Table drive device, machine tool, and workpiece machining method

Abstract

The table drive device includes a table device having a table that supports a workpiece, a support base that supports the table device, a first motor having a first portion in contact with the support base and a second portion that is positioned farther from the support base than the first portion and that moves the table device relative to the support base, and a cooling device that cools the first motor. The cooling device has a fan that imparts momentum to air, a supply duct that supplies air to the first portion of the first motor, and an exhaust duct that exhausts the air from around the second portion of the first motor.

Description

Technical Field

[0001] The present invention relates to a table drive device, a machine tool, and a workpiece processing method.

Background Art

[0002] Techniques for cooling heat-generating bodies such as motors are known.

[0003] As a related technique, Patent Document 1 discloses a cooling circuit for a heat-generating body in an indexing device for a machine tool. The cooling circuit described in Patent Document 1 has a cooling flow path provided around the heat-generating body. More specifically, in Patent Document 1, a cooling jacket is arranged so as to contact the stator of a motor.

Prior Art Documents

Patent Documents

[0004]

Patent Document 1

Summary of the Invention

Problems to be Solved by the Invention

[0005] An object of the present invention is to provide a table drive device, a machine tool, and a workpiece processing method capable of suppressing heat generated from a motor from being transmitted to a support base that supports the table device.

Means for Solving the Problems

[0006] In some embodiments, the table drive device comprises a table device having a table for supporting a workpiece; a support base for supporting the table device; a first motor having a first portion in contact with the support base and a second portion positioned further from the support base than the first portion, for relative movement of the table device with respect to the support base; and a cooling device for cooling the first motor. The cooling device includes a fan for imparting momentum to air, a supply duct for supplying the air to the first portion of the first motor, and an exhaust duct for exhausting the air from around the second portion of the first motor.

[0007] In some embodiments, the machine tool comprises a machining head that supports a tool for machining a workpiece, a moving device for moving the machining head, and a table drive device. The table drive device comprises a table device having a table for supporting the workpiece, a support base for supporting the table device, a first motor having a first portion in contact with the support base and a second portion positioned further from the support base than the first portion, for moving the table device relative to the support base, and a cooling device for cooling the first motor. The cooling device comprises a fan for imparting momentum to air, a supply duct for supplying the air to the first portion of the first motor, and an exhaust duct for exhausting the air from around the second portion of the first motor.

[0008] A workpiece processing method in some embodiments comprises the steps of: cooling a first motor in contact with a support base; fixing a workpiece to the table of a table device; moving the table device relative to the support base that supports the table device using the driving force of the first motor; and processing the workpiece using a tool. The step of cooling the first motor includes: imparting momentum to air using a fan; supplying the air to a first part of the first motor from a supply duct; cooling the first motor using the air by flowing the air from the first part of the first motor toward a second part of the first motor in a direction away from the support base; and discharging the air from around the second part of the first motor through an exhaust duct. [Effects of the Invention]

[0009] The present invention provides a table drive device, a machine tool, and a workpiece processing method that can suppress the transfer of heat generated from the motor to the support base of the table device. [Brief explanation of the drawing]

[0010] [Figure 1] Figure 1 is a schematic cross-sectional view illustrating a machine tool in the first embodiment. [Figure 2] Figure 2 is a schematic cross-sectional view illustrating an example of the arrangement of the supply duct, exhaust duct, and cover. [Figure 3] Figure 3 is a schematic diagram illustrating an example of a mechanism for transmitting power from the first motor to the support block. [Figure 4] Figure 4 is a schematic diagram illustrating an example of a mechanism for transmitting power from the second motor to a rotating body. [Figure 5] Figure 5 is a schematic cross-sectional view illustrating an example of the arrangement of supply and exhaust ducts. [Figure 6] Figure 6 is a diagram illustrating an example of a second cooling system. [Figure 7]FIG. 7 is a schematic cross-sectional view schematically showing a modified example of the arrangement of the ducts. [Figure 8] FIG. 8 is a schematic plan view schematically showing a modified example of the arrangement of the first motor. [Figure 9] FIG. 9 is a schematic perspective view for explaining an example of a moving device for moving the processing head. [Figure 10] FIG. 10 is a view schematically showing a machine tool in the second embodiment. [Figure 11] FIG. 11 is a view schematically showing a machine tool in a modified example of the second embodiment. [Figure 12] FIG. 12 is a view schematically showing an example of a mechanism for transmitting power from the first motor to the rotating body. [Figure 13] FIG. 13 is a view schematically showing a part of a machine tool in the third embodiment. [Figure 14] FIG. 14 is a schematic cross-sectional view schematically showing a part of a machine tool in the third embodiment. [Figure 15] FIG. 24 is a schematic perspective view for explaining an example of a moving device for moving the processing head. [Figure 16] FIG. 16 is a view schematically showing an example of the arrangement of the supply duct, the exhaust duct, and the cover. [Figure 17] FIG. 17 is a view schematically showing an example of the connection relationship between the control device and the controlled device. [Figure 18] FIG. 18 is a view schematically showing a state in which the control device can control the fan motor based on a signal from the temperature sensor. [Figure 19] FIG. 19 is a flowchart showing an example of a workpiece processing method in the embodiment.

Embodiments for Carrying Out the Invention

[0011] Hereinafter, referring to the drawings, the table drive device 1, the machine tool 100, and the workpiece processing method in the embodiment will be described. In the following description of the embodiment, parts and members having the same function are denoted by the same reference numerals, and repeated descriptions of the parts and members denoted by the same reference numerals are omitted.

[0012] (First Embodiment) Referring to FIGS. 1 to 9, the table drive device 1A and the machine tool 100A in the first embodiment will be described. FIG. 1 is a schematic cross-sectional view schematically showing the machine tool 100A in the first embodiment. FIG. 2 is a schematic cross-sectional view schematically showing an example of the arrangement of the supply duct 51, the exhaust duct 54, and the cover 6. In FIG. 2, the area where the first motor 4 is arranged is provided with dot hatching, and the description of the internal structure of the first motor 4 is omitted. FIG. 3 is a diagram schematically showing an example of a mechanism for transmitting power from the first motor 4 to the support block 22. FIG. 4 is a diagram schematically showing an example of a mechanism for transmitting power from the second motor 14 to the rotating body 24. FIG. 5 is a schematic cross-sectional view schematically showing an example of the arrangement of the supply duct 51 and the exhaust duct 54. In FIG. 5, the area where the first motor 4 is arranged is provided with dot hatching, and the description of the internal structure of the first motor 4 is omitted. FIG. 6 is a diagram for explaining an example of the second cooling device 15. FIG. 7 is a schematic cross-sectional view schematically showing a modified example of the arrangement of the duct 50. In FIG. 7, the area where the first motor 4 is arranged is provided with dot hatching, and the description of the internal structure of the first motor 4 is omitted. FIG. 8 is a schematic plan view schematically showing a modified example of the arrangement of the first motor 4. FIG. 9 is a schematic perspective view for explaining an example of the moving device 103 for moving the machining head HD. In FIG. 9, the description of the duct 50, the cover 6, the partition wall 11, the outer wall 108, etc. is omitted.

[0013] As illustrated in FIG. 1, the table drive device 1A in the first embodiment includes a table device 2, a support base 3, a first motor 4, and a cooling device 5.

[0014] The table device 2 has a table 21 that supports the workpiece W, which is the object to be processed. The support base 3 supports the table device 2.

[0015] The first motor 4 has a first portion 41 that is in contact with the support base 3, and a second portion 42 that is positioned further from the support base 3 than the first portion 41. In the example shown in Figure 2, the first portion 41 of the first motor 4 is supported by the support base 3. In the example shown in Figure 2, the first portion 41 includes a first end 41a of the first motor 4, and the second portion 42 includes a second end 42a of the first motor 4. The first end 41a is the end closer to the support base 3 than the second end 42a, and the second end 42a is the end further from the support base 3 than the first end 41a.

[0016] In the example shown in Figure 1, the first motor 4 moves the table device 2 relative to the support base 3. In the example shown in Figure 1, the first motor 4 tilts the table device 2 around the first axis AX1. When the table device 2 is moved relative to the support base 3, current is supplied to the first motor 4. The first motor 4 converts electrical energy into kinetic energy, and uses this kinetic energy to move the table device 2 relative to the support base 3. Note that the first motor 4 generates heat when current flows through it.

[0017] The cooling device 5 cools the first motor 4. The cooling device 5 includes a fan 58 that imparts momentum to the air and a duct 50 through which the air flows. In the example shown in Figure 2, the table drive device 1A has a fan motor 59 that drives the fan 58. When the fan 58 is rotated by the fan motor 59, momentum is imparted to the air by the fan 58. The air, now given momentum, flows through the duct 50.

[0018] The duct 50 includes a supply duct 51 and an exhaust duct 54. The supply duct 51 supplies air to the first part 41 of the first motor 4 (in other words, the first part 41 of the first motor 4 on the side of the support base 3). The exhaust duct 54 exhausts air from around the second part 42 of the first motor 4 (in other words, around the second part 42 of the first motor 4 on the side opposite to the support base 3).

[0019] As illustrated in Figure 1, the machine tool 100A in the first embodiment includes, in addition to the table drive device 1A described above, a machining head HD that supports a tool T for machining a workpiece W, and a moving device 103 for moving the machining head. The machining head HD may be configured to support the tool T so that it is in a position substantially parallel to the vertical direction, or so that it is in a position substantially parallel to the horizontal direction, or so that the position of the tool T can be changed. In plan view, the machine tool 100A may have an outer wall 108 surrounding the table drive device 1A and the machining head HD. In plan view, the outer wall 108 may be arranged to surround the table drive device 1A, the machining head HD, and the moving device 103. The outer wall 108 may also have an opening B1 (see Figure 8 if necessary) into which a workpiece W can be inserted from the outside of the outer wall 108 to the inside of the outer wall 108. Furthermore, the machine tool 100A may have a door 109 that can open and close the opening B1 (see Figure 8 if necessary).

[0020] In the table drive unit 1A and machine tool 100A of the first embodiment, the first part 41 of the first motor 4 is effectively cooled by supplying air to the first part 41 of the first motor 4 via the supply duct 51. Therefore, the transfer of heat generated from the first motor 4 from the first part 41 to the support base 3 is prevented or suppressed. In addition, in the table drive unit 1A and machine tool 100A of the first embodiment, air is supplied to the first part 41 and exhausted from around the second part 42. In this way, an airflow is formed from the first part 41 of the first motor 4 toward the second part 42 of the first motor 4. Therefore, the air used to cool the first part 41, which is closer to the support base 3, is also used to cool the central part of the first motor 4 or the second part 42 of the first motor 4. Furthermore, the direction from the first part 41 of the first motor 4 toward the second part 42 of the first motor 4 is away from the support base 3. Therefore, the air whose temperature has risen due to contact with the first motor 4 is prevented or suppressed from moving toward the support base 3.

[0021] In the table drive unit 1A and machine tool 100A of the first embodiment, the transfer of heat from the first motor 4 to the support base 3 via the first part 41 or air is suppressed, thereby suppressing thermal deformation of the support base 3 and the table device 2. Therefore, the decrease in the positional accuracy of the workpiece W supported by the table device 2 as the operating time of the first motor 4 increases is suppressed. Furthermore, since the decrease in the positional accuracy of the workpiece W is suppressed, the decrease in the machining accuracy of the workpiece W is also suppressed. In particular, the first part 41 of the first motor 4 that is close to the support base 3 is preferentially cooled by air, and the air used to cool the first part 41 moves away from the support base 3, thereby efficiently suppressing thermal deformation of the support base 3 and the table device 2.

[0022] In the first embodiment, the table drive unit 1A and machine tool 100A use a cooling device 5 with a duct 50 and a fan 58, which reduces the complexity of the support base 3 structure compared to the case where a coolant is circulated inside the support base 3. Also, since cooling is performed by air, the power consumption of the cooling device 5 is low (in other words, an energy-saving cooling method is realized). Furthermore, since cooling is performed by air, the environmental impact is small.

[0023] (Optional additional configuration) Next, with reference to Figures 1 to 9, optional additional configurations that can be adopted in the table drive unit 1A and machine tool 100A in the first embodiment will be described.

[0024] (Tilting of Table Device 2) In the example shown in Figure 1, the support base 3 supports the table device 2 so that it can tilt around the first axis AX1. More specifically, the table device 2 includes a support block 22 that directly or indirectly supports the table 21, and the support base 3 supports the support block 22 so that it can tilt around the first axis AX1. The support block 22 is composed of an assembly of several parts. The support block 22 may be composed of an assembly including a first block 22a (e.g., a cylindrical first block) tiltably supported by a first support base 3a, a second block 22b (e.g., a cylindrical second block) tiltably supported by a second support base 3b, and a third block 22c that rotatably supports a rotating body to which the table 21 is fixed.

[0025] In the example shown in Figure 1, the first motor 4 is a motor that tilts the support block 22 around the first axis AX1. The first axis AX1 is, for example, an axis parallel to the horizontal plane.

[0026] In the example shown in Figure 1, the first motor 4 is not built into the support base 3. In other words, the first motor 4 is located outside the support base 3. In this case, the structure of the support base 3 is simpler compared to the case where the first motor 4 is a direct drive motor built into the support base 3. Also, when the first motor 4 is located outside the support base 3, the heat generated from the first motor 4 does not accumulate inside the support base 3. Therefore, even if the first motor 4 is not cooled using a cooling device, the thermal deformation of the support base 3 due to the heat generated by the first motor 4 is relatively small. If the first part 41 of the first motor 4 is preferentially cooled using the cooling device 5 described above, the thermal deformation of the support base 3 due to the heat generated by the first motor 4 becomes even smaller.

[0027] In the example shown in Figure 1, the support block 22 has a first end 2a that is tiltably supported by a support base 3 (more specifically, a first support base 3a) and a second end 2b that is tiltably supported by a support base 3 (more specifically, a second support base 3b). In the example shown in Figure 3, the output shaft 44 of the first motor 4 is connected to the support block 22 (more specifically, the first end 2a of the support block 22) in a power-transmitting manner. In the example shown in Figure 3, when the output shaft 44 of the first motor 4 rotates, the support block 22 tilts around the first shaft AX1.

[0028] Additionally, as illustrated in Figure 4, the table device 2 may include a rotating body 24 to which the table 21 (see Figure 1 if necessary) is fixed, and a second motor 14. The second motor 14 rotates the rotating body 24 around the second axis AX2.

[0029] In the example shown in Figure 4, the rotating body 24 is supported by a support block 22 so as to be rotatable around the second axis AX2. The output shaft 144 of the second motor 14 is connected to the rotating body 24 so as to be able to transmit power. In the example shown in Figure 4, when the output shaft 144 of the second motor 14 rotates, the rotating body 24 rotates around the second axis AX2. In this way, the table 21 fixed to the rotating body 24 rotates around the second axis AX2. In the example shown in Figure 4, the second axis AX2 is an axis perpendicular to the direction parallel to the first axis AX1. In the example shown in Figure 4, the second motor 14 is a motor that rotates the rotating body 24 via a mechanical power transmission mechanism M2. Alternatively, the second motor 14 may be a direct-drive motor that directly drives the rotating body 24. More specifically, the second motor 14 may include a rotor fixed to the rotating body 24 and a stator fixed to the support block 22.

[0030] (Cover 6) In the example shown in Figure 2, the table drive unit 1A includes a cover 6 surrounding the first motor 4. The cover 6 has a first port 69a, a second port 69b, and a wall 60.

[0031] The first port 69a functions as an inlet for introducing air from the supply duct 51 into the internal region SP1 of the cover 6. The second port 69b functions as an outlet for discharging air from the internal region SP1 of the cover 6 into the exhaust duct 54.

[0032] In the example shown in Figure 2, cover 6 defines the airflow path from the first port 69a to the second port 69b. Hereinafter, the airflow path defined by cover 6 (more specifically, the airflow path from the first port 69a to the second port 69b) will be defined as the first airflow path FP1.

[0033] If the table drive unit 1A has a cover 6 surrounding the first motor 4, the cooling efficiency of the first motor 4 by air is improved. In addition, the heat generated from the first motor 4 is less likely to dissipate from the area around the first motor 4 through paths other than the exhaust duct 54. Therefore, thermal deformation of components arranged around the first motor 4 is more effectively suppressed. In the example shown in Figure 2, the cover 6 defines an air passage (more specifically, a first air passage FP1 from the first port 69a to the second port 69b) of the first motor 4. In this case, the first part 41 of the first motor 4 is preferentially cooled, while the entire first motor 4 is also efficiently cooled.

[0034] In the example shown in Figure 2, the first motor 4 is positioned in the internal region SP1 of the cover 6, so the cross-sectional area of ​​the first flow path FP1 is reduced by the amount occupied by the first motor 4. Also, because the cross-sectional area of ​​the first flow path FP1 is reduced, the velocity of the air flowing through the first flow path FP1 increases. Therefore, the first motor 4 is cooled more efficiently by the relatively faster air. The cover 6 is also cooled efficiently by the relatively faster air. As a result, the transfer of heat from the cover 6 to the components positioned outside the cover 6 is suppressed. In this way, thermal deformation of the components positioned outside the cover 6 is suppressed even more effectively.

[0035] In the example shown in Figure 2, the cover 6 has multiple walls 60, including a first wall 62a and a second wall 62b. The multiple walls 60 also constitute a housing for the first motor 4. In the example shown in Figure 2, a first port 69a is formed in the second wall 62b. A second port 69b is also formed in the same second wall 62b. In the example shown in Figure 2, the second port 69b is positioned above the first port 69a. Therefore, the cover 6 as a whole forms an airflow with an upward momentum component.

[0036] The multiple walls 60 may include side walls 62 positioned opposite the side of the first motor 4 and a top wall 63 covering the top 4t of the first motor 4.

[0037] In the example shown in Figure 2, the lower end of the cover 6 is attached to the top 3t of the support base 3. The cover 6 may also surround the first motor 4 and a portion 31t of the support base 3 (more specifically, a portion 31t of the top 3t of the support base 3).

[0038] In the example shown in Figure 2, the cover 6 is made of a plate (more specifically, a metal plate).

[0039] Alternatively, the cover 6 may be omitted, as illustrated in Figure 5.

[0040] (Partition wall 11) In the example shown in Figure 1, the table drive unit 1A includes a partition wall 11. The partition wall 11 separates the machining area where the workpiece W is machined (in other words, the first area RG1 where the table 21 supporting the workpiece W is located) from the second area RG2 where the first motor 4 and cover 6 are located.

[0041] When the table drive unit 1A is equipped with a partition wall 11, chips generated by machining the workpiece W, or coolant supplied to the workpiece W during machining, are prevented from scattering from the machining area, the first area RG1, to the second area RG2. However, coolant mist can enter the second area RG2 through the gap between the partition wall 11 and other components. When the first motor 4 is surrounded by a cover 6 and air is supplied to the internal space of the cover 6 from a supply duct 51, the entry of the mist into the internal space of the cover 6 is effectively suppressed.

[0042] The cover 6 may include a first wall 62a positioned between the first motor 4 and the partition wall 11. When the first wall 62a is positioned between the first motor 4 and the partition wall 11, the transfer of heat generated from the first motor 4 to the partition wall 11 is suppressed by the first wall 62a. In the example shown in Figure 1, the first wall 62a is positioned opposite the partition wall 11 via a space SP2. Since the space SP2 functions as an air layer between the first wall 62a and the partition wall 11, the transfer of heat generated from the first motor 4 to the partition wall 11 is suppressed even more effectively.

[0043] (Power transmission member 13) In the example shown in Figure 3, the first motor 4 transmits power to the support block 22 (more specifically, the first block 22a) of the table device 2 via a mechanical power transmission mechanism M1.

[0044] In the example shown in Figure 3, the table drive device 1A has a power transmission member 13 that transmits the driving force of the first motor 4 to the support block 22 of the table device 2. In the example shown in Figure 3, the power transmission member 13 includes (1) a first shaft 131 connected to the output shaft 44 of the first motor 4, and (2) a conversion member 133 connected to the support block 22 that converts the rotation of the first shaft 131 around its central axis AX3 into the rotation of the support block 22 around its first axis AX1. Note that any known member (e.g., a shaft, cam, gear, transmission belt, etc.) can be used as the power transmission member 13 or the conversion member 133.

[0045] In the example shown in Figure 3, the first shaft 131 includes a roller gear cam 131a (sometimes called a "globoidal cam"), and the conversion member 133 includes a plurality of cam followers 133a arranged around the support block 22. Alternatively, the first shaft 131 may include a worm gear, and the support block 22 may include a gear that meshes with the worm gear. Further alternatively, the first shaft 131 may include a first bevel gear, and the support block 22 may include a second bevel gear that meshes with the first bevel gear.

[0046] In the example shown in Figure 3, the first axis AX1, which is the pivot axis of the support block 22, is parallel to a plane perpendicular to the output shaft 44 of the first motor 4 (or the central axis AX3 of the first shaft 131). Alternatively, if power is transmitted between the first shaft 131 and the support block 22 using multiple general-purpose gears or a transmission belt, the first axis AX1, which is the pivot axis of the support block 22, may be parallel to the central axis AX3 of the first shaft 131.

[0047] (Second cooling device 15) As illustrated in Figure 6, the table drive unit 1A may include a second cooling unit 15 that cools the second motor 14 using a coolant. The second cooling unit 15 has a coolant flow path FL through which the coolant flows. The coolant flow path FL is arranged, for example, to pass through the support base 3. The second cooling unit 15 may have a pump 151 that circulates the coolant within the coolant flow path FL.

[0048] In the example shown in Figure 6, the first motor 4 is cooled by air supplied from the supply duct 51, and the second motor 14 is cooled using coolant flowing through the coolant flow path FL. Therefore, the coolant flow path FL is not complicated compared to the case where both the first motor 4 and the second motor 14 are cooled using coolant. For example, since there is no need to provide a coolant flow path for cooling the first motor 4 inside the support base 3, the structure of the support base 3 is not complicated. Also, since there is no need to provide a coolant flow path for cooling the first motor 4 inside the support base 3, the size of the support base 3 is suppressed.

[0049] In the example shown in Figure 6, the second motor 14, which is positioned closer to the table 21 than the first motor 4, is cooled using a coolant. Therefore, thermal deformation of the table device 2 caused by the heat generated by the second motor 14 is effectively suppressed. In addition, the first motor 4, which is positioned further from the table 21 than the second motor 14, is cooled using air. Therefore, while the complexity of the structure of the table drive device 1A is suppressed, thermal deformation of the support base 3 caused by the heat generated by the first motor 4 is also suppressed.

[0050] (Support stand 3) In the example shown in Figure 1, the support base 3 includes a first support base 3a that tiltably supports the first end 2a of the table device 2, and a second support base 3b that tiltably supports the second end 2b of the table device 2. Furthermore, the first portion 41 of the first motor 4 is in contact with the first support base 3a. More specifically, the first portion 41 of the first motor 4 is attached to the first support base 3a.

[0051] (Base structure 9) In the example shown in Figure 1, the machine tool 100A includes a base structure 9. Support bases 3 (more specifically, a first support base 3a and a second support base 3b) are fixed to the base structure 9. The base structure 9 may also have a fixed portion of a moving device 103 for moving the machining head HD fixed to it. In the example shown in Figure 1, the support bases 3 are fixed to the base structure 9, and a cover 6 surrounding the first motor 4 is fixed to the support bases 3. In other words, the cover 6 is supported by the base structure 9 via the support bases 3 so that it cannot move relative to the base structure 9. Also in the example shown in Figure 1, the first part 41 of the first motor 4 is fixed to the support bases 3. In other words, the first part 41 of the first motor 4 is supported by the base structure 9 via the support bases 3 so that it cannot move relative to the base structure 9.

[0052] (Duct 50) In this specification, the direction from the first support base 3a toward the second support base 3b is defined as the first direction DR1, and the direction opposite to the first direction DR1 is defined as the second direction DR2. In the example shown in Figure 2, the supply duct 51 has a first end 51a and a second end 51b. The first end 51a is provided with an air intake port OP1, and the second end 51b is provided with an air outlet port OP2. In the example shown in Figure 2, air is drawn into the supply duct 51 from the first end 51a, and air is blown out from the second end 51b toward the first part 41 of the first motor 4. In the example shown in Figure 2, the second end 51b is positioned toward the first direction DR1 than the first end 51a. Therefore, the supply duct 51 as a whole forms an airflow having a momentum component in the direction along the first direction DR1.

[0053] In a plan view, the extension direction of the supply duct 51 may be parallel to the first direction DR1. Also, as illustrated in Figure 1, the first end 51a of the supply duct 51 may be connected to the first opening E1 formed in the outer wall 108.

[0054] In the example shown in Figure 2, the exhaust duct 54 has a first end 54a and a second end 54b. An air intake port OP3 is provided at the first end 54a, and an air outlet port OP4 is provided at the second end 54b. In other words, air is drawn into the exhaust duct 54 from the first end 54a, and air is blown out from the second end 54b. In the example shown in Figure 2, the second end 54b is positioned on the second direction DR2 side of the first end 54a. Therefore, the exhaust duct 54 as a whole forms an airflow having a momentum component in the direction along the second direction DR2.

[0055] In the example shown in Figure 2, the exhaust duct 54 is positioned above the supply duct 51. The exhaust duct 54 may also be positioned directly above the supply duct 51. In this case, the size of the duct 50 in plan view can be made more compact.

[0056] In a plan view, the extension direction of the exhaust duct 54 may be parallel to the first direction DR1. Also, as illustrated in Figure 1, the second end 54b of the exhaust duct 54 may be connected to the second opening E2 formed in the outer wall 108.

[0057] In the example shown in Figure 2, a roughly U-shaped airflow path is defined by the supply duct 51, the cover 6, and the exhaust duct 54. The U-shaped airflow path creates airflow toward the first part 41 of the first motor 4, airflow from the first part 41 of the first motor 4 toward the second part 42 of the first motor 4, and airflow away from the second part 42 of the first motor 4 (see the dashed arrow in Figure 2). Furthermore, the U-shape of the airflow path allows for a compact arrangement of the entire airflow path.

[0058] In the example shown in Figure 2, the supply duct 51 and cover 6 are connected such that the assembly of the supply duct 51 and cover 6 has a substantially T-shape. Alternatively, the supply duct 51 and cover 6 may be connected such that the assembly of the supply duct 51 and cover 6 has a substantially L-shape (see Figure 10 if necessary).

[0059] (Fan 58) In the example shown in Figure 2, a fan 58 is located in the supply duct 51 (more specifically, at the first end 51a of the supply duct 51). In this case, the fan 58 functions as an intake fan 58a that draws air into the supply duct 51. Alternatively, or additionally, a fan 58 may be located in the exhaust duct 54 (more specifically, at the second end 54b of the exhaust duct 54). In this case, the fan 58 functions as an exhaust fan 58b (see Figure 5) that discharges air from the exhaust duct 54. There are no restrictions on the type of fan 58, the method of mounting the fan 58, or the arrangement of the fan 58 in the embodiment. In other words, any fan 58 can be used as long as it can generate airflow within the duct 50.

[0060] (Filter 57) The table drive unit 1A may be equipped with a filter 57 to remove foreign matter such as dust from the air. In the example shown in Figure 2, the filter 57 is located in the supply duct 51 (more specifically, at the first end 51a of the supply duct 51).

[0061] (Variation of the arrangement of duct 50) In this specification, the direction from the first part 41 of the first motor 4 toward the second part 42 of the first motor 4 is defined as the third direction DR3. In the example shown in Figure 2, the direction of extension of the supply duct 51 is substantially perpendicular to the third direction DR3. Also, the direction of extension of the exhaust duct 54 is substantially perpendicular to the third direction DR3.

[0062] Alternatively, as illustrated in Figure 7, the direction of extension of the exhaust duct 54 may be along the third direction DR3. Also, the direction from the first end 54a of the exhaust duct 54 toward the second end 54b of the exhaust duct 54 may be upward.

[0063] In the example shown in Figure 2, the exhaust duct 54 and the cover 6 are separate components, with the exhaust duct 54 attached to the cover 6. Alternatively, as illustrated in Figure 7, the cover 6 surrounding the first motor 4 and the exhaust duct 54 that exhausts air from around the second portion 42 of the first motor 4 may be integrally molded. In other words, a portion of the exhaust duct 54 may function as the cover 6 surrounding the first motor 4.

[0064] (Arrangement of the first motor 4) In the example shown in Figure 2, the first motor 4 is positioned directly above the support base 3. In this case, the space directly above the support base 3 can be effectively utilized. Also, since high-temperature air rises, the air heated by the heat generated by the first motor 4 is less likely to move towards the support base 3.

[0065] (Modified arrangement of the first motor 4) In the example shown in Figure 2, the first portion 41 of the first motor 4 is in contact with the top 3t of the support base 3 (more specifically, the first support base 3a). Alternatively, as illustrated in Figure 8, the first portion 41 of the first motor 4 may be in contact with the side of the support base 3 (more specifically, the first support base 3a).

[0066] In the example shown in Figure 8, in a plan view, the direction from the first part 41 of the first motor 4 to the second part 42 of the first motor 4 (in other words, the third direction DR3) is perpendicular to the first direction DR1. As illustrated in Figure 8, in a plan view, the extending direction of the supply duct 51 may be parallel to the first direction DR1. Also, in a plan view, the extending direction of the exhaust duct 54 may be parallel to the first direction DR1.

[0067] As illustrated in Figure 8, the exterior wall 108 may have a front wall 108a on which the door 109 is located, a side wall 108b, and a rear wall 108c. Furthermore, the wall to which the first end 51a of the supply duct 51 is attached may be different from the wall on which the door 109 is located (for example, the front wall 108a). In the example shown in Figure 8, the first end 51a of the supply duct 51 is attached to the side wall 108b.

[0068] (Mobile device 103) In the example shown in Figure 9, the moving device 103 for moving the machining head HD includes a first moving device 103a that moves the machining head HD in a direction along the X-axis parallel to the horizontal plane, a second moving device 103b that moves the machining head HD in a direction along the Y-axis parallel to the horizontal plane, and a third moving device 103c that moves the machining head HD in a direction along the Z-axis perpendicular to the horizontal plane. In the example shown in Figure 9, the X-axis is parallel to the first direction DR1, and the Y-axis is perpendicular to the X-axis direction.

[0069] In the example shown in Figure 9, the moving device 103 for moving the machining head HD includes a first member 104a (e.g., a saddle), a second member 105a (e.g., a column), and a third member 106a. The first member 104a is supported by the base structure 9 so as to be movable in the direction along the X-axis. The first moving device 103a moves the first member 104a relative to the base structure 9 in the direction along the X-axis. The second member 105a is supported by the first member 104a so as to be movable in the direction along the Y-axis. The second moving device 103b moves the second member 105a relative to the first member 104a in the direction along the Y-axis. The third member 106a is supported by the second member 105a so as to be movable in the direction along the Z-axis. The third moving device 103c moves the third member 106a relative to the second member 105a in a direction along the Z-axis. The third member 106a includes the machining head HD (in other words, the machining head HD moves integrally with the third member 106a).

[0070] In the example shown in Figure 9, the moving device 103 can move the machining head HD in three dimensions. Alternatively, the moving device 103 may be a device that moves the machining head HD in two or one dimensions.

[0071] (Second embodiment) Referring to Figure 10, the table drive unit 1B and the machine tool 100B in the second embodiment will be described. Figure 10 is a schematic diagram showing the machine tool 100B in the second embodiment. Figure 11 is a schematic diagram showing the machine tool 100B in a modified example of the second embodiment. Figure 12 is a schematic diagram showing an example of a mechanism for transmitting power from the first motor 4 to the rotating body 24.

[0072] In the first embodiment, an example was described in which a first motor 4 in contact with a support base 3 tilts the table device 2 around a first axis AX1. In the second embodiment, the first motor 4 in contact with the support base 3 rotates a rotating body 24 to which the table 21 is fixed around a first axis AT1. The first axis AT1 is, for example, an axis parallel to the vertical direction.

[0073] The second embodiment will primarily describe the differences from the first embodiment. On the other hand, in the second embodiment, repetitive explanations of matters already explained in the first embodiment will be omitted. Therefore, it goes without saying that even if not explicitly explained in the second embodiment, matters already explained in the first embodiment can be applied to the second embodiment.

[0074] In the example shown in Figure 10, the table drive device 1B comprises (1) a table device 2 having a table 21 that supports a workpiece W which is the object to be processed; (2) a support base 3 that supports the table device 2; (3) a first motor 4 having a first part 41 that is in contact with the support base 3 and a second part 42 that is positioned further from the support base 3 than the first part 41, and which moves the table device 2 relative to the support base 3; and (4) a cooling device 5 that cools the first motor 4. The cooling device 5 also comprises (5) a fan 58 that imparts momentum to the air; (6) a supply duct 51 that supplies air to the first part 41 of the first motor 4; and (7) an exhaust duct 54 that exhausts air from around the second part 42 of the first motor 4.

[0075] Furthermore, in the example shown in Figure 10, the machine tool 100B includes, in addition to the table drive device 1B described above, a machining head HD that supports a tool T for machining the workpiece W, and a moving device 103 for moving the machining head HD.

[0076] Based on the above, the table drive unit 1B and the machine tool 100B in the second embodiment have the same effects as the table drive unit 1A and the machine tool 100A in the first embodiment, respectively.

[0077] (Optional additional configuration) Next, with reference to Figures 10 to 12, optional additional configurations that can be adopted in the table drive unit 1B and machine tool 100B in the second embodiment will be described.

[0078] In the example shown in Figure 10, the table device 2 includes a table 21 and a rotating body 24 to which the table 21 is fixed. The support base 3 supports the rotating body 24 so that it can rotate around the first axis AT1. The first motor 4 rotates the rotating body 24 to which the table 21 is fixed around the first axis AT1.

[0079] In the example shown in Figure 10, the table drive unit 1B includes a cover 6 surrounding the first motor 4. In the example shown in Figure 10, the cover 6 surrounding the first motor 4 and the exhaust duct 54 that exhausts air from around the second portion 42 of the first motor 4 are integrally molded. In other words, a part of the exhaust duct 54 functions as the cover 6 surrounding the first motor 4. Alternatively, the exhaust duct 54 and the cover 6 surrounding the first motor 4 may be separate components.

[0080] In the example shown in Figure 12, the first axis AT1, which is the pivot axis of the rotating body 24, is parallel to a plane perpendicular to the output shaft 44 of the first motor 4 (or the central axis AT2 of the first shaft 131).

[0081] In the example shown in Figure 12, the first motor 4 transmits power to the rotating body 24 of the table device 2 via a mechanical power transmission mechanism M1. More specifically, the table drive device 1B has a power transmission member 13 that transmits the driving force of the first motor 4 to the rotating body 24 of the table device 2. In the example shown in Figure 12, the power transmission member 13 includes (1) a first shaft 131 connected to the output shaft 44 of the first motor 4, and (2) a conversion member 133 connected to the rotating body 24 that converts the rotation of the first shaft 131 around its central axis AT2 to the rotation of the rotating body 24 around its first axis AT1. Note that any known member (e.g., a shaft, cam, gear, transmission belt, etc.) can be used as the power transmission member 13 or the conversion member 133.

[0082] In the example shown in Figure 12, the first shaft 131 includes a roller gear cam 131a (sometimes called a "globoidal cam"), and the conversion member 133 includes a plurality of cam followers 133a arranged around the rotating body 24. Alternatively, the first shaft 131 may include a worm gear, and the rotating body 24 may include a gear that meshes with the worm gear. Further alternatively, the first shaft 131 may include a first bevel gear, and the rotating body 24 may include a second bevel gear that meshes with the first bevel gear.

[0083] In the example shown in Figure 10, the direction from the first part 41 of the first motor 4 toward the second part 42 of the first motor 4 (in other words, the third direction DR3) is away from the table device 2 and the support base 3. Also, the direction from the first part 41 of the first motor 4 toward the second part 42 of the first motor 4 (in other words, the third direction DR3) is parallel to the horizontal plane.

[0084] In the example shown in Figure 10, the machine tool 100B includes a base structure 9 to which the support base 3 is fixed. In the example shown in Figure 10, the support base 3 is fixed to the base structure 9, and a cover 6 surrounding the first motor 4 is fixed to the support base 3. Also in the example shown in Figure 10, the first part 41 of the first motor 4 is fixed to the support base 3.

[0085] As illustrated in Figure 11, the first end 51a of the supply duct 51 may be connected to the first opening E1 of the outer wall 108 of the machine tool 100B. The second end 54b of the exhaust duct 54 may be connected to the second opening E2 of the outer wall 108 of the machine tool 100B.

[0086] (Third embodiment) Referring to Figures 13 to 18, the table drive unit 1C and the machine tool 100C in the third embodiment will be described. Figure 13 is a schematic diagram showing a part of the machine tool 100C in the third embodiment. Figure 14 is a schematic cross-sectional view showing a part of the machine tool 100C in the third embodiment. Figure 15 is a schematic perspective view illustrating an example of a moving device 103 for moving the machining head HD. Note that in Figure 15, the duct 50, cover 6, partition wall 11, outer wall 108, etc. are omitted. Figure 16 is a schematic diagram showing an example of the arrangement of the supply duct 51, exhaust duct 54, and cover 6. Figure 17 is a schematic diagram showing an example of the connection relationship between the control device 85 and the controlled equipment. Figure 18 is a schematic diagram showing how the control device 86 can control the fan motor 59 based on the signal from the temperature sensor 81.

[0087] The third embodiment will primarily describe the differences from the first and second embodiments. On the other hand, the third embodiment will omit repetitive explanations of matters already described in the first or second embodiment. Therefore, it goes without saying that matters already described in the first or second embodiment can be applied to the third embodiment even if they are not explicitly explained. Conversely, matters described in the third embodiment are applicable to the first or second embodiment.

[0088] In the example shown in Figures 13 and 14, the table drive device 1C comprises: (1) a table device 2 having a table 21 that supports a workpiece W which is the object to be processed; (2) a support base 3 that supports the table device 2; (3) a first motor 4 having a first part 41 that is in contact with the support base 3 and a second part 42 that is positioned further from the support base 3 than the first part 41, and which moves the table device 2 relative to the support base 3; and (4) a cooling device 5 that cools the first motor 4. The cooling device 5 also comprises: (5) a fan 58 that imparts momentum to the air; (6) a supply duct 51 that supplies air to the first part 41 of the first motor 4; and (7) an exhaust duct 54 that exhausts air from around the second part 42 of the first motor 4.

[0089] Furthermore, in the example shown in Figure 15, the machine tool 100C includes, in addition to the table drive device 1C described above, a machining head HD that supports a tool T for machining a workpiece, and a moving device 103 for moving the machining head HD.

[0090] Based on the above, the table drive unit 1C and the machine tool 100C in the third embodiment have the same effects as the table drive unit 1A and the machine tool 100A in the first embodiment, respectively.

[0091] (Optional additional configuration) Next, with reference to Figures 1 to 18, optional additional configurations that can be adopted in the table drive device 1C and machine tool 100C in the third embodiment will be described. In the table drive device 1C and machine tool 100C in the third embodiment, the optional additional configurations described in the first embodiment can be adopted. Furthermore, in the table drive device 1C and machine tool 100C in the third embodiment, the optional additional configurations described in the second embodiment can be adopted.

[0092] (Tilting of Table Device 2) In the example shown in Figure 13, the support base 3 supports the table device 2 so that it can tilt around the first axis AX1. More specifically, the table device 2 includes a support block 22 that directly or indirectly supports the table 21, and the support base 3 supports the support block 22 so that it can tilt around the first axis AX1. The support block 22 is composed of an assembly of multiple parts.

[0093] The mechanism by which the first motor 4 tilts the table device 2 (more specifically, the support block 22) around the first axis AX1 has already been described in the first embodiment (see Figure 3 if necessary). Therefore, a repeated explanation of the mechanism by which the first motor 4 tilts the table device 2 (more specifically, the support block 22) around the first axis AX1 will be omitted.

[0094] As illustrated in Figure 13, the table device 2 may have a rotating body 24 to which the table 21 is fixed. The rotating body 24 is supported by a support block 22 so as to be rotatable around the second axis AX2. The table device 2 also has a second motor 14 (see Figure 4) that rotates the rotating body 24 around the second axis AX2.

[0095] The mechanism by which the second motor 14 rotates the rotating body 24 around the second axis AX2 has already been described in the first embodiment (see Figure 4 if necessary). Therefore, a repeated explanation of the mechanism by which the second motor 14 rotates the rotating body 24 around the second axis AX2 will be omitted.

[0096] (Cover 6) In the example shown in Figure 14, the table drive unit 1C includes a cover 6 surrounding the first motor 4. Since the cover 6 has already been described in the first embodiment, a repeated explanation of the cover 6 will be omitted.

[0097] (Partition wall 11) In the example shown in Figure 13, the table drive unit 1C includes a partition wall 11 that separates the machining area where the workpiece is machined (in other words, the first area RG1 where the table 21 supporting the workpiece W is located) from the second area RG2 where the first motor 4 and cover 6 are located. Since the partition wall 11 has already been described in the first embodiment, a repeated explanation of the partition wall 11 will be omitted.

[0098] (Second cooling device 15) As illustrated in Figure 6, the table drive unit 1A may include a second cooling device 15 that cools the second motor 14 using a cooling liquid. Since the second cooling device 15 has already been described in the first embodiment, a repeated explanation of the second cooling device 15 will be omitted.

[0099] (Support stand 3) In the example shown in Figure 15, the support base 3 includes a first support base 3a that tiltably supports the first end of the table device 2, and a second support base 3b that tiltably supports the second end of the table device 2. Furthermore, a first portion 41 of the first motor 4 is in contact with the first support base 3a. More specifically, the first portion 41 of the first motor 4 is attached to the first support base 3a. As illustrated in Figure 13, a cover 6 surrounding the first motor 4 may be fixed to the support base 3.

[0100] (Base structure 9) In the example shown in Figure 15, the machine tool 100C includes a base structure 9. Support bases 3 (more specifically, a first support base 3a and a second support base 3b) are fixed to the base structure 9.

[0101] (Duct 50) In the example shown in Figure 16, the supply duct 51 has a first end 51a and a second end 51b. The first end 51a is provided with an air intake OP1, and the second end 51b is provided with an air outlet OP2. In the example shown in Figure 16, the second end 51b is positioned on the first direction DR1 side than the first end 51a. Therefore, the supply duct 51 as a whole forms an airflow having a momentum component in the direction along the first direction DR1. In the example shown in Figure 16, the height of the second end 51b is lower than the height of the first end 51a. Alternatively, the height of the second end 51b may be lower than the height of the first end 51a, or the heights of both ends may be equal.

[0102] In a plan view, the extension direction of the supply duct 51 may be parallel to the first direction DR1. Also, as illustrated in Figure 14, the first end 51a of the supply duct 51 may be connected to the first opening E1 formed in the outer wall 108.

[0103] In the example shown in Figure 14, the exhaust duct 54 has a first end 54a and a second end 54b. The first end 54a is provided with an air intake port OP3, and the second end 54b is provided with an air outlet port OP4. In the example shown in Figure 14, the second end 54b is positioned on the second direction DR2 side than the first end 54a. Therefore, the exhaust duct 54 as a whole forms an airflow having a momentum component in the direction along the second direction DR2.

[0104] In the example shown in Figure 14, the exhaust duct 54 is positioned above the supply duct 51. The exhaust duct 54 may also be positioned directly above the supply duct 51. In this case, the size of the duct 50 in plan view can be made more compact.

[0105] In the example shown in Figure 14, a roughly U-shaped airflow path is defined by the supply duct 51, the cover 6, and the exhaust duct 54. The U-shaped airflow path creates an airflow toward the first part 41 of the first motor 4, an airflow from the first part 41 of the first motor 4 toward the second part 42 of the first motor 4, and an airflow away from the second part 42 of the first motor 4.

[0106] In the example shown in Figure 14, the air intake port OP1 of the supply duct 51 is a side opening. When the air intake port OP1 of the supply duct 51 is a side opening, it is easy to attach the first end 51a of the supply duct 51 (in other words, the end on the air intake port OP1 side) to the outer wall 108 (more specifically, the side wall 108b). In the example shown in Figure 14, the air outlet port OP4 of the exhaust duct 54 is an upward opening. When the air outlet port OP4 of the exhaust duct 54 is an upward opening, it is difficult for the warm air blown out from the air outlet port OP4 to return to the space below the exhaust duct 54.

[0107] In the example shown in Figure 13, the air outlet OP4 of the exhaust duct 54 is positioned inside the outer wall 108 in a plan view. When the air outlet OP4 is positioned inside the outer wall 108, the length of the exhaust duct 54 can be shortened. In addition, workers located outside the outer wall 108 will not experience discomfort from the air blown out from the air outlet OP4.

[0108] In the example shown in Figure 13, the air outlet OP4 of the exhaust duct 54 is located between the partition wall 11 and the outer wall 108 in a plan view. Also, in the example shown in Figure 13, the air outlet OP4 has an upward opening. In this case, the warm air blown out from the air outlet OP4 is less likely to be directed towards the support base 3.

[0109] (Inspection opening B2, and panel PN) As illustrated in Figure 13, the outer wall 108 may have an opening B2 for maintaining or inspecting equipment located in the second region RG2 between the outer wall 108 and the partition wall 11. The machine tool 100C may also have a panel PN that can open and close the opening B2. In the example shown in Figure 13, the panel PN is attached to the outer wall 108 so as to close the opening B2.

[0110] (Mobile device 103) In the example shown in Figure 15, the moving device 103 for moving the machining head HD includes a first moving device 103a that moves the machining head HD in a direction along the X-axis parallel to the horizontal plane, a second moving device 103b that moves the machining head HD in a direction along the Y-axis parallel to the horizontal plane, and a third moving device 103c that moves the machining head HD in a direction along the Z-axis perpendicular to the horizontal plane. In the example shown in Figure 15, the X-axis is parallel to the first direction DR1, and the Y-axis is perpendicular to the X-axis direction.

[0111] In the example shown in Figure 15, the moving device 103 for moving the machining head HD includes a first member 104b, a second member 105b, and a third member 106b. The first member 104b is supported by the base structure 9 so as to be movable in the direction along the Y axis. The second moving device 103b moves the first member 104b relative to the base structure 9 in the direction along the Y axis. The second member 105b is supported by the first member 104b so as to be movable in the direction along the X axis. The first moving device 103a moves the second member 105b relative to the first member 104b in the direction along the X axis. The third member 106b is supported by the second member 105b so as to be movable in the direction along the Z axis. The third moving device 103c moves the third member 106b relative to the second member 105b in the direction along the Z axis. The third component 106b includes the machining head HD.

[0112] In the example shown in Figure 15, the moving device 103 can move the machining head HD in three dimensions. Alternatively, the moving device 103 may be a device that moves the machining head HD in two or one dimensions.

[0113] (Base structure 9) The machine tool 100C includes a base structure 9. In the example shown in Figure 15, the base structure 9 movably supports structures (104b, 105b, 106b) including the machining head HD. As illustrated in Figure 13, the cover 6 surrounding the first motor may include a first wall 62a positioned between the first motor and the base structure 9. Because the first motor is surrounded by the cover 6 and the first motor and the base structure 9 are separated by the first wall 62a, heat generated from the first motor is less likely to be transferred to the base structure 9. Thus, thermal deformation of the base structure 9 is suppressed.

[0114] In the example shown in Figure 15, the base structure 9 includes a guide member 91 (more specifically, a guide rail 91r) that guides the movement of the first member 104b of the moving device 103. In the example shown in Figure 13, the cover 6 surrounding the first motor includes a first wall 62a positioned between the first motor and the guide member 91. In this case, heat generated from the first motor is less likely to be transferred to the guide member 91. Therefore, thermal deformation of the guide member 91 is suppressed, and a decrease in the positional accuracy of the machining head HD is suppressed.

[0115] (Power supply line 71, control line 73, signal line 75, and control device 85) In the example shown in Figure 16, the table drive unit 1C includes a power supply line 71 that supplies power to the first motor 4. Additionally, the table drive unit 1C may include a control line 73 (for example, a control line that activates the electromagnetic brake of the first motor 4) that transmits a control command to the first motor 4 to stop the rotation of the rotating part of the first motor 4. Alternatively, or additionally, the table drive unit 1C may include a signal line 75 that transmits a signal from an encoder 74 provided on the first motor 4 (more specifically, a signal indicating the rotational phase of the first motor 4) to the control device 85. In the example shown in Figure 17, the control device 85 controls the first motor 4 and the moving devices 103 that move the machining head HD (for example, the first moving device 103a, the second moving device 103b, and the third moving device 103c described above). Additionally, the control device 85 may control the second motor 14 and the pump 151 that circulates the coolant.

[0116] As illustrated in Figure 16, at least one of the above-mentioned power supply line 71, control line 73, and signal line 75 may be arranged to pass through an opening OP5 formed in at least one of the supply duct 51 and exhaust duct 54. In the example shown in Figure 16, the above-mentioned power supply line 71 is arranged to pass through an opening OP5 formed in the exhaust duct 54. Additionally, the above-mentioned control line 73 and / or the above-mentioned signal line 75 may be arranged to pass through an opening OP5 formed in the exhaust duct 54.

[0117] When the first motor 4 is enclosed by a cover 6, and each of the power supply line 71, control line 73, and signal line 75 is arranged to pass through an opening OP5 formed in the duct 50, the connections between each of the power supply line 71, control line 73, and signal line 75 and the first motor 4 are protected by the duct 50 and the cover 6.

[0118] (Temperature sensor 81, and control device 85) As illustrated in Figure 16, the table drive unit 1C may have a temperature sensor 81. The temperature sensor 81 detects the temperature of the first motor 4, the temperature of the internal space of the cover 6, or the temperature of the internal space of the exhaust duct 54.

[0119] As illustrated in Figure 18, the table drive unit 1C may have a control device 86 for controlling the fan motor 59. The control device 86 for controlling the fan motor 59 may be the same as the control device 85 for controlling the first motor 4. In other words, one control device 85 may control both the first motor 4 and the fan motor 59. The control device 86 may control the fan motor 59 based on a signal received from the temperature sensor 81. For example, the control device 86 may control the ON / OFF state of the fan motor 59 based on a signal received from the temperature sensor 81. Alternatively, or additionally, the control device 86 may control the rotational speed of the fan motor 59 based on a signal received from the temperature sensor 81.

[0120] For example, the control device 86 may switch the fan motor 59 from OFF to ON in response to the detected temperature detected by the temperature sensor 81 exceeding a first threshold TH1. Alternatively, or additionally, the control device 86 may increase the rotational speed of the fan motor 59 in response to the detected temperature detected by the temperature sensor 81 exceeding a second threshold TH2. Also, the control device 86 may switch the fan motor 59 from ON to OFF in response to the detected temperature detected by the temperature sensor 81 falling below a third threshold TH3. Alternatively, or additionally, the control device 86 may decrease the rotational speed of the fan motor 59 in response to the detected temperature detected by the temperature sensor 81 falling below a fourth threshold TH4.

[0121] Alternatively, the control device 86 may switch the fan motor 59 from OFF to ON if the value obtained by subtracting the reference temperature from the detected temperature detected by the temperature sensor 81 exceeds the fifth threshold TH5. The reference temperature may be the temperature detected by the temperature sensor 81 before the first motor 4 is driven. Alternatively, the reference temperature may be the temperature detected by a second temperature sensor 82 located at an arbitrary reference position (for example, near the air intake of the supply duct 51).

[0122] Alternatively, or additionally, the control device 86 may increase the rotational speed of the fan motor 59 if the value obtained by subtracting the above-mentioned reference temperature from the detected temperature detected by the temperature sensor 81 exceeds the sixth threshold TH6.

[0123] Furthermore, the control device 86 may switch the fan motor 59 from ON to OFF if the value obtained by subtracting the above-mentioned reference temperature from the detected temperature detected by the temperature sensor 81 becomes less than or equal to the seventh threshold TH7. Alternatively, or additionally, the control device 86 may reduce the rotational speed of the fan motor 59 if the value obtained by subtracting the above-mentioned reference temperature from the detected temperature detected by the temperature sensor 81 becomes less than or equal to the eighth threshold TH8.

[0124] Alternatively, the fan motor 59 may be driven continuously while the machine tool 100C is in operation or while the first motor 4 is being driven.

[0125] (Workpiece processing method) The workpiece processing method in the embodiment will be described with reference to Figures 1 to 19. Figure 19 is a flowchart showing an example of the workpiece processing method in the embodiment.

[0126] The workpiece machining method in the embodiment is performed using a machine tool 100 (for example, machine tool 100A in the first embodiment, machine tool 100B in the second embodiment, machine tool 100C in the third embodiment, or other machine tools).

[0127] In the first step ST1, the power to the machine tool 100 is turned ON. The first step ST1 is the machine tool startup process.

[0128] In the second step ST2, the first motor 4 in contact with the support base 3 is cooled. The second step ST2 is the first cooling step. The first cooling step (second step ST2) may start simultaneously with the power of the machine tool 100 being turned ON. Alternatively, the first cooling step (second step ST2) may start when the detected temperature detected by the temperature sensor 81 exceeds the first threshold TH1. For example, the first cooling step (second step ST2) may start when the detected temperature detected by the temperature sensor 81 exceeds the first threshold TH1 during or after the execution of the moving step (fifth step ST5) and / or the workpiece processing step (sixth step ST6) described later. Further alternatively, the first cooling step (second step ST2) may start when the value obtained by subtracting the reference temperature from the detected temperature detected by the temperature sensor 81 is higher than the fifth threshold TH5. For example, the first cooling step (second step ST2) may be started when the value obtained by subtracting the reference temperature from the detected temperature detected by the temperature sensor 81 becomes higher than the fifth threshold TH5 during or after the execution of the transfer step (fifth step ST5) and / or the workpiece processing step (sixth step ST6) described later.

[0129] The first cooling step (second step ST2) includes (1) imparting momentum to the air using a fan 58, (2) supplying air to the first part 41 of the first motor 4 from a supply duct 51, (3) cooling the first motor 4 using air by flowing air from the first part 41 of the first motor 4 toward the second part 42 of the first motor 4 toward the support base 3, and (4) discharging air from around the second part 42 of the first motor 4 through an exhaust duct 54.

[0130] Additionally, the workpiece processing method in the embodiment may include a second cooling step for cooling the second motor 14 that rotates the table 21 around the second axis AX2. The second cooling step (third step ST3) may be performed simultaneously with the first cooling step (second step ST2). In the example shown in Figure 6, the second motor 14 provided on the table device 2 is cooled using a coolant, and the first motor 4 in contact with the support base 3 is cooled using air. In this case, the cooling of the second motor 14 using a coolant effectively suppresses thermal deformation of the table device 2. Furthermore, the cooling of the first motor 4 using air suppresses thermal deformation of the support base 3 in a low-cost and energy-saving manner.

[0131] The first cooling step (second step ST2) may include flowing air from the first part 41 of the first motor 4 to the second part 42 of the first motor 4 in the region between the first motor 4 and the cover 6 surrounding the first motor 4. By flowing air through the relatively narrow region between the first motor 4 and the cover 6, both the first motor 4 and the cover 6 are effectively cooled. Thus, thermal deformation of components located on the outside of the cover 6 due to heat generated from the first motor 4 is effectively suppressed.

[0132] In the first cooling step (second step ST2), the direction from the first part 41 of the first motor 4 to the second part 42 of the first motor 4 may be upward (see Figures 1 and 14), or it may be in a direction away from the support base 3 (more specifically, the first support base 3a) in a plan view (see Figure 8).

[0133] In the fourth step ST4, the workpiece W is fixed to the table 21 of the table device 2. The fourth step ST4 is the workpiece fixing step. The workpiece fixing step (fourth step ST4) may be performed after the start of the first cooling step (second step ST2) described above, or before the start of the first cooling step (second step ST2) described above.

[0134] In the fifth step ST5, the table device 2 is moved relative to the support base 3 that supports it, using the driving force of the first motor 4. The fifth step ST5 is a movement process.

[0135] The moving process (5th step ST5) may include tilting the table device 2 around the first axis AX1. In the examples shown in Figures 1 and 13, the tilting of the table device 2 is performed using the driving force of the first motor 4. The first axis AX1 is, for example, an axis parallel to the horizontal plane. The tilting of the table device 2 may also include rotating the support block 22 around the first axis AX1 relative to the support base 3.

[0136] Alternatively, or additionally, the moving step (5th step ST5) may include rotating the table 21.

[0137] In the example shown in Figure 6, the rotation of the table 21 is performed using the driving force of a second motor 14, which is different from that of the first motor 4. In the example shown in Figure 6, the second motor 14 rotates the rotating body 24, to which the table 21 is fixed, around a second axis AX2 relative to the support block 22. The second axis AX2 is, for example, an axis perpendicular to the upper surface of the table 21.

[0138] In the example shown in Figure 10, the rotation of the table 21 is performed using the driving force of the first motor 4. In the example shown in Figure 10, the first motor 4 rotates the rotating body 24 to which the table 21 is fixed around the first axis AT1 relative to the support base 3. The first axis AT1 is, for example, an axis perpendicular to the horizontal plane. In the example shown in Figure 10, the first axis AT1 is an axis perpendicular to the upper surface of the table 21.

[0139] Alternatively, or additionally, the moving step (5th step ST5) may include moving the table device 2 in a linear manner.

[0140] In the sixth step ST6, the workpiece W is machined using the tool T. The sixth step ST6 is a workpiece machining process. The workpiece machining process (sixth step ST6) is performed by moving the tool T relative to the workpiece W. This relative movement is performed using a moving device 103 that moves the machining head HD. Alternatively, or additionally, this relative movement may be performed using the first motor 4 and / or the second motor 14 described above.

[0141] In the workpiece processing method of this embodiment, the first part 41 of the first motor 4 is effectively cooled by supplying air to the first part 41 of the first motor 4 via the supply duct 51. Therefore, the transfer of heat generated from the first motor 4 from the first part 41 to the support base 3 is prevented or suppressed. Furthermore, in the workpiece processing method of this embodiment, air flows from the first part 41 of the first motor 4 toward the second part 42 of the first motor 4. Therefore, the air used to cool the first part 41, which is closer to the support base 3, is also used to cool the second part 42 of the first motor 4. In addition, the direction from the first part 41 of the first motor 4 toward the second part 42 of the first motor 4 is toward the direction away from the support base 3. Therefore, the movement of air whose temperature has risen due to contact with the first motor 4 toward the support base 3 is prevented or suppressed.

[0142] In the workpiece processing method of this embodiment, the transfer of heat from the first motor 4 to the support base 3 via the first part 41 or air is suppressed, thereby suppressing thermal deformation of the support base 3 and the table device 2. Therefore, the decrease in the positional accuracy of the workpiece W supported by the table device 2 as the operating time of the first motor 4 increases is suppressed. Furthermore, since the decrease in the positional accuracy of the workpiece W is suppressed, the decrease in the processing accuracy of the workpiece W is also suppressed.

[0143] The present invention is not limited to the embodiments or modifications described above, and it is clear that each embodiment or modification can be appropriately modified or changed within the scope of the technical concept of the present invention. Furthermore, the various technologies used in each embodiment or modification can be applied to other embodiments or other modifications, as long as no technical inconsistencies arise. In addition, any optional additional configurations in each embodiment or modification can be omitted as appropriate. [Explanation of Symbols]

[0144] 1, 1A, 1B, 1C... Table drive unit, 2... Table device, 2a... First end, 2b... Second end, 3... Support base, 3a... First support base, 3b... Second support base, 3t... Top, 4... First motor, 4t... Top, 5... Cooling device, 6... Cover, 9... Base structure, 11... Partition wall, 13... Power transmission member, 14... Second motor, 15... Second cooling device, 21... Table, 22... Support block, 22a... First block, 22b... Second block, 22c... Third block, 24... Rotating body, 31t... Part of the top of the support base, 41... First part of the first motor , 41a...First end of the first motor, 42...Second part of the first motor, 42a...Second end of the first motor, 44...Output shaft, 50...Duct, 51...Supply duct, 51a...First end, 51b...Second end, 54...Exhaust duct, 54a...First end, 54b...Second end, 57...Filter, 58...Fan, 58a...Intake fan, 58b...Exhaust fan, 59...Fan motor, 60...Wall, 62...Side wall, 62a...First wall, 62b...Second wall, 63...Top wall, 69a...First port, 69b...Second port, 71...Power supply line, 73...Control line, 74...Encoder, 75...Signal line, 81...Temperature sensor, 82...Second temperature sensor, 85...Control device, 86...Control device, 91...Guide member, 91r...Guide rail, 100, 100A, 100B, 100C...Machine tool, 103...Moving device, 103a...First moving device, 103b...Second moving device, 103c...Third moving device, 104a...First member, 104b...First member, 105a...Second member, 105b...Second member, 106a...Third member, 106b...Third member, 108...Outer wall, 108a...Front wall, 108b...Side wall, 108c...Rear wall, 109...Door, 13 1...First shaft, 131a...Roller gear cam, 133...Conversion member, 133a...Cam follower, 144...Output shaft, 151...Pump, B1...Opening, B2...Opening, E1...First opening, E2...Second opening, FL...Coolant flow path, FP1...First flow path, HD...Machining head, M1...Power transmission mechanism, M2...Power transmission mechanism, OP1...Air intake, OP2...Air outlet, OP3...Air intake, OP4...Air outlet, OP5...Opening, PN...Panel, RG1...First area, RG2...Second area, SP1...Internal area, SP2...Space, T...Tool, W...Workpiece

Claims

1. A table device having a table for supporting a workpiece; A support base for supporting the table device; a first motor having a first portion in contact with the support base and a second portion disposed at a position farther from the support base than the first portion, the first motor moving the table device relative to the support base; a cooling device for cooling the first motor; Equipped with The cooling device includes: A fan that gives momentum to the air, a supply duct for supplying the air to the first portion of the first motor; an exhaust duct that exhausts the air from around the second portion of the first motor; have Table drive device.

2. The table device includes a support block that directly or indirectly supports the table, The first motor is a motor that tilts the support block. The table drive device according to claim 1 .

3. a cover surrounding the first motor; The cover defines an air flow path from the first portion of the first motor to the second portion of the first motor.

3. The table drive device according to claim 1 or 2.

4. a partition wall separating a first area in which the table is disposed from a second area in which the first motor and the cover are disposed, The cover includes a first wall disposed between the first motor and the partition wall. The table drive device according to claim 3 .

5. A substantially U-shaped air flow path is defined by the supply duct, the cover, and the exhaust duct. The table drive device according to claim 3 .

6. The supply duct and the cover are connected such that the assembly of the supply duct and the cover has a substantially T-shape or a substantially L-shape. The table drive device according to claim 3 .

7. At least one of a power supply line for supplying power to the first motor, a control line for transmitting a control command for stopping rotation of a rotating part of the first motor, and a signal line for transmitting a signal from an encoder provided in the first motor to a control device is arranged to pass through an opening formed in at least one of the supply duct and the exhaust duct. The table drive device according to claim 3 .

8. The first motor is disposed directly above the support base.

3. The table drive device according to claim 1 or 2.

9. a second cooling device that cools the second motor using a cooling fluid; The table device is a rotating body to which the table is fixed and which is supported by the support block so as to be rotatable about a second axis; the second motor that rotates the rotating body about the second axis; having A cooling liquid flow path through which the cooling liquid flows is disposed so as to pass through the support base. The table drive device according to claim 2 .

10. The air intake of the supply duct is a side opening. The air outlet of the exhaust duct opens upward.

3. The table drive device according to claim 1 or 2.

11. A machining head that supports a tool for machining a workpiece; A moving device that moves the processing head; Table drive device Equipped with The table drive device is A table device having a table for supporting the workpiece; A support base for supporting the table device; a first motor having a first portion in contact with the support base and a second portion disposed at a position farther from the support base than the first portion, the first motor moving the table device relative to the support base; a cooling device for cooling the first motor; Equipped with The cooling device includes: A fan that gives momentum to the air, a supply duct for supplying the air to the first portion of the first motor; an exhaust duct that exhausts the air from around the second portion of the first motor; have Machine tools.

12. Further, an outer wall is provided surrounding the table drive device and the processing head in a plan view, A first end of the supply duct is connected to a first opening formed in the outer wall. The machine tool according to claim 11.

13. The air outlet of the exhaust duct is disposed inside the outer wall in a plan view. The machine tool according to claim 12.

14. a base structure that movably supports a structure including the processing head; a cover surrounding the first motor; Equipped with The cover includes a first wall disposed between the first motor and the base structure. A machine tool according to claim 12 or 13.

15. cooling the first motor in contact with the support base; A step of fixing a workpiece to a table of a table device; a step of moving the table device relative to the support base that supports the table device by using a driving force of the first motor; machining the workpiece using a tool; Equipped with The step of cooling the first motor includes: imparting momentum to the air using a fan; supplying the air from a supply duct to a first portion of the first motor; cooling the first motor using the air by flowing the air in a direction away from the support base from the first portion of the first motor toward a second portion of the first motor; exhausting the air from around the second portion of the first motor through an exhaust duct; Includes Workpiece processing method.

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