Light Emitting Display Device Including Moisture Sensing Pattern and Manufacturing Method for the Same

Abstract

The present invention can improve the yield of a substrate by simultaneously sensing the moisture content during the formation process of a light-emitting display device to determine whether the substrate needs to be repaired. The light-emitting display device of the present invention may include a substrate having a display area including a plurality of subpixels and a non-display area surrounding the display area, thin-film transistors each provided in the plurality of subpixels, an alignment key provided in the non-display area, an inorganic insulating film covering the thin-film transistors and the alignment key, a light-emitting element connected to the thin-film transistors and provided on the inorganic insulating film, a moisture sensing pattern provided on the inorganic insulating film overlapping with the alignment key, and an encapsulation structure located further inside than the moisture sensing pattern and protecting the light-emitting element.

Description

Technology Field

[0001] The present invention relates to a display device and includes a light-emitting display device capable of monitoring the degree of moisture permeability within a substrate during deposition and encapsulation processes by providing a moisture sensing pattern in the outer region of a substrate, and a method for manufacturing the same. Background Technology

[0002] As the information society develops, the demand for display devices for displaying images is increasing in various forms.

[0003] A light-emitting display device that forms pixels with light-emitting elements does not require a separate light source unit, which is advantageous for slimming or flexibility, and also has the advantage of good color purity.

[0004] For example, a light-emitting device comprises two different electrodes and a light-emitting layer between them. When electrons generated from one electrode and holes generated from the other electrode are injected into the light-emitting layer, the injected electrons and holes combine to form an exciton. Light emission occurs as the generated exciton transitions from an excited state to a ground state.

[0005] A light-emitting display device achieves display through the emission of light from a light-emitting layer. If moisture enters the light-emitting elements within the device, they deteriorate, which is a major cause of reduced lifespan. The problem to be solved

[0006] The light-emitting element provided within the light-emitting display device is formed through a deposition process, and the encapsulation structure protecting the light-emitting element can be formed through deposition and coating processes. The deposition process for forming the light-emitting display device is carried out in multiple chambers, and there is a problem of moisture entering the light-emitting display device due to movement between chambers or impurities remaining within the chambers.

[0007] If moisture remains within a finished light-emitting display, the deterioration of the device may be accelerated; therefore, it is necessary to sense the moisture inside the light-emitting display early.

[0008] The present invention provides a light-emitting display device capable of simultaneously sensing moisture generated during the formation of a light-emitting element and an encapsulation structure formed on a substrate by providing a moisture sensing pattern in the outer region of the substrate, and a method for manufacturing the same. means of solving the problem

[0009] The light-emitting display device of the present invention is provided with a moisture sensing pattern superimposed on an alignment key in the outer region of a substrate, and monitors the moisture content on the substrate in real time by inspecting the degree of expansion of the moisture sensing pattern and determines the repair of the substrate, thereby improving the yield of the substrate.

[0010] A light-emitting display device according to one embodiment of the present invention may include a substrate having a display area including a plurality of subpixels and a non-display area surrounding the display area, a thin-film transistor provided in each of the plurality of subpixels, an alignment key provided in the non-display area, an inorganic insulating film covering the thin-film transistor and the alignment key, a light-emitting element connected to the thin-film transistor and provided on the inorganic insulating film, a moisture sensing pattern provided on the inorganic insulating film overlapping with the alignment key, and an encapsulation structure located further inside than the moisture sensing pattern and protecting the light-emitting element. Effects of the invention

[0011] The light-emitting display device and the method for manufacturing the same according to the present invention have the following effects.

[0012] First, the light-emitting display device of the present invention can simultaneously sense the amount of moisture generated during a process performed on the substrate by providing a moisture sensing pattern in the outer region of the substrate.

[0013] Second, the moisture sensing pattern is formed as a hydrogel corresponding to the alignment key position, so that the degree of deviation from the center of the alignment key can be easily identified depending on the amount of moisture.

[0014] Third, compared to a light-emitting display device that is discarded when moisture is detected after the completion of the device, the present invention allows the process to be stopped and the substrate to be repaired when the moisture amount is detected to be above a certain level, thereby improving the yield of the light-emitting display device.

[0015] Fourth, when repairing the substrate, the moisture sensing pattern is also shrunk back to its original state, making it possible to recycle the moisture sensing pattern along with the substrate. Brief explanation of the drawing

[0016] FIG. 1 is a schematic block diagram showing a light-emitting display device of the present invention. FIG. 2 is a plan view showing a light-emitting display device according to one embodiment of the present invention. FIG. 3 is a cross-sectional view showing the line I~I' of FIG. 2 according to one embodiment of the present invention. Figure 4a is a photograph showing one form of a hydrogel. Figure 4b is a photograph showing the expanded shape according to the moisture content of the hydrogel. FIGS. 5 and 6 are cross-sectional views showing a light-emitting display device according to another embodiment of the present invention. FIG. 7 is a plan view showing the moisture sensing pattern of the present invention and the deformed state of the moisture sensing pattern after sensing a certain amount of moisture. FIGS. 8a to 8c are plan views showing examples of moisture sensing patterns of the light-emitting display device of the present invention and shapes corresponding to the alignment key during expansion. FIG. 9 is a plan view showing the state in which the moisture-sensed moisture-sensing pattern of the present invention is repaired through a thermal process. FIG. 10 is a process flowchart illustrating the method for manufacturing a light-emitting display device of the present invention. Specific details for implementing the invention

[0017] Hereinafter, preferred embodiments of the present specification will be described with reference to the attached drawings. Throughout the specification, the same reference numbers denote substantially the same components. In the following description, if it is determined that a detailed description of a technology or configuration related to the present specification could unnecessarily obscure the essence of the specification, such detailed description is omitted. Additionally, the component names used in the following description have been selected for ease of drafting the specification and may differ from the actual product part names.

[0018] Shapes, sizes, ratios, angles, numbers, etc. disclosed in the drawings for describing various embodiments of this specification are exemplary, and this specification is not limited to the matters shown in the drawings. Throughout this specification, the same reference numerals refer to the same components. Furthermore, in describing this specification, if it is determined that a detailed description of related prior art could unnecessarily obscure the essence of this specification, such detailed description is omitted. Where terms such as "includes," "has," or "is made up" are used in this specification, other parts may be added unless "only" is used. Where a component is expressed in the singular, it includes cases where it is included in the plural unless specifically stated otherwise.

[0019] In interpreting the components included in the various embodiments of this specification, they are interpreted to include an error range even if there is no separate explicit description.

[0020] In describing various embodiments of this specification, when describing positional relationships, for example, when the positional relationship between two parts is described using expressions such as 'on', 'on the upper part', 'on the lower part', 'next to', etc., unless 'immediately' or 'directly' is used, one or more other parts may be located between the two parts.

[0021] In describing various embodiments of this specification, when describing temporal relationships, for example, when describing temporal sequences using 'after,' 'following,' 'next,' 'before,' etc., cases that are not continuous may be included unless 'immediately' or 'directly' is used.

[0022] In describing the various embodiments of this specification, terms such as 'first~', 'second~', etc. may be used to describe various components, but these terms are used merely to distinguish between identical or similar components. Accordingly, unless otherwise stated, a component modified by 'first~' in this specification may be identical to a component modified by 'second~' within the technical scope of this specification.

[0023] "First horizontal axis direction," "second horizontal axis direction," and "vertical axis direction" should not be interpreted as having only geometric relationships in which the relationship between them is vertical, but may mean having a broader directionality within the scope in which the configuration of the present specification can function.

[0024] The term “at least one” should be understood to include all combinations that can be presented from one or more related items. For example, the meaning of “at least one of the first item, the second item, and the third item” may mean not only the first item, the second item, or the third item individually, but also all combinations of items that can be presented from two or more of the first item, the second item, and the third item.

[0025] Each feature within the various embodiments of this specification may be combined or combined with one another, either partially or wholly, and may technically enable various interlocking and operation. Each of the various embodiments may be implemented independently of one another or may be implemented together in an associated relationship.

[0026] FIG. 1 is a block diagram schematically showing a light-emitting display device of the present invention.

[0027] As shown in FIG. 1, a light-emitting display device (10) according to one embodiment of the present invention may include a display panel (11), an image processing unit (12), a timing control unit (13), a data driving unit (14), a scan driving unit (15), and a power supply unit (16).

[0028] The display panel (11) can display an image in response to a data signal (DATA) supplied from a data driving unit (14), a scan signal supplied from a scan driving unit (15), and power supplied from a power supply unit (16).

[0029] The display panel (11) may include subpixels (SP) arranged at each intersection area of ​​a plurality of gate lines (GL) and a plurality of data lines (DL). The structure of the subpixels (SP) may be varied depending on the type of light-emitting display device.

[0030] For example, subpixels (SP) can be formed in a top emission, bottom emission, or dual emission manner depending on their structure. Subpixels (SP) refer to units capable of emitting their own color by having a specific type of color filter formed or by each having a light-emitting part without a color filter being formed.

[0031] For example, the subpixels (SP) may include a red subpixel, a green subpixel, and a blue subpixel. Alternatively, the subpixels (SP) may include, for example, a red subpixel, a blue subpixel, a white subpixel, and a green subpixel. The subpixels (SP) may have one or more different light-emitting areas depending on their light-emitting characteristics. For example, subpixels emitting a color different from the blue subpixel may have different light-emitting areas.

[0032] In the light-emitting display device of the present invention, the light emission color, arrangement type, arrangement order, etc. of each color light-emitting part can be configured in various forms depending on the light emission characteristics, lifespan of the element, specifications of the device, etc., and are not limited thereto.

[0033] The display panel (11) can be divided into a display area (AA) where subpixels (SP) are arranged to display an image, and a non-display area (NA) surrounding the display area (AA). A scan driving unit (15) can be mounted in the non-display area (NA) of the display panel (11). Additionally, the non-display area (NA) may include a pad section (PAD) including a pad electrode (PD).

[0034] The display panel (11) includes a substrate (see 100 in FIG. 3), a thin-film transistor (see T1 in FIG. 3), a light-emitting element (see ED in FIG. 3) on the substrate (100), and an encapsulation layer (see 150 in FIG. 3) covering the thin-film transistor (T1) and the light-emitting element (ED).

[0035] The image processing unit (12) can output a data enable signal (DE), etc., along with a data signal (DATA) supplied from the outside. In addition to the data enable signal (DE), the image processing unit (12) can output one or more of a vertical synchronization signal, a horizontal synchronization signal, and a clock signal, but these signals are omitted for convenience of explanation.

[0036] The timing control unit (13) may receive a data signal (DATA) along with a driving signal from the image processing unit (12). The driving signal may include a data enable signal (DE). Alternatively, the driving signal may include a vertical synchronization signal, a horizontal synchronization signal, and a clock signal. Based on the driving signal, the timing control unit (13) may output a data timing control signal (DDC) for controlling the operation timing of the data driving unit (14) and a gate timing control signal (GDC) for controlling the operation timing of the scan driving unit (15).

[0037] The data driving unit (14) can output a data signal (DATA) supplied from the timing control unit (13) by sampling and latching the data signal supplied from the timing control unit (13) in response to the data timing control signal (DDC) supplied from the timing control unit (13) and converting it into a gamma reference voltage.

[0038] The data driver (14) can output a data signal (DATA) through data lines (DL). The data driver (14) can be implemented in the form of an integrated circuit (IC). For example, the data driver (14) can be electrically connected to a pad electrode (PD) placed in the non-display area (NA) of the display panel (11) through a flexible circuit film (not shown).

[0039] The scan driver (15) can output a scan signal in response to a gate timing control signal (GDC) supplied from the timing control unit (13). The scan driver (15) can output a scan signal through gate lines (GL). The scan driver (15) can be implemented in the form of an Integrated Circuit (IC) or implemented in a Gate In Panel (GIP) manner on a display panel (11).

[0040] The power supply unit (16) can output a high potential voltage and a low potential voltage, etc., for driving the display panel (11). The power supply unit (16) can supply a high potential voltage to the display panel (11) through the first power line (EVDD) (driving power line or pixel power line) and can supply a low potential voltage to the display panel (11) through the second power line (EVSS) (auxiliary power line or common power line).

[0041] The display panel (11) is divided into a display area (AA) and a non-display area (NA), and may include a plurality of subpixels (SP) defined by gate lines (GL) and data lines (DL) that intersect each other and form a matrix shape on a substrate (100) within the display area (AA).

[0042] The subpixels (SP) may include white subpixels and subpixels that emit at least two of the following: red light, green light, blue light, yellow light, magenta light, and cyan light. Additionally, a plurality of subpixels (SP) may have a specific type of color filter formed thereon, or may emit their own color without a color filter being formed. However, the present invention is not necessarily limited thereto, and the subpixels (SP) may be configured in various forms, such as the emission color, placement type, and placement order, depending on the emission characteristics, the lifespan of the device, and the specifications of the device.

[0043] Below, we examine the moisture sensing pattern of the light-emitting display device of the present invention, the moisture sensing method using the same, and the method for manufacturing the light-emitting display device.

[0044] FIG. 2 is a plan view showing a light-emitting display device according to one embodiment of the present invention, and FIG. 3 is a cross-sectional view showing the line I to I' of FIG. 2 according to one embodiment of the present invention.

[0045] As shown in FIG. 2 and FIG. 3, a light-emitting display device (1000) according to one embodiment of the present invention includes a substrate (100) having a display area (AA) including a plurality of subpixels (SP) and a non-display area (NA) surrounding the display area (AA), a thin-film transistor (T1) each provided in a plurality of subpixels (SP), a light-emitting element (ED) connected to the thin-film transistor and provided on an inorganic protective film (125), and an encapsulation structure (150) that protects the light-emitting element.

[0046] The substrate (100) may be made of a transparent glass or plastic film. The substrate (100) may be flexible when thinner than a certain thickness. A protective film may be further provided on the back surface of the substrate (100) to prevent external air or impurities from entering through the substrate (100).

[0047] A thin-film transistor (T1) provided on a substrate (100) includes, for example, a gate electrode (105), a semiconductor layer (115) superimposed with a gate insulating film (110) interposed between the gate electrode (105), and source electrodes (121) and drain electrodes (122) each connected to both sides of the semiconductor layer (115).

[0048] The semiconductor layer (115) comprises at least one of an oxide semiconductor, crystalline silicon, and amorphous silicon.

[0049] The illustrated thin-film transistor (T1) is shown as a bottom-gate structure in which, for example, the gate electrode (105) is provided on the lower side of the semiconductor layer (115), but the light-emitting display device of the present invention is not limited thereto. A top-gate structure in which the gate electrode is provided on the upper side of the semiconductor layer can also be applied to the thin-film transistor (T1). For example, when the thin-film transistor (T1) is formed as a top-gate structure, a light-blocking layer with a buffer layer interposed therebetween may be further provided on the lower side of the semiconductor layer.

[0050] The drain electrode (122) of the thin-film transistor (T1) can be connected to the first electrode (141) of the light-emitting element (ED). The light-emitting element (ED) comprises the first electrode (141), the light-emitting layer (142), and the second electrode (143). An intermediate layer including at least the light-emitting layer (142) may be included between the first electrode (141) and the second electrode (143). Although FIG. 3 shows the light-emitting layer (142) located only in the region between the banks (145), in some cases, the intermediate layer including the light-emitting layer (142) may be formed over the entire display area (AA) and extending from the edge of the display area (AA) to a part of the non-display area (NA).

[0051] In addition to the intermediate layer between the first and second electrodes (141, 143), common layers such as a hole injection layer, a hole transport layer, an electron transport layer, and an electron injection layer may be further included in addition to the illustrated light-emitting layer (142). The common layer may be formed over the entire display area (AA) and extending from the edge of the display area (AA) to a portion of the non-display area (NA).

[0052] An interlayer insulating film (120) may be provided between the semiconductor layer (115) of the thin-film transistor (T1), the source electrode (121), and the drain electrode (122).

[0053] In some cases, a buffer layer may be added as an inorganic insulating film below the gate electrode (105).

[0054] In addition, a metal wiring (127) may be further provided in the same layer as the source electrode (121) and drain electrode (122) of the thin-film transistor (T1) in the non-display area. For example, the metal wiring (127) may be a power supply voltage line, a ground line, a gate signal line, etc., and may partially overlap with the dam pattern (DAM) in the non-display area (NA).

[0055] The thin-film transistor (T1) is protected by an inorganic protective film (125), and a flattening film (130) may be provided on the inorganic protective film (125).

[0056] The gate insulating film (110), the interlayer insulating film (120), and the inorganic protective film (125) may be formed by including, for example, at least one of a nitride film, an oxide film, and an oxynitride film. The gate insulating film (110), the interlayer insulating film (120), and the inorganic protective film (125) may be a single film or multiple films.

[0057] Additionally, the flattening film (130) provided on the inorganic protective film (125) is formed of an organic insulating material with a thickness sufficient to flatten the surface. The flattening film (130) may be made of at least one organic material such as photoacrylic, polyimide, benzocyclobutene resin, and acrylate resin.

[0058] The bank (145) exposes the opening of the first electrode (141) of the subpixel (SP). The bank (145) is also called a pixel defining film in that it defines the opening of each subpixel.

[0059] Bank (145) can be formed from an organic insulating material and can be made of at least one organic material such as photoacrylic, polyimide, benzocyclobutene resin, and acrylate resin.

[0060] The dam pattern (DAM) can be formed to a certain height by stacking a first dam layer (130A) on the same layer as the flattening film (130) and a second dam layer (145A) on the same layer as the bank (145). The dam pattern (DAM) may be provided in a non-display area (NA) spaced at a certain distance from the edge of the display area (AA) as a barrier structure to prevent overflow of the organic encapsulation layer (152) applied in liquid form in the encapsulation structure (150) formed in a subsequent process. As shown in FIG. 2, the dam pattern (DAM) may have a shape that surrounds the display area (AA). In some cases, the dam pattern (DAM) may be formed as a plurality of spaced-apart patterns, each having a shape that surrounds the display area (AA). When a spacer is further formed on the bank (145), the dam pattern (DAM) may further include a pattern on the same layer as the spacer. When the dam pattern (DAM) consists of multiple spaced patterns, the height between the spaced patterns can be varied.

[0061] A sealing structure (150) may be further included on the light-emitting element (ED) for protection.

[0062] The bag structure (150) may be composed of an alternating structure of inorganic bag layers (151, 153) and organic bag layers (152). For example, the bag structure may be in the form where an organic bag layer (152) is sandwiched between the first and second inorganic bag layers (151, 153). In some cases, one or more additional pairs of organic bag layers and inorganic bag layers may be provided on the second inorganic bag layer (153).

[0063] The first and second inorganic encapsulation layers (151, 153) may be composed of silicon nitride, aluminum nitride, zirconium nitride, titanium nitride, hafnium nitride, tantalum nitride, silicon oxide, aluminum oxide, titanium oxide, tin oxide, cerium oxide, silicon oxynitride (SiON), lithium fluoride, etc.

[0064] The organic encapsulation layer (152) may be composed of acrylic resin, methacrylate resin, polyisoprene, vinyl resin, epoxy resin, urethane resin, cellulose resin, and perylene resin.

[0065] The encapsulation structure (150), which is formed on the second electrode (143), is formed on the upper portion of the light-emitting element (ED). In order to prevent deformation of the light-emitting element (ED) at high temperatures, the formation of the encapsulation structure (150) can be carried out in a low-temperature film deposition process of approximately 120°C or lower. Accordingly, the inorganic encapsulation film (151, 153) included in the encapsulation structure (150) may have a different component ratio and density from the inorganic insulating film (110, 120, 125) located between the substrate (100) and the first electrode (141).

[0066] Additionally, in the light-emitting display device of the present invention, an alignment key (210) may be provided in a non-display area (NA) of the substrate (100). The alignment key (210) may be formed on the same layer as at least one electrode of the thin-film transistor (T1). In some cases, if a light-blocking layer is provided on the lower side of the thin-film transistor (T1), the alignment key (210) may be formed with the same metal as the light-blocking layer. The alignment key (210) may be used as a reference for alignment during patterning for the layer after the alignment key (210) is formed.

[0067] The alignment key (210), the gate electrode (105), the source electrode (1210), and the drain electrode (122) of the thin-film transistor (T1) may each be made of a single layer or a multilayer of any one selected from the group consisting of copper (Cu), molybdenum (Mo), aluminum (Al), chromium (Cr), gold (Au), titanium (Ti), nickel (Ni), neodymium (Nd), tantalum (Ta), or tungsten (W), or an alloy thereof. For example, if the alignment key (210), the gate electrode (105), the source electrode (1210), and the drain electrode (122) of the thin-film transistor (T1) are a single layer, they may be made of any one selected from the group consisting of molybdenum (Mo), aluminum (Al), chromium (Cr), gold (Au), titanium (Ti), nickel (Ni), neodymium (Nd), or copper (Cu), or an alloy thereof. Additionally, the gate of the alignment key (210) and the thin-film transistor (T1) If the electrode (105), source electrode (1210) and drain electrode (122) are multilayer, they may be double layers of molybdenum / aluminum-neodymium, molybdenum / aluminum, titanium / aluminum, or copper / molytitanium. Alternatively, the gate electrode (105) and the first and second electrodes (121, 122) may be triple layers of molybdenum / aluminum-neodymium / molybdenum, molybdenum / aluminum / molybdenum, titanium / aluminum / titanium, or molytitanium / copper / molytitanium. However, they are not limited thereto, and the gate electrode (105), source electrode (1210), and drain electrode (122) of the alignment key (210) and thin-film transistor (T1) may be made of silver molybdenum (Mo), aluminum (Al), chromium (Cr), gold (Au), titanium (Ti), It may also be formed into a multilayer of any one selected from the group consisting of nickel (Ni), neodymium (Nd), or copper (Cu), or an alloy thereof.

[0068] As shown in FIG. 2, the alignment key (210) can be selectively positioned at the outermost corner of the non-display area (NA) of the substrate (100).

[0069] In the light-emitting display device of the present invention, a moisture sensing pattern (220) is provided on an inorganic protective film (125) that protects a thin-film transistor (TFT) by overlapping it with an alignment key (210). In the initial stage of forming the moisture sensing pattern (220), the moisture sensing pattern (220) is positioned corresponding to the center of the alignment key (210).

[0070] The moisture sensing pattern (220) includes, for example, a hydrogel. A hydrogel is a gel that uses water as a dispersion medium and is hydrophilic. As shown in FIG. 3, the moisture sensing pattern (220) is provided in a roughly spherical shape and is in a spherical state having a constant diameter during manufacturing. The moisture sensing pattern (220) has the property of expanding by containing surrounding water.

[0071] The light-emitting display device (1000) of the present invention forms a moisture sensing pattern (220) as a hydrogel, thereby allowing the moisture sensing pattern (220) to absorb moisture when it is contained in the substrate (100) and the upper array structure of the substrate (100). The moisture sensing pattern (220), which can absorb moisture, is located at the center of the alignment key (210) and expands outward from the center of the alignment key (210) depending on the surrounding moisture content. If the expansion is severe, the outline of the moisture sensing pattern (220) deviates from the center of the alignment key (210). When the hydrogel expands due to moisture content, it changes to a silver color, and accordingly, the expanded moisture sensing pattern (220) can obscure the alignment key (210) detected by the camera. If the alignment key (210) is not detected by the expanded moisture sensing pattern (220), the process is put on hold and a repair process of the substrate (100) is performed.

[0072] Here, the repair process of the substrate (100) is performed as a type of thermal process, and heat can be applied to the substrate (100) to vaporize the moisture. In this thermal process, the moisture contained in the substrate (100) and the moisture contained in the moisture sensing pattern (220) are dehydrated, and the moisture sensing pattern (220) can return to its original diameter.

[0073] Around the moisture sensing pattern (220), a fence structure (230) with a shape surrounding the moisture sensing pattern (220) may be further included, as shown in FIGS. 2 and 3.

[0074] Since the moisture sensing pattern (220) may encroach upon the bag structure (150) if the expansion is severe, a fence structure (230) may be included to restrict physical shape changes to prevent this. In terms of process sequence, the fence structure (230) may be formed first, and then the moisture sensing pattern (220) may be formed within the fence structure (230).

[0075] In the light-emitting display device (1000) according to the first embodiment of the present invention, a fence structure (230) can be formed in the same layer as the dam pattern (DAM). In this case, the fence structure (230) may be made of a plurality of organic insulating films that can be patterned.

[0076] Additionally, the fence structure (230) is formed at a height higher than the moisture sensing pattern (220) when formed, so that even if the moisture sensing pattern (220) within the fence structure (230) expands, the fence structure (230) functions to confine the expanded moisture sensing pattern (220) without it moving outward.

[0077] The fence structure (230) and the moisture sensing pattern (220) can be formed on an inorganic protective film (125), for example. Here, the lower surface of each of the moisture sensing pattern (220) and the fence structure (230) may be in contact with the inorganic protective film (125). In some cases, the fence structure (230) and the moisture sensing pattern (220) may be located on a different type of inorganic insulating film formed on the outer edge of the substrate (100) rather than the inorganic protective film (125). In any case, it is preferable that the moisture sensing pattern (220) and the fence structure (230) be located on the inorganic insulating film forming the first electrode (141) to sense moisture during the deposition process of the light-emitting element (ED) configuration and the formation process of the encapsulation structure (150).

[0078] Among the configurations formed on the substrate (100), the inorganic insulating film on the lower side of the first electrode (141) may be, for example, a gate insulating film (110), an interlayer insulating film (120), or an inorganic protective film (125).

[0079] In the light-emitting display device of the present invention, the moisture content according to the degree of expansion of the moisture sensing pattern (220) according to the position alignment corresponding to the alignment key (210) is detected, and the moisture sensing pattern (220) is located above the alignment key (210).

[0080] Accordingly, the moisture sensing pattern (220) can be placed on the inorganic protective film (125) immediately after the formation of the inorganic protective film (125). The inorganic protective film (125) is an inorganic insulating film that protects the thin-film transistor (T1). By forming the moisture sensing pattern (220) on the upper side of the inorganic protective film (125), it can sense moisture remaining in the interlayer insulating film (120) located below the inorganic protective film (125). Additionally, by forming the moisture sensing pattern (220) further outward than the outermost edge line (E) of the adjacent encapsulation structure (150), the light-emitting display device (1000) of the present invention can sense the moisture content of each layer formed on the substrate (100) without interfering with the encapsulation structure (150).

[0081] In this case, moisture contained in these layers can be sensed from the moisture sensing pattern (220) when the flattening film (130) and bank (145) and dam pattern (DAM) are formed.

[0082] A dam pattern (DAM) provided in the non-display area (NA) of the substrate (100) along the edge of the display area (AA) is positioned closer to the display area (AA) than the moisture sensing pattern (220). With the height of the dam pattern (DAM), liquid organic material can be prevented from crossing the dam pattern (DAM) when forming the organic encapsulation layer (152).

[0083] Next, when proceeding with the deposition process of each of the light-emitting layer (142) and the second electrode (143), the degree of correspondence is determined from the alignment key (210) of the moisture sensing pattern (220), and the moisture content can be sensed during the deposition process of the organic layer (EL) and the second electrode (143).

[0084] Subsequently, even while forming the bag structure (150) of the first inorganic bag layer (151), the organic bag layer (152), and the second inorganic bag layer (153) formed in sequence, the moisture content within the bag structure (150) can be sensed in the non-indicated area (NA) of the moisture sensing pattern (220).

[0085] It is determined how far the outline of the moisture sensing pattern (220) is separated from the center of the alignment key (210). When the outline of the moisture sensing pattern (220) is separated from the alignment key (210) by a certain amount or more, the process is put on hold and the substrate (100) is repaired. The substrate (100) being repaired has an excessive moisture content, and the substrate (100) can be reused by dehydrating it through a thermal process, thereby improving the yield of the light-emitting display device.

[0086] In the light-emitting display device of the present invention, if a moisture sensing pattern (220) that expands upon absorption of moisture, such as a hydrogel, is provided, an abnormal moisture content can be sensed depending on whether the alignment key (210) detected by the camera is recognized.

[0087] In a general method for manufacturing a light-emitting display device that does not have a moisture sensing pattern on a substrate, the moisture content contained in the device is sensed only after the light-emitting element is formed and the encapsulation structure is completed; in this case, the completed device is difficult to repair, making it difficult to reuse the substrate and requiring it to be discarded.

[0088] The light-emitting display device and the method for manufacturing the same according to the present invention allow for immediate holding of the process when a moisture content exceeding a certain level is present due to the expansion of a moisture sensing pattern (220) corresponding to an alignment key in each process formed after the inorganic protective film, thereby facilitating repair. Accordingly, the yield of the light-emitting display device can be significantly improved, process simplification and process reduction are possible, and the use of harmful substances can be reduced by using a hydrogel with confirmed material stability as the moisture sensing pattern. Accordingly, it has an ESG (Environment / Social / Governance) effect in terms of eco-friendliness, low power consumption, and process optimization.

[0089] Figure 4a is a photograph showing one form of the hydrogel. Figure 4b is a photograph showing the expanded form of the hydrogel depending on the water content.

[0090] As shown in Fig. 4a, the hydrogel is a type of sphere, and as shown in Fig. 4b, its size gradually increases as the water content increases.

[0091] In the light-emitting display device of the present invention, when the hydrogel is formed into a moisture sensing pattern (220), the critical point of expansion can be determined by the fence structure (230).

[0092] FIGS. 5 and 6 are cross-sectional views showing a light-emitting display device according to another embodiment of the present invention.

[0093] The light-emitting display device (1200) of the present invention according to FIG. 5 has a difference in that it forms a moisture sensing pattern (220) at a position overlapping with the alignment key (210) but does not form a fence structure compared to FIG. 2 and FIG. 3 described above.

[0094] In this case as well, if the moisture sensing pattern (220) deviates from the center position of the alignment key (210), it can be detected by the camera corresponding to the alignment key (210). If the moisture sensing pattern (220) deviates significantly from the center of the alignment key (210), the process is put on hold, and the substrate (100) is determined to be abnormal. The substrate (100) determined to be abnormal can be normalized by performing a repair process, such as a thermal process, and then the process can be resumed.

[0095] The light-emitting display device (1500) according to FIG. 6 is formed such that the lowest first inorganic encapsulation layer (151) of the encapsulation structure (150) overlaps with the alignment key (210) at the edge or near the edge of the substrate (100). Then, a moisture sensing pattern (220) and a fence structure (230) are formed on the first inorganic encapsulation layer (151).

[0096] In this case, the moisture sensing pattern (220) is in direct contact with the first inorganic bag layer (151) of the bag structure (150), so the moisture content of the first inorganic bag layer (151) can be directly detected, and the moisture content of the adjacent second inorganic bag layer (153) and the inwardly adjacent organic bag layer (152) can be directly sensed during the formation process of the bag structure (150).

[0097] Since the fence structure (230) has a higher thickness and narrower width than the second inorganic bag layer (153), if the edge line (E) of the second inorganic bag layer (153) is outside the fence structure (230), it may be difficult to form or a seam may occur in the area where the fence structure (230) is formed. Therefore, the second inorganic bag layer (153) is made to have an edge line (E) inside the fence structure (230) so as not to interfere with the fence structure (230).

[0098] FIG. 7 is a plan view showing the moisture sensing pattern of the present invention and the deformed state of the moisture sensing pattern after sensing a certain amount of moisture.

[0099] As shown in FIG. 7, when the moisture sensing pattern (220A) is initially formed, the moisture sensing pattern (220A) is aligned to correspond to the center of the alignment key (210), so that normal detection is possible when the alignment key (210) is detected by an external camera.

[0100] However, if the process is placed in a state where moisture is contained in an abnormal amount, the moisture sensing pattern (220A) senses the moisture and expands, and the outline of the moisture sensing pattern (220A) deviates from the center of the alignment key (210), causing the moisture sensing pattern (220A) to cover the center area of ​​the alignment key (210) and its surroundings, making it difficult to properly identify the alignment key (210) by an external camera. In this case, the process can be held, and a repair process of the substrate can be performed.

[0101] FIGS. 8a to 8c are plan views showing examples of moisture sensing patterns of the light-emitting display device of the present invention and shapes corresponding to the alignment key during expansion.

[0102] FIG. 8a shows a moisture sensing pattern (221) formed by overlapping it with an alignment key (210) as described in the light-emitting display device of FIG. 2 and FIG. 3, and a fence structure (231) formed around the moisture sensing pattern (221) to a level where the alignment key can be detected. Since the moisture sensing pattern (221) is circular in the XY plane, the fence structure (231) also follows a circular structure. D1 refers to a key shape distortion area detected by an external camera when the moisture sensing pattern (221) expands and fills up to the inner surface of the fence structure (231). When such a key shape distortion area (D1) occurs, it is difficult to align the position of each layer using the alignment key (210), so it is determined that there is an abnormality in the substrate and repair can be performed.

[0103] In FIG. 8b, compared to FIG. 8a, the moisture sensing pattern (222) and the fence structure (232) are provided in a rectangular shape. D2 refers to a key shape distortion area detected by an external camera when the moisture sensing pattern (222) expands and fills up to the inner surface of the fence structure (232). When such a key shape distortion area (D2) occurs, it is difficult to align the position of each layer using the alignment key (210), so it is determined that there is an abnormality in the substrate and repair can be performed.

[0104] Compared to FIG. 8a, FIG. 8c is provided with a moisture sensing pattern (223) and a fence structure (233) in a rhombus shape. D3 refers to a key shape distortion area detected by an external camera when the moisture sensing pattern (223) expands and fills up to the inner surface of the fence structure (233).

[0105] Reference numerals 221A, 222A, and 223A, which are not described in FIGS. 8a through 8c, represent moisture sensing patterns that have expanded to the inner surface of the fence structure (233) in each case.

[0106] Moving to FIG. 8a, FIG. 8b, and FIG. 8c, the key shape distortion area (D1, D2, D3) gradually decreased. The size of the key shape distortion area can be adjusted according to the detection resolution of the external camera, and this can be done by adjusting the shape of the moisture sensing pattern and the distance from the fence structure.

[0107] FIG. 9 is a plan view showing the state in which the moisture-sensed moisture-sensing pattern of the present invention is repaired through a thermal process.

[0108] Meanwhile, in the light-emitting display device of the present invention, the moisture sensing pattern (220) is formed on an inorganic protective film (125) or a first inorganic encapsulation layer (151). As shown in FIG. 9, the moisture sensing pattern (220B), which has expanded due to moisture absorption, can be dehydrated and dehydrogelified by proceeding with a thermal process together with the substrate (100) while the subsequent process is in a held state, and can return to its initial state. That is, it can return to a moisture sensing pattern (220C) having an initial diameter corresponding to the center of the alignment key (210). This dehydrogelated moisture sensing pattern (220C) can simultaneously monitor the moisture content of the process on the substrate where the subsequent process is performed to detect whether there is an abnormality in the moisture content.

[0109] Hereinafter, with reference to the process flowchart and in conjunction with FIGS. 2 and FIGS. 3, we will examine the method for manufacturing a light-emitting display device of the present invention.

[0110] FIG. 10 is a process flowchart illustrating the method for manufacturing a light-emitting display device of the present invention.

[0111] As shown in FIGS. 2, FIGS. 3, and FIGS. 10, a substrate (100) is provided having a display area (AA) including a plurality of subpixels (SP) and a non-display area (NA) surrounding the display area.

[0112] Next, a thin-film transistor (T1) is formed in a plurality of subpixels (SP), and an alignment key (210) is formed in a non-display area (NA) (S10).

[0113] Next, an inorganic protective film (125) is formed covering the thin-film transistor (T1) and the alignment key (210).

[0114] Next, a fence structure (230) is formed on an inorganic insulating film (125) that overlaps with the edge of the alignment key (210) (S20).

[0115] Next, a moisture sensing pattern (220) is formed within a fence structure (230) corresponding to the center of the alignment key (210) on the inorganic insulating film (125) (S30).

[0116] Next, primary monitoring is performed using the above moisture sensing pattern, and a light-emitting element (ED) connected to the thin-film transistor is formed on the above inorganic insulating film (1250) (S40).

[0117] The light-emitting element (ED) is provided by stacking a first electrode (141) facing each other, an intermediate layer including a light-emitting layer (142), and a second electrode (142) in sequence. A bank (145) may be further provided to expose the light-emitting portion of the first electrode (141) after the first electrode (141) is formed and before the light-emitting layer (142) is formed. The bank (144) and the planarization film (130) may be partially patterned in the non-display area (NA) to form a dam pattern (DAM: 130A / 145A) that is adjacent to the display area (AA) than the alignment key (210) and guides the edge line of the organic encapsulation layer.

[0118] A sealing structure (150) that protects the light-emitting element (ED) is formed further inside the moisture sensing pattern (220) (S50). The sealing structure (150) includes, for example, a first inorganic sealing layer (151), an organic sealing layer (152), and a second inorganic sealing layer (153), and both the first and second inorganic sealing layers (151, 153) have an edge line (E) further inside the fence structure (230), or at least the upper second inorganic sealing layer (153) has an edge line (E) further inside the fence structure (230). The sensing pattern (220) formed on the inorganic protective film (125) or the first inorganic encapsulation layer (151) can simultaneously sense the moisture content during the process of forming the encapsulation structure (150) by detecting the degree of expansion corresponding to the alignment key (210) after formation with a camera corresponding to the alignment key (210).

[0119] That is, the light-emitting display device of the present invention can simultaneously sense the amount of moisture generated during a process performed on a substrate by providing a moisture sensing pattern in the outer region of the substrate.

[0120] The moisture sensing pattern is formed as a hydrogel corresponding to the alignment key position, so that the degree of deviation from the center of the alignment key can be easily identified depending on the amount of moisture.

[0121] Compared to a light-emitting display device that is discarded when moisture is detected after completion, the present invention allows the process to be stopped and the substrate to be repaired when the amount of moisture is detected to be above a certain level, thereby improving the yield of the light-emitting display device.

[0122] The light-emitting display device of the present invention allows the moisture sensing pattern to also shrink back to its original state when the substrate is repaired, so that the moisture sensing pattern can be recycled along with the substrate.

[0123] A light-emitting display device according to one embodiment of the present invention may include a substrate having a display area including a plurality of subpixels and a non-display area surrounding the display area, a thin-film transistor provided in each of the plurality of subpixels, an alignment key provided in the non-display area, an inorganic insulating film covering the thin-film transistor and the alignment key, a light-emitting element connected to the thin-film transistor and provided on the inorganic insulating film, a moisture sensing pattern provided on the inorganic insulating film overlapping with the alignment key, and an encapsulation structure located further inside than the moisture sensing pattern and protecting the light-emitting element.

[0124] The above moisture sensing pattern may be a hydrogel.

[0125] It may further include a fence structure surrounding the moisture sensing pattern and spaced apart from the moisture sensing pattern.

[0126] Each lower surface of the above moisture sensing pattern and the above fence structure can come into contact with the above inorganic insulating film.

[0127] The above fence structure may have a thickness greater than the above moisture sensing pattern.

[0128] It further includes a dam pattern provided in a non-display area of ​​the substrate along the edge of the display area, and the dam pattern may be closer to the display area than the moisture sensing pattern.

[0129] The above fence structure may be made of the same material as the above dam pattern.

[0130] The above-described encapsulation structure includes at least one inorganic encapsulation film and at least one organic encapsulation film, and the edge of the at least inorganic encapsulation film may be closer to the display area than the moisture sensing pattern and the fence structure.

[0131] The thin-film transistor comprises a semiconductor layer, a gate electrode superimposed on the semiconductor layer, a source electrode and a drain electrode connected to both ends of the semiconductor layer, and the alignment key may be located on the same layer as at least one metal of the thin-film transistor.

[0132] A method for manufacturing a light-emitting display device according to an embodiment of the present invention may include: a first step of providing a substrate having a display area including a plurality of subpixels and a non-display area surrounding the display area; a second step of forming thin-film transistors on the plurality of subpixels and forming an alignment key provided in the non-display area; a third step of forming an inorganic insulating film covering the thin-film transistors and the alignment key; a fourth step of forming a moisture sensing pattern on the inorganic insulating film superimposed on the alignment key; a fifth step of forming a light-emitting element connected to the thin-film transistors on the inorganic insulating film, which is primarily monitored by the moisture sensing pattern; and a sixth step of forming an encapsulation structure that protects the light-emitting element further inside than the moisture sensing pattern.

[0133] In the sixth step above, secondary monitoring using the moisture sensing pattern may be included.

[0134] The above first monitoring can measure the degree to which the outline of the moisture sensing pattern is separated from the center of the alignment key.

[0135] Meanwhile, it will be obvious to those skilled in the art that the present invention described above is not limited to the embodiments and attached drawings described above, and that various substitutions, modifications, and changes are possible within the scope of the technical concept of the present invention. Explanation of the symbols

[0136] 100: Substrate T1: Thin-film transistor ED: Light-emitting element 130: Planarization film 150: Bag structure 151: First inorganic bag layer 152: Organic bag layer 153: Second inorganic bag layer 130A: 1st Dam Layer 145A: 2nd Dam Layer DAM: Dam Pattern 145: Bank 210: Align Key 220: Moisture Sensing Pattern 230: Fence structure E: Weapon bag layer edge 1000: Light-emitting display device

Claims

Claim 1 A light-emitting display device comprising: a substrate having a display area including a plurality of subpixels and a non-display area surrounding the display area; a thin-film transistor provided in each of the plurality of subpixels; an alignment key provided in the non-display area; an inorganic insulating film covering the thin-film transistor and the alignment key; a light-emitting element connected to the thin-film transistor and provided on the inorganic insulating film; a moisture sensing pattern provided on the inorganic insulating film that overlaps with the alignment key; and an encapsulation structure located further inside than the moisture sensing pattern and protecting the light-emitting element. Claim 2 In claim 1, the above moisture sensing pattern is a hydrogel, a light-emitting display device. Claim 3 A light-emitting display device according to claim 1, further comprising a fence structure surrounding the moisture sensing pattern and spaced apart from the moisture sensing pattern. Claim 4 In claim 3, the lower surface of each of the moisture sensing pattern and the fence structure is a light-emitting display device in contact with the inorganic insulating film. Claim 5 In claim 3, the fence structure is a light-emitting display device having a thickness greater than the moisture sensing pattern. Claim 6 In claim 3, the light-emitting display device further comprises a dam pattern provided in a non-display area of ​​the substrate along the edge of the display area, wherein the dam pattern is closer to the display area than the moisture sensing pattern. Claim 7 In claim 6, the above fence structure is a light-emitting display device made of the same material as the above dam pattern. Claim 8 In claim 3, the encapsulation structure comprises at least one inorganic encapsulation film and at least one organic encapsulation film, and the edge of the at least inorganic encapsulation film is closer to the display area than the moisture sensing pattern and the fence structure, in a light-emitting display device. Claim 9 In claim 1, the thin-film transistor comprises a semiconductor layer, a gate electrode superimposed on the semiconductor layer, a source electrode and a drain electrode connected to both ends of the semiconductor layer, and the alignment key is a light-emitting display device located on the same layer as at least one metal of the thin-film transistor. Claim 10 A method for manufacturing a light-emitting display device comprising: a first step of providing a substrate having a display area including a plurality of subpixels and a non-display area surrounding the display area; a second step of forming thin-film transistors on the plurality of subpixels and forming an alignment key provided in the non-display area; a third step of forming an inorganic insulating film covering the thin-film transistors and the alignment key; a fourth step of forming a moisture sensing pattern on the inorganic insulating film superimposed on the alignment key; a fifth step of forming a light-emitting element connected to the thin-film transistors on the inorganic insulating film, which performs primary monitoring with the moisture sensing pattern; and a sixth step of forming an encapsulation structure that protects the light-emitting element further inside than the moisture sensing pattern. Claim 11 A method for manufacturing a light-emitting display device according to claim 10, comprising secondary monitoring using the moisture sensing pattern in the above 6th step. Claim 12 In claim 10, the above primary monitoring is a method for manufacturing a light-emitting display device that measures the degree to which the outline of the moisture sensing pattern is separated from the alignment key center.

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