Measurement apparatus, positioning apparatus, lithography apparatus, and article manufacturing method

Abstract

The present disclosure provides a measuring device for measuring the position of a side surface, wherein the measuring device comprises: a sensor that measures the position of the side surface in a first state in which the opposing part is positioned at a predetermined distance from the side surface and the opposing part is positioned opposite to the side surface; and a moving part that moves at least the opposing part among the sensors, wherein the moving part operates in a first mode that moves the opposing part in a direction away from the side surface upon receiving a first signal, and in a second mode that moves the opposing part in the said direction upon receiving a second signal.

Description

Technology Field

[0001] The present disclosure relates to a measuring device, a positioning device, a lithography device, and a method for manufacturing an article. Background Technology

[0002] Japanese Patent Publication No. 2006-189429 describes an air sensor (gas measurement proximity sensor) that measures the position of a measurement surface (measurement side) based on the pressure of said conduit, wherein a measurement probe that sprays gas through a conduit is positioned in close proximity to said surface. In the air sensor described in Japanese Patent Publication No. 2006-189429, the distance between the measurement probe and the measurement surface is controlled to a constant level to avoid collision between the measurement probe and the measurement surface.

[0003] A sensor, such as an air sensor, equipped with a part positioned in close proximity to the side of the object during position measurement, is retracted so that the part moves away from the side of the object when the position measurement of the side of the object is completed, in order to avoid contact between the air sensor and the side of the object. Meanwhile, in an emergency situation, such as when an abnormality (e.g., vibration) occurs in the relative position between the sensor and the side of the object, the retraction operation performed at the end of measurement may not allow the air sensor to retract in a timely manner, and there is a possibility that the air sensor and the side of the object may come into contact.

[0004] The present disclosure provides a technology advantageous for appropriately retracting a sensor that measures the position of the side of the device.

[0005] According to one aspect of the present disclosure, a measuring device for measuring the position of a side of a subject comprises: a sensor that measures the position of the side of a subject in a first state in which the opposing part is positioned at a predetermined distance from the side of a subject and has an opposing part facing the side of a subject; and a moving part that moves at least the opposing part among the sensors, wherein the moving part operates in a first mode in which the opposing part is moved away from the side of a subject upon receiving a first signal indicating withdrawal of the opposing part upon completion of measurement at the sensor, and in a second mode in which the opposing part is moved away in the said direction upon receiving a second signal indicating withdrawal of the opposing part in an emergency, and the time from receiving the second signal in the second mode until withdrawal of the opposing part is completed is shorter than the time from receiving the first signal in the first mode until withdrawal of the opposing part is completed.

[0006] The features of the present disclosure will become apparent from the description of the following embodiments with reference to the accompanying drawings. The description of the following embodiments is explained by example. Brief explanation of the drawing

[0007] The accompanying drawings, which are included in and constitute a part of the specification of the present disclosure, serve to illustrate embodiments of the present disclosure and, together with this description, explain the principles of said embodiments. FIG. 1 is a diagram schematically showing an example of the configuration of an exposure device according to a first embodiment; FIG. 2a is a diagram schematically showing a first configuration example of an air sensor; FIG. 2b is a diagram schematically showing a second configuration example of an air sensor; FIG. 3 is a diagram schematically showing an example of the configuration of a measuring device according to a first embodiment; FIG. 4 is a flowchart showing the operation of a measuring device according to a first embodiment; FIGS. 5a and 5b are graphs respectively showing an example of the time variation of the movement speed of the air sensor for the first mode and the second mode; FIG. 6 is a diagram schematically showing an example of the configuration of a measuring device according to a second embodiment; FIGS. 7a to 7f are schematic drawings illustrating examples of configuration and operation of a measuring device according to a second embodiment; FIG. 8 is a schematic diagram showing an example of the configuration of a measuring device according to a third embodiment. Specific details for implementing the invention

[0008] Hereinafter, embodiments are described in detail with reference to the attached drawings. Furthermore, the following embodiments are not intended to limit the scope of the claims. Although multiple features are described in the embodiments, they are not limited to embodiments requiring all of these multiple features, and multiple such features may be appropriately combined. Moreover, in the attached drawings, the same reference number is attached to identical or similar components, and redundant descriptions thereof are omitted.

[0009] The lithography apparatus according to the present disclosure is an apparatus for forming a pattern on a substrate. Examples of the lithography apparatus include an exposure apparatus that exposes a substrate to light to transfer a pattern of a mask onto the substrate, or an imprint apparatus that uses a mold to form a pattern on an imprint material on a substrate. In the following description, an exposure apparatus is described as an example of a lithography apparatus.

[0010] <First Embodiment>

[0011] A first embodiment according to the present disclosure is described. FIG. 1 schematically illustrates an example of the configuration of an exposure device (100) according to the present embodiment. The exposure device (100) may be configured to have an illumination optical system (12) that illuminates a disc (11) and a projection optical system (13) that projects a pattern of the disc (11) onto a substrate (1), and to expose the substrate (1) by projecting the pattern of the disc (11) onto the substrate (1) through the projection optical system (13). Additionally, the exposure device (100) may have a substrate stage (41) that is movable while holding the substrate (1), a measuring device (20) that measures the position (height) of the side surface, and a control unit (CNT). The measuring device (20) according to the present embodiment may be configured to measure the surface height (surface position) of the substrate (1) as the position of the side surface. In the exposure device (100) according to the present embodiment, the substrate stage (41), the measuring device (20), and the control unit (CNT) may constitute a positioning device for positioning the substrate (1). In the positioning device, the control unit (CNT) controls the substrate stage (41) based on the measurement result of the measuring device (20).

[0012] The substrate stage (41) holds the substrate (1) and drives the substrate (1) in the X and Y directions by moving it over a stage plate (not shown) in the X and Y directions. The substrate stage (41) may be configured to drive the substrate (1) in the X and Y directions as well as in the 6-axis (X, Y, Z, θX, θY, θZ) directions. A reference plate (2) having a reference surface may be installed on the substrate stage (41). The reference surface of the reference plate (2) is a flat surface, and a reference mark, whose position is detected by, for example, an alignment sensor (not shown), may be installed on the reference surface.

[0013] The position and orientation of the substrate stage (41) are measured by a position measurement system (MS) and can be controlled by a control unit (CNT) based on the output of the position measurement system (MS). The position measurement system (MS) is equipped with a plurality of position measuring instruments and measures the position and orientation of the substrate stage (41) with respect to six axes (X, Y, Z, θX, θY, θZ). In FIG. 1, two position measuring instruments 42 and 43 that measure the Y-direction position of the substrate stage (41) are shown. However, in practice, a position measuring instrument that measures the X-direction position of the substrate stage (41), a position measuring instrument that measures the Z-direction position of the substrate stage (41), etc., are also installed. Each position measuring instrument may be equipped with, for example, an interferometer, an encoder, or one or more interferometers and one or more encoders.

[0014] The measuring device (20) is equipped with an air sensor (21) and measures the surface height of the substrate (1) using the air sensor (21). The air sensor (21) is a sensor (measuring instrument) that discharges (injects) air (gas) toward the surface of the substrate (1) through a conduit and measures the surface height of the substrate (1) based on the pressure of the conduit. Since the air discharged from the air sensor (21) only touches the outermost surface of the substrate (1) and does not penetrate into the interior of the substrate (1), the air sensor (21) can precisely measure the surface height of the substrate (1) without being affected by the internal structure of the substrate (1). For example, the air sensor (21) can be configured to measure the surface height of the substrate (1) with a resolution higher than the nanometer order or 1 nm. Additionally, the air sensor (21) is also referred to as an air gauge sensor, an air gap sensor, or an air micro sensor.

[0015] The control unit (CNT) is configured by a computer (information processing device) having a processor such as a central processing unit (CPU) and a memory such as memory, for example, and controls each part of the exposure device (100). The control unit (CNT) may be implemented by a PLD (Programmable Logic Device) such as an FPGA (Field Programmable Gate Array), an ASIC (Application Specific Integrated Circuit), a general-purpose or dedicated computer on which a program is installed, or a combination of all or part of these.

[0016] Next, an example of the configuration of the air sensor (21) will be described. FIG. 2a schematically illustrates a first example of the configuration of the air sensor (21). The air sensor (21) may be equipped with a reference nozzle (31) that discharges air through a first conduit (C1), a measuring nozzle (32) that discharges air through a second conduit (C2), and a differential pressure sensor (33) that detects the difference between the pressure of the first conduit (C1) and the pressure of the second conduit (C2). In each of the reference nozzle (31) and the measuring nozzle (32), an orifice (30) is installed at the air inlet and outlet.

[0017] Air can be supplied from a mass flow controller (36) to a reference nozzle (31) (first conduit (C1)) and a measuring nozzle (32) (second conduit (C2)) through a sensor (35), such as a pressure gauge or a flow meter. Air is supplied to the mass flow controller (36) from a gas source (39) through a valve (38) and a filter (37). The valve (38) may be installed to turn on / off the supply of air from the gas source (39) to the mass flow controller (36). The filter (37) may be installed to supply clean air from the gas source (39) to the mass flow controller (36). The output of the differential pressure sensor (33) is transmitted to a processor (34), and the processor (34) converts the output of the differential pressure sensor (33) (i.e., the difference between the pressure of the first conduit (C1) and the pressure of the second conduit (C2)) into height information.

[0018] The mass flow controller (36) supplies air with constant pressure and flow rate to the reference nozzle (31) and the measuring nozzle (32). More specifically, the mass flow controller (36) may operate to maintain the pressure at the outlet side of the mass flow controller (36) at a predetermined pressure (e.g., 70 kPa ± 0.01 kPa) based on the output of the sensor (35). The diameter of the orifice (30) installed in each of the reference nozzle (31) and the measuring nozzle (32) may be, for example, within the range of 0.1 to 0.2 mm. Since the orifice (30) acts as a resistance to the air flow, the pressure in the first conduit (C1) of the reference nozzle (31) can be maintained constant. Meanwhile, the pressure in the second conduit (C2) of the measuring nozzle (32) has a value corresponding to the distance between the measuring nozzle (32) and the measuring side. That is, as the distance between the measuring nozzle (32) and the measuring side is reduced, the pressure in the second channel (C2) increases, and as the distance increases, the pressure in the second channel (C2) decreases. In addition, the measuring side is the surface of the substrate (1) in this embodiment, but it may also be the surface of the reference plate (2).

[0019] The differential pressure sensor (33) is provided with the pressure of the first conduit (C1) of the reference nozzle (31) and the pressure of the second conduit (C2) of the measuring nozzle (32). That is, the differential pressure sensor (33) is supplied with a differential pressure corresponding to the distance between the measuring nozzle (32) and the side surface to be measured. The processor (34) converts the output of the differential pressure sensor (33) into height information of the side surface to be measured and provides the corresponding height information to the control unit (CNT). In this way, the air sensor (21) measures the height of the side surface to be measured by discharging air toward the outermost surface of the side surface to be measured. Because of this, measurement errors caused by internal structures that may exist below the side surface to be measured do not occur.

[0020] The air sensor (21) according to the present embodiment is provided with a measuring nozzle (32) as a facing part facing the surface of the substrate (1) which is the side surface, and measures the surface height of the substrate (1) in a state (first state) in which the measuring nozzle (32) is positioned at a predetermined distance from the surface of the substrate (1). This state may be understood as a state in which the tip (bottom) of the measuring nozzle (32) is brought close to the surface of the substrate (1), and is also referred to as the "nozzle proximity state" below. That is, the air sensor (21) discharges air from the measuring nozzle (32) toward the surface of the substrate (1) in the nozzle proximity state, and measures the surface height of the substrate (1) based on the internal pressure of the measuring nozzle (32) at that time (i.e., the pressure of the second conduit (C2).

[0021] Additionally, a moving part (22) for moving (driving) the air sensor (21) is installed in the measuring device (20). When measuring the surface height of the substrate (1) by the air sensor (21) is initiated, the moving part (22) moves the air sensor (21) in the -Z direction so that the measuring nozzle (32) is positioned at a predetermined distance from the surface of the substrate (1). Meanwhile, when measuring the surface height of the substrate (1) by the air sensor (21) is finished (when measurement is finished), the moving part (22) moves the air sensor (21) in the +Z direction (a direction away from the surface of the substrate (1)) to retract the air sensor (21). That is, the moving part (22) can be configured to move the air sensor (21) (measuring nozzle (32)) relatively in the ±Z direction with respect to the substrate (1). Additionally, the moving part (22) may be understood as a driving part that drives the air sensor (21) in the ±Z direction.

[0022] FIG. 2b schematically illustrates a second configuration example of the air sensor (21). In the second configuration example, a first differential pressure sensor (33A) and a second differential pressure sensor (33B) are installed in place of the differential pressure sensor (33) of the first configuration example. The first differential pressure sensor (33A) detects the difference between the pressure in the first conduit (C1) of the reference nozzle (31) and the pressure in the second conduit (72) of the measuring nozzle (32). Likewise, the second differential pressure sensor (33B) detects the difference between the pressure in the first conduit (C1) of the reference nozzle (31) and the pressure in the second conduit (C2) of the measuring nozzle (32). The first differential pressure sensor (33A) and the second differential pressure sensor (33B) have different sensitivities (and measurement ranges). The processor (34) can convert the output of the first differential pressure sensor (33A) into height information, and also convert the output of the second differential pressure sensor (33B) into height information.

[0023] In the air sensor (21), if deformation or misalignment of internal parts occurs due to shocks such as vibration, the measurement precision may decrease. Therefore, when retracting the air sensor (21) at the end of measurement in the air sensor (21), it is desirable to move the air sensor (21) so that shocks (vibrations) causing deformation or misalignment of internal parts are not applied to the air sensor (21). Meanwhile, in the exposure device (100), if an emergency situation occurs, such as the occurrence of an earthquake, an abnormality in the support member of the measurement device (20) (air sensor (21)), or an operational abnormality of the substrate stage (41), the air sensor (21) and the substrate (1) on the substrate stage (41) that are close to each other may come into contact. In this case, the air sensor (21) may receive a large shock, causing deformation or misalignment of internal parts of the air sensor (21), and other parts such as the substrate stage (41) may also be damaged. To stop the exposure device (100) in an emergency, an operator may press an emergency stop button (14) (see FIG. 1) installed on the exposure device (100).

[0024] To solve these problems, the measuring device (20) according to the present embodiment includes a first mode and a second mode as an operation mode in which a moving part (22) moves the air sensor (21) in the +Z direction (a direction away from the surface of the substrate (1)) to retract the air sensor (21). The first mode is an operation mode in which the moving part (22) moves (retracts) the air sensor (21) in the +Z direction upon receiving a normal retraction signal (first signal) indicating the retraction of the air sensor (21) when measurement at the air sensor (21) ends. The second mode is an operation mode in which the moving part (22) moves (retracts) the air sensor (21) in the +Z direction upon receiving an emergency retraction signal (second signal) indicating the retraction of the air sensor (21) in an emergency. The retraction time of the air sensor (21) is shorter in the second mode than in the first mode. The withdrawal time of the air sensor (21) refers to the time from receiving a withdrawal signal indicating withdrawal of the air sensor (21) until the withdrawal of the air sensor (21) is completed. That is, the time from receiving an emergency withdrawal signal in the second mode until the withdrawal of the air sensor (21) is completed is shorter than the time from receiving a normal withdrawal signal in the first mode until the withdrawal of the air sensor (21) is completed. Accordingly, the air sensor (21) can be appropriately withdrawn according to the condition of the measuring device (20). Here, the normal withdrawal signal and the emergency withdrawal signal are trigger signals (control signals) supplied from the control unit (CNT) to the moving unit (22) to withdraw the air sensor (21) (i.e., move it in the +Z direction).

[0025] FIG. 3 schematically illustrates an example of the configuration of a measuring device (20) according to the present embodiment. As described above, the measuring device (20) may be equipped with an air sensor (21) and a moving part (22). In the present embodiment, the moving part (22) is equipped with one type of moving mechanism (22a), and the air sensor (21) in each of the first mode and the second mode may be moved by the one type of moving mechanism (22a). The moving mechanism (22a) is attached to a frame (15) (support member). For example, the moving mechanism (22a) is equipped with an actuator having a stator installed on the frame (15) and a movable member installed on the air sensor (21). By moving the movable member relative to the stator, the air sensor (21) is moved in the ±Z direction. As the actuator of the moving mechanism (22a), an air cylinder, a linear motor, a voice coil motor, or a solenoid may be used. Additionally, the frame (15) can be supported by the structure of the exposure device (100) through the vibration damping mount (16).

[0026] FIG. 4 is a flowchart illustrating the operation of a measuring device (20) according to the present embodiment. FIG. 4 illustrates the operation flow of the measuring device (20) under the control of a control unit (CNT). FIG. 4 is opened with the air sensor (21) (measuring nozzle (32)) positioned in a retracted position. The retracted position is a position where the air sensor (21) is positioned so as to be further away from the substrate (1) in the +Z direction than the measuring position. The measuring position is a position where the air sensor (21) is positioned at a predetermined distance from the surface of the substrate (1) to measure the surface height of the substrate (1).

[0027] When the measuring device (20) receives a placement signal in step S11, it proceeds to step S12 and moves the air sensor (21) (measuring nozzle (32)) in the -Z direction by the moving unit (22) to place the air sensor (21) at the measurement position. The placement signal is a trigger signal (control signal) supplied from the control unit (CNT) to the moving unit (22) to indicate the placement of the air sensor (21) (measuring nozzle (32)) at the measurement position. After that, it proceeds to step S13, and the measuring device (20) begins measuring the surface height of the substrate (1) by the air sensor (21) upon receiving a measurement start signal. The measurement start signal is a trigger signal (control signal) supplied from the control unit (CNT) to the air sensor (21) to indicate the start of measuring the surface height of the substrate (1).

[0028] When the measuring device (20) receives an emergency withdrawal signal in step S14 while measuring the surface height of the substrate (1), it proceeds to step S15, and moves the air sensor (21) (measuring nozzle (32)) in the +Z direction by the moving unit (22) to the second mode to place the air sensor (21) in the withdrawal position. When the air sensor (21) is placed in the withdrawal position, the withdrawal of the air sensor (21) is terminated. As described above, the emergency withdrawal signal is a trigger signal (control signal) supplied from the control unit (CNT) to the moving unit (22) to instruct the withdrawal of the air sensor (21) in an emergency.

[0029] Here, the exposure device (100) is equipped with an abnormality detection sensor that detects various abnormalities within the device. When the abnormality detection sensor detects an abnormality, the control unit (CNT) can supply an emergency evacuation signal to the moving unit (22). Various abnormalities are listed below. Even when the emergency stop button (14) is pressed by an operator, the control unit (CNT) can supply an emergency evacuation signal to the moving unit (22).

[0030] · Abnormal condition of the exposure device (100)

[0031] · Abnormalities in the deviation, current, and / or position of the air sensor (21)

[0032] · Abnormalities in deviation, current and / or position of the substrate stage (41)

[0033] · Deviation of the frame (15), current and / or position abnormalities

[0034] · Deviation, current and / or position abnormalities of the vibration damping mount (16)

[0035] When the measuring device (20) receives a normal withdrawal signal in step S16, it proceeds to step S17 and moves the air sensor (21) (measuring nozzle (32)) in the +Z direction in the first mode by the moving unit (22) to place the air sensor (21) in the withdrawal position. When the air sensor (21) is placed in the withdrawal position, the withdrawal of the air sensor (21) is terminated. As described above, the normal withdrawal signal is a trigger signal (control signal) supplied from the control unit (CNT) to the moving unit (22) to indicate the withdrawal of the air sensor (21) when measurement at the air sensor (21) is terminated. When the control unit (CNT) acquires height information output from the air sensor (21), it determines that measurement at the air sensor (21) is terminated and can supply the normal withdrawal signal to the moving unit (22).

[0036] Next, a first mode and a second mode for the moving unit (22) to move (retreat) the air sensor (21) in the +Z direction will be described. As described above, the first mode is an operation mode in which the moving unit (22) moves (retreats) the air sensor (21) in the +Z direction when measurement at the air sensor (21) is successfully completed. Meanwhile, the second mode is an operation mode in which the moving unit (22) moves (retreats) the air sensor (21) in the +Z direction in an emergency, and the retreat time of the air sensor (21) is shorter than that of the first mode.

[0037] FIG. 5a illustrates an example of the time change of the movement speed of the air sensor (21) in each of the first mode and the second mode. In FIG. 5a, "T1" indicates the timing at which the moving part (22) starts moving the air sensor (21) in the first mode. "T2" indicates the timing at which the moving part (22) starts moving the air sensor (21) in the second mode. "T0" indicates the timing at which the moving part (22) receives a retreat signal (normal retreat signal or emergency retreat signal).

[0038] In the first mode, when a normal withdrawal signal is received at timing T0, the movement of the air sensor (21) is initiated at timing T1 after performing a predetermined preparation operation. Meanwhile, in the second mode, when an emergency withdrawal signal is received at timing T0, the predetermined preparation operation is omitted and the movement of the air sensor (21) is initiated at timing T2. Accordingly, the waiting time P2 from the reception of the emergency withdrawal signal in the second mode to the start of movement of the air sensor (21) can be made shorter than the waiting time P1 from the reception of the normal withdrawal signal in the first mode to the start of movement of the air sensor (21). Therefore, the withdrawal time of the air sensor (21) in the second mode can be made shorter than the withdrawal time of the air sensor (21) in the first mode.

[0039] FIG. 5b illustrates an example of the time change of the movement speed of the air sensor (21) in each of the first mode and the second mode. In FIG. 5b, "Ts" indicates the timing at which the moving part (22) starts moving the air sensor (21) in each of the first mode and the second mode. Additionally, "T0" indicates the timing at which the moving part (22) receives a retreat signal (normal retreat signal or emergency retreat signal).

[0040] In the first mode, when a normal withdrawal signal is received at timing T0, the movement of the air sensor (21) is initiated at timing Ts, and the air sensor (21) is moved with acceleration A1. Meanwhile, in the second mode, when an emergency withdrawal signal is received at timing T0, the movement of the air sensor (21) is initiated at timing Ts, and the air sensor (21) is moved with acceleration A2, which is greater than acceleration A1. By doing so, the withdrawal time of the air sensor (21) in the second mode can be made shorter than the withdrawal time of the air sensor (21) in the first mode. Here, in the second mode, as shown in FIG. 5a, the waiting time may be made shorter than in the first mode, and as shown in FIG. 5b, the acceleration may be made greater than in the first mode.

[0041] As described above, the measuring device (20) according to the present embodiment includes a first mode in which the moving part (22) moves (retreats) the air sensor (21) upon receiving a normal retreat signal, and a second mode in which the moving part (22) moves (retreats) the air sensor (21) upon receiving an emergency retreat signal. The retreat time of the air sensor (21) in the second mode is shorter than in the first mode. Therefore, the air sensor (21) can be appropriately retreated depending on the condition of the measuring device (20).

[0042] Here, in the above-described embodiment, an air sensor (21) using gas is exemplified as the sensor that the moving part (22) moves in each of the first mode and the second mode. However, the sensor that the moving part (22) moves may be a sensor that has a facing part facing the side of the object and measures the position of the side of the object while the facing part is positioned at a predetermined distance from the side of the object. For example, an optical sensor or a capacitance sensor may be used as the sensor that the moving part (22) moves.

[0043] <Second Embodiment>

[0044] A second embodiment according to the present disclosure is described. In this embodiment, an example is described in which a plurality of moving mechanisms of different types for moving the air sensor (21) are installed in the moving part (22). Furthermore, this embodiment basically inherits the first embodiment, and matters not mentioned below may follow the first embodiment.

[0045] FIG. 6 schematically illustrates an example of the configuration of a measuring device (20) according to the present embodiment. In the measuring device (20) according to the present embodiment, a first moving mechanism (22b) and a second moving mechanism (22c), which have different methods of moving the air sensor (21), are installed in the moving part (22). In each of the first mode and the second mode, the air sensor (21) is moved using the first moving mechanism and the second moving mechanism. The first moving mechanism (22b) is equipped with an actuator having a stator and a movable member, and moves the air sensor (21) in the ±Z direction by moving the movable member relative to the stator. As the actuator of the first moving mechanism (22b), an air cylinder, a linear motor, a voice coil motor, or a solenoid may be used. The second moving mechanism (22c) may be provided with a spring member that applies a force in the +Z direction to an air sensor (21) (measuring nozzle (32)) positioned at a predetermined distance from the surface of the substrate (1).

[0046] The measuring device (20) according to the present embodiment may further include a fixing mechanism (23) for fixing the position of an air sensor (21) that is positioned at a predetermined distance from the surface of the substrate (1) to measure the surface height of the substrate (1), i.e., the position of the air sensor (21) positioned at the measuring position. For example, the fixing mechanism (23) is installed on a support member (17) attached to the frame (15) and fixes the position of the air sensor (21) (measuring nozzle (32)) using at least one of vacuum suction force and electromagnetic force. As the fixing mechanism (23), a vacuum chuck, an electromagnet, an electrostatic chuck, a voice coil motor, or a solenoid may be used.

[0047] FIGS. 7a to 7f schematically illustrate specific configuration examples and operation examples of a measuring device (20) according to the present embodiment. In the measuring device (20) according to the present embodiment, the first moving mechanism (22b) comprises an actuator having a stator (22b1) installed on a frame (15) and a movable member (22b2) capable of moving in the ±Z direction relative to the stator (22b1). The movable member (22b2) of the first moving mechanism (22b) can come into contact with the upper surface of the air sensor (21). The second moving mechanism (22c) comprises a spring member, one end of which is connected to the frame (15) and the other end of which is connected to the air sensor (21). By using a spring member in the second moving mechanism (22c), complex control is unnecessary, and the measuring device (20) can be configured simply. In addition, in the following description, the first moving mechanism (22b) may be referred to as "actuator (22b)" and the second moving mechanism (22c) may be referred to as "spring member (22c)".

[0048] The measuring device (20) according to the present embodiment can operate according to the flowchart of FIG. 4 described above. FIG. 7a shows the state of the measuring device (20) before the flowchart of FIG. 4 is initiated, that is, the state in which the air sensor (21) is positioned in the retracted position. When the measuring device (20) receives a positioning signal in step S11, it proceeds to step S12, and moves the air sensor (21) in the -Z direction by moving the actuator (22b2) of the actuator (22b) in the -Z direction as shown in FIG. 7b. When the air sensor (21) is positioned in the measuring position, the fixing mechanism (23) fixes the position of the air sensor (21).

[0049] Then, as shown in FIG. 7c, the measuring device (20) moves the actuator (22b2) in the +Z direction to separate the actuator (22b2) from the air sensor (21). In this state (separated state or second state) where the actuator (22b2) is separated from the air sensor (21), a force in the +Z direction is applied to the air sensor (21) by the restoring force of the spring member (22c). However, since the position of the air sensor (21) is fixed by the fixing mechanism (23), the air sensor (21) remains in the measurement position. In this state, the measuring device (20) proceeds to step S13 and, upon receiving a measurement start signal, begins measuring the surface height of the substrate (1) by the air sensor (21).

[0050] During the measurement of the surface height of the substrate (1), if an emergency withdrawal signal is received in step S14, the process proceeds to step S15, and the measuring device (20) moves the air sensor (21) in the +Z direction in the second mode to place the air sensor (21) in the withdrawal position. More specifically, as shown in FIG. 7d, the measuring device (20) releases the position fixation of the air sensor (21) by the fixing mechanism (23), thereby moving the air sensor (21) in the +Z direction by the force of the spring member (22c) to place the air sensor (21) in the withdrawal position. That is, in the second mode of the present embodiment, the position fixation of the air sensor (21) by the fixing mechanism (23) is released in the separated state, thereby moving the air sensor (21) in the +Z direction by the force of the spring member (22c) to place it in the withdrawal position.

[0051] After the surface height measurement of the substrate (1) is completed, if a normal withdrawal signal is received in step S16, the process proceeds to step S17, and the measuring device (20) moves the air sensor (21) in the +Z direction in the first mode to place the air sensor (21) in the withdrawal position. More specifically, as shown in FIG. 7e, the measuring device (20) moves the actuator (22b2) of the actuator (22b) in the -Z direction to bring the actuator (22b2) into contact with the air sensor (21), and in this state, releases the position fixation of the air sensor (21) by the fixing mechanism (23). The operation of moving the actuator (22b2) in the -Z direction to bring it into contact with the air sensor (21) corresponds to the preparation operation described above with reference to FIG. 5a. Next, as shown in FIG. 7f, the measuring device (20) moves the air sensor (21) in the +Z direction by the force of the spring member (22c) while supporting the air sensor (21) by the actuator (22b2) by moving the actuator (22b2) of the actuator (22b). Thus, the air sensor (21) is positioned in the retracted position.

[0052] In this way, in the first mode, when a normal withdrawal signal is received, a preparatory operation is performed to move the actuator (22b2) in the -Z direction to contact the air sensor (21), and then the movement of the air sensor (21) begins. Meanwhile, in the second mode, when an emergency withdrawal signal is received, the preparatory operation is omitted and the movement of the air sensor (21) begins. Accordingly, the waiting time P2 from the reception of the emergency withdrawal signal in the second mode to the start of movement of the air sensor (21) can be made shorter than the waiting time P1 from the reception of the normal withdrawal signal in the first mode to the start of movement of the air sensor (21). Because of this, the withdrawal time of the air sensor (21) in the second mode can be made shorter than the withdrawal time of the air sensor (21) in the first mode.

[0053] In the first mode, the air sensor (21) is supported by the actuator (22b2) of the actuator (22b) and the actuator (22b2) is moved in the +Z direction, and the air sensor (21) is moved in the +Z direction by the force of the spring member (22c). Meanwhile, in the second mode, the air sensor (21) is moved in the +Z direction by only the force of the spring member (22c) without support by the actuator (22b2) of the actuator (22b). By doing so, the acceleration A2 that moves the air sensor (21) in the second mode can be made greater than the acceleration A1 that moves the air sensor (21) in the first mode. Therefore, the withdrawal time of the air sensor (21) in the second mode can be made shorter than the withdrawal time of the air sensor (21) in the first mode.

[0054] <Third Embodiment>

[0055] A third embodiment according to the present disclosure is described. In this embodiment, an example is described in which only a part (measuring nozzle (32)) of the air sensor (21) is moved by the moving part (22). That is, in this embodiment, it is described that the measuring device (20) may be configured such that the moving part (22) moves at least the opposing part (measuring nozzle (32)) of the air sensor (21). Furthermore, this embodiment basically inherits the first embodiment, and matters not mentioned below may follow the first embodiment. The second embodiment may be applied to this embodiment, and an example applying the configuration of the second embodiment is described below.

[0056] FIG. 8 schematically illustrates an example of the configuration of a measuring device (20) according to the present embodiment. The measuring device (20) according to the present embodiment may be configured such that only the measuring nozzle (32), which is the opposing part of the air sensor (21) facing the surface of the substrate (1), is moved by a moving part (22) (first moving mechanism (22a), second moving mechanism (22b)). More specifically, the measuring nozzle (32) of the air sensor (21) is installed on a holder (24), and the moving part (22) moves the measuring nozzle (32) in the ±Z direction by moving the holder (24) in the ±Z direction. Components of the air sensor (21) other than the measuring nozzle (32) are supported by a frame (15), and air is supplied to the measuring nozzle (32) through a pipe (T). By configuring the measuring device (20) in this way, the weight of the object moved by the moving part (22) is reduced, so that the acceleration for moving the object in the second mode can be further increased.

[0057] Here, in the measuring device (20) according to the present embodiment, since there is a margin regarding the weight of the object moved by the moving part (22), it becomes possible to move other parts by the moving part (22). For example, the measuring device (20) can move a sensor that measures the surface height of the substrate (1) in a different way than the air sensor (21) by the moving part (22). In FIG. 8, an optical sensor (25) (second sensor) that measures the surface height of the substrate (1) using light is installed on the holder (24). The optical sensor (25) is a measuring instrument that measures the surface height of the substrate (1) based on the reflected light by irradiating light onto the surface of the substrate (1) and receiving reflected light from the substrate (1). The moving part (22) moves the optical sensor (25) in the ±Z direction together with the measuring nozzle (32) of the air sensor (21) by moving the holder (24) in the ±Z direction.

[0058] <Effective form of method for manufacturing an article>

[0059] The method for manufacturing an article according to an embodiment of the present disclosure is suitable for manufacturing articles such as microdevices, such as semiconductor devices, or devices having a microstructure. The method for manufacturing an article according to the present embodiment includes a forming step of forming a pattern on a substrate using the lithography apparatus (lithography method) described above, a processing step of processing the substrate on which the pattern is formed in the forming step, and a manufacturing step of manufacturing an article from the substrate processed in the processing step. When the lithography apparatus is configured as an exposure apparatus, the forming step may be a step of forming a latent image pattern on a photosensitive material coated on a substrate by exposing the substrate using the exposure apparatus (exposure method) described above. In this case, the processing step may include a step of developing the substrate on which the latent image pattern is formed. The method for manufacturing an article further includes other well-known steps (oxidation, film formation, deposition, doping, planarization, etching, resist stripping, dicing, bonding, packaging, etc.). The method for manufacturing an article according to the present embodiment is advantageous over conventional methods in at least one of the performance, quality, productivity, and production cost of the article.

[0060] <Other embodiments>

[0061] Additionally, embodiments of the present disclosure may be realized by a computer having a system or device having one or more circuits (e.g., an application-oriented integrated circuit (ASIC)) for performing one or more functions of the above-described embodiments(s) by reading and executing computer-executable instructions (e.g., one or more programs) recorded in a storage medium (more fully referred to as a 'non-transient computer-readable storage medium'), and / or having one or more circuits for performing one or more functions of the above-described embodiments(s); and may also be realized by a method performed by said computer having said system or device by reading and executing said computer-executable instructions from said storage medium to perform one or more functions of said embodiments(s) and / or controlling said one or more circuits for performing one or more functions of said embodiments(s). said computer may have one or more processors (e.g., a central processing unit (CPU), a microprocessing unit (MPU)), and may have a network of separate computers or separate processors for reading and executing computer-executable instructions. The above computer-executable instructions may be provided to the computer, for example, from a network or the storage medium. The storage medium is, for example, a hard disk, random access memory (RAM), read-only memory (ROM), storage of a distributed computing system, or an optical disc (compact disc (CD), digital multifunction disc (DVD), or Blu-ray disc (BD)). TM One or more of the following may be provided: flash memory elements, memory cards, etc.

[0062] Although the present disclosure has been described with reference to exemplary embodiments, it will be understood that the present disclosure is not limited to the exemplary embodiments disclosed above. The scope of the claims below should be broadly interpreted to include all variations, equivalent structures, and functions.

Claims

Claim 1 A measuring device for measuring the position of a side of a subject, comprising: a sensor that measures the position of the side of a subject in a first state in which the opposing part is positioned at a predetermined distance from the side of a subject, and a moving part that moves at least the opposing part among the sensors, wherein the moving part operates in a first mode in which the opposing part is moved away from the side of a subject upon receiving a first signal indicating withdrawal of the opposing part upon completion of measurement at the sensor, and in a second mode in which the opposing part is moved away in the said direction upon receiving a second signal indicating withdrawal of the opposing part in an emergency, wherein the time from receiving the second signal in the second mode until withdrawal of the opposing part is completed is shorter than the time from receiving the first signal in the first mode until withdrawal of the opposing part is completed. Claim 2 A measuring device according to claim 1, wherein the time from receiving the second signal in the second mode until initiating movement of the opposing part is shorter than the time from receiving the first signal in the first mode until initiating movement of the opposing part. Claim 3 In claim 1, the second mode is a measuring device in which the acceleration moving the opposing part is greater than that of the first mode. Claim 4 A measuring device according to claim 1, wherein the moving part comprises a first moving mechanism and a second moving mechanism having different methods of moving the opposing part, and wherein the opposing part in each of the first mode and the second mode is moved using the first moving mechanism and the second moving mechanism. Claim 5 A measuring device according to claim 4, wherein the first moving mechanism comprises an actuator having a movable member capable of moving in the said direction, and the second moving mechanism comprises a spring member that applies a force in the said direction to the opposing part of the first state. Claim 6 A measuring device according to claim 5, wherein during measurement at the sensor, the actuator is positioned spaced apart from the opposing part, and in the first mode, the moving part contacts the actuator with the opposing part and moves the opposing part in the direction by the force of the spring member while supporting the opposing part by the actuator, and in the second mode, the moving part moves the opposing part in the direction by the force of the spring member in a second state in which the actuator is spaced apart from the opposing part. Claim 7 A measuring device according to claim 6, further comprising a fixing mechanism for fixing the position of the opposing part in the first state, and in the second mode, wherein the moving part moves in the direction by the spring member as the fixing of the position of the opposing part by the fixing mechanism is released. Claim 8 In claim 7, the fixing mechanism is a measuring device that fixes the position of the opposing part by using at least one of vacuum suction force and electromagnetic force. Claim 9 A measuring device according to claim 1, wherein the moving part is equipped with one type of moving mechanism, and the opposing part in each of the first mode and the second mode is moved using the one type of moving mechanism. Claim 10 A measuring device according to claim 1, wherein the sensor comprises, as the opposing part, a nozzle that discharges gas toward the side surface through a conduit, and measures the height of the side surface based on the pressure of the conduit. Claim 11 A measuring device according to claim 1, further comprising a second sensor that measures the position of the side surface of the device using light, wherein the moving part moves the second sensor in the said direction together with the opposing part. Claim 12 A positioning device for positioning a substrate, comprising: a stage that moves while holding the substrate; a measuring device described in any one of claims 1 to 11 that measures the surface position of the substrate as a side surface; and a control unit that controls the stage based on the measurement result of the measuring device. Claim 13 A lithography apparatus for forming a pattern on a substrate, comprising a positioning device as described in claim 12. Claim 14 A method for manufacturing an article, comprising: a step of forming a pattern on a substrate using a lithography apparatus described in claim 13; a step of processing the substrate that has undergone the forming step; and a step of manufacturing an article from the substrate that has undergone the processing step.

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