Apparatus for controlling fluid

Abstract

A fluid control device capable of reducing flow rate deviations between channels connected to multiple regions is provided. A fluid control device comprises a plurality of channels connected to an inlet channel to allow fluid passing through an inlet channel to flow, a plurality of control valves arranged to regulate the flow of fluid in each of the plurality of channels, a plurality of flow sensors arranged to measure the flow rate of fluid in each of the plurality of channels, a plurality of pressure sensors arranged to measure the pressure of fluid in each of the plurality of channels, a plurality of supply channels connected to the plurality of channels to supply fluid passing through the plurality of channels to a plurality of process areas, a discharge channel connected to the plurality of channels to discharge fluid passing through the plurality of channels, and a laminar flow member having a plurality of orifice tubes arranged in each of the plurality of channels to laminarize the fluid passing through the plurality of channels and allow it to pass through the discharge channel.

Description

Technology Field

[0001] The present invention relates to a fluid control device, and more specifically, to a fluid control device capable of distributing and supplying fluid to multiple regions. Background Technology

[0002] Electronic pressure controllers (EPCs) are widely used in various industrial fields to control the flow rate and pressure of fluids entering process chambers.

[0003] Electronic pressure controllers are critical devices that precisely control the flow rate and pressure of fluids entering process chambers in various industrial fields, including semiconductor manufacturing processes. In particular, electronic pressure controllers are used in various semiconductor manufacturing processes, such as Chemical Vapor Deposition (CVD), plasma etching, and sputtering, to perform precise control of the gases supplied to the process chambers.

[0004] A typical electronic pressure controller includes a housing having a fluid path for receiving fluid and guiding it into a process chamber, at least one valve for opening and closing the fluid path, a flow sensor for measuring the flow rate of the fluid flowing through the path, a pressure sensor for measuring the pressure of the fluid flowing through the path, and a controller for controlling the valve according to the measurement value of the pressure sensor. Through this configuration, the electronic pressure controller can regulate the pressure of the process chamber by having the controller control the valve according to the measurement value of the pressure sensor.

[0005] With the recent advancement of the semiconductor industry and the increasing size of wafers, the demand for process uniformity and precision is growing. In particular, for large wafer processes of 300mm or larger, uniform gas distribution across multiple regions within a single process chamber is essential, and this requires independent and precise fluid control for each region.

[0006] Conventional electronic pressure control systems required the use of multiple individual electronic pressure controllers to precisely supply fluid to multiple process chambers or multiple regions within a single chamber. This structure entails various problems, such as increased installation space, complex piping systems, high installation costs, and control deviations between individual devices.

[0007] Against this backdrop, a multi-channel electronic pressure controller capable of efficiently integrating multiple electronic pressure controllers and enabling stable flow rate control has been developed.

[0008] Conventional multi-channel electronic pressure controllers used needle valves to partially bypass a portion of the flow rate in each channel so that the fluid inflow pressure in each process area could be controlled.

[0009] However, needle valves occupy a relatively large amount of space and have the problem of causing pressure variations in each process area. In addition, as needle valves are mechanically actuated, there is a risk that the set flow rate value may fluctuate. Prior art literature

[0010] Published Patent No. 2024-0077022 (May 31, 2024) The problem to be solved

[0011] The present invention was devised to solve the above-mentioned problems and aims to provide a fluid control device capable of reducing flow rate deviations between channels connected to multiple regions.

[0012] In addition, the present invention aims to provide a fluid control device capable of precisely controlling the fluid inflow pressure in each region without using a mechanically driven needle valve.

[0013] The problems of the present invention are not limited to those mentioned above, and other unmentioned problems will be clearly understood by those skilled in the art from the description below. means of solving the problem

[0014] To solve the problem described above, a fluid control device according to one embodiment of the present invention comprises: a plurality of channels connected to an inlet channel so that a fluid passing through an inlet channel can flow; a plurality of control valves arranged to regulate the flow of fluid in each of the plurality of channels; a plurality of flow sensors arranged to measure the flow rate of fluid in each of the plurality of channels; a plurality of pressure sensors arranged to measure the pressure of fluid in each of the plurality of channels; a plurality of supply channels connected to the plurality of channels to supply the fluid passing through the plurality of channels to a plurality of process areas; a discharge channel connected to the plurality of channels to discharge the fluid passing through the plurality of channels; and a laminar flow member having a plurality of orifice tubes arranged in each of the plurality of channels to laminarize the fluid passing through the plurality of channels and pass it through the discharge channel.

[0015] Each of the above plurality of laminar flow members may further include a fixed tube having a through hole into which the plurality of orifice tubes are inserted.

[0016] The plurality of orifice tubes may be configured to be longer than the length of the fixed tube so as to protrude from one end of the fixed tube.

[0017] The above fixed tube may include a connecting body; a first dividing body extending from one end of the connecting body; a second dividing body extending from one end of the connecting body to face the first dividing body; and a slit disposed between the first dividing body and the second dividing body.

[0018] Each of the above plurality of laminar flow members may further include a sleeve that surrounds the first split body and the second split body to press the first split body toward the second split body and press the second split body toward the first split body.

[0019] The plurality of channels and the plurality of supply paths can be connected through the slits of each of the plurality of laminar flow members.

[0020] The cross-sectional shape of the above-mentioned through hole may be hexagonal.

[0021] A fluid control device according to one embodiment of the present invention comprises: a front block having a plurality of first flow paths arranged in parallel to form a plurality of channels; a center block connected to the end of the front block such that a plurality of second flow paths arranged in parallel to form a plurality of channels and a plurality of second flow paths connected in a one-to-one manner with the plurality of first flow paths; and a rear block connected to the end of the center block such that a plurality of third flow paths arranged in parallel to form a plurality of channels and a plurality of third flow paths connected in a one-to-one manner with the plurality of second flow paths, wherein the plurality of control valves, the plurality of flow sensors, and the plurality of pressure sensors may be arranged in the center block such that they are connected to the plurality of second flow paths one by one.

[0022] The inlet passage may be arranged in the front block so as to be connected to the plurality of first passages, and the plurality of supply passages may be arranged in the rear block so as to be connected one-to-one with the plurality of third passages, and the discharge passage and the plurality of laminar flow members may be arranged in the rear block.

[0023] A fluid control device according to one embodiment of the present invention may further include an inflow control valve disposed in the front block to control the flow of fluid passing through the inflow channel.

[0024] To solve the problem described above, a fluid control device according to another embodiment of the present invention comprises: a base block having a plurality of channels through which fluid can flow, a plurality of supply channels connected to the plurality of channels to supply fluid to a plurality of process areas, and a discharge channel connected to the plurality of channels to discharge fluid passing through the plurality of channels; and a laminar flow member having a plurality of orifice tubes and a fixed tube having a through hole into which the plurality of orifice tubes are inserted, each disposed in the plurality of channels to laminarize the fluid passing through the plurality of channels and pass it through the discharge channel. Effects of the invention

[0025] According to the present invention, by arranging laminar flow members capable of laminarizing fluid flow in a plurality of channels, the flow rate variation between each channel can be reduced. In particular, the orifice length of the laminar flow member is longer than its diameter, thereby minimizing the flow rate variation caused by the tolerance of the flow channel diameter.

[0026] Furthermore, according to the present invention, the laminar flow member adopts a fixed structure without movable parts, thereby resolving the problem of setpoint fluctuations caused by the use of conventional needle valves and enabling consistent pressure-dependent flow rate control in each channel. In addition, performance remains constant even after long-term use, and manufacturing and assembly are easy, allowing for reduced manufacturing costs.

[0027] Furthermore, according to the present invention, by integrating a plurality of pressure controllers into a single module, installation space can be minimized and manufacturing costs reduced. In addition, the integrated structure minimizes piping, thereby reducing the risk of fluid leakage and facilitating maintenance.

[0028] The various and beneficial advantages and effects of the present invention are not limited to those described above, and a wider variety of effects are included in this specification. Brief explanation of the drawing

[0029] FIG. 1 is a schematic diagram showing a fluid control system including a fluid control device according to one embodiment of the present invention. FIG. 2 is a plan view showing a fluid control device according to one embodiment of the present invention. FIG. 3 is a bottom view showing a portion of a fluid control device according to one embodiment of the present invention. FIG. 4 is a side view showing a portion of a fluid control device according to one embodiment of the present invention. FIG. 5 is a side cross-sectional view showing a laminar flow member of a fluid control device according to one embodiment of the present invention. FIG. 6 is a perspective view showing a laminar flow member of a fluid control device according to one embodiment of the present invention. FIG. 7 is a perspective view showing a laminar flow member according to another embodiment. Specific details for implementing the invention

[0030] The advantages and features of this specification and the methods for achieving them will become clear by referring to the embodiments described below in detail together with the accompanying drawings. However, this specification is not limited to the embodiments disclosed below but may be implemented in various different forms, and these embodiments are provided merely to ensure that the disclosure of this specification is complete and to fully inform those skilled in the art of the scope of this specification.

[0031] Shapes, areas, ratios, angles, numbers, etc. disclosed in the drawings for explaining the embodiments of this specification are exemplary, and this specification is not limited to the depicted details. Throughout the specification, the same reference numerals refer to the same components. Furthermore, in describing this specification, if it is determined that a detailed description of related prior art could unnecessarily obscure the essence of this specification, such detailed description is omitted. Where terms such as "includes," "has," or "is made up" are used in this specification, other parts may be added unless "only" is used. Where a component is expressed in the singular, it includes cases where it is included in the plural unless specifically stated otherwise.

[0032] In interpreting the components, they are interpreted to include a margin of error even in the absence of a separate explicit statement.

[0033] In the case of describing a positional relationship, for example, when the positional relationship between two parts is described using expressions such as 'on,' 'upper,' 'lower,' or 'next to,' one or more other parts may be located between the two parts unless 'immediately' or 'directly' is used.

[0034] Additionally, terms such as "first," "second," etc. are used to describe various components, but these components are not limited by these terms. These terms are used merely to distinguish one component from another. Accordingly, the first component mentioned below may be the second component within the technical scope of this specification.

[0035] Throughout the specification, the same reference numerals refer to the same components.

[0036] The area and thickness of each component shown in the drawings are illustrated for convenience of explanation and are not necessarily limited to the area and thickness of the components illustrated in this specification.

[0037] In the embodiments, a 'module' or 'part' performs at least one function or operation and may be implemented in hardware or software, or a combination of hardware and software. Additionally, a plurality of 'modules' or a plurality of 'parts' may be integrated into at least one module, except for the 'module' or 'part' that needs to be implemented in specific hardware.

[0038] The features of each of the various embodiments of this specification may be combined or combined with one another, either partially or wholly, and may technically enable various interlocking and operation. Each embodiment may be implemented independently of one another or may be implemented together in an associated relationship.

[0039] The present invention will be described below with reference to the drawings.

[0040] FIG. 1 is a schematic diagram showing a fluid control system including a fluid control device according to an embodiment of the present invention. FIG. 2 is a plan view showing a fluid control device according to an embodiment of the present invention. FIG. 3 is a bottom view showing a portion of the fluid control device according to an embodiment of the present invention. FIG. 4 is a side view showing a portion of the fluid control device according to an embodiment of the present invention.

[0041] As shown in the drawing, a fluid control system (1000) according to one embodiment of the present invention includes a fluid control device (100) for distributing and supplying fluid to multiple regions, a vacuum pump (200) connected to the fluid control device (100) to discharge fluid from the fluid control device (100), and a controller (300) for controlling the fluid control device (100) and the vacuum pump (200). A fluid control system (1000) according to one embodiment of the present invention can receive fluid from a fluid source (10) and supply it to a plurality of process regions (20a)(20b)(20c)(20d).

[0042] A plurality of process regions (20a)(20b)(20c)(20d) may be process chambers for processing processes in various industrial fields, including semiconductor manufacturing processes such as chemical vapor deposition (CVD), plasma etching, sputtering, and cleaning. Additionally, the fluid supplied by the fluid control system (1000) according to one embodiment of the present invention may be a gas used in processing processes in various industrial fields, such as semiconductor manufacturing processes.

[0043] A fluid control device (100) comprises an inlet passage (110) connected to a fluid source (10), an inlet control valve (112) for controlling the flow of fluid through the inlet passage (110), a plurality of pressure controllers (120a) (120b) (120c) (120d) for controlling the pressure of the fluid passing through the inlet passage (110) and supplying it to a plurality of process areas (20a) (20b) (20c) (20d), and a base block (160). The plurality of pressure controllers (120a) (120b) (120c) (120d) are arranged to be integrated into a single base block (160).

[0044] An inlet passage (110) is connected to a fluid source (10) and introduces fluid supplied from the fluid source (10) into the interior of the base block (160). Inside the base block (160), a distribution passage (114) is arranged to connect the inlet passage (110) with a plurality of pressure controllers (120a), (120b), (120c), and (120d). The distribution passage (114) is connected to the respective channels (121a), (121b), (121c), and (121d) of the plurality of pressure controllers (120a), (120b), (120c), and (120d). The fluid introduced through the inlet passage (110) is distributed to the plurality of pressure controllers (120a), (120b), (120c), and (120d) through the distribution passage (114).

[0045] An inflow control valve (112) is placed in the base block (160) to control the flow of fluid passing through the inflow path (110). The inflow control valve (112) can block or control the flow of fluid through the inflow path (110). The inflow control valve (112) can be controlled by a controller (300).

[0046] A plurality of pressure controllers (120a)(120b)(120c)(120d) are integrated into a base block (160) in the form of a single module. Each of the plurality of pressure controllers (120a)(120b)(120c)(120d) includes a channel (121a)(121b)(121c)(121d), a control valve (122a)(122b)(122c)(122d), a flow sensor (123a)(123b)(123c)(123d), a pressure sensor (124a)(124b)(124c)(124d), a supply path (125a)(125b)(125c)(125d), and a laminar flow member (130a)(130b)(130c)(130d).

[0047] Multiple pressure controllers (120a)(120b)(120c)(120d) receive fluid through a common inlet passage (110). The common inlet passage (110) is opened and closed by an inlet control valve (112).

[0048] Multiple channels (121a)(121b)(121c)(121d) are arranged inside the base block (160) to be connected to the inlet channel (110). Multiple channels (121a)(121b)(121c)(121d) are connected to the inlet channel (110) through the distribution channel (114). Fluid distributed from the distribution channel (114) to the multiple channels (121a)(121b)(121c)(121d) is supplied to multiple supply channels (125a)(125b)(125c)(125d) through each channel (121a)(121b)(121c)(121d).

[0049] A plurality of control valves (122a)(122b)(122c)(122d) are each connected to a plurality of channels (121a)(121b)(121c)(121d) to control the flow of fluid in a plurality of channels (121a)(121b)(121c)(121d). The control valves (122a)(122b)(122c)(122d) are independently controlled by a controller (300) and can individually control the flow of fluid in each channel (121a)(121b)(121c)(121d). The plurality of control valves (122a)(122b)(122c)(122d) are spaced apart on a base block (160) to be connected to each channel (121a)(121b)(121c)(121d).

[0050] The opening amount of the control valves (122a)(122b)(122c)(122d) can be adjusted according to the flow rate deviation between channels calculated by the controller (300). That is, if the flow rate deviation exceeds a preset reference value, the controller (300) can minimize the flow rate deviation between channels (121a)(121b)(121c)(121d) by adjusting the opening amount of the control valve of the channel with the larger flow rate deviation.

[0051] The control valves (122a)(122b)(122c)(122d) are controlled by a controller (300), such as a solenoid valve, and various valves capable of controlling the flow of fluid passing through the channels (121a)(121b)(121c)(121d) may be used.

[0052] The control valves (122a)(122b)(122c)(122d) are spaced apart on the base block (160) to be connected to each channel (121a)(121b)(121c)(121d).

[0053] A plurality of flow sensors (123a)(123b)(123c)(123d) are each connected to a plurality of channels (121a)(121b)(121c)(121d) to measure the flow rate of fluid in a plurality of channels (121a)(121b)(121c)(121d). The flow sensors (123a)(123b)(123c)(123d) are positioned in a base block (160) so as to be located downstream of the control valves (122a)(122b)(122c)(122d) in the fluid path through the channels (121a)(121b)(121c)(121d). The flow sensors (123a)(123b)(123c)(123d) measure the flow rate of the fluid in each channel (121a)(121b)(121c)(121d) and transmit the flow rate measurement signal to the controller (300).

[0054] Flow sensors (123a)(123b)(123c)(123d) can measure the flow rate in each channel (121a)(121b)(121c)(121d) in real time and transmit a measurement signal to the controller (300). The controller (300) can calculate the flow rate deviation between channels based on the flow rate measurement signals received from the plurality of flow sensors (123a)(123b)(123c)(123d).

[0055] Various flow meters, such as thermal flow meters, differential pressure flow meters, volumetric flow meters, vortex flow meters, and ultrasonic flow meters, can be used as flow sensors (123a)(123b)(123c)(123d).

[0056] A plurality of pressure sensors (124a)(124b)(124c)(124d) are each connected to a plurality of channels (121a)(121b)(121c)(121d) to measure the pressure of the fluid in the plurality of channels (121a)(121b)(121c)(121d). The pressure sensors (124a)(124b)(124c)(124d) are positioned in the base block (160) so as to be located downstream of the flow sensors (123a)(123b)(123c)(123d) in the fluid path through the channels (121a)(121b)(121c)(121d). Pressure sensors (124a)(124b)(124c)(124d) measure the pressure of the fluid in each channel (121a)(121b)(121c)(121d) and transmit the pressure measurement signal to the controller (300).

[0057] Pressure sensors (124a)(124b)(124c)(124d) can measure the pressure of each channel (121a)(121b)(121c)(121d) in real time and transmit a measurement signal to the controller (300). The controller (300) can monitor and control the pressure status in each channel (121a)(121b)(121c)(121d) based on the pressure measurement signals received from the multiple pressure sensors (124a)(124b)(124c)(124d).

[0058] Pressure sensors (124a)(124b)(124c)(124d) can be configured to measure fluid pressure in various ways, such as strain gauge type, capacitive type, piezoelectric type, and semiconductor type.

[0059] The supply channels (125a)(125b)(125c)(125d) are each connected to the multiple channels (121a)(121b)(121c)(121d) to supply fluid passing through the multiple channels (121a)(121b)(121c)(121d) to the multiple process areas (20a)(20b)(20c)(20d). The supply channels (125a)(125b)(125c)(125d) are connected to the channels (121a)(121b)(121c)(121d) downstream of the pressure sensor (124a)(124b)(124c)(124d) in the fluid path through the channels (121a)(121b)(121c)(121d). Fluid with controlled flow rate and pressure passing through channels (121a)(121b)(121c)(121d) is supplied to process areas (20a)(20b)(20c)(20d) through supply channels (125a)(125b)(125c)(125d).

[0060] The supply channels (125a)(125b)(125c)(125d) supply fluid, such as process gas, to the process area (20a)(20b)(20c)(20d) with a precisely controlled flow rate and pressure in each channel (121a)(121b)(121c)(121d), thereby enabling uniform process treatment. The pressure in the supply channels (125a)(125b)(125c)(125d) can be controlled by laminar flow members (130a)(130b)(130c)(130d) that pass the fluid from the channels (121a)(121b)(121c)(121d) to the discharge channel (150).

[0061] Referring to FIGS. 3 to 6, laminar flow members (130a)(130b)(130c)(130d) are disposed inside a base block (160) to control the flow of fluid discharged from a plurality of channels (121a)(121b)(121c)(121d) to a discharge channel (150). The laminar flow members (130a)(130b)(130c)(130d) include a plurality of orifice tubes (131), a fixing tube (133) that fixes the plurality of orifice tubes (131), and a sleeve (140) that is coupled to the fixing tube (133).

[0062] The laminar flow members (130a)(130b)(130c)(130d) adopt a structure that replaces conventional needle valves. In the laminar flow members (130a)(130b)(130c)(130d), the fluid becomes laminar as it passes through the orifice tube (131), forming a stable and consistent flow. The laminar flow members (130a)(130b)(130c)(130d) resolve the problem of set value fluctuations that may occur when using needle valves and enable consistent pressure-dependent flow rate control in each channel (121a)(121b)(121c)(121d).

[0063] A plurality of orifice tubes (131) are configured to make the fluid passing through each channel (121a)(121b)(121c)(121d) laminar. The plurality of orifice tubes (131) are bundled by a fixed tube (133) and placed in each channel (121a)(121b)(121c)(121d).

[0064] The orifice tube (131) has an orifice (132) through which fluid can pass. The orifice tube (131) is formed such that the length (L) of the orifice (132) is very long relative to the diameter (D). The long length (L) of the orifice (132) increases the pressure loss of the fluid and reduces the flow rate deviation due to the tolerance of the diameter (D). This allows the flow rate deviation in each channel (121a)(121b)(121c)(121d) to be minimized.

[0065] The fluid pressure loss in the orifice tube (131) can be expressed by the following mathematical formula 1.

[0066] Mathematical formula 1.

[0067]

[0068] ΔP: Pressure loss

[0069] L : Length of orifice tube (m)

[0070] D: Diameter of the orifice (m)

[0071] ρ : Fluid density on the upstream side (kg / m³) 3 )

[0072] μ : Fluid viscosity coefficient (cp)

[0073] : Average fluid velocity in the orifice tube

[0074] K: Orifice tube inlet shape correction coefficient

[0075] And the fluid flow rate in the orifice tube (131) can be expressed by the following mathematical formula 2.

[0076] Mathematical formula 2.

[0077]

[0078] Q: Flow rate

[0079] r : radius of the orifice (m)

[0080] In this way, as the length (L) of the orifice (132) increases, the pressure loss increases, and as the length (L) increases, the influence of the diameter (D) becomes relatively smaller. Also, as the length (L) of the orifice (132) increases, the difference in flow rate due to the difference in diameter (D) is offset by the increase in length (L).

[0081] When the length (L) of the orifice tube (131) is increased, the flow rate is relatively reduced and the pressure loss increases due to the loss caused by friction with the inner wall of the orifice tube (131), but the flow rate does not increase proportionally and becomes inversely proportional. And since the reduced flow rate is proportional to the fourth power of the radius of the orifice (132), the flow rate increases even if the radius of the orifice (132) is increased only slightly.

[0082] Accordingly, although there may be a tolerance in the diameter of the orifice (132) of the orifice tube (131), the flow rate variation of the fluid passing through the orifice tube (131) in each channel (121a)(121b)(121c)(121d) is reduced due to the length effect of the orifice (132). In particular, the length (L) of the orifice (132) is formed to be very long compared to the diameter (D), so that laminar flow occurs for a sufficient amount of time while the fluid passes through the orifice (132), and as a result, the fluid flow is stabilized.

[0083] In summary, as the length (L) of the orifice (132) increases, the pressure loss occurring throughout the entire laminar flow member (130a)(130b)(130c)(130d) increases, thereby reducing the relative proportion of the flow rate difference caused by the diameter tolerance of the orifice (132). This is because as the length (L) of the orifice (132) increases, the frictional area between the fluid and the inner wall of the orifice (132) increases, leading to greater pressure loss, and this increase in pressure loss offsets the flow rate difference caused by the diameter tolerance. Additionally, as the length (L) of the orifice (132) increases, the influence of the orifice (132) diameter on the resistance of the entire laminar flow member (130a)(130b)(130c)(130d) decreases. In the case of a short orifice, the diameter accounts for a large proportion of the total resistance, but as the length (L) increases, the resistance due to the length becomes dominant, and the influence of the diameter decreases relatively.

[0084] Therefore, due to the effect of increasing the length (L) of the orifice (132) and the laminar flow effect of the fluid passing through the orifice (132), the flow rate deviation can be reduced compared to a conventional orifice structure. This structure minimizes the flow rate deviation per channel caused by machining tolerances and enables precise flow rate control required in the process.

[0085] The ratio of the diameter (D) and length (L) of the orifice (132) can be set as follows.

[0086] Diameter (D) : Length (L) = 1 : 70 ~ 1 : 100

[0087] When the ratio of the diameter (D) to the length (L) of the orifice (132) is less than 1:70, the effect of reducing the flow rate deviation with increasing the length (L) of the orifice (132) is small. On the other hand, when the ratio of the diameter (D) to the length (L) of the orifice (132) exceeds 1:100, it is not easy to secure space for the installation of the laminar flow members (130a)(130b)(130c)(130d), and there is a problem that it is difficult to manufacture the orifice tube (131).

[0088] However, the ratio of the diameter (D) and length (L) of the orifice (132) can be varied depending on the design conditions of the fluid control device (100), such as the type of fluid.

[0089] Multiple orifice tubes (131) are positioned inside a fixed tube (133) so as to penetrate the fixed tube (133) in the longitudinal direction. The multiple orifice tubes (131) are bundled by the fixed tube (133) and positioned in each channel (121a)(121b)(121c)(121d). This structure allows the multiple orifice tubes (131) to be stably fixed and enables the fluid flow to be distributed uniformly.

[0090] The length (L) of each orifice tube (131) is longer than the length of the fixed tube (133). As a result, the multiple orifice tubes (131) protrude a certain length from one end of the fixed tube (133). Due to this structural feature, the fluid passing through each channel (121a)(121b)(121c)(121d) flows into the multiple orifice tubes (131) before reaching one end of the fixed tube (133).

[0091] At one end of the fixed tube (133), an uneven flow of fluid occurs as the fluid strikes the fixed tube (133). By protruding the orifice tube (131) from one end of the fixed tube (133), the problem of fluid inflow into the orifice tube (131) due to the uneven flow of fluid can be prevented. That is, since the fluid flows into the orifice tube (131) before striking the fixed tube (133), the fluid flow into the orifice tube (131) is not disturbed and remains stable. This can contribute to improving the precision of flow rate control in each channel (121a)(121b)(121c)(121d).

[0092] The fixed tube (133) has a through hole (134) into which a plurality of orifice tubes (131) are inserted. The through hole (134) is positioned to penetrate the fixed tube (133) in the longitudinal direction. The cross-sectional shape of the through hole (134) is hexagonal.

[0093] The hexagonal shape of the through hole (134) is a shape optimized for efficiently arranging and fixing multiple orifice tubes (131). The hexagonal shape allows orifice tubes (131) with circular cross-sections to be closely attached to each other, and allows each orifice tube (131) to be stably supported at the corner portions of the hexagon.

[0094] In particular, the hexagonal shape can maximize space utilization in a manner similar to a honeycomb structure. This allows for the placement of the maximum number of orifice tubes (131) in the minimum space, while simultaneously maintaining a uniform spacing between each orifice tube (131).

[0095] Additionally, the hexagonal through hole (134) effectively prevents the orifice tubes (131) from rotating or moving. Since each face of the hexagon serves to support the orifice tube (131), the orifice tube (131) can be stably fixed without positional change even with vibrations caused by fluid flow or external impacts.

[0096] However, the cross-sectional shape of the through hole (134) can be varied.

[0097] The fixed tube (133) includes a head (135), a connecting body (136), a first split body (137), and a second split body (138).

[0098] The head (135) is positioned to face the inner surface of the base block (160). The diameter of the head (135) is larger than the diameter of the connecting body (136). An O-ring (142) is positioned on the head (135), and the O-ring (142) seals the space between the fixed tube (133) and the inner surface of the base block (160) to prevent fluid leakage.

[0099] The connecting body (136) connects the head (135) and a pair of split bodies (137) (138).

[0100] The first split body (137) extends from one end of the connecting body (136). The first split body (137) contacts some of the orifice tubes (131) among the plurality of orifice tubes (131) and can press some of the orifice tubes (131) toward the second split body (138).

[0101] The second split body (138) extends from one end of the connecting body (136) to face the first split body (137). The second split body (138) contacts other parts of the orifice tubes (131) among the plurality of orifice tubes (131) and can press other parts of the orifice tubes (131) toward the first split body (137).

[0102] A slit (139) is disposed between the first split body (137) and the second split body (138). The slit (139) serves as a fluid passage connecting each channel (121a)(121b)(121c)(121d) and each supply path (125a)(125b)(125c)(125d). Fluid passing through each channel (121a)(121b)(121c)(121d) can flow through the slit (139) to each supply path (125a)(125b)(125c)(125d).

[0103] The sleeve (140) is combined with a fixing tube (133) to wrap around the first split body (137) and the second split body (138). By wrapping the first split body (137) and the second split body (138), the sleeve (140) presses the first split body (137) toward the second split body (138) and presses the second split body (138) toward the first split body (137). Since this pressing force acts uniformly between the first split body (137) and the second split body (138), a plurality of orifice tubes (131) can be stably fixed between the first split body (137) and the second split body (138).

[0104] A plurality of orifice tubes (131) disposed between the first divided body (137) and the second divided body (138) are firmly fixed by the pressure of the sleeve (140). Therefore, it is possible to prevent the orifice tubes (131) from moving or detaching due to pressure or vibration generated when fluid passes through the orifice tubes (131).

[0105] The length of the sleeve (140) is shorter than the length of the slit (139). As a result, when the sleeve (140) is combined with the fixed tube (133), the slit (139) is not completely covered by the sleeve (140), and a portion of the slit (139) is exposed to the outside. Due to this structural feature, fluid flowing into the slit (139) can be freely discharged from the outer surface of the fixed tube (133) and flow into the supply channels (125a)(125b)(125c)(125d).

[0106] The sleeve (140) is designed to allow for easy assembly when combined with the fixed tube (133), and after combination, provides sufficient fastening force to maintain stable fixing force even during long-term use.

[0107] As such, the laminar flow members (130a)(130b)(130c)(130d) adopt a fixed structure without moving parts, thereby minimizing mechanical wear or failure and maintaining consistent performance even after long-term use. In particular, unlike conventional needle valves, mechanical driving is not required, so the problem of fluctuations in set values ​​or mechanical instability can be fundamentally resolved.

[0108] In addition, the laminar flow members (130a)(130b)(130c)(130d) are designed with a simple structure and are easy to manufacture and assemble. Also, since a complex mechanical structure is not required, a compact design is possible, which can contribute to reducing the overall size of the fluid control device (100).

[0109] Additionally, the fluid passing through the laminar flow members (130a)(130b)(130c)(130d) becomes laminar due to the long flow path length of the orifice tube (131), which has the effect of stabilizing the fluid flow. The laminarized fluid is discharged to the outside through the discharge path (150), and in this process, the pressure and flow rate of each channel (121a)(121b)(121c)(121d) are precisely controlled, and the flow rate deviation between the channels (121a)(121b)(121c)(121d) is minimized.

[0110] The fluid passing through the laminar flow members (130a)(130b)(130c)(130d) flows into the discharge channel (150) through the discharge guide channels (145a)(145b)(145c)(145d).

[0111] The discharge channel (150) is connected to a plurality of channels (121a)(121b)(121c)(121d) through a plurality of laminar flow members (130a)(130b)(130c)(130d). The discharge channel (150) is connected to a vacuum pump (200) and discharges fluid to the outside from the plurality of channels (121a)(121b)(121c)(121d).

[0112] The discharge channel (150) is disposed inside the base block (160). A plurality of discharge guide channels (145a)(145b)(145c)(145d) are disposed in the base block (160), and the discharge channel (150) is connected to each laminar flow member (130a)(130b)(130c)(130d) through the plurality of discharge guide channels (145a)(145b)(145c)(145d).

[0113] When the vacuum pump (200) is operated, some of the fluid flowing along the channels (121a)(121b)(121c)(121d) passes through the laminar flow members (130a)(130b)(130c)(130d) and is discharged through the discharge path (150). This allows the pressure and flow rate of each channel (121a)(121b)(121c)(121d) to be precisely controlled, and the pressure and flow rate of the fluid supplied to the process area (20a)(20b)(20c)(20d) to be stably maintained.

[0114] The discharge channel (150) forms a common discharge passage for multiple channels (121a)(121b)(121c)(121d). This structure integrates the fluid discharged from each channel (121a)(121b)(121c)(121d) into a single discharge path, enabling efficient discharge.

[0115] Referring to FIGS. 2 to 4, the base block (160) fixes an inflow control valve (112), a plurality of control valves (122a) (122b) (122c) (122d), a plurality of flow sensors (123a) (123b) (123c) (123d), and a plurality of pressure sensors (124a) (124b) (124c) (124d).

[0116] The base block (160) includes a front block (161), a center block (163), and a rear block (165) that are connected in sequence.

[0117] The front block (161) is responsible for the initial inflow and distribution of fluid. The front block (161) includes a structure that fixes the inflow control valve (112) and distributes the inflow fluid into a plurality of channels (121a)(121b)(121c)(121d).

[0118] Inside the front block (161), a plurality of first flow paths (162a)(162b)(162c)(162d) constituting a plurality of channels (121a)(121b)(121c)(121d) are arranged in parallel. The first flow paths (162a)(162b)(162c)(162d) are arranged to be connected one-to-one with the second flow paths (164a)(164b)(164c)(164d) of the center block (163).

[0119] Additionally, an inlet passage (110) is arranged inside the front block (161). An inlet control valve (112) is fixed to the front block (161) and controls the flow of fluid passing through the inlet passage (110).

[0120] Additionally, a distribution channel (114) is arranged inside the front block (161) to connect an inlet channel (110) and a plurality of first channels (162a)(162b)(162c)(162d). Fluid flowing in through the inlet channel (110) is distributed to a plurality of first channels (162a)(162b)(162c)(162d) through the distribution channel (114).

[0121] An inlet pipe (172) extending from the inlet passage (110) is connected to the front block (161). Fluid supplied from a fluid source (10; see FIG. 1) flows into the interior of the base block (160) through the inlet pipe (172).

[0122] The center block (163) fixes a plurality of control valves (122a)(122b)(122c)(122d) constituting a plurality of pressure controllers (120a)(120b)(120c)(120d), a plurality of flow sensors (123a)(123b)(123c)(123d), and a plurality of pressure sensors (124a)(124b)(124c)(124d).

[0123] Inside the center block (163), a plurality of second flow paths (164a)(164b)(164c)(164d) constituting a plurality of channels (121a)(121b)(121c)(121d) are arranged in parallel. The center block (163) is connected to the end of the front block (161) so that a plurality of second flow paths (164a)(164b)(164c)(164d) are connected one-to-one with a plurality of first flow paths (162a)(162b)(162c)(162d).

[0124] A flow control member (178) and a guide tube (180) are respectively disposed in the second Euro (164a)(164b)(164c)(164d).

[0125] The flow control member (178) controls the flow of fluid passing through the second flow path (164a)(164b)(164c)(164d). The flow control member (178) can control the flow of fluid in the second flow path (164a)(164b)(164c)(164d) so that the flow sensor (123a)(123b)(123c)(123d) can smoothly measure the flow rate of fluid in the second flow path (164a)(164b)(164c)(164d).

[0126] The guide tube (180) guides the fluid in the second Euro (164a)(164b)(164c)(164d) to the pressure sensor (124a)(124b)(124c)(124d) and the laminar flow member (130a)(130b)(130c)(130d).

[0127] Additionally, the guide tube (180) can contact one end of the laminar flow member (130a) (130b) (130c) (130d) and press the other end of the laminar flow member (130a) (130b) (130c) (130d) against the inner surface of the rear block (165).

[0128] A control valve (122a) (122b) (122c) (122d), a flow sensor (123a) (123b) (123c) (123d), and a pressure sensor (124a) (124b) (124c) (124d) are each connected to the second Euro (164a) (164b) (164c) (164d) of the center block (163).

[0129] The center block (163) can be joined to the front block (161) by a fastening member such as a bolt. A sealing structure to prevent fluid leakage can be placed between the front block (161) and the center block (163).

[0130] Inside the rear block (165), a plurality of third channels (166a)(166b)(166c)(166d) constituting a plurality of channels (121a)(121b)(121c)(121d) are arranged in parallel. The rear block (165) is connected to the end of the center block (163) so that a plurality of third channels (166a)(166b)(166c)(166d) are connected one-to-one with a plurality of second channels (164a)(164b)(164c)(164d).

[0131] In the rear block (165), a plurality of supply channels (125a)(125b)(125c)(125d) are arranged to be connected one-to-one with a plurality of third channels (166a)(166b)(166c)(166d). A plurality of laminar flow members (130a)(130b)(130c)(130d) are arranged one by one in the plurality of third channels (166a)(166b)(166c)(166d).

[0132] Additionally, inside the rear block (165), a discharge channel (150), a plurality of laminar flow members (130a) (130b) (130c) (130d) and a plurality of discharge guide channels (145a) (145b) (145c) (145d) connecting the discharge channel (150) are arranged.

[0133] Some of the fluid passing through the second flow path (164a)(164b)(164c)(164d) of the center block (163) passes through the orifice (132) of the laminar flow member (130a)(130b)(130c)(130d) and flows into the discharge guide flow path (145a)(145b)(145c)(145d). Additionally, another portion of the fluid passing through the second flow path (164a)(164b)(164c)(164d) of the center block (163) flows into the supply flow path (125a)(125b)(125c)(125d) through the slit (139) of the laminar flow member (130a)(130b)(130c)(130d) and the gap between the inner surface of the rear block (165) and the laminar flow member (130a)(130b)(130c)(130d).

[0134] Additionally, a plurality of supply pipes (174a)(174b)(174c)(174d) with a plurality of supply channels (125a)(125b)(125c)(125d) extended thereto and a discharge pipe (176) with a discharge channel (150) extended thereto are connected to the rear block (165).

[0135] The rear block (165) can be joined to the center block (163) through a fastening member such as a bolt. A sealing structure to prevent fluid leakage can be placed between the center block (163) and the rear block (165).

[0136] Referring to FIG. 1, the controller (300) is electrically connected to a plurality of pressure controllers (120a) (120b) (120c) (120d) and controls the plurality of pressure controllers (120a) (120b) (120c) (120d).

[0137] The controller (300) receives pressure measurement signals and flow measurement signals measured in multiple channels (121a)(121b)(121c)(121d) through multiple flow sensors (123a)(123b)(123c)(123d) and multiple pressure sensors (124a)(124b)(124c)(124d), and controls multiple control valves (122a)(122b)(122c)(122d). The controller (300) calculates the flow rate deviation between channels based on the pressure measurement signals and flow rate measurement signals measured in multiple channels (121a)(121b)(121c)(121d), and controls multiple pressure controllers (120a)(120b)(120c)(120d) based on the calculated flow rate deviation, thereby minimizing the flow rate deviation between channels.

[0138] Additionally, the controller (300) can collectively control the fluid supply to a plurality of pressure controllers (120a)(120b)(120c)(120d) by controlling the inflow control valve (112).

[0139] Additionally, the controller (300) can store and analyze data collected from various sensors, optimize the performance of the system, and, if necessary, generate an alarm or perform safety measures.

[0140] As described above, according to the present invention, by arranging laminar flow members (130a)(130b)(130c)(130d) capable of laminarizing the fluid flow in a plurality of channels (121a)(121b)(121c)(121d), the flow rate deviation between channels (121a)(121b)(121c)(121d) due to the tolerance of the flow channel diameter can be minimized. In particular, by making the length of the orifice (132) of the laminar flow members (130a)(130b)(130c)(130d) longer than the diameter, the laminarization of the fluid can be promoted and the flow rate deviation can be minimized.

[0141] In addition, according to the present invention, the laminar flow members (130a)(130b)(130c)(130d) have no moving parts, unlike conventional needle valves, so there is less wear and tear or failure, and performance is maintained consistently even after long-term use. In addition, manufacturing and assembly are easy, which can reduce manufacturing costs, and the design can be made with a compact structure.

[0142] In addition, according to the present invention, due to the structural features of the laminar flow members (130a)(130b)(130c)(130d), multiple flow rate ranges can be controlled with a single product, and the flow rate according to differential pressure can be standardized, thereby increasing the efficiency of system operation.

[0143] In addition, according to the present invention, by integrating a plurality of pressure controllers (120a)(120b)(120c)(120d) into a single module, the installation space can be minimized and manufacturing costs can be reduced. Furthermore, through the integrated structure, piping is minimized, which reduces the risk of fluid leakage and facilitates maintenance.

[0144] FIG. 7 is a perspective view showing a laminar flow member according to another embodiment.

[0145] The laminar flow member (530) shown in FIG. 7 includes a plurality of orifice tubes (531), a fixing tube (533) that fixes the plurality of orifice tubes (531), and a sleeve (540) that is coupled to the fixing tube (533).

[0146] Multiple orifice tubes (531) are bundled and fixed by a fixed tube (533). The orifice tubes (531) have an orifice (532) through which fluid can pass.

[0147] The fixed tube (533) has a through hole (534) into which a plurality of orifice tubes (531) are inserted. The fixed tube (533) includes a head (535), a connecting body (536), a first split body (537), and a second split body (538). A slit (539) through which fluid can pass is disposed between the first split body (537) and the second split body (538).

[0148] The sleeve (540) is coupled to the fixed tube (533) to wrap around the first split body (537) and the second split body (538) in order to fix a plurality of orifice tubes (531) to the fixed tube (533).

[0149] The laminar flow member (530) shown in FIG. 7 has structural features that, compared to the previously described laminar flow members (130a) (130b) (130c) (130d), the width of the through hole (534) of the fixed tube (533) is larger and the number of orifice tubes (531) is greater. This structure allows a larger flow rate to pass through.

[0150] Although preferred examples of the present invention have been described above, the scope of the present invention is not limited to the forms described and illustrated above.

[0151] For example, the number of pressure controllers integrated into the base block (160) can be varied.

[0152] Additionally, the base block (160) can be changed to a single block shape or a shape including two or more blocks, or other shapes.

[0153] Additionally, the laminar flow member may be changed to a different structure including a plurality of orifice tubes (131) in addition to the structure shown.

[0154] Although the embodiments of this specification have been described in more detail with reference to the attached drawings, this specification is not necessarily limited to these embodiments and may be modified in various ways within the scope of the technical spirit of this specification. Accordingly, the embodiments disclosed in this specification are intended to explain, not to limit, the technical spirit of this specification, and the scope of the technical spirit of this specification is not limited by these embodiments. Therefore, the embodiments described above should be understood as illustrative in all respects and not restrictive. Explanation of the symbols

[0155] 100: Fluid control device 110 : Inflow of Euros 112: Inflow control valve 114 : Distribution Euro 120a, 120b, 120c, 120d: Pressure controller 121a, 121b, 121c, 121d : Channel 122a, 122b, 122c, 122d: Control valves 123a, 123b, 123c, 123d: Flow sensors 124a, 124b, 124c, 124d: Pressure sensors 125a, 125b, 125c, 125d: Supply Euro 130a, 130b, 130c, 130d, 530: Laminar flow members 131, 531: Orifice tube 132, 532 : Orifice 133, 533 : Fixed tube 134, 534: Through hole 135, 535 : Head 136, 536 : Connecting body 137, 537 : 1st divided body 138, 538 : Second divided body 139, 539 : Slit 140, 540 : Sleeve 142 : O-ring 145a, 145b, 145c, 145d: Emission Guide Euro 150 : Emission Euro 160 : Base Block 161 : Front Block 162a, 162b, 162c, 162d: First Euro 163 : Center Block 164a, 164b, 164c, 164d: Second Euro 165 : Rear Block 166a, 166b, 166c, 166d: Third Euro 172 : Inlet pipe 174a, 174b, 174c, 174d: Supply pipes 176 : Discharge pipe 178 : Flow control member 180 : Guide tube 200 : Vacuum pump 300 : Controller 1000: Fluid Control System 10: Fluid source 20a, 20b, 20c, 20d: Process area

Claims

Claim 1 A fluid control device comprising: a plurality of channels connected to an inlet channel so that a fluid passing through an inlet channel can flow; a plurality of control valves arranged to regulate the flow of fluid in each of the plurality of channels; a plurality of flow sensors arranged to measure the flow rate of fluid in each of the plurality of channels; a plurality of pressure sensors arranged to measure the pressure of fluid in each of the plurality of channels; a plurality of supply channels connected to the plurality of channels to supply the fluid passing through the plurality of channels to a plurality of process areas; a discharge channel connected to the plurality of channels to discharge the fluid passing through the plurality of channels; and a laminar flow member having a plurality of orifice tubes arranged in each of the plurality of channels to laminarize the fluid passing through the plurality of channels and pass it through the discharge channel. Claim 2 A fluid control device according to claim 1, wherein each of the plurality of laminar flow members further comprises a fixed tube having a through hole into which the plurality of orifice tubes are inserted. Claim 3 A fluid control device according to paragraph 2, wherein the plurality of orifice tubes are configured to be longer than the length of the fixed tube so as to protrude from one end of the fixed tube. Claim 4 A fluid control device according to paragraph 2, wherein the fixed tube comprises: a connecting body; a first split body extending from one end of the connecting body; a second split body extending from one end of the connecting body so as to face the first split body; and a slit disposed between the first split body and the second split body. Claim 5 A fluid control device according to claim 4, wherein each of the plurality of laminar flow members further comprises a sleeve surrounding the first split body and the second split body to press the first split body toward the second split body and press the second split body toward the first split body. Claim 6 A fluid control device according to claim 5, wherein the plurality of channels and the plurality of supply paths are connected through the slits of each of the plurality of laminar flow members. Claim 7 A fluid control device in which the cross-sectional shape of the through hole in paragraph 2 is hexagonal. Claim 8 A fluid control device according to claim 1, comprising: a front block having a plurality of first flow paths constituting the plurality of channels arranged in parallel; a center block connected to the end of the front block such that a plurality of second flow paths constituting the plurality of channels are arranged in parallel and the plurality of second flow paths are connected one-to-one with the plurality of first flow paths; and a rear block connected to the end of the center block such that a plurality of third flow paths constituting the plurality of channels are arranged in parallel and the plurality of third flow paths are connected one-to-one with the plurality of second flow paths, wherein the plurality of control valves, the plurality of flow sensors, and the plurality of pressure sensors are arranged in the center block such that they are connected one by one to the plurality of second flow paths. Claim 9 A fluid control device according to claim 8, wherein the inlet flow path is arranged in the front block so as to be connected to the plurality of first flow paths, the plurality of supply flow paths are arranged in the rear block so as to be connected one-to-one with the plurality of third flow paths, and the discharge flow path and the plurality of laminar flow members are arranged in the rear block. Claim 10 A fluid control device according to claim 9, further comprising an inlet control valve disposed in the front block to control the flow of fluid passing through the inlet passage. Claim 11 A fluid control device comprising: a base block having a plurality of channels through which fluid can flow, a plurality of supply channels connected to the plurality of channels to supply fluid to a plurality of process areas, and a discharge channel connected to the plurality of channels to discharge fluid passing through the plurality of channels; and a laminar flow member having a plurality of orifice tubes and a fixed tube having a through hole into which the plurality of orifice tubes are inserted, each disposed in the plurality of channels to laminarize the fluid passing through the plurality of channels and pass it through the discharge channel.

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