glass

Abstract

The present invention can provide glass which has a Young's modulus of 80 GPa or more, suppresses deflection and can be easily produced by forming an alkali-free glass in which a parameter A represented by formula (1) is 0.817 or less, a parameter B represented by formula (2) is 0.898 or more, and the ratio of the content of MgO relative to the total content of divalent oxides RO is 0.65 or more if expressed in terms of molar percentages on an oxide basis.　A = 1.747-0.022 × [SiO 2 ] +0.006 × [Al 2 O 3 ] +0.018 × [B 2 O 3 ] +0.013 × [MgO] -0.010 × [CaO] -0.003 × [SrO] +0.012 × [BaO] +0.015 × [ZnO] (1) B = 1.315-0.010 × [SiO 2 ] +0.005 × [Al 2 O 3 ] +0.023 × [B 2 O 3 ] +0.004 × [MgO] -0.016 × [CaO] -0.007 × [SrO] +0.011 × [BaO] +0.010 × [ZnO] (2)

Description

Glass

[0001] The present invention relates to glass.

[0002] Glass is sometimes used as a member for supporting a semiconductor device during the manufacturing process of the semiconductor device. For example, Patent Document 1 describes a supporting glass substrate with a high Young's modulus to suppress bending.

[0003] Japanese Patent Application Laid-Open No. 2021-20840

[0004] Glasses with high Young's modulus to suppress deflection often exhibit viscosity curves, i.e., temperature dependency of viscosity, that are unsuitable for manufacturing due to the components added to achieve the high Young's modulus, and therefore there is a demand for glass that can be manufactured more easily.

[0005] An object of the present invention is to provide a glass that is easy to manufacture while suppressing deflection.

[0006] The glass according to the present disclosure is an alkali-free glass in which parameter A shown in formula (1) is 0.817 or less, parameter B shown in formula (2) is 0.898 or more, the ratio of the content of MgO to the total content of divalent oxides RO, expressed in mole % on an oxide basis, is 0.65 or more, and Young's modulus is 80 GPa or more.

[0007] A=1.747-0.022×[SiO ２ ]+0.006×[Al ２ O ３ ]+0.018×[B ２ O ３ ]+0.013×[MgO]-0.010×[CaO]-0.003×[SrO]+0.012×[BaO]+0.015×[ZnO]...(1)

[0008] B=1.315-0.010×[SiO ２ ]+0.005×[Al ２ O ３ ]+0.023×[B ２ O ３ ]+0.004×[MgO]-0.016×[CaO]-0.007×[SrO]+0.011×[BaO]+0.010×[ZnO]...(2)

[0009] According to the present invention, it is possible to easily manufacture the device while suppressing bending.

[0010] FIG. 1 is a schematic diagram of the glass according to this embodiment.

[0011] Preferred embodiments of the present invention will be described in detail below with reference to the accompanying drawings. The present invention is not limited to these embodiments, and when there are multiple embodiments, the present invention also includes combinations of the embodiments. Numerical values ​​include rounded ranges. Numerical ranges expressed as "to" mean a range that includes the upper and lower limits of the values ​​before and after "to," and the same meaning will be used hereafter. The upper and lower limits of a numerical range can be combined as appropriate.

[0012] (Glass) FIG. 1 is a schematic diagram of glass according to this embodiment. As shown in FIG. 1, glass 10 according to this embodiment is used as a glass substrate for manufacturing semiconductor packages, and more specifically, is a supporting glass substrate for manufacturing FOWLPs and the like. However, the use of glass 10 is not limited to the manufacture of FOWLPs and the like and is arbitrary. It may be a glass substrate used to support components, or may be used for purposes other than supporting components. Note that FOWLPs and the like include fan-out wafer level packages (FOWLPs) and fan-out panel level packages (FOPLPs).

[0013] (Glass Composition) Next, a preferred composition of the glass 10 will be described.

[0014] (Parameter A) The parameter A of the glass 10 is expressed by the following formula (1).

[0015] A=1.747-0.022×[SiO ２ ]+0.006×[Al ２ O ３ ]+0.018×[B ２ O ３]+0.013×[MgO]-0.010×[CaO]-0.003×[SrO]+0.012×[BaO]+0.015×[ZnO]...(1)

[0016] In addition, the oxide A contained in the glass 10 in terms of mole percent based on oxides is ｘ O ｙ (A is an element constituting an oxide, and x and y are any integers) content is [A ｘ O ｙ The content here is expressed as the percentage of oxide A relative to the entire glass 10 in mole percent based on oxides. ｘ O ｙ That is, for example, in formula (1), [SiO ２ ] is the SiO 2 content relative to the entire glass 10 in mole percent on an oxide basis. ２ The ratio of the content of the oxides represented by formula (1) is inclusive. Furthermore, glass 10 does not necessarily contain all of the oxides represented by formula (1). In formula (1), the content of oxides not contained in glass 10 is treated as 0. Furthermore, glass 10 may contain components other than the oxides represented by formula (1).

[0017] The parameter A of glass 10 is preferably 0.817 or less, more preferably 0.813 or less, more preferably 0.809 or less, more preferably 0.802 or less, more preferably 0.796 or less, and more preferably 0.789 or less. Furthermore, parameter A is also preferably 0.781 or more, and is preferably 0.781 or more and 0.817 or less, but is also preferably 0.783 or less, preferably 0.776 or less, and is also preferably 0.770 or less. By having parameter A within this range, the temperature difference between the melting temperature and the forming temperature of glass 10 is prevented from becoming too large, thereby suppressing an increase in energy loss during the transition from the melting process to the forming process and facilitating production. Furthermore, by having parameter A within this range, the temperature difference between the forming temperature and the softening temperature is prevented from becoming too small, facilitating viscosity control during forming and facilitating production.

[0018] (Parameter B) The parameter B of the glass 10 is expressed by the following formula (2).

[0019] B=1.315-0.010×[SiO ２ ]+0.005×[Al ２ O ３ ]+0.023×[B ２ O ３ ]+0.004×[MgO]-0.016×[CaO]-0.007×[SrO]+0.011×[BaO]+0.010×[ZnO]...(2)

[0020] Glass 10 does not necessarily contain all of the oxides represented by formula (2). In formula (2), the content of oxides not contained in glass 10 is treated as 0. Furthermore, glass 10 may contain components other than the oxides represented by formula (2).

[0021] Parameter B of glass 10 is preferably 0.898 or greater, more preferably 0.901 or greater, more preferably 0.904 or greater, more preferably 0.907 or greater, more preferably 0.911 or greater, more preferably 0.915 or greater, more preferably 0.921 or greater, more preferably 0.926 or greater, and even more preferably 0.931 or greater. Parameter B of glass 10 is also preferably 0.935 or less, and is preferably 0.903 or greater and 0.935 or less. Having parameter B within this range prevents the temperature difference between the molding temperature and the softening temperature from becoming too small, facilitating viscosity control during molding and facilitating production.

[0022] (SiO ２ ) The glass 10 is SiO ２ Contains (SiO ２ In order to appropriately suppress the rise in the melting temperature and the liquidus temperature, the glass 10 preferably contains, in mole percent on an oxide basis, SiO ２The content of SiO is preferably 55.0% or more and 65.0% or less, more preferably 55% or more and 65% or less, even more preferably 57% or more and 64.5% or less, even more preferably 59% or more and 64% or less, even more preferably 61% or more and 63.5% or less, and even more preferably 61.5% or more and 62.5% or less. ２ When the content falls within this range, warping can be suppressed and manufacturing can be facilitated.

[0023] (Al ２ O ３ ) Al ２ O ３ has the effect of increasing the Young's modulus, suppressing deflection, and suppressing phase separation of the glass. ２ O ３ The glass 10 preferably contains, in mole percent on an oxide basis, Al. ２ O ３ The content of Al is preferably 3% or more and 13.0% or less, more preferably 5% or more and 11% or less, more preferably 7% or more and 9% or less, more preferably 7.0% or more and 8.5% or less, more preferably 7.2% or more and 8.5% or less, more preferably 7.4% or more and 8% or less, and even more preferably 7.5% or more and 7.7% or less. ２ O ３ When the content falls within this range, warping can be suppressed and manufacturing can be facilitated.

[0024] (B ２ O ３ ) B ２ O ３ has the effect of suppressing devitrification due to crystallization of the glass, facilitating manufacturing, and controlling the Young's modulus. ２ O ３ The glass 10 preferably contains, in mole percent on an oxide basis, B ２ O ３The content of is preferably 1.0% or more and 10.0% or less, more preferably 2% or more and 9% or less, more preferably 3% or more and 8.5% or less, more preferably 4% or more and 8% or less, more preferably 5.5% or more and 7.5% or less, more preferably 5.8% or more and 6.8% or less, and even more preferably 6% or more and 6.5% or less. ２ O ３ When the content falls within this range, warping can be suppressed and manufacturing can be facilitated.

[0025] (MgO / RO) MgO increases the Young's modulus without increasing density, and therefore has the effect of increasing the specific modulus among Group 2 elements. The ratio of the MgO content to the RO content (MgO / RO) is important in controlling the specific modulus. Therefore, in glass 10, the ratio (MgO / RO) is preferably 0.65 or more, more preferably 0.65 to 0.9, more preferably 0.68 to 0.9, more preferably 0.7 to 0.85, more preferably 0.72 to 0.8, and even more preferably 0.74 to 0.77. Here, R refers to a divalent metal, RO refers to an oxide of the divalent metal R, and the RO content refers to the total content of the divalent oxides. When multiple types of divalent oxides are contained, the total content of these divalent oxides refers to the total content of those divalent oxides. When only one type of divalent oxide is contained, the total content of that divalent oxide refers to the content of that divalent oxide. By setting the ratio (MgO / RO) within this range, warping can be suppressed and manufacturing can be facilitated.

[0026] (RO) The total content of divalent oxides RO in glass 10, expressed in mole percent on an oxide basis, is preferably 10.0% to 40.0%, more preferably 15% to 35%, more preferably 17.5% to 30%, more preferably 20% to 27.5%, more preferably 22% to 26%, more preferably 23.5% to 25%, and even more preferably 24% to 24.5%. Having the total RO content within this range facilitates manufacturing while suppressing warping.

[0027] (MgO) Since MgO can increase Young's modulus without increasing density, i.e., it is a component that increases the specific modulus, glass 10 preferably contains MgO. Furthermore, among components that increase Young's modulus, MgO is a component that easily adjusts the viscosity of the glass. For example, rare earth oxides increase Young's modulus, but they also reduce the temperature dependence of viscosity in the high-temperature range, resulting in a larger temperature difference between the melting temperature and the forming temperature. Al2O3 also increases Young's modulus and suppresses deflection, but it is highly effective in increasing the viscosity of the glass, which can impair melting characteristics and formability. MgO is also a component that contributes to the viscosity of the glass, but by adjusting its content, it is an excellent component that achieves both suppression of deflection and ease of manufacture. The MgO content of glass 10, expressed in mole percent on an oxide basis, is preferably 10.0% to 25.0%, more preferably 12% to 22%, more preferably 14% to 22%, more preferably 16% to 22%, more preferably 16.5% to 22%, more preferably 16.5% to 20%, more preferably 16.6% to 18.6%, more preferably 16.7% to 18%, and even more preferably 17% to 17.7%. Having an MgO content within this range facilitates manufacturing while suppressing warping.

[0028] (CaO) CaO has the effect of increasing the specific elastic modulus, second only to MgO among oxides of Group 2 elements. Therefore, glass 10 may be CaO-free (CaO content is 0 mol%), or may contain CaO. The CaO content of glass 10, expressed in mol% based on oxide, is preferably 1.0% to 10.0%, more preferably 1.1% to 7%, more preferably 1.5% to 4.2%, more preferably 1.8% to 3.7%, more preferably 2.2% to 3.4%, more preferably 2.4% to 3%, and even more preferably 2.5% to 2.7%. The CaO content within this range can facilitate manufacturing while suppressing deflection.

[0029] (SrO) SrO has the effect of increasing density and controlling Young's modulus, improving meltability. Glass 10 may contain or not contain SrO. The SrO content of glass 10, expressed in mole percent on an oxide basis, is preferably 0.1% to 5.0%, more preferably 0.1% to 3.4%, more preferably 0.5% to 3%, more preferably 0.9% to 2.6%, and even more preferably 1% to 2%. When the SrO content is within this range, manufacturing can be facilitated while suppressing deflection.

[0030] (BaO) BaO has a greater effect of increasing density than SrO and improves meltability. Glass 10 may contain BaO, but it may also contain BaO. The BaO content of glass 10, expressed in mole percent on an oxide basis, is preferably 0.1% to 5.0%, more preferably 1% to 4.8%, more preferably 1.5% to 4.7%, more preferably 2% to 4.5%, more preferably 2.5% to 4.3%, more preferably 3% to 4.1%, and even more preferably 3.3% to 3.8%. The BaO content within this range facilitates manufacturing while suppressing warping.

[0031] (ZnO) ZnO has the effect of improving the meltability of glass and increasing the Young's modulus. Therefore, the glass 10 may contain ZnO, but may not contain ZnO. By keeping the ZnO content at 10% or less, an increase in the linear thermal expansion coefficient can be suppressed. The ZnO content of the glass 10, expressed in mole percent on an oxide basis, is preferably 0.1% to 10% or less, more preferably 0.5% to 8% or less, more preferably 1% to 7% or less, more preferably 1.5% to 6% or less, more preferably 2% to 5% or less, more preferably 2.5% to 4% or less, and even more preferably 3% to 3.5% or less. By keeping the ZnO content within this range, manufacturing can be facilitated while suppressing deflection.

[0032] (Alkali Metal Oxide) The glass 10 is preferably an alkali-free glass. ２ O, Na ２ O.K. ２ The glass 10 is substantially free of alkali metal oxides such as LiO. Here, "substantially free of alkali metal oxides" means that the glass does not contain alkali metal oxides other than unavoidable impurities mixed in from raw materials, etc. In other words, it means that the glass does not intentionally contain alkali metal oxides. For example, the glass 10 contains, in mole percent based on oxides, Li, ２ The content of O is preferably 0%, and Na ２ The content of O is preferably 0%, and K ２ The O content is preferably 0%.

[0033] In addition to the above-mentioned components, oxides (sub-oxides) other than the oxides listed above may be contained in order to adjust various mechanical properties, melting properties, and moldability. The oxides listed above include SiO ２ , Al ２ O ３ , B ２ O ３ , RO (divalent oxides), and alkali metal oxides. Examples of secondary oxides include TiO ２ and ZrO ２ Metal oxides such as Y ２O ３ and rare earth oxides such as La2O3. Glass 10 may contain a total of 5% or less of suboxides, expressed in mole percent on an oxide basis, preferably 3% or less, more preferably 2% or less, even more preferably 1% or less, still more preferably 0.5% or less, still more preferably 0.3% or less, still more preferably 0.2% or less, even more preferably 0.1% or less, and it is particularly preferable that glass 10 contains substantially no suboxides.

[0034] (PbO) PbO has the effect of increasing Young's modulus, but is an oxide that places a heavy burden on the environment. Therefore, it is preferable that glass 10 does not contain PbO. In glass 10, the PbO content, expressed in mole percent based on oxide, is preferably 0.1% or less, more preferably 0.05% or less, and even more preferably 0.01% or less. By keeping the PbO content within this range, the environmental burden can be reduced.

[0035] (Fe ２ O ３ ) Glass 10 is Fe ２ O ３ It is preferable that the glass 10 does not contain Fe as an external percentage, expressed as mass % on an oxide basis. ２ O ３ The content of Fe is preferably 0.1% or less, more preferably 0.001% or more and 0.05% or less, and even more preferably 0.005% or more and 0.01% or less. ２ O ３ Such a low content of Fe can suppress the decrease in light transmittance. ２ O ３ The content of Fe is based on the oxide. ２ O ３ Fe contained in glass 10 relative to the total mass of all components of glass 10 excluding ２ O ３ It refers to the mass ratio of

[0036] (Preferable Composition of Glass) The preferred composition range of the glass 10 will be further explained below.

[0037] In order to improve the clarity of the glass, Glass 10 contains, in mass % on an oxide basis, SnO ２ , CeO ２ , Sb ２ O ３ , S.O. ３ The total amount of F and Cl can be contained in an amount of 1.0 wt % or less, preferably 0.5 wt % or less, more preferably 0.3 wt % or less, and even more preferably 0.1 wt % or less, in terms of the external ratio.

[0038] Glass 10 contains, in mole percent on an oxide basis, SiO ２ and Al ２ O ３ and B ２ O ３ The ratio of the content of RO to the total content of (RO) / (SiO ２ +Al ２ O ３ +B ２ O ３ )) is preferably 0.2 or more and 0.5 or less, more preferably 0.22 or more and 0.48 or less, more preferably 0.27 or more and 0.44 or less, more preferably 0.29 or more and 0.38 or less, more preferably 0.31 or more and 0.34 or less, and even more preferably 0.32 or more and 0.33 or less. ２ +Al ２ O ３ +B ２ O ３ )) falling within this range makes it possible to achieve both Young's modulus and solubility.

[0039] In glass 10, the total amount of SiO2, Al2O3, MgO, and CaO (SiO2 + Al2O3 + MgO + CaO), expressed in mole percent on an oxide basis, is preferably 85% to 98%, more preferably 86% to 95%, even more preferably 87% to 93%, and still more preferably 88% to 91%. Such a high lower limit for the total amount (SiO2 + Al2O3 + MgO + CaO) makes it possible to control the density and Young's modulus, and having the upper limit within this range makes it possible to suppress deterioration of solubility.

[0040] The glass 10 is Al ２ O３ The difference (Al ２ O ３ (Al -RO) is preferably -30% or more and 0% or less, more preferably -28.5% or more and -5% or less, even more preferably -25% or more and -8% or less, even more preferably -22% or more and -12% or less, even more preferably -20% or more and -14% or less, and even more preferably -18% or more and -16% or less, expressed in mole % on an oxide basis. ２ O ３ When the value of -RO) is in this range, both the Young's modulus and the solubility can be achieved.

[0041] Glass 10 contains, in mole percent on an oxide basis, SiO ２ :60.5%~61.5% Al ２ O ３ :7.2%~7.7%B ２ O ３ It is preferable that glass 10 contains the following oxides: 6.0% to 7.0%, MgO: 17.0% to 18.0%, CaO: 3.5% to 4.5%, SrO: 0.0% to 1.0%, and BaO: 2.5% to 3.5%. Having the content of each oxide within this range makes it possible to easily manufacture glass 10 while suppressing warping. Note that when the composition of glass 10 is within the above ranges, glass 10 preferably does not contain any oxides other than those listed above, except for unavoidable impurities.

[0042] It is preferable that the glass 10 does not contain a sintered body. In other words, the glass 10 is preferably a glass that is not a sintered body. The term "sintered body" as used herein refers to a component in which a plurality of particles are heated at a temperature lower than the melting point to bond the particles together. Sintered bodies have a relatively high porosity due to the inclusion of pores, but the glass 10 is not a sintered body and therefore has a low porosity, typically 0%. However, the inclusion of unavoidable traces of pores is permitted. The porosity here refers to the so-called true porosity, which is the sum of the volumes of pores (voids) that are open to the outside and pores (voids) that are not open to the outside, divided by the total volume (apparent volume). The porosity can be measured, for example, according to JIS R 1634:1998, "Method for measuring the density and open porosity of sintered fine ceramics."

[0043] The glass used for the glass 10 is preferably amorphous glass, i.e., an amorphous solid. This glass may be crystallized glass containing crystals on the surface or inside, but amorphous glass is preferred from the viewpoint of density. Among ceramics, those produced by sintering methods are preferably not used because they have low transmittance and high density.

[0044] (Shape of Glass) Next, the shape of the glass 10 will be described. As shown in FIG. 1 , the glass 10 is a plate-shaped glass substrate including a surface 12, which is one main surface, and a surface 14, which is the main surface opposite to the surface 12. The surface 14 may be parallel to the surface 12, for example. The glass 10 may have a circular disk shape when viewed in a plan view, i.e., from a direction perpendicular to the surface 12. However, the shape is not limited to a disk and may be any shape, such as a polygonal plate such as a rectangle. Note that the above shapes also include those having a notch or orientation flat provided on the outer periphery.

[0045] Furthermore, the thickness D of the glass 10, i.e., the length between the surface 12 and the surface 14, is preferably 0.1 mm or more and 5.0 mm or less, more preferably 0.1 mm or more and 2.0 mm or less, and even more preferably 0.1 mm or more and 0.7 mm or more. By setting the thickness D to 0.1 mm or more, the glass 10 can be prevented from becoming too thin, thereby suppressing breakage due to bending or impact. By setting the thickness D to 2.0 mm or less, the glass can be prevented from becoming heavy, and by setting the thickness D to 0.7 mm or less, the glass can be further prevented from becoming heavy.

[0046] (Glass Characteristics) Next, the characteristics of the glass 10 will be described.

[0047] (Young's Modulus) The Young's modulus E of the glass 10 is preferably 75 GPa or more, more preferably 77 GPa to 120 GPa, more preferably 79 GPa to 100 GPa, more preferably 81 GPa to 90 GPa, more preferably 83 GPa to 87 GPa, and even more preferably 84 GPa to 86 GPa. By setting the Young's modulus E within this range, deflection can be appropriately suppressed. If the Young's modulus is too high, cutting, grinding, and polishing become difficult.

[0048] (Young's Modulus Parameter) The Young's modulus parameter Y of the glass 10 calculated from the composition is preferably 0.9 or more, more preferably 0.95 to 1.15, more preferably 0.96 to 1.10, more preferably 0.97 to 1.05, more preferably 0.98 to 1.04, more preferably 0.99 to 1.03, and even more preferably 1.00 to 1.02. By setting the Young's modulus parameter Y in this range, the Young's modulus E can be set within the above range, and deflection can be appropriately suppressed. The Young's modulus parameter Y is calculated from the following equation (3):

[0049] Y=(60-0.244[SiO ２ ]+0.27[Al ２ O ３ ]−0.60[B ２ O ３ ]+0.63[MgO]+0.48[CaO]-0.56[SrO]-0.22[BaO]+1.37[ZnO]) / 85...(3)

[0050] (Density) The density ρ of the glass 10 is 2.4 g / cm ３ 2.9g / cm or more ３ Preferably, 2.45 g / cm or less ３ 2.85g / cm or more ３ More preferably, 2.5 g / cm ３ 2.8g / cm or more ３ More preferably, 2.55 g / cm ３ 2.75g / cm or more ３ More preferably, 2.57 g / cm ３ 2.7g / cm or more ３ More preferably, 2.59 g / cm３ 2.65g / cm or more ３ More preferably, 2.6 g / cm or less ３ 2.63g / cm or more ３ The following is even more preferred:

[0051] (E / ρ) The ratio (E / ρ) of Young's modulus E to density ρ of the glass 10 is 30 GPa cm ３ / g or more 40GPa・cm ３ / g or less, and 30.5 GPa cm ３ / g or more 38GPa・cm ３ / g or less is more preferable, and 31 GPa cm ３ / g or more 36GPa・cm ３ / g or less is more preferable, and 31.5 GPa cm ３ / g or more 34GPa・cm ３ / g or less is more preferable, and 32 GPa cm ３ / g or more 33.5GPa・cm ３ / g or less is more preferable, and 32.2 GPa cm ３ / g or more 33GPa・cm ３ / g or less is more preferable, and 32.4 GPa cm ３ / g or more 32.7GPa・cm ３ / g or less is more preferable. When the lower limit of the ratio (E / ρ) is in this range, it is possible to suppress the weight and the deflection, which makes it easier to handle in the process. Furthermore, when the upper limit of the ratio (E / ρ) is in this range, it is possible to suppress the occurrence of cracks during processing.

[0052] (Linear Thermal Expansion Coefficient) The linear thermal expansion coefficient α of the glass 10 is preferably 5.8 ppm / °C or less, more preferably 3.6 ppm / °C to 5.6 ppm / °C, more preferably 3.8 ppm / °C to 5.2 ppm / °C, more preferably 4 ppm / °C to 5.2 ppm / °C, more preferably 4.2 ppm / °C to 4.8 ppm / °C, more preferably 4.3 ppm / °C to 4.6 ppm / °C, and more preferably 4.35 ppm / °C to 4.5 ppm / °C. By setting the linear thermal expansion coefficient within this range, deflection can be appropriately suppressed. The linear thermal expansion coefficient α is the average thermal expansion coefficient in the range of 20°C to 300°C, and is a value measured in accordance with DIN-51045-1 as a standard for thermal expansion measurement. For example, a thermal expansion meter DIL 402 Expedis Supreme manufactured by NETZSCH is used as the measuring device to measure in the range of 0°C to 350°C, and the average thermal expansion coefficient in the range of 20°C to 300°C may be taken as the linear thermal expansion coefficient.

[0053] (melting temperature T ２ , working temperature T ３ , molding temperature T ４ , softening temperature T ７．６５ ) Melting temperature T of glass 10 ２ is preferably 1400°C or higher and 1650°C or lower, more preferably 1410°C or higher and 1620°C or lower, more preferably 1440°C or higher and 1590°C or lower, more preferably 1470°C or higher and 1560°C or lower, more preferably 1480°C or higher and 1550°C or lower, more preferably 1490°C or higher and 1540°C or lower, more preferably 1500°C or higher and 1530°C or lower, and more preferably 1510°C or higher and 1520°C or lower. ２ The viscosity η is 10 ２ The melting temperature T ２ Such a relatively low temperature makes it easy to dissolve. ２ The relatively high working temperature T of the glass 10 allows it to be comparable to the melting temperatures of other common commercial glasses, which makes it easier to adjust the melting equipment when changing the glass substrate. ３is preferably 1200°C or higher and 1400°C or lower, more preferably 1215°C or higher and 1390°C or lower, more preferably 1240°C or higher and 1380°C or lower, more preferably 1260°C or higher and 1370°C or lower, more preferably 1290°C or higher and 1360°C or lower, more preferably 1315°C or higher and 1350°C or lower, and even more preferably 1325°C or higher and 1345°C or lower. ３ The viscosity η is 10 ３ The temperature at which the viscosity becomes dPa·s. ３ Such a relatively low temperature makes it easy to form the glass 10. ４ is preferably 1080°C or higher and 1300°C or lower, more preferably 1100°C or higher and 1280°C or lower, more preferably 1120°C or higher and 1260°C or lower, more preferably 1140°C or higher and 1240°C or lower, more preferably 1160°C or higher and 1220°C or lower, more preferably 1180°C or higher and 1215°C or lower, more preferably 1190°C or higher and 1210°C or lower, and more preferably 1200°C or higher and 1205°C or lower. ４ The viscosity η is 10 ４ The temperature at which the viscosity becomes dPa·s. Molding temperature T ４ Such a relatively low softening temperature T of the glass 10 makes it easy to form. ７．６５ The softening temperature T is preferably 800°C or higher and 1000°C or lower, more preferably 830°C or higher and 980°C or lower, more preferably 850°C or higher and 960°C or lower, more preferably 870°C or higher and 940°C or lower, more preferably 890°C or higher and 925°C or lower, more preferably 900°C or higher and 920°C or lower, and more preferably 905°C or higher and 915°C or lower. ７．６５ The viscosity η is 10 ７．６５ The softening temperature T ７．６５ Such a relatively low melting temperature T ２ , working temperature T ３ , molding temperature T ４The softening temperature T can be measured by the inner cylinder rotation method or the like. ７．６５ The softening point (°C) can be measured by the method specified in JIS R 3103-1 "Viscosity and viscosity fixed points of glass - Part 1: Method for measuring softening point."

[0054] (T ２ -T ４ ) The glass 10 has a melting temperature T ２ and molding temperature T ４ The difference between ２ -T ４ ) is preferably 280°C or more and 340°C or less. ２ -T ４ ) may be 400°C or less, 290°C or more and 375°C or less, 295°C or more and 360°C or less, 298°C or more and 340°C or less, 300°C or more and 320°C or less, 305°C or more and 315°C or less, or 307°C or more and 310°C or less. ２ -T ４ Since the difference (T) is relatively small, the temperature gradient from the melting process to the molding process is small. This makes it possible to suppress the increase in energy loss during the transition between processes, and facilitates manufacturing. ２ -T ４ If the viscosity is too small, the range of change in viscosity relative to temperature becomes too large, making it difficult to control the melting and molding temperatures from the melting step to the molding step.

[0055] (T ４ -T ７．６５ ) The glass 10 is formed at a forming temperature T ４ and softening temperature T ７．６５ The difference between ４ -T ７．６５ ) is preferably 290°C or higher, and more preferably 290°C or higher and 300°C or lower. ４ -T ７．６５) may be 250°C or higher, 250°C or higher and 350°C or lower, 260°C or higher and 335°C or lower, 270°C or higher and 315°C or lower, 280°C or higher and 305°C or lower, 285°C or higher and 300°C or lower, or 290°C or higher and 295°C or lower. ４ -T ７．６５ If the difference (T) is small, precise temperature control is required to control the viscosity of the glass during the molding process. It is difficult to perform precise temperature control in large-scale manufacturing facilities, and not only may it not be possible to mold the glass into the designed shape, but cracks or breakage may also occur. ４ -T ７．６５ ) is relatively large, it is easy to control the viscosity during molding, and manufacturing is easy.

[0056] (Glass Manufacturing Method) Glass 10 may be manufactured by any method, but is manufactured by the following method, for example. First, raw materials such as silica sand and soda ash, which are the raw materials for the compounds contained in glass 10, are heated to a predetermined temperature (e.g., 1500°C to 1600°C) and melted. Then, the molten raw materials (glass) are refined and then formed into a plate shape in a forming step. The formed glass has the composition range of glass 10 described above based on oxides. Then, glass 10 is manufactured by subjecting the glass formed in the forming step to an annealing step. Note that the method for manufacturing glass 10 is not limited to the above and may be any method. For example, the annealing step is not essential. Furthermore, various methods can be adopted for the forming step when manufacturing glass 10, and examples thereof include a melt casting method, a downdraw method (e.g., an overflow downdraw method, a slot-down method, and a redraw method), a float method, a roll-out method, and a press method.

[0057] Next, an example of a manufacturing process when the glass 10 is used in FOWLP manufacturing will be described. In FOWLP manufacturing, a plurality of semiconductor chips are bonded to the glass 10, and the semiconductor chips are covered with a sealing material to form an element substrate. Then, the glass 10 and the element substrate are separated, and the side of the element substrate opposite the semiconductor chips is bonded to, for example, another piece of glass 10. Then, wiring, solder bumps, etc. are formed on the semiconductor chips, and the element substrate and the glass 10 are separated again. Then, the element substrate is cut into individual semiconductor chips to obtain semiconductor devices.

[0058] (Effects) As explained above, glass 10 according to the first aspect of the present disclosure is an alkali-free glass in which parameter A is 0.817 or less, parameter B is 0.898 or more, the ratio of the content of MgO to the total content of divalent oxides RO (MgO / RO) expressed in mole percent on an oxide basis is 0.65 or more, and Young's modulus E is 80 GPa or more. Glass 10 of the present disclosure is an alkali-free glass with a Young's modulus E of 80 GPa or more, and therefore deflection can be appropriately suppressed. However, alkali-free glasses with high Young's modulus generally have a melting temperature T ２ and molding temperature T ４ The difference between ２ -T ４ ) becomes larger, and the molding temperature T ４ and softening temperature T ７．６５ The difference between ４ -T ７．６５ ) tends to become smaller. ２ -T ４ If the difference (T ４ -T ７．６５ ) is small, the temperature range that can be tolerated in the molding process becomes small, making it difficult to control the viscosity and molding. On the other hand, the inventors have found, as a result of extensive research, that by setting the parameters A, B, and the ratio (MgO / RO) within the above ranges, the difference (T ２ -T ４ ) becomes excessive, and the difference (T ４ -T ７．６５) can be appropriately suppressed from becoming too low. That is, by having parameters A, B, and the ratio (MgO / RO) within the above ranges, glass 10 of the present disclosure can suppress an increase in energy loss during the transition from the melting process to the molding process while suppressing difficulty in viscosity control. Therefore, the present disclosure can provide glass 10 that is easy to manufacture while suppressing deflection. Furthermore, alkali-free glasses with a Young's modulus E of 80 GPa or more tend to have a large specific elastic modulus E / ρ (Young's modulus / density), which may make them more susceptible to cracking during processing. Furthermore, for example, if the specific elastic modulus E / ρ becomes too small, the glass may become too brittle and heavy, making it difficult to handle during processing. In contrast, by having parameters A, B, and the ratio (MgO / RO) within the above ranges, glass 10 of the present disclosure can maintain the specific elastic modulus E / ρ within an appropriate range, suppressing cracking during processing, and making it easy to handle during processing.

[0059] Glass 10 according to a second aspect of the present disclosure is glass 10 according to the first aspect, wherein the glass contains, in mole percent on an oxide basis, SiO ２ :55.0%~65.0%, Al ２ O ３ :3.0%~13.0%, B ２ O ３ : 1.0% to 10.0%, RO: 10.0% to 40.0%. According to the present disclosure, it is possible to easily manufacture the film while suppressing warping.

[0060] Glass 10 according to a third aspect of the present disclosure is glass 10 according to the first or second aspect, and preferably contains, in mole percent on an oxide basis, MgO: 10.0% to 25.0%. According to the present disclosure, manufacturing can be facilitated while suppressing deflection.

[0061] Glass 10 according to a fourth aspect of the present disclosure is glass 10 according to any one of the first to third aspects, and preferably contains, in mole percent on an oxide basis, CaO: 1.0% to 10.0%. According to the present disclosure, manufacturing can be facilitated while suppressing deflection.

[0062] Glass 10 according to a fifth aspect of the present disclosure is glass 10 according to any one of the first to fourth aspects, and preferably contains, in mole percent on an oxide basis, SrO: 0% to 5.0%. According to the present disclosure, manufacturing can be facilitated while suppressing deflection.

[0063] Glass 10 according to a sixth aspect of the present disclosure is glass 10 according to any one of the first to fifth aspects, and preferably contains, in mole percent on an oxide basis, BaO: 0% to 5.0%. According to the present disclosure, manufacturing can be facilitated while suppressing deflection.

[0064] The glass 10 according to the seventh aspect of the present disclosure is the glass 10 according to any one of the first to sixth aspects, and is preferably used as a substrate. The glass 10 according to the present disclosure is suitably used as a substrate.

[0065] The glass 10 according to an eighth aspect of the present disclosure is the glass 10 according to the seventh aspect, and is preferably used in the manufacture of at least one of a fan-out wafer-level package and a fan-out panel-level package. The glass 10 is suitable for these applications.

[0066] Examples Next, examples will be described. Tables 1-1 to 1-3 show the properties of the glass of each example. Note that the embodiment may be modified as long as the effects of the invention are achieved.

[0067]

[0068] Example 1 In Example 1, a glass having the composition shown in Table 1-1 was produced. In Example 1, a raw plate having a diameter of 320 mm and a thickness of 6 mm was produced using a melt-casting method. Next, multiple plates having a diameter of 300 mm and a thickness of 3 mm were cut out from the center of the raw plate. Both surfaces of these plates were polished using cerium oxide as an abrasive to obtain glass having a thickness of 0.7 mm.

[0069] For the glass of Example 1, parameter A was calculated using the above formula (1). For the glass of Example 1, parameter B was calculated using the above formula (2). For the glass of Example 1, density ρ (g / cm ３ ) was measured. The density was measured by the Archimedes method. For the glass of Example 1, Young's modulus E (GPa) was measured. Young's modulus was measured by the ultrasonic pulse method specified in JIS R 1602:1995 "Testing method for elastic modulus of fine ceramics." The bulk density of the sample was measured by the Archimedes method, and the longitudinal wave velocity and shear wave velocity were measured using an ultrasonic thickness gauge 38DL PLUS manufactured by Olympus Corporation to determine the Young's modulus value. For the glass of Example 1, the linear thermal expansion coefficient α (ppm / °C) was measured. Measurements were made in the range of 0°C to 350°C using a thermal dilatometer (DIL 402 Expedis Supreme) manufactured by NETZSCH as the measuring device, and the average thermal expansion coefficient in the range of 20°C to 300°C was taken as the linear thermal expansion coefficient α. For the glass of Example 1, the melting temperature T ２ (℃), working temperature T ３ (℃), molding temperature T ４ The dissolution temperature T ２ , working temperature T ３ , molding temperature T ４ was measured by the inner cylinder rotation method. ７．６５ The softening temperature T ７．６５ The softening point (°C) was measured by the method specified in JIS R 3103-1 "Viscosity and viscosity fixed points of glass - Part 1: Method for measuring softening point." The measurement results and calculation results are shown in Table 1-1.

[0070] In Examples 2 to 60, glasses were produced in the same manner as in Example 1, except that the glass compositions were as shown in Tables 1-1 to 1-3. The measurement results and calculation results for each example are shown in Tables 1-1 to 1-3.

[0071] (Evaluation) For each example of glass, manufacturability was judged and deflection was evaluated.

[0072] In determining manufacturability, the difference (T ２ -T４ ) is 280°C or more and 340°C or less, and the difference (T ４ -T ７．６５ ) is 290°C or higher, the difference (T ２ -T ４ ) is 280°C or more and 340°C or less, and the difference (T ４ -T ７．６５ ) is 290°C or higher.

[0073] In the deflection evaluation, a Young's modulus of 80 GPa or more was rated as "pass", and a Young's modulus of less than 80 GPa was rated as "fail".

[0074] As shown in Table 1, the glasses of Examples 1 to 41 (Examples), in which parameter A was 0.817 or less, parameter B was 0.898 or more, and the ratio (MgO / RO) was 0.65 or more, passed the manufacturability evaluation and the deflection evaluation, indicating that they could be easily manufactured while suppressing deflection. On the other hand, the glasses of Examples 42 to 60 (Comparative Examples), which did not satisfy at least one of parameter A being 0.817 or less, parameter B being 0.898 or more, and ratio (MgO / RO) being 0.65 or more, failed at least one of the manufacturability evaluation and the deflection evaluation, indicating that they could not be easily manufactured while suppressing deflection.

[0075] Although the embodiments of the present invention have been described above, the embodiments are not limited to the contents of these embodiments. Furthermore, the above-described components include those that can be easily imagined by a person skilled in the art, those that are substantially the same, and those that are within the scope of what is called equivalents. Furthermore, the above-described components can be combined as appropriate. Furthermore, various omissions, substitutions, or modifications of the components can be made without departing from the spirit of the above-described embodiments.

[0076] 10. Glass

Claims

1. A glass having a parameter A shown in formula (1) of 0.817 or less, a parameter B shown in formula (2) of 0.898 or more, a ratio of the content of MgO to the total content of divalent oxides RO expressed in mole percent on an oxide basis of 0.65 or more, a Young's modulus of 80 GPa or more, and an alkali-free glass. A=1.747-0.022×[SiO ２ ]+0.006×[Al ２ O ３ ]+0.018×[B ２ O ３ ]+0.013×[MgO]-0.010×[CaO]-0.003×[SrO]+0.012×[BaO]+0.015×[ZnO]...(1) B=1.315-0.010×[SiO ２ ]+0.005×[Al ２ O ３ ]+0.023×[B ２ O ３ ]+0.004×[MgO]-0.016×[CaO]-0.007×[SrO]+0.011×[BaO]+0.010×[ZnO]] ...(2) 2. In terms of oxide mole percent, SiO ２ :55.0%~65.0%, Al ２ O ３ :3.0%~13.0%, B ２ O ３ 2. The glass according to claim 1, comprising: SiO: 1.0% to 10.0%; RO: 10.0% to 40.0%.

3. The glass according to claim 1 or 2, containing, in mole percent on an oxide basis, MgO: 10.0% to 25.0%.

4. The glass according to claim 1 or 2, containing, in mole percent on an oxide basis, CaO: 1.0% to 10.0%.

5. The glass according to claim 1 or 2, containing, in mole percent on an oxide basis, SrO: 0% to 5.0%.

6. The glass according to claim 1 or 2, containing, in mole percent on an oxide basis, BaO: 0% to 5.0%.

7. The glass according to claim 1 or 2, wherein the parameter A is 0.781 or more and 0.817 or less, the parameter B is 0.903 or more and 0.935 or less, and the ratio of the content of MgO to the total content of divalent oxides RO, expressed in mole percent on an oxide basis, is 0.65 or more and 0.9 or less.

8. In terms of oxide mole percent, SiO ２ :61.0%~63.5%, Al ２ O ３ 3. The glass of claim 1, comprising: 7.0% to 8.5%.

9. The glass according to claim 1 or 2, containing, in mole percent on an oxide basis, MgO: 12% to 22%, CaO: 1.1% to 7%, SrO: 0.1% to 5.0%, and BaO: 0.1% to 5.0%.

10. The glass according to claim 1 or 2, which is substantially free of alkali metal oxides.

11. The glass according to claim 1 or 2, wherein the Young's modulus parameter Y shown in formula (3) is 0.9 or more. Y=(60-0.244[SiO ２ ]+0.27[Al ２ O ３ ]−0.60[B ２ O ３ ]+0.63[MgO]+0.48[CaO]-0.56[SrO]-0.22[BaO]+1.37[ZnO]) / 85...(3) 12. The ratio of Young's modulus E to density ρ (E / ρ) is 30 GPa cm ３ / g or more 40GPa・cm ３ The glass of claim 1 or claim 2, wherein the refractive index is 0.1 to 0.

5.

13. Melting temperature T ２ and molding temperature T ４ Difference from (T ２ -T ４ 3. The glass according to claim 1 , wherein the melting point of the glass is 400° C. or less.

14. Molding temperature T ４ and softening temperature T ７．６５ Difference from (T ４ -T ７．６５ 3. The glass according to claim 1 , wherein the temperature of the glass is 250° C. or higher.

15. SiO ２ and Al ２ O ３ and B ２ O ３ The ratio of the content of RO to the total content of (RO) / (SiO ２ +Al ２ O ３ +B ２ O ３ 3. The glass according to claim 1 , wherein R 1 is 0.2 or greater and 0.5 or less.

16. SiO ２ , Al ２ O ３ , MgO, CaO total amount (SiO ２ +Al ２ O ３ 3. The glass according to claim 1, wherein the content of MgO in the glass is 85% or more and 98% or less in mole percent based on oxides.

17. Al ２ O ３ The difference (Al ２ O ３ 3. The glass according to claim 1, wherein the content of —RO) is, in mole percent based on oxides, −30% or more and 0% or less.

18. The glass according to claim 1 or 2, which is used as a substrate.

19. The glass of claim 15 for use in the manufacture of at least one of a fan-out wafer level package and a fan-out panel level package.