Peeling device, peeling system, adsorption device, and peeling method

Abstract

The present invention provides a peeling device, peeling system, adsorption device, and peeling method that can easily peel off a member to be peeled from a substrate even when the member to be peeled is in close contact with the substrate, and furthermore, can easily peel off multiple members to be peeled from a substrate at once even when multiple members to be peeled are in close contact with the substrate. [Solution] The second peeling device 7a, 7b, 7c, or 7d peels off a member to be peeled W formed on the surface of a base material M from the base material M, and in particular comprises a plurality of first adsorption parts 13a1 to 13a4, second adsorption parts 13b1 to 13b4, third adsorption parts 13c1 to 13c4, or fourth adsorption parts 13d1 to 13d4 that can adsorb to the surface of the member to be peeled W, and an expansion / contraction mechanism that expands and contracts the distance between these plurality of adsorption parts.

Description

Technical Field

[0001] The present invention relates to a peeling device, a peeling system, a suction device, and a peeling method for peeling a peeled member formed on the surface of a substrate.

Background Art

[0002] Conventionally, a peeling device for peeling a sheet formed on the surface of an article is known.

[0003] For example, it is recognized that in Patent Document 1, a molded product take-out device 2 that sucks and raises the surface of a molded product P placed on a movable mold 4 to separate the molded product P placed on the movable mold 4 from the movable mold 4 is described (see FIG. 1 etc.)

[0004] Also, it is recognized that the suction part 12 described in Cited Document 1 includes a suction part main body 19, four arms 20 extending radially from the center of the suction part main body 19, and suction cups 14 arranged on each arm 20 (see FIG. 2 etc.).

Prior Art Documents

Patent Documents

[0005]

Patent Document 1

Summary of the Invention

Problems to be Solved by the Invention

[0006] However, since the molded product take-out device 2 described in Patent Document 1 sucks and raises the surface of the molded product P placed on the movable mold 4 to separate the molded product P placed on the movable mold 4 from the movable mold 4, when the molded product P is in close contact with the movable mold 4, there is a problem that it is difficult to separate the molded product P from the movable mold 4 (hereinafter referred to as "substrate").

[0007] Furthermore, in the molded product removal device (hereinafter referred to as the "peeling device"), it is desirable to consider the case where a large number of molded products P (hereinafter referred to as the "parts to be peeled") are molded at once, taking production efficiency into consideration.

[0008] The present invention addresses the aforementioned problems of the prior art and aims to provide a peeling device, peeling system, adsorption device, and peeling method that can easily peel off a member to be peeled from a substrate even when the member to be peeled is in close contact with the substrate, and furthermore, can easily peel off multiple members to be peeled from a substrate at once even when multiple members to be peeled are in close contact with the substrate. [Means for solving the problem]

[0009] To solve the above-mentioned problems, the first aspect of the present invention peeling device This is a peelable member formed on the surface of the base material. of Multiple adsorption parts that can adhere to the surface, and the distance between these multiple adsorption parts can be expanded or contracted. possible Equipped with an expansion / contraction mechanism, The expansion and contraction mechanism expands and contracts the distance between the plurality of adsorption parts that are adsorbed onto the member to be peeled off, thereby peeling the member to be peeled off, which is formed on the surface of the substrate, from the substrate. It is characterized by the following:

[0010] Furthermore, a second aspect of the present invention is a peeling device according to the first aspect, wherein the expansion and contraction mechanism comprises a first drive shaft provided at a first position, a first fixed part having a plurality of first arms extending radially from the first position, and a first rotating part having the same number of second arms as the first arms extending radially from the first position, and rotatable about the first position by the rotation of the first drive shaft, and the suction part comprises a plurality of elongated first members slidably arranged along each of the plurality of first arms of the first fixed part, and connecting the tip of each of the second arms of the first rotating part and each of the suction parts.

[0011] Furthermore, a third aspect of the present invention is characterized in that, in the peeling device of the first aspect, a contact portion capable of contacting the surface of the member to be peeled is provided near each adsorption portion.

[0012] Furthermore, a fourth aspect of the present invention is characterized in that, in the peeling device of the second aspect, a contact portion capable of contacting the surface of the member to be peeled is provided near each adsorption portion.

[0013] Furthermore, a fifth aspect of the present invention is a peeling apparatus according to the third aspect, wherein the member to be peeled comprises a main part that constitutes a component and a discarded part that does not constitute a component, and the contact part is capable of contacting the surface of the discarded part.

[0014] Furthermore, a sixth aspect of the present invention is a peeling apparatus according to the fourth aspect, wherein the member to be peeled comprises a main part that constitutes a component and a discarded part that does not constitute a component, and the contact part is capable of contacting the surface of the discarded part.

[0015] Furthermore, a seventh aspect of the present invention is characterized in that, in the peeling device of the first aspect, an insertion portion that can be inserted into the member to be peeled is provided near each suction portion.

[0016] Furthermore, an eighth aspect of the present invention is characterized in that, in the peeling device of the second aspect, an insertion portion that can be inserted into the member to be peeled is provided near each adsorption portion.

[0017] Furthermore, a ninth aspect of the present invention is a peeling apparatus according to the seventh aspect, wherein the member to be peeled comprises a main part that constitutes a component and a discarded part that does not constitute a component, and the insertion part is insertable into the discarded part.

[0018] Furthermore, a tenth aspect of the present invention is a peeling apparatus according to the eighth aspect, wherein the member to be peeled comprises a main part that constitutes a component and a discarded part that does not constitute a component, and the insertion part is insertable into the discarded part.

[0019] Further, in the eleventh aspect of the present invention, in the peeling device of the second aspect, the peeled member is a molded product, the base material is a mold for molding the molded product, and it is provided with a cutting part that cuts the gate of the molded product in conjunction with the operation of the first rotating part.

[0020] Further, in the twelfth aspect of the present invention, in the peeling device of the fourth aspect, the peeled member is a molded product, the base material is a mold for molding the molded product, and it is provided with a cutting part that cuts the gate of the molded product in conjunction with the operation of the first rotating part.

[0021] Further, in the thirteenth aspect of the present invention, in the peeling device of the sixth aspect, the peeled member is a molded product, the base material is a mold for molding the molded product, and it is provided with a cutting part that cuts the gate of the molded product in conjunction with the operation of the first rotating part.

[0022] Further, in the fourteenth aspect of the present invention, in the peeling device of the eighth aspect, the peeled member is a molded product, the base material is a mold for molding the molded product, and it is provided with a cutting part that cuts the gate of the molded product in conjunction with the operation of the first rotating part.

[0023] Further, in the fifteenth aspect of the present invention, in the peeling device of the tenth aspect, the peeled member is a molded product, the base material is a mold for molding the molded product, and it is provided with a cutting part that cuts the gate of the molded product in conjunction with the operation of the first rotating part.

[0024] Further, in the sixteenth aspect of the present invention, in any one of the peeling devices of the eleventh aspect to the fifteenth aspect, it is provided with an application part for applying a mold release agent to the surface of the mold from which the molded product has been脱模.

[0025] Furthermore, the seventeenth aspect of the present invention is characterized by comprising an articulated robot and a peeling device of any of the first to fifteenth aspects connected to the tip of the articulated robot.

[0026] Furthermore, the eighteenth aspect of the present invention is characterized by comprising an articulated robot and a sixteenth aspect of the peeling device connected to the tip of the articulated robot.

[0027] Furthermore, the first invention 9 The embodiment is a peeling device of the first embodiment, wherein the expansion and contraction mechanism has a second drive shaft provided at a second position, a second fixed part extending from the second position, a second rotating part having a plurality of third arms extending radially from the second position and rotatable about the second position by the rotation of the second drive shaft, a plurality of sliding parts slidably arranged on the second fixed part and having a plurality of fourth arms extending radially from each different third position, a plurality of elongated second members connecting the respective tips of the plurality of third arms of the second rotating part to each of the plurality of sliding parts, a plurality of third drive shafts provided at the third position of each of the plurality of sliding parts, and the same number as the fourth arms extending radially from each different third position multiple The suction part is characterized by having a fifth arm and a plurality of third rotating parts that are rotatable about each of the different third positions by the rotation of the plurality of third drive shafts, wherein the suction part is slidably disposed along each of the fourth arms of each of the plurality of sliding parts and comprises a plurality of elongated third members that connect each of the tip portions of each of the plurality of fifth arms of each of the plurality of third rotating parts and each of the suction parts.

[0028] Furthermore, this invention 20 The aspect is the first 9 In the peeling device of the above configuration, each adsorption portion is provided near a contact portion that can come into contact with the surface of the member to be peeled.

[0029] Furthermore, this invention 21 The manner of is, 20 In the peeling apparatus of the present invention, the member to be peeled comprises a main part that constitutes a component and a discarded part that does not constitute a component, and the contact part is capable of contacting the surface of the discarded part.

[0030] Furthermore, the second part of the present invention 2 The aspect is the first 9In the peeling device of the above configuration, each suction portion is provided near the insertion portion which can be inserted into the member to be peeled.

[0031] Furthermore, the second part of the present invention 3 The aspect of this is the second 2 In the peeling apparatus of the present invention, the member to be peeled comprises a main part that constitutes a component and a discarded part that does not constitute a component, and the insertion part is characterized in that it can be inserted into the discarded part.

[0032] Furthermore, the second part of the present invention 4 The aspect is the first 9 In the peeling apparatus of the present invention, the member to be peeled is a molded product, and the base material is a mold for molding the molded product, and is characterized in that it is linked to the operation of the third rotating part and includes a cutting part for cutting the gate of the molded product.

[0033] Furthermore, the second part of the present invention 5 The manner of is, 20 In the peeling apparatus of the present invention, the member to be peeled is a molded product, and the base material is a mold for molding the molded product, and is characterized in that it is linked to the operation of the third rotating part and includes a cutting part for cutting the gate of the molded product.

[0034] Furthermore, the second part of the present invention 6 The manner of is, 21 In the peeling apparatus of the present invention, the member to be peeled is a molded product, and the base material is a mold for molding the molded product, and is characterized in that it is linked to the operation of the third rotating part and includes a cutting part for cutting the gate of the molded product.

[0035] Furthermore, the second part of the present invention 7 The aspect of this is the second 2 In the peeling apparatus of the present invention, the member to be peeled is a molded product, and the base material is a mold for molding the molded product, and is characterized in that it is linked to the operation of the third rotating part and includes a cutting part for cutting the gate of the molded product.

[0036] Furthermore, the second part of the present invention 8 The aspect of this is the second3 In the peeling apparatus of the present invention, the member to be peeled is a molded product, and the base material is a mold for molding the molded product, and is characterized in that it is linked to the operation of the third rotating part and includes a cutting part for cutting the gate of the molded product.

[0037] Furthermore, the second part of the present invention 9 The aspect of this is the second 4 The manner of the second 8 A release device according to any of the embodiments thereof is characterized by comprising an application section for applying a release agent to the surface of the mold from which the molded product has been released.

[0038] Furthermore, this invention 30 A peeling system in the manner of the above, comprising an articulated robot and connected to the tip of the articulated robot, claim 1 9 to claim 2 8 The invention is characterized by comprising a peeling device as described in any of the above.

[0039] Furthermore, the peeling system according to the 31st aspect of the present invention is characterized by comprising an articulated robot and a peeling device according to claim 29 connected to the tip of the articulated robot.

[0040] Furthermore, this invention 32 The suction device in this embodiment is characterized by comprising: a first drive shaft provided at a first position; a first fixed part having a plurality of first arms extending radially from the first position; a first rotating part having the same number of second arms as the first arms extending radially from the first position and rotatable about the first position by the rotation of the first drive shaft; suction parts slidably arranged along each of the plurality of first arms of the first fixed part; and a plurality of elongated first members connecting the tip of each of the second arms of the first rotating part and each of the suction parts.

[0041] Furthermore, the third aspect of the present invention 3The suction device in this configuration includes a second drive shaft provided at a second position, a second fixed part extending from the second position, a second rotating part having a plurality of third arms extending radially from the second position and rotatable about the second position by the rotation of the second drive shaft, a plurality of sliding parts slidably arranged on the second fixed part and having a plurality of fourth arms extending radially from different third positions, a plurality of elongated second members connecting the respective tips of the plurality of third arms of the second rotating part to each of the plurality of sliding parts, a plurality of third drive shafts provided at the third position of each of the plurality of sliding parts, and the same number as the fourth arms extending radially from the different third positions multiple The device is characterized by having a fifth arm and comprising a plurality of third rotating parts that are rotatable about each of the different third positions by the rotation of the plurality of third drive shafts, a suction part that is slidably disposed along each of the fourth arms of each of the plurality of sliding parts, and a plurality of elongated third members that connect the tip of each of the plurality of fifth arms of each of the plurality of third rotating parts and each of the suction parts.

[0042] Furthermore, the third aspect of the present invention 4 The peeling method of this embodiment comprises a first step of adsorbing a member to be peeled off, formed on the surface of a substrate, by a plurality of adsorbent parts arranged at spaced intervals, and after the first step, reducing the distance between each adsorbent part. By , before The present invention is characterized by comprising a second step of peeling the peelable member from the substrate.

[0043] Furthermore, the third aspect of the present invention 5 The peeling method of this embodiment includes a third step of adsorbing each of a plurality of peelable members formed on the surface of a substrate by a plurality of adsorption parts arranged at a distance from each other, and after the third step, reducing the distance between each of the adsorption parts. By , before The present invention is characterized by comprising a fourth step of peeling off a plurality of peelable members from the substrate. [Effects of the Invention]

[0044] According to the peeling apparatus of the first aspect of the present invention, a peeling member formed on the surface of the substrate of Multiple adsorption parts that can adhere to the surface, and the distance between these multiple adsorption parts can be expanded or contracted. possible Equipped with an expansion / contraction mechanism, The expansion and contraction mechanism expands and contracts the distance between multiple adsorption parts that are adsorbed onto the material to be peeled off, thereby peeling the material formed on the surface of the substrate from the substrate. Therefore, even when the member to be peeled is in close contact with the substrate, the member to be peeled can be easily peeled from the substrate by expanding or contracting the spacing between the multiple adsorption parts using the expansion / contraction mechanism.

[0045] Furthermore, according to a second aspect of the present invention, in the peeling apparatus of the first aspect, The expansion / contraction mechanism is, The device comprises a first drive shaft positioned at a first location, a first fixed part having a plurality of first arms extending radially from the first location, and a first rotating part having the same number of second arms as the first arms extending radially from the first location, and rotatable about the first location by the rotation of the first drive shaft. The suction part comprises a plurality of elongated first members slidably arranged along each of the plurality of first arms of the first fixed part, connecting the tip of each of the second arms of the first rotating part to each of the suction parts. In addition to the effects of the peeling device of the first embodiment, even when the member to be peeled is in close contact with the substrate, the spacing between the plurality of suction parts can be easily expanded and contracted by a single first drive shaft, and the member to be peeled can be easily peeled from the substrate.

[0046] Furthermore, according to a third aspect of the present invention, in the peeling device of the first aspect, contact portions that can contact the surface of the member to be peeled are provided near each adsorption portion. Therefore, in addition to the effects of the peeling device of the first aspect, even members to be peeled that have high ductility or malleability can be peeled even more easily from the substrate.

[0047] Furthermore, according to a fourth aspect of the present invention, in the peeling device of the second aspect, contact portions that can contact the surface of the member to be peeled are provided near each adsorption portion. Therefore, in addition to the effects of the peeling device of the second aspect, even members to be peeled that have high ductility or malleability can be peeled even more easily from the substrate.

[0048] Furthermore, according to a fifth aspect of the present invention, in the peeling apparatus of the third aspect, the member to be peeled comprises a main part that constitutes a component and a discarded part that does not constitute a component, and the contact part can contact the surface of the discarded part. In addition to the effects of the peeling apparatus of the third aspect, the member to be peeled can be easily peeled from the substrate without damaging the main part.

[0049] Furthermore, according to a sixth aspect of the present invention, in the peeling apparatus of the fourth aspect, the member to be peeled comprises a main part that constitutes a component and a discarded part that does not constitute a component, and the contact part can contact the surface of the discarded part. Therefore, in addition to the effects of the peeling apparatus of the fourth aspect, the member to be peeled can be easily peeled from the substrate without damaging the main part.

[0050] Furthermore, according to a seventh aspect of the present invention, in the peeling device of the first aspect, an insertion portion that can be inserted into the member to be peeled is provided near each adsorption portion. Therefore, in addition to the effects of the peeling device of the first aspect, even if there are multiple members to be peeled that have high ductility or malleability, the members to be peeled can be peeled even more easily from the substrate.

[0051] Furthermore, according to the eighth aspect of the present invention, in the peeling device of the second aspect, an insertion portion that can be inserted into the member to be peeled is provided near each adsorption portion. Therefore, in addition to the effects of the peeling device of the second aspect, even if there are multiple members to be peeled that have high ductility or malleability, the members to be peeled can be peeled even more easily from the substrate.

[0052] Furthermore, according to the ninth aspect of the present invention, in the peeling apparatus of the seventh aspect, the member to be peeled comprises a main part that constitutes a component and a discarded part that does not constitute a component, and the insertion part can be inserted into the discarded part. Therefore, in addition to the effects of the peeling apparatus of the seventh aspect, the member to be peeled can be easily peeled from the substrate without damaging the main part.

[0053] Furthermore, according to the tenth aspect of the present invention, in the peeling apparatus of the eighth aspect, the member to be peeled comprises a main part that constitutes a component and a discarded part that does not constitute a component, and the insertion part can be inserted into the discarded part. Therefore, in addition to the effects of the peeling apparatus of the eighth aspect, the member to be peeled can be easily peeled from the substrate without damaging the main part.

[0054] Furthermore, according to an eleventh aspect of the present invention, in the peeling apparatus of the second aspect, the member to be peeled is a molded product, and the base material is a mold for molding the molded product, and is equipped with a cutting part that cuts the gate of the molded product in conjunction with the operation of the first rotating part. In addition to the effects of the peeling apparatus of the second aspect, the gate can be easily cut with a single first drive shaft.

[0055] Furthermore, according to a twelfth aspect of the present invention, in the peeling apparatus of the fourth aspect, the member to be peeled is a molded product, and the base material is a mold for molding the molded product, and is equipped with a cutting section that cuts the gate of the molded product in conjunction with the operation of the first rotating section. In addition to the effects of the peeling apparatus of the fourth aspect, the gate can be easily cut with a single first drive shaft.

[0056] Furthermore, according to the 13th aspect of the present invention, in the peeling apparatus of the sixth aspect, the member to be peeled is a molded product, and the base material is a mold for molding the molded product, and is equipped with a cutting section that cuts the gate of the molded product in conjunction with the operation of the first rotating section. In addition to the effects of the peeling apparatus of the sixth aspect, the gate can be easily cut with a single first drive shaft.

[0057] Furthermore, according to the 14th aspect of the present invention, in the peeling apparatus of the 8th aspect, the member to be peeled is a molded product, and the base material is a mold for molding the molded product, and is equipped with a cutting section that cuts the gate of the molded product in conjunction with the operation of the first rotating section. In addition to the effects of the peeling apparatus of the 8th aspect, the gate can be easily cut with a single first drive shaft.

[0058] Furthermore, according to the 15th aspect of the present invention, in the peeling apparatus of the 10th aspect, the member to be peeled is a molded product, and the base material is a mold for molding the molded product, and is equipped with a cutting part that cuts the gate of the molded product in conjunction with the operation of the first rotating part. In addition to the effects of the peeling apparatus of the 10th aspect, the gate can be easily cut with a single first drive shaft.

[0059] Furthermore, according to the 16th aspect of the present invention, the release device of any of the 11th to 15th aspects is equipped with an application section for applying a release agent to the surface of the mold from which the molded product has been released. In addition to the effects of the release device of any of the 11th to 15th aspects, the following molded products can be easily released.

[0060] Furthermore, according to the seventeenth aspect of the present invention, the peeling system comprises an articulated robot and a peeling device of any of the first to fifteenth aspects connected to the tip of the articulated robot, so that the peeling device can enter a narrow area and the member to be peeled can be easily peeled from the substrate.

[0061] Furthermore, according to the 18th aspect of the present invention, the peeling system includes an articulated robot and a peeling device according to the 16th aspect connected to the tip of the articulated robot, so that the peeling device can enter a narrow area and the member to be peeled can be easily peeled from the substrate.

[0062] Furthermore, the first invention 9 According to the embodiment, in the peeling device of the first embodiment, the expansion and contraction mechanism includes a second drive shaft provided at a second position, a second fixed part extending from the second position, a second rotating part having a plurality of third arms extending radially from the second position and rotatable about the second position by the rotation of the second drive shaft, a plurality of sliding parts slidably arranged on the second fixed part and having a plurality of fourth arms extending radially from each different third position, a plurality of elongated second members connecting the respective tips of the plurality of third arms of the plurality of rotating parts to each of the plurality of sliding parts, a plurality of third drive shafts provided at the third position of each of the plurality of sliding parts, and the same number as the fourth arms extending radially from each different third position multipleThe device has a fifth arm and a plurality of third rotating parts that can rotate about different third positions by the rotation of a plurality of third drive shafts, and the suction part is slidably arranged along each of the plurality of fourth arms of each of the plurality of slide parts and comprises a plurality of elongated third members that connect the tip of each of the plurality of fifth arms of each of the plurality of third rotating parts to each of the suction parts, so that the spacing between the plurality of slide parts can be easily expanded or contracted by a single second drive shaft to match the size of the peeling member and the substrate, and even when the peeling member is in close contact with the substrate, the spacing between the plurality of suction parts can be easily expanded or contracted by the third drive shaft to easily peel the peeling member from the substrate.

[0063] Furthermore, this invention 20 According to the manner, the first 9 In the peeling device of the first type, each adsorption portion is provided near a contact portion that can contact the surface of the member to be peeled, 9 In addition to the effects of the peeling apparatus of this form, even if there are multiple members to be peeled that have high ductility or malleability, the members to be peeled can be peeled even more easily from the substrate.

[0064] Furthermore, this invention 21 According to the manner, 20 In the peeling apparatus of the form, the member to be peeled comprises a main part that constitutes a component and a discarded part that does not constitute a component, and the contact part is capable of contacting the surface of the discarded part, 20 In addition to the effects of the peeling device of this form, the member to be peeled can be easily peeled from the substrate without damaging the essential parts.

[0065] Furthermore, the second part of the present invention 2 According to the manner, the first 9 In the peeling device of the first type, an insertion part that can be inserted into the member to be peeled is provided near each suction part, so the first 9 In addition to the effects of the peeling apparatus of this form, even if there are multiple members to be peeled that have high ductility or malleability, the members to be peeled can be peeled even more easily from the substrate.

[0066] Furthermore, the second part of the present invention 3 According to the manner, the second 2 In the peeling apparatus of the second type, the member to be peeled comprises a main part that constitutes a component and a discard part that does not constitute a component, and the insertion part is insertable into the discard part, so the second type 2 In addition to the effects of the peeling device of this form, the member to be peeled can be easily peeled from the substrate without damaging the essential parts.

[0067] Furthermore, the second part of the present invention 4 According to the manner, the first 9 In the peeling apparatus of the first embodiment, the member to be peeled is a molded product, and the base material is a mold for molding the molded product, and is equipped with a cutting section that cuts the gate of the molded product in conjunction with the operation of the third rotating part, 9 In addition to the effects of the peeling device of this form, the gate can be easily cut by a single third drive shaft.

[0068] Furthermore, the second part of the present invention 5 According to the manner, 20 In the peeling apparatus of the above embodiment, the member to be peeled is a molded product, and the base material is a mold for molding the molded product, and is equipped with a cutting section that cuts the gate of the molded product in conjunction with the operation of the third rotating part, 20 In addition to the effects of the peeling device of this form, the gate can be easily cut by a single third drive shaft.

[0069] Furthermore, the second part of the present invention 6 According to the manner, 21 In the peeling apparatus of the above embodiment, the member to be peeled is a molded product, and the base material is a mold for molding the molded product, and is equipped with a cutting section that cuts the gate of the molded product in conjunction with the operation of the third rotating part, 21 In addition to the effects of the peeling device of this form, the gate can be easily cut by a single third drive shaft.

[0070] Furthermore, the second part of the present invention 7 According to the manner, the second 2In the peeling apparatus of the second embodiment, the member to be peeled is a molded product, and the base material is a mold for molding the molded product, and is equipped with a cutting section that cuts the gate of the molded product in conjunction with the operation of the third rotating section, 2 In addition to the effects of the peeling device of this form, the gate can be easily cut by a single third drive shaft.

[0071] Furthermore, the second part of the present invention 8 According to the manner, the second 3 In the peeling apparatus of the second embodiment, the member to be peeled is a molded product, and the base material is a mold for molding the molded product, and is equipped with a cutting section that cuts the gate of the molded product in conjunction with the operation of the third rotating section, 3 In addition to the effects of the peeling device of this form, the gate can be easily cut by a single third drive shaft.

[0072] Furthermore, the second part of the present invention 9 According to the manner, the second 4 The manner of the second 8 In any of the following embodiments of the release device, since it is equipped with an application unit for applying a release agent to the surface of the mold from which the molded product has been released, the second 4 The manner of the second 8 In addition to the effects of any of the above-described release devices, the following molded products can be easily demolded.

[0073] Furthermore, this invention 30 According to the peeling system of the embodiment, a multi-joint robot and a connection to the tip of the multi-joint robot, claim 1 9 to claim 2 8 Since it is equipped with a peeling device as described in any of the above, the peeling device can be used in a narrow area. Susumu By inserting it, the material to be peeled off can be easily removed from the base material.

[0074] Furthermore, according to the 31st aspect of the present invention, the peeling system includes an articulated robot and a peeling device according to claim 29 connected to the tip of the articulated robot, so that the peeling device can enter a narrow area and the member to be peeled can be easily peeled from the substrate.

[0075] Furthermore, this invention 32According to the suction device of this form, it comprises a first drive shaft provided at a first position, a first fixed part having a plurality of first arms extending radially from the first position, a first rotating part having the same number of second arms as the first arms extending radially from the first position and rotatable about the first position by the rotation of the first drive shaft, suction parts slidably arranged along each of the plurality of first arms of the first fixed part, and a plurality of elongated first members connecting the tip of each of the second arms of the first rotating part and each of the suction parts. As a result, the spacing between the plurality of suction parts can be easily expanded and contracted by a single first drive shaft, and consequently, objects of different sizes can be easily attracted.

[0076] Furthermore, the third aspect of the present invention 3 According to the adsorption device of this form, a second drive shaft is provided at a second position, The A second fixing part extending radially from position 2, The It has multiple third arms that extend radially from position 2, The By the rotation of the drive shaft 2, The A second rotating part that can rotate around position 2, The Multiple sliding parts, each having multiple fourth arms that are slidably positioned on a fixed part 2 and extend radially from different third positions, The Rotating part 2 Multiple The tip of each of the third arms of the number and Multiple Multiple long second members connected to each of the number of sliding parts, Multiple Each of the number slides The Multiple third drive shafts located at position 3, So Each extends radially from a different third position. The 4 arms, the same number multiple Having a fifth arm, Multiple By the rotation of the third drive shaft, So Multiple third rotating parts that can rotate around different third positions, Multiple Each of the number slides Multiple Each of the fourth arms has a suction part that is slidably positioned along each fourth arm, Multiple Each of the third rotations of the number Multiple Each of the tips of the fifth arm of the number, Sucking Since each of the attachment points is equipped with multiple elongated third members connected to them, the spacing between the multiple suction points can be easily expanded or contracted by the second and third drive shafts, and consequently, multiple objects of different sizes can be easily attracted.

[0077] Furthermore, the third aspect of the present invention 4 According to the peeling method of this embodiment, a first step is to adsorb the member to be peeled, which is formed on the surface of the substrate, by a plurality of adsorption parts that are spaced apart, and after the first step, the spacing between each adsorption part is reduced. By , covered Since the method includes a second step of peeling the release member from the substrate, the release member can be easily peeled from the substrate even when it is in close contact with the substrate.

[0078] Furthermore, the third aspect of the present invention 5 According to the peeling method of this embodiment, a third step is to adsorb each of the multiple peelable members formed on the surface of the substrate by a plurality of adsorption parts arranged at a distance from each other, and after the third step, the distance between each of the adsorption parts is reduced. By , Multiple The method includes a fourth step of peeling off several members to be peeled from the substrate, so that even when multiple members to be peeled are in close contact with the substrate, multiple members to be peeled off can be easily peeled off from the substrate simultaneously. [Brief explanation of the drawing]

[0079] [Figure 1] This is an overall perspective view of the peeling system according to the first embodiment of the present invention. [Figure 2] This is an enlarged view of section A in Figure 1. [Figure 3] This is a bottom view of the first peeling device of this embodiment when the workpiece width is increased and the suction section width is increased. [Figure 4] This is a front view of the first peeling apparatus of this embodiment when the workpiece width is increased and the suction section width is increased. [Figure 5]This is a bottom view of the first peeling device of this embodiment when the workpiece width is reduced and the suction section width is increased. [Figure 6] This is a front view of the first peeling apparatus of this embodiment when the workpiece width is reduced and the suction section width is increased. [Figure 7] This is a bottom view of the first peeling device of this embodiment when the workpiece width is reduced and the suction section width is reduced. [Figure 8] This is a front view of the first peeling apparatus of this embodiment when the workpiece width is reduced and the suction section width is reduced. [Figure 9] This is a bottom view of the first peeling apparatus of this embodiment when the workpiece width is reduced and the cutter section is cut. [Figure 10] This is a front view of the first peeling apparatus of this embodiment when the workpiece width is reduced and the cutter section is cut. [Figure 11] This is a block diagram of the peeling system of this embodiment. [Figure 12] This is a block diagram of the main controller of the peeling system in this embodiment. [Figure 13] This is a flowchart of the main program in the peeling system of this embodiment. [Figure 14] This is an overall plan view of the member to be peeled used in the peeling system of this embodiment. [Figure 15] This figure shows the state of the first peeling device of this embodiment before adjusting the workpiece width to match the member to be peeled. [Figure 16] This figure shows the state after the first peeling device of this embodiment has adjusted the width of the workpiece to match the member to be peeled. [Figure 17] This is an enlarged view of section B in Figure 16. [Figure 18] This figure shows the state in which the adsorption part adsorbs the member to be peeled in the peeling system of this embodiment. [Figure 19] This is an enlarged view of section C in Figure 18. [Figure 20] This figure shows the peeling system of this embodiment, in which the suction part has adsorbed the member to be peeled and the width of the suction part has been reduced. [Figure 21]This figure shows the state in the release system of this embodiment where the adsorption part separates the member to be released from the substrate, and the release agent is sprayed from the release agent spray nozzle. [Figure 22] This figure shows the state in the release system of this embodiment, where the release agent has been sprayed from the release agent spray nozzle and the member to be released has been separated from the substrate. [Figure 23] This figure shows the peeling system of this embodiment, with the peeled member placed back onto another plate. [Figure 24] This figure shows the state in which the cutter section of the peeling system of this embodiment is set on the gate of the member to be peeled. [Figure 25] This figure shows the state in which the cutter unit of the peeling system of this embodiment has been activated to cut the gate of the member to be peeled. [Figure 26] This is a front view of the first peeling apparatus of the second embodiment when the workpiece width is increased and the suction section width is increased. [Figure 27] Figure 26 is equivalent to Figure 17. [Figure 28] Figure 26 is equivalent to Figure 19. [Modes for carrying out the invention]

[0080] Embodiments of the present invention will be described below with reference to the drawings.

[0081] (First Embodiment) First, a first embodiment of the present invention will be described. Note that the drawings used in this embodiment are exaggerated for ease of understanding, and their dimensions differ from the actual dimensions. Figure 1 is an overall perspective view of the peeling system of the first embodiment of the present invention, and Figure 2 is an enlarged view of part A in Figure 1.

[0082] In this embodiment, peeling system 1 and peeling system 101 of the embodiment described later use a mold as an example of the "substrate" and a molded product as an example of the "member to be peeled" of the present invention, and an embodiment is described in which a molded product of a highly malleable and ductile thin film formed by a mold is peeled off by a peeling device. However, the peeling system of the present invention is not limited to this embodiment and can be implemented in all embodiments in which a member to be peeled off, including a molded product, is peeled off from the surface of a substrate to which a member to be peeled off can be attached, including a mold.

[0083] However, the peeling system 1, first peeling device 5, second peeling devices 7a, 7b, 7c, and 7d of this embodiment, as well as the peeling system 101 and first peeling device 105 of the embodiment described later, are particularly effective when peeling a thin film to be peeled from a substrate, which has high malleability and ductility.

[0084] Furthermore, because the peeling system 1 of this embodiment has a very large number of parts, it was not possible to assign reference numerals (part numbers) to all the parts shown on the paper due to space limitations. Therefore, these reference numerals (part numbers) are assigned to other drawings, and this embodiment and the implementation described later will be explained while referring to multiple drawings.

[0085] As shown in Figures 1 and 2, the peeling system 1 of this embodiment comprises an articulated robot 3 and a first peeling device 5 (which also corresponds to the "suction device" of the present invention) rotatably connected to the tip of the articulated robot 3.

[0086] The articulated robot 3 is a standard 7-axis articulated robot installed at location G and operated by commands from the robot controller 8 (see Figure 11).

[0087] The articulated robot 3 has seven axes: a first rotation axis 31 for rotating the second base 32 relative to the first base 30; a second rotation axis 33 for rotating the lower arm 34 forward and backward relative to the second base 32; a third rotation axis 35 for rotating the upper arm 36 up and down relative to the lower arm 34; a fourth rotation axis 37 for coaxially rotating the lower middle arm 38 relative to the upper and lower arm 36; a fifth rotation axis 39 for coaxially rotating the upper middle arm 40 relative to the lower middle arm 38; a sixth rotation axis 41 for rotating the lower upper arm 42 up and down relative to the upper middle arm 40; and a seventh rotation axis 43 for rotating the upper upper arm 44 up and down relative to the lower upper arm 42.

[0088] As described above, the first peeling device 5 is rotatably connected to the tip of the upper arm portion 44 of the articulated robot 3, and peels off the peelable member (molded product) W, which will be described later, that has adhered to the surface of the base material (mold) M, after molding, from the base material M.

[0089] Furthermore, the first peeling device 5 of this embodiment can change the spacing (work width) of the four second peeling devices 7a, 7b, 7c, and 7d (which also correspond to the "adsorption device" of the present invention) described later, according to the size of the base material M and the member to be peeled W, and the width between the adsorption parts (adsorption part width), described later, can also be changed in order to peel the member to be peeled W from the base material M.

[0090] Furthermore, the first peeling device 5 of this embodiment can individually and simultaneously peel off the four divided members W1, W2, W3, and W4 from the base material M using four second peeling devices 7a, 7b, 7c, and 7d, which will be described later (see Figure 14).

[0091] In this embodiment, the first peeling device 5 peels off the four peelable members W1, W2, W3, and W4 from the base material M individually and simultaneously. However, by removing or not operating some of the suction parts, it is possible to peel off not just the four peelable members, but three, two, or one peelable member individually and simultaneously.

[0092] Figure 3 is a bottom view of the first peeling apparatus of this embodiment when the workpiece width is increased and the suction section width is increased, Figure 4 is a front view thereof, Figure 5 is a bottom view of the first peeling apparatus of this embodiment when the workpiece width is decreased and the suction section width is increased, and Figure 6 is a front view thereof.

[0093] As shown in Figures 2 to 4, the first peeling device 5 of this embodiment comprises a hollow box-shaped housing 69, which is rotatably connected to the tip of the upper arm 44 of the articulated robot 3 and has a roughly rectangular shape in plan view; a main frame 29 (corresponding to the "second fixing part of the present invention") connected to the housing 69 for moving four second peeling devices 7a, 7b, 7c, and 7d, which will be described later, radially in directions approximately 90 degrees from the center (which is the same position as the main rotation center 67); and four second peeling devices 7a, 7b, 7c, and 7d (see Figure 3) that can move along the main frame 29 in directions approximately 90 degrees different from each other.

[0094] Furthermore, the first peeling device 5 is connected to the bottom surface of the housing 69 and includes a main motor 9 for moving the four second peeling devices 7a, 7b, 7c, and 7d along the main frame 29 in directions approximately 90 degrees apart from each other, a main motor pulley 77 connected to the motor shaft of the main motor 9, a main rotating part timing belt 73 with one end wound around the main motor pulley 77, and a main rotating part pulley 71 wound around the other end of the main rotating part timing belt 73 and rotating around the same position as the main rotating part center 67 (corresponding to the "second position" of the present invention, see Figure 7) (the rotation center of the main rotating part 71 corresponds to the "second drive shaft" of the present invention).

[0095] Furthermore, the first peeling device 5 includes a main rotating part 45 (corresponding to the "second rotating part" of the present invention) which is connected coaxially to the rotation center of the main rotating part pulley 71 and has a roughly cross shape in plan view (a state in which one end of the four main rotating bars (corresponding to the "third arm" of the present invention) is joined at a single point at an angle of approximately 90 degrees) in order to change the spacing between the second peeling devices 7a, 7b, 7c, and 7d.

[0096] Furthermore, the first peeling device 5 further includes an auxiliary part moving link 47a (corresponding to the "second member" of the present invention, see Figure 5) that connects the end of one main rotating bar of the main rotating part 45 to the auxiliary frame 65a (corresponding to the "first fixing part" and "sliding part" of the present invention) and an auxiliary part moving link 47b (corresponding to the "first fixing part" and "sliding part" of the present invention) that connects the end of the other main rotating bar of the main rotating part 45 to the auxiliary frame 65b (corresponding to the "first fixing part" and "sliding part" of the present invention) The device comprises: a "second component" (corresponding to the "second component" of the present invention, see Figure 5); an auxiliary component movement link 47c (corresponding to the "second component" of the present invention, see Figure 5) that connects the end of one other main rotating bar of the main rotating component 45 to the auxiliary frame 65c (corresponding to the "first fixed component" and "sliding component" of the present invention); and an auxiliary component movement link 47d (corresponding to the "second component" of the present invention, see Figures 3 and 5) that connects the end of one other main rotating bar of the main rotating component 45 to the auxiliary frame 65d (corresponding to the "first fixed component" and "sliding component" of the present invention).

[0097] In this embodiment, the first peeling device 5 is configured to transmit the driving force of the main motor 9 via the main rotating pulley 71 in order to move the four second peeling devices 7a, 7b, 7c, and 7d in directions that are approximately 90 degrees apart from each other. However, the driving force may also be transmitted directly from the motor shaft of the main motor 9.

[0098] Furthermore, the main rotating bar (corresponding to the "third arm" of the present invention) refers to the four protruding parts of the main rotating part 45 that extend radially from the main rotating part center 67 (see Figure 7) of the main rotating part 45 in directions of approximately 90 degrees.

[0099] As shown in Figures 2 to 4, the main frame 29 has a grid shape with a total of eight protrusions on its outer circumference: two protrusions 79a1 and 79a2, two protrusions 79b1 and 79b2, two protrusions 79c1 and 79c2, and two protrusions 79d1 and 79d2, respectively, so that each of the auxiliary frames 65a, 65b, 65c, and 65d of the second peeling device, which will be described later, can move. Overall, it has a roughly rectangular shape in plan view.

[0100] Furthermore, the main frame 29 is formed along the two aforementioned protrusions 79a1 and 79a2 and includes two auxiliary frame movement rails 25a1 and 25a2 for the auxiliary frame 65a (described later) to move along the main frame 29; two auxiliary frame movement rails 25b1 and 25b2 for the auxiliary frame 65b (described later) to move along the main frame 29, formed along two protrusions 79b1 and 79b2; two auxiliary frame movement rails 25c1 and 25c2 for the auxiliary frame 65c (described later) to move along the main frame 29, formed along two protrusions 79c1 and 79c2; and two auxiliary frame movement rails 25d1 and 25d2 for the auxiliary frame 65d (described later) to move along the main frame 29, formed along two protrusions 79d1 and 79d2.

[0101] Furthermore, the first peeling device 5 includes auxiliary frame moving carriages 81a1 and 81a2 (see Figure 7) that can move along two auxiliary frame moving rails 25a1 and 25a2, auxiliary frame moving carriages 81b1 and 81b2 (see Figure 7) that can move along two auxiliary frame moving rails 25b1 and 25b2, auxiliary frame moving carriages 81c1 and 81c2 (see Figure 7) that can move along two auxiliary frame moving rails 25c1 and 25c2, and auxiliary frame moving carriages 81d1 and 81d2 (see Figure 7) that can move along two auxiliary frame moving rails 25d1 and 25d2.

[0102] Furthermore, the first peeling device 5 is equipped with three mold release agent spray nozzles 63a, 63b, and 63c (corresponding to the "coating section" of the present invention) for applying a mold release agent to the surface of the base material M after the member to be peeled W has been peeled from the base material M, in order to facilitate the next peeling of the member to be peeled W from the base material M.

[0103] Specifically, the mold release agent spray nozzle 63b located in the center is provided on the main frame 29 on the side opposite to the articulated robot 3 relative to the main frame 29, the mold release agent spray nozzle 63a, which is positioned adjacent to the mold release agent spray nozzle 63b, is provided on the auxiliary frame 65a on the side opposite to the articulated robot 3 relative to the auxiliary frame 65a, and the mold release agent spray nozzle 63c, which is positioned on the opposite side from the mold release agent spray nozzle 63a relative to the mold release agent spray nozzle 63b, is provided on the auxiliary frame 65b on the side opposite to the articulated robot 3 relative to the auxiliary frame 65b.

[0104] Next, we will explain the operation of the first peeling device 5 described above.

[0105] In the first peeling device 5, when the main motor 9 is rotated counterclockwise toward the motor shaft tip, the main motor pulley 77, the main rotating part timing belt 73, and the main rotating part pulley 71 rotate in the same direction, and the main rotating part 45 rotates clockwise toward the plane of the paper in Figure 5.

[0106] Then, in Figure 5, when the main rotating part 45 rotates clockwise toward the plane of the paper, the auxiliary frames 65a, 65b, 65c, and 65d move outward by the auxiliary moving links 47a, 47b, 47c, and 47d.

[0107] Specifically, the auxiliary frame movement link 47a moves the auxiliary frame movement carriages 81a1 and 81a2 (see Figure 7) of the auxiliary frame 65a outward along the two auxiliary frame movement rails 25a1 and 25a2 (see Figure 7), and the auxiliary frame movement link 47b moves the auxiliary frame movement carriages 81b1 and 81b2 (see Figure 7) of the auxiliary frame 65b outward along the two auxiliary frame movement rails 25b1 and 25b2 (see Figure 7). As the auxiliary frame is moved, the auxiliary frame movement carriages 81c1 and 81c2 (see Figure 7) of the auxiliary frame 65c move outward along the two auxiliary frame movement rails 25c1 and 25c2 (see Figure 7) by the auxiliary frame movement link 47c, and the auxiliary frame movement carriages 81d1 and 81d2 (see Figure 7) of the auxiliary frame 65d move outward along the two auxiliary frame movement rails 25d1 and 25d2 (see Figure 7) by the auxiliary frame movement link 47d.

[0108] Figure 3 is a bottom view showing the state in which auxiliary frames 65a, 65b, 65c, and 65d have moved outwards, and Figure 4 is a front view thereof.

[0109] On the other hand, in the first peeling device 5, when the main motor 9 is rotated clockwise toward the motor shaft tip, the main motor pulley 77, the main rotating part timing belt 73, and the main rotating part pulley 71 rotate in the same direction, and the main rotating part 45 rotates counterclockwise toward the plane of the paper in Figure 3.

[0110] Then, in Figure 3, when the main rotating part 45 rotates counterclockwise toward the plane of the paper, the auxiliary frames 65a, 65b, 65c, and 65d move inward by the auxiliary moving links 47a, 47b, 47c, and 47d.

[0111] Specifically, the auxiliary frame movement link 47a moves the auxiliary frame movement carriages 81a1 and 81a2 (see Figure 7) of the auxiliary frame 65a inward along the two auxiliary frame movement rails 25a1 and 25a2 (see Figure 7), and the auxiliary frame movement link 47b moves the auxiliary frame movement carriages 81b1 and 81b2 (see Figure 7) of the auxiliary frame 65b inward along the two auxiliary frame movement rails 25b1 and 25b2 (see Figure 7). As the auxiliary frame is moved, the auxiliary frame movement carriages 81c1 and 81c2 (see Figure 7) of the auxiliary frame 65c move inward along the two auxiliary frame movement rails 25c1 and 25c2 (see Figure 7) by the auxiliary frame movement link 47c, and the auxiliary frame movement carriages 81d1 and 81d2 (see Figure 7) of the auxiliary frame 65d move inward along the two auxiliary frame movement rails 25d1 and 25d2 (see Figure 7) by the auxiliary frame movement link 47d.

[0112] Figure 5 is a bottom view showing the state in which the auxiliary frames 65a, 65b, 65c, and 65d have moved inward, and Figure 6 is a front view thereof.

[0113] As described above, the first peeling device 5 of this embodiment can change the spacing (work width) of the four second peeling devices 7a, 7b, 7c, and 7d, which will be described later, according to the size of the base material M and the member to be peeled W.

[0114] The second peeling device 7a peels the member to be peeled W1, described later, from the base material M by changing the width between the adsorption parts (adsorption part width), described later, and consists of an auxiliary frame 65a (see Figure 5) which is roughly cross-shaped in plan view (a state in which one end of four auxiliary frame bars (corresponding to the "first arm" and "fourth arm" of the present invention) is joined at one point at an angle of approximately 90 degrees), an auxiliary motor 11a positioned in the center of the auxiliary frame 65a (the intersection of the cross shape), and the auxiliary motor 11 The device includes an auxiliary rotating part 21a (corresponding to the "first rotating part" and "third rotating part" of the present invention) which is connected to the motor shaft of a (corresponding to the "first drive shaft" and "third drive shaft" of the present invention) and is rotatable about the auxiliary rotating part center 23a (corresponding to the "first position" and "third position" of the present invention), and has a roughly cross shape in plan view (a state in which one end of the four auxiliary rotating part bars (corresponding to the "second arm" and "fifth arm" of the present invention) is joined at a single point at an angle of approximately 90 degrees).

[0115] Furthermore, the auxiliary frame bar (corresponding to the "first arm" and "fourth arm" of the present invention) refers to the four protruding parts of the auxiliary frame 65a that extend radially at approximately 90 degrees from the center of the auxiliary frame 65a (which is the same position as the auxiliary rotating part center 23a), and the auxiliary rotating part bar (corresponding to the "second arm" and "fifth arm" of the present invention) refers to the four protruding parts of the auxiliary rotating part 21a that extend radially at approximately 90 degrees from the auxiliary rotating part center 23a of the auxiliary rotating part 21a.

[0116] Furthermore, the second peeling device 7a includes suction unit moving rails 27a1, 27a2, 27a3, and 27a4 formed along four auxiliary frame bars of the auxiliary frame 65a, and suction unit moving carriages 17a1, 17a2, 17a3, and 17a4 that are movable along each of the suction unit moving rails 27a1, 27a2, 27a3, and 27a4.

[0117] Furthermore, the second peeling device 7a includes a first suction part 13a1 having a suction hole 15a1 and connected to a carriage for moving the suction part 17a1, a first suction part 13a2 having a suction hole 15a2 and connected to a carriage for moving the suction part 17a2, a first suction part 13a3 having a suction hole 15a3 and connected to a carriage for moving the suction part 17a3, and a first suction part 13a4 having a suction hole 15a4 and connected to a carriage for moving the suction part 17a4.

[0118] Furthermore, the second peeling device 7a includes a suction unit moving link 19a1 (corresponding to the "first member" and "third member" of the present invention) that connects the end of one auxiliary rotating bar of the auxiliary rotating unit 21a to the suction unit moving carriage 17a1, and a suction unit moving link 19a2 (corresponding to the "first member" and "third member" of the present invention) that connects the end of the other auxiliary rotating bar of the auxiliary rotating unit 21a to the suction unit moving carriage 17a2. The device comprises: a suction part moving link 19a3 (corresponding to the "first member" and "third member" of the present invention) that connects the end of one other auxiliary rotating bar of the auxiliary rotating part 21a to the suction part moving carriage 17a3; and a suction part moving link 19a4 (corresponding to the "first member" and "third member" of the present invention) that connects the end of one other auxiliary rotating bar of the auxiliary rotating part 21a to the suction part moving carriage 17a4.

[0119] Furthermore, the second peeling device 7a includes a needle portion 75a1 (corresponding to the "insertion portion" of the present invention, see Figure 5) located near the first suction portion 13a1, a needle portion 75a2 (corresponding to the "insertion portion" of the present invention) located near the first suction portion 13a2, a needle portion 75a3 (corresponding to the "insertion portion" of the present invention) located near the first suction portion 13a3, and a needle portion 75a4 (corresponding to the "insertion portion" of the present invention, see Figure 5) located near the first suction portion 13a4.

[0120] Furthermore, the second peeling device 7a includes a cutter section 53a (corresponding to the "cutting section" of the present invention) that rotates and opens and closes around the cutter section rotation center 51a by opening and closing the cutter first gripping section 55a and the cutter second gripping section 57a; a cutter section lowering plate 59a connected to the suction section moving carriage 17a2 and having an inclined surface that slopes downward toward the outside, for lowering the cutter section 53a to the cutting position in order to cut the gate formed on the peeled part W1, which will be described later; and a rotatable cutter section lowering pulley 61a connected to the auxiliary frame bar of the auxiliary frame 65a and for lowering the cutter section 53a to the cutting position along the cutter section lowering plate 59a.

[0121] Furthermore, the distance between the lower end of the cutter section 53a and the lower ends of the first suction sections 13a1 to 13a4 is X1, as shown in Figures 4 and 6, before the cutter section 53a is lowered to the cutting position by the cutter section lowering plate 59a and the cutter section lowering pulley 61a, and after the cutter section 53a is lowered to the cutting position by the cutter section lowering plate 59a and the cutter section lowering pulley 61a, it is X2, which is shorter than X1, as shown in Figures 8 and 10, which will be described later.

[0122] Furthermore, the second peeling device 7a includes a cutter operating roller 49a that is rotatably connected to the outermost end of the auxiliary rotating bar of the auxiliary rotating bar 21a of the auxiliary rotating bar 21a, which is on the outer side of the connection point between the auxiliary rotating bar of the auxiliary rotating bar 21a and the suction unit moving link 19a4, in order to operate the cutter unit 53a.

[0123] Furthermore, the second peeling device 7b also peels the member to be peeled off, described later, W2 from the base material M by changing the width between the adsorption parts (adsorption part width), and comprises an auxiliary frame 65b (see Figure 5) which has a roughly cross shape in plan view (a state in which one end of four auxiliary frame bars is joined at one point at an angle of approximately 90 degrees), an auxiliary motor 11b positioned in the center of the auxiliary frame 65b (the intersection of the cross shape), and an auxiliary rotating part 21b (corresponding to the "first rotating part" and "third rotating part" of the present invention) which has a roughly cross shape in plan view (a state in which one end of four auxiliary rotating part bars (corresponding to the "second arm" and "fifth arm" of the present invention) is joined at one point at an angle of approximately 90 degrees), and is connected to the motor shaft of the auxiliary motor 11b (corresponding to the "first drive shaft" and "third drive shaft" of the present invention) and is rotatable about the auxiliary rotating part center 23b (corresponding to the "first position" and "third position" of the present invention).

[0124] Furthermore, the auxiliary frame bar (corresponding to the "first arm" and "fourth arm" of the present invention) refers to the four protruding parts of the auxiliary frame 65b that extend radially at approximately 90 degrees from the center of the auxiliary frame 65b (which is the same position as the auxiliary rotating part center 23b), and the auxiliary rotating part bar (corresponding to the "second arm" and "fifth arm" of the present invention) refers to the four protruding parts of the auxiliary rotating part 21b that extend radially at approximately 90 degrees from the auxiliary rotating part center 23b of the auxiliary rotating part 21b.

[0125] Furthermore, the second peeling device 7b includes suction unit moving rails 27b1, 27b2 (see Figure 5), 27b3, and 27b4 (see Figure 5) formed along four auxiliary frame bars of the auxiliary frame 65b, and suction unit moving carriages 17b1, 17b2, 17b3, and 17b4 that are movable along each of the suction unit moving rails 27b1, 27b2, 27b3, and 27b4, respectively.

[0126] Furthermore, the second peeling device 7b includes a second suction part 13b1 having a suction hole 15b1 and connected to a carriage for moving the suction part 17b1, a second suction part 13b2 having a suction hole 15b2 and connected to a carriage for moving the suction part 17b2, a second suction part 13b3 having a suction hole 15b3 and connected to a carriage for moving the suction part 17b3, and a second suction part 13b4 having a suction hole 15b4 and connected to a carriage for moving the suction part 17b4.

[0127] Furthermore, the second peeling device 7b includes a suction unit moving link 19b1 (corresponding to the "first member" and "third member" of the present invention) that connects the end of one auxiliary rotating bar of the auxiliary rotating unit 21b to the suction unit moving carriage 17b1, and a suction unit moving link 19b2 (corresponding to the "first member" and "third member" of the present invention) that connects the end of the other auxiliary rotating bar of the auxiliary rotating unit 21b to the suction unit moving carriage 17b2. The device comprises: a suction part moving link 19b3 (corresponding to the "first member" and "third member" of the present invention) that connects the end of one other auxiliary rotating bar of the auxiliary rotating part 21b to the suction part moving carriage 17b3; and a suction part moving link 19b4 (corresponding to the "first member" and "third member" of the present invention) that connects the end of one other auxiliary rotating bar of the auxiliary rotating part 21b to the suction part moving carriage 17b4.

[0128] Furthermore, the second peeling device 7b includes a needle portion 75b1 (corresponding to the "insertion portion" of the present invention) located near the second suction portion 13b1, a needle portion 75b2 (corresponding to the "insertion portion" of the present invention) located near the second suction portion 13b2, a needle portion 75b3 (corresponding to the "insertion portion" of the present invention) located near the second suction portion 13b3, and a needle portion 75b4 (corresponding to the "insertion portion" of the present invention, see Figure 5) located near the second suction portion 13b4.

[0129] Furthermore, the second peeling device 7b includes a cutter section 53b (corresponding to the "cutting section" of the present invention) that rotates and opens and closes around the cutter section rotation center 51b by opening and closing the cutter first gripping section 55b and the cutter second gripping section 57b; a cutter section lowering plate 59b connected to the suction section moving carriage 17b2 and having an inclined surface that slopes downward toward the outside, for lowering the cutter section 53b to the cutting position in order to cut the gate formed on the peeled part W2, which will be described later; and a rotatable cutter section lowering pulley 61b connected to the auxiliary frame bar of the auxiliary frame 65b and for lowering the cutter section 53b to the cutting position along the cutter section lowering plate 59b.

[0130] Furthermore, the distance between the lower end of the cutter section 53b and the lower ends of the second suction sections 13b1 to 13b4 is X1, as shown in Figures 4 and 6, before the cutter section 53b is lowered to the cutting position by the cutter section lowering plate 59b and the cutter section lowering pulley 61b, and after the cutter section 53b is lowered to the cutting position by the cutter section lowering plate 59b and the cutter section lowering pulley 61b, it is X2, which is shorter than X1, as shown in Figures 8 and 10, which will be described later.

[0131] Furthermore, the second peeling device 7b includes a cutter operating roller 49b that is rotatably connected to the outermost end of the auxiliary rotating bar of the auxiliary rotating bar 21b of the auxiliary rotating bar 21b, which is on the outer side of the connection point between the auxiliary rotating bar of the auxiliary rotating bar 21b and the suction unit moving link 19b4, in order to operate the cutter unit 53b.

[0132] Furthermore, the second peeling device 7c also peels the member to be peeled off, described later, W3 from the base material M by changing the width between the adsorption parts (adsorption part width), and comprises an auxiliary frame 65c (see Figure 5) which has a roughly cross shape in plan view (a state in which one end of four auxiliary frame bars is joined at one point at an angle of approximately 90 degrees), an auxiliary motor 11c which is positioned in the center of the auxiliary frame 65c (the intersection of the cross shape), and an auxiliary rotating part 21c (corresponding to the "first rotating part" and "third rotating part" of the present invention) which has a roughly cross shape in plan view (a state in which one end of four auxiliary rotating part bars (corresponding to the "second arm" and "fifth arm" of the present invention) is joined at one point at an angle of approximately 90 degrees), and is connected to the motor shaft of the auxiliary motor 11c (corresponding to the "first drive shaft" and "third drive shaft" of the present invention) and is rotatable about the auxiliary rotating part center 23c (corresponding to the "first position" and "third position" of the present invention).

[0133] Furthermore, the auxiliary frame bar (corresponding to the "first arm" and "fourth arm" of the present invention) refers to the four protruding parts of the auxiliary frame 65c that extend radially at approximately 90 degrees from the center of the auxiliary frame 65c (which is the same position as the auxiliary rotating part center 23c), and the auxiliary rotating part bar (corresponding to the "second arm" and "fifth arm" of the present invention) refers to the four protruding parts of the auxiliary rotating part 21c that extend radially at approximately 90 degrees from the auxiliary rotating part center 23c of the auxiliary rotating part 21c.

[0134] Furthermore, the second peeling device 7c includes suction unit moving rails 27c1, 27c2, 27c3, and 27c4 formed along four auxiliary frame bars of the auxiliary frame 65c, and suction unit moving carriages 17c1, 17c2, 17c3, and 17c4 that are movable along each of the suction unit moving rails 27c1, 27c2, 27c3, and 27c4.

[0135] Furthermore, the second peeling device 7c includes a third suction part 13c1 having a suction hole 15c1 and connected to a carriage for moving the suction part 17c1, a third suction part 13c2 having a suction hole 15c2 and connected to a carriage for moving the suction part 17c2, a third suction part 13c3 having a suction hole 15c3 and connected to a carriage for moving the suction part 17c3, and a third suction part 13c4 having a suction hole 15c4 and connected to a carriage for moving the suction part 17c4.

[0136] Furthermore, the second peeling device 7c includes a suction unit moving link 19c1 (corresponding to the "first member" and "third member" of the present invention) that connects the end of one auxiliary rotating bar of the auxiliary rotating unit 21c to the suction unit moving carriage 17c1, and a suction unit moving link 19c2 (corresponding to the "first member" and "third member" of the present invention) that connects the end of the other auxiliary rotating bar of the auxiliary rotating unit 21c to the suction unit moving carriage 17c2. The device comprises: a suction part moving link 19c3 (corresponding to the "first member" and "third member" of the present invention) that connects the end of one other auxiliary rotating part bar of the auxiliary rotating part 21c to the suction part moving carriage 17c3; and a suction part moving link 19c4 (corresponding to the "first member" and "third member" of the present invention) that connects the end of one other auxiliary rotating part bar of the auxiliary rotating part 21c to the suction part moving carriage 17c4.

[0137] Furthermore, the second peeling device 7c includes a needle portion 75c1 (corresponding to the "insertion portion" of the present invention) located near the third suction portion 13c1, a needle portion 75c2 (corresponding to the "insertion portion" of the present invention) located near the third suction portion 13c2, a needle portion 75c3 (corresponding to the "insertion portion" of the present invention) located near the third suction portion 13c3, and a needle portion 75c4 (corresponding to the "insertion portion" of the present invention, see Figure 5) located near the third suction portion 13c4.

[0138] Furthermore, the second peeling device 7c includes a cutter section 53c (corresponding to the "cutting section" of the present invention) that rotates and opens and closes around the cutter section rotation center 51c by opening and closing the cutter first gripping section 55c and the cutter second gripping section 57c; a cutter section lowering plate 59c connected to the suction section moving carriage 17c4 and having an inclined surface that slopes downward toward the outside, for lowering the cutter section 53c to the cutting position in order to cut the gate formed on the peeled part W3, which will be described later; and a rotatable cutter section lowering pulley 61c (see Figure 5) connected to the auxiliary frame bar of the auxiliary frame 65c, which lowers the cutter section 53c to the cutting position along the cutter section lowering plate 59c.

[0139] Furthermore, the distance between the lower end of the cutter section 53c and the lower ends of the third suction sections 13c1 to 13c4 is X1, as shown in Figures 4 and 6, before the cutter section 53c is lowered to the cutting position by the cutter section lowering plate 59c and the cutter section lowering pulley 61c, and after the cutter section 53c is lowered to the cutting position by the cutter section lowering plate 59c and the cutter section lowering pulley 61c, it is X2, which is shorter than X1, as shown in Figures 8 and 10, which will be described later.

[0140] Furthermore, the second peeling device 7c includes a cutter operating roller 49c that is rotatably connected to the outermost end of the auxiliary rotating bar of the auxiliary rotating bar 21c, which is on the outer side of the connection point between the auxiliary rotating bar of the auxiliary rotating bar 21c and the suction unit moving link 19c2, in order to operate the cutter unit 53c.

[0141] Furthermore, the second peeling device 7d also peels the member to be peeled W4, described later, from the base material M by changing the width between the adsorption parts (adsorption part width), and comprises an auxiliary frame 65d which is roughly cross-shaped in plan view (with one end of each of the four auxiliary frame bars joined at one point at an angle of approximately 90 degrees), an auxiliary motor 11d which is positioned in the center of the auxiliary frame 65d (the intersection of the cross shape), and an auxiliary rotating part 21d which is roughly cross-shaped in plan view (with one end of each of the four auxiliary rotating bars (corresponding to the "second arm" and "fifth arm" of the present invention) joined at one point at an angle of approximately 90 degrees), and is connected to the motor shaft of the auxiliary motor 11d (corresponding to the "first drive shaft" and "third drive shaft" of the present invention) and rotatable about the auxiliary rotating part center 23d (corresponding to the "first position" and "third position" of the present invention).

[0142] Furthermore, the auxiliary frame bar (corresponding to the "first arm" and "fourth arm" of the present invention) refers to the four protruding parts of the auxiliary frame 65d that extend radially at approximately 90 degrees from the center of the auxiliary frame 65d (which is the same position as the auxiliary rotating part center 23d), and the auxiliary rotating part bar (corresponding to the "second arm" and "fifth arm" of the present invention) refers to the four protruding parts of the auxiliary rotating part 21d that extend radially at approximately 90 degrees from the auxiliary rotating part center 23d of the auxiliary rotating part 21d.

[0143] Furthermore, the second peeling device 7d includes suction unit moving rails 27d1, 27d2, 27d3, and 27d4 formed along four auxiliary frame bars of the auxiliary frame 65d, and suction unit moving carriages 17d1, 17d2, 17d3, and 17d4 that are movable along each of the suction unit moving rails 27d1, 27d2, 27d3, and 27d4.

[0144] Furthermore, the second peeling device 7d includes a fourth suction part 13d1 having a suction hole 15d1 and connected to a carriage for moving the suction part 17d1, a fourth suction part 13d2 having a suction hole 15d2 and connected to a carriage for moving the suction part 17d2, a fourth suction part 13d3 having a suction hole 15d3 and connected to a carriage for moving the suction part 17d3, and a fourth suction part 13d4 having a suction hole 15d4 and connected to a carriage for moving the suction part 17d4.

[0145] Furthermore, the second peeling device 7d includes a suction unit moving link 19d1 (corresponding to the "first member" and "third member" of the present invention) that connects the end of one auxiliary rotating bar of the auxiliary rotating unit 21d to the suction unit moving carriage 17d1, and a suction unit moving link 19d2 (corresponding to the "first member" and "third member" of the present invention) that connects the end of the other auxiliary rotating bar of the auxiliary rotating unit 21d to the suction unit moving carriage 17d2. The device comprises: a suction part moving link 19d3 (corresponding to the "first member" and "third member" of the present invention) that connects the end of one other auxiliary rotating part bar of the auxiliary rotating part 21d to the suction part moving carriage 17d3; and a suction part moving link 19d4 (corresponding to the "first member" and "third member" of the present invention) that connects the end of one other auxiliary rotating part bar of the auxiliary rotating part 21d to the suction part moving carriage 17d4.

[0146] Furthermore, the second peeling device 7d includes a needle portion 75d1 (corresponding to the "insertion portion" of the present invention, see Figure 5) located near the fourth suction portion 13d1, a needle portion 75d2 (corresponding to the "insertion portion" of the present invention, see Figure 5) located near the fourth suction portion 13d2, a needle portion 75d3 (corresponding to the "insertion portion" of the present invention, see Figure 5) located near the fourth suction portion 13d3, and a needle portion 75d4 (corresponding to the "insertion portion" of the present invention, see Figure 5) located near the fourth suction portion 13d4.

[0147] Furthermore, the second peeling device 7d includes a cutter section 53d (corresponding to the "cutting section" of the present invention) that rotates and opens and closes around the cutter section rotation center 51d by opening and closing the cutter first gripping section 55d and the cutter second gripping section 57d; a cutter section lowering plate 59d connected to the suction section moving carriage 17d4 and having an inclined surface that slopes downward toward the outside, for lowering the cutter section 53d to the cutting position in order to cut the gate formed on the peeled part W4, which will be described later; and a rotatable cutter section lowering pulley 61d connected to the auxiliary frame bar of the auxiliary frame 65d and for lowering the cutter section 53d to the cutting position along the cutter section lowering plate 59d.

[0148] Furthermore, the distance between the lower end of the cutter section 53d and the lower ends of the fourth suction sections 13d1 to 13d4 is X1, as shown in Figures 4 and 6, before the cutter section 53d is lowered to the cutting position by the cutter section lowering plate 59d and the cutter section lowering pulley 61d. After the cutter section 53d is lowered to the cutting position by the cutter section lowering plate 59d and the cutter section lowering pulley 61d, it is X2, which is shorter than X1, as shown in Figures 8 and 10, which will be described later.

[0149] Furthermore, the second peeling device 7d includes a cutter operating roller 49d that is rotatably connected to the outermost end of the auxiliary rotating bar of the auxiliary rotating bar 21d of the auxiliary rotating bar 21d, which is on the outer side of the connection point between the auxiliary rotating bar of the auxiliary rotating bar 21d and the suction unit moving link 19d2, in order to operate the cutter unit 53d.

[0150] Next, we will explain the operation of the four second peeling devices 7a, 7b, 7c, and 7d described above.

[0151] Figure 7 is a bottom view of the first peeling apparatus of this embodiment when the workpiece width and the suction section width are reduced, and Figure 8 is a front view thereof.

[0152] In the second peeling device 7a, when the auxiliary motor 11a is rotated clockwise toward the motor shaft tip, the auxiliary rotating part 21a rotates counterclockwise toward the plane of the paper in Figure 7.

[0153] Then, in Figure 7, when the auxiliary rotating part 21a rotates counterclockwise toward the plane of the paper, the suction part moving links 19a1, 19a2, 19a3, and 19a4 move the suction part moving carriages 17a1, 17a2, 17a3, and 17a4 outward along the suction part moving rails 27a1, 27a2, 27a3, and 27a4, and as a result the four first suction parts 13a1, 13a2, 13a3, and 13a4 move outward.

[0154] Furthermore, in the second peeling device 7b, when the auxiliary motor 11b is rotated clockwise toward the motor shaft tip, the auxiliary rotating part 21b rotates counterclockwise toward the plane of the paper in Figure 7.

[0155] Then, in Figure 7, when the auxiliary rotating part 21b rotates counterclockwise toward the plane of the paper, the suction part moving links 19b1, 19b2, 19b3, and 19b4 move the suction part moving carriages 17b1, 17b2, 17b3, and 17b4 outward along the suction part moving rails 27b1, 27b2, 27b3, and 27b4, and as a result the four second suction parts 13b1, 13b2, 13b3, and 13b4 move outward.

[0156] Furthermore, in the second peeling device 7c, when the auxiliary motor 11c is rotated clockwise toward the tip of the motor shaft, the auxiliary rotating part 21c rotates counterclockwise toward the plane of the paper in Figure 7.

[0157] Then, in Figure 7, when the auxiliary rotating part 21c rotates counterclockwise toward the plane of the paper, the suction part moving links 19c1, 19c2, 19c3, and 19c4 move the suction part moving carriages 17c1, 17c2, 17c3, and 17c4 outward along the suction part moving rails 27c1, 27c2, 27c3, and 27c4, and as a result the four third suction parts 13c1, 13c2, 13c3, and 13c4 move outward.

[0158] Furthermore, in the second peeling device 7d, when the auxiliary motor 11d is rotated clockwise toward the motor shaft tip, the auxiliary rotating part 21d rotates counterclockwise toward the plane of the paper in Figure 7.

[0159] Then, in Figure 7, when the auxiliary rotating part 21d rotates counterclockwise toward the plane of the paper, the suction part moving links 19d1, 19d2, 19d3, and 19d4 move the suction part moving carriages 17d1, 17d2, 17d3, and 17d4 outward along the suction part moving rails 27d1, 27d2, 27d3, and 27d4, and as a result the four fourth suction parts 13d1, 13d2, 13d3, and 13d4 move outward.

[0160] Figure 5 is a bottom view showing the state in which the auxiliary frames 65a, 65b, 65c, and 65d are moved inward, and the four auxiliary motors 11a, 11b, 11c, and 11d are rotated clockwise toward the motor shaft tip, causing the suction unit moving carriages 17a1-17a4, 17b1-17b4, 17c1-17c4, and 17d1-17d4 to move outward along the suction unit moving rails 27a1-27a4, 27b1-27b4, 27c1-27c4, and 27d1-27d4, respectively, resulting in the first suction unit 13a1-13a4, the second suction unit 13b1-13b4, the third suction unit 13c1-13c4, and the fourth suction unit 13d1-13d4 moving outward, and Figure 6 is a front view showing the same state.

[0161] On the other hand, in the second peeling device 7a, when the auxiliary motor 11a is rotated counterclockwise toward the tip of the motor shaft, the auxiliary rotating part 21a rotates clockwise toward the plane of the paper in Figure 5.

[0162] Then, in Figure 5, when the auxiliary rotating part 21a rotates clockwise toward the plane of the paper, the suction part moving links 19a1, 19a2, 19a3, and 19a4 move the suction part moving carriages 17a1, 17a2, 17a3, and 17a4 inward along the suction part moving rails 27a1, 27a2, 27a3, and 27a4, and as a result the four first suction parts 13a1, 13a2, 13a3, and 13a4 move inward.

[0163] Furthermore, in the second peeling device 7b, when the auxiliary motor 11b is rotated counterclockwise toward the tip of the motor shaft, the auxiliary rotating part 21b rotates clockwise toward the plane of the paper in Figure 5.

[0164] Then, in Figure 5, when the auxiliary rotating part 21b rotates clockwise toward the plane of the paper, the suction part moving links 19b1, 19b2, 19b3, and 19b4 move the suction part moving carriages 17b1, 17b2, 17b3, and 17b4 inward along the suction part moving rails 27b1, 27b2, 27b3, and 27b4, and as a result the four second suction parts 13b1, 13b2, 13b3, and 13b4 move inward.

[0165] Furthermore, in the second peeling device 7c, when the auxiliary motor 11c is rotated counterclockwise toward the tip of the motor shaft, the auxiliary rotating part 21c rotates clockwise toward the plane of the paper in Figure 5.

[0166] Then, in Figure 5, when the auxiliary rotating part 21c rotates clockwise toward the plane of the paper, the suction part moving links 19c1, 19c2, 19c3, and 19c4 move the suction part moving carriages 17c1, 17c2, 17c3, and 17c4 inward along the suction part moving rails 27c1, 27c2, 27c3, and 27c4, and as a result the four third suction parts 13c1, 13c2, 13c3, and 13c4 move inward.

[0167] Furthermore, in the second peeling device 7d, when the auxiliary motor 11d is rotated counterclockwise toward the tip of the motor shaft, the auxiliary rotating part 21d rotates clockwise toward the plane of the paper in Figure 5.

[0168] Then, in Figure 5, when the auxiliary rotating part 21d rotates clockwise toward the plane of the paper, the suction part moving links 19d1, 19d2, 19d3, and 19d4 move the suction part moving carriages 17d1, 17d2, 17d3, and 17d4 inward along the suction part moving rails 27d1, 27d2, 27d3, and 27d4, and as a result the four fourth suction parts 13d1, 13d2, 13d3, and 13d4 move inward.

[0169] Figure 7 is a bottom view showing the state in which the auxiliary frames 65a, 65b, 65c, and 65d are moved inward, and the four auxiliary motors 11a, 11b, 11c, and 11d are rotated counterclockwise toward the motor shaft tip, causing the suction unit moving carriages 17a1-17a4, 17b1-17b4, 17c1-17c4, and 17d1-17d4 to move inward along the suction unit moving rails 27a1-27a4, 27b1-27b4, 27c1-27c4, and 27d1-27d4, respectively, resulting in the first suction unit 13a1-13a4, the second suction unit 13b1-13b4, the third suction unit 13c1-13c4, and the fourth suction unit 13d1-13d4 moving inward, and Figure 8 is a front view showing the same state.

[0170] As described above, the second peeling devices 7a, 7b, 7c, and 7d can change the width between the adsorption parts (adsorption part width) in order to peel the member to be peeled off from the substrate M.

[0171] In this embodiment, as shown in Figures 5 and 7, we have described a configuration in which the second peeling devices 7a, 7b, 7c, and 7b are operated simultaneously. However, since the second peeling devices 7a, 7b, 7c, and 7b each have their own auxiliary motors 11a, 11b, 11c, and 11d, they can be operated individually.

[0172] However, considering the efficiency of peeling the members to be peeled from the base material M, it is better to peel the four members to be peeled W1, W2, W3, and W4 from the base material M simultaneously, and it is better to operate the second peeling devices 7a, 7b, 7c, and 7b simultaneously.

[0173] In this embodiment, the auxiliary frame 65a, auxiliary motor 11a, auxiliary rotating part 21a, suction part moving rails 27a1, 27a2, 27a3 and 27a4, suction part moving carriages 17a1, 17a2, 17a3 and 17a4, and suction part moving links 19a1, 19a2, 19a3 and 19a4 constitute the "expansion and contraction mechanism" of the present invention.

[0174] Furthermore, the auxiliary frame 65b, auxiliary motor 11b, auxiliary rotating part 21b, suction part moving rails 27b1, 27b2, 27b3 and 27b4, suction part moving carriages 17b1, 17b2, 17b3 and 17b4, and suction part moving links 19b1, 19b2, 19b3 and 19b4 of this embodiment constitute the "expansion and contraction mechanism" of the present invention.

[0175] Furthermore, the auxiliary frame 65c, auxiliary motor 11c, auxiliary rotating part 21c, suction part moving rails 27c1, 27c2, 27c3 and 27c4, suction part moving carriages 17c1, 17c2, 17c3 and 17c4, and suction part moving links 19c1, 19c2, 19c3 and 19c4 of this embodiment constitute the "expansion and contraction mechanism" of the present invention.

[0176] Furthermore, the auxiliary frame 65d, auxiliary motor 11d, auxiliary rotating part 21d, suction part moving rails 27d1, 27d2, 27d3 and 27d4, suction part moving carriages 17d1, 17d2, 17d3 and 17d4, and suction part moving links 19d1, 19d2, 19d3 and 19d4 of this embodiment constitute the "expansion and contraction mechanism" of the present invention.

[0177] Furthermore, the main motor 9 of this embodiment, main frame 29, main rotating part 45, auxiliary moving links 47a, 47b, 47c and 47d, auxiliary frame moving rails 25a1, 25a2, 25b1, 25b2, 25c1, 25c2, 25d1 and 25d2, auxiliary frame moving carriages 81a1, 81a2, 81b1, 81b2, 81c1, 81c2, 81d1 and 81d2, auxiliary frames 65a, 65b, 65c and 65d, auxiliary motors 11a, 11 b, 11c and 11d, auxiliary rotating parts 21a, 21b, 21c and 21d, rails for moving the suction part 27a1 to 27a4, 27b1 to 27b4, 27c1 to 27c4 and 27d1 to 27d4, carriages for moving the suction part 17a1 to 17a4, 17b1 to 17b4, 17c1 to 17c4 and 17d1 to 17d4, and links for moving the suction part 19a1 to 19a4, 19b1 to 19b4, 19c1 to 19c4 and 19d1 to 19d4 constitute the "expansion and contraction mechanism" of the present invention.

[0178] Next, the operation of the cutter sections of the second peeling devices 7a, 7b, 7c, and 7d for cutting the gate of the member to be peeled W will be described.

[0179] Figure 9 is a bottom view of the first peeling apparatus of this embodiment when the workpiece width is reduced and the cutter section is cut, and Figure 10 is a front view thereof.

[0180] In this embodiment, the cutter section is operated by rotating the auxiliary motor, similar to how the width between the suction sections (suction section width) is changed as described above. However, it does not operate from the state shown in Figure 5 to the state shown in Figure 7. It only operates when the auxiliary motor is further rotated in the same direction from the state shown in Figure 7.

[0181] Furthermore, in the stages shown in Figures 5 and 6, as shown in Figures 5 and 6, the cutter section lowering plate 59a is separated from the cutter section lowering pulley 61a, the cutter section lowering plate 59b is separated from the cutter section lowering pulley 61b, the cutter section lowering plate 59c is separated from the cutter section lowering pulley 61c, and the cutter section lowering plate 59d is separated from the cutter section lowering pulley 61d.

[0182] First, in the second peeling device 7a, as described above, when the auxiliary motor 11a is rotated counterclockwise toward the motor shaft tip from the state shown in Figures 5 and 6, the auxiliary rotating part 21a rotates clockwise toward the plane of the paper in Figure 5.

[0183] Then, in Figure 5, when the auxiliary rotating part 21a rotates clockwise toward the plane of the paper, the suction part moving carriages 17a1, 17a2, 17a3, and 17a4 move inward along the suction part moving rails 27a1, 27a2, 27a3, and 27a4 by the suction part moving links 19a1, 19a2, 19a3, and 19a4, causing the four first suction parts 13a1, 13a2, 13a3, and 13a4 to move inward, and the cutter part lowering plate 59a, which has an inclined surface that slopes downward toward the outside, comes into contact with the cutter part lowering pulley 61a, causing the cutter part lowering pulley 61a to rotate and descend along the cutter part lowering plate 59a, and the auxiliary frame 65a to which the cutter part lowering pulley 61a is connected also descends.

[0184] Furthermore, in the second peeling device 7b, as described above, when the auxiliary motor 11b is rotated counterclockwise toward the motor shaft tip from the state shown in Figures 5 and 6, the auxiliary rotating part 21b rotates clockwise toward the plane of the paper in Figure 5.

[0185] Then, in Figure 5, when the auxiliary rotating part 21b rotates clockwise toward the plane of the paper, the suction part moving carriages 17b1, 17b2, 17b3, and 17b4 move inward along the suction part moving rails 27b1, 27b2, 27b3, and 27b4 by the suction part moving links 19b1, 19b2, 19b3, and 19b4, causing the four second suction parts 13b1, 13b2, 13b3, and 13b4 to move inward, and the cutter part lowering plate 59b, which has an inclined surface that slopes downward toward the outside, comes into contact with the cutter part lowering pulley 61b, causing the cutter part lowering pulley 61b to rotate and descend along the cutter part lowering plate 59b, and the auxiliary frame 65b to which the cutter part lowering pulley 61b is connected also descends.

[0186] Furthermore, in the second peeling device 7c, as described above, when the auxiliary motor 11c is rotated counterclockwise toward the motor shaft tip from the state shown in Figures 5 and 6, the auxiliary rotating part 21c rotates clockwise toward the plane of the paper in Figure 5.

[0187] Then, in Figure 5, when the auxiliary rotating part 21c rotates clockwise toward the plane of the paper, the suction part moving carriages 17c1, 17c2, 17c3, and 17c4 move inward along the suction part moving rails 27c1, 27c2, 27c3, and 27c4 by the suction part moving links 19c1, 19c2, 19c3, and 19c4, causing the four third suction parts 13c1, 13c2, 13c3, and 13c4 to move inward, and the cutter part lowering plate 59c, which has an inclined surface that slopes downward toward the outside, comes into contact with the cutter part lowering pulley 61c, causing the cutter part lowering pulley 61c to rotate and descend along the cutter part lowering plate 59c, and the auxiliary frame 65c to which the cutter part lowering pulley 61c is connected also to descend.

[0188] Furthermore, in the second peeling device 7d, as described above, when the auxiliary motor 11d is rotated counterclockwise toward the motor shaft tip from the state shown in Figures 5 and 6, the auxiliary rotating part 21d rotates clockwise toward the plane of the paper in Figure 5.

[0189] Then, in Figure 5, when the auxiliary rotating part 21d rotates clockwise toward the plane of the paper, the suction part moving carriages 17d1, 17d2, 17d3, and 17d4 move inward along the suction part moving rails 27d1, 27d2, 27d3, and 27d4 by the suction part moving links 19d1, 19d2, 19d3, and 19d4, causing the four fourth suction parts 13d1, 13d2, 13d3, and 13d4 to move inward, and the cutter part lowering plate 59d, which has an inclined surface that slopes downward toward the outside, comes into contact with the cutter part lowering pulley 61d, causing the cutter part lowering pulley 61d to rotate and descend along the cutter part lowering plate 59d, and the auxiliary frame 65d to which the cutter part lowering pulley 61d is connected also to descend.

[0190] Figure 7 is a bottom view showing the state in which the auxiliary frames 65a, 65b, 65c, and 65d are moved inward, the four auxiliary motors 11a, 11b, 11c, and 11d are rotated counterclockwise toward the motor shaft tip, the first suction parts 13a1-13a4, the second suction parts 13b1-13b4, the third suction parts 13c1-13c4, and the fourth suction parts 13d1-13d4 move inward, and the cutter section lowering plates 59a-59d come into contact with the cutter section lowering pulleys 61a-61d, causing the cutter section lowering pulleys 61a-61d and auxiliary frames 65a-65d to descend, and Figure 8 is a front view of the same.

[0191] Furthermore, in the second peeling device 7a, if the auxiliary motor 11a is rotated further counterclockwise toward the motor shaft tip from the state shown in Figures 7 and 8 above, the auxiliary rotating part 21a rotates further clockwise toward the plane of the paper in Figure 7.

[0192] Then, in Figure 7, when the auxiliary rotating part 21a rotates further clockwise toward the plane of the paper, the cutter operating roller 49a, which is rotatably connected to the outer end of one of the auxiliary rotating bar bars of the auxiliary rotating part 21a, comes into contact with the cutter first gripping part 55a, causing the cutter first gripping part 55a to rotate around the cutter rotation center 51a. As a result, the cutter part 53a cuts the gate of the member to be peeled W by closing the cutter first gripping part 55a and the cutter second gripping part 57a.

[0193] Furthermore, in the second peeling device 7b, if the auxiliary motor 11b is rotated further counterclockwise toward the motor shaft tip from the state shown in Figures 7 and 8 above, the auxiliary rotating part 21b rotates further clockwise toward the plane of the paper in Figure 7.

[0194] Then, in Figure 7, when the auxiliary rotating part 21b rotates further clockwise toward the plane of the paper, the cutter operating roller 49b, which is rotatably connected to the outer end of one of the auxiliary rotating bar bars of the auxiliary rotating part 21b, comes into contact with the cutter first gripping part 55b, causing the cutter first gripping part 55b to rotate around the cutter rotation center 51b. As a result, the cutter part 53b cuts the gate of the member to be peeled W by closing the cutter first gripping part 55b and the cutter second gripping part 57b.

[0195] Furthermore, in the second peeling device 7c, if the auxiliary motor 11c is rotated further counterclockwise toward the motor shaft tip from the state shown in Figures 7 and 8 above, the auxiliary rotating part 21c will rotate further clockwise toward the plane of the paper in Figure 7.

[0196] Then, in Figure 7, when the auxiliary rotating part 21c rotates further clockwise toward the plane of the paper, the cutter operating roller 49c, which is rotatably connected to the outer end of one of the auxiliary rotating bar bars of the auxiliary rotating part 21c, comes into contact with the cutter first gripping part 55c, causing the cutter first gripping part 55c to rotate around the cutter rotation center 51c. As a result, the cutter part 53c cuts the gate of the member to be peeled W by closing the cutter first gripping part 55c and the cutter second gripping part 57c.

[0197] Furthermore, in the second peeling device 7d, if the auxiliary motor 11d is rotated further counterclockwise toward the motor shaft tip from the state shown in Figures 7 and 8 above, the auxiliary rotating part 21d rotates further clockwise toward the plane of the paper in Figure 7.

[0198] Then, in Figure 7, when the auxiliary rotating part 21d rotates further clockwise toward the plane of the paper, the cutter operating roller 49d, which is rotatably connected to the outer end of one of the auxiliary rotating bar bars of the auxiliary rotating part 21d, comes into contact with the cutter first gripping part 55d, causing the cutter first gripping part 55d to rotate around the cutter rotation center 51d. As a result, the cutter part 53d cuts the gate of the member to be peeled W by closing the cutter first gripping part 55d and the cutter second gripping part 57d.

[0199] Figure 9 is a bottom view showing the state in which the auxiliary frames 65a, 65b, 65c, and 65d are moved inward, and the four auxiliary motors 11a, 11b, 11c, and 11d are rotated further counterclockwise toward the motor shaft tip, closing the first cutter gripping section 55a and the second cutter gripping section 57a, closing the first cutter gripping section 55b and the second cutter gripping section 57b, closing the first cutter gripping section 55c and the second cutter gripping section 57c, and closing the first cutter gripping section 55d and the second cutter gripping section 57d, and Figure 10 is a front view of the same state.

[0200] Furthermore, if the auxiliary rotating part 21a then rotates counterclockwise toward the paper, the first cutter gripping part 55a and the second cutter gripping part 57a will open due to the compression springs (not shown) engaged with them, and the cutter part 53a will also open.

[0201] Furthermore, if the auxiliary rotating part 21b subsequently rotates counterclockwise toward the paper, the first cutter gripping part 55b and the second cutter gripping part 57b will open due to the compression springs (not shown) engaged with them, and the cutter part 53b will also open.

[0202] Furthermore, when the auxiliary rotating part 21c rotates counterclockwise toward the paper, the first cutter gripping part 55c and the second cutter gripping part 57c open due to the compression springs (not shown) engaged with them, and the cutter part 53c also opens.

[0203] Furthermore, when the auxiliary rotating part 21d rotates counterclockwise toward the paper, the first cutter gripping part 55d and the second cutter gripping part 57d open due to the compression springs (not shown) engaged with them, and the cutter part 53d also opens.

[0204] Next, a block diagram of the peeling system 1 of this embodiment will be described.

[0205] Figure 11 is a block diagram of the peeling system of this embodiment, and Figure 12 is a block diagram of the main controller of the peeling system of this embodiment.

[0206] In Figure 11, the peeling system 1 comprises a main controller 6 electrically connected to a power supply 4, a robot controller 8 electrically connected to the main controller 6 for controlling the articulated robot 3, a motor driver 10 electrically connected to the main controller 6 for driving the main motor 9 and four auxiliary motors 11a, 11b, 11c, and 11d, an air compressor 12 electrically connected to the main controller 6 for driving the first suction parts 13a1, 13a2, 13a3, and 13a4, the second suction parts 13b1, 13b2, 13b3, and 13b4, the third suction parts 13c1, 13c2, 13c3, and 13c4, the fourth suction parts 13d1, 13d2, 13d3, and 13d4, and the mold release agent spray nozzles 63a, 63b, and 63c, and an operation panel 2 for the operator of the peeling system 1 to send commands to the peeling system 1.

[0207] Furthermore, in Figure 12, the main controller 6 includes a CPU (Central Processing Unit) 14, a RAM (Random Access Memory) 16 connected to the CPU 14 for input / output, and a ROM (Read Only Memory) 18 connected to the CPU 14 for input / output.

[0208] The RAM16 includes a mold information table 16a that stores information such as the shape of the base material (mold) M used by the peeling system 1, and a peelable member information table 16b that stores information such as the shape and number of peelable members to be peeled off by the peeling system 1.

[0209] Furthermore, the ROM 18 includes a main program 18a that controls the operation of the entire peeling system 1 of this embodiment.

[0210] Next, the operation of the peeling system 1 with the above configuration will be described.

[0211] Figure 13 is a flowchart of the main program in the peeling system of this embodiment, and Figure 14 is an overall plan view of the member to be peeled used in the peeling system of this embodiment.

[0212] As described above, the peeling system 1 of this embodiment comprises an articulated robot 3 and a first peeling device 5 rotatably connected to the tip of the articulated robot 3. The first peeling device 5, using four second peeling devices 7a, 7b, 7c, and 7d, can individually and simultaneously peel off four separate peeling members W1, W2, W3, and W4 from the base material M, which are obtained by dividing the member to be peeled W.

[0213] Therefore, the peeling member W used in the peeling system of this embodiment is peeled off from the substrate M, as shown in Figure 14, and comprises four peeling members W1, W2, W3, and W4, each of which is peeled off individually.

[0214] Furthermore, the peelable member W1 comprises a main part W1a that constitutes the final part to be used, a discarded part W1b that does not constitute the part, and a gate G1 for flowing the molten material of the peelable member W1 onto the base material M; the peelable member W2 comprises a main part W2a that constitutes the final part to be used, a discarded part W2b that does not constitute the part, and a gate G2 for flowing the molten material of the peelable member W2 onto the base material M; the peelable member W3 comprises a main part W3a that constitutes the final part to be used, a discarded part W3b that does not constitute the part, and a gate G3 for flowing the molten material of the peelable member W3 onto the base material M; the peelable member W4 comprises a main part W4a that constitutes the final part to be used, a discarded part W4b that does not constitute the part, and a gate G4 for flowing the molten material of the peelable member W4 onto the base material M.

[0215] In Figure 13, first, the operator of the peeling system 1 turns on the power switch, then inputs information such as the type of base material (mold) M, the size of the member to be peeled, and the number of items to be processed using the operation buttons on the operation panel 2, and presses the start button. The peeling system 1 then moves the arm of the articulated robot 3 to its initial position (S1), obtains base material (mold) information from the mold information table 16a based on the input information (S3), obtains member to be peeled information from the member to be peeled information table 18b (S5), and sets the number of members to be peeled W to be processed (S7).

[0216] Then, it is determined whether or not molding by the base material (mold) M is completed (S9). If it is determined that molding by the base material (mold) M is not completed (S9: No), the system waits until molding is completed. If it is determined that molding by the base material (mold) M is completed (S9: Yes), the main rotating part 45 of the first peeling device 5 is rotated to move the suction positions of the auxiliary frames 65a, 65b, 65c, and 65d in the +X direction and / or -Xj direction, adjusting them to match the four peelable members W1, W2, W3, and W4 formed by dividing the peelable member W formed on the base material (mold) (S11).

[0217] Figure 15 shows the state before the first peeling device 5 rotates the main rotating part 45 to match the sizes of the four peeling members W1, W2, W3, and W4, and Figure 16 shows the state after the first peeling device 5 rotates the main rotating part 45 to match the sizes of the four peeling members W1, W2, W3, and W4.

[0218] Furthermore, Figure 17 is an enlarged view of section B in Figure 16, in which case the lower ends of the needle sections 75a1-75a4, 75b1-75b4, 75c1-75c4 and 75d1-75d4 are located at a distance X3 above the lower ends of the first suction sections 13a1-13a4, the second suction sections 13b1-13b4, the third suction sections 13c1-13c4 and the fourth suction sections 13d1-13d4, respectively.

[0219] Returning to the main program, the main rotating part 45 of the first peeling device 5 is rotated to adjust the suction positions of the auxiliary frames 65a, 65b, 65c, and 65d to match the four peeling members W1, W2, W3, and W4 which are formed by dividing the peeling member W formed on the base material (mold) (S11). Then, the first peeling device 5 moves the four second peeling devices 7a, 7b, 7c, and 7d downwards (in the -Z direction, see Figure 16) to adsorb the four peeling members W1, W2, W3, and W4, respectively (S13).

[0220] Figure 18 shows the state in which the four second peeling devices 7a, 7b, 7c, and 7d of the first peeling device 5 have adsorbed the four peeling members W1, W2, W3, and W4, respectively, and Figure 19 is an enlarged view of section C in Figure 18.

[0221] Here, the first adsorption parts 13a1-13a4, the second adsorption parts 13b1-13b4, the third adsorption parts 13c1-13c4, and the fourth adsorption parts 13d1-13d4 flex when adsorbing the member to be peeled W, so that the needle parts 75a1-75a4, 75b1-75b4, 75c1-75c4, and 75d1-75d4 are inside the member to be peeled W. Susumu The lower ends of the needle portions 75a1-75a4, 75b1-75b4, 75c1-75c4, and 75d1-75d4 are located at a distance X4 below the lower ends (surface of the peeled member W) of the first suction portion 13a1-13a4, the second suction portion 13b1-13b4, the third suction portion 13c1-13c4, and the fourth suction portion 13d1-13d4, respectively.

[0222] Furthermore, the first suction parts 13a1-13a4, the second suction parts 13b1-13b4, the third suction parts 13c1-13c4, and the fourth suction parts 13d1-13d4 are positioned to adsorb the member to be peeled W, and the needle parts 75a1-75a4, 75b1-75b4, 75c1-75c4, and 75d1-75d4 are positioned within the member to be peeled W. Susumu The insertion points correspond to the discarded portions W1b, W2b, W3b, and W4b of the member to be peeled W, respectively. Since these are parts that do not ultimately constitute a component, the member to be peeled W can be peeled from the base material M without damaging the essential parts that ultimately constitute the component.

[0223] If there are no surface scratches or other issues, the positions in which the first suction parts 13a1~13a4, the second suction parts 13b1~13b4, the third suction parts 13c1~13c4 and the fourth suction parts 13d1~13d4 adsorb onto the member to be peeled W, and the needle parts 75a1~75a4, 75b1~75b4, 75c1~75c4 and 75d1~75d4 are located within the member to be peeled W. Susumu The insertion point can be any position on the member W to be peeled off.

[0224] Then, the auxiliary rotating parts 21a, 21b, 21c, and 21d provided on each of the four second peeling devices 7a, 7b, 7c, and 7d are rotated to reduce the spacing between the first adsorption parts 13a1 to 13a4, the second adsorption parts 13b1 to 13b4, the third adsorption parts 13c1 to 13c4, and the fourth adsorption parts 13d1 to 13d4 (S15).

[0225] As shown in Figure 20, the peelable members W1, W2, W3, and W4 formed on the substrate (mold) M are then peeled away from the substrate (mold) M. Figure 20 shows the state in which, after the first adsorption parts 13a1-13a4, the second adsorption parts 13b1-13b4, 13a1-13a4, and the second adsorption parts 13b1-13b4 each adsorb the peelable members W1, W2, W3, and W4, the distances between the first adsorption parts 13a1-13a4, the second adsorption parts 13b1-13b4, the third adsorption parts 13c1-13c4, and the fourth adsorption parts 13d1-13d4 are reduced, and the peelable members W1, W2, W3, and W4 are peeled away from the substrate (mold) M.

[0226] Then, the first peeling device 5, which is equipped with the second peeling device 7a, the second peeling device 7b, the second peeling device 7c, and the second peeling device 7d, is moved upward (in the +Z direction, see Figure 21) to separate it from the base material (mold) M, and the peeled members W1, W2, W3, and W4 are removed from the base material (mold) M (S17).

[0227] At that time, in order to facilitate the removal of the member to be removed W during the next molding process, a release agent is sprayed onto the surface of the base material (mold) M by three release agent spray nozzles 63a, 63b, and 63c that are evenly arranged along the entire width of the base material (mold) M (S19).

[0228] Figure 21 shows the state in which the first release device 5, equipped with second release devices 7a, 7b, 7c, and 7d, separates from the substrate (mold) M while adsorbing the member to be released W, and the three release agent spray nozzles 63a, 63b, and 63c spray the release agent toward the surface of the substrate (mold) M. Figure 22 shows the state after the spraying.

[0229] Then, the auxiliary rotating parts 21a, 21b, 21c, and 21d provided on each of the four second peeling devices 7a, 7b, 7c, and 7d are rotated in the reverse direction to expand the spacing between the first suction parts 13a1 to 13a4, the second suction parts 13b1 to 13b4, the third suction parts 13c1 to 13c4, and the fourth suction parts 13d1 to 13d4 (S21). The first peeling device 5, equipped with the second peeling devices 7a, 7b, 7c, and 7d, is moved downward (-Z direction, see Figure 22) to temporarily place the member to be peeled W onto another plate P, and the first peeling device 5 is moved upward again (+Z direction, see Figure 23) (S23).

[0230] Figure 23 shows the state in which the auxiliary rotating parts 21a, 21b, 21c, and 21d are rotated in the reverse direction to expand the spacing between the first suction parts 13a1 to 13a4, the second suction parts 13b1 to 13b4, the third suction parts 13c1 to 13c4, and the fourth suction parts 13d1 to 13d4, and the member to be peeled off W is temporarily placed on another plate.

[0231] Then, the auxiliary rotating parts 21a, 21b, 21c, and 21d of the four second peeling devices 7a, 7b, 7c, and 7d are rotated in the forward direction to reduce the distance between the first suction parts 13a1 to 13a4, the second suction parts 13b1 to 13b4, the third suction parts 13c1 to 13c4, and the fourth suction parts 13d1 to 13d4 to such an extent that the cutter parts 53a, 53b, 53c, and 53d do not operate. After that, the four second peeling devices 7a, 7b, 7c, and 7d are used to re-adsorb the four peeling members W1, W2, W3, and W4, respectively.

[0232] Subsequently, the auxiliary rotating parts 21a, 21b, 21c, and 21d are further rotated in the forward direction to close the cutter first gripping part 55a and cutter second gripping part 57a, the cutter first gripping part 55b and cutter second gripping part 57b, the cutter first gripping part 55c and cutter second gripping part 57c, and the cutter first gripping part 55d and cutter second gripping part 57d, so that the cutter part 53a, cutter part 53b, cutter part 53c, and cutter part 53d cut the gates G1, G2, G3, and G4 of the peeled members W1, W2, W3, and W4 (S25).

[0233] Figure 24 shows the state in which the cutter sections 53a, 53b, 53c, and 53d are set on the gates G1, G2, G3, and G4 of the members to be peeled W1, W2, W3, and W4, and Figure 25 shows the state in which the cutter sections 53a, 53b, 53c, and 53d are operated to cut the gates G1, G2, G3, and G4 of the members to be peeled W1, W2, W3, and W4.

[0234] Then, the first peeling device 5 separates from the peeled member W (S27), and it is determined whether or not the number of processes of the peeling system 1 has reached the number of peelings input by the operator (S29). If the number of peelings of the peeling system 1 has not reached the number of peelings input by the operator (S29: No), the processes from S9 to S29 are repeated until the number of peelings is reached. If the number of peelings of the peeling system 1 has reached the number of peelings input by the operator (S29: Yes), the process is terminated (S31).

[0235] In addition, the process of S13 in this embodiment functions as the "first step" and "third step" of the present invention, and the processes of S15 and S17 in this embodiment function as the "second step" and "fourth step" of the present invention.

[0236] According to the second peeling devices 7a, 7b, 7c, or 7d of this embodiment, for the purpose of peeling the peeled member W formed on the surface of the base material M from the base material M, particularly, a plurality of first suction portions 13a1 to 13a4, second suction portions 13b1 to 13b4, third suction portions 13c1 to 13c4, or fourth suction portions 13d1 to 13d4 that can adsorb to the surface of the peeled member W, and a scaling mechanism that expands and contracts the distance between these plurality of suction portions are provided. Therefore, even when the peeled member W is adhered to the base material M, the peeled member W can be easily peeled from the base material M by expanding and contracting the interval between the plurality of suction portions by the scaling mechanism.

[0237] Furthermore, according to the second peeling device 7a, 7b, 7c, or 7d of this embodiment, the expansion and contraction mechanism comprises the motor shaft of an auxiliary motor 11a, 11b, 11c, or 11d provided at the auxiliary rotating part center 23a, 23b, 23c, or 23d, and auxiliary frames 65a, 65b, 65c, or 65d each having four auxiliary frame bars extending radially from the auxiliary rotating part center 23a, 23b, 23c, or 23d, and the auxiliary rotating part center 23a, 23b, 23c, or 23 The device comprises auxiliary rotating parts 21a, 21b, 21c, or 21d, which have the same number of auxiliary rotating part bars as auxiliary frame bars extending radially from d, and which are rotatable about the auxiliary rotating part center 23a, 23b, 23c, or 23d by the rotation of the motor shafts of auxiliary motors 11a, 11b, 11c, or 11d, and the first suction parts 13a1 to 13a4, the second suction parts 13b1 to 13b4, the third suction parts 13c1 to 13c4, or the fourth suction parts 13d1 to 13d4 are auxiliary frame bars. Each of the four auxiliary frame bars 65a, 65b, 65c, or 65d is slidably positioned along each auxiliary frame bar, and multiple long suction unit movement links 19a1-19a4, 19b1-13b4, 3rd suction unit 13c1-13c4, or 4th suction unit 13d1-13d4 are connected to the respective ends of the auxiliary rotating unit bars of the auxiliary rotating unit 21a, 21b, 21c, or 21d, and to each of the first suction unit 13a1-13a4, second suction unit 13b1-13b4, third suction unit 13c1-13c4, or 4th suction unit 13d1-13d4. Since it is equipped with 19b4, 19c1~19c4 or 19d1~19d4, even when the member to be peeled W is in close contact with the base material M, the spacing between the first adsorption parts 13a1~13a4, the second adsorption parts 13b1~13b4, the third adsorption parts 13c1~13c4, or the fourth adsorption parts 13d1~13d4 can be easily expanded or contracted by the motor shaft of a single auxiliary motor 11a, 11b, 11c, or 11d, and the member to be peeled W can be easily peeled from the base material M.

[0238] Furthermore, according to the second peeling device 7a, 7b, 7c, or 7d of this embodiment, needle portions 75a1 to 75a4, 75b1 to 75b4, 75c1 to 75c4, and 75d1 to 75d4, which can be inserted into the member to be peeled W, are provided near each of the first adsorption portions 13a1 to 13a4, the second adsorption portions 13b1 to 13b4, the third adsorption portions 13c1 to 13c4, or the fourth adsorption portions 13d1 to 13d4. Therefore, even if there are multiple members to be peeled W with high ductility or malleability, the members to be peeled W can be peeled even more easily from the base material M.

[0239] Furthermore, according to the second peeling device 7a, 7b, 7c, or 7d of this embodiment, the member to be peeled W comprises essential parts W1a, W2a, W3a, or W4a that constitute a component, and discarded parts W1b, W2b, W3b, or W4b that do not constitute a component, and the needle parts 75a1-75a4, 75b1-75b4, 75c1-75c4, or 75d1-75d4 can be inserted into the discarded parts W1b, W2b, W3b, or W4b, so that the member to be peeled W can be easily peeled from the base material M without damaging the essential parts W1a, W2a, W3a, or W4a.

[0240] Furthermore, according to the second peeling device 7a, 7b, 7c, or 7d of this embodiment, the member to be peeled W is a molded product, and the base material M is a mold for molding the molded product, and is equipped with a cutter section 53a, 53b, 53c, or 53d that cuts the gate G1, G2, G3, or G4 of the molded product in conjunction with the operation of the auxiliary rotating section 21a, 21b, 21c, or 21d, so that the gate G1, G2, G3, or G4 can be easily cut by the motor shaft of a single auxiliary motor 11a, 11b, 11c, or 11d.

[0241] Furthermore, according to the second release device 7a, 7b, 7c, or 7d of this embodiment, since it is equipped with three release agent spray nozzles 63a, 63b, and 63c that apply a release agent to the surface of the mold from which the molded product has been released, the next molded product can be easily released.

[0242] Furthermore, according to the first peeling device 5 of this embodiment, the expansion and contraction mechanism includes a main rotating pulley 71 provided at the center 67 of the main rotating part, a main frame 29 extending radially from the center 67 of the main rotating part, and a main rotating part 45 having four main rotating bar extending radially from the center 67 of the main rotating part and rotatable about the center 67 of the main rotating part by the rotation of the main rotating pulley 71, and four auxiliary frame bars slidably arranged on the main frame 29 and extending radially from each of the auxiliary rotating part centers 23a, 23b, 23c, and 23d. The auxiliary frames 65a, 65b, 65c, and 65d, the ends of each of the four main rotating bar sections of the main rotating section 45, and four long auxiliary section movement links 47a, 47b, 47c, and 47d connecting each of the auxiliary frames 65a, 65b, 65c, and 65d, the motor shafts of the auxiliary motors 11a, 11b, 11c, and 11d provided at the auxiliary rotating section centers 23a, 23b, 23c, and 23d of each of the auxiliary rotating section centers 23a, 23b, 23c, and 23d, and four auxiliary frame bars extending radially from each of the auxiliary rotating section centers 23a, 23b, 23c, and 23d It comprises auxiliary frames 65a, 65b, 65c, and 65d having - and four auxiliary rotating section bars, the same number as the auxiliary frame bars extending radially from each of the auxiliary rotating section centers 23a, 23b, 23c, and 23d, and auxiliary rotating sections 21a, 21b, 21c, and 21d that are rotatable about each of the auxiliary rotating section centers 23a, 23b, 23c, and 23d by the rotation of the motor shafts of the auxiliary motors 11a, 11b, 11c, and 11d, and first suction sections 13a1~13a4, second suction sections 13b1~13b4, third suction sections 13c1~13c4, and fourth suction sections 13d1~13 d4 is slidably positioned along each of the four auxiliary frame bars of each of the auxiliary frames 65a, 65b, 65c, and 65d, and comprises a plurality of long suction part moving links 19a1-19a4, 19b1-19b4, 19c1-19c4, and 19d1-19d4 that connect the respective ends of the auxiliary rotating part bars of each of the auxiliary rotating part 21a, 21b, 21c, and 21d, and each of the first suction parts 13a1-13a4, second suction parts 13b1-13b4, third suction parts 13c1-13c4, and fourth suction parts 13d1-13d4,The spacing between the multiple first suction parts 13a1-13a4, second suction parts 13b1-13b4, third suction parts 13c1-13c4, and fourth suction parts 13d1-13d4 can be easily expanded or contracted by a single main rotating pulley 71 to match the size of the release member W and the base material M. Even when the release member W is in close contact with the base material M, the spacing between the multiple first suction parts 13a1-13a4, second suction parts 13b1-13b4, third suction parts 13c1-13c4, and fourth suction parts 13d1-13d4 can be easily expanded or contracted by the motor shafts of the auxiliary motors 11a, 11b, 11c, and 11d, allowing the release member W to be easily detached from the base material M.

[0243] Furthermore, according to the peeling system 1 of this embodiment, since it comprises an articulated robot 3 and a first peeling device 5 and second peeling devices 7a, 7b, 7c, and 7d connected to the tip of the articulated robot 3, the first peeling device 5 and the second peeling devices 7a, 7b, 7c, and 7d can be used in a narrow area. Susumu By inserting it, the member to be peeled W can be easily peeled off from the base material M.

[0244] Furthermore, according to the suction device 7a, 7b, 7c, or 7d of this embodiment, the motor shaft of the auxiliary motor 11a, 11b, 11c, or 11d provided at the auxiliary rotating part center 23a, 23b, 23c, or 23d, the auxiliary frame 65a, 65b, 65c, or 65d each having four auxiliary frame bars extending radially from the auxiliary rotating part center 23a, 23b, 23c, or 23d, and the suction device 7a, 7b, 7c, or 7d of this embodiment, the motor shaft of the auxiliary motor 11a, 11b, 11c, or 11d provided at the auxiliary rotating part center 23a, 23b, 23c, or 23d, the auxiliary frame 65a, 65b, 65c, or 65d each having four auxiliary frame bars extending radially from the auxiliary rotating part center 23a, 23b, 23c, or 23d The auxiliary rotating section 21a, 21b, 21c, or 21d has the same number of auxiliary rotating section bars as the auxiliary frame bars that extend in a radial direction, and is rotatable about the auxiliary rotating section center 23a, 23b, 23c, or 23d by the rotation of the motor shafts of the auxiliary motors 11a, 11b, 11c, or 11d, and each of the four auxiliary frame bars of the auxiliary frame 65a, 65b, 65c, or 65d is slidably positioned along each frame bar. Multiple long suction part moving links 19a1 connect the first suction parts 13a1-13a4, second suction parts 13b1-13b4, third suction parts 13c1-13c4, or fourth suction parts 13d1-13d4, and the respective tips of the auxiliary rotating part bars of the auxiliary rotating parts 21a, 21b, 21c, or 21d, and each of the first suction parts 13a1-13a4, second suction parts 13b1-13b4, third suction parts 13c1-13c4, or fourth suction parts 13d1-13d4. Since it is equipped with ~19a4, 19b1~19b4, 19c1~19c4 or 19d1~19d4, the spacing between each of the first adsorption parts 13a1~13a4, second adsorption parts 13b1~13b4, third adsorption parts 13c1~13c4, or fourth adsorption parts 13d1~13d4 can be easily expanded or contracted by one motor shaft of the auxiliary motors 11a, 11b, 11c, or 11d, and consequently, objects of different sizes can be easily adsorbed.

[0245] Furthermore, according to the suction device 5 of this embodiment, the main rotating part 45 has a main rotating pulley 71 provided at the center 67 of the main rotating part, a main frame 29 extending from the center 67 of the main rotating part, and four main rotating bars extending radially from the center 67 of the main rotating part, and is rotatable about the center 67 of the main rotating part by the rotation of the main rotating pulley 71, and four auxiliary frame bars that are slidably arranged on the main frame 29 and extend radially from different auxiliary rotating parts centers 23a, 23b, 23c, and 23d. The auxiliary frames 65a, 65b, 65c, and 65d, the respective ends of the four main rotating bars of the main rotating section 45, and four long suction section moving links 19a1-19a4, 19b1-19b4, 19c1-19c4, and 19d1-19d4 that connect each of the four auxiliary frames 65a, 65b, 65c, and 65d, and the motor shafts of the auxiliary motors 11a, 11b, 11c, and 11d provided at the auxiliary rotating section centers 23a, 23b, 23c, and 23d of each of the auxiliary rotating section centers of the auxiliary frames 65a, 65b, 65c, and 65d, and each of the different auxiliary rotating section centers The auxiliary rotating parts 21a, 21b, 21c, and 21d have the same number of auxiliary rotating parts bars as the auxiliary frame bars that extend radially from the core 23a, 23b, 23c, and 23d, and are rotatable about different auxiliary rotating parts centers 23a, 23b, 23c, and 23d by the rotation of the motor shafts of the auxiliary motors 11a, 11b, 11c, and 11d, and the first suction parts 13a1 to 13a4 and the second suction parts 13b1 to 23d are slidably arranged along each of the four auxiliary frame bars of each of the auxiliary frames 65a, 65b, 65c, and 65d Since it is equipped with 13b4, third attachment parts 13c1~13c4 and fourth suction parts 13d1~13d4, the respective tip ends of the four auxiliary frame bars of each of the auxiliary rotating parts 21a, 21b, 21c and 21d, and each of the first suction parts 13a1~13a4, second suction parts 13b1~13b4, third attachment parts 13c1~13c4 and fourth suction parts 13d1~13d4, it is equipped with suction part moving links 19a1~19a4, 19b1~19b4, 19c1~19c4 and 19d1~19d4, so first suction parts 13a1~13a4, second suction parts 13b1~13b4,The distance between the third attachment points 13c1-13c4 and the fourth suction points 13d1-13d4 can be easily expanded or contracted by the second and third drive shafts, thereby enabling easy attraction of multiple objects of different sizes.

[0246] Furthermore, according to the peeling method of this embodiment, a first step is to adsorb the peeling member W formed on the surface of the substrate M by first adsorption parts 13a1~13a4, second adsorption parts 13b1~13b4, third adhesion parts 13c1~13c4 or fourth adsorption parts 13d1~13d4 which are spaced apart, and after the first step, the first adsorption parts 13a1~13a4, second adsorption parts 13b1~13b4, third adhesion parts 13c1~13c4 or fourth adsorption parts The method includes a second step of reducing the spacing between each adsorption portion 13d1 to 13d4 and separating the first adsorption portions 13a1 to 13a4, the second adsorption portions 13b1 to 13b4, the third attachment portions 13c1 to 13c4, or the fourth adsorption portions 13d1 to 13d4 from the base material M to detach the member to be detached W from the base material M. Therefore, even when the member to be detached W is in close contact with the base material M, the member to be detached W can be easily detached from the base material M.

[0247] Furthermore, according to the peeling method of this embodiment, each of the multiple peelable members W formed on the surface of the substrate M is adsorbed by a plurality of first adsorption parts 13a1~13a4, second adsorption parts 13b1~13b4, third adhesion parts 13c1~13c4 and fourth adsorption parts 13d1~13d4, which are spaced apart from each other, and after the third step, the first adsorption parts 13a1~13a4, second adsorption parts 13b1~13b4, third adhesion parts 13c1~13c4 or fourth adsorption parts The method includes a fourth step of reducing the spacing between each adsorption portion 13d1 to 13d4 and separating the first adsorption portions 13a1 to 13a4, the second adsorption portions 13b1 to 13b4, the third attachment portions 13c1 to 13c4, or the fourth adsorption portion 13d1 to 13d4 from the base material M to peel off a plurality of members to be peeled off from the base material M. Therefore, even when a plurality of members to be peeled off W are in close contact with the base material M, the plurality of members to be peeled off W can be easily peeled off from the base material M at the same time.

[0248] (Second Embodiment) Next, a second embodiment of the present invention will be described. Note that the drawings used in this embodiment are exaggerated for ease of understanding, and their dimensions differ from the actual dimensions.

[0249] The following describes a second embodiment of the present invention. The peeling system 101, first peeling device 105, and second peeling devices 107a, 107b, 107c, and 107d of this embodiment are the same as the peeling system 1, first peeling device 5, and second peeling devices 7a, 7b, 7c, and 7d of the first embodiment, except for the contact parts 175a1 to 175a4, 175b1 to 175b4, 175c1 to 175c4, and 175d1 to 175d4 provided near the first adsorption parts 13a1 to 13a4, second adsorption parts 13b1 to 13b4, third adhesion parts 13c1 to 13c4, and fourth adsorption parts 13d1 to 13d4, respectively. Therefore, parts common to the first embodiment are denoted by the same reference numerals and their descriptions are omitted.

[0250] Figure 26 is a front view of the first peeling apparatus of the second embodiment when the workpiece width is increased and the suction section width is increased, Figure 27 is a view corresponding to Figure 17 in Figure 26, and Figure 28 is a view corresponding to Figure 19 in Figure 26.

[0251] As shown in Figures 1 and 26, the peeling system 101 of this embodiment comprises an articulated robot 3 and a first peeling device 105 rotatably connected to the tip of the articulated robot 3.

[0252] The first peeling device 105, like the first peeling device 5 of the first embodiment, is rotatably connected to the tip of the upper arm portion 44 of the articulated robot 3, and peels off the peelable member (molded product) W, which will be described later, that has adhered to the surface of the base material (mold) M, described later, after molding, from the base material M.

[0253] Furthermore, in the first peeling device 105 of this embodiment, similar to the first peeling device 5 of the first embodiment, the spacing between the second peeling devices 107a, 107b, 107c, and 107d (work width) can be changed according to the size of the base material M and the member to be peeled W, and the width between the adsorption parts (adsorption part width) can also be changed in order to peel the member to be peeled W from the base material M.

[0254] Furthermore, the first peeling device 105 of this embodiment, like the first peeling device 5 of the first embodiment, can individually and simultaneously peel off the four divided members W1, W2, W3, and W4 from the base material M using four second peeling devices 107a, 107b, 107c, and 107d (see Figure 14).

[0255] In this embodiment as well, the first peeling device 105 peels the four peelable members W1, W2, W3, and W4 from the base material M individually and simultaneously. However, by removing or not operating some of the suction parts, it is possible to peel off not four peelable members, but three, two, or one peelable member individually and simultaneously.

[0256] Furthermore, the second peeling device 107a includes a contact portion 175a1 having a convex / concave 175a1t at its tip and positioned near the first suction portion 13a1, a contact portion 175a2 having a convex / concave 175a2t at its tip and positioned near the first suction portion 13a2, a contact portion 175a3 having a convex / concave 175a3t (not shown, but similar to the convex / concave 175a1t and convex / concave 175a2t) at its tip and positioned near the first suction portion 13a3 (not shown, but similar to the contact portions 175a1 and 175a2), and a contact portion 175a4 having a convex / concave 175a4t (not shown, but similar to the convex / concave 175a1t and convex / concave 175a2t) at its tip and positioned near the first suction portion 13a4 (not shown, but similar to the contact portions 175a1 and 175a2).

[0257] Further, the second peeling device 107b includes a contact portion 175b1 having a concavo-convex portion 175b1t at its tip, which is disposed near the second suction portion 13b1; a contact portion 175b2 having a concavo-convex portion 175b2t at its tip, which is disposed near the second suction portion 13b2; a contact portion 175b3 (not shown, which is the same as the contact portion 175b1 and the contact portion 175b2) having a concavo-convex portion 175b3t (not shown, which is the same as the concavo-convex portion 175b1t and the concavo-convex portion 175b2t) at its tip, which is disposed near the second suction portion 13b3; and a contact portion 175b4 (not shown, which is the same as the contact portion 175b1 and the contact portion 175b2) having a concavo-convex portion 175b4t (not shown, which is the same as the concavo-convex portion 175b1t and the concavo-convex portion 175b2t) at its tip, which is disposed near the second suction portion 13b4.

[0258] Further, the second peeling device 107c (not shown, which is located on the back side of the paper surface of the second peeling device 107b in the same manner as the second peeling device 7c of the first embodiment) includes a contact portion 175c1 having a concavo-convex portion 175c1t at its tip (not shown, which is the same as the concavo-convex portion 175b1t and the concavo-convex portion 175b2t), which is disposed near the third suction portion 13c1; a contact portion 175c2 having a concavo-convex portion 175c2t at its tip (not shown, which is the same as the concavo-convex portion 175b1t and the concavo-convex portion 175b2t), which is disposed near the third suction portion 13c2; a contact portion 175c3 (not shown, which is the same as the contact portion 175b1 and the contact portion 175b2) having a concavo-convex portion 175c3t (not shown, which is the same as the concavo-convex portion 175b1t and the concavo-convex portion 175b2t) at its tip, which is disposed near the third suction portion 13c3; and a contact portion 175c4 (not shown, which is the same as the contact portion 175b1 and the contact portion 175b2) having a concavo-convex portion 175c4t at its tip (not shown, which is the same as the concavo-convex portion 175b1t and the concavo-convex portion 175b2t), which is disposed near the third suction portion 13c4.

[0259] Furthermore, the second peeling device 107d (not shown, but located on the back side of the paper of the second peeling device 107a, similar to the second peeling device 7d of the first embodiment) is located near the fourth suction part 13d1 and has a contact part 175d1 (not shown, but similar to contact parts 175a1 and 175a2) with a convex / concave 175d1t (not shown, but similar to convex / concave 175a1t and convex / concave 175a2t) at its tip, and a contact part 175d2 (not shown, but similar to convex / concave 175a1t and convex / concave 175a2t) at its tip, located near the fourth suction part 13d2 The device includes a contact portion 175a1 and 175a2 (though not shown, it is the same as the contact portion 175a1 and 175a2), a contact portion 175d3 (though not shown, it is the same as the contact portion 175a1 and 175a2) located near the fourth suction portion 13d3 and having a convex / concave 175d3t (though not shown, it is the same as the convex / concave 175a1t and 175a2t) at its tip, and a contact portion 175d4 (though not shown, it is the same as the contact portion 175a1 and 175a2) located near the fourth suction portion 13d4 and having a convex / concave 175d4t (though not shown, it is the same as the convex / concave 175a1t and 175a2t) at its tip.

[0260] Figure 26 shows the state before the first peeling device 105 rotates the main rotating part 45 to match the sizes of the four peeling members W1, W2, W3, and W4. In this case, the lower ends of the contact parts 175a1~175a4, 175b1~175b4, 175c1~175c4, and 175d1~175d4 are located at a distance X5 above the lower ends of the first suction parts 13a1~13a4, the second suction parts 13b1~13b4, the third attachment parts 13c1~13c4, and the fourth suction parts 13d1~13d4, respectively, as shown in Figure 27.

[0261] Then, the main rotating part 45 of the first peeling device 5 is rotated to adjust the suction positions of the auxiliary frames 65a, 65b, 65c, and 65d to match the four peeling members W1, W2, W3, and W4 formed by dividing the peeling member W formed on the base material (mold) (S11 in Figure 13). After that, the first peeling device 105 is operated by the four second peeling devices 107a, 107b, 107c, and 107d, respectively. When the four peelable members W1, W2, W3, and W4 are adsorbed (S13 in Figure 13), as shown in Figure 28, the first adsorption parts 13a1~13a4, the second adsorption parts 13b1~13b4, the third contact parts 13c1~13c4, and the fourth adsorption parts 13d1~13d4 flex when adsorbing the peelable members W, causing the contact parts 175a1~175a4, 175b1~175b4, 175c1~175c4, and 175d1~175d4 to come into contact with the peelable members W.

[0262] Furthermore, the positions where the first adsorption parts 13a1-13a4, the second adsorption parts 13b1-13b4, the third contact parts 13c1-13c4, and the fourth adsorption parts 13d1-13d4 adsorb the member to be peeled W, and the positions where the contact parts 175a1-175a4, 175b1-175b4, 175c1-175c4, and 175d1-175d4 contact the member to be peeled W, correspond to the discarded parts W1b, W2b, W3b, and W4b of the member to be peeled W, respectively. Since these are parts that do not ultimately constitute a component, the member to be peeled W can be peeled from the base material M without damaging the essential parts that ultimately constitute a component.

[0263] If there are no surface scratches or other issues, the positions where the first adsorption parts 13a1-13a4, the second adsorption parts 13b1-13b4, the third contact parts 13c1-13c4, and the fourth adsorption parts 13d1-13d4 adsorb onto the member to be peeled W, and the positions where the contact parts 175a1-175a4, 175b1-175b4, 175c1-175c4, and 175d1-175d4 contact the member to be peeled W, may be any position on the member to be peeled W.

[0264] Then, the auxiliary rotating parts 21a, 21b, 21c, and 21d provided on each of the four second peeling devices 107a, 107b, 107c, and 107d are rotated to reduce the spacing between the first adsorption parts 13a1 to 13a4, the second adsorption parts 13b1 to 13b4, the third adsorption parts 13c1 to 13c4, and the fourth adsorption parts 13d1 to 13d4 (S15 in Figure 13).

[0265] As a result, as shown in Figure 20, the peelable members W1, W2, W3, and W4 formed on the base material (mold) M peel off from the base material (mold) M.

[0266] According to the second peeling device 107a, 107b, 107c, or 107d of this embodiment, which is intended for peeling a member to be peeled W formed on the surface of a base material M from the base material M, it is equipped with a plurality of first adsorption parts 13a1 to 13a4, second adsorption parts 13b1 to 13b4, third adsorption parts 13c1 to 13c4, or fourth adsorption parts 13d1 to 13d4 that can adsorb to the surface of the member to be peeled W, and an expansion / contraction mechanism that expands and contracts the distance between these plurality of adsorption parts. Therefore, even when the member to be peeled W is in close contact with the base material M, the member to be peeled W can be easily peeled from the base material M by expanding and contracting the distance between the plurality of adsorption parts using the expansion / contraction mechanism.

[0267] Furthermore, according to the second peeling device 107a, 107b, 107c or 107d of this embodiment, the expansion and contraction mechanism comprises the motor shaft of an auxiliary motor 11a, 11b, 11c or 11d provided at the auxiliary rotating part center 23a, 23b, 23c or 23d, and auxiliary frames 65a, 65b, 65c or 65d each having four auxiliary frame bars extending radially from the auxiliary rotating part center 23a, 23b, 23c or 23d, and the auxiliary rotating part center 23a, 23b, 23 The device comprises auxiliary rotating parts 21a, 21b, 21c, or 21d, which have the same number of auxiliary rotating part bars as auxiliary frame bars extending radially from c or 23d, and which are rotatable about the auxiliary rotating part center 23a, 23b, 23c, or 23d by the rotation of the motor shafts of the auxiliary motors 11a, 11b, 11c, or 11d, and the first suction parts 13a1 to 13a4, the second suction parts 13b1 to 13b4, the third attachment parts 13c1 to 13c4, or the fourth suction parts 13d1 to 13d4, Each of the four auxiliary frame bars of the auxiliary frame 65a, 65b, 65c, or 65d is slidably positioned along each auxiliary frame bar, and a plurality of long suction part movement links 19a1 to 19a4, 19a1 to 19a4, 19a1 to 19a4 are connected to the respective ends of the auxiliary rotating part bars of the auxiliary rotating part 21a, 21b, 21c, or 21d, and to each of the first suction parts 13a1 to 13a4, second suction parts 13b1 to 13b4, third attachment parts 13c1 to 13c4, or fourth suction parts 13d1 to 13d4. Since it is equipped with b1-19b4, 19c1-19c4, or 19d1-19d4, even when the member to be peeled W is in close contact with the base material M, the spacing between the first adsorption parts 13a1-13a4, the second adsorption parts 13b1-13b4, the third attachment parts 13c1-13c4, or the fourth adsorption parts 13d1-13d4 can be easily expanded or contracted by the motor shaft of a single auxiliary motor 11a, 11b, 11c, or 11d, and the member to be peeled W can be easily peeled from the base material M.

[0268] Furthermore, according to the second peeling device 107a, 107b, 107c, or 107d of this embodiment, contact portions 175a1 to 175a4, 175b1 to 175b4, 175c1 to 175c4, or 175d1 to 175d4 that can contact the surface of the member to be peeled W are provided near each of the first adsorption portions 13a1 to 13a4, the second adsorption portions 13b1 to 13b4, the third contact portion 13c1 to 13c4, or the fourth adsorption portion 13d1 to 13d4. Therefore, even if there are multiple members to be peeled W with high ductility or malleability, the members to be peeled W can be peeled even more easily from the base material M.

[0269] Furthermore, according to the second peeling device 107a, 107b, 107c, or 107d of this embodiment, the member to be peeled W comprises essential parts W1a, W2a, W3a, or W4a that constitute a component, and discarded parts W1b, W2b, W3b, or W4b that do not constitute a component, and the contact parts 175a1 to 175a4, 175b1 to 175b4, 175c1 to 175c4, or 175d1 to 175d4 can contact the surface of the discarded parts W1b, W2b, W3b, or W4b, so that the member to be peeled W can be easily peeled from the base material M without damaging the essential parts W1a, W2a, W3a, or W4a.

[0270] Furthermore, according to the second peeling device 107a, 107b, 107c, or 107d of this embodiment, the member to be peeled W is a molded product, and the base material M is a mold for molding the molded product, and is equipped with a cutter section 53a, 53b, 53c, or 53d that cuts the gate G1, G2, G3, or G4 of the molded product in conjunction with the operation of the auxiliary rotating section 21a, 21b, 21c, or 21d, so that the gate G1, G2, G3, or G4 can be easily cut by the motor shaft of a single auxiliary motor 11a, 11b, 11c, or 11d.

[0271] Furthermore, according to the second release device 107a, 107b, 107c, or 107d of this embodiment, since it is equipped with three release agent spray nozzles 63a, 63b, and 63c that apply a release agent to the surface of the mold from which the molded product has been released, the next molded product can be easily released.

[0272] Furthermore, according to the first peeling device 105 of this embodiment, the expansion and contraction mechanism includes a main rotating pulley 71 provided at the center 67 of the main rotating part, a main frame 29 extending radially from the center 67 of the main rotating part, and four main rotating bars extending radially from the center 67 of the main rotating part, and a main rotating part 45 that is rotatable about the center 67 of the main rotating part by the rotation of the main rotating pulley 71, and four auxiliary frames slidably arranged on the main frame 29 and extending radially from each of the different auxiliary rotating parts centers 23a, 23b, 23c, and 23d. Auxiliary frames 65a, 65b, 65c, and 65d having a lever; four long auxiliary movement links 47a, 47b, 47c, and 47d connecting the respective ends of the four main rotating bar of the main rotating section 45 to each of the auxiliary frames 65a, 65b, 65c, and 65d; motor shafts of auxiliary motors 11a, 11b, 11c, and 11d provided at the respective auxiliary rotating section centers 23a, 23b, 23c, and 23d of the auxiliary frames 65a, 65b, 65c, and 65d; and a radiating extension from each of the different auxiliary rotating section centers 23a, 23b, 23c, and 23d. It comprises auxiliary frames 65a, 65b, 65c, and 65d, each having four auxiliary frame bars, and auxiliary rotating parts 21a, 21b, 21c, and 21d, each having the same number of auxiliary rotating bar extensions as the auxiliary frame bars extending radially from each of the auxiliary rotating part centers 23a, 23b, 23c, and 23d, and which are rotatable about each of the different auxiliary rotating part centers 23a, 23b, 23c, and 23d by the rotation of the motor shafts of the auxiliary motors 11a, 11b, 11c, and 11d, and first suction parts 13a1 to 13a4, second suction parts 13b1 to 13b4, third attachment parts 13c1 to 13c4 and The fourth suction parts 13d1 to 13d4 are slidably arranged along each of the four auxiliary frame bars of each of the auxiliary frames 65a, 65b, 65c, and 65d, and each of the tip ends of each of the auxiliary rotating bar of each of the auxiliary rotating parts 21a, 21b, 21c, and 21d are connected to each of the first suction parts 13a1 to 13a4, the second suction parts 13b1 to 13b4, the third attachment parts 13c1 to 13c4, and the fourth suction parts 13d1 to 13d4 by a plurality of long suction part moving links 19a1 to 19a4, 19b1 to 19b4, 19c1 to 19c4, and 19d1 to 19d4.Because it is equipped with this, the spacing between the multiple first suction parts 13a1-13a4, second suction parts 13b1-13b4, third adhesion parts 13c1-13c4, and fourth suction parts 13d1-13d4 can be easily expanded and contracted by a single main rotating pulley 71 to match the size of the peeling member W and the base material M. Even when the peeling member W is in close contact with the base material M, the spacing between the multiple first suction parts 13a1-13a4, second suction parts 13b1-13b4, third adhesion parts 13c1-13c4, and fourth suction parts 13d1-13d4 can be easily expanded and contracted by the motor shafts of the auxiliary motors 11a, 11b, 11c, and 11d, allowing the peeling member W to be easily peeled from the base material M.

[0273] Furthermore, according to the peeling system 101 of this embodiment, since it comprises an articulated robot 3 and a first peeling device 105 and second peeling devices 107a, 107b, 107c, and 107d connected to the tip of the articulated robot 3, the first peeling device 105 and the second peeling devices 107a, 107b, 107c, and 107d can be used in a narrow area. Susumu By inserting it, the member to be peeled W can be easily peeled off from the base material M.

[0274] Furthermore, according to the suction device 107a, 107b, 107c, or 107d of this embodiment, the motor shaft of the auxiliary motor 11a, 11b, 11c, or 11d provided on the auxiliary rotating part center 23a, 23b, 23c, or 23d, and the auxiliary frame 65a, 65b, 65c, or 65d each having four auxiliary frame bars extending radially from the auxiliary rotating part center 23a, 23b, 23c, or 23d, and the auxiliary rotating part center 23a, 23b, 23c, It has the same number of auxiliary rotating section bars as auxiliary frame bars extending radially from 23d, and auxiliary rotating section 21a, 21b, 21c or 21d that can rotate about the auxiliary rotating section center 23a, 23b, 23c or 23d by the rotation of the motor shaft of auxiliary motor 11a, 11b, 11c or 11d, and each of the four auxiliary frame bars of the auxiliary frame 65a, 65b, 65c or 65d, each of the auxiliary frame bars, slides along each frame bar Multiple long suction part movement links 1 connect the tip of each of the auxiliary rotating part bars of the auxiliary rotating part 21a, 21b, 21c, or 21d to each of the first suction part 13a1-13a4, second suction part 13b1-13b4, third attachment part 13c1-13c4, or fourth suction part 13d1-13d4, which are movably arranged. Since it is equipped with 9a1-19a4, 19b1-19b4, 19c1-19c4 or 19d1-19d4, the spacing between each of the first suction parts 13a1-13a4, second suction parts 13b1-13b4, third attachment parts 13c1-13c4, or fourth suction parts 13d1-13d4 can be easily expanded or contracted by one motor shaft of the auxiliary motors 11a, 11b, 11c, or 11d, and consequently, objects of different sizes can be easily attracted.

[0275] Furthermore, according to the suction device 105 of this embodiment, the main rotating part 45 has a main rotating part pulley 71 provided at the center 67 of the main rotating part, a main frame 29 extending from the center 67 of the main rotating part, and four main rotating part bars extending radially from the center 67 of the main rotating part, and the main rotating part 45 is rotatable about the center 67 of the main rotating part by the rotation of the main rotating part pulley 71, and four auxiliary frame bars are slidably arranged on the main frame 29 and extend radially from different auxiliary rotating part centers 23a, 23b, 23c, and 23d respectively. The auxiliary frames 65a, 65b, 65c, and 65d, the tips of the four main rotating bars of the main rotating section 45, and four long suction section moving links 19a1~19a4, 19b1~19b4, 19c1~19c4, and 19d1~19d4 that connect each of the four auxiliary frames 65a, 65b, 65c, and 65d, and the motor shafts of the auxiliary motors 11a, 11b, 11c, and 11d provided at the auxiliary rotating section centers 23a, 23b, 23c, and 23d of each of the auxiliary rotating sections of the auxiliary frames 65a, 65b, 65c, and 65d, and each of the different auxiliary rotating sections The auxiliary rotating parts 21a, 21b, 21c, and 21d each have the same number of auxiliary rotating parts bars as auxiliary frame bars extending radially from the centers 23a, 23b, 23c, and 23d, and are rotatable about different auxiliary rotating part centers 23a, 23b, 23c, and 23d by the rotation of the motor shafts of the auxiliary motors 11a, 11b, 11c, and 11d, and each of the four auxiliary frame bars of each of the auxiliary frames 65a, 65b, 65c, and 65d has first suction parts 13a1 to 13a4 and second suction parts 13b1 to 23d, which are slidably arranged along each auxiliary frame bar. Since it is equipped with 13b4, third attachment parts 13c1~13c4 and fourth suction parts 13d1~13d4, the respective tip ends of the four auxiliary frame bars of each of the auxiliary rotating parts 21a, 21b, 21c and 21d, and each of the first suction parts 13a1~13a4, second suction parts 13b1~13b4, third attachment parts 13c1~13c4 and fourth suction parts 13d1~13d4, it is equipped with suction part moving links 19a1~19a4, 19b1~19b4, 19c1~19c4 and 19d1~19d4, so first suction parts 13a1~13a4, second suction parts 13b1~13b4,The distance between the third attachment points 13c1-13c4 and the fourth suction points 13d1-13d4 can be easily expanded or contracted by the second and third drive shafts, thereby enabling easy attraction of multiple objects of different sizes.

[0276] Although the peeling device, peeling system, adsorption device, and peeling method according to embodiments of the present invention have been described above, the present invention is not limited to the above embodiments and can be implemented with various modifications without departing from the spirit of the invention.

[0277] For example, in the first peeling devices 5 and 105 of the above-described embodiments, only the form in which the main rotating part 45 (corresponding to the "second rotating part" of the present invention) is roughly cross-shaped in plan view (a state in which one end of each of the four main rotating bars (corresponding to the "third arm" of the present invention) is joined at a single point at an angle of approximately 90 degrees) has been described. However, the main rotating part is not limited to having four main rotating bars, and is sufficient if one end of each of two or more (multiple) main rotating bars is joined at a predetermined angle.

[0278] Furthermore, in the second peeling devices 7a to 7d and 107a to 17d in the embodiments described above, only the auxiliary frames 65a to 65d having a roughly cross shape in plan view (where one end of each of the four auxiliary frame bars is joined at a single point at an angle of approximately 90 degrees) have been described. However, the auxiliary frame is not limited to having four auxiliary frame bars; it is sufficient if one end of each of two or more (multiple) auxiliary frame bars is joined at a predetermined angle.

[0279] Furthermore, in the second peeling devices 7a to 7d and 107a to 17d in the embodiments described above, only the auxiliary rotating parts 21a to 21d have been described in a form that is roughly cross-shaped in plan view (a state in which one end of each of the four auxiliary rotating part bars (corresponding to the "second arm" of the present invention) is joined at a single point at an angle of approximately 90 degrees). However, the auxiliary rotating part is not limited to having four auxiliary rotating part bars, and is acceptable as long as one end of each of two or more (multiple) auxiliary rotating part bars is joined at a predetermined angle.

[0280] Furthermore, in the embodiments described above, the multiple auxiliary frames 65a, etc., have been described as moving in directions 90 degrees relative to each other from the center 67 of the main rotating part. However, the invention is not limited to this, and the multiple auxiliary frames 65a, etc., may be moved in any direction as long as they do not interfere with each other.

[0281] Furthermore, in the embodiments described above, the multiple suction parts 13a1 etc. have been described as moving in directions of 90 degrees relative to each other from the auxiliary rotation part center 23a etc., but this is not limited to this, and the multiple suction parts 13a1 etc. may move in any direction as long as they do not interfere with each other. [Explanation of symbols]

[0282] 1. Peeling System 2. Control Panel 3. Multi-joint robot 4...Power supply 5. First peeling device (peeling device, adsorption device) 6. Main Controller 7a,7b,7c,7d...Second peeling device (peeling device, adsorption device) 8. Robot Controller 9. Main motor (expansion / contraction mechanism) 10. Motor Driver 11a, 11b, 11c, 11d... Auxiliary motors (expansion / contraction mechanism) 12. Air compressor 13a1, 13a2, 13a3, 13a4... 1st adsorption part (adsorption part) 13b1,13b2,13b3,13b4...Second adsorption section (adsorption section) 13c1, 13c2, 13c2, 13c4... Third adsorption section (adsorption section) 13d1, 13d2, 13d3, 13d4... Fourth adsorption section (adsorption section) 14..CPU 15a1,15a2,15a3,15a4,15b1,15b2,15b3,15b4,15c1,15c2,15c2,15c4,15d1,15d2,15d3,15d4...Suction hole 16...RAM 17a1, 17a2, 17a3, 17a4, 17b1, 17b2, 17b3, 17b4, 17c1, 17c2, 17c2, 17c4, 17d1, 17d2, 17d3, 17d4... Carriage for moving the suction part (expansion / contraction mechanism) 18···ROM 19a1, 19a2, 19a3, 19a4, 19b1, 19b2, 19b3, 19b4, 19c1, 19c2, 19c2, 19c4, 19d1, 19d2, 19d3, 19d4... Links for moving the suction part (expansion / contraction mechanism, first member, third member) 20... Control Panel 21a, 21b, 21c, 21d... Auxiliary rotating parts (expansion / contraction mechanism, first rotating part (second arm), third rotating part) (Fifth Arm) 23a, 23b, 23c, 23d... Auxiliary rotation center (first position, third position) 25a1, 25a2, 25b1, 25b2, 25c1, 25c2, 25d1, 25d2... Auxiliary frame moving rail (expansion / contraction mechanism) 27a1, 27a2, 27a3, 27a4, 27b1, 27b2, 27b3, 27b4, 27c1, 27c2, 27c2, 27c4, 27d1, 27d2, 27d3, 27d4... Rails for moving the suction part (expansion / contraction mechanism) 29. Main frame (expansion / contraction mechanism, second fixing part) 45. Main rotating part (expansion / contraction mechanism, second rotating part (third arm)) 47a, 47b, 47c, 47d... Auxiliary section movement links (expansion / contraction mechanism, second member) 49a, 49b, 49c, 49d... Rollers for operating the cutter section 51a, 51b, 51c, 51d... Center of rotation of the cutter section 53a, 53b, 53c, 53d... Cutter section (cutting section) 55a, 55b, 55c, 55d... Cutter first gripping part 57a, 57b, 57c, 57d...Cutter part 2 grip part 59a, 59b, 59c, 59d... Plates for lowering the cutter section 61a, 61b, 61c, 61d... Pulleys for lowering the cutter section 63a, 63b, 63c... Release agent spray nozzle (coating part) 65a, 65b, 65c, 65d... Auxiliary frame (expansion / contraction mechanism, first fixing part (first arm), sliding part (fourth arm)) 67...Center of the main rotating part (second position) 69... cabinet 71...Main rotating part pulley (second drive shaft) 73. Main rotating part timing belt 75a1, 75a2, 75a3, 75a4, 75b1, 75b2, 75b3, 75b4, 75c1, 75c2, 75c2, 75c4, 75d1, 75d2, 75d3, 75d4... Insertion part 77. Main motor pulley 79a1,79a2,79b1,79b2,79c1,79c2,79d1,79d2...Protrusion 81a1, 81a2, 81b1, 81b2, 81c1, 81c2, 81d1, 81d2... Auxiliary frame moving carriage (expansion / contraction mechanism) 175a1,175a2,175a3,175a4,175b1,175b2,175b3,175b4,175c1,175c2,175c2,175c4,175d1,175d2,175d3,175d4...Abutting part 175a1t,175a2t,175a3t,175a4t,175b1t,175b2t,175b3t,175b4t,175c1t,175c2t,175c2t,175c4t,175d1t,175d2t,175d3t,175d4t...Uneven part B...Installation location G1, G2, G3, G4... Gate M...Base material (mold) P...plate W, W1, W2, W3, W4... Part to be peeled (molded product) W1a,W2a,W3a,W4a...Main part W1b, W2b, W3b, W4b... Disposable section

Claims

1. In a peeling apparatus for peeling off a peelable member formed on the surface of a substrate from the substrate, Multiple adsorption parts capable of adsorbing onto the surface of the member to be peeled, An expansion / contraction mechanism capable of expanding or contracting the distance between the plurality of adsorption parts adsorbed to the member to be peeled off, A peeling apparatus characterized by being equipped with the following features.

2. The aforementioned expansion / contraction mechanism is A first drive shaft provided in the first position, A first fixing part having a plurality of first arms extending radially from the first position, A first rotating part having the same number of second arms as the first arms that extend radially from the first position, and which is rotatable about the first position by the rotation of the first drive shaft, Equipped with, The suction portion is slidably arranged along each of the plurality of first arms of the first fixing portion. The peeling device according to claim 1, further comprising a plurality of elongated first members connecting the respective tip portions of the second arms of the first rotating portion and each of the suction portions.

3. The peeling device according to claim 1, characterized in that each adsorption portion is provided near a contact portion that can contact the surface of the member to be peeled.

4. The peeling device according to claim 2, characterized in that each adsorption portion is provided near a contact portion that can contact the surface of the member to be peeled.

5. The member to be peeled off comprises a main part that constitutes a component and a discarded part that does not constitute a component, Equipped with, The peeling device according to claim 3, characterized in that the contact portion is capable of contacting the surface of the discard portion.

6. The member to be peeled off comprises a main part that constitutes a component and a discarded part that does not constitute a component, Equipped with, The peeling device according to claim 4, characterized in that the contact portion is capable of contacting the surface of the discard portion.

7. The peeling device according to claim 1, characterized in that each adsorption portion is provided near an insertion portion that can be inserted into the member to be peeled.

8. The peeling device according to claim 2, characterized in that each adsorption portion is provided near an insertion portion that can be inserted into the member to be peeled.

9. The member to be peeled off comprises a main part that constitutes a component and a discarded part that does not constitute a component, Equipped with, The peeling device according to claim 7, characterized in that the insertion portion is insertable into the discard portion.

10. The member to be peeled off comprises a main part that constitutes a component and a discarded part that does not constitute a component, Equipped with, The peeling device according to claim 8, characterized in that the insertion portion is insertable into the discard portion.

11. The member to be peeled is a molded product, and the base material is a mold for molding the molded product. The peeling device according to claim 2, further comprising a cutting unit that cuts the gate of the molded product in conjunction with the operation of the first rotating unit.

12. The member to be peeled is a molded product, and the base material is a mold for molding the molded product. The peeling device according to claim 4, further comprising a cutting unit that cuts the gate of the molded product in conjunction with the operation of the first rotating unit.

13. The member to be peeled is a molded product, and the base material is a mold for molding the molded product. The peeling device according to claim 6, further comprising a cutting unit that cuts the gate of the molded product in conjunction with the operation of the first rotating unit.

14. The member to be peeled is a molded product, and the base material is a mold for molding the molded product. The peeling device according to claim 8, further comprising a cutting unit that cuts the gate of the molded product in conjunction with the operation of the first rotating unit.

15. The member to be peeled is a molded product, and the base material is a mold for molding the molded product. The peeling device according to claim 10, further comprising a cutting unit that cuts the gate of the molded product in conjunction with the operation of the first rotating unit.

16. The release device according to any one of claims 11 to 15, further comprising an application section for applying a release agent to the surface of the mold from which the molded product has been released.

17. The aforementioned expansion / contraction mechanism is A second drive shaft located in the second position, A second fixing portion extending from the second position, A second rotating part having a plurality of third arms extending radially from the second position, and which is rotatable about the second position by the rotation of the second drive shaft, A plurality of sliding parts, each having a plurality of fourth arms slidably arranged on the second fixed part and extending radially from different third positions, A plurality of elongated second members connecting the respective tips of the plurality of third arms of the described second rotating part and each of the plurality of sliding parts, A plurality of third drive shafts provided at the third position of each of the plurality of slide portions, It has a plurality of third rotating parts that are rotatable about each of the respective third positions by the rotation of the plurality of third drive shafts, with the same number of fifth arms as the fourth arms that extend radially from each of the respective third positions, Equipped with, The suction portion is slidably arranged along each of the fourth arms of each of the plurality of sliding portions, The peeling device according to claim 1, further comprising a plurality of elongated third members connecting the respective tips of the plurality of fifth arms of each of the plurality of third rotating parts and each of the suction parts.

18. The peeling device according to claim 17, characterized in that each adsorption portion is provided near a contact portion that can contact the surface of the member to be peeled.

19. The member to be peeled off comprises a main part that constitutes a component and a discarded part that does not constitute a component, Equipped with, The peeling device according to claim 18, characterized in that the contact portion is capable of contacting the surface of the discard portion.

20. The molded product release apparatus according to claim 17, characterized in that each adsorption portion is provided near an insertion portion that can be inserted into the member to be released.

21. The member to be peeled off comprises a main part that constitutes a component and a discarded part that does not constitute a component, Equipped with, The peeling device according to claim 20, characterized in that the insertion portion is insertable into the discard portion.

22. The member to be peeled is a molded product, and the base material is a mold for molding the molded product. The peeling device according to claim 17, further comprising a cutting section that cuts the gate of the molded product in conjunction with the operation of the third rotating section.

23. The member to be peeled is a molded product, and the base material is a mold for molding the molded product. The peeling device according to claim 18, further comprising a cutting unit that cuts the gate of the molded product in conjunction with the operation of the third rotating unit.

24. The member to be peeled is a molded product, and the base material is a mold for molding the molded product. The peeling device according to claim 19, further comprising a cutting unit that cuts the gate of the molded product in conjunction with the operation of the third rotating unit.

25. The member to be peeled is a molded product, and the base material is a mold for molding the molded product. The peeling device according to claim 20, further comprising a cutting unit that cuts the gate of the molded product in conjunction with the operation of the third rotating unit.

26. The member to be peeled is a molded product, and the base material is a mold for molding the molded product. The peeling device according to claim 21, further comprising a cutting unit that cuts the gate of the molded product in conjunction with the operation of the third rotating unit.

27. The release device according to any one of claims 22 to 26, further comprising an application section for applying a release agent to the surface of the mold from which the molded product has been released.

28. Articulated robots and A peeling device according to any one of claims 1 to 27, connected to the tip of the articulated robot, A peeling system characterized by comprising the following features.

29. A first drive shaft provided in the first position, A first fixing part having a plurality of first arms extending radially from the first position, A first rotating part having the same number of second arms as the first arms that extend radially from the first position, and which is rotatable about the first position by the rotation of the first drive shaft, Each of the plurality of first arms of the first fixing part is provided with a suction part that is slidably arranged along each first arm, A plurality of elongated first members connecting the respective tip portions of the second arms of the first rotating portion and each of the suction portions, An adsorption device characterized by having the following features.

30. A second drive shaft located in the second position, A second fixing portion extending from the second position, A second rotating part having a plurality of third arms extending radially from the second position, and which is rotatable about the second position by the rotation of the second drive shaft, Multiple sliding parts, each having multiple third arms slidably arranged on the second fixed part and extending radially from different third positions, A plurality of elongated second members connecting the respective tips of the plurality of third arms of the described second rotating part and each of the plurality of sliding parts, A plurality of third drive shafts provided at the third position of each of the plurality of slide portions, It has a plurality of third rotating parts that are rotatable about each of the respective third positions by the rotation of the plurality of third drive shafts, with the same number of fourth arms as the third arms that extend radially from each of the respective third positions, Each of the plurality of third arms of each of the plurality of sliding parts is provided with a suction part that is slidably arranged along each third arm, A suction device characterized by comprising a plurality of elongated third members that connect the respective tips of the plurality of fourth arms of each of the plurality of third rotating parts and each of the suction parts.

31. A first step involves adsorbing a peelable member formed on the surface of a substrate by a plurality of adsorption parts arranged at spaced intervals, Following the first step, a second step is taken to reduce the spacing between each adsorption portion and to separate the plurality of adsorption portions from the substrate in order to detach the member to be peeled from the substrate. A peeling method characterized by comprising the following:

32. A third step involves adsorbing each of the multiple peelable members formed on the surface of the substrate by multiple adsorption parts arranged at a distance from each other, Following the third step, a fourth step is performed to reduce the distance between each of the adsorption parts and to separate the plurality of adsorption parts from the substrate, thereby peeling the plurality of members to be peeled from the substrate. A peeling method characterized by comprising the following:

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