Container opening / closing device, conveying device, and conveying system

Claims

1. A container opening and closing device for opening and closing a container, wherein a pair of first support parts and second support parts are provided at intervals in the horizontal direction, and multiple pairs of these support parts are provided at intervals in the vertical direction perpendicular to the horizontal direction, A retaining part for holding the lid of the container, A drive unit that moves the holding portion at least in the vertical direction, A detection unit is provided in the holding portion and detects the vertical height positions of the first support portion and the second support portion, respectively, by the movement of the holding portion. A calculation unit for calculating the first positional displacement amount of the first support portion and the second positional displacement amount of the second support portion, Equipped with, The first positional displacement is the amount of positional displacement between the detected height position of the first support and the predetermined height position of the first support. The second positional displacement is the amount of positional displacement between the detected height position of the second support and the predetermined height position of the second support, The first support section and the second support section each have a main body section that supports the object to be transported and a section to be measured provided at the tip of the main body section. The detection unit detects the lower end position in the vertical direction of the part to be measured of the first support and the second support as the detection height position of the first support and the second support, respectively. A container opening and closing device characterized by the following features.

2. A conveying device for conveying an object to be conveyed to a container provided in the container opening and closing device described in claim 1, The transport device includes a determination unit that determines whether the vertical height position of the first support unit and the second support unit is abnormal, based on the detection result of the detection unit or the calculation result of the calculation unit. A conveying device characterized by the following features.

3. The calculation unit calculates the first positional displacement amount or the second positional displacement amount as a positive value when the detection height position of the first support portion or the detection height position of the second support portion is above the specified height position in the vertical direction, and calculates the first positional displacement amount or the second positional displacement amount as a negative value when the detection height position of the first support portion or the detection height position of the second support portion is below the specified height position in the vertical direction. The determination unit determines that the height position of the first support or the height position of the second support is abnormal if the absolute value of the first positional displacement or the absolute value of the second positional displacement is greater than the first threshold. The conveying device according to feature 2.

4. The calculation unit calculates the difference between the detected height position of the first support and the detected height position of the second support. The determination unit determines that at least one of the height positions of the first support and the second support is abnormal if the absolute value of the difference between the detected height position of the first support and the detected height position of the second support is greater than the second threshold. The conveying device according to feature 2.

5. A conveying device for conveying an object to be conveyed to a container provided in the container opening and closing device described in claim 1, A conveying mechanism having a handle capable of holding the object to be conveyed, A selection unit that selects one of the first positional displacement amount and the second positional displacement amount calculated by the calculation unit of the container opening and closing device as the insertion height correction amount, A guide unit that derives the insertion height to be inserted into the container of the hand based on the selected insertion height correction amount, A lifting and lowering operation unit that raises and lowers the hand to the insertion height that was led out by the lead-out unit, An insertion operation unit that inserts the hand into the container at the derived insertion height, Equipped with, The selection unit selects the insertion height correction amount according to the operation type of the transport mechanism. A conveying device characterized by the following features.

6. The calculation unit calculates the first positional displacement amount or the second positional displacement amount as a positive value when the detection height position of the first support portion or the detection height position of the second support portion is above the specified height position in the vertical direction, and calculates the first positional displacement amount or the second positional displacement amount as a negative value when the detection height position of the first support portion or the detection height position of the second support portion is below the specified height position in the vertical direction. The selection unit selects the insertion height correction amount based on the sign of the first positional displacement amount and the second positional displacement amount, according to the operation type of the transport mechanism. The conveying device according to feature 5.

7. In the process by which the conveying mechanism loads the object to be conveyed into the container, if either the first positional displacement amount or the second positional displacement amount is a positive value, the selection unit selects the larger of the first positional displacement amount and the second positional displacement amount as the insertion height correction amount. In the process of the transport mechanism unloading the object from the container, if either the first positional displacement or the second positional displacement is a negative value, the selection unit selects the smaller of the first and second positional displacements as the insertion height correction amount. The conveying device according to feature 6.

8. In the process of the transport mechanism loading the object to be transported into the container, if both the first positional displacement and the second positional displacement are positive or both are negative, the selection unit selects the larger of the first positional displacement and the second positional displacement as the insertion height correction amount. In the process of the transport mechanism unloading the object from the container, if both the first positional displacement and the second positional displacement are positive or negative, the selection unit selects the smaller of the first and second positional displacements as the insertion height correction amount. The conveying device according to feature 6.

9. A transport system comprising at least a container opening and closing device for opening and closing a container having a pair of first support parts and a second support part provided at intervals in the horizontal direction, with multiple pairs of these support parts provided at intervals in the vertical direction perpendicular to the horizontal direction; a transport device for transporting an object to be transported to a container provided on the container opening and closing device, which has a transport mechanism having a hand capable of holding the object to be transported; and a control unit for controlling the operation of the container opening and closing device and the transport device, The container opening and closing device is A retaining part for holding the lid of the container, A drive unit that moves the holding portion at least in the vertical direction, The holding portion is provided with a detection unit that detects the vertical height positions of the first support portion and the second support portion by the movement of the holding portion, The control unit, A calculation unit that calculates a first positional displacement amount of the first support portion relative to a predetermined height position of the first support portion and a second positional displacement amount of the second support portion relative to a predetermined height position of the second support portion, A selection unit selects one of the first positional displacement amount and the second positional displacement amount calculated by the calculation unit as the insertion height correction amount. A guide unit that derives the insertion height to be inserted into the container of the hand based on the selected insertion height correction amount, A lifting and lowering operation unit that raises and lowers the hand to the insertion height that was led out by the lead-out unit, It comprises an insertion operation unit that inserts the hand into the container at the derived insertion height, The detection unit detects the position of the lower end of each of the first support and the second support in the vertical direction as the detection height position of each of the first support and the second support. A transport system characterized by the following features.

10. The control unit further includes a determination unit that determines whether the vertical height position of the first support unit and the second support unit is abnormal, based on the detection result of the detection unit or the calculation result of the calculation unit. The transport system according to feature 9.

11. The calculation unit calculates the first positional displacement amount or the second positional displacement amount as a positive value when the detection height position of the first support portion or the detection height position of the second support portion is above the specified height position in the vertical direction, and calculates the first positional displacement amount or the second positional displacement amount as a negative value when the detection height position of the first support portion or the detection height position of the second support portion is below the specified height position in the vertical direction. The determination unit determines that the height position of the first support or the height position of the second support is abnormal if the absolute value of the first positional displacement or the absolute value of the second positional displacement is greater than the first threshold. The transport system according to feature 10.

12. The calculation unit calculates the difference between the detected height position of the first support and the detected height position of the second support. The determination unit determines that at least one of the height positions of the first support and the second support is abnormal if the absolute value of the difference between the detected height position of the first support and the detected height position of the second support is greater than the second threshold. The transport system according to feature 10.

13. The calculation unit calculates the first positional displacement amount or the second positional displacement amount as a positive value when the detection height position of the first support portion or the detection height position of the second support portion is above the specified height position in the vertical direction, and calculates the first positional displacement amount or the second positional displacement amount as a negative value when the detection height position of the first support portion or the detection height position of the second support portion is below the specified height position in the vertical direction. The selection unit selects the insertion height correction amount based on the sign of the first positional displacement amount and the second positional displacement amount, according to the operation type of the transport mechanism. The transport system according to feature 9.

14. In the process by which the conveying mechanism loads the object to be conveyed into the container, if either the first positional displacement amount or the second positional displacement amount is a positive value, the selection unit selects the larger of the first positional displacement amount and the second positional displacement amount as the insertion height correction amount. In the process of the transport mechanism unloading the object from the container, if either the first positional displacement or the second positional displacement is a negative value, the selection unit selects the smaller of the first and second positional displacements as the insertion height correction amount. The transport system according to feature 13.

15. In the process of the transport mechanism loading the object to be transported into the container, if both the first positional displacement and the second positional displacement are positive or both are negative, the selection unit selects the larger of the first positional displacement and the second positional displacement as the insertion height correction amount. In the process of the transport mechanism unloading the object from the container, if both the first positional displacement and the second positional displacement are positive or negative, the selection unit selects the smaller of the first and second positional displacements as the insertion height correction amount. The transport system according to feature 13.

16. A container opening and closing device for opening and closing the lid of a container having a plurality of support parts for supporting a substrate arranged at intervals in the vertical direction, The retaining part for holding the lid, A drive unit for moving the holding unit in the vertical direction, A detection unit detects the height position of the support unit as the holding unit moves, Equipped with, The detection unit detects the lower end position of the support portion. A container opening and closing device characterized by the following features.

17. The support portion comprises a main body portion that supports the substrate, and a portion to be measured that is larger than the main body portion and is provided at the tip of the main body portion, The detection unit detects the lower end position of the part to be measured. The container opening and closing device according to feature 16.

18. The plurality of support members comprises a pair of first support members and second support members provided at intervals in the horizontal direction, The detection unit detects the vertical positions of the lower end of the first support and the lower end of the second support, respectively, by the movement of the holding unit. The detected position of the lower end of the first support is defined as the detected height position of the first support. The detected position of the lower end of the second support is defined as the detected height position of the second support. The container opening and closing device according to feature 16.

19. The plurality of support parts comprises a pair of first support parts and second support parts provided at intervals in the horizontal direction, The detection unit detects the vertical height positions of the first support unit and the second support unit by the movement of the holding unit, The system further includes a calculation unit for calculating a first positional displacement amount of the first support portion and a second positional displacement amount of the second support portion. The calculation unit calculates the lower end positions of the first support and the second support in the vertical direction as the detected height positions of the first support and the second support, respectively. The container opening and closing device according to feature 16.

20. The first positional displacement amount is the positional displacement amount between the detected height position of the first support and the predetermined height position of the first support, The second positional displacement is the amount of positional displacement between the detected height position of the second support and the predetermined height position of the second support, which has been set in advance. The container opening and closing device according to feature 19.