Manufacturing automation system, method and apparatus for controlling process environment

Abstract

Various embodiments of the present disclosure relate to a manufacturing automation system and an apparatus and method for controlling a process environment. The manufacturing automation system may include: a cassette loaded with at least one object and comprising at least one fan; a transfer device for transferring the cassette; a stocker comprising a fan control device that stores the cassette transferred by the transfer device, moves the cassette to one of a plurality of process equipment, and controls the operating speed of the at least one fan; a data collection device for collecting process information related to the cassette; and a control device that receives the collected process information, generates fan control information that variably controls the operating speed of the at least one fan based on the received process information, and transmits the generated fan control information to the fan control device of the stocker.

Description

Technology Field

[0001] Various embodiments of the present disclosure relate to a manufacturing automation system and an apparatus and method for controlling a process environment. Background Technology

[0002] Various electronic devices, such as smartphones, digital cameras, laptop computers, navigation systems, and smart televisions, include display devices. Display devices may include Liquid Crystal Displays (LCDs), Field Emission Displays (FEDs), Organic Light Emitting Displays (OLEDs), etc.

[0003] Display devices can be manufactured through numerous processes, such as substrate manufacturing processes, cell manufacturing processes, and module processes. As such, the manufacturing processes of display devices, which consist of numerous processes, can be automated. For example, an object (e.g., a substrate) that has been processed by process equipment can be loaded into a loading device (e.g., a cassette) and then transferred to another process equipment by a transfer device (e.g., an Automatic Guided Vehicle (AGV), etc.). Meanwhile, the loading device can be stored in a storage device (e.g., a stocker).

[0004] Meanwhile, contamination of the object may occur due to various causes during the execution of the manufacturing process. For example, defects may occur where the object is contaminated due to particles or foreign substances penetrating into the interior of the loading device caused by ambient airflow generated while the object is transferred to another process equipment after the completion of the process or while moving from one storage device to another. As another example, defects involving silver (Ag) leaching may occur if the object remains stagnant for a certain period of time or longer during a specific process. As yet another example, defects may occur where the object is contaminated due to contamination of the manufacturing line. As yet another example, defects may occur where the object corrodes and / or rusts due to fumes generated during a specific process.

[0005] To prevent the aforementioned contamination, airflow from fans located on the sides and / or ceiling of the loading device is utilized to prevent particles or foreign substances from entering the interior of the device. However, current automation systems operate the fans at a constant speed (e.g., rotation) regardless of the characteristics of the process. Consequently, current automation systems face the problem that particles or foreign substances are not completely removed in some processes, or that power consumption increases because the fans operate unnecessarily even in processes with a low probability of contamination. The problem to be solved

[0006] Various embodiments of the present disclosure may provide a manufacturing automation system and a device and method for controlling a process environment that can improve the quality and manufacturing efficiency of an object by adaptively (or variably) adjusting the operating time and / or operating intensity of an environment control device according to process characteristics.

[0007] Various embodiments of the present disclosure may provide a manufacturing automation system and a device and method for controlling a process environment that can reduce power consumption of the automation system by adaptively (or variably) adjusting the operating time and / or operating intensity of the environment control device according to process characteristics. means of solving the problem

[0008] A manufacturing automation system according to one embodiment of the present disclosure may include: a cassette having at least one object loaded and at least one fan; a transfer device for transferring the cassette; a stocker including a fan control device that stores the cassette transferred by the transfer device, moves the cassette to one of a plurality of process equipment, and controls the operating speed of the at least one fan; a data collection device for collecting process information related to the cassette; and a control device that receives the collected process information, generates fan control information that variably controls the operating speed of the at least one fan based on the received process information, and transmits the generated fan control information to the fan control device of the stocker.

[0009] According to one embodiment, the control device can analyze the process information to recognize the process step where the cassette is located, use a previously stored mapping information database to identify the fan speed mapped to the recognized process step, and generate the fan control information including the fan speed.

[0010] According to one embodiment, the mapping information DB may include a mapping table in which process groups classified according to process characteristics and fan speeds to be applied to each process group are respectively mapped.

[0011] According to one embodiment, the mapping information DB can map the recipe and fan speed of the process equipment.

[0012] According to one embodiment, the mapping information DB may map the lot information and fan speed of the object.

[0013] According to one embodiment, when a plurality of cassettes are stored in the stocker, the control device can generate fan control information by mapping the identification information of each cassette to the fan speed to be applied to the fan of the corresponding cassette.

[0014] According to one embodiment, the data collection device may include a process data collection module that collects data related to a process step in which the cassette is located; a location data collection module that collects data related to the location of the cassette; and a quality data collection module that collects data related to the quality of the object.

[0015] According to one embodiment, the data collection device may include an artificial intelligence-based classification model that has been trained to generate process information based on raw data collected by at least one of the process data collection module, the location data collection module, and the quality data collection module.

[0016] According to one embodiment, the control device may include an artificial intelligence-based generative model that has been trained to analyze process information and generate fan control information based on the analyzed process information.

[0017] According to one embodiment, the at least one fan and the fan control device can be connected via wireless communication.

[0018] According to one embodiment, the manufacturing automation system may further include a buffer unit located between the transfer device and the stocker for temporarily storing the cassette.

[0019] A method for controlling a process environment of a control device according to one embodiment of the present disclosure may include: collecting process information related to a cassette loaded with at least one object; analyzing the collected process information and generating fan control information that variably controls the operating speed of at least one fan included in the cassette based on the analysis results; and transmitting the generated fan control information to a fan control device that controls the operation of the at least one fan.

[0020] According to one embodiment, the step of generating the fan control information may include: a step of analyzing the process information to recognize the process step in which the cassette is located; a step of verifying the fan speed mapped to the recognized process step using previously stored mapping information; and a step of generating the fan control information based on the fan speed.

[0021] According to one embodiment, the step of generating the fan control information may include the step of generating the fan control information by mapping the identification information of each cassette and the fan speed to be applied to the fan of the corresponding cassette, respectively, when a plurality of cassettes are stored in each stocker.

[0022] According to one embodiment, the step of collecting process information may include a process data collection step for collecting data related to a process step in which the cassette is located; a location data collection step for collecting data related to the location of the cassette; and a quality data collection step for collecting data related to the quality of the object.

[0023] A control device according to one embodiment of the present disclosure may include: a communication module that receives process information related to a cassette loaded with at least one object; and a control module that analyzes the received process information, generates fan control information that variably controls the operating speed of at least one fan included in the cassette based on the analysis results, and controls the communication module to transmit the generated fan control information to a fan control device that controls the operation of at least one fan.

[0024] According to one embodiment, the control device may further include a memory that stores a mapping information database in which process groups classified according to process characteristics and fan speeds to be applied to each process group are respectively mapped.

[0025] According to one embodiment, the control module can analyze the process information to recognize the process step where the cassette is located, check the fan speed mapped to the recognized process step from the mapping information DB, and generate the fan control information including the checked fan speed.

[0026] According to one embodiment, the mapping information DB may map the recipe and fan speed of the process equipment, or map the lot information and fan speed of the object.

[0027] According to one embodiment, when multiple cassettes are stored in each stocker, the control module can generate fan control information by mapping the identification information of each cassette to the fan speed to be applied to the fan of the corresponding cassette. Effects of the invention

[0028] Various embodiments of the present disclosure can improve the quality and manufacturing efficiency of an object and reduce power consumption by varying the operation of an environmental control device (e.g., fan, temperature controller, humidity controller, vibration controller, etc.) according to process characteristics. For example, various embodiments of the present disclosure can improve quality by preventing (or minimizing) contamination in a process where there is a high possibility of contamination by foreign substances by increasing the operating time and / or operating intensity of the environmental control device. In this way, various embodiments of the present disclosure can improve manufacturing efficiency (or yield) by efficiently preventing contamination of the object (or improving quality). As another example, various embodiments of the present disclosure can reduce power consumption in a process where there is no or low possibility of contamination by foreign substances by turning off the environmental control device or reducing the operating time and / or operating intensity.

[0029] The effects according to the various embodiments of the present disclosure are not limited to those exemplified above, and a wider variety of effects may be understood from the description provided in the present disclosure. Brief explanation of the drawing

[0030] FIG. 1 is a schematic diagram illustrating a manufacturing automation system according to one embodiment of the present disclosure. FIG. 2a is a drawing illustrating the appearance of a cassette according to one embodiment of the present disclosure. FIG. 2b is a drawing for explaining an example of varying the speed of a fan according to a process according to one embodiment of the present disclosure. FIG. 3 is a flowchart illustrating a method for controlling the process environment of a manufacturing automation system according to one embodiment of the present disclosure. FIG. 4 is a block diagram illustrating the configuration of an electronic device according to one embodiment of the present disclosure. FIG. 5 is a flowchart illustrating a method for controlling the process environment of an electronic device according to one embodiment of the present disclosure. Specific details for implementing the invention

[0031] Hereinafter, various embodiments of the present disclosure will be described with reference to the attached drawings. Although specific embodiments of the present disclosure are illustrated in the drawings and described in detail, this is not intended to limit the various embodiments of the present disclosure to a specific form. For example, it is obvious to those skilled in the art that the embodiments of the present disclosure may be varied.

[0032] FIG. 1 is a schematic diagram illustrating a manufacturing automation system according to one embodiment of the present disclosure, FIG. 2a is a diagram illustrating the appearance of a cassette according to one embodiment of the present disclosure, and FIG. 2b is a diagram illustrating an example of varying the speed of a fan according to a process according to one embodiment of the present disclosure.

[0033] Referring to FIGS. 1 to 2b, a manufacturing automation system (100) according to one embodiment of the present disclosure can automate all or part of various processes for the design, manufacturing, inspection, and / or shipment of a product, and can support (or provide) the production of high-quality products and power savings by variably controlling the process environment in consideration of the characteristics of each process. For example, the manufacturing automation system (100) can transport an object to a location where a process is to be performed to perform the process, or temporarily store it before performing the process, and transport or temporarily store the object after the process has been performed to the next process location. For example, the manufacturing automation system (100) according to one embodiment of the present disclosure can be widely applied to the manufacturing process of various products (e.g., display devices, semiconductors, pharmaceuticals, petrochemical products, home appliances, etc.). For convenience of explanation, the following description will be given as an example of its use in the manufacturing process of a display device.

[0034] In addition, a manufacturing automation system (100) according to one embodiment of the present disclosure can variably control the process environment (e.g., wind speed, airflow, temperature, humidity, vibration, etc.) by taking into account the characteristics of each process. For example, the manufacturing automation system (100) can variably control (e.g., adjust) the wind speed of a fan (e.g., Equipment Fan filter Unit, EFU) located in various process equipment (e.g., cassette, stocker, buffer unit, etc.). For convenience of explanation, the following description will use an example of variably controlling the wind speed of a fan placed in a cassette for each process step.

[0035] A manufacturing process system (100) according to one embodiment may include a transfer device (10), a manufacturing line (20), a buffer unit (30), a stocker (40), a data collection device (60), and a control device (70).

[0036] The transfer device (10) can transfer objects along a manufacturing line (20). For example, the transfer device (10) can transfer a cassette (15) loaded with an object (e.g., a substrate included in a display device). The cassette (15) can be loaded with (or accommodate) items used in the manufacturing process of the display device or manufactured products. For convenience of explanation, the case where a substrate is loaded into the cassette (15) will be described below as an example.

[0037] According to one embodiment, the cassette (15) has a cuboid shape as shown in FIG. 2a, and a loading space for loading objects may be formed inside. Additionally, the cassette (15) may have only one side (e.g., front surface) open and five sides (e.g., top surface, bottom surface, left-side surface, right-side surface, and rear surface) closed. At least one fan (15a) may be positioned on the rear of the cassette (15). The at least one fan (15a) may form an airflow toward the front to prevent foreign substances, gases and / or particles, etc., from entering the interior of the cassette (15). The wind speed of the at least one fan (15a) may be varied according to conditions (e.g., characteristics of the process being performed). The operation (e.g., fan speed) of at least one fan (15a) can be wirelessly controlled by a fan control device (41) described later. For example, the fan (15a) may be a wireless EFU.

[0038] According to one embodiment, the transfer device (10) may be an automatic guided vehicle (AGV) used in a factory automation system, an automated material handling system (AMHS), etc. However, it is not limited thereto and may include various transport devices for transporting a cassette (15). For example, the transfer device (10) may include an autonomous mobile robot (AMR), a rail guided vehicle (RGV), an overhead shuttle (OHS), a conveyor belt, etc.

[0039] The manufacturing line (20) may be a passage or rail through which the transfer device (10) moves. According to one embodiment, if the transfer device (10) is an overhead shuttle, the manufacturing line (20) may be placed on the ceiling or upper part of a manufacturing space (e.g., a clean-room).

[0040] A buffer unit (30) may be positioned between a transfer device (10) and a stocker (40). The buffer unit (30) may temporarily store a cassette (15). For example, the buffer unit (30) may temporarily store a cassette (15) to prevent delays in the work process associated with the transfer of the cassette (15). The buffer unit (30) may include a transfer member (not shown) for transferring the cassette (15) from the transfer device (10) to the buffer unit (30). For example, the buffer unit (30) may include a transfer roller (not shown) as a transfer member. Specifically, when the cassette (15) reaches the location where the buffer unit (30) is located by the transfer device (10), the cassette (15) may be transferred to the buffer unit (30) by the rotation of the transfer roller. According to some embodiments, the transfer member may include a transfer member such as a conveyor belt or an arm.

[0041] A stocker (40) is positioned on one side of a buffer unit (30) and can store a cassette (15). The stocker (40) can receive and store a cassette (15) to be processed from the buffer unit (30), or transfer a cassette (15) to the buffer unit (30) after the process is completed. According to one embodiment, the stocker (40) includes a plurality of layers in a first direction (Z-axis), though not limited thereto, and each layer can store a plurality of cassettes (15) in a second direction (X-axis direction) and a third direction (Y-axis direction).

[0042] According to one embodiment, the stocker (40) can move (or transfer) the stored cassette (15) to the corresponding process equipment (45) in the order of the process. The stocker (40) can move (or transfer) the cassette (15) after all processes have been completed to the buffer unit (30). The cassette (15) after all processes have been completed and transferred to the buffer unit (30) can be transferred to another stocker (40) via the transfer device (10).

[0043] According to one embodiment, a plurality of stokers (40) may be arranged along a manufacturing line (20). Each stoker (40) may include at least one process equipment (45). According to some embodiments, the process equipment (45) may not be included in the stoker (40) but may be arranged around the stoker (40) as a separate configuration. Each process equipment (45) may perform a process on an object (e.g., a substrate) loaded in a cassette (40). For example, each process equipment (45) may perform various manufacturing processes on an object (e.g., a substrate), such as a cell manufacturing process and a module process.

[0044] According to one embodiment, each stocker (40) may include a fan control device (41) that controls the operation of a fan (15a) located in a cassette (15), as shown in FIG. 2B. The fan control device (41) and the fan (15a) may be wirelessly connected. The fan control device (41) may control the wind speed of the fan (15a) differently depending on the process. For example, the fan control device (41) can control the fan (15a) of the cassette (15) to rotate at a first RPM (e.g., corresponding to a first wind speed (e.g., 0.4 m (meter) / s (second))) during the first process (45-1), the third process (45-3), the fifth process (45-5), and the sixth process (45-6), control the fan (15a) of the cassette (15) to rotate at a second RPM (e.g., corresponding to a second wind speed (e.g., 0.2 m / s)) during the second process (45-2), and control the fan (15a) of the cassette (15) to rotate at a third RPM (e.g., corresponding to a third wind speed (e.g., 0.5 m / s)) during the fourth process (45-4).

[0045] The data collection device (60) can collect (or acquire) process information related to the cassette (15) loaded with the object. The process information may include process step information where the cassette (15) is located, location information of the cassette (15), and / or quality information related to abnormalities in the manufacturing equipment.

[0046] According to one embodiment, the data collection device (60) may include a location data collection module (61), a process data collection module (62), and a quality data collection module (63).

[0047] The location data collection module (61) can collect data related to the location information of the cassette (15). For example, the location data collection module (61) can collect raw data related to the location information of the cassette (15) from a material control system (MCS) that manages the movement path of the cassette (15). According to one embodiment, the location data collection module (61) is a material control system (MCS) or may be included in a material control system (MCS).

[0048] The process data collection module (62) can collect data related to process step information where the cassette (15) is located. For example, the process data collection module (62) can collect raw data related to the process step where the cassette (15) is located from a manufacturing execution system (MES) that monitors and manages the manufacturing process. According to one embodiment, the process data collection module (62) is a manufacturing execution system (MES) or may be included in a manufacturing execution system (MES).

[0049] The quality data collection module (63) can collect data related to quality information regarding abnormalities (or malfunctions) of the equipment. For example, the quality data collection module (63) can collect raw data related to quality information from a fault detection and classification system (FDC) that detects abnormalities of the equipment and classifies the abnormalities. According to one embodiment, the quality data collection module (63) is a fault detection and classification system (FDC) or may be included in a fault detection and classification system (FDC).

[0050] According to one embodiment, the data collection device (60) can acquire the process information based on artificial intelligence (e.g., deep learning). For example, the data collection device (60) may include an artificial intelligence-based classification model. The classification model can generate the process information (e.g., extract information necessary to generate fan control information from various information included in the raw data) based on raw data collected by at least one of the location data collection module (61), the process data collection module (62), and the quality data collection module (63). The classification model may be trained based on training data. Additionally, the classification model may be updated periodically or upon request (e.g., a user's request). The control device (70) may be connected to the data collection device (60) wirelessly or via a wired connection. The control device (70) may receive process information from the data collection device (60). The control device (70) can analyze process information and, based on the analysis results, generate fan control information to control the operation (e.g., rotation time and / or rotation intensity) of at least one fan (15a) located in the cassette (15), and transmit the generated fan control information to the fan control device (41) of the stocker (40). For example, the control device (70) can analyze the collected process information to recognize which stocker among the plurality of processes each cassette is located in and which process step among the plurality of processes to perform. Subsequently, the control device (70) can check the fan speed mapped to the recognized process step based on the previously stored mapping information and generate fan control information to control the fan speed of each cassette based on the checked fan speed. Meanwhile, the control device (70) can analyze the collected process information to determine the range of data to be used for generating the fan control information. For example, the control device (70) can analyze the collected process information to determine the upper limit data and lower limit data to be used for generating the fan control information.

[0051] According to one embodiment, the control device (70) can generate fan control information by mapping identification information of each cassette (e.g., MAC address, cassette ID, Lot number, etc.) to the fan speed to be applied to the corresponding fan when a single stocker contains multiple cassettes. According to one embodiment, the control device (70) can improve the yield by efficiently applying drying and ventilation characteristics (e.g., number of ventilations) after the process is completed. For example, the control device (70) can vary the fan speed by reflecting the drying and ventilation characteristics. Specifically, the control device (70) can variably control the set fan speed (e.g., maintain, increase, or decrease) by reflecting process information, because if the set fan speed is increased in response to an increase in the number of ventilations, the object may be damaged due to the high fan speed.

[0052] According to one embodiment, the control device (70) can generate the fan control information based on artificial intelligence (e.g., deep learning). For example, the control device (70) may include an artificial intelligence-based generative model. The generative model may analyze process information and generate the fan control information based on the analyzed process information. The generative model may be trained based on training data. Additionally, the generative model may be updated periodically or upon request (e.g., a user's request). According to one embodiment, the control device (70) may separately include an analysis model that analyzes the process information. At this time, the generation module may receive analysis results (e.g., stocker information where each cassette is located and process steps to be performed by each cassette) from the analysis model and generate fan control information based on the received analysis results.

[0053] Meanwhile, although not illustrated in FIG. 1, the manufacturing automation system (100) may further include an air filter unit. According to one embodiment, the air filter unit may include a Fan Filter Unit (FFU) or an Equipment Fan Filter Unit (EFU).

[0054] FIG. 3 is a flowchart illustrating a method for controlling the process environment of a manufacturing automation system according to one embodiment of the present disclosure.

[0055] Referring to FIG. 3, a method for controlling the process environment of a manufacturing automation system according to one embodiment of the present disclosure may include the step (S301) of collecting process information for each cassette while performing a manufacturing process. For example, a data collection device (60) of a manufacturing automation system (100) may acquire process step information, location information, and / or quality information for each of a plurality of cassettes. Specifically, the data collection device (60) may collect location information of each cassette (15) from a logistics control system (MCS) that manages the movement path of the cassette (15), collect process step information from a manufacturing execution system (MES) that manages the process sequence, and collect quality information from an anomaly detection classification system (FDC) that detects and manages anomalies in an object (or manufacturing equipment).

[0056] According to one embodiment, the method may include the step (S303) of transmitting the collected process information to a control device (70). For example, the data collection device (60) may transmit the collected process information to the control device (70) via various known wireless communication methods (e.g., Wi-Fi, Wi-Fi Direct, Bluetooth, Bluetooth Low Energy (BLE), Zigbee, Ultra-Wideband (UWB) communication, etc.).

[0057] According to one embodiment, the method may include the step (S305) in which a control device (70) analyzes collected process information and generates fan control information based on the analyzed result. For example, the control device (70) can analyze the collected process information to recognize which of the multiple stockers each cassette is located in and which of the multiple processes it will perform. Subsequently, the control device (70) can check the fan speed mapped to the recognized process based on previously stored mapping information and generate fan control information to control the fan speed of each cassette based on the checked fan speed. According to one embodiment, if a single stocker contains multiple cassettes, the control device (70) can generate fan control information by mapping the identification information of each cassette (e.g., MAC address, cassette ID, Lot number, etc.) and the fan speed to be applied to the corresponding fan.

[0058] According to one embodiment, the method may include the step (S307) of the control device (70) transmitting the generated fan control information to the fan control device (41) of the stocker (40). For example, when the first-1 cassette and the first-2 cassette are located in the first stocker and the second-1 cassette and the second-2 cassette are located in the second stocker, the control device (70) may transmit the first-1 fan control information for controlling the fan speed of the first-1 cassette and the first-2 fan control information for controlling the fan speed of the first-2 cassette to the fan control device of the first stocker, and transmit the second-1 fan control information for controlling the fan speed of the second-1 cassette and the second-2 fan control information for controlling the fan speed of the second-2 cassette to the fan control device of the second stocker. Here, the first-1 fan control information, the first-2 fan control information, the second-1 fan control information, and the second-2 fan control information may be the same or different depending on the characteristics of the process in which the first-1 cassette, the first-2 cassette, the second-1 cassette, and the second-2 cassette are located. In this way, the control device (70) can control the fan speed of each cassette differently depending on the characteristics of the process in which each cassette is located.

[0059] According to one embodiment, the method may include the step (S309) in which a fan control device (41) of a stoker (40) transmits the fan control information to at least one fan (15a) included in the corresponding cassette (15). For example, the fan control device of the first stoker may transmit the first-1 fan control information to the fan of the first-1 cassette and the first-2 fan control information to the fan of the first-2 cassette, and the fan control device of the second stoker may transmit the second-1 fan control information to the fan of the second-1 cassette and the second-2 fan control information to the fan of the second-2 cassette.

[0060] According to one embodiment, the method may include a step (S311) in which the fan (15a) of the cassette (15) operates at a speed according to fan control information. For example, the fan of the first-1 cassette may operate at a first-1 speed, the fan of the first-2 cassette may operate at a first-2 speed, the fan of the second-1 cassette may operate at a second-1 speed, and the fan of the second-2 cassette may operate at a second-2 speed. Here, as described above, the first-1 speed, the first-2 speed, the second-1 speed, and the second-2 speed may all be the same, or at least one of them may be different.

[0061] FIG. 4 is a block diagram illustrating the configuration of an electronic device according to one embodiment of the present disclosure.

[0062] Referring to FIG. 4, an electronic device (400) according to one embodiment of the present disclosure may include a communication module (410), a memory (420), and a control module (430). According to one embodiment, the electronic device (400) may be the control device (70) of FIG. 1.

[0063] The communication module (410) can communicate with an external device (e.g., the data collection device (60) of FIG. 1, the fan control device (41) of FIG. 2b). The communication module (410) can transmit and receive various information with the external device. For example, the communication module (410) can receive process information from the external device (e.g., the data collection device (60) of FIG. 1). As another example, the communication module (410) can transmit fan control information to another external device (e.g., the fan control device (41) of FIG. 2b). According to one embodiment, the communication module (410) may include a wireless communication module for wireless communication with the external device (e.g., a Wi-Fi module, a Bluetooth module, a low-power Bluetooth (BLE) module, a Zigbee module, an ultra-wideband (UWB) communication module, etc.). According to some embodiments, the communication module (410) may further include a wired communication module (not shown).

[0064] The memory (420) can store various data used by at least one component of the electronic device (400) (e.g., control module (430)). The data may include, for example, input data or output data for software and related commands. The memory (420) may include volatile memory (not shown) or non-volatile memory (not shown).

[0065] According to one embodiment, the memory (420) may store a program (e.g., software) for variably controlling the manufacturing process environment. According to one embodiment, the memory (420) may store a mapping information database (421). The mapping information database (421) may store a mapping between the characteristics of the process and the speed of the fan. For example, the mapping information database (421) may map a process with a low probability of foreign substances or contamination (e.g., inflow of foreign substances, gas, and / or particles) to a relatively low speed, and map a process with a high probability of contamination to a relatively high fan speed. This is intended to save power by preventing the fan from operating unnecessarily in processes with a low probability of contamination, and to improve quality by preventing contamination through high wind speeds in processes with a high probability of contamination. The mapping information database (421) may include a mapping table in which various processes are classified into multiple process groups based on process characteristics (e.g., chemical and gas characteristics), and the classified process groups and the fan speeds to be applied to each group are mapped.

[0066] According to one embodiment, the mapping information DB (421) may map the recipe (e.g., setting conditions) of the process equipment to the fan speed. This is to vary the fan speed by reflecting the characteristics according to the setting conditions for performing the process, even if the process equipment is the same. According to one embodiment, the mapping information DB (421) may map the model information or lot information of the object to the fan speed. This is to vary the fan speed by reflecting the characteristics of the object that vary depending on the lot.

[0067] The control module (430) can variably control the manufacturing process environment (e.g., fan speed). For example, the control module (430) can analyze process information received from an external device (e.g., data collection device (60) of FIG. 1) through the communication module (410), generate fan control information based on the analysis results, and transmit the generated fan control information to another external device (e.g., fan control device (41) of FIG. 2b) through the communication module (410). According to one embodiment, the control module (430) may include an analysis module (431) that analyzes process information and a generation module (432) that generates fan control information.

[0068] The analysis module (431) can analyze the collected process information to recognize which of the multiple stockers each cassette is located in and which of the multiple process steps it will perform.

[0069] The generation module (432) can check the fan speed mapped to the recognition result based on the mapping information DB (421) stored in the memory (420), and generate fan control information to control the fan speed of each cassette based on the checked fan speed. According to one embodiment, if the stocker contains multiple cassettes, the generation module (432) can generate fan control information by mapping the identification information (e.g., Mac Address, Cassette ID, Lot Number, etc.) of each cassette with the fan speed. The generated fan control information is transmitted to the stocker where the corresponding cassette is located, and the stocker can control the fan speed of the cassette corresponding to the identification information.

[0070] According to one embodiment, the analysis module (431) may be an analysis model based on a previously learned artificial intelligence (e.g., deep learning). Additionally, the generation module (432) may be a generation model based on a previously learned artificial intelligence (e.g., deep learning).

[0071] FIG. 5 is a flowchart illustrating a method for controlling the process environment of an electronic device according to one embodiment of the present disclosure.

[0072] Referring to FIG. 5, a method for controlling the process environment of an electronic device (400) according to one embodiment of the present disclosure may include the step (S510) of acquiring process information for each of a plurality of cassettes while performing a manufacturing process. For example, the electronic device (400) (e.g., control module (430)) may receive process step information, location information, and / or quality information for each of the plurality of cassettes from a data collection device (e.g., data collection device (60) of FIG. 1) connected via a communication module (410). Here, since the step S510 is similar to the step S303 of FIG. 3, a detailed description is omitted.

[0073] According to one embodiment, the method may include a step (S520) of analyzing the acquired process information. For example, an electronic device (400) (e.g., a control module (430)) may analyze the collected information to recognize which of the multiple stockers each cassette is located in and which of the multiple processes to perform. Here, since the step S520 is similar to the step S305 of FIG. 3, a detailed description is omitted.

[0074] According to one embodiment, the method may include a step (S530) of generating fan control information based on analysis results. For example, an electronic device (400) (e.g., a control module (430)) may identify the fan speed mapped to the recognized process based on a mapping information DB (421) previously stored in memory (420), and generate fan control information for controlling the fan speed of each cassette based on the identified fan speed. Here, since the step S530 is similar to the step S305 of FIG. 3, a detailed description is omitted.

[0075] According to one embodiment, the method may include the step (S540) of transmitting the generated fan control information to a fan control device. For example, an electronic device (400) (e.g., a control module (430)) may transmit the generated fan control information to a fan control device of the corresponding stocker (e.g., a fan control device (41) of FIG. 1) through a communication module (410). Here, since the step S540 is similar to the step S307 of FIG. 3, a detailed description is omitted. In this way, the electronic device (400) can control the fan speed of each cassette differently according to the characteristics of the process in which each cassette is located.

[0076] Meanwhile, various embodiments of the present disclosure have been described in detail above based on examples of controlling fan speed and / or operating time. However, the present disclosure can vary the operation of various environmental control devices, such as temperature, humidity, and vibration, depending on process characteristics. Through this, the various embodiments of the present disclosure can improve the quality and manufacturing efficiency of an object (e.g., a substrate) and reduce power consumption.

[0077] Various embodiments of the present disclosure and the terms used therein are not intended to limit the technical features described in the present disclosure to specific embodiments, and should be understood to include various modifications, equivalents, or substitutions of said embodiments. In connection with the description of the drawings, similar reference numerals may be used for similar or related components. The singular form of a noun corresponding to an item may include one or more of said items unless the relevant context clearly indicates otherwise. In the present disclosure, each of phrases such as “A or B”, “at least one of A and B”, “at least one of A or B”, “A, B or C”, “at least one of A, B and C”, and “at least one of A, B, or C” may include any one of the items listed together in the corresponding phrase, or all possible combinations thereof. Terms such as “first,” “second,” or “first” or “second” may be used simply to distinguish a component from another component and do not limit the components in any other aspect (e.g., importance or order). Where any (e.g., first) component is referred to as “coupled” or “connected” to another (e.g., second) component, with or without the terms “functionally” or “communicationly,” it means that said component may be connected to said other component directly (e.g., via wire), wirelessly, or through a third component.

[0078] The term “module” as used in various embodiments of the present disclosure may include a unit implemented in hardware, software, or firmware, and may be used interchangeably with terms such as logic, logic block, component, or circuit, for example. A module may be a component formed integrally, or a minimum unit of said component or a part thereof that performs one or more functions. For example, according to one embodiment, a module may be implemented in the form of an application-specific integrated circuit (ASIC).

[0079] Various embodiments of the present disclosure may be implemented as software (e.g., a program) comprising one or more instructions stored in a storage medium (e.g., internal memory or external memory) readable by a machine. For example, a processor of the machine (e.g., a control module (430)) may call at least one of the one or more instructions stored from the storage medium and execute it. This enables the machine to operate to perform at least one function according to the at least one called instruction. The one or more instructions may include code generated by a compiler or code that can be executed by an interpreter. The storage medium readable by the machine may be provided in the form of a non-transitory storage medium. Here, "non-transitory" simply means that the storage medium is a tangible device and does not contain a signal (e.g., electromagnetic waves), and this term does not distinguish between cases where data is stored semi-permanently and cases where it is stored temporarily in the storage medium.

[0080] Methods according to various embodiments of the present disclosure may be provided as included in a computer program product. The computer program product may be traded between a seller and a buyer as a product. The computer program product may be distributed in the form of a device-readable storage medium (e.g., compact disc read-only memory (CD-ROM)) or distributed online (e.g., download or upload) through an application store (e.g., Play Store™) (or directly between two user devices (e.g., smartphones). In the case of online distribution, at least a portion of the computer program product may be temporarily stored or temporarily created in a device-readable storage medium, such as the memory of a manufacturer's server, an application store's server, or a relay server.

[0081] According to various embodiments, each component (e.g., module or program) of the components described above may include a singular or multiple entities, and some of the multiple entities may be separated and placed in other components. According to various embodiments, one or more of the aforementioned components or operations may be omitted, or one or more other components or operations may be added. Generally or additionally, multiple components (e.g., module or program) may be integrated into a single component. In this case, the integrated component may perform one or more functions of each of the multiple components in the same or similar manner as those performed by the corresponding components among the multiple components prior to integration. According to various embodiments, operations performed by the module, program, or other components may be executed sequentially, in parallel, iteratively, or heuristically, or one or more of the operations may be executed in a different order, omitted, or one or more other operations may be added. Explanation of the symbols

[0082] 100: Manufacturing Automation System 10: Transfer Device 15: Cassette 15a: Fan 20: Manufacturing line 30: Buffer unit 40: Stalker 41: Fan control unit 45: Process equipment 60: Data acquisition device 70: Control unit 400: Electronic device 410: Communication module 420: Memory 421: Mapping Information DB 430: Control Module 431: Analysis Module 432: Generation Module

Claims

Claim 1 A manufacturing automation system comprising: a cassette loaded with at least one object and including at least one fan; a transfer device for transferring the cassette; a stocker including a fan control device that stores the cassette transferred by the transfer device, moves the cassette to one of a plurality of process equipment, and controls the operating speed of the at least one fan; a data collection device for collecting process information related to the cassette; and a control device that receives the collected process information, generates fan control information that variably controls the operating speed of the at least one fan based on the received process information, and transmits the generated fan control information to the fan control device of the stocker. Claim 2 A manufacturing automation system according to claim 1, wherein the control device analyzes the process information to recognize the process step in which the cassette is located, uses a previously stored mapping information database to verify the fan speed mapped to the recognized process step, and generates the fan control information including the fan speed. Claim 3 In claim 2, the mapping information DB comprises a manufacturing automation system including a mapping table in which process groups classified according to process characteristics and fan speeds to be applied to each process group are respectively mapped. Claim 4 In claim 2, the mapping information DB is a manufacturing automation system in which the recipe and fan speed of the process equipment are mapped. Claim 5 In claim 2, the mapping information DB is a manufacturing automation system in which the lot information and fan speed of the object are mapped. Claim 6 In claim 1, the control device is a manufacturing automation system that generates fan control information by mapping identification information of each cassette to a fan speed to be applied to the fan of the corresponding cassette when a plurality of cassettes are stored in the stocker. Claim 7 In claim 1, the data collection device comprises a process data collection module that collects data related to a process step in which the cassette is located; a location data collection module that collects data related to the location of the cassette; and a quality data collection module that collects data related to the quality of the object, thereby forming a manufacturing automation system. Claim 8 In claim 7, the data collection device comprises a manufacturing automation system including an artificial intelligence-based classification model that has been trained to generate process information based on raw data collected by at least one of the process data collection module, the location data collection module, and the quality data collection module. Claim 9 A manufacturing automation system according to claim 1, wherein the control device includes an artificial intelligence-based generative model that has been trained to analyze process information and generate fan control information based on the analyzed process information. Claim 10 A manufacturing automation system according to claim 1, wherein at least one fan and the fan control device are connected via wireless communication. Claim 11 A manufacturing automation system according to claim 1, further comprising a buffer unit located between the transfer device and the stoker and temporarily storing the cassette. Claim 12 A method for controlling a process environment of a control device, comprising: collecting process information related to a cassette loaded with at least one object; analyzing the collected process information and generating fan control information that variably controls the operating speed of at least one fan included in the cassette based on the analysis results; and transmitting the generated fan control information to a fan control device that controls the operation of at least one fan. Claim 13 In claim 12, the step of generating the fan control information comprises: a step of analyzing the process information to recognize the process step in which the cassette is located; a step of confirming the fan speed mapped to the recognized process step using previously stored mapping information; and a step of generating the fan control information based on the fan speed. Claim 14 In claim 12, the step of generating the fan control information comprises the step of generating the fan control information by mapping the identification information of each cassette and the fan speed to be applied to the fan of the corresponding cassette, respectively, when a plurality of cassettes are stored in each stocker. Claim 15 In claim 12, the step of collecting process information comprises: a process data collection step for collecting data related to a process step in which the cassette is located; a location data collection step for collecting data related to the location of the cassette; and a quality data collection step for collecting data related to the quality of the object. Claim 16 A control device comprising: a communication module for receiving process information related to a cassette loaded with at least one object; and a control module for analyzing the received process information, generating fan control information for variably controlling the operating speed of at least one fan included in the cassette based on the analysis results, and controlling the communication module to transmit the generated fan control information to a fan control device that controls the operation of the at least one fan. Claim 17 A control device according to claim 16, further comprising a memory that stores a mapping information database in which process groups classified according to process characteristics and fan speeds to be applied to each process group are respectively mapped. Claim 18 In claim 17, the control module analyzes the process information to recognize the process step where the cassette is located, verifies the fan speed mapped to the recognized process step from the mapping information DB, and generates the fan control information including the verified fan speed. Claim 19 In claim 17, the mapping information DB is a control device in which the recipe and fan speed of process equipment are mapped, or the lot information and fan speed of the object are mapped. Claim 20 In claim 16, the control module is a control device that generates fan control information by mapping identification information of each cassette to the fan to be applied to the fan of the corresponding cassette when a plurality of cassettes are stored in each stocker.

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