Object detection sensor and object detection method

Abstract

At least four first optical elements are arranged on an imaginary plane. In addition, at least one second optical element is disposed on the imaginary plane. One of the first optical elements and the second optical element is a light emitting element and the other is a light receiving element. The at least four first optical elements and the at least one second optical element constitute a minimum unit. The directional characteristics of the four first optical elements of the minimum unit are the same, and the directional characteristic of the second optical element is such that if a straight line extending from the second optical element in the normal line direction of the imaginary plane is defined as a reference axis, an angle of inclination at which an illumination intensity or a light-receiving sensitivity in a direction inclined from the reference axis is half of the illumination intensity or the light-receiving sensitivity in the direction of the reference axis is at most equal to 15°. The four first optical elements of the minimum unit are not disposed on one common straight line that passes through the second optical element, and are also not disposed on one common circumference centered on the second optical element. On the basis of a measurement value, which is a received light intensity when each of the first optical elements and the second optical element of the minimum unit are activated, a calculating unit obtains a distance from the imaginary plane to a target object on the reference axis, and an angle of inclination and an inclination azimuth angle of a surface of the target object.

Description

Object detection sensor and object detection method

[0001] The present invention relates to an object detection sensor and an object detection method.

[0002] A sensor is known that detects the distance to an object and the object's posture by detecting light emitted from a light-emitting element and reflected by the object using a light-receiving element (Patent Document 1). The sensor described in Patent Document 1 includes two light-emitting elements with high light diffusion properties and one light-receiving element with high directionality. The one light-receiving element and the two light-emitting elements are arranged in a straight line. Light emitted from the light-emitting elements that is diffusely reflected by the surface of the object is received by the light-receiving element. The distance from the light-receiving element to the object is derived by utilizing the fact that the distances from the light-emitting elements to the object are different for the two light-emitting elements and the illuminance at the position of the object is different.

[0003] Furthermore, by arranging a light-emitting element at a position equidistant on either side of the light-receiving element, for a total of four light-emitting elements, it is also possible to determine the inclination of the surface of the object along the direction in which the light-emitting elements are arranged.

[0004] Special Publication No. 62-17163

[0005] The sensor described in Patent Document 1 can determine the inclination of an object in the direction in which the light-emitting elements are arranged, but cannot determine the inclination in other directions.

[0006] An object of the present invention is to provide an object detection sensor and an object detection method that can determine the distance to an object and the direction of the slope of the surface of the object.

[0007] According to one aspect of the present invention, there is provided a light emitting device comprising: at least four first optical elements arranged on a virtual plane; at least one second optical element arranged on the virtual plane; and a calculation unit, wherein one of the first optical elements and the second optical elements is a light emitting element and the other is a light receiving element, wherein at least four of the first optical elements and one of the second optical elements form a minimum unit, wherein the four first optical elements of the minimum unit have the same directional characteristics, and the directional characteristics of the second optical element are such that, when a straight line extending from the second optical element in a normal direction to the virtual plane is taken as a reference axis, an inclination angle at which illuminance or light receiving sensitivity in a direction inclined from the reference axis becomes 1 / 2 of the illuminance or light receiving sensitivity in the direction of the reference axis is 15° or less, and the four first optical elements of the minimum unit are not arranged on a common straight line passing through the second optical element, nor are they arranged on a common circumference centered on the second optical element, The calculation unit is provided with an object detection sensor that calculates the distance from the virtual plane to an object on the reference axis, the inclination angle in the normal direction of the surface of the object relative to the reference axis, and the inclination azimuth angle based on measured values ​​that are the received light intensity when each of the smallest unit first light elements and the second light element are operated.

[0008] According to another aspect of the present invention, there is provided a detection method for detecting an object on a reference axis extending in a normal direction of the virtual plane from the second optical element by operating a minimum unit of first optical elements and second optical elements each composed of at least four first optical elements arranged on a common virtual plane, wherein one of the first optical elements and the second optical elements is a light-emitting element and the other is a light-receiving element, the four minimum unit of first optical elements have the same directional characteristics, and the directional characteristics of the second optical element have a tilt angle of 15° or less when the illuminance or light-receiving sensitivity in a direction tilted from the reference axis is half of the illuminance or light-receiving sensitivity in the direction of the reference axis, the four minimum unit of first optical elements are not arranged on a common straight line passing through the second light, nor are they arranged on a common circumference centered on the second optical element, An object detection method is provided which determines a luminance measurement value when the object is used as a new light source based on light emitted from one of the first optical element and the second optical element of the smallest unit, reflected by the object, and received by the other element, and calculates at least one of the reflectance of the surface of the object, the distance from the virtual plane to the object on the reference axis, the tilt angle of the surface of the object with respect to the reference axis, and the tilt azimuth angle of the surface of the object from the measurement value.

[0009] By configuring the four smallest units of first optical elements so that they are not arranged on a common straight line passing through the second optical elements, nor on a common circumference centered on the second optical elements, it is possible to determine the distance to the object and the direction of the slope of the object's surface.

[0010] FIG. 1A is a schematic perspective view of an object detection sensor according to a first embodiment, and FIG. 1B is a diagram showing an example of the positional relationship between four first optical elements and one second optical element in a plan view. FIG. 2 is a diagram showing the positional relationship between one first optical element, one second optical element, and an object, and a coordinate system. FIG. 3 is a schematic diagram showing the directional characteristics of the first optical element and the second optical element. FIG. 4 is a flowchart showing a procedure executed by a calculation unit of the object detection sensor according to the first embodiment. FIG. 5 is a diagram showing the planar positional relationship between four first optical elements and one second optical element of an object detection sensor according to a modification of the first embodiment. FIG. 6 is a schematic perspective view of an object detection sensor according to another modification of the first embodiment. FIG. 7 is a diagram showing the planar positional relationship between the first optical element and the second optical element of an object detection sensor according to a second embodiment. FIGS. 8A and 8B are diagrams showing the planar positional relationship between the first optical element and the second optical element of an object detection sensor according to a third embodiment and its modification, respectively. Fig. 9 is a diagram showing the planar positional relationship between first optical elements and second optical elements of an object detection sensor according to a fourth embodiment. Fig. 10 is a schematic plan view showing the positional relationship between a plurality of first optical elements and one second optical element included in one minimum unit out of a plurality of minimum units of an object detection sensor according to a fifth embodiment. Fig. 11 is a graph showing the relationship between the ratio R (Equation (8)) and the distance z when two pairs of first optical elements are operated. Fig. 12 is a flowchart showing a procedure executed by a calculation unit of the object detection sensor according to the fifth embodiment.

[0011] First Embodiment An object detection sensor and an object detection method according to a first embodiment will be described with reference to FIGS. 1 to 4. FIG.

[0012] FIG. 1A is a schematic perspective view of an object detection sensor according to a first embodiment. The object detection sensor according to the first embodiment includes four first optical elements 31, one second optical element 32, and a calculation unit 40. Each of the four first optical elements 31 is a light-emitting element that emits light under the control of the calculation unit 40. The first optical elements 31 may be, for example, a light-emitting diode (LED) or a vertical-cavity surface-emitting laser (VCSEL). The second optical element 32 is a light-receiving element that outputs an electrical signal corresponding to the intensity of the received light. This electrical signal is input to the calculation unit 40. The second optical element 32 may be, for example, a photodiode, a phototransistor, a CdS cell, or the like. In FIG. 1A, the light-receiving elements are hatched.

[0013] The four first light elements 31 and one second light element 32 are arranged on a common imaginary plane 21. For example, the four first light elements 31 and one second light element 32 are mounted on a flat surface of a substrate 20. In this case, the mounting surface of the substrate 20 substantially coincides with the imaginary plane 21. The object detection sensor according to the first embodiment detects an object 50 that passes through the second light elements 32 and is located on an imaginary line (hereinafter referred to as a reference axis 25) extending in the normal direction of the imaginary plane 21. Specifically, the distance from the imaginary plane 21 to the object 50 and the attitude of the object 50 are detected based on the intensity of light that is emitted from each of the first light elements 31, reflected by the object 50, and incident on the second light element 32. Here, "passing through the second light elements 32" means passing through the geometric center of the light-receiving area of ​​the second light element 32.

[0014] FIG. 1B is a diagram showing an example of the positional relationship between four first optical elements 31 and one second optical element 32 in a plan view. The four first optical elements 31 are not arranged on a common straight line passing through the second optical element 32, nor are they arranged on a common circumference centered on the second optical element 32. That is, when a straight line SL is drawn passing through the second optical element 32 and one first optical element 31, at least one of the other three first optical elements 31 is arranged at a position deviating from the straight line SL. In the example shown in FIG. 1B, two first optical elements 31 are arranged at a position deviating from the straight line SL. Furthermore, when a circumference C is drawn centered on the second optical element 32 and passing through one first optical element 31, at least one of the other three first optical elements 31 is arranged at a position deviating from the circumference C. In the example shown in FIG. 1B, two first optical elements 31 are arranged at a position deviating from the circumference C.

[0015] Here, whether the first optical element 31 is located on the line SL or the circumference C is determined based on the geometric center of the light-emitting area of ​​the first optical element 31. Whether the second optical element 32 is located on the line SL is determined based on the geometric center of the light-receiving area of ​​the second optical element 32. The circumference centered on the second optical element 32 means the circumference centered on the geometric center of the light-receiving area of ​​the second optical element 32. Due to this arrangement, the distance between at least one first optical element 31 and the second optical element 32 is different from the distances between the other three first optical elements 31 and the second optical element 32. A total of four light-receiving and light-emitting pairs are configured by each of the four first optical elements 31 and one second optical element 32.

[0016] Next, the definitions of the coordinate system and various parameters used in this specification will be described with reference to Fig. 2. Fig. 2 is a diagram showing the positional relationship between one first optical element 31i, the second optical element 32, and the object 50, and the coordinate system. The xy plane of the xyz Cartesian coordinate system corresponds to the virtual plane 21 (Fig. 1A), and the second optical element 32 is disposed at the origin O. The z axis corresponds to the reference axis 25. Note that a left-handed system is used as the xyz Cartesian coordinate system.

[0017] When the four first optical elements 31 are numbered sequentially starting from 1, the i-th first optical element 31 is denoted as 31i. The x and y coordinates of the first optical element 31i are respectivelyｘｉ , a ｙｉ The distance from the origin O to the first optical element 31i is denoted as r ｉ The azimuth angle of the position of the first optical element 31 when the x-axis is the reference direction is represented as θ ｒｉ It is marked as follows.

[0018] The intersection of the surface of the object 50 facing the origin O and the reference axis 25 (hereinafter referred to as the representative point of the object 50) is denoted as P. The distance from the origin O (second optical element 32) to the representative point P of the object 50 is denoted as z. In this specification, the distance z from the second optical element 32 to the representative point P of the object 50 may be simply referred to as the distance z from the second optical element 32 to the object 50. The unit vector pointing from the representative point P of the object 50 to the first optical element 31i is denoted as n. ｉ The unit vector n ｉ and the reference axis 25 is defined as θ ｉ It is marked as follows.

[0019] The unit normal vector of the surface of the object 50 at the position of the representative point P is n ｓ The unit normal vector n ｓ and the angle between the reference axis 25 is φ ｚ The angle φ is ｚ is called the tilt angle of the object 50. The unit normal vector n ｓ The angle between the vertical projection onto the xy plane and the x-axis is φ ｘ The angle φ is ｘ is called the tilt azimuth angle of the surface of the object 50.

[0020] 3 is a schematic diagram showing the directional characteristics of the first optical element 31 and the second optical element 32. The directional characteristic DC1 of the first optical element 31 and the directional characteristic DC2 of the second optical element 32 are shown in a graph. The tilt angle from the positive direction of the z-axis is denoted as θ. In the first optical element 31, the light intensity is maximum when θ=0° (front direction), and the light intensity decreases as the tilt angle θ increases. The tilt angle θ at which the light intensity becomes half of the light intensity in the front direction is called the half-maximum half-angle θ. １／２In the second optical element 32, the light sensitivity is maximum when θ=0° (front direction), and the light sensitivity decreases as the tilt angle θ increases. The tilt angle θ at which the light sensitivity becomes half of the light sensitivity in the front direction is called the half-maximum half-angle θ. １／２ That's what they say.

[0021] The first optical element 31 has a wider angle of directivity than the second optical element 32. For example, the first optical element 31 has a wide angle of directivity such that light of sufficient intensity is irradiated onto an object 50 ( FIG. 1A ) located on the reference axis 25. The second optical element 32 has a sharp directional characteristic such that it has sufficiently low sensitivity to reflected light from an object located far away from the reference axis 25. For example, the half-angle at half maximum θ of the directional characteristic of the second optical element 32 is １／２ is preferably 15° or less, more preferably 10° or less, and most preferably 5° or less.

[0022] When the directivity characteristic of the first optical element 31 does not depend on the azimuth angle, the directivity characteristic LD(θ) of the first optical element 31 can generally be approximated by the following equation. Here, n is a parameter determined by the directivity of the first optical element 31. The larger n is, the sharper the directivity becomes.

[0023] The light emission intensity of the i-th first optical element 31i in the front direction is G ｉ and the light receiving sensitivity of the second optical element 32 is denoted as C. The reflectance of the surface of the object 50 is denoted as α. The light intensity LIi at the representative point P is expressed by the following equation. Note that the four first optical elements 31 have the same directional characteristic LD(θ).

[0024] The intensity of light detected by the second light element 32, that is, the luminance Li of the representative point P when the representative point P is viewed as a new light source from the second light element 32, is expressed by the following equation.

[0025] The denominator z on the right side of equation (3) βThe term z indicates that as the distance z increases, the field of view of the second light element 32 widens, and the contribution of brightness per unit area of ​​the surface of the object 50 (FIG. 1A) decreases. When light is irradiated onto a wide area of ​​the surface of the object 50, and the surface of the object 50 is larger than the field of view of the second light element 32, the entire field of view of the second light element 32 receives light even if the distance z increases. In such a case, z β The influence of the term (a) is small depending on the shape and size of the object 50, the half-angle at half maximum θ of the directional characteristics of the second optical element 32, and the １／２ In reality, β in equation (3) takes any value within the range of 0 to 2, depending on the magnitude of

[0026] The parameter CαG on the right side of equation (3) ｉ / z β is common to the four first optical elements 31, so the unknown quantity in equation (3) is the parameter CαG ｉ / z β , distance z, tilt azimuth φ ｘ , inclination angle φ ｚ and four equations (3) are generated for i=1, 2, 3, 4. The four first optical elements 31 are not arranged on a common line passing through the second optical element 32, nor are they arranged on a common circumference centered on the second optical element 32, so the four equations are linearly independent. Therefore, the calculation unit 40 solves this simultaneous equation with four unknowns to calculate the parameter CαG ｉ / z β , distance z, tilt azimuth φ ｘ , inclination angle φ ｚ can be obtained.

[0027] Next, a method for detecting an object by the object detection sensor according to the first embodiment will be described with reference to Fig. 4. Fig. 4 is a flowchart showing the procedure executed by the calculation unit 40 (Fig. 1A) of the object detection sensor according to the first embodiment.

[0028] The calculation unit 40 (FIG. 1A) sequentially causes the four first optical elements 31 to emit light, and measures the intensity of the light received by the second optical element 32 for each first optical element 31 (step SA1). The calculation unit 40 generates simultaneous equations with four unknowns by substituting each of the four measured values ​​measured by the second optical elements 32 into equation (3), and solves the simultaneous equations with four unknowns to calculate the distance z, the tilt azimuth angle φ, and the like. ｘ , inclination angle φ ｚ is calculated (step SA2).

[0029] Next, a description will be given of the excellent effects of Example 1. In Example 1, four first optical elements 31 and one second optical element 32 are used to measure the distance z and the tilt azimuth angle φ. ｘ , inclination angle φ ｚ That is, it is possible to determine not only the tilt angle in a specific direction but also the direction in which the surface of the object 50 is tilted.

[0030] Next, an object detection sensor according to a modification of the first embodiment will be described. In the object detection sensor according to the first embodiment, the directional characteristics LD(θ) of the four first light elements 31 are isotropic and do not depend on the azimuth angle, but they do not necessarily have to be isotropic. For example, if the directional characteristics can be converted into a form that is not azimuth angle dependent by coordinate transformation, the directional characteristics do not necessarily have to be isotropic.

[0031] For example, the half-width θ in the xz plane shown in FIG. １／２ is the half-angle θ at half maximum in the yz plane １／２ If the value of the y-axis is doubled, the half-angle θ １／２ is the half-angle θ at half maximum in the yz plane １／２ This is equivalent to the case where the directional characteristics do not have azimuth angle dependency. Therefore, by performing coordinate transformation, a simultaneous equation of the same form as equation (3) can be obtained.

[0032] Next, an object detection sensor according to another modification of the first embodiment will be described with reference to Fig. 5. Fig. 5 is a diagram showing the planar positional relationship between the four first light elements 31 and one second light element 32 of the object detection sensor according to this modification.

[0033] In the object detection sensor according to the first embodiment, none of the four first optical elements 31 (FIG. 1B) are arranged on a single straight line. In contrast, in the modified example shown in FIG. 5, three first optical elements 31 and one second optical element 32 are arranged on a single straight line SL, and the remaining one first optical element 31 is arranged at a position deviated from this straight line SL. Even in this case, if the four simultaneous equations consisting of the four equations (3) defined for each of the four first optical elements 31 are linearly independent, the distance z and the tilt azimuth angle φ can be calculated as in the first embodiment. ｘ , inclination angle φ ｚ can be obtained.

[0034] Next, an object detection sensor according to yet another modification of the first embodiment will be described with reference to Fig. 6. Fig. 6 is a schematic perspective view of the object detection sensor according to this modification.

[0035] In the first embodiment ( FIG. 1A ), four first optical elements 31 are light-emitting elements and one second optical element 32 is a light-receiving element. In contrast, in this modified example, one second optical element 32 is a light-emitting element and four first optical elements 31 are light-receiving elements. In FIG. 6 , the light-receiving elements are hatched. The directional characteristics of the first optical element 31 and the second optical element 32 are the same as the directional characteristics of the first optical element 31 and the second optical element 32 of the object detection sensor according to the first embodiment.

[0036] That is, the second optical element 32 mainly irradiates light onto the object 50 located on the reference axis 25, and does not substantially irradiate light in a direction significantly deviated from the reference axis 25. For example, when the half-angle at half maximum θ of the directional characteristics of the light emitted from the second optical element 32 is １／２ is preferably 15° or less, more preferably 10° or less, and most preferably 5° or less.

[0037] Furthermore, the directional characteristics of the light receiving sensitivity of the four first light elements 31 are wider than the directional characteristics of the second light elements 32. For example, they have sufficient light receiving sensitivity to light reflected by an object 50 ( FIG. 1A ) located on the reference axis 25.

[0038] When detecting an object, the second light element 32 emits light, and the four first light elements 31 each receive light reflected from the object 50. In this modified example, the luminance of the representative point P on the surface of the object 50 is also expressed by equation (3). Therefore, in this modified example, as in the first embodiment, the luminance of the representative point P on the surface of the object 50 is expressed by equation (3). ｘ , inclination angle φ ｚ can be obtained.

[0039] Second Embodiment Next, an object detection sensor according to a second embodiment will be described with reference to Fig. 7. Below, a description of the configuration common to the object detection sensor according to the first embodiment described with reference to Figs. 1A to 4 will be omitted.

[0040] 7 is a diagram showing the planar positional relationship between the first optical elements 31 and the second optical elements 32 of the object detection sensor according to the second embodiment. In the second embodiment, as in the first embodiment, four first optical elements 31 and one second optical element 32 are arranged on the imaginary plane 21.

[0041] In the first embodiment ( FIG. 1B ), none of the three first optical elements 31 among the four first optical elements 31 are arranged on a single straight line, and the four first optical elements 31 are not arranged on a common circumference centered on the second optical element 32. In the second embodiment, in addition to this condition, the four first optical elements 31 are arranged so as to satisfy the following condition.

[0042] In the second embodiment, two of the four first optical elements 31 are first optical elements 31a. １ , 31a ２ are arranged at positions point-symmetric with respect to the second optical element 32, and the other two first optical elements 31b １ , 31b ２ The second optical element 32 and the first optical element 31a are also arranged in point symmetry with respect to the second optical element. １ , 31a ２ The distance to each of ａ and the second optical element 32 to the first optical element 31b １ , 31b ２ The distance to each of ｂ The two first optical elements 31a are denoted as follows: １ , 31a２ and the other two first optical elements 31b １ , 31b ２ The angle between the line passing through the point is denoted as δ. The angle δ is greater than 0° and less than 180°.

[0043] Two first optical elements 31 positioned point-symmetrically to each other are referred to as a pair of first optical elements. １ , 31a ２ constitute one pair of first optical elements 31a, and the other two first optical elements 31b １ , 31b ２ constitute another first optical element pair 31b.

[0044] First optical element 31a １ Applying equation (3) to

[0045] First optical element 31a ２ Applying equation (3) to

[0046] In formula (4) and formula (5), G ａ１ = G ａ２ , θ ｒａ１ +θ ｒａ２ = 180°, the following equation is obtained from equations (4) and (5):

[0047] Similarly, the first optical element 31b １ , 31b ２ For , the following equation is obtained:

[0048] First optical element 31a １ , 31a ２ The sum of the measured values ​​when the first optical element pair 31a consisting of the first optical element pair 31a is made to emit light and the second optical element 32 receives the light is calculated by the sum of the measured values ​​when the first optical element pair 31a consists of the first optical element pair 31b １ , 31b ２ The ratio R of the sum of the measured values ​​when each of the first optical element pairs 31b consisting of the first optical element pair 31b and the second optical element 32 receives the light is expressed by the following equation from equations (6) and (7):

[0049] Since the only unknown in equation (8) is z, the distance z to the object 50 can be calculated from the ratio R.

[0050] Furthermore, for the first optical element pair 31a, the following equation is obtained from equations (4) and (5):

[0051] Similarly, the following equation is obtained for the first optical element pair 31b.

[0052] From equations (9) and (10), the following equation is derived: where the parameter R is defined by equation (8) and the parameter A １ is defined by the following formula:

[0053] From equation (11), the parameter A １ The value of parameter A can be calculated. １ Once the value of is known, the tilt angle φ can be calculated from equation (12). ｚ Furthermore, from equation (9), the tilt azimuth angle φ ｘ In this way, by finding the sum and difference of the measured values ​​by the two first optical element pairs 31a and 31b and performing simple algebraic calculations, the tilt angle φ can be calculated. ｚ and inclination azimuth φ ｘ can be calculated.

[0054] Next, the advantageous effects of the second embodiment will be described. In the second embodiment, the distance z to the object 50 and the inclination angle φ of the surface of the object 50 are calculated by simple algebraic calculations without solving simultaneous equations with four unknowns. ｚ , and the tilt azimuth angle φ ｘ can be obtained.

[0055] Next, an object detection sensor according to a modification of Example 2 will be described. In Example 2, the four first light elements 31 are light-emitting elements and one second light element 32 is a light-receiving element, but the opposite configuration may also be used, where one second light element 32 is a light-emitting element and the four first light elements 31 are light-receiving elements.

[0056] Third Embodiment Next, an object detection sensor according to a third embodiment will be described with reference to Fig. 8A. Below, a description of the configuration common to the object detection sensor according to the second embodiment described with reference to Fig. 7 will be omitted.

[0057] 8A is a diagram showing the planar positional relationship between the first light element 31 and the second light element 32 of the object detection sensor according to the third embodiment. The object detection sensor according to the second embodiment (FIG. 7) includes one second light element 32 and four first light elements 31. In contrast, the object detection sensor according to the third embodiment includes a plurality of first light elements 31 and a plurality of second light elements 32 arranged on an imaginary plane 21. In FIG. 8A, the light receiving elements are hatched.

[0058] The second optical elements 32 are arranged at equal intervals along a single straight line SL2. The first optical elements 31 are arranged at equal intervals along two straight lines SL1 that extend parallel to the straight line SL2, sandwiching the straight line SL2. The spacing between the first optical elements 31 arranged on the straight line SL1 is equal to the spacing between the second optical elements 32 arranged along the straight line SL2. The spacing between one straight line SL1 and the straight line SL2 is equal to the spacing between the other straight lines SL1 and SL2. Furthermore, the first optical elements 31 are arranged at the intersection of a line passing through one second optical element 32 and one first optical element 31 on one straight line SL1 and the other straight line SL1.

[0059] With this arrangement, two or more pairs of two first optical elements 31 arranged in point-symmetric positions with respect to each second optical element 32 can be selected. One of the two first optical elements 31 arranged in point-symmetric positions with respect to each other is arranged on one straight line SL1, and the other first optical element 31 is arranged on the other straight line SL1. Two pairs of first optical elements, each consisting of one second optical element 32 and two first optical elements 31 arranged in point-symmetric positions with respect to the second optical element 32, are referred to as a minimum unit 30.

[0060] Similarly to the second embodiment (FIG. 7), the distance z to the object 50 and the inclination angle φ of the surface of the object 50 are calculated by each of the plurality of minimum units 30. ｚ and tilt azimuth φｘ can be obtained.

[0061] Next, the advantageous effects of the third embodiment will be described. In the third embodiment, the distance z from each of the second optical elements 32 to the object 50 along the straight line SL2 in the direction perpendicular to the imaginary plane 21, the inclination angle φ of the surface of the object 50, and the like are calculated. ｚ and tilt azimuth φ ｘ Therefore, a line profile of the surface of the object 50 in a direction parallel to the straight line SL2 can be obtained. Furthermore, the inclination angle φ obtained for each of the plurality of minimum units 30 can be calculated. ｚ and tilt azimuth φ ｘ From this, the inclination angle of the surface of the object 50 with respect to the direction perpendicular to the straight line SL2 on the virtual plane 21 can be obtained.

[0062] Furthermore, in the third embodiment, one first optical element 31 is shared by a plurality of minimum units 30. Therefore, it is possible to reduce the number of first optical elements 31 compared to when the first optical element 31 is not shared by a plurality of minimum units. Furthermore, in the third embodiment, the first optical element 31 is not arranged between a plurality of second optical elements 32 arranged along the straight line SL2. Therefore, it is possible to arrange the second optical elements 32 densely along the straight line SL2.

[0063] Four first optical elements 31 can be selected relative to one second optical element 32 so that the relative positional relationship between one second optical element 32 and four first optical elements 31 constituting the minimum unit 30 is the same in all minimum units 30. When the relative positional relationship between one second optical element 32 and four first optical elements 31 is the same in all minimum units 30, the variable r ａ , r ｂ , θ ｒａ１ , θ ｒｂ１ The values ​​of the two are the same. This provides the excellent effect of making the calculation easier.

[0064] Next, an object detection sensor according to a modification of the third embodiment will be described with reference to Fig. 8B, which is a diagram showing the planar positional relationship between the first light element 31 and the second light element 32 of the object detection sensor according to the modification of the third embodiment.

[0065] In the third embodiment ( FIG. 8A ), the interval between the second optical elements 32 arranged along the line SL2 is the same as the interval between the first optical elements 31 arranged along each of the lines SL1. In contrast, in the modified example shown in FIG. 8B , the interval between the first optical elements 31 arranged along each of the lines SL1 is wider than the interval between the second optical elements 32 arranged along the line SL2. In other words, the number of first optical elements 31 is smaller than the number of first optical elements 31 in the object detection sensor according to the third embodiment.

[0066] In this way, even if the interval between the first optical elements 31 is wider than the interval between the second optical elements 32, it is possible to select four first optical elements 31 constituting the minimum unit 30 for each of the plurality of second optical elements 32. In the modified example shown in Fig. 8B, the number of first optical elements 31 can be further reduced compared to the third embodiment shown in Fig. 8A. In this modified example, the variable r in Equations (8), (11), and (12) can be reduced between the minimum units 30. ａ , r ｂ , θ ｒａ１ , θ ｒｂ１ It should be noted that the values ​​of will not be the same.

[0067] Next, another modification of the third embodiment will be described. In the third embodiment, the plurality of first optical elements 31 are arranged along two straight lines SL1, but the plurality of first optical elements 31 do not necessarily have to be arranged along straight lines. It is sufficient that four first optical elements 31 constituting the minimum unit 30 can be selected for each of the plurality of second optical elements 32. Note that, in order to arrange the plurality of second optical elements 32 densely, it is preferable to arrange the first optical elements 31 at positions deviated from the straight line SL2.

[0068] In the third embodiment, a light-emitting element is used as the first optical element 31 and a light-receiving element is used as the second optical element 32, but the reverse may be true, where a light-receiving element is used as the first optical element 31 and a light-emitting element is used as the second optical element 32.

[0069] [Fourth Example] Next, an object detection sensor according to a fourth example will be described with reference to Fig. 9. Below, a description of the configuration common to the object detection sensor according to the third example described with reference to Fig. 8A will be omitted.

[0070] 9 is a diagram showing the planar positional relationship between the first light element 31 and the second light element 32 of the object detection sensor according to the fourth embodiment. In FIG. 9, the second light element 32, which is a light receiving element, is hatched. In the third embodiment ( FIG. 8A ), the plurality of second light elements 32 are arranged one-dimensionally along a single straight line SL2. In contrast, in the fourth embodiment, the plurality of second light elements 32 are arranged two-dimensionally on the imaginary plane 21.

[0071] For example, a plurality of second optical elements 32 are arranged at each of a plurality of intersections between a plurality of straight lines SL2a that are parallel to one another and equally spaced apart and a plurality of straight lines SL2b that intersect with the straight lines SL2a and are parallel to one another and equally spaced apart. That is, the plurality of second optical elements 32 are arranged at equal intervals in a first direction parallel to the straight lines SL2a, and are also arranged at equal intervals in a second direction parallel to the straight lines SL2b.

[0072] A plurality of first optical elements 31 are arranged at each of a plurality of intersections between a plurality of straight lines SL1a that are parallel to the straight line SL2a and arranged at equal intervals and a plurality of straight lines SL1b that are parallel to the straight line SL2b and arranged at equal intervals. That is, the plurality of first optical elements 31 are arranged at equal intervals in a first direction parallel to the straight lines SL1a, and are also arranged at equal intervals in a second direction parallel to the straight lines SL1b. The straight line SL1a is arranged at the center of two adjacent straight lines SL2a, and the straight line SL1b is arranged at the center of two adjacent straight lines SL2b.

[0073] For each of the plurality of second optical elements 32, four first optical elements 31 that constitute the minimum unit 30 can be selected. Furthermore, among the plurality of minimum units 30, the four first optical elements 31 can be selected so that the positional relationship between the second optical element 32 and the four first optical elements 31 is the same.

[0074] Next, the advantageous effects of the fourth embodiment will be described. In the fourth embodiment, it is possible to obtain a line profile of the surface of the object 50 along each of the plurality of straight lines SL2a and a line profile of the surface of the object 50 along each of the plurality of straight lines SL2b. Furthermore, in the fourth embodiment, since no first optical elements 31 are disposed between two second optical elements 32 aligned in a direction parallel to the straight lines SL2a or between two second optical elements 32 aligned in a direction parallel to the straight lines SL2b, it is possible to arrange the plurality of second optical elements 32 (measurement points) two-dimensionally and densely.

[0075] One first optical element 31 is shared by a plurality of minimum units 30. Therefore, the number of first optical elements 31 can be reduced.

[0076] Next, an object detection sensor according to a modification of the fourth embodiment will be described. In the fourth embodiment, the second optical elements 32 are arranged at equal intervals along the straight line SL2a and at equal intervals along the straight line SL2b, but the second optical elements 32 do not necessarily have to be arranged along straight lines. It is sufficient to arrange each of the second optical elements 32 two-dimensionally, and to arrange four first optical elements 31 constituting a minimum unit 30 for each second optical element 32. In this case, it is preferable to arrange the first optical elements 31 so that one first optical element 31 is shared by multiple minimum units 30.

[0077] Fifth Example Next, an object detection sensor according to a fifth example will be described with reference to Fig. 10, Fig. 11, and Fig. 12. Below, a description of the configuration common to the object detection sensor according to the fourth example described with reference to Fig. 9 will be omitted.

[0078] FIG. 10 is a schematic plan view showing the positional relationship between a plurality of first optical elements 31 and one second optical element 32 included in one minimum unit 30 among a plurality of minimum units 30 of an object detection sensor according to a fifth embodiment. In the fourth embodiment ( FIG. 9 ), the minimum unit 30 is configured with one second optical element 32 and two first optical element pairs (four first optical elements 31). In contrast, in the fifth embodiment, each minimum unit 30 includes one second optical element 32 and three or more first optical element pairs (six or more first optical elements 31). FIG. 10 shows an example in which one minimum unit 30 includes five first optical element pairs 31a, 31b, 31c, 31d, and 31e. In the object detection sensor according to the fourth embodiment ( FIG. 9 ), ten first optical elements 31 can be selected for each of the plurality of second optical elements 32 so that one minimum unit 30 includes five first optical element pairs.

[0079] The distance from the first optical element 31 to the second optical element 32 of each of the first optical element pairs 31a, 31b, 31c, 31d, and 31e is defined as r ａ , r ｂ , r ｃ , r ｄ , r ｅ The distance r ａ , r ｂ , r ｃ , r ｄ , r ｅ The magnitude relationship is as follows: As an example, r ａ = 5 mm, r ｂ = 7.5 mm, r ｃ = 10 mm, r ｄ = 15 mm, r ｅ = 20 mm.

[0080] 11 is a graph showing the relationship between the ratio R (Equation (8)) and the distance z when two pairs of first optical elements and one second optical element 32 are operated. The horizontal axis represents the distance z in units of mm, and the vertical axis represents the ratio R. The distance from the first optical element 31 to the second optical element 32 of the two pairs of first optical elements to be operated is defined as r Ｓ , r Ｌ Here, r Ｓ <r ＬThe thin dashed line, thick dashed line, thin solid line, and thick solid line in the graph shown in FIG. Ｌ = 7.5 mm, r Ｌ = 10 mm, r Ｌ = 15 mm, and r Ｌ In either case, the ratio R is Ｓ = 5 mm.

[0081] It can be seen that the ratio R increases as the distance z increases. Ｌ The shorter the distance z, the faster the ratio R increases. In order to improve the measurement accuracy of the distance z, it is preferable to calculate the distance z using an area where the slope of the graph is steep. That is, as the distance z increases, the distance r Ｌ In the example shown in FIG. 11, the distance z is in the range Z １ , Z ２ , Z ３ , Z ４ When the distance r Ｌ It is preferable to operate the first optical element pairs at distances r 7.5 mm, 10 mm, 15 mm, and 20 mm. Ｓ operates the first pair of optical elements of 5 mm.

[0082] 12 is a flowchart showing the procedure executed by the calculation unit 40 (FIG. 1A) of the object detection sensor according to the fifth embodiment. The calculation unit 40 first calculates the distance r Ｌ is set to 20 mm (step SB1). That is, the distance r Ｓ = 5 mm and the first optical element pair 31a and the distance r Ｌ The first optical element pair 31e having a wavelength of 20 mm is operated. The two first optical element pairs 31a and 31e are operated, respectively, to obtain the luminance La １ , La ２ , Lb １ , Lb ２ Measure the luminance La １ , La ２ is the distance r Ｓ The two first optical elements 31 of the first optical element pair 31a are operated and measured. １ , Lb ２ is the distance rＬ The two first optical elements 31 of the first optical element pair 31e with a distance of 20 mm are operated and measured. From the measurement results, a provisional value of the distance z is calculated using equation (8) (step SB2).

[0083] Next, a process corresponding to the provisional value of the distance z is executed (step SB3). １ When it is within the range of Ｌ The provisional value of the distance z is set to 7.5 mm (step SB4). ２ When it is within the range of Ｌ The provisional value of the distance z is set to 10 mm (step SB5). ３ When it is within the range of Ｌ The provisional value of the distance z is set to 15 mm (step SB6). ４ If it is within the range, the provisional value of the distance z is adopted as the measurement result (step SB8).

[0084] In step SB4, SB5, or SB6, the distance r Ｌ After resetting, the set distance r Ｌ Then, the first pair of optical elements corresponding to the distance r is operated to recalculate the provisional value of the distance z (step SB7). Ｓ remains at 5 mm.

[0085] The recalculated provisional value of the distance z is set to the section Z shown in FIG. １ , Z ２ , Z ３ , Z ４ Of these, distance r Ｌ (Step SB8). Ｌ If the provisional value of the recalculated distance z is not within the range corresponding to the set value of the distance r, the procedure from step SB3 is repeated. Ｌ If it is within the range corresponding to the set value of (a), the recalculated provisional value of the distance z is adopted as the measurement result (step SB9).

[0086] As described above, in the fifth embodiment, first, the first optical element 31 and the second optical element 32 of two first optical element pairs selected from a plurality of first optical element pairs are operated to obtain a provisional value of the distance z (step SB2). Based on the obtained provisional value, two first optical element pairs are selected from the plurality of first optical element pairs (steps SB4, SB5, and SB6), and the first optical element 31 and the second optical element 32 of the selected two first optical element pairs are operated to recalculate the provisional value of the distance z (step SB7). In this way, the distance z is obtained by operating two preferred first optical element pairs according to the provisional value of the distance z.

[0087] Next, the advantageous effects of the fifth embodiment will be described. In the fifth embodiment, for each of the plurality of minimum units 30 (FIGS. 9 and 10), measurement is performed by operating the first optical element pair that is optimal for the value of distance z. This makes it possible to improve the measurement accuracy of distance z.

[0088] Next, an object detection sensor according to a modification of the fifth embodiment will be described. In the fifth embodiment, each of the minimum units 30 includes five sets of first optical element pairs 31a, 31b, 31c, 31d, and 31e, but the number of first optical element pairs included in the minimum units 30 may be three or more. If each of the minimum units 30 includes three sets of first optical element pairs, two sections are provided in FIG. 11. In this case, the process is branched into two in step SB3 (FIG. 12). If the provisional value of distance z is within the range of the preferred section, the provisional value is adopted as the measurement result (corresponding to step SB9). If the provisional value of distance z is outside the range of the preferred section, the distance r Ｌ The first optical element pair having different values ​​is selected, and the provisional value of the distance z is recalculated (corresponding to step SB7).

[0089] In the fifth embodiment, in step SB1 (FIG. 12), the distance r Ｌ is set to the longest value of 20 mm. This is because it is assumed that the object 50 (FIG. 1A) is often detected at a position far from the object detection sensor and then approaches the object detection sensor. If the range of distance z within which the object 50 is expected to be first detected is estimated in advance, the distance r ＬIt is advisable to set a value corresponding to the expected distance z to .

[0090] The above-described embodiments are merely examples, and it goes without saying that partial substitution or combination of the configurations shown in different embodiments is possible. Similar effects resulting from similar configurations of multiple embodiments will not be mentioned sequentially for each embodiment. Furthermore, the present invention is not limited to the above-described embodiments. For example, it will be obvious to those skilled in the art that various modifications, improvements, combinations, etc. are possible.

[0091] 20 substrate 21 virtual plane 25 reference axis 30 minimum unit 31, 31a １ , 31a ２ , 31b １ , 31b ２ , 31i First optical element 31a, 31b, 31c, 31d, 31e First optical element pair 32 Second optical element 40 Calculation unit 50 Object

Claims

1. At least four first optical elements arranged on an imaginary plane; at least one second optical element disposed on the virtual plane; Calculation unit and Equipped with one of the first optical element and the second optical element is a light-emitting element, and the other is a light-receiving element; a minimum unit is configured by at least four of the first optical elements and one of the second optical elements, the four first optical elements of the minimum unit have the same directional characteristics, and the directional characteristics of the second optical elements are such that, when a straight line extending from the second optical element in a normal direction to the virtual plane is taken as a reference axis, an inclination angle at which illuminance or light receiving sensitivity in a direction inclined from the reference axis becomes 1 / 2 of the illuminance or light receiving sensitivity in the direction of the reference axis is 15° or less, the four first optical elements of the minimum unit are not arranged on a common straight line passing through the second optical element, nor are they arranged on a common circumference centered on the second optical element, The calculation unit is an object detection sensor that calculates the distance from the virtual plane to an object on the reference axis, the inclination angle in the normal direction of the surface of the object with respect to the reference axis, and the inclination azimuth angle based on measured values that are the received light intensities when each of the first light elements of the smallest unit and the second light element are operated.

2. The object detection sensor according to claim 1 , wherein the minimum unit includes at least two pairs of first optical elements each consisting of two of the first optical elements arranged at positions point-symmetrical to each other with respect to the second optical element.

3. 3. The object detection sensor according to claim 2, wherein the calculation unit calculates the distance from the virtual plane to the object based on the sum of the measurement values when the first optical element and the second optical element of one of the first optical element pairs are operated and the sum of the measurement values when the first optical element and the second optical element of the other first optical element pair are operated.

4. the minimum unit includes at least three pairs of the first optical elements, The calculation unit operating the first optical elements and the second optical elements of two sets of first optical element pairs selected from the three sets of first optical element pairs to obtain a provisional value of the distance from the virtual plane to the object; 4. The object detection sensor according to claim 3, wherein two pairs of first optical elements are selected from the at least three pairs of first optical elements based on the provisional values, and the distance from the virtual plane to the object is calculated based on the measurement values when the first optical elements and the second optical elements of the selected two pairs of first optical elements are operated.

5. 5. The object detection sensor according to claim 2, wherein the calculation unit calculates a tilt angle and a tilt azimuth angle in a normal direction of the surface of the object relative to the reference axis, based on a difference between the measurement values when the first optical element and the second optical element of one of the first optical element pairs are operated and a difference between the measurement values when the first optical element and the second optical element of the other first optical element pair are operated.

6. a plurality of the second optical elements are arranged; a plurality of the first optical elements are arranged to constitute the minimum unit for each of the plurality of second optical elements; The object detection sensor according to claim 2 , wherein at least one of the plurality of first optical elements is shared by at least two of the minimum units.

7. The object detection sensor according to claim 6 , wherein the second optical elements are arranged in a straight line.

8. the second optical elements are arranged at equal intervals in a first direction and also at equal intervals in a second direction intersecting the first direction; the plurality of first optical elements are arranged at equal intervals in the first direction and also at equal intervals in the second direction; an arrangement interval between the plurality of first optical elements in the first direction is equal to an arrangement interval between the plurality of second optical elements in the first direction; The object detection sensor according to claim 6 , wherein an arrangement interval between the plurality of first light elements in the second direction is equal to an arrangement interval between the plurality of second light elements in the second direction.

9. A detection method for detecting an object on a reference axis extending in a normal direction of the virtual plane from the second optical element by operating a minimum unit of the first optical element and the second optical element, the minimum unit being composed of at least four first optical elements and a second optical element arranged on a common virtual plane, the method comprising: one of the first optical element and the second optical element is a light-emitting element, and the other is a light-receiving element; the four first optical elements of the minimum unit have the same directional characteristics, and the directional characteristics of the second optical elements have a tilt angle of 15° or less when the illuminance or light receiving sensitivity in a direction tilted from the reference axis is half of the illuminance or light receiving sensitivity in the direction of the reference axis; the four first optical elements of the minimum unit are not arranged on a common straight line passing through the second optical element, nor are they arranged on a common circumference centered on the second optical element, determining a luminance measurement value when the object is used as a new light source based on light emitted from one of the first optical element and the second optical element of the minimum unit, reflected by the object, and received by the other element; An object detection method that calculates, from the measurement values, at least one of the reflectivity of the surface of the object, the distance from the virtual plane to the object on the reference axis, the tilt angle of the surface of the object with respect to the reference axis, and the tilt azimuth angle of the surface of the object.

10. the minimum unit includes at least two pairs of first optical elements each consisting of two of the first optical elements arranged at positions point-symmetric with respect to the second optical element, calculating a sum of the measurement values measured by operating the first optical element and the second optical element of one of the first optical element pairs and a sum of the measurement values measured by operating the first optical element and the second optical element of the other of the first optical element pairs; The object detection method according to claim 9 , wherein the distance from the virtual plane to the object on the reference axis is calculated based on the sum of the measurement values.

11. calculating a difference between the measurement values measured by operating the first optical element and the second optical element of one of the first optical element pairs and a difference between the measurement values measured by operating the first optical element and the second optical element of the other of the first optical element pairs; The object detection method according to claim 10 , further comprising calculating at least one of an inclination angle of the surface of the object relative to the reference axis and an inclination azimuth angle of the surface of the object based on the difference in the measurement values.

12. the minimum unit includes at least three pairs of the first optical elements, operating the first optical elements and the second optical elements of two sets of first optical element pairs selected from the three sets of first optical element pairs to obtain a provisional value of the distance from the virtual plane to the object; 12. The object detection method according to claim 10, further comprising: selecting two pairs of first optical elements from at least three pairs of first optical elements based on the provisional values; and operating the first optical elements and the second optical elements of the selected two pairs of first optical elements to determine the distance from the virtual plane to the target object.