Vaporizer module and sterilization system including the same

Abstract

One aspect of the present invention provides a vaporizer module used in a sterilization system, comprising: a main body; a supply port connected to the main body and into which a sterilizing agent is injected; a vaporization unit for vaporizing the sterilizing agent injected into the supply port; a vaporization chamber into which the sterilizing agent vaporized in the vaporization unit is diffused; a vacuum port connected to the vaporization chamber for forming a vacuum inside the vaporization chamber; and a plate disposed within the vaporization chamber and having one or more orifices formed therein through which the vaporized sterilizing agent passes.

Description

Technology Field

[0001] The present invention relates to a vaporizer module and a sterilization system including the same. Background Technology

[0002] In general, sterilization, unlike washing or disinfection, means the complete removal of all types of living microorganisms. Sterilization is achieved through various physical and chemical actions and is essential, especially in the field of medical devices.

[0003] When sterilizing various workpieces, heat provided by dry heat or steam is used, or a sterilizing agent made of chemicals such as ethylene oxide gas or hydrogen peroxide is vaporized and then used.

[0004] Meanwhile, for a sterilizing agent to be effectively vaporized, it undergoes heat transfer under low pressure conditions and a temperature environment above a certain level under those pressure conditions; therefore, the process of forming a vacuum is important to enable effective vaporization.

[0005] Generally, a vacuum is created inside the vaporizer by creating a vacuum in the sterilization chamber, but it is difficult to create a vacuum inside the vaporizer due to sterilizing agents that may remain inside the vaporizer module. Prior art literature

[65535] U.S. Patent Publication No. 2002-0098111 (July 25, 2002) The problem to be solved

[0006] The present invention is intended to solve the problems of the aforementioned prior art, and the objective of the present invention is to provide a vaporizer module capable of rapidly forming a vacuum inside and a sterilization system including the same. means of solving the problem

[0007] One aspect of the present invention provides a vaporizer module used in a sterilization system, comprising: a main body; a supply port connected to the main body and into which a sterilizing agent is injected; a vaporizing unit for vaporizing the sterilizing agent injected into the supply port; a vaporizing chamber into which the sterilizing agent vaporized in the vaporizing unit is diffused; a vacuum port connected to the vaporizing chamber and for forming a vacuum inside the vaporizing chamber; and a plate disposed within the vaporizing chamber and having one or more orifices formed therein through which the vaporized sterilizing agent passes.

[0008] In one embodiment, the vaporization chamber includes a first flow path leading to the sterilization chamber of the sterilizer and a second flow path leading to the vacuum port, and the fluid flow resistance of the second flow path may be formed to be higher than the fluid flow resistance of the first flow path.

[0009] In one embodiment, the vaporization chamber may be divided into a first vaporization chamber on the side of the vaporization section with respect to the plate, and a second vaporization chamber where the first flow path and the second flow path are located.

[0010] In one embodiment, the one or more orifices may be positioned opposite the vacuum port with respect to the center of the vaporization chamber.

[0011] In one embodiment, the one or more orifices may be positioned on the inlet side of the first flow path.

[0012] In one embodiment, the one or more orifices may be formed to penetrate at an angle toward the inlet side of the first flow path.

[0013] Another aspect of the present invention is a vaporizer module used in a sterilizer, comprising: a main body; a supply port connected to the main body and into which a liquid sterilizing agent is injected; a vaporization unit connected to the supply port and into which the injected sterilizing agent is vaporized; a vaporization chamber into which the sterilizing agent vaporized in the vaporization unit is supplied; a vacuum port connected to the vaporization chamber and for forming a vacuum inside the vaporization chamber; and a check valve disposed on a flow path connected to the vacuum port.

[0014] In one embodiment, the vaporizer module is characterized in that the check valve is closed by a pressure increase occurring during the vaporization of the sterilizing agent.

[0015] Another aspect of the present invention provides a sterilization system comprising: a vaporizer module; a sterilization chamber connected to the vaporizer module; a plasma discharge unit capable of plasma discharge when power is applied; a sterilizing agent supply unit for supplying a sterilizing agent to the vaporizer module; a vacuum pump connected to a vacuum port of the sterilization chamber and the vaporizer module; and a circulation channel unit connecting an outlet of the sterilization chamber, the plasma discharge unit, and the vaporizer module; wherein the vaporized sterilizing agent is forcibly circulated within the circulation channel unit. Effects of the invention

[0016] According to one aspect of the present invention, a vacuum port is directly connected to a vaporizer module, enabling faster and more efficient vacuum formation within the module.

[0017] In addition, the orifice of the plate increases fluid flow resistance in the direction of the vacuum port and lowers resistance in the direction of the sterilization chamber, thereby guiding the vaporized sterilizing agent mainly toward the sterilization chamber, which can prevent leakage through the vacuum port and condensation of the sterilizing agent within the vacuum port.

[0018] In addition, the check valve connected to the vacuum port closes automatically when the pressure rises during the vaporization of the sterilizing agent, so it can effectively prevent backflow and loss of the vaporized sterilizing agent.

[0019] In addition, the closed-loop circulation system connecting the vaporizer module, the sterilization chamber, and the plasma discharge unit can not only improve overall sterilization efficiency but also purify residual sterilizing agents.

[0020] The effects of the present invention are not limited to the effects described above, and should be understood to include all effects that can be inferred from the configuration of the invention described in the detailed description or claims of the present invention. Brief explanation of the drawing

[0021] FIG. 1 is a schematic diagram of a sterilization system according to one embodiment of the present invention. FIG. 2 is a schematic diagram of a vaporizer module and a sterilization chamber according to one embodiment of the present invention. FIG. 3 is a bottom view of a vaporizer module body according to one embodiment of the present invention. FIG. 4 is a plan view of a vaporizer module body according to one embodiment of the present invention. FIG. 5 illustrates the flow direction of a sterilizing agent in a vaporizer module according to one embodiment of the present invention. FIGS. 6 and FIGS. 7 illustrate a plate according to one embodiment of the present invention. FIG. 8 illustrates the flow direction of a sterilizing agent in a vaporizer module according to another embodiment of the present invention. Specific details for implementing the invention

[0022] The present invention will be described below with reference to the attached drawings. However, the present invention may be implemented in various different forms and is therefore not limited to the embodiments described herein. Furthermore, in order to clearly explain the present invention in the drawings, parts unrelated to the explanation have been omitted, and similar parts throughout the specification have been given similar reference numerals.

[0023] Throughout the specification, when it is stated that a part is "connected" to another part, this includes not only cases where they are "directly connected," but also cases where they are "indirectly connected" with other members interposed between them. Furthermore, when it is stated that a part "includes" a certain component, this means that, unless specifically stated otherwise, it does not exclude other components but rather allows for the inclusion of additional components.

[0024] Terms including ordinal numbers such as ‘first’ or ‘second’ used herein may be used to describe various components or steps, but such components or steps should not be limited by ordinal numbers. Terms including ordinal numbers should be interpreted solely for the purpose of distinguishing one component or step from other components or steps.

[0025] Hereinafter, embodiments of the present invention will be described in detail with reference to the attached drawings.

[0026] FIG. 1 is a schematic diagram of a sterilization system according to one embodiment of the present invention.

[0027] Referring to FIG. 1, the sterilization system (1) dries and sterilizes a workpiece, and the workpiece may be any item requiring sterilization, including medical instruments.

[0028] Referring to FIG. 1, a sterilization system (1) according to one embodiment of the present invention may include a vaporizer module (100), a sterilization chamber (200), a plasma discharge unit (300), a sterilizing agent supply unit (400), a pressure adjustment unit (500), a circulation path unit (600), and a filter unit (700).

[0029] The vaporizer module (100) is connected to the sterilization chamber (200) and can vaporize the sterilizing agent flowing into the sterilization chamber (200). Specifically, the sterilizing agent is vaporized as its temperature rises in the vaporizer module (100).

[0030] The sterilization chamber (200) is hollow inside and capable of accommodating a workpiece, allowing for sterilization treatment of the workpiece. Drying and sterilization treatment of the workpiece can be performed inside the sterilization chamber (200).

[0031] The sterilization chamber (200) can be connected to the vaporizer module (100) and the plasma discharge unit (300) through the circulation channel (600) to be described later, and the fluid, such as ozone, heated air, and vaporized sterilizing agent generated by plasma discharge in the plasma discharge unit (300), flows through the circulation channel (600) which is formed in a closed-loop structure, thereby having the effect of improving the drying and sterilization efficiency of the workpiece. In this specification, 'fluid' refers to a gas such as ozone, heated air, and vaporized sterilizing agent.

[0032] The sterilization chamber (200) has a hollow interior and can accommodate a workpiece. The sterilization chamber (200) can be connected to a circulation channel (600), and the internal air of the sterilization chamber (200) can be exhausted through the circulation channel (600), and fluids such as air, ozone, and vaporized sterilizing agent that have passed through the plasma discharge section (300) and the vaporizer module (100) can be introduced.

[0033] The chamber heater (210) is installed in the sterilization chamber (200) and can generate heat by receiving power from the outside and can transfer heat to the sterilization chamber (200).

[0034] Referring to FIG. 1, the plasma discharge unit (300) is capable of plasma discharge when power is applied, and can be connected to the vaporizer module (100) and sterilization chamber (200) through the circulation channel unit (600).

[0035] As a result, the air exhausted from the sterilization chamber (200) can be introduced into the plasma discharge section (300) through the circulation channel (600) and then pass through the vaporizer module (100) to be introduced back into the sterilization chamber (200).

[0036] Through this air circulation, the sterilizing agent that was not vaporized during the initial vaporization process or remained inside the vaporizer module (100) in a vaporized state can be introduced into the sterilization chamber (200), thereby preventing contamination and damage to the vaporizer module (100) caused by the sterilizing agent remaining in the vaporizer module (100).

[0037] In addition, the plasma discharge unit (300) decomposes the hydrogen peroxide used in the sterilization chamber (200) into harmless gas by plasma discharge before discharging it outside the device. Specifically, the plasma discharge unit (300) forms an electric field during the process of exhausting the low-pressure atmosphere of the sterilization chamber (200) and the vaporized hydrogen peroxide, thereby decomposing the vaporized sterilizing agent into harmless gas.

[0038] In addition, ozone can be generated through plasma discharge, and the generated ozone can be introduced into the sterilization chamber (200) through the circulation channel (600). As a result, ozone sterilization treatment is possible for the workpiece contained inside the sterilization chamber (200).

[0039] The sterilizing agent supply unit (400) is connected to the vaporizer module (100) and can supply a liquid sterilizing agent to the vaporizer module (100). The sterilizing agent may be hydrogen peroxide. However, it is not limited to this, and various modifications are possible, such as being formed from a substance having a sterilizing effect, such as nitrogen dioxide or ethylene oxide gas.

[0040] The pressure adjustment unit (500) is installed in the circulation channel (600) and can make the inside of the sterilization chamber (200) a low pressure state close to a vacuum and can exhaust air from the inside of the sterilization chamber (200).

[0041] In the present invention, the pressure adjustment unit (500) functions to adjust the internal pressure of the sterilization chamber (200) and exhaust air using a vacuum pump method, but is not limited thereto and various modifications are possible within the technical concept of being able to form the interior of the sterilization chamber (200) into a low-pressure state close to a vacuum.

[0042] The circulation path (600) connects the sterilization chamber (200), the plasma discharge section (300), and the vaporizer module (100) and is formed in a closed-loop structure, thereby providing a flow path that allows fluid to circulate.

[0043] A circulation channel section (600) according to one embodiment of the present invention may include a first circulation channel (610) and a second circulation channel (620).

[0044] The first circulation channel (610) connects the sterilization chamber (200) and the plasma discharge unit (300), and a pressure adjustment unit (500) may be installed on the first circulation channel (610). A first valve unit (V1) may be disposed on the first circulation channel (610), and the flow of a fluid, such as air, in the first circulation channel (610) may be controlled by the first valve unit (V1).

[0045] The second circulation path (620) connects the plasma discharge section (300) and the vaporizer module (100). According to one embodiment of the present invention, the pressure adjustment section (500) can make the interior of the vaporizer module (100) a low pressure state close to a vacuum and can exhaust air from the interior of the vaporizer module (100).

[0046] Additionally, fluid discharged from the plasma discharge unit (300) can be introduced into the vaporizer module (100). A second valve unit (V2) may be disposed on the second circulation path (620), and the flow of fluids such as air and ozone in the second circulation path (620) can be controlled by the second valve unit (V2).

[0047] The circulation channel section (600), specifically the first circulation channel (610) and the second circulation channel (620), connects the sterilization chamber (200), the plasma discharge section (300), and the vaporizer module (100), and can form a closed-loop circulation structure. The vaporized sterilizing agent is forcibly circulated within the circulation channel section (600), enabling efficient use of the sterilizing agent.

[0048] The filter unit (700) is connected to the plasma discharge unit (300) and may include a first filter (710) and a second filter (720) capable of filtering fluid that flows into the plasma discharge unit (300) or is discharged from the plasma discharge unit (300).

[0049] Below, the operation process of a sterilization system (1) according to one embodiment of the present invention is described.

[0050] First, the pressure regulating unit (500) operates to create a low-pressure state close to a vacuum in the internal space of the sterilization chamber (200) and the vaporizer module (100).

[0051] The liquid sterilizing agent supplied from the sterilizing agent supply unit (400) is heated and vaporized inside the vaporizer module (100). The vaporized sterilizing agent flows into the sterilization chamber (200), comes into contact with the object to be treated, and performs a sterilization action.

[0052] Fluids such as air and residual sterilizing agents exhausted from the sterilization chamber (200) flow to the plasma discharge unit (300) through the circulation channel (600). In the plasma discharge unit (300), harmful sterilizing agents are decomposed into harmless gases while simultaneously generating ozone. The fluid containing the generated ozone is introduced back into the sterilization chamber (200) through the circulation channel (600), enabling additional ozone sterilization treatment for the workpiece. Through this closed-loop circulation structure, the fluid can be reintroduced into the sterilization chamber via the vaporizer module (100), which improves sterilization efficiency and helps effectively remove residual sterilizing agents.

[0053] The above-mentioned circulating fluid passes through the filter section (700) to filter out impurities. The filtered fluid is safely exhausted to the outside of the system.

[0054] FIG. 2 is a schematic diagram of a vaporizer module and a sterilization chamber according to one embodiment of the present invention, FIG. 3 is a bottom view of a vaporizer module body according to one embodiment of the present invention, FIG. 4 is a top view of a vaporizer module body according to one embodiment of the present invention, and FIG. 5 is a diagram showing the flow direction of a sterilizing agent of a vaporizer module according to one embodiment of the present invention.

[0055] Referring to FIGS. 2 to 5, the vaporizer module (100) may include a main body (110), a supply port (120), a vaporization section (130), a vaporization chamber (140), a vacuum port (150), and a plate (160).

[0056] The main body (110) is formed as a hollow structure including a vaporization chamber (140), and a supply port (120) and a vacuum port (150) are disposed in the main body (110).

[0057] In addition, a sealing portion (111) is provided around the bottom surface and the top surface of the main body (110).

[0058] The supply port (120) can be connected to the sterilizing agent supply unit (400) of FIG. 1 and can receive a preset amount of sterilizing agent from the sterilizing agent supply unit (400).

[0059] The vaporization unit (130) vaporizes the sterilizing agent introduced into the main body (110) through the supply port (120) and includes a heater (131) and a heating block (132).

[0060] The heater (131) is installed on one side of the heating block (132) to heat the heating block (132) and can generate heat by receiving power from the outside. The heater (131) can be heated to 50 degrees Celsius to 130 degrees Celsius, for example, when the sterilizing agent is hydrogen peroxide.

[0061] Referring to FIGS. 2 and 3, a vaporization channel (112) through which a liquid sterilizing agent flows may be formed between the heating block (132) and the main body (110). The vaporization channel (112) may be formed by being recessed into one side of the main body (110) or one side of the heating block (132).

[0062] Referring to FIG. 3, an inlet (112a) connected to a supply port (120) is formed on one side of the vaporization channel (112), and an outlet (112b) connected to a vaporization chamber (140) is formed on the other side of the vaporization channel (112). The vaporization channel (112) may be formed as a bending channel that bends several times, for example, as shown in FIG. 3. Such a vaporization channel (112) provides a much longer path than a straight channel, allowing the liquid sterilizing agent to remain in the vaporization channel (112) sufficiently so that vaporization can be completely achieved. However, it is not limited to this, and various modifications may be possible.

[0063] The liquid sterilizing agent travels along the vaporization path (112), receives heat from the heater (131) to vaporize, and is discharged into the vaporization chamber (140) through the outlet (112b).

[0064] The vaporization chamber (140) is a space where the vaporized sterilizing agent discharged from the outlet (112b) of the vaporization unit (130) is primarily diffused, and the vaporization chamber (140) is connected to an exhaust path through the sterilization chamber (200) or the vacuum port (150).

[0065] The vaporization chamber (140) can be divided into a first vaporization chamber (141) on the side of the vaporization section (130) based on the plate (160), and a second vaporization chamber (142) in which the first flow path (143a, 143b) and the second flow path (144) are located.

[0066] One side of the first flow path (143a, 143b) is connected to the second vaporization chamber (142), and the other side is connected to the sterilization chamber (200). Additionally, the second flow path (144) is connected to the vacuum port (150).

[0067] In one embodiment, the first flow path (143a, 143b) and the second flow path (144) may be positioned on different sides of the second vaporization chamber (142). That is, the first flow path (143a, 143b) and the second flow path (144) may be positioned to face in different directions. For example, the first flow path (143a, 143b) may be positioned on both sides of the second vaporization chamber (142), and the second flow path (144) may be positioned on the other side of the second vaporization chamber (142).

[0068] The vacuum port (150) is connected to the vaporization chamber (140) and serves as a passage for forming a vacuum inside the vaporization chamber (140) by means of a pressure regulating unit (500). In the present invention, the interior of the vaporizer module (100) can be vacuumed more quickly and efficiently through the vacuum port (150).

[0069] The plate (160) allows the sterilizing agent that has not been vaporized in the vaporization section to remain sufficiently in the first vaporization chamber (141) while ensuring that the vaporization is completely achieved.

[0070] Meanwhile, if a vacuum port (150) is connected together with the vaporization chamber (140) as in the present invention, even though the vaporized sterilizing agent should be supplied to the sterilization chamber (200), problems may occur where the sterilizing agent leaks out into the vacuum port (150) or condenses and is lost inside the piping connected to the vacuum port (150).

[0071] Accordingly, the present invention arranges a plate (160) having one or more orifices formed within a vaporization chamber (140) to form a higher fluid flow resistance toward the vacuum port (150) than the fluid flow resistance toward the sterilization chamber (200).

[0072] The orifices of the plate (160) control the flow path of the vaporized sterilizing agent, particularly promoting flow into the first flow path (143a, 143b) and suppressing flow into the second flow path (144) to minimize loss of the sterilizing agent.

[0073] FIGS. 6 and FIGS. 7 illustrate a plate according to one embodiment of the present invention.

[0074] In one embodiment, referring to FIG. 6, the one or more orifices (161) may be positioned opposite the vacuum port (150) with respect to the center of the vaporization chamber (140). This positioning induces the vaporized sterilizing agent to flow through a path physically furthest from the vacuum port (150), thereby making direct outflow to the vacuum port (150) more difficult and enhancing flow toward the sterilization chamber (200).

[0075] In one embodiment, referring to FIG. 7(a), the one or more orifices (162a, 162b) may be positioned at the inlet side of the first flow path (143a, 143b). This maximizes flow efficiency and minimizes unnecessary flow resistance by allowing the vaporized sterilizing agent to flow directly and efficiently into the main flow path leading to the sterilization chamber (200).

[0076] In one embodiment, referring to FIG. 7(b), the one or more orifices (162a, 162b) may be formed to penetrate at an angle toward the inlet side of the first flow path (143a, 143b). Specifically, the orifices (162a) located on the first flow path (143a) side relative to the center of the vaporization chamber (140) are formed to penetrate at an angle toward the first flow path (143a) side, and the orifices (162b) located on the first flow path (143b) side are formed to penetrate at an angle toward the first flow path (143b) side. Since these orifices (162a, 162b) guide the flow direction of the vaporized sterilizing agent passing through them toward the first flow path (143a, 143b), the vaporized sterilizing agent can be efficiently introduced into the sterilization chamber (200) through the first flow path (143a, 143b).

[0077] Here, the fluid flow resistance of the second flow path (144) is formed to be higher than the fluid flow resistance of the first flow path (143a, 143b) by the plate (160). This difference in fluid flow resistance induces the vaporized sterilizing agent to preferentially flow into the first flow path (143a, 143b) toward the sterilization chamber (200), where the fluid resistance is relatively lower. This prevents the sterilizing agent from being lost to the outside of the system through the vacuum forming port (150) or from condensing inside the vacuum piping.

[0078] In this way, the present invention causes a difference in resistance by making the flow towards the sterilization chamber (200) through the orifice of the plate (160) smooth, while intentionally restricting the flow towards the vacuum port (150).

[0079] Meanwhile, the arrangement of the orifices of the plate (160) is not limited to the example described above, and various modifications are possible, such as adjusting at least one of the size, number, or position so that the fluid flow resistance of the vaporized sterilizing agent passing through the plate toward the first flow path is lower than the fluid flow resistance of the agent passing through the plate toward the second flow path.

[0080] FIG. 8 illustrates the flow direction of a sterilizing agent in a vaporizer module according to another embodiment of the present invention.

[0081] Referring to FIG. 8, the vaporizer module (100) may include a check valve (170) placed on a second circulation path (620) connected to a vacuum port (150). The check valve (170) is characterized by being closed by a pressure increase that occurs during the vaporization of the sterilizing agent. Specifically, when a liquid sterilizing agent is injected into the vaporization unit (130) and heated to start vaporization, the pressure inside the vaporization chamber (140) is temporarily increased by the vaporized sterilizing agent.

[0082] At this time, the check valve (170) automatically closes in response to this pressure increase, effectively preventing the vaporized sterilizing agent from flowing back toward the vacuum port (150) or being lost through the second circulation path (620). This is particularly effective in minimizing the loss of the sterilizing agent that may occur during the initial stages of vaporization.

[0083] Hereinafter, with reference to FIGS. 3, FIGS. 4 and FIGS. 8, the operation process of a vaporizer module according to an embodiment of the present invention is described.

[0084] First, a predetermined amount of liquid sterilizing agent (e.g., hydrogen peroxide) is introduced into the main body (110) through the supply port (120) from the sterilizing agent supply unit (400).

[0085] The introduced liquid sterilizing agent is heated and vaporized in the vaporization section (130). The vaporization section (130) includes a heater (131) and a heating block (132), and the heater (131) heats the heating block (132), and this heat is transferred to the liquid sterilizing agent flowing along the vaporization channel (112) formed between the heating block (132) and the main body (110), thereby vaporizing it. The vaporization channel (112) is formed, for example, as a curved channel that bends several times, so that the liquid sterilizing agent can remain in the vaporization channel (112) sufficiently and vaporize completely. The vaporized sterilizing agent is discharged into the vaporization chamber (140) through the outlet (112b) of the vaporization channel (112).

[0086] The vaporization chamber (140) is a space where the vaporized sterilizing agent discharged from the vaporization unit (130) is primarily diffused. A plate (160) is disposed within the vaporization chamber (140), and this plate (160) includes one or more orifices to control the flow path of the vaporized sterilizing agent. Specifically, the plate (160) forms the fluid flow resistance toward the vacuum port (150) side higher than the fluid flow resistance toward the sterilization chamber (200) side, thereby inducing the vaporized sterilizing agent to flow preferentially into the first flow path (143a, 143b) connected to the sterilization chamber (200). This prevents unnecessary loss of the sterilizing agent and maximizes sterilization efficiency.

[0087] The vacuum port (150) serves as a passage for forming a vacuum inside the vaporization chamber (140) by means of a pressure regulating unit (500). At this time, the check valve (170) placed on the second circulation path (620) connected to the vacuum port (150) automatically closes in response to the pressure increase that occurs when the sterilizing agent is vaporized, thereby effectively preventing the vaporized sterilizing agent from flowing back into or being lost to the vacuum port (150).

[0088] According to the vaporizer module and sterilization system including the same according to one embodiment of the present invention described above, a vacuum port is directly connected to the vaporizer module, enabling faster and more efficient vacuum formation inside the module.

[0089] In addition, the orifice of the plate increases fluid flow resistance in the direction of the vacuum port and lowers resistance in the direction of the sterilization chamber, thereby guiding the vaporized sterilizing agent mainly toward the sterilization chamber, which can prevent leakage through the vacuum port and condensation of the sterilizing agent within the vacuum port.

[0090] In addition, the check valve connected to the vacuum port closes automatically when the pressure rises during the vaporization of the sterilizing agent, so it can effectively prevent backflow and loss of the vaporized sterilizing agent.

[0091] The foregoing description of the present invention is for illustrative purposes only, and those skilled in the art will understand that other specific forms can be easily modified without altering the technical spirit or essential features of the present invention. Therefore, the embodiments described above should be understood as illustrative in all respects and not restrictive. For example, each component described as a single unit may be implemented in a distributed manner, and components described as distributed may likewise be implemented in a combined form.

[0092] The scope of the present invention is defined by the claims set forth below, and all modifications or variations derived from the meaning and scope of the claims and equivalent concepts thereof should be interpreted as being included within the scope of the present invention.

[0093] Meanwhile, the present invention is the result of the following problem.

[0094] Project ID: 2420020754

[0095] Sub-project number: 00275019

[0096] Ministry Name: Ministry of SMEs and Startups

[0097] Project Management (Specialized) Agency Name: Korea Technology Information Promotion Agency for SMEs

[0098] Research Project Name: SME Technology Innovation Development

[0099] Research Project Title: Development of Medical Devices Using Plasma-Based 3D Printing Manufacturing Processes

[0100] Project Executing Organization Name: Plasma Map

[0101] (Total) Research Period: July 17, 2023 – July 16, 2027

[0102] (Current) Research Period: 2025.01.01~2025.12.31 Explanation of the symbols

[0104] 1 Sterilization System 100 Carburetor Modules 200 sterilization chambers 300 plasma discharge section 400 Sterilizing Agent Supply Unit 500 pressure regulator 600 Circulating Euro section 700 filter section

Claims

Claim 1 A vaporizer module used in a sterilization system comprises: a main body; a supply port connected to the main body and into which a sterilizing agent is injected; a vaporization unit for vaporizing the sterilizing agent injected into the supply port; a vaporization chamber into which the sterilizing agent vaporized in the vaporization unit diffuses; and a vacuum port connected to the vaporization chamber and for forming a vacuum inside the vaporization chamber. and includes a plate disposed within the vaporization chamber and having one or more orifices formed therein through which the vaporized sterilizing agent passes, wherein the vaporization chamber includes a first flow path leading to the sterilization chamber of the sterilization system and a second flow path leading to the vacuum port, wherein the vaporization chamber is divided with respect to the plate into a first vaporization chamber on the side of the vaporization unit and a second vaporization chamber where the first flow path and the second flow path are located, wherein the first flow path and the second flow path are disposed on different sides of the second vaporization chamber and configured to face different directions, wherein the one or more orifices are disposed on the inlet side of the first flow path and are formed to penetrate obliquely toward the inlet side of the first flow path to guide the flow direction of the vaporized sterilizing agent toward the first flow path, wherein the fluid flow resistance of the second flow path is formed to be higher than the fluid flow resistance of the first flow path, and a check valve is disposed on the flow path connected to the vacuum port, and the check valve is formed by the pressure increase occurring when the sterilizing agent vaporizes A vaporizer module characterized by being closed. Claim 2 A sterilization system comprising: a vaporizer module according to claim 1; a sterilization chamber connected to the vaporizer module; a plasma discharge unit capable of plasma discharge upon receiving power; a sterilizing agent supply unit for supplying a sterilizing agent to the vaporizer module; a vacuum pump connected to a vacuum port of the sterilization chamber and the vaporizer module; and a circulation channel unit connecting an outlet of the sterilization chamber, the plasma discharge unit, and the vaporizer module; wherein the vaporized sterilizing agent is forcibly circulated within the circulation channel unit. Claim 3 delete Claim 4 delete Claim 5 delete Claim 6 delete Claim 7 delete Claim 8 delete Claim 9 delete

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