Light detection and ranging (LIDAR) system including a modular assembly

Abstract

A modular LIDAR sensor system comprises a seed laser configured to output a beam, a modular modulator coupled to receive the beam output from the seed laser and modulate the beam to generate a modulated beam, a modular amplifier configured to receive the modulated beam from the modular modulator and generate an amplified beam, and a modular transceiver chip coupled to the modular modulator and the modular amplifier, wherein the modular transceiver chip is configured to emit the beam vertically from a first surface of the modular transceiver chip through an optical window and to receive a beam reflected from a target through the optical window.

Description

Technology Field

[0001] The present disclosure generally relates to a modular assembly of components for a light detection and distance measurement (LIDAR) system, more specifically to a LIDAR system comprising a modular modulator, a modular amplifier, and a modular transceiver chip. Background Technology

[0002] LIDAR sensor systems are used in a wide range of applications, from elevation measurement to imaging and collision avoidance. The design and implementation of LIDAR sensor systems may utilize Optical Integrated Circuits (PICs) or integrated optical circuits, which are chips containing photonic components. In the past, there have been attempts to incorporate an increasing number of LIDAR system photonic components into a single PIC. However, these attempts suffer from complexity and significantly reduced manufacturing yields for such complex chips. Other prior art approaches have utilized fiber optic connectors to combine the various components of LIDAR systems. The drawbacks of using fiber optic cable connectors include the configuration complexity and alignment issues arising from the use of fibers and connectors, in addition to the additional space required. Therefore, there is a need for a method to build LIDAR systems with high yield and reduced complexity. means of solving the problem

[0003] Embodiments of the present disclosure relate to a modular architecture for a light detection and distance measurement (LIDAR) sensor system of a vehicle, more specifically, to a LIDAR sensor system composed of modular components and methods for configuring the components for cooperation and communication. According to one aspect of the subject matter described in the present disclosure, the LIDAR sensor system comprises a seed laser configured to output a beam, a modular modulator configured to receive a beam output from the seed laser and modulate the beam to generate a modulated beam, a modular amplifier configured to receive the modulated beam from the modular modulator and generate an amplified beam—the modular amplifier comprises a specific semiconductor optical amplifier having multiple apertures—and a modular transceiver chip coupled to the modular modulator and the modular amplifier—the transceiver chip configured to emit the beam perpendicularly from a first surface of the transceiver chip through an optical window and to receive a beam reflected from a target through the optical window.

[0004] These and other embodiments may each optionally include one or more of the following features. For example, the features may include a seed laser comprising a laser having a grating structure that provides optical feedback to output a beam, or a lens that couples the beam to a modular modulator—the lens having a pitch in the range of 450 to 550 micrometers. For example, the features may also include the modular modulator performing in-phase and orthogonal modulation or frequency modulation to generate a modulated beam. In another example, the features may include the modular modulator and the seed laser being integrated into a single chip to form a seed laser assembly. In another feature, the seed laser assembly is mounted on a first submount, and the modular transceiver chip coupled to the modular modulator is mounted on a second submount to align the height of the seed laser assembly with the height of the modular transceiver chip for optical coupling. In some features, the modular amplifier includes a semiconductor optical amplifier or a tapered semiconductor optical amplifier configured to receive a modulated beam from a modular modulator and generate an amplified beam through stimulated emission. For example, in one embodiment, the modular amplifier includes one of indium phosphide (InP), gallium arsenide (GaAs), silicon nitride (SiN), indium arsenide (InAs), gallium nitride (GaN), or indium antimonide (InSb). Features may also include that a particular semiconductor optical amplifier has additional material for bow management on its sides.Additionally, the features may further include a feature in which the modular amplifier comprises a first bar mounted on a first part of the modular amplifier and a second bar mounted on a second part of the modular amplifier, wherein the second bar has a coefficient of thermal expansion matching the coefficient of thermal expansion of the first bar, and the first bar and the second bar are configured to lower the junction temperature of the modular amplifier, or the first bar and the second bar are 16 aperture bars and the modular amplifier comprises 16 tapered semiconductor optical amplifiers. For example, the features may include a modular modulator optically coupled to the modular amplifier by a lens array, or a feature in which the lens array compensates for a height difference between a first height of the submount of the modular modulator and a second height of the submount of the modular amplifier. The features may also include a feature in which the modular modulator, the modular amplifier, and the modular transceiver chip are fully tested before integration to enable a high yield. Other features may include a splitter that couples a modular modulator to a modular amplifier, and the splitter may include a 1-to-16 splitter having a pitch in the range of 450 to 550 micrometers. For example, the features may include a splitter comprising a lens array that couples a modular modulator to a modular amplifier and a plurality of 1-to-4 splitter chips having a pitch in the range of 450 to 550 micrometers, wherein the lens array comprises four lenses and has a pitch in the range of 450 to 550 micrometers. Additionally, the features may include a modular modulator, a modular amplifier, and a modular transceiver chip that are integrated horizontally or vertically. Additionally, the features may include a modular modulator, a modular amplifier, and a modular transceiver chip that are part of an autonomous vehicle or part of an autonomous vehicle control system.

[0005] A vehicle LIDAR sensor system included according to other aspects of the subject matter described in this disclosure comprises a seed laser configured to output a beam, a modulator coupled to the seed laser to receive a beam from the seed laser and modulate said beam to generate a modulated beam, an amplifier coupled to the modulator to receive the modulated beam from the modulator and generate an amplified beam, and a transceiver coupled to the modulator and the amplifier—the transceiver is configured to process and emit an amplified beam in a predetermined direction to the transceiver via surface emission and to receive and process a beam reflected from an object in the environment where the vehicle is located. In some embodiments of this disclosure, an autonomous vehicle control system may include a LIDAR sensor system as described herein and one or more processors configured to use the reflected beam to determine at least one of a distance to an object or a speed of an object and to control the operation of the autonomous vehicle in response to at least one of said distance or speed. In some embodiments of the present disclosure, an autonomous vehicle may include a LIDAR sensor system, a steering system, a braking system, and a vehicle controller as described herein. The vehicle controller may include one or more processors configured to determine at least one of a distance to an object or a speed of an object using a reflected beam, and to control the operation of at least one of the steering system and the braking system in response to at least one of the distance or speed.

[0006] These and other embodiments may each optionally include one or more of the following features. For example, the features may include a transceiver comprising an optical window that is a passage for emitting an amplified beam and receiving a reflected beam. The features may also include surface emission comprising emitting the amplified beam perpendicularly from the surface of the transceiver. For example, the features may also include a feature in which the transceiver processes a beam reflected from an object to detect a photocurrent and couples the detected photocurrent to a transimpedance amplifier. In another example, the features may include a modulator and a seed laser being integrated into a seed laser assembly, the seed laser assembly being mounted on a first submount, and a transceiver being mounted on a second submount to align the height of the seed laser and the height of the transceiver for optical coupling. In another example, the features may include a feature in which the amplifier comprises a semiconductor optical amplifier, and the semiconductor optical amplifier is integrated with a U-shaped passive component for optical amplification. In another example, the features may include a tapered semiconductor optical amplifier configured to receive a modulated beam from a modulator and generate an amplified beam through stimulated emission. For example, the amplifier may include at least one of indium phosphide (InP), gallium arsenide (GaAs), indium arsenide (InAs), gallium nitride (GaN), indium antimonide (InSb), or rare earth doping materials. For example, the features may include a modulator being optically coupled to the amplifier through a first lens array, said first lens array compensating for a height difference between a first height of the modulator's submount and a second height of the amplifier's submount, and the amplifier being optically coupled to a transceiver through a second lens array. For example, the first lens array, the amplifier, and the second lens array are integrated into a single chip.In another example, other features may include a splitter that couples the output of a modulator to the input of an amplifier, and the splitter may include a 1-to-16 splitter having a pitch in the range of 450 to 550 micrometers. In another example, the features may also include a first lens array that couples the output of the splitter to the input of an amplifier, and the splitter may include a plurality of 1-to-4 splitter chips having a pitch in the range of 450 to 550 micrometers, and the first lens array may include four lenses having a pitch in the range of 450 to 550 micrometers. Additionally, the features may include the modulator, amplifier, and transceiver each having a modular structure and being horizontally aligned for optical coupling, and the optical ports of the modulator, amplifier, and transceiver each horizontally aligned for optical coupling having a matching pitch, a matching optical mode size, and a matching facet angle. In another example, the features may include the modulator, amplifier, and transceiver each having a modular structure and being vertically aligned for optical coupling.

[0007] Those skilled in the art will understand that this overview is merely illustrative and is not intended to be limiting in any way. Any of the features described herein may be used in combination with any other features, and any subset of such features may be used in combination according to various embodiments. Other aspects, original features, and advantages of the devices and / or processes described herein, defined only by the claims, will become apparent in the detailed description mentioned herein and considered together with the accompanying drawings. Furthermore, the language used in this disclosure has been chosen primarily for readability and illustrative purposes and is not intended to limit the scope of the subject matter disclosed herein. Brief explanation of the drawing

[0008] In the attached drawings, various embodiments are provided as examples rather than limitations, and similar reference numbers refer to similar elements. FIG. 1a is a block diagram showing an example of a system environment of an autonomous vehicle according to some embodiments. FIG. 1b is a block diagram showing an example of a system environment of an autonomous commercial truck vehicle according to some embodiments. FIG. 1c is a block diagram showing an example of a system environment of an autonomous commercial truck vehicle according to some embodiments. FIG. 1d is a block diagram showing an example of a system environment of an autonomous commercial truck vehicle according to some embodiments. FIG. 2 is a block diagram showing an example of a LIDAR sensor system for an autonomous vehicle according to some embodiments. FIG. 3 is a high-level block diagram showing exemplary components of a LIDAR sensor system for an autonomous vehicle according to some embodiments. FIG. 4 is a high-level block diagram showing exemplary modular components of a horizontally integrated LIDAR sensor system for an autonomous vehicle according to some embodiments. FIG. 5 is a high-level block diagram showing exemplary modular components of a horizontal or vertical integrated LIDAR sensor system of an autonomous vehicle according to some embodiments. FIG. 6 is a high-level block diagram showing an exemplary plan view of modular components of a LIDAR sensor system of an autonomous vehicle according to some embodiments. FIG. 7 is a cross-sectional view showing an exemplary integrated chip package of a modular LIDAR sensor system for an autonomous vehicle according to some embodiments. It should be understood that alternative embodiments of the structures and methods exemplified in this specification may be used without departing from the principles described herein. Specific details for implementing the invention

[0009] According to certain embodiments, the modular LIDAR sensor system (300) includes a seed laser (308), a modular modulator (306), a modular amplifier (304), and a modular transceiver chip (302). The LIDAR sensor system (300) is advantageous in that each of these components (302, 304, 306, 308) has a modular design. This modular design is particularly advantageous in that each of the components is an individual integrated circuit, and the individual integrated circuits are optically coupled by microlenses. Due to this modularity, the modular LIDAR sensor system (300) overcomes the disadvantages of the aforementioned prior art, as each individual integrated circuit has a much higher yield for each of the modular components. Through this modular design, the efficiency of each component can be tested individually in various aspects. Additionally, this modular design also provides greater configuration flexibility by allowing different versions of any configuration of the modular modulator (306), modular amplifier (304), or modular transceiver chip (302) to be used with other modular components. In some embodiments, the LIDAR sensor system (300) may also include an integrated chip package for the LIDAR sensor that defines the configuration of optical components to provide a path for optical signals transmitted into and out of the LIDAR sensor and to dissipate heat generated by the optical components for enhanced performance. The modular transceiver chip (302) may be configured to emit a beam vertically from a first surface of the modular transceiver chip (302) through an optical window and to receive a beam reflected from a target through the optical window.

[0010] In the following description, for illustrative purposes, many specific details are mentioned to provide a complete understanding of the various aspects of different exemplary embodiments. It should be noted that any specific exemplary embodiment may, in various cases, be implemented without all specific details and / or by variations, permutations, and combinations of the various features and elements described herein. We will now refer to the embodiments of the present disclosure in detail, examples of which are illustrated in the accompanying drawings. Where possible, the same reference numbers are used in the drawings and description to refer to identical or similar parts.

[0011] Additionally, relative terms such as "bottom," "bottom," "back," or "below," and "top," "top," "front," or "up" may be used in this specification to describe the relationship between one element and another as illustrated in the drawings. Relative terms are to be understood as intended to include directions of the device other than those expressed in the drawings. For example, if one of the devices in the drawings is flipped over, elements described as being on the "bottom" side of the other elements will face the "top" side of the other elements. Thus, the exemplary term "bottom" may include both "bottom" and "top" directions depending on the specific direction of the drawings. Similarly, if one of the devices in the drawings is flipped over, elements described as being "below" or "bottom" of the other elements will face "up" of the other elements. Thus, the exemplary terms "bottom" or "bottom" may include both up and down directions.

[0012] Referring to drawings in which similar numbers indicate similar parts, FIG. 1a illustrates an example of a system environment (100A) of an autonomous vehicle (111A) in which various technologies disclosed herein may be implemented. For example, the vehicle (111A) may include a powertrain (102) comprising a prime mover (104) that is driven by an energy source (106) and can provide power to a drivetrain (108), and a control system (110) comprising a direction control unit (112), a powertrain control unit (114), and a braking control unit (116). The vehicle (111A) may be implemented as any number of other types of vehicles, including vehicles capable of transporting people and / or cargo and capable of driving on land, and it should be understood that the aforementioned components (102-116) may vary significantly depending on the type of vehicle in which these components are utilized.

[0013] For the sake of simplification, the embodiments described below focus on wheeled land vehicles such as passenger cars, vans, trucks, buses, etc. In these embodiments, the prime mover (104) may include one or more electric motors and / or internal combustion engines (among others). The energy source (106) may include, for example, a fuel system (providing, e.g., gasoline, diesel, hydrogen, etc.), a battery system, solar panels, or other renewable energy sources, and / or a fuel cell system. The drivetrain (108) comprises wheels and / or tires, along with a transmission and / or any other mechanical drive components suitable for converting the output of the prime mover (104) into vehicle motion, one or more brakes configured to controlly stop or decelerate the vehicle (111A), and directional or steering components suitable for controlling the trajectory of the vehicle (111A) (e.g., a rack-and-pinion steering linkage that pivots around a generally perpendicular axis to change the angle of the rotation planes of the wheels relative to the longitudinal axis of the vehicle). In some embodiments, combinations of powertrains and energy sources may be used (e.g., in the case of electric / gas hybrid vehicles), and in other embodiments, a plurality of electric motors (e.g., dedicated to individual wheels or axles) may be used as prime movers. In the case of a hydrogen fuel cell embodiment, the prime mover (104) may comprise one or more electric motors, and the energy source (106) may comprise a fuel cell system activated by hydrogen fuel.

[0014] The direction control unit (112) may include one or more actuators and / or sensors for controlling direction or steering components to cause the vehicle (111A) to follow a desired trajectory and for receiving feedback from the steering components. The power train control unit (114) may be configured to control the speed and / or direction of the vehicle (111A) by controlling the output of the power train (102), for example, by controlling the output of the prime mover (104) and by controlling the gears of the transmission within the drivetrain (108). The braking control unit (116) may be configured to control one or more brakes, for example, disc or drum brakes coupled to the wheels of the vehicle, to decelerate or stop the vehicle (111A).

[0015] All-terrain or track vehicles and other vehicle types, including but not limited to construction equipment, may utilize different powertrains, drivetrains, energy sources, direction control units, powertrain control units, and supply control units. Additionally, in some embodiments, some of the components may be combined, for example, where the direction control of the vehicle is handled primarily by changing the output of one or more prime movers. Accordingly, the embodiments disclosed herein are not limited to the application of the technologies disclosed herein particularly to autonomous land vehicles.

[0016] In the illustrated embodiments, various levels of autonomous control, including full or semi-autonomous control of a vehicle (111A), may be implemented in a vehicle control system (120), which comprises one or more processors (122) and one or more memories (124), wherein each processor (122) may be configured to execute program code instructions (126) stored in the memory (124). The processor(s) may include, for example, graphics processing units ("GPU(s)") and / or central processing units ("CPU(s)").

[0017] The sensors (130) may include various sensors suitable for collecting information from the surrounding environment of the vehicle to be used to control the operation of the vehicle (111A). For example, the sensors (130) may include one or more detection and distance measuring sensors (e.g., at least one of a radar sensor (134) and a LIDAR sensor (136)), a 3D position sensor (138), for example, a satellite navigation system such as GPS (Global Positioning System), GLONASS (Global Naya Navigazionnaya Sputnikovaya Sistema or Global Navigation Satellite System), BeiDou Navigation Satellite System (BDS), Galileo, Compass, etc. The 3D position sensor (138) may be used to determine the position of the vehicle on Earth using satellite signals. The sensors (130) may optionally include a camera (140) and / or an IMU (Inertial Measurement Unit) (142). The camera (140) may be a monographic or stereographic camera and may record still and / or video images. The IMU (142) may include multiple gyroscopes and accelerometers capable of detecting linear and rotational motion of the vehicle (111A) in three directions. One or more encoders (144), such as wheel encoders, may be used to monitor the rotation of one or more wheels of the vehicle (111A). In some embodiments, the LIDAR sensor (136) may include the structure of a silicon photonics device for a coherent LIDAR system as described in detail below.

[0018] The outputs of the sensors (130) may be provided to a set of control subsystems (150) including a localization subsystem (152), a perception subsystem (154), a planning subsystem (156), and a control subsystem (158). The localization subsystem (152) serves to precisely determine the position and orientation (also referred to as “pose” or “pose estimation”) of the vehicle (111A) primarily within its surrounding environment and generally within some reference frames. The perception subsystem (154) serves to detect, track, and / or identify objects within the environment surrounding the vehicle (111A). Machine learning models according to some embodiments may be utilized for tracking objects. The planning subsystem (156) serves to plan the movement trajectory or path of the vehicle (111A) over some time frames when a desired destination is given, as well as stationary and moving objects within the environment. Machine learning models according to some embodiments may be utilized for planning the vehicle trajectory. The control subsystem (158) primarily serves to generate appropriate control signals to control various control units of the vehicle control system (120) to implement the planned trajectory of the vehicle (111A). Similarly, a machine learning model may be utilized to generate one or more signals to control the autonomous vehicle (111A) to implement the planned trajectory.

[0019] It will be understood that the set of components for the vehicle control system (120) illustrated in FIG. 1a is merely one example. Individual sensors may be omitted in some embodiments. Additionally, or alternatively, in some embodiments, multiple sensors of the same type illustrated in FIG. 1a may be used for redundancy and / or to cover different areas around the vehicle. Furthermore, additional sensors of other types may exist in addition to those described above to provide actual sensor data related to the operation and environment of the wheeled land vehicle. Similarly, control subsystems of other types and / or combinations may be used in other embodiments. Additionally, although the subsystems (152-158) are depicted as being separate from the processor (122) and memory (124), in some embodiments, some or all of the functions of the subsystems (152-158) may be implemented as program code instructions (126) that reside in one or more memories (124) and are executed by one or more processors (122), and it should be understood that these subsystems (152-158) may be implemented using the same processor(s) and / or memory in some cases. The subsystems may be implemented at least partially using various dedicated circuit logic, various processors, various field programmable gate arrays ("FPGA"), various application integrated circuits ("ASIC"), various real-time controllers, etc., and as previously mentioned, many subsystems may utilize circuits, processors, sensors and / or other components. Furthermore, various components of the vehicle control system (120) may be networked in various ways.

[0020] In some embodiments, the vehicle (111A) may also include an auxiliary vehicle control system (not illustrated) that can be used as a redundant or backup control system for the vehicle (111A). In some embodiments, the auxiliary vehicle control system may fully operate the autonomous vehicle (111A) when an adverse event occurs to the vehicle control system (120), whereas in other embodiments, the auxiliary vehicle control system may have only limited functionality, for example, to stop the vehicle (111A) in a controlled manner in response to an adverse event detected by the main vehicle control system (120). In other embodiments, the auxiliary vehicle control system may be omitted.

[0021] Generally, different architectures including various combinations of software, hardware, circuit logic, sensors, networks, etc., may be used to implement the various components illustrated in FIG. 1a. Each processor may be implemented, for example, as a microprocessor, and each memory may represent random access memory ("RAM") devices including primary storage devices, as well as any auxiliary levels of memory, for example, cache memories, non-volatile or backup memories (e.g., programmable or flash memories), read-only memories, etc. Additionally, each memory may be considered to include any storage capacity used as virtual memory stored in a mass storage device or another computer controller, as well as any cache memory of the processor, which is a memory storage device physically located elsewhere in the vehicle (111A). One or more processors (122) illustrated in FIG. 1a, or completely separate processors, may be used to implement additional functions in the vehicle (111A) for purposes other than autonomous control, for example, control of entertainment systems, operation of doors, lights, amenities, etc.

[0022] Additionally, for additional storage, the vehicle (111A) may include one or more mass storage devices, for example, among others, a removable disk drive, a hard disk drive, a direct access storage device ("DASD"), an optical drive (e.g., a CD drive, a DVD drive, etc.), a solid-state storage drive ("SSD"), a network-connected storage device, a storage area network and / or a tape drive, etc.

[0023] Additionally, the vehicle (100) may include a user interface (118) that enables the vehicle (111A) to receive multiple inputs from a user or operator and generate outputs for said user or operator, such as one or more displays, touchscreens, voice and / or gesture interfaces, buttons and other haptic controls. In other cases, user input may be received through another computer or electronic device, for example, through an app on a mobile device or through a web interface.

[0024] Additionally, the vehicle (111A) may include one or more network interfaces, such as a network interface (162) suitable for communication with one or more networks (176) to allow the transmission of information with other computers and electronic devices, including a central service such as a cloud service that is a medium for receiving information including machine learning models trained for use in its autonomous control and other data. One or more networks (176) may be, for example, communication networks and may include one or more local area networks ("LAN") such as a wide area network ("WAN") such as the Internet, a Wi-Fi LAN, a mesh network, etc., and one or more bus subsystems. One or more networks (176) may optionally utilize one or more standard communication technologies, protocols and / or inter-process communication technologies. In some embodiments, data collected by one or more sensors (130) may be uploaded to a computing system (172) via the network (176) for further processing. In the illustrated embodiment, the vehicle (111A) can communicate with the computing system (172) via the network (176) and signal line (178). In some embodiments, the computing system (172) is a cloud-based computing device. Additionally, the processing of autonomous vehicle data by the computing system (172) according to a number of embodiments is described in relation to FIG. 2.

[0025] Each processor illustrated in FIG. 1a and the various additional controllers and subsystems disclosed herein generally operate under the control of an operating system and execute or depend on various computer software applications, components, programs, objects, modules, data structures, etc., as described in more detail below. Additionally, various applications, components, programs, objects, modules, etc., may also be executed on one or more processors of another computer (e.g., computing system (172)) coupled to the vehicle (100) via a network (176) in a distributed, cloud-based, or client-server computing environment in which processing required to implement the functions of a computer program can be assigned to multiple computers and / or services via a network, for example.

[0026] Generally, routines executed to implement the various embodiments described herein, regardless of whether they are implemented as part of an operating system or a specific application, component, program, object, module, or sequence or subset thereof, are referred to herein as “program code.” Program code generally includes one or more instructions that reside in various memories and storage devices at various times and, when read and executed by one or more processors, perform steps necessary to execute steps or elements that implement the various aspects of the present disclosure. Additionally, while the embodiments have fully functional computers and systems and are described below in that context, it should be understood that the various embodiments described herein may be distributed as program products of various forms and that the embodiments may be implemented regardless of the specific type of computer-readable medium used to actually perform the distribution.

[0027] Examples of computer-readable media include, among others, tangible non-transient media such as volatile and non-volatile memory devices, floppy and other removable disks, solid-state drives, hard disk drives, magnetic tapes, and optical discs (e.g., CD-ROMs, DVDs, etc.).

[0028] Furthermore, the various program codes described below may be identified based on the application implemented in a particular embodiment. However, it should be noted that any specific program nomenclature below is used merely for convenience, and therefore the present disclosure should not be limited to use only in any specific application identified and / or implied by such nomenclature. Additionally, considering the typically innumerable ways in which computer programs can be organized into routines, procedures, methods, modules, objects, etc., and the various ways in which program functions can be assigned among the various software layers residing within a general computer (e.g., operating systems, libraries, APIs, applications, applets, etc.), it should be noted that the present disclosure is not limited to the specific organization and assignment of program functions described herein.

[0029] The exemplary environment illustrated in FIG. 1a is not intended to limit the embodiments disclosed herein. In fact, other alternative hardware and / or software environments may be used without going beyond the scope of the embodiments disclosed herein.

[0030] The truck may include a LIDAR system (e.g., the vehicle control system (120) of FIG. 1a, the LIDAR system (201) of FIG. 2, etc.). In some embodiments, the LIDAR system may encode an optical signal using frequency modulation and scatter the encoded optical signal into free space using an optical device. By detecting frequency differences between the encoded optical signal and the reflected signal reflected from the object, the frequency-modulated (FM) LIDAR system may determine the position of the object and / or accurately measure the velocity of the object using the Doppler effect. The FM LIDAR system may use continuous wave (referred to as "FMCW LIDAR" or "Coherent FMCW LIDAR") or quasi-continuous wave (referred to as "FMQW LIDAR"). The LIDAR system may encode an optical signal using phase modulation (PM) and scatter the encoded optical signal into free space using an optical device.

[0031] FM or phase-modulated (PM) LIDAR systems can provide significant advantages over conventional LIDAR systems in relation to automotive and / or commercial truck applications. First, in some cases, an object (e.g., a pedestrian wearing dark clothing) may have low reflectivity in that it reflects back only a small amount (e.g., 10% or less) of the incident light incident on the object to the sensors of the FM or PM LIDAR system (e.g., sensors (130) in FIG. 1a). In other cases, an object (e.g., a flashing road sign) may have high reflectivity (e.g., more than 10%) in that it reflects back a large amount of the incident light incident on the object to the sensors of the FM LIDAR system.

[0032] Regardless of the reflectance of the object, the FM LIDAR system can detect objects (e.g., classification, recognition, discovery, etc.) at a greater distance (e.g., twice as far) than conventional LIDAR systems. For example, the FM LIDAR system can detect low-reflectance objects at a distance of 300 meters or more and high-reflectance objects at a distance of 400 meters or more.

[0033] To achieve such an improvement in detection capability, the FM LIDAR system may use sensors (e.g., sensors (130) of FIG. 1a). In some embodiments, these sensors may be sensitive to a single photon, which means they can detect the minimum possible amount of light. The FM LIDAR system may use infrared wavelengths (e.g., 950 nm, 1550 nm, etc.) in some applications, but is not limited to an infrared wavelength range (e.g., near-infrared: 800 nm to 1500 nm, mid-infrared: 1500 nm to 5600 nm, and far-infrared: 5600 nm to 1,000,000 nm). By operating the FM or PM LIDAR system at infrared wavelengths, the FM or PM LIDAR system can broadcast stronger light pulses or light beams while satisfying eye safety standards. Conventional LIDAR systems often have to limit their light output (and distance detection capability) for eye safety reasons because they are often not sensitive to single photons and / or operate only at near-infrared wavelengths.

[0034] Therefore, by detecting objects from a greater distance, FM LIDAR systems can have more time to react to unexpected obstacles. In fact, even a few milliseconds of additional time can improve safety and comfort, especially for large vehicles (such as commercial trucks) traveling at high speeds on highways.

[0035] Another advantage of FM LIDAR systems is that they provide accurate speeds for each data point in real time. In some embodiments, speed measurement is performed using the Doppler effect, which shifts the frequency of light received from an object relative to at least one of the speed in the radiating direction (e.g., the direction vector between the detected object and the sensor) or the frequency of the laser signal. For example, for speeds occurring in road conditions where the speed is less than 100 m / s, the corresponding shift at a wavelength of 1550 nanometers (nm) corresponds to a frequency shift of less than 130 megahertz (MHz). Because this frequency shift is small, it is difficult to detect directly in the optical domain. However, by utilizing coherent detection in FMCW, PMCW, or FMQW LIDAR systems, the signal can be converted to the RF domain so that the frequency shift can be calculated using various signal processing techniques. This allows autonomous vehicle control systems to process received data more quickly.

[0036] Instantaneous velocity calculation also makes it easier for the FM LIDAR system to identify remote or sparse data points as objects and / or track the motion of said objects over time. For example, an FM LIDAR sensor (e.g., sensor (130) in FIG. 1a) may receive only a few return signals (e.g., light reception signals (hits)) from an object 300 m away, but if said return signals provide a velocity value of interest (e.g., vehicle approach speed of 70 mph or more), the FM LIDAR system and / or the autonomous vehicle control system may determine individual weights for probabilities associated with the objects.

[0037] The rapid identification and / or tracking of FM LIDAR systems provides autonomous vehicle control systems with more time to maneuver the vehicle. Additionally, a better understanding of how quickly objects are moving allows autonomous vehicle control systems to plan better responses.

[0038] Another advantage of FM LIDAR systems is that they have less static noise compared to conventional LIDAR systems. That is, conventional LIDAR systems designed for enhanced light sensitivity generally experience performance degradation under strong sunlight. These systems are also susceptible to crosstalk (e.g., when sensors are confused by each other's light pulses or light beams) and magnetic interference (e.g., when a sensor is confused by its own previous light pulse or light beam). To overcome these disadvantages, vehicles using conventional LIDAR systems often require additional hardware, complex software, and / or more computational power to manage this "noise."

[0039] On the other hand, FM LIDAR systems do not suffer from these types of problems because each sensor is specifically designed to respond only to its own optical characteristics (e.g., light beams, light waves, light pulses). If the return light does not match the timing, frequency, and / or wavelength of the originally transmitted light, the FM sensor can filter out the corresponding data point (e.g., remove, ignore, etc.). In this way, FM LIDAR systems generate more accurate data (e.g., generate, derive, etc.) with fewer hardware or software requirements, enabling safer and smoother driving.

[0040] Finally, FM LIDAR systems are more scalable than existing LIDAR systems. As more autonomous vehicles (e.g., passenger cars, commercial trucks, etc.) appear on the roads, vehicles powered by FM LIDAR systems will not have to suffer from interference problems caused by sensor crosstalk. Additionally, FM LIDAR systems use less optical peak power than existing LIDAR sensors. Therefore, some or all of the optical components for FM LIDAR can be manufactured on a single chip, which offers its own advantages as discussed herein.

[0041] FIG. 1b is a block diagram illustrating an example of a system environment for autonomous commercial truck vehicles according to some embodiments. The environment (100B) includes a commercial truck (180B) for transporting cargo (182B). In some embodiments, the commercial truck (180B) may include vehicles configured to be suitable for long-distance cargo transport, local cargo transport, multimodal cargo transport (i.e., transport in which a road-based vehicle is used as one of a number of transport modes for transporting cargo) and / or other road-based cargo transport applications. The commercial truck (180B) may be a flatbed truck, a refrigerated truck (e.g., a freezer truck), a ventilated van (e.g., a dry van), a moving truck, etc. The cargo (182B) may be goods and / or agricultural products. The commercial truck (180B) may include trailers for carrying cargo (182B), such as flatbed trailers, lowboy trailers, step deck trailers, extendable flatbed trailers, side kit trailers, etc.

[0042] The environment (100B) includes an object (111B) located within a distance range of 30 meters or less from the truck (shown as another vehicle in FIG. 1b).

[0043] A commercial truck (180B) may include a LIDAR system (184B) for determining the distance to an object (111B) and / or measuring the speed of the object (111B) (e.g., an FM LIDAR system, the vehicle control system (120) of FIG. 1a, the LIDAR system (201) of FIG. 2, etc.). FIG. 1b shows one LIDAR system (184B) mounted on the front of the commercial truck (180B), but the number of LIDAR systems and the mounting area of ​​the LIDAR system on the commercial truck are not limited to a specific number or a specific area. The commercial truck (180B) may include any number of LIDAR systems (184B) (or auxiliary components such as sensors, modulators, coherent signal generators, etc.) mounted in any area of ​​the commercial truck (180B) (e.g., front, rear, side, top, bottom, lower and / or bottom) to facilitate the detection of objects in any free space relative to the commercial truck (180B).

[0044] As described, the LIDAR system (184B) in the environment (100B) can be configured to detect objects (e.g., other vehicles, bicycles, trees, road signs, potholes, etc.) at a short distance (e.g., 30 meters or less) from the commercial truck (180B).

[0045] FIG. 1c is a block diagram illustrating an example of a system environment of an autonomous commercial truck vehicle according to some embodiments. The environment (100C) includes the same components as those included in the environment (100B) (e.g., a commercial truck (180B), cargo (182B), LIDAR system (184B), etc.).

[0046] The environment (100C) includes an object (111C) (illustrated as another vehicle in FIG. 1c) located within a distance range of (i) more than 30 meters and (ii) 150 meters or less from the commercial truck (180B). As illustrated, the LIDAR system (184B) within the environment (100C) may be configured to detect objects (e.g., other vehicles, bicycles, trees, road signs, potholes, etc.) located at a predetermined distance (e.g., 100 meters) from the commercial truck (180B).

[0047] FIG. 1d is a block diagram illustrating an example of a system environment of an autonomous commercial truck vehicle according to some embodiments. The environment (100D) includes the same components as those included in the environment (100B) (e.g., a commercial truck (180B), cargo (182B), LIDAR system (184B), etc.).

[0048] The environment (100D) includes an object (111D) (illustrated as another vehicle in FIG. 1d) within a distance range of more than 150 meters from the commercial truck (180B). As illustrated, the LIDAR system (184B) within the environment (100D) may be configured to detect objects (e.g., other vehicles, bicycles, trees, road signs, potholes, etc.) within a predetermined distance (e.g., 300 meters) from the commercial truck (180B).

[0049] In commercial truck applications, it is important to effectively detect objects at all distances due to the increased weight required for the vehicle and the consequently longer stopping distances. FM LIDAR systems (e.g., FMCW and / or FMQW systems) or PM LIDAR systems are highly suitable for commercial truck applications due to the aforementioned advantages. Therefore, commercial trucks equipped with these systems can enhance the ability to safely transport both people and goods over short or long distances, thereby improving the safety of not only the commercial truck but also surrounding vehicles. In various embodiments, these FM or PM LIDAR systems can be used in semi-autonomous applications where the commercial truck has a driver and some functions of the commercial truck are operated autonomously using the FM or PM LIDAR system, or in fully autonomous applications where the commercial truck is operated entirely by the FM or LIDAR system, either alone or in combination with other vehicle systems.

[0050] In a LIDAR system using CW modulation, the modulator continuously modulates the laser light. For example, if the modulation period is 10 seconds, the input signal is modulated over the entire 10 seconds. Instead, in a LIDAR system using quasi-CW modulation, the modulator modulates the laser light to have both an active part and an inactive part. For example, in the case of a 10-second period, the modulator modulates the laser light only for 8 seconds (also called the "active part") and does not modulate the laser light for 2 seconds (also called the "inactive part"). By doing this, the LIDAR system can reduce power consumption during the 2 seconds because the modulator does not need to provide a continuous signal.

[0051] In frequency modulated continuous wave (FMCW) LIDARs for automotive applications, FMCW measurement and signal processing methods are applied, but it may be advantageous to operate the LIDAR system using quasi-CW modulation where the optical signal is not always in an on-state (e.g., enable state, power-on state, transmission state, etc.). In some embodiments, quasi-CW modulation may have a duty cycle of 1% or more and up to 50%. If energy can be consumed in an off-state (e.g., disable state, power-off state, etc.) during the actual measurement time, there may be an improvement in the signal-to-noise ratio (SNR) and / or a reduction in signal processing requirements to consistently integrate all energy over a longer time scale.

[0052] FIG. 2 is a block diagram illustrating an exemplary environment of a LIDAR sensor system for an autonomous vehicle according to some embodiments. The environment (200) includes a LIDAR sensor system (201) comprising a transmitting (Tx) path and a receiving (Rx) path. The Tx path includes one or more Tx input / output ports (not shown in FIG. 2), and the Rx path includes one or more receiving input / output ports (not shown in FIG. 2).

[0053] In some embodiments, the semiconductor substrate and / or semiconductor package may include a Tx path and an Rx path. In some embodiments, the semiconductor substrate and / or semiconductor package may include at least one of a silicon photonics circuit, a programmable logic controller (PLC), or a III-V semiconductor circuit.

[0054] In some embodiments, the first semiconductor substrate and / or the first semiconductor package may include a Tx path, and the second semiconductor substrate and / or the second semiconductor package may include an Rx path. In some arrangements, Rx input / output ports and / or Tx input / output ports may occur (or be formed / placed / located / stacking) along one or more edges of one or more semiconductor substrates and / or semiconductor packages.

[0055] The environment (200) includes one or more transmitters (216) and one or more receivers (222).

[0056] The environment (200) includes one or more optical devices (210) (e.g., a vibrating scanner, a unidirectional scanner, a Risley prism, a circulator optic, and / or a beam collimator, etc.) coupled to the LIDAR system (201). In some embodiments, one or more optical devices (210) may be coupled to a Tx path through one or more Tx input / output ports. In some embodiments, one or more optical devices (210) may be coupled to an Rx path through one or more Rx input / output ports.

[0057] The environment (200) includes a vehicle control system (e.g., the vehicle control system (120) of FIG. 1a) coupled to the LIDAR system (201). In some embodiments, the vehicle control system (120) may be coupled to an Rx path through one or more Rx input / output ports.

[0058] The Tx path may include a laser source (202), a modulator (204A), a modulator (204B), an amplifier (206), and one or more transmitters (216). The Rx path may include one or more receivers (222), a mixer (208), a detector (212), a transimpedance amplifier (TIA) (214), and one or more analog-to-digital converters (ADCs). Although FIG. 2 illustrates only a selected number of components and one input / output channel, the environment (200) may include any number of components and / or input / output channels (of any combination) interconnected in any arrangement to facilitate the combination of various functions of the LIDAR system to support the operation of the vehicle.

[0059] The laser source (202) may be configured to generate an optical signal (or beam) derived from (or associated with) a local oscillator (LO) signal. In some embodiments, the optical signal may have an operating wavelength equal to or substantially equal to 1550 nanometers. In some embodiments, the optical signal may have an operating wavelength between 1400 nanometers and 1440 nanometers.

[0060] A laser source (202) may be configured to provide an optical signal to a modulator (204A), and the modulator (204A) may be configured to generate a modulated optical signal by modulating the phase and / or frequency of the optical signal based on a first radio frequency (RF) signal (indicated as "RF1" in FIG. 2) and using continuous wave (CW) modulation or quasi-CW modulation. The modulator (204A) may be configured to transmit the modulated optical signal to an amplifier (206). The amplifier (206) may be configured to amplify the modulated optical signal and generate the amplified optical signal to an optical device (210) through one or more transmitters (216). One or more transmitters (216) may include one or more optical waveguides or antennas.

[0061] The optical device (210) may be configured to guide an amplified optical signal received from a Tx path toward an object (218) in an environment within a given field of view, receive a return signal reflected back from the object (218), and provide the return signal to a mixer (208) of an Rx path through one or more receivers (222). One or more receivers (222) may include one or more optical waveguides or antennas. In some arrangements, the transmitters (216) and receivers (222) may comprise one or more transceivers (not shown in FIG. 2). In some arrangements, one or more transceivers may include a monostatic transceiver or a bistatic transceiver.

[0062] A laser source (202) may be configured to provide an LO signal to a modulator (204B), and the modulator is configured to generate a modulated LO signal by modulating the phase and / or frequency of the LO signal based on a second RF signal (indicated as “RF2” in FIG. 2) using continuous wave (CW) modulation or quasi-CW modulation, and to transmit the modulated LO signal to a mixer (208) in an Rx path.

[0063] The mixer (208) may be configured to mix the modulated LO signal with the returned signal (e.g., combine, multiply, etc.) to generate a down-converted signal and transmit the down-converted signal to the detector (212). In some arrangements, the mixer (208) may be configured to transmit the modulated LO signal to the detector (212).

[0064] The detector (212) may be configured to generate an electrical signal based on the down-converted signal and transmit the electrical signal to the TIA (214). In some arrangements, the detector (212) may be configured to generate an electrical signal based on the down-converted signal and the modulated signal.

[0065] The TIA (214) can be configured to amplify an electrical signal and transmit the amplified electrical signal to a vehicle control system (120) through one or more ADCs (220).

[0066] In some embodiments, TIA (214) is 5 picowatts per square root Hertz (i.e., 5×10 per square root Hertz). -12 It may have a peak noise equivalent output (NEP) of less than watts. In some embodiments, the TIA (214) may have a gain between 4 kilohms and 25 kilohms.

[0067] In some embodiments, the detector (212) and / or TIA (214) may have a 3-decibel bandwidth of 80 kilohertz (kHz) to 450 megahertz (MHz).

[0068] The vehicle control system (120) may be configured to determine the distance to an object (218) and / or measure the speed of the object (218) based on one or more electrical signals received from the TIA through one or more ADCs (220).

[0069] In some embodiments, the modulator (204A) and / or the modulator (204B) may have a bandwidth of 400 megahertz (MHz) to 1000 MHz.

[0070] In some embodiments, the modulator (204A) may be configured to transmit a first modulated optical (optical) signal and a second modulated optical (optical) signal to an amplifier (206). The amplifier (206) may be configured to amplify the first and second modulated optical signals and generate the amplified optical signal to an optical device (210) via transmitters (216). The optical device (210) may be configured to guide the first and second modulated optical signals received from the Tx path toward an object (218) in an environment within a given field of view, receive the corresponding first and second return signals reflected back from the object (218), and provide the first and second return signals to a mixer (208) of the Rx path via receivers (222). The modulator (204B) may be configured to generate (1) a first modulated LO signal associated with a first modulated optical signal and (2) a second modulated LO signal associated with a second modulated optical signal, and to transmit the first and second modulated LO signals to a mixer (208) in the Rx path. The mixer (208) may be configured to pair (e.g., associate, link, identify, etc.) the first return optical signal with the first modulated LO signal, and to mix (e.g., combine, multiply, etc.) the first return optical signal with the first modulated LO signal to generate a first down-converted signal and to transmit the first down-converted signal to a detector (212). Similarly, the mixer (208) may be configured to pair the second return optical signal with the second modulated LO signal, and to mix the second return optical signal with the second modulated LO signal to generate a second down-converted signal and to transmit the second down-converted signal to a detector (212). The detector (212) may be configured to generate first and second electrical signals, respectively, based on the first and second down-converted signals. The vehicle control system (120) may be configured to determine the distance to an object (218) and / or measure the speed of the object (218) based on the first and second electrical signals received through the TIA (214) and ADCs (220).

[0071] FIG. 3 illustrates a high-level block diagram showing exemplary components (302, 304, 306, and 308) of a modular LIDAR sensor system (300) for an autonomous vehicle according to some embodiments. According to some embodiments, the modular LIDAR sensor system (300) includes a seed laser (308), a modular modulator (306), a modular amplifier (304), and a modular transceiver chip (302). As previously mentioned, the modular LIDAR sensor system (300) is particularly advantageous because, through its modular design, each of the components (302, 304, 306, and 308) can be individual integrated circuits optically coupled by microlenses. This provides a high yield of the modular components (302, 304, 306, and 308) and ease of configuration and assembly for various variations of each modular component (302, 304, 306, and 308). This modular architecture is particularly advantageous because the seed laser (308), modular modulator (306), modular amplifier (304), and modular transceiver chip (302) can each be configured and tested individually and then assembled to form the configurations described below with reference to FIGS. 4 and 5. Basically, the modular architecture of FIGS. 3, 4, and 5 consists only of individual integrated circuits and microlenses. This modular architecture does not require any optical fibers to optically combine the components of the modular architecture.

[0072] A seed laser (308) is provided to generate a light beam. In some embodiments, the seed laser (308) may be a light source, for example, a distributed feedback (DFB) diode laser source. The light or beam of the seed laser (308) may be optically coupled to input into a modular modulator (306). In some embodiments, the seed laser (308) includes a DFB diode laser source (310) and a microlens assembly (312) that couples the DFB diode laser source (310) to the modular modulator (306). The seed laser (308) is modular in that it may be composed of a single integrated circuit.

[0073] A modular modulator (306) receives an optical beam generated by a seed laser and generates a modulated optical signal. In some embodiments, the modular modulator (306) includes a modulator and a splitter (see FIGS. 4 and 5 below). In some embodiments, the modular modulator (306) performs in-phase and quadrature modulation to generate a modulated beam. In some embodiments, the modular modulator (306) performs phase modulation to generate a modulated beam. The splitter is coupled to the output of the modulator to provide the output of the modular modulator (306). In some embodiments, the splitter is a single splitter that is a passive component hybridly integrated with the modulator of the modular modulator (306), as described in more detail below with reference to FIG. 4. In some embodiments, the splitter is a plurality of splitters, as described in more detail below with reference to FIG. 5. The modular modulator (306) is modular in that it can be composed of a single integrated circuit.

[0074] In some embodiments, the seed laser (308) and the modular modulator (306) may be integrated to form a seed laser assembly (314). In some embodiments, the seed laser assembly (314) is mounted on a first submount, and the coupled modular transceiver chip (302) is mounted on a second submount to align the height of the seed laser assembly (314) and the height of the modular transceiver chip (302) for optical coupling.

[0075] The modular amplifier (304) is one or more semiconductor optical amplifiers (SOA). In some embodiments, the modular amplifier (304) is one or more tapered semiconductor optical amplifiers (TSOA). In some embodiments, the modular amplifier (304) is one or more SOA array chips. Each SOA array chip includes integrated U-turns and other passive components for optical amplification. In some embodiments, the SOA array chip may be an integrated photonic device of the III-V semiconductor system in which all components are formed of III-V material and formed / placed on a single substrate formed of III-V material. Additionally, in some embodiments, each SOA array chip may include four to five channels and may be configured to amplify a beam through stimulated emission. The modular amplifier (304) is optically coupled to the modular modulator (306) by microlenses (not shown). Similarly, the modular amplifier (304) is optically coupled by micro-lenses (not shown) to provide the amplified signal to the modular transceiver chip (302). Details of this optical coupling will be described in more detail below with reference to FIGS. 4 and FIGS. 5.

[0076] In some embodiments, the modular silicon photonics (SiPho) transceiver chip (302) comprises at least one of a silicon photonics circuit, a programmable logic controller (PLC), or a III-V semiconductor circuit. The modular SiPho transceiver chip (302) processes coupled light using a modular amplifier (304). The modular SiPho transceiver chip (302) comprises a plurality of coherent pixels that process the output of the modular amplifier (304) and emit light from the surface of the modular SiPho transceiver chip (302) through an optical window of the integrated chip package. The modular SiPho transceiver chip (302) processes light collected and reflected from a target and couples the detected photocurrent to a transimpedance amplifier (not shown). The transimpedance amplifier converts the photocurrent into an electric voltage, which is then coupled outside the integrated chip package.

[0077] FIG. 4 is a high-level block diagram showing exemplary modular components of a LIDAR sensor system (400) of horizontal integration of autonomous vehicles according to some embodiments. As illustrated, the LIDAR sensor system (400) comprises: a seed laser (308), a modular modulator (306), an integrated seed microlens (402), a splitter (404), a first microlens array (406a), an array of TSOAs (408), a second microlens array (406b), and a modular SiPho transceiver chip (302).

[0078] In this embodiment, the seed laser (308), modular modulator (306), and modular SiPho transceiver chip (302) have a structure, form, and function similar to those described above with reference to FIG. 3, so the description will not be repeated here. The modular modulator (306) is coupled to the splitter (404) by an integrated seed microlens (402). That is, the seed laser (308), the modular modulator (306), and the integrated seed microlens (402) can be integrated into a single integrated circuit. An exemplary configuration for such integration is shown in FIG. 4 as a cross-sectional view of a p-up semiconductor structure to the left of the components (306, 308, 402).

[0079] The splitter (404) is a 1-to-n splitter that splits an optical signal output to the splitter (404) through an integrated seed microlens (402) by a modular modulator (306) into n signals. In some embodiments, the core pitch of the splitter (404) is in the range of 450 to 550 micrometers. In some embodiments, the splitter (404) is a 1-to-16 splitter with a core pitch of 500 μm. In some embodiments, the splitter (404) is a 1-to-32 splitter with a core pitch of 500 μm. In some embodiments, the splitter (404) is a passive optical splitter. In some embodiments, the splitter (404) is formed on one or more integrated circuits. An exemplary configuration for such integration is illustrated in FIG. 4 as a cross-sectional view of a p-down semiconductor structure to the left of the components (402 and 404).

[0080] The first microlens array (406a) is used to optically couple the output of the splitter (404) to an array of TSOAs (408). The first microlens array (406a) includes a microlens for each signal output by the splitter (404). In some embodiments, the first microlens array (406a) includes 16 microlenses with a pitch of 500 μm. In some embodiments, the first microlens array (406a) includes 32 microlenses with a pitch of 500 μm. Each lens of the first microlens array (406a) couples the output of the splitter (404) to a corresponding TSOA of the array of TSOAs (408). In some embodiments, the seed microlens (402) and the first microlens array (406a) lens array compensate for the height difference between the first height of the submount of the modular modulator (306) and the second height of the submount of the modular amplifier (408).

[0081] An array of TSOAs (408) has the same number of TSOAs as the output signal of the splitter (404). That is, for each signal output by the splitter (404), there is one corresponding TSOA. In some embodiments, the splitter (404) outputs 16 optical signals, and the array of TSOAs (408) contains 16 TSOAs. In some embodiments, the splitter (404) outputs 32 optical signals, and the array of TSOAs (408) contains 32 TSOAs. In some embodiments, the array of TSOAs (408) contains 16 aperture bars or several individual bars in which the array contains 16 TSOAs. As described below, the array of TSOAs includes a side real estate for double-sided cooling and flatness. In some embodiments, the TSOAs have a pitch of 500 μm. It should be understood that in other embodiments, the array may be different types of SOAs. The array of TSOAs (408) is optically coupled to the splitter (404) by the first microlens array (406a) and optically coupled to the modular SiPho transceiver chip (302) by the second microlens array (406b).

[0082] A second microlens array (406b) is used to optically couple the output of an array of TSOAs (408) to a modular SiPho transceiver chip (302). The second microlens array (406b) includes a microlens for each signal output by the array of TSOAs (408). Essentially, the second microlens array (406b) includes a microlens for each TSOA of the array of TSOAs (408). In some embodiments, the second microlens array (406b) includes 16 microlenses with a 500 μm pitch. In some embodiments, the second microlens array (406b) includes 32 microlenses with a 500 μm pitch. Each lens of the second microlens array (406b) couples the output of the TSOA to the corresponding input of the modular SiPho transceiver chip (302).

[0083] In some embodiments, the first microlens array (406a), the array of TSOAs (408), and the second microlens array (406b) are formed on a single integrated circuit. An exemplary configuration for this integration is shown in FIG. 4 as a cross-sectional view of a p-down semiconductor structure to the left of these components (406a, 408, and 406b).

[0084] The above modular components (306, 402, 404, 406a, 408, 406b, and 302) are horizontally integrated, which means that each of the semiconductor chips forming each modular component is stacked on top of each other as illustrated. This requires only horizontal alignment of the different components to ensure that light is transmitted from one modular component to another as required for optical coupling. In some embodiments, the optical ports of each of the two aligned chips must be at the same pitch and have matching optical mode sizes and cross-sectional angles according to Snell's law.

[0085] FIG. 5 is a high-level block diagram showing exemplary modular components of a horizontally or vertically integrated LIDAR sensor system (500) for autonomous vehicles according to some embodiments. The LIDAR sensor system (500) includes a seed laser (308), a modular modulator (306), a plurality of seed microlenses (502a-502d), a plurality of splitters (504a-50d), a first plurality of microlens arrays (506a-506d), a plurality of TSOA chips (508a-508d), a second plurality of microlens arrays (510a-510d), and a modular SiPho transceiver chip (302).

[0086] The LIDAR sensor system (500) of FIG. 5 is further modularized by dividing the splitter (404) into a plurality of splitter chips (504a-504b); dividing the first micro-lens array (406a) into a plurality of micro-lens arrays (506a-506d); dividing the TSOA chip (408) into a plurality of TSOA chips (508a-508d); and dividing the second micro-lens array (406b) into a plurality of micro-lens arrays (510a-510d). Variations of this modular architecture increase yield and reliability by having components that are easier to manufacture. This architecture requires vertical or horizontal alignment of an increased number of modular components to achieve the same architectural output.

[0087] In this embodiment, the seed laser (308), modular modulator (306), and modular C4 transceiver chip (302) have a structure, shape, and function similar to those described above with reference to FIGS. 3 and 4, so the description will not be repeated here.

[0088] A modular modulator (306) is coupled to a plurality of micro-lenses (502a-502d). Each of the plurality of micro-lenses (502a-502d) is optically coupled to a corresponding splitter (504a-504d). For example, a micro-lens (502a) couples the modular modulator (306) to the splitter (504a). Similarly, a micro-lens (502b) couples the modular modulator (306) to the splitter (504b); a micro-lens (502c) couples the modular modulator (3062) to the splitter (504c); and a micro-lens (502d) couples the modular modulator to the splitter (504c).

[0089] In some embodiments, the plurality of splitters (504a-504d) are each splitter chips. For example, if an architecture similar to that of FIG. 4 is required and the modular splitter (404) is a 1-to-16 splitter, the plurality of splitters (504a-504d) will each be a 1-to-4 splitter chip; thus, the four splitter chips (504a-504d) of FIG. 5 may provide the same function as the single modular splitter (404) of FIG. 4. Each of the plurality of splitters (504a-504d) combines a respective microlens (502a-502d) with a respective microlens array (506a-506d). For example, a splitter (504a) combines a micro lens (502a) with a micro lens array (506a), a splitter (504b) combines a micro lens (502b) with a micro lens array (506b), a splitter (504c) combines a micro lens (502c) with a micro lens array (506c), and a splitter (504d) combines a micro lens (502d) with a micro lens array (506d). FIG. 5 should be understood as illustrating a method in which any number of splitter chips having a smaller splitting ratio can be used in a modular manner instead of a single splitter chip having a larger splitting ratio.

[0090] As described above, each splitter (504a-504d) is coupled to each microlens array (506a-506d). In some embodiments, there are four microlens arrays (506a-506d). Continuing to compare the modular design of FIG. 4 with the modular design of FIG. 5, a single microlens array (406a) is replaced by multiple microlens arrays (506a-506d). For example, if a single microlens (406a) comprises 16 microlenses with a 500 μm pitch and a similar architecture is required, each microlens array (506a-506d) of the multiple microlens arrays (506a-506d) will comprise four microlenses with a 500 μm pitch. In some embodiments, the number of microlens arrays and the number of microlenses within each array correspond to the number of signals generated by the splitter chips (504a-504d), respectively. Each microlens array of the plurality of microlens arrays (506a-506d) is combined in turn to provide each optical signal to each TSOA chip (508a-508d). For example, the microlens array (506a) provides optical signals to the TSOA chip (508a), and the microlens array (506b) provides optical signals to the TSOA chip (508b).

[0091] As illustrated in FIG. 5, each of the plurality of TSOA chips (508a-508d) amplifies an optical signal received from its corresponding microlens array (506a-506d). In some embodiments, the design includes four TSOA chips (508a-508d). Again, continuing to compare the modular design of FIG. 4 with the modular design of FIG. 5, a single array of TSOAs (408) is replaced by a plurality of TSOA chips (508a-508d). In contrast to the single array of TSOAs (408), each of the TSOA chips (508a-508d) includes four TSOAs. In some embodiments, the plurality of TSOA chips (508a-508d) may have 16 aperture bars or several individual bars, double-sided cooling, lateral spacing for flatness, and a 500 μm pitch. It should be understood that in other implementations, the TSOA chips (508a-508d) may be different types of SOAs.

[0092] Each of the plurality of TSOA chips (508a-508d) is optically coupled to the modular SiPho transceiver chip (302) by a corresponding microlens array (510a-510d). The second plurality of microlens arrays (510a-510d) may be similar in form and function to the first plurality of microlens arrays (506a-506d), but each TSOA chips (508a-508d) is coupled to the modular SiPho transceiver chip (302). In an embodiment of this design, the number of microlens arrays (510a-510d) corresponds to the number of TSOA chips (508a-508d).

[0093] FIG. 6 illustrates a high-level block diagram showing an exemplary plan view of modular components for a LIDAR sensor system (600) for an autonomous vehicle according to some embodiments. FIG. 6 illustrates one planar implementation and layout of the modular components of the present disclosure. In some embodiments, the LIDAR sensor system (600) includes a seed laser assembly (314), a splitter (404), a modular SiPho transceiver chip (302), a plurality of semiconductor optical amplifiers (602a-602d), and a plurality of lenses (604a-604d). As illustrated, the seed laser assembly (314) inputs an optical beam to the modular components on an integrated circuit (606) including the splitter (404) and the modular SiPho transceiver chip (302). The integrated circuit (606) is optically coupled by a signal line (608) and provides an optical input to the optical amplifier (602d) among a plurality of semiconductor optical amplifiers (602a-602d) through a lens (604d). The semiconductor optical amplifiers (602a-602d) are coupled to transmit and receive optical signals to and from each other. Additionally, each of the plurality of semiconductor optical amplifiers (602a-602d) is coupled by a respective lens (604a-604b) to transmit the amplified signals back to the integrated circuit (606). Although not illustrated, the semiconductor chip (606) also includes other inputs and outputs for providing optical signals to other components. In some embodiments, the optical ports of each of the two aligned chips must be at the same pitch and also have optical mode sizes and cross-sectional angles that match according to Snell's law.

[0094] FIG. 7 illustrates a cross-sectional view showing an exemplary integrated chip package (700) for a modular LIDAR sensor system for an autonomous vehicle according to some embodiments. In FIG. 7, the integrated chip package (700) for the LIDAR sensor system defines a configuration of optical components that provides a path for an optical signal or beam to travel in and out of the integrated chip package (700) and dissipates heat generated by the optical components to improve performance. The integrated chip package (700) may include a lid (704) covering the upper surface of the integrated chip package (700). The integrated chip package (700) may include a U-shaped block (706) coupled to the lid (704) to seal the optical components in a hermetic seal. For example, the U-shaped block (706) may be formed of copper. The integrated chip package (700) may include a cooling plate (702) coupled to the side of the integrated chip package (700). In some embodiments, the cooling plate (702) may be attached to the lead (704) so ​​as to be on top of the lead (704). In other embodiments, the cooling plate (702) may be attached to the U-shaped block (706) so as to be under the U-shaped block (706) on the opposite side of the lead (704) in a manner that does not obstruct the optical window (420). The material of the cooling plate (702) may be any one of copper, aluminum, and silicon.

[0095] The integrated chip packaging (700) may include a silicon photonics transceiver chip (712) separated from the MOB (708). The transceiver chip (712) is coupled to the MOB (708) via a micro-optical assembly (710) and configured to receive a beam output by the MOB (708). For example, the micro-optical assembly (710) may include a micro-lens array for collimating the beam from the MOB (708) to a coupling facet at the edge of the transceiver chip (712). The integrated chip packaging (700) may include an assembly of semiconductor optical amplifier (SOA) array chips (714). The SOA array chip (714) may be implemented as a III-V semiconductor module coupled to the transceiver chip (412) by hybrid integration on the upper surface of the transceiver chip (712). This hybrid integration is useful because it eliminates the need for a micro-optical assembly to combine the SOA array chip (714) with the transceiver chip (712). The transceiver chip (412) is configured to process a beam received from the MOB (708). For example, the transceiver chip (712) uses one or more SOA array chips (714) to amplify the beam.

[0096] The integrated chip packaging (700) may include an optical window (720) in a U-shaped block (706) on the opposite bottom surface of the lead (704) to provide an interface for optical signals. The material of the optical window (720) may be one of glass, fused silica, or an organic polymer. The optical window (720) allows a beam to travel in and out of the surface-emitting transceiver chip (712). After amplifying the beam using an assembly of SOA array chips (714) on the upper surface, the transceiver chip (712) is configured to emit the beam vertically from the lower surface through the optical window (720). For example, the beam is emitted from the integrated chip packaging (700) at a right angle to the lower surface of the transceiver chip (712). The advantage of surface emission of the beam from the transceiver chip (712) is that the configuration of the optical window (720) is easier compared to edge emission from the transceiver chip (712). When a beam is emitted from the edge of the transceiver chip (712), the optical window (720) may need to be precisely aligned so that the optical window (720) is horizontal with the narrow edge of the transceiver chip (712). As such, the surface emission feature of the transceiver chip (712) provides easy assembly and manufacturability of the integrated chip packaging (700). The transceiver chip (712) may be configured to extend laterally from the optical window (720) by a critical offset so as to sufficiently overlap with the optical window (720) within the integrated chip packaging (700). The end of the transceiver chip (712) extending laterally from the optical window (720) may be joined to a support structure (724) for mechanical strength. For example, the dimensions of the optical window may be millimeter length x millimeter width. The distance between the lower surface of the transceiver chip (712) and the optical window (720) can be about X microns.

[0097] A beam emitted from the integrated chip packaging (700) may be incident on a target and reflected back to the integrated chip packaging (700) through the same optical window (720). A transceiver chip (712) is configured to receive and process the beam reflected from the target. For example, the transceiver chip (712) may be configured as a photodiode to generate a photocurrent based on the reflected beam collected through the optical window (720) and transmit the photocurrent to a transimpedance amplifier (TIA) (722). In some embodiments, the integrated chip packaging (700) may include a TIA (722) integrated with the transceiver chip (712) using flip-chip bonding. The TIA (722) may be configured to convert the photocurrent into a voltage signal, which is then coupled outside the integrated chip packaging (700) through a wire bond (728). In some embodiments, the integrated chip packaging (700) may include a TIA (722) on the surface of a chip carrier outside the transceiver chip (712) to bond it to the transceiver chip (712). In other embodiments, the integrated chip packaging (700) excludes the TIA (722) from the packaged integration. For example, the TIA (722) is located outside the integrated chip packaging (700).

[0098] In some embodiments, the integrated chip packaging (700) may include a configuration of a double-sided heat transfer assembly for discharging heat generated by the sealed components during operation and maintaining the temperature of the sealed components below a reference temperature of the cooling plate (702). In the double-sided heat transfer assembly, a first heat transfer component (718) may be bonded to the lower surface of the transceiver chip (712) so as to be positioned between the transceiver chip (712) and the metal base of the U-shaped block (706) for heat dissipation. A second heat transfer component (716) may be bonded to the exposed upper surface of the SOA array chip (714) so ​​as to be positioned between the SOA array chip (714) and the lead (704) of the integrated chip packaging (700) for heat dissipation. For example, the heat transfer components may be a thermal interface material (e.g., aluminum nitride (AlN) ceramic, beryllium oxide ceramic, pyrolytic graphite sheet (PGS), etc.), a thermoelectric cooler (TEC), a liquid cooling system, or a combination thereof. In the example of FIG. 7, the first heat transfer component (718) may be a thermoelectric cooler or aluminum nitride ceramic. The second heat transfer component (716) may include, for example, a first thermal interface material layer such as an AlN-n-clamp bonded to the exposed surface of the SOA array chip (714) and a second thermal interface material layer such as PGS bonded on top of the first layer. The second heat transfer component (718) may have any suitable height. The second heat transfer component (718) reduces the emission of light emitted through the optical window (720) from the lower surface of the transceiver chip (712). The combination of a small optical window (720) and a low-height second heat transfer component (718) induces a large area under the transceiver chip (712) covered by the second heat transfer component (718) for effective heat dissipation.

[0099] The foregoing detailed description of the present disclosure is provided for illustrative and illustrative purposes only. It is not intended to be complete or to limit the present disclosure to the exact form disclosed. Many variations and modifications are possible in light of the above teachings. The described embodiments are selected to best explain the principles of the present disclosure and their practical applications, thereby enabling those skilled in the art to make the best use of the present disclosure in various embodiments and in various modifications suitable for the specific use being considered. The scope of the present disclosure is intended to be defined by the claims appended herein.

[0100] Although some embodiments of the present disclosure and their advantages have been described in detail, it should be understood that various variations, substitutions, and modifications may be made herein without departing from the spirit and scope of the present disclosure as defined by the appended claims. For example, it will be readily understood by those skilled in the art that many of the features, functions, processes, and materials described herein may be modified while remaining within the scope of the present disclosure. Furthermore, the scope of the present disclosure is not intended to be limited to specific embodiments of the processes, machines, manufacturing, compositions of materials, means, methods, and steps described in the specification. As will be readily understood by those skilled in the art from the description of the present disclosure, existing or future-to-be-developed processes, machines, manufacturing, compositions of materials, means, methods, or steps that perform substantially the same function or achieve substantially the same results as the embodiments described herein may be utilized in accordance with the present disclosure. Accordingly, the appended claims are intended to include such processes, machines, manufacturing, compositions of materials, means, methods, or steps within the scope of the claims.

Claims

Claim 1 A vehicle light detection and distance measurement (LIDAR) system comprising: a seed laser configured to output a beam; a modulator coupled to the seed laser to receive the beam from the seed laser and modulate the beam to generate a modulated beam; an amplifier coupled to the modulator to receive the modulated beam from the modulator and generate an amplified beam - the amplifier comprises a semiconductor optical amplifier integrated with a U-shaped passive component for optical amplification -; and a transceiver coupled to the modulator and the amplifier - the transceiver is configured to emit the amplified beam in a predetermined direction toward the transceiver via surface emission and to receive and process a beam reflected from an object in the environment where the vehicle is located - a LIDAR system. Claim 2 A LIDAR system according to claim 1, wherein the transceiver includes an optical window in which the amplified beam is emitted and the reflected beam is received, and the surface emission includes emitting the amplified beam vertically from the surface of the transceiver. Claim 3 A LIDAR system according to claim 1, wherein the transceiver processes the reflected beam from the object to detect a photocurrent and couples the detected photocurrent to a transimpedance amplifier. Claim 4 A LIDAR system according to claim 1, wherein the modulator and the seed laser are integrated into a seed laser assembly. Claim 5 A LIDAR system according to claim 4, wherein the seed laser assembly is mounted on a first submount and the transceiver is mounted on a second submount for aligning the height of the seed laser and the height of the transceiver for optical coupling. Claim 6 A LIDAR system according to claim 1, wherein the amplifier comprises a first bar mounted on a first part of the amplifier and a second bar mounted on a second part of the amplifier. Claim 7 A LIDAR system according to claim 6, wherein the first bar and the second bar are configured to lower the junction temperature of the amplifier. Claim 8 A LIDAR system according to claim 1, wherein the amplifier comprises a tapered semiconductor optical amplifier configured to receive the modulated beam from the modulator and generate the amplified beam through stimulated emission. Claim 9 A LIDAR system according to claim 1, wherein the amplifier comprises at least one of indium phosphide (InP), gallium arsenide (GaAs), indium arsenide (InAs), gallium nitride (GaN), indium antimonide (InSb), or a rare earth-doped material. Claim 10 A LIDAR system according to claim 1, wherein the modulator is optically coupled to the amplifier through a first lens array. Claim 11 A LIDAR system according to claim 10, wherein the first lens array compensates for the height difference between the first height of the submount of the modulator and the second height of the submount of the amplifier. Claim 12 A LIDAR system according to claim 10, wherein the amplifier is optically coupled to the transceiver through a second lens array. Claim 13 A LIDAR system according to claim 12, wherein the first lens array, the amplifier, and the second lens array are integrated into a single chip. Claim 14 A LIDAR system according to claim 1, further comprising a splitter that couples the output of the modulator to the input of the amplifier, wherein the splitter comprises a 1-to-16 splitter having a pitch in the range of 450 to 550 micrometers. Claim 15 A LIDAR system according to claim 14, further comprising a first lens array that couples the output of the splitter to the input of the amplifier, wherein the splitter comprises a plurality of 1-to-4 splitter chips having a pitch in the range of 450 to 550 micrometers, and the first lens array comprises four lenses having a pitch in the range of 450 to 550 micrometers. Claim 16 A LIDAR system according to claim 1, wherein each of the modulator, the amplifier, and the transceiver has a modular structure and is horizontally aligned for optical coupling. Claim 17 A LIDAR system according to claim 16, wherein the optical ports of each of the modulator, the amplifier, and the transceiver, which are horizontally aligned for optical coupling, have a matching pitch, a matching optical mode size, and a matching facet angle. Claim 18 A LIDAR system according to claim 1, wherein each of the modulator, the amplifier, and the transceiver has a modular structure and is vertically aligned for optical coupling. Claim 19 An autonomous vehicle control system comprising: a light detection and distance measurement (LIDAR) system; and one or more processors, wherein the LIDAR system comprises: a seed laser configured to output a beam; a modulator coupled to the seed laser to receive the beam from the seed laser and modulate the beam to generate a modulated beam; an amplifier coupled to the modulator to receive the modulated beam from the modulator and generate an amplified beam—the amplifier comprises a semiconductor optical amplifier integrated with a U-shaped passive component for optical amplification—; and a transceiver coupled to the modulator and the amplifier—the transceiver is configured to emit the amplified beam in a predetermined direction toward the transceiver via surface emission and to receive and process a beam reflected from an object in an environment where the autonomous vehicle is located—and wherein the one or more processors are configured to determine at least one of a distance to the object or a speed of the object using the reflected beam, and to control the operation of the autonomous vehicle in response to at least one of the distance or the speed. Claim 20 An autonomous vehicle comprising: a light detection and distance measurement (LIDAR) system; a steering system; a braking system; and a vehicle controller, wherein the LIDAR system comprises: a seed laser configured to output a beam; a modulator coupled to the seed laser to receive the beam from the seed laser and modulate the beam to generate a modulated beam; an amplifier coupled to the modulator to receive the modulated beam from the modulator and generate an amplified beam—the amplifier comprises a semiconductor optical amplifier integrated with a U-shaped passive component for optical amplification—; and a transceiver coupled to the modulator and the amplifier—the transceiver is configured to emit the amplified beam in a predetermined direction toward the transceiver via surface emission and to receive and process a beam reflected from an object in an environment where the autonomous vehicle is located—and the vehicle controller is configured to determine at least one of a distance to the object or a speed of the object using the reflected beam, and to control the operation of at least one of the steering system and the braking system in response to at least one of the distance or the speed.

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