Method for dividing a workpiece

Abstract

(Problem) Reduce the proportion of the surface area of ​​the workpiece where the tape is not adhered, thereby suppressing the deterioration of processing quality when the workpiece is divided from the back side by a cutting blade. (Solution) A tape is attached to the surface of a workpiece such that the direction in which the elongation rate is lowest when a predetermined force is applied to the tape is non-parallel to each of the multiple lines of division that extend in a grid pattern. In this case, each of the multiple lines of division does not extend along a direction perpendicular to the said direction. By doing so, the proportion of the area of ​​the workpiece surface where the tape is not attached is reduced near the boundary between each of the multiple lines of division and the area where the device is formed, thereby suppressing the deterioration of processing quality when the workpiece is divided from the back side by a cutting blade.

Description

Technology Field

[0001] The present invention relates to a method for dividing a workpiece, wherein the workpiece is divided into multiple regions by a plurality of planned division lines extending in a grid pattern, and a device is formed on the surface side of each of the multiple regions, and the workpiece is divided by a cutting blade from the back side of the workpiece along each of the plurality of planned division lines. Background Technology

[0002] Chips of semiconductor devices such as IC (Integrated Circuit) and LSI (Large Scale Integration) are indispensable components of various electronic devices such as mobile phones and personal computers. Such chips are manufactured, for example, by dividing a workpiece having a plurality of devices formed on its surface side along a line scheduled for division.

[0003] For such workpiece division, a cutting device is used that comprises, for example, a cutting unit having a spindle equipped with an annular cutting blade at its tip and a holding table for holding the workpiece. In this cutting device, the workpiece is divided into multiple chips by contacting a rotating cutting blade to the workpiece along each of a plurality of planned division lines extending in a grid pattern.

[0004] However, in order to divide the workpiece into multiple chips, it is necessary to cut the cutting blade deep into the workpiece so that the rotating cutting blade penetrates the workpiece. In this case, there is a risk that the holding table that holds the workpiece may be cut and damaged by the cutting blade.

[0005] Therefore, when dividing a workpiece into multiple chips in this manner, a tape is often attached to the workpiece and the workpiece is held on a holding table through this tape. This allows the workpiece to be divided into multiple chips while positioning the outer edge of the cutting blade penetrating the workpiece inside the tape. As a result, damage to the holding table is prevented.

[0006] Furthermore, in this case, the tape is not divided along with the division of the workpiece. That is, multiple chips are integrated via the tape. Therefore, the probability of several chips scattering when the workpiece is divided into multiple chips can be reduced. In addition, to facilitate handling before and after such workpiece division, the workpiece is often divided into work units integrated with an annular frame via the tape.

[0007] For example, when a workpiece is divided from the surface side by a cutting blade, a work unit in which the workpiece and an annular frame are integrated is formed by interposing a tape attached to the back side of the workpiece (see, for example, Patent Document 1). In addition, when a workpiece is divided from the back side by a cutting blade, a work unit in which the workpiece and an annular frame are integrated is formed by interposing a tape attached to the surface of the workpiece (see, for example, Patent Document 2). Prior art literature

[0008] Japanese Published Patent Application No. Hei 11-330008, Japanese Published Patent Application No. 2020-178064 The problem to be solved

[0009] When a device is formed on the surface of a workpiece, the surface of the workpiece often has an uneven shape. Specifically, in each of the multiple regions partitioned by multiple planned division lines extending in a grid pattern on the surface of the workpiece, a laminate including various insulating films and conductive films is formed to constitute the device.

[0010] Meanwhile, in order to facilitate the division of the workpiece along each of the multiple division lines extending in a grid, such stacking is often not formed in the areas of the workpiece surface corresponding to the multiple division lines. As a result, the surface of the workpiece becomes an uneven shape (the multiple areas where the device is formed become convex, and the areas corresponding to the multiple division lines become concave).

[0011] Therefore, in order to adhere the tape to the entire surface of such a workpiece, it is necessary for the tape to stretch along the uneven shape of the workpiece surface. However, in the case of such a tape, there is generally anisotropy in the elongation rate of the tape when a predetermined force is applied.

[0012] For example, when manufacturing a tape, the elongation rate of the tape when a predetermined force is applied in the tensile direction (MD (Machine Direction) direction) is lower than the elongation rate of the tape when a predetermined force is applied in other directions, such as the direction perpendicular to the tensile direction (TD (Transverse Direction) direction).

[0013] In addition, if the planned split line extends along a direction perpendicular to the direction of low elongation of the tape (e.g., the tensile direction), the tape may not adhere to the surface of the workpiece near the boundary between this planned split line and the area where the device is formed. Furthermore, if the workpiece is split from the back side by a cutting blade in this state, there is a risk that the processing quality will deteriorate when splitting the workpiece along this planned split line.

[0014] With this in mind, the objective of the present invention is to reduce the proportion of the surface area of ​​the workpiece to which the tape is not adhered, thereby suppressing the deterioration of processing quality when the workpiece is divided from the back side by a cutting blade. means of solving the problem

[0015] According to one aspect of the present invention, a workpiece is divided into a plurality of regions by a plurality of first division lines, each extending along a first direction, and a plurality of second division lines, each extending along a second direction intersecting the first direction, and a device is formed on the surface side of each of the plurality of regions. A method for dividing a workpiece by means of a cutting blade from the back side of the workpiece along each of the plurality of first division lines and each of the plurality of second division lines is provided, comprising: a first work unit forming step in which a first tape having anisotropy in the elongation rate when a predetermined force is applied is attached to a first annular frame to cover an opening of the first annular frame, and the first tape is attached to the surface of the workpiece to form a first work unit in which the workpiece and the first annular frame are integrated; and after the first work unit forming step, the first tape side of the first work unit is held by a holding table to cover the back side of the workpiece A method for dividing a workpiece is provided, comprising a holding step for exposing the workpiece, and after the holding step, a dividing step in which the workpiece is divided from the back side by the cutting blade along each of the plurality of first division planned lines and each of the plurality of second division planned lines, and in the first work unit forming step, the first tape is attached to the surface of the workpiece such that the third direction in which the elongation rate is lowest when the predetermined force is applied to the first tape is non-parallel to either the first direction or the second direction.

[0016] In addition, in the present invention, the first direction and the second direction are orthogonal, and in the first work unit forming step, it is preferable to attach the first tape to the surface of the workpiece such that the angle formed by each of the straight line along the third direction, the straight line along the first direction, and the straight line along the second direction is 45 degrees.

[0017] In addition, the present invention further comprises a second work unit forming step in which a second work unit is formed in which the workpiece and the second annular frame are integrated by forming a notch or orientation flat for indicating a crystal orientation on the outer edge of the workpiece, and after the dividing step, a second tape is attached to the second annular frame to cover the opening of the second annular frame in which a frame cutout is formed on the outer edge, and further, after attaching the second tape to the back surface of the workpiece, the first tape is peeled off from the workpiece. In the second work unit forming step, the second tape attached to the second annular frame is positioned such that the angle formed by the direction from the center of the workpiece toward the notch or orientation flat and the direction indicated by the frame cutout is 0°, 90°, 180°, or 270°. It is desirable to adhere to the back side. Effects of the invention

[0018] In the present invention, the first tape is attached to the surface of a workpiece such that the direction in which the elongation rate is lowest (the third direction) when a predetermined force is applied to the first tape is non-parallel to each of the plurality of planned division lines extending in a grid pattern. In this case, each of the plurality of planned division lines does not extend along a direction perpendicular to the said direction.

[0019] By doing so, the ratio of the surface area of ​​the workpiece where the first tape is not attached is reduced near the boundary between each of the multiple planned division lines and the area where the device is formed, thereby suppressing the deterioration of processing quality when the workpiece is divided from the back side by a cutting blade. Brief explanation of the drawing

[0020] Figure 1 is a flowchart schematically illustrating an example of a method for dividing a workpiece. FIG. 2 is a schematic perspective view showing an example of a tape adhesive device used to perform a work unit forming step. FIG. 3(A) is a schematic perspective view showing an example of a workpiece, and FIG. 3(B) is a schematic perspective view showing an example of an annular frame. FIG. 4 is a partial enlarged perspective view schematically showing a retaining unit and a tape adhesive unit. FIG. 5 is a perspective view schematically showing the workpiece and the annular frame being brought into the support. FIG. 6 is a perspective view schematically showing a workpiece with adjusted position and an annular frame. FIG. 7 is a partial cross-sectional side view schematically showing the attachment of tape to a workpiece and an annular frame. FIG. 8 is a perspective view schematically showing an example of a work unit. FIG. 9 is a perspective view schematically showing an example of a cutting device used to perform a holding step and a splitting step. FIG. 10 is a side view schematically showing a table base, a holding table, and a motor. FIG. 11 is a partial cross-sectional side view showing an enlarged view of the table base and the retaining table. FIG. 12 is a perspective view schematically showing an example of a work unit after a splitting step. FIG. 13 is a flowchart schematically illustrating a modified example of a workpiece division method. FIG. 14 is a schematic perspective view of an example of a tape adhesive device used to perform a second work unit forming step. FIG. 15 is a partial enlarged perspective view schematically showing the tape attachment portion. FIG. 16 is a partial enlarged perspective view schematically showing the work unit forming part, etc. FIG. 17 is a partial enlarged perspective view schematically showing the return section, etc. FIG. 18 is a partial enlarged perspective view schematically showing the peeled portion. FIG. 19 is a perspective view schematically showing an example of a second work unit. Specific details for implementing the invention

[0021] An embodiment of the present invention will be described with reference to the attached drawings. FIG. 1 is a flowchart schematically illustrating an example of a method for dividing a workpiece. In this method, first, a work unit in which the workpiece and an annular frame are integrated is formed by interposing a tape attached to the surface of the workpiece such that the direction in which the tape elongation rate is lowest is non-parallel to the line to be divided (work unit formation step: S1).

[0022] FIG. 2 is a schematic perspective view showing an example of a tape adhesive device used to perform a work unit forming step (S1). In addition, the X1 axis direction (front-back direction) and the Y1 axis direction (left-right direction) shown in FIG. 2 are directions perpendicular to each other on a horizontal plane, and the Z1 axis direction (up-down direction) is a direction perpendicular to the X1 axis direction and the Y1 axis direction (vertical direction).

[0023] The tape adhesive device (2) shown in FIG. 2 has a rectangular base (4) that supports each component. In the front area of ​​the upper surface of this base (4), three cassette mounting stands (6a, 6b, 6c) are formed to be arranged side by side along the Y1 axis direction. And, for example, a cassette (8a) for holding a workpiece is placed on the cassette mounting stand (6a).

[0024] Additionally, a cassette (8b) capable of accommodating a work unit including a workpiece and an annular frame integrated via a tape in a tape adhesive device (2) is placed on the cassette holder (6b). Additionally, a cassette (8c) capable of accommodating an annular frame is placed on the cassette holder (6c).

[0025] FIG. 3(A) is a schematic perspective view showing an example of a workpiece accommodated in a cassette (8a). The workpiece (11) shown in FIG. 3(A) has a disc-shaped substrate (13) made of a single-crystal semiconductor material such as silicon (Si), silicon carbide (SiC), or gallium nitride (GaN).

[0026] A notch (15) is formed on the outer edge of the substrate (13) to indicate a specific crystal orientation of the single-crystal semiconductor constituting the substrate (13). Additionally, an impurity region doped with impurities is formed on a part of the surface (13a) side of the substrate (13).

[0027] Additionally, the workpiece (11) is divided into multiple regions (19) by multiple planned division lines (first planned division lines) (17a) each extending along the same direction (first direction) and multiple planned division lines (second planned division lines) (17b) each extending along a second direction that intersects the first direction. Also, the first direction is a direction parallel to the direction from the center of the substrate (13) toward the notch (15), and the second direction is a direction perpendicular to the direction from the center of the substrate (13) toward the notch (15). That is, the first direction and the second direction are orthogonal.

[0028] And, in each of the plurality of regions (19), a device is formed. This device is composed of a stack including a portion of the surface (13a) side of the substrate (13) (an intrinsic semiconductor region and an impurity region where no impurities exist) and various insulating films and conductive films formed on the surface (13a) of the substrate (13).

[0029] Additionally, the same layer is not formed in the area corresponding to the multiple planned division lines (17a, 17b) on the surface of the workpiece (11). Therefore, the surface of the workpiece (11) has an uneven shape (the multiple area (19) where the device is formed becomes a convex part, and the area corresponding to the multiple planned division lines (17a, 17b) becomes a concave part).

[0030] In addition, there are no restrictions on the material, shape, structure, and size of the substrate (13). The substrate (13) may be made of materials such as ceramics, resin, and metal, for example. In addition, there may be cases where no impurity region is formed on the substrate (13). In addition, instead of a notch, a flat surface, so-called orientation flat (orifla), may be formed on the outer edge of the substrate (13) to indicate a specific crystal orientation.

[0031] FIG. 3(B) is a schematic perspective view showing an example of an annular frame (first annular frame) accommodated in a cassette (8c). The annular frame (21) shown in FIG. 3(B) is made of a metal material, for example, aluminum or stainless steel. In the center of this annular frame (21), a circular opening (21a) is formed with a diameter longer than that of the workpiece (11) (substrate (13)).

[0032] That is, the inner circumference of the annular frame (21) extends in a circular shape, and its diameter (inner diameter) is longer than the diameter of the workpiece (11) (substrate (13)). In addition, the outer edge of the annular frame (21) includes four arc portions (21b), each extending in an arc shape, and four straight portions (21c), each extending in a straight line.

[0033] And, four arc portions (21b) are arranged such that their diameter is longer than the inner diameter of the annular frame (21) and their center coincides with the center of the opening (21a). Additionally, the four arc portions (21b) are arranged at approximately equal intervals along the circumferential direction of the annular frame (21).

[0034] Additionally, four straight sections (21c) are arranged to overlap with a square whose center coincides with the center of the opening (21a). Additionally, each side of this square is longer than the inner diameter of the annular frame (21) and shorter than the diameter of the circle that overlaps with the four arc sections (21b). Additionally, each of the four straight sections (21c) is arranged between an adjacent pair of arc sections (21b) along the circumferential direction of the annular frame (21).

[0035] Additionally, a pair of frame cutouts (23a, 23b) are formed between one of the four straight sections (21c) and a pair of arc sections (21b) adjacent to the straight section (21c). The frame cutout (23a) is formed to cut the outer edge of the annular frame (21) in an acute angle shape. Additionally, the frame cutout (23b) is formed to cut the outer edge of the annular frame (21) in a right angle shape.

[0036] Additionally, a pair of frame cutouts (23a, 23b) are used to indicate the direction of the workpiece (11) that is integrated with the annular frame (21) via a tape. For example, the workpiece (11) is integrated with the annular frame (21) such that the first direction is perpendicular to the straight section (21c) positioned between the pair of frame cutouts (23a, 23b), and the second direction is parallel to the straight section (21c) positioned between the pair of frame cutouts (23a, 23b). In this case, alignment of the workpiece (11) is facilitated when processing the workpiece (11).

[0037] Referring again to FIG. 2, the remaining components of the tape adhesive device (2) will be described. Also, in FIG. 2, the workpiece (11) contained in the cassette (8a), the work unit contained in the cassette (8b) (the workpiece (11) and the annular frame (21) integrated via the tape), and the annular frame (21) contained in the cassette (8c) are shown in dashed lines.

[0038] In the upper surface area of ​​the support (4) located at the rear of the three cassette supports (6a, 6b, 6c), an opening (4a) extending along the Y1 axis direction is formed. In this opening (4a), a first conveying unit (10a) for conveying an annular frame (21) and a work unit, and a second conveying unit (10b) for conveying a workpiece (11) are formed.

[0039] Each of the first conveying unit (10a) and the second conveying unit (10b) has a movable support member (12a, 12b) movable along the Y1 axis direction. This movable support member (12a, 12b) has a piston rod movable along the Z1 axis direction and contains an actuator (not shown), such as an air cylinder, that can be rotated with a straight line along the Z1 axis direction as the axis of rotation.

[0040] Additionally, an opening through which the piston rod passes is formed on the upper surface of the movable support member (12a, 12b). And, the lower end of the return arm (14a, 14b) is connected to the upper end of the piston rod. The return arm (14a, 14b) is a robot arm having a plurality of joints, each of which can rotate with a straight line along the Z1 axis direction as the axis of rotation.

[0041] The upper part of this return arm (14a, 14b) incorporates a motor that rotates a spindle rotatable along a straight line perpendicular to the Z1 axis direction as the axis of rotation. This spindle is connected to the base of the robot hand (16a, 16b) through an opening formed on the side of the upper part of the return arm (14a, 14b).

[0042] On one side of this robot hand (16a, 16b), for example, a plurality of suction holes (not shown) are formed. And, these suction holes are connected to a suction source (not shown), such as a vacuum pump, through a fluid path formed inside the robot hand (16a, 16b) and a valve that controls the flow of gas.

[0043] And, by opening the valve while the suction source is in operation, negative pressure is generated in the space near one side of the robot hand (16a, 16b). By this, one side of the robot hand (16a) of the first conveying unit (10a) functions as a holding surface that sucks and holds the annular frame (21). Likewise, one side of the robot hand (16b) of the second conveying unit (10b) functions as a holding surface that sucks and holds the workpiece (11).

[0044] In addition, in the first return unit (10a), the upper and lower parts of the annular frame (21) may be inverted by rotating the spindle built into the upper part of the return arm (14a) while the annular frame (21) is held in place by suction by the holding surface of the robot hand (16a).

[0045] Likewise, in the second return unit (10b), the workpiece (11) may be inverted vertically by rotating the spindle built into the upper part of the return arm (14b) while the workpiece (11) is held in place by suction by the holding surface of the robot hand (16b).

[0046] In the upper surface area of ​​the support (4) located at the rear of the opening (4a), an X1 axis moving mechanism (18) is formed to move the support (20) along the X1 axis direction. This X1 axis moving mechanism (18) has a pair of guide rails (18a) each extending along the X1 axis direction.

[0047] And, the lower side of the support (20) is connected to the upper side of a pair of guide rails (18a) in a sliding manner. Additionally, a screw shaft (18b) extending along the X1 axis direction is disposed between the pair of guide rails (18a).

[0048] A motor (18c) for rotating the screw shaft (18b) is connected to the front end of the screw shaft (18b). And, on the surface of the screw shaft (18b) where a spiral groove is formed, a nut portion (not shown) is formed to accommodate a plurality of balls that roll on the surface of the rotating screw shaft (18b), thereby forming a ball screw.

[0049] That is, when the screw shaft (18b) rotates, a number of balls circulate within the nut portion, and the nut portion moves along the X1 axis direction. In addition, this nut portion is fixed to the lower surface of the support (20). Because of this, when the screw shaft (18b) is rotated by the motor (18c), the support (20) moves along the X1 axis direction together with the nut portion.

[0050] By this, a support (20) can be placed in either the incoming / outgoing area located above the front side of a pair of guide rails (18a) or the tape attachment area located above the rear side. Additionally, the incoming / outgoing area is an area of ​​the support (20) where the workpiece (11) and annular frame (21) can be brought into the support (20) and the work unit can be taken out of the support (20).

[0051] Additionally, the tape attachment area is an area of ​​the support (20) capable of forming a work unit (integration of the workpiece (11) and the annular frame (21) via the tape). And, in FIG. 2, the support (20) placed in the tape attachment area is shown.

[0052] The formation of the work unit is carried out by a tape attachment unit (36) formed above the tape attachment area of ​​the support (20). FIG. 4 is a partial enlarged perspective view schematically showing the support (20) and the tape attachment unit (36). The support (20) has a rectangular frame support (22) that supports an annular frame (21).

[0053] This frame support (22) has a circular opening (24) formed in the center and also has a square top surface (26) including a pair of sides (26a, 26b) extending along the X1 axis direction and a pair of sides (26c, 26d) extending along the Y1 axis direction. Additionally, on the inside of this opening (24), a spindle (not shown) extending along the Z1 axis direction and a motor (not shown) that rotates this spindle using a straight line along the Z1 axis direction as the axis of rotation are formed.

[0054] The lower part of a cylindrical workpiece support (28) that holds the workpiece (11) is connected to the upper part of this spindle. And when the motor built into the frame support (22) operates, the workpiece support (28) passes through the center of the upper surface of the workpiece support (28) and rotates together with the spindle, with a straight line along the Z1 axis direction as the axis of rotation.

[0055] And, on the inner side of this opening (24), a lifting mechanism (not shown) is formed to move (raise / lower) the workpiece support (28) along the Z1 axis direction. This lifting mechanism adjusts the height of the workpiece support (28) so that, for example, the height of the upper surface of the annular frame (21) supported by the frame support (22) and the height of the upper surface of the workpiece (11) supported by the workpiece support (28) are matched.

[0056] Additionally, on the upper surface (26) of the frame support (22), a pair of fixed protrusions (30a, 30b) are formed, the height of which is shorter than the thickness of the annular frame (21). This fixed protrusion (30a) is positioned on the side (26a) of the upper surface (26) of the frame support (22) when viewed from the upper surface of the workpiece support (28), and also extends along the X1 axis direction. Likewise, the fixed protrusion (30b) is positioned on the side (26c) of the upper surface (26) of the frame support (22) when viewed from the upper surface of the workpiece support (28), and also extends along the Y1 axis direction.

[0057] And, on the upper surface (26) of the frame support (22), a pair of openings (32a, 32b) extending along the Y1 axis direction and a pair of openings (32c, 32d) extending along the X1 axis direction are formed. This pair of openings (32a, 32b) are positioned on the side (26b) of the upper surface (26) of the frame support (22) when viewed from the upper surface of the workpiece support (28). Likewise, the pair of openings (32c, 32d) are positioned on the side (26d) of the upper surface (26) of the frame support (22) when viewed from the upper surface of the workpiece support (28).

[0058] Additionally, a movable projection (34a) movable along the Y1 axis direction passes through each of the pair of openings (32a, 32b). Likewise, a movable projection (34b) movable along the X1 axis direction passes through each of the pair of openings (32c, 32d). And, two actuators for moving the movable projections (34a, 34b) are built into the frame support (22).

[0059] Specifically, the frame support (22) incorporates a first actuator (not shown), such as an air cylinder, having a first piston rod movable along the Y1 axis direction. The lower part of the movable projection (34a) is connected to the tip of the first piston rod via a connecting member (not shown).

[0060] Likewise, the frame support (22) incorporates a second actuator (not shown), such as an air cylinder, having a second piston rod movable along the X1 axis direction. And, the lower part of the movable projection (34b) is connected to the tip of the second piston rod via a connecting member (not shown).

[0061] A tape attachment unit (36) formed above the tape attachment area of ​​the support (20) has a supply roller (38). A plurality of circular tapes (first tapes) (27) attached to the peeling substrate (25) are wound on this supply roller (38).

[0062] Additionally, the diameter of each of the multiple tapes (27) is longer than the inner diameter (diameter of the opening (21a)) of the annular frame (21) and shorter than the square side that overlaps with the straight portion (21c) of the outer edge of the annular frame (21) (see FIG. 3(B)).

[0063] Additionally, each of the plurality of tapes (27) has, for example, a flexible film-shaped tape substrate and an adhesive layer (glue layer) formed on one side of the tape substrate (the side facing the peeling substrate (25)). And each of the tape substrate and the adhesive layer is made of a material that transmits visible light.

[0064] Specifically, the tape substrate is composed of polyolefin (PO), polyethylene terephthalate (PET), polyvinyl chloride (PVC), or polystyrene (PS), etc. Additionally, the adhesive layer is composed of UV-curable silicone rubber, acrylic materials, or epoxy materials, etc.

[0065] In addition, for each of the multiple tapes (27), there is anisotropy in the elongation rate when a predetermined force is applied. For example, for each of the multiple tapes (27), the elongation rate is lowest when a predetermined force is applied along the tensile direction (MD direction) of the tape (27) when manufacturing the tape (27).

[0066] Then, a plurality of tapes (27) are pulled out obliquely downward by an induction roller (40) together with a release substrate (25). Here, each of the plurality of tapes (27) is attached to the release substrate (25) such that the direction in which they are pulled out by the induction roller (40) is parallel to the tension direction (MD direction).

[0067] In addition, the direction in which the multiple tapes (27) are drawn out by the induction roller (40) is a direction parallel to the X1 axis direction. Therefore, for each of the multiple tapes (27), the elongation rate is lowest when a predetermined force is applied along the X1 axis direction.

[0068] Additionally, each of the plurality of tapes (27) drawn out by the induction roller (40) is peeled from the peeling substrate (25) by a peeling member (42) that is in line contact with the peeling substrate (25). Specifically, the peeling substrate (25) is pulled by an induction roller (44) formed at the rear of the peeling member (42).

[0069] Therefore, the direction of travel of the peeling material (25) changes significantly before and after contact with the peeling member (42). Meanwhile, each of the multiple tapes (27) is not pulled by the induction roller (44). As a result, each of the multiple tapes (27) is peeled from the peeling material (25) through contact between the peeling member (42) and the peeling material (25).

[0070] Additionally, a pressure roller (46) is formed in a position facing the peeling member (42) via the peeling substrate (25) and is used when attaching a plurality of tapes (27) peeled from the peeling substrate (25) to the workpiece (11) and the annular frame (21).

[0071] Additionally, the peeling material (25) pulled by the induction roller (44) is wound and recovered by the recovery roller (48) formed above the induction roller (44). Also, the tape adhesive unit (36) is connected to a lifting mechanism (not shown).

[0072] This lifting mechanism adjusts the height of the tape attachment unit (36) so that the pressure roller (46) is positioned at a height where the pressure roller (46) can contact the annular frame (21) and / or workpiece (11) placed on the support (20) located in the tape attachment area, for example. By doing so, the tape (27) can be pressed hard against the annular frame (21) and / or workpiece (11) by the pressure roller (46).

[0073] In the tape adhesive device (2) shown in FIG. 2, for example, a work unit forming step (S1) is performed in the following order. Specifically, first, an X1 axis direction moving mechanism (18) is operated to place the support (20) in the loading / unloading area. Then, the workpiece (11) and the annular frame (21) are brought into the support (20).

[0074] FIG. 5 is a schematic perspective view showing the workpiece (11) and the annular frame (21) being brought into the support (20). Specifically, the second conveying unit (10b) is operated to remove the workpiece (11) contained in the cassette (8a) from the cassette (8a) and bring it into the upper surface of the workpiece support (28) of the support (20).

[0075] At this time, the second conveying unit (10b) brings the workpiece (11) onto the upper surface of the workpiece support (28) such that the surface of the workpiece (11) (the surface (13a) of the substrate (13)) faces upward, and the notch (15) is positioned on the side (26d) of the upper surface (26) of the frame support (22) when viewed from the upper surface of the workpiece support (28).

[0076] That is, the workpiece (11) is brought onto the upper surface of the workpiece support (28) such that each of the plurality of planned division lines (17a) is parallel to the X1 axis direction and each of the plurality of planned division lines (17b) is parallel to the Y1 axis direction.

[0077] Additionally, the first conveying unit (10a) is operated to take the annular frame (21) contained in the cassette (8c) out of the cassette (8c) and bring it onto the upper surface (26) of the frame support (22) of the support (20).

[0078] At this time, the first conveying unit (10a) brings the annular frame (21) onto the upper surface (26) of the frame support (22) so that, when viewed from the upper surface of the workpiece support (28), the straight section (21c) positioned between a pair of frame cutouts (23a, 23b) is positioned on the side (26d) of the upper surface (26) of the frame support (22).

[0079] That is, the annular frame (21) is brought onto the upper surface of the frame support (22) such that a pair of straight sections (21c) including this straight section (21c) are parallel to the Y1 axis direction, and also, the other pair of straight sections (21c) are parallel to the X1 axis direction.

[0080] Additionally, prior to the introduction of the annular frame (21) into the frame support (22), the movable projection (34a) and the movable projection (34b) are positioned furthest from the workpiece support (28). Then, this annular frame (21) is introduced into an area further inside than the fixed projection (30a) and the fixed projection (30b), and the movable projection (34a) and the movable projection (34b).

[0081] Next, the positions of both are adjusted by rotating the workpiece (11) and also moving the annular frame (21) in a horizontal direction. FIG. 6 is a schematic perspective view showing the workpiece (11) and the annular frame (21) with their positions adjusted.

[0082] Specifically, the workpiece (11) is rotated by a predetermined angle (e.g., 45°). By doing so, each of the multiple planned division lines (17a, 17b) of the workpiece (11) becomes non-parallel to the X1 axis direction. That is, each of the multiple planned division lines (17a, 17b) becomes non-parallel to the direction in which the elongation rate is lowest when a predetermined force is applied to the tape (27) described above.

[0083] Also, the movable projection (34a) is moved along the Y1 axis direction so as to approach the workpiece support (28). By doing so, the movable projection (34a) comes into contact with one of the pair of straight sections (21c) parallel to the X1 axis direction. Then, the movable projection (34a) is moved along the Y1 axis direction until the other of the pair of straight sections (21c) parallel to the X1 axis direction comes into contact with the fixed projection (30a).

[0084] Likewise, the movable projection (34b) is moved along the X1 axis direction so as to approach the workpiece support (28). By doing so, the movable projection (34b) comes into contact with one of the pair of straight sections (21c) parallel to the Y1 axis direction. Then, the movable projection (34b) is moved along the X1 axis direction until the other of the pair of straight sections (21c) parallel to the Y1 axis direction comes into contact with the fixed projection (30b).

[0085] Next, if necessary, a lifting mechanism formed on the inner side of the opening (24) is operated to raise and lower the workpiece support (28). That is, if the height of the upper surface of the annular frame (21) supported by the frame support (22) and the upper surface (surface) (surface (13a) of the substrate (13)) of the workpiece (11) supported by the workpiece support (28) are significantly different, the height of the workpiece support (28) is adjusted to match the heights of both.

[0086] Next, a tape (27) is applied to the workpiece (11) and the annular frame (21). FIG. 7 is a partial cross-sectional side view schematically showing the application of a tape (27) to the workpiece (11) and the annular frame (21). Specifically, first, an X1 axis movement mechanism (18) is operated to position a support (20) that supports the workpiece (11) and the annular frame (21) in the tape application area. At this time, a movable projection (34b) is positioned approximately directly below the pressure roller (46) of the tape application unit (36).

[0087] Next, the movable projection (34b) is moved to the furthest position from the workpiece support (28). Next, the tape adhesive unit (36) is lowered to a height where the pressure roller (46) can contact the workpiece (11) and the annular frame (21). Next, the guide roller (40, 44), pressure roller (46), and retrieval roller (48) (pressure roller (46), etc.) are rotated so that the tape (27) is peeled from the peeling substrate (25) and faces the upper surface of the annular frame (21).

[0088] Next, the support (20) is moved forward while continuing to rotate the pressure roller (46), etc. By doing so, the tape (27) is pressed downward by the pressure roller (46). As a result, the tape (27) is gradually adhered to the upper surface of the annular frame (21) and the upper surface (surface) of the workpiece (11) (surface (13a) of the substrate (13)).

[0089] Here, the surface shape of the workpiece (11) is an uneven shape including a convex portion (a plurality of regions (19) where the device is formed) and a concave portion (a region corresponding to a plurality of planned division lines (17a, 17b)). And, in order to attach the tape (27) to the entire surface of the workpiece (11), it is necessary for the area to be attached to the tape (27) to be extended near the boundary between each of the plurality of planned division lines (17a, 17b) and the region (19) where the device is formed.

[0090] Regarding this point, the tape (27) is positioned such that, as described above, the direction in which the elongation rate is lowest when a predetermined force is applied is non-parallel to each of the plurality of planned division lines (17a, 17b). By doing so, the proportion of the surface area of ​​the workpiece (11) to which the tape (27) is not attached can be reduced near the boundary between each of the plurality of planned division lines (17a, 17b) and the area (19) where the device is formed.

[0091] In addition, it is preferable that the angle formed by the straight line along the direction in which the elongation rate of the tape (27) is lowest (the straight line along the third direction described above) and the straight line along each of the plurality of planned division lines (17a) (the straight line along the first direction described above) is 45°. That is, it is preferable that the angle formed by the straight line along the third direction described above and the straight line along each of the plurality of planned division lines (17b) (the straight line along the second direction described above) is 45°.

[0092] In this case, the slope in the direction where the elongation rate of the tape (27) is lowest for each of the multiple planned division lines (17a, 17b) becomes equal. Therefore, the ratio of the surface area of ​​the workpiece (11) to which the tape (27) is not attached can be equalized near the boundary between each of the multiple planned division lines (17a, 17b) and the area (19) where the device is formed.

[0093] As described above, a tape (27) is attached to the workpiece (11) and the annular frame (21). As a result, a work unit (first work unit) is formed in which the workpiece (11) and the annular frame (21) are integrated through the tape (27). FIG. 8 is a schematic perspective view showing this work unit (29). In FIG. 8, the back side of the workpiece (11) (the back side (13b) of the substrate (13)) is shown.

[0094] Next, this work unit (29) is brought into the cassette (8b). Specifically, first, the X1 axis direction movement mechanism (18) is operated to place the support (20) in the loading / unloading area. Then, the first conveying unit (10a) is operated to remove the work unit (29) supported by the support (20) from the support (20) and bring it into the cassette (8b).

[0095] In the method for dividing a workpiece shown in FIG. 1, after the work unit forming step (S1), the tape (27) side of the work unit (29) is held and the back side of the workpiece (the back side (13b) of the substrate (13)) is exposed (holding step: S2). Then, after this holding step (S2), the workpiece (11) is divided by a cutting blade from the back side of the workpiece (11) along each of the plurality of division planned lines (17a, 17b) (dividing step: S3).

[0096] FIG. 9 is a schematic perspective view of an example of a cutting device used to perform a holding step (S2) and a splitting step (S3). In addition, the X2 axis direction (front-back direction) and the Y2 axis direction (left-right direction) shown in FIG. 9 are directions perpendicular to each other on a horizontal plane, and the Z2 axis direction (up-down direction) is a direction perpendicular to the X2 axis direction and the Y2 axis direction (vertical direction).

[0097] The cutting device (50) shown in FIG. 9 has a support (52) that supports each component. On the upper side of the support (52), a pair of guide rails (54) are formed, each extending along the Y2 axis direction. And, on the upper side of the pair of guide rails (54), a rectangular movable table (56) extending along the X2 axis direction is connected in a slidable manner.

[0098] Additionally, a screw shaft (58) extending along the Y2 axis direction is disposed between a pair of guide rails (54). A motor (60) for rotating the screw shaft (58) is connected to one end of the screw shaft (58). Then, on the surface of the screw shaft (58) where a spiral groove is formed, a nut portion (not shown) is formed to accommodate a plurality of balls that roll on the surface of the rotating screw shaft (58), thereby forming a ball screw.

[0099] That is, when the screw shaft (58) rotates, a number of balls circulate within the nut part, and the nut part moves along the Y2 axis direction. In addition, this nut part is fixed to the lower surface of the moving table (56). Therefore, when the screw shaft (58) is rotated by the motor (60), the moving table (56) moves along the Y2 axis direction together with the nut part.

[0100] In addition, a Y2 axis scale (62) is formed in the area adjacent to the guide rail (54) on the upper surface of the support (52). This Y2 axis scale (62) is used to measure the position of the moving table (56) in the Y2 axis direction.

[0101] On the upper surface of the movable table (56), a pair of guide rails (64) are formed, each extending along the X2 axis direction. A table base (66) is connected to the upper surface of the pair of guide rails (64) in a slidable manner. Additionally, the detailed structure of the table base (66) will be described later.

[0102] Additionally, a screw shaft (68) extending along the X2 axis direction is positioned between a pair of guide rails (64). A motor (70) for rotating the screw shaft (68) is connected to the front end (one end) of the screw shaft (68). Furthermore, on the surface of the screw shaft (68) where a spiral groove is formed, a nut portion (not shown) is formed to accommodate a plurality of balls that roll on the surface of the rotating screw shaft (68), thereby forming a ball screw.

[0103] That is, when the screw shaft (68) rotates, a number of balls circulate within the nut part, and the nut part moves along the X2 axis direction. In addition, this nut part is fixed to the lower surface of the table base (66). Therefore, when the screw shaft (68) is rotated by the motor (70), the table base (66) moves along the X2 axis direction together with the nut part.

[0104] Additionally, an X2 axis scale (72) is formed in an area adjacent to the guide rail (64) on the upper surface of the movable table (56). This X2 axis scale (72) is used to measure the position of the table base (66) in the X2 axis direction.

[0105] A holding table (74) is formed on the upper surface of the table base (66). Additionally, a motor (84) is formed on the side of the table base (66) to rotate the holding table (74) using a straight line passing through the center of the holding table (74) and along the Z2 axis direction as the axis of rotation. FIG. 10 is a side view schematically showing the table base (66), the holding table (74), and the motor (84).

[0106] The table base (66) has a rectangular base plate (66a). The lower side of this base plate (66a) (the lower side of the table base (66)) is connected to a pair of guide rails (64). Additionally, a rectangular erected section (66b) extending upward is formed at the upper end of the front section of the base plate (66a).

[0107] Additionally, at the rear portion of the upper part of this mounting section (66b), a rectangular top plate section (66c) extending rearward is formed. At the center of this top plate section (66c), a cylindrical through hole (not shown) is formed that penetrates the top plate section (66c) in the vertical direction. Also, in the table base (66), an open space (66d) exists between the upper surface of the bottom plate section (66a) and the lower surface of the top plate section (66c).

[0108] Additionally, on the upper surface of the table base (66) (the upper surface of the top plate portion (66c)), a retaining table (74) is formed to cover a through hole formed in the top plate portion (66c). This retaining table (74) is supported on the table base (66) in a manner that allows it to rotate through the center of the retaining table (74) and also rotate along a straight line along the Z2 axis direction as an axis of rotation. FIG. 11 is a partial cross-sectional side view showing an enlarged portion of the table base (66) and the retaining table (74).

[0109] The retaining table (74) has a disc-shaped retaining member (74a) located above a through hole formed in the top plate (66c). This retaining member (74a) is made of a material that transmits visible light, such as soda glass, borosilicate glass, or quartz glass. Additionally, a cylindrical fitting part (74b) extending downward from the retaining member (74a) is formed around the retaining member (74a).

[0110] Additionally, a suction passage (74c) is formed inside the retaining member (74a) and the fitting part (74b), and this suction passage (74c) is connected to a suction source (not shown), such as a vacuum pump, via a pipe (76) connected to the outer surface of the fitting part (74b). In addition, an annular fitting hole is formed in the top plate part (66c), and the lower part of the fitting part (74b) is inserted into this fitting hole in a manner that allows it to slide.

[0111] Additionally, a cylindrical driven pulley (78) is formed on the outer surface of the fitting portion (74b). A belt (80) is stretched over this driven pulley (78). Also, as shown in FIG. 10, this belt (80) is stretched over the upper part of a drive pulley (82) that extends along the Z2 axis direction. Additionally, the lower part of this drive pulley (82) is connected to a motor (84) formed on the front of the installation portion (66b).

[0112] And, when this motor (84) operates, the electric pulley (82) rotates with a straight line along the Z2 axis direction as the axis of rotation, and the force that rotates the electric pulley (82) is also transmitted to the driven pulley (78) through the belt (80). By this, the retaining table (74) passes through the center of the retaining table (74) together with the driven pulley (78) and also rotates with a straight line along the Z2 axis direction as the axis of rotation.

[0113] Additionally, a cylindrical frame support (86) is formed at each of the four corners of the upper surface of the table base (66) (the upper surface of the top plate (66c)). This frame support (86) supports the annular frame (21) through the tape (27) when the work unit (29) is placed on the holding table (74).

[0114] Additionally, this frame support (86) is formed so that its upper surface is lower than the upper surface of the holding table (74) so ​​that when the work unit (29) is placed on the holding table (74), the upper surface of the annular frame (21) is positioned lower than the upper surface of the holding table (74) (the upper surface of the holding member (74a)).

[0115] Referring again to FIG. 9, the remaining components of the cutting device (50) will be described. A rectangular support structure (88) is formed on the rear side of the upper surface of the support (52). On the side of this support structure (88), a pair of guide rails (90) are formed, each extending along the Z2 axis direction.

[0116] And, on the surface side of a pair of guide rails (90), a rectangular spindle housing (92) extending along the X2 axis direction is connected in a slidable manner. Additionally, a screw shaft (94) extending along the Z2 axis direction is disposed between the pair of guide rails (90).

[0117] A motor (96) for rotating the screw shaft (94) is connected to the upper end (one end) of the screw shaft (94). And, on the surface of the screw shaft (94) where a spiral groove is formed, a nut part (not shown) is formed to accommodate a plurality of balls that roll on the surface of the rotating screw shaft (94), thereby forming a ball screw.

[0118] That is, when the screw shaft (94) rotates, a number of balls circulate within the nut portion, and the nut portion moves along the Z2 axis direction. In addition, this nut portion is fixed to the side facing the support structure (88) of the spindle housing (92). Therefore, when the screw shaft (94) is rotated by the motor (96), the spindle housing (92) moves along the Z2 axis direction together with the nut portion.

[0119] This spindle housing (92) accommodates a spindle (not shown) extending along the X2 axis direction and a motor (not shown) that rotates the spindle using a straight line along the X2 axis direction as the axis of rotation. The tip (front end) of the spindle is exposed through an opening formed on the front of the spindle housing (92).

[0120] Additionally, an annular cutting blade (98) is mounted on the tip of the spindle exposed from the spindle housing (92). Therefore, when the spindle rotates, the cutting blade (98) rotates together with the spindle along a straight line along the X2 axis direction as the axis of rotation. Additionally, an upper imaging unit (100) is formed on the side far from the support structure (88) of the spindle housing (92).

[0121] This upper imaging unit (100) images a structure located below it using visible light. Additionally, a lower imaging unit (102) is formed at a position facing the upper imaging unit (100) in the vertical direction. This lower imaging unit (102) images a structure located above it using visible light.

[0122] Additionally, the lower imaging unit (102) is connected to a lifting support mechanism (106) extending along the Z2 axis direction through a connecting part (104) extending along the X2 axis direction. This lifting support mechanism (106) is formed on the upper surface of the base (52) and supports the lower imaging unit (102) so that it can be lifted.

[0123] In the cutting device (50), for example, the holding step (S2) and the dividing step (S3) are performed in the following order. Specifically, first, the work unit (29) is placed on the holding table (74) so ​​that the back side of the workpiece (11) (the back side of the substrate (13) (13b)) faces upward. That is, the workpiece (11) is placed on the holding member (74a) via the tape (27), and the annular frame (21) is placed on the frame support member (86) via the tape (27).

[0124] Next, a suction source communicating with the suction passage (74c) formed inside the retaining member (74a) and the fitting part (74b) of the retaining table (74) through the pipe (76) is operated. By doing so, the workpiece (11) is suctioned and retained through the tape (27) placed on the retaining member (74a). By the above, the retaining step (S2) is completed.

[0125] Next, the moving table (56) and the table base (66) are moved so that the through hole formed in the retaining member (74a) is positioned between the upper imaging unit (100) and the lower imaging unit (102). That is, the lower imaging unit (102) is positioned in the open space (66d) between the bottom plate (66a) and the top plate (66c) of the table base (66).

[0126] Next, the lower imaging unit (102) captures the surface of the workpiece (11) through this through hole, the transparent retaining member (74a), and the tape (27). Then, based on the image formed by the imaging by the lower imaging unit (102), the retaining table (74) is rotated so that a plurality of planned division lines (17a) or a plurality of planned division lines (17b) are parallel to the Y2 axis direction.

[0127] Next, the moving table (56) and the table base (66) are moved so that any of the multiple planned division lines (17a, 17b) are positioned in the Y2 axis direction as viewed from the cutting blade (98). Next, the spindle housing (92) is moved so that the lower end of the cutting blade (98) is positioned higher than the lower surface of the tape (27) and also lower than the upper surface.

[0128] Next, the cutting blade (98) is rotated. Then, while the cutting blade (98) is rotated, the moving table (56) is moved so that the cutting blade (98) passes from one end to the other end in the Y2 axis direction of the workpiece (11). By doing so, the workpiece (11) is divided by the cutting blade (98) from the back side along any of the multiple planned division lines (17a, 17b).

[0129] Also, by repeating the same operation, the workpiece (11) is divided by the cutting blade (98) from the back side along each of the multiple planned division lines (17a, 17b). By doing so, the division step (S3) is completed. FIG. 12 is a schematic perspective view showing the work unit (29) after the division step (S3).

[0130] In the splitting step (S3), a groove (27a) is formed in the tape (27) because the cutting blade (98) is cut into the tape (27), but the tape (27) is not split. Therefore, the split workpiece (11) and the annular frame (21) are maintained as a work unit (29) integrated with the tape (27).

[0131] As described above, in the method for dividing a workpiece shown in FIG. 1, the tape (27) is attached to the surface of the workpiece (11) such that the direction in which the elongation rate is lowest when a predetermined force is applied to the tape (27) is non-parallel to each of the plurality of planned division lines (17a, 17b). In this case, each of the plurality of planned division lines (17a, 17b) does not extend along a direction perpendicular to that direction.

[0132] By doing so, the ratio of the surface area of ​​the workpiece (11) to which the tape (27) is not attached is reduced near the boundary of each of the multiple planned division lines (17a, 17b) and the area (19) where the device is formed, thereby suppressing the deterioration of processing quality when the workpiece (11) is divided from the back side by the cutting blade (98).

[0133] Additionally, the method for dividing a workpiece according to the present invention may include, after the dividing step (S3), a step of aligning the direction representing a specific crystal orientation of the workpiece (11) with the direction represented by the frame cut of the annular frame (making the angle formed by both directions 0°). FIG. 13 is a flowchart schematically illustrating an example of such a method for dividing a workpiece. In this method, the work unit forming step (S1), holding step (S2), and dividing step (S3) described above are first performed in order.

[0134] Then, a second tape attached to the back of the workpiece (11) is interposed so that the direction indicating a specific crystal orientation of the workpiece (11) (e.g., the direction from the center of the workpiece (11) toward the notch (15)) matches the direction indicated by the frame cut of the second annular frame, thereby forming a second work unit in which the workpiece (11) and the second annular frame are integrated (second work unit forming step: S4).

[0135] FIG. 14 is a schematic perspective view of an example of a tape adhesive device used to perform the second work unit forming step (S4). In addition, the X3 axis direction (front-back direction) and the Y3 axis direction (left-right direction) shown in FIG. 14 are directions perpendicular to each other on a horizontal plane, and the Z3 axis direction (up-down direction) is a direction perpendicular to the X3 axis direction and the Y3 axis direction (vertical direction).

[0136] The tape adhesive device (108) shown in FIG. 14 has a rectangular support (110) that supports each component. Two cassette holders (112a, 112b) are formed at a pair of corners located on the front side of the upper surface of the support (110).

[0137] And, a cassette (114a) is placed on the cassette holder (112a) to accommodate a work unit (29) containing a divided workpiece (11). Also, a cassette (114b) capable of accommodating a second work unit formed in the tape adhesive device (108) is placed on the cassette holder (112b).

[0138] Additionally, an opening (110a) extending along the Y3 axis direction is formed in the upper surface area of ​​the support (110) located at the rear of the two cassette supports (112a, 112b). A conveying unit (116) for conveying a work unit is formed in this opening (110a). This conveying unit (116) has the same structure as the first conveying unit (10a) shown in FIG. 2.

[0139] Additionally, a tape attachment portion (110b) is formed on one of a pair of corners located on the rear side of the upper surface of the support (110). FIG. 15 is a partial enlarged perspective view schematically showing the tape attachment portion (110b). A support (118) is formed on this tape attachment portion (110b), and a second annular frame (31) is placed on this support (118).

[0140] This second annular frame (31) has the same structure as the annular frame (21) shown in FIG. 3(B), etc. Additionally, the second annular frame (31) is placed on a support (118) such that the direction indicated by a pair of frame cutouts (33a, 33b) (the direction from the center of the opening (31a) toward the straight section (31b) positioned between the pair of frame cutouts (33a, 33b)) is parallel to the X3 axis direction, and the straight section (31b) is positioned on the front side.

[0141] Additionally, a tape attachment unit (120) is formed above the support (118). This tape attachment unit (120) has the same structure as the tape attachment unit (36) shown in FIG. 4, etc. Additionally, a plurality of circular second tapes (37) attached to the peeling substrate (35) are wound on the supply roller (122) of the tape attachment unit (120).

[0142] Additionally, the diameter of each of the plurality of second tapes (37) is longer than the inner diameter of the second annular frame (31) and shorter than the square side that overlaps with the straight portion (31b) of the outer edge of the second annular frame (31). Additionally, each of these plurality of second tapes (37) has the same structure as the tape (27) shown, for example, in FIG. 4.

[0143] In addition, the support (118) is connected to an X3 axis moving mechanism (not shown), just like the support (20) shown in FIG. 4, etc. In addition, the tape adhesive unit (120) is connected to a lifting mechanism (not shown), just like the tape adhesive unit (36) shown in FIG. 4, etc.

[0144] Additionally, a work unit forming part (110c) is formed in the front area of ​​the tape attachment part (110b) shown in FIG. 14. FIG. 16 is a partial enlarged perspective view schematically showing the work unit forming part (110c), etc. A cut table (124) is formed in this work unit forming part (110c), and a work unit (29) that is discharged from the cassette (114a) by the return unit (116) can be fed into this cut table (124).

[0145] Additionally, a cutter (126) is formed above the cut table (124) to cut the tape (27) existing between the workpiece (11) of the work unit (29) brought into the cut table (124) and the annular frame (21).

[0146] This cutter (126) is connected to a rotary drive source (128) formed above the center of the cut table (124), and this rotary drive source (128) rotates the cutter (126) with a predetermined radius of rotation. Also, the rotary drive source (128) is connected to a lifting mechanism (not shown).

[0147] Additionally, on the side of the cut table (124), an X3 axis direction moving mechanism casing (130) extending along the X3 axis direction is formed. On the side of the X3 axis direction moving mechanism casing (130) on the side of the cut table (124), an opening (130a) extending from a lateral area at one end of the cut table (124) in the X3 axis direction to a lateral area at the other end is formed, and an adhesive roller support (132) passes through this opening (130a).

[0148] The base portion of this adhesive roller support (132) is connected to an X3 axis movement mechanism (not shown) embedded in an X3 axis movement mechanism casing (130). Additionally, an adhesive roller (134) is formed in the portion of the adhesive roller support (132) exposed from the X3 axis movement mechanism casing (130). Then, when the X3 axis movement mechanism connected to the base portion of the adhesive roller support (132) operates, this adhesive roller (134) moves along the X3 axis direction to contact the upper surface of the cut table (124).

[0149] Additionally, an opening is formed on the side opposite to the side where the opening (130a) of the X3 axial movement mechanism casing (130) is formed, and a conveying unit support (136) passes through this opening. The base of this conveying unit support (136) is connected to an X3 axial movement mechanism (not shown) embedded in the X3 axial movement mechanism casing (130).

[0150] Additionally, the return unit support (136) is bent to extend toward the support (118) and the cut table (124), and a return unit (138) is formed on the lower side of its front end. This return unit (138) has a cylindrical connecting part (138a) that accommodates an air cylinder having a piston rod (not shown) movable along the Z3 axis direction, and the front end (lower end) of this piston rod is fixed to the upper side of a disc-shaped connecting part (138b).

[0151] On the upper side of each end portion in the X3 axis direction of this connecting portion (138b), a rectangular connecting portion (138c) extending along the X3 axis direction is formed. Additionally, the front end of the connecting portion (138c) is fixed to the side of the central portion of the rectangular connecting portion (138d) extending along the Y3 axis direction.

[0152] And, a suction pad (138e) is formed on the lower side of both ends of this connection part (138d). In addition, the suction pad (138e) is connected to a suction source (not shown), such as a vacuum pump, through a passage (not shown) formed inside the connection part (138d), etc. and a pipe communicating with the passage.

[0153] Additionally, a conveying section (110d) is formed in the lateral area of ​​the work unit forming section (110c) shown in FIG. 14. FIG. 17 is a partial enlarged perspective view schematically showing the conveying section (110d), etc. In this conveying section (110d), a rectangular Y3 axis direction moving mechanism casing (140) is formed, which extends along the Y3 axis direction from the area behind the cut table (124) to the area behind the peeling table (148) described later.

[0154] An opening is formed in the rear of the Y3 axis direction movement mechanism casing (140), and the front side of the lower portion of a pair of rectangular lifting and rotating mechanism casings (142a, 142b), each extending along the Z3 axis direction, passes through this opening. Additionally, the lower portion of each of the pair of lifting and rotating mechanism casings (142a, 142b) is connected to a Y3 axis direction movement mechanism (not shown) embedded in the Y3 axis direction movement mechanism casing (140).

[0155] And, an opening is formed in the front of each of the pair of lifting and rotating mechanism casings (142a, 142b), and a rectangular conveying unit support (144a, 144b) extending along the X3 axis direction passes through this opening. The base of this conveying unit support (144a, 144b) is connected to a lifting mechanism (not shown) and a rotating mechanism (not shown) embedded in the lifting and rotating mechanism casings (142a, 142b).

[0156] This lifting mechanism raises the conveyor unit support members (144a, 144b) along the Z3 axis direction. Additionally, this rotating mechanism rotates the conveyor unit support members (144a, 144b) using a straight line along the X3 axis direction as the axis of rotation. Furthermore, a conveyor unit (146a, 146b) is formed on the lower side of the leading edge of the conveyor unit support members (144a, 144b). This conveyor unit (146a, 146b) has the same structure as the conveyor unit (138) shown in FIG. 16.

[0157] Additionally, a peeling section (110e) is formed in the area opposite to the work unit forming section (110c) as seen from the conveying section (110d) shown in FIG. 14. FIG. 18 is a partial enlarged perspective view schematically showing the peeling section (110e). A peeling table (148) is formed in this peeling section (110e). This peeling table (148) has a disc-shaped porous plate (148a) with an exposed upper surface.

[0158] This porous plate (148a) is connected to a suction source (not shown), such as a vacuum pump, through a suction channel (not shown) formed inside the peeling table (148). Therefore, when this suction source is operated while a work unit is placed on the upper surface of the porous plate (148a), the work unit is maintained on the peeling table (148).

[0159] An X3 axis movement mechanism (150) is formed on the upper side of the peeling table (148). This X3 axis movement mechanism (150) has a pair of guide rails (150a) each extending along the X3 axis direction. And, the back side of a moving plate (152) is connected to the surface side of the pair of guide rails (150a) in a sliding manner. Also, a screw shaft (150b) extending along the X3 axis direction is disposed between the pair of guide rails (150a).

[0160] A motor (150c) for rotating the screw shaft (150b) is connected to the front end of the screw shaft (150b). And, on the surface of the screw shaft (150b) where a spiral groove is formed, a nut portion (not shown) is formed to accommodate a plurality of balls that roll on the surface of the rotating screw shaft (150b), thereby forming a ball screw.

[0161] That is, when the screw shaft (150b) rotates, a number of balls circulate within the nut portion, and the nut portion moves along the X3 axis direction. In addition, this nut portion is fixed to the back surface of the moving plate (152). Therefore, when the screw shaft (150b) is rotated by the motor (150c), the moving plate (152) moves along the X3 axis direction together with the nut portion.

[0162] On the surface of this moving plate (152), a pair of air cylinders (154, 156) are formed so as to be arranged side by side in the front and back directions. The air cylinder (154) located at the front has a piston rod (154a) that is movable along the Z3 axis direction, and a gripping claw (158) that grips the peeling tape (39) described later is connected to the lower end of this piston rod (154a).

[0163] The gripping claw (158) has an L-shaped fixed claw (160). This fixed claw (160) has a rectangular erecting portion (160a) extending along the Z3 axis direction and a rectangular bottom portion (160b) extending from the lower end of this erecting portion (160a) toward the rear. Additionally, a rectangular movable claw (162) movable along the Z3 axis direction is formed on the rear side of this erecting portion (160a).

[0164] Additionally, the air cylinder (156) located at the rear of the air cylinder (154) has a piston rod (156a) that is movable along the Z3 axis direction, and a rectangular heating plate (164) for heating the peeling tape (39) described later is connected to the lower end of the piston rod (156a). The heating plate (164) has a heating wire built into it, and by generating an electric current in the heating wire, the heating plate (164) is heated with the area around the lower surface of the heating plate (164) as the center.

[0165] Additionally, a Y3 axis direction movement mechanism (166) is formed at the rear of the air cylinder (156). This Y3 axis direction movement mechanism (166) has a pair of guide rails (166a) each extending along the Y3 axis direction. And, the rear side of the air cylinder (168) is connected to the front side of the pair of guide rails (166a) in a sliding manner. Also, a screw shaft (166b) extending along the Y3 axis direction is disposed between the pair of guide rails (166a).

[0166] A motor (166c) for rotating the screw shaft (166b) is connected to one end of the screw shaft (166b). And, on the surface of the screw shaft (166b) where a spiral groove is formed, a nut portion (not shown) is formed to accommodate a plurality of balls that roll on the surface of the rotating screw shaft (166b), thereby forming a ball screw.

[0167] That is, when the screw shaft (166b) rotates, a number of balls circulate within the nut portion, and the nut portion moves along the Y3 axis direction. In addition, this nut portion is fixed to the back of the air cylinder (168). Therefore, when the screw shaft (166b) is rotated by the motor (166c), the air cylinder (168) moves along the Y3 axis direction together with the nut portion.

[0168] Additionally, the air cylinder (168) has a piston rod (168a) movable along the Z3 axis direction, and a disc-shaped cutter (170) is connected to the lower end of the piston rod (168a). Additionally, a workbench (172) is formed below the cutter (170) for cutting the peeling tape (39) described later.

[0169] A groove (172a) along the Y3 axis direction is formed in this workbench (172). Then, while the peeling tape (39) is on the workbench (172), if a cutter (170), whose lower end is located inside the groove (172a), is moved along the Y3 axis direction, the peeling tape (39) is cut by the cutter (170).

[0170] Additionally, a peeling tape supply unit (174) is formed at the rear of the workbench (172). This peeling tape supply unit (174) has a supply roller (176). A peeling tape (39) is wound on this supply roller (176). This peeling tape (39) has a tape substrate and a thermosetting resin layer formed on one side of the tape substrate (the side facing the supply roller (176)).

[0171] Additionally, below the supply roller (176), a pair of guide rollers (178) are formed in parallel along the Z3 axis direction, and the peeling tape (39) is drawn downward by this pair of guide rollers (178). Additionally, below the pair of guide rollers (178), a pair of discharge rollers (180) are formed in parallel along the Z3 axis direction, and the peeling tape (39) is sent forward by this pair of discharge rollers (180).

[0172] In the tape attachment device (108) shown in FIG. 14, for example, the second work unit forming step (S4) is performed in the following order. Specifically, first, the second annular frame (31) is brought into the support (118) of the tape attachment part (110b).

[0173] At this time, this second annular frame (31) is placed on a support (118) such that the direction indicated by a pair of frame cutouts (33a, 33b) (the direction from the center of the opening (31a) toward the straight section (31b) positioned between the pair of frame cutouts (33a, 33b)) is parallel to the X3 axis direction, and also the straight section (31b) is positioned on the front side.

[0174] Next, the second tape (37) is attached to the upper surface of the second annular frame (31) in the same manner as the method of attaching the tape (27) to the annular frame (21) described above. Next, the return unit (116) is operated to remove the work unit (29) contained in the cassette (114a) from the cassette (114a) and bring it into the cut table (124) of the work unit forming part (110c).

[0175] At this time, the return unit (116) brings the work unit (29) onto the cut table (124) so ​​that the back side of the workpiece (11) faces upward and the notch (15) is positioned forward when viewed from the center of the workpiece (11). By doing so, the direction from the center of the divided workpiece (11) toward the notch (15) becomes parallel to the X3 axis direction.

[0176] Next, the tape (27) is cut in a circular shape along the outer circumference of the workpiece (11) of the work unit (29) by the cutter (126). By doing so, the work unit (29) is separated into a workpiece (11) with a disc-shaped tape (27) attached to its lower surface (surface) and an annular frame (21) with an annular tape (27) attached to its lower surface.

[0177] Next, the return unit (116) is operated to remove the annular frame (21) separated from the workpiece (11) from the cut table (124) and bring it into the cassette (114a). Next, the return unit (138), etc., is operated to remove the second annular frame (31) with the second tape (37) attached to its upper surface from the support (118) and bring it into the cut table (124).

[0178] Specifically, first, an X3 axial movement mechanism connected to the base of the return unit support (136) is operated so that the suction pad (138e) is positioned directly above the second annular frame (31). Then, an air cylinder housed in the connection part (138a) is operated so that the suction pad (138e) comes into contact with the upper surface of the second annular frame (31) or the second tape (37) attached thereto.

[0179] Next, a suction source communicating with the suction pad (138e) is operated. By doing so, the second annular frame (31) is maintained on the suction pad (138e). Next, an air cylinder received in the connecting part (138a) is operated to raise the second annular frame (31).

[0180] Next, the X3 axis movement mechanism connected to the base of the return unit support (136) is operated so that the second tape (37) attached to the second annular frame (31) is positioned directly above the workpiece (11) placed on the cut table (124).

[0181] Next, the air cylinder housed in the connecting part (138a) is operated so that the second annular frame (31) approaches the cut table (124). Next, the operation of the suction source communicating with the suction pad (138e) is stopped. By the above, the transfer of the second tape (37) from the support (118) of the second annular frame (31), which is attached to the upper surface, to the cut table (124) is completed.

[0182] Next, an X3 axis movement mechanism connected to the base of the adhesive roller support (132) is operated so that the second tape (37) in contact with the upper surface (back surface) of the workpiece (11) is pressed by the adhesive roller (134). By doing so, the second tape (37) is adhered to the upper surface (back surface) of the workpiece (11), and the workpiece (11) and the second annular frame (31) are integrated.

[0183] At this time, the direction indicated by the pair of frame cuts (33a, 33b) of the second annular frame (31) (the direction from the center of the opening (31a) toward the straight section (31b) positioned between the pair of frame cuts (33a, 33b)) coincides with the direction from the center of the divided workpiece (11) toward the notch (15). That is, the angle formed by the direction indicated by the pair of frame cuts (33a, 33b) of the second annular frame (31) and the direction from the center of the divided workpiece (11) toward the notch (15) becomes 0°.

[0184] Next, the second annular frame (31) integrated with the workpiece (11) is removed from the cut table (124) and brought into the peeling table (148) of the peeling section (110e), and the conveying unit (146a, 146b), etc. of the conveying section (110d) is operated.

[0185] Specifically, first, the Y3 axis movement mechanism built into the Y3 axis movement mechanism casing (140) is operated so that the suction pad of the return unit (146a) is positioned directly above the second annular frame (31). Then, the lifting mechanism built into the lifting rotation mechanism casing (142a) is operated so that the suction pad of the return unit (146a) comes into contact with the upper surface of the second annular frame (31) or the second tape (37) attached thereto.

[0186] Next, a suction source communicating with the suction pad of the return unit (146a) is operated. By this, the second annular frame (31) is maintained on the suction pad of the return unit (146a). Next, a lifting mechanism built into the lifting rotation mechanism casing (142a) is operated to raise the second annular frame (31). Next, a rotation mechanism built into the lifting rotation mechanism casing (142a) is operated to invert the upper and lower parts of the return unit support (144a).

[0187] By this, the return unit (146a) is positioned above the return unit support (144a). Additionally, the return unit (146a) maintains a second annular frame (31) integrated with the workpiece (11) in such a state that the surface of the workpiece (11) to which the tape (27) is attached faces upward, and the back surface of the workpiece (11) to which the second tape (37) is attached faces downward.

[0188] Next, the lifting mechanism and / or rotating mechanism built into the lifting rotating mechanism casing (142b) is operated so that the lifting unit (146b) is positioned higher than the second annular frame (31) maintained in the lifting unit (146a), and also the lifting unit support (144b) is positioned above the lifting unit (146b).

[0189] Next, the Y3 axis movement mechanism built into the Y3 axis movement mechanism casing (140) is operated to bring the lifting rotation mechanism casing (142a) and the lifting rotation mechanism casing (142b) into contact. Next, the lifting mechanism built into the lifting rotation mechanism casing (142a) and / or the lifting mechanism built into the lifting rotation mechanism casing (142b) are operated to bring the suction pad of the return unit (146b) into contact with the upper surface of the second annular frame (31).

[0190] Next, the operation of the suction source communicating with the suction pad of the return unit (146a) is stopped, and the suction source communicating with the suction pad of the return unit (146b) is operated. By doing so, the second annular frame (31) integrated with the workpiece (11) is transferred from the return unit (146a) to the return unit (146b).

[0191] Next, the Y3 axis movement mechanism built into the Y3 axis movement mechanism casing (140) is operated so that the second annular frame (31) is positioned directly above the peeling table (148). Then, the lifting mechanism built into the lifting rotation mechanism casing (142b) is operated so that the second annular frame (31) approaches the peeling table (148).

[0192] Next, the operation of the suction source communicating with the suction pad of the return unit (146b) is stopped. By doing so, the return from the cut table (124) of the second annular frame (31) integrated with the workpiece (11) to the peeling table (148) is completed. By doing so, the workpiece (11) with the tape (27) attached to the upper surface (surface) is placed on the peeling table (148) with the second tape (37) attached to the lower surface (back side) interposed therebetween.

[0193] Next, in the peeling section (110e), the tape (27) attached to the surface of the workpiece (11) is peeled off. Specifically, first, a suction source communicating with the porous plate (148a) of the peeling table (148) is operated. As a result, the workpiece (11) is held on the peeling table (148) with the second tape (37) interposed. Next, the X3 axis direction movement mechanism (150) moves the moving plate (152) so that the gripping claw (158) approaches the peeling tape supply unit (174).

[0194] Next, a pair of guide rollers (178) and a pair of discharge rollers (180) are operated so that the peeling tape (39) is discharged toward the gripping claw (158). By doing so, the leading edge of the peeling tape (39) is positioned between the bottom part (160b) of the fixed claw (160) and the movable claw (162).

[0195] Next, the movable claw (162) is brought close to the bottom part (160b) of the fixed claw (160) so that the tip of the peeling tape (39) is sandwiched between the bottom part (160b) of the fixed claw (160) and the movable claw (162), that is, so that it is gripped by the gripping claw (158). Next, the X3 axis moving mechanism (150) moves the moving plate (152) so that the gripping claw (158) is separated from the peeling tape supply unit (174) and positioned above the peeling table (148).

[0196] At this time, the peeling tape (39), with its tip gripped by the gripping claw (158), is pulled by the gripping claw (158) and pulled out along the X3 axis direction. Also, this gripping claw (158) is positioned higher than the workbench (172). Additionally, the X3 axis direction moving mechanism (150) moves the moving plate (152) along the X3 axis direction so that the outer circumference of the tape (27) attached to the surface of the workpiece (11) is positioned directly below the heating plate (164).

[0197] Next, the air cylinder (156) lowers the piston rod (156a) so that a portion of the peeling tape (39) located directly below the heating plate (164) is pressed firmly against the tape (27). Next, an electric current is generated in the heating wire embedded in the heating plate (164) to heat the area near the bottom surface of the heating plate (164). By doing so, a portion of the peeling tape (39) hardens while in contact with the tape (27).

[0198] Next, the air cylinder (168) lowers the piston rod (168a) so that the portion located above the groove (172a) of the workbench (172) of the peeling tape (39) is cut by the cutter (170), and also the Y3 axis direction moving mechanism (166) moves the air cylinder (168) along the Y3 axis direction.

[0199] Next, the air cylinder (154) raises the piston rod (154a) to raise the gripping claw (158). By doing so, the tape (27) in contact with a portion of the peeling tape (39) is peeled off from the surface of the workpiece (11). Additionally, if necessary to completely peel off the tape (27) from the surface of the workpiece (11), the X3 axis moving mechanism (150) may move the moving plate (152) so that the gripping claw (158) moves along the X3 axis direction.

[0200] By the above, the peeling of the tape (27) attached to the surface of the workpiece (11) is completed. Thus, a second work unit is formed in which the workpiece (11) and the second annular frame (31) are integrated by interposing the second tape (37). FIG. 19 is a perspective view schematically showing this second work unit (41). Also, in FIG. 19, the surface of the workpiece (11) (the surface (13a) of the substrate (13)) is shown.

[0201] Next, the operation of the suction source communicating with the porous plate (148a) of the peeling table (148) is stopped. Next, the return unit (116) is operated to remove the second work unit (41) from the peeling table (148) and bring it into the cassette (114b). By doing so, the second work unit forming step (S4) is completed.

[0202] In the method for dividing a workpiece shown in FIG. 13, which includes the second work unit forming step (S4), the direction from the center of the divided workpiece (11) toward the notch (15) and the direction indicated by a pair of frame cutouts (33a, 33b) of the second annular frame (31) (the direction from the center of the opening (31a) toward the straight section (31b) positioned between the pair of frame cutouts (33a, 33b)) are aligned (the angle formed by both directions is set to 0°). By doing so, it is easier to align the position of the workpiece (11) when processing is performed on the workpiece (11) after the second work unit forming step (S4).

[0203] In addition, the described content is an embodiment of the present invention, and inventions having features different from the described content are also included in the present invention. For example, the second annular frame used in the second work unit forming step (S4) may be the same as the annular frame (21) used in the work unit forming step (S1).

[0204] That is, as this second annular frame, it is not necessary to prepare an annular frame different from the annular frame (21). Specifically, the second work unit forming step (S4) included in the method for dividing a workpiece of the present invention may be performed in the following order.

[0205] First, a second tape (37) is attached to the back side of the workpiece (11) and the other side of the annular frame (21) without separating the workpiece (11) and the annular frame (21) by interposing a tape (27) attached to the surface of the workpiece (11) and one side of the annular frame (21). Then, the tape (27) attached to the surface of the workpiece (11) and one side of the annular frame (21) is peeled off. In this case, the effort required for the second work unit forming step can be reduced.

[0206] Meanwhile, if the second annular frame used in the second work unit forming step (S4) is different from the annular frame (21) used in the work unit forming step (S1), as described above, the portion of the tape (27) other than the portion attached to the surface of the workpiece (11) can be removed in advance before peeling the tape (27) from the surface of the workpiece (11). Therefore, the probability of the tape (27) remaining on the second work unit (41) formed by peeling the tape (27) from the surface of the workpiece (11) can be reduced.

[0207] Additionally, in the second work unit forming step (S4), the direction from the center of the divided workpiece (11) toward the notch (15) and the direction indicated by a pair of frame cuts (33a, 33b) of the second annular frame (31) do not have to coincide. That is, the angle formed by the two directions does not have to be 0°. For example, in the second work unit forming step (S4), the second tape (37) attached to the second annular frame (31) may be attached to the back surface of the workpiece (11) so that the angle formed by the two directions becomes 90°, 180°, or 270°.

[0208] Furthermore, the structure and method, etc., of the embodiments described above may be appropriately modified and implemented as long as they do not deviate from the scope of the purpose of the present invention. Explanation of the symbols

[0209] 11 : Workpiece 13 : Substrate (13a : Surface, 13b : Back side) 15 : Notch 17a : Line scheduled for division (Line scheduled for 1st division) 17b : Line scheduled for division (Line scheduled for 2nd division) 19 : Area 21: Illusion Frame (1st Illusion Frame) (21a : opening, 21b : arc, 21c : straight) 23a, 23b: Frame cutoff 25 : Release material 27 : Tape (1st Tape) 29 : Work Unit (1st Work Unit) 31: Second annular frame (31a: opening, 31b: straight section) 33a, 33b: Frame cutoff 35 : Release material 37: Tape 2 39 : Release tape 41: 2nd Work Unit 2 : Tape adhesive device 4 : Expectation 6a, 6b, 6c: Cassette insert 8a, 8b, 8c: Cassette 10a: 1st return unit 10b: 2nd return unit 12a, 12b: Movable support 14a, 14b : Return arm 16a, 16b: Robot hand 18: X1 axis direction movement mechanism (18a: Guide rail, 18b: Screw shaft, 18c: Motor) 20 : Support 22 : Frame support 24 : Opening 26 : Top surface (26a, 26b, 26c, 26d : Sides) 28 : Workpiece support 30a, 30b: Fixed protrusions 32a, 32b, 32c, 32d : opening 34a, 34b: Movable protrusions 36: Tape adhesive unit 38: Supply roller 40: Induction roller 42: Delamination absence 44: Induction roller 46: Pressure roller 48: Recovery roller 50 : Cutting device 52 : Expectation 54: Guide rail 56 : Move Table 58 : Screw shaft 60 : Motor 62 : Y2 axis scale 64: Guide rail 66 : Table base (66a : Bottom plate, 66b : Installation plate) (66c: top plate, 66d: open space) 68: Screw shaft 70 : Motor 72 : X2 axis scale 74: Retention table (74a: Retention member, 74b: Fit, 74c: Suction path) 76 : Piping 78: Driven pulley 80 : Belt 82 : Electric pulley 84 : Motor 86 : Frame support 88 : Support structure 90 : Guide rail 92 : Spindle housing 94 : Screw shaft 96 : Motor 98: Cutting blade 100 : Upper imaging unit 102 : Lower imaging unit 104 : Connection part 106 : Lifting support mechanism 108 : Tape adhesive device 110 : Expectation 112a, 112b: Cassette rack 114a, 114b : Cassette 116 : Return unit 118 : Frame support 120 : Tape adhesive unit 122: Supply roller 124 : Cut Table 126 : Cutter 128 : Rotary driving source 130: X3 axial movement mechanism casing (130a: opening) 132 : Adhesive roller support 134 : Adhesive Roller 136 : Return unit support 138 : Return unit (138a, 138b, 138c, 138d : Connection part) 140 : Y3 axial movement mechanism casing 142a, 142b: Lifting and rotating mechanism casing 144a, 144b: Return unit support 146a, 146b: Return unit 148 : Delamination table (148a : Porous plate) 150 : X3 axial movement mechanism (150a: Guide rail, 150b: Screw shaft, 150c: Motor) 152 : Moving plate 154: Air cylinder (154a: Piston rod) 156 : Air cylinder (156a : Piston rod) 158 : Phage Claw 160: Fixed claw (160a: Installation part, 160b: Bottom part) 162 : Movable Claw 164 : Heating plate 166 : Y3 axis direction movement mechanism (166a: Guide rail, 166b: Screw shaft, 166c: Motor) 168 : Air cylinder (168a : Piston rod) 170 : Cutter 172 : Workbench (172a : Home) 174: Release tape supply unit 176: Supply roller 178 : Induction roller 180 : Dispatch roller

Claims

Claim 1 A method for dividing a workpiece by means of a cutting blade from the back side of the workpiece along each of the plurality of first division lines and each of the plurality of second division lines, wherein the workpiece is divided into multiple regions by a plurality of first division lines extending along a first direction and a plurality of second division lines extending along a second direction intersecting the first direction, and a device is formed on the surface side of each of the plurality of regions; the method comprises: a first work unit forming step in which a first work unit is formed by attaching a first tape having anisotropy in the elongation rate when a predetermined force is applied to a first annular frame to cover an opening of the first annular frame and also attaching the first tape to the surface of the workpiece, thereby forming a first work unit in which the workpiece and the first annular frame are integrated; and, after the first work unit forming step, a holding table that holds the first tape side of the first work unit and exposes the back side of the workpiece. A method for dividing a workpiece, comprising a step and, after the holding step, a dividing step in which the workpiece is divided from the back side by the cutting blade along each of the plurality of first division planned lines and each of the plurality of second division planned lines to form a groove in the first tape, and in the first work unit forming step, the first tape is attached to the surface of the workpiece such that the third direction in which the elongation rate is lowest when the predetermined force is applied to the first tape is non-parallel to either the first direction or the second direction. Claim 2 A method for dividing a workpiece according to claim 1, wherein the first direction and the second direction are orthogonal, and in the first work unit forming step, the first tape is attached to the surface of the workpiece such that the angle formed by the straight line along the third direction, the straight line along the first direction, and the straight line along the second direction is 45 degrees. Claim 3 In claim 1 or 2, a notch or orientation flat for indicating a crystal orientation is formed on the outer edge of the workpiece, and after the dividing step, a second tape is attached to the second annular frame to cover the opening of the second annular frame in which a frame cutout is formed on the outer edge, and further, after attaching the second tape to the back surface of the workpiece, the first tape is peeled off from the workpiece to form a second work unit in which the workpiece and the second annular frame are integrated, thereby further comprising a second work unit forming step, wherein in the second work unit forming step, the second tape attached to the second annular frame is attached to the back surface of the workpiece such that the angle formed by the direction from the center of the workpiece toward the notch or the orientation flat and the direction indicated by the frame cutout is 0°, 90°, 180°, or 270°. A method of dividing a workpiece by bonding.

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