Apparatus for estimating decomposition efficiency of facility for detoxification sf6 gas

Abstract

The present invention discloses an apparatus and method for predicting the decomposition rate of an SF6 gas detoxification facility. The apparatus for predicting the decomposition rate of an SF6 gas detoxification facility according to the present invention comprises: an input module receiving operating conditions of an SF6 gas detoxification facility; an exhaust gas flow meter installed at the outlet of the SF6 gas detoxification facility to measure the exhaust gas flow rate; a combustion gas analyzer installed at the outlet to measure the oxygen concentration in the exhaust gas; a database for constructing reference data according to operating conditions; and a processor operatively coupled to the input module, the exhaust gas flow meter, the combustion gas analyzer, and the database; wherein the processor receives operating conditions through the input module and receives the exhaust gas flow rate and oxygen concentration from the exhaust gas flow meter and the combustion gas analyzer, and predicts the decomposition rate of SF6 gas based on the reference data according to operating conditions constructed in the database.

Description

Technology Field

[0001] The present invention relates to an apparatus and method for predicting the decomposition rate of an SF6 gas detoxification facility, and more specifically, to an apparatus and method for predicting the decomposition rate of an SF6 gas detoxification facility by building a database of relationship information between the decomposition rate derived through precision analysis equipment in the SF6 gas detoxification facility and the oxygen concentration in the exhaust gas, and then measuring the oxygen concentration. Background Technology

[0002] Sulfur hexafluoride gas (SF6) has been successfully used in electrical equipment such as high-voltage and medium-voltage switchgear, GIS (Gas Insulated Switchgear), ring circuits, automatic circuit breakers, transformers, and cables since the early 1960s due to its high dielectric strength (about 3 times that of air), high thermal insulation capability (about 10 times that of air), and high heat transfer performance (about 2 times that of air).

[0003] In addition, sulfur hexafluoride gas is widely used in various fields, including not only the electric industry but also aluminum production, magnesium smelting, semiconductor production, flat-panel screen production, nuclear fuel cycles, noise-reducing windows, tires, high-performance radar, tracking gas for climate measurement, power plant pipes, and military applications. The electric industry uses high concentrations of sulfur hexafluoride gas close to 100%, while fields other than the electric industry use low concentrations of sulfur hexafluoride gas of about 1%.

[0004] In Korea, approximately 80% of the total sulfur hexafluoride gas consumption is used in the electric power industry. For example, SF6 is used as an insulator in power equipment such as GIS (Gas Insulated Switchgear), medium-voltage gas switchgear, high-voltage gas switchgear, high-voltage gas-insulated wire, and gas-insulated voltage transformer, and it is stored and recovered through a closed cycle.

[0005] Since sulfur hexafluoride gas has a very high global warming potential (GWP) that is 23,900 times that of carbon dioxide (CO2) and remains in the atmosphere for a long period of 3,200 years without decomposing, it is environmentally and economically important to recycle SF6 gas without releasing it into the atmosphere. Therefore, it is necessary to prevent atmospheric release and manage the entire process, including development, design, production, service, maintenance, and recovery, in an environmentally compliant manner.

[0006] The background technology of the present invention is disclosed in Korean Published Patent Application No. 10-2022-0131730 (published September 29, 2022, apparatus for decomposing and detoxifying sulfur hexafluoride). The problem to be solved

[0007] As such, the SF6 gas decomposition and detoxification facility is composed of a high-temperature reaction section for decomposing SF6 and a neutralization section for implementing a detoxification reaction for treating the decomposed gas. In the high-temperature reaction section, SF6 is thermally decomposed at a high temperature of 1,200°C or higher, and in the neutralization section, the decomposed gas composed of strong acidic substances is cooled and then the acidic substances are neutralized through an acid-base reaction with basic substances, so that only harmless gas is finally discharged.

[0008] Figure 1 is a block diagram showing a typical SF6 gas detoxification facility.

[0009] As shown in FIG. 1, when high-concentration SF6 gas is supplied to a decomposition furnace (10) together with LPG, which is a combustion fuel, and LPG and air are combusted within the decomposition furnace (10) to create a high-temperature atmosphere, the SF6 is thermally decomposed and strong acidic substances such as HF and SOx, combustion products such as CO2 and H2O, and N2, O2, etc., which did not participate in combustion, are discharged as decomposition gases.

[0010] Afterward, the decomposition gas is cooled to 70°C or lower by spraying a sufficient amount of neutralizing water in the quencher section (20). By rapidly cooling it in this way, the decomposition gas is not only suppressed from recombining into SF6 gas or generating unwanted products through reactions via other pathways in a high-temperature atmosphere, but the equipment can also be protected from high-temperature strong acids.

[0011] The decomposition gas cooled in the quencher section (20) reacts with a neutralizing agent in the neutralization section (40) to neutralize strong acidic substances such as HF and SOx, and is discharged as salt. In addition, the neutralized water that does not participate in the reaction is recirculated within the process, and when the water level of the circulation tank (30) increases, it is discharged to the wastewater storage tank along with the salt. At this time, the neutralization section (40) includes packing to increase the surface area between the reactants, thereby inducing the detoxification reaction to proceed smoothly, and KOH can be used as the neutralizing agent.

[0012] The gas treated in this manner is then treated to recover residual pollutants through a dust collector (50), and finally, O2, CO2, SF6, N2, etc. are discharged into the atmosphere through an outlet (60).

[0013] At this time, the decomposition rate of the SF6 gas detoxification facility can be calculated as the ratio of the discharge amount to the supply amount of SF6 gas.

[0014] This decomposition rate tends to decrease as the temperature of the SF6 gas detoxification facility decreases and as the supply amount of SF6 gas increases, so it is necessary to manage the decomposition rate for optimal operation of the SF6 gas detoxification facility.

[0015] In order to derive the decomposition rate, precision analysis equipment such as a quadruple mass spectrometer (QMS) and a Fourier transform infrared spectroscopy (FT-IR) can be installed at the exhaust port (60) to analyze the exhaust gas, thereby deriving the decomposition rate.

[0016] At this time, the QMS can measure the exhaust gas flow rate by injecting tracer gas (He) into the decomposition furnace (10) and detecting the amount of tracer gas in the exhaust gas, and the FT-IR can measure the concentration of substances in the exhaust gas, thereby deriving the amount of SF6 gas that is not decomposed and is discharged through the outlet (60) based on the exhaust gas flow rate and the SF6 concentration in the exhaust gas.

[0017] When establishing precision analytical equipment such as QMS and FT-IR to derive the decomposition rate, not only is the initial investment cost increased, but the continuous use of tracer gas (e.g., He) for analysis and the annual inspection / calibration costs can also lead to an increase in operating costs. Furthermore, there is a problem of cost loss resulting from reduced lifespan and decreased asset value due to the continuous use of the analytical equipment.

[0018] The present invention has been devised to improve the above-mentioned problems, and the objective of the present invention according to one aspect is to provide an apparatus and method for predicting the decomposition rate of an SF6 gas decomposition facility, which can predict the decomposition rate by measuring the oxygen concentration after constructing a database of relationship information between the decomposition rate derived through precision analysis equipment in the SF6 gas decomposition facility and the oxygen concentration in the exhaust gas. means of solving the problem

[0019] A device for predicting the decomposition rate of an SF6 gas detoxification facility according to one aspect of the present invention comprises: an input module for receiving operating conditions of an SF6 gas detoxification facility; an exhaust gas flow meter installed at the outlet of the SF6 gas detoxification facility for measuring the exhaust gas flow rate; a combustion gas analyzer installed at the outlet for measuring the oxygen concentration in the exhaust gas; a database for constructing reference data according to operating conditions; and a processor operatively coupled to the input module, the exhaust gas flow meter, the combustion gas analyzer, and the database; wherein the processor receives operating conditions through the input module and receives the exhaust gas flow rate and oxygen concentration from the exhaust gas flow meter and the combustion gas analyzer, and predicts the decomposition rate of SF6 gas based on reference data according to operating conditions constructed in the database.

[0020] In the present invention, the reference data according to the operating conditions is characterized by including the decomposition rate of SF6 gas derived through precision analysis equipment for each operating condition, and the exhaust gas flow rate and oxygen concentration measured at the outlet.

[0021] In the present invention, the precision analysis equipment is characterized by including a quadruple mass spectrometer (QMS) and a Fourier transform infrared spectroscopy (FT-IR).

[0022] In the present invention, the operating conditions are characterized by including a fuel amount, an air amount, and an SF6 supply amount.

[0023] In the present invention, the processor is characterized by building reference data according to operating conditions in a database based on the relationship between the decomposition rate of SF6 gas derived from the operating conditions input through an input module and measurement information measured through a precision analysis device for each operating condition, and the exhaust gas flow rate and oxygen concentration measured through an exhaust gas flow meter and a combustion gas analyzer.

[0024] In the present invention, the processor is characterized by counting and outputting the construction cycle of reference data according to operating conditions.

[0025] A method for predicting the decomposition rate of an SF6 gas detoxification facility according to one aspect of the present invention comprises: a step in which a processor receives the operating conditions of an SF6 gas detoxification facility; a step in which the processor receives the exhaust gas flow rate and oxygen concentration measured at the outlet of the SF6 gas detoxification facility; a step in which the processor reads reference data according to the operating conditions from a database; and a step in which the processor predicts the decomposition rate of SF6 gas from the input operating conditions, exhaust gas flow rate, and oxygen concentration based on the reference data according to the operating conditions built in the database.

[0026] In the present invention, the reference data according to the operating conditions is characterized by including the decomposition rate of SF6 gas derived through precision analysis equipment for each operating condition, and the exhaust gas flow rate and oxygen concentration measured at the outlet.

[0027] In the present invention, the precision analysis equipment is characterized by including a quadruple mass spectrometer (QMS) and a Fourier transform infrared spectroscopy (FT-IR).

[0028] In the present invention, the operating conditions are characterized by including a fuel amount, an air amount, and an SF6 supply amount.

[0029] The present invention is characterized by further including: a step in which a processor determines whether to establish reference data according to operating conditions in a database; and a step in which, based on the result of determining whether to establish reference data according to operating conditions, the processor establishes reference data according to operating conditions in a database based on the relationship between the decomposition rate of SF6 gas derived from the operating conditions input through an input module and measurement information measured through a precision analysis device for each operating condition, and the exhaust gas flow rate and oxygen concentration measured through an exhaust gas flow meter and a combustion gas analyzer.

[0030] The present invention is characterized by further including the step of, when the determination of whether reference data is established according to operating conditions results in the reference data being established, the processor counting and outputting the establishment cycle of the reference data according to operating conditions. Effects of the invention

[0031] The apparatus and method for predicting the decomposition rate of an SF6 gas detoxification facility according to one aspect of the present invention can predict the decomposition rate by measuring the oxygen concentration after building a database of relationship information between the decomposition rate derived through precision analysis equipment in the SF6 gas detoxification facility and the oxygen concentration in the exhaust gas, thereby reducing the initial investment and operating costs of the SF6 gas detoxification facility. Brief explanation of the drawing

[0032] Figure 1 is a block diagram showing a typical SF6 gas detoxification facility. FIG. 2 is a block diagram showing a decomposition rate prediction device for an SF6 gas detoxification facility according to one embodiment of the present invention. Figure 3 is an example graph showing the relationship between the amount of oxygen produced and the decomposition rate at a constant fuel supply amount in a decomposition rate prediction device for an SF6 gas detoxification facility according to one embodiment of the present invention. FIG. 4 is a flowchart illustrating a method for predicting the decomposition rate of an SF6 gas detoxification facility according to one embodiment of the present invention. Specific details for implementing the invention

[0033] Hereinafter, an apparatus and method for predicting the decomposition rate of an SF6 gas detoxification facility according to the present invention will be described with reference to the attached drawings. In this process, the thickness of lines or the size of components shown in the drawings may be exaggerated for clarity and convenience of explanation. Furthermore, the terms described below are defined considering their functions in the present invention, and these may vary depending on the intention or convention of the user or operator. Therefore, the definitions of these terms should be based on the content throughout this specification.

[0034] FIG. 2 is a block diagram showing a decomposition rate prediction device for an SF6 gas detoxification facility according to one embodiment of the present invention, and FIG. 3 is an example graph showing the relationship between the amount of oxygen produced and the decomposition rate at a constant fuel supply amount in a decomposition rate prediction device for an SF6 gas detoxification facility according to one embodiment of the present invention.

[0035] As illustrated in FIG. 2, a decomposition rate prediction device for an SF6 gas detoxification facility according to one embodiment of the present invention may include an input module (100), an exhaust gas flow meter (200), a combustion gas analyzer (300), a database (600), an output module (700), a memory (400), and a processor (500).

[0036] The input module (100) can receive operating conditions for the SF6 gas detoxification facility. In addition, it can receive reference data based on operating conditions for building a database (600).

[0037] That is, as for the operating conditions, information including the fuel amount, air amount, and SF6 supply amount can be received as the operating status of the SF6 gas detoxification facility.

[0038] In addition, the input module (100) can receive the exhaust gas flow rate and the concentration of SF6 gas in the exhaust gas measured by a quadruple mass spectrometer (QMS) and a Fourier transform infrared spectroscopy (FT-IR), which are precision analysis instruments, in order to calculate the decomposition rate of SF6 gas by the SF6 gas detoxification facility.

[0039] An exhaust gas flow meter (200) is installed at the outlet (60) of the SF6 gas detoxification facility to measure the exhaust gas flow rate.

[0040] A combustion gas analyzer (300) is installed at the exhaust port (60) to measure the oxygen concentration in the exhaust gas.

[0041] The database (600) can be constructed by storing standard data according to operating conditions.

[0042] Here, the reference data according to the operating conditions may include the decomposition rate of SF6 gas derived through precision analysis equipment for each operating condition, and the exhaust gas flow rate and oxygen concentration measured at the outlet (60).

[0043] The output module (700) can output the predicted decomposition rate of SF6 gas and output the timing of the database (600) construction to update the reference data according to the operating conditions.

[0044] The memory (400) can store an execution program related to the operation of the decomposition rate prediction device of the SF6 gas detoxification facility, and the stored information can be selected by the processor (500) as needed.

[0045] That is, various types of data and commands generated during the execution of an operating system (O / S) or application (program or applet) for operating the decomposition rate prediction device of an SF6 gas detoxification facility are stored in the memory (400). At this time, the memory (400) can be implemented as a non-volatile memory, volatile memory, flash memory, hard disk drive (HDD), or solid-state drive (SSD). Additionally, the memory (400) is accessed, and data reading / writing / modification / deletion / updating by the processor (500) can be performed.

[0046] The processor (500) is operatively coupled to the input module (100), exhaust gas flow meter (200), combustion gas analyzer (300), database (600), output module (700) and memory (400) to control the overall operation of the decomposition rate prediction device of the SF6 gas detoxification facility by copying various programs stored in memory (400) to RAM and executing them to perform various operations.

[0047] Here, although the processor (500) is described as including only one CPU, it may be implemented with multiple CPUs (or DSP, SoC, etc.) during implementation.

[0048] In various embodiments, the processor (500) may be implemented as a digital signal processor (DSP) that processes digital signals, a microprocessor, or a time controller (TCON). However, it is not limited thereto, and may include or be defined by one or more of a central processing unit (CPU), a micro controller unit (MCU), a micro processing unit (MPU), a controller, an application processor (AP), a communication processor (CP), or an ARM processor. Additionally, the processor (500) may be implemented as a System on Chip (SoC) or a large-scale integration (LSI) with a built-in processing algorithm, or may be implemented in the form of a Field Programmable Gate Array (FPGA).

[0049] That is, the processor (500) receives operating conditions through the input module (100), receives the exhaust gas flow rate and oxygen concentration from the exhaust gas flow meter (200) and the combustion gas analyzer (300), predicts the decomposition rate of SF6 gas based on reference data according to operating conditions built in the database (600), and outputs it through the output module (700).

[0050] In this way, the processor (500) receives the fuel amount, air amount, and SF6 supply amount as operating conditions for the SF6 gas detoxification facility through the input module (100), and receives the exhaust gas flow rate and oxygen concentration from the exhaust gas flow meter (200) and the combustion gas analyzer (300), and can predict the decomposition rate of SF6 gas based on the reference data according to the operating conditions built in the database (600).

[0051] At this time, the processor (500) can first check whether standard data according to operating conditions has been established in the database (600) at the time of initial start, and if it has not been established, it can perform the process of establishing standard data according to operating conditions in the database (600) based on the relationship between the decomposition rate of SF6 gas derived from the operating conditions input through the input module (100) and the measurement information measured through the precision analysis equipment for each operating condition, and the exhaust gas flow rate and oxygen concentration measured through the exhaust gas flow meter (200) and the combustion gas analyzer (300).

[0052] In addition, the processor (500) can update the reference data through a precision analysis device to resolve any discrepancies that may occur between the decomposition rate and the oxygen concentration in the exhaust gas due to reasons such as the aging of the SF6 gas detoxification facility, by counting and outputting the construction cycle after establishing reference data according to operating conditions.

[0053] As shown in FIG. 3, this is an example graph showing the relationship between the amount of oxygen produced and the decomposition rate at a constant fuel supply amount in a decomposition rate prediction device for an SF6 gas detoxification facility according to one embodiment of the present invention.

[0054] As shown here, increasing the amount of SF6 injected can increase oxygen production and decrease the decomposition rate, so as oxygen production increases, the decomposition rate may decrease.

[0055] In addition, the decomposition rate decreases rapidly after the optimal operating point (e.g., SF6 injection amount 30 L / min, O2 generation amount 27.3 L / min). Before the optimal operating point, the fuel supply is sufficient and the decomposition rate is high, but thereafter, the decomposition rate may decrease as there is a shortage of H2O required for the decomposition reaction due to insufficient fuel supply.

[0056] In this way, the decomposition rate can be derived by measuring the oxygen concentration in the exhaust gas during the operation of the SF6 gas detoxification facility and calculating the amount of oxygen produced.

[0057] As described above, according to the decomposition rate prediction device for an SF6 gas detoxification facility according to an embodiment of the present invention, the decomposition rate can be predicted by measuring the oxygen concentration after building a database of information on the relationship between the decomposition rate derived through precision analysis equipment in the SF6 gas detoxification facility and the oxygen concentration in the exhaust gas, thereby reducing the initial investment and operating costs of the SF6 gas detoxification facility.

[0058] FIG. 4 is a flowchart illustrating a method for predicting the decomposition rate of an SF6 gas detoxification facility according to one embodiment of the present invention.

[0059] As illustrated in FIG. 4, in a method for predicting the decomposition rate of an SF6 gas detoxification facility according to one embodiment of the present invention, first, a processor (500) checks whether reference data according to operating conditions has been established in a database (600) (S10).

[0060] Here, the reference data according to the operating conditions may include the decomposition rate of SF6 gas derived through precision analysis equipment for each operating condition, and the exhaust gas flow rate and oxygen concentration measured at the outlet (60).

[0061] In step S10, after checking whether reference data according to operating conditions has been established in the database (600), if it has not been established, the processor (500) performs a process of establishing reference data according to operating conditions in the database (600) based on the relationship between the decomposition rate of SF6 gas derived from the operating conditions input through the input module (100) and the measurement information measured through the precision analysis equipment for each operating condition, and the exhaust gas flow rate and oxygen concentration measured through the exhaust gas flow meter (200) and the combustion gas analyzer (300) (S20).

[0062] The measurement information measured here by precision analysis equipment according to operating conditions may include the exhaust gas flow rate and the concentration of SF6 gas in the exhaust gas measured by a quadruple mass spectrometer (QMS) and a Fourier transform infrared spectroscopy (FT-IR), which are precision analysis equipment installed at the outlet of the SF6 gas detoxification facility.

[0063] After checking whether standard data according to operating conditions has been established in the database (600) at step S10, if standard data according to operating conditions has been established, the processor (500) receives the operating conditions of the SF6 gas detoxification facility through the input module (100) (S30).

[0064] Here, as operating conditions, information including fuel quantity, air quantity, and SF6 supply quantity can be input as the operating status of the SF6 gas detoxification facility.

[0065] Additionally, the processor (500) receives the exhaust gas flow rate and oxygen concentration from the exhaust gas flow meter (200) and the combustion gas analyzer (300) while the SF6 gas detoxification facility is in operation.

[0066] Meanwhile, the processor (500) checks whether standard data according to operating conditions has been established in the database (600) at step S10, and then counts and outputs the establishment cycle of standard data according to operating conditions, so that the standard data may be updated through a precision analysis device to resolve any discrepancies that may occur between the established decomposition rate and the oxygen concentration in the exhaust gas due to reasons such as the aging of the SF6 gas detoxification facility.

[0067] After receiving the operating conditions, exhaust gas flow rate, and oxygen concentration of the SF6 gas detoxification facility in step S30, the processor (500) reads reference data according to the operating conditions from the database (600) (S40).

[0068] After reading reference data according to operating conditions in step S40, the processor (500) predicts the decomposition rate of SF6 gas from the input operating conditions, exhaust gas flow rate and oxygen concentration based on the read reference data according to operating conditions (S50).

[0069] After predicting the decomposition rate of SF6 gas based on the operating conditions of the SF6 gas detoxification facility, the exhaust gas flow rate, and the oxygen concentration in step S50, the processor outputs the prediction result through the output module (S60).

[0070] As described above, according to the method for predicting the decomposition rate of an SF6 gas detoxification facility according to an embodiment of the present invention, the decomposition rate can be predicted by measuring the oxygen concentration after building a database of information on the relationship between the decomposition rate derived through precision analysis equipment in the SF6 gas detoxification facility and the oxygen concentration in the exhaust gas, thereby reducing the initial investment and operating costs of the SF6 gas detoxification facility.

[0071] The implementations described herein may be implemented, for example, as methods or processes, devices, software programs, data streams, or signals. Even if discussed only in the context of a single form of implementation (e.g., discussed only as a method), the implementation of the discussed features may also be implemented in other forms (e.g., devices or programs). Devices may be implemented in appropriate hardware, software, and firmware, etc. Methods may be implemented in devices such as processors, which generally refer to processing devices including, for example, computers, microprocessors, integrated circuits, or programmable logic devices. Processors also include communication devices such as computers, cell phones, portable / personal digital assistants ("PDAs"), and other devices that facilitate the communication of information between end-users.

[0072] Although the present invention has been described with reference to the embodiments illustrated in the drawings, this is merely illustrative, and those skilled in the art will understand that various modifications and equivalent alternative embodiments are possible therefrom.

[0073] Therefore, the true technical scope of protection of the present invention should be determined by the claims below. Explanation of the symbols

[0074] 10 : Decomposition 20 : Quencher 30 : Circulation tank 40 : Neutralization unit 50 : Dust collector 60 : Discharge port 100 : Input module 200 : Exhaust gas flow meter 300 : Combustion gas analyzer 400 : Memory 500 : Processor 600 : Database 700 : Output module

Claims

Claim 1 An SF6 gas detoxification facility decomposition rate prediction device comprising: an input module receiving operating conditions of an SF6 gas detoxification facility; an exhaust gas flow meter installed at the outlet of the SF6 gas detoxification facility to measure the exhaust gas flow rate; a combustion gas analyzer installed at the outlet to measure the oxygen concentration in the exhaust gas; a database for constructing reference data according to the operating conditions; and a processor operatively coupled to the input module, the exhaust gas flow meter, the combustion gas analyzer, and the database; wherein the processor receives the operating conditions through the input module, receives the exhaust gas flow rate and the oxygen concentration from the exhaust gas flow meter and the combustion gas analyzer, predicts the decomposition rate of SF6 gas based on the reference data according to the operating conditions constructed in the database, and counts and outputs the construction cycle of the reference data according to the operating conditions. Claim 2 A decomposition rate prediction device for an SF6 gas detoxification facility according to claim 1, characterized in that the reference data according to the above operating conditions includes the decomposition rate of SF6 gas derived through precision analysis equipment for each operating condition, the exhaust gas flow rate measured at the above outlet, and the above oxygen concentration. Claim 3 A decomposition rate prediction device for an SF6 gas detoxification facility, characterized in that, in claim 2, the precision analysis equipment includes a quadruple mass spectrometer (QMS) and a Fourier transform infrared spectroscopy (FT-IR). Claim 4 A device for predicting the decomposition rate of an SF6 gas detoxification facility, characterized in that, in claim 1, the operating conditions include a fuel amount, an air amount, and an SF6 supply amount. Claim 5 A decomposition rate prediction device for an SF6 gas detoxification facility according to claim 1, wherein the processor constructs reference data according to the operating conditions in the database based on the relationship between the operating conditions input through the input module, the decomposition rate of SF6 gas derived from measurement information measured through precision analysis equipment for each operating condition, the exhaust gas flow rate measured through the exhaust gas flow meter and the combustion gas analyzer, and the oxygen concentration. Claim 6 delete Claim 7 A method for predicting the decomposition rate of an SF6 gas decomposition facility, comprising: a step in which a processor receives operating conditions of an SF6 gas decomposition facility; a step in which the processor receives an exhaust gas flow rate and an oxygen concentration measured at an outlet of the SF6 gas decomposition facility; a step in which the processor reads reference data according to the operating conditions from a database; and a step in which the processor predicts the decomposition rate of SF6 gas from the input operating conditions, the exhaust gas flow rate, and the oxygen concentration based on the reference data according to the operating conditions established in the database; wherein, if the reference data according to the operating conditions is established as a result of determining whether the reference data according to the operating conditions has been established, the processor further comprises a step of counting and outputting the establishment cycle of the reference data according to the operating conditions. Claim 8 A method for predicting the decomposition rate of an SF6 gas detoxification facility according to claim 7, wherein the reference data according to the above operating conditions includes the decomposition rate of SF6 gas derived through precision analysis equipment for each operating condition, the exhaust gas flow rate measured at the above discharge port, and the above oxygen concentration. Claim 9 A method for predicting the decomposition rate of an SF6 gas detoxification facility, characterized in that, in claim 8, the precision analysis equipment includes a quadruple mass spectrometer (QMS) and a Fourier transform infrared spectroscopy (FT-IR). Claim 10 A method for predicting the decomposition rate of an SF6 gas detoxification facility, characterized in that, in claim 7, the above operating conditions include a fuel amount, an air amount, and an SF6 supply amount. Claim 11 A method for predicting the decomposition rate of an SF6 gas detoxification facility according to claim 7, further comprising: a step in which the processor determines whether reference data according to the operating conditions is established in the database; and a step in which the processor establishes reference data according to the operating conditions in the database based on the relationship between the decomposition rate of SF6 gas derived from the operating conditions input through an input module and measurement information measured through a precision analysis device for each operating condition, the exhaust gas flow rate measured through an exhaust gas flow meter and a combustion gas analyzer, and the oxygen concentration, according to the result of determining whether reference data according to the operating conditions is established. Claim 12 delete

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