Semiconductor device

Abstract

The present invention provides a semiconductor device comprising a transistor portion and a diode portion. The semiconductor device includes: a first-conductivity type drift region provided on a semiconductor substrate; a plurality of trench portions extending in a predetermined trench extension direction on a front surface side of the semiconductor substrate; a second conductivity-type base region provided above the drift region; a first conductivity-type first emitter region provided on a front surface of the semiconductor substrate and having a doping concentration higher than that of the drift region; a first conductivity-type second emitter region provided on the front surface of the semiconductor substrate and having a doping concentration higher than that of the drift region; and a second conductivity-type trench sidewall region provided above the drift region and having a doping concentration higher than that of the base region.

Description

Semiconductor Devices

[0001] The present invention relates to a semiconductor device.

[0002] Conventionally, semiconductor devices including an N-type emitter region and a P-type contact region have been known (see, for example, Patent Documents 1 and 2). General disclosure

[0003] In a first aspect of the present invention, there is provided a semiconductor device including a transistor portion and a diode portion, the semiconductor device including: a drift region of a first conductivity type provided in a semiconductor substrate; a plurality of trench portions extending on a front surface side of the semiconductor substrate in a predetermined trench extension direction; a base region of a second conductivity type provided above the drift region; a first emitter region of the first conductivity type provided on the front surface of the semiconductor substrate and having a doping concentration higher than that of the drift region; a second emitter region of the first conductivity type provided on the front surface of the semiconductor substrate and having a doping concentration higher than that of the drift region; and a trench sidewall region of the second conductivity type provided above the drift region and having a doping concentration higher than that of the base region. The plurality of trench portions may include gate trench portions. Any first mesa portion between the plurality of trench portions may have a first emitter formation region in which the first emitter region is provided on the side wall of the gate trench portion, and a second emitter formation region in which the trench sidewall region is provided below the second emitter region on the side wall of the gate trench portion.

[0004] The semiconductor device may further include a contact region of a second conductivity type provided above the drift region and having a doping concentration higher than that of the base region, and the first mesa portion may have a contact formation region on the front surface where the contact region is provided.

[0005] In any of the above semiconductor devices, the length of the first emitter formation region in the trench extension direction may be greater than the length of the contact formation region in the trench extension direction.

[0006] In any of the above semiconductor devices, both ends of the first emitter formation region may be in contact with the contact formation region in the trench extension direction.

[0007] In any of the above semiconductor devices, one end of the contact formation region may be in contact with the first emitter formation region in the trench extension direction, and the other end of the contact formation region may be in contact with the second emitter formation region.

[0008] In any of the above semiconductor devices, both ends of the second emitter formation region may be in contact with the contact formation region in the trench extension direction.

[0009] In any of the above semiconductor devices, the length Lb in the trench extension direction between the second emitter formation region and the contact formation regions provided at both ends of the second emitter formation region may be equal to or greater than the length of the first emitter formation region in the trench extension direction.

[0010] In any of the above semiconductor devices, the first emitter formation region, the contact formation region, the second emitter formation region, and the contact formation region may be repeatedly provided in this order in the trench extension direction.

[0011] In any of the semiconductor devices described above, the first emitter region may extend in the trench arrangement direction from one trench portion in contact with the first mesa portion to the other opposing trench portion.

[0012] In any of the above semiconductor devices, the doping concentration of the first emitter region may be the same as the doping concentration of the second emitter region.

[0013] In any of the above semiconductor devices, the trench sidewall region may be in contact with a lower end of the second emitter region.

[0014] In any of the above semiconductor devices, the doping concentration of the trench sidewall region may be lower than the doping concentration of the contact region.

[0015] In any of the above semiconductor devices, the doping concentration of the trench sidewall region is 1E17 cm －３ Above, 1E20cm －３ It may be the following:

[0016] In any of the above semiconductor devices, the length of the trench sidewall region in contact with the sidewall of the gate trench portion below the second emitter region may be 0.1 μm or more and 3.0 μm or less.

[0017] In any of the above semiconductor devices, the width of the trench sidewall region in the trench arrangement direction of the plurality of trench portions may be 0.05 μm or more and equal to or less than the mesa width of the first mesa portion.

[0018] In any of the above semiconductor devices, the trench sidewall region may extend from one trench portion adjacent to the first mesa portion to the other trench portion.

[0019] Any of the above semiconductor devices may further include an accumulation region of the first conductivity type provided above the drift region and having a doping concentration higher than that of the drift region.

[0020] In any of the above semiconductor devices, a lower end of the trench sidewall region may contact an upper end of the accumulation region.

[0021] Any of the above semiconductor devices may include a trench contact portion extending from the front surface of the semiconductor substrate in a depth direction of the semiconductor substrate.

[0022] In any of the above semiconductor devices, the trench contact portion may be spaced apart from the trench sidewall region.

[0023] In any of the above semiconductor devices, the lower end of the trench contact portion may be deeper than the lower end of the second emitter region and shallower than the lower end of the trench sidewall region.

[0024] Any of the above semiconductor devices may further include a plug region of a second conductivity type provided above the drift region and having a doping concentration higher than that of the base region.

[0025] In any of the above semiconductor devices, the plug region may be spaced apart from the trench sidewall region.

[0026] In any of the above semiconductor devices, the plug region may be provided at a lower end of the trench contact portion and may be in contact with the trench sidewall region.

[0027] Any of the above semiconductor devices may include a cathode region provided closer to the back surface of the semiconductor substrate than the drift region. The cathode region may include a first cathode portion of a first conductivity type having a higher doping concentration than the drift region. The cathode region may include a second cathode portion of a second conductivity type provided in contact with the first cathode portion.

[0028] In any of the above semiconductor devices, the transistor section may have a main region in which the first emitter formation region and the second emitter formation region are provided, and a boundary region provided adjacent to the diode section rather than the main region.

[0029] In any of the semiconductor devices described above, the base region may be in contact with the first emitter region on a sidewall of the gate trench portion of the first emitter formation region, and the drift region may be in contact with the base region on a sidewall of the gate trench portion of the first emitter formation region.

[0030] In any of the semiconductor devices described above, the base region may be in contact with the first emitter region on a sidewall of the gate trench portion of the first emitter formation region, and the accumulation region may be in contact with the base region on a sidewall of the gate trench portion of the first emitter formation region.

[0031] The above summary of the invention does not list all of the features of the present invention, and subcombinations of these features may also be inventions.

[0032] 3A shows an example of a top view of the semiconductor device 100. It is an enlarged view of region A in FIG. 1. It is a view showing an example of an XZ cross section including the a-a' cross section in FIG. 2A. It is a view showing an example of an XZ cross section including the bb' cross section in FIG. 2A. It is a view showing an example of an XZ cross section including the c-c' cross section in FIG. 2A. It is a view showing an example of a YZ cross section including the dd' cross section in FIG. 2A. It is a modified example of the enlarged view of region A in FIG. 1. It is a view showing an example of an XZ cross section including the ee' cross section in FIG. 3A. It is a view showing an example of an XZ cross section including the ff' cross section in FIG. 3A. It is a view showing an example of an XZ cross section including the gg' cross section in FIG. 3A. It is a view showing an example of a YZ cross section including the h-h' cross section in FIG. 3A. It is a view showing an example of a YZ cross section including the ii' cross section in FIG. 3A. It is an enlarged view of a modified example of an XZ cross section passing through the second emitter formation region 62. It is an enlarged view of a modified example of an XZ cross section passing through the second emitter formation region 62. It is an enlarged view of a modified example of an XZ cross section passing through the second emitter formation region 62. 3A , 3B, 3C, 3D, 3E, 3F, 3G, 3G-3H ...

[0033] The present invention will be described below through embodiments of the invention, but the following embodiments do not limit the scope of the invention as claimed. Furthermore, not all of the combinations of features described in the embodiments are necessarily essential to the solution of the invention.

[0034] In this specification, one side in a direction parallel to the depth direction of a semiconductor substrate is referred to as "upper" and the other side as "lower." Of the two main surfaces of a substrate, layer, or other member, one surface is referred to as the upper surface and the other surface is referred to as the lower surface. The directions of "upper" and "lower" are not limited to the direction of gravity or the directions when the semiconductor device is mounted.

[0035] In this specification, technical matters may be explained using orthogonal coordinate axes of the X-axis, Y-axis, and Z-axis. The orthogonal coordinate axes merely identify the relative positions of components and do not limit a specific direction. For example, the Z-axis does not limit the height direction relative to the ground. Note that the +Z-axis direction and the -Z-axis direction are opposite directions. When the Z-axis direction is described without specifying positive or negative, it means a direction parallel to the +Z-axis and -Z-axis.

[0036] In this specification, orthogonal axes parallel to the upper and lower surfaces of the semiconductor substrate are referred to as the X-axis and Y-axis. Furthermore, an axis perpendicular to the upper and lower surfaces of the semiconductor substrate is referred to as the Z-axis. In this specification, the direction of the Z-axis may be referred to as the depth direction. Furthermore, in this specification, the direction parallel to the upper and lower surfaces of the semiconductor substrate, including the X-axis and Y-axis, may be referred to as the horizontal direction.

[0037] In this specification, when we say "same" or "equal," it may also include cases where there is an error due to manufacturing variations, etc. The error is, for example, within 10%.

[0038] In this specification, the conductivity type of a doped region doped with an impurity is described as P-type or N-type. In this specification, the impurity may particularly mean either an N-type donor or a P-type acceptor, and may be referred to as a dopant. In this specification, doping means introducing a donor or an acceptor into a semiconductor substrate to form a semiconductor exhibiting an N-type conductivity or a P-type conductivity.

[0039] In this specification, the doping concentration means the concentration of donors or acceptors in a thermal equilibrium state. In this specification, the net doping concentration means the net concentration obtained by adding together the donor concentration as the concentration of positive ions and the acceptor concentration as the concentration of negative ions, taking into account the polarity of the charge. As an example, the donor concentration is N Ｄ , acceptor concentration is N Ａ Then, the net doping concentration at any position is N Ｄ -N ＡIn this specification, the net doping concentration may be simply referred to as the doping concentration.

[0040] In this specification, the terms P+ type and N+ type refer to a doping concentration higher than that of P type or N type, and the terms P- type and N- type refer to a doping concentration lower than that of P type or N type. In addition, in this specification, the terms P++ type and N++ type refer to a doping concentration higher than that of P+ type or N+ type.

[0041] In this specification, chemical concentration refers to the atomic density of an impurity measured regardless of its state of electrical activation. Chemical concentration can be measured, for example, by secondary ion mass spectrometry (SIMS). The net doping concentration can be measured by voltage-capacitance measurement (CV). The carrier concentration measured by spreading resistance measurement (SR) may also be referred to as the net doping concentration. Carriers refer to electron or hole charge carriers. The carrier concentration measured by CV or SR may be a value in a thermal equilibrium state. In addition, since the donor concentration in an N-type region is sufficiently greater than the acceptor concentration, the carrier concentration in that region may also be referred to as the donor concentration. Similarly, in a P-type region, the carrier concentration in that region may also be referred to as the acceptor concentration. In this specification, the doping concentration in an N-type region may also be referred to as the donor concentration, and the doping concentration in a P-type region may also be referred to as the acceptor concentration.

[0042] In addition, when the concentration distribution of the donor, acceptor, or net doping has a peak, the peak value may be taken as the donor, acceptor, or net doping concentration in the region. In cases where the donor, acceptor, or net doping concentration is approximately uniform, the average value of the donor, acceptor, or net doping concentration in the region may be taken as the donor, acceptor, or net doping concentration.

[0043] The carrier concentration measured by the SR method may be lower than the donor or acceptor concentration. In the range where current flows when measuring spreading resistance, the carrier mobility of the semiconductor substrate may be lower than the value in the crystalline state. A decrease in carrier mobility occurs when carriers are scattered due to a disorder in the crystalline structure caused by lattice defects or the like. The reason for the decrease in carrier concentration is as follows. In the SR method, spreading resistance is measured and the carrier concentration is calculated from the measured spreading resistance. At this time, the carrier mobility is calculated using the carrier mobility in the crystalline state. On the other hand, at locations where lattice defects are introduced, the carrier mobility is decreased, but the carrier concentration is calculated using the carrier mobility in the crystalline state. Therefore, the value obtained is lower than the actual carrier concentration, i.e., the donor or acceptor concentration.

[0044] The donor or acceptor concentration calculated from the carrier concentration measured by the CV method or the SR method may be lower than the chemical concentration of the element representing the donor or acceptor. As an example, the donor concentration of phosphorus or arsenic, which acts as a donor in a silicon semiconductor, or the acceptor concentration of boron, which acts as an acceptor, is about 99% of the chemical concentration. On the other hand, the donor concentration of hydrogen, which acts as a donor in a silicon semiconductor, is about 0.1% to 10% of the chemical concentration of hydrogen. In this specification, the SI unit system is adopted. In this specification, distance and length units may be expressed in cm (centimeter). In this case, various calculations may be performed by converting them to m (meter). Regarding numerical representations of powers of 10, for example, 1E+16 is expressed as 1×10 １６ , and the display of 1E-16 is 1×10 －１６ Shows.

[0045] Fig. 1 shows an example of a top view of a semiconductor device 100. Fig. 1 shows the positions of each component projected onto the top surface of a semiconductor substrate 10. Fig. 1 shows only some components of the semiconductor device 100, and some components are omitted. The semiconductor device 100 is a semiconductor chip including a transistor section 70 and a diode section 80.

[0046] The transistor section 70 includes a transistor such as an insulated gate bipolar transistor (IGBT). The diode section 80 includes a diode such as a free wheel diode (FWD). The semiconductor device 100 of this example is a reverse conducting IGBT (RC-IGBT) that has the transistor section 70 and the diode section 80 on the same chip.

[0047] The semiconductor substrate 10 is a substrate formed of a semiconductor material. The semiconductor substrate 10 may be a silicon substrate, a silicon carbide substrate, a diamond substrate, a nitride semiconductor substrate such as gallium nitride, an inorganic compound semiconductor substrate such as gallium oxide, or an organic compound semiconductor substrate. The semiconductor substrate 10 in this example is a silicon substrate. The semiconductor substrate 10 may be a wafer cut from a semiconductor ingot, or may be a chip obtained by dividing the wafer. The semiconductor ingot may be manufactured by any of the Czochralski method (CZ method), the magnetic field-applied Czochralski method (MCZ method), or the float zone method (FZ method).

[0048] The semiconductor substrate 10 has end edges 102 in a top view. When simply referred to as a top view in this specification, it means that the semiconductor substrate 10 is viewed from the top surface side. The semiconductor substrate 10 of this example has two pairs of end edges 102 that face each other in a top view. In FIG. 1 , the X-axis and Y-axis are parallel to one of the end edges 102. The Z-axis is perpendicular to the top surface of the semiconductor substrate 10. The semiconductor substrate 10 has an active region 160 and an edge termination structure 170.

[0049] The active region 160 is a region through which a main current flows in the depth direction between the upper and lower surfaces of the semiconductor substrate 10 during operation of the semiconductor device 100. An emitter electrode is provided above the active region 160, but is not shown in FIG.

[0050] At least one of a transistor section 70 including a transistor element such as an IGBT and a diode section 80 including a diode element such as a free wheel diode (FWD) is provided in the active region 160. In the example of Fig. 1, the transistor sections 70 and the diode sections 80 are alternately arranged along a predetermined arrangement direction (the X-axis direction in this example) on the upper surface of the semiconductor substrate 10.

[0051] In FIG. 1 , the region where the transistor section 70 is arranged is marked with the symbol "I," and the region where the diode section 80 is arranged is marked with the symbol "F." In this specification, the direction perpendicular to the arrangement direction in a top view may be referred to as the extension direction (the Y-axis direction in FIG. 1 ). The transistor section 70 and the diode section 80 may each have a longitudinal direction in the extension direction. In other words, the length of the transistor section 70 in the Y-axis direction is greater than the width in the X-axis direction. Similarly, the length of the diode section 80 in the Y-axis direction is greater than the width in the X-axis direction. The extension direction of the transistor section 70 and the diode section 80 may be the same as the longitudinal direction of each trench section, which will be described later.

[0052] The diode section 80 has an N+ type cathode region in a region that contacts the lower surface of the semiconductor substrate 10. In this specification, the region in which the cathode region is provided is referred to as the diode section 80. In other words, the diode section 80 is a region that overlaps with the cathode region in a top view. A P+ type collector region may be provided in a region other than the cathode region on the lower surface of the semiconductor substrate 10.

[0053] The transistor section 70 has a P+ type collector region in a region in contact with the lower surface of the semiconductor substrate 10. The transistor section 70 also has a gate structure, which has an N type emitter region, a P type base region, a gate conductive portion, and a gate insulating film, periodically arranged on the upper surface side of the semiconductor substrate 10.

[0054] The semiconductor device 100 may have one or more pads above the semiconductor substrate 10. The semiconductor device 100 of this example has a gate pad 112. The semiconductor device 100 may also have pads such as an anode pad, a cathode pad, and a current detection pad. Each pad is disposed near an edge 102. The vicinity of the edge 102 refers to the region between the edge 102 and the emitter electrode in a top view. When the semiconductor device 100 is mounted, each pad may be connected to an external circuit via wiring such as a wire.

[0055] A gate potential is applied to the gate pad 112. The gate pad 112 is electrically connected to a conductive portion of the gate trench portion of the active region 160. The semiconductor device 100 includes a gate wiring 130 that connects the gate pad 112 and the gate trench portion.

[0056] The gate wiring 130 is electrically connected to the gate conductive portion of the transistor portion 70 and applies a gate voltage to the transistor portion 70. The gate wiring 130 is provided so as to surround the outer periphery of the active region 160 in a top view. The gate wiring 130 is electrically connected to a gate pad 112 provided in the edge termination structure portion 170.

[0057] The semiconductor device 100 may also include a temperature sensing unit (not shown) which is a PN junction diode formed of polysilicon or the like, and a current detection unit (not shown) which simulates the operation of a transistor unit provided in the active region 160.

[0058] In the present example, the semiconductor device 100 includes an edge termination structure 170 between the active region 160 and the edge 102 when viewed from above. The edge termination structure 170 in the present example is disposed between the gate wiring 130 and the edge 102. The edge termination structure 170 relieves electric field concentration on the upper surface side of the semiconductor substrate 10. The edge termination structure 170 may include at least one of a guard ring, a field plate, and a resurf, which are provided in an annular shape surrounding the active region 160.

[0059] 2A is an enlarged view of region A in Fig. 1. Region A is a region including the transistor section 70, the diode section 80, and the gate wiring 130. In this example, the gate wiring 130 includes a gate metal layer 50 and a gate runner section 51.

[0060] On the front surface 21 of the semiconductor substrate 10, a boundary region 90 is provided between the transistor section 70 and the diode section 80. The transistor section 70 has a main region 75 and the boundary region 90. The front surface 21 of the semiconductor substrate 10 refers to one of two opposing main surfaces of the semiconductor substrate 10. The front surface 21 will be described later.

[0061] The semiconductor device 100 of this example includes a gate trench portion 40, a dummy trench portion 30, a well region 17, an emitter region 12, a base region 14, a contact region 15, and an anode region 19 formed inside the front surface 21 side of the semiconductor substrate 10. The semiconductor device 100 of this example also includes an emitter electrode 52 and a gate metal layer 50 provided above the front surface 21 of the semiconductor substrate 10. The emitter electrode 52 and the gate metal layer 50 are provided separately from each other.

[0062] An interlayer insulating film is formed between emitter electrode 52 and gate metal layer 50 and front surface 21 of semiconductor substrate 10, but the interlayer insulating film is omitted in Fig. 2A. In this example, contact holes 54, 55, and 56 are formed in the interlayer insulating film so as to penetrate the interlayer insulating film.

[0063] The emitter electrode 52 is electrically connected to the emitter region 12, the contact region 15, the base region 14, and the anode region 19 on the front surface 21 of the semiconductor substrate 10 through a contact hole 54 opened in the interlayer insulating film. The emitter electrode 52 is also connected to a dummy conductive portion in the dummy trench portion 30 through a contact hole 56. A connection portion 25 made of a conductive material such as polysilicon doped with impurities may be provided between the emitter electrode 52 and the dummy conductive portion.

[0064] The gate metal layer 50 contacts the gate runner 51 through the contact hole 55. The gate runner 51 is made of a semiconductor such as polysilicon doped with impurities. The gate runner 51 is connected to a gate conductive portion in the gate trench 40 on the front surface 21 of the semiconductor substrate 10.

[0065] The emitter electrode 52 and the gate metal layer 50 are formed of a material containing metal. At least a portion of the emitter electrode 52 may be formed of a metal such as aluminum (Al) or a metal alloy such as aluminum-silicon alloy (AlSi) or aluminum-silicon-copper alloy (AlSiCu). At least a portion of the gate metal layer 50 may be formed of a metal such as aluminum (Al) or a metal alloy such as aluminum-silicon alloy (AlSi) or aluminum-silicon-copper alloy (AlSiCu). The emitter electrode 52 and the gate metal layer 50 may have a barrier metal made of titanium or a titanium compound below the region made of aluminum or the like. Each electrode may further have a plug formed by embedding tungsten or the like in a contact hole so as to contact the barrier metal and aluminum or the like.

[0066] The well region 17 is provided so as to overlap with the gate metal layer 50 and the gate runner portion 51. The well region 17 is also provided so as to extend by a predetermined width into an area where it does not overlap with the gate metal layer 50 and the gate runner portion 51. In this example, the well region 17 is provided away from the end of the contact hole 54 in the Y-axis direction toward the gate metal layer 50. The well region 17 is a region of a second conductivity type having a doping concentration higher than that of the base region 14. In this example, the base region 14 is P- type, and the well region 17 is P+ type.

[0067] Each of the transistor section 70 and the diode section 80 has a plurality of trench sections arranged in the trench arrangement direction on the front surface 21 of the semiconductor substrate 10. In the transistor section 70 of this example, one or more gate trench sections 40 and one or more dummy trench sections 30 are alternately provided along the trench arrangement direction. In the diode section 80 of this example, a plurality of dummy trench sections 30 are provided along the trench arrangement direction. In this example, the diode section 80 does not have a gate trench section 40. The trench arrangement direction may be the same as or different from the arrangement direction of the transistor section 70 and the diode section 80. In this example, the trench arrangement direction is the same as the arrangement direction of the transistor section 70 and the diode section 80.

[0068] In the transistor section 70, one or more gate trench sections 40 are arranged at predetermined intervals along the trench arrangement direction. The gate conductive section inside the gate trench section 40 is electrically connected to the gate metal layer 50, and a gate potential is applied thereto. In the transistor section 70, one or more dummy trench sections 30 may be arranged at predetermined intervals along the trench arrangement direction. A potential different from the gate potential is applied to the dummy conductive section inside the dummy trench section 30. The dummy conductive section in this example is electrically connected to the emitter electrode 52, and an emitter potential is applied thereto.

[0069] In the transistor section 70, one or more gate trench sections 40 and one or more dummy trench sections 30 may be alternately formed along a predetermined trench arrangement direction. The dummy trench sections 30 are arranged at predetermined intervals along the predetermined trench arrangement direction in the diode section 80 and the boundary region 90. Note that the transistor section 70 may not be provided with the dummy trench sections 30 and may be composed of only the gate trench sections 40.

[0070] The gate trench portion 40 in this example may have two extension portions 41 (portions of the trench that are linear along the extension direction) extending along a trench extension direction perpendicular to the trench arrangement direction, and a connection portion 43 connecting the two extension portions 41. The trench extension direction in FIG. 2A is the Y-axis direction. The trench extension direction may be the same as or different from the extension direction of the transistor portion 70 and the diode portion 80. The trench extension direction in this example is the same as the extension direction of the transistor portion 70 and the diode portion 80.

[0071] At least a part of the connection portion 43 is preferably curved in a top view. By connecting the ends of the two extension portions 41 in the Y-axis direction with each other by the connection portion 43, electric field concentration at the ends of the extension portions 41 can be alleviated.

[0072] In the transistor section 70, the dummy trench section 30 is provided between the extension portions 41 of the gate trench section 40. One or more dummy trench sections 30 may be provided between the extension portions 41. The dummy trench section 30 may have a linear shape extending in a predetermined trench extension direction, and may have an extension portion 31 and a connection portion 33, similar to the gate trench section 40. The semiconductor device 100 may include both linear dummy trench sections 30 without the connection portion 33, and dummy trench sections 30 with the connection portion 33. The direction in which the extension portion 41 of the gate trench section 40 or the extension portion 31 of the dummy trench section 30 extends long in the trench extension direction is defined as the longitudinal direction of the trench section. The longitudinal direction of the gate trench portion 40 or the dummy trench portion 30 may coincide with the extension direction of the transistor portion 70 and the diode portion 80. In this example, the extension direction of the transistor portion 70 and the diode portion 80 and the longitudinal direction of the trench portion are the Y-axis direction. The trench arrangement direction in which multiple gate trench portions 40 or dummy trench portions 30 are arranged is defined as the short-side direction of the trench portion. The short-side direction may coincide with the arrangement direction of the transistor portions 70 and the diode portions 80. The short-side direction may also be perpendicular to the longitudinal direction. In this example, the longitudinal direction and the short-side direction are perpendicular. In this example, the arrangement direction of the transistor portion 70 and the diode portion 80 and the short-side direction of the trench portion are the X-axis direction.

[0073] The gate conductive portion in the gate trench portion 40 is connected to the gate runner portion 51 at a connection portion 43 at the tip of the gate trench portion 40. The gate trench portion 40 may be provided so as to protrude toward the gate runner portion 51 further than the dummy trench portion 30 in the trench extension direction (Y-axis direction). The protruding portion of the gate trench portion 40 is connected to the gate runner portion 51.

[0074] The diffusion depth of the well region 17 may be deeper than the depths of the gate trench portion 40 and the dummy trench portion 30. The ends of the gate trench portion 40 and the dummy trench portion 30 in the Y-axis direction are provided in the well region 17 when viewed from above. In other words, at the ends of each trench portion in the Y-axis direction, the bottom of each trench portion in the depth direction is covered by the well region 17. This makes it possible to alleviate electric field concentration at the bottom of each trench portion.

[0075] A mesa portion is provided between each trench portion in the arrangement direction. The mesa portion refers to a region inside the semiconductor substrate 10 that is sandwiched between two adjacent trench portions. As an example, the upper end of the mesa portion is the upper surface of the semiconductor substrate 10. The depth position of the lower end of the mesa portion is the same as the depth position of the lower end of the trench portion. In this example, the mesa portion is provided on the upper surface of the semiconductor substrate 10, extending along the trench portion in the trench extension direction (Y-axis direction).

[0076] The main region 75 is a region in the transistor section 70 through which a main current flows in the depth direction. The main region 75 has an emitter region 12. The main region 75 has a first emitter formation region 61 and a second emitter formation region 62. In this example, the main region 75 has the first emitter formation region 61, the second emitter formation region 62, and a contact formation region 63. The area of ​​the main region 75 may be larger than the area of ​​the boundary region 90.

[0077] The boundary region 90 is provided on the diode section 80 side of the transistor section 70. That is, the boundary region 90 is provided in the transistor section 70 closer to the diode section 80 than the main region 75. The boundary region 90 may have a dummy trench section 30 and may be a region in which a collector region 22 is provided on the back surface side of the semiconductor substrate 10. Both ends of the mesa section of the boundary region 90 in the trench arrangement direction may contact the dummy trench section 30. All of the trench sections in the boundary region 90 may be dummy trench sections 30. The boundary region 90 may also include a gate trench section 40. In this example, the boundary region 90 does not have a first conductivity type emitter region 12 provided in the mesa section on the front surface 21 side of the semiconductor substrate 10. The boundary region 90 may have a base region 14 and an anode region 19 on the front surface 21. The boundary region 90 may have the emitter region 12 or the contact region 15 on the front surface 21. In this example, the boundary region 90 has the anode region 19 and the contact region 15 on the front surface 21. Note that Figure 2A shows the positions of the collector region 22 and the cathode region 82 provided on the back surface side of the semiconductor substrate 10 when projected onto the front surface 21.

[0078] The mesa portion 71 is a mesa portion provided in the main region 75 of the transistor portion 70. The mesa portion 81 is a mesa portion provided in the diode portion 80. The mesa portion 91 is a mesa portion provided in the boundary region 90. In this specification, when simply referred to as a mesa portion, it may refer to any of the mesa portion 71, the mesa portion 81, or the mesa portion 91. The extension portion of each trench portion may be considered to be one trench portion. In other words, the region sandwiched between two extension portions may be considered to be a mesa portion.

[0079] Each mesa portion is provided with a base region 14 or an anode region 19. Of the base region 14 or anode region 19 exposed on the front surface 21 of the semiconductor substrate 10 in the mesa portion, the region closest to the gate metal layer 50 is referred to as the base region 14-e or anode region 19-e. While FIG. 2A shows the base region 14-e or anode region 19-e disposed at one end of each mesa portion in the trench extension direction, a base region 14-e or anode region 19-e is also disposed at the other end of each mesa portion. Each mesa portion may be provided with at least one of a first conductivity type emitter region 12 and a second conductivity type contact region 15 in a region sandwiched between the base region 14-e or anode region 19-e in a top view. In this example, the emitter region 12 is N+ type, and the contact region 15 is P+ type. The emitter region 12 and the contact region 15 may be provided between the base region 14 and the upper surface of the semiconductor substrate 10 in the depth direction.

[0080] The mesa portion 71 of the transistor portion 70 has an emitter region 12 exposed on the front surface 21 of the semiconductor substrate 10. The emitter region 12 is provided in contact with the gate trench portion 40. The mesa portion 71 may be provided with a contact region 15 exposed on the front surface 21 of the semiconductor substrate 10.

[0081] The mesa portion 71 in this example has a first emitter formation region 61, a second emitter formation region 62, and a contact formation region 63. The mesa portion 71 is an example of a first mesa portion having the first emitter formation region 61 and the second emitter formation region 62. The first emitter formation region 61 is a region in which the trench sidewall region 11 described below is not provided, and may form a channel. The second emitter formation region 62 is a region in which the trench sidewall region 11 is provided, and may not form a channel. The trench sidewall region 11 will be described later.

[0082] The first emitter formation region 61 is a region in which the first emitter region 121 is provided on the sidewall of the gate trench portion 40. Alternatively, the first emitter formation region 61 may be a region on the sidewall of the gate trench portion 40 where the trench sidewall region 11 is not provided below the first emitter region 121. The first emitter formation region 61 is a region into which an inversion layer is formed when the gate is on and electrons are injected. The first emitter formation region 61 may be in contact with at least one of the second emitter formation region 62 or the contact formation region 63. In this example, both ends of the first emitter formation region 61 are in contact with the contact formation region 63 in the trench extension direction. This allows holes to be extracted at both ends of the first emitter formation region 61.

[0083] The first emitter region 121 is provided on the front surface 21 of the semiconductor substrate 10 and is a region of the first conductivity type having a higher doping concentration than the drift region 18. The drift region 18 will be described later. The doping concentrations of the first emitter region 121 and the second emitter region 122 are 1E21 cm －３ Above, 1E22cm －３ The first emitter region 121 and the second emitter region 122 may have the same doping concentration. In this example, the first emitter region 121 extends in the trench arrangement direction from one trench portion that contacts the mesa portion 71 to the other opposing trench portion.

[0084] The second emitter formation region 62 is a region on the sidewall of the gate trench portion 40, in which the trench sidewall region 11 is provided below the second emitter region 122. Because the second emitter formation region 62 has the trench sidewall region 11 below the second emitter region 122, an inversion layer is not formed and the second emitter formation region 62 does not need to function as a channel region. The second emitter formation region 62 may be in contact with at least one of the first emitter formation region 61 or the contact formation region 63. In this example, both ends of the second emitter formation region 62 are in contact with the contact formation region 63 in the trench extension direction.

[0085] The second emitter region 122 is provided on the front surface 21 of the semiconductor substrate 10 and is a region of the first conductivity type having a doping concentration higher than that of the drift region 18. In this example, the second emitter region 122 extends in the trench arrangement direction from one trench portion that contacts the mesa portion 71 to the other opposing trench portion.

[0086] The doping concentration of the first emitter region 121 may be the same as the doping concentration of the second emitter region 122. That is, the first emitter region 121 and the second emitter region 122 may be formed by an ion implantation process under the same conditions. The first emitter region 121 and the second emitter region 122 may be formed simultaneously by an ion implantation process under the same conditions. The integral of the doping concentration of the first emitter region 121 may be the same as the integral of the doping concentration of the second emitter region 122.

[0087] The contact formation region 63 is a region where the contact region 15 is provided on the front surface 21. The contact formation region 63 may be in contact with at least one of the first emitter formation region 61 or the second emitter formation region 62.

[0088] The first emitter formation region 61, the second emitter formation region 62, and the contact formation region 63 may be arranged in any order in the trench extension direction. In this example, the first emitter formation region 61, the contact formation region 63, the second emitter formation region 62, and the contact formation region 63 are repeatedly provided in this order in the trench extension direction.

[0089] The contact formation region 63 is in contact with at least one of the first emitter formation region 61 or the second emitter formation region 62. In this example, the contact formation region 63 is in contact with both the first emitter formation region 61 and the second emitter formation region 62. In this example, in the trench extension direction, one end of the contact formation region 63 is in contact with the first emitter formation region 61, and the other end of the contact formation region 63 is in contact with the second emitter formation region 62.

[0090] The mesa portion 81 of the diode portion 80 does not have an emitter region 12, but may have an emitter region 12. In this example, an anode region 19 is provided on the front surface 21 of the mesa portion 81. A contact region 15 may be provided on the front surface 21 of the mesa portion 81. In the region of the front surface 21 of the mesa portion 81 sandwiched between the anode regions 19-e, a contact region 15 may be provided in contact with each anode region 19-e. In the region of the front surface 21 of the mesa portion 81 sandwiched between the contact regions 15, an anode region 19 may be provided. The anode region 19 may be disposed in the entire region sandwiched between the contact regions 15 in the trench extension direction.

[0091] A contact hole 54 is provided above each mesa portion. The contact hole 54 is arranged in a region sandwiched between the base region 14-e or the anode region 19-e along the trench extension direction. In this example, the contact holes 54 are provided above the contact region 15, the base region 14, the anode region 19, and the emitter region 12. The contact holes 54 are not provided in regions corresponding to the base region 14-e, the anode region 19-e, and the well region 17. The contact hole 54 may be arranged in the center of the mesa portion 71 in the trench arrangement direction (X-axis direction).

[0092] In the diode section 80, an N+ type cathode region 82 is provided in a region adjacent to the lower surface of the semiconductor substrate 10. The doping concentration of the cathode region 82 is higher than the doping concentration of the drift region 18. A P+ type collector region 22 may be provided in a region of the lower surface of the semiconductor substrate 10 where the cathode region 82 is not provided. The cathode region 82 and the collector region 22 are provided between a rear surface 23 of the semiconductor substrate 10 and a buffer region 20, which will be described later. In FIG. 2A , a boundary 78 between the cathode region 82 and the collector region 22 is indicated by a dashed line. The rear surface 23 will be described later.

[0093] The cathode region 82 is disposed away from the well region 17 in the Y-axis direction. This ensures a distance between the cathode region 82 and a P-type region (well region 17) that has a relatively high doping concentration and is formed deep, improving the breakdown voltage and suppressing the injection of holes from the well region 17. In this example, the end of the cathode region 82 in the Y-axis direction is disposed farther from the well region 17 than the end of the contact hole 54 in the Y-axis direction. In another example, the end of the cathode region 82 in the Y-axis direction may be disposed between the well region 17 and the contact hole 54.

[0094] The anode region 19 is provided in the mesa portion 91 of the boundary region 90. The boundary region 90 may have a plurality of mesa portions 91. The mesa portion 91 may have the base region 14 instead of the anode region 19. The anode region 19 will be described later.

[0095] 2B is a diagram showing an example of an XZ cross section including the aa' cross section in FIG. 2A. The XZ cross section including the aa' cross section is an XZ plane passing through the first emitter formation region 61 in the transistor section 70. The semiconductor device 100 of this example has a semiconductor substrate 10, an interlayer insulating film 38, an emitter electrode 52, and a collector electrode 24 in the XZ cross section including the aa' cross section. The emitter electrode 52 is provided above the semiconductor substrate 10 and the interlayer insulating film 38.

[0096] The drift region 18 is a region of a first conductivity type provided in the semiconductor substrate 10. In this example, the drift region 18 is, for example, an N-type. The drift region 18 may be a region remaining in the semiconductor substrate 10 without other doped regions being formed therein. That is, the doping concentration of the drift region 18 may be the same as the doping concentration of the semiconductor substrate 10.

[0097] The buffer region 20 is a region of the first conductivity type that is provided closer to the back surface 23 of the semiconductor substrate 10 than the drift region 18. The buffer region 20 in this example is provided closer to the back surface 23 of the semiconductor substrate 10 than the center of the semiconductor substrate 10 in the depth direction. The buffer region 20 in this example is, for example, N-type. The doping concentration of the buffer region 20 is higher than the doping concentration of the drift region 18. The buffer region 20 may function as a field stop layer that prevents a depletion layer spreading from the lower surface side of the base region 14 from reaching the collector region 22 of the second conductivity type and the cathode region 82 of the first conductivity type.

[0098] The collector region 22 and the cathode region 82 are provided on the back surface 23 of the semiconductor substrate 10. The collector region 22 is provided below the buffer region 20 in the transistor section 70. The cathode region 82 is provided below the buffer region 20 in the diode section 80. A boundary 78 between the collector region 22 and the cathode region 82 may be the boundary between the transistor section 70 and the diode section 80.

[0099] The collector electrode 24 is formed on the rear surface 23 of the semiconductor substrate 10. The collector electrode 24 is formed of a conductive material such as a metal. At least a portion of the collector electrode 24 may be formed of a metal such as aluminum (Al), or a metal alloy such as an aluminum-silicon alloy (AlSi) or an aluminum-silicon-copper alloy (AlSiCu).

[0100] The base region 14 is a second conductivity type region provided above the drift region 18 in the mesa portion 71. The base region 14 may also be provided in the mesa portion 91. The base region 14 is provided in contact with the gate trench portion 40. The base region 14 may be provided in contact with the dummy trench portion 30.

[0101] The anode region 19 is a second conductivity type region provided above the drift region 18 in the mesa portion 91 and the mesa portion 81. The anode region 19 is provided in contact with the dummy trench portion 30. The anode region 19 may be provided in contact with the gate trench portion 40. The depth of the anode region 19 in the depth direction of the semiconductor substrate 10 may be deeper, shallower, or equal to the depth of the base region 14. In this example, the depth of the anode region 19 is equal to the depth of the base region 14.

[0102] The doping concentration of the anode region 19 may be the same as or lower than that of the base region 14. The anode region 19 in this example is P-- type. The maximum doping concentration of the anode region 19 may be equal to or smaller than that of the base region 14. The maximum doping concentration of the anode region 19 in this example is lower than that of the base region 14. The integral of the doping concentration of the anode region 19 along the depth direction of the semiconductor substrate 10 may be equal to or smaller than that of the base region 14. The integral of the doping concentration of the anode region 19 in this example is lower than that of the base region 14.

[0103] The first emitter region 121 is provided closer to the front surface 21 than the drift region 18 and has a higher doping concentration than the drift region 18. The first emitter region 121 of this example is provided on the front surface 21. That is, the first emitter region 121 of this example is exposed at the front surface 21 of the semiconductor substrate 10. The first emitter region 121 of this example is provided above the base region 14 in the mesa portion 71. The base region 14 may be in contact with the first emitter region 121 on the sidewall of the gate trench portion 40 of the first emitter formation region 61. The first emitter region 121 may be provided in contact with the gate trench portion 40. The first emitter region 121 may or may not be in contact with the dummy trench portion 30. Note that the first emitter region 121 does not have to be provided in the mesa portion 91.

[0104] The accumulation region 16 is provided above the drift region 18. That is, the accumulation region 16 is provided closer to the front surface 21 of the semiconductor substrate 10 than the drift region 18. The accumulation region 16 is a region of the first conductivity type having a higher doping concentration than the drift region 18. In this example, the accumulation region 16 is, for example, an N+ type. The doping concentration of the accumulation region 16 is 1E16 cm －３ Above, 1E18cm －３ The accumulation region 16 may be provided in the mesa portion 71. The accumulation region 16 may be provided in the mesa portion 81 and the mesa portion 91.

[0105] The accumulation region 16 is provided in contact with the gate trench portion 40. On the sidewall of the gate trench portion 40 of the first emitter formation region 61, the accumulation region 16 may be in contact with the base region 14. The accumulation region 16 may or may not be in contact with the dummy trench portion 30. The doping concentration of the accumulation region 16 is higher than the doping concentration of the drift region 18. By providing the accumulation region 16, the carrier injection enhancement effect (IE effect) can be enhanced, and the on-voltage of the transistor portion 70 can be reduced.

[0106] One or more gate trenches 40 and one or more dummy trenches 30 are provided on the front surface 21. Each trench extends from the front surface 21 to the drift region 18. In regions where at least one of the emitter region 12, the base region 14, the contact region 15, and the accumulation region 16 is provided, each trench also penetrates these regions to reach the drift region 18. The trenches penetrating the doped regions are not limited to those manufactured in the order of forming the doped regions and then the trenches. The trenches penetrating the doped regions also include those formed after the trenches are formed.

[0107] The gate trench portion 40 has a gate trench formed on the front surface 21, a gate insulating film 42, and a gate conductive portion 44. The gate insulating film 42 is formed to cover the inner wall of the gate trench. The gate insulating film 42 may be formed by oxidizing or nitriding the semiconductor on the inner wall of the gate trench. The gate conductive portion 44 is formed inside the gate trench, further inward than the gate insulating film 42. The gate insulating film 42 insulates the gate conductive portion 44 from the semiconductor substrate 10. The gate conductive portion 44 is made of a conductive material such as polysilicon. The gate trench portion 40 is covered on the front surface 21 with an interlayer insulating film 38.

[0108] The gate conductive portion 44 includes a region facing the base region 14 across the gate insulating film 42. When a predetermined voltage is applied to the gate conductive portion 44, an electron channel is formed by an inversion layer in the surface layer of the base region 14 at the interface that contacts the gate trench.

[0109] The dummy trench portion 30 may have the same structure as the gate trench portion 40. The dummy trench portion 30 has a dummy trench, a dummy insulating film 32, and a dummy conductive portion 34 formed on the front surface 21 side. The dummy insulating film 32 is formed to cover the inner wall of the dummy trench. The dummy conductive portion 34 is formed inside the dummy trench and further inward than the dummy insulating film 32. The dummy insulating film 32 insulates the dummy conductive portion 34 from the semiconductor substrate 10. The dummy trench portion 30 is covered on the front surface 21 with an interlayer insulating film 38.

[0110] The interlayer insulating film 38 is provided on the front surface 21. An emitter electrode 52 is provided above the interlayer insulating film 38. One or more contact holes 54 are provided in the interlayer insulating film 38 to electrically connect the emitter electrode 52 to the semiconductor substrate 10. Contact holes 55 and 56 may also be provided so as to penetrate the interlayer insulating film 38.

[0111] The barrier metal 53 is provided on the sidewall and bottom surface of the contact hole 54. The barrier metal 53 may be provided on the entire bottom surface of the contact hole 54. The material of the barrier metal 53 may be titanium or a titanium compound. If the semiconductor substrate 10 is made of silicon, the barrier metal 53 may react with the semiconductor substrate 10 to form a silicide.

[0112] The plug portion 59 is provided inside the barrier metal 53 in the contact hole 54. The material of the plug portion 59 may be tungsten. The material of the plug portion 59 may be the same as the material of the emitter electrode 52.

[0113] Although the semiconductor device 100 of this example does not include a lifetime control unit having a lifetime killer, it may include a lifetime control unit. The semiconductor device 100 may include a lifetime killer region closer to the front surface 21 than the center in the depth direction of the semiconductor substrate 10, or may include a lifetime killer region closer to the back surface 23 than the center in the depth direction of the semiconductor substrate 10.

[0114] 2C is a diagram showing an example of an XZ cross section including the bb' cross section in FIG. 2A. The XZ cross section including the bb' cross section is an XZ plane passing through the second emitter formation region 62 in the transistor section 70. In this example, differences from the aa' cross section in FIG. 2B passing through the first emitter formation region 61 will be particularly described. Other points may be the same as the aa' cross section in FIG. 2B.

[0115] The second emitter formation region 62 has a second emitter region 122, a trench sidewall region 11, a base region 14, and an accumulation region 16 in the mesa portion 71. The second emitter formation region 62 does not have a contact region 15.

[0116] The second emitter region 122 is provided closer to the front surface 21 than the drift region 18, and has a higher doping concentration than the drift region 18. The second emitter region 122 of this example is provided on the front surface 21. That is, the second emitter region 122 of this example is exposed at the front surface 21 of the semiconductor substrate 10. The second emitter region 122 of this example is provided above the base region 14 in the mesa portion 71. The second emitter region 122 may be provided above the trench sidewall region 11. The lower surface of the second emitter region 122 may be in contact with the upper surface of the base region 14. The lower surface of the second emitter region 122 may be in contact with the upper surface of the trench sidewall region 11. The second emitter region 122 may be provided in contact with the gate trench portion 40. The second emitter region 122 may or may not be in contact with the dummy trench portion 30. The second emitter region 122 does not have to be provided in the mesa portion 91 .

[0117] The trench sidewall region 11 is a second conductivity type region provided above the drift region 18 and having a higher doping concentration than the base region 14. The trench sidewall region 11 may be provided above the accumulation region 16. The doping concentration of the trench sidewall region 11 may be lower than the doping concentration of the contact region 15. The doping concentration of the trench sidewall region 11 is 1E17 cm －３ Above, 1E20cm －３ The doping concentration of the trench sidewall region 11 may be the same as that of the contact region 15.

[0118] The trench sidewall region 11 is in contact with the gate trench portion 40. The trench sidewall region 11 may or may not be in contact with the dummy trench portion 30. The trench sidewall region 11 of this example is in contact with the lower end of the second emitter region 122. The trench sidewall region 11 of this example is provided spaced apart from the accumulation region 16. The trench sidewall region 11 may be in contact with the accumulation region 16. The trench sidewall region 11 does not have to be provided in the diode portion 80 and the boundary region 90.

[0119] 2D is a diagram showing an example of an XZ cross section including the cc' cross section in FIG. 2A. The XZ cross section including the cc' cross section is an XZ plane passing through the contact formation region 63 in the transistor section 70. In this example, differences from the aa' cross section in FIG. 2B passing through the first emitter formation region 61 will be particularly described. Other points may be the same as the aa' cross section in FIG. 2B.

[0120] The contact region 15 is a region of the second conductivity type having a higher doping concentration than the base region 14. The doping concentration of the contact region 15 is 1E21 cm －３ Above, 1E22cm －３ The contact region 15 may be provided above the base region 14. The contact region 15 may be provided above the accumulation region 16. The contact region 15 may extend in the trench arrangement direction from one of two adjacent trench portions to the other in the contact formation region 63. The trench sidewall region 11 may not be provided below the contact region 15.

[0121] 2E shows an example of a YZ cross section including the dd' cross section in Fig. 2A. The YZ cross section including the dd' cross section is a YZ plane that passes through the mesa portion 71 of the transistor portion 70. The dd' cross section is a cross section that does not pass through the contact hole 54.

[0122] The first emitter formation region 61 is provided between two adjacent contact formation regions 63 in the trench extension direction. The second emitter formation region 62 is provided between two adjacent contact formation regions 63 in the trench extension direction. That is, the contact formation regions 63 may be provided on either side of the first emitter formation region 61 or on either side of the second emitter formation region 62 in the trench extension direction.

[0123] The length L61 is the width of the first emitter formation region 61 in the trench extension direction. The length L61 may be the width of the first emitter formation region 61 in contact with the gate trench portion 40 in the trench extension direction. The length L61 may be greater than or equal to the length L63. The length L61 of the first emitter formation region 61 in the trench extension direction may be 0.5 μm or more and 3.0 μm or less. The region in which a channel is formed can be adjusted by the length L61. The length L61 may be adjusted in consideration of the ease of hole extraction, etc.

[0124] The length L62 is the width in the trench extension direction of the second emitter formation region 62. The length L62 may be the width in the trench extension direction of the second emitter formation region 62 that contacts the gate trench portion 40. The length L62 in the trench extension direction of the second emitter formation region 62 may be 0.5 μm or more and 3.0 μm or less.

[0125] The length L62 may be the same as or different from the length L61. The length L62 may be greater than or less than the length L61. By increasing the length L62, it is possible to increase the region where a channel is not formed while suppressing the amount of holes injected into the diode section 80.

[0126] The length L63 is the width of the contact formation region 63 in the trench extension direction. The length L63 may be the width of the contact formation region 63 in contact with the gate trench portion 40 in the trench extension direction. The length L63 may be the same as or different from the lengths L61 and L62. The length L63 may be greater than or less than the lengths L61 and L62. The length L63 may be 0.5 μm or greater and 5.0 μm or less.

[0127] The length Lb is the length in the trench extension direction of a region where no channel is formed on the sidewall of the gate trench portion 40. In this example, the length Lb is the width in the trench extension direction between the second emitter formation region 62 and the contact formation regions 63 provided on both ends of the second emitter formation region 62. The length Lb may be equal to or greater than the length L61. The ratio of the length L61 to the length Lb, which determines the channel density, may be determined depending on the saturation current required by the semiconductor device 100.

[0128] The thickness D121 is the width of the first emitter region 121 in the depth direction of the semiconductor substrate 10. When the first emitter region 121 has a slope on the bottom surface, the thickness D121 may be the width of the first emitter region 121 at the shallowest position of the first emitter region 121. The thickness D121 may be 0.3 μm or more and 0.7 μm or less.

[0129] The thickness D122 is the width of the second emitter region 122 in the depth direction of the semiconductor substrate 10. When the second emitter region 122 has a slope on the bottom surface, the thickness D122 may be the width of the second emitter region 122 at the shallowest position of the second emitter region 122. The thickness D122 may be 0.3 μm or more and 0.7 μm or less.

[0130] The thickness D121 may be the same as or different from the thickness D122. The thickness D121 may be greater than the thickness D122. That is, the lower end of the first emitter region 121 may be deeper than the lower end of the second emitter region 122. The dopant in the second emitter region 122 may be less likely to diffuse than the dopant in the first emitter region 121 due to the influence of the trench sidewall region 11. In this case, the second emitter region 122 may be formed shallower than the first emitter region 121.

[0131] The thickness D15 is the width of the contact region 15 in the depth direction of the semiconductor substrate 10. When the contact region 15 has a slope on the bottom surface, the thickness D15 may be the width of the contact region 15 at the shallowest position of the contact region 15. The thickness D15 may be greater than the thickness D121 and the thickness D122. The thickness D15 may be 0.5 μm or more and 2.0 μm or less.

[0132] Position Pz14 is the position of the lower end of base region 14 from front surface 21 in the depth direction of semiconductor substrate 10. Position Pz14 may be 2.0 μm or more and 5.0 μm or less.

[0133] Position Pz11 is the distance from the front surface 21 to the lower end of the trench sidewall region 11 in the depth direction of the semiconductor substrate 10. Position Pz11 may be 2.0 μm or more and 4.0 μm or less. Position Pz11 may be smaller than position Pz14. That is, the lower end of the trench sidewall region 11 may be shallower than the lower end of the base region 14.

[0134] Here, there is a trade-off between the reverse recovery loss Err of the semiconductor device 100 and the forward voltage Vf of the diode section 80. The semiconductor device 100 of this example can reduce the reverse recovery loss Err by adjusting the amount of holes injected from the transistor section 70 to the diode section 80 while maintaining the channel density. The semiconductor device 100 of this example can control the channel density by changing the ratio of the first emitter formation region 61 provided therein, and can adjust the amount of holes injected by the trench sidewall region 11 provided in the second emitter formation region 62, thereby enabling more flexible control of the characteristics of the semiconductor device 100.

[0135] 3A is a modified example of an enlarged view of region A in FIG. 1. The semiconductor device 100 of this example differs from the semiconductor device 100 of FIG. 2A in that it includes a trench contact portion 58. In this example, differences from the semiconductor device 100 of FIG. 2A will be particularly described. Other aspects may be the same as the semiconductor device 100 of FIG. 2A.

[0136] The trench contact portion 58 is provided in a mesa portion between two adjacent trench portions among the plurality of trench portions. The trench contact portion 58 extends from the front surface of the semiconductor substrate 10 in the depth direction of the semiconductor substrate 10. The trench contact portion 58 may be provided extending from the upper end of the interlayer insulating film 38 to the inside of the semiconductor substrate 10. The trench contact portion 58 in this example is provided in the contact hole 54. By providing the trench contact portion 58, the semiconductor device 100 in this example can reduce the base resistance during turn-off and improve latch-up resistance.

[0137] FIG. 3B is a diagram showing an example of an XZ cross section including the ee' cross section in FIG. 3A. The XZ cross section including the ee' cross section is an XZ plane passing through the first emitter formation region 61 in the transistor section 70. The trench contact section 58 may have a plug section 59 and / or a barrier metal 53. The semiconductor device 100 of this example includes a plug region 13 below the trench contact section 58. The cathode region 82 of this example has a first cathode section 182 and a second cathode section 282. In this example, differences from the semiconductor device 100 of FIG. 2B will be particularly described. Other aspects may be the same as those of the semiconductor device 100 of FIG. 2B.

[0138] The plug region 13 is provided above the drift region 18 and has a higher doping concentration than the base region 14. The plug region 13 in this example is provided below the trench contact portion 58. The plug region 13 in this example is in contact with the bottom surface of the trench contact portion 58. The plug region 13 may be in contact with the sidewall of the trench contact portion 58. The plug region 13 is a region of the second conductivity type having a higher doping concentration than the base region 14. The plug region 13 in this example has a higher doping concentration than the contact region 15. The doping concentration of the second conductivity type dopant in the plug region 13 may be equal to or lower than the doping concentration of the first conductivity type dopant in the first emitter region 121.

[0139] The plug region 13 may be provided to extend in the trench extension direction on the bottom surface of the trench contact portion 58. The plug region 13 may be provided over the entire bottom surface of the trench contact portion 58. The plug region 13 may also be provided in the boundary region 90 and the diode portion 80.

[0140] The lower end of the trench contact portion 58 may be deeper than the lower end of the emitter region 12. In this example, the lower end of the trench contact portion 58 is deeper than the lower end of the first emitter region 121. The lower end of the trench contact portion 58 may be shallower than the lower end of the base region 14. The sidewall of the trench contact portion 58 may contact the first emitter region 121 and the plug region 13.

[0141] The first cathode portion 182 and the second cathode portion 282 are provided closer to the rear surface 23 of the semiconductor substrate 10 than the drift region 18. The first cathode portion 182 is a region of a first conductivity type having a higher doping concentration than the drift region 18. The second cathode portion 282 is a region of a second conductivity type provided in contact with the first cathode portion 182. The first cathode portion 182 and the second cathode portion 282 may be repeatedly provided in a predetermined direction. The first cathode portion 182 and the second cathode portion 282 may be repeatedly provided in the trench arrangement direction or the trench extension direction. By changing the ratio of the first cathode portion 182 to the second cathode portion 282, it is possible to adjust the characteristics of the diode portion 80, such as the forward voltage. The area of ​​the first cathode portion 182 on the rear surface 23 of the semiconductor substrate 10 may be larger than the area of ​​the second cathode portion 282 on the rear surface 23 of the semiconductor substrate 10 .

[0142] 3C is a diagram showing an example of an XZ cross section including the ff' cross section in FIG. 3A. The XZ cross section including the ff' cross section is an XZ plane that passes through the second emitter formation region 62 in the transistor section 70. In this example, differences from the ee' cross section in FIG. 3B will be particularly described. Other points may be the same as the ee' cross section in FIG. 3B.

[0143] The lower end of the trench contact portion 58 may be deeper than the lower end of the second emitter region 122. The lower end of the trench contact portion 58 may be shallower than the lower end of the trench sidewall region 11. However, the lower end of the trench contact portion 58 may also be deeper than the lower end of the trench sidewall region 11. The sidewall of the trench contact portion 58 may be in contact with the second emitter region 122 and the plug region 13.

[0144] The trench contact portion 58 is spaced apart from the trench sidewall region 11. The plug region 13 and the base region 14 may be provided between the trench contact portion 58 and the trench sidewall region 11. However, the trench contact portion 58 may also be in contact with the trench sidewall region 11.

[0145] The plug region 13 is spaced apart from the trench sidewall region 11. A base region 14 may be provided between the plug region 13 and the trench sidewall region 11. However, the plug region 13 may be in contact with the trench sidewall region 11.

[0146] The semiconductor device 100 of this example can suppress the influence of the trench contact portion 58 on the gate threshold voltage, thereby making it possible to control the gate threshold voltage independently of the trench contact portion 58.

[0147] 3D is a diagram showing an example of an XZ cross section including the gg' cross section in FIG. 3A. The XZ cross section including the gg' cross section is an XZ plane that passes through the contact formation region 63 in the transistor section 70. In this example, differences from the ee' cross section in FIG. 3B will be particularly described. Other points may be the same as the ee' cross section in FIG. 3B.

[0148] The lower end of the trench contact portion 58 is shallower than the lower end of the contact region 15. However, the lower end of the trench contact portion 58 may be deeper than the lower end of the contact region 15. The sidewall of the trench contact portion 58 may be in contact with the contact region 15 and the plug region 13.

[0149] The bottom end of the plug region 13 is deeper than the bottom end of the contact region 15. However, the bottom end of the plug region 13 may be shallower than the bottom end of the contact region 15.

[0150] 3E shows an example of a YZ cross section including the hh' cross section in FIG. 3A. The YZ cross section including the hh' cross section is a YZ plane that passes through the mesa portion 71 of the transistor portion 70. The hh' cross section is a cross section that does not pass through the contact hole 54. In this figure, the lower end of the trench contact portion 58 is indicated by a dashed line. Even when the semiconductor device 100 includes the trench contact portion 58, the first emitter formation region 61, the second emitter formation region 62, and the contact formation region 63 may be repeatedly arranged in the same manner as in the case of FIG. 2E where the semiconductor device 100 does not include the trench contact portion 58.

[0151] In this specification, the matters described in the embodiments including the trench contact portion 58 may also be applied to the semiconductor device 100 that does not include the trench contact portion 58, as appropriate. Similarly, the matters described in the embodiments that do not include the trench contact portion 58 may also be applied to the semiconductor device 100 that does include the trench contact portion 58, as appropriate.

[0152] 3F shows an example of a YZ cross section including the ii' cross section in FIG. 3A. The YZ cross section including the ii' cross section is a YZ plane that passes through the mesa portion 81 of the diode portion 80. The ii' cross section is a cross section that does not pass through the contact hole 54.

[0153] The plug regions 13 may be provided discretely in the trench extension direction at the lower end of the trench contact portion 58, or the plug regions 13 may not be provided. The plug regions 13 may be provided continuously in the trench extension direction at the lower end of the trench contact portion 58. In this example, the plug regions 13 are provided discretely in the trench extension direction at the lower end of the trench contact portion 58. However, the plug regions 13 may be provided continuously at the lower end of the trench contact portion 58, extending in the trench extension direction. The region in which the plug regions 13 are provided may be changed as appropriate, taking into account the characteristics of the diode portion 80, such as the forward voltage.

[0154] 4A is an enlarged view of a modified example of the XZ cross section passing through the second emitter formation region 62. This figure shows a mesa portion 71 sandwiched between the dummy trench portion 30 and the gate trench portion 40.

[0155] The plug region 13 may be in contact with the sidewall of the trench contact portion 58 on the dummy trench portion 30 side, or may be in contact with the sidewall of the trench contact portion 58 on the gate trench portion 40 side. The plug region 13 in this example is in contact with both the sidewall of the trench contact portion 58 on the dummy trench portion 30 side and the sidewall of the trench contact portion 58 on the gate trench portion 40 side. The sidewall of the trench contact portion 58 in this example is in contact with the second emitter region 122 and the plug region 13.

[0156] The length Lg122 is the length of the second emitter region 122 that contacts the sidewall of the gate trench portion 40. The length Lg122 may be the length in the depth direction of the semiconductor substrate 10. The length Lg122 may be the same as the thickness D122 of the second emitter region 122.

[0157] The length Lg11 is the length of the trench sidewall region 11 that contacts the gate trench portion 40 below the second emitter region 122. The length Lg11 may be determined so that a channel is not formed on the sidewall of the gate trench portion 40. The length Lg11 may be determined in consideration of the amount of holes injected from the transistor portion 70 to the diode portion 80. For example, the length Lg11 is 0.1 μm or more and 3.0 μm or less.

[0158] The depth D58 indicates the distance from the front surface 21 to the bottom end of the trench contact portion 58 in the depth direction of the semiconductor substrate 10. Increasing the depth D58 suppresses the amount of holes injected from the transistor portion 70 to the diode portion 80, making it easier to reduce the reverse recovery loss Err. In this example, the depth D58 is deeper than the bottom end of the second emitter region 122. Therefore, the depth D58 is greater than the length Lg11.

[0159] The end 110 indicates the end of the trench sidewall region 11 that is farthest from the sidewall of the gate trench portion 40 in the trench arrangement direction. In this example, the end 110 is located between the trench contact portion 58 and the gate trench portion 40 in the trench arrangement direction. That is, the trench sidewall region 11 extends from the sidewall of the gate trench portion 40 in the trench arrangement direction and terminates without contacting the trench contact portion 58.

[0160] In this example, the trench sidewall region 11 is spaced apart from the plug region 13. The distance La between the trench sidewall region 11 and the plug region 13 may be 0.05 μm or more and 0.2 μm or less.

[0161] The width W11 is the width of the trench sidewall region 11 in the trench arrangement direction. The width W11 is the width from the sidewall of the gate trench portion 40, which the trench sidewall region 11 contacts, to the end 110 of the trench sidewall region 11. The width W11 may be 0.05 μm or more and the mesa width Wm of the mesa portion 71 or less. In this example, the width W11 is smaller than half the mesa width Wm of the mesa portion 71, but may be larger than half the mesa width Wm of the mesa portion 71. The mesa width Wm may be 0.5 μm or more and 1.3 μm or less. The width W11 may be the trench width Wt or less. The trench width Wt is not particularly limited, but may be 0.8 μm or more and 1.4 μm or less. The width W11 may be the contact width Wc at the bottom surface of the contact hole 54. The contact width Wc may be 0.1 μm or more and 0.3 μm or less. In the semiconductor device 100, the width W11 is set to be larger than the thickness of the inversion layer formed on the sidewall of the gate trench portion 40, thereby preventing the formation of a channel.

[0162] 4B is an enlarged view of a modified example of the XZ cross section passing through the second emitter formation region 62. The second emitter formation region 62 of this example differs from the second emitter formation region 62 of FIG. 4A in that the trench sidewall region 11 contacts the plug region 13. In this example, differences from the second emitter formation region 62 of FIG. 4A will be particularly described. Other points may be the same as the second emitter formation region 62 of FIG. 4A.

[0163] The plug region 13 may be provided at the lower end of the trench contact portion 58 and may be in contact with the trench sidewall region 11. The sidewall of the plug region 13 may be in contact with the trench sidewall region 11, and the lower end of the plug region 13 may be in contact with the trench sidewall region 11. The contact of the plug region 13 with the trench sidewall region 11 increases the gate threshold voltage of the gate trench portion 40. The semiconductor device 100 of this example can increase the gate threshold voltage while suppressing latch-up.

[0164] 4C is an enlarged view of a modified example of the XZ cross section passing through the second emitter formation region 62. The second emitter formation region 62 of this example differs from the second emitter formation region 62 of FIG. 4B in that it does not have the plug region 13. In other respects, it may be the same as the second emitter formation region 62 of FIG. 4B.

[0165] When the plug region 13 is not provided in the second emitter formation region 62, the plug region 13 does not need to be provided in other regions of the semiconductor device 100. By not providing the plug region 13, it becomes easier to suppress the injection of holes from the transistor section 70 to the diode section 80. The trench contact section 58 in this example contacts the trench sidewall region 11, but may be separated from the trench sidewall region 11.

[0166] 4D is an enlarged view of a modified example of the XZ cross section passing through the second emitter formation region 62. The second emitter formation region 62 of this example differs from the second emitter formation region 62 of FIG. 4B in the region where the trench sidewall region 11 is formed. Other points may be the same as the second emitter formation region 62 of FIG. 4B.

[0167] The trench sidewall region 11 extends from one trench portion adjacent to the mesa portion 71 to the other trench portion. That is, the width W11 of the trench sidewall region 11 is equal to the mesa width Wm of the mesa portion 71. In this example, the trench sidewall region 11 extends from the sidewall of the gate trench portion 40 to the sidewall of the dummy trench portion 30. By providing the trench sidewall region 11 extending from one trench portion to the other trench portion in the trench arrangement direction, the influence of mask misalignment used to form the trench sidewall region 11 can be avoided. The semiconductor device 100 of this example can reduce latch-up by increasing the area in which the trench sidewall region 11 is formed while suppressing the influence of mask misalignment on the trench sidewall region 11.

[0168] 4E is an enlarged view of a modified example of the XZ cross section passing through the second emitter formation region 62. The second emitter formation region 62 of this example differs from the second emitter formation region 62 of FIG. 4B in that the depth of the trench contact portion 58 is shallower than the second emitter region 122. In other respects, the second emitter formation region 62 may be the same as the second emitter formation region 62 of FIG. 4B.

[0169] The bottom end of the trench contact portion 58 is shallower than the bottom end of the second emitter region 122. That is, the depth D58 is smaller than the length Lg122. The bottom end of the plug region 13 may be deeper than the bottom end of the second emitter region 122.

[0170] The sidewall of the trench contact portion 58 contacts the second emitter region 122 and the plug region 13. The trench contact portion 58 may be spaced apart from the trench sidewall region 11. The plug region 13 in this example contacts the trench sidewall region 11, but may be spaced apart from the trench sidewall region 11. The plug region 13 may be omitted.

[0171] 4F is an enlarged view of a modified example of the XZ cross section passing through the second emitter formation region 62. The second emitter formation region 62 of this example differs from the second emitter formation region 62 of FIG. 4B in that the depth of the trench contact portion 58 is deeper than the trench sidewall region 11. In other respects, the second emitter formation region 62 may be the same as the second emitter formation region 62 of FIG. 4B.

[0172] The lower end of the trench contact portion 58 is deeper than the lower end of the trench sidewall region 11. That is, the depth D58 is greater than the sum of the length Lg122 and the length Lg11. The lower end of the trench contact portion 58 may be shallower than the lower end of the base region 14. The lower end of the plug region 13 is deeper than the lower end of the trench sidewall region 11. The lower end of the plug region 13 may be shallower than the lower end of the base region 14.

[0173] The sidewall of the trench contact portion 58 contacts the second emitter region 122, the trench sidewall region 11, and the plug region 13. The trench contact portion 58 may be separated from the trench sidewall region 11. In this case, the sidewall of the trench contact portion 58 may contact the second emitter region 122, the base region 14, and the plug region 13. The plug region 13 in this example contacts the trench sidewall region 11, but may be separated from the trench sidewall region 11. The plug region 13 may be omitted.

[0174] 4G is an enlarged view of a modified example of the XZ cross section passing through the second emitter formation region 62. The second emitter formation region 62 of this example differs from the second emitter formation region 62 of FIG. 4A in the depth of the trench sidewall region 11. Other points may be the same as the second emitter formation region 62 of FIG. 4A.

[0175] The lower end of the trench sidewall region 11 contacts the upper end of the accumulation region 16. The lower end of the trench sidewall region 11 may be located at the same position as the lower end of the base region 14 in the depth direction of the semiconductor substrate 10. In this example, the trench sidewall region 11 is separated from the trench contact portion 58 and the plug region 13, but may contact at least one of the trench contact portion 58 or the plug region 13. By increasing the length Lg11 of the trench sidewall region 11, the electric field distribution in the mesa portion 71 can be flattened, electric field concentration can be alleviated, and the reliability of the semiconductor device 100 can be improved. The trench sidewall region 11 may extend from the sidewall of the gate trench portion 40 to the sidewall of the dummy trench portion 30 in the arrangement direction.

[0176] 5A shows an enlarged top view of a modified example of the semiconductor device 100. In this example, the arrangement of the first emitter formation region 61, the second emitter formation region 62, and the contact formation region 63 differs from that of the semiconductor device 100 in FIG. 2A. In this example, differences from the semiconductor device 100 in FIG. 2A will be particularly described. Other aspects may be the same as those of the semiconductor device 100 in FIG. 2A.

[0177] The first emitter formation region 61 is in contact with the second emitter formation region 62 and the contact formation region 63. In the trench extension direction, one end of the first emitter formation region 61 is in contact with the second emitter formation region 62, and the other end of the first emitter formation region 61 is in contact with the contact formation region 63.

[0178] The second emitter formation region 62 is in contact with the first emitter formation region 61 and the contact formation region 63. In the trench extension direction, one end of the second emitter formation region 62 is in contact with the first emitter formation region 61, and the other end of the second emitter formation region 62 is in contact with the contact formation region 63.

[0179] The contact formation region 63 contacts the first emitter formation region 61 and the second emitter formation region 62. In the trench extension direction, one end of the contact formation region 63 contacts the first emitter formation region 61, and the other end of the contact formation region 63 contacts the second emitter formation region 62.

[0180] The first emitter formation region 61, the second emitter formation region 62, and the contact formation region 63 are repeatedly provided in this order in the trench extension direction.

[0181] The length Lb is the length in the trench extension direction of the second emitter formation region 62 and the contact formation region 63. That is, the length Lb is the sum of the length L62 and the length L63.

[0182] In this example, a mesa portion 71 sandwiched between two gate trench portions 40 is described as an example, but the structure of this example may also be applied to a mesa portion 71 sandwiched between adjacent dummy trench portions 30 and gate trench portions 40.

[0183] 5B shows an enlarged top view of a modified example of the semiconductor device 100. The mesa portion 71 of this example differs from the mesa portion 71 of FIG. 2A in that it does not have a contact formation region 63. In this example, differences from the semiconductor device 100 of FIG. 2A will be particularly described. Other aspects may be the same as those of the semiconductor device 100 of FIG. 2A.

[0184] The first emitter formation regions 61 and the second emitter formation regions 62 are alternately arranged in the trench extension direction. In this example, the first emitter formation region 61 contacts the second emitter formation region 62. In the trench extension direction, both ends of the first emitter formation region 61 contact the second emitter formation region 62. Similarly, in the trench extension direction, both ends of the second emitter formation region 62 contact the first emitter formation region 61.

[0185] The length Lb is the length of the second emitter formation region 62 in the trench extension direction. That is, the length Lb is equal to the length L62. In the semiconductor device 100 of this example, by omitting the contact formation region 63, the amount of holes injected into the diode section 80 can be further reduced.

[0186] 6 is a diagram showing a modified example of the XZ cross section including the ee' cross section in FIG. 3A. The ee' cross section of this example differs from the ee' cross section of FIG. 3B in that it does not include the accumulation region 16. In this example, differences from the ee' cross section of FIG. 3B will be particularly described. Other points may be the same as the ee' cross section of FIG. 3B.

[0187] The mesa portion 71 has the plug region 13, the base region 14, the drift region 18, and the first emitter region 121, but does not have the accumulation region 16. In this example, the bottom surface of the base region 14 is in contact with the top surface of the drift region 18.

[0188] The base region 14 may be in contact with the first emitter region 121 on the sidewall of the gate trench portion 40 in the first emitter formation region 61. The drift region 18 may be in contact with the base region 14 on the sidewall of the gate trench portion 40 in the first emitter formation region 61. In other words, the trench sidewall region 11 does not need to be provided below the first emitter region 121 on the sidewall of the gate trench portion 40 in the first emitter formation region 61.

[0189] 7 shows an example of a method for manufacturing the semiconductor device 100. This example shows an example of a method for manufacturing the semiconductor device 100, and the order of the steps may be changed as appropriate.

[0190] In step S100, the anode region 19 is formed above the drift region 18. In step S102, the base region 14 is formed above the drift region 18. If the base region 14 and the anode region 19 have the same doping concentration, the base region 14 and the anode region 19 may be formed simultaneously in a common process.

[0191] In step S104, a plurality of trenches are formed in the front surface 21 of the semiconductor substrate 10. The dummy trenches 30 and the gate trenches 40 may be formed simultaneously in a common process, or the dummy trenches 30 and the gate trenches 40 may be formed separately. Step S104 may be performed before steps S100 and S102.

[0192] In step S106, the accumulation region 16, trench sidewall region 11, contact region 15, and emitter region 12 are formed. The order in which the accumulation region 16, trench sidewall region 11, contact region 15, and emitter region 12 are formed is not limited. In step S106, each region may be formed in descending order of distance from the front surface 21 in the depth direction of the semiconductor substrate 10. In one example, the accumulation region 16, trench sidewall region 11, contact region 15, and emitter region 12 are formed in this order. Annealing for activation may be performed all at once after ion implantation for forming each region has been performed, or may be performed individually after ion implantation.

[0193] In this example, a first emitter region 121 and a second emitter region 122 are formed as the emitter region 12. The first emitter region 121 and the second emitter region 122 may be formed simultaneously in an ion implantation step under the same conditions, or may be formed separately.

[0194] The dopant in the emitter region 12 may be ion-implanted after the dopant in the accumulation region 16 is ion-implanted, or may be ion-implanted before the dopant in the accumulation region 16. The dopant in the emitter region 12 may be ion-implanted after the dopant in the contact region 15 is ion-implanted, or may be ion-implanted before the dopant in the contact region 15. The dopant in the emitter region 12 may be ion-implanted after the dopant in the trench sidewall region 11 is ion-implanted, or may be ion-implanted before the dopant in the trench sidewall region 11 is ion-implanted.

[0195] The dopant in the trench sidewall region 11 may be ion-implanted after or before the dopant in the contact region 15. The dopant in the trench sidewall region 11 may be ion-implanted after or before the dopant in the accumulation region 16.

[0196] In step S108, trench contact portions 58 and plug regions 13 are formed. The plug regions 13 may be formed by forming contact holes 54 for the trench contact portions 58 and then ion-implanting a dopant of the second conductivity type into the lower ends of the contact holes 54. After forming the plug regions 13, the trench contact portions 58 may be formed by filling the contact holes 54 with a barrier metal 53 and a plug portion 59.

[0197] In this example, the trench contact portion 58 is formed after the emitter region 12 is formed, but it may be formed before the emitter region 12 is formed.

[0198] 8A shows a top view of a semiconductor device 500 of a comparative example. The semiconductor device 500 includes emitter regions 512 and contact regions 515. The emitter regions 512 and contact regions 515 are alternately provided in the trench extension direction. The emitter regions 512 extend from one adjacent gate trench portion 40 to the other adjacent gate trench portion 40 in the trench arrangement direction. The contact regions 515 extend from one adjacent gate trench portion 40 to the other adjacent gate trench portion 40 in the trench arrangement direction.

[0199] FIG. 8B shows a YZ cross section including the j-j' cross section in FIG. 8A. The YZ cross section including the j-j' cross section is a YZ plane passing through the mesa portion of the semiconductor device 500. The trench sidewall region 11 is not provided below the emitter region 512. Therefore, the region where the emitter region 512 is formed functions as a channel region, and the contact region 515 is provided in the region that does not function as a channel region. If the width of the emitter region 512 in the trench extension direction is fixed and the width of the contact region 515 in the trench extension direction is changed to adjust the saturation current, a trade-off occurs between the latch-up resistance and the amount of holes injected into the diode portion. For example, increasing the width of the contact region 515 in the trench extension direction to adjust the saturation current may improve the latch-up resistance but increase the amount of holes injected into the diode portion. On the other hand, if the width of the contact region 515 in the trench extension direction is reduced in order to adjust the saturation current, the number of holes injected into the diode portion decreases, but this may result in a decrease in latch-up resistance.

[0200] In contrast, the semiconductor device 100 has a second emitter formation region 62 and a contact formation region 63, which have different concentrations of the second conductivity type, as regions that do not function as a channel. This allows the amount of hole injection to be controlled independently of the channel density. That is, even when the first emitter formation region 61, which functions as a channel region, is fixed, the semiconductor device 100 can adjust the latch-up resistance and the amount of hole injection into the diode section by adjusting the ratio between the second emitter formation region 62 and the contact formation region 63. Therefore, the semiconductor device 100 can improve the latch-up resistance and reduce the reverse recovery loss Err while achieving a desired saturation current.

[0201] Although the present invention has been described above using embodiments, the technical scope of the present invention is not limited to the scope described in the above embodiments. It will be apparent to those skilled in the art that various modifications and improvements can be made to the above embodiments. It is clear from the claims that such modifications and improvements can also be included within the technical scope of the present invention.

[0202] It should be noted that the order of execution of each process, such as operations, procedures, steps, and stages, in the devices, systems, programs, and methods shown in the claims, specifications, and drawings is not specifically stated as "before," "prior to," etc., and that the processes can be performed in any order unless the output of a previous process is used in a subsequent process. Even if the operational flow in the claims, specifications, and drawings is described using "first," "next," etc. for convenience, this does not mean that the processes must be performed in this order.

[0203] DESCRIPTION OF SYMBOLS 10: Semiconductor substrate, 11: Trench sidewall region, 12: Emitter region, 13: Plug region, 14: Base region, 15: Contact region, 16: Accumulation region, 17: Well region, 18: Drift region, 19: Anode region, 20: Buffer region, 21: Front surface, 22: Collector region, 23: Back surface, 24: Collector electrode, 25: Connection portion, 30: Dummy trench portion, 31: Extension portion, 32: Dummy insulating film, 33: Connection portion, 34: Dummy conductive portion, 38: Interlayer insulating film, 40: Gate trench portion, 41: Extension portion, 42: Gate insulating film, 43: Connection portion, 44: Gate conductive portion, 50: Gate metal layer, 51: Gate runner portion, 52: Emitter electrode, 53: Barrier metal, 54: Contact hole , 55...contact hole, 56...contact hole, 58...trench contact portion, 59...plug portion, 61...first emitter formation region, 62...second emitter formation region, 63...contact formation region, 70...transistor portion, 71...mesa portion, 75...main region, 78...boundary, 80...diode portion, 81...mesa portion, 82...cathode region, 90...boundary region, 91...mesa portion, 100...semiconductor device, 102...edge, 110...end, 112...gate pad, 121...first emitter region, 122...second emitter region, 130...gate wiring, 160...active region, 170...edge termination structure portion, 182...first cathode portion, 282...second cathode portion, 500...semiconductor device, 512...emitter region, 515...contact region

Claims

1. A semiconductor device comprising a transistor section and a diode section, A first-conductivity drift region provided on the semiconductor substrate, On the front side of the semiconductor substrate, a plurality of trench portions are provided, which are extended in a predetermined trench extension direction. A second conductivity type base region is provided above the drift region, A first emitter region of a first conductivity type having a doping concentration higher than that of the drift region is provided on the front surface of the semiconductor substrate, A second emitter region of a first conductivity type, provided on the front surface of the semiconductor substrate, has a doping concentration higher than that of the drift region, A second conductive trench sidewall region is provided above the drift region and has a higher doping concentration than the base region, A second conductive contact region is provided above the drift region and has a higher doping concentration than the base region, Equipped with, The plurality of trench sections have gate trench sections, Any of the first mesa portions between the plurality of trench portions is A first emitter forming region is provided in the side wall of the gate trench portion, In the side wall of the gate trench portion, a second emitter forming region is provided below the second emitter region, where the trench side wall region is located. It has, The first mesa portion has a contact-forming region on its front surface in which the contact region is provided. The contact region is in contact with the side wall of the gate trench portion on the front surface of the semiconductor substrate. Semiconductor equipment.

2. A semiconductor device comprising a transistor section and a diode section, A first-conductivity drift region provided on the semiconductor substrate, On the front side of the semiconductor substrate, a plurality of trench portions are provided, which are extended in a predetermined trench extension direction. A second conductivity type base region is provided above the drift region, A first emitter region of a first conductivity type having a doping concentration higher than that of the drift region is provided on the front surface of the semiconductor substrate, A second emitter region of a first conductivity type, provided on the front surface of the semiconductor substrate, has a doping concentration higher than that of the drift region, A second conductive trench sidewall region is provided above the drift region and has a higher doping concentration than the base region, Equipped with, The plurality of trench sections have gate trench sections, Any of the first mesa portions between the plurality of trench portions is A first emitter forming region is provided in the side wall of the gate trench portion, In the side wall of the gate trench portion, a second emitter forming region is provided below the second emitter region, where the trench side wall region is located. It has, The first emitter formation region and the second emitter formation region are alternately and repeatedly provided in the trench extension direction. Semiconductor equipment.

3. A semiconductor device comprising a transistor section and a diode section, A first-conductivity drift region provided on the semiconductor substrate, On the front side of the semiconductor substrate, a plurality of trench portions are provided, which are extended in a predetermined trench extension direction. A second conductivity type base region is provided above the drift region, A first emitter region of a first conductivity type having a doping concentration higher than that of the drift region is provided on the front surface of the semiconductor substrate, A second emitter region of a first conductivity type, provided on the front surface of the semiconductor substrate, has a doping concentration higher than that of the drift region, A second conductive trench sidewall region is provided above the drift region and has a higher doping concentration than the base region, A second conductive contact region is provided above the drift region and has a higher doping concentration than the base region, Equipped with, The plurality of trench sections have gate trench sections, Any of the first mesa portions between the plurality of trench portions is A first emitter forming region is provided in the side wall of the gate trench portion, In the side wall of the gate trench portion, a second emitter forming region is provided below the second emitter region, where the trench side wall region is located. It has, The first mesa portion has a contact-forming region on its front surface in which the contact region is provided. The length of the first emitter formation region in the trench extension direction is greater than the length of the contact formation region in the trench extension direction. Semiconductor equipment.

4. In the trench extension direction, both ends of the first emitter formation region are in contact with the contact formation region. The semiconductor device according to claim 1.

5. In the trench extension direction, one end of the contact formation region is in contact with the first emitter formation region, and the other end of the contact formation region is in contact with the second emitter formation region. The semiconductor device according to claim 1.

6. In the trench extension direction, both ends of the second emitter formation region are in contact with the contact formation region. The semiconductor device according to claim 1.

7. The length Lb of the trench extension direction between the second emitter formation region and the contact formation regions provided at both ends of the second emitter formation region is greater than or equal to the length of the first emitter formation region in the trench extension direction. The semiconductor device according to claim 6.

8. In the trench extension direction, the first emitter formation region, the contact formation region, the second emitter formation region, and the contact formation region are repeatedly provided in this order. The semiconductor device according to claim 1.

9. The first emitter region extends in the trench arrangement direction from one trench portion in contact with the first mesa portion to the other opposing trench portion. The semiconductor device according to claim 1.

10. The doping concentration in the first emitter region is the same as the doping concentration in the second emitter region. The semiconductor device according to claim 1.

11. The trench sidewall region is in contact with the lower end of the second emitter region. The semiconductor device according to claim 1.

12. The doping concentration in the trench sidewall region is lower than the doping concentration in the contact region. The semiconductor device according to claim 1.

13. The doping concentration in the trench sidewall region is 1E17cm －３ Above, 1E20cm －３ The following is The semiconductor device according to claim 1.

14. Below the second emitter region, the length over which the trench sidewall region contacts the sidewall of the gate trench is 0.1 μm or more and 3.0 μm or less. The semiconductor device according to claim 1.

15. The width of the plurality of trenches in the trench arrangement direction of the trench sidewall region is 0.05 μm or more and less than or equal to the mesa width of the first mesa. The semiconductor device according to claim 1.

16. The trench sidewall region extends from one trench section adjacent to the first mesa section to the other trench section. The semiconductor device according to claim 1.

17. It comprises a first conductivity type accumulation region located above the drift region, with a doping concentration higher than that of the drift region. The semiconductor device according to claim 1.

18. A semiconductor device comprising a transistor section and a diode section, A first-conductivity drift region provided on the semiconductor substrate, On the front side of the semiconductor substrate, a plurality of trench portions are provided, which are extended in a predetermined trench extension direction. A second conductivity type base region is provided above the drift region, A first emitter region of a first conductivity type having a doping concentration higher than that of the drift region is provided on the front surface of the semiconductor substrate, A second emitter region of a first conductivity type, provided on the front surface of the semiconductor substrate, has a doping concentration higher than that of the drift region, A second conductive trench sidewall region is provided above the drift region and has a higher doping concentration than the base region, A first conductivity type accumulation region is provided above the drift region and has a doping concentration higher than that of the drift region, Equipped with, The plurality of trench sections have gate trench sections, Any of the first mesa portions between the plurality of trench portions is A first emitter forming region is provided in the side wall of the gate trench portion, In the side wall of the gate trench portion, a second emitter forming region is provided below the second emitter region, where the trench side wall region is located. It has, The lower end of the trench side wall region is in contact with the upper end of the storage region. Semiconductor equipment.

19. The semiconductor substrate is provided with a trench contact portion that extends from the front surface of the semiconductor substrate in the depth direction of the semiconductor substrate. The semiconductor device according to any one of claims 1 to 18.

20. The trench contact portion is spaced apart from the trench side wall region. The semiconductor device according to claim 19.

21. The lower end of the trench contact portion is deeper than the lower end of the second emitter region and shallower than the lower end of the trench sidewall region. The semiconductor device according to claim 19.

22. It comprises a second conductivity type plug region located above the drift region and having a higher doping concentration than the base region. The semiconductor device according to claim 19.

23. The plug region is spaced apart from the trench side wall region. The semiconductor device according to claim 22.

24. The plug region is provided at the lower end of the trench contact portion and is in contact with the trench side wall region. The semiconductor device according to claim 22.

25. The semiconductor substrate is provided with a cathode region located on the back side of the drift region, The cathode region is A first cathode portion of a first conductivity type with a doping concentration higher than that of the drift region, A second cathode portion of a second conductivity type is provided in contact with the first cathode portion, has The semiconductor device according to any one of claims 1 to 18.

26. The aforementioned transistor section is The main region provided with the first emitter formation region and the second emitter formation region, A boundary region provided adjacent to the diode portion rather than the main region. has The semiconductor device according to any one of claims 1 to 18.

27. In the side wall of the gate trench portion of the first emitter formation region, The base region is in contact with the first emitter region, The drift region is in contact with the base region. The semiconductor device according to claim 1.

28. In the side wall of the gate trench portion of the first emitter formation region, The base region is in contact with the first emitter region, The storage area is in contact with the base area. The semiconductor device according to claim 17.