Triboelectric nanogenerator and its manufacturing method

Abstract

A triboelectric nanogenerator according to the present invention comprises: a first film comprising a first substrate, a first electrode, and an adhesive layer; and a second film comprising a second substrate and a second electrode.

Description

Technology Field

[0001] The present invention relates to a triboelectric nanogenerator and a method for manufacturing the same. Background Technology

[0003] Energy harvesting is a technology that collects energy generated from natural sources and converts it into electrical energy. Interest is growing in this technology as a means to replace or supplement existing batteries in devices where miniaturization is emphasized, such as IoT wearables or implantable devices. Natural energy sources used for energy harvesting include photovoltaic, thermoelectric, piezoelectric, electromagnetic, and triboelectric sources. Among these, piezoelectric and triboelectric devices are attracting attention because they require relatively lower investment and operating costs compared to other energy harvesting technologies and are free from temporal and spatial constraints. These piezoelectric and triboelectric devices typically possess thin and flexible characteristics. A representative piezoelectric-triboelectric device is the triboelectric nanogenerator (TENG), which generates electricity by utilizing the triboelectric charging and electrostatic induction phenomena that occur when two different materials come into contact and separate, using two different materials as a first and second charged layer. This is a technology that harvests energy by utilizing the charge transfer that occurs during the process of two materials with different triboelectric properties coming into contact. Specifically, it utilizes the phenomenon where a voltage drop occurs at the contact surface when two materials come into contact or do not come into contact due to mechanical force, causing electrons to move from one material to the other and generate electrical energy. Such triboelectric nanogenerators are considered promising next-generation energy generation devices due to desirable characteristics such as being lightweight, portable, environmentally friendly, and low-cost.Triboelectric nanogenerators (TENGs), which convert mechanical energy into electrical energy, are the subject of active research and development due to their high energy conversion efficiency, low manufacturing costs, simple and flexible structures, and the ability to be fabricated from various materials. The performance of TENGs is significantly influenced by the amount of charge generated through friction and the efficiency of the process for separating positive and negative charges. Generally, two methods are applied to improve TENG performance. The first involves increasing the amount of charge generated during the friction process by using appropriate friction materials with distinctly different polarities, while the second involves creating a friction layer with a surface having a micro or nano structure or performing surface modification on a nanoscale. In particular, since effectively separating the generated positive and negative charges is crucial in the second method, it has a profound impact on determining the device structure. Therefore, TENG performance has been improved through new structures such as linear grating, rolling, and planar structures. Furthermore, to improve the performance of TENGs, methods are being applied to increase surface charge density by injecting ionized air. As such, various improvement measures have been proposed to enhance the performance of TENGs, but in order for TENGs to remain a promising future technology for large-area applications, efforts are still needed to integrate mature and robust technologies and to develop TENGs with structures capable of overcoming the limitations of peeling methods, such as rapid peeling and requirements for initial adhesion.

[0004] The aforementioned background technology is one that the inventor possessed or acquired in the process of deriving the contents of the disclosure of the present application, and it cannot be considered as prior art disclosed to the general public prior to the filing of this application. The problem to be solved

[0006] The present invention is intended to solve the aforementioned problem, and the objective of the present invention is to provide a programmable triboelectric nanogenerator based on a non-linear cutting pattern and a method for manufacturing the same.

[0007] Another technical problem to be solved by the present invention is to provide a triboelectric nanogenerator capable of simultaneously inducing strong adhesion and enhancement of peak electrical signals by combining with a metamaterial adhesive, and a method for manufacturing the same.

[0008] However, the problems that the present invention aims to solve are not limited to those mentioned above, and other unmentioned problems will be clearly understood by those skilled in the art from the description below. means of solving the problem

[0010] A triboelectric nanogenerator according to the present invention comprises: a first film comprising a first substrate, a first electrode, and an adhesive layer; and a second film comprising a second substrate and a second electrode.

[0011] According to one embodiment, a portion of the first film includes a metastructure region comprising a cut pattern, and the cut pattern may be in a shape including cut edges and one uncut edge.

[0012] According to one embodiment, the maximum width of the metastructure is 1 mm to 20 mm, the maximum length from the uncut side of the metastructure is 1 mm to 50 mm, and the metastructure may be cut to the thickness range of the first film.

[0013] According to one embodiment, the metastructure may be arranged in one direction, or the metastructure may be arranged symmetrically with respect to the center of the first film.

[0014] According to one embodiment, the spacing between the metastructures may be 1 mm to 5 mm.

[0015] According to one embodiment, the cut pattern in the adhesive layer of the first film may be attached to the second substrate of the second film and delayed peeled off.

[0016] According to one embodiment, the first film may provide minimum peel strength in the direction of minimum force when peeling of the first film proceeds from the uncut edge of the metastructure, and may provide maximum peel strength in the direction of maximum force when peeling of the first film proceeds from the region opposite to the uncut edge.

[0017] According to one embodiment, the adhesive layer may comprise at least one selected from the group consisting of polydimethylsiloxane (PDMS), polyurethane (PU), polyvinyl alcohol (PVA), polymethyl methacrylate (PMMA), ethylene vinyl acetate (EVA), polycaprolactone (PCL), polyvinylidene fluoride (PVDF), polyimide, silicone rubber, polypropylene (PP), ecoflex, low-density polyethylene (LDPE), and MXene.

[0018] According to one embodiment, the first substrate and the second substrate may each comprise at least one selected from the group consisting of polyethylene terephthalate (PET), polyethersulfone (PES), polyester (PE), polyethylene naphthalate (PEN), and Kapton.

[0019] According to one embodiment, the triboelectric nanogenerator may have a higher peak voltage value when providing maximum peel strength in the direction of maximum force, and a lower peak voltage value when providing minimum peel strength in the direction of minimum force.

[0020] According to one embodiment, the triboelectric nanogenerator may have an average peak voltage of 7.0 V to 10 V when peeling in the direction of maximum force under a peeling speed of 10 mm / s.

[0021] According to one embodiment, the thickness of the first film and the second film is each 20 μm to 500 μm, and the thickness ratio of the first substrate and the adhesive layer may be 1:0.1 to 1:3.

[0022] A method for manufacturing a triboelectric nanogenerator according to the present invention comprises: a step of forming a first electrode on a first substrate; a step of forming an adhesive layer on the first electrode; a step of heat-curing the first electrode on which the adhesive layer is formed to form a first film; a step of cutting a portion of the first film to form a metastructure; a step of forming a second electrode on a second substrate to form a second film; and a step of attaching the surface of the adhesive layer of the first film on which the metastructure is formed to the surface of the second substrate of the second film. Effects of the invention

[0024] The present invention provides a triboelectric nanogenerator and a method for manufacturing the same. The triboelectric nanogenerator according to the present invention induces not only excellent adhesion performance through a non-linear cutting pattern but also an enhanced electric peak signal. Furthermore, even when peeled off at a low peeling speed, a high signal can be obtained due to the high separation speed of the individual large-area cutting patterns. Based on the high adhesion imparted by the cutting pattern, the range of triboelectric material selection can be expanded, and sustainable adhesion and electrical signal production are possible based on a simple structure. With a directional non-linear structure, signal switching is possible depending on the peeling direction, and electrical signals can be easily programmed by modifying the cutting pattern. Adhesion and electrical signals can be programmed separately, and different electrical signals can be produced even with cutting patterns exhibiting the same adhesion, and vice versa. It has the advantage of showing high utility in cases where both adhesion and electrical signals are required simultaneously. When configured in a rollable form, continuous signals can be obtained and directional utilization is possible. Based on a simple manufacturing process, it can be applied to various materials as needed. Improved electrical performance can be expected through the introduction of nano / micro structures, which increase the effective contact area. By expanding the size of Meta-TENGs, they can be utilized in fields requiring greater adhesion and electrical signals. Furthermore, if developed into a rolling form, optimization allows for application not only to conveyor belts but also to a wider range of fields, such as automobile wheels, thereby expanding the scope of application. Brief explanation of the drawing

[0026] FIG. 1 is a schematic diagram showing a triboelectric nanogenerator according to one embodiment of the present invention. FIG. 2 is a schematic diagram showing the structure of a triboelectric nanogenerator according to one embodiment and a comparative example of the present invention. Figure 3 is a graph showing the performance evaluation according to the parameters of the metastructure of a triboelectric nanogenerator according to one embodiment of the present invention. Figure 4 is a metastructure of a triboelectric nanogenerator according to one embodiment of the present invention and a graph of performance evaluation based thereon. FIG. 5 is a diagram showing an example of application of a triboelectric nanogenerator according to one embodiment of the present invention. FIG. 6 is a diagram showing an example of application of a triboelectric nanogenerator according to one embodiment of the present invention. FIG. 7 is a diagram showing an example of application of a triboelectric nanogenerator according to one embodiment of the present invention. FIG. 8 is a flowchart showing the operating mechanism of a triboelectric nanogenerator according to one embodiment of the present invention. FIG. 9 is an actual image and a voltage graph over time showing the operating mechanism of a triboelectric nanogenerator according to one embodiment of the present invention. FIG. 10 is a graph showing the peak voltage and adhesion strength of a triboelectric nanogenerator according to (a) an embodiment and a comparative example of the present invention, (b) a graph showing the peak voltage and adhesion strength according to the peeling direction of a triboelectric nanogenerator according to one embodiment, and (c) a graph showing the peak voltage and adhesion strength according to the peeling speed of a triboelectric nanogenerator according to one embodiment. FIG. 11 is a flowchart illustrating a method for manufacturing a triboelectric nanogenerator according to one embodiment of the present invention. Specific details for implementing the invention

[0027] Hereinafter, embodiments are described in detail with reference to the attached drawings. However, various modifications may be made to the embodiments, and thus the scope of the patent application is not limited or restricted by these embodiments. It should be understood that all modifications, equivalents, and substitutions to the embodiments are included within the scope of the rights.

[0028] The terms used in the embodiments are for illustrative purposes only and should not be interpreted as intended to be limiting. Singular expressions include plural expressions unless the context clearly indicates otherwise. In this specification, terms such as "comprising" or "having" are intended to indicate the existence of the features, numbers, steps, actions, components, parts, or combinations thereof described in the specification, and should be understood as not precluding the existence or addition of one or more other features, numbers, steps, actions, components, parts, or combinations thereof.

[0029] Unless otherwise defined, all terms used herein, including technical or scientific terms, have the same meaning as generally understood by those skilled in the art to which the embodiments pertain. Terms such as those defined in commonly used dictionaries should be interpreted as having a meaning consistent with their meaning in the context of the relevant technology, and should not be interpreted in an ideal or overly formal sense unless explicitly defined in this application.

[0030] In addition, when describing with reference to the attached drawings, identical components are assigned the same reference numeral regardless of the drawing symbols, and redundant descriptions thereof are omitted. In describing the embodiments, if it is determined that a detailed description of related prior art could unnecessarily obscure the essence of the embodiments, such detailed description is omitted. Furthermore, when describing the components of the embodiments, terms such as first, second, A, B, (a), (b), etc., may be used. These terms are intended merely to distinguish the components from other components, and the essence, order, or sequence of the components is not limited by these terms. Where it is stated that a component is "connected," "combined," or "joined" to another component, it should be understood that while the component may be directly connected or joined to the other component, another component may also be "connected," "combined," or "joined" between each component.

[0031] Components included in any one embodiment and components having common functions shall be described using the same names in other embodiments. Unless otherwise stated, the descriptions given in any one embodiment may also apply to other embodiments, and specific descriptions shall be omitted to the extent of overlap.

[0033] A triboelectric nanogenerator according to the present invention comprises: a first film comprising a first substrate, a first electrode, and an adhesive layer; and a second film comprising a second substrate and a second electrode.

[0034] FIG. 1 is a schematic diagram showing a triboelectric nanogenerator according to one embodiment of the present invention.

[0035] Referring to FIG. 1, it can be seen that the triboelectric nanogenerator (1) comprises a first film (10) including a first substrate (13), a first electrode (12), and an adhesive layer (11); and a second film (20) including a second substrate (21) and a second electrode. A copper wire (30) connected to the triboelectric nanogenerator may be connected to a measuring device (40). The first film may be peeled from the second film at a constant speed to obtain an adhesive force and an electrical signal. The triboelectric nanogenerator may include a cutting pattern, and the electrical signal may be enhanced by instantaneous peeling. The first film may provide minimum peeling strength in the direction of minimum force when the peeling of the first film proceeds from the uncut edge of the metastructure, and provide maximum peeling strength in the direction of maximum force when the peeling of the first film proceeds from the region opposite to the uncut edge. The electron movement direction may be the direction of minimum force.

[0036] Conventional triboelectric nanogenerators have limitations regarding the peeling method (requiring rapid peeling and an initial adhesion state), but the triboelectric nanogenerator according to the present invention has a structure capable of resolving these issues. By utilizing the rapid jumping behavior of the cut pattern, the peak value of the electrical signal can be enhanced during low-speed peeling, and the adhesion force can be increased through crack trapping. It can be utilized in cases where adhesion and electrical signal acquisition are required simultaneously. The magnitude of the electrical signal can be programmed by modifying the cut pattern. Differences in adhesion force and electrical signal can be introduced based on directionality. When developed in a rolling form, the discontinuity, which is one of the limitations of the peeling method, can be resolved. Further performance improvements can be expected through changes in materials, addition of materials, or modification of the cut pattern shape.

[0038] According to one embodiment, a portion of the first film includes a metastructure region comprising a cut pattern, and the cut pattern may be in a shape including cut edges and one uncut edge.

[0039] FIG. 1 is a schematic diagram showing a triboelectric nanogenerator according to one embodiment of the present invention.

[0040] Referring to FIG. 1, a portion of the first film (10) includes a metastructure region that includes a cut pattern, and the cut pattern may be in a shape that includes cut edges (B) and one uncut edge (A). The shape deformation of the cut pattern is not limited, and functionality such as directionality can be improved through shape deformation.

[0042] According to one embodiment, the maximum width of the metastructure is 1 mm to 20 mm, the maximum length from the uncut side of the metastructure is 1 mm to 50 mm, and the metastructure may be cut to the thickness range of the first film.

[0043] FIG. 2 is a schematic diagram showing the structure of a triboelectric nanogenerator according to one embodiment and a comparative example of the present invention.

[0044] Referring to FIG. 2, the structure of a triboelectric nanogenerator without a metastructure region and a triboelectric nanogenerator including a metastructure region can be observed. The maximum width (W) of the metastructure of the triboelectric nanogenerator including the metastructure region p ) is 1 mm to 20 mm, and the maximum length (L) from the uncut side (A) of the metastructure is p ) is 1 mm to 50 mm, and the metastructure may be cut to the thickness range of the first film. The minimum length (S) of the metastructure from the uncut side (A) of the metastructure may be 1 mm or more. The number (N) of the metastructurep ) may be adjustable.

[0045] According to one embodiment, the maximum width of the metastructure may be 1 mm to 20 mm; 5 mm to 20 mm; 10 mm to 20 mm; 15 mm to 20 mm; 1 mm to 15 mm; 1 mm to 10 mm; 1 mm to 5 mm; 5 mm to 10 mm; 10 mm to 15 mm; 12 mm to 18 mm.

[0046] According to one embodiment, if the maximum width of the metastructure is outside the range, there may be a problem in that cracks propagate abnormally, and the intended adhesion and electrical signal enhancement do not appear.

[0047] According to one embodiment, the maximum length from the uncut side of the metastructure may be 1 mm to 50 mm; 10 mm to 50 mm; 15 mm to 50 mm; 20 mm to 50 mm; 25 mm to 50 mm; 30 mm to 50 mm; 35 mm to 50 mm; 40 mm to 50 mm; 45 mm to 50 mm; 1 mm to 40 mm; 1 mm to 30 mm; 1 mm to 20 mm; 1 mm to 10 mm; 10 mm to 20 mm; 15 mm to 30 mm; 20 mm to 40 mm; 25 mm to 45 mm.

[0048] According to one embodiment, if the maximum length from the uncut side is outside the range, rapid peeling of the uncut side does not occur, so the adhesive force does not reach the maximum point and a decrease in voltage output may occur.

[0049] Figure 3 is a graph showing the performance evaluation according to the parameters of the metastructure of a triboelectric nanogenerator according to one embodiment of the present invention.

[0050] Referring to FIG. 3, (a) the maximum length (L) from the uncut side (A) of the metastructure, which is a parameter of the metastructure. p It is a voltage graph according to ), and the maximum length (L) from the uncut side (A) of the metastructure. p It can be confirmed that as ) increases, the voltage also increases, and as the peeling speed increases, the voltage also increases. In addition, (b) the maximum width (W) of the metastructure, which is a parameter of the metastructure, p It is a voltage graph according to ), and the maximum width (W) of the above metastructure p It can be confirmed that as ) increases, the voltage also increases, and as the peeling speed increases, the voltage also increases. (c) The number of the above metastructures (N), which is a parameter of the metastructure. p ) and the maximum width (W) of the above metastructure p This is a voltage graph based on ), and it can be confirmed that the voltage increases as the peeling speed increases. It can be confirmed that not only the adhesive strength but also the electrical signal can be programmed by adjusting the parameters (length, width, number, etc.) of the metastructure including the cut pattern.

[0052] According to one embodiment, the metastructure may be arranged in one direction, or the metastructure may be arranged symmetrically with respect to the center of the first film.

[0053] Figure 4 is a metastructure of a triboelectric nanogenerator according to one embodiment of the present invention and a graph of performance evaluation based thereon.

[0054] Referring to FIG. 4, in Examples 2 and 3, the metastructure may be arranged symmetrically with respect to the center of the first film. The metastructure of the triboelectric nanogenerator according to Examples 2 and 3 and the performance evaluation graph thereof can be observed, and voltage values ​​according to the cut pattern can be observed. A portion of the first film includes a metastructure region containing a cut pattern, and the cut pattern may be a shape including cut edges and one uncut edge, and the shape is not limited. Example 2 may introduce different types of cut patterns within a single film to enable performance as needed.

[0056] According to one embodiment, the spacing between the metastructures may be 1 mm to 5 mm.

[0057] FIG. 2 is a schematic diagram showing the structure of a triboelectric nanogenerator according to one embodiment and a comparative example of the present invention.

[0058] Referring to FIG. 2, the spacing (W) between the metastructures of the triboelectric nanogenerator including the metastructure region int ) may be 1 mm to 5 mm.

[0059] According to one embodiment, the spacing between the metastructures may be 1 mm to 5 mm; 2 mm to 5 mm; 3 mm to 5 mm; 4 mm to 5 mm; 1 mm to 4 mm; 1 mm to 3 mm; 1 mm to 2 mm; 1.5 mm to 2.5 mm; 2 mm to 3 mm; 2.5 mm to 4 mm; 3 mm to 4.5 mm.

[0060] According to one embodiment, if the spacing between the metastructures (incision patterns within the same column) is less than 1 mm, there may be a problem where the gap between adjacent metastructures is damaged or severed during peeling, and if it exceeds 5 mm, the ratio of the spacing to the total area increases excessively, and the maximum width (W) of the metastructure p ) decreases, and as a result, there may be problems in terms of design efficiency for improving adhesion and voltage output.

[0062] According to one embodiment, the cut pattern in the adhesive layer of the first film may be attached to the second substrate of the second film and delayed peeled off.

[0063] According to one embodiment, the cut pattern in the adhesive layer of the first film may be attached to the second substrate of the second film and subjected to delayed peeling. The triboelectric nanogenerator according to the present invention induces not only excellent adhesion performance due to the non-linear cut pattern but also an enhanced electric peak signal, and can obtain a high signal even when peeled off at a low peeling speed due to the high separation speed of the large-area cut pattern individually. Based on the high adhesion force imparted by the cut pattern, the range of triboelectric material selection can be expanded, and sustainable adhesion force and electrical signal production based on a simple structure are possible. With a directional non-linear structure, signal switching is possible according to the peeling direction, and electrical signals can be easily programmed through modification of the cut pattern. Adhesion force and electrical signals can be programmed separately, and different electrical signals can be produced even with cut patterns exhibiting the same adhesion force, and vice versa. It has the advantage of showing high utility when adhesion force and electrical signals are required simultaneously. When configured in a rollable form, continuous signals can be obtained and directional utilization is possible. Based on a simple manufacturing process, it can be applied to various materials as needed.

[0064] FIG. 5 is a diagram showing an example of application of a triboelectric nanogenerator according to one embodiment of the present invention.

[0065] Referring to FIG. 5, an adhesive is shown as an application example of a triboelectric nanogenerator according to one embodiment of the present invention, which can transmit an electrical signal when peeling occurs to notify the user. The advantage of utilizing a Meta-TENG including a cut pattern is that it can be used in places where both adhesion and an electrical signal are required simultaneously. Through the discontinuous peeling of a Meta-TENG in which different types of cut patterns are mixed, detachment may be delayed to prevent a suspended object from falling off.

[0066] FIG. 6 is a diagram showing an example of application of a triboelectric nanogenerator according to one embodiment of the present invention.

[0067] Referring to FIG. 6, a buzzer indicating when a door is opened is shown among the applications of a triboelectric nanogenerator according to one embodiment of the present invention. It can also be used to delay the opening of a door and transmit a signal by utilizing the directionality of the cut pattern.

[0068] FIG. 7 is a diagram showing an example of application of a triboelectric nanogenerator according to one embodiment of the present invention.

[0069] Referring to FIG. 7, a conveyor belt is shown as an application example of a triboelectric nanogenerator according to an embodiment of the present invention. By configuring a Meta-TENG including a cut pattern into a rollable form, the lack of persistence that was a problem in the conventional peeling method can be resolved. Based on the directionality characteristic of the cut pattern, a low electrical signal can be output when the conveyor belt operates in a designated direction.

[0070] On the other hand, when operating in the opposite way, the cutting pattern may generate a high peak voltage as it momentarily detaches from the main conveyor belt, and through signal processing, stop the belt's operation and sound an alarm.

[0072] According to one embodiment, the first film may provide minimum peel strength in the direction of minimum force when peeling of the first film proceeds from the uncut edge of the metastructure, and may provide maximum peel strength in the direction of maximum force when peeling of the first film proceeds from the region opposite to the uncut edge.

[0073] According to one embodiment, the first film may provide minimum peel strength in the direction of minimum force when the peeling of the first film proceeds from the uncut edge of the metastructure, and may provide maximum peel strength in the direction of maximum force when the peeling of the first film proceeds from the area opposite to the uncut edge, and the cutting pattern may significantly improve the area involved within the same time to obtain a larger peak voltage value, and as the cutting pattern resisting peeling based on high adhesion falls off instantaneously and rapidly, the time interval is reduced, which can lead to a larger peak voltage value.

[0075] According to one embodiment, the adhesive layer may comprise at least one selected from the group consisting of polydimethylsiloxane (PDMS), polyurethane (PU), polyvinyl alcohol (PVA), polymethyl methacrylate (PMMA), ethylene vinyl acetate (EVA), polycaprolactone (PCL), polyvinylidene fluoride (PVDF), polyimide, silicone rubber, polypropylene (PP), ecoflex, low-density polyethylene (LDPE), and MXene.

[0076] According to one embodiment, the adhesive layer may preferably be polydimethylsiloxane (PDMS). It is expected that the electrical performance of the Meta-TENG may be improved when an inexpensive and commercially widely used material is utilized as the friction material, and when materials such as MXene, nanocomposites, or polymer materials having a higher dielectric constant are mixed during fabrication.

[0078] According to one embodiment, the first substrate and the second substrate may each comprise at least one selected from the group consisting of polyethylene terephthalate (PET), polyethersulfone (PES), polyester (PE), polyethylene naphthalate (PEN), and Kapton.

[0079] According to one embodiment, the first substrate and the second substrate may each preferably be terephthalate (polyethylene terephthalate; PET).

[0081] According to one embodiment, the triboelectric nanogenerator may have a higher peak voltage value when providing maximum peel strength in the direction of maximum force, and a lower peak voltage value when providing minimum peel strength in the direction of minimum force.

[0082] FIG. 8 is a flowchart showing the operating mechanism of a triboelectric nanogenerator according to one embodiment of the present invention.

[0083] Referring to Fig. 8, a three-step flowchart can be observed, which may be an electrical signal according to the crack propagation behavior.

[0084] FIG. 9 is an actual image and a voltage graph over time showing the operating mechanism of a triboelectric nanogenerator according to one embodiment of the present invention.

[0085] Referring to Fig. 9, an actual image showing the operating mechanism of the triboelectric nanogenerator and V over time. crack You can check the value and V value.

[0086] The first step may be that when the two films are attached, the surfaces of the cut pattern films become charged with opposite poles due to the triboelectric phenomenon.

[0087] In the second stage, during the process of peeling at a constant speed in the direction of maximum force (the direction in which the adhesion of the non-linear cut pattern is maximized), the crack propagation may be trapped at the interconnect tip point of the cut pattern and reversed in the opposite direction, and when the part without the cut pattern is peeled, only a very small amount of charge transfer may occur.

[0088] The third step involves the inverted crack accelerating, which may induce the incision pattern to detach rapidly and instantaneously. In this scenario, a large amount of charge is transferred instantaneously within a short period, potentially resulting in enhanced peak signal values. In the absence of a pattern, the localized area detaches continuously, leading to a problem of low maximum values. The incision pattern significantly increases the area involved within the same timeframe, enabling the attainment of larger peak values. Furthermore, as the incision pattern, which resists delamination based on high adhesion, detaches rapidly and instantaneously, the time interval is reduced, which can lead to even higher peak values.

[0090] According to one embodiment, the triboelectric nanogenerator may have an average peak voltage of 7.0 V to 10 V when peeling in the direction of maximum force under a peeling speed of 10 mm / s.

[0091] FIG. 10 is a graph showing the peak voltage and adhesion strength of a triboelectric nanogenerator according to (a) an embodiment and a comparative example of the present invention, (b) a graph showing the peak voltage and adhesion strength according to the peeling direction of a triboelectric nanogenerator according to one embodiment, and (c) a graph showing the peak voltage and adhesion strength according to the peeling speed of a triboelectric nanogenerator according to one embodiment.

[0092] Referring to FIG. 10(a), which is a graph showing the peak voltage and adhesion strength of triboelectric nanogenerators according to one example and a comparative example, it can be seen that the triboelectric nanogenerator according to the comparative example (Planar TENG) showed only a maximum value of 0.57 V under a constant peeling speed of 10 mm / s, whereas the triboelectric nanogenerator according to the example (Meta-TENG) showed a peak signal reaching an average of 7.3 V. This indicates that the peak voltage of the triboelectric nanogenerator according to the example is superior to that of the comparative example, with a difference of 12.8 times.

[0093] Referring to FIG. 10(b), a graph showing the peak voltage and adhesion strength according to the peeling direction of a triboelectric nanogenerator according to one embodiment can be seen that a voltage directionality (Vmax / Vmin) of 10.3 was achieved, with a value of 7.3 V when peeling in the maximum force direction and 0.71 V when peeling in the minimum force direction.

[0094] Referring to FIG. 10 (c), the graph shows the peak voltage and adhesion strength according to the peeling speed of a triboelectric nanogenerator according to one embodiment. Although it showed an increasing trend with the peeling speed, it can be seen that a distinct peak value of 4.4 V was achieved even under a very low peeling speed of 1 mm / s.

[0095] According to one embodiment, the triboelectric nanogenerator may have the advantage of stably securing high output characteristics even under relatively low peeling conditions when the average peak voltage is within the above range when peeling in the direction of maximum force under a peeling speed of 10 mm / s. In addition, by obtaining distinct peak values, it is easy to perform sensing under specific operations as well as energy harvesting.

[0097] According to one embodiment, the thickness of the first film and the second film is each 20 μm to 500 μm, and the thickness ratio of the first substrate and the adhesive layer may be 1:0.1 to 1:3.

[0098] According to one embodiment, the thickness of the first film and the second film is, respectively, 20 μm to 500 μm; 50 μm to 500 μm; 100 μm to 500 μm; 150 μm to 500 μm; 200 μm to 500 μm; 250 μm to 500 μm; 300 μm to 500 μm; 350 μm to 500 μm; 400 μm to 500 μm; 450 μm to 500 μm; 20 μm to 450 μm; 20 μm to 400 μm; 20 μm to 350 μm; 20 μm to 300 μm; 20 μm to 250 μm; 20 μm to 200 μm; It may be 20 µm to 150 µm; 20 µm to 100 µm; 50 µm to 100 µm; 80 µm to 200 µm; 150 µm to 300 µm; 200 µm to 400 µm; 250 µm to 450 µm.

[0099] According to one embodiment, if the thickness of the first film and the second film is less than 20 μm, there may be a problem in which proper crack propagation is not induced due to a decrease in mechanical stability or in which durability is impaired; if it is greater than 500 μm, there may be a problem in which the thickness of the first film becomes excessively thick, thereby restricting the flexibility of the overall structure and the instantaneous peeling behavior of the cut pattern; and in the case of the second film, there may be a problem in which the charge induced in the electrode, i.e., the electrical performance, is degraded due to an excessive increase in thickness.

[0100] According to one embodiment, the thickness ratio of the first substrate and the adhesive layer may be 1:0.1 to 1:3; 1:0.5 to 1:3; 1:1 to 1:3; 1:1.5 to 1:3; 1:2 to 1:3; 1:2.5 to 1:3; 1:0.1 to 1:2.5; 1:0.1 to 1:2; 1:0.1 to 1:1.5; 1:0.1 to 1:1; 1:0.1 to 1:0.5; 1:0.5 to 1:1; 1:0.8 to 1:1.5; 1:1 to 1:2.

[0101] According to one embodiment, if the thickness ratio of the first substrate and the adhesive layer is less than 1:0.1, the adhesive layer is too thin, so proper crack propagation does not occur after the formation of the metastructure, and there may be a problem of difficulty in obtaining uniform electrical output when peeling, and if it is more than 1:3, the adhesive layer becomes excessively thick, reducing the flexibility of the overall structure and reducing the interfacial stability with the substrate.

[0103] A method for manufacturing a triboelectric nanogenerator according to the present invention comprises: a step of forming a first electrode on a first substrate; a step of forming an adhesive layer on the first electrode; a step of heat-curing the first electrode on which the adhesive layer is formed to form a first film; a step of cutting a portion of the first film to form a metastructure; a step of forming a second electrode on a second substrate to form a second film; and a step of attaching the surface of the adhesive layer of the first film on which the metastructure is formed to the surface of the second substrate of the second film.

[0104] FIG. 11 is a flowchart illustrating a method for manufacturing a triboelectric nanogenerator according to one embodiment of the present invention.

[0105] Referring to FIG. 11, the method for manufacturing a triboelectric nanogenerator according to the present invention can be seen as follows: a step of forming a first electrode (12) on a first substrate (13); a step of forming an adhesive layer (11) on the first electrode (12); a step of heat-curing the first electrode on which the adhesive layer is formed to form a first film (10); and a step of cutting a portion of the first film to form a metastructure.

[0106] For example, silver nanowires (AgNWs) are spray-coated onto a prepared 100 μm thick PET substrate (sheet resistance < 5 Ω cm- 2 It may be a method of forming a first electrode by ) and connecting copper wires using silver paste. It may be a method of applying liquid PDMS mixed at a ratio of 15:1 (base prepolymer: curing agent) to a thickness of 100 μm on a stacked silver nanowire (AgNW) layer using a blade coating method, forming a first film by heat-curing at 80°C for 1 hour in an oven, and inserting a non-linear cut pattern having an arbitrary design into the bonded PDMS-AgNW-PET film using a cutting plotter. AgNWs are spray-coated onto a 100 μm thick PET substrate (sheet resistance < 5 Ω cm -2A second film may be formed by forming electrode 2 and connecting copper wires using silver paste. The PDMS surface of the first film (cut pattern film) is attached to the PET surface of the second film (non-pattern film), and the copper wires connected to each film are connected to a measuring device. Then, the first film (cut pattern film) is peeled from the second film (non-pattern film) at a constant speed to obtain the resulting adhesive force and electrical signal.

[0108] Although embodiments have been described as above, those skilled in the art can apply various technical modifications and variations based on the above. For example, suitable results can be achieved even if the described techniques are performed in a different order than described, and / or the components of the described system, structure, device, circuit, etc. are combined or assembled in a form different from described, or replaced or substituted by other components or equivalents.

[0109] Therefore, other implementations, other embodiments, and equivalents to the claims also fall within the scope of the claims set forth below.

Claims

Claim 1 A triboelectric nanogenerator comprising: a first film comprising a first substrate, a first electrode, and an adhesive layer; and a second film comprising a second substrate and a second electrode. Claim 2 A triboelectric nanogenerator according to claim 1, wherein a portion of the first film comprises a metastructure region including a cut pattern, and the cut pattern is shaped to include cut edges and one uncut edge. Claim 3 A triboelectric nanogenerator according to claim 2, wherein the maximum width of the metastructure is 1 mm to 20 mm, the maximum length from the uncut side of the metastructure is 1 mm to 50 mm, and the metastructure is cut to the thickness range of the first film. Claim 4 A triboelectric nanogenerator according to paragraph 2, wherein the metastructure is arranged in one direction or the metastructure is arranged symmetrically with respect to the center of the first film. Claim 5 A triboelectric nanogenerator according to paragraph 2, wherein the spacing between the metastructures is 1 mm to 5 mm. Claim 6 A triboelectric nanogenerator according to paragraph 2, wherein the cut pattern in the adhesive layer of the first film is attached to the second substrate of the second film and is subject to delayed peeling. Claim 7 A triboelectric nanogenerator according to claim 2, wherein the first film provides minimum peel strength in the direction of minimum force when peeling of the first film proceeds from the uncut edge of the metastructure, and provides maximum peel strength in the direction of maximum force when peeling of the first film proceeds from the region opposite to the uncut edge. Claim 8 A triboelectric nanogenerator according to claim 1, wherein the adhesive layer comprises at least one selected from the group consisting of polydimethylsiloxane (PDMS), polyurethane (PU), polyvinyl alcohol (PVA), polymethyl methacrylate (PMMA), ethylene vinyl acetate (EVA), polycaprolactone (PCL), polyvinylidene fluoride (PVDF), polyimide, silicone rubber, polypropylene (PP), ecoflex, low-density polyethylene (LDPE), and MXene. Claim 9 A triboelectric nanogenerator according to claim 1, wherein the first substrate and the second substrate each comprise at least one selected from the group consisting of polyethylene terephthalate (PET), polyethersulfone (PES), polyester (PE), polyethylene naphthalate (PEN), and Kapton. Claim 10 A triboelectric nanogenerator according to claim 1, wherein the peak value of the voltage increases when providing maximum peel strength in the direction of maximum force, and the peak value of the voltage decreases when providing minimum peel strength in the direction of minimum force. Claim 11 The triboelectric nanogenerator according to claim 1, wherein the average peak voltage when peeling in the direction of maximum force under a peeling speed of 10 mm / s is 7.0 V to 10 V. Claim 12 A triboelectric nanogenerator according to claim 1, wherein the thickness of the first film and the second film is each 20 μm to 500 μm, and the thickness ratio of the first substrate and the adhesive layer is 1 : 0.1 to 1 :

3. Claim 13 A method for manufacturing a triboelectric nanogenerator comprising: a step of forming a first electrode on a first substrate; a step of forming an adhesive layer on the first electrode; a step of heat-curing the first electrode on which the adhesive layer is formed to form a first film; a step of cutting a portion of the first film to form a metastructure; a step of forming a second electrode on a second substrate to form a second film; and a step of attaching the surface of the adhesive layer of the first film on which the metastructure is formed to the surface of the second substrate of the second film.

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