Cassette inspection device

Abstract

A cassette storage device comprises a plurality of first support bars defining a plurality of slots, a plurality of second support bars intersecting the plurality of first support bars, and a cassette including upper and lower plates above and below the plurality of second support bars, a first cover and a second cover covering the upper and lower plates of the cassette, and third to fifth covers disposed between the first cover and the second cover, wherein the third cover has an opening defined therein that allows observation of the inside of the cassette, a door that exposes the opening to the outside in an open state and seals the opening from the outside in a closed state, a hinge connecting a first end of the door to the third cover, a port in which the cassette is received, an electromagnet disposed in the port, and an electromagnet controller that adjusts the output of the electromagnet between the door and the open state.

Description

Technology Field

[0001] The present invention relates to a cassette storage device. More specifically, the present invention relates to a cassette storage device for inspecting the presence or absence of a substrate. Background Technology

[0002] As information technology develops, the importance of display devices, which serve as a medium of connection between users and information, is being highlighted. Accordingly, the use of display devices such as liquid crystal display devices (LCDs), organic light emitting display devices (OLEDs), and plasma display devices (PDPs) is increasing.

[0003] In the process of manufacturing such a display device and an electronic device including the display device, multiple substrates can be accommodated in a cassette. The cassette can improve productivity by transporting multiple substrates between manufacturing process facilities at once.

[0004] Multiple slots can be defined in a cassette. A circuit board can be accommodated in each slot. The cassette may be transported with all slots filled, or with some slots empty. The presence or absence of circuit boards within the cassette, the number of boards, etc., can be entered into a computer system for management. The problem to be solved

[0005] The objective of the present invention is to provide a cassette storage device capable of detecting the presence or absence of a substrate inside a cassette without interfering with the cover of a differential pressure type cassette.

[0006] However, the purpose of the present invention is not limited to such purposes, and may be expanded in various ways without departing from the spirit and scope of the present invention. means of solving the problem

[0007] To achieve the aforementioned objective of the present invention, a cassette storage device according to one embodiment of the present invention comprises: a plurality of first support bars extending in a first direction and spaced apart from each other in a second direction intersecting the first direction to define a plurality of slots; a plurality of second support bars extending in a third direction intersecting the first direction and the second direction; a cassette including an upper plate and a lower plate connected to the upper and lower portions of the second support bars; a first cover covering the upper plate; a second cover covering the lower plate; a third cover disposed between the first cover and the second cover and having an opening defined therein that allows observation of the interior of the cassette; a fourth cover connected to the third cover between the first cover and the second cover; and a fifth cover connected to the fourth cover between the first cover and the second cover; a door that exposes the opening to the outside in an open state and seals the opening from the outside in a closed state; a hinge connecting a first end of the door to the third cover; a port in which the cassette is received; and a member disposed in the port. It may include an electromagnet and an electromagnet controller that controls the output of the electromagnet between the opening state and the closing state of the door.

[0008] In one embodiment, the cassette storage device may further include a magnetic body positioned adjacent to the first end of the door so that the door is opened by rotating the hinge by the attractive force of the electromagnet.

[0009] In one embodiment, the electromagnet may be a plurality of units.

[0010] In one embodiment, the electromagnet controller can independently control the output of the plurality of electromagnets.

[0011] In one embodiment, the plurality of electromagnets may include a first electromagnet adjacent to the magnetic body and a second electromagnet positioned at a location spaced further from the magnetic body than the first electromagnet. The first electromagnet may be turned on in the open state, and the second electromagnet may be turned on while transitioning from the open state to the closed state.

[0012] In one embodiment, the electromagnet controller can gradually reduce the output of the second electromagnet while transitioning from the open state to the closed state.

[0013] In one embodiment, the cassette storage device may further include a sealing member disposed at the second end of the door that is furthest apart from the first end.

[0014] In one embodiment, the cassette cover includes a fold portion, and the fold portion may include a first portion protruding from the third cover and a second portion extending from the first portion and parallel to the third cover of the cover. The fold portion may provide a space in which foreign matter is trapped, thereby preventing the foreign matter from entering the cassette.

[0015] In one embodiment, the cassette storage device may further include a sensor that senses the presence or absence of a processing object placed in the slots through the opening in the open state of the door.

[0016] In one embodiment, the object to be processed may include a first substrate adjacent to the fourth cover located between the third cover and the fifth cover, and a second substrate spaced apart from the fourth cover. The sensor may sense the presence or absence of the second substrate through the opening.

[0017] In one embodiment, the hinge may include an elastic hinge.

[0018] To achieve the aforementioned objective of the present invention, a cassette storage device according to one embodiment of the present invention comprises: a cassette including a plurality of first support bars extending in a first direction and spaced apart from each other in a second direction intersecting the first direction to define a plurality of slots; a plurality of second support bars extending in a third direction intersecting the first direction and the second direction; and an upper plate and a lower plate connected to the upper and lower portions of the second support bars; a first cover covering the upper plate; a second cover covering the lower plate; a third cover, a fourth cover, and a fifth cover disposed between the first cover and the second cover, wherein the third cover and the fifth cover face each other in the second direction, and the third cover has an opening defined in the third cover to allow observation of the interior of the cassette; and a folded portion that prevents the inflow of foreign matter into the cassette by providing a space in which foreign matter is confined, including a first portion protruding from the third cover and a second portion extending from the first portion and parallel to the third cover of the cover, wherein the third cover and the fifth cover face each other in the second direction, and the third cover has an opening defined in the third cover that allows observation of the interior of the cassette, and a folded portion that prevents the inflow of foreign matter into the cassette by including a first portion protruding from the third cover and a second portion extending from the first portion and parallel to the third cover of the cover. It may include a door that exposes an opening to the outside and seals the opening from the outside in a closed state, and includes a door containing a magnetic material, a hinge connecting a first end of the door to a third cover, a port in which the cassette is received, and an electromagnet disposed in the port and reacting with the magnetic material contained in the door to open and close the door.

[0019] In one embodiment, the cassette storage device may further include an electromagnet controller that controls the output of the electromagnet between the opening state and the closing state of the door.

[0020] In one embodiment, the cassette storage device may further include a magnetic body positioned adjacent to the first end of the door so that the door is opened by rotating the hinge by the attractive force of the electromagnet.

[0021] In one embodiment, the electromagnet may be a plurality of units.

[0022] In one embodiment, the electromagnet controller can independently control the output of the plurality of electromagnets.

[0023] In one embodiment, the plurality of electromagnets may include a first electromagnet adjacent to the magnetic body and a second electromagnet positioned at a location spaced further from the magnetic body than the first electromagnet. The first electromagnet may be turned on in the open state, and the second electromagnet may be turned on while transitioning from the open state to the closed state.

[0024] In one embodiment, the electromagnet controller can gradually reduce the output of the second electromagnet while the door is transitioning from the open state to the closed state.

[0025] In one embodiment, the cassette storage device may further include a sealing member disposed at a second end of the door that is furthest apart from the first end. The hinge may include an elastic hinge.

[0026] In one embodiment, the cassette storage device may further include a sensor that senses the presence or absence of a processing object disposed in the slots through the opening in the open state of the door. The processing object may include a first substrate adjacent to the fourth cover located between the third cover and the fifth cover, and a second substrate spaced apart from the fourth cover. The sensor may sense the presence or absence of the second substrate through the opening. Effects of the invention

[0027] A cassette storage device according to embodiments of the present invention forms an opening on the side of the cover to check the inside of the cassette, and the opening is opened and closed by a door. When the door is open, the opening is exposed to the outside so that the presence or absence of a substrate inside the cassette can be checked, and when the door is closed, the opening is sealed from the outside so that foreign substances can be prevented from entering the opening during transportation.

[0028] In addition, the door can operate without power. The door can be opened and closed without power without adding other mechanisms by means of the attractive force between the electromagnetic and magnetic materials and the elastic force of the hinge. Accordingly, the configuration of the cassette storage device can be simplified and made lighter.

[0029] In addition, the output of the electromagnet may gradually decrease while the door is closing. Accordingly, the door may close slowly. Although damage to the substrate may occur due to impact when the door closes, the impact caused by the door closing can be effectively prevented or minimized by closing the door slowly.

[0030] In addition, the electromagnet may be composed of multiple units. The electromagnet may include a first electromagnet that opens the door and a second electromagnet that closes the door. The output of the second electromagnet may be gradually reduced. Accordingly, the impact caused by the closing of the door can be effectively prevented or minimized.

[0031] In addition, a sealing member may be disposed at the end of the door. The sealing member can prevent external foreign matter from entering the cassette by ensuring a tight seal between the door and the cover of the cassette when the door is in the closed state.

[0032] In addition, the cover may include a folded portion. For example, the folded portion may have a shape in which a 'U' is rotated clockwise. The folded portion may serve as a barrier that primarily prevents the foreign substance from entering the cassette by providing a space to trap the foreign substance.

[0033] However, the effects of the present invention are not limited to the effects described above, and may be extended in various ways without departing from the spirit and scope of the present invention. Brief explanation of the drawing

[0034] FIG. 1 is a perspective view illustrating a cassette module included in a cassette storage device according to one embodiment of the present invention. FIG. 2 is a perspective view illustrating a cassette included in a cassette storage device according to embodiments of the present invention. FIG. 3 is a perspective view of the cassette module of FIG. 1 with the door and hinge omitted. FIG. 4 is a perspective view illustrating the rear of the cassette module of FIG. 1. FIG. 5 is a perspective view illustrating a cassette module included in a cassette storage device according to another embodiment of the present invention. FIGS. 6, FIGS. 7 and FIGS. 8 are drawings for illustrating a factory in which a cassette storage device according to embodiments of the present invention is placed. Figure 9 is a drawing for explaining the slot of the cassette of Figure 8. FIGS. 10, FIGS. 11, and FIGS. 12 are drawings for illustrating a port in which a cassette is received according to embodiments of the present invention. FIGS. 13 and FIGS. 14 are drawings for explaining regions A and B of FIG. 12. FIG. 15 is a drawing for explaining a door included in a cassette storage device according to embodiments of the present invention. FIGS. 16 and 17 are drawings for explaining a sensor included in a cassette storage device according to embodiments of the present invention. FIGS. 18 and FIGS. 19 are drawings for explaining the operation of the sensors of FIGS. 15, FIGS. 16, and FIGS. 17. FIGS. 20 and FIGS. 21 are drawings for explaining region C of FIG. 19. FIGS. 22 and FIGS. 23 are drawings for explaining region D of FIG. 21. FIGS. 24, FIGS. 25, and FIGS. 26 are drawings for explaining the operation of a door included in a cassette storage device. FIG. 27 is a drawing for explaining a magnetic material according to another embodiment included in a cassette storage device according to one embodiment of the present invention. FIG. 28 is a drawing for explaining an electromagnet according to another embodiment included in a cassette storage device according to one embodiment of the present invention. FIG. 29 is a block diagram of an electronic device according to one embodiment. FIG. 30 is a schematic diagram of an electronic device according to various embodiments. FIGS. 31, FIGS. 32, and FIGS. 33 are drawings for explaining a display device according to an embodiment of the present invention. Specific details for implementing the invention

[0035] Hereinafter, embodiments of the present invention will be described in more detail with reference to the attached drawings. Identical components in the drawings are given the same reference numerals, and redundant descriptions of identical components are omitted.

[0036] For example, the first direction (DR1), the second direction (DR2), and the third direction (DR3) may intersect each other. For example, the first direction (DR1), the second direction (DR2), and the third direction (DR3) may be perpendicular to each other.

[0037] FIG. 1 is a perspective view illustrating a cassette module included in a cassette storage device according to one embodiment of the present invention. FIG. 2 is a perspective view illustrating a cassette included in a cassette storage device according to embodiments of the present invention. FIG. 3 is a perspective view of the cassette module of FIG. 1 with the door and hinge omitted. FIG. 4 is a perspective view illustrating the rear view of the cassette module of FIG. 1.

[0038] Referring to FIGS. 1, FIGS. 2, FIGS. 3, and FIGS. 4, a cassette storage device according to one embodiment of the present invention (e.g., the cassette storage device (1) of FIG. 12) may include a cassette module (CSM). In one embodiment, the cassette module (CSM) may include a cassette (CST) and a cassette cover (CO).

[0039] In one embodiment, the cassette (CST) may include a plurality of first support bars (B1), a plurality of second support bars (B2), an upper plate (P1), and a lower plate (P2).

[0040] For example, a plurality of first support bars (B1) may include first-1 support bars (B11) and first-2 support bars (B12) that are spaced apart from each other in a second direction (DR2) and extend in a first direction (DR1). However, the present invention is not limited thereto. For example, a plurality of first support bars (B1) may include three or more support bars spaced apart from each other in a second direction. For example, the support bars may include first-2 support bars (B12) and third support bars that are sequentially arranged from the first-1 support bars (B11) in a second direction (DR2). The third support bars may also extend in the first direction (DR1).

[0041] A plurality of first support bars (B1) may define a plurality of slots (e.g., a plurality of slots (SL) of FIG. 9). For example, a plurality of first support bars (B1) may include a plurality of support bars spaced apart in a third direction (DR3). For example, first-1 support bars (B11) may be spaced apart in a third direction (DR3). First-2 support bars (B12) may be spaced apart in a third direction (DR3). The first-1 support bars (B11) and the first-2 support bars (B12) may be parallel to a plane defined by the first direction (DR1) and the second direction (DR2).

[0042] A plurality of second support bars (B2) can be extended in a third direction (DR3). A plurality of second support bars (B2) can maintain a constant distance between the upper plate (P1) and the lower plate (P2).

[0043] For example, the top plate (P1) and the bottom plate (P2) may be connected to the upper and lower parts of the second support bars (B2). For example, the top plate (P1) and the bottom plate (P2) may be parallel to a plane defined by the first direction (DR1) and the second direction (DR2). For example, the top plate (P1) and / or the bottom plate (P2) may be in the form of a 1-plate, as in the top plate (P1) of FIG. 2, or may be in the form of a repeating hollow rectangular plate defined by a horizontal bar (P21) and a vertical bar (P22), as in the bottom plate (P2) of FIG. 2.

[0044] In one embodiment, the cassette cover (CO) may include a first cover (CO1), a second cover (CO2), a third cover (CO3), a fourth cover (CO4), and a fifth cover (CO5). Hereinafter, for convenience of explanation, it is also referred to as a cassette cover or a cover.

[0045] In one embodiment, the first cover (CO1) may cover the top plate (P1). The second cover (CO2) may cover the bottom plate (P2). The third cover (CO3) may be placed between the first cover (CO1) and the second cover (CO2). An opening (OP) that allows observation of the inside of the cassette (CST) may be defined in the third cover (CO3). The fourth cover (CO4) may be connected to the third cover (CO3) between the first cover (CO1) and the second cover (CO2). The fifth cover (CO5) may be connected to the fourth cover (CO4) between the first cover (CO1) and the second cover (CO2).

[0046] For example, the front portion of the cassette (CST) may be open. The rear portion of the cassette (CST) facing the front portion in the first direction (DR1) may be covered by a fourth cover (CO4). The side portions between the front portion and the rear portion of the cassette (CST) may be covered by a third cover (CO3) and a fifth cover (CO5). For example, an opening (OP) may be defined in either the third cover (CO3) or the fifth cover (CO5). The upper and lower portions intersecting the front portion, the rear portion, and the side portions of the cassette (CST) may be covered by a first cover (CO1) and a second cover (CO2). A processing object (e.g., a processing object (OB) in FIG. 9) may be loaded or unloaded through the front portion.

[0047] For example, as illustrated in FIG. 3, the opening (OP) may be defined by a plurality of covers. For example, second support bars (B2) may be disposed on the side portion of the cassette (CST). The plurality of covers may be disposed between the second support bars (B2). For example, the third cover (CO) may include a third-1 cover (CO31), a third-2 cover (CO32), a third-3 cover (CO33), a third-4 cover (CO34), a third-5 cover (CO35), and a third-6 cover (CO36) disposed between the second support bars (B2). For example, the second support bar (B2) may not be disposed between the third-1 cover (CO31) and the third-2 cover (CO32). Accordingly, the space between the third-1 cover (CO31) and the third-2 cover (CO32) may be an empty space (i.e., the opening (OP)).

[0048] In one embodiment, the opening (OP) can be opened and closed by a door (DO). In one embodiment, the opening (OP) can be exposed to the outside in an open state (e.g., open state (S1) of FIG. 24), and the opening (OP) can be sealed from the outside in a closed state (e.g., closed state (S3) of FIG. 26).

[0049] In one embodiment, the door (DO) and the third cover (CO3) may be connected by a hinge (HI). In one embodiment, the hinge (HI) may connect the first end of the door (DO) (e.g., the first end (E1) of FIG. 20) to the third cover (CO3).

[0050] In one embodiment, the hinge (HI) may include an elastic hinge. The elastic hinge may rotate as the door (DO) responds to the electromagnet (EM). For example, the elastic hinge may include a spring. The elastic hinge may absorb shock and help prevent the door (DO) from closing excessively. The elastic hinge may reduce the resistance of the electromagnet (EM) to minimize power consumption. The elastic hinge may open and close the door (DO) without power using elastic force. Accordingly, the door (DO) may be opened to expose the opening (OP) to the outside (open state (S1)).

[0051] A filter unit (FU) may be disposed on one side of the cassette (CST). The filter unit (FU) may supply purified air (e.g., a first airflow (FL1)) to the space inside the shelf (e.g., shelf (SH) in FIG. 8) described later. For example, the filter unit (FU) may include an EFU (equipment fan filter unit). However, the present invention is not limited thereto.

[0052] However, this is exemplary and the present invention is not limited thereto. For example, the cassette module (CSM) may further include various components. For example, the cassette (CST) may further include protrusions (PP) and a stopper (STO). For example, the protrusions (PP) and the stopper (STO) may prevent the workpiece from being dislodged by vibration or rotation.

[0053] FIG. 5 is a perspective view illustrating a cassette module included in a cassette storage device according to another embodiment of the present invention.

[0054] Referring to FIG. 5, for example, an opening (OP) can be formed by perforating a cover (e.g., a third cover (CO3')). For example, in FIG. 3, the opening (OP) is defined as the empty space between two covers by spaced-apart arrangements, but in FIG. 5, the opening (OP) can be defined by forming an empty space by perforating a cover.

[0055] For example, in FIGS. 3 and FIGS. 5, it is described that an opening (OP) is formed in the third cover (CO3), but the present invention is not limited thereto. For example, an opening (OP) may be formed in the fifth cover (CO5).

[0056] Additionally, although the cassette module (CSM) has been described as having a cuboidal shape, the present invention is not limited thereto. For example, the sides of the cassette (CST) may be rounded and surrounded by a dome-shaped cover. The dome-shaped cover may be an integrated cover comprising a third cover (CO3) having an opening (OP) formed therein, and fourth and fifth covers (CO4, CO5) extending in one direction from the third cover (CO3).

[0057] FIGS. 6, FIGS. 7, and FIGS. 8 are drawings for illustrating a factory in which a cassette storage device according to embodiments of the present invention is placed.

[0058] Referring to FIGS. 6, 7, and 8, for example, the factory (FAB) may be divided into a first zone (A1), a second zone (A2), a third zone (A3), and a fourth zone (A4).

[0059] The factory (FAB) may be an environment with a cleanliness class of 10 or lower. However, embodiments of the present invention are not necessarily limited thereto. A ceiling filter unit (CFU) may be placed above the factory (FAB). The ceiling filter unit (CFU) may be placed above the rack master (RM), shelf (SH), and port (PT). The ceiling filter unit (CFU) may supply purified air to the rack master (RM), shelf (SH), and port (PT). By the ceiling filter unit (CFU), a downflow (DF) directed in the opposite direction of the third direction (DR3) may be formed in the first zone (A1). For example, the ceiling filter unit (CFU) may include a fan filter unit (FFU). However, the present invention is not limited thereto.

[0060] For example, a rack master (RA) and a rail (R) may be placed in the first zone (A1). The first zone (A1) may be a space where the rack master (RA) moves. For example, the rack master (RA) may move along the rail (R). For example, the rack master (RA) may play a role in managing and controlling the shelves (SH) described below. The rack master (RM) may include a robot arm (RAM). The robot arm (RAM) may handle the processing object described below (e.g., the processing object (OB) of FIG. 9) to load or unload into a cassette (CST).

[0061] For example, the object to be processed may include a glass substrate. A rack master (RA) may load or unload the glass substrate. It may be designed to safely transport and process the glass substrate.

[0062] For example, the rack master (RA) may have a precise fixing mechanism. Accordingly, the cassette (CST) can be precisely fixed. Therefore, the cassette (CST) can remain stable even during movement. For example, the rack master (RA) may include alignment marks and sensors. Accordingly, the position of the cassette (CST) can be accurately detected. In other words, positional errors can be minimized. For example, the rack master (RA) can process multiple glasses simultaneously. Therefore, productivity can be high.

[0063] For example, the second zone (A2) may be a space in which a plurality of shelves (SH) are arranged. For example, the plurality of shelves (SH) may include a first shelf (SH1), a second shelf (SH2), and a third shelf (SH3). The first shelf (SH1), the second shelf (SH2), and the third shelf (SH3) may include a horizontal frame (FR1) and a vertical frame (FR2). The horizontal frame (FR1) may be parallel to the first direction (DR1) or the second direction (DR2). The vertical frame (FR2) may be parallel to the third direction (DR3). However, the present invention is not limited thereto. For example, one shelf (SH) may be arranged in the second zone (A2), or two or four or more shelves (SH) may be arranged.

[0064] For example, multiple shelves (SH) may accommodate cassettes (CST). A shelf (SH) may be a place for temporarily storing cassettes (CST).

[0065] For example, the front portion of the cassette (CST) (the open front portion) may face the vertical frame (FR2) of the shelf (SH). By positioning the rear portion of the closed cassette (CST) toward the first zone (A1), foreign matter, etc., may not be introduced into the cassette (CST) when the rack master (RM) moves in the first zone (A1).

[0066] For example, particles may be generated when the rack master (RA) is in operation. To prevent contamination by said particles, a filter unit (FU) may be placed on the rear portion of the cassette (CST). Accordingly, a first airflow (FL1) may be formed from inside the cassette (CST) outward (e.g., toward the first direction (DR1) and then toward the opposite direction of the third direction (DR3). Additionally, between the cassette (CST) and the frame of the shelf (SH) (e.g., the second frame (FR2)), a second airflow (FL2) toward the opposite direction of the third direction (DR3) may be formed by the ceiling filter unit (CFU). In other words, the filter unit (FU) can inhale contaminated air and discharge purified air. Accordingly, the inside of the cassette (CST) can be maintained in a clean state.

[0067] When a filter unit (FU) is attached to equipment, it may require installation and maintenance at a high position. However, when a filter unit (FU) is attached to a cassette module (CSM) as in the present invention, the installation and maintenance of the filter unit (FU) can be easier.

[0068] For example, the third zone (A3) may be a space in which a plurality of ports (PT) are arranged. For example, the plurality of ports (PT) may include a first port (PT1) and a second port (PT2). However, the present invention is not limited thereto. For example, one port (PT) may be arranged in the third zone (A3), or three or more ports (PT) may be arranged.

[0069] For example, multiple ports (PT) can accommodate cassettes (CST).

[0070] For example, the fourth zone (A4) may be a space where a process chamber (CH) is placed. Before the cassette (CST) moves from the third zone (A3) to the fourth zone (A4), the mapping process may be performed. The port (PT) may be a place where a mapping process is performed to inspect the presence or absence of glass inside the cassette (CST) before proceeding with a subsequent process. For example, the subsequent process may be an octa process. For example, the octa process may be a process of attaching touch components. However, the present invention is not limited thereto.

[0071] In other words, the mapping process can be performed before each process. For example, before the deposition process, one original glass is accommodated in one slot, and after the deposition process, the original glass is separated into two, so that two separated glasses can be accommodated per slot.

[0072] For example, the above mapping process may refer to a process of detecting the presence or absence of glass inside the cassette (CST) and digitizing it. For example, broken glass may occur inside the cassette (CST) during transportation. The broken glass can be discharged from the cassette (CST) automatically or manually. At this time, if the discharge of the broken glass is not reflected in the computer data, a data error may occur.

[0073] If a subsequent process is carried out without compensating for the above data error, a defect may occur because the subsequent process (e.g., the above Octa process) is carried out when glass is not present. To minimize the occurrence of the above defect, the above mapping process, which matches the presence or absence of glass with the above computer data, can be carried out first.

[0074] Figure 9 is a drawing for explaining the slot of the cassette of Figure 8.

[0075] Referring to FIGS. 2, 8, and 9, a workpiece (OB) may be accommodated inside a cassette (CST). For example, the workpiece (OB) may include a glass substrate used in the manufacturing process of a display device (and / or an electronic device including said display device). However, embodiments of the present invention are not necessarily limited thereto, and the workpiece (OB) may include a silicon wafer used in a semiconductor process.

[0076] For example, the plurality of slots (SL) may include first to sixth slots (SL1, SL2, SL3, SL4, SL5, and SL6). The workpiece (OB) may sag (P) due to gravity. To minimize this, as described above, a plurality of first support members (B1, for example, only first- and second support members (B12) are shown in FIG. 9) may be arranged. However, the present invention is not limited thereto. For example, the plurality of slots (SL) may include two or more slots. Each slot may accommodate a plurality of workpieces or a single workpiece.

[0077] A workpiece (OB) can be placed in a plurality of slots (SL). For example, the plurality of slots (SL) can be defined by a plurality of first support bars (B1). The plurality of slots (SL) may all be filled, or some may be empty.

[0078] FIGS. 10, FIGS. 11, and FIGS. 12 are drawings for illustrating a port in which a cassette is received according to embodiments of the present invention.

[0079] Referring to FIGS. 10, 11, and 12, in one embodiment, a cassette storage device (1) according to embodiments of the present invention may include a port (PO), an electromagnet (EM), and an electromagnet controller (ECO).

[0080] As illustrated in FIG. 10, in one embodiment, an electromagnet (EM) may be placed in a port (PO). For example, the port (PO) may also be in a form where only the front part is open and other sides are closed by a combination of horizontal surfaces (PF1) and vertical surfaces (PF2). However, the present invention is not limited thereto. For example, the port (PO) may be formed by a combination of rods.

[0081] As illustrated in FIG. 11, in one embodiment, the port (PO) may accommodate a cassette module (CSM). As previously described, the cassette module (CSM) may include the cassette (e.g., the cassette (CST) of FIG. 2) and the cover (CO).

[0082] In one embodiment, the door (DO) may operate without power. In one embodiment, the door (DO) may be connected to the cover of the cassette (e.g., the third cover (CO3)), and the electromagnet (EM) may be placed in the port (PO). (e.g., when the door (DO) is connected to the third cover (CO3), the electromagnet (EM) may be placed in the port (PO) located adjacent to the third cover (CO3).)

[0083] As the door (DO) operates without power, the cassette module (CSM) can be made lighter and the power supply minimized. However, the present invention is not limited thereto. For example, a power device may be additionally connected to the door (DO). In this case, the door (DO) can be controlled more precisely.

[0084] In one embodiment, the door (DO) may include a magnetic material. For example, the door (DO) may include a metal that is lightweight, rust-resistant, and has sufficient rigidity. For example, the door (OD) may include aluminum, nickel-chrome plating, etc. Accordingly, the door (DO) may open / close in response to the on / off of the electromagnet (EM).

[0085] In one embodiment, the electromagnet controller (ECO) can turn the electromagnet (EM) on or off. Accordingly, the door (DO) can be opened or closed. Additionally, the electromagnet controller (ECO) can adjust the output of the electromagnet (EM) while the door (DO) is transitioning from the open state (e.g., the open state (S1) of FIG. 24) to the closed state (e.g., the closed state (S3) of FIG. 26).

[0086] For example, the output of the electromagnet (EM) can be reduced by lowering the voltage to decrease the linear velocity of the electromagnet (EM). To this end, the cassette storage device may further include a voltage regulator.

[0087] As another example, the output may be controlled by adjusting the conditioner pulse of the electromagnet (EM). For example, the output may be controlled by adjusting the amplitude and period of the pulse. To this end, the cassette storage device may further include a pulse width modulation (PWM) controller.

[0088] As another example, the output may be controlled by adjusting the current flowing through the electromagnet (EM). By reducing the current to decrease the linear velocity of the electromagnet (EM), the output may be reduced. To this end, the cassette storage device may further include a current regulator.

[0089] However, the present invention is not limited thereto. For example, a control circuit may be included in a switching system including an electromagnet (EM). The output of the electromagnet (EM) may be controlled through the control circuit. Alternatively, the output may be controlled by changing the components of the electromagnet (EM) (e.g., coil, short, case, etc.). Alternatively, the output may be controlled by adjusting the resistance by placing a resistance dial gauge, etc.

[0090] Referring to FIG. 2 and FIG. 12, a processing target (OB) may be located in a mapping area (MA). For example, a second substrate (SUB2) may be placed in a first mapping area (A). A first substrate (SUB1) may be placed in a second mapping area (B). For example, the first mapping area (A) may be an area adjacent to the rear portion of the cassette (CST), and the second mapping area (B) may be an area adjacent to the front portion of the cassette (CST).

[0091] FIGS. 13 and FIGS. 14 are drawings for explaining regions A and B of FIG. 12.

[0092] Referring to FIGS. 12, 13, and 14, a cassette storage device (1) according to embodiments of the present invention may include a second sensor (SE2). For example, the second sensor (SE2) may be placed on the front of a port (PO). In one embodiment, the second sensor (SE2) may include a laser distance sensor. For example, the second sensor (SE2) may include a light-emitting part (SE21) and a light-receiving part (SE22). For example, a laser beam (L1) may be emitted from the light-emitting part (SE21). The laser beam (L1) may be received from the light-receiving part (SE22). Accordingly, the presence or absence of a processing target (e.g., a first substrate (SUB1)) located between the light-emitting part (SE21) and the light-receiving part (SE22) may be detected. However, the present invention is not limited thereto. For example, the second sensor (SE2) can use various sensors such as a vision camera, a CCD sensor, a printed pattern sensor, a Hall sensor, etc.

[0093] However, the second sensor (SE2) may have difficulty detecting the presence or absence of a processing target located in the first mapping area (A) adjacent to the rear portion of the cassette (CST). For example, the protrusions (PP) of FIG. 1 may be misidentified as the processing target, and if another structure (e.g., additional support bar (B3)) is located within the cassette (CST), the additional support bar may be misidentified as the processing target.

[0094] Meanwhile, even if an additional sensor is placed adjacent to the third cover (CO3), it may be difficult to detect the presence or absence of the processing target located in the first mapping area (A). For example, if there is no opening (OP) in the third cover (CO3), the additional sensor cannot pass through the third cover (CO3) to detect the presence or absence of the processing target located in the first mapping area (A).

[0095] FIG. 15 is a drawing for explaining a door included in a cassette storage device according to embodiments of the present invention. FIG. 16 and FIG. 17 are drawings for explaining a sensor included in a cassette storage device according to embodiments of the present invention. FIG. 18 and FIG. 19 are drawings for explaining the operation of the sensor of FIG. 15, FIG. 16, and FIG. 17.

[0096] Referring to FIGS. 2, FIGS. 15, FIGS. 16, FIGS. 17, and FIGS. 18, the first substrate (SUB1) is mapped (detected and computerized by the presence or absence of the substrate) by the second sensor (SE2), and the second substrate (SUB2) exposes the opening (OP) to the outside, after which the mapping can proceed through the opening (OP). That is, the opening (OP) can be opened to the outside only when the electromagnet (EM) is turned on. That is, it can be opened only immediately before the mapping is performed.

[0097] A first sensor (SE1) can approach a second substrate (SUB). For example, the first sensor (SE1) can approach an opening (OP) in one direction (e.g., a second direction (DR2)) from outside the port (PO). The first sensor (SE1) can detect the presence or absence of a second substrate (SUB2) located in a first mapping area (A) through the opening (OP). In one embodiment, the first sensor (SE1) may include a laser distance sensor. However, the present invention is not limited thereto. For example, the first sensor (SE1) may use various sensors such as a vision camera, a CCD sensor, a printed pattern sensor, a Hall sensor, etc.

[0098] However, the present invention is not limited thereto. For example, the first sensor (SE1) may be connected to a driving device (DR). Using the driving device (DR), within the port (PO), the first sensor (SE1) may access the opening (OP) in a first direction (DR1), a direction opposite to the first direction (DR1), and / or a second direction (DR2).

[0099] A first sensor (SE1) can approach the opening (OP). In one embodiment, the first sensor (SE1) may include a laser distance sensor. The first sensor (SE1) can detect the presence or absence of a second substrate (SUB2) located in the first mapping area (A) through the opening (OP).

[0100] FIGS. 20 and FIGS. 21 are drawings for explaining region C of FIG. 19. FIGS. 22 and FIGS. 23 are drawings for explaining region D of FIG. 21.

[0101] Referring to FIGS. 20 and 21, a cassette storage device according to embodiments of the present invention (e.g., cassette storage device (1) of FIG. 12) may further include a sealing member (BF). The sealing member (BF) may be positioned at a second end (E2) facing a first end (E1) of a door (DO). For example, when the door (DO) is in the closed state (e.g., the closed state (S3) of FIG. 26), the first end (E1) and the second end (E2) may be positioned spaced apart from each other in a first direction (DR1).

[0102] For example, the sealing member (BF) may include silicone, etc. The sealing member (BF) can minimize the generation of particles when the door is closed. In addition, the sealing member (BF) can prevent or minimize damage to the object to be processed caused by the closing of the door by acting as a cushion when the door is closed. For example, the object to be processed may be damaged by impact vibration when the door (DO) is closed due to the elastic force. To minimize this, the door (DO) may be closed slowly, and the sealing member (BF) may act as a cushion. However, the present invention is not limited thereto. For example, the sealing member (BF) may include various materials with high airtightness and cushioning effects.

[0103] Referring to FIG. 22, in one embodiment, the cassette cover (CO) may include a fold portion (PRT). The fold portion (PRT) may include a first portion (P1) and a second portion (P2). The first portion (P1) may be a portion protruding from the cover (CO, e.g., a third cover (CO3)). The second portion (P2) may be a portion extending from the first portion (P1) and parallel to the cover (e.g., the third cover).

[0104] In one embodiment, the bending portion (PRT) may provide a confinement space (CS) in which foreign matter (F) is trapped by a vortex (PH2). As the confinement space (CS) is defined, foreign matter (F) can be primarily trapped in the confinement space (CS) when the door is closed. Accordingly, the inflow of foreign matter (F) into the cassette (e.g., the cassette (CST) of FIG. 2) can be prevented.

[0105] For example, as the door (DO) moves in one direction (e.g., PH1), the airflow around the door (DO) may change irregularly. Accordingly, vortices (PH2) may be generated around the door (DO). For example, when the door (DO) is closed, the airflow may change irregularly due to the difference in air velocity between the inside and outside, and vortices (PH2) may be generated as the door (DO) obstructs the airflow.

[0106] For example, a bend (PRT) may be placed to prevent foreign matter (F) from entering the interior of the cassette along the vortex (PH2). The bend (PRT) can trap foreign matter (F) in the confinement space (CS) to prevent foreign matter (F) from entering the interior of the cassette.

[0107] As illustrated in FIG. 23, there may be multiple bending portions (PRT'). For example, the bending portion (PRT') may include a first portion (P1) and a second portion (P2) extending from the first portion (P1). Additionally, the bending portion (PRT') may include a third portion (P3) and a fourth portion (P4) extending from the third portion (P3). The first portion (P1) and the third portion (P3) may be portions protruding from the cover (CO). The second portion (P2) may be a portion extending from the first portion (P1) and parallel to the cover (CO). The fourth portion (P4) may be a portion extending from the third portion (P3) and parallel to the cover (CO).

[0108] Multiple bending portions (PRT') can provide multiple confinement spaces (CS1, CS2). Accordingly, foreign matter (F) can be further prevented from entering the cassette.

[0109] However, the present invention is not limited thereto. For example, an air curtain, a filter system, a positive pressure system, etc., may be further provided adjacent to the door (DO). For example, the air curtain may form a strong airflow when the door (DO) is opened or closed to prevent the inflow of foreign substances (F). For example, the filter system may install a filter around the door (DO) to filter out incoming foreign substances (F). The positive pressure system may maintain the internal pressure of the cassette higher than the external pressure to prevent external foreign substances (F) from entering the interior of the cassette.

[0110] The cassette storage device according to the embodiments of the present invention can reduce installation and maintenance costs, etc., and prevent the inflow of foreign substances (F) by omitting the above devices.

[0111] FIGS. 24, FIGS. 25, and FIGS. 26 are drawings for explaining the operation of a door included in a cassette storage device.

[0112] Referring to FIGS. 20 and 24, in one embodiment, a cassette storage device according to embodiments of the present invention (e.g., cassette storage device (1) of FIG. 12) may further include a magnetic body (MM). The magnetic body (MM) can open the door (DO) by rotating the hinge (HI) by the attractive force of an electromagnet (EM). The magnetic body (MM) may be positioned adjacent to a first end (E1) of the door (DO).

[0113] For example, a magnetic body (MM) support may be positioned from the door (DO) in a direction intersecting the extension direction of the door (DO). A magnetic body (MM) may be positioned on the support.

[0114] Although FIGS. 20 and 21 describe one electromagnet (EM), the present invention is not limited thereto. In one embodiment, as shown in FIG. 24, there may be multiple electromagnets (EM). In one embodiment, the multiple electromagnets (EM) may include a first electromagnet (EM1) adjacent to a magnetic body (MM) and a second electromagnet (EM2) positioned at a location spaced further from the magnetic body (MM) than the first electromagnet (EM1). For example, the first electromagnet (EM1) may be adjacent to a cover (CO), and the second electromagnet (EM2) may be spaced further from the cover (CO) than the first electromagnet (EM1).

[0115] For example, the first electromagnet (EM1) and the second electromagnet (EM2) may have a rectangular shape. For example, the first electromagnet (EM1) may be arranged in a vertical direction (e.g., a shape extending in the third direction (DR3)), and the second electromagnet (EM2) may be arranged in a horizontal direction (e.g., a shape extending in the first direction (DR1)). Accordingly, stability can be increased while the door is closing, and only the control area can be finely controlled. However, the present invention is not limited thereto. For example, the shape, number, arrangement, etc. of the electromagnets (EM) may be varied.

[0116] In one embodiment, the electromagnet controller (ECO) can independently control the output of the plurality of electromagnets (EM). For example, the electromagnet controller (ECO) can individually turn on / off the first electromagnet (EM1) and / or the second electromagnet (EM2). Additionally, the electromagnet controller (ECO) can individually adjust the output of the first electromagnet (EM1) and / or the second electromagnet (EM2).

[0117] As illustrated in FIG. 24, the first electromagnet (EM1) can be turned ON in an open state (S1). For example, the door (DO) may contain a material that reacts to the electromagnet (EM). Accordingly, the door (DO) can move in response to the attractive force of the first electromagnet (EM1).

[0118] As illustrated in FIG. 25, while transitioning from an open state (e.g., the open state (S1) in FIG. 24) to a closed state (e.g., the closed state (S3) in FIG. 26) (e.g., S2 in FIG. 25), the electromagnet controller (ECO) can control a plurality of electromagnets (EM). For example, the first electromagnet (EM1) can be turned off, and the second electromagnet (EM2) can be turned on. In one embodiment, the electromagnet controller (ECO) can gradually reduce the output of the second electromagnet (EM2). Accordingly, the impact caused by the closing of the door can be minimized.

[0119] As shown in FIG. 26, all electromagnets (EM) can be turned off in the closed state (S3).

[0120] FIG. 27 is a drawing for explaining a magnetic material according to another embodiment included in a cassette storage device according to one embodiment of the present invention.

[0121] Referring to FIG. 27, in one embodiment, there may be a plurality of magnetic bodies (MM). For example, the magnetic bodies (MM) may include a first magnetic body (MM1) and a second magnetic body (MM2). The second magnetic body (MM2) may be spaced further away from the second electromagnet (EM2) than the first magnetic body (MM1). For example, while transitioning from an open state (e.g., the open state (S1) in FIG. 24) to a closed state (e.g., the closed state (S3) in FIG. 26) (e.g., S21), the electromagnet controller (ECO) may control the plurality of electromagnets (EM). For example, the first electromagnet (EM1) may be turned off, and the output of the second electromagnet (EM2) may be gradually reduced. The second electromagnet (EM2) can minimize the impact caused by the closing of the door by attracting the first magnetic body (MM1) and the second magnetic body (MM2).

[0122] FIG. 28 is a drawing for explaining an electromagnet according to another embodiment included in a cassette storage device according to one embodiment of the present invention.

[0123] Referring to FIG. 28, in one embodiment, there may be a plurality of electromagnets (EM). For example, the electromagnets (EM) may include a first electromagnet (EM1), a second electromagnet (EM2), and a third electromagnet (EM3). For example, while transitioning from an open state (e.g., the open state (S1) in FIG. 24) to a closed state (e.g., the closed state (S3) in FIG. 26) (e.g., S22), an electromagnet controller (ECO) may control the plurality of electromagnets (EM). For example, the first electromagnet (EM1) may be turned off, and the outputs of the second electromagnet (EM2) and the third electromagnet (EM3) may be gradually reduced. The second electromagnet (EM2) and the third electromagnet (EM3) may attract magnetic materials while minimizing the impact caused by the closing of the door. For example, the second electromagnet (EM2) may primarily control the closing of the door, and the third electromagnet (EM3) may secondarily control the closing of the door. However, the present invention is not limited thereto.

[0124] The display device according to the embodiment can be applied to various electronic devices. An electronic device according to one embodiment includes the display device described above and may further include a module or device having other additional functions in addition to the display device.

[0125] FIG. 29 is a block diagram of an electronic device according to one embodiment.

[0126] Referring to FIG. 29, an electronic device (EA) according to one embodiment may include a display module (11), a processor (12), a memory (13), and a power module (14).

[0127] The processor (12) may include at least one of a central processing unit (CPU), an application processor (AP), a graphic processing unit (GPU), a communication processor (CP), an image signal processor (ISP), and a controller.

[0128] The memory (15) may store data information necessary for the operation of the processor (12) or the display module (11). When the processor (12) executes an application stored in the memory (15), a video data signal and / or an input control signal is transmitted to the display module (11), and the display module (11) can process the received signal and output video information through a display screen.

[0129] The power module (14) may include a power supply module, such as a power adapter or battery device, and a power conversion module that converts the power supplied by the power supply module to generate power necessary for the operation of the electronic device (10).

[0130] At least one of each component of the electronic device (EA) may be included within the display device according to the embodiments described above. Additionally, some of the individual modules functionally included within a single module may be included within the display device, while others may be provided separately from the display device. For example, the display device may include a display module (11), and the processor (12), memory (13), and power module (14) may be provided in the form of other devices within the electronic device (EA) other than the display device.

[0131] FIG. 30 is a schematic diagram of an electronic device according to various embodiments.

[0132] Referring to FIG. 30, in one embodiment, various electronic devices to which a display device according to the embodiments is applied may include not only image display electronic devices such as a smartphone (10_1a), a tablet PC (10_1b), a laptop (10_1c), a TV (10_1d), and a desk monitor (10_1e), but also wearable electronic devices including display modules such as smart glasses (10_2a), a head-mounted display (10_2b), and a smart watch (10_2c), and automotive electronic devices (10_3) including display modules such as a CID (Center Information Display) and a room mirror display placed on the instrument panel, center fascia, and dashboard of a car.

[0133] FIGS. 31, FIGS. 32, and FIGS. 33 are drawings for explaining a display device according to an embodiment of the present invention.

[0134] For example, FIG. 31 is a perspective view of the display device. FIG. 32 is an exploded perspective view of the display device. FIG. 33 is a plan view for illustrating a substrate included in the display device.

[0135] Referring to FIGS. 31 and 32, in one embodiment, the electronic device (EA) may include an external case (EDC). A mounting groove may be defined in the external case (EDC). A protected object (e.g., a display module (DD)) may be accommodated in the space defined by the mounting groove. For example, the protected object may be a display device including a display module (DD). The protected object may be various electronic devices including a display device. Although a display module (DD) is used as an example in FIG. 32, the present invention is not limited thereto. As described above, the electronic device (EA) may be implemented in various forms.

[0136] In one embodiment, a protective film (PF) may be adhered to the object to be protected. In one embodiment, the cover film from which the release liner has been removed may include a protective film (PF) disposed on the object to be protected, and an adhesive layer that adheres the protective film (PF) to the object to be protected. The protective film (PF) may include a protective portion that overlaps with the outer shape (ED) of the object to be protected.

[0137] For example, the display module (DD) may include a window module (WM) and a display module (DM).

[0138] The display module (DM) may include a display area (DA) and a peripheral area (BZA).

[0139] Multiple pixels (PX) may be arranged in a display area (DA). The front surface may refer to a surface where light emitted from multiple pixels (PX) is displayed as an image. The front surface may be defined by a first direction (DR1) and a second direction (DR2). The back surface may be adjacent to the external case (EDC) than the front surface. The front surface and the back surface may be separated by a third direction (DR3).

[0140] However, the present invention is not limited thereto. For example, the image may also be displayed on the back surface, and in this case, the outer case (EDC) may be formed of a transparent material.

[0141] The surrounding area (BZA) can surround the display area (DA). For example, the shape of the display area (DA) can be substantially defined by the surrounding area (BZA).

[0142] The window module (WM) may include a plurality of layers. For example, it may include a substrate, a light-blocking pattern, a window protection layer, an adhesive layer, etc.

[0143] For example, the substrate may include a material with high light transmittance. For example, the substrate may include glass.

[0144] The window protection layer may be disposed on the substrate. The adhesive layer may be disposed between the window protection layer and the substrate. The adhesive layer may adhere the window protection layer and the substrate.

[0145] The light-blocking pattern may be disposed on the lower surface of the substrate. The light-blocking pattern may include dyes or pigments, etc. The light-blocking pattern may be formed by a coating method. The light-blocking pattern may be disposed to overlap with the non-display area (BZA). However, the present invention is not limited thereto. For example, the light-blocking pattern may include other materials. In addition, the light-blocking pattern may be formed in a different way. The light-blocking pattern may overlap with a part of the display area (DA). In addition, the light-blocking pattern may be disposed on the substrate.

[0146] The window module (WM) can minimize stress applied to the display module (DM). In addition, the window module (WM) can prevent external moisture and the like from penetrating into the display module (DM).

[0147] The description of the display device and the electronic device above is exemplary. The object to which the cover film is adhered may be a display device and / or various electronic devices including the same.

[0148] Referring to FIG. 33, the cassette storage device described above with reference to FIGS. 1 through 28 may accommodate the substrate. For example, the substrate may be a primary substrate (MS) or a two-part substrate in which the primary substrate (MS) is divided along a cutting line (CL). Additionally, the substrate may be a plurality of cells (CEL) formed on the primary substrate (MS). For example, the plurality of cells (CEL) may be a substrate in which the display device and / or the electronic device is being formed or a substrate in which the formation is completed. However, the present invention is not limited thereto.

[0149] For example, the cassette storage device may accommodate a plurality of divided substrates separated along a plurality of cutting lines. For example, the cassette storage device may accommodate a 3-divided substrate. For example, a first divided substrate, a second divided substrate, and a third divided substrate may be accommodated from the rear of the cassette. A second opening may be further defined in the third cover included in the cassette storage device. For example, the first opening may be adjacent to the rear of the cassette, and the second opening may be spaced further from the rear of the cassette than the first opening. The first divided substrate may be detected through the first opening, the second divided substrate may be detected through the second opening, and the third divided substrate may be detected through a sensor placed on the front. Industrial applicability

[0150] A cassette storage device according to exemplary embodiments of the present invention can be applied to a process for manufacturing a display device included in a computer, laptop, mobile phone, smartphone, smartpad, PMP, PDA, MP3 player, etc.

[0151] Although the present invention has been described above with reference to embodiments thereof, those skilled in the art will understand that various modifications and changes can be made to the present invention without departing from the spirit and scope of the invention as described in the following claims. Explanation of the symbols

[0152] DR1: First direction DR2 : Second direction DR3 : Third Direction SL: Multiple slots B1: Multiple first support bars B2 : Multiple second support bars P1 : Top plate P2 : Bottom plate CST: Cassette CO : Cassette Cover CO1 ~ CO5: 1st to 5th covers OP : Opening DO : Door E1: First end of the door E2: Second end of the door S1: Open state S3: Closed state HI : Hinge PO : Port EM: Electromagnet EM1: First electromagnet EM2: Second electromagnet ECO: Electromagnet controller 1 : Cassette storage device MM: Magnetic material BF: Sealing member PRT, PRT' : Bent section P1, P3: First part of the bent section P2, P4: Second part of the bent section F: Foreign substance CS, CS1, CS2: Spaces where foreign substances are trapped SE1: 1st sensor SE2: Second sensor SUB1: 1st substrate SUB2: Second Substrate

Claims

Claim 1 A cassette comprising: a plurality of first support bars extending in a first direction and spaced apart from each other in a second direction intersecting the first direction to define a plurality of slots; a plurality of second support bars extending in a third direction intersecting the first direction and the second direction; and an upper plate and a lower plate connected to the upper and lower portions of the second support bars; a cassette cover comprising: a first cover covering the upper plate; a second cover covering the lower plate; a third cover disposed between the first cover and the second cover and having an opening defined therein for observing the interior of the cassette; a fourth cover connected to the third cover between the first cover and the second cover; and a fifth cover connected to the fourth cover between the first cover and the second cover; a door exposing the opening to the outside in an open state and sealing the opening from the outside in a closed state; a hinge connecting a first end of the door to the third cover; a port receiving the cassette; and an electromagnet disposed in the port. A cassette storage device comprising an electromagnet controller that controls the output of the electromagnet between the opening state and the closing state of the door. Claim 2 A cassette storage device according to claim 1, further comprising a magnetic body disposed adjacent to the first end of the door so as to open the door by rotating the hinge by the attractive force of the electromagnet. Claim 3 A cassette storage device characterized in that, in paragraph 2, the electromagnet is a plurality of individuals. Claim 4 In paragraph 3, the cassette storage device is characterized in that the electromagnet controller independently controls the output of the plurality of electromagnets. Claim 5 In paragraph 4, the plurality of electromagnets are, A first electromagnet adjacent to the above magnetic body; and A cassette storage device comprising a second electromagnet positioned at a location spaced apart from the first electromagnet from the magnetic body, wherein the first electromagnet is turned ON in the open state and the second electromagnet is turned ON while transitioning from the open state to the closed state. Claim 6 A cassette storage device according to claim 5, wherein the electromagnet controller gradually reduces the output of the second electromagnet while transitioning from the open state to the closed state. Claim 7 A cassette storage device according to claim 1, further comprising a sealing member disposed at the second end of the door that is furthest apart from the first end. Claim 8 A cassette storage device according to claim 1, wherein the cassette cover includes a fold portion, the fold portion includes a first portion protruding from the third cover and a second portion extending from the first portion and parallel to the third cover of the cover, and the fold portion provides a space in which foreign matter is trapped to prevent the foreign matter from entering the cassette. Claim 9 A cassette storage device according to claim 1, further comprising a sensor that senses the presence or absence of a processing object placed in the slots through the opening in the open state of the door. Claim 10 A cassette storage device according to claim 9, wherein the processing object comprises a first substrate adjacent to the fourth cover located between the third cover and the fifth cover, and a second substrate spaced apart from the fourth cover, and wherein the sensor senses the presence or absence of the second substrate through the opening. Claim 11 A cassette storage device according to claim 1, characterized in that the hinge includes an elastic hinge. Claim 12 A cassette comprising: a plurality of first support bars extending in a first direction and spaced apart from each other in a second direction intersecting the first direction to define a plurality of slots; a plurality of second support bars extending in a third direction intersecting the first direction and the second direction; and an upper plate and a lower plate connected to the upper and lower portions of the second support bars; a cassette cover comprising a first cover covering the upper plate, a second cover covering the lower plate, a third cover disposed between the first cover and the second cover, a fourth cover, and a fifth cover, wherein the third cover and the fifth cover face each other in the second direction, and the third cover has an opening defined in the third cover that allows observation of the interior of the cassette, and a folded portion that prevents the inflow of foreign matter into the cassette by providing a space in which foreign matter is trapped, including a first portion protruding from the third cover and a second portion extending from the first portion and parallel to the third cover of the cover; wherein, in an open state, the opening is exposed to the outside, and in a closed state, the opening A cassette storage device comprising: a door that is sealed from the outside and contains a magnetic material; a hinge connecting a first end of the door to a third cover; a port in which the cassette is received; and an electromagnet disposed in the port and reacting with the magnetic material contained in the door to open and close the door. Claim 13 A cassette storage device according to claim 12, further comprising an electromagnet controller that adjusts the output of the electromagnet between the transition of the door from the open state to the closed state. Claim 14 A cassette storage device according to claim 13, further comprising a magnetic body disposed adjacent to the first end of the door so as to open the door by rotating the hinge by the attractive force of the electromagnet. Claim 15 A cassette storage device characterized in that, in claim 14, the electromagnet is a plurality of individuals. Claim 16 In claim 15, the cassette storage device is characterized in that the electromagnet controller independently controls the output of the plurality of electromagnets. Claim 17 In paragraph 15, the above plurality of electromagnets are, A first electromagnet adjacent to the above magnetic body; and A cassette storage device comprising a second electromagnet positioned at a location spaced apart from the first electromagnet from the magnetic body, wherein the first electromagnet is turned ON in the open state and the second electromagnet is turned ON while transitioning from the open state to the closed state. Claim 18 A cassette storage device according to claim 17, wherein the electromagnet controller gradually reduces the output of the second electromagnet while the door is transitioning from the open state to the closed state. Claim 19 A cassette storage device according to claim 12, further comprising a sealing member disposed at the second end of the door that is most spaced apart from the first end, and wherein the hinge comprises an elastic hinge. Claim 20 A cassette storage device according to claim 12, further comprising a sensor that senses the presence or absence of a processing object disposed in the slots through the opening in the open state of the door, wherein the processing object includes a first substrate adjacent to the fourth cover located between the third cover and the fifth cover and a second substrate spaced apart from the fourth cover, and wherein the sensor senses the presence or absence of the second substrate through the opening.

Images