Sheet transferring apparatus

Abstract

A sheet transfer device according to embodiments of the present disclosure comprises a plurality of blocks, a block assembly comprising one or more support elements that support an object, a flow generating device that supplies flow to the block assembly, and a controller that controls the flow generating device. The block assembly comprises a first block comprising a main chuck as one or more support elements, the object having a strip shape, and the main chuck being arranged to correspond to the object and having a width smaller than that of the object, and may include one or more of a porous chuck, a Bernoulli chuck, and a Coanda chuck.

Description

Technology Field

[0001] The present disclosure relates to a sheet transfer device. Background Technology

[0002] Adsorption devices are commonly used to transport thin film materials such as films. The adsorption device supports the transport object by adsorbing it using multiple vacuum holes and transports it to a desired location.

[0003] However, when the object to be transported has a narrow strip shape rather than a wide surface area, conventional suction devices cannot provide sufficient support. For example, in the case of a vacuum plate, if the suction force of each vacuum hole is weak and the contact area with the object to be transported is narrow, it cannot provide sufficient support. Furthermore, in the case of porous pads, pressure loss occurs in areas not in contact with the object to be transported, making it similarly difficult to stably support the object.

[0004] The information described above disclosed in the background technology of this invention is intended only to enhance understanding of the background of the present invention and may therefore include information that does not constitute prior art. Prior art literature

[0005] Korean Registered Patent Publication KR 10-1773779 B1 The problem to be solved

[0006] The present disclosure is intended to solve the aforementioned problems and can provide a sheet transfer device capable of stably supporting a member such as a thin and narrow sheet in the shape of a strip.

[0007] However, the technical problems that the embodiments of the present disclosure aim to solve are not limited to those described above, and other unmentioned problems can be clearly understood by a person skilled in the art from the description of the invention below. means of solving the problem

[0008] A sheet transfer device according to embodiments of the present disclosure comprises a plurality of blocks, a block assembly comprising one or more support elements that support an object, a flow generating device that supplies flow to the block assembly, and a controller that controls the flow generating device. The block assembly comprises a first block comprising a main chuck as one or more support elements, the object having a strip shape, and the main chuck being arranged to correspond to the object and having a width smaller than that of the object, and may include one or more of a porous chuck, a Bernoulli chuck, and a Coanda chuck.

[0009] The above main chuck is arranged to correspond to the object and can be extended continuously without interruption.

[0010] The main chuck comprises a plurality of first main chucks corresponding to the corners of the object and a plurality of second main chucks corresponding to the corners of the object, and the plurality of first main chucks and the plurality of second main chucks are spaced apart from each other and may have different lengths or widths.

[0011] The first block further includes an auxiliary chuck that supports a film attached to the object, comprising a vacuum hole or a vacuum pad, and the first block may include a first support area where the main chuck is arranged and a second support area adjacent to the first support area where the auxiliary chuck is arranged.

[0012] The first block further includes a third support area located opposite the second support area and adjacent to the first support area, and the auxiliary chuck may include a first auxiliary chuck arranged in the second support area and including a vacuum hole or vacuum pad, and a second auxiliary chuck arranged in the second support area and including a vacuum hole or vacuum pad.

[0013] The block assembly further includes a second block that supports the first block and includes a flow path communicating with the first block and the flow generating device, and the first block may be detachably attached to the second block.

[0014] The first block includes a plurality of segments that are detachable from each of the second blocks, and the main chuck may include a plurality of main chucks arranged on the plurality of segments.

[0015] The above flow generating device includes a plurality of regulators connected to each area of ​​the main chuck, and the controller can control the plurality of regulators to individually control the flow supplied to each area of ​​the main chuck. Effects of the invention

[0016] The sheet transfer device according to the embodiments of the present disclosure can stably support an object by using a support element that fits the shape of the object. The sheet transfer device can stably support an object in the shape of a narrow strip.

[0017] A sheet transfer device according to embodiments of the present disclosure can provide a support element suitable for an object by replacing a block or a part of a block according to the shape and size of the object. Brief explanation of the drawing

[0018] The following drawings attached to this specification illustrate embodiments of the present invention and serve to facilitate an understanding of the technical concept of the present invention in conjunction with the description of the invention provided below. The present invention is not to be interpreted as being limited to the matters described in the drawings. FIG. 1 schematically illustrates a sheet transfer device according to embodiments of the present disclosure. FIG. 2 shows the transfer target of a sheet transfer device according to embodiments of the present disclosure. FIGS. 3–7 show a first block and a state in which the first block supports an object according to embodiments of the present disclosure. FIGS. 8 and 9 show a modularized first block according to embodiments of the present disclosure. FIGS. 10 and FIGS. 11 show a modularized first block according to other embodiments of the present disclosure. FIGS. 12 and 13 schematically illustrate the flow path connection state of a sheet transfer device according to embodiments of the present disclosure. Specific details for implementing the invention

[0019] Embodiments of the present disclosure and methods for achieving them may be more easily understood by referring to the detailed description of the embodiments together with the accompanying drawings. Embodiments are described in detail below with reference to the accompanying drawings. However, the described embodiments are subject to various modifications and may be implemented in different forms and are not to be interpreted as being limited to the embodiments described herein. Furthermore, the features of each of the various embodiments of the present disclosure may be combined with one another wholly or partially, and technically, various interlocking and operation are possible. Each embodiment may be implemented independently of one another or combined and implemented together. The described embodiments are provided as examples to make the present disclosure complete and to fully convey the spirit of the present disclosure to those skilled in the art. The present disclosure should be understood to include all variations and equivalents and substitutions are possible within the spirit and scope of the present disclosure. Accordingly, processes, components, and techniques that are not necessary to a person skilled in the art for a complete understanding of the embodiments of the present disclosure may not be described.

[0020] Unless otherwise noted, the same reference numerals, characters, or combinations thereof throughout the attached drawings and descriptions represent the same components, and descriptions thereof are omitted. Additionally, irrelevant parts may be omitted from the drawings to clarify the explanation when describing the embodiments.

[0021] The areas depicted in the drawings are schematic and their shapes do not represent or limit the actual shape of the device area. Relative sizes of elements, layers, and areas in the drawings may be exaggerated for clarity. Additionally, the use of hatching and / or shading in the attached drawings may generally be provided to clarify the boundaries between adjacent elements. Therefore, unless specifically limited, the presence or absence of hatching or shading does not indicate a preference or requirement for a particular material, material properties, dimensions, proportions, commonalities between the depicted elements, or other characteristics, attributes, properties, etc.

[0022] Various embodiments are described herein with reference to cross-sectional examples, which are schematic examples of embodiments and / or intermediate structures. For example, the shapes in the drawings may vary as a result of manufacturing techniques and / or tolerances. Furthermore, specific structural or functional descriptions disclosed herein are merely examples for explaining embodiments according to the concept of the present disclosure. Accordingly, the embodiments disclosed herein should be interpreted as not being limited to the shapes of the illustrated areas and including variations in shape due to manufacturing processes, etc.

[0023] Specific details may be provided in the specification to facilitate understanding of various embodiments. Alternatively, various embodiments may be implemented without specific details or with one or more details. In other cases, well-known structures and devices may be illustrated in the form of block diagrams to avoid unnecessarily obscuring various embodiments.

[0024] To facilitate explanation and to describe the relationship between one element or feature and another element or feature as illustrated in the drawings, spatially relative terms such as "below," "above," "lower," and "upper" may be used. Spatially relative terms are intended to include various directions of the device in use or operation in addition to the directions depicted in the drawings. For example, if the device in the drawings is inverted, another element or feature described as "below" or "lower" will face "above" the other element or feature. Thus, as exemplary terms, "below" and "lower" may include both upper and lower directions. The device may face other directions (e.g., a 90-degree rotation or other directions), and spatially relative descriptions used herein should be interpreted accordingly. Likewise, if it is stated that the first part is positioned "above" the second part, this means that the first part is positioned on the upper or lower side of the second part.

[0025] Additionally, the expression “viewed in plan” means the case where the object is viewed from above, and the expression “in a schematic section” means the case where a schematic section is taken by cutting the object vertically or horizontally. The term “viewed in side” means that the first object may be above, below, or to the side of the second object, and vice versa. Furthermore, the terms “overlap” or “superimposition” may include layer, stack, plane, extension, cover, or partial cover, or any other suitable term that a person skilled in the art understands and can understand. The expression “not overlapping” may include meanings such as “away from” or “separated from” and any other suitable equivalents recognized and understood by a person skilled in the art. The terms “plane” and “surface” may mean that the first object may be directly or indirectly opposite the second object. In the case where a third object is located between a first object and a second object, the first object and the second object may be understood as facing each other but indirectly opposing each other.

[0026] When an element, layer, region, or component (hereinafter also referred to as "element, etc.") is described as being "formed," "connected," or "combined" with another element, etc., this includes the possibility that it may be directly formed in the element, etc., formed in the other element, etc., indirectly formed in the other element, etc., connected, or combined. Furthermore, "formed," "connected," or "combined" may collectively refer to direct or indirect combination or connection of elements, etc., or integral or non-integral combination or connection, so that one or more elements, etc. may exist. For example, when an element, etc. is described as being "electrically connected" or "electrically combined" with another element, etc., this includes the possibility that it may be directly electrically connected or combined with the other element, etc., or that other elements, etc. exist. However, "direct connection" or "direct combination" means that one element, etc. is directly connected or combined with another element, etc., without an intermediate element, etc., or is located in another element, etc. Additionally, in this specification, when a part of a layer, film, region, guide plate, etc., is formed in another part, the direction of formation is not limited to the upward direction, but includes the possibility that the part is formed on the side or bottom. Conversely, when a part of a layer, film, region, guide plate, etc. is formed "below" another part, it includes not only the case where that part is "immediately below" the other part, but also the case where there is another part between the part and the other part. Meanwhile, other expressions describing the relationship of elements, such as "between," "immediately between," or "adjacent to" and "immediately adjacent to," may be interpreted similarly. Furthermore, when an element, etc. is referred to as being between two elements, etc., it may be the only element, etc. between the two elements, etc., or there may be another element, etc. between them.

[0027] Expressions such as “at least one” or “any one” do not limit the order of individual elements. For example, “at least one of X, Y, and Z,” “at least one of X, Y, or Z,” and “at least one selected from the group consisting of X, Y, and Z” may include X alone, Y alone, Z alone, or any combination of two or more of X, Y, and Z. Similarly, expressions such as “at least one of A and B” and “at least one of A or B” may include A, B, or A and B. In this specification, the term “and / or” generally includes any combination of one or more related list items. For example, expressions such as “A and / or B” may include A, B, or A and B.

[0028] Terms such as "first," "second," and "third" may be used herein to describe various elements, but such elements are not limited by these terms. These terms are used to distinguish one element, etc. from another. Accordingly, the first element, etc. described below may be referred to as the second, etc. without departing from the spirit and scope of the invention. Describing an element as the "first" element does not require or imply the existence of a second element or other elements. Terms such as "first," "second," etc. may also be used in this specification to distinguish different categories or sets of elements, etc. For clarity, terms such as "first," "second," etc. may each represent "first category (or first set)," "second category (or second set)," etc.

[0029] The terms used herein are used merely to describe specific embodiments and are not intended to limit the disclosure. Singular expressions used herein may include plural expressions, and plural expressions may include singular forms unless the context clearly indicates otherwise. The terms “include,” “comprising,” and “have” mean to specify the presence of the features, integers, and steps specified herein. These expressions do not exclude the presence or addition of one or more other functions, steps, operations, components, and / or groups thereof.

[0030] Where one or more embodiments may be implemented differently, a specific process sequence may be performed differently from the described order. For example, two processes described consecutively may be performed substantially simultaneously or in the reverse order of the described order.

[0031] The terms "substantially," "approximately," "roughly," and similar terms are used as terms of approximation rather than terms of degree, and signify satisfying the range of implied deviation of the measured or calculated value (e.g., the range of deviation due to the limitations of the measurement system). For example, "approximately" may mean within one or more standard deviations or within ±30%, ±20%, ±10%, or ±5% of the specified value.

[0032] Unless otherwise defined, all terms used herein, including technical or scientific terms, have the same meaning as generally understood by those skilled in the art to which the present invention pertains. Terms such as those defined in commonly used dictionaries should be interpreted as having a meaning consistent with that meaning in the context of the relevant technology and / or this specification, and should not be interpreted in an idealized or overly formal sense unless explicitly defined herein.

[0033] FIG. 1 schematically shows a sheet transfer device (1) according to embodiments of the present disclosure, FIG. 2 shows an object (O) according to embodiments of the present disclosure, FIG. 3-7 show a state in which a first block (100, 100A, 100B, 100C, 100D) and a first block (100, 100A, 100B, 100C, 100D) support the object (O) according to embodiments of the present disclosure, FIG. 8 and FIG. 9 show a modularized first block (100E) according to embodiments of the present disclosure, FIG. 10 and FIG. 11 show a modularized first block (100F) according to other embodiments of the present disclosure, and FIG. 12 and FIG. 13 schematically show the flow path connection state of a sheet transfer device (1D) according to embodiments of the present disclosure.

[0034] A sheet transfer device (1) according to embodiments of the present disclosure can transfer an object (O) by supporting the object (O) with one or more support elements, moving it to a desired position, and then releasing it. The object (O) is not specifically limited in type, size, and shape and may have a sheet shape such as a film or a thin plate. For example, the object (O) may be a frame of an all-solid-state battery having a narrow strip shape. The sheet transfer device (1) can transfer the frame to a device that stacks the electrode layer, the solid electrolyte layer, and the frame. Here, the support elements include components that adsorb or support the object (O) in a non-contact manner and may include a main chuck or an auxiliary chuck described later.

[0035] As shown in FIG. 2, the object (O) can have various sizes and shapes. For example, the object (O) can be a square sheet with a hollow interior (Fig. 2 (a)). The object (O) can have a narrow rectangular strip shape that partitions the internal opening.

[0036] The object (O) may be a rectangular sheet with a long side extending in the first direction (or the Y-axis direction of FIG. 2) and having a hollow interior ((b) of FIG. 2). Alternatively, the object (O) may have a long side extending in the second direction (or the X-axis direction of FIG. 2).

[0037] The object (O) may include a support film (F). As shown in (c) of FIG. 2, the object (O) may include a rectangular sheet with a hollow interior and a support film (F) that supports it. The support film (F) may be located on the opposite side of the surface where the sheet transfer device (1) contacts the sheet of the object (O). The support film (F) is attached to the object (O) and may include a transparent or translucent material. The support film (F) has a size larger than the object (O), and the portion extending outward from the object (O) may provide a gripping portion for handling the object (O). For example, the support film (F) may be a release film attached to the object (O), which is the frame of an all-solid-state battery.

[0038] The object (O) may be a rectangular sheet with a hollow interior and different widths for each side. As shown in (d) of FIG. 2, the object (O) may be a rectangular sheet in which one of the pair of long sides is wider. Although the drawing shows a case where one long side is wider, the widths of two long sides may be wider than the two short sides, or the width of one short side may be wider than the widths of the other sides.

[0039] The object (O) may include one or more curved sections. As shown in FIG. 2(e), the object (O) may be a rectangular sheet with one short side having a curved shape. The object (O) may have various lengths and curvatures of the curved sections. Although the drawing shows a case where one short side includes a curved section, one or more other sides may include a curved section.

[0040] The object (O) may have a shape other than a rectangle. As shown in (f) of FIG. 2, the object (O) may have a shape in which one long side is bent. Although the drawing shows a shape in which one long side is bent outward, the object (O) may have a shape in which one or more other sides are bent outward or inward one or more times.

[0041] In addition to this, the object (O) may include various sizes and shapes not shown in the drawing. The first block (100) of the sheet transfer device (1) can stably support the object (O) by including a combination of one or more support elements corresponding to the shape and size of the object (O).

[0042] A sheet transfer device (1) according to embodiments of the present disclosure may include a block assembly (10), a flow generating device (20), and a controller (30).

[0043] For example, the sheet transfer device (1) includes a plurality of blocks, a block assembly (10) including one or more support elements that support an object (O), a flow generating device (20) that supplies flow to the block assembly (10), and a controller (30) that controls the flow generating device (20). The block assembly (10) includes a first block (100) that includes a main chuck (110) as one or more support elements, the object (O) has a strip shape, and the main chuck (110) is arranged to correspond to the object (O) and has a width smaller than that of the object (O), and may include one or more of a porous chuck, a Bernoulli chuck, and a Coanda chuck.

[0044] The block assembly (10) is connected to the flow generating device (20) and can support or release the target (O) by transmitting the flow generated by the flow generating device (20) to the target (O). For example, the block assembly (10) can support the target (O) by adsorbing it using the negative pressure generated by the flow generating device (20). Alternatively, the block assembly (10) can support the target (O) by floating it by spraying the flow of gas generated by the flow generating device (20) around the target (O). The block assembly (10) can be moved by a moving device such as a gantry, a robot arm, a shuttle, a conveyor belt, etc.

[0045] The block assembly (10) may include a plurality of replaceable blocks.

[0046] The block assembly (10) may include a first block (100), a second block (200), a third block (300), and a connector (400).

[0047] The first block (100) is located at the bottom of the plurality of blocks included in the block assembly (10) and can spray gas onto an object (O) or support the object (O) by adsorbing it. For example, as shown in FIG. 1, the first block (100) is connected to the second block (200) and can be connected to the flow path of the second block (200). The first block (100) and the second block (200) can be connected through fastening members such as bolts. The flow generated by the flow generating device (20) can be supplied to the first block (100) through the connector (400), the third block (300), and the flow path of the second block (200). The first block (100) may include a support element for adsorption or gas spraying on the bottom surface facing the object (O).

[0048] The first block (100) may be detachable from the second block (200). The first block (100) includes a support element corresponding to the shape and size of the object (O) to be transported, and if the shape and size of the object (O) change, the first block (100) including the support element corresponding to it may be replaced. The first block (100) and the second block (200) may be replaced together, or only the first block (100) may be replaced.

[0049] The second block (200) is located between the first block (100) and the third block (300) and can support the first block (100). For example, as shown in FIG. 1, the second block (200) can detachably support the first block (100) on its lower surface. The second block (200) may include a channel communicating with a support element included in the first block (100).

[0050] The third block (300) supports the second block (200), and a connector (400) connected to a flow generating device (20) may be connected to the upper surface. The third block (300) supports and fixes the second block (200) and the first block (100) to a moving device, and may have a size and shape corresponding to the first block (100) and the second block (200).

[0051] Alternatively, the block assembly (10) may include a first block (100), a second block (200), and a connector (400). The connector (400) may be located on the second block (200) without a third block (300), and the second block (200) may be directly connected to the flow generating device (20) through the connector (400).

[0052] The first block (100) may include a main chuck (110) as a support element.

[0053] The main chuck (110) is located on the bottom surface of the first block (100) and can be connected to the flow path of the second block (200). The main chuck (110) can support the object (O) by adsorbing it with negative pressure generated by the flow generation device (20), or by spraying the flow generated by the flow generation device (20) around the object (O) to lift the object (O) off the floor and support it in a non-contact manner. The main chuck (110) may include a special chuck. For example, the main chuck (110) may include a porous chuck, a Bernoulli chuck, or a Coanda chuck. Here, a special chuck refers to a chuck that supports the object (O) in a manner other than the general vacuum adsorption method using a vacuum hole or vacuum pad, and the vacuum hole or vacuum pad and the porous chuck can be understood as distinct concepts. When the main chuck (110) includes a Bernoulli chuck or a Coanda chuck, the main chuck (110) can non-contact support the object (O) by generating lift by injecting gas around it without directly injecting the object (O). The operation method of the Bernoulli chuck and the Coanda chuck may utilize known technology, and a detailed description is omitted.

[0054] As shown in FIG. 3, the main chuck (110) has a shape corresponding to the object (O) and may have a width smaller than that of the object (O). Therefore, when adsorbing the object (O), the object (O) can be stably supported without air leakage. If the shape and size of the object (O) change, the first block (100) can be replaced with a first block (100) that includes a different main chuck (110).

[0055] As shown in FIG. 3, the main chuck (110) has a continuous shape without interruption, thereby expanding the supporting area of ​​the object (O) and enabling stable support. In addition, unlike vacuum holes or vacuum pads which are difficult to configure to correspond to a narrow strip shape, the main chuck (110) includes special chucks such as a porous chuck, a Bernoulli chuck, and a Coanda chuck, so that even a narrow part of the object (O) can be effectively supported.

[0056] The main chuck (110) may have a continuous shape but may include multiple distinct regions. Each region may be connected to a different flow path of the second block (200). Accordingly, the controller (30) can control the flow generating device (20) (or regulator) to individually control the flow supplied to each region of the main chuck (110).

[0057] In another embodiment, the first block (100A) may include a plurality of main chucks (110A) spaced apart from each other. For example, as shown in FIG. 4, the plurality of main chucks (110A) each have a rod shape, are spaced apart from each other, and may be arranged to have a shape corresponding to the object (O).

[0058] A plurality of main chucks (110A) may include a plurality of first main chucks (111A) and second main chucks (112A).

[0059] Multiple first main chucks (111A) may correspond to the corners of the object (O). For example, the first main chuck (111A) may be located on the long side of the first block (100A) so as to correspond to the long side of the object (O). The first main chuck (111A) may include a pair of first main chucks (111A). The first main chuck (111A) extends in a first direction (e.g., the Y-axis direction of FIG. 4 or the length direction of the first block (100A)) and may be spaced apart from the second main chuck (112A).

[0060] Multiple second main chucks (112A) may correspond to the edges of the object (O). For example, the second main chuck (112A) may be located on the short side of the first block (100A) corresponding to the short side of the object (O). The second main chuck (112A) may include a pair of second main chucks (112A). The second main chuck (112A) may extend in a second direction (e.g., the X-axis direction of FIG. 4 or the length direction of the first block (100A)).

[0061] The first main chuck (111A) and the second main chuck (112A) can be spaced apart from each other. Thus, it may be easy to adjust the length and / or width of the first main chuck (111A) and the second main chuck (112A) differently. As shown in FIG. 4 (b), an object (O) having a longer length in the vertical direction can also be stably supported by the first main chuck (111A), which is longer than the second main chuck (112A). Alternatively, the second main chuck (112A) may have a longer length.

[0062] As shown in FIG. 2 (d), if the widths of each side of the object (O) are different, the first main chuck (111A) and the second main chuck (112A) may also have different widths. FIG. 4 shows a case where the width of the first main chuck (111A) is larger, but the width of the second main chuck (112A) may be larger. Alternatively, as shown in FIG. 2 (e) and (f), even if the object (O) has a non-straight shape, such as having a curved part, protruding inward or outward, or having a bent shape, the shape and length of the first main chuck (111A) and the second main chuck (112A) corresponding to it can be adjusted to stably support the object (O).

[0063] If the alignment between the first block (100A) and the object (O) is misaligned, the position may be most significantly misaligned at the corner of the main chuck (110A) that is furthest from the center of the first block (100A). In this case, flow loss may occur at the corner, which may reduce the supporting power of the main chuck (110A). The first block (100A) can prevent flow loss at the corner and thus prevent weakening of the supporting power of the main chuck (110A) even if the alignment between the first block (100A) and the object (O) is slightly misaligned, by separating the first main chuck (111A) and the second main chuck (112A) from each other at the corner.

[0064] If the length of the first direction (Y-axis direction in FIG. 4) of the object (O) is longer than the length of the second direction (X-axis direction in FIG. 4), the width of the second direction of the first main chuck (111A) may be greater than the width of the first direction of the second main chuck (112A). Through this, the main chuck (110A) can effectively support the edge region of the object (O).

[0065] The first main chuck (111A) and the second main chuck (112A) can be positioned at a set location to stably support the object (O).

[0066] For example, when the center of the first block (100A) is used as the starting point and the long side of the object (O) is used as the end point, the first main chuck (111A) can be positioned at a point of approximately 70% or more. Additionally, when the center of the first block (100A) is used as the starting point and the short side of the object (O) is used as the end point, the second main chuck (112A) can be positioned at a point of approximately 75% or more. Accordingly, the main chuck (110A) can effectively support the object (O) with a minimum support area and prevent the edge area of ​​the object (O) from lifting due to the external environment and other factors.

[0067] Additionally, the long side of the first main chuck (111A) may be positioned to correspond to the long side of the object (O). For example, as shown in FIG. 4 (b), the size of the object (O) may be larger than the main chuck (110A). In this case, the long side of the first main chuck (111A) closest to the long side of the object (O) may be spaced apart from the long side of the object (O) within a range of about 1 mm or less. Additionally, the long side of the second main chuck (112A) may be positioned to correspond to the short side of the object (O). For example, the long side of the second main chuck (112A) closest to the short side of the object (O) may be spaced apart from the short side of the object (O) within a range of about 1 mm or less.

[0068] Accordingly, the embodiment can position the main chuck (110A) to correspond to the size of the object (O), thereby effectively supporting the object (O) and preventing the edge area from lifting due to the external environment and other factors.

[0069] Additionally, although not shown in the drawing, even if the size of the object (O) is smaller than the main chuck (110A), each corner of the object (O) may be spaced apart from the outermost edge of the first and second main chucks (111A, 112A) within a range of 1 mm or less.

[0070] Accordingly, the embodiment can effectively support the object (O) while minimizing leakage of the main chuck (110A) even when the size of the object (O) is smaller than the main chuck (110A).

[0071] Multiple main chucks (110A) can be connected to a flow generating device (20) through the same or different flow paths. Each flow path can be connected independently to the flow generating device (20). Accordingly, the controller (30) can control the flow paths connected to each main chuck (110A) to independently control the on / off, flow rate, or intensity of the main chucks (110A). Thus, the first block (100A) can provide a supporting force suitable for the shape or size of the object (O). For example, multiple first main chucks (111A) and second main chucks (112A) can support the object (O) with different pressures.

[0072] In another embodiment, the first block (100B) may include a plurality of support regions. In each support region, identical or different chucks may be arranged. For example, as shown in FIG. 5(a), the first block (100B) may include a first support region (SA1), a second support region (SA2), and a third support region (SA3). The first block (100B) may include a main chuck (110B), a first auxiliary chuck (113B), and a second auxiliary chuck (114B).

[0073] The first support area (SA1) may be an area that supports a strip-shaped portion of the object (O). As shown in FIG. 5, the first support area (SA1) may be located between the second support area (SA2) and the third support area (SA3). In the first support area (SA1), a first main chuck (111B) and a second main chuck (112B) included in a plurality of main chucks (110B) may be arranged. The first main chuck (111B) and the second main chuck (112B) are identical to the first main chuck (111A) and the second main chuck (112A) described above, and a detailed description is omitted. Alternatively, the plurality of main chucks (110B) may be replaced with the main chuck (110) described in FIG. 3.

[0074] The second support area (SA2) may be an area adjacent to the first support area (SA1) and supporting a portion other than the strip-shaped portion of the object (O). For example, as shown in FIG. 2 (c), if the object (O) includes a film (F), the second support area (SA2) may be an area supporting a portion of the film (F) located above the strip-shaped portion. For example, as shown in FIG. 5, the second support area (SA2) may be located above the first support area (SA1) in the first direction.

[0075] A first auxiliary chuck (113B) may be located in the second support area (SA2). The first auxiliary chuck (113B) includes a plurality of vacuum holes and can adsorb and support the film (F) of the object (O). Although the vacuum holes may have weaker support force compared to the special chuck included in the main chuck (110B), they can stably support a large-area object (O). The first auxiliary chuck (113B) may be connected to a flow generating device (20) through a different flow path from the main chuck (110B) and may be controlled independently of the main chuck (110B) by a controller (30).

[0076] The third support area (SA3) may be an area adjacent to the first support area (SA1) and supporting a portion of the object (O) other than the strip-shaped portion. For example, as shown in FIG. 2(c), if the object (O) includes a film (F), the second support area (SA2) may be an area supporting a portion of the film (F) located above the strip-shaped portion. For example, as shown in FIG. 5, the third support area (SA3) may be located below the first support area (SA1) in the first direction. The third support area (SA3) may be on the opposite side of the second support area (SA2) with respect to the first support area (SA1).

[0077] A second auxiliary chuck (114B) may be located in the third support area (SA3). The second auxiliary chuck (114B) includes a plurality of vacuum holes and can adsorb and support the film (F) of the object (O). Although the vacuum holes may have weaker support force compared to the special chuck included in the main chuck (110B), they can stably support a large-area object (O). The second auxiliary chuck (114B) may be connected to a flow generating device (20) through a different flow path from the main chuck (110B) and may be controlled independently of the main chuck (110B) by a controller (30).

[0078] Therefore, the first block (100B) can stably support both the narrow strip-shaped portion and the wide film (F) portion of the object (O) at the same time.

[0079] In another embodiment, as shown in FIG. 6, the first block (100C) may include a plurality of main chucks (110C), a first main chuck (111C) and a second main chuck (112C), and a first auxiliary chuck (113C) and a second auxiliary chuck (114C). The first block (100C) includes a first support area (SA1), a second support area (SA2), and a third support area (SA3), and the first main chuck (111C) and the second main chuck (112C) may be arranged in the first support area (SA1), the first auxiliary chuck (113C) in the second support area (SA2), and the second auxiliary chuck (114C) in the third support area (SA3). The first block (100C) of FIG. 6 has a different configuration of the first auxiliary chuck (113C) and the second auxiliary chuck (114C) compared to the first block (100B) of FIG. 5, while other configurations may be the same.

[0080] The first auxiliary chuck (113C) is located in the second support area (SA2) and may include a vacuum pad. The vacuum pad is positioned at a location corresponding to the film (F) of the object (O) and may include a contact portion made of a deformable elastic material such as rubber, polyurethane, or silicone so as to be in close contact with the film (F). For example, the vacuum pad may have a cup shape with a hollow interior in the portion that is in close contact with the film (F). Thus, the first auxiliary chuck (113C) can be in closer contact with the film (F) and support the film (F) with a strong support force.

[0081] The second auxiliary chuck (114C) is located in the third support area (SA3) and may include a vacuum pad. The vacuum pad is positioned at a location corresponding to the film (F) of the object (O) and may include a contact portion made of a deformable elastic material such as rubber, polyurethane, or silicone so as to be in close contact with the film (F). For example, the vacuum pad may have a cup shape with a hollow interior in the portion that is in close contact with the film (F). Thus, the second auxiliary chuck (114C) can be in closer contact with the film (F) and support the film (F) with a strong support force.

[0082] The drawing shows a case where the first auxiliary chuck (113C) and the second auxiliary chuck (114C) are arranged in pairs in the second support area (SA2) and the third support area (SA3), respectively, but the number of the first auxiliary chuck (113C) and the second auxiliary chuck (114C) is not limited thereto. The number, shape, and arrangement of the first auxiliary chuck (113C) and the second auxiliary chuck (114C) may be different or identical, and may vary depending on the size and shape of the film (F).

[0083] In another embodiment, as shown in FIG. 7, the first block (100D) may include a plurality of main chucks (110D), a first main chuck (111D) and a second main chuck (112D), and a first auxiliary chuck (113D) and a second auxiliary chuck (114D). The first block (100D) includes a first support area (SA1), a second support area (SA2), and a third support area (SA3), and the first main chuck (111D) and the second main chuck (112D) may be arranged in the first support area (SA1), the first auxiliary chuck (113D) in the second support area (SA2), and the second auxiliary chuck (114D) in the third support area (SA3). When compared to the first block (100B), the first block (100D) has a different configuration of the first auxiliary chuck (113D) or the second auxiliary chuck (114D), and other configurations may be the same.

[0084] The second auxiliary chuck (114D) is located in the third support area (SA3) and may include a vacuum pad. The vacuum pad is positioned at a location corresponding to the film (F) of the object (O) and may include a contact portion made of a deformable elastic material such as rubber, polyurethane, or silicone so as to be in close contact with the film (F). For example, the vacuum pad may have a cup shape with a hollow interior in the portion that is in close contact with the film (F). Thus, the second auxiliary chuck (114D) can be in closer contact with the film (F) and support the film (F) with a strong support force.

[0085] The drawing shows a case where the second auxiliary chuck (114D) includes a vacuum pad rather than a vacuum hole, but conversely, the second auxiliary chuck (114D) may include a vacuum hole and the first auxiliary chuck (113D) may include a vacuum pad.

[0086] The first block (100D) can stably support objects (O) of various shapes and sizes by including a first auxiliary chuck (113D) and a second auxiliary chuck (114D) that include different types of adsorption members. For example, the part of the object (O) corresponding to the second support area (SA2) may have a larger area than other parts, and the part of the object (O) corresponding to the third support area (SA3) may be heavier than other parts. In this case, the first block (100D) can stably support the object (O) by including a vacuum hole in the first auxiliary chuck (113D) that can support a large area and a vacuum pad in the second auxiliary chuck (114D) that provides strong support.

[0087] The first blocks (100, 100A, 100B, 100C, 100D) described above may be a single block. Each of the first blocks (100, 100A, 100B, 100C, 100D) may be separated or combined as a whole into the second block (200). The first blocks (100, 100A, 100B, 100C, 100D) may be separated from the second block (200) and replaced with other first blocks (100, 100A, 100B, 100C, 100D) depending on the shape and size of the object (O).

[0088] In another embodiment, the first block (100E) of the block assembly (10E) may include a plurality of detachable segments. Each segment may be detachable from the second block (200E). For example, as shown in FIGS. 8 and 9, the first block (100E) may include a first segment (101E), a second segment (102E), a third segment (103E), a fourth segment (104E), and a fifth segment (105E). The first block (100E) may include the first segment (101E), the second segment (102E), the third segment (103E), the fourth segment (104E), and the fifth segment (105E), which may be detachable from the second block (200E).

[0089] The first segment (101E), the second segment (102E), the third segment (103E), and the fourth segment (104E) can be arranged around the fifth segment (105E). For example, as shown in FIG. 8, the first segment (101E), the second segment (102E), the third segment (103E), and the fourth segment (104E) can be arranged above, below, left, and right of the fifth segment (105E), respectively. The first segment (101E) and the second segment (102E) can be symmetrical in the second direction, and the third segment (103E) and the fourth segment (104E) can be symmetrical in the first direction.

[0090] The first block (100E) may include a plurality of main chucks (110E). The plurality of main chucks (110E) may include a first main chuck (111E) and a second main chuck (112E). Each of the first main chuck (111E) and the second main chuck (112E) may be located in the first segment (101E), the second segment (102E), the third segment (103E), and the fourth segment (104E). For example, the first main chuck (111E) may be located in the first segment (101E) and the second segment (102E), and the second main chuck (112E) may be located in the third segment (103E) and the fourth segment (104E).

[0091] The first segment (101E), the second segment (102E), the third segment (103E), and the fourth segment (104E) may have independent flow paths. For example, as shown in FIG. 9, the second block (200E) includes a plurality of independent flow paths (210E), and the plurality of flow paths (210E) may be connected to a main chuck (110E) included in each segment. Each flow path (210E) may have a size and shape corresponding to the main chuck (110E). The controller (30) can independently control the flow supplied to each flow path (210E) to independently control the operation of the main chuck (110E) included in the first segment (101E), the second segment (102E), the third segment (103E), and the fourth segment (104E).

[0092] The first segment (101E), the second segment (102E), the third segment (103E), the fourth segment (104E), and the fifth segment (105E) may include a plurality of protrusions (120E). Each protrusion (120E) may be connected to a coupling hole (220E) formed in the second block (200E). Alternatively, the first segment (101E), the second segment (102E), the third segment (103E), the fourth segment (104E), and the fifth segment (105E) may each be detachable from the second block (200E) in a different manner.

[0093] Therefore, the block assembly (10E) can proceed with the sheet transfer process by replacing only some segments to match the shape and size of the object (O), without the need to replace the entire first block (100E).

[0094] Although FIGS. 8 and 9 show that the fifth segment (105E) does not include a support element, the fifth segment (105E) may also include a main chuck (110E).

[0095] Or, as shown in FIG. 10 and FIG. 11, the first block (100F) of the block assembly (10F) may include a first segment (101F), a second segment (102F), a third segment (103F), a fourth segment (104F), a fifth segment (105F), a sixth segment (106F), and a seventh segment (107F). The first segment (101F), the second segment (102F), the third segment (103F), the fourth segment (104F), and the fifth segment (105F) are identical to the first segment (101E), the second segment (102E), the third segment (103E), the fourth segment (104E), and the fifth segment (105E) described in FIGS. 8 and 9, and a detailed description is omitted.

[0096] The first block (100F) may include a plurality of support regions, such as a first support region (SA1), a second support region (SA2), and a third support region (SA3). As shown in FIG. 10, the first support region (SA1) is a region divided into a first segment (101F), a second segment (102F), a third segment (103F), a fourth segment (104F), and a fifth segment (105F), and may be a region corresponding to a band-shaped portion of the object (O).

[0097] The second support area (SA2) is an area partitioned by the sixth segment (106F), adjacent to the first support area (SA1), and may be an area that supports other parts (e.g., film (F)) excluding the strip-shaped portion of the object (O). The second support area (SA2) may be located above the first support area (SA1) in the first direction. A first auxiliary chuck (113F) may be located in the sixth segment (106F). The first auxiliary chuck (113F) includes a plurality of vacuum holes and can adsorb and support the film (F) of the object (O).

[0098] The third support area (SA3) is an area partitioned by the seventh segment (107F), adjacent to the first support area (SA1), and may be an area (e.g., a film (F)) that supports a part other than the strip-shaped portion of the object (O). The third support area (SA3) may be located below the first support area (SA1) in the first direction. The third support area (SA3) may be on the opposite side of the second support area (SA2) with respect to the first support area (SA1). A second auxiliary chuck (114F) may be located in the seventh segment (107F). The second auxiliary chuck (114F) includes a plurality of vacuum pads and can adsorb and support the film (F) of the object (O).

[0099] Alternatively, the sixth segment (106F) may include a first auxiliary chuck (113F) comprising a plurality of vacuum pads, and the seventh segment (107F) may include a second auxiliary chuck (114F) comprising a plurality of vacuum holes.

[0100] The sixth segment (106F) and the seventh segment (107F) may have independent flow paths, with the second block (200F) being detachable. For example, as shown in FIG. 11, the second block (200F) includes a plurality of independent flow paths (210F), and the plurality of flow paths (210F) may be connected to a first auxiliary chuck (113F) and a second auxiliary chuck (114F) included in each segment. Each flow path (210F) may have a size and shape corresponding to the first auxiliary chuck (113F) and the second auxiliary chuck (114F). The controller (30) can independently control the flow supplied to each flow path (210F) to independently control the operation of the first auxiliary chuck (113F) and the second auxiliary chuck (114F) included in the sixth segment (106F) and the seventh segment (107F).

[0101] The sixth segment (106F) and the seventh segment (107F) may include a plurality of protrusions (120F). Each protrusion (120F) may be connected to a coupling hole (220F) formed in the second block (200F). Alternatively, the sixth segment (106F) and the seventh segment (107F) may each be detachable from the second block (200F) in a different way.

[0102] Therefore, the block assembly (10F) can perform the sheet transfer process by replacing only a portion of the segments, including the main chuck (110F), the first auxiliary chuck (113F), or the second auxiliary chuck (114F), to match the shape and size of the object (O), without the need to replace the entire first block (100F).

[0103] A flow generating device (20) is connected to a block assembly (10) and can generate a flow and supply it to the block assembly (10). The flow generating device (20) can supply negative pressure to a support element of the first block (100) or supply a gaseous (e.g., air) flow. For example, the flow generating device (20) may include one or more ejectors and / or vacuum pumps. The flow generating device (20) may include a regulator that controls the flow supplied to the support element of the first block (100).

[0104] The controller (30) can control the flow generating device (20) to regulate the flow supplied to the first block (100). The controller (30) can control the flow generating device (20) by receiving input from a pre-stored algorithm or program, or instructions from a user. The controller (30) can regulate the flow rate, pressure, generation cycle, etc. of the flow generated by the flow generating device (20).

[0105] The controller (30) may utilize an integrated circuit structure that executes each control function through one or more microprocessors or other control devices, such as memory, a processor, a logic circuit, or a look-up table. The controller (30) may be implemented as part of a module, program, or code containing one or more executable instructions for executing a specific logic function. The controller (30) may include or be implemented by a processor, such as a central processing unit, that executes each function or microprocessor, etc. The controller (30) may include a communication device capable of transmitting and receiving data to and from external devices, etc. The communication device may include one or more combinations of a digital modem, an RF modem, an antenna circuit, a Wi-Fi chip, and related software and / or firmware.

[0106] The control operation of the controller (30D) will be explained with reference to FIGS. 12 and FIGS. 13. For convenience of explanation, the following description will focus on the block assembly (10D) including the first block (100D) shown in FIG. 7, but the control operation of the controller (30D) can be applied in the same way to other forms of first blocks (100, 100A, 100B, 100C, 100E, 100F).

[0107] The sheet transfer device (1D) may include a block assembly (10D), a flow generating device (20D), and a controller (30D). When the first main chuck (111D) and the second main chuck (112D) of the block assembly (10D) include porous chucks, as shown in FIG. 12, the controller (30D) may operate a vacuum pump included in the flow generating device (20D). The negative pressure generated by the vacuum pump is transmitted through a flow path to the vacuum holes of the first main chuck (111D), the second main chuck (112D), and the first auxiliary chuck (113D), and to the vacuum pad of the second auxiliary chuck (114D), and the first main chuck (111D), the second main chuck (112D), the first auxiliary chuck (113D), and the second auxiliary chuck (114D) may adsorb and support an object (O).

[0108] The controller (30D) can control a plurality of regulators (R) included in the flow generating device (20D). The plurality of regulators (R) can be independently connected to the first main chuck (111D), the second main chuck (112D), the first auxiliary chuck (113D), and the second auxiliary chuck (114D). The controller (30D) can control each regulator (R) to adjust the sound pressure supplied to the support element.

[0109] Alternatively, if the first main chuck (111D) and the second main chuck (112D) include a Bernoulli chuck or a Coanda chuck, as shown in FIG. 13, the controller (30D) can operate the ejector included in the flow generating device (20D). Air generated from the ejector flows through the regulator (R) into the first main chuck (111D) and the second main chuck (112D), and then can be discharged toward the object (O) through the first main chuck (111D) and the second main chuck (112D).

[0110] The controller (30D) can individually control the regulator (R) connecting the first main chuck (111D), the second main chuck (112D), the first auxiliary chuck (113D), and the second auxiliary chuck (114D) and the flow generating device (20D) according to the size, shape, and weight of the object (O). For example, if the part of the object (O) corresponding to a support element is heavier or larger, the controller (30D) can control the regulator (R) corresponding to that support element to supply a greater negative pressure to the support element or to spray a larger amount of gas. Thus, the sheet transfer device (1D) can stably support objects (O) having various shapes, sizes, and weights.

[0111] Although the present invention has been described with reference to the embodiments illustrated in the drawings, this is merely illustrative. Those skilled in the art will fully understand that various modifications and equivalent alternative embodiments are possible from the embodiments. Accordingly, the true technical scope of protection of the present invention should be determined based on the appended claims. Explanation of the symbols

[0112] 1: Sheet transfer device 10: Block Assembly 100: Block 1 110: Mainchuck 200: Block 2 300: Block 3 400: Connector 20: Flow generating device 30: Controller

Claims

Claim 1 A sheet transfer device comprising: a block assembly including a plurality of blocks and one or more support elements supporting an object; a flow generating device supplying flow to the block assembly; and a controller for controlling the flow generating device; wherein the block assembly includes a first block including a main chuck as the one or more support elements, the object has a strip shape, and the main chuck is arranged to correspond to the object and has a width smaller than that of the object, and includes one or more of a porous chuck, a Bernoulli chuck, and a Coanda chuck. Claim 2 A sheet transfer device according to claim 1, wherein the main chuck is arranged to correspond to the object and extends continuously without interruption. Claim 3 In claim 1, the main chuck comprises a plurality of first main chucks corresponding to the corners of the object; and a plurality of second main chucks corresponding to the corners of the object; wherein the plurality of first main chucks and the plurality of second main chucks are spaced apart from each other and have different lengths or widths, a sheet transfer device. Claim 4 A sheet transfer device according to claim 1, wherein the first block further comprises an auxiliary chuck that supports a film attached to the object and includes a vacuum hole or a vacuum pad, and the first block comprises: a first support area where the main chuck is arranged; and a second support area adjacent to the first support area where the auxiliary chuck is arranged. Claim 5 A sheet transfer device according to claim 4, wherein the first block further includes a third support area located opposite the second support area and adjacent to the first support area, and the auxiliary chuck comprises: a first auxiliary chuck arranged in the second support area and including a vacuum hole or a vacuum pad; and a second auxiliary chuck arranged in the second support area and including a vacuum hole or a vacuum pad. Claim 6 In claim 1, the block assembly further comprises a second block that supports the first block and includes a flow path communicating with the first block and the flow generating device, and the first block is detachably attached to the second block, forming a sheet transfer device. Claim 7 A sheet transfer device according to claim 6, wherein the first block comprises a plurality of segments each detachable from the second block, and the main chuck comprises a plurality of main chucks arranged on the plurality of segments. Claim 8 A sheet transfer device according to claim 1, wherein the flow generating device includes a plurality of regulators connected to each area of ​​the main chuck, and the controller controls the plurality of regulators to individually control the flow supplied to each area of ​​the main chuck.

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