Composite sealing structure, sealing structure, and sealing method using a composite sealing structure

Abstract

A composite sealing structure (1) is fitted into a pair of flange portions (10) and has a ring-shaped metal member (2) having a continuous concave groove (2a) formed along the entire circumference of the outer or inner side, a receiving portion (3a) fitted into the concave groove (2a) of the metal member (2), and an elastomer member (3) having a protrusion (3b) continuous to the receiving portion (3a) and in contact with a pair of flange portions (10). During non-compression and when compression begins, only the protrusion (3b) is in contact with the pair of flange portions (10), and in a compression state exceeding a predetermined compression ratio, the protrusion and the deformed metal member (2) are brought into contact with the pair of flange portions (10), thereby sealing the space between the pair of flange portions (10).

Description

Technology Field

[0001] The present invention relates to a composite sealing structure, a sealing structure, and a sealing method using a composite sealing structure. Background Technology

[0002] Conventionally, rubber O-rings are used in semiconductor manufacturing devices or surface treatment devices for liquid crystal panels to create a vacuum environment. On the other hand, in radical gas environments or corrosive environments, rubber O-rings have poor corrosion and radical resistance, so it is known that a sealing material having an elastic sealing body and a corrosion-resistant ring made of fluorine resin is used (e.g., Patent Document 1).

[0003] However, just like the rubber material, the resin material covering the rubber material cannot avoid the penetration of gases, such as the atmosphere, from the high-pressure side (atmosphere side) to the low-pressure side (negative pressure side).

[0004] Accordingly, a low-fastening composite metal seal is known, for example, as described in Patent Document 2, in which a rubber O-ring seal is integrated on the outer side of a metal seal that has a shape that can be inserted into an O-ring sealing groove. In this composite metal seal, the metal seal on the inner side prevents high-temperature corrosive gas from flowing into the rubber O-ring seal as much as possible.

[0005] In addition, as described in Patent Document 3, a gasket is known in which a metal layer or a plastic layer is formed on the inner surface and / or outer surface of a ring-shaped rubber elastomer. In this gasket, the metal layer or the plastic layer is bonded to the ring-shaped rubber elastomer. Prior art literature

[0006] Patent Document 1: Japanese Patent No. 4625746 Patent Document 2: Japanese Patent Publication No. 2023-156213 Patent Document 3: Japanese Patent Publication No. Hei 11-201288 The problem to be solved

[0007] In the above composite metal seal, the elastic force of the composite metal seal is set to be approximately equal to the elastic force of the rubber O-ring seal. This is intended to allow the composite metal seal to replace the conventional rubber O-ring seal.

[0008] There is a demand to further improve sealing performance compared to conventional composite sealing structures while maintaining such low fastening force.

[0009] In the case of Patent Document 3, since the concave groove of the metal layer or plastic layer is shallow, the metal layer or plastic layer must be bonded to the ring-shaped elastic body, and the inconvenience of the bonding process may be a problem. On the other hand, if bonding is not performed, the metal layer or plastic layer is very prone to coming off the ring-shaped elastic body, and handling becomes cumbersome.

[0010] Likewise, in the case of Patent Document 2, the metal seal and the rubber O-ring seal are not bonded, so the metal layer or plastic layer is prone to coming off from the ring-shaped elastic body, making handling cumbersome.

[0011] The present invention has been made in consideration of these points, and its purpose is to improve sealing performance by reducing gas permeation from the elastomer member while maintaining a low fastening force. Furthermore, another purpose is to improve sealing performance by reducing gas permeation from the elastomer member while maintaining a low fastening force, and to make it difficult to detach and easy to handle. means of solving the problem

[0012] To achieve the above objective, the present invention is designed so that, under appropriate compression conditions, the metal member prevents corrosive gases or radical gases from flowing toward the elastomer member while maintaining sealing properties by the elastomer member.

[0013] Specifically, the first invention comprises a ring-shaped metal member having a continuous concave groove formed along the entire circumference of the outer or inner side, and an elastomer member having a receiving portion fitted into the concave groove of the metal member and a protrusion portion continuous to the receiving portion and in contact with a pair of flange portions, wherein only the protrusion portion contacts the pair of flange portions when not compressed and when compression is initiated, and wherein the protrusion portion and the deformed metal member come into contact in a compression state exceeding a predetermined compression ratio to seal the space between the pair of flange portions, and wherein the concave groove of the metal member is positioned so that both end portions are in a direction in which they are close to each other, and the minimum height dimension of both end portions is smaller than the maximum height dimension of the receiving portion.

[0014] According to the above configuration, while securing sealing performance with an elastomer member, the flow of corrosive gases or radical gases toward the elastomer member is suppressed by a metal member in a compressed state contacting a pair of flange portions, and the permeation of gases (such as the atmosphere) from the elastomer member is reduced, thereby improving sealing performance. Additionally, since the elastomer member guarantees sealing performance from the start of compression, the fastening force of the metal member can be reduced. Furthermore, because the metal member and the elastomer member are difficult to detach, they do not become misaligned even when fitted into a pair of flanges, and proper sealing performance can be achieved.

[0015] In the second invention, the receiving portion in the first invention, when not compressed, has a semicircular or semi-elliptical cross section or a V-shaped groove cross section.

[0016] According to the above configuration, the receiving portion is properly accommodated within the concave groove of the metal member so that it is difficult to fall out during non-compression and compression.

[0017] In the third invention, the concave groove of the metal member, in the first or second invention, is positioned such that the two end portions are positioned in a direction that brings them close to each other, thereby wrapping around the entire circumference of the portion to be received of the elastomer member, and the portion to be received is accommodated in such a way that it is difficult for it to fall out of the concave groove when uncompressed and when compressed.

[0018] According to the above configuration, since the metal member and the elastomer member are difficult to detach, transportation is easy after assembly.

[0019] In the invention of the fourth sealing method, a composite sealing structure is provided by fitting a ring-shaped metal member having a continuous concave groove formed along the entire circumference of the outer or inner side, and an elastomer member having a receiving portion fitted into the concave groove of the metal member and a protrusion portion continuous to the receiving portion and in contact with a pair of flange portions, and fitting the structure to the pair of flange portions, wherein only the protrusion portion is in contact with the pair of flange portions during non-compression and during the start of compression, and the protrusion portion and the deformed metal member are brought into contact with the pair of flange portions in a compression state exceeding a predetermined compression ratio to seal the space between the pair of flange portions, thereby suppressing the flow of corrosive gas or radical gas toward the elastomer member side by the metal member and reducing the permeation of gas from the elastomer member, and wherein the concave groove of the metal member is brought close in a direction in which both end portions are close to each other, so that the receiving portion is received within the concave groove in a manner that makes it difficult for it to fall out during non-compression and compression. Mold it in advance.

[0020] According to the above configuration, while securing sealing performance with an elastomer member, it is possible to suppress the flow of corrosive gases or radical gases toward the elastomer member by means of a metal member in a compressed state contacting a pair of flange portions, thereby reducing gas permeation from the elastomer member. Furthermore, since the elastomer member guarantees sealing performance from the start of compression, the fastening force of the metal member can be reduced. In addition, because the metal member and the elastomer member are difficult to detach, they do not become misaligned even when fitted into a pair of flanges, allowing for proper sealing performance and easy transportation after assembly.

[0021] In the fifth invention, in the fourth invention, the side of the metal member is in an atmosphere of radical gas.

[0022] According to the above configuration, in a compressed state, the metal member contacts a pair of flange portions, and since the inflow of radical gas from the metal member to the elastomer member is suppressed, the durability of the elastomer member is significantly improved.

[0023] In the sixth invention, in the fourth or fifth invention, the side of the elastomer member is used in an atmosphere of -80°C or higher and 250°C or lower.

[0024] According to the above configuration, a wide range of elastomer materials can be selected from low to high temperatures.

[0025] In addition, the seventh invention comprises a ring-shaped metal member having a continuous concave groove formed on the entire circumference of the outer or inner side, and the opening ends of the concave grooves being curved or bent so as to be close to each other, a fitting part that fits into the concave groove of the metal member, and a ring-shaped elastomer member having a protrusion that is continuous and in contact with a pair of flange parts by interposing a constriction part with a thickness smaller than that of the fitting part in the fitting part, wherein only the protrusion part contacts the pair of flange parts when not compressed and when compression is initiated, and the protrusion part and the deformed metal member come into contact in a compression state of a predetermined compression ratio or higher so as to seal between the pair of flange parts, and the minimum distance between the parts of the opening ends of the metal member facing each other is smaller than the maximum height of the fitting part, and the opening ends of the metal member engage with the constriction part to prevent slippage.

[0026] According to the above configuration, sealing performance can be improved by securing sealing performance with an elastomer member, suppressing the flow of corrosive gases or radical gases toward the elastomer member by means of a metal member in contact with a pair of flange portions in a compressed state, and reducing the permeation of gases (such as the atmosphere) from the elastomer member. Additionally, since the elastomer member guarantees sealing performance from the start of compression, the fastening force of the metal member can be lowered. Furthermore, the cross-sectional shape of the metal member is curved or bent so that the opening sides are close to each other, and the opposing opening ends are engaged with the constricted portion of the elastomer member to prevent slippage, making handling very easy, such as when inserting the composite sealing structure into the sealing groove.

[0027] In the eighth invention, in the seventh invention, the curved arc-shaped cross-sectional portion of the metal member is configured to come into contact with the pair of flange portions in the compressed state.

[0028] According to the above configuration, since the curved part contacts the flange part, the end of the metal member is less likely to damage the inner surface of the sealing groove, etc. compared to one with a pointed cross-section.

[0029] In the ninth invention, in the seventh invention, the minimum distance between the mutually facing parts of the opening ends is 70% or more and 99% or less of the maximum height of the fitting part.

[0030] If the minimum distance between the mutually facing parts of the opening ends is less than 70% of the maximum height of the fitting part, it becomes difficult to insert the fitting part between the opening ends, and if it is greater than 99%, it becomes easy to slip out. However, according to the above configuration, it is easy to insert the fitting part between the opening ends, and if one end is inserted, it is difficult to slip out, so the elastomer member does not slip out from the metal member and is easy to handle.

[0031] The sealing structure of the 10th invention is a sealing structure in which the composite sealing structure of the 7th to 9th inventions is fitted into the concave groove of the first member and fastened by the second member to exhibit sealing performance, wherein the maximum height of the metal member is greater than the depth of the concave groove, and also smaller than the maximum height of the protrusion, and is greater than 100% of the depth of the concave groove and less than or equal to 130%.

[0032] According to the above configuration, since the maximum height of the metal member is appropriately large compared to the depth of the concave groove, the protrusion is compressed first, and then compressed together with the metal member at an appropriate compression rate.

[0033] In the 11th invention, the maximum height of the protrusion is configured to be 105% or more and 145% or less with respect to the depth of the concave groove, as in the 10th invention.

[0034] If the maximum height of the protrusion is greater than 145% of the depth of the concave groove, the compression rate of the protrusion becomes too high, and if it is less than 105%, the metal member is compressed without the protrusion being sufficiently compressed. However, according to the above configuration, since the depth of the concave groove is set to an appropriate depth relative to the maximum height of the protrusion, sealing performance is achieved when the elastomer member and the metal member are compressed at an appropriate compression rate.

[0035] In the invention of the 12th sealing method, a composite sealing structure is prepared in which a constriction portion of a ring-shaped elastomer member, in which a fitting portion, a constriction portion, and a protrusion portion are formed in succession, is fitted into the concave groove of a ring-shaped metal member, in which a continuous concave groove is formed on the entire circumference of the outer or inner side, to prevent slippage; the composite sealing structure is clamped between a pair of flange portions, and when not compressed and when compression begins, the constriction portion of the elastomer member is interposed with the fitting portion of the elastomer member so that only the continuous protrusion portion is brought into contact with the pair of flange portions, and in a compression state of a predetermined compression ratio or higher, the protrusion portion and the curved arc-shaped cross-section portion of the deformed metal member are brought into contact with the pair of flange portions to seal between the pair of flange portions, thereby suppressing corrosive gas or radical gas from flowing toward the elastomer member side by the metal member and reducing gas permeation from the elastomer member.

[0036] According to the above configuration, by inserting the constricted portion of the elastomer member into the concave groove of the metal member to prevent slippage, handling is facilitated when clamping between a pair of flange portions. In addition, while ensuring sealing performance with the elastomer member, it is possible to suppress the flow of corrosive gases or radical gases toward the elastomer member by the metal member in contact with the pair of flange portions in a compressed state, thereby reducing gas permeation from the elastomer member. Furthermore, since the elastomer member guarantees sealing performance from the start of compression, the clamping force of the metal member can be lowered.

[0037] In the 13th invention, in the 12th invention, the side of the metal member is in an atmosphere of radical gas.

[0038] According to the above configuration, in a compressed state, the metal member contacts a pair of flange portions, and since the inflow of radical gas from the metal member to the elastomer member is suppressed, the durability of the elastomer member is significantly improved. Effects of the invention

[0039] As explained above, according to the present invention, the sealing performance is maintained by the elastomer member, and the permeation of gas from the elastomer member is reduced while the metal member suppresses the flow of corrosive gas or radical gas toward the elastomer member. Therefore, while maintaining a low fastening force, the sealing performance is improved, and it is difficult to remove and easy to handle. Brief explanation of the drawing

[0040] FIG. 1 is an enlarged view of part I of FIG. 2b showing a composite sealing structure according to embodiment 1 of the present invention. FIG. 2a is a plan view showing a composite sealing structure. Figure 2b is a cross-sectional view along line IIb-IIb of Figure 2a. FIG. 3 is a cross-sectional view showing the state in which an elastomer member and a metal member are compressed and deformed by a pair of flange portions in a finite element analysis. Figure 4 is a graph showing the relationship between compression ratio and fastening force. FIG. 5a is a cross-sectional view showing an example of the shape of a metal member. FIG. 5b is a cross-sectional view showing another shape example of a metal member. FIG. 5c is a cross-sectional view showing another shape example of a metal member. FIG. 5d is a cross-sectional view showing another shape example of a metal member. FIG. 6a is a cross-sectional view showing an example of the shape of an elastomer member. FIG. 6b is a cross-sectional view showing another shape example of an elastomer member. FIG. 6c is a cross-sectional view showing another shape example of an elastomer member. FIG. 6d is a cross-sectional view showing another shape example of an elastomer member. Figure 7 is a graph showing the results of a helium leak test. Figure 8 is a graph showing the results of the radical resistance test. FIG. 9 is an enlarged cross-sectional view of part IX of FIG. 10b showing a composite sealing structure according to embodiment 2 of the present invention. FIG. 10a is a plan view showing a composite sealing structure. FIG. 10b is a cross-sectional view along line XB-XB of FIG. 10a showing a composite sealing structure. FIG. 10c is a perspective view showing a composite sealing structure. FIG. 10d is an end cross-sectional view showing the sealing structure before compression. FIG. 11a is a cross-sectional view showing the state in which an elastomer member and a metal member are in contact with a pair of flange portions according to the analysis results of the finite element method analysis. FIG. 11b is a cross-sectional view showing the state in which an elastomer member and a metal member are compressed and deformed by a pair of flange portions according to the results of the finite element method analysis. Figure 12 is a graph showing the relationship between compression ratio and fastening force. FIG. 13 is a drawing corresponding to FIG. 9 showing a composite sealing structure according to Variant Example 1. FIG. 14 is a drawing corresponding to FIG. 9 showing a composite sealing structure according to modified example 2. FIG. 15 is a drawing corresponding to FIG. 9 showing a composite sealing structure according to modified example 3. Specific details for implementing the invention

[0041] Hereinafter, embodiments of the present invention will be described based on the drawings.

[0042] FIGS. 1 to 2b show a composite sealing structure (1) of embodiment 1 of the present invention, and the composite sealing structure (1) has a ring-shaped metal member (2) having a continuous concave groove (2a) formed along the entire circumference of the outer side.

[0043] In the present embodiment 1, the cross-section of the metal member (2) is approximately a semicircular shape that opens toward the outer periphery, but as shown in FIGS. 5a to 5d, it may have various shapes including a concave groove (2a). The metal member (2) is made of stainless steel (SUS316L, SUS304, etc.), nickel alloy (C22, C276, 718, etc.), titanium, aluminum alloy, copper alloy, etc. It may be a molded product with different thicknesses, but may also be a press-formed product with a constant plate thickness (t). The plate thickness (t) is 0.15 to 0.60 mm, preferably 0.20 to 0.30 mm. The height (H2) is 2 to 7 mm, preferably 2.8 to 3.8 mm.

[0044] As also shown in FIG. 3, the composite sealing structure (1) further comprises an elastomer member (3) having a receiving portion (3a) that is fitted into a recess (2a) of a metal member (2) and a projection portion (3b) that is continuous with the receiving portion (3a) and to which a pair of flange portions (10, 10) come into contact. In the present embodiment 1, the receiving portion (3a) of the elastomer member (3) when uncompressed is in a semicircular shape.

[0045] In the present embodiment 1, the receiving portion (3a) is formed along the entire circumference on the inner side, but in the case where the metal member (2) is placed on the outer side as in embodiment 2 described later, the receiving portion (3a) may be placed on the outer side.

[0046] The elastomer member (3) is made of silicone rubber, fluorine rubber, ethylene-propylene rubber, nitrile rubber, butyl rubber, acrylic rubber, SBR, chloroprene rubber, TPE (thermoplastic elastomer), etc.

[0047] The outer diameter (OD) of the elastomer member (3) is 20 to 1270 mm, preferably 300 to 700 mm, and the height (H1) is 2.2 to 7.5 mm, preferably 3 to 4 mm. The diameter-direction width (w0) of the protrusion (3b) is, for example, 1.1 mm, but is not limited thereto. The diameter-direction width (W) of the cross-section of the composite sealing structure (1) is 2 to 12 mm, preferably 2.5 to 4 mm.

[0048] And, as will be described in detail later, the height (H2) of the metal member (2) during non-compression is set to be lower than the height (H1) of the elastomer member (3) so that only the protrusion (3b) comes into contact with a pair of flange parts (10, 10) during non-compression and when compression of the composite sealing structure (1) begins (H2

[0049] It is preferable that the minimum height dimension (H3) between a pair of end portions of the metal member (2) be close to each other in a direction where the end portions are close to each other. Also, it is preferable that the minimum height dimension (H3) of the end portions be smaller than the maximum height dimension of the receiving portion (3a). In particular, this feature is particularly evident when the metal member of FIGS. 5b to 5d is combined with the elastomer member (3) of FIGS. 6b to 6d.

[0050] And, although details will be described later, the protrusion (3b) and the deformed metal member (2) come into contact in a compression state greater than a predetermined compression ratio, thereby configuring the space between a pair of flange portions (10, 10) to be sealed.

[0051] The receiving portion (3a) when uncompressed is semicircular in this embodiment 1, but as shown in FIGS. 6b to 6d, it may have a semi-elliptical cross-section or a cross-sectional V-shaped groove.

[0052] -Analysis of the Finite Element Method-

[0053] The relationship between the compression ratio and the fastening force of the composite sealing structure (1) was analyzed using finite element analysis software. ​

[0054] The units were set as length in mm, Young's modulus in MPa, and force in N. Based on static analysis and nonlinear structural analysis (contact, large deformation), the analysis was performed using the symmetry of the composite sealing structure (1) as a 1 / 2 axisymmetric model as shown in FIG. 3.

[0055] For the composite sealing structure (1), the rigidity of a pair of flange portions (10, 10) is sufficiently high, and the pair of flange portions (10, 10) are treated as rigid bodies. In conducting the analysis including deformation amount and frictional contact, large deformation effects were taken into account. The compression ratio is calculated based on the height of the composite sealing structure (1) when uncompressed, that is, the height (H1) of the elastomer member when uncompressed.

[0056] In this analysis, the elastomer member (3) used the physical property value of silicone rubber with a hardness of 70, and the metal member (2) used the physical property value of SUS316L.

[0057] As described above, the height (H2) of the metal member (2) when not compressed is set lower than the height (H1) of the elastomer member (3).

[0058] That is, initially only the upper and lower elastomer members (3) were in contact with the pair of flange parts (10, 10), but at a compression rate of 5%, the metal member (2) also came into contact with the outer circumference of the pair of flange parts (10, 10).

[0059] ​And at a compression ratio of around 7.5%, the fastening force increases linearly. After 7.5%, it can be seen that both the metal member (2) and the elastomer member (3) stably contact a pair of flange portions (10, 10) to provide sealing performance.

[0060] When the target clamping force was reached, the compression ratio was about 22%, and the maximum clamping force was 7.1 N / mm.

[0061] The same interpretation was performed for cases where the metal member (2) has the shape shown in FIGS. 5a to FIGS. 5d, and for cases where the elastomer member (3) has the shape shown in FIG. 6a.

[0062] Table 1 shows the relationship between the plate thickness and height of each metal member and the fastening force when combined. Regardless of the shape, an appropriate fastening force was achieved, as shown in Table 1. The examples shown in FIGS. 3 and 4 correspond to the case of (Fig. 5a-4) in Table 1. It was found that an appropriate fastening force is obtained by the appropriate shape of the metal member (2) and the appropriate plate thickness (t) and height (H2).

[0063] [Table 1]

[0064]

[0065] -Sealing method using a composite sealing structure-

[0066] The aforementioned composite sealing structure (1) is clamped in a pair of flange portions (10, 10). The device used is not particularly limited, but, for example, it is used in a part that seals the inside and outside of the flow path of a pair of flange portions (10, 10) that connects a gas or liquid flow path in a semiconductor manufacturing device or a surface treatment device for a liquid crystal panel.

[0067] When not compressed, only the upper and lower protrusions (3b) of the elastomer member (3) are brought into contact with a pair of flange portions (10, 10), respectively. In the present embodiment 1, for example, the composite sealing structure (1) is used in an atmosphere where the inner side (inside the passage) of the metal member (2) is in a radical gas atmosphere, and the outer side (outside the passage) of the elastomer member (3) is in an atmosphere of -80°C or higher and 250°C or lower. Since the protrusions (3b) of the elastomer member (3) come into contact with a pair of flange portions (10, 10) from the start of compression, a reliable sealing effect is ensured.

[0068] Next, as the compression ratio is gradually increased, for example, as described above, at a compression ratio of around 5%, as shown in FIG. 3, the metal member (2) also begins to come into contact with a pair of flange portions (10, 10), and in a compression state greater than that compression ratio, the protrusion portion (3b) and the deformed metal member (2) come into contact with a pair of flange portions (10, 10).

[0069] Thus, with appropriate fastening force, the composite sealing structure (1) seals between a pair of flange portions (10, 10), and reduces the permeation of gas from the elastomer member (3) while suppressing the flow of radical gas toward the elastomer member (3) by the metal member (2).

[0070] In addition, it is desirable that the maximum clamping force during compression be maintained at, for example, between 3.9 N / mm and 25 N / mm. That is, since sealing performance is guaranteed by the flexible elastomer member (3), the maximum clamping force can be maintained at a lower value compared to a metal seal alone.

[0071] In this way, while securing sealing properties with the elastomer member (3), the flow of radical gas toward the elastomer member (3) is suppressed by the metal member (2) in a compressed state with respect to a pair of flange portions (10, 10), and the permeation of gas from the elastomer member (3) can be reduced. Additionally, since the elastomer member (3) guarantees sealing properties, the fastening force of the metal member (2) can be lowered.

[0072] In addition, when compressed, the metal member (2) comes into contact with a pair of flange portions (10, 10) by an appropriate fastening force, so that the inflow of radical gas into the elastomer member (3) is effectively suppressed, and the durability of the elastomer member (3) is significantly improved.

[0073] In addition, if the outer side of the elastomer member (3) is in an atmosphere of -80°C or higher and 250°C or lower, a wide range of elastomer members (3) as described above can be selected depending on the application.

[0074] In addition, the concave groove (2a) of the metal member (2) is positioned such that the two end portions are brought close to each other, thereby the concave groove (2a) surrounds the receiving portion (3a) of the elastomer member (3) around its entire circumference, so that the receiving portion (3a) is properly accommodated within the concave groove (2a) of the metal member (2) so that it is difficult to fall out during both non-compression and compression. Therefore, since the metal member and the elastomer member are difficult to fall out, they do not become misaligned even when fitted together with a pair of flanges, and the sealing performance can be properly exhibited. Furthermore, it is easy to transport after assembly.

[0075] Accordingly, according to the composite sealing structure (1) of the present embodiment 1, the sealing performance is maintained by the elastomer member (3) and the permeation of gas from the elastomer member (3) is reduced by the metal member (2) while suppressing the flow of corrosive gas or radical gas toward the elastomer member (3), so that the sealing performance can be improved while maintaining a low fastening force.

[0076] -Verification of effectiveness through helium leak test-

[0077] FIG. 7 is a graph showing the results of a helium leakage test using the composite sealing structure (1) of Embodiment 1 of the present invention.

[0078] The temperature during the test was 22℃, the helium flow rate was 50 mL / min (hood method), and the compression ratio was based on the initial height of the seal (H1) = 3.60 mm.

[0079] Although not detailed, a composite sealing structure (1) was placed between a pair of flange sections (10, 10) of a press device and compressed. The leakage amount was monitored by a helium leakage detector, and a stable state was set as the background. Tape was wrapped around the outer circumference of the pair of flange sections (10, 10) to form a hood (leaving a helium inlet). The leakage amount was monitored for 10 minutes after helium began to be blown into the inlet. The leakage amount when the leakage amount stabilized was recorded as the saturated leakage amount.

[0080] As a comparative example, the same was recorded for the case of a sealing equivalent to an elastomer member (3) alone without a metal member (2).

[0081] As can be seen from FIG. 7, it was found that for compression ratios of 10%, 20%, and 22%, the amount of leakage of the composite sealing structure (1) was smaller compared to the case of the elastomer member (3) alone.

[0082] -Verification of effect through radical resistance test-

[0083] Although not shown in the diagram, a radical exposure tester was used. The gas conditions were set to O2+CF4 (2:1), the pressure inside the processing chamber was set to 100 Pa, and the microwave output was set to 2500 W. The compression ratio was based on the initial height of the composite sealing structure (1), H1 = 3.60 mm.

[0084] Radical resistance was confirmed for the composite sealing structure (1) and the elastomer member (3) alone as a comparative example.

[0085] As shown in FIG. 8, in the composite sealing structure (1), it was confirmed that the combination with the metal member (2) was effective in resistance to radicals, as there was no weight reduction (consumption of the elastomer member (3)). On the other hand, in the case of the elastomer member (3) alone, it was found that significant consumption of the elastomer material occurred.

[0086] (Embodiment 2)

[0087] FIGS. 9 and 10 show a composite sealing structure (1') of Embodiment 2 of the present invention. In Embodiment 1, the metal member (2) is installed on the inner side, but in Embodiment 2, the outer side corresponds to an environment such as a radical gas, and the metal member (2') is positioned on the outer side. In this case, an elastomer member (3') is fitted into a concave groove (2a') on the inner side from the inner side.

[0088] The composite sealing structure (1') comprises a ring-shaped metal member (2') in which a continuous concave groove (2a') is formed along the entire circumference of the outer side, and the opening ends (2b') of the concave groove (2a') are curved so as to be close to each other. The distance (h4) between a pair of opening ends (2b') is smaller than the maximum height (h5) of the inner circumference of the concave groove (2a'). <h5).

[0089] In this embodiment 2, the cross-section of the metal member (2') is approximately a semicircular shape that opens toward the inner circumference, but it may have various shapes having a concave groove (2a'), as described in the modified example below. The metal member (2') is made of stainless steel (SUS316L, SUS304, etc.), nickel alloy (C22, C276, 718, etc.), titanium, aluminum alloy, copper alloy, etc. It may be a molded product with different thicknesses, but it may also be a press-formed product with a constant plate thickness (t). The plate thickness (t) is 0.15 mm or more and 0.60 mm or less, preferably 0.20 mm or more and 0.30 mm or less. The height (h6) of the metal member (2') is 1.2 mm or more and 7 mm or less, preferably 1.8 mm or more and 3.8 mm or less. Maximum height (h5) of the inner circumference of the concave groove (2a') = h6 - 2 × t (h4 <h5<h6)이다.

[0090] The composite sealing structure (1') further comprises an elastomer member (3') having a fitting portion (3a') that is fitted into a concave groove (2a') of a metal member (2'), and a protrusion (3b') that is continuous with the fitting portion (3a') and a constriction (3c') having a thickness smaller than that of the fitting portion (3a'), and a pair of flange portions (10', 11') (shown only in FIG. 10d) as a first member and a second member, which are in contact with each other. In the present embodiment 2, the fitting portion (3a') of the elastomer member (3') when uncompressed is in a semicircular shape.

[0091] In this embodiment 2, the fitting joint (3a') is formed along the entire circumference on the outer side, but in the case where the metal member (2') is formed on the inner side as in embodiment 1, the fitting joint (3a') may be formed on the inner side.

[0092] The elastomer member (3') is made of silicone rubber, fluorine rubber, ethylene-propylene rubber, nitrile rubber, butyl rubber, acrylic rubber, SBR, chloroprene rubber, TPE (thermoplastic elastomer), etc.

[0093] The inner diameter (ID) of the elastomer member (3') is 20 to 1270 mm, preferably 300 to 700 mm, and the maximum height (h1) is 1.5 to 7.5 mm, preferably 2.5 to 4 mm. The compression ratio (Δh1) of the elastomer member (3') is based on 5% or more and 30% or less of h1. As shown in FIG. 10d, the groove depth (D) is 70% or more and 95% or less of the maximum height (h1) of the elastomer member (0.70h1≤D≤0.95h1), preferably 75% or more and 85% or less (0.75h1≤D≤0.85h1). The diameter-direction width (W) of the cross-section of the composite sealing structure (1') is 2 to 12 mm, preferably 2.5 to 6 mm. If the depth of the sealing groove (12') formed in the first flange portion (10') is D, the height (h6) of the metal member (2') is greater than or equal to the depth (D) of the sealing groove (12') and less than the maximum height (h1) of the elastomer member (3') (D≤h6

[0094] The height (h2) of the constriction (3c') of the elastomer member (3') is smaller than the maximum height (h3) of the fitting joint (3a') and also smaller than the distance (h4) between the opening ends (2b') of the metal member (2'). <h4<h3). 압축 시에 엘라스토머 부재(3')가 금속 부재(2')로부터 과도한 힘이 가해지지 않도록, 개구 끝단(2b')의 사이와 잘록부(3c')와의 사이에 적절한 간극을 확보하는 것이 바람직하다(0.75h4≤h2≤0.9h4). 개구 끝단(2b') 사이의 거리(h4)는, 엘라스토머 부재(3')의 최대 높이(h1)의 90% 이상 99% 이하(0.9h1≤h4≤0.99h1)인 것이 바람직하다.

[0095] ​And, as will be described in detail later, the height (h6) of the metal member (2') during non-compression is set to be lower than the height (h1) of the elastomer member (3') so that only the protrusion (3b') comes into contact with a pair of flange portions (10', 11') during non-compression and when compression of the composite sealing structure (1') begins (h6

[0096] And, although details will be described later, in a compression state greater than a predetermined compression ratio, the protrusion (3b') and the deformed metal member (2') come into contact, thereby configuring the space between a pair of flange portions (10', 11') to be sealed.

[0097] The fitting joint (3a') during non-compression is semicircular in cross-section in this embodiment 2, but may have a different cross-sectional shape such as the modified example described later.

[0098] -Analysis of the Finite Element Method-

[0099] The relationship between the compression ratio and the fastening force of the composite sealing structure (1') was analyzed using commercially available finite element method analysis software.

[0100] Based on static analysis and nonlinear structural analysis (contact, large deformation), and utilizing the symmetry of the composite sealing structure (1'), the analysis was performed as a 1 / 2 axially symmetric model as shown in FIG. 11a and FIG. 11b.

[0101] ​Regarding the deformation amount of the composite sealing structure (1'), the deformation amount of the pair of flange portions (10', 11') is sufficiently small and the rigidity of the flange portions (10', 11') is sufficiently high, and the pair of flange portions (10', 11') are treated as rigid bodies. In conducting the analysis including deformation amount and frictional contact, large deformation effects were taken into account. The compression ratio is calculated based on the height of the composite sealing structure (1') when uncompressed, that is, the height (h1) of the elastomer member (3') when uncompressed.

[0102] In this analysis, the elastomer member (3') uses the physical property value of silicone rubber with a hardness of 70, and the metal member (2') uses the physical property value of SUS316L.

[0103] As described above, the height (h2) of the metal member (2') when uncompressed is set lower than the height (h1) of the elastomer member (3').

[0104] That is, initially only the upper and lower elastomer members (3') were in contact with a pair of flange portions (10', 11'), but at a compression rate of around 13%, the metal member (2') also came into contact with the outer circumference of the pair of flange portions (10', 11').

[0105] And the fastening force increases linearly at a compression ratio of around 14%. After 14%, it can be seen that both the metal member (2') and the elastomer member (3') stably contact a pair of flange portions (10', 11') to provide sealing performance. ​

[0106] When the target clamping force was reached, the compression ratio was about 22%, and the maximum clamping force became 9.3 N / mm.

[0107] -Sealing method using a composite sealing structure-

[0108] As illustrated in FIG. 10d, the aforementioned composite sealing structure (1') is placed in the sealing groove (12') of the first flange portion (10') and clamped to a pair of flange portions (10', 11'). The device used is not particularly limited, but, for example, it is used in a part that seals the inside and outside of the flow path of a pair of flange portions (10', 11') connecting a gas or liquid flow path in a semiconductor manufacturing device or a surface treatment device for a liquid crystal panel.

[0109] When not compressed, only the upper and lower protrusions (3b') of the elastomer member (3') are brought into contact with a pair of flange portions (10', 11'), respectively. In this embodiment 2, for example, the composite sealing structure (1') is used in an atmosphere where the outer side (inside the passage) of the metal member (2') is in a radical gas atmosphere, and the inner side (outside the passage) of the elastomer member (3') is in an atmosphere of -80°C or higher and 250°C or lower. Since the protrusions (3b') of the elastomer member (3') come into contact with a pair of flange portions (10', 11') from the start of compression, a secure seal is ensured.

[0110] Next, as the compression ratio is gradually increased, for example, at a compression ratio of around 13% as described above, the metal member (2') also begins to come into contact with a pair of flange portions (10', 11'), and in a compression state greater than that compression ratio, the protrusion portion (3b') and the deformed metal member (2') come into contact with a pair of flange portions (10', 11').

[0111] Thus, with appropriate fastening force, the composite sealing structure (1') seals between a pair of flange portions (10', 11'), and the metal member (2') suppresses the flow of radical gas toward the elastomer member (3'), thereby reducing the permeation of gas from the elastomer member (3').

[0112] In addition, it is desirable that the maximum clamping force during compression be maintained at, for example, between 3.44 N / mm and 20.0 N / mm. That is, since sealing performance is guaranteed by the flexible elastomer member (3'), the maximum clamping force can be maintained at a lower value compared to a metal seal alone.

[0113] In this way, while securing sealing properties with the elastomer member (3'), radical gas can be suppressed from flowing toward the elastomer member (3') to the metal member (2') which is in contact with the pair of flange portions (10', 11') in a compressed state, and gas permeation from the elastomer member (3') can be reduced. Additionally, since the elastomer member (3') ensures sealing properties, the fastening force of the metal member (2') can be lowered.

[0114] In addition, when compressed, the metal member (2') comes into contact with a pair of flange portions (10', 11') by an appropriate fastening force, so that the inflow of radical gas into the elastomer member (3') is effectively suppressed, and the durability of the elastomer member (3') is significantly improved.

[0115] In addition, in this embodiment 2, the inner side of the elastomer member (3') is in an atmosphere of -80°C or higher and 250°C or lower, but by appropriately changing the material of the elastomer member (3'), sealing with various physical properties (temperature range, sealing performance, etc.) can be realized.

[0116] Additionally, since the concave groove (2a') of the metal member (2') surrounds the fitting portion (3a') of the elastomer member (3') around its entire circumference, the fitting portion (3a') is properly accommodated within the concave groove (2a') of the metal member (2') so that it is difficult to fall out during both non-compression and compression.

[0117] In addition, the cross-sectional shape of the metal member (2') is curved so that the opening ends (2b') are close to each other, and the opposing opening ends (2b') are engaged with the constricted portion (3c') of the elastomer member (3') to prevent slippage, so handling is very easy when inserting the composite sealing structure (1) into the sealing groove (12').

[0118] Accordingly, according to the composite sealing structure (1') of the present embodiment 2, the sealing performance is maintained by the elastomer member (3'), and the permeation of gas from the elastomer member (3') is reduced by the metal member (2') while suppressing the flow of corrosive gas or radical gas toward the elastomer member (3'). Therefore, while maintaining a low fastening force, the sealing performance is improved, and it can be made difficult to remove and easy to handle.

[0119] -Variation Example 1-

[0120] FIG. 13 shows a composite sealing structure (101) according to Variant Example 1 of Embodiment 2 of the present invention, and differs from Embodiment 2 in that the shape of the metal member (102) is different. In addition, in each of the following variations, parts identical to those in FIG. 9 to FIG. 11b are given the same reference numerals, and their detailed descriptions are omitted.

[0121] The metal member (102) of this modified example is not in the shape of a circular cross-section, but has a shape similar to the cross-section of a clay bottle, in which the opening side formed by press-forming a metal plate narrows toward the end. In this modified example as well, a pair of opening ends (102b) are close to each other in a direction that brings them closer together, and the distance (h4) between the two is smaller than the maximum height (h5) of the inner circumference of the concave groove (2a'). <h5). 금속 부재(102)의 개구 끝단(102b)의 내경이 일정한 평탄한 형상에 맞추어, 잘록부(103c)에도 평탄한 부분이 있어도 된다. 돌조부(103b)는, 상기 실시형태 2와 동일한 형태를 갖는다. 개구 끝단(102b) 사이의 간격(h4)은, 엘라스토머 부재(103)의 끼움결합부(103a)의 높이(h3)보다 좁고, 잘록부(103c)의 높이(h2)보다 약간 크다(h2<h4<h3<h5). 이와 같이 구성함으로써, 상기 실시형태 2와 마찬가지의 작용 효과가 얻어진다.

[0122] -Variation Example 2-

[0123] FIG. 14 shows a composite sealing structure (201) according to a modified example 2 of embodiment 2 of the present invention, and differs from embodiment 2 in that the shape of the metal member (202) is different.

[0124] The metal member (202) of the present modified example has a cross-sectional shape of approximately an arc, but the opening ends (202b) are bent so that they are close to each other in the vertical direction. The gap (h4) between the opening ends (202b) is narrower than the height (h3) of the fitting joint part (203a) and slightly larger than the height (h2) of the constriction part (203c). <h4<h3<h5). 이와 같이 구성함으로써, 상기 실시형태 2와 마찬가지의 작용 효과가 얻어진다.

[0125] Also, the inner surface in the diameter direction of the protrusion (203b) of the elastomer member (203) is round. Additionally, the constriction (203c) of the elastomer member (203) is narrow in shape without a flat surface in the upper and lower directions, matching the shape of the opening end (202b). However, it is not different from the above embodiment 2 in terms of functional effect.

[0126] -Variation Example 3-

[0127] FIG. 15 shows a composite sealing structure (301) according to a modified example 3 of embodiment 2 of the present invention, and differs from embodiment 2 in that the shape of the elastomer member (303) is different.

[0128] The metal member (302) of this modified example has a cross-sectional arc shape, similar to Embodiment 2 above, but the elastomer member (303) has a cross-sectional V-shape with a concave shape on the outer side in the radial direction. In this case, there is a relatively large gap between the inner surface of the metal member (302). The gap (h4) between the opening ends (302b) is narrower than the height (h3) of the fitting joint part (303a) and slightly larger than the height (h2) of the constriction part (303c). <h4<h3<h5). 이와 같이 구성함으로써, 상기 실시형태 2와 마찬가지의 작용 효과가 얻어진다.

[0129] That is, in the above embodiment 2, the metal member (2') is positioned on the outer side, but when the inner side is in an environment such as a radical gas, it is positioned on the inner side. In this case, the elastomer member is fitted into the concave groove on the outer side from the outer side.

[0130] In addition, in the above embodiment 2, the first member and the second member are formed as a pair of flange portions (10', 11'), but are not limited to flange shapes and may be composed of a pair of members having a sealing groove formed on one side.

[0131] Furthermore, the above embodiments are essentially preferred examples and are not intended to limit the scope of the invention, its applications, or uses. Explanation of the symbols

[0132] 1 : Composite sealing structure 2 : Metal member 2a : Concave groove 3: Elastomer absence 3a : Receiving part 3b : Stone grandfather 10: Flange section 1' : Composite sealing structure 2' : Metal member 2a' : Concave groove 2b' : Opening end 3: Elastomer absence 3a' : Insert joint 3b' : Stone grandfather 3c' : Constriction 10', 11' : A pair of flange portions (first member and second member) 12' : Ceiling groove 101 : Composite sealing structure 102 : Metal member 102b : Opening end 103a : Insert joint 103c : Narrowing part 201 : Composite sealing structure 202 : Metal member 202b : Opening end 203 : Elastomer absence 203a : Insert joint 203b : Stone grandfather 203c : Narrow section 301 : Composite sealing structure 302 : Metal member 302b : Opening end 303 : Elastomer absence 303a : Insert joint 303c : Narrow section

Claims

Claim 1 A composite sealing structure comprising a ring-shaped metal member having a continuous concave groove formed along the entire circumference of the outer or inner side, an elastomer member having a receiving portion fitted into the concave groove of the metal member and a protrusion portion continuous to the receiving portion and in contact with a pair of flange portions, wherein only the protrusion portion contacts the pair of flange portions when not compressed and when compression is initiated, and wherein the protrusion portion and the deformed metal member come into contact in a compression state of a predetermined compression ratio or higher to seal the space between the pair of flange portions, wherein the concave groove of the metal member is positioned in a direction in which both end portions are close to each other, and the minimum height dimension of both end portions is smaller than the maximum height dimension of the receiving portion. Claim 2 A composite sealing structure according to claim 1, wherein the receiving portion when not compressed has a semicircular or semi-elliptical cross section, or has a V-shaped groove cross section. Claim 3 A composite sealing structure according to claim 1 or 2, wherein the concave groove of the metal member is positioned such that both end portions are positioned in a direction that brings them close to each other, thereby wrapping around the entire circumference of the receiving portion of the elastomer member, and the receiving portion is received within the concave groove in such a way that it is difficult for it to fall out during non-compression and compression. Claim 4 A composite sealing structure comprising a ring-shaped metal member having a continuous concave groove formed along the entire circumference of the outer or inner side, and an elastomer member having a receiving portion fitted into the concave groove of the metal member and a protrusion portion continuous to the receiving portion and in contact with a pair of flange portions, wherein the concave groove of the metal member surrounds the receiving portion of the elastomer member over the entire circumference, and the receiving portion is received within the concave groove in a manner that makes it difficult to fall out during non-compression and compression, and is clamped between the pair of flange portions, and only the protrusion portion in contact with the pair of flange portions during non-compression and at the start of compression, and the protrusion portion and the deformed metal member are brought into contact with the pair of flange portions in a compression state exceeding a predetermined compression ratio, thereby sealing between the pair of flange portions and reducing gas permeation from the elastomer member while suppressing corrosive gas or radical gas from flowing toward the elastomer member side by the metal member. A sealing method using a composite sealing structure, characterized by pre-forming the concave groove of the metal member so that the two end portions are brought close to each other in a direction that the portion to be received is received within the concave groove in a way that makes it difficult for the portion to fall out during non-compression and compression. Claim 5 A sealing method using a composite sealing structure characterized in that, in paragraph 4, the side of the metal member is in an atmosphere of radical gas. Claim 6 A sealing method using a composite sealing structure, characterized in that, in claim 4 or 5, the side of the elastomer member is used in an atmosphere of -80°C or higher and 250°C or lower. Claim 7 A composite sealing structure characterized by comprising: a ring-shaped metal member having a continuous concave groove formed along the entire circumference of the outer or inner side, and the opening ends of the concave groove being curved or bent so as to be close to each other; a ring-shaped elastomer member having a protrusion that is continuous and in contact with a pair of flange portions, with a fitting portion inserted into the concave groove of the metal member and a constriction portion having a thickness smaller than that of the fitting portion inserted into the fitting portion; wherein, when not compressed and when compression is initiated, only the protrusion portion contacts the pair of flange portions, and in a compressed state exceeding a predetermined compression ratio, the protrusion portion and the deformed metal member come into contact to seal the space between the pair of flange portions, wherein the minimum distance between the mutually facing portions of the opening ends of the metal member is smaller than the maximum height of the fitting portion, and the opening ends of the metal member engage with the constriction portion to prevent slippage. Claim 8 A composite sealing structure according to claim 7, characterized in that, in the above-mentioned compressed state, the curved portion of the opening end side of the metal member is configured to come into contact with the pair of flange portions. Claim 9 A composite sealing structure according to claim 7, characterized in that the minimum distance between mutually facing portions of the opening ends is 70% or more and 99% or less of the maximum height of the fitting joint portion. Claim 10 A sealing structure in which a composite sealing structure described in any one of claims 7 to 9 is fitted into a concave groove of a first member and fastened by a second member to exhibit sealing performance, wherein the maximum height of the metal member is greater than the depth of the concave groove and also smaller than the maximum height of the protrusion, and is greater than 100% and less than or equal to 130% of the depth of the concave groove. Claim 11 A sealing structure according to claim 10, characterized in that the maximum height of the above-mentioned protrusion is 105% or more and 145% or less of the depth of the above-mentioned concave groove. Claim 12 A sealing method using a composite sealing structure characterized by preparing a composite sealing structure in which a constriction portion of a ring-shaped elastomer member, in which a fitting portion, a constriction portion, and a protrusion portion are formed in succession, are fitted into the concave groove of a ring-shaped metal member, in which a continuous concave groove is formed on the entire circumference of the outer or inner side, to prevent slippage; clamping the composite sealing structure between a pair of flange portions; bringing only the continuous protrusion portion into contact with the pair of flange portions by interposing the constriction portion of the fitting portion of the elastomer member during non-compression and during the start of compression; and bringing the protrusion portion and the curved arc-shaped cross-section portion of the deformed metal member into contact with the pair of flange portions in a compression state exceeding a predetermined compression ratio, thereby sealing the space between the pair of flange portions, and reducing gas permeation from the elastomer member while suppressing corrosive gas or radical gas from flowing toward the elastomer member side by the metal member. Claim 13 A sealing method using a composite sealing structure characterized in that, in claim 12, the side of the metal member is in an atmosphere of radical gas.

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