Shaking table
The oscillating table design with a linear motion mechanism and rolling bearings facilitates easy lifespan calculation, accurate positioning, and high-speed operation by eliminating clearance and backlash.
Patent Information
- Authority / Receiving Office
- KR · KR
- Patent Type
- Patents
- Current Assignee / Owner
- NIPPON THOMPSON
- Filing Date
- 2023-08-07
- Publication Date
- 2026-07-29
AI Technical Summary
Conventional oscillating tables using worm gears face challenges in lifespan calculation, accurate positioning, and high-speed operation due to sliding mechanisms and backlash.
An oscillating table design incorporating a linear motion mechanism with rolling bearings and an eccentric shaft, allowing for easy lifespan calculation, accurate positioning, and high-speed operation by eliminating clearance and backlash.
Enables easy lifespan calculation, accurate positioning, and high-speed operation without clearance, ensuring smooth and stable oscillating motion.
Smart Images
Figure R1020257001587_ABST
Abstract
Description
Technology Field
[0001] The present disclosure relates to a oscillating table. The present application claims priority to Japanese application No. 2022-174481 filed on October 31, 2022, and incorporates all the contents described in said Japanese application. Background Technology
[0002] A sliding device comprising a base body and a sliding body is known (see, for example, Patent Document 1). According to the sliding device disclosed in Patent Document 1, a meshing body such as a worm or a pinion is used as a driving method. A rack gear that meshes with this meshing body is formed on the side of a first sliding member fixed to the base body or on the side of a second sliding member fixed to the sliding body. Prior art literature
[0003] [Patent Document 1] Japanese Patent Publication No. 2001-99254 The problem to be solved
[0004] In the case of a oscillating table (e.g., a goniostage), the conventional drive method employing a worm gear had the following problems. Specifically, since the drive method employing a worm gear utilizes a so-called sliding mechanism during operation, it is difficult to calculate the lifespan of the device. In addition, because the device is configured with a clearance, backlash occurs, making it very difficult to accurately determine the position of the table section. Furthermore, there are limitations to operating at high speeds.
[0005] Therefore, one of the objectives is to provide a oscillating table that allows for easy lifespan calculation, accurate positioning of the table section, and appropriate high-speed operation. means of solving the problem
[0006] A oscillating table according to the present disclosure comprises: a base portion; a linear motion mechanism including a rail mounted on the base portion and a slider mounted to be movable relative to the rail; a driving source for linearly reciprocating motion of the slider; a first support portion mounted on the slider and reciprocating linearly together with the slider; a first rolling bearing mounted on the first support portion; a table portion capable of oscillating motion by transmitting power from the driving source; a second support portion supporting the table portion; a second rolling bearing mounted on the second support portion; and an eccentric shaft comprising a first shaft portion and a second shaft portion disposed at an eccentric position relative to the first shaft portion, wherein the first shaft portion is supported by the first rolling bearing and the second shaft portion is supported by the second rolling bearing. Effects of the invention
[0007] According to the above oscillation table, lifespan calculation is easy, accurate positioning of the table section can be determined, and high-speed operation can be properly performed. Brief explanation of the drawing
[0008] FIG. 1 is a schematic perspective view illustrating a oscillating table according to embodiment 1 of the present disclosure. Figure 2 is a schematic plan view of the oscillating table shown in Figure 1. Figure 3 is a schematic side view of the oscillating table shown in Figure 1. Figure 4 is a schematic front view of the oscillating table shown in Figure 1. FIG. 5 is a schematic perspective view illustrating an oscillating table of Embodiment 1, with the table portion described later removed and some members shown in dashed lines. Figure 6 is a schematic plan view of the oscillating table shown in Figure 5. Figure 7 is a schematic side view of the oscillating table shown in Figure 5. Figure 8 is a schematic front view of the oscillating table shown in Figure 5. FIG. 9 is a schematic cross-sectional view of the oscillating table illustrated in FIG. 5, including the base portion described below, when cut in the YZ plane. Figure 10 is a schematic plan view of the oscillating table shown in Figure 9. FIG. 11 is a schematic side view of the oscillating table shown in FIG. 9. FIG. 12 is a schematic front view of the oscillating table shown in FIG. 9. Figure 13 is an enlarged view of area XIII shown in Figure 10. FIG. 14 is a schematic side view of the oscillating table shown in FIG. 13. FIG. 15 is a schematic side view of a oscillating table showing the table section described later in an inclined state due to oscillation. FIG. 16 is a schematic side view of a oscillating table showing the state before tilting, that is, the table portion described later being horizontal. Specific details for implementing the invention
[0009] [Overview of Embodiments]
[0010] The oscillating table of the present disclosure comprises a base portion, a linear motion mechanism including a rail mounted on the base portion and a slider mounted to be movable relative to the rail, a driving source for linearly reciprocating motion of the slider, a first support portion mounted on the slider and linearly reciprocating motion together with the slider, a first rolling bearing mounted on the first support portion, a table portion capable of oscillating motion by transmitting power from the driving source, a second support portion supporting the table portion, a second rolling bearing mounted on the second support portion, and an eccentric shaft comprising a first shaft portion and a second shaft portion disposed at an eccentric position relative to the first shaft portion, wherein the first shaft portion is supported by the first rolling bearing and the second shaft portion is supported by the second rolling bearing.
[0011] According to the oscillating table of the present disclosure, a slider included in a linear motion mechanism moves in a linear reciprocating motion by power from a driving source. A first support member mounted on the slider moves in a linear reciprocating motion together with the slider. Then, a table member mounted on a second support member via an eccentric shaft moves in an oscillating motion accompanying the linear reciprocating motion of the first support member. Here, the first shaft portion of the eccentric shaft is supported by a first rolling bearing, and the second shaft portion of the eccentric shaft is supported by a second rolling bearing. Unlike a sliding mechanism, this configuration facilitates the calculation of life based on the fatigue of the rolling element. Furthermore, since the configuration employs the first rolling bearing and the second rolling bearing, unlike a driving method employing a worm gear, no clearance is created, allowing for accurate positioning of the table member and suitability for high-speed operation. Therefore, according to this oscillating table, life calculation is easy, accurate positioning of the table member is possible, and high-speed operation can be appropriately performed. Here, accurate positioning of the table member means that the angle of inclination of the table member, which is inclined by the oscillating motion, can be accurately determined.
[0012] In the above-mentioned oscillating table, the linear motion mechanism may include a linear motion guide unit. By doing so, the table portion can be oscillated smoothly, and more accurate position determination can be performed.
[0013] In the above-mentioned oscillating table, at least one of the first rolling bearing and the second rolling bearing may include an angular bearing. By doing so, the table portion can be oscillated smoothly while properly supporting the eccentric shaft, and an accurate lifespan calculation can be performed.
[0014] In the above-described oscillating table, the driving source may include a ball screw having a screw shaft and a ball screw nut mounted on a first support member, and a motor that rotates the screw shaft. By doing so, the rotational motion of the motor is converted into the linear motion of the slider, allowing the table member to oscillate more smoothly, and the rotation of the motor is controlled to enable high-speed operation and accurate position determination.
[0015] In the above-mentioned oscillating table, when the table portion is horizontal when viewed in the horizontal direction, the direction in which the virtual line segment connecting the center of the first axis portion and the center of the second axis portion extends may be horizontal. By doing so, the stability of the oscillating table can be secured when the position of the table portion is horizontal.
[0016] In the above-described oscillating table, the sliders may be installed in multiple numbers. By doing so, the linear reciprocating motion of the first support member can be accurately performed by the multiple sliders, thereby enabling more accurate positioning and high-speed operation.
[0017] In the above-described oscillating table, the table portion may include a sliding portion having a sliding surface formed of a curved surface. The table portion may also include a guide portion formed of a curved surface, having a guide surface that contacts the sliding surface, and guiding the table portion. By doing so, the oscillating movement of the table portion can be made smoother through the sliding portion having a sliding surface and the guide portion having a guide surface.
[0018] In the above-mentioned oscillating table, the guide members may be installed as a pair with a rail in between. By doing so, the oscillating table members can be guided more appropriately.
[0019] [Specific examples of embodiments]
[0020] Next, an example of a specific embodiment of the oscillation table of the present disclosure will be described with reference to the drawings. In the following drawings, identical or corresponding parts are given the same reference numerals, and their descriptions are not repeated.
[0021] (Embodiment 1)
[0022] First, Embodiment 1, which is an embodiment of the present disclosure, will be described. FIG. 1 is a schematic perspective view illustrating a oscillating table according to Embodiment 1 of the present disclosure. In FIG. 1 and subsequent drawings, the Y direction represents the length direction of the oscillating table, which is the extension direction of the rail described later, the X direction represents the short direction of the oscillating table, and the Z direction represents the thickness direction (height direction) of the oscillating table. The X direction, the Y direction, and the Z direction are each orthogonal. FIG. 2 is a schematic plan view of the oscillating table illustrated in FIG. 1. FIG. 2 is a view of the oscillating table illustrated in FIG. 1 seen in the direction of arrow II. FIG. 3 is a schematic side view of the oscillating table illustrated in FIG. 1. FIG. 3 is a view of the oscillating table illustrated in FIG. 1 seen in the direction indicated by arrow III. FIG. 4 is a schematic front view of the oscillating table illustrated in FIG. 1. FIG. 4 is a view of the oscillating table illustrated in FIG. 1 seen in the direction indicated by arrow IV.
[0023] FIG. 5 is a schematic perspective view showing a oscillating table in Embodiment 1, with the table portion described later removed and some members indicated by dashed lines. FIG. 6 is a schematic plan view of the oscillating table shown in FIG. 5. FIG. 6 is a view of the oscillating table shown in FIG. 5 seen in the direction indicated by arrow VI. FIG. 7 is a schematic side view of the oscillating table shown in FIG. 5. FIG. 7 is a view of the oscillating table shown in FIG. 5 seen in the direction indicated by arrow VII. FIG. 8 is a schematic front view of the oscillating table shown in FIG. 5. FIG. 8 is a view of the oscillating table shown in FIG. 5 seen in the direction indicated by arrow VIII.
[0024] FIG. 9 is a schematic cross-sectional view of the oscillating table illustrated in FIG. 5, including the base portion described below, when cut along the YZ plane. FIG. 10 is a schematic plan view of the oscillating table illustrated in FIG. 9. FIG. 10 is a view of the oscillating table of FIG. 9 seen in the direction indicated by arrow X. FIG. 11 is a schematic side view of the oscillating table illustrated in FIG. 9. FIG. 11 is a view of the oscillating table of FIG. 9 seen in the direction indicated by arrow XI. FIG. 12 is a schematic front view of the oscillating table illustrated in FIG. 9. FIG. 12 is a view of the oscillating table of FIG. 9 seen in the direction indicated by arrow XII. FIG. 13 is an enlarged view of area XIII illustrated in FIG. 10. FIG. 13 is an enlarged view of area XIII of FIG. 10. FIG. 14 is a schematic side view of the oscillating table illustrated in FIG. 13. FIG. 15 is a schematic side view of the oscillating table illustrating the table portion described below in a tilted state due to oscillation. FIG. 16 is a schematic side view of a oscillating table showing the state before tilting, that is, the table portion described later being horizontal.
[0025] Referring to FIGS. 1 to 16, an oscillating table (10) according to embodiment 1 of the present disclosure comprises a base portion (11), a linear motion mechanism (12), a driving source (13), a first support portion (14), a first rolling bearing (15), a table portion (16), a second support portion (18), a second rolling bearing (19), and an eccentric shaft (20). In this embodiment, both the first rolling bearing (15) and the second rolling bearing (19) are angular bearings. Next, the configuration of each component will be described.
[0026] The base portion (11) is rectangular when viewed in the Z direction, which is the thickness direction. The base portion (11) is the part that serves as the foundation of the oscillating table (10), and each member is mounted directly or indirectly. The base portion (11) includes a plate-shaped base plate (34) and a pair of guide portions (17a) and guide portions (17b).
[0027] A pair of guide sections (17a) and guide sections (17b) are integrally formed with the base plate (34). Guide sections (17a) and guide sections (17b) are installed spaced apart in the X direction with the rail (21) described later in between. Guide section (17a) is formed as a curved surface and has a guide surface (29a) that contacts the sliding surface (38a) described later. Guide section (17b) is formed as a curved surface and has a guide surface (29b) that contacts the sliding surface (38b) described later. Guide surfaces (29a) and guide surfaces (29b) are installed at the Z-direction ends of guide sections (17a) and guide sections (17b), respectively. Guide surfaces (29a) and guide surfaces (29b) are each arc-shaped when viewed in the X direction. The curvature of guide surfaces (29a) and guide surfaces (29b) is the same. The guide surface (29a) and the guide surface (29b) guide the table portion (16) during the oscillating movement of the table portion (16).
[0028] The linear mechanism (12) is a linear guide unit in this embodiment. The linear mechanism (12) includes a rail (21) and, in this embodiment, two sliders (22a) and sliders (22b). The rail (21) is mounted so as to be positioned in the X-direction central area of the base part (11), specifically the base plate (34), with its length direction in the Y-direction. The rail (21) is mounted and fixed to the base plate (34) by means of a plurality of bolts. The rail (21) is formed such that the rail track surface on which the rolling element moves is concave along the length direction.
[0029] Sliders (22a) and (22b) are each mounted on the rail (21). In each slider (22a) and slider (22b), the slider track surface on which the rolling element rotates is formed to be concave along the longitudinal direction. A plurality of rolling elements, such as balls, are installed between the slider track surface of slider (22a) and the rail track surface. Likewise, a plurality of rolling elements, such as balls, are provided between the slider track surface of slider (22b) and the rail track surface. The linear mechanism (12) as a linear guide unit can smoothly reciprocate the sliders (22a) and slider (22b) in a linear direction along the longitudinal direction of the rail (21).
[0030] The driving source (13) causes the slider (22a) and the slider (22b) to move in a linear reciprocating motion. In this embodiment, the driving source (13) includes a ball screw (23) and a motor (24). The ball screw (23) includes a ball screw nut (25) and a screw shaft (26). The screw shaft (26) is installed so that its longitudinal direction extends in the Y direction. A screw groove is installed on the outer diameter surface of the screw shaft (26). The screw shaft (26) is rotated by the motor (24). The ball screw nut (25) is mounted on the screw shaft (26), and a rolling element (ball) is disposed between the screw groove and the track surface installed on the ball screw nut (25). Due to the rotation of the screw shaft (26), the ball screw nut (25) moves in a linear reciprocating motion in the Y direction, which is the longitudinal direction of the screw shaft (26).
[0031] The first support member (14) is block-shaped and is mounted on the ball screw nut (25). Additionally, the first support member (14) is installed to be placed on the upper portion of the slider (22a) and the slider (22b). That is, the ball screw nut (25), the first support member (14), the slider (22a), and the slider (22b) are each mounted and configured to move as a single unit. By the rotation of the screw shaft (26), the ball screw nut (25), the first support member (14) mounted on the ball screw nut (25), and the slider (22a) and the slider (22b) mounted on the first support member (14) move in tandem to perform linear reciprocating motion in the Y direction. A through hole extending in the X direction is formed in the first support member (14), and a first rolling bearing (15) is mounted within this through hole. In this embodiment, the outer ring of the first rolling bearing (15) is mounted so as to be fitted into the through hole installed in the first support member (14).
[0032] The table portion (16) is plate-shaped and is mounted to cover the base portion (11) in the Z direction. The table portion (16) is capable of oscillating by transmitting power from a driving source. The table portion (16) includes a mounting portion (27) having a plane (37) that can be parallel to the XY plane. The plane (37) of the mounting portion (27) becomes a surface exposed in the Z direction. The surface located opposite to the plane (37) of the mounting portion (27) in the thickness direction faces the base portion (11). Due to the oscillating movement of the table portion (16), the plane (37) of the mounting portion (27) becomes inclined with respect to the horizontal direction. At both ends of the mounting portion (27) in the X direction, a wedge portion (35a) and a wedge portion (35b) are provided that protrude toward the base plate (34). The Z-direction cross-sections of the wedge portion (35a) and the wedge portion (35b) are composed of curved surfaces. The Z-direction cross-sections of the wedge portion (35a) and the wedge portion (35b) are each arc-shaped when viewed in the X direction.
[0033] The table portion (16) includes a sliding portion (28a) having a sliding surface (38a) formed of a curved surface. The table portion (16) includes a sliding portion (28b) having a sliding surface (38b) formed of a curved surface. The sliding portion (28a) and the sliding portion (28b) are each mounted by bolts on the surface of the mounting portion (27) facing the base plate (34). The sliding portion (28a) and the sliding portion (28b) are each freely detachably mounted on the mounting portion (27). The sliding portion (28a) is positioned to contact the wedge portion (35a). The sliding portion (28b) is positioned to contact the wedge portion (35b). The sliding surface (38a) and the sliding surface (38b) are each arc-shaped when viewed in the X direction. The curvature of the sliding surface (38a) and the sliding surface (38b) is the same.
[0034] The second support member (18) is mounted on the table member (16) and supports the table member (16). The second support member (18) is mounted on the surface facing the base plate (34) among the mounting portions (27) of the table member (16). The second support member (18) is also block-shaped. Specifically, the second support member (18) has a tapered portion in which the width in the Y direction narrows as it approaches the base member (11) when viewed in the X direction. A through hole is formed in the second support member (18) that penetrates in the X direction, and a second rolling bearing (19) is mounted within this through hole. In this embodiment, the outer ring of the second rolling bearing (19) is mounted so as to be fitted into the through hole installed in the second support member (18).
[0035] The eccentric shaft (20) is mounted such that its axial direction is the X direction. The eccentric shaft (20) includes a first shaft portion (31), a second shaft portion (32), and a connecting portion (33). The connecting portion (33) is plate-shaped and is installed to connect the first shaft portion (31) and the second shaft portion (32). The second shaft portion (32) is positioned at an eccentric position relative to the first shaft portion (31). Specifically, the X-direction end of the first shaft portion and the X-direction end of the second shaft portion (32) are connected in an eccentric state, i.e., with the centers of each shaft portion offset. The eccentric shaft (20) rotates with the center (36b) of the second shaft portion (32) as the center of rotation. In this case, the second shaft portion (32) undergoes rotational motion. Since the second shaft (32) is positioned at an eccentric position relative to the first shaft (31), the first shaft (31) undergoes orbital motion with the center (36b) of the second shaft (32) as the center of rotation. Additionally, the center (36a) of the first shaft (31) and the center (36b) of the second shaft (32) are illustrated in FIG. 15 and FIG. 16.
[0036] The eccentric shaft (20) is supported by a first rolling bearing (15) and a second rolling bearing (19). Specifically, the first shaft portion (31) of the eccentric shaft (20) is supported by the first rolling bearing (15). Additionally, the second shaft portion (32) of the eccentric shaft (20) is supported by the second rolling bearing (19). In this embodiment, the first shaft portion (31) is fitted into the inner side of the inner ring included in the first rolling bearing (15). Additionally, the second shaft portion (32) is fitted into the inner side of the inner ring included in the second rolling bearing (19). Here, when viewed in the horizontal direction, when the plane (37) of the table portion (16), specifically the mounting portion (27), is horizontal, the extension direction of the virtual line segment (39) connecting the center (36a) of the first shaft portion (31) and the center (36b) of the second shaft portion (32) is configured to be horizontal. The virtual line segment (39) is shown as a dashed line in FIGS. 15 and FIGS. 16. Additionally, when the table portion (16) oscillates and the plane (37) becomes inclined, this virtual line segment (39) also becomes inclined.
[0037] Next, the operation of the oscillating table (10) is described. The screw shaft (26) of the ball screw (23) rotates due to the transmission of rotational force from the motor (24). Then, the ball screw nut (25) mounted on the screw shaft (26) moves in a straight line in the Y direction. In conjunction with the straight movement of the ball screw nut (25), the first support member (14) also moves in a straight line. In response to the straight movement of the first support member (14), the eccentric shaft (20) rotates. Due to the rotation of the eccentric shaft (20), the table member (16) is guided by the guide surface (29a) of a pair of guide members (17a) and the guide surface (29b) of a guide member (17b), and together with the second support member (18), the table member (16) oscillates. Due to the oscillation of the table member (16), the plane (37) of the mounting member (27) is inclined.
[0038] According to the oscillating table (10) of this configuration, the slider (22a) and slider (22b) included in the linear motion mechanism reciprocate in a linear motion by power from the driving source (13). The first support member (14) mounted on the slider (22a) and slider (22b) reciprocates in a linear motion together with the slider (22a) and slider (22b). Then, the table member (16) mounted on the second support member (18) via the eccentric shaft (20) oscillates in accordance with the linear reciprocating motion of the first support member (14). Here, the first shaft member (31) of the eccentric shaft (20) is supported by the first rolling bearing (15), and the second shaft member (32) of the eccentric shaft (20) is supported by the second rolling bearing (19). Unlike a sliding mechanism, this configuration makes it easy to calculate the lifespan based on the fatigue of the rolling element. In addition, since the configuration employs a first rolling bearing (15) and a second rolling bearing (19), unlike a driving method employing a worm gear, no gap is created, so the table portion (16) can be accurately positioned and is suitable for high-speed operation. Therefore, with such a oscillating table (10), lifespan calculation is easy, and the table portion (16) can be accurately positioned and high-speed operation can be properly performed.
[0039] In this embodiment, the linear motion mechanism (12) includes a linear motion guide unit. Therefore, the table portion (16) can be oscillated smoothly, and at the same time, position determination can be made more accurately.
[0040] In this embodiment, the first rolling bearing and the second rolling bearing are both angular bearings. Therefore, the table portion (16) can be oscillated smoothly while properly supporting the eccentric shaft (20), allowing for accurate lifespan calculation.
[0041] In this embodiment, the driving source (13) includes a ball screw (23) having a ball screw nut (25) mounted on a screw shaft (26) and a first support member (14), and a motor (24) that rotates the screw shaft (26). Accordingly, the rotational motion of the motor (24) is converted into linear motion of the slider (22a) and slider (22b) to more smoothly oscillate the table member (16), and the rotation of the motor (24) is controlled to enable high-speed operation and accurate position determination.
[0042] In this embodiment, when viewed in the horizontal direction, when the table portion (16) is horizontal, the extension direction of the virtual line segment (39) connecting the center (36a) of the first shaft portion (31) and the center (36b) of the second shaft portion (32) is horizontal. Therefore, the stability of the oscillating table (10) can be secured when the position of the table portion (16) is horizontal.
[0043] In this embodiment, a plurality of sliders (22a) and sliders (22b) are installed, specifically two. Accordingly, the linear reciprocating motion of the first support member (14) can be accurately performed by the plurality of sliders (22a) and sliders (22b), thereby enabling more accurate positioning and high-speed operation.
[0044] In this embodiment, the table portion (16) includes a sliding portion (28a) having a sliding surface (38a) formed of a curved surface and a sliding portion (28b) having a sliding surface (38b) formed of a curved surface. The base portion (11) includes a guide portion (17a) formed of a curved surface and having a guide surface (29a) in contact with the sliding surface (38a) and guiding the table portion (16), and a guide portion (17b) formed of a curved surface and having a guide surface (29b) in contact with the sliding surface (38b) and guiding the table portion (16). Accordingly, the sliding portion (28a) and the sliding portion (28b) having a sliding surface (38a) and a sliding surface (38b), respectively, and the guide portion (17a) and the guide portion (17b) having a guide surface (29a) and a guide surface (29b), respectively, can make the oscillating movement of the table portion (16) smoother.
[0045] In this embodiment, the guide section (17a) and the guide section (17b) are installed as a pair with the rail (21) in between. Thus, the oscillating table section (16) can be guided more appropriately.
[0046] (Other embodiments)
[0047] Additionally, in the above embodiment, the guide member (17a) and the guide member (17b) are installed as a pair with the rail (21) in between, but are not limited thereto and may be installed with either one.
[0048] In addition, in the above embodiment, sliders (22a) and (22b) are installed in multiple numbers, but are not limited thereto and may have only one slider.
[0049] In addition, in the above embodiment, the driving source (13) is configured to include a ball screw (23) comprising a screw shaft (26) and a ball screw nut (25) mounted on a first support member (14), and a motor (24) that rotates the screw shaft (26), but is not limited thereto, and the driving source (13) may use other mechanisms capable of linear reciprocating motion, such as a linear motor. In addition, in the above embodiment, a linear guide unit is configured to be used as the linear mechanism, but is not limited thereto, and other linear mechanisms may be adopted.
[0050] It should be understood that the embodiments disclosed above are illustrative in all respects and are not limiting in any respects. The scope of the invention is defined by the claims, and is intended to include all modifications within the meaning and scope equivalent to the claims. Explanation of the symbols
[0051] 10 oscillating table, 11 base part, 12 linear motion mechanism, 13 driving source, 14 first support part, 15 first rolling bearing, 16 table part, 17a, 17b guide part, 18 second support part, 19 second rolling bearing, 20 eccentric shaft, 21 rail, 22a, 22b slider, 23 ball screw, 24 motor, 25 ball screw nut, 26 screw shaft, 27 mounting part, 28a, 28b sliding part, 29a, 29b guide surface, 31 first shaft part, 32 second shaft part, 33 connecting part, 34 base plate, 35a, 35b wedge part, 36a, 36b center, 37 plane, 38a, 38b sliding surface, 39 virtual line segment.
Claims
Claim 1 A oscillating table comprising a base portion, a rail mounted on the base portion, and a slider mounted so as to be movable relative to the rail, a driving source for reciprocating linear motion of the slider, a first support portion mounted on the slider and reciprocating linearly together with the slider, a first rolling bearing mounted on the first support portion, a table portion capable of oscillating motion through which power from the driving source is transmitted, a second support portion supporting the table portion, a second rolling bearing mounted on the second support portion, and an eccentric shaft comprising a first shaft portion and a second shaft portion disposed at an eccentric position relative to the first shaft portion, wherein the first shaft portion is supported by the first rolling bearing and the second shaft portion is supported by the second rolling bearing. Claim 2 In claim 1, the linear motion mechanism is a oscillating table including a linear motion guide unit. Claim 3 A oscillating table according to claim 1 or 2, wherein at least one of the first rolling bearing and the second rolling bearing comprises an angular bearing. Claim 4 A oscillating table according to claim 1 or 2, wherein the driving source comprises a ball screw having a screw shaft and a ball screw nut mounted on the first support member, and a motor that rotates the screw shaft. Claim 5 A oscillating table according to claim 1 or 2, wherein, when viewed in the horizontal direction, the direction in which the virtual line segment connecting the center of the first axis and the center of the second axis extends is horizontal when the table portion is horizontal. Claim 6 In claim 1 or 2, the slider is a oscillating table in which a plurality of sliders are installed. Claim 7 A oscillating table according to claim 1 or 2, wherein the table portion comprises a sliding portion having a sliding surface formed of a curved surface, and the base portion comprises a guide portion formed of a curved surface, having a guide surface in contact with the sliding surface, and guiding the table portion. Claim 8 In claim 7, the guide member is a pair of oscillating tables installed with the rail in between.