Device and method for controlling the movement of an object in an open loop and / or closed loop manner

Abstract

In terms of having high dynamism with high accuracy and low energy consumption, the present invention embodies a device for controlling the movement of an object in an open and / or closed loop manner, the device comprises an electromagnetic actuator (2) designed to move an object, a stator (3) and a rotor (4) coupled to the stator (3), a flexor (7, 12) that guides and / or supports the rotor (4) to generate movement and to be coupled to or support the object in an electromagnetically interacting manner, and at least one sensor (13) for detecting the movement of the rotor (4) and / or the object, and the sensor signal of the at least one sensor (13) generated based on the movement of the rotor (4) and / or the object can be used to control the position of the rotor (4) in an open and / or closed loop manner. The present invention also relates to a corresponding method.

Description

Technology Field

[0001] The present invention relates to an apparatus and method for controlling the movement of an object in an open loop and / or closed loop manner. Background Technology

[0002] These devices, known for example in the form of actuator-sensor systems, can be used in various technical fields to control movement in a monitored manner. Such systems require particularly high dynamics when used in optical applications. For example, laser processing requires very fast actuators to rapidly guide the laser beam over the workpiece to be processed. Fast actuators are also used in metrology, for instance, to scan surfaces. Another application is laser communication, where lasers are used to communicate between moving objects (e.g., aircraft, satellites). Here, it is necessary to track the laser beam from a (movable) transmitter to a (also moving) receiver very quickly and reliably. Prior art literature

[65535] WO 2022 / 184214 A1 The problem to be solved

[0003] Various electromagnetic actuators can be used in these applications, which are based in principle on Lorentz force or reluctance force. These actuators are used to move optical elements capable of shaping or deflecting a light beam. For example, tilting mirrors (also known as fast-steering mirrors or FSMs) are often used for scanning motions. Since the optical elements are typically connected to the rotor of the actuator system, they become part of the system's moving mass. Because optical elements are generally made of glass, the mass that must be moved for shaping or deflection cannot be ignored. Therefore, the challenge is to move optical elements such as lenses, mirrors, and prisms very quickly and accurately. Due to their low cost, so-called negative coil actuators are frequently used for this purpose.

[0004] The mass inertia of the object to be moved by the actuator (which is typically a rotor along with an optical element) is generally determined based on the required optical properties of the optical element and the requirements for the stability and manufacturability of the associated mechanical device. Subsequently, the actuator is designed to apply the necessary forces and dynamics to achieve the required deflection of the object with the desired dynamics. A controller is used to close the control loop to ensure that the target-oriented and controlled movement of the rotor and optical element is achieved. In this context, dynamic range refers to the bandwidth in the closed-loop operation of the actuator-sensor system. The control bandwidth is the frequency (-3 dB) capable of compensating for interference and errors.

[0005] These actuators have a resonant frequency in the two- or low three-digit frequency range due to the moving mass. The fundamental frequency is the fundamental formula. According to (1), it is determined by the moving mass m of the system and the spring constant—stiffness—c. In a rotary actuator-sensor system, the moment of inertia J is chosen instead of the mass m, and the formula The resonant frequency may also be determined accordingly. In more complex systems, higher harmonics are generated in addition to the fundamental frequency.

[0006] In closed-loop control systems, the fundamental frequency generally does not pose a problem for control because the controller is designed to match the fundamental frequency. However, higher harmonics in the form of parasitic resonance are particularly important because they interfere with control by stimulating other degrees of freedom instead of the desired shift at the fundamental frequency. Consequently, the interfering excitation may not be properly controlled, leading to positive feedback (vibration) and potentially destabilizing the entire system.

[0007] This means that the open-loop transfer function (i.e., the transfer function in uncontrolled operation) must be smooth in the control bandwidth and must not contain undesirable parasitic resonances. Then, the actuator-sensor system must be designed so that higher harmonics (parasitic resonances or modes) exist only above the control bandwidth. This enables linear transfer operation up to the desired (-3dB) bandwidth (dynamic) of the entire system. For example, for highly dynamic systems such as optical applications, this means that the control bandwidth must be in a high range, such as 1.5 kHz or 2 kHz. For parasitic modes to be located above the control bandwidth, a very high fundamental frequency, such as 400 to 500 Hz, is required. A high fundamental frequency can be achieved in two ways according to Formula (1): increasing the stiffness c of the system, or decreasing the moving mass m (or moment of inertia J). However, due to the aforementioned requirements for optical elements or mechanical devices, it is often impossible to reduce the mass or moment of inertia, as these requirements are predetermined. However, to increase mechanical rigidity, the actuator must apply significantly more energy to control a stronger system. This means that high energy consumption or power loss occurs on the actuator side.

[0008] The interaction of the elements described here is complex: mechanical elements must be combined with magnetic elements, and optical elements must be moved by controlling them with electromagnetic actuators. Additionally, there are sensors that create a closed control loop. means of solving the problem

[0009] The present invention addresses the problem of designing and developing a device of the type mentioned in the introduction, for example, an actuator-sensor system, and a corresponding method, thereby enabling high dynamism with high accuracy and low energy consumption.

[0010] The above problem is solved by an apparatus having the features of claim 1 and a method having the features of claim 17.

[0011] Next, a device for controlling the movement of an object in an open and / or closed loop manner is provided. The device comprises an electromagnetic actuator having an electromagnetically interacting stator and a rotor coupled to the stator, designed to move the object to generate movement and to be coupled to or to support the object, a bending part guiding and / or supporting the rotor, and at least one sensor for detecting the movement of the rotor and / or the object. The sensor signal of the at least one sensor generated based on the movement of the rotor and / or the object can be used to control the position of the rotor in an open loop and / or closed loop manner.

[0012] The method according to claim 17 has the following features: in particular, a method for controlling the movement of an object in an open and / or closed loop manner using an apparatus according to any one of claims 1 through 16. The apparatus comprises an electromagnetic actuator designed to move an object to generate movement and to be coupled to or to support the object, and, in an electromagnetically interacting manner, a stator and a rotor coupled to the stator, a bending part guiding and / or supporting the rotor, and at least one sensor for detecting the movement of the rotor and / or the object. The sensor signal of the at least one sensor generated based on the movement of the rotor and / or the object is used to control the position of the rotor in an open and / or closed loop manner.

[0013] According to the present invention, it is known that the above task is solved in a surprisingly simple way by combining mechanical, electrical, and magnetic components within the actuator.

[0014] In a more advantageous way, the bend can be designed with high stiffness such that parasitic modes exist above the control bandwidth, and the actuator can have negative stiffness to the extent that the fundamental frequency is reduced in relation to energy-efficient operation. Additionally, the bend can have sufficiently high stiffness so that parasitic modes exist above the control bandwidth, and the actuator with negative stiffness enables energy-efficient operation by lowering the fundamental frequency.

[0015] According to the present invention, it has also been recognized that the high positive stiffness of the mechanical subsystem within an actuator-sensor system can be compensated by the negative stiffness of the electromagnetic subsystem. The high positive stiffness of the mechanical subsystem—as described above—is necessary to ensure that parasitic modes exist above the required control bandwidth. It is known that using the electromagnetic subsystem can generate negative stiffness, which effectively reduces the damping of the system and thereby lowers the overall stiffness. Thus, the overall stiffness of the system consists of the positive stiffness of the mechanical subsystem and the negative stiffness of the electromagnetic subsystem. Surprisingly, while the introduction of negative stiffness lowers the fundamental frequency on the one hand, the parasitic modes are unaffected or only slightly affected on the other, and continue to exist above the control bandwidth. Lowering the fundamental frequency also reduces the energy consumption of the actuator, enabling simple and stable control with high dynamics and low energy consumption.

[0016] To enable an object to move with specific degrees of freedom, the mechanical subsystem includes specific components that allow movement within those degrees of freedom while restricting other degrees of freedom. For example, in the case of tilting movement along one axis, movement in the direction of tilting must be possible, while movement perpendicular to it or torsional movement must be restricted. According to the present invention, such components are designed as bends that enable the movement of the rotor and the consequent movement of the object according to various predetermined methods and individual requirements. Generally, the bend may be a rigid body designed to deform elastically within a predefined range of movement. Thus, the bend may be a flexible element or a combination of elements that are flexible or movable within the predetermined degrees of freedom. For example, such a bend may at least significantly prevent movement in a predetermined direction, while allowing movement in other predetermined directions to a desired degree. This enables high dynamics with high accuracy and low energy consumption of the described device.

[0017] Depending on individual requirements and design, the stator may have at least one coil capable of applying current. This can be used to move an object by applying force to the rotor in conjunction with a ferromagnetic or permanent magnet counterpart on the rotor. This ensures electromagnetic interaction with the rotor.

[0018] In relation to the appropriate amplification and induction of the magnetic field generated by the coil, at least one coil may preferably have a soft magnetic core.

[0019] According to the present invention, it has also been recognized that the rotor may have at least one permanent magnet depending on individual requirements and individual configurations. With the help of the permanent magnet, negative stiffness of the actuator is achieved and offset by positive mechanical stiffness. As a result, highly dynamic and simultaneously energy-saving movement of the rotor and the object is achieved.

[0020] In relation to the simple creation of a two-axis device in which a rotor and an object can move around two axes, the stator may have two coils offset laterally from each other. In particular, in a suitable arrangement, at least two coils are offset at a 90° angle so that movement is achieved in two axes offset 90° from each other.

[0021] In particular, to generate efficient movement, the stator may have two coils positioned opposite each other. The first coil amplifies the force effect of the permanent magnet, while the other coil weakens it (differential arrangement). This generates a force or torque, which causes the rotor to bend or tilt particularly efficiently. In the case of a 2-axis device, two coils, two permanent magnets, and two sensor elements can be used for each direction of movement.

[0022] To ensure a stable arrangement of the rotor, the bend may have a bending element, which is preferably designed as a rod bend. Accordingly, the movement of the rotor and the consequent movement of the object can also occur along the bending direction of the bending element. A stable position of the rotor can be achieved along the longitudinal direction of the bending element, for example, specifying the z-direction, and movement of the rotor in the longitudinal direction can be at least strongly damped or completely prevented.

[0023] In certain embodiments, the bend can combine the stator and the rotor. While the bend supports the rotor (along with the object) and ensures a rigid connection in the z-direction, the bending element allows movement around at least one axis perpendicular to the z-direction (the tilt axis). Given the simple and compact design of the device, no additional components are required. The stiffness of movement around the tilt axis is defined by the elasticity of the bending element. The elastic modulus is defined by the elastic modulus of the material used for the bending element and its geometric dimensions.

[0024] In addition, regarding the particularly stable arrangement and secure positioning of the rotor and the object, the bend may have a flat bend. This flat bend can help prevent or suppress unwanted torsional movement of the rotor around the longitudinal axis (z-axis) of the rod bend.

[0025] In particular, for simple designs, a flat flexor can be designed as a disc with a flexible arm. When the longitudinal direction of the bending element or rod flexor is arranged in the z-direction, such a flat flexor can be arranged in the xy plane.

[0026] The arm is coupled to the ring to position these flat bends. Since the ring can be part of the flat flexor, a particularly compact design of the flat flexor is provided. The ring of the flat flexor can be rigidly connected to the stator. On the other hand, the central part of the flat flexor can be connected to the rotor. This suppresses torsional movement of the rotor around the z-axis and allows only tilting movement around the x-axis (or, in the case of a two-axis design, tilting movement around the y-axis also becomes possible).

[0027] Depending on the application, the object may have optical elements in specific embodiments. These optical elements may be lenses, mirrors, prisms, etc.

[0028] For controlled movement of the rotor, the device includes one or more sensors that detect the movement of the rotor and close the control loop. The sensors may be distance, position, or angle sensors. In certain exemplary embodiments, and depending on the application, at least one sensor may be designed as a capacitive, inductive, or non-contact distance sensor operating according to the eddy current measurement principle. Various applications may have different requirements, and the sensor best suited for each case may be selected.

[0029] As briefly mentioned above, at least one sensor may have at least two sensor elements for detecting the movement of a rotor and / or object in at least two different directions independently of each other. This has made it possible to implement a wide variety of applications.

[0030] In a particularly advantageous embodiment, the device may have a control device for setting a predetermined position of the rotor and / or object. This ensures a high level of accuracy when obtaining a desired position of the rotor and / or object.

[0031] In particular, in another advantageous embodiment, the device may be designed such that the fundamental frequency of the device is lower than the control bandwidth and the first parasitic frequency is higher than the control bandwidth. It is particularly advantageous when the control bandwidth is 1 kHz or higher, preferably in the range of 1.5 kHz. This enables particularly fast and accurate movement of the rotor.

[0032] An exemplary embodiment of the device according to the present invention may be referred to as an actuator-sensor system and may include one or more sensors on a flat substrate.

[0033] In principle, in exemplary embodiments, mechanical, magnetic, and electrical components can be precisely combined, and when used together, a very compact and dynamic actuator-sensor system can be formed with low energy consumption for the controlled movement of moving elements. Brief explanation of the drawing

[0034] There are various possibilities for designing and developing the teachings of the present invention to an advantage. To this end, one should refer to the description of preferred embodiments of the apparatus according to the present invention by referring to the following claims on one hand and the drawings on the other. While describing preferred embodiments with reference to the drawings, general preferred embodiments and improvements of the present invention are also described. FIG. 1a illustrates a side view and a cross-sectional view of an exemplary embodiment of a device according to the present invention. FIG. 1b illustrates a side view and a cross-sectional view of an additional embodiment of the device according to the present invention. FIG. 2 shows a side perspective view of another exemplary embodiment of a device according to the present invention. FIG. 3 illustrates a schematic plan view of a flat flexor of an exemplary embodiment of a device according to the present invention. FIG. 4 illustrates a board diagram of an exemplary embodiment of a device according to the present invention, which is implemented as a two-axis actuator-sensor system. FIG. 5 illustrates a board diagram of an exemplary embodiment of a device according to the present invention, which is implemented as a two-axis actuator-sensor system. Specific details for implementing the invention

[0035] An exemplary embodiment of the present invention is as follows.

[0036] One exemplary embodiment of the device according to the present invention may be composed of an electromagnetic actuator, a sensor, a rod flexor, and a flat flexor in the form of an actuator-sensor system.

[0037] In an exemplary embodiment, the actuator is composed of an electromagnetic actuator having a stator and a rotor, where the rotor is the moving element. The stator contains a coil through which current flows, generating a magnetic field. The rotor contains a permanent magnet. Movement is generated by the magnetic interaction between the stator and the rotor. As a moving element, the rotor is guided by a so-called flexor. Additionally, the rotor supports an optical element used to form or deflect a beam of light. To achieve a closed control loop, the system includes a sensor that detects the movement of the rotor. The sensor signal is used by the control system to specifically control the position of the rotor in an open and / or closed-loop manner.

[0038] Specifically:

[0039] Stator:

[0040] In the broadest sense, the stator defines the basic structure of an actuator-sensor system, consisting of a housing, coils, a rotor, and components that support optical elements. It is advantageous to have a soft magnetic core capable of amplifying and inducing a magnetic field in the coil.

[0041] Rotor:

[0042] The rotor may have a permanent magnet on which the Lorentz force of the coil acts. In addition, the rotor may have an optical element.

[0043] Actuator:

[0044] In simple cases, the actuator may have a stator with a single coil—with or without a core—and a rotor containing a permanent magnet. Depending on the polarity of the permanent magnet or the direction of the current passing through the coil, attractive or repulsive forces may be generated. This can produce movement in one direction (e.g., "backward and forward" or "upward or downward") in response to changes in the signal. It is preferable to have two coils in the stator and two permanent magnets in the rotor positioned opposite each other. This allows for doubling efficiency. Additionally, the permanent magnet in the rotor, combined with the ferromagnetic counterpart in the stator, applies a static magnetic force to the rotor, inducing the desired negative stiffness of the actuator. The ferromagnetic counterpart can be a structural element of the stator, such as the bottom of the housing or the mounting point of the coil. It is particularly advantageous if the soft magnetic core of the coil forms the ferromagnetic counterpart.

[0045] Flexer:

[0046] The flexor performs various functions. First, since it supports the rotor, it must possess a certain level of stability and rigidity. Second, it must be flexible enough to allow for the mechanical movement of the rotor. Third, it must prevent unwanted degrees of freedom from occurring. For example, it must ensure that the rotor does not strike the housing or other components. In a particularly preferred form, the flexor consists of two parts. For example, a rod flexor in the form of a bending element is rigidly connected to the stator on one side. On the opposite side is a rotor supported by the rod flexor. The z-axis is defined by the rod flexor. If the rod flexor is elastically deformed perpendicular to the z-axis, movement in all directions in the xy plane—rotational symmetry about a 360° circle—is possible, provided it is not restricted by other mechanical means.

[0047] A simple example is a single-axis actuator for movement tilted about the y-axis. That is, for example, there is a single-axis actuator for movement tilted in the positive or negative direction of the x-axis. Through this, a ray can be deflected in a specific way within a plane.

[0048] To enable tilting motion along two axes, two actuator-sensor systems can be combined at an angle (e.g., 90°) to further advance the actuator-sensor system.

[0049] This enables movement around the y-axis and x-axis. This allows the light beam to be deflected into a cone spanning an achievable angular range in the two deflection directions. It is particularly advantageous to arrange the two actuator-sensor systems into a common rod flexor and a flat flexor, with the flexor designed in two parts. Thus, the two-axis system consists of a stator with at least two coils, a rotor with at least two permanent magnets, a common rod flexor and a flat flexor, and a sensor with at least two sensor elements to independently detect movement in two independent directions—x and y directions. The differential is particularly advantageous in that it uses two coils, two permanent magnets, and two sensor elements for each direction of movement.

[0050] Description: Tilting movement is a controlled movement that approaches a specific position in a goal-oriented manner. This does not mean a simple movement in the sense of a dual-stabilization system with two end positions, and may also be determined by mechanical end stops.

[0051] The bar flexor possesses high stiffness in the z-direction and supports the rotor against the magnetic force of the stator. This offsets the negative stiffness of the magnetic circuit with positive stiffness. Additionally, the flexor includes a flat flexor in the form of a flat disc equipped with a flexible arm, through which the disc is attached to the mounting ring. Although the flat flexor has very low stiffness in the z-direction, it prevents rotational movement around the z-axis—that is, torsional movement—which cannot be prevented by a relatively thin bar flexor alone. By combining the flat flexor and the bar flexor, a defined positive stiffness can be specifically set, allowing the fundamental frequency and, in particular, higher harmonics to achieve the desired dynamics of the entire system. The positive stiffness is determined by the proper design of the bar and flat flexors, namely their geometry, the bar diameter of the bar flexor, the length or width of the flat flexor's arm, the thickness of the flat flexor, and the materials used. The positive stiffness is offset by the negative stiffness of the actuator, effectively damping the system. However, the decisive factor is that the actuator design dampens only the fundamental mode. That is, since it compensates only for stiffness in the direction of movement, only the fundamental resonance is deflected downward. Parasitic resonance remains above the control bandwidth at the high frequencies achieved by the design, allowing for simple and stable control with high dynamics. Effective damping is particularly advantageous when the design is such that static magnetic force compensates for the mechanical force of the flexor over a wide range of movement. In other words, damping is achieved as effectively as possible within the actuator's control range. This can be achieved through a sophisticated arrangement of permanent magnets against a ferromagnet. The mechanical force is According to the relationship, it increases as the deflection increases. In contrast, the effect of the magnetic force increases as the distance (air gap) decreases. Nearly constant damping can be achieved over a wide range of movement through structural measures in which the air gap decreases as the deformation (tilting) of the rotor increases.

[0052] Optical element:

[0053] This is often a mirror attached to the rotor. With the help of mirrors, an actuator-sensor system can refract light rays in a specific direction. To reduce mass, a reflective layer such as aluminum or silver can be directly coated onto the rotor. Alternatively, lenses, prisms, or other optical elements can be attached to the rotor to deflect or shape the beam.

[0054] Sensor:

[0055] In particular, to achieve a compact design, the sensor can be designed as a flat sensor. This enables a flat design of the actuator-sensor system, is particularly suitable for confined installation conditions, and can be used in any application requiring low mass, such as vehicles or aircraft. A single sensor can detect rotor movement in two directions. However, using two sensors arranged differentially is more advantageous because it suppresses interference in a known manner and generates symmetrical signals. Non-contact distance sensors based on inductive or eddy current measurement principles or capacitive measurement principles are most suitable. These methods do not affect the object being measured—in this case, the rotor—and have a bandwidth high enough to ensure high dynamic control of the actuator.

[0056] control:

[0057] The actuator-sensor system may include a controller capable of accurately setting the rotor position. The rotor position is measured by a sensor element—the control variable—and compared to a setpoint—the operating variable. Since there is no parasitic resonance in the system transfer function, control can be implemented relatively simply. Furthermore, the fundamental frequency varies only within ±20 Hz over the rotor tilt range, or within ±10 Hz if the design is particularly advantageous. This means that, for example, a standard PID controller can be used.

[0058] Additional exemplary embodiments:

[0059] FIG. 1a illustrates a single-axis actuator-sensor system (1) with very high dynamism in a compact design. The actuator (2) consists of a stator (3) and a rotor (4). The stator (3) contains two coils (5a, 5b), which in this example are designed as coreless air coils. The stator (3) also forms the housing (6) of the actuator-sensor system (1). A rod flexer (7) in the form of a bending element, specifically a bending beam, is permanently attached to the stator (3). The rod flexer (7) is capable of elastic deformation in a region where the diameter (8) is reduced. Examples show movement (9) tilting about the y-axis in positive and negative x directions. An axis system (10) is shown in the upper left corner. The rotor (4) contains two permanent magnets (11a, 11b), which, together with the coils (5a, 5b), generate a dynamic magnetic force effect that moves the rotor (4). Attraction and repulsion are generated depending on the polarity of the permanent magnets (11a, 11b) and the direction of current flow through the coils (5a, 5b), causing the rotor (4) to tilt around the y-axis. The static force effect to dampen the system, namely the negative stiffness of the magnetic circuit, is achieved through the permanent magnets (11a, 11b) combined with the ferromagnetic structure of the stator (3). In addition to the rod flexer (7), the rotor (4) is connected to the stator (3), in this case the housing (6), through another flat flexer (12). The flat flexer (12) guides the rotor (4) in the lateral direction—the xy plane—and prevents the rotor (4) from striking the housing (6). Additionally, the flat flexer (12) prevents twisting of the rod flexer (7), so only movement tilting around the y-axis in the positive x direction and the negative x direction (9) is possible. The actuator-sensor system includes a sensor (13) in the form of an eddy current sensor arranged on a flat substrate.

[0060] FIG. 1b shows a single-axis actuator-sensor system (1) with particularly high dynamics in the compact design of FIG. 1a, and the coils (5a, 5b) each have a ferromagnetic core (27a, 27b). The core serves to amplify and form the magnetic flux of the coils (5a, 5b) on one hand, and serves as a counterpart to the permanent magnet (11a, 11b) on the other. A static force effect to dampen the system, that is, a force effect to achieve negative stiffness of the magnetic circuit, is achieved by the permanent magnet (11a, 11b) combined with the ferromagnetic core (27a, 27b) of the coils (5a, 5b).

[0061] FIG. 2 illustrates an actuator-sensor system (14) for biaxial movement. In principle, two single-axis actuator-sensor systems (1) are positioned at 90° to each other, and some components exist only once since they are used together: the central bar flexor (7), the flat flexor (12), and the rotor (4) are required only once if designed accordingly. The actuator-sensor system includes four coils—coils 5a, 5b, and 5c shown—and four permanent magnets—permanent magnets 11a, 11b, and 11c shown. The sensor (13) includes four coils—not shown—that detect movement in two directions—rotation or turning around the x-axis or y-axis—which are the measuring elements of the differential array. The rotor (4) is attached with a mirrored area (15) which allows the light beam to be deflected in a specific spatial direction.

[0062] FIG. 3 shows an example of a flat flexor (12) having a central region (16) connected to a rotor (4). The central region (16) is connected to an outer fixing ring (18) by four arms (17a, 17b, 17c, 17d). It is secured by screws—not shown—to the stator (3) or housing (6) or other parts firmly connected to the stator, and the screws extend through openings (19a, 19b, 19c, 19d). The arms (17a, 17b, 17c, 17d) are flexible so as to allow tilting movement around the x-axis or y-axis, but not rotational—torsional movement—around the z-axis.

[0063] FIG. 4 shows a Bode diagram (20) of a two-axis actuator-sensor system (14) having particularly high dynamics according to the present invention. Various transfer functions (21) for various slopes (22) to be controlled in each case are shown. Specifically, transfer functions for slopes of -0.1°, -0.3°, -0.6°, -0.9°, -1.1°, and -1.4° are shown. It is important to note that parasitic modes that can interfere with or prevent dynamic control are above 1.5 kHz and are therefore no longer visible in the diagram. It is particularly advantageous for control when the range of the fundamental resonance (23)—which varies with the slope—changes within ±20 Hz. As can be seen in this diagram, a change of only ±10 Hz is also particularly advantageous, especially in the range between 87 Hz and 94 Hz.

[0064] FIG. 5 shows a Bode diagram (20) of a biaxial actuator-sensor system (14) according to the present invention having particularly high dynamics, having a fundamental resonance (23) and a first harmonic (25) of about 2 kHz. The control bandwidth (26) of the system is designed to be 1.5 kHz. This satisfies the conditions for stable control using a simple controller (i.e., a PID controller). The fundamental resonance (23) is below the control bandwidth (26) at a frequency in the range of about 80 Hz, which is a higher harmonic, and in particular, the first harmonic (25) is about 2.1 kHz above the control bandwidth.

[0065] With respect to additional advantageous embodiments of the device according to the present invention, to avoid duplication, reference is made to the general parts of the description and the appended claims.

[0066] Finally, it should be clearly noted that the exemplary embodiments described above are intended only to illustrate the claimed teachings and are not limited to the exemplary embodiments. Explanation of the symbols

[0067] 1 Actuator sensor system 2 Actuator 3 stators 4 rotors 5 coils 6 housing 7-rod flexor 8 diameter 9 Tilting movement 10-axis system 11a, 11b, 11c permanent magnets 12 flat flexors 13 sensors 14 Actuator Sensor System 15 Mirrored area 16 central area 17a-17d cancer 18 fixed rings 19a-19d drill 20 Board Diagrams 21 Transfer function 22 Angle of inclination [°] 23 Fundamental Resonance 24 range 25 1st harmonic 26 control bandwidth 27a, 27b Ferromagnetic core

Claims

Claim 1 A device for controlling the movement of an object, such as an optical element, in at least one of an open-loop and closed-loop method, wherein the device is designed to move the object and comprises an electromagnetic actuator (2) having a stator (3) and a rotor (4) coupled to the stator in a manner that electromagnetically interacts to generate the movement and is coupled to or supports the object, a flexer (7, 12) that performs at least one of guiding and supporting the rotor (4), and at least one sensor (13) for detecting the movement of at least one of the rotor (4) and the object, wherein the sensor signal of the at least one sensor (13) generated based on the movement of at least one of the rotor (4) and the object can be used to control the position of the rotor (4) in at least one of an open-loop and closed-loop method, wherein the flexer (7, 12) is designed to be high rigidity such that a parasitic mode capable of interfering with or preventing dynamic control exists above the control bandwidth, and the actuator (2) has a fundamental frequency in relation to energy-efficient operation A device for controlling the movement of an object characterized by having reduced negative stiffness. Claim 2 delete Claim 3 A device for controlling the movement of an object according to claim 1, wherein the stator (3) has at least one coil (5a, 5b). Claim 4 A device for controlling the movement of an object, wherein, in paragraph 3, at least one coil (5a, 5b) preferably has a soft magnetic core. Claim 5 A device for controlling the movement of an object according to claim 1, wherein the rotor (4) has at least one permanent magnet (11a, 11b, 11c). Claim 6 A device for controlling the movement of an object according to claim 1, characterized in that the stator (3) has two coils (5a, 5b) and the rotor (4) has two permanent magnets (11a, 11b, 11c) arranged facing each other. Claim 7 A device for controlling the movement of an object according to claim 1, wherein the flexor (7, 12) preferably includes a bending element designed as a rod flexor (7). Claim 8 A device for controlling the movement of an object, characterized in that, in claim 7, the bending element connects the stator (3) and the rotor (4) to each other. Claim 9 A device for controlling the movement of an object according to claim 1, wherein the flexor (7, 12) includes a flat flexor (12). Claim 10 A device for controlling the movement of an object, characterized in that, in claim 9, the flat flexor (12) is designed as a disk having substantially flexible arms (17a, 17b, 17c, 17d). Claim 11 A device for controlling the movement of an object, characterized in that, in claim 10, the above arms (17a, 17b, 17c, 17d) are coupled to a ring (18). Claim 12 A device for controlling the movement of an object, characterized in that, in claim 1, the object includes an optical element or is an optical element. Claim 13 A device for controlling the movement of an object according to claim 1, wherein the at least one sensor (13) has at least two sensor elements for detecting the movement of at least one of the rotor (4) and the object in at least two different directions independently of each other. Claim 14 A device for controlling the movement of an object according to claim 1, characterized in that at least one sensor (13) is designed to be a sensor (13) that operates according to capacitive, inductive, or eddy current measurement principles. Claim 15 A device for controlling the movement of an object, characterized in that, in claim 1, the device has a control device for setting at least one predetermined position among the rotor (4) and the object. Claim 16 A device for controlling the movement of an object according to claim 1, characterized in that the fundamental frequency of the device is in the range of up to 1 kHz and the primary parasitic frequency is designed to exceed 1.5 kHz. Claim 17 A method for controlling the movement of an object, such as an optical element, in at least one of an open loop and a closed loop method by means of a device according to any one of claims 1 and 3 to 16, wherein the device is designed to move the object and has an electromagnetic actuator (2) having a stator (3) and a rotor (4) coupled to the stator (3) in a manner that generates the movement and interacts with the object or supports the object, a flexor (7, 12) that guides and supports at least one of the rotor (4), and at least one sensor (13) for detecting the movement of at least one of the rotor (4) and the object, wherein the sensor signal of the at least one sensor (13) generated based on the movement of at least one of the rotor (4) and the object is used to control the position of the rotor (4) in at least one of an open loop and a closed loop method.

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