Actuator and fluid control device

Abstract

This actuator is provided with: a first plate in which a drive body is disposed and which is provided with a center part that can be vibrated by the drive body in a direction orthogonal to a flat plate surface, a frame body disposed outside the center part in a plan view, and a connection member that is disposed between the center part and the frame body and that connects the center part to the frame body so as to be able to vibrate; an annular support body that is positioned facing the frame body of the first plate and that supports the first plate; and an auxiliary member disposed between the first plate and the support body. The frame body includes a first inner peripheral surface facing an outer peripheral end surface of the center part. The auxiliary member has a second inner peripheral surface on the center side. The connection member is connected to the frame body and is provided with a frame-body-side beam part extending from the first inner peripheral surface to the center-part side. In a plan view, the second inner peripheral surface is closer to the center-part-side than the first inner peripheral surface. The frame body, the auxiliary member, and the support body overlap in a plan view. The frame body and the auxiliary member are in contact with each other, and the auxiliary member and the support body are in contact with each other. In a first region of a predetermined length from an end part of the frame-body-side beam part on a side connected to the frame body, the frame-body-side beam part is in contact with the auxiliary member. In a second region closer to the center-part side than the first region in the frame-body-side beam part, the frame-body-side beam part does not come into contact with the auxiliary member.

Description

Actuators and fluid control devices

[0001] The present invention relates to an actuator that generates vibrations and a fluid control device that includes the actuator.

[0002] Patent Document 1 describes a pump. The pump in Patent Document 1 supports a diaphragm on a sidewall member of a housing using a springy member (connecting member). The connecting member has a constant thickness.

[0003] International Publication No. 2020 / 111064

[0004] However, in the configuration described in Patent Document 1, the cross-sectional area of ​​the connecting member and the side wall member changes suddenly, which can cause damage to the connecting portion between the connecting member and the side wall member and vibration loss.

[0005] SUMMARY OF THE INVENTION Therefore, an object of the present invention is to provide an actuator that is suppressed from being damaged or suffering from vibration loss.

[0006] An actuator according to one embodiment of the present invention includes a first plate having a central portion on which a driver is disposed and which can be vibrated in a direction perpendicular to a flat plate surface by the driver, a frame body disposed outside the central portion in a plan view, and a connecting member disposed between the central portion and the frame body and connecting the central portion to the frame body so as to be vibrable; an annular support body positioned opposite the frame body of the first plate and supporting the first plate; and an auxiliary member disposed between the first plate and the support body. The frame body has a first inner peripheral surface facing the outer peripheral end face of the central portion. The auxiliary member has a second inner peripheral surface on the central side. The connecting member is connected to the frame body and includes a frame-side beam portion extending from the first inner peripheral surface toward the central portion.

[0007] In a plan view, the second inner peripheral surface is closer to the center than the first inner peripheral surface. The frame body, the auxiliary member, and the support body overlap in a plan view. The frame body and the auxiliary member contact each other, and the auxiliary member and the support body contact each other. In a first region of a predetermined length from the end of the frame body side beam portion on the side connected to the frame body, the frame body side beam portion contacts the auxiliary member. In a second region of the frame body side beam portion closer to the center than the first region, the frame body side beam portion does not contact the auxiliary member.

[0008] Also, an actuator according to one embodiment of the present invention includes a first plate having a central portion on which a driver is disposed and which can be vibrated by the driver in a direction perpendicular to the plate surface; a frame body disposed outside the central portion in a plan view; a connecting member disposed between the central portion and the frame body and connecting the central portion to the frame body so that the central portion can be vibrated; an annular support body positioned opposite the frame body of the first plate and supporting the first plate; and an auxiliary member disposed between the first plate and the support body. The actuator includes a first member in which the first plate and the auxiliary member are formed as a single member. The frame body has a first inner peripheral surface facing the outer peripheral end face of the central portion. The auxiliary member has a second inner peripheral surface on the central side. The connecting member is connected to the frame body and includes a frame-side beam portion extending from the first inner peripheral surface toward the central portion.

[0009] In a plan view, the second inner peripheral surface is located closer to the center than the first inner peripheral surface. The frame body, the auxiliary member, and the support body have overlapping portions in a plan view. In a first region of a predetermined length from the end of the frame body side beam portion on the side connected to the frame body, the frame body side beam portion overlaps with the auxiliary member in a plan view. In a second region of the frame body side beam portion that is closer to the center than the first region, the frame body side beam portion does not overlap with the auxiliary member in a plan view.

[0010] Also, an actuator according to one embodiment of the present invention includes a first plate having a central portion on which a driver is disposed and which can be vibrated in a direction perpendicular to a flat plate surface by the driver, a frame body disposed outside the central portion in a plan view, a connecting member disposed between the central portion and the frame body and connecting the central portion to the frame body so as to be vibrable, an annular support body positioned opposite the frame body of the first plate and supporting the first plate, and an auxiliary member disposed between the first plate and the support body. The actuator also includes a second member in which the auxiliary member and the support body are formed as a single member. The frame body has a first inner peripheral surface facing the outer peripheral end face of the central portion. The auxiliary member has a second inner peripheral surface on the central side. The connecting member is connected to the frame body and includes a frame-side beam portion extending from the first inner peripheral surface toward the central portion.

[0011] In a plan view, the second inner peripheral surface is located closer to the center than the first inner peripheral surface. The frame body and the auxiliary member have overlapping portions in a plan view. In a first region of a predetermined length from the end of the frame body side beam portion on the side connected to the frame body, the frame body side beam portion contacts the auxiliary member. In a second region of the frame body side beam portion that is closer to the center than the first region, the frame body side beam portion does not contact the auxiliary member.

[0012] In any of these configurations, in the direction in which the central portion, connecting member, and frame body are connected in order, a first portion having a thickness equal to the thickness of the connecting member alone, a second portion having a thickness including at least the connecting member and auxiliary member, and a third portion having a thickness including the frame body, auxiliary member, and support body are configured. The first portion, the second portion, and the third portion become thicker in this order. This prevents a large change in thickness at the connection between the connecting member and the frame body, suppresses stress concentration at the connection point between the connecting member and the frame body as in the conventional case, and suppresses vibration loss due to stress concentration.

[0013] According to the present invention, damage and vibration loss can be suppressed.

[0014] FIG. 1 is a side cross-sectional view showing an example of the configuration of a fluid control device according to an embodiment of the present invention. FIG. 2 is an exploded perspective view showing an example of the configuration of a fluid control device according to an embodiment of the present invention. FIG. 3 is a plan view showing only a first plate and an auxiliary member in a fluid control device according to an embodiment of the present invention. FIG. 4(A) is an enlarged plan view of the overlapping position of the connecting member and the auxiliary member, and FIG. 4(B) is a perspective view thereof. FIG. 5(A) is a cross-sectional view of a portion of the connecting member of the first plate corresponding to the second region (a cross-sectional view corresponding to cross-section CSA in FIG. 4(A)). FIG. 5(B) is a cross-sectional view of a portion of the connecting member of the first plate corresponding to the first region (a cross-sectional view corresponding to cross-section CSB in FIG. 4(A)). FIG. 5(C) is a cross-sectional view of a portion of the first plate corresponding to the frame (a cross-sectional view corresponding to cross-section CSC in FIG. 4(A)). FIG. 6 is a graph showing an example of the relationship between the protrusion amount LB of the auxiliary member and the maximum stress applied to the frame. FIG. 7 is a graph showing an example of the relationship between the protrusion amount LB of the auxiliary member and the operating time until failure. FIG. 8 is a graph showing an example of the relationship between the protrusion amount LB of the auxiliary member and the vibration displacement at the center Po of the central portion. FIG. 9 is an enlarged plan view of the overlapping position of the connecting member and the auxiliary member in a fluid control device of a first derivative example. FIG. 10 is an enlarged plan view of the overlapping position of the connecting member and the auxiliary member in a fluid control device of a second derivative example. FIG. 11 is a side cross-sectional view of a fluid control device of a third derivative example. FIG. 12 is a side cross-sectional view of a fluid control device of a fourth derivative example. FIG. 13 is a side cross-sectional view of a fluid control device of a fifth derivative example. FIG. 14 is a side cross-sectional view of a fluid control device of a sixth derivative example. FIG. 15 is a side cross-sectional view of a fluid control device of a seventh derivative example. FIG. 16 is a side cross-sectional view of a fluid control device of an eighth derivative example. FIG. 17 is an exploded perspective view of the fluid control device of the eighth derivative example.

[0015] An actuator and a fluid control device according to an embodiment of the present invention will be described with reference to the drawings. In this embodiment, the expression "two components are in contact" includes both cases where the two components are in direct contact with each other and cases where the two components are in contact with each other via an adhesive material for fixing the two components to each other.

[0016] FIG. 1 is a side cross-sectional view showing an example of the configuration of a fluid control device according to an embodiment of the present invention. FIG. 1 is not a cross-sectional view cut along a straight plane, and the cross section has been appropriately adjusted to make the configuration of the fluid control device easier to understand. In addition, in each of the figures including FIG. 1, the dimensional relationships and the like have been appropriately adjusted to make the configuration easier to understand. FIG. 2 is an exploded perspective view showing an example of the configuration of a fluid control device according to an embodiment of the present invention. FIG. 3 is a plan view showing only a first plate and an auxiliary member in a fluid control device according to an embodiment of the present invention.

[0017] 1 and 2, the fluid control device 10 includes a first plate 30, a driver 40, a second plate 51, a support 52, and an auxiliary member 60. The first plate 30, the driver 40, the support 52, and the auxiliary member 60 form an actuator 20.

[0018] The first plate 30 is made of a conductive material and includes a central portion 31, a frame body 32, and a plurality of connecting members 33.

[0019] The central portion 31 is a flat plate having a circular shape in plan view (shape when viewed in the thickness direction). The central portion 31 has an outer peripheral surface 311 that is circular in plan view.

[0020] The frame body 32 is a flat plate and is disposed outward from the outer peripheral surface 311 of the central portion 31 in a plan view. The frame body 32 is an annular body having a circular opening in the center. The frame body 32 has an inner peripheral surface 321. The inner peripheral surface 321 corresponds to the "first inner peripheral surface" of the present invention.

[0021] The central portion 31 is disposed within the opening of the frame 32. The center of the central portion 31 and the center of the frame 32 in a plan view coincide with each other. Note that "coincidence" here includes the range of manufacturing error and the range of tolerance for the performance of the fluid control device 10 and the actuator 20. Hereinafter, "coincidence" has the same meaning in this embodiment. The diameter of the opening of the frame 32 is larger than the diameter of the central portion 31, and an inner circumferential surface 321 of the frame 32 and an outer circumferential surface 311 of the central portion 31 are positioned at a distance from each other.

[0022] The multiple connecting members 33 are beam-shaped and have the same overall thickness. The multiple connecting members 33 are arranged between the central portion 31 and the frame body 32. The multiple connecting members 33 connect to the outer peripheral surface 311 of the central portion 31 and the inner peripheral surface 321 of the frame body 32. The multiple connecting members 33 are arranged at predetermined intervals along the circumferential direction of the outer peripheral surface 311 of the first plate 30.

[0023] As shown in FIG. 3 , each of the plurality of connecting members 33 includes a first beam portion 331 , a second beam portion 332 , and a third beam portion 333 .

[0024] The first beam portion 331 has a strip shape extending in the radial direction from the center Po of the central portion 31 in a plan view.

[0025] The second beam portion 332 has a strip shape extending along the outer peripheral surface 311 of the central portion 31 in a plan view.

[0026] The third beam portion 333 has a strip shape in a plan view that extends in a radial direction with respect to the center Po of the central portion 31. The third beam portion 333 is a feature that corresponds to the "frame-side beam portion" of the present invention.

[0027] An end portion of the first beam portion 331 on the side of the center Po in the extension direction is connected to the outer peripheral surface 311 of the central portion 31. An end portion of the first beam portion 331 on the outer side (opposite the center Po side) in the extension direction is connected to the center of the second beam portion 332 in the extension direction.

[0028] Both ends of the second beam portion 332 in the extending direction are connected to the third beam portion 333 .

[0029] The end of the third beam portion 333 on the center Po side in the extension direction is connected to the second beam portion 332. The end of the third beam portion 333 on the outer side in the extension direction is connected to the inner circumferential surface 321 of the frame body 32.

[0030] The first plate 30 has the above-described configuration and has a plurality of openings 34. The plurality of openings 34 penetrate the first plate 30 in the thickness direction. The plurality of openings 34 are arranged between the central portion 31 and the frame body 32. The plurality of openings 34 are areas between the central portion 31 and the frame body 32 where the central portion 31, the frame body 32, and the plurality of connecting members 33 are not arranged, and are portions surrounded by the central portion 31, the frame body 32, and the plurality of connecting members 33. The openings 34 correspond to the "first opening" of the present invention.

[0031] The driver 40 includes a disk-shaped piezoelectric body and driving electrodes. The driving electrodes are formed on both main surfaces of the piezoelectric body.

[0032] The second plate 51 is a flat plate having a circular opening 510 that includes the center in a plan view. The opening 510 is a feature that corresponds to the "second opening" of the present invention.

[0033] The support body 52 is a flat plate having a circular opening 520 that includes the center in a plan view. The planar shape of an inner peripheral surface 521 of the support body 52 formed by the opening 520 is the same as the planar shape of the inner peripheral surface 321 of the frame body 32. The inner peripheral surface 321 of the frame body 32 corresponds to the "first inner peripheral surface" of the present invention, and the inner peripheral surface of the support body 52 corresponds to the "third inner peripheral surface."

[0034] The auxiliary member 60 is a flat plate having a circular opening 600 that includes the center in a plan view. The auxiliary member 60 is made of, for example, the same material as the first plate 30. The planar shape (circular) of the inner circumferential surface 61 of the auxiliary member 60 formed by the opening 600 is similar to the planar shape (circular) of the inner circumferential surface 521 of the support body 52 and the planar shape (circular) of the inner circumferential surface 321 of the frame body 32. The diameter of the circle formed by the inner circumferential surface 61 of the auxiliary member 60 is smaller than the diameter of the circle formed by the inner circumferential surface 521 of the support body 52 and the diameter of the circle formed by the inner circumferential surface 321 of the frame body 32. The inner circumferential surface 61 of the auxiliary member 60 corresponds to the "second inner circumferential surface" of the present invention.

[0035] 1 and 2, the driver 40 is disposed on one main surface of the central portion 31 of the first plate 30. In this case, the center of the driver 40 and the center of the central portion 31 coincide with each other.

[0036] The auxiliary member 60, the support body 52, and the second plate 51 are arranged in this order on the other main surface side of the first plate 30. In this case, the center of the circle formed by the inner peripheral surface 61 of the auxiliary member 60, the center of the circle formed by the inner peripheral surface 521 of the support body 52, and the center of the circle formed by the inner peripheral surface 321 of the frame body 32 overlap in a plan view (viewed in the stacking direction in which the auxiliary member 60, the support body 52, and the second plate 51 are arranged in this order).

[0037] With this configuration, the frame 32 of the first plate 30 is supported by the support 52 via the auxiliary member 60. As a result, when a drive signal is supplied to the driver 40 through a drive signal application mechanism (not shown), the driver 40 is distorted. The center portion 31 of the first plate 30 is connected to the frame 32 by multiple band-shaped connecting members 33 that are easily deformable. The frame 32 is supported by the fixing support 52 via the auxiliary member 60. As a result, the center portion 31 generates bending vibrations that vibrate in a direction perpendicular to the flat plate surface. This achieves the function of the actuator 20.

[0038] Furthermore, a space is formed that is surrounded by the first plate 30, the second plate 51, the support body 52, and the auxiliary member 60. This space is in communication with the outside through an opening 510 in the second plate 51 that is positioned at a position that overlaps the center Po of the first plate 30 in a plan view. This space is also in communication with the outside through a plurality of openings 34 that are formed between the outer peripheral surface 311 of the central portion 31 of the first plate 30 and the inner peripheral surface 321 of the frame body 32. Here, as described above, when the central portion 31 generates bending vibration, for example, gas is sucked in through the opening 510 and discharged through the plurality of openings 34. This realizes the function of the fluid control device 10.

[0039] 1 and 3 , in this plan view, the inner circumferential surface 521 of the support body 52 and the inner circumferential surface 321 of the frame body 32 overlap. The inner circumferential surface 61 of the auxiliary member 60 is located closer to the center Po of the central portion 31 than the inner circumferential surface 521 of the support body 52 and the inner circumferential surface 321 of the frame body 32. In other words, in a plan view, the inner circumferential surface 61 of the auxiliary member 60 protrudes closer to the center Po than the inner circumferential surface 521 of the support body 52 and the inner circumferential surface 321 of the frame body 32. In further other words, in a plan view, the inner circumferential surface 521 of the support body 52 and the inner circumferential surface 321 of the frame body 32 extend outward beyond the inner circumferential surface 61 of the auxiliary member 60 and overlap with the auxiliary member 60.

[0040] With this configuration, the auxiliary member 60 overlaps with a portion of the third beam portion 333 of the multiple connecting members 33 in a plan view.

[0041] FIG. 4A is an enlarged plan view of the overlapping position of the connecting member and the auxiliary member, and FIG. 4B is a perspective view thereof.

[0042] As shown in FIGS. 4A and 4B , in a plan view, the auxiliary member 60 protrudes toward the center Po (inward) from the inner circumferential surface 321 of the frame body 32, so that the auxiliary member 60 overlaps a portion of the connecting member 33. Specifically, the auxiliary member 60 overlaps a portion of the third beam portion 333 of the connecting member 33. More specifically, the protrusion length LP60 of the auxiliary member 60 toward the center Po is shorter than the length of the third beam portion 333 (= the distance W34 between the inner circumferential surface 321 of the frame body 32 and the second beam portion 332 in a plan view). As a result, the auxiliary member 60 overlaps a first region 333o of a predetermined length (= LP60) on the side of the third beam portion 333 that is connected to the inner circumferential surface 321 of the frame body 32. On the other hand, the auxiliary member 60 does not overlap a second region 333i of the third beam portion 333 that is closer to the second beam portion 332 than the first region 333o.

[0043] With this configuration, the connecting member 33 is not in contact with the auxiliary member 60 or the support body 52 in the second region 333 i of the third beam portion 333 .

[0044] The connecting member 33 overlaps and contacts the auxiliary member 60 in the first region 333 o of the third beam portion 333 , but does not overlap or contact the support body 52 .

[0045] The frame body 32 overlaps and contacts the auxiliary member 60. The stack of the frame body 32 and the auxiliary member 60 overlaps and contacts the support body 52.

[0046] As a result, as shown in Figures 5(A), 5(B), and 5(C), the thickness of the portion connecting the third beam portion 333 of the connecting member 33 to the frame body 32 changes in three stages. Figure 5(A) is a cross-sectional view of a portion of the connecting member of the first plate corresponding to the second region (a cross-sectional view corresponding to cross-section CSA in Figure 4(A)), Figure 5(B) is a cross-sectional view of a portion of the connecting member of the first plate corresponding to the first region (a cross-sectional view corresponding to cross-section CSB in Figure 4(A)), and Figure 5(C) is a cross-sectional view of a portion of the first plate corresponding to the frame body (a cross-sectional view corresponding to cross-section CSC in Figure 4(A)).

[0047] As shown in Fig. 5(A), a thickness DA of a first portion of the connecting member 33 corresponding to the second region 333i of the third beam portion 333 is the thickness of only the connecting member 33. As shown in Fig. 5(B), a thickness DB of a second portion of the connecting member 33 corresponding to the first region 333o of the third beam portion 333 is the sum of the thickness of the connecting member 33 and the thickness of the auxiliary member 60. As shown in Fig. 5(C), a thickness DC of a third portion of the connecting member 33 corresponding to the frame body 32 is the sum of the thickness of the frame body 32 (= the thickness of the connecting member 33), the thickness of the auxiliary member 60, and the support body.

[0048] Therefore, the relationship of thickness DA of the first portion < thickness DB of the second portion < thickness DC of the third portion is established. That is, in the direction from the central portion 31 to the frame body 32, the thickness of the first plate 30 gradually changes in three stages from the third beam portion 333 of the connecting member 33 to the frame body 32. That is, the number of thickness changes is greater than in the conventional configuration.

[0049] In the fluid control device 10 and the actuator 20 configured as described above, the stress of vibrations occurring in the central portion 31 is applied to the frame 32, which is the fixed portion.

[0050] However, by providing the above-described configuration of the fluid control device 10 and the actuator 20, the stress directly applied to the frame 32 is reduced. This is because the stress is significantly applied at the position where the thickness changes. Therefore, as described above, the fluid control device 10 and the actuator 20 further include a position where the thickness changes before reaching the frame 32. This makes it possible for the fluid control device 10 and the actuator 20 to prevent a significant change in thickness at the connection between the connecting member 33 and the frame 32, and to distribute the stress applied to the frame 32 to other points where the thickness changes. Therefore, the stress applied to the frame 32 is suppressed.

[0051] As a result, the fluid control device 10 and the actuator 20 can prevent the frame 32, the auxiliary member 60, and the support body 52 from peeling off from each other, thereby preventing breakage. Furthermore, the fluid control device 10 and the actuator 20 can prevent stress concentration on the frame 32, i.e., the fixed end of the central portion 31, thereby preventing stress loss and vibration loss in the central portion 31.

[0052] The protruding length LP60 of the auxiliary member 60 has a more appropriate value based on the shapes of the central portion 31 and the connecting member 33 and the magnitude of vibration of the central portion 31.

[0053] Fig. 6 is a graph showing an example of the relationship between the protrusion amount LB of the auxiliary member and the maximum stress applied to the frame. In the example of Fig. 6, the maximum stress decreases as the protrusion length LP60 increases up to about 0.10 mm. Then, when the protrusion length LP60 becomes about 0.10 mm or more, the maximum stress remains low with almost no change. Therefore, in this case, it is preferable to set the protrusion amount to 0.10 mm or more.

[0054] 7 is a graph showing an example of the relationship between the protrusion amount LB of the auxiliary member and the drive time until failure. In the example of FIG. 7, the drive time until failure increases as the protrusion length LP60 increases, up to about 0.10 mm. Then, when the protrusion length LP60 is about 0.10 mm or more, the drive time until failure remains stable with almost no change. Therefore, in this case, it is preferable to set the protrusion amount to 0.10 mm or more.

[0055] 8 is a graph showing an example of the relationship between the protrusion amount LB of the auxiliary member and the vibration displacement at the center Po of the central portion. As shown in the example of FIG. 8, the vibration displacement increases as the protrusion length LP60 increases.

[0056] In this way, by setting the protrusion amount to a predetermined threshold or more, the fluid control device 10 and the actuator 20 can suppress stress and extend the operating time until failure without undesirably attenuating the vibration displacement.

[0057] The configuration described above is merely an example, and it is also possible to adopt the following derivative configuration.

[0058] 9 is an enlarged plan view of the position where the connecting member and the auxiliary member overlap in the fluid control device of Derivative Example 1. As shown in FIG. 9, the fluid control device 10A of Derivative Example 1 differs from the fluid control device 10 in that it includes an auxiliary member 60A. The other configurations of the fluid control device 10A are similar to those of the fluid control device 10.

[0059] The portion of the auxiliary member 60A that protrudes from the inner peripheral surface 321 of the frame body 32 does not extend over the entire circumference, but protrudes partially, including the portion that overlaps with the third beam portion 333 of the connecting member 33.

[0060] As a result, the fluid control device 10A can achieve the same effects as the fluid control device 10. Furthermore, the fluid control device 10A can reduce the portion of the opening 34 that is blocked by the auxiliary member 60A. Meanwhile, by having the auxiliary member 60A protrude over the entire periphery like the auxiliary member 60 of the fluid control device 10, the stress suppression effect can be further enhanced.

[0061] 10 is an enlarged plan view of the position where the connecting member and the auxiliary member overlap in the fluid control device of Derivative Example 2. As shown in FIG. 10, the fluid control device 10B of Derivative Example 2 differs from the fluid control device 10 in that it includes an auxiliary member 60B. The other configurations of the fluid control device 10B are similar to those of the fluid control device 10.

[0062] In the auxiliary member 60B, the protrusion amount at the portion overlapping the third beam portion 333 of the connecting member 33 is greater than the protrusion amount at the portion not overlapping the third beam portion 333.

[0063] As a result, the fluid control device 10B can achieve the same effects as the fluid control device 10.

[0064] 11 is a side cross-sectional view of a fluid control device of Derivative Example 3. As shown in FIG. 11 , the fluid control device 10C of Derivative Example 3 differs from the fluid control device 10 in that it includes a support body 52C. Other configurations of the fluid control device 10C are similar to those of the fluid control device 10.

[0065] The circle defined by the inner peripheral surface 521 of the support body 52C is larger than the circle defined by the inner peripheral surface 321 of the frame body 32 .

[0066] As a result, the fluid control device 10C can achieve the same effects as the fluid control device 10.

[0067] 12 is a side cross-sectional view of a fluid control device of Derivative Example 4. As shown in Fig. 12, the fluid control device 10D of Derivative Example 4 differs from the fluid control device 10 in that it includes a support body 52D. Other configurations of the fluid control device 10D are similar to those of the fluid control device 10.

[0068] The circle defined by the inner peripheral surface 521 of the support body 52D is smaller than the circle defined by the inner peripheral surface 321 of the frame body 32. In this case, the circle defined by the inner peripheral surface 521 of the support body 52D is larger than the circle defined by the inner peripheral surface 61 of the auxiliary member 60.

[0069] As a result, the fluid control device 10D can achieve the same effects as the fluid control device 10.

[0070] 13 is a side cross-sectional view of a fluid control device of Derivative Example 5. As shown in Fig. 13, a fluid control device 10E of Derivative Example 5 differs from the fluid control device 10 in that a first member 71 is used. Other configurations of the fluid control device 10E are similar to those of the fluid control device 10.

[0071] The fluid control device 10E includes a first member 71. The first member 71 is configured such that the first plate 30 and the auxiliary member 60 are integrated into one member.

[0072] As a result, the fluid control device 10E can achieve the same effects as the fluid control device 10. Furthermore, the fluid control device 10E does not require bonding between the first plate 30 and the auxiliary member 60. Therefore, the fluid control device 10E can reduce the number of bonding points and suppress thickness errors.

[0073] 14 is a side cross-sectional view of a fluid control device of Derivative Example 6. As shown in Fig. 14, a fluid control device 10F of Derivative Example 6 differs from the fluid control device 10 in that a second member 72 is used. Other configurations of the fluid control device 10F are similar to those of the fluid control device 10.

[0074] The fluid control device 10F includes a second member 72. The second member 72 is configured such that the auxiliary member 60 and the support member 52 are integrated into one member.

[0075] As a result, the fluid control device 10F can achieve the same effects as the fluid control device 10. Furthermore, the fluid control device 10F does not require bonding between the first plate 30 and the auxiliary member 60. Therefore, the fluid control device 10F can reduce the number of bonding points and suppress thickness errors.

[0076] Fig. 15 is a side cross-sectional view of a fluid control device of derivative example 7. As shown in Fig. 15, a fluid control device 10G of derivative example 7 differs from the fluid control device 10 in the configuration of a support body 52G and in the use of a third member 73G.

[0077] The fluid control device 10G includes a third member 73G. The third member 73G is configured such that the support member 52G and the second plate 51 are integrated into one member.

[0078] In a plan view of the fluid control device 10G, the inner circumferential surface 521 of the support 52G is located closer to the center of the fluid control device 10G than the inner circumferential surface 61 of the auxiliary member 60. In other words, the entire surface of the auxiliary member 60 facing the support 52G is connected to the support 52G.

[0079] As a result, the fluid control device 10G can achieve the same effects as the fluid control device 10. Furthermore, in the fluid control device 10G, the support body 52G and the second plate 51 are configured as a single member, so there is no need to bond the support body 52G to the second plate 51. Therefore, the fluid control device 10G can reduce the number of bonding points, and thickness errors can be suppressed.

[0080] Fig. 16 is a side cross-sectional view of a fluid control device of Derivative Example 8. Fig. 17 is an exploded perspective view of the fluid control device of Derivative Example 8. As shown in Figs. 16 and 17 , the fluid control device 10H of Derivative Example 8 differs from the fluid control device 10 in the configuration of a support body 52H and in the use of a third member 73H. Note that Fig. 17 shows a case where the thickness of the central region of the central portion 31 of the first plate 30 is thicker than the thickness of the outer edge region.

[0081] The fluid control device 10H includes a third member 73H. The third member 73H is configured such that the support body 52H and the second plate 51 are integrated into one member.

[0082] In a plan view of the fluid control device 10H, the inner circumferential surface 521 of the support body 52H is located closer to the center of the fluid control device 10H than the inner circumferential surface 61 of the auxiliary member 60.

[0083] As a result, the fluid control device 10G can achieve the same effects as the fluid control device 10.

[0084] The support body 52H is also formed with a circular groove 590. The groove 590 is recessed from the surface of the support body 52H facing the auxiliary member 60 (the surface opposite the second plate 51). The diameter of the groove 590 is larger than the diameter of the circle when the inner circumferential surface 521 is viewed in plan.

[0085] Furthermore, when the fluid control device 10H is viewed in a plane, if the groove 590 overlaps with the inner surface 61 of the auxiliary member 60, for example, when the support body 52H and the auxiliary member 60 are fixed with adhesive, excess adhesive is contained in the groove 590, preventing it from spilling out toward the opening 600 (the pump chamber side).

[0086] The fluid control device and actuator shown in each of the above examples can also adopt the following configurations as appropriate.

[0087] The thickness of the central portion 31 may be different from that of the connecting member 33 .

[0088] The thickness of the central region of the central portion 31 may be greater than that of the outer edge region thereof.

[0089] The central portion 31 may be provided with a valve membrane on the second plate 51 side.

[0090] The configurations and derivative configurations shown in the above embodiments can be combined as appropriate, and effects according to each combination can be achieved.

[0091] 10, 10A, 10B, 10C, 10D, 10E, 10F: fluid control device 20: actuator 30: first plate 31: central portion 32: frame body 33: connecting member 34: opening 40: driver 51: second plate 52, 52C, 52D: support body 60, 60A, 60B: auxiliary member 61: inner circumferential surface 71: first member 72: second member 311: outer circumferential end 321: inner circumferential surface 331: first beam portion 332: second beam portion 333: third beam portion 333i: second region 333o: first region 510, 520: opening 521: inner circumferential end 600: opening

Claims

1. A first plate comprising a central portion on which a drive unit is arranged and which is vibrable in a direction perpendicular to the flat plate surface by the drive unit, a frame positioned outside the central portion in a plan view, and a connecting member positioned between the central portion and the frame, which vibrates the central portion relative to the frame, An annular support body positioned opposite the frame of the first plate and supporting the first plate, An auxiliary member disposed between the first plate and the support, Equipped with, The frame body is provided with a first inner surface facing the outer peripheral end surface of the central portion, The auxiliary member has a second inner surface on the central side, The connecting member is connected to the frame and includes a frame-side beam portion extending from the first inner circumferential surface toward the central portion. In the plan view, the second inner surface is located closer to the central part than the first inner surface. The frame, the auxiliary member, and the support overlap in the plan view. The frame and the auxiliary member are in contact with each other, and the auxiliary member and the support are in contact with each other. In a first region of a predetermined length from the end of the frame side beam portion that connects to the frame, the frame side beam portion is in contact with the auxiliary member. In the second region of the frame side beam portion that is closer to the central portion than the first region, the frame side beam portion does not come into contact with the auxiliary member. Actuator.

2. A first plate comprising a central portion on which a drive unit is arranged and which is vibrable in a direction perpendicular to the flat plate surface by the drive unit, a frame positioned outside the central portion in a plan view, and a connecting member positioned between the central portion and the frame, which vibrates the central portion relative to the frame, An annular support body positioned opposite the frame of the first plate and supporting the first plate, An auxiliary member disposed between the first plate and the support, Equipped with, The frame body is provided with a first inner surface facing the outer peripheral end surface of the central portion, The auxiliary member has a second inner surface on the central side, The first plate and the auxiliary member are comprised of a first member made of a single component, The connecting member is connected to the frame and includes a frame-side beam portion extending from the first inner circumferential surface toward the central portion. In the plan view, the second inner surface is located closer to the central part than the first inner surface. The frame, the auxiliary member, and the support body have overlapping portions in the plan view. In a first region of a predetermined length from the end of the frame side beam that connects to the frame, the frame side beam overlaps with the auxiliary member in a plan view. In the second region of the frame side beam portion that is closer to the central portion than the first region, the frame side beam portion does not overlap with the auxiliary member in a plan view. Actuator.

3. A first plate comprising a central portion on which a drive unit is arranged and which is vibrable in a direction perpendicular to the flat plate surface by the drive unit, a frame positioned outside the central portion in a plan view, and a connecting member positioned between the central portion and the frame, which vibrates the central portion relative to the frame, An annular support body positioned opposite the frame of the first plate and supporting the first plate, An auxiliary member disposed between the first plate and the support, Equipped with, The frame body is provided with a first inner surface facing the outer peripheral end surface of the central portion, The auxiliary member has a second inner surface on the central side, The auxiliary member and the support member are comprised of a second member made of a single component, The connecting member is connected to the frame and includes a frame-side beam portion extending from the first inner circumferential surface toward the central portion. In the plan view, the second inner surface is located closer to the central part than the first inner surface. The frame and the auxiliary member have overlapping portions in the plan view, In a first region of a predetermined length from the end of the frame side beam portion that connects to the frame, the frame side beam portion is in contact with the auxiliary member. In the second region of the frame side beam portion that is closer to the central portion than the first region, the frame side beam portion does not come into contact with the auxiliary member. Actuator.

4. The support comprises the third inner surface on the central side, In the plan view, the third inner surface is positioned closer to the center than the second inner surface. The actuator according to any one of claims 1 to 3.

5. The aforementioned connecting members are multiple in number, The plurality of connecting members are arranged at intervals along the outer circumference of the central part, The auxiliary member is annular. The actuator according to any one of claims 1 to 3.

6. The aforementioned central part is circular in plan view, The second inner surface is circular in plan view. The actuator according to claim 5.

7. The actuator comprises the actuator described in any one of claims 1 to 3, The first plate has a first opening formed by being surrounded by the central portion, the frame, and the connecting member. The second plate is positioned opposite the first plate and has a second opening at a location that overlaps with the central part in the plan view, The second plate is in contact with the support so as to form a space surrounded by the first plate, the auxiliary member, the support, and the second plate. Fluid control device.

8. The second plate and the support are composed of a single component. The fluid control device according to claim 7.