Apparatus for processing substrate and method of processing substrate

Abstract

A substrate processing device with increased processing speed and improved precision is provided. The substrate processing device includes: a stage that supports a substrate and transports the substrate in one direction along a first direction; a first head unit located on the stage and having a first width in a second direction perpendicular to the first direction; and a second head unit spaced apart from the first head unit in the first direction on the stage and having the first width in the second direction, wherein the first head unit discharges only a first liquid, and the second head unit discharges only a second liquid different from the first liquid.

Description

Technology Field

[0001] The present invention relates to a substrate processing apparatus and a substrate processing method. Background Technology

[0002] When performing a printing process (e.g., RGB patterning) on ​​a transparent substrate to manufacture display devices such as LCD panels, PDP panels, and LED panels, a printing process facility equipped with an inkjet head module may be used. The problem to be solved

[0003] The problem that the present invention aims to solve is to provide a substrate processing device with increased processing speed and improved precision.

[0004] Another problem that the present invention aims to solve is to provide a substrate processing method with increased processing speed and improved precision.

[0005] The problems of the present invention are not limited to those mentioned above, and other problems not mentioned will be clearly understood by those skilled in the art from the description below. means of solving the problem

[0006] One aspect of the substrate processing apparatus of the present invention for achieving the above objective comprises: a stage that supports a substrate and transports the substrate in one direction along a first direction; a first head unit located on the stage and having a first width in a second direction perpendicular to the first direction; and a second head unit spaced apart from the first head unit in the first direction on the stage and having the first width in the second direction, wherein the first head unit discharges only a first liquid and the second head unit discharges only a second liquid different from the first liquid.

[0007] The first chemical solution contains ink of a first color, and the second chemical solution contains ink of a second color different from the first color.

[0008] The above-described substrate processing device further comprises: a first head management unit located below the stage and overlapping with the first head unit; and a second head management unit located below the stage and overlapping with the second head unit, wherein the first head management unit includes a container that is opened and closed by a first sliding door and receives the first liquid medicine discharged from the first head unit, and the second head management unit includes a container that is opened and closed by a second sliding door and receives the second liquid medicine discharged from the second head unit.

[0009] The first head unit comprises a first nozzle section including a plurality of nozzles arranged along a second direction different from the first direction and discharging the first liquid medicine, a first spacer and a second spacer disposed on the side of the first nozzle section in the first direction, and a third spacer and a third spacer disposed on the side of the first nozzle section in the second direction.

[0010] The first head unit is movable in the first direction by the first spacer and the second spacer, and in the second direction by the third spacer and the fourth spacer.

[0011] The first head unit stores the first drug solution under a first condition, and the second head unit stores the second drug solution under a second condition different from the first condition.

[0012] One aspect of the substrate processing method of the present invention for achieving the above other objectives comprises placing a substrate on a stage, moving the stage along a first direction so that the substrate is aligned with a first head unit, discharging a first chemical solution having a first color onto the substrate using the first head unit, moving the stage along the first direction so that the substrate is aligned with a second head unit spaced apart from the first head unit in the first direction, and discharging a second chemical solution having a second color different from the first color onto the substrate using the second head unit, wherein the first head unit and the second head unit have the same width in a second direction perpendicular to the first direction.

[0013] It further includes discharging the first liquid medicine stored in the first head unit to a first head management unit that overlaps with the first head unit below the stage.

[0014] Discharging the first drug solution stored in the first head unit to a first head management unit overlapping with the first head unit below the stage includes opening a sliding door that opens and closes the first head management unit and discharging the first drug solution into a container included in the first head management unit.

[0015] Discharging the first drug solution onto the substrate using the first head unit includes discharging the first drug solution in a preset amount by a processor controlling the first head unit, and discharging the second drug solution onto the substrate using the second head unit includes discharging the second drug solution in a preset amount by the processor controlling the second head unit.

[0016] Specific details of other embodiments are included in the detailed description and drawings. Brief explanation of the drawing

[0017] FIG. 1 is a conceptual diagram for explaining a substrate processing apparatus according to one embodiment of the present invention. FIG. 2 is a drawing for explaining a head unit of a substrate processing device according to one embodiment of the present invention. FIGS. 3 to 5 are drawings for explaining the operation of a substrate processing device according to an embodiment of the present invention. FIG. 6 is a drawing for explaining a head unit of a substrate processing device according to one embodiment of the present invention. FIG. 7 is a diagram illustrating the operation of a substrate processing device according to one embodiment of the present invention. FIG. 8 is a drawing illustrating a substrate processing apparatus according to one embodiment of the present invention. Specific details for implementing the invention

[0018] Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings. The advantages and features of the present invention, and the methods for achieving them, will become clear by referring to the embodiments described below in detail together with the accompanying drawings. However, the present invention is not limited to the embodiments disclosed below but can be implemented in various different forms. These embodiments are provided merely to ensure that the disclosure of the present invention is complete and to fully inform those skilled in the art of the scope of the invention, and the present invention is defined only by the scope of the claims. Throughout the specification, the same reference numerals refer to the same components.

[0019] When elements or a layer are referred to as being "on" or "on" another element or layer, it includes not only being directly on top of the other element or layer but also cases where another layer or element is interposed in between. On the other hand, when an element is referred to as being "directly on" or "directly on," it indicates that no other element or layer is interposed in between.

[0020] Spatially relative terms such as "below," "beneath," "lower," "above," and "upper" may be used to facilitate the description of the relationship between one element or component and another, as illustrated in the drawings. Spatially relative terms should be understood as encompassing different orientations of the element during use or operation, in addition to the orientations illustrated in the drawings. For example, if an element illustrated in the drawings is flipped, the element described as "below" or "beneath" of another element may be placed "above" of that other element. Therefore, the exemplary term "below" may encompass both the lower and upper directions. Elements may also be oriented in other directions, and accordingly, spatially relative terms may be interpreted according to the orientation.

[0021] Although terms such as "first," "second," etc. are used to describe various elements, components, and / or sections, it goes without saying that these elements, components, and / or sections are not limited by these terms. These terms are used merely to distinguish one element, component, or section from another. Accordingly, it goes without saying that the first element, first component, or first section mentioned below may be a second element, second component, or second section within the technical scope of the present invention.

[0022] The terms used herein are for describing the embodiments and are not intended to limit the invention. In this specification, the singular form includes the plural form unless specifically stated otherwise in the text. As used herein, "comprises" and / or "comprising" do not exclude the presence or addition of one or more other components, steps, actions, and / or elements to the mentioned components, steps, actions, and / or elements.

[0023] Unless otherwise defined, all terms used in this specification (including technical and scientific terms) may be used in a meaning that is commonly understood by those skilled in the art to which the present invention pertains. Additionally, terms defined in commonly used dictionaries are not to be interpreted ideally or excessively unless explicitly and specifically defined otherwise.

[0024] Hereinafter, embodiments of the present invention will be described in detail with reference to the attached drawings. In describing with reference to the attached drawings, identical or corresponding components are given the same reference number regardless of the drawing symbols, and redundant descriptions thereof will be omitted.

[0025] FIG. 1 is a conceptual diagram for explaining a substrate processing apparatus according to an embodiment of the present invention. FIG. 2 is a drawing for explaining a head unit of a substrate processing apparatus according to an embodiment of the present invention.

[0026] Referring to FIG. 1, a substrate processing device (1) according to one embodiment may include a plurality of head units.

[0027] The substrate processing device (1) may include a first head unit (110), a second head unit (120), and a third head unit (130) spaced apart from each other in a first direction (X).

[0028] The first head unit (110) may include a first discharge unit (111) and a first liquid control unit (112). The first head unit (110) may discharge the first liquid.

[0029] The second head unit (120) may include a second discharge unit (121) and a second liquid control unit (122). The second head unit (120) may discharge the second liquid.

[0030] The third head unit (130) may include a third discharge unit (131) and a third liquid control unit (132). The third head unit (130) may discharge the third liquid.

[0031] That is, the first to third head units (110-130) each discharge different types of liquid medicine onto the substrate (W), and as the substrate (W) is transported along the first direction, the first to third liquid medicines are sequentially printed.

[0032] In the substrate processing device (1), the substrate (W) is transported along the first direction (X). The substrate (W) can be transported in only one direction along the first direction (X). For example, the substrate (W) can be transported from the first head unit (110) to the second head unit (120), but the substrate (W) cannot be transported from the second head unit (120) to the first head unit (110). That is, while the substrate (W) is transported along the first direction (X) during processing in the substrate processing device (1), it can overlap with the first to third head units (110-130) each only once.

[0033] The first to third head management units (210-230) may each overlap with the first to third head units (110-130). The first to third head management units (210-230) may be configured to clean, maintain, or manage the first to third head units (110-130). For example, the first head management unit (210) may include a container for receiving a first liquid that is temporarily discharged through the nozzle of the first head unit (110) to prevent the nozzle of the first head unit (110) from becoming clogged.

[0034] The second head unit (120) and the third head unit (130) may include substantially the same configuration as the first head unit (110). Accordingly, the first head unit (110) will be described in detail below as an example.

[0035] In FIG. 1, the substrate processing device (1) is shown as including three head units, but the embodiment is not limited thereto. The number of head units included in the substrate processing device (1) can be varied depending on the embodiment.

[0036] Referring to FIG. 2, the first head unit (110) includes a first discharge unit (111), a head circulation unit (1121), a head supply unit (1122), a liquid supply unit (1123), a circulation supply unit (1124), an intermediate body (1125), and an upper body (1126).

[0037] The first discharge unit (111) can discharge the first chemical solution to the outside. The first discharge unit (111) can discharge the first chemical solution to the outside of the first head unit (110) using a nozzle.

[0038] The head circulation unit (1121) can receive the first chemical solution from the first discharge unit (111). The head circulation unit (1121) can circulate the first chemical solution discharged by the first head unit (110) so that it does not solidify or precipitate metal particles or quantum dot materials contained in the first chemical solution.

[0039] The head supply unit (1122) can supply the first liquid medicine to the first discharge unit (111).

[0040] The liquid supply unit (1123) can supply the first liquid stored in the intermediate body (1125) to the head supply unit (1122).

[0041] The circulation supply unit (1124) can circulate the first drug solution stored in the intermediate body (1125). Specifically, the circulation supply unit (1124) can circulate the first drug solution so that it does not solidify or precipitate metal particles or quantum dot materials contained in the first drug solution while it is stored in the intermediate body (1125).

[0042] The intermediate body (1125) can store the first medicine provided by the first head unit (110). The intermediate body (1125) may include a container for storing the first medicine. The intermediate body (1125) may include a level sensor inside the container to determine the level of the first medicine filled inside the container for storing the first medicine in real time.

[0043] The upper body (1126) can control the pressure for the circulation of the first chemical solution. Specifically, the upper body (1126) may include a pressure control unit that provides pressure via pneumatic piping for the circulation of the first chemical solution.

[0044] FIGS. 3 to 5 are drawings for explaining the operation of a substrate processing device according to an embodiment of the present invention.

[0045] Referring to FIGS. 3 to 5, the substrate (W) is transported in a first direction (X). The substrate (W) is sequentially aligned with the first head unit (110), the second head unit (120), and the third head unit (130) along the first direction (X).

[0046] When the substrate (W) is aligned with the first head unit (110), the first discharge part (111) of the first head unit (110) discharges the first chemical solution onto the substrate (W). At this time, only the first chemical solution discharged by the first head unit (110) is printed on the substrate (W).

[0047] When the substrate (W) is aligned with the second head unit (120), the second discharge part (121) of the second head unit (120) discharges the second drug solution onto the substrate (W). At this time, only the second drug solution discharged by the second head unit (120) is printed on the substrate (W) along with the first drug solution discharged by the first head unit (110).

[0048] When the substrate (W) is aligned with the third head unit (130), the third discharge part (131) of the third head unit (130) discharges the third drug solution onto the substrate (W). Finally, the first to third drugs discharged by the first to second head units (110-130) are printed on the substrate (W).

[0049] The substrate (W) is transported in only one direction along the first direction (X), and the first to third head units (110-130) each discharge different types of first to third chemical solutions, thereby improving the processing speed of the substrate (W).

[0050] FIG. 6 is a drawing for explaining a head unit of a substrate processing device according to an embodiment of the present invention. FIG. 7 is a drawing for explaining the operation of a substrate processing device according to an embodiment of the present invention.

[0051] Referring to FIGS. 6 and 7, the first discharge unit (111) may include a first nozzle unit (11) for discharging a first liquid medicine. The first nozzle unit (11) is arranged along a second direction (Y).

[0052] The first discharge section (111) includes first to fourth spacers (S1-S4) surrounding the periphery of the first nozzle section (11). That is, the first discharge section (111) may include an extra space that does not discharge the first liquid medicine through the first nozzle section (11).

[0053] The first spacer (S1) and the second spacer (S2) are positioned on the side of the first nozzle part (11) in the second direction (Y). The third spacer (S3) and the fourth spacer (S4) are positioned on the side of the first nozzle part (11) in the first direction (X).

[0054] Likewise, the second discharge section (121) and the third discharge section (131) include a spacer surrounding the second nozzle section and the third nozzle section.

[0055] The first head unit (110) can be positioned by the first to fourth spacers (S1-S4) of the first discharge unit (111). Specifically, the first head unit (110) can be positioned in the second direction (Y) by the width of the first spacer (S1) in the second direction (Y). Likewise, the first head unit (110) can be positioned in the second direction (Y) by the width of the second spacer (S2) in the second direction (Y).

[0056] Additionally, the first head unit (110) can be repositioned in the first direction (X) by the width of the third spacer (S3) in the first direction (X). Likewise, the first head unit (110) can be repositioned in the first direction (X) by the width of the fourth spacer (S4) in the first direction (X).

[0057] If the substrate (W) is not aligned with the first head unit (110), the first head unit (110) is positioned by the first to fourth spacers (S1-S4) of the first discharge unit (111) so that the first liquid medicine can be precisely discharged to a target point on the substrate (W).

[0058] In FIG. 6, the first nozzle section (11) is shown as being arranged alternately up and down with respect to a centerline extending in the first direction (X), but the embodiment is not limited thereto. The arrangement of the first nozzle section (11) in the first discharge section (111) can be varied in many ways depending on the embodiment.

[0059] With reference to FIG. 6, the first discharge section (111) of the first head unit (110) has been described, but this can be applied in the same way to the second discharge section (121) of the second head unit (120) and the third discharge section (131) of the third head unit (130).

[0060] Referring to FIG. 7, the second head unit (120) can be positioned in the second direction by the spacer positioned on one side of the second nozzle part. For example, the second head unit (120) can be positioned in the second direction by the right spacer of the second nozzle part.

[0061] FIG. 8 is a drawing illustrating a substrate processing apparatus according to one embodiment of the present invention.

[0062] Referring to FIG. 8, the substrate processing device (1) may include a first head unit to a third head unit (110-130), a first head management unit to a third head management unit (210-230), a first gantry to a third gantry (310-330), a stage (410), a gripper (420), a substrate transfer rail (430), and a processor (500).

[0063] The first to third head units (110-130) may be spaced apart from each other along the first direction (X) in which the substrate (W) is transported. The first to third head units (110-130) may each discharge the first to third drug solution onto the substrate (W).

[0064] The first to third head units (110-130) are spaced apart along the first direction (X) and may have the same width in the second direction (Y).

[0065] In some embodiments, the first to third head units (110-130) may each discharge only one type of liquid medicine. For example, the first head unit (110) may discharge only the first liquid medicine. The second head unit (120) may discharge only the second liquid medicine. The third head unit (130) may discharge only the third liquid medicine.

[0066] The first to third chemical solutions, each discharged by the first to third head units (110-130), may contain ink of a different color. For example, the first chemical solution may contain ink of a first color. The second chemical solution may contain ink of a second color. The third chemical solution may contain ink of a third color.

[0067] The first to third head units (110-130) each discharge a liquid medicine of a preset volume, and when the liquid medicine of a preset volume is discharged onto the substrate (W), the stage (410) supporting the substrate (W) can transport the substrate (W) so as to be aligned with the subsequent head units.

[0068] By having the first to third head units (110-130) each discharge different types of liquid medicines, the first to third head units (110-130) can each discharge different types of liquid medicines under different conditions. That is, the first to third liquid medicines stored in the first to third head units (110, 120, 130) and supplied to the first to third discharge units (111-131) can each be stored under different conditions. For example, the first head unit (110) can store the first liquid medicine at a first temperature, while the second head unit (120) can store the second liquid medicine at a second temperature. In such cases, the characteristics of the liquid medicines can be preserved by storing the first to third liquid medicines, each having different characteristics, under conditions suitable for each characteristic.

[0069] The stage (410) can support the substrate (W). That is, the substrate (W) can be placed on the stage (410). The stage (410) can be connected to the substrate transfer rail (430) by a gripper (420). The stage (410) can transfer the substrate (W) so that the substrate (W) is aligned with the first to third head units (110-130).

[0070] The gripper (420) can hold the stage (410). The gripper (420) can connect the stage (410) and the substrate transfer rail (430) so that the stage (410) supporting the substrate (W) is mounted on the substrate transfer rail (430).

[0071] The substrate transfer rail (430) can be extended along the first direction (X). The substrate transfer rail (430) can guide the stage (410) supporting the substrate (W) to move.

[0072] The first head management unit (210) may be positioned below a stage (410) that supports a substrate (W) and a substrate transfer rail (430) on which the stage (410) is guided. The first head management unit (210) may be positioned to overlap with the first head unit (110). The first head management unit (210) may be positioned to overlap with the first gantry (310).

[0073] The first head management unit (210) can be opened and closed by the first sliding door (211). The first head management unit (210) may include a container containing an internal space. When the first sliding door (211) is opened, the first head management unit (210) can receive the first liquid medicine discharged from the first head unit (110).

[0074] Likewise, the second head management unit (220) and the third head management unit (230) may be positioned below a stage (410) that supports a substrate (W) and a substrate transfer rail (430) on which the stage (410) is guided. The second head management unit (220) and the third head management unit (230) may be positioned to overlap with the second head unit (120) and the third head unit (130), respectively. The second head management unit (220) and the third head management unit (230) may be positioned to overlap with the second gantry (320) and the third gantry (330), respectively.

[0075] The second head management unit (220) and the third head management unit (230) can be opened and closed by the second sliding door (221) and the third sliding door (231), respectively. The second head management unit (220) and the third head management unit (230) can each include a container containing an internal space. When the second sliding door (221) and the third sliding door (231) are each opened, the second head management unit (220) and the third head management unit (230) can each receive the second liquid medicine and the third liquid medicine discharged from the second head unit (120) and the third head unit (130), respectively.

[0076] Depending on the characteristics of the liquid, the first to third discharge sections (111-131) of the first to third head units (110-130) may become clogged. For example, if the liquid provided by the first to third head units (110-130) has high viscosity or contains metal particles or protonated liquids that may precipitate, it is required to prevent the first to third discharge sections (111-131) from becoming clogged.

[0077] In some embodiments, the first to third drug solutions remaining stored in the first to third head units (110-130) can be entirely discharged through the first to third discharge units (111-131). At this time, the remaining first to third drug solutions of the first to third head units (110-130) discharged from the first to third discharge units (111-131) can be received in the first to third head management units (210-230).

[0078] When the first to third head management units (210-230) are not in use, the first to third sliding doors (211-231) can be closed to close the first to third head management units (210-230).

[0079] The first to third gantry (310-330) may be positioned facing the stage (410) so that the first to third head units (110-130) can discharge the first to third drug solution on the stage (410) on which the substrate (W) is supported. The first to third gantry (310-330) may include a column portion and a flat portion on which the first to third head units (110-130) are positioned.

[0080] The first to third gantry (310-330) may be spaced apart along the first direction (X) in which the substrate (W) is transported. The first to third gantry (310-330) may be arranged to overlap with the first to third head management units (210-230).

[0081] The processor (500) can control the first to third head units (110-130). For example, the processor (500) can control the volume of the first to third drug solution dispensed by the first to third head units (110-130). Accordingly, the first to third head units (110-130) can dispense the first to third drug solution in an amount preset by the processor (500).

[0082] Although not illustrated, the substrate processing device (1) may include a camera that determines whether the substrate (W) is aligned with the head unit that dispenses the liquid medicine. The camera can determine whether the mark marked on the substrate (W) coincides with the center point of the camera's field of view (FOV), thereby determining whether the substrate (W) is correctly aligned with the first to third head units (110-130) that dispense the first to third liquid medicines.

[0083] If it is determined through the camera that the substrate (W) is misaligned with any one of the first to third head units (110-130), the position of the head unit that is not aligned with the substrate (W) can be moved. Specifically, as described with reference to FIGS. 6 and 7, the position of the head unit can be adjusted by the size of the spacer placed around the discharge portion of the head unit.

[0084] Although embodiments of the present invention have been described above with reference to the attached drawings, those skilled in the art will understand that the present invention may be implemented in other specific forms without changing its technical concept or essential features. Therefore, the embodiments described above should be understood as illustrative in all respects and not restrictive. Explanation of the symbols

[0085] 110: 1st Head Unit 120: 2nd Head Unit 210: 1st Head Management Unit 220: 2nd Head Management Unit

Claims

Claim 1 A stage for supporting a substrate and transporting the substrate in a one-way direction along a first direction; a first head unit positioned on the stage and having a first width in a second direction perpendicular to the first direction; a second head unit spaced apart from the first head unit in the first direction on the stage and having the first width in the second direction; and includes a camera that determines whether a mark marked on the substrate coincides with the center point of the FOV (Field Of View); the first head unit discharges only a first liquid medicine, and the second head unit discharges only a second liquid medicine different from the first liquid medicine; the first head unit includes a first nozzle section comprising a plurality of nozzles that discharge the first liquid medicine and are arranged along a second direction different from the first direction; a first spacer and a second spacer disposed on the side of the first nozzle section in the first direction; and a third spacer and a fourth spacer disposed on the side of the first nozzle section in the second direction; is movable by the amount of the first spacer and the second spacer in the first direction and is movable by the amount of the third spacer and the fourth spacer in the second direction; the camera determines whether the substrate is aligned with the first head unit; and if the first head unit determines through the camera that the substrate and the first head unit are misaligned, the first A substrate processing device in which the position is adjusted by the size of the spacer to the fourth spacer. Claim 2 A substrate processing apparatus according to claim 1, wherein the first chemical solution comprises an ink of a first color, and the second chemical solution comprises an ink of a second color different from the first color. Claim 3 A substrate processing apparatus according to claim 1, further comprising: a first head management unit located below the stage and overlapping with the first head unit; and a second head management unit located below the stage and overlapping with the second head unit, wherein the first head management unit includes a container that is opened and closed by a first sliding door and receives the first liquid medicine discharged from the first head unit, and the second head management unit includes a container that is opened and closed by a second sliding door and receives the second liquid medicine discharged from the second head unit. Claim 4 delete Claim 5 delete Claim 6 A substrate processing apparatus according to claim 1, wherein the first head unit stores the first drug solution under a first condition, and the second head unit stores the second drug solution under a second condition different from the first condition. Claim 7 The method comprises placing a substrate on a stage, moving the stage along a first direction to align the substrate with a first head unit, discharging a first liquid medicine having a first color onto the substrate using the first head unit, moving the stage along the first direction to align the substrate with a second head unit spaced apart from the first head unit in the first direction, and discharging a second liquid medicine having a second color different from the first color onto the substrate using the second head unit, wherein the first head unit and the second head unit have the same width in a second direction perpendicular to the first direction, and the first head unit includes a first nozzle section comprising a plurality of nozzles arranged along the second direction and discharging the first liquid medicine, a first spacer and a second spacer disposed on the side of the first nozzle section in the first direction, and a third spacer and a fourth spacer disposed on the side of the first nozzle section in the second direction, and wherein the first spacer and the second A substrate processing method that is movable by the amount of a spacer, is movable by the amount of the third spacer and the fourth spacer in the second direction, determines using a camera whether the center point of the FOV (Field Of View) coincides with the mark marked on the substrate, determines using the camera whether the substrate is aligned with the first head unit, and if it is determined that the substrate and the first head unit are misaligned, adjusts the position of the first head unit by the size of the first spacer to the fourth spacer. Claim 8 A substrate processing method according to claim 7, further comprising discharging the first liquid medicine stored in the first head unit to a first head management unit overlapping with the first head unit below the stage. Claim 9 A substrate processing method according to claim 8, wherein discharging the first drug solution stored in the first head unit to a first head management unit overlapping with the first head unit below the stage comprises opening a sliding door that opens and closes the first head management unit and discharging the first drug solution into a container included in the first head management unit. Claim 10 A substrate processing method according to claim 7, wherein discharging the first drug solution onto the substrate using the first head unit comprises discharging the first drug solution in a preset amount by a processor controlling the first head unit, and discharging the second drug solution onto the substrate using the second head unit comprises discharging the second drug solution in a preset amount by the processor controlling the second head unit.

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