Dispensing device, dispenser system having the same and dispensing method

Abstract

The present invention relates to a dispensing device, a dispenser system including the same, and a dispensing method, and more specifically, to a dispensing device that precisely dispenses a liquid to a target location in a measured amount, a dispenser system including the same, and a dispensing method. A discharge device according to one embodiment of the present invention may include: a nozzle portion that discharges a discharge liquid through a discharge port at a tip; a nozzle receiving block that provides a vacuum-forming space around the tip portion of the nozzle portion; and a suction portion that vacuum-exhausts the vacuum-forming space.

Description

Technology Field

[0001] The present invention relates to a dispensing device, a dispenser system including the same, and a dispensing method, and more specifically, to a dispensing device that precisely dispenses a liquid to a target location in a measured amount, a dispenser system including the same, and a dispensing method. Background Technology

[0002] A dispensing device is a device that performs the function of dispensing a set amount of liquid by spraying a certain amount through a nozzle to the corresponding location of a target object. Such a dispensing device can be used in precision industrial fields, such as display manufacturing processes, to coat or bond the corresponding area, and can be used to dispense liquid crystal (LC) during encapsulation and cell processes.

[0003] Droplets may be generated at the moment the liquid is ejected from the dispensing device, and these scattered droplets can contaminate areas other than the intended location. Furthermore, if the liquid has high viscosity, such as liquid crystal (LC), it may fail to break into droplets and instead stretch out, settling in a tadpole shape rather than a round one. This can result in a tail portion extending beyond the intended location, causing a deterioration in coating quality.

[0004] Therefore, technology is required to prevent contamination caused by scattered droplets during the discharge of the liquid and to prevent the tail portion of the discharged liquid from settling. Prior art literature

[0005] Registered Patent No. 10-1461438 The problem to be solved

[0006] The present invention provides a dispensing device that precisely dispenses a liquid to a target location in a precise quantity without contamination by scattered droplets and without a target tail, a dispenser system including the same, and a dispensing method. means of solving the problem

[0007] A discharge device according to one embodiment of the present invention may include: a nozzle portion that discharges a discharge liquid through a discharge port at a tip; a nozzle receiving block that provides a vacuum-forming space around the tip portion of the nozzle portion; and a suction portion that vacuum-exhausts the vacuum-forming space.

[0008] The nozzle receiving block includes an insertion groove into which the tip of the nozzle part is inserted, and the insertion groove may have a wider width than the tip of the nozzle part.

[0009] The above vacuum forming space can be formed between the inner surface of the insertion groove and the outer surface of the tip of the nozzle part.

[0010] The rear end of the nozzle part is fixed and further includes a nozzle fixing part supported by the nozzle receiving block; and the front end of the nozzle part can be spaced apart from the inner surface of the insertion groove by the nozzle fixing part being supported by the nozzle receiving block.

[0011] It may further include a sealing member provided between the nozzle fixing part and the nozzle receiving block.

[0012] The nozzle receiving block further includes a communication hole communicating with the insertion groove, and the discharge port of the nozzle part may be arranged concentrically with the communication hole.

[0013] The diameter of the above communication hole may be 90 to 110% of the diameter of the above discharge port.

[0014] The discharge port and the communication hole are arranged on different planes, and the distance between the discharge port and the communication hole may be 5 to 10% of the diameter of the discharge port.

[0015] The above suction unit may include a suction line for exhausting the vacuum forming space; and a suction pump connected to the suction line.

[0016] The nozzle receiving block may further include a first suction channel extending to the outside of the vacuum forming space; and a second suction channel connected to the first suction channel and extending in a direction intersecting the extension direction of the first suction channel.

[0017] The above first intake passage may be composed of multiple passages.

[0018] The nozzle receiving block may further include a buffer channel that connects two or more of the first suction channels to the second suction channel.

[0019] It may further include a control unit that controls the nozzle part and the suction part to discharge the discharge liquid from the discharge port while vacuum exhausting the vacuum forming space.

[0021] A dispenser system according to another embodiment of the present invention may include a stage supporting a target object; a discharge device according to one embodiment of the present invention provided on the stage; and a driving unit for moving the stage or the discharge device.

[0022] The above target object includes a glass substrate, and the above discharge liquid may include liquid crystal.

[0024] A discharge method according to another embodiment of the present invention may include: a process of vacuuming a vacuum forming space provided around the tip of a nozzle part; a process of discharging a discharge liquid from a discharge port of the nozzle part while vacuuming the vacuum forming space; and a process of sucking and discharging at least one of a scattered droplet and a droplet tail of the discharge liquid.

[0025] The above suction and discharge process may include: a process of forming a first vacuum in the vacuum forming space to suck up the scattered droplets; and a process of forming a second vacuum greater than the first vacuum to suck up the droplet tails.

[0026] The vacuum forming space above may be formed between the inner surface of the insertion groove and the outer surface of the tip of the nozzle part by inserting the tip of the nozzle part into the insertion groove of the nozzle receiving block.

[0027] The distance between the inner surface of the insertion groove and the outer surface of the tip of the nozzle part may be less than or equal to the diameter of the discharge port. Effects of the invention

[0028] A discharge device according to an embodiment of the present invention is provided with a vacuum-forming space around the tip of the nozzle portion to suck and discharge scattering droplets and / or droplet tails generated while discharging the discharge liquid through the discharge port of the nozzle portion, thereby preventing scattering droplets from contaminating parts (or areas) other than the impact location (or target location) or preventing droplet tails from forming a tail portion of the impacted discharge liquid. Accordingly, the coating quality of the discharge device can be improved.

[0029] Here, a vacuum-forming space can be formed between the inner surface of the insertion groove of the nozzle receiving block and the outer surface of the tip of the nozzle part, thereby generating suction pressure around the discharge port of the nozzle part to effectively suck up and discharge flying droplets and droplet tails.

[0030] In addition, in the discharge method using a discharge device, the discharge liquid can be discharged through the discharge port of the nozzle while vacuuming the vacuum-forming space, and accordingly, scattered droplets and / or droplet tails are sucked out, allowing the discharge liquid to be precisely discharged to the impact location in a precise quantity without contamination by scattered droplets or impact tails.

[0031] At this time, the vacuum level of the vacuum forming space can be adjusted according to the viscosity of the discharge liquid. In the case of low viscosity, scattering droplets are more likely to occur than droplet tails, so a first vacuum level is formed in the vacuum forming space to effectively suck up scattering droplets. In the case of high viscosity, droplet tails are more likely to occur than scattering droplets, so a second vacuum level greater than the first vacuum level is formed in the vacuum forming space to effectively suck up droplet tails. Through this, scattering droplets and / or droplet tails can be effectively removed by sucking and discharging them according to the viscosity of the discharge liquid. Brief explanation of the drawing

[0032] FIG. 1 is a schematic cross-sectional view showing a discharge device according to an embodiment of the present invention. FIG. 2 is a cross-sectional view showing the first and second suction passages of a nozzle receiving block according to an embodiment of the present invention. FIG. 3 is a schematic cross-sectional view showing a dispenser system according to another embodiment of the present invention. FIG. 4 is a flowchart illustrating a discharge method according to another embodiment of the present invention. Specific details for implementing the invention

[0033] Embodiments of the present invention will be described in more detail below with reference to the attached drawings. However, the present invention is not limited to the embodiments disclosed below but may be implemented in various different forms; these embodiments are provided merely to ensure that the disclosure of the present invention is complete and to fully inform those skilled in the art of the scope of the invention. In the description, the same reference numerals are assigned to identical components, and the drawings may be partially exaggerated in size to accurately describe the embodiments of the present invention, and the same reference numerals in the drawings refer to the same elements.

[0035] FIG. 1 is a schematic cross-sectional view showing a discharge device according to an embodiment of the present invention.

[0036] Referring to FIG. 1, a discharge device (100) according to one embodiment of the present invention may include: a nozzle part (110) that discharges a discharge liquid (10) through a discharge port (111) at the tip; a nozzle receiving block (120) that provides a vacuum forming space (125) around the tip of the nozzle part (110); and a suction part (not shown) that vacuum exhausts the vacuum forming space (125).

[0037] The nozzle part (110) may have a discharge port (111) at its tip and may discharge a discharge liquid (10) through the discharge port (111) at the tip and may apply (dispense) the discharge liquid (10) to a corresponding location (or target location) of a target object (20). Here, the target object (20) may include a substrate such as glass, organic, or semiconductor. For example, the nozzle part (110) may have a discharge port (111) formed at its tip, and the discharge liquid (10) discharged from the discharge port (111) may fall vertically by gravity and land on a corresponding location of the target object (20).

[0038] The nozzle receiving block (120) can provide a vacuum forming space (125) around the tip of the nozzle part (110) and can provide suction pressure around the discharge port (111). Here, the vacuum forming space (125) can be connected to a suction part (not shown) and vacuum exhaust (or suction exhaust) so that a vacuum can be formed and the degree of vacuum can be controlled according to the suction strength of the suction part (not shown).

[0039] The suction unit (not shown) can vacuum exhaust the vacuum forming space (125) and can create a vacuum in the vacuum forming space (125) to provide suction pressure around the discharge port (111), and can remove scattered droplets (13) and / or droplet tails (11b) of the discharge liquid (10) that have escaped through the discharge port (111) in addition to a predetermined discharge amount (or a certain amount) by suctioning and discharging them. Here, the suction unit (not shown) can adjust the suction (or exhaust) intensity, and accordingly, the vacuum level of the vacuum forming space (125) can be adjusted.

[0040] The discharge device (100) according to the present invention is provided with a vacuum-forming space (125) around the tip of the nozzle part (110) to suck and discharge the scattered droplets (13) and / or droplet tails (11b) generated while discharging the discharge liquid (10) through the discharge port (111) of the nozzle part (110), thereby preventing the scattered droplets (13) from contaminating a part (or area) other than the impact location (or target location) or the droplet tails (11b) from forming a tail portion of the discharged liquid (or impacted droplet). Accordingly, the coating quality of the discharge device (100) can be improved.

[0041] Here, the nozzle receiving block (120) may include an insertion groove (121) into which the tip portion (e.g., lower portion) of the nozzle portion (110) is inserted, and the tip portion (part) of the nozzle portion (110) having a discharge port (111) formed therein may be inserted into the insertion groove (121).

[0042] At this time, the insertion groove (121) may have a width wider than the tip portion of the nozzle portion (110). For example, the insertion groove (121) may be larger than the insertion portion (or tip portion) of the nozzle portion (110), the flat cross-sectional area (or width) of the insertion groove (121) may be larger than the flat cross-sectional area (or width) of the nozzle portion (110), and the nozzle portion (110) may be spaced apart from the inner surface of the insertion groove (121).

[0043] That is, the vacuum forming space (125) can be formed between the inner surface of the insertion groove (121) and the outer surface of the tip of the nozzle part (110) by inserting the tip of the nozzle part (110) into the insertion groove (121) and separating the outer surface of the tip of the nozzle part (110) from the inner surface of the insertion groove (121).

[0044] For example, the insertion groove (121) may be formed corresponding to the tip (shape) of the nozzle part (110), and the distance between the inner surface of the insertion groove (121) and the outer surface of the tip of the nozzle part (110) may be generally constant (or equal). Through this, the vacuum level may be uniform (or equal) throughout the vacuum level forming space (125), and a uniform suction pressure may be generated around the discharge port (111) of the nozzle part (110).

[0045] In the present invention, the tip of the nozzle part (110) is inserted into the insertion groove (121) of the nozzle receiving block (120) to form a vacuum forming space (125) between the inner surface of the insertion groove (121) of the nozzle receiving block (120) and the outer surface of the tip of the nozzle part (110). Through this, suction pressure is generated overall (or 360°) around the discharge port (111) of the nozzle part (110), thereby effectively sucking and discharging the scattered droplets (13) and droplet tails (13b). That is, suction pressure is formed in the entire 360° area around the discharge port (111) by the vacuum forming space (125), so that all scattered droplets (13) can be sucked regardless of the scattering direction of the scattered droplets (13).

[0046] The discharge device (100) according to the present invention may further include a nozzle fixing part (140) in which the rear end of the nozzle part (110) is fixed and supported by a nozzle receiving block (120).

[0047] The nozzle fixing part (140) can fix the nozzle part (110), and the rear end (e.g., upper end) of the nozzle part (110) opposite to the front end can be fixed, and the front end of the nozzle part (110) can be inserted into the insertion groove (121) and supported on the upper end (or upper surface) of the nozzle receiving block (120). For example, the rear end of the nozzle part (110) can be inserted into the nozzle fixing part (140) and fixed, and the front end of the nozzle part (110) can protrude to the lower part of the nozzle fixing part (140), and the lower surface (or bottom) of the nozzle fixing part (140) can be inserted into the insertion groove (121) and supported on the upper surface (surface) of the nozzle receiving block (120).

[0048] Here, the tip of the nozzle part (110) can be spaced apart from the inner surface of the insertion groove (121) by the nozzle fixing part (140) being supported by the nozzle receiving block (120), and accordingly, a vacuum forming space (125) can be formed between the inner surface of the insertion groove (121) of the nozzle receiving block (120) and the outer surface of the tip of the nozzle part (110), and the distance between the inner surface of the insertion groove (121) and the outer surface of the tip of the nozzle part (110) can be constant. In addition, the distance between the inner surface of the insertion groove (121) and the outer surface of the tip of the nozzle part (110) can be made uniform overall, and accordingly, a suction exhaust path (i.e., the vacuum forming space) having a uniform width can be formed within the insertion groove (121), and a uniform and smooth exhaust flow can be formed. Through this, the scattered droplet (13) and the droplet tail (11b) can be effectively sucked and discharged along the suction exhaust path.

[0049] And the discharge device (100) according to the present invention may further include a sealing member (151) provided between the nozzle fixing part (140) and the nozzle receiving block (120).

[0050] A sealing member (151) may be provided between the nozzle fixing part (140) and the nozzle receiving block (120), and seals the gap between the nozzle fixing part (140) and the nozzle receiving block (120) so as not to cause a minute leakage of suction pressure except around (or near) the discharge port (111), and can effectively form a vacuum in the vacuum forming space (125). For example, the sealing member (151) may be provided between the bottom (or lower surface) of the nozzle fixing part (140) and the top (or upper surface) of the nozzle receiving block (120), and a concave groove may be formed on the upper surface of the nozzle receiving block (120) and the sealing member (151) may be provided within the concave groove. Here, the sealing member (151) may include an O-ring.

[0051] The nozzle receiving block (120) may further include a communication hole (122) that communicates with the insertion groove (121). The communication hole (122) may communicate with the insertion groove (121) and may pass through the discharge liquid (10) discharged from the discharge port (111) by being opposite (or communicating) with the discharge port (111). For example, among the discharge liquid (10) discharged from the discharge port (111), only the droplet (11a) of the discharge droplet (11) may be deposited at the target location (or impact location) of the target object (20) through the communication hole (122) to form a deposited droplet (12), and the droplet tail (11b) and / or scattered droplet (13) may be sucked (discharged) into the vacuum forming space (125).

[0052] Here, the discharge port (111) of the nozzle part (110) can be arranged concentrically with the communication hole (122). That is, the center of the discharge port (111) of the nozzle part (110) and the center of the communication hole (122) are located on a straight line (or coincide), so that the discharge droplet (11) discharged from the discharge port (111) can pass through the communication hole (122) well. As the discharge droplet (11) passes through the communication hole (122), only the droplet (11a) completely passes through the communication hole (122), and the droplet tail (11b) cannot completely exit the communication hole (122) and can be sucked into the vacuum forming space (125) by the suction pressure.

[0053] At this time, the diameter of the communication hole (122) may be 90 to 110% of the diameter of the discharge port (111), and the diameter of the communication hole (122) may be made equal to the diameter of the discharge port (111) as much as possible. If the diameter of the communication hole (122) is smaller than 90% of the diameter of the discharge port (111), the droplet (11a) may pass through the communication hole (122) and hit the circumference of the communication hole (122), causing the scattered droplet (13) to increase in size and decrease in size, and as a result, a small amount of discharge (or the discharge liquid) may be applied (or landed) at the impact location, and a large amount of scattered droplet (13) may not be completely removed. On the other hand, if the diameter of the connecting hole (122) is larger than 110% of the diameter of the discharge port (111), leakage of suction pressure occurs through the connecting hole (122), and the inlet (or starting position) of the vacuum forming space (125) moves away from the droplet tail (11b), so that the suction pressure is not properly transmitted to the droplet tail (11b), and thus sufficient (or complete) suction of the droplet tail (11b) may not occur. As a result, a large amount of discharge may be applied to the above-mentioned impact location, or a tail may form on the impact droplet (12), and the discharge liquid (10) may be applied in a tadpole shape.

[0054] However, if the diameter of the communication hole (122) is 90 to 110% of the diameter of the discharge port (111), all flying droplets (13) can be sucked in and droplet tails (11b) can be sufficiently (or completely) sucked in, thereby preventing the flying droplets (13) from contaminating parts other than the impact location and preventing the droplet tails (11b) from causing impact tails on the impacted droplets (12).

[0055] In addition, the discharge port (111) and the communication hole (122) may be placed on different planes, and the distance between the discharge port (111) and the communication hole (122) may be 5 to 10 percent of the diameter of the discharge port (111). The nozzle part (110) may be spaced apart from the inner surface of the insertion groove (121), so that the tip (part) of the nozzle part (110) may be spaced apart from the bottom surface of the insertion groove (121), and the discharge port (111) may be placed within the insertion groove (121). Accordingly, the communication hole (122), which is formed by penetrating at least a part of the bottom surface of the insertion groove (121), may be placed on a different plane from the discharge port (111), the discharge port (111) may be located above the communication hole (122), and the discharge port (111) and the communication hole (122) may be aligned (with each other).

[0056] At this time, the distance between the discharge port (111) and the communication hole (122) may be 5 to 10 percent of the diameter of the discharge port (111), and the communication hole (122) may be positioned as close as possible to the discharge port (111) so that the droplet (11a) can pass through the communication hole (122) without being affected by the suction pressure, while the relatively small and light flying droplet (13) and droplet tail (11b) can be sucked (discharged) well into the vacuum forming space (125). That is, as the inlet of the vacuum forming space (125) becomes closer to and narrows with respect to the discharge port (111), leakage of suction pressure is suppressed and / or prevented, so that scattering droplets (13) and droplet tails (11b) can be well sucked into the vacuum forming space (125) by strong suction pressure, and relatively large and heavy droplets (11a) cannot enter the inlet of the vacuum forming space (125) and can be well expelled through the communication hole (122).

[0057] If the distance between the discharge port (111) and the communication hole (122) is less than 5% of the diameter of the discharge port (111), the entrance of the vacuum forming space (125) becomes too small, so that fine-sized scattered droplets (13) can be sucked into the vacuum forming space (125), but relatively large-sized scattered droplets (13) and droplet tails (11b) may not be sucked into the vacuum forming space (125). On the other hand, if the distance between the discharge port (111) and the communication hole (122) is greater than 10% of the diameter of the discharge port (111), the inlet of the vacuum forming space (125) becomes too large, and leakage of suction pressure may occur. If the suction strength of the suction part (not shown) is increased to compensate for this, the droplet (11a) may also be sucked in through at least some of the wide vacuum forming space (125) inlet, resulting in a loss of discharge volume (or the discharge liquid).

[0058] However, if the distance between the discharge port (111) and the communication hole (122) is 5 to 10 percent of the diameter of the discharge port (111), the scattered droplets (13) and droplet tails (11b) are well sucked into the vacuum-forming space (125), while the droplets (11a) are well expelled through the communication hole (122), so that a certain amount is deposited at the target location of the target object (20).

[0059] For example, the diameter of the discharge port (111) may be 2 to 3 mm (about 2.5 mm), and the distance between the discharge port (111) and the communication hole (122) may be 0.1 to 0.2 mm (about 0.2 mm). At this time, the diameter of the communication hole (122) may also be 2 to 3 mm (about 2.5 mm).

[0060] The above suction section (not shown) may include a suction line (not shown) for exhausting a vacuum forming space (125); and a suction pump (not shown) connected to the suction line (not shown). The suction line (not shown) may exhaust the vacuum forming space (125), may be connected to the suction pump (not shown), and may provide a discharge path (or exhaust path) through which a scattered droplet (13) and / or droplet tail (11b) sucked into the vacuum forming space (125) may move toward the suction pump (not shown) (or toward the suction pump) by the suction force of the suction pump (not shown).

[0061] A suction pump (not shown) may be connected to the suction line (not shown) and may provide suction force to draw in a scattered droplet (13) and / or droplet tail (11b) into a vacuum forming space (125), and may discharge (or exhaust) the scattered droplet (13) and / or droplet tail (11b) drawn into the vacuum forming space (125) through the suction line (not shown).

[0062] That is, the scattered droplets (13) and / or droplet tails (11b) can be sucked into the vacuum-forming space (125) by the suction force of the suction pump (not shown) and discharged (or moved) along the suction line (not shown).

[0063] FIG. 2 is a cross-sectional view showing the first and second suction passages of a nozzle receiving block according to an embodiment of the present invention.

[0064] Referring to FIG. 2, the nozzle receiving block (120) may further include a first suction channel (131) extending outward from the vacuum forming space (125); and a second suction channel (132) connected to the first suction channel (131) and extending in a direction intersecting the extension direction of the first suction channel (131). The first suction channel (131) may be in communication with the vacuum forming space (125) and extend outward from the vacuum forming space (125) (or radially), and may provide suction pressure to the vacuum forming space (125) perpendicular to the discharge direction of the discharge liquid (10). Accordingly, a force in the opposite direction to the discharge direction that hinders the discharge of the droplet (11a) may not act directly on the droplet (11a), so that only the scattered droplet (13) and / or droplet tail (11b) can be sucked (discharged) without affecting the discharge of the droplet (11a). For example, the first suction channel (131) may extend horizontally from the vacuum forming space (125).

[0065] The second suction channel (132) may be connected to the first suction channel (131) and may extend in a direction that intersects (or is perpendicular) with the extension direction of the first suction channel (131), and may be connected to the suction line (not shown), and may form an exhaust flow in a direction that intersects (e.g., a vertical direction) with the extension direction of the first suction channel (131) by the suction force of the suction pump (not shown). For example, the second suction channel (132) may be connected to the first suction channel (131) and extend in a vertical direction. When the suction line (not shown) is directly connected to the first suction channel (131), the suction force of the suction pump (not shown) acts directly in the extension direction of the first suction channel (131), so the difference in suction pressure may increase depending on the distance from the suction line (not shown), and the variation in suction pressure may increase depending on the amount of scattered droplets (13) and / or droplet tails (11b) within the first suction channel (131).

[0066] However, when the second suction channel (132) is connected to the first suction channel (131) to connect the suction line (not shown) and the first suction channel (131), the suction force of the suction pump (not shown) acts directly on the second suction channel (132), but suction pressure is formed indirectly within the first suction channel (131), so that the difference in suction pressure can be reduced depending on the distance from the suction line (not shown), and the deviation in suction pressure depending on the amount of scattered droplets (13) and / or droplet tails (11b) within the first suction channel (131) can also be reduced. Accordingly, a stable exhaust flow (or discharge flow) can be formed in the first suction channel (131), the second suction channel (132), and the suction line (not shown).

[0067] At this time, the first suction passage (131) may be composed of multiple passages and may be arranged symmetrically (or on both sides) around the vacuum forming space (125). By configuring the first suction passage (131) in multiple passages and symmetrically arranging them around the vacuum forming space (125), a vacuum can be stably formed along the circumference of the discharge port (111) of the nozzle part (110) in the vacuum forming space (125), and a uniform vacuum (or suction pressure) can be formed throughout (or overall) the vacuum forming space (125). Accordingly, a stable suction pressure can be provided around the entire circumference of the discharge port (111) of the nozzle part (110) (or 360°), and a uniform suction pressure can be formed around the discharge port (111) of the nozzle part (110).

[0068] For example, a plurality of first suction channels (131) may be extended in the same direction (or parallel direction) and may be arranged in a plurality (or two or more) on each side of the vacuum forming space (125), and may be arranged in parallel (or parallel) with the extension direction, spaced apart in a direction perpendicular to the extension direction on each side of the vacuum forming space (125). As shown in FIG. 2, a first horizontal channel (131a), a second horizontal channel (131b), and a third horizontal channel (131c) may be arranged on one side of the vacuum forming space (125), and a first horizontal channel (131a), a second horizontal channel (131b), and a third horizontal channel (131c) may be arranged in the same way on the other side of the vacuum forming space (125).

[0069] If there is only one first suction channel (131) on each side of the vacuum forming space (125), the flying droplets (13) and droplet tails (11b) may be well sucked in the direction of extension, but the suction pressure in the direction perpendicular to the direction of extension is relatively weak, making it difficult to suck in the flying droplets (13) and / or droplet tails (11b) that fly (or scatter or stretch) in the direction perpendicular to the direction of extension. Accordingly, if multiple first suction channels (131) are arranged (or positioned) in the direction perpendicular to the direction of extension on each side of the vacuum forming space (125), the suction pressure in the direction perpendicular to the direction of extension is supplemented, so that the flying droplets (13) and / or droplet tails (11b) that fly in the direction perpendicular to the direction of extension can also be effectively sucked in.

[0070] Here, two or more first suction channels (131) may be connected to a single second suction channel (132), thereby allowing the first suction channels (131) connected to the same second suction channel (132) to form a generally (or relatively) uniform suction pressure. For example, two or more (or multiple) first suction channels (131) each placed on both sides of the vacuum forming space (125) may each be connected to one second suction channel (132). In this case, not only can the number of suction pumps (not shown) be reduced, but the control of uniform suction pressure can also be made easier, allowing a generally uniform suction pressure to be formed in multiple first suction channels (131), and a generally (or overall) uniform suction pressure can be formed around the discharge port (111) of the nozzle part (110).

[0071] At this time, two or more first suction channels (131) may be connected to one second suction channel (132) through each connecting channel, or they may be connected to one second suction channel (132) by communicating with each other through connecting channels that connect them.

[0072] For example, the nozzle receiving block (120) may further include a buffer channel (133) that connects two or more first suction channels (131) to a second suction channel (132). The buffer channel (133) may connect two or more first suction channels (131) and may be connected to (one) a second suction channel (132) to connect the two or more first suction channels (131) and the second suction channel (132). By spreading (or dispersing) the suction pressure through the second suction channel (132) through the buffer channel (133) and making it uniform, the variation in suction pressure between the two or more first suction channels (131) is reduced and the suction pressure of the two or more first suction channels (131) can be made uniform. As shown in FIG. 2, the first horizontal channel (131a), the second horizontal channel (131b), and the third horizontal channel (131c) can be connected to the buffer channel (133) and communicate with each other, and the buffer channel (133) can be connected to the second suction channel (132) and connected to the second suction channel (132).

[0073] Meanwhile, the inner diameter (or width) of the second suction channel (132) may be at least partially larger than the inner diameter (or width) of the first suction channel (131). For example, the inner diameter of the end of the second suction channel (132) connected to the suction line (not shown) which is far from the first suction channel (131) may be larger, and the inner diameter may increase (gradually or in stages) as it moves further away from the first suction channel (131), and the inner diameter of the second suction channel (132) as a whole may be larger than the inner diameter of the first suction channel (131). It is not particularly limited to this, and it is sufficient that the inner diameter of the end of the second suction channel (132) connected to the suction line (not shown) may be larger than the inner diameter of the first suction channel (131) which is the same (or uniform) as a whole. Since the airflow flows from a high pressure area to a low pressure area, the inner diameter of the second suction channel (132) is widened to lower the internal pressure compared to the first suction channel (131), thereby allowing the scattered droplets (13) and droplet tails (11b) to be effectively discharged (or exhausted) from the first suction channel (131), which has a relatively high internal pressure, to the second suction channel (132), which has a relatively low internal pressure.

[0074] The discharge device (100) according to the present invention may further include a nozzle part (110) and a control part (not shown) that controls the suction part (not shown) to discharge a discharge liquid (10) from the discharge port (111) while vacuum exhausting the vacuum forming space (125).

[0075] A control unit (not shown) can control the nozzle unit (110) and the suction unit (not shown), and discharge the discharge liquid (10) from the discharge port (111) while vacuum exhausting the vacuum forming space (125), so that the scattered droplets (13) and droplet tails (11b) are sucked out (or removed), and only the droplets (11a) are deposited at the target location of the target object (20).

[0076] Here, a control unit (not shown) can adjust the vacuum level of the vacuum forming space (125) according to the viscosity of the discharge liquid (10). In the case of low viscosity, scattering droplets (13) are generated more easily than droplet tails (11b), so a first vacuum level is formed in the vacuum forming space (125) to effectively suck up scattering droplets (13), and in the case of high viscosity, droplet tails (11b) are generated more easily than scattering droplets (13), so a second vacuum level greater than the first vacuum level is formed in the vacuum forming space (125) to effectively suck up droplet tails (11b). In the case of droplet tails (11b), the higher the viscosity, the less easily they break off from the droplet (11a), so the vacuum level can be increased to allow the droplet tails (11b) to be easily broken off from the droplet (11a). Through this, scattering droplets (13) and / or droplet tails (11b) can be effectively removed by suctioning and discharging them according to the viscosity of the discharge liquid (10).

[0077] For example, when the viscosity of the discharge liquid (10) is 20,000 cP (centiPoise), the vacuum pressure of the vacuum forming space (125) can be set to -30 to -40 kPa, and when the viscosity of the discharge liquid (10) is 500 cP, the vacuum pressure of the vacuum forming space (125) can be set to -10 to -15 kPa. At this time, in order to maintain a vacuum pressure of -30 to -40 kPa, the suction pump (not shown) can provide a suction force (or suction strength) equal to or stronger than a vacuum pressure of -60 kPa, and in order to maintain a vacuum pressure of -10 to -15 kPa, the suction pump (not shown) can provide a suction force equal to or weaker than a vacuum pressure of -60 kPa.

[0078] Meanwhile, the nozzle part (110) can be inserted into and removed (or separated) from the insertion groove (121) of the nozzle receiving block (120), and the shape and volume of the vacuum forming space (125) can be adjusted according to the size and shape of the nozzle part (110) by replacing the nozzle part (110). For example, the nozzle fixing part (140) can be attached to (or coupled and separated) the nozzle receiving block (120), and the nozzle part (110) can be replaced by attaching and detaching the nozzle fixing part (140). At this time, the nozzle fixing part (140) can be coupled to the nozzle receiving block (120) by being fastened by a screw (bolt), etc., and can be separated in reverse.

[0080] FIG. 3 is a schematic cross-sectional view showing a dispenser system according to another embodiment of the present invention.

[0081] Referring to FIG. 3, a dispenser system according to another embodiment of the present invention will be examined in more detail, and details that overlap with the previously described parts regarding the dispensing device according to one embodiment of the present invention will be omitted.

[0082] A dispenser system (200) according to another embodiment of the present invention may include a stage (210) supporting a target object (20); a discharge device (100) according to one embodiment of the present invention provided on the stage (210); and a driving unit (not shown) for moving the stage (210) or the discharge device (100).

[0083] The stage (210) can support the target object (20), and can move relative to the discharge device (100), and can be fixed or moved.

[0084] The discharge device (100) may be provided on a stage (210) and may discharge a discharge liquid (10) onto a target object (20). Here, the discharge device (100) is a discharge device (100) according to an embodiment of the present invention, and since it has been described in detail above, a detailed description is omitted.

[0085] A driving unit (not shown) can move the stage (210) or the discharge device (100), and can move the discharge device (100) relatively on the stage (210). For example, the driving unit (not shown) can move the discharge device (100), move the stage (210), or move both the discharge device (100) and the stage (210). By moving the discharge device (100) relatively on the stage (210) in this way, the discharge liquid (10) can be applied (or coated) to the target location (or impact location) of the target object (20).

[0086] Here, the target object (20) may include a glass substrate, and the discharge liquid (10) may include liquid crystal (LC). That is, the dispenser system (200) may be a fill dispenser equipment that discharges liquid crystal (LC) in a measured amount during the encapsulation and cell processes. The surface of the glass substrate may be composed of one or more cells, and the cell may be divided into a cell active area and a cell internal area, and a fill material such as liquid crystal (LC) may be filled into the cell internal area. If such liquid crystal (LC) is scattered and scattered droplets (13) fall (or enter) into the cell active area, a critical problem with the mass production yield occurs, and if scattered droplets (13) fall into the cell internal area, even if it does not become a direct cause of the mass production yield problem, improvement is required as a problem with the discharge quality.

[0087] Accordingly, the dispenser system (200) of the present invention can sufficiently (or completely) suck and discharge scattering droplets (13) and / or droplet tails (11b) by using (or including) the discharge device (100) according to one embodiment of the present invention, and accordingly, can precisely discharge a discharge liquid (10), such as liquid crystal (LC), to a target location (i.e., the internal area of ​​the cell) in a precise amount without contamination by scattering droplets (13) and target tails.

[0088] Meanwhile, the first suction channel (131) may be extended along the (relative) direction of movement of the discharge device (100), and the first suction channel (131) connected to one side of the vacuum forming space (125) may be extended in the direction of movement, and the first suction channel (131) connected to the other side of the vacuum forming space (125) may be extended in the opposite direction to the direction of movement. Since the impact tail occurs in the same direction as the direction of movement, the first suction channel (131) may be extended along the direction of movement to provide sufficient suction pressure in the same direction and / or opposite direction to the direction of movement of the discharge device (100) so that the droplet tail (11b) that needs to be cut off from the droplet (11a) can be effectively cut off and sucked.

[0090] FIG. 4 is a flowchart illustrating a discharge method according to another embodiment of the present invention.

[0091] Referring to FIG. 4, a dispensing method according to another embodiment of the present invention will be examined in more detail. However, details that overlap with the previously described parts regarding the dispensing device according to one embodiment of the present invention and the dispenser system according to another embodiment of the present invention will be omitted.

[0092] A discharge method according to another embodiment of the present invention may include: a process (S100) of vacuuming a vacuum forming space (125) provided around the tip of a nozzle part (110); a process (S210) of discharge a discharge liquid (10) from a discharge port (111) of the nozzle part (110) while vacuuming the vacuum forming space (125); and a process (S220) of sucking and discharging at least one of a scattered droplet (13) and a droplet tail (11b) of the discharge liquid (10).

[0093] First, the vacuum forming space (125) provided around the tip of the nozzle part (110) is vacuum exhausted (S100). The vacuum forming space (125) provided around the tip of the nozzle part (110) can be vacuum exhausted by the nozzle receiving block (120), and the vacuum forming space (125) can be vacuum exhausted through the suction part (not shown) before discharging the discharge liquid (10) from the discharge port (111) of the nozzle part (110) so that the scattered droplets (13) and droplet tails (11b) are removed and only the droplets (11a) are deposited.

[0094] Next, the discharge liquid (10) is discharged from the discharge port (111) of the nozzle part (110) while vacuuming the vacuum forming space (125) (S210). While vacuuming the vacuum forming space (125), the discharge liquid (10) can be discharged from the discharge port (111) of the nozzle part (110) while a vacuum is formed in the vacuum forming space (125). Among the discharge liquid (10), the scattered droplets (13) and / or droplet tails (11b) are sucked (discharged) into the vacuum forming space (125) and removed, and only the droplets (11a) can be deposited at the target location (or impact location) of the target object (20).

[0095] Next, at least one of the scattered droplets (13) and droplet tails (11b) of the discharge liquid (10) is sucked out (S220). In the process of discharging the discharge liquid (10) (S210), by vacuuming the vacuum forming space (125), at least one of the scattered droplets (13) and droplet tails (11b) of the discharge liquid (10) can be sucked out, and the scattered droplets (13) and / or droplet tails (11b) can be sucked into the vacuum forming space (125) and discharged through the suction line (not shown) of the suction part (not shown). The process of sucking out (S220) can be performed almost simultaneously with the process of discharging the discharge liquid (10) (S210).

[0096] Accordingly, in the discharge method of the present invention, the discharge liquid (10) can be discharged through the discharge port (111) of the nozzle part (110) while vacuum exhausting the vacuum forming space (125), and accordingly, the scattered droplets (13) and / or droplet tails (11b) are sucked out and discharged, so that the discharge liquid (10) can be discharged precisely to the impact location in a precise amount without contamination by the scattered droplets (13) and the impact tails.

[0097] The above suction and discharge process (S220) may include a process (S221) of forming a first vacuum in a vacuum forming space (125) to suck up a scattered droplet (13); and a process (S222) of forming a second vacuum greater than the first vacuum to suck up a droplet tail (11b).

[0098] A first vacuum can be formed in the vacuum forming space (125) to suck up the scattered droplets (13) (S221). When the discharge liquid (10) has low viscosity, scattered droplets (13) are generated more easily than droplet tails (11b), so a relatively low first vacuum can be formed in the vacuum forming space (125) to effectively suck up the scattered droplets (13).

[0099] And, a second vacuum greater than the first vacuum can be formed to suck up the droplet tail (11b) (S222). When the discharge liquid (10) has high viscosity, the droplet tail (11b) is generated more easily than the scattered droplet (13), so a second vacuum greater than the first vacuum can be formed in the vacuum forming space (125) to effectively suck up the droplet tail (11b). In the case of the droplet tail (11b), the higher the viscosity, the less easily it breaks off from the droplet (11a), so the second vacuum can be greater than the first vacuum so that the droplet tail (11b) can be easily broken off from the droplet (11a).

[0100] Accordingly, the vacuum level of the vacuum forming space (125) can be adjusted according to the viscosity of the discharge liquid (10). In the case of low viscosity, scattering droplets (13) are generated more easily than droplet tails (11b), so a relatively low first vacuum level is formed in the vacuum forming space (125) to effectively suck up the scattering droplets (13). In the case of high viscosity, droplet tails (11b) are generated more easily than scattering droplets (13), so a relatively high second vacuum level is formed in the vacuum forming space (125) to effectively suck up the droplet tails (11b). Through this, scattering droplets (13) and / or droplet tails (11b) can be effectively removed by sucking and discharging them according to the viscosity of the discharge liquid (10).

[0101] Here, the vacuum forming space (125) can be formed between the inner surface of the insertion groove (121) and the outer surface of the tip of the nozzle part (110) by inserting the tip of the nozzle part (110) into the insertion groove (121) of the nozzle receiving block (120). By inserting at least a part of the nozzle part (110) into the insertion groove (121) of the nozzle receiving block (120), a vacuum forming space (125) can be formed between the inner surface of the insertion groove (121) of the nozzle receiving block (120) and the outer surface of the tip of the nozzle part (110), thereby generating suction pressure around the discharge port (111) of the nozzle part (110) in a total direction (or 360°), so that the scattered droplets (13) and droplet tails (13b) can be effectively sucked and discharged. That is, suction pressure is formed in the entire 360° area around the discharge port (111) by the vacuum forming space (125), so that all scattered droplets (13) can be sucked in regardless of the scattering direction of the scattered droplets (13).

[0102] At this time, the distance between the inner surface of the insertion groove (121) and the outer surface of the tip of the nozzle part (110) may be less than or equal to the diameter of the discharge port (111). If the distance between the inner surface of the insertion groove (121) and the outer surface of the tip of the nozzle part (110) is greater than the diameter of the discharge port (111), the inlet (or starting position) of the vacuum forming space (125) may be too large, and leakage of suction pressure may occur. If the suction strength of the suction part (not shown) is increased to compensate for this, all of the discharge liquid (10) discharged from the discharge port (111) may be sucked (discharged) into the vacuum forming space (125).

[0103] Accordingly, by making the distance between the inner surface of the insertion groove (121) and the outer surface of the tip of the nozzle part (110) less than the diameter of the discharge port (111), leakage of suction pressure is reduced, and sufficient suction pressure is maintained to sufficiently (or completely) suction and discharge the scattered droplet (13) and droplet tail (13b), so that a (one) amount of droplet (11a) can be deposited at the target location of the target object (20).

[0104] Meanwhile, the discharge method of the present invention may further include a process (S300) of maintaining vacuum exhaust of the vacuum forming space (125).

[0105] After the discharge of the discharge liquid (10) (or the process of discharging the discharge liquid) is terminated (or completed), the vacuum of the vacuum forming space (125) can be maintained (S300). After the discharge of the discharge liquid (10) is terminated, the vacuum of the vacuum forming space (125) can be maintained for a predetermined time (or a certain time), and through this, the discharge liquid (10) remaining (or remaining) around the discharge port (111) of the nozzle part (110) after the discharge of the discharge liquid (10) is terminated can be removed by suction discharge. Accordingly, a separate nozzle cleaning process can be omitted.

[0107] Thus, in the present invention, a vacuum-forming space is provided around the tip of the nozzle part to suck and discharge flying droplets and / or droplet tails generated while discharging liquid through the discharge port of the nozzle part, thereby preventing flying droplets from contaminating areas other than the impact location or causing the droplet tail to form a tail portion of the impacted liquid. Accordingly, the coating quality of the discharge device can be improved. Here, a vacuum-forming space can be formed between the inner surface of the insertion groove of the nozzle receiving block and the outer surface of the tip of the nozzle part, thereby generating suction pressure around the discharge port of the nozzle part to effectively suck and discharge flying droplets and droplet tails. Furthermore, the liquid can be discharged through the discharge port of the nozzle part while vacuum-exhausting the vacuum-forming space, and accordingly, flying droplets and / or droplet tails are sucked and discharged, allowing the liquid to be precisely discharged to the impact location in a precise quantity without contamination by flying droplets or impact tails. At this time, the vacuum level of the vacuum forming space can be adjusted according to the viscosity of the discharge liquid. In the case of low viscosity, scattering droplets are more likely to occur than droplet tails, so a first vacuum level is formed in the vacuum forming space to effectively suck up scattering droplets. In the case of high viscosity, droplet tails are more likely to occur than scattering droplets, so a second vacuum level greater than the first vacuum level is formed in the vacuum forming space to effectively suck up droplet tails. Through this, scattering droplets and / or droplet tails can be effectively removed by sucking and discharging them according to the viscosity of the discharge liquid.

[0109] The term “on” as used in the above description includes cases of direct contact as well as cases where it is located facing the upper or lower surface without direct contact; it is possible to be located facing the entire upper or lower surface as well as partially facing it, and it is used to mean facing from a distance or in direct contact with the upper or lower surface.

[0111] Although preferred embodiments of the present invention have been illustrated and described above, the present invention is not limited to the embodiments described above, and those skilled in the art will understand that various modifications and equivalent alternative embodiments are possible without departing from the gist of the present invention as claimed in the claims. Accordingly, the technical scope of protection of the present invention should be determined by the following claims. Explanation of the symbols

[0112] 10 : Discharged liquid 11 : Discharged droplet 11a: Droplet 11b: Droplet tail 12: Impact droplet 13: Scattered droplet 20 : Target object 100 : Discharge device 110: Nozzle section 111: Discharge port 120: Nozzle receiving block 121: Insertion groove 122: Connecting hole 125: Vacuum formation space 131: First intake channel 131a: First horizontal channel 131b: Second horizontal channel 131c: Third horizontal channel 132: Second intake path 133: Buffer path 140 : Nozzle fixing part 151 : Sealing member 200: Dispenser System 210: Stage

Claims

Claim 1 A discharge device comprising: a nozzle portion for discharging a liquid through a discharge port at a tip; a nozzle receiving block providing a vacuum-forming space around the tip portion of the nozzle portion; and a suction portion for vacuum exhausting the vacuum-forming space, wherein the nozzle receiving block includes an insertion groove into which the tip portion of the nozzle portion is inserted, and the insertion groove has a width wider than the tip portion of the nozzle portion. Claim 2 delete Claim 3 A discharge device according to claim 1, wherein the vacuum forming space is formed between the inner surface of the insertion groove and the outer surface of the tip of the nozzle part. Claim 4 A discharge device according to claim 1, further comprising: a nozzle fixing part in which the rear end of the nozzle part is fixed and supported by the nozzle receiving block; wherein the front end of the nozzle part is spaced apart from the inner surface of the insertion groove by the nozzle fixing part being supported by the nozzle receiving block. Claim 5 A discharge device according to claim 4, further comprising a sealing member provided between the nozzle fixing part and the nozzle receiving block. Claim 6 A discharge device according to claim 1, wherein the nozzle receiving block further includes a communication hole communicating with the insertion groove, and the discharge port of the nozzle part is arranged concentrically with the communication hole. Claim 7 A discharge device according to claim 6, wherein the diameter of the connecting hole is 90 to 110% of the diameter of the discharge port. Claim 8 A discharge device according to claim 6, wherein the discharge port and the communication hole are arranged in different planes, and the distance between the discharge port and the communication hole is 5 to 10% of the diameter of the discharge port. Claim 9 The discharge device according to claim 1, wherein the suction part comprises: a suction line for exhausting the vacuum forming space; and a suction pump connected to the suction line. Claim 10 A discharge device according to claim 9, wherein the nozzle receiving block further comprises: a first suction passage extending to the outside of the vacuum forming space; and a second suction passage connected to the first suction passage and extending in a direction intersecting the extension direction of the first suction passage. Claim 11 A discharge device according to claim 10, wherein the first suction path is composed of a plurality of tubes. Claim 12 A discharge device according to claim 11, wherein the nozzle receiving block further comprises a buffer passage connecting two or more of the first suction passages to the second suction passage. Claim 13 A discharge device according to claim 1, further comprising a control unit that controls the nozzle part and the suction part to discharge the discharge liquid from the discharge port while vacuum exhausting the vacuum forming space. Claim 14 A dispenser system comprising: a stage supporting a target object; a dispensing device according to any one of claims 1 and 3 to 13 provided on the stage; and a driving unit for moving the stage or the dispensing device. Claim 15 A dispenser system according to claim 14, wherein the target object comprises a glass substrate and the discharge liquid comprises a liquid crystal. Claim 16 A discharge method comprising: a process of vacuuming a vacuum forming space provided around the tip of a nozzle part; a process of vacuuming the vacuum forming space while discharging a discharge liquid from a discharge port of the nozzle part; and a process of sucking and discharging at least one of a scattered droplet and a droplet tail of the discharge liquid, wherein the vacuum forming space is formed between the inner surface of the insertion groove and the outer surface of the tip of the nozzle part by inserting the tip of the nozzle part into an insertion groove of a nozzle receiving block. Claim 17 A discharge method according to claim 16, wherein the suction and discharge process comprises: a process of forming a first vacuum in a vacuum forming space to suck up the scattered droplets; and a process of forming a second vacuum greater than the first vacuum to suck up the droplet tails. Claim 18 delete Claim 19 A discharge method according to claim 16, wherein the distance between the inner surface of the insertion groove and the outer surface of the tip of the nozzle part is less than or equal to the diameter of the discharge port.

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