Particle analysis device, particle analysis system, and particle analysis method

Abstract

The particle analysis device 30 includes an acquisition unit (31) that acquires a multi-viewpoint image obtained by combining captured images obtained by simultaneously capturing, from different viewpoints by a plurality of cameras (17), an image of a lens array (16) on which light from irradiated particles is focused via a main lens (15); a detection unit (32) that detects a light intensity pattern of scattered light scattered from the particles based on the multi-viewpoint image acquired by the acquisition unit (31); an analysis unit (33) that analyzes a scattering solid angle of the scattered light centered on the optical axis of the main lens (15) based on the light intensity pattern of the scattered light detected by the detection unit (32); and a calculation unit (34) that calculates the molecular weight and particle size of the particle based on the scattering solid angle of the scattered light analyzed by the analysis unit (33).

Description

[Technical field]

[0001] The present disclosure relates to a particle analysis device, a particle analysis system, and a particle analysis method. [Background technology]

[0002] Conventionally, there has been provided a particle analysis device. This particle analysis device irradiates light onto a particle to be analyzed, and analyzes the optical characteristics of the particle based on the scattered light generated by the irradiation. Such a conventional particle analysis device is disclosed in, for example, Patent Document 1. [Prior art documents] [Patent documents]

[0003] [Patent Document 1] JP 2020-122717 A Summary of the Invention [Problem to be solved by the invention]

[0004] The particle analysis device disclosed in Patent Document 1 captures and observes the brightness distribution and scattering angle distribution of scattered light from particles that serve as scatterers. When attempting to analyze the three-dimensional structure of a particle using the particle analysis device disclosed in Patent Document 1, it is necessary to sequentially capture images of the optical system in which light from the subject is imaged from multiple different viewpoints. This may result in a long time being required from capturing images to analysis.

[0005] The present disclosure has been made to solve the above-mentioned problems, and aims to provide a particle analysis device that can analyze scattering particles in three dimensions with a single imaging. [Means for solving the problem]

[0006] The particle analysis device according to the present disclosure includes an acquisition unit that acquires a multi-viewpoint image obtained by combining images captured by multiple cameras simultaneously from different viewpoints of a lens array in which light from irradiated particles is imaged through a main lens, a detection unit that detects a light intensity pattern of scattered light from the particles based on the multi-viewpoint image acquired by the acquisition unit, an analysis unit that analyzes the scattering solid angle of the scattered light centered on the optical axis of the main lens based on the light intensity pattern of the scattered light detected by the detection unit, and a calculation unit that calculates the molecular weight and particle size of the particle based on the scattering solid angle of the scattered light analyzed by the analysis unit. Effect of the Invention

[0007] According to the present disclosure, particles that serve as scatterers can be analyzed three-dimensionally by imaging once. [Brief description of the drawings]

[0008] [Figure 1] 1 is a schematic diagram showing a configuration of a particle analysis system according to a first embodiment. [Diagram 2] 1 is a block diagram showing a configuration of a particle analysis device according to a first embodiment. [Diagram 3] 3 is a flowchart showing a particle analysis method according to the first embodiment. [Figure 4] 4A is a diagram showing a multi-view image when light from the main lens is imaged at each lens of the lens array. FIG. 4B is a multi-view image when light from the main lens is imaged in front of and behind the lens array. [Diagram 5] 11 is a diagram showing the correspondence between the scattering solid angle of scattered light and the minimum including circle. FIG. [Figure 6] 6A and 6B are diagrams showing a multi-view image including a diffraction pattern of diffracted light, respectively. FIG. 6A is a diagram showing a main lens image, and FIG. 6B is an enlarged view of FIG. 6A. [Figure 7] 7A and 7B are diagrams illustrating an example of a hardware configuration of the particle analysis apparatus according to the first embodiment. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0009] In order to describe the present disclosure in more detail, embodiments of the present disclosure will be described below with reference to the accompanying drawings.

[0010] Embodiment 1

[0011] First, the configuration of a particle analysis system 10 according to the first embodiment will be described with reference to Fig. 1. Fig. 1 is a schematic diagram showing the configuration of the particle analysis system 10 according to the first embodiment. The upper diagram in Fig. 1 shows the configuration of the particle analysis system 10. The lower diagram in Fig. 1 shows a geometrical optics simulation corresponding to the particle analysis system 10.

[0012] 1, the particle analysis system 10 includes a light source 11, a collimator lens 12, a shielding plate 13, a condenser lens 14, a main lens 15, a lens array 16, a plurality of cameras 17, and a particle analysis device 30. The particle analysis system 10 is also capable of mounting a sample 20 between the condenser lens 14 and the main lens 15. The sample 20 is made of a material that can transmit light. The light source 11, the collimator lens 12, the shielding plate 13, the condenser lens 14, and the lens array 16 are coaxially arranged on the optical axis of the main lens 15.

[0013] The light source 11 outputs light radially from its tip. The wavelength and intensity of the light output from the light source 11 can be adjusted. The light source 11 is, for example, a laser light source that outputs laser light.

[0014] The collimator lens 12 is composed of a plurality of circular lenses. The collimator lens 12 passes radial light output from the light source 11, converts the radial light into parallel light, and outputs the parallel light.

[0015] The shielding plate 13 is formed in a disk shape. This shielding plate 13 is disposed between the collimator lens 12 and the condenser lens 14. The diameter of the shielding plate 13 is smaller than the lens diameter of the collimator lens 12 and the lens diameter of the condenser lens 14. Therefore, the shielding plate 13 shields the center portion of the parallel light output from the collimator lens 12, thereby converting the parallel light into a parallel light without the light in the center portion.

[0016] The condenser lens 14 passes the centrally-distant parallel light formed by the shading plate 13, converting the parallel light into centrally-distant conical light and outputs it. That is, the centrally-distant conical light is tapered light that gradually becomes smaller in diameter as it travels from the condenser lens 14 toward the sample 20. At this time, the central portion of the conical light is also conical. Such conical light output from the condenser lens 14 is irradiated onto the sample 20. The shading plate 13 and the condenser lens 14 constitute a dark-field condenser lens.

[0017] Here, when the conical light is irradiated onto the particles forming the sample 20, light scattering occurs in one or more particles irradiated with the conical light. Hereinafter, the particles that scatter light are referred to as scatterers. In this case, if the light output from the light source 11 is laser light that interferes with the shielding plate 13, the particles that become scatterers may generate scattered light that is scattered forward toward the main lens 15 and diffracted light that is generated by diffraction. For this reason, the scattered light and diffracted light generated by the scatterers are incident on the main lens 15 described later.

[0018] The main lens 15 passes the scattered light scattered from the scatterers and the diffracted light diffracted by the scatterers, and focuses the light on the lens array 16 described below. For example, the main lens 15 is composed of an objective lens 15a and an imaging lens 15b. Or, the main lens 15 is composed of a microlens 15c. The objective lens 15a and the imaging lens 15b are arranged in order from the sample 20 side toward the lens array 16 side.

[0019] The lens array 16 is composed of a plurality of lenses 16a (see FIG. 4A). These lenses 16a are arranged at a regular pitch or at a random pitch.

[0020] The multiple cameras 17 have an imaging range that includes all the lenses 16a of the lens array 16, and capture the light imaged by each lens 16a. In the particle analysis system 10 shown in Fig. 1, one camera 17 is shown as a representative of the multiple cameras 17. The cameras 17 are disposed at different positions and capture images of the surface of the lens array 16 from different viewpoints or directions.

[0021] Each camera 17 is also connected to an image generation unit (not shown). This image generation unit generates a multi-view image, as if the lens array 16 were captured from a plurality of viewpoints, by synthesizing all the images captured simultaneously by each camera 17. Therefore, the multi-view image generated by the image generation unit is a three-dimensional image. Furthermore, the image generation unit is capable of outputting the generated multi-view image to the particle analysis device 30.

[0022] Furthermore, when the captured lens array image is rotated and misaligned with respect to the image sensor of the camera 17 around the optical axis of the image sensor, the camera 17 corrects the rotation angle of the lens array image.

[0023] Next, the configuration of the particle analysis device 30 according to the first embodiment will be described with reference to FIG. 2. FIG. 2 is a block diagram showing the configuration of the particle analysis device 30 according to the first embodiment.

[0024] As shown in FIG. 2, the particle analysis device 30 includes an acquisition unit 31, a detection unit 32, an analysis unit 33, a calculation unit , and an output unit .

[0025] The acquisition unit 31 acquires multi-viewpoint images from an image generation unit connected to the multiple cameras 17. The acquisition unit 31 outputs the acquired multi-viewpoint images to the detection unit 32.

[0026] The detection unit 32 acquires the multi-view image from the acquisition unit 31. The detection unit 32 detects the light intensity pattern of the scattered light and the light intensity pattern of the diffracted light based on the acquired multi-view image. Each light intensity pattern is a three-dimensional light intensity pattern. The detection unit 32 outputs the detected light intensity pattern of the scattered light and the light intensity pattern of the diffracted light to the analysis unit 33.

[0027] In addition, the detector 32 can generate an image of an arbitrary focal plane (hereinafter, referred to as a refocused image) from the multi-viewpoint image. Since a plurality of refocused images can be generated from one multi-viewpoint image, it is possible to restore a three-dimensional image.

[0028] The analysis unit 33 acquires the light intensity pattern of the scattered light and the light intensity pattern of the diffracted light from the detection unit 32. The analysis unit 33 analyzes the scattering solid angle of the scattered light based on the light intensity pattern of the scattered light. The analysis unit 33 also analyzes the diffraction pattern of the diffracted light based on the light intensity pattern of the diffracted light. The analysis unit 33 outputs the analyzed scattering solid angle of the scattered light and the diffraction pattern of the diffracted light to the calculation unit 34. The scattering solid angle of the scattered light is the radiation angle or inclination angle of the scattered light with respect to the optical axis of the main lens 15 as the center.

[0029] The calculation unit 34 acquires the scattering solid angle of the scattered light and the diffraction pattern of the diffracted light from the analysis unit 33. The calculation unit 34 calculates the weight and radius of the particle that becomes the scatterer using the scattering solid angle of the scattered light and a known theory. The calculation unit 34 also calculates the radius of the particle that becomes the scatterer using the diffraction pattern of the diffracted light. The calculation unit 34 outputs the calculated weight and radius of the particle that becomes the scatterer to the output unit 35.

[0030] The output unit 35 acquires the weight and radius of the particle that will become a scatterer from the calculation unit 34. The output unit 35 outputs the acquired weight and radius of the particle that will become a scatterer to the display unit 41.

[0031] The display unit 41 acquires the weight and radius of the particles that will become scatterers from the output unit 35. The display unit 41 displays the acquired weight and radius of the particles that will become scatterers on the display screen.

[0032] Next, the particle analysis method according to the first embodiment will be described with reference to Fig. 3. Fig. 3 is a flowchart showing the particle analysis method according to the first embodiment.

[0033] In step ST11, the acquisition unit 31 acquires a multi-view image obtained by combining images captured simultaneously by the multiple cameras 17.

[0034] In step ST12, the detection unit 32 detects the light intensity pattern of the scattered light scattered from the particles serving as scatterers, and the diffraction pattern of the diffracted light diffracted by the particles serving as scatterers.

[0035] In step ST13, the analysis unit 33 analyzes the scattering solid angle of the scattered light centered on the optical axis of the main lens 15, based on the light intensity pattern of the scattered light.

[0036] In step ST14, the calculation unit 34 calculates the molecular weight and particle size of the particle that becomes the scatterer based on the solid scattering angle of the scattered light. The calculation unit 34 also calculates the particle size of the particle that becomes the scatterer based on the diffraction pattern of the diffracted light.

[0037] In step ST15, the output unit 35 outputs to the display unit 41 the molecular weight and particle size of the particles that become scatterers.

[0038] Next, the analysis of scattered light will be described in detail with reference to Fig. 4 and Fig. 5. Fig. 4 is a diagram showing a multi-viewpoint captured image. Fig. 5 is a diagram showing the correspondence between the scattering solid angle of scattered light and the minimum including circle.

[0039] FIG. 4A is a multi-view image when light from the main lens 15 is focused on each lens 16a of the lens array 16. The bright spots of each lens 16a are in focus and clearly visible. FIG. 4B is a multi-view image when light from the main lens 15 is focused on the front and rear of the lens array 16. The bright spots of the lenses 16a are not in focus and appear blurry. FIG. 4A is an enlargement of nine lenses 16a from the multi-view image. FIG. 4B is an enlargement of one lens 16a from the multi-view image.

[0040] 4A and 4B, the white regions are signal regions where light is incident, and the black regions are noise regions where no light is incident. Therefore, the detector 32 can distinguish between the signal regions, which are white regions, and the noise regions, which are black regions, in the multi-viewpoint image.

[0041] In imaging using the lens array 16, light scattered from the same scattering object may be incident on multiple lenses 16a. The light incident on each lens 16a is the result of observing the scattering object from different viewpoints, and the scattered light obtained from different scattering solid angles must be analytically identified as bright spots obtained from the same scattering object.

[0042] Depending on the arrangement of the particles, the scattered light imaged on the lens array 16 and the light imaged in front of and behind the lens array 16 may be projected and observed on the same lens array 16. In this case, the detection unit 32 needs to separate the light intensity pattern of the light incident from each scatterer from the integrated light of these lights.

[0043] For example, when detecting the light intensity pattern of the scattered light using the multi-view image shown in Fig. 4A, the detection unit 32 subtracts the difference between the average luminance obtained by averaging the luminance at the bright spot portion of each lens 16a and the luminance of the bright spot portion from the pixel corresponding to the bright spot portion. When determining the light intensity pattern of the scattered light using the multi-view image shown in Fig. 4B, the detection unit 32 subtracts the average luminance from the light intensity pattern of the bright spot portion of each lens 16a.

[0044] Furthermore, the detection unit 32 identifies particles that become scattering bodies based on, for example, the pitch between lenses in the lens array 16 and the distance from the sample 20 to the objective lens 15a.

[0045] Here, after identifying the particle, if there is a particle that emits scattered light from a specific focal plane located on the optical axis of the objective lens 15a, the scattered light is projected onto the lens array 16 at a specific interval, as shown in FIG. 4A. This situation is equivalent to extracting cone-shaped scattered light as shown in FIG. 5. The scattered light is also equivalent to the light acquired by the objective lens 15a. θ shown in FIG. 5 is the scattering solid angle of the scattered light.

[0046] In order to calculate the XY coordinates of the target scatterer from a lens array image containing multiple bright spots, the analysis unit 33 needs to calculate the center of the smallest encompassing circle contained in the light detected from multiple identical scatterers projected onto the lens array 16, as shown in Figure 5.

[0047] When the distance between scatterers is short inside the sample 20, bright spots of scattered light occur in some of the lenses 16a in the lens array 16. In this case, the bright spot corresponding to a given scatterer is included in the minimum inclusive circle defined for that scatterer. Therefore, by identifying the particle that is the scatterer, it is possible to draw the minimum inclusive circle for that particle.

[0048] Then, the analysis unit 33 analyzes the dependence of the scattered light on the solid scattering angle based on the centroid coordinates of the bright spot portions obtained from the same particle contained in the minimum inclusive circle, with the center of the minimum inclusive circle as the origin, and the diameter of the main lens 15, etc.

[0049] Next, the calculation unit 34 calculates the molecular weight and particle size of the particle serving as the scatterer by using the scattering solid angle dependence of the scattered light analyzed by the analysis unit 33 and a theoretical formula related to the angle dependence obtained from the Mie scattering theory, which is a known theory. Note that information on the bright spot portion corresponding to each scattering solid angle can be converted into the molecular weight of the particle by using the Mie scattering theory.

[0050] Next, a description will be given of the fact that the scattering solid angle dependency of scattered light at a specific pixel after generation of a refocused image can be analyzed from the ray overlap matrix used to generate the refocused image.

[0051] The ray overlap matrix can be created using the following equation (1).

[0052] Δ=MLP(1-fmla / (d*M2-a)) ··· (1) Δ: Distance between identical rays in the X and Y directions in a multi-view image MLP: Lens pitch 16a d: Z-axis position to be drawn (distance from the object-side focal plane of the main lens 15 to the particle) fmla: focal length of the lens array image side at the main lens 15 a: Distance from the focal plane of the main lens 15 on the lens array image side to the center of the lens array 16 in the thickness direction

[0053] The ray overlap matrix can be converted using the following equation (2).

[0054] Δ EI =Δ-(MLP-EI one ) ··· (2) E.I. one : The length of one side of the elemental image array cut out in a square shape from one main lens 15

[0055] The row direction of the ray overlap matrix corresponds to the row number and column number in the overlapping elemental image array. Therefore, by applying the ray overlap matrix to the rows and columns of the elemental image array, respectively, it is possible to finally extract index information of the pixels to be overlapped from the elemental image array. This index information corresponds to EIA(i,j), which is the pixel value existing in row i and column j of the elemental image array. Therefore, when the pixel value R(u,v) existing in row u and column v after the generation of the refocused image is expressed using the ray overlap matrix C, it is expressed by the following formula (3). Note that C is a matrix having the number of rows composed of positive integers from 1 to k and the maximum number of rows = maximum number of columns of the refocused image.

[0056] TIFF0007599629000001.tif14166

[0057] Here, C(1:k|C≠0, u), which is the first term in equation (3), indicates the columns u in the ray overlap matrix C that do not include 0 in the row direction.

[0058] The scattering solid angle dependency SA[ua,va] indicates what kind of angle dependency the corresponding pixel value (u,v) has after the generation of the refocused image. Therefore, since a matrix is ​​stored in the pixel corresponding to the scattering solid angle dependency SA[ua,va], the scattering solid angle dependency SA[ua,va] has a matrix form different from a normal matrix. For example, a matrix such as SA[ua,va]=(1,2;3,4) is stored corresponding to a specific ua,va. Taking these into consideration, the scattering solid angle dependency SA can be expressed by the following formula (4).

[0059] TIFF0007599629000002.tif8166

[0060] Furthermore, as described above, when calculating the scattering solid angle dependency of the light intensity pattern of the scattered light from the pixel values ​​obtained at each scattering solid angle, the analysis unit 33 gradually changes and measures the light intensity of the light source 11, which has a power of 1 mW or less, and calculates the scattering solid angle of the scattered light based on the calibration data at that time.

[0061] Next, the analysis of diffracted light will be described with reference to Fig. 6. Fig. 6 is a diagram showing a multi-view image including a diffraction pattern of diffracted light.

[0062] When the particle size of the scattering body is smaller than the resolution of the multi-view image, it is difficult for the detection unit 32 to detect the particle size of the scattering body based on the scattered light of the multi-view image. In this case, the detection unit 32 detects the particle size of the scattering body by using the diffracted light of the multi-view image.

[0063] The diffraction pattern of the diffracted light is formed according to the angle of incidence of the diffracted light with respect to the lens array 16. The detector 32 detects the diffraction pattern of the diffracted light using a refocused image generated from a multi-viewpoint image. The diffraction pattern on the object-side focal plane of the main lens 15 is directly projected onto the lens array 16. In addition, the diffraction pattern on a non-focal plane other than the object-side focal plane can be obtained by reconstructing the focal plane on the target particle side.

[0064] 6, the diffraction pattern of the diffracted light diffracted by the scatterers is projected onto one lens 16a of the lens array 16 based on the optical positional relationship between the focal plane of the main lens 15 and the lens array 16. The calculation unit 34 calculates the particle size of the scatterers from the diffraction pattern obtained from such a single particle by utilizing the Fraunhofer diffraction approximation.

[0065] The calculation unit 34 calculates the particle size of the particle that becomes the scatterer by using the following formula (5), where q is the radius of the first dark circular image of the diffraction, R is the distance to the lens 16a that becomes the observation image, λ is the wavelength of the diffracted light, and D is the particle size. q=1.22(R*λ / D) (5)

[0066] In a normal observation system, since the focal depth is shallow, R is the focal length of the objective lens 15a. In contrast, the calculation unit 34 extracts refocused images of different focal planes from one multi-viewpoint image, and measures q for each R with D as a fitting parameter, so that the particle size of the scattering particles can be calculated with high accuracy.

[0067] It should be noted that the particle analysis device 30 according to the first embodiment is not intended to analyze reflected light from particles that become scattering bodies or transmitted light that passes through particles that become scattering bodies. The particle analysis device 30 can perform analysis as long as the reflected light or transmitted light is not incident on the main lens 15 and the lens array 16. For this reason, the particle analysis device 30 has a configuration that is significantly different from devices for analyzing the reflected light or transmitted light.

[0068] Next, an example of a hardware configuration of the particle analysis device 30 according to the first embodiment will be described with reference to Fig. 7. Fig. 7A and Fig. 7B are diagrams showing an example of a hardware configuration of the particle analysis device 30 according to the first embodiment.

[0069] 7A, particle analysis device 30 is configured with a computer, and the computer has a processor 51 and a memory 52. ​​Memory 52 stores programs for causing the computer to function as acquisition unit 31, detection unit 32, analysis unit 33, calculation unit 34, and output unit 35. The functions of acquisition unit 31, detection unit 32, analysis unit 33, calculation unit 34, and output unit 35 are realized by processor 51 reading and executing the programs stored in memory 52.

[0070] 7B , the particle analysis device 30 may include a processing circuit 53. In this case, the processing circuit 53 may be realized by the acquisition unit 31, the detection unit 32, the analysis unit 33, the calculation unit 34, and the output unit 35.

[0071] Alternatively, the particle analysis device 30 may have a processor 51, a memory 52, and a processing circuit 53 (not shown). In this case, some of the functions of the acquisition unit 31, the detection unit 32, the analysis unit 33, the calculation unit 34, and the output unit 35 may be realized by the processor 51 and the memory 52, and the remaining functions may be realized by the processing circuit 53.

[0072] The processor 51 is, for example, one that uses at least one of a central processing unit (CPU), a graphics processing unit (GPU), a microprocessor, a microcontroller, or a digital signal processor (DSP).

[0073] The memory 52 uses, for example, at least one of a semiconductor memory or a magnetic disk. More specifically, the memory 52 uses at least one of a random access memory (RAM), a read only memory (ROM), a flash memory, an erasable programmable read only memory (EPROM), an electrically erasable programmable read-only memory (EEPROM), a solid state drive (SSD), or a hard disk drive (HDD).

[0074] The processing circuit 53 uses, for example, at least one of an ASIC (Application Specific Integrated Circuit), a PLD (Programmable Logic Device), an FPGA (Field-Programmable Gate Array), a SoC (System-on-a-Chip), or a system LSI (Large-Scale Integration).

[0075] As described above, in the particle analysis device 30 according to the first embodiment, the molecular weight and particle size of the particle that becomes the scatterer are calculated based on the light intensity pattern of the scattered light, and the particle size of the particle that becomes the scatterer are calculated based on the diffraction pattern of the diffracted light. In contrast, the particle analysis device 30 may be one that calculates the molecular weight and particle size of the particle that becomes the scatterer based on the light intensity pattern of the scattered light, or one that calculates the particle size of the particle that becomes the scatterer based on the diffraction pattern of the diffracted light.

[0076] In the case where the particle analysis device 30 calculates the molecular weight and particle size of a particle that becomes a scatterer based on the light intensity pattern of the scattered light, the particle analysis device 30 may include an acquisition unit 31, a detection unit 32, an analysis unit 33, a calculation unit 34, and an output unit 35. In the case where the particle analysis device 30 calculates the particle size of a particle that becomes a scatterer based on the diffraction pattern of the diffracted light, the particle analysis device 30 may include an acquisition unit 31, a detection unit 32, a calculation unit 34, and an output unit 35.

[0077] As described above, the particle analysis device 30 according to the first embodiment includes an acquisition unit 31 that acquires a multi-view image obtained by synthesizing captured images of the lens array 16, on which light from particles irradiated with light is imaged via the main lens 15, captured simultaneously by the multiple cameras 17 from different viewpoints, a detection unit 32 that detects a light intensity pattern of scattered light scattered from the particles based on the multi-view image acquired by the acquisition unit 31, an analysis unit 33 that analyzes a scattering solid angle of the scattered light centered on the optical axis of the main lens 15 based on the light intensity pattern of the scattered light detected by the detection unit 32, and a calculation unit 34 that calculates the molecular weight and particle size of the particle based on the scattering solid angle of the scattered light analyzed by the analysis unit 33. Therefore, the particle analysis device 30 can three-dimensionally analyze particles that become scatterers by capturing an image once.

[0078] Moreover, the particle analysis device 30 according to the first embodiment includes an acquisition unit 31 that acquires a multi-view image obtained by synthesizing captured images of the lens array 16, on which light from particles irradiated with light is focused via the main lens 15, simultaneously captured by a plurality of cameras 17 from different viewpoints, a detection unit 32 that detects a diffraction pattern of diffracted light diffracted by the particles based on the multi-view image acquired by the acquisition unit 31, and a calculation unit 34 that calculates the particle size of the particles based on the diffraction pattern of the diffracted light detected by the detection unit 32. Thus, the particle analysis device 30 can three-dimensionally analyze particles that become scatterers by capturing an image once.

[0079] In addition, in the present disclosure, any of the components of the embodiments may be modified or omitted within the scope of the disclosure. [Industrial Applicability]

[0080] The particle analysis device according to the present disclosure can calculate the molecular weight and particle size of particles that serve as scatterers based on the light intensity pattern of scattered light and the diffraction pattern of diffracted light from a multi-viewpoint image, and can therefore analyze particles that serve as scatterers in three dimensions with a single image capture, making it suitable for use in particle analysis devices, etc. [Explanation of symbols]

[0081] 10 particle analysis system, 11 light source, 12 collimator lens, 13 shielding plate, 14 condenser lens, 15 main lens, 15a objective lens, 15b imaging lens, 15c microlens, 16 lens array, 16a lens, 17 camera, 20 sample, 30 particle analysis device, 31 acquisition unit, 32 detection unit, 33 analysis unit, 34 calculation unit, 35 output unit, 41 display unit, 51 processor, 52 memory, 53 processing circuit.

Claims

1. An acquisition unit that acquires a multi-viewpoint image by synthesizing captured images of a lens array in which light from particles irradiated with light is formed through a main lens, the captured images being simultaneously captured by a plurality of cameras from different viewpoints; a detection unit that detects a light intensity pattern of light scattered from the particle based on the multi-viewpoint image acquired by the acquisition unit; an analysis unit that analyzes a scattering solid angle of the scattered light centered on the optical axis of the main lens based on the light intensity pattern of the scattered light detected by the detection unit; a calculation unit that calculates the molecular weight and particle size of the particles based on the solid scattering angle of the scattered light analyzed by the analysis unit. A particle analysis device characterized by:

2. An acquisition unit that acquires a multi-viewpoint image by synthesizing captured images of a lens array in which light from particles irradiated with light is formed through a main lens, the captured images being simultaneously captured by a plurality of cameras from different viewpoints; A detection unit that detects a diffraction pattern of diffracted light diffracted by the particle based on the multi-viewpoint image acquired by the acquisition unit; a calculation unit that calculates the particle size of the particle based on the diffraction pattern of the diffracted light detected by the detection unit. A particle analysis device characterized by:

3. a light source that irradiates light onto a sample containing the particles; a main lens that forms an image of light from the sample on the lens array; A plurality of cameras that capture images of the lens array from different viewpoints; a particle analysis device according to claim 1 or 2, which is connected to the plurality of cameras; The sample is disposed on the optical axis of the main lens and between the light source and the main lens. A particle analysis system comprising:

4. a dark field condenser lens that irradiates the light output from the light source onto the sample; the light source and the dark field condenser lens are disposed on the optical axis of the main lens; The sample is disposed between the main lens and the darkfield condenser lens.

4. The particle analysis system according to claim 3.

5. The lens array includes: It is composed of multiple lenses arranged at a fixed pitch or multiple lenses arranged at a random pitch.

4. The particle analysis system according to claim 3.

6. The light source is capable of adjusting the wavelength and intensity of the light it outputs.

4. The particle analysis system according to claim 3.

7. A step in which an acquisition unit acquires a multi-viewpoint image obtained by synthesizing captured images of a lens array in which light from particles irradiated with light is formed through a main lens, the captured images being simultaneously captured by a plurality of cameras from different viewpoints; A detection unit detects a light intensity pattern of scattered light from the particle based on the multi-view image acquired by the acquisition unit; An analysis unit analyzes a scattering solid angle of the scattered light centered on the optical axis of the main lens based on a light intensity pattern of the scattered light detected by the detection unit; and a step of calculating a molecular weight and a particle size of the particle based on the solid scattering angle of the scattered light analyzed by the analysis unit. A particle analysis method comprising:

8. A step in which an acquisition unit acquires a multi-viewpoint image obtained by synthesizing captured images of a lens array in which light from particles irradiated with light is formed through a main lens, the captured images being simultaneously captured by a plurality of cameras from different viewpoints; A step in which a detection unit detects a diffraction pattern of diffracted light diffracted by the particle based on the multi-view image acquired by the acquisition unit; and a step of calculating a particle size of the particle based on a diffraction pattern of the diffracted light detected by the detection unit. A particle analysis method comprising:

Images