Dehumidifying apparatus

Abstract

A dehumidification device is provided for supplying dehumidified air to an EFEM (Equipment Front End Module). The dehumidification device comprises a housing having an internal space, a dehumidification rotor disposed inside the housing that dehumidifies passing air while rotating around a vertical axis and discharges it downward, and a plurality of fans disposed on the side of the dehumidification rotor that suck in outside air and discharge it into the interior of the housing; and the outside air discharged from the plurality of fans is supplied to the dehumidification rotor through the internal space of the housing.

Description

Technology Field

[0001] The present invention relates to a dehumidification device, and more specifically, to a dehumidification device capable of implementing a slim structure by arranging a plurality of fans on the side of a dehumidification rotor. Background Technology

[0002] As the miniaturization of semiconductor manufacturing processes progresses, precise control of the process environment is required, and in particular, humidity control of the Equipment Front End Module (EFEM), where wafer transport and loading take place, is becoming important. Conventional EFEMs were equipped with an Equipment Filter Unit (EFU) that filters external air and supplies it into the index chamber, but they could only manage cleanliness through the filter and could not provide a humidity control function.

[0003] Accordingly, there have been attempts to add a dehumidification device using a rotary dehumidification rotor to the EFEM. The dehumidification device can be implemented by installing it additionally on top of the EFEM or by removing the existing EFU and installing the dehumidification device in that location. However, conventional dehumidification devices adopt a vertical stacking structure in which a blower is placed on top of the dehumidification rotor, which has the problem of increasing the overall height. In particular, in the case of an intermediate inlet type structure where the existing EFU is removed and the dehumidification device is installed in that space, there was a limitation in applying a dehumidification device with a tall vertical stacking structure because the installable height is limited by the thickness of the EFU.

[0004] Furthermore, in conventional vertical stacking structures, the blower is positioned at the upper center of the dehumidification rotor to directly draw in air; consequently, the blower itself blocks a significant portion of the airflow path, leading to increased airflow resistance and pressure loss. Using a high-output blower to overcome this airflow resistance resulted in increased power consumption and greater noise and vibration. Moreover, the blockage of the airflow path by the blower caused uneven distribution of air supplied to the dehumidification rotor, which in turn reduced dehumidification efficiency.

[0005] Therefore, there is a need to develop a dehumidification device that has a slim structure, is applicable to various installation environments, and can improve dehumidification performance through efficient airflow distribution. The problem to be solved

[0006] The technical problem that the present invention aims to solve is to provide a dehumidification device having a slim structure that can be applied to various installation environments.

[0007] Another technical problem that the present invention aims to solve is to provide a dehumidification device capable of minimizing airflow resistance by efficiently utilizing the internal space of the housing and supplying uniform air to the dehumidification rotor.

[0008] Another technical problem that the present invention aims to solve is to provide a dehumidification device capable of achieving excellent dehumidification performance while reducing power consumption.

[0009] Another technical problem that the present invention aims to solve is to provide a dehumidification device having a modular structure that is easy to maintain. means of solving the problem

[0010] According to one embodiment of the present invention, a dehumidification device for supplying dehumidified air to an Equipment Front End Module (EFEM) may be provided, comprising: a housing having an internal space; a dehumidification rotor disposed inside the housing and dehumidifying air passing through while rotating around a vertical axis and discharging it downward; and a plurality of fans disposed on the side of the dehumidification rotor and sucking in outside air and discharging it into the interior of the housing; wherein the outside air discharged from the plurality of fans is supplied to the dehumidification rotor through the internal space of the housing.

[0011] A dehumidification device may be provided, further comprising a pair of cassettes disposed respectively at the upper and lower portions of the dehumidification rotor and having protruding partition walls to partition the space through which air flows in and out of the dehumidification rotor, wherein the internal space of the housing includes a side space formed between the outer surface of the dehumidification rotor and the inner wall of the housing, and an upper space formed at the upper portion of the upper cassette among the pair of cassettes.

[0012] The outside air discharged from the plurality of fans may include a first airflow that is directly introduced into the upper part of the dehumidification rotor through the upper space of the dehumidification rotor.

[0013] The outside air discharged from the plurality of fans may include a second airflow that rises while circulating through the side space of the dehumidification rotor and then flows into the upper part of the dehumidification rotor.

[0014] The flow direction of the outside air discharged from the plurality of fans and the flow direction of the dehumidifying air discharged downward from the dehumidifying rotor may be perpendicular to each other.

[0015] The outside air discharged from the plurality of fans can be uniformly supplied to the dehumidification rotor while circulating through the internal space of the housing.

[0016] The above plurality of fans can discharge air in a direction perpendicular to the rotation axis of the dehumidification rotor.

[0017] The above plurality of fans can be arranged in a line along the horizontal direction.

[0018] The above horizontal direction may be the depth direction of the EFEM.

[0019] The above multiple fans may be axial fans.

[0020] The above dehumidification device further includes a controller that controls the plurality of fans; and the plurality of fans and the controller may be modularized into a single fan assembly and replaceable.

[0021] The exemplary embodiments above and other exemplary embodiments will be explained or clarified by the detailed description that follows regarding exemplary embodiments to be read in conjunction with the accompanying drawings. Effects of the invention

[0022] The disclosed technology may have the following effects. However, this does not mean that a specific embodiment must include all of the following effects or only the following effects; therefore, the scope of the rights of the disclosed technology should not be understood as being limited by this.

[0023] According to one embodiment of the present invention, by arranging a plurality of fans on the side of the dehumidification rotor, the overall height can be significantly reduced compared to a conventional vertical stacked structure, thereby enabling the realization of a slim structure that allows the dehumidification device to be easily installed in the installation space of an existing fan filter unit (EFU).

[0024] According to another embodiment of the present invention, outside air discharged from a plurality of fans is supplied to a dehumidification rotor while circulating through the internal space of the housing, thereby minimizing airflow resistance and pressure loss that occurred when a conventional blower blocked the flow path, and enabling uniform air supply over the entire area of ​​the dehumidification rotor, so that dehumidification efficiency can be improved.

[0025] According to another embodiment of the present invention, by efficiently utilizing the side and upper spaces inside the housing to disperse the airflow and lower the wind speed, excellent dehumidification performance can be achieved without a high-output blower, thereby reducing power consumption and noise and vibration.

[0026] According to another embodiment of the present invention, by modularizing a plurality of fans and a controller into a single fan assembly, rapid replacement is possible during maintenance and the assembly process is simplified, thereby improving productivity and maintenance convenience.

[0027] The foregoing disclosure does not constitute a complete list of all aspects of the present invention. It should be understood that the present invention includes all methods, apparatuses, and systems that are feasible from all appropriate combinations of the various aspects disclosed in the following detailed description and claims, as well as the matters summarized above. Furthermore, effects that can be obtained or predicted by embodiments of the present invention are to be disclosed directly or implicitly in the detailed description of the embodiments of the present invention. For example, various effects predicted according to embodiments of the present invention will be disclosed in the detailed description that follows. Brief explanation of the drawing

[0028] Aspects, features, and advantages of specific embodiments of the present disclosure will become more apparent from the following description with reference to the accompanying drawings. FIG. 1 is a perspective view of a dehumidification device according to the prior art. FIG. 2 is a perspective view showing the structure of an EFEM to which a dehumidification device according to one embodiment of the present invention is applied. FIG. 3 is a perspective view of a dehumidification device according to one embodiment of the present invention. FIG. 4 is a perspective view of a dehumidification device with the upper cover and front cover disassembled from FIG. 3. Figure 5 is an exploded perspective view of the dehumidification rotor and cassette. FIG. 6 is a side view of a dehumidification device according to one embodiment of the present invention. FIG. 7 is a perspective view of a fan assembly according to one embodiment of the present invention. Specific details for implementing the invention

[0029] The terms used in this specification will be briefly explained, and the invention will be described in detail.

[0030] The terms used in the embodiments of the present invention have been selected based on currently widely used general terms whenever possible, taking into account their functions within the invention; however, these terms may vary depending on the intent of those skilled in the art, case law, the emergence of new technologies, etc. Additionally, in specific cases, terms have been arbitrarily selected by the applicant, and in such cases, their meanings will be described in detail in the relevant description of the invention. Therefore, the terms used in the present invention should be defined not merely by their names, but based on their meanings and the overall content of the invention.

[0031] Embodiments of the present invention may be subject to various modifications and may have various forms; therefore, specific embodiments are illustrated in the drawings and described in detail in the detailed description. However, this is not intended to limit the scope of specific embodiments, and it should be understood that the scope includes all modifications, equivalents, and substitutions that fall within the spirit and scope of the disclosed art. In describing the embodiments, detailed descriptions of related prior art are omitted if it is determined that such detailed descriptions may obscure the essence.

[0032] Terms such as "first," "second," etc., may be used to describe various components, but components should not be limited by these terms. Terms are used solely for the purpose of distinguishing one component from another.

[0033] The singular expression includes the plural expression unless the context clearly indicates otherwise. In this application, terms such as "comprising" or "consisting of" are intended to specify the existence of the features, numbers, steps, actions, components, parts, or combinations thereof described in the specification, and should be understood as not precluding the existence or addition of one or more other features, numbers, steps, actions, components, parts, or combinations thereof.

[0034] Embodiments of the present invention are described below with reference to the attached drawings so that those skilled in the art can easily implement them. However, the present invention may be embodied in various different forms and is not limited to the embodiments described herein. Furthermore, in order to clearly explain the present invention in the drawings, parts unrelated to the explanation have been omitted, and similar parts throughout the specification are denoted by similar reference numerals.

[0035] FIG. 1 is a perspective view of a dehumidification device according to the prior art.

[0036] Referring to FIG. 1, a conventional dehumidification device (10') includes a housing (20'), a dehumidification rotor (30') disposed inside the housing (20'), and a centrifugal fan (40') disposed above the dehumidification rotor (30').

[0037] A conventional dehumidification device (10') adopts a vertical stacking structure in which a centrifugal fan (40') is located at the upper center of a dehumidification rotor (30'). The centrifugal fan (40') can draw in air in the axial direction from the top and then discharge it in the radial direction. The discharged air can pass through the inside of a housing (20') and flow into the dehumidification rotor (30'). In this structure, the centrifugal fan (40') itself blocks a significant portion of the air passage, which causes problems such as increased airflow resistance and pressure loss.

[0038] In addition, as the centrifugal fan (40') is positioned above the dehumidification rotor (30'), the overall height increases, and there is a limitation in applying a vertical stacked dehumidification device because the height at which it can be installed is limited, especially when installing a dehumidification device in the existing fan filter unit (EFU) space of the EFEM.

[0039] Furthermore, there is a problem in that the distribution of air supplied to the dehumidification rotor (30') becomes uneven because the centrifugal fan (40') blocks the airflow path, thereby reducing dehumidification efficiency. If a high-output centrifugal fan (40') is used to overcome this airflow resistance and unevenness, additional problems arise, such as increased power consumption and increased noise and vibration.

[0040] Therefore, there is a need to develop a new dehumidification device that can improve dehumidification performance through efficient airflow distribution while having a slim structure.

[0041] FIG. 2 is a perspective view showing the structure of an EFEM to which a dehumidification device according to one embodiment of the present invention is applied.

[0042] Referring to FIG. 2, the EFEM (10) may include a control unit (20) in which electrical components for process control are housed, a fan filter unit mounting unit (30) provided at the bottom of the control unit (20), and an index chamber (40) provided at the bottom of the fan filter unit mounting unit (30).

[0043] The index chamber (40) may be a space for transporting wafers between the load port and the process chamber. A wafer transport robot, an alignment stage, a FOUP (Front Opening Unified Pod) loader, etc., may be placed in the index chamber (40). As the semiconductor process becomes more miniaturized, humidity control inside the index chamber (40) is becoming important. The present invention can be configured to supply dehumidified air to the index chamber (40) without significantly changing the structure of the existing EFEM (10).

[0044] The fan filter unit mounting portion (30) may provide a fan filter unit mounting space (30a). Conventionally, a fan filter unit (50) including a housing (51), an intake fan (52), and a filter (54) is mounted in this space (30a). The intake fan (52) of the fan filter unit (50) may typically be provided as a pair. The intake fan (52) may be positioned on the upper inner side of the housing (51) to draw in external air and send it downward. The filter (54) may be positioned on the lower side of the housing (51) spaced apart from the intake fan (52). The filter (54) can filter the air drawn in by the intake fan (52) and supply it to the index chamber (40).

[0045] In one embodiment of the present invention, the existing fan filter unit (50) can be removed and a dehumidification device (500) can be installed in the fan filter unit mounting space (30a). Since the fan filter unit mounting space (30a) is formed to correspond to the size of the fan filter unit (50), it may have a limited space in the height direction (Z-axis direction). Therefore, in order to install the dehumidification device (500) in this space (30a), a slim structure with a significantly lower height compared to a conventional vertical stacked dehumidification device is required.

[0046] The dehumidification device (500) of the present invention adopts a structure in which a plurality of fans (530) are arranged on the side of the dehumidification rotor (520), so that it can be easily mounted even within the height constraints of the fan filter unit mounting space (30a). Through this configuration, dehumidified air can be supplied to the index chamber (40) while utilizing the mounting space (30a) of the fan filter unit mounting part (30) as is.

[0047] That is, the present invention has the advantage of being able to add a dehumidification function without redesigning the EFEM (10) itself. This is particularly useful when you want to add a dehumidification function to an already installed EFEM (10).

[0048] FIG. 2 illustrates an intermediate inlet type structure in which a dehumidification device (500) is placed in the mounting space (30a) of the fan filter unit mounting part (30), but the present invention is not limited thereto. For example, the dehumidification device (500) of the present invention can be similarly applied to an upper mounting type structure in which the dehumidification device (500) is placed on the upper part of the control unit (20). In this way, the present invention can have the advantage of being able to flexibly respond to various design forms of EFEM.

[0049] Hereinafter, directional terms used in this specification are defined. Based on the coordinate axes illustrated in FIG. 2, the 'width direction of the EFEM' may refer to the X-axis direction, the 'depth direction of the EFEM' to the Y-axis direction, and the 'height direction of the EFEM' to the Z-axis direction. The 'front of the EFEM' may refer to the +Y direction, and the 'rear of the EFEM' to the -Y direction. 'Upper' and 'lower' may indicate relative positions based on the Z-axis direction. However, these directional terms may be used to aid in understanding the present invention. The scope of the present invention is not limited to a specific direction.

[0050] FIG. 3 is a perspective view of a dehumidification device according to one embodiment of the present invention.

[0051] Referring to FIG. 3, a dehumidification device (500) according to one embodiment of the present invention may include a housing (510) and a plurality of fans (530) disposed on the side of the housing (510).

[0052] The housing (510) can form the outer shape of the dehumidification device (500). The housing (510) can provide a space for accommodating various components for dehumidification inside. The housing (510) may include a front cover (511), a side cover (512), and a top cover (513). The front cover (511) may form the front of the housing (510). The side covers (512) may form both sides of the housing (510). The side covers (512) may be provided as a pair and arranged opposite each other in the X-axis direction. The top cover (513) may form the top of the housing (510). The housing (510) may further include a rear surface facing the front cover (511). The bottom of the housing (510) is open so that dehumidified air can be discharged.

[0053] Multiple fans (530) may be placed on the side cover (512) of the housing (510). Multiple fans (530) may be arranged in a line along the horizontal direction (Y-axis direction). In one embodiment, multiple fans (530) may be arranged in a matrix form or distributed on multiple sides of the housing (510). In the embodiment illustrated in FIG. 3, five fans are placed, but the number of fans is not limited thereto and may be changed according to design requirements.

[0054] Multiple fans (530) can draw in outside air and discharge it into the interior of the housing (510). Multiple fans (530) can discharge air in a horizontal direction (-X direction). This may correspond to a direction perpendicular to the rotation axis (Z-axis) of the dehumidification rotor (520). By having multiple fans (530) positioned on the side of the dehumidification rotor (520) to discharge air in a horizontal direction, the overall height of the dehumidification device (500) can be significantly reduced compared to the vertical stacking structure of the prior art.

[0055] The dehumidification device (500) can discharge dehumidified air downward (-Z direction) through the lower part of the housing (510). The flow direction of the outside air discharged from the plurality of fans (530) and the flow direction of the dehumidified air discharged from the dehumidification device (500) can be perpendicular to each other. Through this structure, the internal space of the housing (510) can be efficiently utilized to circulate the airflow.

[0056] The horizontal direction in which multiple fans (530) are arranged in a line may correspond to the depth direction (Y-axis direction) of the EFEM.

[0057] The dehumidification device (500) can be mounted in the fan filter unit mounting space (30a) of the EFEM (10). A filter (54) can be connected to the lower part of the dehumidification device (500). The filter (54) can filter the dehumidified air discharged from the dehumidification device (500). An opening can be formed between the filter (54) and the index chamber (40) to allow air to communicate. The dehumidified air discharged from the dehumidification device (500) and passed through the filter (54) can finally flow into the index chamber (40) through the opening. Through this, the humidity inside the index chamber (40) can be effectively controlled.

[0058] In one embodiment, the filter (54) may be a recycled filter from an existing fan filter unit (50). In another embodiment, the dehumidification device (500) may be integrally formed with the filter (54). In yet another embodiment, a buffer frame may be placed between the dehumidification device (500) and the filter (54). The buffer frame may be manufactured to correspond to the size of the filter (54) and may serve as an interface between the dehumidification device (500) and the filter (54).

[0059] In one embodiment, multiple dehumidification devices (500) may be installed depending on the filter size of the EFEM. For example, if the width of the filter is large, two or more dehumidification devices (500) may be arranged side by side along the width direction (X-axis direction) of the EFEM. In this case, each dehumidification device (500) may operate independently or be integratedly controlled.

[0060] FIG. 4 is a perspective view of a dehumidification device with the upper cover and front cover disassembled from FIG. 3. FIG. 5 is an disassembled perspective view of a dehumidification rotor and a cassette. FIG. 6 is a side view of a dehumidification device according to an embodiment of the present invention.

[0061] Referring to FIGS. 4 and 5, the dehumidification device (500) may include a dehumidification rotor (520) disposed inside a housing (510), a plurality of fans (530), a controller (540), an upper cassette (600), and a lower cassette (700).

[0062] The dehumidifying rotor (520) can be placed inside the housing (510). The dehumidifying rotor (520) can rotate around a vertical axis (Z-axis). The dehumidifying rotor (520) can dehumidify the air passing through it. The dehumidifying rotor (520) can discharge the dehumidified air downward. In one embodiment, the dehumidifying rotor (520) may have a honeycomb structure formed of a moisture-absorbing material such as silica gel or zeolite.

[0063] Referring to FIG. 5, the upper cassette (600) may be placed on the upper part of the dehumidification rotor (520). The lower cassette (700) may be placed on the lower part of the dehumidification rotor (520). The upper cassette (600) and the lower cassette (700) may partition the space through which air flows in and out of the dehumidification rotor (520). The upper cassette (600) and the lower cassette (700) may each have protruding partition walls (610, 710). The partition walls (610, 710) may divide the area of ​​the dehumidification rotor (520) into a processing area, a regeneration area, and a cooling area.

[0064] A plurality of openings (not shown) may be formed in the upper cassette (600). The plurality of openings may be arranged along the outer surface of the dehumidifying rotor (520). The plurality of openings may connect the side space (S1) and the upper space (S2). In one embodiment, the plurality of openings may be distributed along the entire outer surface of the dehumidifying rotor (520).

[0065] A packing (not shown) may be placed on the lower surface of the lower cassette (700). The packing may seal the side space (S1) and the lower part of the dehumidifying rotor (520). The packing may prevent air from the side space (S1) from flowing directly into the lower part of the dehumidifying rotor (520). This allows the air from the side space (S1) to flow only into the upper part of the dehumidifying rotor (520) through the opening of the upper cassette (600).

[0066] Referring to FIG. 6, the internal space of the housing (510) may include a side space (S1) and an upper space (S2). The side space (S1) may be formed between the outer surface of the dehumidifying rotor (520) and the inner wall of the housing (510). The side space (S1) may be formed at a height between the upper cassette (600) and the lower cassette (700). The side space (S1) may be a space surrounding the side of the dehumidifying rotor (520). The upper space (S2) may be formed on the upper part of the upper cassette (600). The upper space (S2) may be a space formed on the upper part of the dehumidifying rotor (520).

[0067] A plurality of fans (530) may be positioned on the side of the dehumidification rotor (520). Outside air discharged from the plurality of fans (530) may be supplied to the dehumidification rotor (520) through the internal space of the housing (510). Specifically, the outside air discharged from the plurality of fans (530) may form a first airflow (A1) and a second airflow (A2).

[0068] The first airflow (A1) can be directly introduced into the upper part of the dehumidification rotor (520) through the upper space (S2). The first airflow (A1) can be discharged horizontally from a plurality of fans (530) and then introduced into the upper part of the dehumidification rotor (520) via the upper space (S2).

[0069] The second airflow (A2) can circulate through the side space (S1), rise, and then enter the upper part of the dehumidification rotor (520). The second airflow (A2) can be discharged from a plurality of fans (530) and then enter the lower part of the side space (S1). The second airflow (A2) can circulate within the side space (S1). Due to the bottom packing of the lower cassette (700), the second airflow (A2) may not be able to directly enter the lower part of the side space (S1) and may rise. The rising second airflow (A2) can pass through the opening of the upper cassette (600) and enter the upper space (S2). The second airflow (A2) can finally enter the upper part of the dehumidification rotor (520) from the upper space (S2).

[0070] The outside air discharged from the multiple fans (530) can be uniformly supplied to the dehumidifying rotor (520) while circulating through the side space (S1) and upper space (S2) inside the housing (510).

[0071] The side space (S1) can provide a space where air discharged from multiple fans (530) is mixed. The air circulating through the side space (S1) can serve to cool components such as motors and controllers placed inside the housing (510). A packing is placed on the lower surface of the lower cassette (700) so that the air in the side space (S1) can be guided to flow only into the upper part of the dehumidification rotor (520).

[0072] Since multiple fans (530) are positioned on the side rather than the top of the dehumidification rotor (520), the problem of the blower blocking the airflow path, as in the prior art, does not occur. Additionally, since the airflow can be dispersed by utilizing the large space inside the housing (510), the wind speed can be lowered and pressure loss can be minimized. Through this, uniform air supply is possible over the entire area of ​​the dehumidification rotor (520), and dehumidification efficiency can be improved.

[0073] The dehumidified air passing through the dehumidification rotor (520) can be discharged downward through the lower part of the housing (510). The flow direction (horizontal direction) of the outside air discharged from the plurality of fans (530) and the flow direction (vertical downward) of the dehumidified air discharged from the dehumidification rotor (520) can be perpendicular to each other.

[0074] FIG. 7 is a perspective view of a fan assembly according to one embodiment of the present invention.

[0075] Referring to FIG. 7, the fan assembly (550) may include a plurality of fans (530), a controller (540), a support frame (551), and a support member (552).

[0076] Multiple fans (530) may be arranged in a row on a support frame (551). The support frame (551) may form a skeletal structure that supports multiple fans (530). The support frame (551) may fix the position of multiple fans (530) and provide rigidity to the entire fan assembly (550). The support frame (551) may be formed of a metal material or a synthetic resin material having rigidity.

[0077] Multiple fans (530) may be axial fans. Axial fans can discharge air in the same direction as the intake direction. Multiple fans (530) can discharge air in a direction perpendicular to the rotation axis of the dehumidification rotor (520). In the embodiment illustrated in FIG. 7, five fans are arranged, but the number of fans is not limited thereto and can be changed according to design requirements.

[0078] The controller (540) can control multiple fans (530). The controller (540) can control the rotational speed of multiple fans (530). The controller (540) can adjust the amount of air supplied to the dehumidification rotor (520). The controller (540) can control multiple fans (530) independently or integrally according to the dehumidification requirements of the EFEM (10). The controller (540) may include an inverter, a PWM control circuit, or other power control devices.

[0079] The controller (540) can be coupled to the support frame (551) through a support member (552). The support member (552) can serve to secure the controller (540) to the support frame (551). The support member (552) can be configured in the form of a bracket, a plate, or a frame. The support member (552) may also serve to mitigate vibration transmission between the controller (540) and the support frame (551). The support member (552) can be secured to the support frame (551) through bolts, screws, or other fastening means.

[0080] The fan assembly (550) can be detachably coupled to the side cover (512) of the housing (510). The fan assembly (550) can be configured to be independently replaceable. The fan assembly (550) can be secured to the housing (510) through bolts, clips, or other fastening means.

[0081] Through this, if a failure occurs in multiple fans (530) or controllers (540), the entire fan assembly (550) can be quickly replaced. Since only the fan assembly (550) can be removed and replaced without disassembling other components of the dehumidification device (500), maintenance time can be reduced. This minimizes the downtime of the dehumidification device (500) and prevents a decrease in the productivity of the EFEM (10).

[0082] In one embodiment, the fan assembly (550) can be manufactured as a standardized module. In this case, the same fan assembly (550) can be applied to different dehumidification devices (500), thereby improving component compatibility and facilitating inventory management.

[0083] Although preferred embodiments of the present invention have been illustrated and described above, the present invention is not limited to the specific embodiments described above. Various modifications are possible by those skilled in the art without departing from the essence of the invention as claimed in the claims, and such modifications should not be understood individually from the technical spirit or perspective of the present invention. Explanation of the symbols

[0084] 10: EFEM 500: Dehumidification device 510: Housing 520: Dehumidification rotor 530: Fan 540: Controller

Claims

Claim 1 A dehumidification device for supplying dehumidified air to an EFEM (Equipment Front End Module), comprising: a housing having an internal space; a dehumidification rotor disposed inside the housing and dehumidifying passing air while rotating around a vertical axis and discharging it downward; and a plurality of fans disposed on the side of the dehumidification rotor and sucking in outside air and discharging it into the interior of the housing; wherein the outside air discharged from the plurality of fans circulates through the internal space of the housing and is uniformly supplied to the dehumidification rotor. Claim 2 A dehumidification device according to claim 1, further comprising a pair of cassettes each disposed at the upper and lower portions of the dehumidification rotor and having protruding partition walls to partition the space through which air flows in and out of the dehumidification rotor; wherein the internal space of the housing comprises a side space formed between the outer surface of the dehumidification rotor and the inner wall of the housing, and an upper space formed at the upper portion of the upper cassette of the pair of cassettes. Claim 3 A dehumidification device according to claim 2, wherein the outside air discharged from the plurality of fans includes a first airflow that is directly introduced into the upper part of the dehumidification rotor through the upper space of the dehumidification rotor. Claim 4 A dehumidification device according to claim 2, wherein the outside air discharged from the plurality of fans includes a second airflow that rises while circulating through the side space of the dehumidification rotor and then flows into the upper part of the dehumidification rotor. Claim 5 A dehumidification device according to claim 1, wherein the flow direction of the outside air discharged from the plurality of fans and the flow direction of the dehumidifying air discharged downward from the dehumidification rotor are perpendicular to each other. Claim 6 delete Claim 7 A dehumidification device according to claim 1, wherein the plurality of fans discharge air in a direction perpendicular to the rotation axis of the dehumidification rotor. Claim 8 A dehumidification device according to claim 1, wherein the plurality of fans are arranged in a row along the horizontal direction. Claim 9 In claim 8, the dehumidification device, wherein the horizontal direction is the depth direction of the EFEM. Claim 10 A dehumidification device in which, in claim 1, the plurality of fans are axial fans. Claim 11 A dehumidification device according to claim 1, further comprising a controller for controlling the plurality of fans, wherein the plurality of fans and the controller are modularized into a single fan assembly and are replaceable.

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