Base cooperation system and platform

Abstract

The purpose of the present invention is to provide a technology which enables data acquisition of only the necessary data, of disclosable data of a device group including semiconductor manufacturing devices other than those in the own base, by accessing another base from the own base.　This base cooperation system accesses, from a first base, a second base which is different from the first base where a first computer and a second computer are arranged, and acquires disclosed data in the second base. In the base cooperation system, an arrival route to the disclosed data is set by the first computer, communication to the disclosed data is permitted for an apparatus on the arrival route, the disclosed data is accessed by the second computer, a server in the first base has an area in which the disclosed data is stored, the disclosed data is copied to the area or is referred to by the second computer, and communication between the area and the bases other than the first base is prohibited by the first computer.

Description

Branch collaboration system and platform

[0001] The present invention relates to a base collaboration system and a platform.

[0002] Evaluation and manufacturing of a single process in semiconductor manufacturing is generally done through collaboration among multiple bases, with the work divided among them. Progress management data or production data for a process in semiconductor manufacturing at one base is checked at other bases and used to improve operation rates and productivity. In this way, data needs to be shared between bases to collaborate on business. However, this data is highly confidential and cannot be made public on external networks. Mutual checking of data between bases requires security measures.

[0003] As a technology for viewing data from a remote location, Patent Document 1 discloses a system for monitoring products deployed on a mobile platform and distributing data related to the deployed products. A server deployed on the mobile platform and the products are capable of two-way communication, allowing access from a remote location to remotely diagnose the products and upload information to the server, which can then be viewed by related parties.

[0004] Japanese Patent Application Laid-Open No. 2003-271758

[0005] In Patent Document 1, data is centralized in a central server, making it impossible to share data with disclosure restrictions at each location. Furthermore, each location must select the data that can be made public. If selection is insufficient, security risks arise when uploading data to the central server. Furthermore, if all publicly available data, not just data required by other locations, is uploaded, the central server must have enormous processing power to handle the large amount of data.

[0006] As such, in conventional technology, data related to semiconductor manufacturing had issues such as the time it took to upload and download data and the unevenness of server capacity, so it was common to have a server for management at each location.

[0007] The object of the present invention is to provide a technology that enables a site to access other sites and obtain only the necessary data from a group of equipment, including semiconductor manufacturing equipment at sites other than the site, that can be made public.

[0008] In order to solve the above-mentioned problems, one representative base collaboration system of the present invention is a base collaboration system in which a first base where a first computer and a second computer are located accesses a second base different from the first base to obtain published data of the second base, wherein a route to the published data is set by the first computer, communication to the published data is permitted for devices on the route, the published data is accessed by the second computer, a server within the first base has an area in which the published data is stored, the second computer copies the published data to the area or references the published data, and communication between bases other than the first base and the area is prohibited by the first computer.

[0009] According to the present invention, it is possible to access from one site to another site only the necessary data of a group of equipment, including semiconductor manufacturing equipment, that can be made public. Problems, configurations, and effects other than those described above will become clear from the description of the following embodiments.

[0010] FIG. 1 is a diagram showing the configuration of a site collaboration system using a platform and a group of devices including semiconductor manufacturing devices. FIG. 2 is a diagram showing the flow of operations performed by a user in the site collaboration system of FIG. 1. FIG. 3 is a diagram showing an example of an etching demonstration for a customer using the site collaboration system within the flowchart of FIG. 2. FIG. 4 is a flowchart showing the use of a BI tool when deriving the progress management index of FIG. 3 from public data. FIG. 5 is a diagram showing details of data processing up to the extraction of the progress management index. FIG. 6 is a diagram showing differences in the configuration of the server and mirror server compared to the site collaboration system of FIG. 1.

[0011] In this disclosure, the term "base" refers to a location where a specific activity is carried out. For example, a "production base" refers to a location where production equipment and other facilities are located and where production and related activities can be carried out. Specific examples of bases include corporate offices, research laboratories, and production factories. Furthermore, "access" refers to reaching and acquiring information held by an object.

[0012] The base collaboration system of the present invention has a platform equipped with a communication network that includes a gateway computer 102 having a data collection program, a data path setting computer 103, and various databases (server 104, databases provided in mirror server 105 at base B, and mirror server 109 at base C).

[0013] [First Embodiment] A first embodiment of the present invention will be described below with reference to FIG. 1. FIG. 1 is a diagram illustrating the configuration of a base linkage system 1 using a platform and a group of devices including semiconductor manufacturing devices. In the base linkage system 1, a first base, where a first computer (hereinafter also referred to as a "data path setting computer") and a second computer (hereinafter also referred to as a "gateway computer") are located, accesses a second base different from the first base to acquire publicly available data (hereinafter also referred to as "publicly available data") from the second base. The gateway computer functions as an access computer that enables access to bases other than the base where the communication network including the gateway computer is located. The platform includes a first computer within the first base, a second computer within the first base, and a server within the first base, and accesses the second base different from the first base to acquire publicly available data from the second base. The system configuration will be described below.

[0014] (System Configuration) System 1 includes base stations A to C. Base station A has communication network 10. Base station B has communication network 11. Base station C has communication network 12. Communication networks 10 to 12 are independent communication networks limited to the scope of each base station, and in principle, communication is limited within the communication network at each base station. In addition, the first base station is connected to the second and third base stations via a network. In the following description, the first base station is base station A, the second base station is classical B, and the third base station is base station C, but the present disclosure is not limited to this. It is also possible for the first base station to be base station A, the second base station to be base station C, and the third base station to be base station B. Specifically, Internet 107 and Internet 117 are provided between base station A and base station B. Internet 117 and Internet 127 are provided between base station B and base station C. Internet 107 and Internet 127 are provided between base station A and base station C. The Internet is shown as an example of a network, and the present disclosure is not limited to the Internet. Any communication means can be appropriately selected and applied as the network of the present disclosure.

[0015] In communication network 10 at base A, user computer 100 at base A, semiconductor manufacturing line computer group 101, gateway computer 102, data path setting computer 103, server 104, mirror server 105 at base B, and mirror server 109 at base C are connected so as to enable communication with each other. Of these, the communication network formed by gateway computer 102, data path setting computer 103, server 104, mirror server 105 at base B, and mirror server 109 at base C is called platform 108. In communication network 11 at base B, user computer 110 at base B, semiconductor manufacturing line computer group 111, gateway computer 112, data path setting computer 113, server 114, mirror server 115 at base A, and mirror server 119 at base C are connected so as to enable communication with each other. Of these, the communication network formed by the gateway computer 112, data path setting computer 113, server 114, mirror server 115 at site A, and mirror server 119 at site C is called platform 118. In addition, in the communication network 12 at site C, the user computer 120 at site C, the gateway computer 122, data path setting computer 123, server 124, mirror server 125 at site A, and mirror server 129 at site B are connected so as to enable communication with each other. Of these, the communication network formed by the gateway computer 122, data path setting computer 123, server 124, mirror server 125 at site A, and mirror server 129 at site B is called platform 128. In the following explanation, explanation of common configurations may be omitted.

[0016] The user computer 100 in the base A is connected to devices in the communication network 10 of the base A. A user at the base A can use the user computer 100 in the base A to access the semiconductor manufacturing equipment, servers, etc. in the base A.

[0017] The first or second site is equipped with a group of devices including semiconductor manufacturing equipment, semiconductor inspection equipment, or semiconductor measurement equipment. Specifically, for example, if site A has a semiconductor manufacturing factory, the semiconductor manufacturing line computer group 101 controls the semiconductor manufacturing equipment and other components that make up the manufacturing line within the semiconductor manufacturing factory. The semiconductor manufacturing line computer group 101 controls the semiconductor manufacturing equipment based on a processing recipe related to process sequences and control parameters, and acquires data indicating the results of processing performed by the semiconductor manufacturing equipment. The acquired data is sent to the server 104 via the gateway computer 102. Details will be described later. In the first embodiment, the semiconductor manufacturing line will be described as a manufacturing line that includes an etching device. Furthermore, the semiconductor manufacturing line computer group 10 is not limited to being composed of multiple computers. The semiconductor manufacturing line computer group 10 can also be composed of a single computer.

[0018] Furthermore, the server within the base stores the equipment ID and the file extension of the output data as equipment master. Specifically, the semiconductor production line computer group 101 assigns an equipment ID to each semiconductor production device, associates the file extension of the output data output from the semiconductor production device with each equipment ID, and manages the file extension, which is stored as equipment master in the server 104. Examples of file extensions include ".txt" for text data, ".gif" for image data, and ".csv" for a CSV file.

[0019] The semiconductor manufacturing line includes at least one of semiconductor manufacturing equipment, semiconductor inspection equipment, and semiconductor measurement equipment. At least one of the multiple bases has an equipment group including at least one of semiconductor manufacturing equipment, semiconductor inspection equipment, and semiconductor measurement equipment. The semiconductor manufacturing equipment may include, in addition to etching equipment, plasma CVD equipment, ashing equipment, surface modification equipment, etc. Note that, although base A is assumed to be a semiconductor manufacturing factory, the present disclosure is not limited thereto. It may also be a development line or a prototype line.

[0020] Gateway computer 102 has the function of relaying data exchange between user computer 100 at site A, the semiconductor production line computers, and the server group (server 104, mirror server 105 at site B, and mirror server 109 at site C). Gateway computer 102 has a data collection program that references the equipment master and collects from semiconductor production line computer group 101 only data associated with an equipment ID and data extension that match the equipment ID and data extension indicated in the equipment master. When user computer 100 at site A requests access to semiconductor production line computer group 101, gateway computer 102 acquires the data from semiconductor production line computer group 101 based on the data collection program.

[0021] In addition, when accessing a group of servers (server 104, mirror server 105 at base B, and mirror server 109 at base C), the gateway computer 102 permits access to the group of servers based on the user ID, etc. specified by the user computer 100 at base A.

[0022] When the route setting computer 103 connects to the communication network 11 of site B or the communication network 12 of site C to acquire data, the gateway computer sets a destination route, which is the route to the public data stored on the server at each site. In addition, communication to the public data is permitted for devices on the destination route, and the route setting computer 103 adds the gateway computer 102 to the public range of the public data. As a result, the public data is accessed by the gateway computer 102. In the site linkage system 1, data acquisition may be permitted between the communication network 10 and the communication network 12. The route setting computer 103 manages the acquisition of data between the communication networks. The functions of the route setting computer 103 will be described in detail later.

[0023] The server 104 presents data in response to a request from the user computer 100 in base A. The server 104 also stores data sent from the equipment master and the semiconductor manufacturing line computer group 101. Note that, although an example in which the server 104 is configured as a single device is shown, the present disclosure is not limited to this. The server may also be configured to be separated into a database server, an application server, a web server, etc., according to function.

[0024] The mirror server 105 at the site B is basically a server that has the same functions and data as the server 114 at the site B. The mirror server 109 at the site C is basically a server that has the same functions and data as the server 124 at the site C.

[0025] In this way, the mirror server in base A has an area within base A where public data of bases other than base A is stored. Note that, although the mirror server 105 at base B and the mirror server 109 at base C are described as separate servers, the present disclosure is not limited to this. The mirror server may be a single server. Also, the server 104, the mirror server 105 at base B, and the mirror server 109 at base C may be configured as a single server. It is also possible to configure a single server to have an area for storing data as server 104, an area for storing data as the mirror server 105 at base B, and an area for storing data as the mirror server 109 at base C. Furthermore, the data stored on the servers in the first base (server 104, mirror server 105 at base B, and mirror server 109 at base C) includes data collected from the device group or data obtained by processing data collected from the device group.

[0026] The communication network 11 at the base B has the same configuration as the communication network 10 at the base A.

[0027] Furthermore, the communication network 12 at the base C has the same configuration as the communication network 10 at the base A, except that it does not have a configuration equivalent to the semiconductor manufacturing line computer group 101. Base C is assumed to be, for example, a research institute that does not have a manufacturing line, a design center that performs design, or the like.

[0028] The communication network 10 at site A, the communication network 11 at site B, and the communication network 12 at site C are each independent communication networks. On the other hand, the remote monitor 106 and the off-site user computer 121 can communicate with the communication network 10 via the Internet 107. Furthermore, the remote monitor 106 and the off-site user computer 121 can communicate with the communication network 12 via the Internet 117. Furthermore, the remote monitor 106 and the off-site user computer 121 can communicate with the communication network 12 via the Internet 127.

[0029] (When data is acquired at the site A) At site A, a process recipe for performing etching is input to semiconductor manufacturing line computer group 101 and executed. After execution, the etching equipment transmits instruction values ​​according to the recipe to each device in the etching equipment, and the etching is performed. The process recipe used for the etching is saved in semiconductor manufacturing line computer group 101.

[0030] The etched wafer is transported to a semiconductor inspection device, a semiconductor analysis device, or a semiconductor analyzer, and each measurement recipe is input into semiconductor manufacturing line computer group 101, and predetermined measurements are performed. Data showing the measurement results is stored in semiconductor manufacturing line computer group 101.

[0031] The data path setting computer 103 determines whether data including process recipes and measurement results stored in the semiconductor manufacturing line computer group 101 can be accessed, and specifies the flow of data (routing). For example, the data path setting computer 103 selects public data and private data from the data stored in the server 104. Public data is data that is made public upon request from a device outside of site A. Examples of devices outside of site A include the user computer 110 in site B and the user computer 120 in site C. It can also be said that public data is data that is made accessible upon request from a device other than the gateway computer. Private data is data that is prohibited from being made public upon request from a device outside of site A.

[0032] The method for setting public or private data is not limited to this. For example, private data can be set to be made public only upon request from the gateway computer 112 at site A and the gateway computer 122 at site B.

[0033] Data routing computer 103 also performs routing and defines the path of data. For public data, it defines the path along which data is transmitted when requested from networks 11 and 12. For example, data routing computer 103 may authorize gateway computer 112 and gateway computer 122 to access network 10. For private data, the data path may be selected by the user, or data routing computer 103 may dynamically select the path.

[0034] The gateway computer 102 executes the data collection program, accesses the equipment master, and acquires data permitted by the equipment master from the equipment group. The permitted data is stored in the server 104 at site A. The gateway computer 102 executes the built-in data collection program, accesses the semiconductor manufacturing line computer group 101 according to the specified data path, and collects data on the semiconductor manufacturing equipment. The collected data is stored in the server 104.

[0035] The server 104 manages the data collected by the gateway computer 102 by dividing it into public data and private data. The management method is not limited to public data and private data. The management method may also be divided by category or level within the database held by the server 104. For example, categories may be considered to be by equipment such as semiconductor manufacturing equipment, semiconductor inspection equipment, semiconductor analysis equipment, and semiconductor analysis equipment, or by production line lot. Furthermore, as for levels, even for etching and private data, it is considered to set a separate information management level, such as limiting the users who can access it within base A.

[0036] The server 104 also registers authentication information for logging in to the platform 108. The server 104 accepts user input via the user computer 100 in site A, registers the user ID and password, and performs authentication at the time of login.

[0037] The user logs in to the platform 108 from the user computer 100 in site A based on authentication information and selects a device ID or file extension registered in the device master in the platform. The server 104 presents the data identified by the specified device ID or file extension to the user.

[0038] As described above, at base A, a user can obtain data (public data and private data) at base A via base A user computer 100. When data at base B is obtained via base B user computer 110, and when data at base C is obtained via base C user computer 120, the same process can be carried out as at base A.

[0039] (When acquiring public data from other locations) The server 104 registers the user IDs and passwords of the gateway computers 112 and 122 as authentication information for logging in to the platform 108. The server 114 also registers the user IDs and passwords of the gateway computers 102 and 122 as authentication information for logging in to the platform 118. The server 124 also registers the user IDs and passwords of the gateway computers 102 and 112 as authentication information for logging in to the platform 128.

[0040] For example, when the gateway computer 102 at site A accesses the platform 118 at site B, even when obtaining data classified as public data at site B, the user ID and password of the gateway computer 102 at site A must be registered in the platform 118 at site B. In other words, when the gateway computer 102 accesses the server 114 at site B, authentication information for the platform 118 that includes the server at site B is required. For example, when a request to access public data at site B is made, the gateway computer 112 at site B allows site A to access the public data based on the request if the authentication information at the time of the request matches the registered authentication information. In this way, by using the authentication information of a gateway computer at another site for logging in to a platform at one site, the route accessible from outside the communication network is limited to routes that go through the gateway computer, making it possible to prevent unauthorized access to data within the platform from external networks.

[0041] A specific example of a case where data can be acquired by an external user will be described below. For example, when public data at site B is acquired from site A, the data path setting computer 113 at site B sets the gateway computer 102 at site A as the public range of the public data on the server 114 at site B.

[0042] The gateway computer 102 has a file copy program that copies public data to an area where the public data is stored or references the public data by the gateway computer 102. The gateway computer 102 at site A passes authentication by the platform 118 via the Internet 107 and accesses the server 114 at site B. The gateway computer 102 executes the program to copy or reference the public data at site B and obtain it.

[0043] The acquired public data from site B passes authentication by platform 108 at site A and is stored in mirror server 105 at site B. Furthermore, communication between sites other than the first site and the area in which the public data of the server at the first site is stored is prohibited by the data path setting computer at the first site. Specifically, the mirror server 105 at site B is prohibited from communicating outside site A by the data path setting computer 103. In this way, the acquired public data is handled only within site A, and site A can view and edit the public data from site B stored on mirror server 105 at site B.

[0044] Other locations, including location B and location C, where no equipment exists, can also introduce a system similar to location A, making it possible to obtain, view, and edit public data from other locations without security risks.

[0045] The scope of disclosure of public data may be gateway computers at a plurality of locations, or may be limited to gateway computers at a specific location.

[0046] (Variation of the First Embodiment) It is also possible to permit access to the platform even when a request is received from a device that is not included in the communication network of the base. For example, the server 104 registers the user IDs and passwords of the remote monitor 106 and the off-base user computer 121 as authentication information for logging in to the platform 108. When a request is received from the remote monitor 106 or the off-base user computer 121, the gateway computer 102 can also obtain data from various servers within the platform 108.

[0047] (Actions and Effects) In Example 1, the route setting computer selects public data and private data, and the data uploaded from one location to the mirror server at another location is limited. Because the amount of data uploaded is reduced, it is possible to utilize data obtained at another location at another location while minimizing the processing power of the mirror server. Furthermore, when there is a request to obtain data from outside the location, only access via the gateway computer is permitted. Because access to data is prohibited for requests from devices for which authentication information is not registered, security risks can be reduced.

[0048] [Embodiment 2] Embodiment 2 of the present invention will be described with reference to Fig. 2. Fig. 2 is a diagram showing the flow of a user's work in the base collaboration system 1 of Fig. 1. This is an example in which manager A at base A gives instructions to manager B at base B.

[0049] First, at base B, manager B gives instructions for semiconductor processing to workers (step S21). Based on the instructions, the workers input the operating conditions of the semiconductor manufacturing equipment into semiconductor production line computers 111 to perform semiconductor processing (step S22), and obtain raw data (data before editing, original data) showing the processing results (step S23). The raw data is obtained by semiconductor production line computers 111 and set as public data or private data by route setting computer 113.

[0050] The raw data is further processed by, for example, the server 114, and converted into a form that can be read by a BI (Business Intelligence) tool. The processed data may include text data such as a weekly report showing the impressions of workers. In response to a user request obtained via the user computer 110 in site B, the processed data is read into, for example, a BI tool provided by the server 114, and converted into visualized data such as graphs (step S25).

[0051] Next, the progress management indicators for the work are extracted from the visualized data. For example, the progress management indicators for the work are extracted from the visualized data by the manager B who has received the visualized data, or the progress management indicators are derived by an analysis application including AI provided by the server 114 (step S26).

[0052] The route setting computer 113 selects the data including the progress management indicators as public data and sets the gateway computer 102 at site A as the public range. The data including the progress management indicators is acquired by the gateway computer 102 and recorded on the mirror server 105 at site B. Manager A views the progress management indicators using the user computer 100 at site A and understands the progress of the work (step S27). If there is a problem with the progress of the work, Manager A again issues instructions to Manager B based on the progress management indicators (step S28).

[0053] (Actions and Effects) Of the data acquired at site B, data including progress management indicators is selected as public data. Data including progress management indicators is compressed in size compared to raw data. Because the amount of data uploaded to the mirror server 105 at site B can be reduced, data acquired at another site can be utilized at another site while reducing the processing capacity of the mirror server. In addition, because progress management indicators can be viewed at other sites, a manager at one site can manage progress at other sites.

[0054] [Example 3] Fig. 3 is a diagram showing an example of a case where an etching demonstration is performed for a customer using the base collaboration system in the flowchart of Fig. 2. The diagram shows types of progress management indicators derived from public data and examples of how the progress management indicators are used.

[0055] In addition to raw data obtained from semiconductor manufacturing equipment, various types of data are utilized, such as processed raw data, visualized data, and statistical data that shows the characteristics of semiconductor manufacturing lines at a site by statistically processing raw and processed data. Examples of these utilizations are explained below.

[0056] As public data, the number of customer etching demonstrations ("Demo Number" in the figure) and the type of demonstration ("Demo Type" in the figure) are counted based on login information for applications (hereinafter also referred to as "apps"). This derives the number of app usages per user as a progress management indicator. By viewing this number of app usages, it is possible to determine whether tasks are being concentrated among specific users and, if so, to review the task allocation. Note that customer demonstrations refer to semiconductor manufacturing performed at the request of a customer, such as a device manufacturer. Note that the number of demonstrations and the type of demonstrations can be extracted, for example, based on the operation history of the semiconductor manufacturing line computers. For example, a user who operates the semiconductor manufacturing line computers 101 logs in to the user computer 101 at site A and obtains data output from the semiconductor manufacturing line computers 101. Therefore, by associating the number of demonstrations and the type of demonstrations with login information, it is possible to grasp the workload of each user.

[0057] Furthermore, the public data includes the specification values ​​desired by the customer, the current specification values ​​after the demonstration ("Current Values" in the figure), and the demonstration history, and the progress rate, which indicates the progress rate of the current specification values ​​relative to the specification values ​​desired by the customer, is calculated. This progress rate can be used to analyze unmet parts and to identify problems that are hindering the demonstration. The specification values ​​desired by the customer are stored in the server 104 by the user computer 100 at site A, for example. The current specification values ​​after the demonstration can also be values ​​based on data indicating the results output from a semiconductor analyzer or semiconductor analyzer, for example.

[0058] In addition, the demo machine status is identified as public data, and the demo machine status when abnormal data occurs is linked in chronological order to the demo machine status. This makes it possible to identify the demo machine status when abnormal data occurs, and to identify the cause of the abnormality. The demo machine is connected to a group of semiconductor production line computers, and data monitoring the operating status of the demo machine is acquired by the semiconductor production line computers.

[0059] In addition, the number of people who serve as work resources and the number of items that serve as demo resources are counted as public data, and the resource ratio for each task is calculated. This enables resource adjustment. Human resources can be calculated, for example, from the operation history of the semiconductor manufacturing line computers and the login history of the user computer 100 at site A. Furthermore, material resources can be calculated by understanding the operation of semiconductor manufacturing equipment from data output from the semiconductor manufacturing line computers, for example.

[0060] In addition, information (customers, other companies) is analyzed as public data, and the number of keywords in the weekly report is counted. This allows the importance of demonstrations related to specific keywords that appear frequently to be determined. Information about customers and other companies is, for example, attached to the process recipe when a customer demonstration is conducted. Information about customers and other companies is collected in the server 104, and the number of times that information about customers and other companies appears in the weekly report is counted.

[0061] In addition, common data such as the etching rate of a single-film wafer (shown as "solid wafer rate" in the figure) is used as public data. Here, solid wafer rates are collected and analyzed for components commonly contained in customer wafers. For example, the uniformity of the etching rate is calculated as a progress management indicator, which makes it possible to identify the cause of yield deterioration. Common data can be extracted, for example, by using specific manufacturing conditions as a key in a semiconductor manufacturing line computer group.

[0062] In addition, the schedule is analyzed as public data to identify the current position relative to the release (e.g., planned release) of the customer's device. This makes it possible to identify demonstrations that are likely to be delayed. For example, a schedule including due dates can be stored in the server 104 by the user. The server 104 calculates the expected end date of the demonstration based on the remaining number of planned process recipes and the expected execution time of the process recipes in the semiconductor manufacturing line computer group 101, and presents a comparison with the schedule.

[0063] (Operation and Effect) By extracting progress management indicators from public data in a customer demonstration, it becomes possible to deal with problems that may arise during the customer demonstration.

[0064] Fourth Embodiment FIG. 4 shows a flowchart for the case where a BI tool is used when the progress management index of FIG. 3 is derived from public data.

[0065] First, a server at each base collects data on semiconductor devices, and periodically causes the semiconductor manufacturing line computers to output tsv files containing various types of device information via a gateway computer, and stores the files (step S41).

[0066] The server then edits the data in the tsv file (step S42). The server processes the data by vertically merging periodically acquired files to generate information that includes changes over time. The server then loads the processed information into the BI tool (step S43). If there are multiple file types, the server links columns common to each file to create relations (step S44), thereby establishing interrelationships and linking the data. Since linking can be difficult depending on the type of graph, a new table is created in the BI tool as needed (step S45). The linked data or new table is read, and a graph is created (step S46). When a new tsv file is generated, the server adds it to the existing file and loads it into the BI tool, updating the graph data (step S47). By repeating this process (steps S46 and S46), the graph is updated, and progress management indicators are extracted from the updated graph.

[0067] (Actions and Effects) By providing a BI tool to the server, if there is progress on the semiconductor manufacturing line, it becomes possible to update the progress management index and present it to the user. Because the user can grasp the changes in the progress management index, it becomes possible to allocate work within a base and between bases in real time (instantaneous).

[0068] [Example 5] Figure 5 is a diagram showing details of data processing up to the extraction of progress management indicators. Communication networks 11 to 13 are each independent communication networks and are basically so-called closed networks that cannot be directly accessed from outside the communication networks. Here, communication networks 11 to 13 are shown as closed network 130, and details of data processing will be explained. Servers A to C in Figure 5 are assumed to be, for example, server 104 at base A, mirror server 105 at base B, and mirror server 109 at base C.

[0069] In FIG. 5, in a closed network 130, a server on the closed network is connected to semiconductor manufacturing equipment, and is capable of collecting information on the status and settings of the equipment and outputting it to the user.

[0070] Server A outputs Data 1 and Data 2, Server B outputs Data 3 and Data 4, and Server C outputs Data 5. A collection of Data 1 to Data 5 is called an output data file 131. After the data in the output data file 131 from the server is read into the BI tool, statistical processing, data processing, AI processing methods, and data processing of a data set 137, which is the post-processing results, etc., are performed on the data table recognized on the BI tool, and visualization and data analysis are performed.

[0071] Although data tables A 132 to E 136 are given as examples of data processing, a wide variety of processing can be realized by creating program scripts.

[0072] Data table A132 created from output data file 131 loaded into the BI tool represents a case where Data 1 to Data 5 are used individually. New data table B133 created by joining part of Data 2 to Data 1 represents a case where new Data 1' is created by adding a part of Data 2 that is not present in Data 1 to Data 1.

[0073] Also, a new data table C134 created by partially combining existing data files indicates that new data 6 is to be created.

[0074] Furthermore, the data table D135, which is the result of the program script on the BI tool and the statistical processing or processing of the data by that script, shows how each piece of data is processed by the program script for statistical processing or data processing that is preset in the BI tool. As a result, it becomes possible to generate and analyze new data.

[0075] Additionally, a data table E136 is shown as a method for performing AI processing to determine the trends in the aforementioned data and extract abnormal points.

[0076] The BI tool 138 receives the above data tables and visualizes them, and can obtain graphs and tables, etc., of the progress management screen 140 presented by the server, for example.

[0077] (Actions and Effects) Because the BI tool is software that runs on a server or personal computer, the device on which the BI tool runs resides on the Internet 139 and is able to access data files output by a server on the closed network 130. This allows information within the closed network to be analyzed using external information via the Internet. Furthermore, the inclusion of AI makes it possible to analyze a variety of information, such as merging information and extracting trends. Note that the BI tool can be used, for example, on-site user computers, remote monitors, and off-site user computers.

[0078] [Example 6] Example 6 differs from Example 1 (FIG. 1) in that the configurations of the server and mirror server are changed. In the following explanation, differences from Example 1 will be explained, and components that are the same as or equivalent to those in Example 1 described above will be assigned the same reference numerals, and their explanation will be simplified or omitted.

[0079] Figure 6 is a diagram showing differences in the configuration of the server and mirror server compared to the base collaboration system of Figure 1. The non-sharable server 150 and the sharable server 152 in the base collaboration system 1a of Figure 6 correspond to the server 104 in the base collaboration system of Figure 1. The non-sharable server 160 and the sharable server 162 in the base collaboration system 1a of Figure 6 correspond to the server 114 in the base collaboration system of Figure 1. The non-sharable server 170 and the sharable server 172 in the base collaboration system 1a of Figure 6 correspond to the server 124 in the base collaboration system of Figure 1.

[0080] The network within the platform at the second base is divided into a first network (hereinafter also referred to as an "intra-base private environment") that can communicate with bases other than the second base, and a second network (hereinafter also referred to as an "intra-base public environment") that cannot communicate with bases other than the second base. Specifically, at base A, an environment divided into an intra-base private environment 155 and an intra-base public environment 156 is set within platform 108. The intra-base private environment 155 is an environment that does not allow communication with bases outside base A, while the intra-base public environment 156 is an environment that allows communication with bases outside base A. Similarly, at base B, platform 118 is divided into an intra-base private environment 165 and an intra-base public environment 166. At base C, platform 128 is divided into an intra-base private environment 175 and an intra-base public environment 176.

[0081] In the intra-site private environment 155, there are arranged a non-shareable server 150 which is a server that stores data that cannot be shared with the outside of site A, and a non-shareable mirror server 151 which is a mirror server that stores data acquired from sites B and C that cannot be shared with the outside of site A. External access to the non-shareable server 150 and the non-shareable mirror server 151 is prohibited by the data path setting computer 103, ensuring the confidentiality and security of the stored data.

[0082] The published data is stored in a database connected to the first network, and the published data stored in the database connected to the first network is stored in a database connected to the cloud network. Specifically, in the intra-site public environment 156, a sharable server 152 that is a server that stores data that can be shared with an outside of site A (e.g., published data) and a sharable mirror server 153 that is a mirror server that stores data that can be shared with an outside of site A among data acquired from sites B and C are disposed. The sharable server 152 and the sharable mirror server 153 are permitted to communicate with an outside of site A by the data path setting computer 103, and the gateway computer 102 can upload data that can be supplied to the inter-site common cloud environment 184 that connects multiple sites via the Internet 154.

[0083] The non-sharable server 160, the non-sharable mirror server 161, the sharable server 162, and the sharable mirror server 163 at base B, and the non-sharable server 170, the non-sharable mirror server 171, the sharable server 172, and the sharable mirror server 173 at base C have the same system configuration as the non-sharable server 150, the non-sharable mirror server 151, the sharable server 152, and the sharable mirror server 153 at base A. Shareable data stored in the sharable server 162 and the sharable mirror server 163 at base B can be uploaded to the inter-base shared cloud environment 184 via the Internet 164. Shareable data stored in the sharable server 172 and the sharable mirror server 173 at base C can be uploaded to the inter-base shared cloud environment 184 via the Internet 174.

[0084] Gateway computer 102 also has a file copy program that stores sharable data in a database in inter-site shared cloud environment 184. By executing this program, sharable data uploaded from each site in inter-site shared cloud environment 184 is stored in a database in cloud server 180, and it becomes possible to access the data stored in cloud server 180 from remote monitor 182.

[0085] It is also possible to deploy the visualization tool or data analysis application 183 in the inter-site shared cloud environment 184 and use it for progress management of the site cooperation system 1a. The visualization tool or data analysis application 183 inputs public data and visualizes or analyzes the progress of semiconductor device manufacturing based on the public data.

[0086] (Operations and Effects) As described above, by storing highly confidential data in an area that cannot be shared with outside the base, a private network environment (non-public) can be created. Furthermore, since the private environment cannot communicate with outside the base, it is possible to prevent, for example, highly confidential customer data from leaking outside the base.

[0087] Furthermore, in a private environment within a base, unnecessary access from outside is prevented and access volume can be managed, making it possible to maintain constant communication speed and stability. Separating an environment that can be accessed from outside and an environment that cannot be accessed from outside to ensure the security of highly confidential data is expected to have various uses. For example, if a manufacturing base of a semiconductor manufacturer is one of the components of the base linkage system 1a, and public data is made available for sharing and provided to customers such as trading companies and industrial equipment manufacturers, the big data held by the customer and the public data can be used as input conditions for Examples 1 to 5, allowing feedback to the manufacturer's manufacturing progress management.

[0088] Furthermore, data can be compared between bases by using a visualization tool or data analysis application 183. This allows the manager to manage the progress between bases and issue instructions to each base via the remote monitor 182. Furthermore, people outside the bases can also manage the progress.

[0089] In the above embodiments, a computer is used for explanation, but a virtual area, a server, or a mobile terminal may be used instead of a computer terminal. Furthermore, the communication method for the communication network within the base may be SMB communication, FTP communication, NFS communication, or other communication method. Furthermore, a computer may be used as the remote monitor.

[0090] Furthermore, in the above embodiment, an etching device has been described as an example of semiconductor manufacturing equipment, but the same effects can be obtained with other manufacturing equipment, such as a plasma CVD device, an ashing device, and a surface modification device.

[0091] Although the embodiments of the present invention have been described above, the present invention is not limited to the above-described embodiments, and various modifications are possible within the scope of the gist of the present invention.

[0092] [Other Aspects] The following are some possible aspects of the present invention, but the present invention is not limited to these. (Aspect 1) A site collaboration system in which a first site, where a first computer and a second computer are located, accesses a second site different from the first site to acquire published data of the second site, wherein a route to the published data is set by the first computer, communication to the published data is permitted for devices on the route, the published data is accessed by the second computer, a server in the first site has an area in which the published data is stored, the second computer copies the published data to the area or references the published data, and communication between sites other than the first site and the area is prohibited by the first computer. (Aspect 2) The site collaboration system described in Aspect 1, wherein the first site is connected to the second site and a third site via a network. (Aspect 3) A base collaboration system according to Aspect 1 or 2, characterized in that the first base is base A, the second base is base B, and the third base is base C. (Aspect 4) A base collaboration system according to any one of Aspects 1 to 3, characterized in that the first base is base A, the second base is base C, and the third base is base B. (Aspect 5) A base collaboration system according to any one of Aspects 1 to 4, characterized in that a network within the platform at the second base is divided into a first network that can communicate with bases other than the second base and a second network that cannot communicate with bases other than the second base, the published data is stored in a database connected to the first network, and the published data stored in the database connected to the first network is stored in a database connected to the cloud network.(Aspect 6) The site collaboration system according to any one of Aspects 1 to 5, wherein the first site or the second site is equipped with a group of devices including semiconductor manufacturing equipment, semiconductor inspection equipment, or semiconductor measurement equipment. (Aspect 7) The site collaboration system according to any one of Aspects 1 to 6, wherein the data stored in the server at the first site includes data collected from the group of devices or data obtained by processing the data collected from the group of devices. (Aspect 8) The site collaboration system according to any one of Aspects 1 to 7, wherein when the second computer accesses the server at the second site, authentication information for a platform comprising the server at the second site is required. (Aspect 9) The site collaboration system according to any one of Aspects 1 to 8, wherein the server at the second site stores a device ID and a file extension of output data as a device master, the second computer acquires data permitted in the device master from the group of devices, and the permitted data is stored in the server at the first site. (Aspect 10) The site collaboration system according to any one of aspects 1 to 9, wherein progress of semiconductor device manufacturing is visualized or analyzed based on the published data.(Aspect 11) A platform comprising a first computer within a first location, a second computer within the first location, and a server within the first location, the platform accessing a second location different from the first location from the first location to acquire published data of the second location, wherein a route to the published data is set by the first computer, communication to the published data is permitted for devices on the route, the published data is accessed by the second computer, the server has an area in which the published data is stored, the second computer copies the published data to the area or references the published data, and communication between locations other than the first location and the area is prohibited by the first computer. (Aspect 12) A platform according to Aspect 11, the platform being characterized in that the first location is connected to the second location and a third location via a network. (Aspect 13) The platform according to aspect 11 or 12, wherein the first location is location A, the second location is location B, and the third location is location C. (Aspect 14) The platform according to any one of aspects 11 to 13, wherein the first location is location A, the second location is location C, and the third location is location B.

[0093] 1, 1a: base linkage system, 10-12: communication network, 100: user computer in base A, 101: semiconductor manufacturing line computer group, 102: gateway computer, 103: data path setting computer, 104: server, 105: mirror server in base B, 106: remote monitor, 107: Internet, 108: platform, 109: mirror server in base C, 110: user computer in base B, 111: semiconductor manufacturing line computer group, 112: gateway computer, 113: data path Setting computer, 114: Server, 115: Mirror server at site A, 117: Internet, 118: Platform, 119: Mirror server at site C, 120: User computer at site C, 121: User computer outside site, 122: Gateway computer, 123: Data path setting computer, 124: Server, 125: Mirror server at site A, 127: Internet, 128: Platform, 129: Mirror server at site B, 130: Closed network, 131: Output data file , 132: Data table A, 133: Data table B, 134: Data table C, 135: Data table D, 136: Data table E, 137: Data set, 138: BI tool, 139: Internet, 140: Progress management screen, 150: Non-shareable server, 151: Non-shareable mirror server, 152: Shareable server, 153: Shareable mirror server, 154: Internet, 155: Private environment within the base, 156: Public environment within the base, 160: Non-shareable server, 161: Non-shareable mirror server, 162: Shareable server, 163: Shareable mirror server, 164: Internet, 165: Private environment of base B, 166: Public environment of base B, 170: Non-shareable server, 171: Non-shareable mirror server, 172: Shareable server, 173: Shareable mirror server, 174: Internet, 175: Private environment of base C, 176: Public environment of base C, 180: Cloud server, 182: Remote monitor, 183: Visualization tool or data analysis application, 184: Cloud environment common between bases

Claims

1. A site cooperation system in which a first site where a first computer and a second computer are located accesses a second site different from the first site to acquire publicly available data of the second site, A route to the published data is set by the first computer; Communication to the published data is permitted to devices on the route of arrival; the published data is accessed by the second computer; the server in the first base has an area in which the published data is stored; The second computer copies the published data to the area or references the published data, A base cooperation system, characterized in that communication between bases other than the first base and the area is prohibited by the first computer.

2. In the site cooperation system according to claim 1 , A site cooperation system, wherein the first site is connected to the second site and the third site via a network.

3. In the site cooperation system according to claim 2, The first base is base A, The second base is base B, A base linking system, wherein the third base is base C.

4. In the site cooperation system according to claim 2, The first base is base A, The second base is a base C, A base linking system, wherein the third base is base B.

5. In the site cooperation system according to claim 1 , a network in the platform at the second base is divided into a first network capable of communicating with any location other than the second base and a second network not capable of communicating with any location other than the second base; The published data is stored in a database connected to the first network; A base collaboration system, characterized in that the data stored in a database connected to the first network and made public is stored in a database connected to a cloud network.

6. In the site cooperation system according to claim 1 , A site cooperation system, wherein the first site or the second site has a group of equipment including semiconductor manufacturing equipment, semiconductor inspection equipment, or semiconductor measurement equipment disposed therein.

7. In the site cooperation system according to claim 6, A base collaboration system, characterized in that the data stored in a server in the first base includes data collected from the group of devices or data that has been processed from data collected from the group of devices.

8. In the site cooperation system according to claim 7, A site cooperation system, characterized in that when the second computer accesses a server in the second site, authentication information of a platform including the server in the second site is required.

9. 9. The site cooperation system according to claim 8, the server in the second base stores the device ID and the file extension of the output data as a device master; The second computer obtains data authorized by the device master from the device group; A site cooperation system, characterized in that the permitted data is stored in a server within the first site.

10. 10. The site cooperation system according to claim 9, A site collaboration system characterized in that the progress of semiconductor device manufacturing is visualized or analyzed based on the published data.

11. A platform including a first computer in a first location, a second computer in the first location, and a server in the first location, the platform accessing a second location different from the first location from the first location to acquire published data of the second location, A route to the published data is set by the first computer; Communication to the published data is permitted to devices on the route of arrival; the published data is accessed by the second computer; The server has an area in which the published data is stored, The second computer copies the published data to the area or references the published data, A platform, characterized in that communication between the area and locations other than the first location is prohibited by the first computer.

12. The platform of claim 11, A platform, wherein the first location is connected to the second location and the third location via a network.

13. The platform of claim 12, The first base is base A, The second base is base B, The platform is characterized in that the third location is location C.

14. The platform of claim 12, The first base is base A, The second base is a base C, A platform characterized in that the third location is location B.