Plasma processing device

JPWO2026028831A1Pending Publication Date: 2026-02-05
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Patent Information

Authority / Receiving Office
JP · JP
Patent Type
Applications
Filing Date
2025-07-17
Publication Date
2026-02-05

AI Technical Summary

Technical Problem

Existing plasma processing apparatuses using microwaves generate non-axially symmetric electric field distributions due to linearly polarized waves and elliptically polarized waves caused by reflected microwaves, leading to non-uniform processing and increased power loss.

Method used

A plasma processing apparatus with a septum polarizer and Faraday rotator that converts microwaves into right- and left-handed circularly polarized waves, maintaining axial symmetry by impedance matching and minimizing energy loss through a configuration that separates reflected waves from the processing chamber.

Benefits of technology

Achieves uniform plasma distribution and processing across a wide range of conditions without active energy loss, ensuring efficient plasma generation and uniformity.

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Abstract

The objective of the present invention is to provide a plasma processing device that generates an axially symmetrical electric field distribution under a wide range of conditions without actively allowing microwave energy to be lost other than for the generation of plasma, and to enable uniform processing. To this end, the plasma processing device comprises a septum polarizer (15) that allows microwaves that have propagated via a circulator (12) to propagate to a processing chamber, wherein: one port of the circulator (12) is connected to each of one port of the septum polarizer (15) and the other port of the septum polarizer (15), and the other port of the circulator (12) is connected to a high-frequency power supply; and the one port of the septum polarizer (15) is a port for converting the propagated microwaves to right-handed circularly polarized waves, and the other port of the septum polarizer (15) is a port for converting the propagated microwaves to left-handed circularly polarized waves.
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