Vibration fluid device

Abstract

Provided is a vibration fluid device that, with a simple structure, prevents unnecessary leakage of vibration and allows visual inspection of the inside of a flow passage. A vibration fluid device 1 comprises: a base body 11; a piezoelectric element 21 that vibrates the base body 11; and a connecting body 31 for attaching the piezoelectric element 21 to the base body 11. The coupling area ratio (Sc / Sp) (%), where Sc is the area of a surface of the connecting body 31, the surface being adjacent to the piezoelectric element 21 and opposing the piezoelectric element 21, and Sp is the area of a surface of the piezoelectric element 21, the surface being adjacent to the connecting body 31 and opposing the connecting body 31, is 50% or less.

Description

vibrating fluid device

[0001] The present invention generally relates to a vibrating fluid device that vibrates a pipe line, and more particularly to a vibrating fluid device that vibrates a pipe line using a piezoelectric element.

[0002] Turbulence of fluids is important for promoting fluid mixing and chemical reactions. However, as the flow channel diameter decreases with the miniaturization of fluid mixing devices, the flow within the channel tends to become laminar, making it difficult to achieve turbulence. It has been known that applying mechanical vibration to the conduit before supplying fluids to the microchannel can promote fluid mixing and reactions.

[0003] Electromagnetic motors are generally used as a source of mechanical vibration. However, electromagnetic systems have the problem of large winding losses as they are miniaturized, resulting in extremely low energy efficiency. On the other hand, piezoelectric elements are suitable for miniaturization because they have no windings, have a simple structure, and generate large forces.

[0004] A method for stirring a specimen solution in which a piezoelectric element is used as a source of mechanical vibration to stir a fluid is described in Japanese Patent Laid-Open Publication No. 2010-117250 (Patent Document 1). In this method, an analytical chip to which a specimen solution containing a test substance has been applied is placed in a reaction device equipped with a piezoelectric element as a vibration source, and the piezoelectric element is activated to propagate vibrations to the specimen solution, thereby efficiently stirring the specimen solution, thereby achieving uniformity in the reaction and improving reaction efficiency, and enabling quantitative analysis in a short period of time.

[0005] JP 2010-117250 A

[0006] When a piezoelectric element is used as a vibration source, a damper is used to prevent vibrations from leaking to areas of the device attached to the piezoelectric element that should not be affected by the vibrations. However, dampers absorb vibration energy as heat energy, and the generation of this heat energy can be a problem in chemical reactions.

[0007] Furthermore, in Patent Document 1, the specimen is sandwiched between a piezoelectric element and a substrate. However, piezoelectric elements are generally opaque, and even piezoelectric elements that are not completely opaque have insufficient light transmission. Therefore, the state and reaction of the specimen during vibration cannot be visually observed around the piezoelectric element, i.e., at the position where the displacement due to vibration is greatest. Furthermore, it is difficult to irradiate the vibrating specimen with light from outside the flow channel.

[0008] SUMMARY OF THE INVENTION It is therefore an object of the present invention to provide a vibrating fluid device that has a simple structure, prevents unnecessary leakage of vibration, and allows the inside of the flow path to be visually confirmed.

[0009] As a result of extensive research, the inventors have discovered that by configuring a base on which a piezoelectric element, which is the vibration source, is installed so that the displacement due to vibration is relatively small at the installation position of the piezoelectric element and is greatest at a position away from the installation position of the piezoelectric element, it is possible to observe the vibrating fluid from any direction.

[0010] Furthermore, the inventors have discovered that, when a piezoelectric element is used as a vibration source, the entire area of ​​the piezoelectric element is typically connected to a base in contact with the base. However, the inventors have discovered that the displacement of the piezoelectric element due to vibration at its installation position can be controlled by adjusting the area ratio between the piezoelectric element and the connector connecting the piezoelectric element to the base. According to the inventors' research, when the entire area of ​​the piezoelectric element is in contact with the base, as is commonly done in the past, the base and the piezoelectric element behave as a single unit, and the portion of the base in contact with the piezoelectric element also vibrates in accordance with the vibration of the piezoelectric element. However, when the piezoelectric element and the base are in contact with each other over a small area, the piezoelectric element and the base behave as separate entities. Therefore, by contacting the piezoelectric element and the base over a small area and further providing regions on the base that are prone to resonate with the piezoelectric element and regions that are unlikely to resonate with the piezoelectric element, it is possible to set vibration regions and damping regions on the base.

[0011] Based on these findings, the present invention is configured as follows.

[0012] A vibrating fluid device according to the present invention includes a base and a piezoelectric element that vibrates the base. The piezoelectric element is attached to the base by a connector, and a connector area ratio (Sc / Sp) (%) is 50% or less, where Sc is the ratio of a piezoelectric body area Sp, which is the area of ​​the surface of the piezoelectric element that is adjacent to and facing the connector, to a connector area Sc, which is the area of ​​the surface of the connector that is adjacent to and facing the piezoelectric element.

[0013] By doing this, when the substrate is placed in a flow path or a flow path is formed in the substrate itself, the vibration displacement of the flow path at the installation position of the piezoelectric element can be relatively suppressed, and the vibration displacement of the flow path at the position where the piezoelectric element is not installed can be maximized.

[0014] Therefore, according to the present invention, it is possible to provide a vibrating fluid device with a simple configuration that prevents unnecessary leakage of vibration and allows the inside of the flow path to be visually confirmed.

[0015] 1A and 1B are a perspective view and a front view, respectively, schematically illustrating the entire vibrating fluid device of the first embodiment; FIG. 1B is a view in which the outer shape of a connecting body in the vibrating fluid device of the first embodiment is projected onto a piezoelectric element; FIG. 1C is a view in which the outer shape of a connecting body in the vibrating fluid device of the first embodiment is projected onto a piezoelectric element; FIG. 1D is a view in which an example of a vibration region and a damping region in the vibrating fluid device of the first embodiment is shown; FIG. 1C is a perspective view and a front view, respectively, schematically illustrating the entire vibrating fluid device of the second embodiment in a semi-transparent manner; FIG. 1D is a perspective view and a front view, respectively, schematically illustrating the entire vibrating fluid device of the third embodiment in a semi-transparent manner; FIG. 1E is a perspective view and a front view, respectively, schematically illustrating the entire vibrating fluid device of the third embodiment in a semi-transparent manner; 6B is a perspective view showing the entire vibrating fluid device of the 4B embodiment; FIG. 6B is a perspective view showing the entire vibrating fluid device of the 5th embodiment in a semi-transparent state; FIG. 6A is a perspective view showing the entire vibrating fluid device of the 6B embodiment in a semi-transparent state; FIG. 6B is a perspective view showing the entire vibrating fluid device of the 6C embodiment in a semi-transparent state; FIG. 6C is a perspective view showing the entire vibrating fluid device of the 6D embodiment in a semi-transparent state; FIG. 6D is a perspective view showing the entire vibrating fluid device of the 6D embodiment in a semi-transparent state, and FIG. 6C is a perspective view showing the connecting portion of the piezoelectric element from below; and FIG. 6B is a perspective view showing the entire vibrating fluid device of the 7th embodiment in a semi-transparent state. 13A is a perspective view, (B) is an enlarged view of a portion having a convex portion protruding into the flow path, and (C) is a cross-sectional view of a portion having a convex portion protruding into the flow path, which are semi-transparently shown in the entire vibrating fluid device of an eighth embodiment; FIG. 13B is a perspective view, (B) is a front view, and (C) is a partially enlarged view showing an enlarged view of the base, the vibration-damping connecting portion, and the weight, which are semi-transparently shown in the entire vibrating fluid device of a modified example of the eighth embodiment; and FIG. 13C is a perspective view, (B) is a front view, and (C) is a partially enlarged view showing an enlarged view of the base, the vibration-damping connecting portion, and the weight, which are semi-transparently shown in the entire vibrating fluid device of another modified example of the eighth embodiment.13A and 13B are perspective and front views, respectively, schematically illustrating a vibrating fluid device according to a ninth embodiment in a semi-transparent manner; FIG. 14A is a diagram illustrating the relationship between the ratio (Sc / Sp) of the connecting body area (Sc) to the piezoelectric element area (Sp) and the amount of displacement due to vibration in the vibrating fluid device according to Example 1; FIG. 15A is a vibration displacement diagram illustrating the displacement due to vibration of the vibrating fluid device according to Example 1, as analyzed by finite element method FEM; FIG. 15B is a vibration displacement diagram illustrating the displacement due to vibration of the vibrating fluid device according to Example 2, as analyzed by finite element method FEM, and is a perspective view and a front view, respectively; FIG. 15B is a vibration displacement diagram illustrating the displacement due to vibration of the vibrating fluid device according to Example 3A, as analyzed by finite element method FEM, and is a perspective view and a front view, respectively; and FIG. 15B is a vibration displacement diagram illustrating the displacement due to vibration of the vibrating fluid device according to Example 3B, as analyzed by finite element method FEM, and is a vibration mode of the resonant frequency of the first piezoelectric element and a vibration mode of the resonant frequency of the second piezoelectric element. Fig. 10 is a vibration displacement diagram showing the displacement due to vibration of the vibrating fluid device of Example 3C by finite element method FEM analysis, (A) in the case of a vibration mode of a resonance frequency by a first piezoelectric element, and (B) in the case of a vibration mode of a resonance frequency by a second piezoelectric element. Fig. 10 is a vibration displacement diagram showing the displacement due to vibration of the vibrating fluid device of Example 7 by finite element method FEM analysis, (A) a perspective view showing the whole, and (B) a front view. Fig. 11 is a vibration displacement diagram showing the displacement due to vibration of the vibrating fluid device of Example 8 by finite element method FEM analysis. Fig. 12 is a vibration displacement diagram showing the displacement due to vibration of the vibrating fluid device of Example 9 by finite element method FEM analysis.

[0016] The vibrating fluid device of the present invention will be described in detail below with reference to specific examples. Note that the present invention is not limited to the embodiments shown below, and various modifications are possible within the scope of the technical concept of the present invention.

[0017] In the present invention, the term "fluid" includes powder as well as liquid and gas, and the term "piezoelectric element" includes piezoelectric ceramics, piezoelectric single crystals, piezoelectric thin films, piezoelectric polymer materials, and the like.

[0018] 1, the vibrating fluid device 1 includes a base 11, a piezoelectric element 21 that vibrates the base 11, and a connector 31 for attaching the piezoelectric element 21 to the base 11. The piezoelectric element 21 and the connector 31 are bonded with an adhesive, and the connector 31 is bonded to the base 11 with an adhesive. The base 11 is preferably made of a light-transmitting material, such as quartz glass. When the fluid is to be visually observed during vibration or when light is irradiated onto the fluid from outside the flow path, it is particularly preferable that the base 11 be made of quartz glass. The connector 31 is made of, for example, brass, and any known material can be used as a connector for the piezoelectric element 21.

[0019] When vibrating a fluid, the base 11 is brought into contact with the fluid (not shown), and the piezoelectric element 21 acts as a vibration source to vibrate the fluid, thereby directly affecting the behavior of the fluid. As a method for bringing the base 11 into contact with the fluid, for example, the base 11 may be immersed in the fluid in a flow path, or the flow path may be formed by the base 11.

[0020] As shown in Figure 2, in the vibrating fluid device 1 of the present invention, the ratio of the area of ​​the surface of the piezoelectric element 21 adjacent to the connecting body 31 and facing the connecting body 31, i.e., the piezoelectric element area Sp surrounded by the outer shape Lp of the piezoelectric element 21, to the area of ​​the surface of the connecting body 31 adjacent to the piezoelectric element 21 and facing the piezoelectric element 21, i.e., the connecting body area Sc surrounded by the outer shape Lc of the connecting body 31, is a connecting area ratio (Sc / Sp) (%) of 50% or less, and the connecting area ratio (Sc / Sp) is preferably 20% or less, and more preferably 10% or less.

[0021] The lower limit of the connection area ratio (Sc / Sp) is set based on the required connection strength, and is, for example, 0.5%.

[0022] As shown in Figure 3, by making the shape, size, and mass of the base 11 different on the left and right sides of the connecting body 31, it is possible to set a vibration region 111 that resonates with the piezoelectric element 21 and a damping region 112 that is less likely to resonate with the piezoelectric element 21 within the base 11.

[0023] By doing this, when the base 11 is installed in a flow path or a flow path is formed in the base 11 itself, the vibration displacement of the flow path at the installation position of the piezoelectric element 21 can be relatively suppressed, and the vibration displacement of the flow path at the position where the piezoelectric element 21 is not installed can be maximized.

[0024] Therefore, according to the present invention, it is possible to provide a vibrating fluid device 1 that has a simple configuration, prevents unnecessary leakage of vibration, and allows the inside of the flow path to be visually confirmed.

[0025] 4, a vibrating fluid device 2 of the second embodiment includes a base 12, a piezoelectric element 22 that vibrates the base 12, and a connecting body 32 for attaching the piezoelectric element 22 to the base 12. As in the first embodiment, by making the shape, size, and mass of the base 12 different on the left and right sides of the connecting body 32, it is possible to set, within the base 12, a vibration region 121 that resonates with the piezoelectric element 22 and a damping region 122 that is less likely to resonate with the piezoelectric element 22.

[0026] The vibrating fluid device 2 of the second embodiment differs from the vibrating fluid device 1 of the first embodiment in that a flow path 42 is formed inside the base body 12. The flow path 42 has two fluid ports 421 a, 421 b that fluidly communicate the inside and outside of the flow path 42, an outlet 422, and a junction 423.

[0027] The fluid flows in from inlets 421a and 421b formed near end 122a on the damping region 122 side, joins at confluence 423 located near end 121a on the vibration region 121 side, flows toward outlet 422, and flows out from outlet 422. Since no piezoelectric element 32 is installed at confluence 423 and vibration is not suppressed, the reaction when the fluids flowing in from inlets 421a and 421b are mixed can be visually observed.

[0028] The other configurations and effects of the second embodiment are similar to those of the first embodiment.

[0029] 5 , a vibrating fluid device 3A of the 3A embodiment includes a base 13, a piezoelectric element 23 that vibrates the base 13, and a connecting body 33 for attaching the piezoelectric element 23 to the base 13. The piezoelectric element 23 and the connecting body 33 are bonded with an adhesive, and the connecting body 33 is bonded with an adhesive to the base 13. As in the first embodiment, by making the shape, size, and mass of the base 13 different on the left and right sides of the connecting body 33, it is possible to set, within the base 13, a vibration region 131 that resonates with the piezoelectric element 23 and a damping region 132 that is less likely to resonate with the piezoelectric element 23.

[0030] The vibrating fluid device 3A of the third embodiment differs from the vibrating fluid device 1 of the first embodiment in that the base body 13 is formed in a tubular shape and has a flow path 43 formed therein.

[0031] By doing this, if the base 13 is formed of a light-transmitting material such as quartz glass, the inside of the flow channel 43 can be viewed from all directions perpendicular to the flow channel axis of the flow channel 43, and analysis and chemical synthesis can be performed during vibration by irradiating light such as ultraviolet or infrared rays from all perpendicular directions.

[0032] The other configurations and effects of the 3A embodiment are the same as those of the first embodiment.

[0033] <Embodiment 3B> As shown in Figure 6, the vibrating fluid device 3B of embodiment 3B comprises a base 13, a first piezoelectric element 231 that vibrates the base 13, a second piezoelectric element 232, a first connecting body 331 for attaching the first piezoelectric element 231 to the base 13, and a second connecting body 332 for attaching the second piezoelectric element 232.

[0034] The first direction of the bending motion excited by the first piezoelectric element 231 and the second direction of the bending motion excited by the second piezoelectric element 232 are substantially perpendicular to each other. The frequency of the AC voltage applied to the first piezoelectric element 231 and the frequency of the AC voltage applied to the second piezoelectric element 232 may be substantially the same or different. Furthermore, the phase of the AC voltage applied to the first piezoelectric element 231 and the phase of the AC voltage applied to the second piezoelectric element 232 may be substantially the same or different, or may be offset by approximately 90°.

[0035] To increase the efficiency of stirring by rotating the fluid, it is desirable for the rotation direction of the fluid to alternate between forward and reverse directions. This can be achieved by providing a frequency difference between the AC voltage applied to the first piezoelectric element 231 and the AC voltage applied to the second piezoelectric element 232. The rotation direction of the fluid is determined by the relative relationship between the vibration directions of the two piezoelectric elements 231 and 232, but the difference in frequency between the two vibrations causes the relative directional relationship between the two vibrations to change over time. This is why the rotation direction alternates between forward and reverse directions.

[0036] To facilitate further understanding, an explanation will be provided. For example, if there is a first piezoelectric element 231 that generates up-and-down vibrations and a second piezoelectric vibrator 232 that generates left-and-right vibrations, and the fluid in the flow path 43 is displaced upward by the first piezoelectric element 231, then displaced right by the second piezoelectric element 232 the next moment, and then displaced downward by the first piezoelectric element 231 the next moment, and then displaced left by the second piezoelectric element 232 the next moment, this will result in a right-handed rotation (clockwise = forward rotation) when viewed continuously. On the other hand, if the fluid in the flow path 43 is displaced upward by the first piezoelectric element 231, then displaced left by the second piezoelectric element 232 the next moment, and then displaced downward by the first piezoelectric element 231 the next moment, and then displaced right by the second piezoelectric element 232 the next moment, this will result in a left-handed rotation (counterclockwise = reverse rotation) when viewed continuously. In this way, the difference between right-handed and left-handed rotations is due to the different relative directional relationships between the two vibrations. If there is a difference in frequency between the up-and-down vibration and the left-and-right vibration, the relative relationship of the vibration directions will change over time, resulting in alternating clockwise and counterclockwise rotations over time.

[0037] Thus, in the vibrating fluid device, the first direction of vibration due to bending of the first piezoelectric element 231 and the second direction of vibration due to bending of the second piezoelectric element 232 are approximately perpendicular to each other, and it is preferable that the frequency of the AC voltage applied to the first piezoelectric element 231 and the frequency of the AC voltage applied to the second piezoelectric element 232 are different.

[0038] As in the 3A embodiment, by making the shape, size, and mass of the base 13 different on the left and right sides of the connecting bodies 331, 332, it is possible to set a vibration region 131 that resonates with the piezoelectric elements 231, 232 and a damping region 132 that is less likely to resonate with the piezoelectric elements 231, 232 within the flow path 43 of the base 13.

[0039] In this way, when the vibrating fluid device includes a plurality of piezoelectric elements, the positions and orientations of the piezoelectric elements can be changed as desired.

[0040] Other configurations and effects of the 3B embodiment are the same as those of the 3A embodiment.

[0041] <Embodiment 3C> As shown in Figure 7, the vibrating fluid device 3C of embodiment 3C comprises a base 13, a first piezoelectric element 231 that vibrates the base 13, a second piezoelectric element 232, a first connecting body 331 for attaching the first piezoelectric element 231 to the base 13, and a second connecting body 332 for attaching the second piezoelectric element 232.

[0042] The difference between the vibrating fluid device 3C of the 3C embodiment and the vibrating fluid device 3B of the 3B embodiment gas is that the distance between the first piezoelectric element 231 and the second piezoelectric element 232 is wider, and a vibration region 131 that resonates with the piezoelectric elements 231 and 232 is formed between the first piezoelectric element 231 and the second piezoelectric element 232.

[0043] Other configurations and effects of the 3C embodiment are the same as those of the 3B embodiment.

[0044] 8 , a vibrating fluid device 4A of the 4A embodiment, like the 3A embodiment, includes a tubular base 14, a piezoelectric element 24 that vibrates the base 14, and a connector 34 for attaching the piezoelectric element 24 to the base 14, and a flow path 44 is formed inside the base 14. As in the 3A embodiment, by making the shape, size, and mass of the base 14 different on the left and right sides of the connector 34, it is possible to set a vibration region 141 that resonates with the piezoelectric element 24 and a damping region 142 that is less likely to resonate with the piezoelectric element 24 within the flow path 44 of the base 14.

[0045] The vibrating fluid device 4A of the 4A embodiment differs from the vibrating fluid device 3A of the 3A embodiment in that the vibrating fluid device 4A has a rod-shaped stirring bar 54a housed in the flow path 44. The cross section of the stirring bar 54a housed in the flow path 44 that is perpendicular to the flow path 44 occupies the center of the cross section of the flow path 44 that is perpendicular to the flow path.

[0046] It is known that when a flow path pipe is forcibly displaced using a piezoelectric element, the fluid follows the so-called forced vortex principle. As shown in Figure 9(A), when no stirrer is housed in the flow path 44, the flow velocity of the fluid in the flow path 44 (indicated by the arrow) increases toward the outside and decreases toward the inside, resulting in zero flow velocity at the center of the flow path (flow path axis). On the other hand, as shown in Figure 9(B), when the stirrer 54a is housed in the flow path 44 so that its cross section perpendicular to the flow path 44 occupies the center of the cross section of the flow path 44 perpendicular to the flow path, the stirrer 54a occupies the region in the center of the flow path where the flow velocity is zero, thereby eliminating the region where the flow velocity is zero.

[0047] By doing so, the fluid can be agitated more effectively.

[0048] Other configurations and effects of the 4A embodiment are the same as those of the 3A embodiment.

[0049] <Embodiment 4B> As shown in Figure 10, the vibrating fluid device 4B of embodiment 4B, like embodiment 4A, comprises a tubular base 14, a piezoelectric element 24 that vibrates the base 14, and a connecting body 34 for attaching the piezoelectric element 24 to the base 14, and a flow path 44 is formed inside the base 14, and a stirring bar 54b is housed within the flow path 44.

[0050] The vibrating fluid device 4B of the 4B embodiment differs from the vibrating fluid device 4A of the 4A embodiment in that the stirring pieces 54b of the vibrating fluid device 4B are spherical rather than rod-shaped, and there are multiple stirring pieces.

[0051] In this way, the shape and number of the stirring bars 54b may be cylindrical, prismatic, spherical, or other shapes, and may be set according to the properties and purpose of the fluid to be stirred. The stirring bars may also be grooved.

[0052] Other configurations and effects of the 4B embodiment are similar to those of the 4A embodiment.

[0053] 11 , a vibrating fluid device 5 of the fifth embodiment, like the vibrating fluid device 2 of the second embodiment, includes a base 15, a piezoelectric element 25 that vibrates the base 15, a connector 35 for attaching the piezoelectric element 25 to the base 15, and a flow path 45 formed inside the base 15. The flow path 45 has two fluid ports 451 a, 451 b that fluidly communicate the inside and outside of the flow path 45, an outlet 452, and a junction 453.

[0054] The vibrating fluid device 5 of the fifth embodiment differs from the vibrating fluid device 2 of the second embodiment in that a stirring bar 55 is housed in the confluence portion 453 .

[0055] The vibrating fluid device 5 of the fifth embodiment further includes a weight 65 having a mass. The weight 65 is attached to the base 15 by any method, such as with an adhesive or by screwing, so as to support from below the side of the base 15 on which the inlets 451 a, 451 b and the outlet 452 are formed. Any known adhesive can be used, such as an epoxy adhesive.

[0056] By adjusting the shape, size, and mass of the weight 65, it is possible to more easily and stably set within the base 15 a vibration region 151 that resonates with the piezoelectric element 25 and a damping region 152 that is less likely to resonate with the piezoelectric element 25.

[0057] The fluid flows in from inlets 421a and 421b formed near end 152a on the damping region 152 side, joins at confluence 453 located near end 151a on the vibration region 151 side, flows toward outlet 452, and flows out from outlet 452. Since no piezoelectric element 35 is installed at confluence 453 and vibration is not suppressed, the reaction when the fluids flowing in from inlets 451a and 451b are mixed can be visually observed.

[0058] By accommodating the stirring bar 55 in the confluence 453 of the flow paths 45 in the vibration region 151, the fluid can be stirred more effectively.

[0059] The other configurations and effects of the fifth embodiment are the same as those of the second embodiment.

[0060] <6A embodiment> As shown in Figure 12, the vibrating fluid device 6A of the 6A embodiment, like the vibrating fluid device 4B of the 4B embodiment, comprises a tubular base 16, a piezoelectric element 26 that vibrates the base 16, and a connector 36 for attaching the piezoelectric element 26 to the base 16, and a flow path 46 is formed inside the base 16, and a plurality of spherical stirring bars 56 are housed within the flow path 46.

[0061] The vibrating fluid device 6A of the 6A embodiment further includes a weight 66 having a mass as an example of a vibration damping section. The weight 66 is attached to the base 16 by any method, such as by adhesive or screw fastening, on the side of the piezoelectric element 26 opposite the side on which the stirring bar 56 is housed. Any known adhesive can be used, such as an epoxy adhesive.

[0062] By adjusting the shape, size, and mass of the weight 66, it is possible to more easily and stably set a vibration region 161 that resonates with the piezoelectric element 26 and a damping region 162 that is less likely to resonate with the piezoelectric element 26 within the flow path 46 of the base 16.

[0063] By arranging the weight 66 on the opposite side to the stirrer 56, the portion housing the stirrer 56 can be made into a vibration region 161, and the fluid can be stirred more effectively in the vibration region 161.

[0064] Other configurations and effects of the 6A embodiment are the same as those of the 4B embodiment.

[0065] 13 , a vibrating fluid device 6B of the 6B embodiment includes a tubular base 16, a first piezoelectric element 261 that vibrates the base 16, a second piezoelectric element 262, a first connector 361 for attaching the first piezoelectric element 261 to the base 16, and a second connector 362 for attaching the second piezoelectric element 262. A flow path 46 is formed in the base 16, and a stirrer 56 is housed in the flow path 46. A weight 66 is attached to the base 16 on the side opposite the side where the stirrer 56 is housed relative to the piezoelectric element 26 by any method, such as adhesive or screw fastening. A known adhesive can be used, such as an epoxy adhesive.

[0066] The weight 66 makes the side of the weight 66 relative to the piezoelectric elements 261, 262 into a damping region 162, and the portion housing the stirrer 56 into a vibration region 161, allowing the fluid to be stirred more effectively in the vibration region 161.

[0067] Other configurations and effects of the 6B embodiment are the same as those of the 6A embodiment.

[0068] 14 , the vibrating fluid device 6C of the 6C embodiment, like the vibrating fluid device 6B of the 6B embodiment, includes a tubular base 16, a first piezoelectric element 261 that vibrates the base 16, a second piezoelectric element 262, a first connector 361 for attaching the first piezoelectric element 261 to the base 16, and a second connector 362 for attaching the second piezoelectric element 262. A flow path 46 is formed in the base 16, and a stirring bar 56 is housed in the flow path 46.

[0069] The oscillating fluid device 6C of the 6C embodiment differs from the oscillating fluid device 6B of the 6B embodiment in that the distance between the first piezoelectric element 261 and the second piezoelectric element 262 is wider, weights 66 are attached to the outside of the first piezoelectric element 261 and the outside of the second piezoelectric element 262, and the stirrer 56 is housed in the flow path 46 between the first piezoelectric element 261 and the second piezoelectric element 262.

[0070] In the vibrating fluid device 6C, two weights 66 form a vibration region 161 between the first piezoelectric element 261 and the second piezoelectric element 262, which resonates with the piezoelectric elements 261, 262, and a damping region 162 is formed outside the first piezoelectric element 261 and outside the second piezoelectric element 262.

[0071] Other configurations and effects of the 6C embodiment are the same as those of the 6B embodiment.

[0072] 15 , the vibrating fluid device 6D of the 6D embodiment, like the vibrating fluid device 6C of the 6C embodiment, includes a tubular substrate 16, a first piezoelectric element 261 that vibrates the substrate 16, a second piezoelectric element 262, a first connecting body 361 for attaching the first piezoelectric element 261 to the substrate 16, and a second connecting body 362 for attaching the second piezoelectric element 262. The connecting bodies 361 and 362 are formed in a ring shape, and an adhesive 362a is interposed between the connecting bodies 361 and 362 and the piezoelectric elements 261 and 262. Known adhesives may be used, such as an epoxy adhesive. The piezoelectric element 261 and the connecting body 361 are bonded together with an adhesive. The substrate 16 is passed through the annular portion of the connecting body 361, and the connecting body 361 and the substrate 16 are also bonded together with an adhesive. A flow path 46 is formed within the base 16, and a stirring bar 56 is housed within the flow path 46. The gap between the first piezoelectric element 261 and the second piezoelectric element 262 is widened, and weights 66 are attached to the outside of the first piezoelectric element 261 and the outside of the second piezoelectric element 262 by any method, such as with adhesive or screw fastening, and the stirring bar 56 is housed within the flow path 46 between the first piezoelectric element 261 and the second piezoelectric element 262. A known adhesive, such as an epoxy adhesive, can be used as the adhesive. The two weights 66 form a vibration region 161 between the first piezoelectric element 261 and the second piezoelectric element 262, which resonates with the piezoelectric elements 261 and 262, and attenuation regions 162 are formed outside the first piezoelectric element 261 and the second piezoelectric element 262.

[0073] The vibrating fluid device 6D of the 6D embodiment differs from the vibrating fluid device 6C of the 6C embodiment in that the flow path 46 has a convex portion 76 downstream of the stirrer 56 in the fluid flow direction as a flow stopper with an inner diameter smaller than the maximum diameter of the stirrer 56. This prevents the stirrer 56 from moving away from the vibration region 171 where vibration displacement is large.

[0074] Other configurations and effects of the 6D embodiment are the same as those of the 6C embodiment.

[0075] 16 , a vibrating fluid device 7 of the seventh embodiment includes a base 17, a piezoelectric element 27 that vibrates the base 17, a connector 37 for attaching the piezoelectric element 27 to the base 17, and a flow path 47 formed inside the base 17. The flow path 47 has two inlets 471 a, 471 b that fluidly communicate between the inside and outside of the flow path 47, an outlet 472, and a junction 473. A stirring bar 57 is housed inside the junction 473.

[0076] The vibrating fluid device 7 further includes a weight 67 as an example of a vibration-damping part having mass. The weight 67 is frame-shaped and is attached to the base 17 by any method, such as with an adhesive or with screws, so as to sandwich and support the entire periphery of the base 17 from above and below. Any known adhesive can be used, such as an epoxy adhesive. The two fluid ports 471a, 471b and the outlet 472 are formed outside the weight 67, and the confluence part 473 is formed inside the frame of the weight 67.

[0077] By adjusting the shape, size, and mass of the weight 67, it is possible to more easily and stably set, within the base 17, a vibration region 171 that resonates with the piezoelectric element 27 and a damping region 172 that does not easily resonate with the piezoelectric element 27. In this embodiment, the vibration region 171 is formed in the central portion of the base 17, and the damping region 172 is formed in the peripheral portion.

[0078] The fluid flows in through inlets 471a and 471b formed in the damping region 172, joins at a junction 473 located in the vibration region 171, flows toward an outlet 472 formed in the damping region 172, and flows out through the outlet 472. Since no piezoelectric element 37 is installed at the junction 473 and vibration is not suppressed, the reaction when the fluids flowing in from the inlets 471a and 471b are mixed can be visually observed.

[0079] By accommodating the stirring bar 57 in the confluence 473 of the flow paths 47 in the vibration region 171, the fluid can be stirred more effectively.

[0080] The other configurations and effects of the seventh embodiment are the same as those of the fifth embodiment.

[0081] Eighth Embodiment As shown in FIG. 17 , the vibrating fluid device 8 of the eighth embodiment, like the vibrating fluid device 6D of the sixth embodiment, includes a tubular base 18, a first piezoelectric element 281 that vibrates the base 18, a second piezoelectric element 282, a first connecting body 381 for attaching the first piezoelectric element 281 to the base 18, and a second connecting body 382 for attaching the second piezoelectric element 282. The connecting bodies 381 and 382 are formed in a cylindrical shape, and an adhesive is interposed between the connecting bodies 381 and 382 and the piezoelectric elements 281 and 282. Known adhesives, such as epoxy adhesives, can be used. The connecting bodies 381 and 382 are also bonded to the base 18 with an adhesive. A flow path 48 is formed within the base 18.

[0082] The first piezoelectric element 281 and the second piezoelectric element 282 are arranged on either side of a midpoint 484 between the inlet 481 and outlet 482 of the flow path 48. Weights 681, 682 are attached to the outside of the first piezoelectric element 281 and the outside of the second piezoelectric element 282 by any method, such as adhesive or screw fastening. Any known adhesive can be used, such as an epoxy adhesive. The two weights 681, 682 form a vibration region 181 between the first piezoelectric element 281 and the second piezoelectric element 282, which resonates with the piezoelectric elements 281, 282, and a damping region 182 is formed outside the first piezoelectric element 281 and the second piezoelectric element 282.

[0083] Unlike the sixth embodiment, the eighth embodiment does not include a stirring bar in the flow path 48 of the vibrating fluid device 8. At a midpoint 484 between the inlet 481 and the outlet 482 of the flow path 48, the inner wall of the flow path 48 is provided with a protrusion 78 that protrudes into the flow path 48.

[0084] Also, unlike the 6D embodiment, the vibrating fluid device 8 of the 8th embodiment includes vibration-damping connectors 881, 882 for connecting the base 18 and the weights 681, 682. The area where the vibration-damping connectors 881, 882 face the base 18, or the area where the vibration-damping connectors 881, 882 face the weights 681, 682, is smaller than the area where the base 18 faces the weights 681, 682. The vibration-damping connectors 881, 882 are formed from a material having the same thermal expansion coefficient as the material of the weights 681, 682. The vibration-damping connectors 881, 882 and the weights 681, 682 are attached by any method, such as with an adhesive or screws. Known adhesives can be used, such as epoxy adhesives.

[0085] 18, as a modification different from that shown in Fig. 17 in the vibrating fluid device 8 of the eighth embodiment, the vibration-damping connectors 881, 882 of a vibrating fluid device 8B do not have to be attached to the center of the upper surfaces of the weights 681, 682. The vibration-damping connectors 881, 882 may be attached to any position on the upper surfaces of the weights 681, 682, such as the end of the upper surfaces of the weights 681, 682.

[0086] 19 , a further variation of the vibrating fluid device 8B of the eighth embodiment, in a vibrating fluid device 8C, as in the third embodiment, the first direction of the bending motion excited by the first piezoelectric element 281 and the second direction of the bending motion excited by the second piezoelectric element 282 are substantially perpendicular to each other. The frequency of the AC voltage applied to the first piezoelectric element 281 and the frequency of the AC voltage applied to the second piezoelectric element 282 may be substantially the same or different. The phase of the AC voltage applied to the first piezoelectric element 281 and the phase of the AC voltage applied to the second piezoelectric element 282 may be substantially the same, different, or may be substantially 90° apart. Furthermore, the weights 681 and 682 are attached at positions and orientations rotated 90° from each other around the flow path axis, and the vibration-damping connecting portions 881 and 882 are attached at positions and orientations rotated 90° from each other around the flow path axis.

[0087] In this way, when the vibrating fluid device is provided with a plurality of weights, the positions and orientations of the weights can be changed as desired.

[0088] The other configurations and effects of the eighth embodiment are the same as those of the sixth embodiment.

[0089] 20 , a vibrating fluid device 9 of the ninth embodiment includes a base 19, piezoelectric elements 291, 292 that vibrate the base 19, connectors 391, 392 for attaching the piezoelectric elements 291, 292 to the base 19, and a flow path 49 formed inside the base 19. The flow path 49 has two inlets 491 a, 491 b that fluidly communicate between the inside and outside of the flow path 49, an outlet 492, and a junction 493.

[0090] The vibrating fluid device 9 further includes weights 691, 692 as an example of a vibration-damping portion having mass. Unlike the seventh embodiment, the weights 691, 692 are not frame-shaped, but are attached to the base 19 so as to support both ends of the base 19 from below. The two fluid ports 491a, 491b, the outlet 492, and the junction 493 are formed inside the weights 691, 692. Also, unlike the seventh embodiment, the vibrating fluid device 9 of the ninth embodiment includes vibration-damping connecting portions 891, 892 for connecting the base 19 and the weights 691, 692, and the area where the vibration-damping connecting portions 691, 692 and the base 19 face each other or the area where the vibration-damping connecting portions 891, 892 and the weights 69 are facing each other is smaller than the area where the base 19 and the weights 691, 692 face each other. The vibration-damping connecting portions 891 and 892 are formed from a material having the same thermal expansion coefficient as the material of the weights 691 and 692 .

[0091] Unlike the seventh embodiment, no stirring bar is accommodated in the flow path 49 of the vibrating fluid device 9 of the ninth embodiment.

[0092] By adjusting the shape, size, and mass of the weights 691 and 692, it is possible to more easily and stably set, within the base 19, a vibration region 191 that resonates with the piezoelectric element 29 and a damping region 192 that is less likely to resonate with the piezoelectric elements 291 and 292. In this embodiment, the vibration region 191 is formed in the center portion of the base 19, and the damping regions 192 are formed at the ends.

[0093] Fluids flow in through inlets 491a and 491b formed in the damping region 192, join at a junction 493 located in the vibration region 191, flow toward an outlet 492 formed in the damping region 192, and flow out through the outlet 492. Since no piezoelectric elements 291 and 292 are installed at the junction 493 and vibration is not suppressed, the reaction when the fluids flowing in from the inlets 491a and 491b are mixed can be visually observed.

[0094] The other configurations and effects of the ninth embodiment are the same as those of the seventh embodiment.

[0095] The present invention can be summarized as follows.

[0096] (1) A vibrating fluid device comprising a base, a piezoelectric element that vibrates the base, and a connecting body for attaching the piezoelectric element to the base, wherein the connecting area ratio (Sc / Sp) (%) is 50% or less, as the ratio of the connecting body area Sc, which is the area of ​​the surface of the connecting body that is adjacent to the piezoelectric element and faces the piezoelectric element, to the piezoelectric body area Sp, which is the area of ​​the surface of the piezoelectric element that is adjacent to the connecting body and faces the piezoelectric element.

[0097] (2) The vibrating fluid device according to (1), wherein the connection area ratio is 20% or less.

[0098] (3) The vibrating fluid device according to (1), wherein the connection area ratio is 10% or less.

[0099] (4) The vibrating fluid device according to (1), wherein a flow path is formed inside the substrate.

[0100] (5) The vibrating fluid device according to (4), wherein the inner wall of the flow path has a protrusion that protrudes into the flow path.

[0101] (6) The vibrating fluid device according to (4), wherein the substrate is flat.

[0102] (7) The vibrating fluid device according to (4), which includes a stirring bar housed in the flow path.

[0103] (8) The vibrating fluid device according to (7), wherein the cross section of the agitator housed in the flow channel that is perpendicular to the flow channel occupies the center of the cross section of the flow channel that is perpendicular to the flow channel.

[0104] (9) The vibrating fluid device according to (7), wherein the flow path has a flow stopper portion having an inner diameter smaller than the maximum diameter of the stirrer, downstream of the stirrer in the direction of fluid flow.

[0105] (10) The vibrating fluid device according to any one of (1) to (9), further comprising a vibration damping section for suppressing vibration of a part of the base body.

[0106] (11) A vibrating fluid device as described in (10), which is provided with a vibration-damping connecting part for connecting the base and the vibration-damping part, and the area where the vibration-damping connecting part faces the base, or the area where the vibration-damping connecting part faces the vibration-damping part, is smaller than the area where the base and the vibration-damping part face each other.

[0107] (12) The vibrating fluid device according to (11), wherein the vibration-damping connecting portion is made of a material having the same thermal expansion coefficient as the material of the vibration-damping portion.

[0108] (13) The vibrating fluid device according to (10), further comprising a viewing section for viewing the flow path, and the vibration suppressing section is disposed on the opposite side of the piezoelectric element from the viewing section.

[0109] (14) The vibrating fluid device according to any one of (1) to (9), wherein the piezoelectric element is configured to vibrate so as to bend the substrate.

[0110] (15) The vibrating fluid device according to any one of (1) to (9), wherein the piezoelectric element is configured to vibrate in a bending manner.

[0111] (16) A vibrating fluid device as described in (1), comprising a plurality of piezoelectric elements, the plurality of piezoelectric elements including a first piezoelectric element and a second piezoelectric element, the flow path having a midpoint, and the first piezoelectric element and the second piezoelectric element being arranged on either side of the midpoint.

[0112] (17) The vibrating fluid device according to (16), wherein the number of the first piezoelectric element and the number of the second piezoelectric element are one each.

[0113] (18) The vibrating fluid device according to (6), wherein the vibration surface of the piezoelectric element is approximately parallel to the surface of the plate-shaped substrate.

[0114] The vibrating fluid device according to the present invention will be described in more detail below, showing specific manufacturing examples and test results.

[0115] Example 1 In the vibrating fluid device 1 of the first embodiment shown in Figure 1, the base 11 was formed from quartz glass with a length of 80 mm, a width of 27 mm, and a thickness of 1.2 mm. The piezoelectric element 21 used was a piezoelectric ceramic with a metal plate bonded to it, which is commonly used for piezoelectric buzzers. The piezoelectric ceramic had an outer diameter of 20 mm, a thickness of 0.24 mm, and was polarized in the thickness direction. Two metal plates were bonded together, and each was made of brass, with an outer diameter of 27 mm and a thickness of 0.3 mm. The same piezoelectric element was used in the following examples.

[0116] The brass connector 31 used had a thickness of 1 mm. The connector 31 was arranged so that the distance from the center of the connector to the tip 111 a of the vibration region 111 of the base 11 (the width of the vibration region) was 32.5 mm, and the distance from the center of the connector to the tip 112 a of the damping region 112 of the base 11 (the width of the damping region) was 47.5 mm.

[0117] The outer diameter of the connecting body 31 was changed, and the displacement (relative displacement) of the tip 112a of the damping region 112 and the vibration displacement diagram (displacement diagram by finite element method FEM analysis) were investigated when the displacement of the tip 111a of the vibration region 111 was set to 1. The results are shown in Figures 21 and 22. The piezoelectric element area Sp = (13.5 x 13.5 x π) mm ２ When the outer diameter of the connector is 2 mm, the connector area Sc = (1 x 1 x π) mm ２ , the connection area ratio Sc / Sp (%) of the connection body area Sc to the piezoelectric element area Sp is (1×1×π) / (13.5×13.5×π)×100=0.55%, when the outer diameter of the connection body is 8 mm, the connection area ratio Sc / Sp (%) is (4×4×π) / (13.5×13.5×π)×100=8.78%, when the outer diameter of the connection body is 12 mm, the connection area ratio Sc / Sp (%) is (6×6×π) When the outer diameter of the connecting body is 20 mm, the connection area ratio Sc / Sp (%) is (10×10×π) / (13.5×13.5×π)×100=54.87%, and when the outer diameter of the connecting body is 27 mm, the connection area ratio Sc / Sp (%) is (13.5×13.5×π) / (13.5×13.5×π)×100=100.00%.

[0118] 21 and 22, when the connected area ratio (Sc / Sp) (%), which is the ratio of the piezoelectric element area Sp surrounded by the outer shape Lp of the piezoelectric element 21 to the connected body area Sc surrounded by the outer shape Lc of the connected body 31, is 50% or less, the relative displacement decreases as the connected body area Sc to the piezoelectric element area Sp decreases. When the connected body area Sc to the piezoelectric element area Sp is 20% or less, the relative displacement is 0.1 or less. When the connected body area Sc to the piezoelectric element area Sp is 10% or less, the relative displacement is even lower.

[0119] The smaller the relative displacement, the greater the displacement of the vibration region and the smaller the displacement of the damping region. Therefore, the ratio of the connecting body area Sc to the piezoelectric element area Sp is 50% or less, preferably 20% or less, and more preferably 10% or less.

[0120] In this specification, in the FEM analysis, the entire periphery of the analytical model is treated as a free end condition. No constraint conditions are included. Therefore, the areas where vibration is stationary are not due to constraints, and this shows that with such an appropriate configuration, a stationary region can be created even in a free vibration state.

[0121] Example 2 In the vibrating fluid device 2 of the second embodiment shown in FIG. 4 , the base 12 was formed of quartz glass with a length of 80 mm, a width of 27 mm, and a thickness of 1.2 mm. The piezoelectric element 22 was the same as the piezoelectric element 11 of Example 1. The brass connector 32 had a diameter of 2 mm and a thickness of 1 mm. The distance from the connection center of the connector 32 to the tip 121a of the vibration region 121 of the base 12 was 32.5 mm, and the distance from the connection center of the connector 32 to the tip 122a of the damping region 122 of the base 12 was 47.5 mm. The connection area ratio (Sc / Sp) % was calculated as (1×1×π) / (13.5×13.5×π)×100=0.55%. A vibration displacement diagram (displacement diagram obtained by finite element method (FEM) analysis) of the vibrating fluid device 2 is shown in FIG. 23 .

[0122] As shown in FIG. 23, the vibration displacement was greatest at the confluence 423 of the flow path 42 .

[0123] Example 3A In the vibrating fluid device 3A of the third embodiment shown in FIG. 5, the base 13 was formed from a quartz glass tube with a length of 80 mm, an outer diameter of 2.8 mm, and an inner diameter of 1.4 mm. The piezoelectric element 23 was the same as the piezoelectric element 11 of Example 1. The connecting body 32 was made of brass, had an outer diameter of 2 mm, and a thickness (length from the outer surface of the base 13 to the piezoelectric element 23) of 0.5 mm. The distance from the connecting center of the connecting body 33 to the tip 131a of the vibration region 131 of the base 13 was 32.5 mm, and the distance from the connecting center of the connecting body 33 to the tip 132a of the damping region 132 of the base 13 was 47.5 mm. The connecting area ratio (Sc / Sp) % was (1 × 1 × π) / (13.5 × 13.5 × π) × 100 = 0.55%. An AC voltage of 2220 Hz was applied to the piezoelectric element 23. FIG. 24 shows a vibration displacement diagram (displacement diagram based on finite element method FEM analysis) of the vibrating fluid device 3A.

[0124] As shown in Figure 24, by applying an AC electric field to the piezoelectric element 23, a large vibration displacement can be excited in the vertical direction at one end of the tube, and the side where this end is located can be made into a vibration region 131, while at the other end of the tube, the vibration displacement is suppressed, and the side where this end is located can be made into a damping region 132.

[0125] Example 3B In the vibrating fluid device 3B of the 3B embodiment shown in FIG. 6 , the base 13 was formed from a quartz glass tube having a length of 100 mm, an outer diameter of 2.8 mm, and an inner diameter of 1.4 mm. The piezoelectric elements 231 and 232 were both the same as the piezoelectric element 11 of Example 1. The connectors 331 and 332 were both made of brass, had an outer diameter of φ2 mm, and a thickness (length from the outer surface of the base 13 to the piezoelectric element 231 or 232) of 0.5 mm. The distance from the connection center of the first connector 331 to the tip 131 a of the vibration region 131 of the base 13 was 32.5 mm, and the distance from the connection center of the first connector 331 to the tip 132 a of the damping region 132 of the base 13 was 47.5 mm. The spacing (pitch) between the first piezoelectric element 231 and the second piezoelectric element 232, i.e., the distance between the connection center of the first connecting body 331 and the connection center of the second connecting body 332, was 28 mm. The connection area ratio (Sc / Sp) % was (1 x 1 x π) / (13.5 x 13.5 x π) x 100 = 0.55%. An AC electric field was applied to each of the piezoelectric elements 231 and 232. A vibration displacement diagram (displacement diagram based on finite element method (FEM) analysis) of the vibrating fluid device 3A is shown in Figure 25.

[0126] As shown in Figure 25(A), a resonance analysis was performed when an AC electric field was applied to the first piezoelectric element 231 (no electric field was applied to the second piezoelectric element 232). A large vibration displacement in the vertical direction was excited at one end of the tube, allowing the side where this end was located to be the vibration region 131. At the other end of the tube, the vibration displacement was suppressed, allowing the side where this end was located to be the damping region 132. The end 131a of the vibration region 131 has a resonance frequency of 2193 Hz for this vibration mode.

[0127] As shown in Figure 25(B), a resonance analysis was performed when an AC electric field was applied to the second piezoelectric element 232 (while no electric field was applied to the first piezoelectric element 231). A large vibration displacement in the vertical direction was excited at one end of the tube, allowing the side where this end was located to be the vibration region 131. At the other end of the tube, the vibration displacement was suppressed, allowing the side where this end was located to be the damping region 132. The end 131a of the vibration region 131 has a resonance frequency of 2260 Hz for this vibration mode.

[0128] When a phase difference of approximately 90° is provided between the first piezoelectric element 231 and the second piezoelectric element 232 and an AC signal of approximately 2227 Hz, an intermediate frequency between the resonant frequencies of the first and second piezoelectric elements, is applied, a rotational motion occurs at the end 131a of the vibration region 131 of the tube of the base 13. (In the case of a phase difference of approximately -90°, a reverse rotation occurs.) In this way, the vibration displacement is large, and the fluid is oscillated and stirred within the flow path 43 of the vibration region 131 where the rotational motion occurs. The vibration displacement is small at the other end, that is, the end 132a of the damping region 132, so this end 132a can be used as a holding portion of the base 13.

[0129] Example 3C In a vibrating fluid device 3C according to the third embodiment shown in FIG. 7 , the base 13 was formed from a quartz glass tube having a length of 150 mm, an outer diameter of 2.8 mm, and an inner diameter of 1.4 mm. The piezoelectric elements 231 and 232 were both identical to the piezoelectric element 11 in Example 1. The connectors 331 and 332 were both made of brass, had an outer diameter of φ2 mm, and a thickness (length from the outer surface of the base 13 to the piezoelectric element 231 or 232) of 0.5 mm. The distance from the connection center of the first connector 331 to the tip 131 a of the vibration region 131 of the base 13 was 42.5 mm, and the distance from the connection center of the first connector 331 to the tip 132 a of the damping region 132 of the base 13 was 107.5 mm. The spacing (pitch) between the first piezoelectric element 231 and the second piezoelectric element 232, i.e., the distance between the connection center of the first connecting body 331 and the connection center of the second connecting body 332, was 65 mm. The connection area ratio (Sc / Sp) % was (1 x 1 x π) / (13.5 x 13.5 x π) x 100 = 0.55%. An AC electric field was applied to each of the piezoelectric elements 231 and 232. A vibration displacement diagram (displacement diagram based on finite element method (FEM) analysis) of the vibrating fluid device 3A is shown in Figure 26.

[0130] As shown in Figure 26(A), by applying an AC electric field to the first piezoelectric element 231 (while no electric field is applied to the second piezoelectric element 232), the center of the base 13 vibrates, displacing alternately diagonally downward to the left and upward to the right, when viewed from the direction indicated by arrow X in Figure 26(A). The reason this vibration does not occur simply in the vertical direction is thought to be due to the influence of the second piezoelectric element 232. Meanwhile, the displacement at both ends of the base 13 is small. A large vibration displacement in the vertical direction can be excited in the center of the base 13, making the center a vibration region 131. The vibration displacement at the ends of the tube is suppressed, making the ends a damping region 132. The end 131a of the vibration region 131 has a resonant frequency of 3163 Hz for this vibration mode.

[0131] As shown in Figure 26(B), by applying an AC electric field to the second piezoelectric element 232 (while no electric field is applied to the first piezoelectric element 231), the central portion of the substrate 13 vibrates, displacing alternately diagonally downward to the right and diagonally upward to the left, from the direction indicated by arrow X in Figure 26(B). The reason this vibration does not occur simply in the horizontal direction is thought to be due to the influence of the first piezoelectric element 231. Meanwhile, the displacement at both ends of the substrate 13 is small. A large vibration displacement in the vertical direction can be excited in the central portion of the substrate 13, making the central portion a vibration region 131. The vibration displacement at the ends of the tube is suppressed, making the ends a damping region 132. The end 131a of the vibration region 131 has a resonant frequency of 3143 Hz for this vibration mode.

[0132] When a phase difference of approximately 90° is provided between the first piezoelectric element 231 and the second piezoelectric element 232 and an AC signal of approximately 3153 Hz, an intermediate frequency between the resonant frequencies of the first and second piezoelectric elements, is applied, a rotational motion occurs in the vibration region 131 of the tube of the base 13. (In the case of a phase difference of approximately -90°, a reverse rotation occurs.) In this way, the vibration displacement is large, and the fluid is oscillated and stirred within the flow path 43 of the vibration region 131 where the rotational motion occurs. Because the vibration displacement is small at the end 132a of the attenuation region 132, the end 132a can be used as a holding portion of the base 13.

[0133] Example 4A In the vibrating fluid device 4A of the 4A embodiment shown in FIG. 8 , the base 14 was formed from a quartz glass tube with a length of 80 mm, an outer diameter of 2.8 mm, and an inner diameter of 1.4 mm. The piezoelectric element 24 was the same as the piezoelectric element 11 of Example 1. The connecting body 34 was made of brass and had an outer diameter of φ2 mm and a thickness (length from the outer surface of the base 14 to the piezoelectric element 24) of 0.5 mm. The distance from the connecting center of the connecting body 34 to the tip 141a of the vibration region 141 of the base 14 was 32.5 mm, and the distance from the connecting center of the connecting body 34 to the tip 142a of the damping region 142 of the base 14 was 47.5 mm. The stirring bar 54a was made of quartz glass and formed into a rod (cylindrical) shape with a length of 10 mm and a diameter of 1 mm. The connection area ratio (Sc / Sp) % was (1×1×π) / (13.5×13.5×π)×100=0.55%.

[0134] Example 4B In the vibrating fluid device 4B of the 4B embodiment shown in FIG. 10 , the base 14 was formed from a quartz glass tube with a length of 80 mm, an outer diameter of 2.8 mm, and an inner diameter of 1.4 mm. The piezoelectric element 24 was the same as the piezoelectric element 11 of Example 1. The connecting body 34 was made of brass, had an outer diameter of φ2 mm, and a thickness (length from the outer surface of the base 14 to the piezoelectric element 24) of 0.5 mm. The distance from the connecting center of the connecting body 34 to the tip 141a of the vibration region 141 of the base 14 was 32.5 mm, and the distance from the connecting center of the connecting body 34 to the tip 142a of the damping region 142 of the base 14 was 47.5 mm. The stirring bar 54a was made of quartz glass and formed into a spherical shape with a diameter of 1 mm. The connection area ratio (Sc / Sp) % was (1×1×π) / (13.5×13.5×π)×100=0.55%.

[0135] Example 5 In the vibrating fluid device 5 of the fifth embodiment shown in FIG. 11 , the base 15 was formed of quartz glass with a length of 80 mm, a width of 27 mm, and a thickness of 1.2 mm. The piezoelectric element 25 was the same as the piezoelectric element 11 of Example 1. The brass connector 35 had a diameter of 2 mm and a thickness of 1 mm. The distance from the connection center of the connector 35 to the tip 151a of the vibration region 151 of the base 15 was 32.5 mm, and the distance from the connection center of the connector 32 to the tip 152a of the damping region 152 of the base 15 was 47.5 mm. The stirrer 55 was made of quartz glass and formed into a rod (cylindrical) shape with a length of 15 mm and a diameter of 0.5 mm. The weight 65 was made of brass with a length of 40 mm, a width of 10 mm, and a thickness of 5 mm. The connection area ratio (Sc / Sp) % was (1×1×π) / (13.5×13.5×π)×100=0.55%.

[0136] Example 6A In the vibrating fluid device 6A of the 6A embodiment shown in FIG. 12, the base 16 was formed from a quartz glass tube with a length of 80 mm, an outer diameter of 2.8 mm, and an inner diameter of 1.4 mm. The piezoelectric element 26 was the same as the piezoelectric element 11 of Example 1. The connecting body 36 was made of brass and had an outer diameter of 2 mm and a thickness (length from the outer surface of the base 16 to the piezoelectric element 26) of 0.5 mm. The distance from the connecting center of the connecting body 36 to the tip 161a of the vibration region 161 of the base 16 was 32.5 mm, and the distance from the connecting center of the connecting body 36 to the tip 162a of the damping region 162 of the base 16 was 47.5 mm. The stirring bar 56 was made of quartz glass and formed into a spherical shape with a diameter of 1 mm. The weight 66 was made of brass and had a length of 10 mm, an outer diameter of 16 mm, and an inner diameter of 2.8 mm. The connection area ratio (Sc / Sp) % was (1×1×π) / (13.5×13.5×π)×100=0.55%.

[0137] Example 6B In the vibrating fluid device 6B of the 6B embodiment shown in FIG. 13 , the base 16 was formed from a quartz glass tube having a length of 100 mm, an outer diameter of 2.8 mm, and an inner diameter of 1.4 mm. The piezoelectric elements 261 and 262 were both the same as the piezoelectric element 11 of Example 1. The connectors 361 and 362 were both made of brass, had an outer diameter of φ2 mm, and a thickness (length from the outer surface of the base 16 to the piezoelectric element 261 or 262) of 0.5 mm. The distance from the connection center of the first connector 361 to the tip 131 a of the vibration region 161 of the base 16 was 32.5 mm, and the distance from the connection center of the first connector 361 to the tip 162 a of the damping region 162 of the base 16 was 47.5 mm. The spacing (pitch) between the first piezoelectric element 261 and the second piezoelectric element 262, i.e., the distance between the connection center of the first connecting body 361 and the connection center of the second connecting body 362, was 28 mm. The stirring bar 56 was made of quartz glass and formed into a spherical shape with a diameter of 1 mm. The weight 66 was made of brass and had a length of 10 mm, an outer diameter of 16 mm, and an inner diameter of 2.8 mm. The connection area ratio (Sc / Sp) % was (1 x 1 x π) / (13.5 x 13.5 x π) x 100 = 0.55%.

[0138] Example 6C In a vibrating fluid device 6C according to the 6C embodiment shown in FIG. 14 , the base 16 was formed from a quartz glass tube having a length of 150 mm, an outer diameter of 2.8 mm, and an inner diameter of 1.4 mm. The piezoelectric elements 261 and 262 were both identical to the piezoelectric element 11 of Example 1. The connectors 361 and 362 were both made of brass, had an outer diameter of 2 mm, and a thickness (length from the outer surface of the base 16 to the piezoelectric element 261 or 262) of 0.5 mm. The distance from the connection center of the first connector 361 to the tip 161 a of the vibration region 161 of the base 16 was 42.5 mm, and the distance from the connection center of the first connector 361 to the tip 162 a of the damping region 162 of the base 16 was 107.5 mm. The spacing (pitch) between the first piezoelectric element 261 and the second piezoelectric element 262, i.e., the distance between the connection center of the first connecting body 361 and the connection center of the second connecting body 362, was 65 mm. The stirring bar 56 was made of quartz glass and formed into a spherical shape with a diameter of 1 mm. The weights 661 and 662 were both made of brass and had a length of 10 mm, an outer diameter of 16 mm, and an inner diameter of 2.8 mm. The connection area ratio (Sc / Sp)% was (1 x 1 x π) / (13.5 x 13.5 x π) x 100 = 0.55%.

[0139] Example 6D In the vibrating fluid device 6D of the 6D embodiment shown in FIG. 15 , the base 16 was formed from a quartz glass tube with a length of 160 mm, an outer diameter of 2.8 mm, and an inner diameter of 1.4 mm. The piezoelectric elements 261 and 262 were both the same as the piezoelectric element 11 of Example 1. The connectors 361 and 362 were both brass ring-shaped, with an outer diameter of 3.8 mm, an inner diameter of 2.8 mm, and a width of 2 mm. An epoxy resin adhesive was interposed between the rings (connectors 361 and 362) and the piezoelectric elements 261 and 262. The distance from the outer surface of the base 16 to the piezoelectric element 261 or 262 was 0.5 mm. The distance from the connection center of the first connecting body 361 to the tip 161a of the vibration region 161 of the base 16 was 47.5 mm, and the distance from the connection center of the first connecting body 361 to the tip 162a of the damping region 162 of the base 16 was 112.5 mm. The spacing (pitch) between the first piezoelectric element 261 and the second piezoelectric element 262, i.e., the distance between the connection center of the first connecting body 361 and the connection center of the second connecting body 362, was 65 mm. The stirring bar 55 was made of quartz glass and formed into a rod (cylindrical) shape with a length of 10 mm and a diameter of 1 mm. The weights 661 and 662 were both made of brass and had a length of 10 mm, an outer diameter of 16 mm, and an inner diameter of 2.8 mm. In the ring-shaped connecting bodies 361 and 362, the surfaces (surfaces coated with adhesive) adjacent to and facing the piezoelectric elements 261 and 262 are rectangular, measuring 2.8 mm in length and 2 mm in width. Therefore, the connecting area ratio (Sc / Sp) % was (2.8 × 2) / (13.5 × 13.5 × π) × 100 = 0.98%.

[0140] Example 7 In the vibrating fluid device 7 of the seventh embodiment shown in FIG. 16 , the base 17 was formed of quartz glass with a length of 60 mm, a width of 120 mm, and a thickness of 1.2 mm. The cross section of the flow path 47 was square, and the internal dimensions of the flow path 47 were 0.8 mm × 0.8 mm. The piezoelectric element 27 was the same as the piezoelectric element 11 of Example 1. The brass connector 37 had a diameter of 2 mm and a thickness of 1 mm. The distance from the connection center of the connector 37 to one end 172a of the base 17 was 35 mm, and the distance from the connection center of the connector 37 to the other end 172b of the base 17 was 85 mm. The stirrer 57 was made of quartz glass and formed into a rod (cylindrical) with a length of 10 mm and a diameter of 0.7 mm. The weight 67 was made of brass, with an outer frame dimension of 100 mm x 70 mm, an inner window dimension of 80 mm x 50 mm, and a thickness of 5 mm. The connection area ratio (Sc / Sp) % was (1 x 1 x π) / (13.5 x 13.5 x π) x 100 = 0.55%. A vibration displacement diagram (displacement diagram based on finite element method (FEM) analysis) of the vibrating fluid device 7 is shown in Figure 27.

[0141] As shown in FIG. 27, the central portion of the base 17, that is, the position where the confluence 473 of the flow path 47 is formed, can be made the region with the largest vibration displacement.

[0142] Example 8 In the vibrating fluid device 8 of the eighth embodiment shown in FIG. 17 , the base 18 was formed from a quartz glass tube with a length of 150 mm, an outer diameter of 2.8 mm, and an inner diameter of 1.4 mm. The piezoelectric elements 281 and 282 were both identical to the piezoelectric element 11 of Example 1. The connectors 381 and 382 were both cylindrical brass components with an outer diameter of 3 mm and a thickness of approximately 3 mm. The distance from the connection center of the first connector 381 to the inlet 481 of the base 18 (one end of the base 18) was 42.5 mm, and the distance from the connection center of the second connector 382 to the outlet 482 of the base 18 (the other end of the base 18) was 42.5 mm. The spacing (pitch) between the first piezoelectric element 281 and the second piezoelectric element 282, i.e., the distance between the connection center of the first connector 381 and the connection center of the second connector 382, ​​was 65 mm. The weights 681, 682 were both made of brass and were 30 mm long, 10 mm wide, and 10 mm thick. The vibration-damping connecting parts 881, 882 were cylindrical and made of brass, with a diameter of 3 mm and a thickness of approximately 3 mm. Therefore, the area where each of the vibration-damping connecting parts 881, 882 faces the base 18 and the area where each of the vibration-damping connecting parts 881, 882 faces the weights 681, 682 were both smaller than the area where each of the base 18 faces the weights 681, 682. In the connecting parts 381, 382, ​​the surfaces adjacent to and facing the piezoelectric elements 281, 282 (the surfaces on which adhesive was applied) were circular and had a diameter of 3 mm. Therefore, the connection area ratio (Sc / Sp) % was (1.5×1.5×π) / (13.5×13.5×π)×100=1.2%. A vibration displacement diagram (displacement diagram by finite element method FEM analysis) of the vibrating fluid device 8 is shown in FIG.

[0143] As shown in FIG. 28, the central portion of the base body 18 was able to be the region with the largest vibration displacement.

[0144] Example 9 In the vibrating fluid device 9 of the ninth embodiment shown in FIG. 20 , the substrate 19 was formed of quartz glass with a length of 90 mm, a width of 20 mm, and a thickness of 1.4 mm. The cross section of the flow path 49 was square, and the inner dimensions of the flow path 49 were 0.2 mm × 0.08 mm. The piezoelectric elements 291 and 292 were the same as the piezoelectric element 11 of Example 1. The brass connectors 391 and 392 were φ3 mm and 3 mm thick. The distance from the connection center of the connector 391 to each of the inlets 491a and 491b was approximately 13.5 mm, and the distance from the connection center of the connector 392 to the outlet 492 was approximately 12.5 mm. The distance from the confluence 493 to each of the inlets 491a and 491b was approximately 29.0 mm, and the distance from the confluence 493 to the outlet 492 was approximately 49.0 mm. The weights 691, 692 were made of brass and were 30 mm long, 10 mm wide, and 10 mm thick. The vibration-damping connectors 891, 892 were cylindrical and made of brass, with a diameter of 3 mm and a thickness of approximately 6 mm. Therefore, the area where the vibration-damping connectors 891, 892 face the base 19 and the area where the vibration-damping connectors 891, 892 face the weights 691, 692 were both smaller than the area where the base 19 faces the weights 691, 692. The connector area ratio (Sc / Sp) was (1.5 x 1.5 x π) / (13.5 x 13.5 x π) x 100 = 1.2%. A vibration displacement diagram (displacement diagram based on finite element method (FEM) analysis) of the vibrating fluid device 9 is shown in Figure 29.

[0145] As shown in FIG. 29, the central portion of the base 19, that is, the position where the confluence 493 of the flow path 49 is formed, can be made the region with the largest vibration displacement.

[0146] The embodiments and examples disclosed above should be considered to be illustrative in all respects and not restrictive. The scope of the present invention is defined by the claims, not the above description, and includes all modifications within the meaning and scope of the claims.

[0147] 1, 2, 3A, 3B, 3C, 4A, 4B, 5, 6A, 6B, 6C, 6D, 7, 8, 9: Vibrating fluid device 11, 12, 13, 14, 15, 16, 17, 18, 19: Base body 21, 22, 23, 231, 232, 24, 25, 26, 261, 262, 27, 281, 282, 29: Piezoelectric element 31, 32, 33, 331, 332, 34, 35, 36, 361, 362, 37, 381, 382, ​​39: Connector 41, 42, 43, 44, 45, 46, 47, 48, 49: Flow path 54a, 54b, 55, 56, 57: Stirrer 65, 66, 67, 681, 682, 691, 692: Weight 76: Flow stopper 881, 882, 891, 892: Vibration damping connection

Claims

1. Substrate and, A piezoelectric element that vibrates the substrate, The base body comprises a connector for attaching the piezoelectric element, The connecting body has a thickness between the outer surface of the substrate and the piezoelectric element. A vibrating fluid apparatus in which the connection area ratio (Sc / Sp) (%) is 50% or less, defined as the ratio of the connection area Sc (area of ​​the surface adjacent to the piezoelectric element and facing the piezoelectric element in the connection) to the piezoelectric element area Sp (area of ​​the surface adjacent to the piezoelectric element and facing the piezoelectric element in the connection).

2. The vibrating fluid apparatus according to claim 1, wherein the aforementioned connection area ratio is 20% or less.

3. The vibrating fluid apparatus according to claim 1, wherein the aforementioned connection area ratio is 10% or less.

4. The vibrating fluid apparatus according to claim 1, wherein a flow channel is formed inside the substrate.

5. The vibrating fluid apparatus according to claim 4, wherein the inner wall of the flow path is provided with a protrusion that projects into the flow path.

6. The vibrating fluid apparatus according to claim 4, wherein the substrate is in the shape of a flat plate.

7. The vibrating fluid apparatus according to claim 4, further comprising a stirring bar housed in the aforementioned flow path.

8. The vibrating fluid apparatus according to claim 7, wherein the cross-section of the agitator housed in the flow path perpendicular to the flow path occupies the center of the cross-section of the flow path perpendicular to the flow path.

9. The vibrating fluid apparatus according to claim 7, wherein the flow path has a flow-stopping portion with an inner diameter smaller than the maximum diameter of the agitator on the downstream side of the agitator in the direction of fluid flow.

10. The vibratory fluid apparatus according to any one of claims 1 to 9, further comprising a vibration damping section for suppressing vibrations of a part of the base.

11. The base body and the vibration damping section are provided with a vibration damping connecting section, The vibratory fluid apparatus according to claim 10, wherein the area where the vibration-damping connecting portion and the base body face each other, or the area where the vibration-damping connecting portion and the vibration-damping portion face each other, is smaller than the area where the base body and the vibration-damping portion face each other.

12. The vibration-damping connecting portion is formed of a material having the same coefficient of thermal expansion as the material of the vibration-damping portion, as described in claim 11.

13. The system includes a viewing section for visualizing the aforementioned flow path, The vibration damping section is arranged on the opposite side of the visible section from the piezoelectric element, as described in claim 10.

14. The vibrating fluid apparatus according to any one of claims 1 to 9, wherein the piezoelectric element is configured to vibrate in such a way as to bend the substrate.

15. The vibrating fluid apparatus according to any one of claims 1 to 9, wherein the piezoelectric element is configured to bend and vibrate.

16. The system comprises multiple piezoelectric elements, The plurality of piezoelectric elements include a first piezoelectric element and a second piezoelectric element, The aforementioned flow path has an intermediate point, The vibrating fluid apparatus according to claim 1, wherein the first piezoelectric element and the second piezoelectric element are arranged with the midpoint between them.

17. The vibrating fluid apparatus according to claim 16, wherein the number of first piezoelectric elements and the number of second piezoelectric elements are each one.

18. The vibrating surface of the piezoelectric element is substantially parallel to the surface of the plate-shaped substrate, as described in claim 6.