Hemispherical Resonator Gyroscope with optical interferometer

Abstract

The present invention relates to a hemispherical resonator gyroscope to which an optical interferometer is applied, comprising a resonator, a resonance unit provided with a vibration applying member for applying vibration to the resonator, a signal generating unit that irradiates light emitted from a light source onto the resonator and a mirror part respectively and generates an optical interference signal through the light reflected from the resonator and the mirror part, and a calculation unit that calculates a resonance pattern of the resonator based on the optical interference signal generated through the signal generating unit. The hemispherical resonator gyroscope applying the optical interferometer according to the present invention has the advantage of improved measurement accuracy because it can more precisely measure minute displacements of the resonator using the optical interferometer and compensate for vibration deformation caused by asymmetry.

Description

Technology Field

[0001] The present invention relates to a hemispherical resonator gyroscope with an optical interferometer, and more specifically, to a hemispherical resonator gyroscope with an optical interferometer capable of detecting a resonance pattern using an optical interferometer. Background Technology

[0002] A gyroscope is a device that can be used to measure a physical quantity of angular rotation. The measured rotational angular velocity can be integrated over time to determine the change in the gyroscope's angular orientation. Once the initial orientation of the gyroscope is known, the change in the gyroscope's angular orientation can be determined to derive the gyroscope's orientation at any point in time after the change in angular orientation. Gyroscopes can be used in applications such as, for example, inertial navigation systems (INS), ground vehicle stabilization, aircraft, ships, and / or other applications.

[0003] A vibrating gyroscope is a gyroscope that utilizes the phenomenon of a resonator vibrating. A vibrating gyroscope may be referred to as a vibrating structural gyroscope and / or a Coriolis vibrating gyroscope (CVG).

[0004] However, in the case of conventional vibrating gyroscopes, asymmetry (mass and stiffness distribution) arising during the manufacturing process of the resonator causes deformation in the resonator's vibration pattern, which limits gyro performance. Therefore, a gyroscope capable of precisely measuring the resonator's vibration pattern is required. Prior art literature

[0005] Registered Patent Publication No. 10-2045982: Method for calibrating a vibration gyroscope The problem to be solved

[0006] The present invention was devised to solve the above problems, and aims to provide a hemispherical resonator gyroscope applying an optical interferometer capable of more precisely measuring minute displacements of a resonator using an optical interferometer and compensating for vibration deformation caused by asymmetry. means of solving the problem

[0007] A hemispherical resonator gyroscope with an optical interferometer according to the present invention for achieving the above objective comprises a resonator, a resonance unit provided with a vibration applying member for applying vibration to the resonator, a signal generating unit that irradiates light emitted from a light source onto the resonator and a mirror part respectively and generates an optical interference signal through light reflected from the resonator and the mirror part, and a calculation unit that calculates a resonance pattern of the resonator based on the optical interference signal generated through the signal generating unit.

[0008] The above signal generating unit can irradiate light to mutually spaced positions of the above resonators.

[0009] The signal generation unit comprises first and second collimators that each scan light to mutually spaced positions of the resonator and receive light reflected from the resonator, a third collimator that scans light to the mirror unit and receives light reflected from the mirror unit, and a first optical coupler unit that divides light emitted from the light source and provides it to the first to third collimators, and receives light received from the first to third collimators to generate a plurality of optical interference signals.

[0010] Meanwhile, the hemispherical resonator gyroscope to which the optical interferometer according to the present invention is applied further comprises a modulator installed on the optical path output from the first optical coupler unit to the second collimator to modulate the center frequency of the light output to the second collimator.

[0011] The modulator modulates the frequency of the light output to the second collimator differently from the center frequency of the light output from the first optical coupler unit to the first collimator.

[0012] The signal generation unit may comprise first and second collimators that each scan light to mutually spaced positions of the resonator and receive light reflected from the resonator, third and fourth collimators that scan light to the mirror unit and receive light reflected from the mirror unit, a light splitter that splits light emitted from the light source into first and second split lights, a second optical coupler unit that splits the first split light received from the light splitter and provides it to the first and third collimators, and receives light received from the first and third collimators to generate an optical interference signal, and a third optical coupler unit that splits the second split light received from the light splitter and provides it to the second and fourth collimators, and receives light received from the second and fourth collimators to generate an optical interference signal.

[0013] The first and second collimators can be set up for the resonator to irradiate light, respectively, at positions spaced apart from each other in the circumferential direction on the outer surface of the resonator.

[0014] The first and second collimators can be set with respect to the resonator such that the optical axis passes through the center of the resonator.

[0015] The first and second collimators can be set so that their optical axes intersect each other at a predetermined intersection angle.

[0016] The above intersection angle is preferably 45°.

[0017] Either of the first and second collimators may be set so that a vibration induction point of the resonator, on which vibration is applied from the vibration applying member, is located on the optical axis.

[0018] It is preferable that the above resonator be formed in a hemispherical shape.

[0019] The above resonator is formed such that its outer diameter decreases from one side to the other, and an internal space is formed on one side so as to be recessed inward, and the internal space is formed in a hemispherical shape such that its inner diameter decreases from one side to the other of the resonator.

[0020] The above resonator can be formed from a metallic material.

[0021] The above resonator can be formed from a glass material.

[0022] The above resonator may have a coating layer made of a metallic material formed to cover its surface.

[0023] The above-mentioned calculation unit calculates the micro-displacement for the light-irradiated points of the resonator where light is irradiated from the first and second collimators based on the optical interference signal provided by the above-mentioned signal generation unit, calculates the micro-displacement due to the rotation of the resonator by compensating for the micro-displacement due to the asymmetry of the resonator based on the amplitude and phase of the calculated micro-displacement for the light-irradiated points, and inversely calculates the angular displacement of the resonator using the calculated micro-displacement due to the rotation of the resonator. Effects of the invention

[0024] The hemispherical resonator gyroscope applying an optical interferometer according to the present invention has the advantage of improved measurement accuracy because it can more precisely measure minute displacements of the resonator using the optical interferometer and compensate for vibration deformation caused by asymmetry using the measured minute displacements of the resonance. Brief explanation of the drawing

[0025] FIG. 1 is a conceptual diagram of a hemispherical resonator gyroscope to which an optical interferometer is applied according to an embodiment of the present invention, and FIG. 2 is a plan view of the resonator of the hemispherical resonant gyroscope of FIG. 1, and FIG. 3 is a partial cross-sectional view of a resonator according to another embodiment of the present invention, and FIG. 4 is a conceptual diagram of a hemispherical resonator gyroscope with an optical interferometer applied according to another embodiment of the present invention. Specific details for implementing the invention

[0026] Hereinafter, a hemispherical resonator gyroscope with an optical interferometer applied according to an embodiment of the present invention will be described in detail with reference to the attached drawings. As the present invention is susceptible to various modifications and may take various forms, specific embodiments are illustrated in the drawings and described in detail in the text. However, this is not intended to limit the present invention to the specific disclosed forms, and it should be understood that it includes all modifications, equivalents, and substitutions that fall within the spirit and scope of the present invention. Similar reference numerals have been used for similar components in the description of each drawing. In the attached drawings, the dimensions of the structures are shown enlarged compared to the actual dimensions for the clarity of the present invention.

[0027] Terms such as "first," "second," etc., may be used to describe various components, but said components should not be limited by said terms. These terms are used solely for the purpose of distinguishing one component from another. For example, without departing from the scope of the present invention, the first component may be named the second component, and similarly, the second component may be named the first component.

[0028] The terms used in this application are used merely to describe specific embodiments and are not intended to limit the invention. The singular expression includes the plural expression unless the context clearly indicates otherwise. In this application, terms such as "comprising" or "having" are intended to specify the existence of the features, numbers, steps, actions, components, parts, or combinations thereof described in the specification, and should be understood as not precluding the existence or addition of one or more other features, numbers, steps, actions, components, parts, or combinations thereof.

[0029] Unless otherwise defined, all terms used herein, including technical or scientific terms, have the same meaning as generally understood by those skilled in the art to which the present invention pertains. Terms such as those defined in commonly used dictionaries should be interpreted as having a meaning consistent with their meaning in the context of the relevant technology, and should not be interpreted in an ideal or overly formal sense unless explicitly defined in this application.

[0030] FIGS. 1 and FIGS. 2 illustrate a hemispherical resonator gyroscope (100) to which an optical interferometer according to the present invention is applied.

[0031] Referring to the drawing, the hemispherical resonator gyroscope (100) to which the above-described optical interferometer is applied comprises a resonator (210), a resonance unit (210) provided with a vibration applying member (220) for applying vibration to the resonator (210), a signal generating unit (300) that irradiates light emitted from a light source (350) onto the resonator (210) and the mirror unit (360) respectively and generates an optical interference signal through the light reflected from the resonator (210) and the mirror unit (360), and a calculation unit (400) that calculates the resonance pattern of the resonator (210) based on the optical interference signal generated through the signal generating unit (300).

[0032] The above resonator (210) is formed in a hemispherical shape. At this time, the resonator (210) is formed convexly downward so that the outer diameter decreases as it goes from the upper surface downward. Here, an internal space is formed on one side of the resonator (210) to be recessed inward. It is preferable that the internal space be formed in a hemispherical shape such that the inner diameter decreases as it goes from one side of the resonator (210) to the other.

[0033] Here, the resonator (210) is formed of a metallic material. Meanwhile, the resonator (210) may also be formed of a glass material. At this time, as shown in FIG. 3, a coating layer (211) is formed to cover the surface, i.e., the inner surface and the outer surface of the resonator (210), and it is preferable that the coating layer (211) be formed of a metallic material.

[0034] Meanwhile, although not shown in the drawing, the resonator (210) can be supported on a frame using a support member. One end of the support member is installed on the frame, and the other end is fixed to the center of the resonator (210), thereby supporting the resonator (210) so that it is spaced apart from the frame so that the resonator (210) vibrates by the vibration applying member (220). The resonator (210) is set on the detection target of the signal generation unit, and the vibration pattern rotates in correspondence with the physical quantity of rotation of the detection target.

[0035] The vibration applying member (220) comprises a waveform generator (221) that generates a sinusoidal wave for vibrating the resonator (210), an amplifier (222) that amplifies the sinusoidal wave generated by the waveform generator (221), and an electrode (223) that applies the sinusoidal wave amplified by the amplifier (222) to the resonator (210). Here, it is preferable that the electrode (223) be set at a predetermined distance from the outer surface of the resonator (210).

[0036] Meanwhile, the vibration applying member (220) is not limited to this, but any vibration applying means capable of applying vibration to the corresponding resonator (210) can be applied.

[0037] The signal generation unit (300) irradiates light to mutually spaced positions of the resonator (210), and comprises first and second collimators (310, 320) that irradiate light to mutually spaced positions of the resonator (210) and receive light reflected from the resonator (210), a third collimator (330) that irradiates light to the mirror unit (360) and receives light reflected from the mirror unit (360), and a first optical coupler unit (340) that divides light emitted from the light source (350) and provides it to the first to third collimators (310, 320, 330), and receives light received from the first to third collimators (310, 320, 330) to generate a plurality of optical interference signals.

[0038] Here, the light source (350) generates laser light, and depending on the application, a laser with a spectrum having various wavelengths and full width at half maximum is used. The light source (350) transmits laser light to the first optical coupler unit (340) through the first optical fiber (341) connected to the first optical coupler unit (340). Meanwhile, a circulator may be installed in the first optical fiber (341).

[0039] The first collimator (310) is connected to the first optical coupler unit (340) through the second optical fiber (342). The first collimator (310) injects light received from the first optical coupler unit (340) through the second optical fiber (342) into the resonator (210) and transmits light reflected from the resonator (210) to the second optical fiber (342).

[0040] Here, the first collimator (310) is set so as to be spaced apart from the outer surface of the resonator (210), and is set so that light is irradiated from the outer surface of the resonator (210) toward the center. At this time, it is preferable that the first collimator (310) be set so that its optical axis passes through the center of the resonator (210) and the electrode (223) of the vibration applying member (220).

[0041] The second collimator (320) is connected to the first optical coupler unit (340) through the third optical fiber (343). The second collimator (320) injects light received from the first optical coupler unit (340) through the third optical fiber (343) into the resonator (210) and transmits light reflected from the resonator (210) to the third optical fiber (343).

[0042] Here, the second collimator (320) is set so as to be spaced apart from the outer surface of the resonator (210), and is set so that light is irradiated from the outer surface of the resonator (210) toward the center. At this time, the second collimator (320) is set so that light is irradiated onto the outer surface of the resonator (210) at a position spaced circumferentially apart from the first collimator (310). More specifically, the first and second collimators (310, 320) are set so that the optical axes of the emitted light intersect each other at a predetermined intersection angle. Here, the intersection angle is preferably 45°.

[0043] Meanwhile, the signal generation unit (300) further comprises a modulator (370) installed on the optical path output from the first optical coupler unit (340) to the second collimator (320) to modulate the center frequency of the light output to the second collimator (320). It is preferable that the modulator (370) be installed on the third optical fiber (343) to modulate the frequency of the light output to the second collimator (320) differently from the center frequency of the light output from the first optical coupler unit (340) to the first collimator (310).

[0044] The third collimator (330) is connected to the first optical coupler unit (340) through the fourth optical fiber (344). The third collimator (330) injects light received from the first optical coupler unit (340) through the fourth optical fiber (344) into the mirror unit (360) and transmits the light reflected from the mirror unit (360) to the fourth optical fiber (344). At this time, the mirror unit (360) is installed opposite the output end of the third collimator (330) to reflect the light emitted from the third collimator (330), and it is preferable that the mirror unit (360) be installed to be movable along the optical axis direction of the light emitted from the third collimator (330). Meanwhile, although not shown in the drawing, instead of the third collimator (330) and the mirror part (360), a reflective coating part capable of reflecting light transmitted through the fourth optical fiber (344) may be provided at the end of the fourth optical fiber (344).

[0045] The first optical coupler unit (340) is connected to a light source (350) via a first optical fiber (341) to receive light from the light source (350), and divides the received light to provide it to the first to third collimators (310, 320, 330) via the second to fourth optical fibers (342, 343, 344). Additionally, the first optical coupler unit (340) receives light transmitted from the first to third collimators (310, 320, 330) and generates a plurality of optical interference signals. Here, the first optical coupler unit (340) is connected to a output unit (400) via the fifth and sixth optical fibers (345, 346) and provides the generated optical interference signals to the output unit (400) via the fifth and sixth optical fibers (345, 346). At this time, it is preferable that the first optical coupler unit (340) be a 3x3 optical fiber coupler.

[0046] The output unit (400) is equipped with a plurality of sensing modules (410) that are respectively connected to the fifth and sixth optical fibers (345, 346) and receive optical interference signals provided by the first optical coupler unit (340), and a output module (420) that inversely calculates the angular displacement of the resonator (210) corresponding to the detection target based on the optical interference signals detected by the sensing modules (410).

[0047] The calculation module (420) calculates the minute displacement of the light irradiation points, namely the first and second collimators (310, 320), through which light is irradiated, based on the optical interference signal provided by the detection module (410).

[0048] Next, the calculation module (420) extracts the micro-displacement for the rotation of the detection target, that is, the rotation of the resonator (210), using the micro-displacement of the light irradiation points. The vibration of the resonator (210) is affected by a small amount of asymmetry during manufacturing. The calculation module (420) extracts the micro-displacement caused by the rotation of each light irradiation point by compensating for the micro-displacement caused by asymmetry using data on the micro-displacement of the light irradiation points.

[0049] Here, the calculation module (420) calculates the resonance pattern angle using the micro-displacement caused by the rotation of the extracted light irradiation points, and inversely calculates the angular displacement of the detection target based on the calculated resonance pattern angle and information regarding the specifications of the pre-entered resonator (210) or detection target.

[0050] The hemispherical resonator gyroscope (100) with an optical interferometer applied according to the present invention configured as described above has the advantage of improving measurement accuracy by using the optical interferometer to more precisely measure minute displacements of the resonator (210) and to compensate for vibration deformation caused by asymmetry.

[0051] Meanwhile, FIG. 4 illustrates a signal generation unit (500) according to another embodiment of the present invention.

[0052] Elements that perform the same function as those in the previously illustrated drawings are indicated by the same reference numeral.

[0053] Referring to the drawing, the signal generating unit (500) comprises: first and second collimators (510, 520) that each scan light to mutually spaced positions of the resonator (210) and receive light reflected from the resonator (210); third and fourth collimators (530, 540) that scan light to the mirror unit (360) and receive light reflected from the mirror unit (360); a light splitter (550) that splits the light emitted from the light source (350) into first and second split lights; and a second optical coupler that splits the first split light received from the light splitter (550) and provides it to the first and third collimators (510, 530), and receives the light received from the first and third collimators (510, 530) to generate an optical interference signal. The apparatus comprises a unit (560) and a third optical coupler unit (570) that divides the second divided light received from the optical splitter (550) and provides it to the second and fourth collimators (520, 540), and receives the light received from the second and fourth collimators (520, 540) to generate an optical interference signal.

[0054] The optical splitter (550) is connected to the light source (350) through the seventh optical fiber (551) and splits the light output from the light source (350) into first and second split light. At this time, a plurality of eighth optical fibers (552) are connected to the output end of the optical splitter (550), and a second and third optical coupler unit (560, 570) is installed on each eighth optical fiber (552), so that the first and second split light are transmitted to the second and third optical coupler units (560, 570) respectively through the eighth optical fiber (552).

[0055] The first collimator (510) is connected to the second optical coupler unit (560) through the ninth optical fiber (511). The first collimator (510) injects light received from the second optical coupler unit (560) through the ninth optical fiber (511) into the resonator (210) and transmits light reflected from the resonator (210) to the ninth optical fiber (511).

[0056] The second collimator (520) is connected to the third optical coupler unit (570) through the tenth optical fiber (521). The second collimator (520) injects light received from the third optical coupler unit (570) through the tenth optical fiber (521) into the resonator (210) and transmits light reflected from the resonator (210) to the tenth optical fiber (521).

[0057] At this time, the second collimator (520) is set so that light is irradiated onto the outer surface of the resonator (210) at a position spaced circumferentially apart from the first collimator (510). More specifically, the first and second collimators (510, 520) are set so that the optical axes of the emitted light intersect each other at a predetermined intersection angle. Here, the intersection angle is preferably 45°.

[0058] The third collimator (530) is connected to the second optical coupler unit (560) through the eleventh optical fiber (531). The third collimator (530) injects light received from the second optical coupler unit (560) through the eleventh optical fiber (531) into the mirror unit (360) and transmits light reflected from the mirror unit (360) to the eleventh optical fiber (531).

[0059] The fourth collimator (540) is connected to the third optical coupler unit (570) through the twelfth optical fiber (541). The fourth collimator (540) injects light received from the third optical coupler unit (570) through the twelfth optical fiber (541) into the mirror section (360) and transmits light reflected from the mirror section (360) to the twelfth optical fiber (541).

[0060] The second optical coupler unit (560) is connected to the optical splitter (550) via the eighth optical fiber (552) to receive the first split light from the optical splitter (550), and splits the received first split light to provide it to the first collimator (510) and the third collimator (530) via the ninth optical fiber (511) and the eleventh optical fiber (531). Additionally, the second optical coupler unit (560) receives the light transmitted from the first collimator (510) and the third collimator (530) to generate an optical interference signal. Here, the second optical coupler unit (560) is connected to the output unit (400) via the thirteenth optical fiber (561) and provides the generated optical interference signal to the output unit (400) via the thirteenth optical fiber (561). At this time, it is preferable that the second optical coupler unit (560) be a 3x3 optical fiber coupler.

[0061] Meanwhile, the third optical coupler unit (570) is connected to the optical splitter (550) via the eighth optical fiber (552) to receive the second split light from the optical splitter (550), and splits the received second split light to provide it to the second collimator (520) and the fourth collimator (540) via the tenth optical fiber (521) and the twelfth optical fiber (541). Additionally, the third optical coupler unit (570) receives the light transmitted from the second collimator (520) and the fourth collimator (540) to generate an optical interference signal. Here, the third optical coupler unit (570) is connected to the output unit (400) via the fourteenth optical fiber (571) and provides the generated optical interference signal to the output unit (400) via the fourteenth optical fiber (571). At this time, it is preferable that the third optical coupler unit (570) be a 3x3 optical fiber coupler.

[0062] The calculation unit (400) receives an optical interference signal through a detection module connected to the 13th optical fiber (561) and the 14th optical fiber (571), and the calculation module (420) calculates the micro-displacement of the light irradiation points where light is irradiated through the 1st and 2nd collimators (510, 520) using the corresponding optical interference signal, and extracts the micro-displacement caused by rotation of each light irradiation point by compensating for the micro-displacement caused by asymmetry using data on the micro-displacement of the light irradiation points. Here, the calculation module (420) calculates the resonance pattern angle using the extracted micro-displacement caused by rotation of the light irradiation points, and inversely calculates the angular displacement of the detection target based on the calculated resonance pattern angle and information on the specifications of the pre-entered resonator (210) or detection target.

[0063] The description of the presented embodiments is provided to enable any person skilled in the art to use or practice the present invention. Various modifications to these embodiments will be apparent to those skilled in the art, and the general principles defined herein may be applied to other embodiments without departing from the scope of the present invention. Thus, the present invention is not limited to the embodiments presented herein, but should be interpreted in the broadest possible scope consistent with the principles and novel features presented herein. Explanation of the symbols

[0064] 100: Hemispherical resonator gyroscope with optical interferometer 200: Resonance unit 210: Resonator 211: Coating layer 220: Vibration input component 221: Waveform generator 222: Amplifier 223: Electrode 300: Signal generation unit 310: First collimator 320: 2nd Collimator 330: 3rd Collimator 340: First optical coupler unit 341: First optical fiber 342: Second optical fiber 343: Third optical fiber 344: 4th optical fiber 345: 5th optical fiber 346: 6th optical fiber 350: Light source 360: Mirror section 370: Modulator 400: Output unit 410: Detection module 420: Output Module

Claims

Claim 1 A resonance unit provided with a resonator and a vibration applying member for applying vibration to the resonator; a signal generating unit that irradiates light emitted from a light source onto the resonator and a mirror part, respectively, and generates an optical interference signal through light reflected from the resonator and the mirror part, and irradiates light onto mutually spaced positions of the resonator, respectively; and a calculation unit that calculates a resonance pattern of the resonator based on the optical interference signal generated through the signal generating unit; wherein the signal generating unit comprises first and second collimators that scan light onto mutually spaced positions of the resonator, respectively, and receive light reflected from the resonator; and a third collimator that scans light onto the mirror part and receives light reflected from the mirror part. A hemispherical resonator gyroscope with an applied optical interferometer, comprising: a first optical coupler unit that divides light emitted from the light source and provides it to the first to third collimators, and receives light received from the first to third collimators to generate a plurality of optical interference signals. Claim 2 delete Claim 3 delete Claim 4 A hemispherical resonator gyroscope with an optical interferometer applied thereto, further comprising: a modulator installed on the optical path output from the first optical coupler unit to the second collimator to modulate the center frequency of the light output to the second collimator in claim 1. Claim 5 In paragraph 4, the modulator is a hemispherical resonator gyroscope with an optical interferometer applied, which modulates the frequency of light output to the second collimator differently from the center frequency of light output to the first collimator from the first optical coupler unit. Claim 6 A resonance unit provided with a resonator and a vibration applying member for applying vibration to the resonator; a signal generating unit that irradiates light emitted from a light source onto the resonator and a mirror part, respectively, and generates an optical interference signal through light reflected from the resonator and the mirror part, wherein the signal generating unit irradiates light onto mutually spaced positions of the resonator, respectively. The apparatus comprises: a calculation unit that calculates a resonance pattern of the resonator based on an optical interference signal generated through the signal generation unit; wherein the signal generation unit includes: first and second collimators that each scan light to mutually spaced positions of the resonator and receive light reflected from the resonator; third and fourth collimators that scan light to the mirror unit and receive light reflected from the mirror unit; an optical splitter that divides light emitted from the light source into first and second split lights; and a second optical coupler unit that divides the first split light received from the optical splitter and provides it to the first and third collimators, and receives light received from the first and third collimators to generate an optical interference signal. A hemispherical resonator gyroscope with an applied optical interferometer, comprising: a third optical coupler unit that divides the second divided light received from the optical splitter and provides it to the second and fourth collimators, and receives the light received from the second and fourth collimators to generate an optical interference signal. Claim 7 In claim 1 or 6, the first and second collimators are hemispherical resonator gyroscopes with an optical interferometer applied, which are set for the resonator to irradiate light at positions mutually spaced apart in the circumferential direction on the outer surface of the resonator. Claim 8 In claim 1 or 6, the first and second collimators are hemispherical resonator gyroscopes with an optical interferometer applied, wherein the optical axis is set for the resonator such that it passes through the center of the resonator. Claim 9 In claim 8, the first and second collimators are hemispherical resonator gyroscopes with an optical interferometer applied, wherein the optical axes are set to intersect each other to have a predetermined intersection angle. Claim 10 In claim 9, a hemispherical resonator gyroscope with an optical interferometer applied, wherein the intersection angle is 45°. Claim 11 In claim 9, a hemispherical resonator gyroscope with an optical interferometer applied, wherein either of the first and second collimators is set on the optical axis such that a vibration induction point of the resonator, on which vibration is applied from the vibration induction member, is located. Claim 12 In claim 1, the resonator is a hemispherical resonator gyroscope with an optical interferometer applied, formed in a hemispherical shape. Claim 13 In claim 12, the resonator is formed such that its outer diameter decreases from one side to the other, and an internal space is formed on one side to be recessed inward, and the internal space is formed in a hemispherical shape such that its inner diameter decreases from one side to the other, a hemispherical resonator gyroscope with an applied optical interferometer. Claim 14 In claim 12 or 13, the resonator is a hemispherical resonator gyroscope with an optical interferometer applied, formed of a metallic material. Claim 15 In claim 12 or 13, the resonator is a hemispherical resonator gyroscope with an optical interferometer applied, formed of a glass material. Claim 16 In claim 15, the above resonator is a hemispherical resonator gyroscope with an optical interferometer applied, wherein a coating layer made of a metallic material is formed to surround the surface of the resonator. Claim 17 A hemispherical resonator gyroscope applying an optical interferometer, wherein the calculation unit calculates a fine displacement for light irradiation points of the resonator where light is irradiated from the first and second collimators based on an optical interference signal provided by the signal generation unit, calculates a fine displacement due to rotation of the resonator based on the calculated fine displacement for the light irradiation points, and inversely calculates the angular displacement of the resonator using the calculated fine displacement due to rotation of the resonator.

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