Magnetic nanoparticle detection kit using diamond nitrogen-vacancy center and manufacturing method thereof

KR102999640B1Active Publication Date: 2026-08-05KOREA INST OF SCI & TECH
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Patent Information

Application Number
KR1020250075766
Authority / Receiving Office
KR · KR
Patent Type
Patents
Current Assignee / Owner
Filing Date
2025-06-10
Publication Date
2026-08-05
Estimated Expiration
2045-06-10

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Abstract

The present invention relates to a magnetic nanoparticle detection kit using a diamond nitrogen-void center and a method for manufacturing the same, comprising: a substrate; and a diamond thin film formed on the substrate; wherein the diamond thin film is provided with a diamond nitrogen-void center pattern capable of detecting magnetic nanoparticles.
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Description

Technology Field

[0001] The present invention relates to a magnetic nanoparticle detection kit for detecting magnetic nanoparticles using a diamond nitrogen-vacuum center and a method for manufacturing the same. Background Technology

[0003] Magnetic nanoparticles are utilized in various fields such as medicine, biotechnology, and environmental monitoring, and are particularly in the spotlight for biomarker detection, drug delivery, and magnetic resonance imaging (MRI) contrast agents. Technologies for detecting these magnetic nanoparticles require high sensitivity and accuracy, and various sensing techniques are being developed to meet this need.

[0004] Recently, magnetic nanoparticle detection technology using diamond nitrogen-vacancy (NV) centers has been attracting attention. Diamond NV centers possess unique optical and electronic fin characteristics and have the advantage of being able to detect external magnetic fields with high sensitivity. In particular, they are advantageous for precise magnetic nanoparticle detection as they can provide higher spatial resolution and reliability than methods using conventional magnetic sensors.

[0005] However, existing NV center-based magnetic nanoparticle detection technologies suffer from problems such as high diamond usage, complex manufacturing processes, and difficulty in maintaining consistent process accuracy. Utilizing diamond NV centers requires growing high-quality diamond substrates, forming NV centers in specific regions, and precisely fabricating sensor elements based on them. These processes necessitate expensive equipment and advanced technical expertise, leading to prolonged processing times.

[0006] Therefore, there is a need for a new technology that can minimize diamond usage, lower process difficulty, and simultaneously improve detection accuracy. Prior art literature

[0008] U.S. Patent Publication No. 10,324,142 (January 18, 2019) The problem to be solved

[0009] The present invention has been devised in consideration of the above points, and its technical objective is to provide a magnetic nanoparticle detection kit using a diamond nitrogen-void center and a method for manufacturing the same, which can significantly reduce manufacturing costs by minimizing the amount of diamond used and significantly lower the difficulty of the process while maintaining high-performance detection capabilities.

[0010] The technical problems that the present invention aims to solve are not limited to those mentioned above, and other unmentioned technical problems will be clearly understood by those skilled in the art to which the present invention belongs from the description below. means of solving the problem

[0012] According to one embodiment of the present invention, a magnetic nanoparticle detection kit using a diamond nitrogen-void center is disclosed, comprising: a substrate; and a diamond thin film formed on the substrate; wherein the diamond thin film is provided with a diamond nitrogen-void center pattern capable of detecting magnetic nanoparticles.

[0013] In addition, the substrate may be formed of a transparent material capable of transmitting a laser.

[0014] In addition, the diamond thin film may have a size in the range of 50 to 200 μm.

[0015] In addition, the diamond nitrogen-void center pattern may have a form in which unit patterns having a size in the range of 300 to 500 nm are arranged at regular intervals.

[0016] In addition, one or more diamond position verification marks may be formed around the diamond thin film.

[0017] In addition, a handle for the user to hold may be additionally installed on the above substrate.

[0018] Meanwhile, according to another embodiment of the present invention, a method for manufacturing a magnetic nanoparticle detection kit using diamond nitrogen-vacancy centers is disclosed, comprising: a step of forming a diamond thin film on a diamond substrate; a step of attaching a mask having a plurality of mask patterns formed thereon to the diamond thin film; a step of injecting nitrogen ions through the mask patterns of the mask to form a diamond nitrogen-vacancy center pattern on the diamond thin film; and a step of separating the diamond thin film from the diamond substrate and transferring the diamond thin film to a substrate.

[0019] In addition, the method for manufacturing the magnetic nanoparticle detection kit further includes the step of injecting helium ions into the diamond matrix; and the diamond thin film can be formed through diamond regrowth on the upper side of the helium ion injection layer resulting from the injection of helium ions.

[0020] In addition, the method for manufacturing the magnetic nanoparticle detection kit may further include the step of removing the helium ion implantation layer through etching after removing the mask.

[0021] In addition, the above mask may be formed of silicone material.

[0022] In addition, the diamond thin film can be separated from the diamond substrate using a UV tape that loses its adhesive strength when exposed to ultraviolet rays.

[0023] Additionally, the step of transferring the diamond thin film to the substrate may include: applying a UV adhesive at a location on the substrate where the thin film is to be formed; bringing a UV tape with the diamond thin film attached close to the substrate to attach the diamond thin film to the UV adhesive; and irradiating ultraviolet rays onto the substrate so that the UV adhesive is cured while the adhesiveness of the UV tape is removed.

[0024] In addition, the method for manufacturing the magnetic nanoparticle detection kit may further include the step of dicing the diamond thin film attached to the UV tape into a plurality of pieces before transferring the diamond thin film to the substrate. Effects of the invention

[0026] According to an embodiment of the present invention, the manufacturing cost of a magnetic nanoparticle detection kit can be significantly reduced compared to existing technology through a diamond film structure that minimizes the use of diamond.

[0027] In addition, according to an embodiment of the present invention, by applying a method to form an NV center pattern through ion implantation using a mask having a mask pattern formed thereon, there is no need to perform the process directly on the diamond, so there is an advantage of significantly reducing the difficulty of the process while simultaneously improving the process precision for forming the NV center pattern.

[0028] In addition, according to an embodiment of the present invention, by using a UV thin film and a UV tape to transfer a diamond thin film onto a substrate, the diamond thin film can be stably attached to the substrate while minimizing damage to the diamond thin film, thereby providing the advantage of high reproducibility in mass production processes. Brief explanation of the drawing

[0030] FIG. 1 is a perspective view of a magnetic nanoparticle detection kit using a diamond nitrogen-vacuum center according to one embodiment of the present invention. FIG. 2 is a diagram illustrating the configuration of a diamond nitrogen-vacancy center pattern formed in a diamond thin film shown in FIG. 1. FIG. 3 is a flowchart illustrating a method for manufacturing a magnetic nanoparticle detection kit using a diamond nitrogen-vacuum center according to one embodiment of the present invention. Figure 4 is a diagram schematically illustrating the process of forming a diamond thin film and a diamond nitrogen-vacancy center pattern of Figure 2. Figure 5 is a diagram schematically illustrating the separation process of the diamond thin film of Figure 2. Figure 6 is a diagram schematically illustrating the transfer process of the diamond thin film of Figure 2. FIG. 7 is a perspective view of a magnetic nanoparticle detection kit using a diamond nitrogen-vacuum center according to another embodiment of the present invention. Specific details for implementing the invention

[0031] The present invention is capable of various modifications and may have various embodiments; specific embodiments are illustrated in the drawings and described in detail in the detailed description. However, this is not intended to limit the present invention to specific embodiments, and it should be understood that it includes all modifications, equivalents, and substitutions that fall within the spirit and scope of the present invention. In describing the present invention, detailed descriptions of related prior art are omitted if it is determined that such detailed descriptions may obscure the essence of the present invention.

[0032] Terms such as "first," "second," etc., may be used to describe various components, but said components should not be limited by said terms. These terms are used solely for the purpose of distinguishing one component from another.

[0033] The terms used in this application are used merely to describe specific embodiments and are not intended to limit the invention. The singular expression includes the plural expression unless the context clearly indicates otherwise. In this application, terms such as "comprising" or "having" are intended to indicate the presence of the features, numbers, steps, actions, components, parts, or combinations thereof described in the specification, and should be understood as not precluding the existence or addition of one or more other features, numbers, steps, actions, components, parts, or combinations thereof.

[0034] Hereinafter, embodiments of a magnetic nanoparticle detection kit using a diamond nitrogen-void center according to the present invention and a method for manufacturing the same will be described in detail with reference to the attached drawings. In describing with reference to the attached drawings, identical or corresponding components are given the same reference numerals, and redundant descriptions thereof will be omitted.

[0035] FIG. 1 is a perspective view of a magnetic nanoparticle detection kit using a diamond nitrogen-void center according to one embodiment of the present invention, and FIG. 2 is a diagram illustrating the configuration of a diamond nitrogen-void center pattern formed on a diamond thin film shown in FIG. 1.

[0036] As shown in FIGS. 1 and 2, the magnetic nanoparticle detection kit according to the present embodiment includes a substrate (10) and a diamond thin film (20).

[0037] The substrate (10) is formed of a transparent material capable of transmitting a laser, and can be formed of a material such as synthetic resin or glass. When detecting magnetic nanoparticles, the laser of the measuring device can reach the substrate (10), pass through the substrate (10), and reach the diamond thin film (20).

[0038] A diamond thin film (20) is formed on a substrate (10) and may have a size in the range of 50 to 200 μm so as to minimize the amount of diamond used when manufacturing a magnetic nanoparticle detection kit. In the present embodiment, a thin film in the shape of a square (rectangular) is exemplified, and the width and height of the square may each be formed in the range of 50 to 200 μm.

[0039] The diamond thin film (20) is provided with a diamond nitrogen-void center pattern (60) capable of detecting magnetic nanoparticles. The detection of magnetic nanoparticles is possible by measuring the light signal emitted from the diamond nitrogen-void pattern (60) through laser excitation of a specific wavelength (e.g., 532 nm).

[0040] As shown in FIG. 2, the diamond nitrogen-void center pattern (60) may have a form in which unit patterns (62) are arranged at regular intervals, and in the case of this embodiment, a structure in which circular unit patterns (62) are arranged is exemplified. The unit patterns (62) may have a size (or diameter, d) in the range of 300 to 500 nm.

[0041] One or more diamond positioning marks (30) may be formed around the diamond thin film (20), and the diamond positioning marks (30) may be arranged to surround the diamond thin film. The diamond positioning marks (30) may be formed from a metal material.

[0042] FIG. 3 is a flowchart illustrating a method for manufacturing a magnetic nanoparticle detection kit using a diamond nitrogen-vacuum center according to one embodiment of the present invention.

[0043] Referring to FIG. 3, the method for manufacturing a magnetic nanoparticle detection kit using a diamond nitrogen-vacuum center according to the present embodiment is described as follows: First, a diamond thin film (20) is formed on a diamond substrate (40) (S10).

[0044] FIG. 4 is a schematic diagram illustrating the process of forming the diamond thin film and the diamond nitrogen-vacancy center pattern of FIG. 2, wherein FIG. 4 (a) to (c) shows the process of forming a diamond thin film (20) on a diamond substrate (40). Specifically, a diamond substrate (40) is prepared as in (a), and helium ions are injected into the diamond substrate (40) as in (b). High-density helium ions are injected to a depth of several hundred nanometers from the surface of the diamond substrate (40), thereby forming a helium ion injection layer (42) on the diamond substrate (40).

[0045] And as shown in Fig. 4 (c), diamond is regrowthed on the upper side of the portion where the helium ion implantation layer (42) is formed to form a diamond thin film (20) of a certain thickness (e.g., 5 μm).

[0046] Next, as shown in (d) of FIG. 4, a mask (50) having a plurality of mask patterns (52) formed thereon is attached to a diamond thin film (20) (S20). The mask (50) can be formed from silicon material and, for example, can be manufactured using an SOI wafer. Each mask pattern (52) of the mask (50) has a shape corresponding to the shape of the diamond nitrogen-void center pattern (60). When circular unit patterns (62) are arranged at regular intervals, as in the diamond nitrogen-void center pattern (60) exemplified in FIG. 2, the mask pattern (52) can also have a shape in which circular holes are arranged at regular intervals.

[0047] Next, as shown in FIG. 4 (e), nitrogen ions are injected through the mask pattern (52) of the mask (50) to form a diamond nitrogen-vacancy center pattern (60) in the diamond thin film (20) (S30).

[0048] Next, the diamond thin film (20) is separated from the diamond substrate (40) and transferred to the substrate (10) (S40). FIGS. 5 and 6 schematically illustrate the separation process and the transfer process of the diamond thin film (20) of FIG. 2, respectively.

[0049] To explain this in detail, as shown in (a) of FIG. 5, the mask (50) is removed from the diamond thin film (20) and heat treatment is performed. Then, as shown in (b), the helium ion implantation layer (42) is removed through etching (e.g., electrochemical etching), thereby allowing the diamond thin film (20) to be easily separated from the diamond substrate (40).

[0050] Next, as shown in FIG. 5 (c) and (d), the diamond substrate (40) is separated using a UV tape (70). The UV tape (70) has the property of being adhesive before receiving ultraviolet rays, but losing its adhesiveness when receiving ultraviolet rays. After attaching the UV tape (70) to the upper surface of the diamond thin film (20) as shown in FIG. 5 (c), moving it upwards separates the diamond thin film (20) from the diamond substrate (40) as shown in (d).

[0051] Next, the diamond thin film (20) attached to the UV tape (70) is diced into a plurality of pieces. In this way, a plurality of diamond nitrogen-void center patterns (60) are formed on a single diamond thin film (20). As previously described, each nitrogen-void center pattern (60) may have a form in which a plurality of unit patterns (62) are combined. According to the manufacturing method of the present embodiment, by simultaneously forming a plurality of diamond nitrogen-void center patterns (60) and dividing them into separate pieces for production, mass production of a magnetic nanoparticle detection kit is possible.

[0052] Next, as shown in FIG. 6(a), a UV adhesive (72) is applied to a location on the substrate (10) where a thin film is to be formed. The UV adhesive (72) has the property of curing when exposed to ultraviolet rays. As shown in FIG. 6(b), a UV tape (70) with a diamond thin film (20) attached is brought close to the substrate (10) to attach the diamond thin film (20) to the UV adhesive (72). In this case, any one of the multiple pieces diced in step (e) of FIG. 5 can be attached.

[0053] Next, as shown in Fig. 6 (c), ultraviolet light is irradiated onto the substrate (10) so that the UV adhesive (72) is cured while the adhesiveness of the UV tape (70) is removed. At this time, the ultraviolet light can be irradiated at a position corresponding to the piece to be attached.

[0054] Next, as shown in (d) of FIG. 6, when the UV tape (70) is moved upward, only the diamond thin film (20) of the piece corresponding to the location where the UV adhesive (72) is applied remains attached to the substrate (10) as shown in (e), and accordingly, the fabrication of the magnetic nanoparticle detection kit is completed.

[0055] FIG. 7 is a perspective view of a magnetic nanoparticle detection kit using a diamond nitrogen-vacuum center according to another embodiment of the present invention.

[0056] The magnetic nanoparticle detection kit according to the present embodiment has a configuration in which a handle (80) for a user to hold is additionally installed on the substrate (10). The configuration in which a diamond nitrogen-void center pattern (60) is provided on the diamond thin film (20) formed on the substrate (10) is the same as in the previous embodiment.

[0057] The magnetic nanoparticle detection kit according to the present embodiment can be utilized, for example, in the form of a dementia diagnosis kit (measuring concentrations of femtomole / L, 5~10 pg / mL), and magnetic nanoparticles can be attached to trace amounts of dementia proteins in the blood and detected using the magnetic nanoparticle detection kit according to the present embodiment.

[0058] In addition, the magnetic nanoparticle detection kit using a diamond nitrogen-pore center according to the present invention is configured to be applicable to various fields, such as medical diagnostic kits, biological research equipment, environmental monitoring sensors, and industrial inspection equipment, thereby providing wide applicability.

[0059] Although the present invention has been described above with reference to specific embodiments, those skilled in the art will understand that various modifications and changes can be made to the invention without departing from the spirit and scope of the invention as described in the following claims. Explanation of the symbols

[0061] 10: Substrate 20: Diamond thin film 30: Diamond positioning mark 40: Diamond base material 42: Helium ion injection layer 50: Mask 52: Mask pattern 60: Diamond nitrogen-void center pattern 70: UV Tape 72: UV Adhesive 80: Handle

Claims

Claim 1 A magnetic nanoparticle detection kit using a diamond nitrogen-void center, comprising: a substrate formed of a light-transmitting material capable of transmitting a laser; and a diamond thin film formed on the substrate and having a size in the range of 50 to 200 μm; wherein the diamond thin film is provided with a diamond nitrogen-void center pattern capable of detecting magnetic nanoparticles, and the diamond nitrogen-void center pattern is characterized by having a form in which unit patterns having a size in the range of 300 to 500 nm are arranged at regular intervals. Claim 2 delete Claim 3 delete Claim 4 delete Claim 5 A magnetic nanoparticle detection kit using a diamond nitrogen-vacancy center, characterized in that, in claim 1, one or more diamond position verification marks are formed around the diamond thin film. Claim 6 A magnetic nanoparticle detection kit using a diamond nitrogen-void center, characterized in that, in claim 1, a handle for a user to hold is additionally installed on the substrate. Claim 7 A method for manufacturing a magnetic nanoparticle detection kit using diamond nitrogen-void centers, comprising: a step of forming a diamond thin film on a diamond substrate; a step of attaching a mask having a plurality of mask patterns formed thereon to the diamond thin film; a step of injecting nitrogen ions through the mask patterns of the mask to form a diamond nitrogen-void center pattern on the diamond thin film; and a step of separating the diamond thin film from the diamond substrate and transferring the diamond thin film to a substrate. Claim 8 A method for manufacturing a magnetic nanoparticle detection kit using a diamond nitrogen-vacancy center, wherein, in claim 7, the step of implanting helium ions into the diamond matrix is ​​further included, and the diamond thin film is formed through diamond regrowth on the upper side of the helium ion implantation layer resulting from the implantation of helium ions. Claim 9 A method for manufacturing a magnetic nanoparticle detection kit using a diamond nitrogen-vacuum center, characterized in that, in claim 8, it further comprises the step of removing the helium ion implantation layer through etching after removing the mask. Claim 10 A method for manufacturing a magnetic nanoparticle detection kit using a diamond nitrogen-void center, characterized in that, in claim 7, the mask is formed of a silicone material. Claim 11 A method for manufacturing a magnetic nanoparticle detection kit using a diamond nitrogen-vacancy center according to claim 7, wherein the diamond thin film is separated from the diamond substrate using a UV tape whose adhesive strength disappears when exposed to ultraviolet rays. Claim 12 A method for manufacturing a magnetic nanoparticle detection kit using a diamond nitrogen-vacancy center, wherein, in claim 11, the step of transferring the diamond thin film to the substrate comprises: applying a UV adhesive at a location on the substrate where the thin film is to be formed; bringing the UV tape to which the diamond thin film is attached close to the substrate to attach the diamond thin film to the UV adhesive; and irradiating ultraviolet rays onto the substrate so that the UV adhesive is cured while the adhesiveness of the UV tape is removed. Claim 13 A method for manufacturing a magnetic nanoparticle detection kit using a diamond nitrogen-vacancy center, characterized in that, in claim 11, the diamond thin film attached to the UV tape is further diced into a plurality of pieces before transferring the diamond thin film to the substrate.

Citation Information

Patent Citations

  • Diamond crystal, diamond element, magnetic sensor, magnetic measurement device, and method for manufacturing sensor array

    KR1020160111445A