Embedded electrical termination for ceramics

Abstract

In one embodiment, the electrical termination assembly comprises a first ceramic member; a second ceramic member fixed to the first ceramic member; and at least one electrical component embedded between the first ceramic member and the second ceramic member. The electrical termination extends through a bore into a recess of the first ceramic member and the second ceramic member and is in electrical contact with the electrical component. The electrical termination includes a rod disposed within the bore and a flange disposed within the recess. At least one interface member is disposed between the flange and the recess. The electrical termination and the interface member are each made of different materials, and these materials have a coefficient of thermal expansion adjusted so that tensile stress is generated in the rod and compressive stress is generated in the first ceramic member and the second ceramic member.

Description

Technology Field

[0001] This application claims and enjoys the benefits of U.S. Provisional Application No. 63 / 622,278, filed January 18, 2024. The entire disclosure of said application is incorporated herein by reference.

[0002] The present disclosure relates to an electrical termination, and more specifically, to an electrical termination for connection with a component embedded within a ceramic substrate, such as, for example, a radio frequency (RF) antenna embedded in a ceramic pedestal for semiconductor processes. Background Technology

[0003] The contents described in this section are intended only to provide background information related to the present disclosure and do not constitute prior art.

[0004] Ceramic pedestals used in semiconductor processes generally contain numerous electrical components, including clamping electrodes, radio frequency (RF) antennas, and heater circuits. However, because ceramic materials are inherently brittle and have a relatively low coefficient of thermal expansion, it is difficult to embed electrically conductive terminations with a higher coefficient of thermal expansion within the ceramic, which can lead to cracking of the ceramic material. More specifically, since the electrical components are made of refractory metals or conductive ceramics with very low coefficients of thermal expansion, it is difficult to connect metal electrodes to these embedded electrical components.

[0005] Electrical components are generally formed in layers, typically having a thin thickness, and are surrounded by ceramic materials. When metal electrodes, generally made of nickel or nickel alloys, are directly bonded to these thin electrical components, typically by brazing, failure to consider the coefficients of thermal expansion of the different materials can cause stress to build up in the ceramic and / or adjacent electrical conductive layers in the relevant area, potentially leading to damage. Furthermore, any embedded electrical components must be sealed from the atmosphere surrounding the ceramic pedestal, i.e., the atmosphere inside the semiconductor process chamber. However, embedded electrical components have low oxidation resistance at high temperatures, which presents problems such as limited lifespan or reduced reliability. The problem to be solved

[0006] The present disclosure aims to solve these problems among various integration problems related to electrical termination within a ceramic substrate or ceramic pedestal. means of solving the problem

[0007] This section provides a general overview of the present disclosure and does not comprehensively describe the full scope or all features of the present disclosure.

[0008] In one embodiment of the present disclosure, an electrical termination assembly comprises: a first ceramic member; a second ceramic member fixed to the first ceramic member; and at least one electrical component embedded between the first ceramic member and the second ceramic member, wherein the first ceramic member comprises a bore and a recess disposed adjacent to the bore, the recess being formed in at least one of the first ceramic member and the second ceramic member, and the electrical termination assembly comprises an electrical termination portion extending through the bore and into the recess and electrically contacting the at least one electrical component, wherein the electrical termination portion comprises: a rod disposed within the bore having a proximal end and a distal end; The electric termination assembly comprises a flange disposed at the distal end of the rod and disposed within the recess, wherein the electric termination assembly comprises at least one interface member disposed between the flange and the recess, and the electric termination and the interface member each comprise different materials having adjusted coefficients of thermal expansion, and accordingly, tensile stress is generated in the rod and compressive stress is generated in the first ceramic member and the second ceramic member.

[0009] In variations of this electrical termination assembly, the following may be implemented individually or in combination:

[0010] The interface member comprises a sputtered layer; the sputtered layer extends along at least a portion of the interface between the first ceramic member and the second ceramic member; further comprises a sealing ring disposed around the upper surface of the flange; the rod is made of a nickel alloy material; the flange is 99.5 wt.% nickel; the flange and the rod comprise a single unitized part; the distal end of the rod comprises a bore, and the bore extends through the center of the flange; the first ceramic member and the second ceramic member are made of aluminum nitride (AlN) material; the flange has a geometry and material capable of elastic deformation; the lower portion of the rod comprises a dimple; the flange further comprises a sealing ring; the proximal end of the rod comprises an external thread, and the electric termination assembly further comprises: a nut screwed into the external thread of the rod; and a sealing ring disposed between the nut and the upper surface of the first ceramic member; The nut further comprises a washer disposed between the sealing ring and the nut. The nut comprises: a flange having an upper surface and a lower surface; an upper peripheral recess disposed on the upper surface of the flange; a lower peripheral recess disposed on the lower surface of the flange; an interface material disposed within each of the upper peripheral recess and the lower peripheral recess; a ceramic ring disposed on the upper surface of the flange and covering the interface material; and a shaft extending proximally, wherein the proximal end of the shaft comprises an external thread; the nut further comprises a peripheral step; the nut further comprises a peripheral chamfer; and the nut further comprises a washer disposed between the lower surface of the nut and the second ceramic member.

[0011] In one embodiment of the present disclosure, an electrical termination assembly comprises: a first ceramic member; a second ceramic member fixed to the first ceramic member; and at least one electrical component embedded between the first ceramic member and the second ceramic member, wherein the first ceramic member comprises a bore extending to the at least one electrical component, and the electrical termination assembly comprises an electrical termination portion extending through the bore and electrically contacting the at least one electrical component, wherein the electrical termination portion comprises: a rod disposed within the bore having a proximal end and a distal end; and a puck disposed at the distal end of the rod, and a first interface member disposed between the distal end of the rod and the puck; and a second interface member disposed between the puck and the at least one electrical component, wherein the puck has a coefficient of thermal expansion greater than that of the first ceramic member and smaller than that of the rod.

[0012] In a variation of this electrical termination assembly, the following may be implemented individually or in combination: a first ceramic member; a second ceramic member fixed to the first ceramic member; at least one electrical component embedded between the first ceramic member and the second ceramic member, wherein the first ceramic member comprises a bore extending to the at least one electrical component and an electrical termination extending through the bore and electrically contacting the at least one electrical component, wherein the electrical termination comprises: a rod disposed within the bore having a proximal end and a distal end; an interface member disposed at the distal end of the rod and in contact with the at least one electrical component; a cap comprising an internal recess and a plurality of bores extending into the recess, wherein the proximal end of the rod is disposed within the recess and the plurality of bores are configured to accommodate power pins; and an interface ring disposed around the proximal end of the rod and in contact with the upper surface of the first ceramic member and the periphery of the cap. And further includes an upper interface member disposed between the proximal end of the rod and the recess of the cap.

[0013] In one embodiment of the present disclosure, an electrical termination assembly comprises: a first ceramic member; a second ceramic member fixed to the first ceramic member; and at least one electrical component embedded between the first ceramic member and the second ceramic member, wherein the first ceramic member comprises a recess extending into the upper surface of the first ceramic member and a plurality of bores extending from the recess to the at least one electrical component, and comprises an electrical termination portion disposed within the recess and extending through the plurality of bores and electrically contacting the at least one electrical component, wherein the electrical termination portion comprises: a plurality of rods each having a proximal end and a distal end and each disposed within the plurality of bores; a plurality of first interface members disposed at the distal end of each of the plurality of rods and contacting the at least one electrical component; a cap disposed within the recess of the first ceramic member and over the plurality of rods; and a second interface member disposed between the cap and the plurality of rods.

[0014] In a variation of this electrical termination assembly, the following may be implemented individually or in combination: the cap comprises at least two upper recesses formed on the upper surface of the cap, the upper recesses configured to accommodate power pins; further comprises an interface material disposed within the at least two upper recesses; the cap comprises a plurality of lower recesses, each of the lower recesses configured to accommodate one of the plurality of rods; further comprises an interface material disposed within each of the plurality of lower recesses; the cap comprises: at least two upper recesses formed on the upper surface of the cap, the upper recesses configured to accommodate power pins, and a plurality of lower recesses, each of the lower recesses configured to accommodate one of the plurality of rods, and further comprises an internal circuit extending between the power pins and the plurality of rods.

[0015] In one embodiment of the present disclosure, an electrical termination assembly comprises: a first ceramic member; a second ceramic member fixed to the first ceramic member; and at least one electrical component embedded between the first ceramic member and the second ceramic member, wherein the first ceramic member comprises a bore extending to the at least one electrical component and an electrical termination extending through the bore and electrically contacting the at least one electrical component, and the electrical termination comprises: a rod disposed within the bore having a proximal end and a distal end; a first interface member disposed between the distal end of the rod and the at least one electrical component; a collar disposed around the proximal end of the rod, the collar comprising a lower flanged portion; a ceramic ring surrounding the collar and disposed on the upper surface of the lower flanged portion; and a second interface member disposed along the outer surface of the rod.

[0016] In a variation of this electrical termination assembly, the following may be implemented individually or in combination: the collar further includes an outer radial projection.

[0017] In one embodiment of the present disclosure, an electrical termination assembly comprises: a first ceramic member; a second ceramic member fixed to the first ceramic member; at least one electrical component embedded between the first ceramic member and the second ceramic member, wherein the first ceramic member comprises a bore extending to the at least one electrical component and an electrical termination extending through the bore and electrically contacting the at least one electrical component, wherein the electrical termination comprises: a rod having a proximal end and a distal end, wherein the proximal end defines a post and the rod is disposed within the bore; a first interface member disposed between the distal end of the rod and the at least one electrical component; a cap disposed around the proximal end of the rod, the cap comprising an internal recess configured to accommodate the post of the rod and a lower flanged portion; a ceramic ring surrounding the cap and disposed on the upper surface of the lower flanged portion; and a second interface member disposed between the cap and the upper surface of the first ceramic member.

[0018] In a variation of this electric termination assembly, the following may be implemented individually or in combination: the electric termination assembly further includes an interface member disposed between the ceramic ring and the lower flange portion of the cap.

[0019] Further applications of the present invention will become clearer through the detailed description below. It should be understood that the description and specific embodiments of this specification are intended merely for illustrative purposes and are not intended to limit the scope of this disclosure. Brief explanation of the drawing

[0020] To facilitate a clearer understanding of the present disclosure, various embodiments are described illustratively with reference to the accompanying drawings as follows. FIG. 1 is a cross-sectional view illustrating one embodiment of an electric termination assembly configured according to the teachings of the present disclosure. FIG. 2a is a cross-sectional view illustrating another embodiment of an electric termination assembly configured according to the teachings of the present disclosure. FIG. 2b is a cross-sectional view illustrating another embodiment of an electric termination assembly configured according to the teachings of the present disclosure. FIG. 3 is a cross-sectional view illustrating another embodiment of an electric termination assembly configured according to the teachings of the present disclosure. FIG. 4a is a cross-sectional view illustrating another embodiment of an electric termination assembly configured according to the teachings of the present disclosure. Figure 4b is an enlarged view of detail 4B-4B of Figure 4a. FIG. 5 is a cross-sectional view illustrating another embodiment of an electric termination assembly configured according to the teachings of the present disclosure. FIG. 6 is a cross-sectional view illustrating another embodiment of an electric termination assembly configured according to the teachings of the present disclosure. FIG. 7a is a cross-sectional view illustrating another embodiment of an electric termination assembly configured according to the teachings of the present disclosure. FIG. 7b is a cross-sectional view illustrating another embodiment of an electric termination assembly configured according to the teachings of the present disclosure. FIG. 8 is a cross-sectional view illustrating another embodiment of an electric termination assembly configured according to the teachings of the present disclosure. FIG. 9 is a cross-sectional view illustrating another embodiment of an electric termination assembly configured according to the teachings of the present disclosure. FIG. 10a is a cross-sectional view illustrating another embodiment of an electric termination assembly configured according to the teachings of the present disclosure. FIG. 10b is a cross-sectional view illustrating another embodiment of an electric termination assembly configured according to the teachings of the present disclosure. FIG. 11 is a cross-sectional view illustrating another embodiment of an electric termination assembly configured according to the teachings of the present disclosure. FIG. 12 is a cross-sectional view illustrating another embodiment of an electric termination assembly configured according to the teachings of the present disclosure. The drawings depicted in this specification are for illustrative purposes only and are not intended to limit the scope of this disclosure in any way. Specific details for implementing the invention

[0021] The following description is merely illustrative and is not intended to limit the present disclosure or its application or use. Additionally, it should be understood that corresponding reference numerals throughout the drawings denote identical or corresponding parts and features.

[0022] Referring to FIG. 1, an electrical termination assembly used in ceramics is illustrated and denoted by reference numeral 20. The electrical termination assembly (20) comprises a first ceramic member (22), a second ceramic member (24) coupled to the first ceramic member (22), and at least one electrical component (26) embedded between the first ceramic member (22) and the second ceramic member (24). For example, the first and second ceramic members (22, 24) together form a plate of a semiconductor process pedestal, and the electrical component (26) may be a radio frequency (RF) antenna. The electrical component (26) may be a heater or other electrical component, and it should be understood that, without departing from the scope of the present disclosure, more than two ceramic members and more than one electrical component may be used. Such ceramic assemblies are more detailed in U.S. Patents No. 11,382,180 and No. 10,287,215, assigned to the same rights holder as the present application, the entirety of which is incorporated herein by reference. Additionally, the teachings of the present disclosure may be applied to applications other than pedestals for semiconductor processes.

[0023] Generally, the ceramic members (22, 24), the electrical termination assembly (20), and the embedded electrical components (26) are pre-assembled together and then placed into a hot press for final assembly. The details of this hot press process vary depending on the material and shape of each component, and an exemplary process is disclosed in U.S. Patent No. 8,684,256, assigned to the same rights holder as the present application, the entirety of which is incorporated herein by reference.

[0024] Also as shown, the first ceramic member (22) includes a bore (30) and a recess (32) formed adjacent to the bore (30). Although the recess (32) is shown as being formed in the first ceramic member (22), it should be understood that, without departing from the technical spirit of the present disclosure, the recess (32) may be formed in at least one of the first ceramic member (22) and / or the second ceramic member (24).

[0025] The electrical end (40) passes through the through hole (30) and extends to the recess (32) and makes electrical contact with the electrical component (26). (Since the components are shown in a disassembled state, it should be understood that the electrical contact is made after the components are assembled.) In this form, the electrical end (40) comprises a rod (42) having a proximal end portion (44) and a distal end portion (46), and as illustrated, the rod (42) is placed within the through hole (30) of the first ceramic member (22). A flange (48) of the electrical end (40) is provided at the distal end (46) of the rod (42), and as illustrated, the flange (48) is placed within the recess (32). At least one interface member (50) is disposed between the flange (48) and the recess (32), and in one embodiment, the interface member (50) is made of sputtered nickel material. Generally, the interface member (50) performs the function of joining and hermetic sealing the interface or joint between two or more components, and in this embodiment, joins and hermetic seals the interface or joint between the flange (48) and the first ceramic member (22). In the illustrated embodiment, the interface member (50) is not only disposed within the recess (32) but also extends along at least a portion of the interface between the first ceramic member (22) and the second ceramic member (24).

[0026] Also, as shown, another interface member (50) is disposed between the first ceramic member (22) and the second ceramic member (24) to combine the first ceramic member (22) and the second ceramic member (24) with each other and simultaneously seal the space between them hermetically.

[0027] In this embodiment, the rod (42) is made of a nickel material, for example, a nickel alloy containing more than 90 wt.% nickel by weight (wt.%), and the flange (48) is also made of a nickel material containing more than 90 wt.% nickel by weight, the first and second ceramic members (22, 24) are both made of aluminum nitride (AlN), and the electrical component (26) is made of sputtered nickel material. The rod (42) and the flange (48) are depicted as separate components and are welded together at the weld (43) in this embodiment, but it should be understood that the rod (42) and the flange (48) may be formed as an integral component without departing from the scope of this disclosure. In other embodiments, the rod (42) and the flange (48) may be brazed together using a brazing material suitable for the specific materials of the rod (42) and the flange (48). Accordingly, the rod (42), flange (48), and interface member (50) are each made of a material designed to have different coefficients of thermal expansion, and after they are joined together, in one embodiment, tensile stress is applied to the rod (42) and compressive stress is applied to the first ceramic member (22) and the second ceramic member (24). The materials are merely exemplary and should be understood that a plurality of other materials may be used for each component constituting the electrical terminal (40) and the second ceramic member (22, 24) without departing from the scope of the present disclosure.

[0028] Now, referring to FIGS. 2a and 2b, variations of the electric termination assembly are illustrated and are generally denoted by reference numeral 60. For clarity, configurations identical or similar to those previously described will not be repeated below. The electric termination assembly (60) includes a rod (62) and a flange (64) as previously described. In the form illustrated in FIG. 2a, the flange (64) includes a sealing ring (66) positioned around the upper surface (68) of the flange (64). In this embodiment, the sealing ring (66) is a separate part and is formed from a nickel material, more specifically Nickel 270. Alternatively, as illustrated in FIG. 2b, the sealing ring (66) may be formed integrally with the flange (64). The depth "D" of the recess (32) is smaller than the sum of the thickness "t" of the flange and the thickness of the sealing ring (66). With this configuration, the sealing ring (66) is deformed during the hot pressing process to form a shape that fits the depth "D" of the recess.

[0029] In this embodiment, the rod (62) is formed of a nickel alloy material, for example, a nickel alloy containing more than 90 wt.% nickel by weight, the flange (64) is made of 99.5 wt.% nickel (Ni), and the ceramic members (22, 24) are all formed of aluminum nitride (AlN). The rod (62) and the flange (64) are formed as a single unitized part, but in other embodiments, the rod (62) and the flange (64) may be separate components. The flange (64) is formed to have a geometry (e.g., thickness) and material that allow for elastic deformation during the assembly process of the electric end assembly (60). In one embodiment, the distal end portion (70) of the rod (62) includes a bore (72) that extends through the center of the flange (64) as illustrated. Alternatively, the bottom surface of the rod (62) may include dimples (not shown) to increase the bond surface area.

[0030] Now, referring to FIG. 3, another variant of the electric termination assembly is illustrated and is generally denoted by reference numeral 80. For clarity, configurations identical or similar to those previously described are not repeated below. The electric termination assembly (80) includes a rod (82) and a flange (84) as previously described. The proximal end of the rod (82) includes external threads (86). The electric termination assembly (80) further includes a nut (88) threadably engaged with the external threads (86) of the rod (82), and a sealing ring (90) disposed between the nut (88) and the upper surface (68) of the first ceramic member (22). In one embodiment, for a more secure connection of the electric termination assembly (80), a washer (92) may be optionally disposed between the sealing ring (90) and the nut (88). In one embodiment, the washer (92) is formed from an alumina or zirconia material. Also, in one embodiment, the external threads (86) of the rod (82) are coated, for example, with sputtered nickel to seal the interface between the rod (82) and the nut (88) and to inhibit oxidation. Furthermore, in some applications, such as forming a termination on an RF electrode, the exterior surface of the rod (82) may be coated with a material having relatively high electrical conductivity (e.g., gold or a gold alloy). It should be understood that, in addition to the materials disclosed herein, various materials suitable for the technical spirit of the present disclosure may be used. For example, aluminum and aluminum alloys may be used as the sputtered layer or the sputtered / joining layer.

[0031] In one embodiment, the rod (82), flange (84), and nut (88) are formed of a tungsten-nickel alloy, and the sealing ring (90) is formed of sputtered nickel. In another embodiment, the rod (82), flange (84), and nut (88) are formed of a molybdenum alloy, and the sealing ring (90) is formed of a nickel material. These materials are merely exemplary and should be understood that various materials may be used for each component without departing from the scope of the present disclosure, provided that different materials are selected such that their coefficients of thermal expansion (CTEs) match as well as possible.

[0032] In one embodiment, as illustrated in FIGS. 4a and 4b, the nut (88) further includes a peripheral step (94). The peripheral step (94) is configured to position a sealing ring (90) that hermetically seals the interface between the nut (88) and the first ceramic member (22). As illustrated, the sealing ring (90) having a stepped shape is positioned within the peripheral step (94) and is thus positioned in a suitable location so that a seal can be achieved upon final assembly. In other embodiments not illustrated, the nut (88) may instead include a peripheral chamfer to accommodate and position the sealing ring (90).

[0033] As illustrated in FIG. 5a, in one of the variations of FIG. 3, a tapered or spherical washer (98) is placed between the secondary nut (96) and the upper surface (68) of the first ceramic member (22). Since the washer (98) has different thicknesses along the radial direction, it provides compressive strength along the rod (82) under various thermal conditions. Additionally, the tapered shape helps to ensure that the load is applied uniformly even if the rod (82) or the nut (88) is slightly misaligned during installation. In one embodiment, the washer (98) is formed from a nickel material, and the secondary nut (96), the nut (88), and the rod (82) are formed from an iron-nickel-cobalt (Kovar) material or a molybdenum material. In addition, to ensure hermeticity, a sputtered nickel layer (not shown) may be formed on both sides of the spherical washer (98).

[0034] Referring to FIG. 5b, a modified example of the electric terminal assembly of FIG. 5a is shown, in which a zirconia or alumina washer (92) is used (the washer may be tapered or non-tapered). Since zirconia and alumina have a relatively large coefficient of thermal expansion (CTE), compressive stress will be induced in the washer (92) and tensile stress will be induced in the rod (82) at high temperatures.

[0035] Now, referring to FIG. 6, another variant of the electrical termination assembly is illustrated and is denoted by reference numeral 100. A nut (101) comprises a flange (102), the flange (102) comprises an upper surface (104), a lower surface (106), an upper peripheral recess (108) formed on the upper surface (104) of the flange (102), a lower peripheral recess (110) formed on the lower surface (106) of the flange (102), and an interface material (112) disposed in each of the upper and lower peripheral recesses (108, 110). A ceramic ring (114) is disposed on the upper surface (104) of the flange (102) to cover the interface material (112), and a shaft (116) extends proximally from the body of the nut (101) as illustrated. As described, in one embodiment of the present disclosure, an external thread is formed at the proximal end of the shaft (116). The external thread of the shaft (116) not only provides a tool engagement feature for securing other electrical components but also performs the function of tightening the nut (101) to the rod (82). In one embodiment, the ceramic ring (114) is formed from aluminum nitride (AlN) material. The interface material (112) is nickel sputter or a gold-nickel braze alloy such as NIORO or NIORO-ABA. The rod (82), flange (84), and nut (88) are formed from molybdenum alloy or tungsten alloy material.

[0036] Referring to FIGS. 7a and 7b, a modified example of the electrical termination assembly of FIGS. 2a and 2b is shown, which differs in that the interface member (51) is discontinuous.

[0037] Now, referring to FIG. 8, another variant of the electrical termination assembly is illustrated and is generally referred to as reference numeral 150. For clarity, configurations identical or similar to those previously described will not be repeated below. The electrical termination assembly (150) includes an electrical termination (152) that extends through the bore (30) and is in electrical contact with at least one electrical component (26). The electrical termination (152) includes a rod (154) and a puck (156). The rod (154), which may be a solid or hollow tube, is disposed within the bore (30) and has a proximal end (158) and a distal end (160). The puck (156) is disposed at the distal end (160) of the rod (154) and has a coefficient of thermal expansion greater than that of the first and second ceramic members (22, 24) but smaller than that of the rod (154). A first interface member (162) is disposed between the distal end (160) of the rod (154) and the puck (156), and a second interface member (164) is disposed between the puck (156) and at least one electrical component (26).

[0038] The rod (154), puck (156), and ceramic members (22, 24) each have a coefficient of thermal expansion adjusted, so that after joining, tensile stress is generated in the rod (154), compressive stress is generated in the first ceramic member (22) and the second ceramic member (24), and the puck (156) provides a hermetically sealed joint between the rod (154) and the electrical component (26).

[0039] In one embodiment, the rod (154) is formed of a nickel material. The first and second interface layers (162, 164) are formed of a brazing material, such as a sputtered nickel layer, and form a hermetic seal. The puck (156) is formed of a tungsten alloy, such as MT 185. In one embodiment, the rod (154) is a hollow tube.

[0040] FIG. 9 illustrates another variant of an electrical termination assembly, generally referred to as reference numeral 170. The electrical termination assembly (170) comprises a rod (172) having a distal end (174) and a proximal end (176), an interface member (178) disposed at the distal end (174) of the rod (172) and in contact with at least one electrical component (26), a cap (180), and an interface ring (190). The cap (180) has a peripheral portion (184) and includes an internal recess (186) and a plurality of bores (188) extending into the recess (186) (two in the illustrated example). The proximal end (176) of the rod (172) is disposed within a recess (186), and a plurality of bores (188) are configured to accommodate power pins (189). An interface ring (190) is disposed to surround the proximal end (176) of the rod (172) and contacts the upper surface of the first ceramic member (22) and the periphery (184) of the cap (180). In one embodiment, the electrical termination assembly (170) also includes an upper interface member (192) disposed between the proximal end (176) of the rod (172) and the recess (186) of the cap (180) for hermetic sealing.

[0041] In one embodiment, the rod (172) is formed of tungsten material, the cap (180) is formed of AlN material, the interface ring (190) is formed of gold-nickel material such as NIORO-ABA, and the interface member (178) is formed of titanium material such as Ti200. In one embodiment, the upper interface member (192) is formed of a layered material and includes both a Mo-AlN composite facing the cap (180) and NIORO-ABA facing the rod (172).

[0042] Referring to FIGS. 10a and 10b, another variant of an electrical termination assembly is illustrated and is generally denoted by reference numeral 200. The electrical termination assembly (200) comprises a first ceramic member (202), a second ceramic member (204) fixed to and hermetically sealed to the first ceramic member (202), at least one electrical component (206) embedded between the first ceramic member (202) and the second ceramic member (204), and an electrical termination (212). The first ceramic member (202) comprises a recess (208) extending into the upper surface of the first ceramic member (202) and a plurality of bores (210) extending from the recess (208) to at least one electrical component (206). Generally, the electrical termination (212) is disposed within the recess (208), extends through a plurality of bores (210), and is electrically in contact with at least one electrical component (206).

[0043] The electrical termination portion (212) comprises a plurality of rods (214) disposed within a plurality of bores (210), a plurality of first interface members (216) disposed at each distal end of the plurality of rods (214) and in contact with at least one electrical component (206), a cap (218) disposed within a recess (208) of a first ceramic member (202) and covering the plurality of rods (214), and a second interface member (220) disposed between the cap (218) and the plurality of rods (214).

[0044] In one embodiment, the cap (218) includes at least two upper recesses (222) formed on the upper surface of the cap (218). The upper recesses (222) are configured to accommodate power pins (219). An interface material (221) is disposed in each upper recess (222) to form a hermetic joint between them. In one embodiment, as shown in FIG. 10b, the cap (218) further includes at least two lower recesses (224) formed on the lower surface of the cap (218). The lower recesses (224) are configured to accommodate one of a plurality of rods (214). An interface material (225) is disposed in each lower recess (224). In one embodiment, the cap (218) further includes an internal circuit (226) extending between a power pin (219) in the upper recess (222) and a plurality of rods (214) in the lower recess (224) (for providing electrical connection).

[0045] In the variations of FIGS. 10a and 10b, a plurality of rods (214) are formed of a tungsten material such as Densimet, and a first interface member (216) is formed of a Ti200 disk. A second interface member (220) is formed of a gold-nickel alloy material such as a NIORO-ABA disk. Power pins (219) are formed of nickel. Interface materials (225) disposed in the upper and lower recesses (222, 224) may be layered materials and include a Mo-AlN composite (on the cap (218) side) and NIORO-ABA (on the rod (214) side).

[0046] FIG. 11 illustrates another variant of an electric termination assembly, generally referred to as reference numeral 240. The electric termination assembly (240) comprises a rod (242), a first interface member (244) disposed between the distal end of the rod (242) and at least one electric component (26), a collar (246) disposed around the proximal end of the rod (242) and including a lower flanged portion (248), a ceramic ring (250) surrounding the collar (246) and disposed on the upper surface of the lower flanged portion (248), a second interface member (252) disposed along the outer surface of the rod (242), and a third interface member (253) disposed between the collar (246) and the upper part of the rod (242). In one embodiment, the collar (246) further includes an external radial extension (254) for setting the position of the ceramic ring (250).

[0047] In one embodiment, the rod (242) is formed from a tungsten alloy such as MT185 or a composite of tungsten and aluminum nitride (AlN). The first interface member (244) is formed from Ti200. The second and third interface members (252, 253) are formed from NIORO-ABA. The ceramic ring (250) is formed from aluminum nitride (AlN) or silicon nitride (Si₃N₄). In one embodiment, the collar (246) is formed from a nickel material or a nickel alloy.

[0048] FIG. 12 illustrates another variant of an electric termination assembly, generally referred to as reference numeral 260. The electric termination assembly (260) comprises a rod (262) having a proximal end defining a post (264), a first interface member (268) disposed between the distal end of the rod (262) and an electric component (26), and a cap (270) comprising an internal recess (272) disposed around the proximal end of the rod (262) and configured to accommodate the post (264) of the rod (262), and a lower flanged portion (274). A ceramic ring (276) surrounds the cap (270) and is disposed on the upper surface of the lower flanged portion (274), and a second interface member (278) is disposed between the cap (270) and the upper surface of the first ceramic member (22). In one embodiment, an additional interface member (280) is disposed between the ceramic ring (276) and the lower flange portion (274) of the cap (270).

[0049] In one embodiment, the rod (262) is formed of a tungsten alloy such as MT185. The cap (270) is formed of a nickel alloy. The first interface member (268) is formed of a composite material consisting of tungsten (W) and aluminum nitride (AlN). The second interface member (278) is formed of a gold-nickel alloy such as NIORO. The ceramic ring (276) is formed of aluminum nitride (AlN).

[0050] The materials described throughout this specification are merely exemplary, and therefore it should be understood that various other materials may be used for each component without departing from the scope of this disclosure, provided that the combination of these materials provides the coefficients of thermal expansion (CTEs) necessary to generate tensile stress in the rod and compressive stress in the ceramic member (22, 24).

[0051] Unless otherwise expressly stated in this specification, all figures representing mechanical / thermal properties, compositional ratios, dimensions and / or tolerances, or other properties should be understood to imply "about" or "approximately" in describing the scope of this disclosure. Such modifications are made considering industrial practice, materials, manufacturing and assembly tolerances, and testing capabilities.

[0052] In this specification, the phrase “at least one of A, B and C” should be interpreted to mean a logical expression “(A or B or C)” using a non-exclusive logical OR, and should not be interpreted to mean “at least one A, at least one B and at least one C”.

[0053] The description of the present disclosure is merely illustrative, and therefore all variations that do not depart from the substance of the present disclosure are intended to be included within the scope of the present disclosure. Such variations should not be interpreted as departing from the spirit and scope of the present disclosure.

Claims

Claim 1 An electric termination assembly comprising: a first ceramic member; a second ceramic member fixed to the first ceramic member; and at least one electric component embedded between the first ceramic member and the second ceramic member, wherein the first ceramic member comprises a bore and a recess disposed adjacent to the bore, the recess being formed in at least one of the first ceramic member and the second ceramic member, and comprising an electric termination member extending through the bore into the recess and making electrical contact with the at least one electric component, wherein the electric termination member comprises: a rod disposed within the bore having a proximal end and a distal end; and a flange disposed at the distal end of the rod and disposed within the recess, and at least one interface member disposed between the flange and the recess, wherein the electric termination member and the interface member each comprise different materials having adjusted coefficients of thermal expansion, so that tensile stress is generated in the rod and compressive stress is generated in the first ceramic member and the second ceramic member. Claim 2 An electric termination assembly according to claim 1, wherein the interface member comprises a sputtered layer. Claim 3 An electric termination assembly according to claim 2, wherein the sputtered layer extends along at least a portion of the interface between the first ceramic member and the second ceramic member. Claim 4 An electric termination assembly according to claim 1, further comprising a sealing ring disposed around the upper surface of the flange. Claim 5 An electric termination assembly according to claim 1, wherein the rod is a nickel alloy material. Claim 6 An electric termination assembly according to claim 1, wherein the flange is 99.5 wt.% nickel. Claim 7 An electric termination assembly according to claim 1, wherein the flange and the rod comprise a single unitized part. Claim 8 An electric termination assembly according to claim 7, wherein the distal end of the rod comprises a bore, and the bore extends through the center of the flange. Claim 9 An electric termination assembly according to claim 1, wherein the first ceramic member and the second ceramic member are aluminum nitride (AlN) material. Claim 10 The electric termination assembly according to claim 1, wherein the flange has a geometric structure and material capable of elastic deformation. Claim 11 An electric termination assembly according to claim 1, wherein the lower part of the rod comprises a dimple. Claim 12 The electric termination assembly according to claim 1, wherein the flange further comprises a sealing ring. Claim 13 The electric termination assembly of claim 1, wherein the proximal end of the rod comprises an external thread, and the electric termination assembly further comprises: a nut screwed into the external thread of the rod; and a sealing ring disposed between the nut and the upper surface of the first ceramic member. Claim 14 An electrical termination assembly according to claim 13, further comprising a washer disposed between the sealing ring and the nut. Claim 15 An electric termination assembly according to claim 13, wherein the nut comprises: a flange having an upper surface and a lower surface; an upper peripheral recess disposed on the upper surface of the flange; a lower peripheral recess disposed on the lower surface of the flange; an interface material disposed within each of the upper peripheral recess and the lower peripheral recess; a ceramic ring disposed on the upper surface of the flange and covering the interface material; and a shaft extending in a proximal direction, wherein the proximal end of the shaft comprises an external thread. Claim 16 An electrical termination assembly according to claim 13, wherein the nut further comprises a peripheral step. Claim 17 An electrical termination assembly according to claim 13, wherein the nut further comprises a peripheral chamfer. Claim 18 An electric termination assembly according to claim 16 or claim 17, further comprising a washer disposed between the lower surface of the nut and the second ceramic member. Claim 19 An electric termination assembly comprising: a first ceramic member; a second ceramic member fixed to the first ceramic member; and at least one electric component embedded between the first ceramic member and the second ceramic member, wherein the first ceramic member comprises a bore extending to the at least one electric component and an electric termination member extending through the bore and electrically contacting the at least one electric component, wherein the electric termination member comprises: a rod disposed within the bore having a proximal end and a distal end; and a puck disposed at the distal end of the rod, a first interface member disposed between the distal end of the rod and the puck; and a second interface member disposed between the puck and the at least one electric component, wherein the puck has a coefficient of thermal expansion greater than that of the first ceramic member and smaller than that of the rod. Claim 20 An electrical termination assembly comprising: a first ceramic member; a second ceramic member fixed to the first ceramic member; at least one electrical component embedded between the first ceramic member and the second ceramic member, wherein the first ceramic member comprises a bore extending to the at least one electrical component and an electrical termination portion extending through the bore and electrically contacting the at least one electrical component, wherein the electrical termination portion comprises: a rod disposed within the bore having a proximal end and a distal end; an interface member disposed at the distal end of the rod and contacting the at least one electrical component; a cap comprising an internal recess and a plurality of bores extending into the recess, wherein the proximal end of the rod is disposed within the recess and the plurality of bores are configured to accommodate power pins; and an interface ring disposed around the proximal end of the rod and contacting the upper surface of the first ceramic member and the periphery of the cap. Claim 21 An electric termination assembly according to claim 20, further comprising an upper interface member disposed between the proximal end of the rod and the recess of the cap. Claim 22 An electrical termination assembly comprising: a first ceramic member; a second ceramic member fixed to the first ceramic member; and at least one electrical component embedded between the first ceramic member and the second ceramic member, wherein the first ceramic member comprises a recess extending into the upper surface of the first ceramic member and a plurality of bores extending from the recess to the at least one electrical component, and an electrical termination portion disposed within the recess and extending through the plurality of bores and electrically contacting the at least one electrical component, wherein the electrical termination portion comprises: a plurality of rods each having a proximal end and a distal end and each disposed within the plurality of bores; a plurality of first interface members disposed at the distal end of each of the plurality of rods and contacting the at least one electrical component; a cap disposed within the recess of the first ceramic member and on the plurality of rods; and a second interface member disposed between the cap and the plurality of rods. Claim 23 An electrical termination assembly according to claim 22, wherein the cap comprises at least two upper recesses formed on the upper surface of the cap, and the upper recesses are configured to accommodate power pins. Claim 24 An electric termination assembly according to claim 23, further comprising an interface material disposed within the at least two upper recesses. Claim 25 An electric termination assembly according to claim 22, wherein the cap comprises a plurality of lower recesses, each of which is configured to accommodate one of the plurality of rods. Claim 26 An electric termination assembly according to claim 25, further comprising an interface material disposed within each of the plurality of lower recesses. Claim 27 An electrical termination assembly according to claim 22, wherein the cap comprises: at least two upper recesses formed on the upper surface of the cap, the upper recesses configured to accommodate power pins, and a plurality of lower recesses, each of the lower recesses configured to accommodate one of the plurality of rods, and further comprises an internal circuit extending between the power pins and the plurality of rods. Claim 28 An electrical termination assembly comprising: a first ceramic member; a second ceramic member fixed to the first ceramic member; and at least one electrical component embedded between the first ceramic member and the second ceramic member, wherein the first ceramic member comprises a bore extending to the at least one electrical component and an electrical termination portion extending through the bore and electrically contacting the at least one electrical component, wherein the electrical termination portion comprises: a rod disposed within the bore having a proximal end and a distal end; a first interface member disposed between the distal end of the rod and the at least one electrical component; a collar disposed around the proximal end of the rod, the collar comprising a lower flanged portion; a ceramic ring surrounding the collar and disposed on the upper surface of the lower flanged portion; and a second interface member disposed along the outer surface of the rod. Claim 29 An electric termination assembly according to claim 28, wherein the collar further comprises an outer radial projection. Claim 30 An electrical termination assembly comprising: a first ceramic member; a second ceramic member fixed to the first ceramic member; at least one electrical component embedded between the first ceramic member and the second ceramic member, wherein the first ceramic member comprises a bore extending to the at least one electrical component and an electrical termination portion extending through the bore and electrically contacting the at least one electrical component, wherein the electrical termination portion comprises: a rod having a proximal end and a distal end, wherein the proximal end defines a post and the rod is disposed within the bore; a first interface member disposed between the distal end of the rod and the at least one electrical component; a cap disposed around the proximal end of the rod, comprising an internal recess configured to accommodate the post of the rod and a lower flanged portion; a ceramic ring surrounding the cap and disposed on the upper surface of the lower flanged portion; and a second interface member disposed between the cap and the upper surface of the first ceramic member. Claim 31 An electric termination assembly according to claim 30, further comprising an interface member disposed between the ceramic ring and the lower flange portion of the cap.

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