Repair apparatus for mask

Abstract

The present invention relates to a repair device for a mask, and more particularly, to a repair device for a mask installed on a transfer device movable in a forward / backward direction or a left / right direction to perform repair on a repair point on a mask, comprising: a lifting part connected to the transfer device; a connecting part connected to the lifting part and capable of being lifted or lowered through the lifting part; and a repair part connected to the connecting part for removing foreign matter from the repair point; wherein the repair part is movable in at least one of the forward / backward direction and the left / right direction by the connecting part, so that the repair part can move in a direction opposite to the movement of the transfer device by the connecting part, thereby allowing repair on the mask to proceed while maintaining a relative stationary state of the repair part with respect to the repair point of the mask even while the transfer device is moving, and since repair on the mask is possible without stopping the movement of the transfer device at the repair point of the mask, the process time for repair can be significantly shortened.

Description

Technology Field

[0001] The present invention relates to a repair device for a mask, and more specifically, to a repair device for a mask capable of performing repair on the mask while maintaining a relative stationary state of the repair part with respect to the repair point of the mask even while the transfer device is moving. Background Technology

[0003] Recent research on semiconductors is progressing in the direction of pursuing high integration and high performance to process more data in a short period of time.

[0004] In addition, research on flat-panel displays is also progressing in the direction of pursuing high resolution.

[0005] To manufacture semiconductors and flat panel displays, a series of unit processes such as film formation, pattern formation, and metal wiring formation are performed.

[0006] The pattern formation process includes a photolithography process, and the photolithography process includes a series of processes such as a cleaning process, a surface treatment process, a photoresist film formation process, an alignment / exposure process, a development process, and an inspection process.

[0007] Meanwhile, the use of a mask corresponding to the pattern plate is essential for accurate pattern formation during the pattern formation process.

[0008] During the pattern formation process, foreign substances (particles, organic materials, photoresist residue, etc.) are bound to remain on the mask for various reasons.

[0009] In particular, since the components and wiring that make up semiconductors and flat-panel displays are extremely fine, if foreign substances adhere to the mask when forming patterns, the normal formation of components or wiring is hindered, leading to defects in the semiconductors and flat-panel displays; therefore, it is important to prevent foreign substances from adhering to the mask.

[0010] Chemical methods were used to remove foreign substances from masks, but there was a problem with contamination occurring during the processing of these chemicals. Consequently, mask repair devices that remove foreign substances by blowing air into repair points on the mask instead of using chemicals are now being used.

[0011] Regarding such a conventional repair device for masks, there is one disclosed in Korean Registered Patent Publication No. 10-1086306.

[0012] A conventional mask repair device is a mask repair device for repairing a mask by removing foreign substances on a semiconductor or flat panel display manufacturing mask having a predetermined pattern formed thereon, and comprises a laser unit that irradiates a laser onto the foreign substances to remove them, a needle unit that applies physical force to the foreign substances to remove them, an air unit that sucks in the foreign substances or blows air onto the foreign substances to remove them, and an optical unit that checks the condition of the foreign substances, wherein the needle unit has four movement axes and further includes a rotation angle sensor that measures the rotation angle of the needle unit, and is configured to move by a gantry.

[0013] However, these conventional mask repair devices have a problem in that repair of the mask is possible only when the gantry and the repair device itself are completely stopped.

[0014] In addition, conventional mask repair devices have the problem that the overall process time for repairing a mask becomes very long because the gantry and the repair device itself must stop whenever repairing the mask is performed.

[0015] In addition, conventional mask repair devices have a problem in that productivity decreases as the overall process time for repairing the mask becomes very long. Prior art literature

[0017] (Patent Document 0001) KR 10-1086306 B1 The problem to be solved

[0018] The present invention has been devised to solve the aforementioned problems, and aims to provide a repair device for a mask that can significantly reduce the process time for repair, as the repair part can move in the opposite direction to the movement of the transfer device by means of a connecting part, thereby allowing the repair of the mask to proceed while maintaining a relative stationary state of the repair part with respect to the repair point of the mask even during the movement of the transfer device, and enabling the repair of the mask without stopping the movement of the transfer device at the repair point of the mask. means of solving the problem

[0020] A repair device for a mask according to the present invention for solving the above-mentioned problem is a repair device for a mask that performs repair on a repair point on a mask, installed on a transfer device movable in a forward / backward direction or a left / right direction, comprising: a lifting part connected to the transfer device; a connecting part connected to the lifting part and capable of being lifted or lowered through the lifting part; and a repair part connected to the connecting part for removing foreign matter from the repair point; wherein the repair part is characterized by being movable in at least one of the forward / backward direction and the left / right direction by the connecting part.

[0021] In addition, when the repair part passes the repair point by moving the transfer device in the forward / backward or left / right direction, the repair part is characterized by removing foreign matter from the repair point while moving in the opposite direction to the movement direction of the transfer device by means of the connection part.

[0022] In addition, the transfer device and the repair unit are characterized by moving in opposite directions at the same speed from the repair point.

[0023] In addition, the repair unit is characterized by being able to repair the repair point while remaining stationary relative to the repair point as it moves in opposite directions at the same speed as the transfer device at the repair point.

[0024] Additionally, the above-mentioned connecting part comprises: a fixed plate; a connecting part driving means including a fixer installed long in the left-right direction on the fixed plate and a mover driven to move in the left-right direction along the fixer; a moving guide including a moving guide rail installed long in the left-right direction on the fixed plate spaced apart from the connecting part driving means and a moving guide block guided in the left-right direction along the moving guide rail; a side plate fixedly installed on the side of the fixed plate to which the lifting part is coupled; and a moving plate coupled to the mover and the moving guide block and capable of moving together in the left-right direction according to the movement of the mover; wherein the repair part is coupled to the moving plate and capable of moving together in the left-right direction with the moving plate.

[0025] In addition, a pair of sensors are installed on both the left and right sides of the fixed plate, and a protruding piece is installed on the movable plate that is detected by the pair of sensors, and the movable plate is characterized in that the stroke distance movable in the left and right directions is limited as the protruding piece is detected by the pair of sensors.

[0026] In addition, the repair part includes a blower that blows air into the repair point to remove foreign matter, wherein the blower is provided in a plurality of numbers and each has a blowing hole of a different diameter. Effects of the invention

[0028] The mask repair device according to the present invention has the following advantages.

[0029] The mask repair device according to the present invention has the advantage that, since the repair part can move in the opposite direction to the movement of the transfer device by means of a connecting part, the repair of the mask can be performed while maintaining a relative stationary state of the repair part with respect to the repair point of the mask even during the movement of the transfer device.

[0030] The mask repair device according to the present invention has the advantage of significantly reducing the process time for repair because it enables repair of the mask without stopping the movement of the transfer device at the repair point of the mask.

[0031] The mask repair device according to the present invention has the advantage of significantly improving productivity because it can drastically shorten the process time for repair.

[0032] The mask repair device according to the present invention has the advantage of having a very simple structure because the repair part can slide left and right through a linear motor installed in the connecting part.

[0033] The mask repair device according to the present invention has the advantage of being able to stably limit the left and right stroke distance of the repair part through a sensor installed in the connection part.

[0034] The mask repair device according to the present invention has the advantage that the amount or intensity of air sent to the repair point can be varied depending on the condition of foreign substances located on the mask, by providing a plurality of blowers having blowing holes of different diameters. Brief explanation of the drawing

[0036] FIG. 1 is a perspective view illustrating a repair device for a mask according to one embodiment of the present invention. FIG. 2 is an exploded perspective view showing the lifting part, connecting part, and repair part of a mask repair device according to one embodiment of the present invention separated. FIG. 3 is an exploded perspective view showing a lifting section of a mask repair device according to one embodiment of the present invention separated. FIG. 4 is an exploded perspective view showing a portion of the connection part of a repair device for a mask according to one embodiment of the present invention separated. FIG. 5 is an exploded perspective view showing a repair section of a mask repair device according to one embodiment of the present invention separated. FIGS. 6 and 7 are diagrams showing the usage state of a repair device for a mask according to one embodiment of the present invention. Specific details for implementing the invention

[0037] In the following, embodiments disclosed in this specification will be described in detail with reference to the attached drawings; however, identical or similar components are given the same reference number regardless of the drawing symbols, and redundant descriptions thereof will be omitted.

[0038] The suffixes "module" and "part" for components used in the following description are assigned or used interchangeably solely for the sake of ease of drafting the specification, and do not inherently possess distinct meanings or roles. Furthermore, in describing the embodiments disclosed in this specification, detailed descriptions of related prior art are omitted if it is determined that such detailed descriptions could obscure the essence of the embodiments disclosed in this specification. Additionally, the attached drawings are intended only to facilitate understanding of the embodiments disclosed in this specification; the technical concept disclosed in this specification is not limited by the attached drawings and should be understood to include all modifications, equivalents, and substitutions that fall within the spirit and technical scope of the present invention.

[0039] Terms including ordinal numbers, such as first, second, etc., may be used to describe various components, but said components are not limited by said terms. These terms are used solely for the purpose of distinguishing one component from another.

[0040] When it is stated that one component is "connected" or "connected" to another component, it should be understood that while it may be directly connected or connected to that other component, there may also be other components in between. On the other hand, when it is stated that one component is "directly connected" or "directly connected" to another component, it should be understood that there are no other components in between.

[0041] A singular expression includes a plural expression unless the context clearly indicates otherwise.

[0042] In this application, terms such as “comprising” or “having” are intended to specify the existence of the features, numbers, steps, actions, components, parts, or combinations thereof described in the specification, and should be understood as not precluding the existence or addition of one or more other features, numbers, steps, actions, components, parts, or combinations thereof.

[0043] In the drawings, the sizes of the components may be exaggerated or reduced for convenience of explanation. For example, the size and thickness of each component shown in the drawings are depicted arbitrarily for convenience of explanation, so the present invention is not necessarily limited to what is illustrated.

[0044] Where an embodiment can be implemented differently, a specific process sequence may be performed differently from the order described. For example, two processes described consecutively may be performed substantially simultaneously or proceed in the reverse order of the description.

[0045] In the following description, the directions of front, back, left, right, up, and down are all described based on the direction table shown in FIG. 1. The front-back direction may be the X-axis direction, the left-right direction may be the Y-axis direction, and the up-down direction may be the Z-axis direction.

[0047] FIG. 1 is a perspective view illustrating a repair device for a mask according to one embodiment of the present invention.

[0048] FIG. 2 is an exploded perspective view showing the lifting part, connecting part, and repair part of a mask repair device according to one embodiment of the present invention separated.

[0049] FIG. 3 is an exploded perspective view showing a lifting section of a mask repair device according to one embodiment of the present invention partially separated.

[0050] FIG. 4 is an exploded perspective view showing a portion of the connection part of a repair device for a mask according to one embodiment of the present invention separated.

[0051] FIG. 5 is an exploded perspective view showing a repair part of a mask repair device according to one embodiment of the present invention separated.

[0052] FIGS. 6 and 7 are diagrams showing the usage state of a repair device for a mask according to one embodiment of the present invention.

[0054] As illustrated in FIG. 1, a repair device for a mask (10, hereinafter referred to as a repair device) according to one embodiment of the present invention may be a device included in a mask inspection equipment for inspecting defects, flaws, etc. of a mask (not shown).

[0055] The part of the above mask where foreign substances exist can be called a repair point of the above mask.

[0056] The repair points of the above mask may exist in multiple locations on the mask, and their positions may be detected in advance through scanning or the like before repairing the mask.

[0057] The repair device (10) can repair the mask by passing over the repair points on the mask and removing foreign substances present therein.

[0058] The repair device (10) can be installed on a transfer device (not shown) provided in the mask inspection equipment.

[0059] The above transfer device may be a gantry capable of moving in the forward / backward direction or the left / right direction.

[0060] The repair device (10) is coupled to the transfer device and moves together with the transfer device in the forward / backward direction or left / right direction, and can perform repair on the mask by passing through the repair point on the mask.

[0061] Here, the movement of the transfer device may have the same meaning as the overall movement of the repair device (10).

[0062] Referring to FIGS. 1 to 3, the repair device (10) may include a lifting unit (100).

[0063] The lifting unit (100) may be configured to enable vertical movement, i.e., Z-axis movement, of the connecting unit (200) and the repair unit (300) to be described later.

[0064] The lifting section (100) can be located on the left side and form the left side of the repair device (10).

[0065] Referring to FIGS. 2 and 3, the lifting unit (100) may include a housing (110).

[0066] The housing (110) may be a configuration in which each component of the lifting unit (100) is mounted or installed.

[0067] The housing (110) can be formed in the shape of a case with a space formed inside and an open right side.

[0068] More specifically, the housing (110) may be formed to be long in the vertical direction, while the left side and the open right side may be formed wider than the front and rear sides.

[0069] The housing (110) can be positioned in a vertically standing manner.

[0070] An upper support (111) and a lower support (112) may be installed inside the housing (110).

[0071] The upper support (111) may be a bearing formed in the shape of a T-shaped block.

[0072] The upper support member (111) can be fixedly installed at the upper center of the inner left side of the housing (110).

[0073] The lower support (112) may be a bearing formed in the shape of a rectangular block.

[0074] The lower support member (112) can be fixedly installed at the lower center of the inner left side of the housing (110).

[0075] The upper support (111) and the lower support (112) can serve to support the screw shaft (141), which will be described later, so that it can rotate in place.

[0076] Referring to FIGS. 2 and 3, the lifting unit (100) may include a cover (120).

[0077] The cover (120) can be formed into a plate shape that is long in the vertical direction.

[0078] The cover (120) may have a front-to-back width shorter than the front-to-back width of the housing (110).

[0079] The cover (120) can be attached to the housing (110).

[0080] The cover (120) can cover the open right side of the housing (110) in a vertical direction.

[0081] The front end of the cover (120) may be spaced apart from the front end of the housing (110), and the rear end of the cover (120) may be spaced apart from the rear end of the housing (110).

[0082] A rectangular hole is formed in the upper center of the cover (120) so that the interior of the housing (110) can be exposed.

[0083] Referring to FIGS. 2 and 3, the lifting unit (100) may include a lifting unit driving means (130).

[0084] The lifting unit driving means (130) may be configured to provide a driving force for operating the ball screw (140) to be described later.

[0085] The lifting unit driving means (130) can be coupled to and fixed to the top of the housing (110).

[0086] The lifting unit driving means (130) may be a motor having a rotating shaft that can rotate in the forward or reverse direction.

[0087] The rotation axis of the lifting unit driving means (130) may be provided in a form that protrudes downward from the lower part of the lifting unit driving means (130).

[0088] Referring to FIGS. 2 and 3, the lifting unit (100) may include a ball screw (140).

[0089] The ball screw (140) may be configured to raise and lower the lifting plate (160), which will be described later, in an up-and-down direction.

[0090] The ball screw (140) can be installed vertically in the center of the interior of the housing (110).

[0091] The ball screw (140) is connected to the lifting unit driving means (130) and can receive rotational force from the lifting unit driving means (130).

[0092] The ball screw (140) may include a screw shaft (141), a nut (142), and a connecting block (143).

[0093] The screw shaft (141) is a shaft having screw threads formed on its outer surface and can be formed to be long in the vertical direction.

[0094] The screw shaft (141) can be rotatably supported at its upper and lower ends by an upper support (111) and a lower support (112), respectively.

[0095] The screw shaft (141) has its upper end connected to the rotation axis of the lifting unit driving means (130) so that it can receive rotational force in the forward or reverse direction from the lifting unit driving means (130).

[0096] A nut (142) can be connected to the screw shaft (141) in a manner that allows it to be fastened.

[0097] The nut (142) can move up and down along the length direction of the screw shaft (141) when the lifting part driving means (130) is driven.

[0098] That is, the nut (142) can rise to the upper side of the screw shaft (141) or descend to the lower side of the screw shaft (141) depending on the rotation of the screw shaft (141) by the lifting part driving means (130).

[0099] A plurality of steel balls are interposed between the nut (142) and the screw shaft (141) to reduce friction between the nut (142) and the screw shaft (141).

[0100] A connecting block (143) can be attached to the nut (142).

[0101] The connecting block (143) can be fixed to the nut (142) by being joined to it in a manner that wraps around the cylindrical portion of the nut (142).

[0102] Referring to FIGS. 2 and 3, the lifting unit (100) may include a lifting guide (150).

[0103] The lifting guide (150) may be configured to guide the lifting of the lifting plate (160) to be described later.

[0104] The lifting guide (150) may be an LM guide (LINEAR MOTION GUIDE).

[0105] The lifting guide (150) can be installed in an up-and-down direction.

[0106] The lifting guide (150) can be provided in multiple numbers.

[0107] For example, a pair of lifting guides (150) can be installed symmetrically with the ball screw (140) in between.

[0108] The lifting guide (150) may include a lifting guide rail (151) and a lifting guide block (152).

[0109] The lifting guide rail (151) can be formed to be long in the vertical direction.

[0110] The lifting guide rail (151) can be fixedly installed inside the housing (110).

[0111] A lifting guide block (152) can be attached to the lifting guide rail (151).

[0112] A pair of lifting guide blocks (152) can be connected to the lifting guide rail (151) at an upper and lower spacing.

[0113] The lifting guide block (152) can slide up and down along the lifting guide rail (151).

[0114] Referring to FIGS. 2 and 3, the lifting unit (100) may include a lifting plate (160).

[0115] The lifting plate (160) is configured to be directly connected to the connecting part (200) for Z-axis movement of the connecting part (200) and the repair part (300) to be described later, and can be installed to be positioned between the housing (110) and the cover (120).

[0116] The lifting plate (160) can be raised and lowered in the up and down direction when the lifting part driving means (130) is operated.

[0117] The lifting plate (160) can be formed in the shape of a rectangular plate when viewed as a whole.

[0118] On the right side of the lifting plate (160), a recessed space may be formed to the left, and as a result, a recessed surface (161) may be formed inside the recessed space of the lifting plate (160).

[0119] On both the front and rear sides of the sunken surface (161), a step (162) that protrudes to the right and is formed vertically can be formed.

[0120] The depression (161) can be formed between the two steps (162).

[0121] The lifting plate (160) may have rectangular holes formed on the upper and lower sides of the center of the recessed surface (161).

[0122] The lifting plate (160) can be connected and combined with the connecting block (143) and a plurality of lifting guide blocks (152).

[0123] More specifically, the lifting plate (160) can be fixed by being fastened to the connecting block (143) through a separate fastening member while the center of the left side is in contact with the right side of the connecting block (143).

[0124] Additionally, the lifting plate (160) can be fixed by being fastened to the lifting guide block (152) through a separate fastening member while the left side front upper and lower parts and the left side rear upper and lower parts are in contact with the right side of each corresponding lifting guide block (152).

[0125] In the recessed space of the lifting plate (160), a cover (120) coupled to the housing (110) may be positioned, and the cover (120) may face the recessed surface (161) with its left side spaced apart.

[0126] At this time, the front and rear steps (162) of the lifting plate (160) may be protruding further to the right than the right side of the cover (120), and thus, when the lifting plate (160) and the connecting part (200) described later are combined, the cover (120) may not interfere with the connecting part (200).

[0127] The lifting plate (160) is installed as described above so that when the lifting unit driving means (130) is driven, it can be raised and lowered together with the vertical movement of the connecting block (143), and the lifting guide block (152) can help the lifting plate (160) to be raised and lowered smoothly.

[0128] Referring to FIGS. 1 to 2 and FIG. 4, the repair device (10) may include a connecting part (200).

[0129] The connecting part (200) may be configured to connect the lifting part (100) and the repair part (300) to be described later, and also enable left and right movement of the repair part (300) alone, that is, Y-axis movement, separate from movement by the transfer device.

[0130] The connecting part (200) can be positioned in a vertically intersecting manner to the right of the lifting part (100).

[0131] The left side of the connecting part (200) can be connected to the lifting part (100), and the front side of the connecting part (200) can be connected to the repair part (300) to be described later.

[0132] Referring to FIGS. 2 and FIGS. 4, the connecting part (200) may include a fixed plate (210).

[0133] The fixed plate (210) can serve as a base on which each component of the connecting part (200) is installed.

[0134] The fixed plate (210) may have the shape of a rectangular plate with a wide front and rear surface.

[0135] The fixed plate (210) can be located on the front left side of the lifting unit (100).

[0136] The fixed plate (210) can be erected in a form that meets vertically with the lifting part (100).

[0137] Referring to FIGS. 2 and FIGS. 4, the connecting part (200) may include a connecting part driving means (220).

[0138] The connecting part driving means (220) may be configured to provide a driving force that enables left and right movement of the moving plate (260) and the repair part (300) coupled thereto, which will be described later.

[0139] The connecting driving means (220) can be installed in a long left-right direction at the front center of the fixed plate (210).

[0140] That is, the connecting driving means (220) can be provided in a shape that crosses the front center of the fixed plate (210) in a left-right direction.

[0141] The connecting driving means (220) may be a linear motor having a structure such as an induction motor unfolded on a plane cut along the axis.

[0142] The connecting driving means (220) may include a stator (221) and a mover (222).

[0143] The stator (221) can be fixedly installed on the fixing plate (210) with its rear surface facing the front surface of the fixing plate (210).

[0144] The stator (221) can function as a rail that is formed long in the left and right directions.

[0145] A mover (222) can be connected to the stator (221).

[0146] The mover (222) can be coupled to the stator (221) so as to be able to move in a straight line in the left and right directions along the stator (221).

[0147] A portion of the mover (222) may be located inside the stator (221), and the remaining portion may be located at the bottom of the stator (221).

[0148] When the connecting part driving means (220) is driven, the mover (222) can slide and move in the left and right directions according to the guidance of the stator (221).

[0149] Referring to FIGS. 2 and FIGS. 4, the connecting part (200) may include a moving guide (230).

[0150] The movement guide (230) may be configured to guide the left and right movement of the movement plate (260) to be described later.

[0151] The movement guide (230) may be a linear motion guide (LM guide) just like the lifting guide (150).

[0152] The movement guide (230) can be installed in a long left-right direction.

[0153] The movement guide (230) can be provided in multiple numbers.

[0154] For example, a pair of moving guides (230) may be installed vertically symmetrically with the connecting driving means (220) in between.

[0155] The movement guide (230) may include a movement guide rail (231) and a movement guide block (232).

[0156] The moving guide rail (231) can be formed to be long in the left and right directions.

[0157] The moving guide rail (231) can be fixedly installed on the front of the fixed plate (210).

[0158] A moving guide block (232) can be attached to the moving guide rail (231).

[0159] The moving guide block (232) can slide up and down along the moving guide rail (231).

[0160] Referring to FIGS. 2 and FIGS. 4, the connection part (200) may include a sensor (240).

[0161] The sensor (240) may be provided to reliably limit the left and right movement distance of the moving plate (260) described later and the repair part (300) coupled thereto and movable together.

[0162] The sensor (240) can be fixedly installed on the upper front surface of the fixed plate (210).

[0163] The sensors (240) can be provided as a pair of left and right sensors side by side.

[0164] For example, the sensors (240) can be fixed such that one protrudes from the upper left side of the front of the fixed plate (210), and the other can be fixed such that the other protrudes from the upper right side of the front of the fixed plate (210).

[0165] The sensor (240) can detect a protruding piece (262) installed on a moving plate (260) to be described later, thereby limiting the left and right movement of the moving plate (260) to a certain position.

[0166] Referring to FIGS. 2 and FIGS. 4, the connecting portion (200) may include a side plate (250).

[0167] The side plate (250) may be a rectangular plate facing the lifting part (100).

[0168] The side plate (250) may have a rectangular hole formed in the upper center.

[0169] The side plate (250) can be combined with the fixed plate (210) so as to be connected to the left end of the fixed plate (210).

[0170] The side plate (250) can be formed with wide left and right sides.

[0171] The side plate (250) can be erected vertically and fixedly installed in a manner orthogonal to the fixed plate (210).

[0172] The side plate (250) can be connected to the lifting plate (160) while facing the cover (120).

[0173] More specifically, the side plate (250) can be directly coupled to the lifting plate (160) by being fastened through a separate fastening member while the left side front and rear portions are respectively abutted against the front side step (162) and the rear side step (162) of the lifting plate (160), and at this time, the side plate (250) can be spaced apart from the cover (120) so that they do not interfere with each other.

[0174] As the side plate (250) is connected to the lifting plate (160), the lifting section (100) and the connecting section (200) can be connected to each other, and accordingly, the connecting section (200) can be moved in the Z-axis direction by being lifted together with the lifting plate (160).

[0175] Referring to FIGS. 2 and FIGS. 4, the connecting part (200) may include a moving plate (260).

[0176] The moving plate (260) is configured to be movable in the left and right directions relative to the fixed plate (210), and serves as a base on which the repair part (300), to be described later, is installed, and at the same time, it can transmit the driving force of the connecting part driving means (220) to the repair part (300) so that the repair part (300) can move left and right separately from the transfer device.

[0177] The moving plate (260) can be formed in the shape of a rectangular plate in which the vertical length is longer than the horizontal length.

[0178] The moving plate (260) can have a wide front and rear surface and can be positioned in a vertically upright state.

[0179] The moving plate (260) can be connected and combined with the connecting driving means (220) and a pair of moving guides (230).

[0180] More specifically, the moving plate (260) can be fixed by being fastened to the moving member (222) through a separate fastening member, with a portion slightly offset downward from the center of the rear facing the front of the moving member (222).

[0181] Additionally, the moving plate (260) can be fixed by being fastened to the moving guide block (232) through a separate fastening member while the rear upper and rear lower portions are in contact with the front of each corresponding moving guide block (232).

[0182] At this time, the moving plate (260) may be spaced apart from the front of the stator (221) so as not to interfere.

[0183] The moving plate (260) is installed as described above so that when the connecting part driving means (220) is driven, it can move in the left and right directions together with the left and right movement of the mover (222), and the moving guide block (232) can help to facilitate the smooth left and right movement of the moving plate (260).

[0184] A flange (261) can be attached to the movable plate (260).

[0185] The flange (261) can be fastened and joined to the top of the movable plate (260).

[0186] The flange (261) can be formed long in the left and right directions and can also protrude stepwise toward the rear side of the movable plate (260).

[0187] A protruding piece (262) may be installed on the flange (261).

[0188] The protruding piece (262) may be a small piece of rectangular shape.

[0189] The protruding piece (262) can be fixedly installed at the top center of the flange (261).

[0190] The protruding piece (262) can be detected by the sensor (240).

[0191] For example, the protruding piece (262) may be detected by the left sensor (240) among a pair of sensors (240) installed on the fixed plate (210) according to the movement of the moving plate (260) to the left, or by the right sensor (240) installed on the fixed plate (210) according to the movement of the moving plate (260) to the right, and the left and right movement of the moving plate (260) may be limited to a line where the protruding piece (262) does not pass past each sensor.

[0192] Accordingly, the moving plate (260) can move accurately within a certain range, with the stroke distance that can be moved in the left and right directions stably limited.

[0193] Referring to FIGS. 1 to 2 and FIG. 5, the repair device (10) may include a repair section (300).

[0194] The repair part (300) may be a configuration provided to directly remove foreign substances present at the repair point of the mask.

[0195] The repair unit (300) can remove foreign substances from the repair point of the mask by moving in the opposite direction to the direction of movement of the transfer device through the connection unit when the repair unit passes the repair point of the mask by moving in the forward / backward or left / right direction of the transfer device, and this will be explained in more detail later.

[0196] The repair unit (300) can be connected to the lifting unit (100) via the connecting unit (200), and accordingly, when the lifting unit (100) is driven, it can be raised and lowered in the up and down direction together with the connecting unit (200) to move closer to or further away from the mask side.

[0197] The repair unit (300) may be movable in at least one of the forward / backward direction and the left / right direction by means of the connecting unit (200) separately from the transfer device.

[0198] For example, the repair part (300) may be connected to the moving plate (260) of the connecting part (200) which is movable in the left and right directions, and may be movable in the left and right directions.

[0199] Referring to FIGS. 2 and FIGS. 5, the repair unit (300) may include a vision unit (310).

[0200] The vision unit (310) may be configured to verify or inspect the repair points of the mask by photographing the repair points of the mask.

[0201] The vision unit (310) may include a lens barrel (311), a lens (312) provided at the bottom of the lens barrel (311), at least one camera (313) provided at the top of the lens barrel (311), and a light (314) for providing light when the camera (313) takes a picture.

[0202] The vision unit (310) can be coupled to the moving plate (260).

[0203] The vision unit (310) can be fixedly installed on the movable plate (260) by being fastened through a separate fastening member with the central rear surface of the tube (311) facing the front surface of the movable plate (260).

[0204] The vision unit (310) is configured as described above and can be capable of capturing the repair point of the mask, thereby enabling verification of whether the repair by the repair unit (320) described later has been properly performed.

[0205] Referring to FIGS. 2 and FIGS. 5, the repair section (300) may include a repair unit (320).

[0206] The repair unit (320) can be connected to the lower part of the vision unit (310).

[0207] The repair unit (320) may be configured to perform direct repair on the mask.

[0208] That is, the repair unit (320) may be configured to directly remove foreign substances present at the repair point of the mask in one way.

[0209] The repair unit (320) may include a frame (321).

[0210] The frame (321) can serve as a frame that allows the repair unit (320) to be mounted on the vision unit (310), and also allows the blower (322, 323) and suction (324), which will be described later, to be installed at an angle-adjustable rate.

[0211] The frame (321) may include two plate-shaped frames spaced apart vertically and having a hollow into which the lens (312) side of the vision unit (310) is inserted, and a connecting frame connecting both sides of the two plate-shaped frames.

[0212] The frame (321) can be fitted onto the lens (312) side of the vision unit (310) and fixed to the vision unit (310).

[0213] The rear end of the frame (321) can be fastened through a separate fastening member while being placed against the lower center of the movable plate (260).

[0214] The repair unit (320) may include a blower (322, 323).

[0215] A blower (322, 323) is configured to apply air to a certain location on the mask, and may have a blowing hole formed inside.

[0216] The blower (322, 323) allows air supplied through an unillustrated air supply unit to be discharged through the blowing hole of the blower (322, 323) so that air can be applied to the repair point of the mask.

[0217] The blower (322, 323) can blow air onto foreign matter present at the repair point of the mask to directly remove the foreign matter from the mask.

[0218] The blower (322, 323) is rotatably installed on the left side of the center of the frame (321) so that the angle of the repair point of the mask can be adjusted.

[0219] The blower (322, 323) may be provided in multiple units.

[0220] For example, the blower (322, 323) may include a first blower (322) and a second blower (323).

[0221] The first blower (322) and the second blower (323) may be installed in a tilted position so as to face the repair point of the mask.

[0222] The first blower (322) may be located further outward than the second blower (323).

[0223] The first blower (322) and the second blower (323) may each have blowing holes of different diameters.

[0224] For example, the diameter of the blowing hole of the first blower (322) may be formed to be larger than the diameter of the blowing hole of the second blower (323), and accordingly, depending on the condition of foreign matter located on the mask, the first blower (322) or the second blower (323) may be selectively used or both may be used to vary the amount or intensity of air sent to the repair point of the mask.

[0225] The repair unit (320) may include a suction (324).

[0226] The suction (324) may be configured to suck up foreign substances present at the repair points of the mask when they are blown away by the blower (322, 323).

[0227] The suction (324) is rotatably installed on the right side of the center of the frame (321) so that the angle of the repair point of the mask can be adjusted.

[0228] The suction (324) can be located on the opposite side of the blower (322, 323).

[0229] The suction (324) is connected to a suction device not shown and can suck up foreign substances present at the repair point of the mask.

[0230] Referring to FIGS. 6 and 7, when the repair device (10) passes the repair point of the mask during movement in the forward / backward or left / right direction of the transfer device, the connecting part driving means (220) can be driven so that the moving plate (260) and the repair part (300) fixedly installed thereon move in the opposite direction to the movement direction of the transfer device.

[0231] For example, as shown in FIG. 6, the repair device (10) can be moved from left to right by the transfer device in a state where the movable plate (260) and the repair part (300) fixedly installed thereon are located to the right of the fixed plate (210) (a state where the protruding piece is detected by the right sensor).

[0232] Additionally, as shown in FIG. 7, the repair device (10) can be moved from right to left by the transfer device in a state where the movable plate (260) and the repair part (300) fixedly installed thereon are located on the left side of the fixed plate (210) (a state where the protruding piece is detected by the left sensor).

[0233] When the repair part (300) passes the repair point of the mask during movement of the repair device (10) as shown in FIG. 6, the connection part driving means (220) is driven, and as the connection part driving means (220) is driven, the moving plate (260) and the repair part (300) fixedly installed thereon move from right to left as shown by the right arrow in FIG. 6.

[0234] Additionally, when the repair part (300) passes the repair point of the mask during movement of the repair device (10) as in FIG. 7, the connection part driving means (220) is driven in the opposite direction as in FIG. 6, and as the connection part driving means (220) is driven in the opposite direction as in FIG. 6, the moving plate (260) and the repair part (300) fixedly installed thereon move from left to right as in the left arrow of FIG. 7.

[0235] At this time, as shown in FIG. 6, the movement of the movable plate (260) and the repair part (300) fixedly installed thereon by the connecting part driving means (220) from right to left can proceed at the same speed as the movement of the repair device (10) from left to right by the transfer device, and as shown in FIG. 7, the movement of the movable plate (260) and the repair part (300) fixedly installed thereon by the connecting part driving means (220) from left to right can proceed at the same speed as the movement of the repair device (10) from right to left by the transfer device.

[0236] That is, the transfer device and the repair unit (300) move in opposite directions at the same speed from the repair point of the mask, and accordingly, the repair unit (300) is in a relatively stationary state with respect to the repair point of the mask, so that repair to remove foreign substances can be performed right above the repair point of the mask even during the overall movement of the repair device (10) by the transfer device, and since repair of the mask is possible without stopping the movement of the transfer device at the repair point of the mask, a significant effect can be achieved in that the process time for repair can be significantly shortened.

[0238] As described above, although the present invention has been explained by limited embodiments and drawings, the present invention is not limited thereto and it is obvious that various modifications and variations are possible within the scope of the technical spirit of the present invention and the equivalent scope of the claims described below by those skilled in the art to which the present invention belongs. Explanation of the symbols

[0240] 10: Mask repair device 100: Lifting section 110: Housing 111: Upper support 112: Lower support 120: Cover 130: Elevator driving means 140: Ball screw 141: Screw shaft 142: Nut 143: Connection Block 150: Elevator Guide 151: Lifting guide rail 152: Lifting guide block 160: Lifting plate 161: Depression surface 162: Step 200: Connection part 210: Fixed plate 220: Connecting part driving means 221: Stator 222: Mover 230: Travel Guide 231: Moving guide rail 232: Movement Guide Block 240: Sensor 250: Side plate 260: Moving plate 261: Flange 262: Protruding piece 300: Repair Department 310: Vision Unit 311: Telescope tube 312: Lens 313: Camera 314: Lighting 320: Repair Unit 321: Frame 322: 1st Blower 323: 2nd Blower 324: Suction

Claims

Claim 1 A repair device for a mask, installed on a transfer device capable of moving in a forward / backward direction or a left / right direction to perform repair on a repair point on a mask, comprising: a lifting part connected to the transfer device; a connecting part connected to the lifting part and capable of moving up and down through the lifting part; and a repair part connected to the connecting part for removing foreign matter from the repair point; wherein the repair part is capable of moving in at least one of the forward / backward direction and the left / right direction by the connecting part. Claim 2 A repair device for a mask according to claim 1, wherein when the repair part passes the repair point by moving the transfer device in the forward / backward or left / right direction, the repair part moves in the opposite direction to the movement direction of the transfer device by the connecting part to remove foreign matter at the repair point. Claim 3 In paragraph 2, the above transfer device and the above repair part are a repair device for a mask, wherein they move in opposite directions at the same speed from the repair point. Claim 4 A repair device for a mask according to paragraph 3, wherein the repair part is capable of repairing the repair point while remaining stationary relative to the repair point as it moves in opposite directions at the same speed as the transfer device at the repair point. Claim 5 In claim 1, the connecting part comprises: a fixed plate; a connecting part driving means including a fixer installed long in the left-right direction on the fixed plate and a mover driven to move in the left-right direction along the fixer; a moving guide including a moving guide rail installed long in the left-right direction on the fixed plate spaced apart from the connecting part driving means and a moving guide block guided in the left-right direction along the moving guide rail; a side plate fixedly installed on the side of the fixed plate to which the lifting part is coupled; and a moving plate coupled to the mover and the moving guide block and capable of moving together in the left-right direction according to the movement of the mover; wherein the repair part is coupled to the moving plate and capable of moving together in the left-right direction with the moving plate, a repair device for a mask. Claim 6 A repair device for a mask according to claim 5, wherein a pair of sensors are installed on both the left and right sides of the fixed plate, a protruding piece is installed on the movable plate that is detected by the pair of sensors, and the movable plate is limited in the stroke distance that can be moved in the left and right directions as the protruding piece is detected by the pair of sensors. Claim 7 A repair device for a mask according to claim 1, wherein the repair part includes a blower that removes foreign matter by releasing air to the repair point, and the blower is provided in a plurality of numbers, each having a blowing hole of a different diameter.

Images