench source structure 22, a trench side end structure 23, a lower interlayer film 56, and a resistive film 61. The chip 2 has a first main surface 3. The trench gate structure 21 is formed on the first main surface 3. The trench source structure 22 is formed on the first main surface 3 at a distance from the trench gate structure 21 in the second direction Y and faces the trench gate structure 21 in the second direction Y. The trench side end structure 23 is formed on the first main surface 3 at a distance from the trench gate structure 21 in a first direction X perpendicular to the second direction Y and faces the trench gate structure 21 in the first direction X. The lower interlayer film 56 covers the first main surface 3. The resistive film 61 is disposed on the lower interlayer film 56 and faces the trench gate structure 21 across the lower interlayer film 56.

[0397] From another perspective, the semiconductor device 1 includes a chip 2, a trench structure 20, a lower interlayer film 56, and a resistive film 61. The chip 2 has a first main surface 3. The trench structure 20 is formed on the first main surface 3. The lower interlayer film 56 includes a first lower insulating film 62 with no impurities added, and covers the trench structure 20. The resistive film 61 is disposed on the lower interlayer film 56 and partially faces the trench structure 20 with the lower interlayer film 56 in between.

[0398] From another perspective, the semiconductor device 1 includes a chip 2, a trench gate structure 21, a lower interlayer film 56, and a resistive film 61. The chip 2 has a first main surface 3. The trench gate structure 21 is formed on the first main surface 3. The lower interlayer film 56 includes a first lower insulating film 62 with no impurities added, and covers the trench gate structure 21. The resistive film 61 is disposed on the lower interlayer film 56 and partially faces the trench gate structure 21 with the lower interlayer film 56 interposed therebetween.

[0399] From another perspective, the semiconductor device 1 includes a chip 2, a trench source structure 22, a lower interlayer film 56, and a resistive film 61. The chip 2 has a first main surface 3. The trench source structure 22 is formed on the first main surface 3. The lower interlayer film 56 includes a first lower insulating film 62 with no impurities added, and covers the trench source structure 22. The resistive film 61 is disposed on the lower interlayer film 56 and partially faces the trench source structure 22 with the lower interlayer film 56 in between.

[0400] From another perspective, the semiconductor device 1 includes a chip 2, a trench gate structure 21, a trench source structure 22, a lower interlayer film 56, and a resistive film 61. The chip 2 has a first main surface 3. The trench gate structure 21 is formed on the first main surface 3. The trench source structure 22 is formed on the first main surface 3 adjacent to the trench gate structure 21. The lower interlayer film 56 includes a first lower insulating film 62 with no impurities added, and covers the trench gate structure 21 and the trench source structure 22. The resistive film 61 is disposed on the lower interlayer film 56 and partially faces the trench gate structure 21 and the trench source structure 22 with the lower interlayer film 56 in between.

[0401] From another perspective, the semiconductor device 1 includes a chip 2, an interlayer film 55, a resistive film 61, a gate pad 81, and a pad insulating film 100. The chip 2 has a first main surface 3. The interlayer film 55 covers the first main surface 3. The resistive film 61 is disposed inside the interlayer film 55. The gate pad 81 has a first pad portion 81a and a second pad portion 81b. The first pad portion 81a forms the main body of the gate pad 81. The second pad portion 81b penetrates a portion of the interlayer film 55 and is connected to the resistive film 61. The pad insulating film 100 has a gate pad opening 101 that exposes the first pad portion 81a of the gate pad 81 and covers the second pad portion 81b of the gate pad 81. The pad insulating film 100 covers the resistive film 61 with the second pad portion 81b sandwiched between them.

[0402] From another perspective, the semiconductor device 1 includes a chip 2, an active plateau 11, a lower interlayer film 56, and a resistive film 61. The chip 2 has a first main surface 3. The active plateau 11 is defined on the first main surface 3 by an active surface 8, an outer peripheral surface 9, and first to fourth connecting surfaces 10A to 10D. The active surface 8 is located inside the first main surface 3. The outer peripheral surface 9 is recessed in the thickness direction outside the active surface 8. The first to fourth connecting surfaces 10A to 10D connect the active surface 8 and the outer peripheral surface 9. The lower interlayer film 56 covers the active surface 8. The resistive film 61 is disposed on the lower interlayer film 56 and faces the active surface 8 with the lower interlayer film 56 in between.

[0403] These configurations make it possible to provide a semiconductor device 1 having a novel layout in a configuration including the resistive film 61. These layouts provide various ideas that contribute to improving electrical characteristics from various perspectives, particularly for designs associated with the resistive film 61 in SiC semiconductor devices (wide bandgap semiconductor devices).

[0404] Other layout examples of the pad region 60 (resistive film 61 and gate electrode 80) are shown below. Fig. 25 is a diagram showing another layout example of the pad region 60. Referring to Fig. 25, the resistive film 61 may cover almost the entire area of ​​the pad region 60 on the lower interlayer film 56. The plurality of resistor openings 70 have a first resistor opening 70A and a second resistor opening 70B, as in the case of the above-described embodiment.

[0405] The first resistor opening 70A exposes one end of the resistive film 61 on one side in the second direction Y. The second resistor opening 70B is formed at a distance from the first resistor opening 70A on one side in the second direction Y, and exposes one end of the resistive film 61 in a region closer to the first side surface 5A (first connecting surface 10A) than the first resistor opening 70A.

[0406] As in the above-described embodiment, the gate pad 81 has a first pad portion 81 a and a second pad portion 81 b. In this embodiment, the first pad portion 81 a is disposed on the inner portion of the resistive film 61 in a plan view and faces the resistive film 61 across a part of the interlayer film 55 (upper interlayer film 57). The first pad portion 81 a is disposed on the inner portion of the resistive film 61 at a distance from the periphery of the resistive film 61 in a plan view.

[0407] The second pad portion 81b extends from the first pad portion 81a toward the first resistor opening 70A and enters the first resistor opening 70A from above the interlayer film 55. The second pad portion 81b is mechanically and electrically connected to the resistor film 61 within the first resistor opening 70A.

[0408] The second pad portion 81b is disposed on the inner portion of the resistive film 61 at a distance from the periphery of the resistive film 61 in a plan view, and faces the resistive film 61 across a part of the interlayer film 55 (upper interlayer film 57). In other words, the entire area of ​​the gate pad 81 is disposed on the inner portion of the resistive film 61 at a distance from the periphery of the resistive film 61. The flatness of the gate pad 81 is improved by the resistive film 61.

[0409] In plan view, the gate wiring 82 covers at least a part of the periphery of the resistive film 61. In plan view, the gate wiring 82 preferably covers the entire periphery of the resistive film 61. In other words, the gate wiring 82 preferably covers the entire area of ​​a raised portion (second step portion 65c) formed in a portion of the interlayer film 55 that covers the periphery of the resistive film 61.

[0410] According to this configuration, the raised portion (second step portion 65c) of the interlayer film 55 caused by the resistive film 61 can be concealed by the gate wiring 82, thereby eliminating conductive residue caused by the raised portion (second step portion 65c) of the interlayer film 55. In this embodiment, the gate wiring 82 covers the entire periphery of the resistive film 61 (the raised portion of the interlayer film 55) in plan view.

[0411] As in the above-described embodiment, the gate wiring 82 includes a first wiring portion 83, a second wiring portion 84, a third wiring portion 85, a fourth wiring portion 86, and a fifth wiring portion 87. In this embodiment, the first wiring portion 83 covers one peripheral edge of the resistive film 61 extending in the first direction X in a plan view. Of course, the first wiring portion 83 may expose part or all of one peripheral edge of the resistive film 61 extending in the first direction X in a plan view.

[0412] The fourth wiring portion 86 covers the remaining three peripheral edges of the resistive film 61 in plan view. Of course, the fourth wiring portion 86 may expose part or all of the remaining three peripheral edges of the resistive film 61 in plan view.

[0413] Fig. 26 is a diagram showing another layout example of the pad region 60. The pad region 60 in Fig. 26 has a layout obtained by modifying the pad region 60 in Fig. 25. Specifically, in this embodiment, the plurality of resistor openings 70 include, in addition to a first resistor opening 70A and a second resistor opening 70B, one or more (one in this embodiment) third resistor openings 70C and one or more (one in this embodiment) fourth resistor openings 70D.

[0414] The third resistor opening 70C is formed in the upper interlayer film 57 so as to expose a part of the resistive film 61 in a region different from the first resistor opening 70A and the second resistor opening 70B. The third resistor opening 70C exposes the other end of the resistive film 61 on the other side in the second direction Y.

[0415] In this embodiment, the third resistor opening 70C is formed in a strip shape extending in the first direction X in a plan view. That is, the third resistor opening 70C extends parallel to the first resistor opening 70A (second resistor opening 70B). The third resistor opening 70C also extends in the direction in which the trench gate structure 21 and the trench source structure 22 extend.

[0416] The third resistor opening 70C faces the first resistor opening 70A (second resistor opening 70B) in the second direction Y. The third resistor opening 70C does not necessarily have to face the first resistor opening 70A (second resistor opening 70B) in the second direction Y, and may be shifted to one side or the other side in the first direction X with respect to the first resistor opening 70A (second resistor opening 70B).

[0417] The third resistor opening 70C has an opening width in the first direction X that is smaller than the resistor length LR of the resistor film 61, and exposes an inner portion of the resistor film 61 at a distance from the periphery of the resistor film 61. The opening width of the third resistor opening 70C may be equal to or larger than the opening width of the first resistor opening 70A (second resistor opening 70B), or may be smaller than the opening width of the first resistor opening 70A (second resistor opening 70B).

[0418] When multiple third resistor openings 70C are formed, the multiple third resistor openings 70C are formed at intervals in the first direction X at the other end of the resistive film 61. In this case, each third resistor opening 70C may be formed in a rectangular, polygonal, circular, or elliptical shape in plan view.

[0419] The fourth resistor opening 70D is formed in the upper interlayer film 57 so as to expose a part of the resistive film 61 in a region different from the first resistor opening 70A, the second resistor opening 70B, and the third resistor opening 70C. The fourth contact opening is formed at a distance from the third resistor opening 70C on the other side in the second direction Y, and exposes the other end of the resistive film 61 in a region closer to the second side surface 5B (second connecting surface 10B) than the third resistor opening 70C.

[0420] In this embodiment, the fourth resistor opening 70D is formed in a strip shape extending in the first direction X in a plan view. That is, in this embodiment, the fourth resistor opening 70D extends parallel to the third resistor opening 70C. The fourth resistor opening 70D also extends in the direction in which the trench gate structure 21 and the trench source structure 22 extend.

[0421] The fourth resistor opening 70D faces the third resistor opening 70C in the second direction Y. The fourth resistor opening 70D does not necessarily have to face the third resistor opening 70C in the second direction Y, and may be shifted to one side or the other side in the first direction X with respect to the third resistor opening 70C.

[0422] The fourth resistor opening 70D has an opening width in the first direction X that is smaller than the resistor length LR of the resistor film 61, and exposes an inner portion of the resistor film 61 at a distance from the periphery of the resistor film 61. The opening width of the fourth resistor opening 70D may be equal to or larger than the opening width of the third resistor opening 70C, or may be smaller than the opening width of the third resistor opening 70C.

[0423] When multiple fourth resistor openings 70D are formed, the multiple fourth resistor openings 70D are formed at intervals in the first direction X at the other end of the resistive film 61. In this case, each fourth resistor opening 70D may be formed in a rectangular, polygonal, circular, or elliptical shape in plan view.

[0424] The fourth resistor openings 70D may be arranged to face the third resistor openings 70C in a one-to-one correspondence in the second direction Y in a plan view. Of course, the fourth resistor openings 70D may be arranged to face the regions between the third resistor openings 70C in a one-to-one correspondence in the second direction Y in a plan view.

[0425] Of course, the opening group including the plurality of fourth resistor openings 70D may be spaced apart from the opening group including the plurality of third resistor openings 70C on one side and / or the other side in the first direction X so as not to face the opening group including the plurality of third resistor openings 70C in the second direction Y in a plan view. Although not specifically shown in the drawings, the resistive film 61 has a resistive recess portion 71 in the portion exposed from the first to fourth resistor openings 70A to 70D.

[0426] In this embodiment, the gate pad 81 has a third pad portion 81c in addition to a first pad portion 81a and a second pad portion 81b. The third pad portion 81c has the same configuration as the second pad portion 81b, except that the extraction direction is different.

[0427] The third pad portion 81c is drawn from the first pad portion 81a toward the third resistor opening 70C and enters the third resistor opening 70C from above the interlayer film 55. The third pad portion 81c is mechanically and electrically connected to a part (the other end) of the resistor film 61 within the third resistor opening 70C.

[0428] The third pad portion 81c is disposed on an inner portion of the resistive film 61 at a distance from the periphery of the resistive film 61 in a plan view, and faces the resistive film 61 across a part of the interlayer film 55 (upper interlayer film 57). The third pad portion 81c also faces the plurality of trench gate structures 21 and the plurality of trench source structures 22 across the interlayer film 55 and the resistive film 61. In other words, the entire area of ​​the gate pad 81 is disposed on an inner portion of the resistive film 61 at a distance from the periphery of the resistive film 61. The flatness of the gate pad 81 is improved by the resistive film 61.

[0429] The gate wiring 82 has a layout similar to that shown in FIG. 25 . The first wiring portion 83 enters the second resistor opening 70B from above the interlayer film 55 and is mechanically and electrically connected to one end of the resistor film 61 within the second resistor opening 70B. In this embodiment, the first wiring portion 83 forms a first gate resistor R1 between itself and the gate pad 81. The resistance value of the first gate resistor R1 can also be adjusted by increasing or decreasing the distance between the connection portion of the gate pad 81 and the connection portion of the first wiring portion 83.

[0430] On the other hand, the fourth wiring portion 86 enters the fourth resistor opening 70B from above the interlayer film 55 and is mechanically and electrically connected to the other end of the resistor film 61 within the fourth resistor opening 70B. In this embodiment, the fourth wiring portion 86 forms a second gate resistor R2 between itself and the gate pad 81. The second gate resistor R2 is connected in parallel to the first gate resistor R1 via the gate wiring 82.

[0431] Therefore, the resistance value between the gate pad 81 and the gate wiring 82 is the combined resistance of the first gate resistor R1 and the second gate resistor R2 (=R1·R2 / (R1+R2)). The resistance value of the second gate resistor R2 can also be adjusted by increasing or decreasing the distance between the connection portion of the gate pad 81 and the connection portion of the fourth wiring portion 86. It is preferable that the resistance value of the second gate resistor R2 be approximately equal to the resistance value of the first gate resistor R1.

[0432] In this manner, in this embodiment, the gate wiring 82 is mechanically and electrically connected to a portion (one end) of the resistive film 61 in the second resistor opening 70B, and is mechanically and electrically connected to a portion (the other end) of the resistive film 61 in the fourth resistor opening 70B. In other words, the gate wiring 82 is connected to the resistive film 61 at multiple locations, and forms multiple gate resistors R (first gate resistor R1 and second gate resistor R2 in this embodiment) between the multiple trench gate structures 21 and the gate pad 81.

[0433] In this embodiment, the pad insulating film 100 covers the second pad portion 81 b and the third pad portion 81 c of the gate pad 81 and has a gate pad opening 101 that exposes the first pad portion 81 a of the gate pad 81 .

[0434] That is, the pad insulating film 100 covers one end (first gate resistor R1) of the resistive film 61, sandwiching a part of the gate pad 81 (second pad portion 81b) and a part of the interlayer film 55 (upper interlayer film 57). The pad insulating film 100 also covers one end (first gate resistor R1) of the resistive film 61, sandwiching a part of the gate wiring 82 (first wiring portion 83) and a part of the interlayer film 55 (upper interlayer film 57).

[0435] The pad insulating film 100 also covers the other end (second gate resistor R2) of the resistive film 61, sandwiching a part of the gate pad 81 (third pad portion 81c) and a part of the interlayer film 55 (upper interlayer film 57). The pad insulating film 100 also covers the other end (second gate resistor R2) of the resistive film 61, sandwiching a part of the gate wiring 82 (fourth wiring portion 86) and a part of the interlayer film 55 (upper interlayer film 57).

[0436] The pad insulating film 100 also covers the annular gap portion of the interlayer film 55 that is exposed from the region (annular region in this embodiment) between the gate pad 81 and the gate wiring 82, and covers the resistive film 61 across the annular gap. In this embodiment, the pad insulating film 100 annularly faces the resistive film 61 across the interlayer film 55 across the entire annular gap in plan view.

[0437] 27 is a diagram showing another layout example of the pad region 60. The pad region 60 in FIG. 27 has a layout obtained by modifying the pad region 60 in FIG. 26. Specifically, in this embodiment, the resistive film 61 is disposed on the other side of the pad region 60 in the second direction Y so as to expose an inner portion of the pad region 60. The resistive film 61 is formed in a strip shape extending in the first direction X in a plan view. The interlayer film 55 has the third resistor opening 70C and the fourth contact opening described above.

[0438] The gate pad 81 has a first pad portion 81a and a third pad portion 81c, but does not have a second pad portion 81b. In this embodiment, the first pad portion 81a is disposed in an area outside the resistive film 61 in a plan view. The third pad portion 81c extends from the first pad portion 81a to an area above the resistive film 61. The third pad portion 81c extends from above the interlayer film 55 into the third resistor opening 70C and is mechanically and electrically connected to the resistive film 61 within the third resistor opening 70C.

[0439] As in the above-described embodiment, the gate wiring 82 includes a first wiring portion 83, a second wiring portion 84, a third wiring portion 85, a fourth wiring portion 86, and a fifth wiring portion 87. In this embodiment, the first wiring portion 83 is disposed in an area outside the resistive film 61 in a plan view. The first wiring portion 83 may be removed as necessary.

[0440] In this embodiment, the fourth wiring portion 86 is disposed in the pad region 60 at a distance from the gate pad 81 as a connection wiring for the resistive film 61, and is electrically connected to the resistive film 61 at a position different from the gate pad 81. The fourth wiring portion 86 enters the fourth resistor opening 70D from above the interlayer film 55, and is mechanically and electrically connected to the resistive film 61 in the fourth resistor opening 70D.

[0441] 28 is a diagram showing another layout example of the pad region 60. Referring to Fig. 28, the resistor film 61 has the same layout as in the above-described embodiment. In this embodiment, the plurality of resistor openings 70 includes one or more (one in this embodiment) first resistor openings 121, one or more (one in this embodiment) second resistor openings 122, and one or more (one in this embodiment) third resistor openings 123.

[0442] The first resistor opening 121 selectively exposes an inner portion of the resistive film 61. The second resistor opening 122 selectively exposes one end of the resistive film 61 on one side in the first direction X. The third resistor opening 123 selectively exposes the other end of the resistive film 61 on the other side in the first direction X. Although not specifically shown in the drawings, the resistive film 61 has a resistive recess portion 71 in the portion exposed from the first to third resistor openings 121 to 123.

[0443] As in the previously described embodiment, the gate pad 81 has a first pad portion 81 a and a second pad portion 81 b. In this embodiment, the second pad portion 81 b is formed narrower than the first pad portion 81 a in the first direction X and extends in a protruding manner from the first pad portion 81 a to a region on the resistive film 61 in the second direction Y. The second pad portion 81 b extends from above the interlayer film 55 into the first resistor opening 121 and is mechanically and electrically connected to the inner portion of the resistive film 61 within the first resistor opening 121.

[0444] As in the above-described embodiment, the gate wiring 82 includes a first wiring portion 83, a second wiring portion 84, a third wiring portion 85, a fourth wiring portion 86, and a fifth wiring portion 87. In this embodiment, the first wiring portion 83 has a first connection portion 124 and a second connection portion 125.

[0445] The first connection portion 124 is provided at a distance from the second pad portion 81b of the gate pad 81 on one side in the first direction X. In this embodiment, the first connection portion 124 is formed in a strip shape extending in the first direction X. The first connection portion 124 enters the second resistor opening 122 from above the interlayer film 55 and is mechanically and electrically connected to one end of the resistor film 61 within the second resistor opening 122.

[0446] The first connection portion 124 forms a first gate resistor R1 together with the gate pad 81 (second pad portion 81b). The resistance value of the first gate resistor R1 is adjusted by adjusting the distance between the connection position of the gate pad 81 (second pad portion 81b) to the resistive film 61 (the position of the first resistor opening 121) and the connection position of the first connection portion 124 to the resistive film 61 (the position of the second resistor opening 122).

[0447] The second connection portion 125 is provided at a distance from the second pad portion 81 b of the gate pad 81 on the other side in the first direction X, and faces the first connection portion 124 across the second pad portion 81 b in the first direction X. In this embodiment, the second connection portion 125 is formed in a strip shape extending in the first direction X. The second connection portion 125 enters the third resistor opening 123 from above the interlayer film 55, and is mechanically and electrically connected to the other end of the resistor film 61 within the third resistor opening 123.

[0448] The second connection portion 125 forms a second gate resistor R2 together with the gate pad 81 (second pad portion 81b). The resistance value of the second gate resistor R2 is adjusted by adjusting the distance between the connection position (position of the first resistor opening 121) of the gate pad 81 (second pad portion 81b) to the resistive film 61 and the connection position (position of the third resistor opening 123) of the second connection portion 125 to the resistive film 61. It is preferable that the resistance value of the second gate resistor R2 be approximately equal to the resistance value of the first gate resistor R1.

[0449] In this embodiment, the second wiring portion 84 is drawn out from the first connection portion 124 to one side in the first direction X and is electrically connected to the resistive film 61 via the first connection portion 124. In this embodiment, the third wiring portion 85 is drawn out from the second connection portion 125 to the other side in the first direction X and is electrically connected to the resistive film 61 via the second connection portion 125.

[0450] The fourth wiring portion 86 is routed in a line from the first connection portion 124 and the second connection portion 125 around the gate pad 81 and is electrically connected to the resistive film 61 via the first connection portion 124 and the second connection portion 125. In other words, the fourth wiring portion 86 connects the first gate resistor R1 and the second gate resistor R2 in parallel. Therefore, the resistance value between the gate pad 81 and the gate wiring 82 is the combined resistance of the first gate resistor R1 and the second gate resistor R2 (=R1·R2 / (R1+R2)).

[0451] Other embodiments of the chip 2 are shown below. Fig. 29 is a cross-sectional view showing another embodiment of the chip 2. Referring to Fig. 29, the semiconductor device 1 may include a second semiconductor region 7 thinner than the first semiconductor region 6 inside the chip 2. In other words, the chip 2 may include an epitaxial layer thicker than the semiconductor substrate.

[0452] The first semiconductor region 6 may have a thickness of 1 μm or more and 50 μm or less (preferably 5 μm or more and 25 μm or less). The second semiconductor region 7 may have a thickness of 0.1 μm or more and less than 50 μm. The thickness of the second semiconductor region 7 may be 5 μm or more (preferably 10 μm or more).

[0453] FIG. 30 is a cross-sectional view showing another embodiment of the chip 2. Referring to FIG. 30, the semiconductor device 1 may include only the first semiconductor region 6 without the second semiconductor region 7 inside the chip 2. In this case, the first semiconductor region 6 is exposed from the first main surface 3, the second main surface 4, and the first to fourth side surfaces 5A to 5D of the chip 2. That is, in this embodiment, the chip 2 does not include a semiconductor substrate and has a single-layer structure made of an epitaxial layer. The first semiconductor region 6 may have a thickness of 1 μm or more and 50 μm or less (preferably 5 μm or more and 25 μm or less).

[0454] 31A to 31P are cross-sectional views showing an example of a manufacturing method for the semiconductor device 1. 31A to 31P show a cross section of an inner part of the active region 12, a cross section of a peripheral part of the active region 12, and a cross section of a part of the pad region 60.

[0455] 31A , first, a wafer 130 is prepared as a base for the chip 2. The wafer 130 has a first main surface 3 on one side and a second main surface 4 on the other side corresponding to the chip 2. The first main surface 3 of the wafer 130 may be referred to as the "first wafer main surface," and the second main surface 4 of the wafer 130 may be referred to as the "second wafer main surface."

[0456] The wafer 130 has a first semiconductor region 6 in a region on the first main surface 3 side, and a second semiconductor region 7 in a region on the second main surface 4 side. The first semiconductor region 6 is made of an epitaxial layer, and the second semiconductor region 7 is made of a substrate.

[0457] 31B , a p-type body region 18 and an n-type source region 19 are formed in the surface layer portion of the first main surface 3. The body region 18 is formed by introducing p-type impurities into the surface layer portion of the first main surface 3. The body region 18 may be formed throughout the entire surface layer portion of the first main surface 3. The source region 19 is formed by selectively introducing n-type impurities into the surface layer portion of the first main surface 3. The source region 19 may be formed throughout the entire surface layer portion of the first main surface 3, or may be selectively formed in a region that will become the active surface 8 via an ion implantation mask.

[0458] 31C , active plateaus 11, a plurality of first trenches 25, a plurality of second trenches 28, a plurality of third trenches 31, and a plurality of fourth trenches 34 are formed in the first main surface 3. In this step, a first mask M1 having a predetermined pattern is first formed on the first main surface 3. The first mask M1 may be an inorganic film (for example, a silicon oxide film).

[0459] The first mask M1 exposes regions where the first trenches 25, the second trenches 28, the third trenches 31, the fourth trenches 34, and the outer peripheral surface 9 are to be formed, and covers the remaining regions. Next, unnecessary portions of the wafer 130 are removed by etching through the first mask M1. The etching may be wet etching and / or dry etching.

[0460] As a result, an active plateau 11, a plurality of first trenches 25, a plurality of second trenches 28, a plurality of third trenches 31, and a plurality of fourth trenches 34 are formed on the first main surface 3. The active plateau 11 is defined by the active surface 8, the outer peripheral surface 9, and the first to fourth connecting surfaces 10A to 10D.

[0461] 31D , the outer peripheral surface 9, the plurality of second trenches 28, the plurality of third trenches 31, and the plurality of fourth trenches 34 are further dug down toward the second main surface 4. In this step, a second mask M2 having a predetermined pattern is first formed on the first mask M1. The second mask M2 exposes the outer peripheral surface 9, the plurality of second trenches 28, and the plurality of fourth trenches 34, and covers the other regions.

[0462] In this embodiment, the second mask M2 has a laminated structure made up of a first inorganic film M21 (e.g., a polysilicon film) and a second inorganic film M22 (e.g., a silicon oxide film). The second inorganic film M22 may be made of an oxide of the first inorganic film M21.

[0463] Next, unnecessary portions of the wafer 130 are removed by etching via the second mask M2. The etching may be wet etching and / or dry etching. As a result, the outer peripheral surface 9, the plurality of second trenches 28, the plurality of third trenches 31, and the plurality of fourth trenches 34 are further dug toward the second main surface 4. The first mask M1 and the second mask M2 are then removed.

[0464] 31E, a plurality of first to fourth well regions 41 to 44 and an outer well region 46 are formed in a surface layer portion of first main surface 3. The plurality of first to fourth well regions 41 to 44 and outer well region 46 are formed by introducing p-type impurities into wafer 130 by ion implantation using an ion implantation mask (not shown).

[0465] The first well regions 41 are formed by introducing p-type impurities into the wafer 130 through the wall surfaces of the first trenches 25. The second well regions 42 are formed by introducing p-type impurities into the wafer 130 through the wall surfaces of the second trenches 28.

[0466] The plurality of third well regions 43 are formed by introducing p-type impurities into the interior of the wafer 130 through the wall surfaces of the plurality of third trenches 31. The plurality of fourth well regions 44 are formed by introducing p-type impurities into the interior of the wafer 130 through the wall surfaces of the plurality of fourth trenches 34. The outer well region 46 is formed by introducing p-type impurities into the interior of the wafer 130 through the outer peripheral surface 9 and the first to fourth connection surfaces 10A to 10D.

[0467] 31F , a plurality of contact regions 45 and an outer contact region 47 are formed in a surface layer portion of the first main surface 3. The plurality of contact regions 45 and the outer contact region 47 are formed by introducing p-type impurities into the interior of the wafer 130 by ion implantation using an ion implantation mask (not shown). The plurality of contact regions 45 are formed by introducing p-type impurities into the interior of the wafer 130 through the wall surfaces of the plurality of second trenches 28. The outer contact region 47 is formed by introducing p-type impurities into the interior of the wafer 130 through the outer peripheral surface 9.

[0468] Although not shown, a plurality of field regions 48 are formed in the surface layer portion of the outer peripheral surface 9. The plurality of field regions 48 are formed by introducing p-type impurities into the interior of the wafer 130 by ion implantation using an ion implantation mask (not shown). The plurality of field regions 48 are formed by introducing p-type impurities into the interior of the wafer 130 via the outer peripheral surface 9. The order of the steps of forming the first well region 41, etc., the contact region 45, etc., and the field region 48 may be arbitrary.

[0469] 30G , first insulating film 26, second insulating film 29, third insulating film 32, fourth insulating film 35, and main surface insulating film 50 are formed on first main surface 3. For example, these insulating films may be formed by oxidation treatment (e.g., thermal oxidation treatment) and / or CVD (Chemical Vapor Deposition) method.

[0470] 30H , a base electrode 131 is formed on the first main surface 3. The base electrode 131 is embedded in the first trench 25, the second trench 28, the third trench 31, and the fourth trench 34 via the first insulating film 26, the second insulating film 29, the third insulating film 32, and the fourth insulating film 35, and covers the main surface insulating film 50 in a film form. In this embodiment, the base electrode 131 is made of a p-type or n-type polysilicon film. For example, the base electrode 131 may be formed by a CVD method.

[0471] Next, referring to FIG. 30I , a third mask M3 having a predetermined pattern is placed on the base electrode 131. The third mask M3 may be an organic mask. The third mask M3 covers regions where the plurality of gate connection electrodes 51 and the sidewall wirings 52 are to be formed, and leaves other regions exposed. Next, unnecessary portions of the base electrode 131 are removed by etching via the third mask M3. The base electrode 131 is removed until the main surface insulating film 50 is exposed. The etching may be wet etching and / or dry etching.

[0472] This forms a plurality of gate connection electrodes 51 and sidewall wirings 52. Also formed are a plurality of trench gate structures 21, a plurality of trench source structures 22, a plurality of trench side edge structures 23, and a plurality of trench termination structures 24. The third mask M3 is then removed.

[0473] 30J , a lower interlayer film 56 is formed on the first main surface 3. In this embodiment, the lower interlayer film 56 has a layered structure including a first lower insulating film 62 and a second lower insulating film 63. In this embodiment, the first lower insulating film 62 is made of an NSG film. In this embodiment, the second lower insulating film 63 is made of a PSG film.

[0474] The first lower insulating film 62 may be formed by a CVD method. The second lower insulating film 63 may be formed by a CVD method. After the step of forming the second lower insulating film 63, a heat treatment step (reflow step) is performed on the second lower insulating film 63. This improves the flatness of the second lower insulating film 63.

[0475] 30K , a base resistive film 132 that serves as a base for the resistive film 61 is formed on the lower interlayer film 56. In this embodiment, the base resistive film 132 is made of a p-type or n-type polysilicon film. For example, the base resistive film 132 may be formed by a CVD method.

[0476] 30L , a fourth mask M4 having a predetermined pattern is placed on the base resistive film 132. The fourth mask M4 may be an organic mask. The fourth mask M4 covers the region where the resistive film 61 is to be formed and leaves the other regions exposed.

[0477] Next, unnecessary portions of the base resistive film 132 are removed by etching via the fourth mask M4. The base resistive film 132 is removed until the lower interlayer film 56 is exposed. The etching method may be wet etching and / or dry etching. As a result, the resistive film 61 is formed. The fourth mask M4 is then removed.

[0478] 30M, an upper interlayer film 57 covering the resistive film 61 is formed on the lower interlayer film 56. This forms an interlayer film 55 having a layered structure including the lower interlayer film 56 and the upper interlayer film 57. In this embodiment, the upper interlayer film 57 has a layered structure including a first upper insulating film 64 and a second upper insulating film 65. In this embodiment, the first upper insulating film 64 is made of an NSG film. In this embodiment, the second upper insulating film 65 is made of a PSG film.

[0479] The first upper insulating film 64 may be formed by a CVD method. The second upper insulating film 65 may be formed by a CVD method. After the step of forming the second upper insulating film 65, a heat treatment step (reflow step) is performed on the second upper insulating film 65. This improves the flatness of the second upper insulating film 65.

[0480] 30N, a fifth mask M5 having a predetermined pattern is placed on the interlayer film 55 (upper interlayer film 57). The fifth mask M5 may be an organic mask. The fifth mask M5 exposes regions where the resistor openings 70 and the gate openings 72 are to be formed, and covers the other regions.

[0481] Next, unnecessary portions of the interlayer film 55 are removed by etching using a fifth mask M5. The interlayer film 55 is removed until the plurality of gate connection electrodes 51 and the resistance film 61 are exposed. As a result, a plurality of resistance openings 70 and a plurality of gate openings 72 are formed in the interlayer film 55. The fifth mask M5 is then removed.

[0482] This process includes a process of partially removing the upper interlayer film 57 by etching and a process of partially removing the lower interlayer film 56 by etching. In this embodiment, the upper interlayer film 57 includes an insulating film (silicon oxide film) of the same quality as the lower interlayer film 56. Therefore, the upper interlayer film 57 and the lower interlayer film 56 may be removed simultaneously in a single etching process. Of course, the upper interlayer film 57 and the lower interlayer film 56 may also be removed separately in multiple etching processes.

[0483] The step of removing the interlayer film 55 may include a step of partially removing the surface layer of the resistive film 61. In this case, a plurality of resistive recesses 71 are formed in the portions of the resistive main surface 61a of the resistive film 61 that are exposed through the plurality of resistive openings 70.

[0484] 30O, a sixth mask M6 having a predetermined pattern is placed on the interlayer film 55. The sixth mask M6 may be an organic mask. The sixth mask M6 exposes regions where the source openings 73 and the outer openings 74 are to be formed, and covers the other regions.

[0485] Next, unnecessary portions of the interlayer film 55 are removed by etching using the sixth mask M6. The interlayer film 55 is removed until the trench source structures 22, the sidewall wirings 52, and the outer contact regions 47 are exposed. As a result, a plurality of source openings 73 and outer openings 74 are formed in the interlayer film 55. The sixth mask M6 is then removed.

[0486] This process includes a process of removing the upper interlayer film 57 by etching and a process of removing the lower interlayer film 56 by etching. In this embodiment, the upper interlayer film 57 includes an insulating film (silicon oxide film) of the same quality as the lower interlayer film 56. Therefore, the upper interlayer film 57 and the lower interlayer film 56 may be removed simultaneously in a single etching process. Of course, the upper interlayer film 57 and the lower interlayer film 56 may also be removed separately in multiple etching processes.

[0487] Of course, by using a common layout for the fifth mask M5 and the sixth mask M6, a plurality of source openings 73 and outer openings 74 may be formed simultaneously with a plurality of resistor openings 70 and a plurality of gate openings 72.

[0488] Next, referring to FIG. 30P, gate electrode 80 and source electrode 90 are formed. In this process, a base electrode, which serves as the base of gate electrode 80 and source electrode 90, is first formed on interlayer film 55 by sputtering. The base electrode has a layered structure including a barrier metal film (e.g., a Ti-based metal film) and a main body metal film (e.g., an Al-based metal film). Next, unnecessary portions of the base electrode are removed by etching using a mask (not shown) having a predetermined pattern. This forms gate electrode 80 and source electrode 90.

[0489] Thereafter, a pad insulating film 100 is formed in a predetermined layout to selectively cover the interlayer film 55, the gate electrode 80, and the source electrode 90. Then, a drain electrode 110 is formed to cover the second main surface 4, and the wafer 130 is selectively cut.

[0490] Before the step of forming the drain electrode 110, a step of thinning the wafer 130 from the second main surface 4 side may be performed. The step of thinning the wafer 130 may include an etching step and / or a grinding step for the second main surface 4. Through the steps including those described above, a plurality of semiconductor devices 1 are manufactured from one wafer 130.

[0491] The above-described embodiment may be embodied in other forms. For example, in the above-described embodiment, the pad region 60 is located on an imaginary line that crosses the center of the active surface 8 in the second direction Y in a plan view. However, the pad region 60 may be positioned to one side or the other in the first direction X with respect to the imaginary line that crosses the center of the active surface 8 in the second direction Y in a plan view.

[0492] That is, the resistive film 61 may be arranged so as to be shifted to one side or the other in the first direction X with respect to an imaginary line that crosses the center of the active surface 8 in the second direction Y in a plan view. Also, the gate pad 81 may be arranged so as to be shifted to one side or the other in the first direction X with respect to an imaginary line that crosses the center of the active surface 8 in the second direction Y in a plan view.

[0493] In this case, the pad region 60 (resistive film 61 and gate pad 81) may be disposed at any corner of the active surface 8 in a plan view. Of course, the pad region 60 may be disposed in the center of the active surface 8 in a plan view. In other words, the resistive film 61 may be disposed in the center of the active surface 8 in a plan view. Furthermore, the gate pad 81 may be disposed in the center of the active surface 8 in a plan view.

[0494] In the above-described embodiment, an example has been shown in which the gate wiring 82 includes the fifth wiring portion 87. However, a gate wiring 82 that does not have the fifth wiring portion 87 may be employed. In this case, the first source pad 91A and the second source pad 91B of the source pad 91 may be integrally formed. In these cases, a gate wiring 82 that does not have the fourth wiring portion 87 may be employed.

[0495] In the above-described embodiment, the gate pad 81 is connected to the resistive film 61 (through the resistor opening 70) by penetrating the interlayer film 55. As another example of such a connection form, for example, the gate pad 81 may be connected to the resistive film 61 through a via electrode embedded in the interlayer film 55 (resistor opening 70).

[0496] In the above-described embodiment, an example has been shown in which the gate wiring 82 penetrates the interlayer film 55 (through the resistor opening 70) and is connected to the resistive film 61. For example, as another example of such a connection form, the gate wiring 82 may be connected to the resistive film 61 through a via electrode embedded in the interlayer film 55 (resistor opening 70). Similarly, the gate wiring 82 may be connected to the trench gate structure 21 (gate connection electrode 51) through a via electrode embedded in the interlayer film 55 (gate opening 72).

[0497] In the above embodiment, an example has been shown in which the source pad 91 is connected to the trench source structure 22 (through the source opening 73) by penetrating the interlayer film 55. For example, as another example of such a connection form, the source pad 91 may be connected to the trench source structure 22 through a via electrode buried in the interlayer film 55 (source opening 73).

[0498] For example, in these connection examples, the via electrode may include a via body electrode (e.g., W-based metal) embedded in the interlayer film 55 (resistor opening 70) via a barrier electrode film (e.g., Ti-based metal film).

[0499] In the above-described embodiments, a structure may be adopted in which the conductivity type of an "n-type" semiconductor region is inverted to "p-type" and the conductivity type of a "p-type" semiconductor region is inverted to "n-type." A specific configuration in this case can be obtained by replacing "n-type" with "p-type" and "p-type" with "n-type" in the above description and accompanying drawings.

[0500] In the above-described embodiment, the n-type second semiconductor region 7 is shown. However, a p-type second semiconductor region 7 may be employed. In this case, an IGBT (Insulated Gate Bipolar Transistor) structure is formed instead of the MISFET structure. In this case, in the above description, the "source" of the MISFET structure is replaced with the "emitter" of the IGBT structure, and the "drain" of the MISFET structure is replaced with the "collector" of the IGBT structure. The p-type second semiconductor region 7 may be an impurity region containing p-type impurities introduced into a surface layer of the second main surface 4 of the chip 2 by ion implantation.

[0501] Below, examples of features extracted from this specification and drawings are shown. Below, alphanumeric characters in parentheses represent corresponding components in the above-mentioned embodiments, but are not intended to limit the scope of each clause to the above-mentioned embodiments. The "semiconductor device" in the following clauses may be replaced with "wide bandgap semiconductor device," "SiC semiconductor device," "semiconductor switching device," "MISFET device," "IGBT device," etc., as necessary.

[0502] [A1] A semiconductor device (1) including: a chip (2) having a main surface (3); a trench structure (20) formed on the main surface (3); an interlayer film (56) covering the trench structure (20); and a resistive film (61) arranged on the interlayer film (56) so as to partially face the trench structure (20) across the interlayer film (56).

[0503] [A2] The semiconductor device (1) according to A1, wherein the resistive film (61) does not have a mechanical connection to the trench structure (20).

[0504] [A3] The semiconductor device (1) according to A1 or A2, wherein the trench structure (20) is a trench gate structure (21).

[0505] [A4] The semiconductor device (1) according to A3 further includes: a gate pad (81) disposed on the interlayer film (56) and electrically connected to the resistive film (61); and a gate wiring (82) disposed on the interlayer film (56) at a distance from the gate pad (81), the gate wiring having a first connection portion (83) electrically connected to the resistive film (61) and second connection portions (84, 85, 86) electrically connected to a portion of the trench gate structure (21) exposed from the resistive film (61).

[0506] [A5] The semiconductor device (1) according to A4, further including a source pad (91) arranged on the interlayer film (56) at a distance from the gate pad (81) and the gate wiring (82), and facing a portion of the trench gate structure (21) exposed from the resistive film (61) and the gate wiring (82) across the interlayer film (56).

[0507] [A6] The semiconductor device (1) according to A5, wherein the source pad (91) has a portion that faces the gate pad (81) in plan view, sandwiching a portion of the gate wiring (82).

[0508] [A7] The semiconductor device (1) according to any one of A4 to A6, further comprising a connection electrode (51) covering the trench gate structure (21) and electrically connected to the trench gate structure (21), the interlayer film (56) covering the trench gate structure (21) and the connection electrode (51), and the gate wiring (82) penetrating the interlayer film (56) and electrically connected to the connection electrode (51).

[0509] [A8] The semiconductor device (1) according to A7, wherein the resistive film (61) is arranged on the interlayer film (56) at a distance from the connection electrode (51) in a plan view.

[0510] [A9] A semiconductor device (1) according to any one of A3 to A8, wherein a plurality of the trench gate structures (21) are formed at intervals on the main surface (3), the interlayer film (56) covers the plurality of the trench gate structures (21), and the resistive film (61) partially faces the plurality of the trench gate structures (21) across the interlayer film (56).

[0511] [A10] The semiconductor device (1) according to A1 or A2, wherein the trench structure (20) is a trench source structure (22).

[0512] [A11] The semiconductor device (1) according to A10 further includes a source pad (91) disposed on the interlayer film (56) and facing the portion of the trench source structure (22) exposed from the resistive film (61) across the interlayer film (56).

[0513] [A12] The semiconductor device (1) according to A11, wherein the source pad (91) is electrically connected to a portion of the trench source structure (22) that is exposed from the resistive film (61).

[0514] [A13] The semiconductor device (1) according to A11 or A12 further includes a gate pad (81) arranged on the interlayer film (56) and electrically connected to the resistive film (61), and a gate wiring (82) arranged on the interlayer film (56) at a distance from the gate pad (81) and electrically connected to the resistive film (61), and the source pad (91) is arranged on the interlayer film (56) at a distance from the gate pad (81) and the gate wiring (82).

[0515] [A14] The semiconductor device (1) according to A13, wherein the gate wiring (82) faces a portion of the trench source structure (22) exposed from the resistive film (61) across the interlayer film (56).

[0516] [A15] A semiconductor device (1) according to any one of A10 to A14, wherein a plurality of the trench source structures (22) are formed at intervals on the main surface (3), the interlayer film (56) covers the plurality of the trench source structures (22), and the resistive film (61) partially faces the plurality of the trench source structures (22) across the interlayer film (56).

[0517] [A16] A semiconductor device (1) according to A1 or A2, wherein a plurality of the trench structures (20) are formed on the main surface (3), the interlayer film (56) covers the plurality of the trench structures (20), and the resistive film (61) partially faces the plurality of the trench structures (20) across the interlayer film (56).

[0518] [A17] The semiconductor device (1) described in A16, wherein the plurality of trench structures (20) include trench gate structures (21) formed on the main surface (3) and trench source structures (22) formed on the main surface (3) at a distance from the trench gate structures (21), the interlayer film (56) covers the trench gate structures (21) and the trench source structures (22), and the resistive film (61) partially faces the trench gate structures (21) across the interlayer film (56) and partially faces the trench source structures (22) across the interlayer film (56).

[0519] [A18] A semiconductor device (1) according to any one of A1 to A17, wherein the interlayer film (56) includes an insulating film (62) with no impurities added that covers the trench structure (20), and the resistive film (61) faces the trench structure (20) across the insulating film (62).

[0520] [A19] A semiconductor device (1) according to any one of A1 to A18, further comprising: a first impurity region (18) of a first conductivity type (p-type) formed in a surface layer portion of the main surface (3); and a second impurity region (19) of a second conductivity type (n-type) formed in a surface layer portion of the first impurity region (18), wherein the trench structure (20) penetrates the first impurity region (18) and the second impurity region (19), and the resistive film (61) faces the first impurity region (18), the second impurity region (19), and the trench structure (20) in the stacking direction (Z).

[0521] [A20] The semiconductor device (1) according to any one of A1 to A19, further comprising a mesa portion (11) defined on the main surface (3) by a first surface portion (8) located inside the main surface (3), a second surface portion (9) recessed in the thickness direction outside the first surface portion (8), and connection surface portions (10A-10D) connecting the first surface portion (8) and the second surface portion (9), wherein the trench structure (20) is formed on the first surface portion (8), the interlayer film (56) covers the first surface portion (8), and the resistive film (61) covers the first surface portion (8) with the interlayer film (56) sandwiched therebetween.

[0522] [A21] The semiconductor device (1) according to any one of A1 to A20, wherein the chip (2) is a wide band gap semiconductor chip (2) including a single crystal of a wide band gap semiconductor.

[0523] [A22] The semiconductor device (1) according to A21, wherein the chip (2) is a SiC chip (2) including a SiC single crystal.

[0524] [B1] A semiconductor device (1) including: a chip (2) having a main surface (3); a first trench structure (21) formed in a strip shape extending in a first direction (X) on the main surface (3); a second trench structure (23) formed on the main surface (3) at a distance from the first trench structure (21) in the first direction (X) and facing the first trench structure (21) in the first direction (X); an interlayer film (56) covering the main surface (3); and a resistive film (61) disposed on the interlayer film (56) at a distance from the second trench structure (23) in the first direction (X) and facing the first trench structure (21) across the interlayer film (56).

[0525] [B2] The semiconductor device (1) according to B1, wherein the resistive film (61) does not have a mechanical connection to the first trench structure (21).

[0526] [B3] The semiconductor device (1) according to B1 or B2, wherein the resistive film (61) faces the second trench structure (23) in the first direction (X) in a plan view.

[0527] [B4] The semiconductor device (1) according to any one of B1 to B3, wherein the resistive film (61) does not face the second trench structure (23) across the interlayer film (56).

[0528] [B5] The semiconductor device (1) according to any one of B1 to B4, wherein the first trench structure (21) is a trench gate structure (21) and the second trench structure (23) is a trench source structure (23).

[0529] [B6] The semiconductor device (1) according to any one of B1 to B5, further including: a pad electrode (81) disposed on the interlayer film (56) and electrically connected to the resistive film (61); and a wiring electrode (82) disposed on the interlayer film (56) at a distance from the pad electrode (81) and electrically connected to the resistive film (61).

[0530] [B7] The semiconductor device (1) according to B6, wherein the wiring electrode (82) is electrically connected to the first trench structure (21).

[0531] [B8] The semiconductor device (1) described in B6 or B7, wherein the wiring electrode (82) is arranged on the interlayer film (56) at a distance from the second trench structure (23) in the first direction (X).

[0532] [B9] The semiconductor device (1) according to any one of B1 to B8, further comprising a low potential pad electrode (91) arranged on the interlayer film (56) at a distance from the resistive film (61).

[0533] [B10] The semiconductor device (1) according to B9, wherein the low potential pad electrode (91) does not have a mechanical connection to the second trench structure (23).

[0534] [B11] A semiconductor device (1) according to any one of B1 to B10, further comprising a connection electrode (51) that partially covers the first trench structure (21) and is electrically connected to the first trench structure (21), the interlayer film (56) covers the connection electrode (51), and the resistive film (61) is disposed on the interlayer film (56) at a distance from the connection electrode (51) in the first direction (X).

[0535] [B12] The semiconductor device (1) according to any one of B1 to B11, further comprising a mesa portion (11) defined on the main surface (3) by a first surface portion (8) located inside the main surface (3), a second surface portion (9) recessed in the thickness direction outside the first surface portion (8), and a connection surface portion (10A-10D) connecting the first surface portion (8) and the second surface portion (9), wherein the first trench structure (21) is formed on the first surface portion (8) at a distance from the connection surface portion (10A-10D), and the second trench structure (23) is formed in the first surface portion (8) in a region between the connection surface portion (10A-10D) and the first trench structure (21).

[0536] [B13] The semiconductor device (1) according to B12, further comprising a sidewall structure (52) arranged on the second surface portion (9) so as to cover the connection surface portions (10A to 10D).

[0537] [B14] The semiconductor device (1) according to B13, wherein the interlayer film (56) covers the sidewall structure (52), and the resistive film (61) is arranged on the interlayer film (56) at a distance from the sidewall structure (52).

[0538] [B15] The semiconductor device (1) described in B13 or B14, wherein the second trench structure (23) penetrates the connection surface portion (10A to 10D), and the sidewall structure (52) is composed of sidewall wiring (52) electrically connected to the second trench structure (23).

[0539] [B16] The semiconductor device (1) according to any one of B1 to B15, further comprising a third trench structure (22) formed on the main surface (3) at a distance from the first trench structure (21) in a second direction (Y) perpendicular to the first direction (X) and facing the first trench structure (21) in the second direction (Y).

[0540] [B17] The semiconductor device (1) described in B16, wherein the third trench structure (22) is formed on the main surface (3) at a distance from the second trench structure (23) in the second direction (Y) and faces the second trench structure (23) in the second direction (Y).

[0541] [B18] The semiconductor device (1) according to any one of B1 to B17, further comprising: a first impurity region (18) of a first conductivity type (p-type) formed in a surface layer portion of the main surface (3); and a second impurity region (19) of a second conductivity type (n-type) formed in a surface layer portion of the first impurity region (18), wherein the first trench structure (21) penetrates the first impurity region (18) and the second impurity region (19), the second trench structure (23) penetrates the first impurity region (18) and the second impurity region (19), and the resistive film (61) faces the first impurity region (18) and the second impurity region (19) in the stacking direction (Z).

[0542] [B19] A semiconductor device (1) according to any one of B1 to B18, wherein the interlayer film (56) includes an impurity-free insulating film (62) that covers the first trench structure (21), and the resistive film (61) faces the first trench structure (21) across the insulating film (62).

[0543] [B20] The semiconductor device (1) according to B19, wherein the insulating film (62) covers the second trench structure (23).

[0544] [B21] The semiconductor device (1) according to any one of B1 to B20, wherein the chip (2) is a wide bandgap semiconductor chip (2) including a single crystal of a wide bandgap semiconductor.

[0545] [B22] The semiconductor device (1) according to B21, wherein the chip (2) is a SiC chip (2) including a SiC single crystal.

[0546] [B23] A semiconductor device (1) comprising: a chip (2) having a main surface (3); a first trench structure (21) formed on the main surface (3); a second trench structure (22) formed on the main surface (3) at a distance from the first trench structure (21) in one direction (Y) and facing the first trench structure (21) in the one direction (Y); a third trench structure (23) formed on the main surface (3) at a distance from the first trench structure (21) in an orthogonal direction (X) perpendicular to the one direction (Y) and facing the first trench structure (21) in the orthogonal direction (X); an interlayer film (56) covering the main surface (3); and a resistive film (61) arranged on the interlayer film (56) so as to face the first trench structure (21) across the interlayer film (56).

[0547] [B24] The semiconductor device (1) according to B23, wherein the resistive film (61) is arranged on the interlayer film (56) at a distance from the third trench structure (23) in the orthogonal direction (X).

[0548] [B25] The semiconductor device (1) according to B23 or B24, wherein the resistive film (61) faces the second trench structure (22) with the interlayer film (56) interposed therebetween.

[0549] [C1] A semiconductor device (1) comprising: a chip (2) having a main surface (3); a trench structure (20) formed on the main surface (3); an interlayer film (56) including an insulating film (62) containing no impurities and covering the trench structure (20); and a resistive film (61) arranged on the interlayer film (56) so as to face the trench structure (20) across the interlayer film (56).

[0550] [C2] The semiconductor device (1) according to C1, wherein the trench structure (20) includes a first conductive polysilicon, and the resistive film (61) includes a second conductive polysilicon.

[0551] [C3] The semiconductor device (1) according to C2, wherein the first conductive polysilicon has a first impurity concentration, and the second conductive polysilicon has a second impurity concentration different from the first impurity concentration.

[0552] [C4] The semiconductor device (1) according to C2 or C3, wherein the second conductive polysilicon contains the same type of impurity as the impurity contained in the first conductive polysilicon.

[0553] [C5] The semiconductor device (1) according to any one of C1 to C4, wherein the insulating film (62) contains silicon oxide with no added impurities.

[0554] [C6] The semiconductor device (1) according to any one of C1 to C5, wherein the insulating film (62) directly covers the trench structure (20).

[0555] [C7] A semiconductor device (1) according to any one of C1 to C6, wherein the interlayer film (56) is stacked on the insulating film (62) as a first insulating film (62) and includes a second insulating film (63) made of an insulating material different from that of the first insulating film (62), and the resistive film (61) is arranged on the second insulating film (63) and covers the first insulating film (62) with the second insulating film (63) sandwiched therebetween.

[0556] [C8] The semiconductor device (1) according to C7, wherein the second insulating film (63) is made of silicon oxide containing phosphorus.

[0557] [C9] A semiconductor device (1) according to C7 or C8, wherein the first insulating film (62) has a first recess (62R) recessed toward the trench structure (20), the second insulating film (63) has a second recess (63R) recessed toward the first recess (62R) of the first insulating film (62), and the resistive film (61) covers the second recess (63R) of the second insulating film (63).

[0558] [C10] The semiconductor device (1) according to C9, wherein the second recess (63R) has a depth smaller than the depth of the first recess (62R).

[0559] [C11] The semiconductor device (1) according to any one of C1 to C10, wherein the trench structure (20) is a trench gate structure (21).

[0560] [C12] The semiconductor device (1) according to C11, further comprising: a gate pad (81) disposed on the interlayer film (56) and electrically connected to the resistive film (61); and a gate wiring (82) disposed on the interlayer film (56) at a distance from the gate pad (81) and electrically connected to the resistive film (61).

[0561] [C13] The semiconductor device (1) according to C12, further comprising a source pad (91) arranged on the interlayer film (56) at a distance from the gate pad (81) and the gate wiring (82).

[0562] [C14] The semiconductor device (1) according to C12 or C13, further comprising an upper interlayer film (57) covering the resistive film (61), the gate pad (81) being arranged on the upper interlayer film (57), and the gate wiring (82) being arranged on the upper interlayer film (57).

[0563] [C15] The semiconductor device (1) according to any one of C1 to C10, wherein the trench structure (20) is a trench source structure (22).

[0564] [C16] The semiconductor device (1) according to C15, further comprising a source pad (91) arranged on the interlayer film (56) at a distance from the resistive film (61).

[0565] [C17] The semiconductor device (1) according to C16, further comprising an upper interlayer film (57) covering the resistive film (61), and the source pad (91) being arranged on the upper interlayer film (57).

[0566] [C18] A semiconductor device (1) according to any one of C1 to C10, wherein a plurality of the trench structures (20) are formed on the main surface (3), the interlayer film (56) covers the plurality of the trench structures (20), and the resistive film (61) faces the plurality of the trench structures (20) across the interlayer film (56).

[0567] [C19] The semiconductor device (1) described in C18, wherein the plurality of trench structures (20) include trench gate structures (21) formed on the main surface (3) and trench source structures (22) formed on the main surface (3) at a distance from the trench gate structures (21), the interlayer film (56) covers the trench gate structures (21) and the trench source structures (22), and the resistive film (61) faces the trench gate structures (21) and the trench source structures (22) across the interlayer film (56).

[0568] [C20] A semiconductor device (1) according to any one of C1 to C19, further comprising: a first impurity region (18) of a first conductivity type (p-type) formed in a surface layer portion of the main surface (3); and a second impurity region (19) of a second conductivity type (n-type) formed in a surface layer portion of the first impurity region (18), wherein the trench structure (20) penetrates the first impurity region (18) and the second impurity region (19), and the resistive film (61) faces the first impurity region (18), the second impurity region (19), and the trench structure (20) in the stacking direction (Z).

[0569] [C21] A semiconductor device (1) according to any one of C1 to C20, further comprising a mesa portion (11) defined on the main surface (3) by a first surface portion (8) located inside the main surface (3), a second surface portion (9) recessed in the thickness direction outside the first surface portion (8), and connection surface portions (10A-10D) connecting the first surface portion (8) and the second surface portion (9), wherein the trench structure (20) is formed on the first surface portion (8), the interlayer film (56) covers the first surface portion (8), and the resistive film (61) covers the first surface portion (8) with the interlayer film (56) sandwiched therebetween.

[0570] [C22] The semiconductor device (1) according to any one of C1 to C21, wherein the chip (2) is a wide band gap semiconductor chip (2) including a single crystal of a wide band gap semiconductor.

[0571] [C23] The semiconductor device (1) according to C22, wherein the chip (2) is a SiC chip (2) including a SiC single crystal.

[0572] [D1] A semiconductor device (1) comprising: a chip (2) having a main surface (3); an interlayer film (55) covering the main surface (3); a resistor (61) arranged inside the interlayer film (55); a pad electrode (81) having a first pad portion (81a) as a pad body and a second pad portion (81b) connected to the resistor (61) through a portion of the interlayer film (55); and a pad insulating film (100) having a pad opening (101) exposing the first pad portion (81a) of the pad electrode (81) and having a portion covering the resistor (61) across the second pad portion (81b) of the pad electrode (81).

[0573] [D2] The semiconductor device (1) described in D1, wherein the first pad portion (81a) covers the interlayer film (55) in an area outside the resistor (61), and the second pad portion (81b) is extended from the first pad portion (81a) to an area above the resistor (61).

[0574] [D3] The semiconductor device (1) according to D2, wherein the pad insulating film (100) covers the entire area of ​​the resistor (61) with the second pad portion (81b) sandwiched therebetween.

[0575] [D4] The semiconductor device (1) according to any one of D1 to D3, further comprising a wiring electrode (82) arranged on the interlayer film (55) at a distance from the pad electrode (81) and connected to the resistor (61) at a position different from the pad electrode (81).

[0576] [D5] The semiconductor device (1) described in D4, wherein the wiring electrode (82) has a first portion (83a) that covers the interlayer film (55) in an area outside the resistor (61) and a second portion (83b) that penetrates a part of the interlayer film (55) and is connected to the resistor (61).

[0577] [D6] The semiconductor device (1) according to D5, wherein the pad insulating film (100) covers the resistor (61) with the second portion (83b) of the wiring electrode (82) sandwiched therebetween.

[0578] [D7] The semiconductor device (1) according to D5 or D6, wherein the pad insulating film (100) covers the first portion (83a) of the wiring electrode (82).

[0579] [D8] The semiconductor device (1) according to any one of D5 to D7, wherein the pad insulating film (100) covers the entire area of ​​the wiring electrode (82).

[0580] [D9] The semiconductor device (1) according to any one of D5 to D8, wherein the wiring electrode (82) surrounds the pad electrode (81).

[0581] [D10] The semiconductor device (1) according to any one of D1 to D9, wherein the pad insulating film (100) includes an insulator different from the interlayer film (55).

[0582] [D11] The semiconductor device (1) according to any one of D1 to D10, wherein the pad insulating film (100) includes an organic insulating film (109).

[0583] [D12] The semiconductor device (1) according to any one of D1 to D11, wherein the pad insulating film (100) includes an inorganic insulating film (108).

[0584] [D13] A semiconductor device (1) according to any one of D1 to D12, wherein the pad insulating film (100) has a laminated structure including an inorganic insulating film (108) and an organic insulating film (109) laminated in this order from the interlayer film (55) side.

[0585] [D14] A semiconductor device (1) according to any one of D1 to D13, wherein the interlayer film (55) includes a lower interlayer film (56) and an upper interlayer film (57) stacked in this order from the main surface (3) side, and the resistor (61) is disposed on the lower interlayer film (56) and is covered by the upper interlayer film (57).

[0586] [D15] The semiconductor device (1) described in D14, wherein the lower interlayer film (56) includes a lower insulating film (62) with no added impurities, and the resistor (61) faces the chip (2) across the lower insulating film (62) in the stacking direction (Z).

[0587] [D16] A semiconductor device (1) according to D14 or D15, wherein the upper interlayer film (57) includes an upper insulating film (64) with no impurities added, and the second pad portion (81b) of the pad electrode (81) faces the resistor (61) across the upper insulating film (64) in the stacking direction (Z).

[0588] [D17] The semiconductor device (1) according to any one of D1 to D16, further comprising a sub-pad electrode (88) arranged on the interlayer film (55) at a distance from the pad electrode (81) and electrically connected to the pad electrode (81) via the resistor (61).

[0589] [D18] A semiconductor device (1) described in D17, wherein the pad insulating film (100) covers the peripheral portion of the subpad electrode (88) and has a subpad opening (102) that exposes the inner portion of the subpad electrode (88).

[0590] [D19] The semiconductor device (1) according to D17 or D18, wherein the subpad electrode (88) has a plane area smaller than the plane area of ​​the pad electrode (81).

[0591] [D20] A semiconductor device (1) according to any one of D1 to D19, further comprising a trench structure (20) formed on the main surface (3), the interlayer film (55) covering the trench structure (20), and the resistor (61) being arranged inside the interlayer film (55) so as to face the trench structure (20) in the stacking direction (Z).

[0592] [D21] The semiconductor device (1) according to D20, wherein the resistor (61) has no mechanical connection to the trench structure (20).

[0593] [D22] A semiconductor device (1) according to any one of D1 to D21, further comprising a first impurity region (18) of a first conductivity type (p-type) formed in a surface layer portion of the main surface (3), and a second impurity region (19) of a second conductivity type (n-type) formed in a surface layer portion of the first impurity region (18), wherein the resistive film (61) faces the first impurity region (18) and the second impurity region (19) in the stacking direction (Z).

[0594] [D23] A semiconductor device (1) according to any one of D1 to D22, further comprising a mesa portion (11) defined on the main surface (3) by a first surface portion (8) located inside the main surface (3), a second surface portion (9) recessed in the thickness direction outside the first surface portion (8), and connection surface portions (10A to 10D) connecting the first surface portion (8) and the second surface portion (9), wherein the interlayer film (55) covers the first surface portion (8), and the resistive film (61) is disposed inside a portion of the interlayer film (55) that covers the first surface portion (8).

[0595] [D24] The semiconductor device (1) according to any one of D1 to D23, wherein the chip (2) is a wide band gap semiconductor chip (2) including a single crystal of a wide band gap semiconductor.

[0596] [D25] The semiconductor device (1) according to D24, wherein the chip (2) is a SiC chip (2) including a SiC single crystal.

[0597] [E1] A semiconductor device (1) comprising: a chip (2) having a main surface (3); a mesa portion (11) defined on the main surface (3) by a first surface portion (8) located inside the main surface (3); a second surface portion (9) recessed in the thickness direction outside the first surface portion (8); and connection surface portions (10A-10D) connecting the first surface portion (8) and the second surface portion (9); an interlayer film (56) covering the first surface portion (8); and a resistive film (61) arranged on the interlayer film (56) so as to face the first surface portion (8).

[0598] [E2] The semiconductor device (1) described in E1, wherein the resistive film (61) is arranged on the interlayer film (56) at a distance from the connection surface portion (10A to 10D) toward the inner side of the first surface portion (8).

[0599] [E3] The semiconductor device (1) according to E1 or E2, further comprising: a pad electrode (81) arranged on the interlayer film (56) so as to face the first surface portion (8) across the interlayer film (56) and electrically connected to the resistive film (61); and a wiring electrode (82) arranged on the interlayer film (56) at a distance from the pad electrode (81) so as to face the first surface portion (8) across the interlayer film (56) and electrically connected to the resistive film (61).

[0600] [E4] The semiconductor device (1) described in E3, wherein the pad electrode (81) is arranged on the interlayer film (56) at a distance from the connection surface portion (10A to 10D) toward the inside of the first surface portion (8).

[0601] [E5] The semiconductor device (1) described in E3 or E4, wherein the wiring electrode (82) is arranged on the interlayer film (56) at a distance from the connection surface portion (10A to 10D) toward the inner side of the first surface portion (8).

[0602] [E6] A semiconductor device (1) according to any one of E3 to E5, further comprising an upper interlayer film (57) covering the resistive film (61), the pad electrode (81) covering the upper interlayer film (57), and the wiring electrode (82) covering the upper interlayer film (57).

[0603] [E7] The semiconductor device (1) according to any one of E1 to E6, further comprising a main surface insulating film (50) covering the first surface portion (8), and the interlayer film (56) covers the first surface portion (8) with the main surface insulating film (50) sandwiched therebetween.

[0604] [E8] The semiconductor device (1) according to E7, wherein the main surface insulating film (50) covers the second surface portion (9) and the connection surface portions (10A to 10D).

[0605] [E9] The semiconductor device (1) according to any one of E1 to E6, further comprising a sidewall structure (52) arranged on the second surface portion (9) so as to cover the connection surface portion (10A to 10D), and the interlayer film (56) covers the sidewall structure (52).

[0606] [E10] The semiconductor device (1) described in E9, wherein the sidewall structure (52) includes an overlap portion (52a) extended onto the first surface portion (8), and the resistive film (61) is arranged on the interlayer film (56) at a distance from the overlap portion (52a) on the inward side of the first surface portion (8).

[0607] [E11] The semiconductor device (1) according to E9 or E10, further comprising a main surface insulating film (50) that covers the first surface portion (8), the second surface portion (9), and the connection surface portion (10A to 10D), and the sidewall structure (52) covers the connection surface portion (10A to 10D) with the main surface insulating film (50) in between, and is arranged on the second surface portion (9) with the second surface portion (9) in between.

[0608] [E12] The semiconductor device (1) according to any one of E1 to E11, further comprising a trench structure (20) formed in the first surface portion (8), the interlayer film (56) covering the trench structure (20), and the resistive film (61) facing the trench structure (20) across the interlayer film (56).

[0609] [E13] The semiconductor device (1) according to E12, wherein the trench structure (20) is formed in the first surface portion (8) at a distance from the connection surface portion (10A to 10D).

[0610] [E14] The semiconductor device (1) according to E13, further comprising a connection electrode (51) covering the trench structure (20) and connected to the trench structure (20), wherein the interlayer film (56) covers the trench structure (20) and the connection electrode (51).

[0611] [E15] The semiconductor device (1) according to E14, wherein the resistive film (61) is disposed on the interlayer film (56) at a distance from the connection electrode (51).

[0612] [E16] The semiconductor device (1) according to any one of E13 to E15, wherein the trench structure (20) is a trench gate structure (21).

[0613] [E17] The semiconductor device (1) according to E12, wherein the trench structure (20) is formed in the first surface portion (8) so as to penetrate the connection surface portions (10A to 10D).

[0614] [E18] The semiconductor device (1) according to E17, wherein the trench structure (20) is a trench source structure (22).

[0615] [E19] A semiconductor device (1) described in any one of E1 to E18, wherein the interlayer film (56) includes an insulating film (62) with no added impurities that covers the first surface portion (8), and the resistive film (61) faces the first surface portion (8) across the insulating film (62).

[0616] [E20] The semiconductor device (1) according to any one of E1 to E19, further including a first impurity region (18) of a first conductivity type (p-type) formed in a surface layer portion of the first surface portion (8), and a second impurity region (19) of a second conductivity type (n-type) formed in a surface layer portion of the first impurity region (18), wherein the resistive film (61) faces the first impurity region (18) and the second impurity region (19) in the stacking direction (Z).

[0617] [E21] The semiconductor device (1) according to any one of E1 to E20, wherein the chip (2) is a wide bandgap semiconductor chip (2) including a single crystal of a wide bandgap semiconductor.

[0618] [E22] The semiconductor device (1) according to E21, wherein the chip (2) is a SiC chip (2) including a SiC single crystal.

[0619] [F1] A semiconductor device (1) including: a chip (2) having a main surface (3); a trench gate structure (21) formed on the main surface (3); an interlayer film (56) covering the trench gate structure (21); and a resistive film (61) arranged on the interlayer film (56) so as to partially face the trench gate structure (21) across the interlayer film (56).

[0620] [F2] A semiconductor device (1) including: a chip (2) having a main surface (3); a trench source structure (22) formed on the main surface (3); an interlayer film (56) covering the trench source structure (22); and a resistive film (61) arranged on the interlayer film (56) so as to partially face the trench source structure (22) across the interlayer film (56).

[0621] [F3] A semiconductor device (1) including: a chip (2) having a main surface (3); a trench gate structure (21) formed on the main surface (3); a trench source structure (22) formed on the main surface (3) adjacent to the trench gate structure (21); an interlayer film (56) covering the trench gate structure (22) and the trench source structure (22); and a resistive film (61) arranged on the interlayer film (56) so as to partially face the trench gate structure (22) and the trench source structure (22) across the interlayer film (56).

[0622] [F4] A semiconductor device (1) including: a chip (2) having a main surface (3); a trench gate structure (21) formed in a strip shape extending in a first direction (X) on the main surface (3); a trench source structure (23) formed on the main surface (3) at a distance from the trench gate structure (21) in the first direction (X) and facing the trench gate structure (21) in the first direction (X); an interlayer film (56) covering the main surface (3); and a resistive film (61) disposed on the interlayer film (56) at a distance from the trench source structure (23) in the first direction (X) and facing the trench gate structure (21) across the interlayer film (56).

[0623] [F5] A semiconductor device (1) including: a chip (2) having a main surface (3); a trench gate structure (21) formed on the main surface (3); a first trench source structure (22) formed on the main surface (3) at a distance from the trench gate structure (21) in one direction (Y) and facing the trench gate structure (21) in the one direction (Y); a second trench source structure (23) formed on the main surface (3) at a distance from the trench gate structure (21) in an orthogonal direction (X) perpendicular to the one direction (Y) and facing the trench gate structure (21) in the orthogonal direction (X); an interlayer film (56) covering the main surface (3); and a resistive film (61) arranged on the interlayer film (56) so as to face the trench gate structure (21) with the interlayer film (56) interposed therebetween.

[0624] The elements and features of the above items can be combined as appropriate. While specific embodiments have been described in detail above, these are merely examples that clearly demonstrate the technical content. Various technical ideas extracted from this specification can be combined as appropriate without being limited by the order of explanation in the specification or the order of the embodiment examples.

[0625] DESCRIPTION OF SYMBOLS 1 Semiconductor device 2 Chip 3 First main surface 8 Active surface (first surface portion) 9 Outer periphery surface (second surface portion) 10A First connection surface (connection surface portion) 10B Second connection surface (connection surface portion) 10C Third connection surface (connection surface portion) 10D Fourth connection surface (connection surface portion) 11 Active plateau (mesa portion) 18 Body region (first impurity region) 19 Source region (second impurity region) 20 Trench structure 21 Trench gate structure 22 Trench source structure 23 Trench side end structure 50 Main surface insulating film 51 Gate connection electrode (connection electrode) 52 Sidewall wiring (sidewall structure) 52a Overlap portion 55 Interlayer film 56 Lower interlayer film 57 Upper interlayer film 61 Resistive film 62 First lower insulating film 62R First recess portion 63 Second lower insulating film 63R Second recess portion 64 First upper insulating film 81 Gate pad (pad electrode) 81a First pad portion 81b Second pad portion 82 Gate wiring (wiring electrode) 83a First portion 83b Second portion 83 First wiring portion (first connection portion) 84 Second wiring portion (second connection portion) 85 Third wiring portion (second connection portion) 86 Fourth wiring portion (second connection portion) 88 Gate subpad (subpad electrode) 91 Source pad 100 Pad insulating film 101 Gate pad opening (pad opening) 102 Gate subpad opening (subpad opening) 108 Inorganic insulating film 109 Organic insulating film X First direction Y Second direction Z Normal direction

Claims

1. An SiC chip having a main surface, a trench structure formed on the main surface, an interlayer film covering the trench structure, and a resistance film disposed on the interlayer film so as to partially face the trench structure with the interlayer film therebetween, the SiC semiconductor device comprising the same.

2. The SiC semiconductor device according to claim 1, wherein the resistance film has no mechanical connection portion to the trench structure.

3. The SiC semiconductor device according to claim 1 or 2, wherein the trench structure is a trench gate structure.

4. a gate pad disposed on the interlayer film and electrically connected to the resistance film, and a gate wiring disposed on the interlayer film at a distance from the gate pad and having a first connection portion electrically connected to the resistance film and a second connection portion electrically connected to a portion of the trench gate structure exposed from the resistance film, the SiC semiconductor device according to claim 3 further comprising the same.

5. The SiC semiconductor device according to claim 4, further comprising a source pad disposed on the interlayer film at a distance from the gate pad and the gate wiring and facing a portion of the trench gate structure exposed from the resistance film and the gate wiring with the interlayer film therebetween.

6. The SiC semiconductor device according to claim 5, wherein the source pad has a portion facing the gate pad with a part of the gate wiring interposed therebetween in a plan view.

7. further comprising a connection electrode covering the trench gate structure and electrically connected to the trench gate structure, wherein the interlayer film covers the trench gate structure and the connection electrode, and the gate wiring is electrically connected to the connection electrode through the interlayer film, the SiC semiconductor device according to claim 4.

8. The SiC semiconductor device according to claim 7, wherein the resistance film is disposed on the interlayer film at a distance from the connection electrode in a plan view.

9. A plurality of the trench gate structures are formed on the main surface at intervals, the interlayer film covers the plurality of trench gate structures, and the resistance film partially faces the plurality of trench gate structures with the interlayer film therebetween, the SiC semiconductor device according to claim 3.

10. The SiC semiconductor device according to claim 1 or 2, wherein the trench structure is a trench source structure.

11. The SiC semiconductor device according to claim 10, further comprising a source pad disposed on the interlayer film and facing a portion of the trench source structure exposed from the resist film with the interlayer film interposed therebetween.

12. The SiC semiconductor device according to claim 11, wherein the source pad is electrically connected to a portion of the trench source structure exposed from the resist film.

13. A gate pad disposed on the interlayer film and electrically connected to the resist film, and a gate wiring disposed on the interlayer film at a distance from the gate pad and electrically connected to the resist film, the SiC semiconductor device according to claim 11, further comprising: The SiC semiconductor device according to claim 11, wherein the source pad is disposed on the interlayer film at a distance from the gate pad and the gate wiring.

14. The SiC semiconductor device according to claim 13, wherein the gate wiring faces a portion of the trench source structure exposed from the resist film with the interlayer film interposed therebetween.

15. A plurality of the trench source structures are formed on the main surface at intervals, the interlayer film covers the plurality of trench source structures, The SiC semiconductor device according to claim 10, wherein the resist film partially faces the plurality of trench source structures with the interlayer film interposed therebetween.

16. A plurality of the trench structures are formed on the main surface, the interlayer film covers the plurality of trench structures, The SiC semiconductor device according to claim 1 or 2, wherein the resist film partially faces the plurality of trench structures with the interlayer film interposed therebetween.

17. The plurality of trench structures include a trench gate structure formed on the main surface and a trench source structure formed on the main surface at a distance from the trench gate structure, the interlayer film covers the trench gate structure and the trench source structure, The SiC semiconductor device according to claim 16, wherein the resist film partially faces the trench gate structure with the interlayer film interposed therebetween and partially faces the trench source structure with the interlayer film interposed therebetween.

18. An SiC chip having a main surface, a trench structure formed on the main surface, an interlayer film including an impurity-free insulating film and covering the trench structure, and a resist film disposed on the interlayer film so as to face the trench structure with the interlayer film interposed therebetween, the SiC semiconductor device comprising:

19. The trench structure includes conductive polysilicon, The insulating film includes silicon oxide without added impurities, The resistive film includes conductive polysilicon, the SiC semiconductor device according to claim 18.

20. An SiC chip having a main surface, A mesa portion partitioned on the main surface by a first surface portion located inside the main surface, a second surface portion recessed in the thickness direction outside the first surface portion, and a connection surface portion connecting the first surface portion and the second surface portion; An interlayer film covering the first surface portion, A resistive film disposed on the interlayer film so as to face the first surface portion, an SiC semiconductor device.