FIFO-capable buffer system

Abstract

The present invention relates to a buffer system capable of first-in, first-out, and is configured to allow a buffer layer, which is installed in a processing line for printed circuit boards and can temporarily store printed circuit boards, to be raised and lowered via a servo motor and an LM guide (Linear Motion Guide), thereby enabling the first-in printed circuit board to be removed, which not only improves the working speed of the printed circuit board process but also enables the buffer layer to be raised and lowered safely.

Description

Technology Field

[0001] The present invention relates to a buffer system capable of first-in, first-out, and more specifically, to a buffer system capable of first-in, first-out, which is configured to be vertically movable so as to allow for the removal of first-in, first-out printed circuit boards by installing a buffer layer that can temporarily store each printed circuit board in a processing line for printed circuit boards, thereby improving the work speed for the printed circuit board process. Background Technology

[0003] Generally, a buffer device refers to a device that temporarily stores a substrate while a series of processes are being carried out in a semiconductor process or a flat panel display forming process.

[0004] Such a buffer device can provide a space for a substrate processed in another process to temporarily stay when the time taken to perform each process in a series of processes differs or when one process is temporarily stopped.

[0005] For example, a buffer device can be used to coordinate the operation time of the entire production process between a cleaning process and a thin film deposition process with different operation speeds, or between a cleaning process and an inspection process.

[0006] A general buffer device according to the prior art is equipped with a transfer means capable of moving the substrate up and down to the buffer device in order to store the substrate transported to the buffer device, thereby moving the substrate upward.

[0007] Therefore, the substrate transferred first was located at the top of the buffer device.

[0008] Therefore, in order to transfer the substrate stored in the buffer back to the process equipment in the downstream process, the substrate at the very bottom is transferred first.

[0009] This is because the device that transports the substrate is accomplished by the rotation of a roller mounted on the lowest shaft.

[0010] As a result, the substrate that was introduced first is discharged last, so the time the introduced substrate remains in the buffer can be relatively long.

[0011] Due to the prolonged residence time in the buffer, dust or foreign substances may be adsorbed onto the substrate. Additionally, although the subsequent process must be performed after a certain period following the preceding process, the subsequent process may be performed much later than the specified time, which can lead to a decrease in yield.

[0012] In addition, a system that transports circuit boards individually by robot for first-in, first-out (FIFO) operations has the problem of increased costs due to the need for expensive robots.

[0013] Taking these points into consideration, a buffer system that performs first-in, first-out has been proposed in Korean Patent Registration No. 10-0790557.

[0014] Upon examination, a conventional buffer system for general first-in, first-out operations comprises one or more buffer layers for temporarily storing or transporting substrates, each consisting of a shaft and a roller inserted into and fixed to the shaft; a driving unit connected to the shaft of the buffer layer containing the substrate to be transported at a fixed position to rotate the shaft and transport the substrate; and an up-and-down moving unit that moves the buffer layer up and down to connect the buffer layer containing the substrate to be transported to the driving unit.

[0015] However, a conventional buffer system configured in this manner for general first-in, first-out operations is configured to move the buffer layer up and down by means of an up-and-down moving unit and connect the buffer layer containing the substrate to be transported to a driving unit; however, since there is no specific configuration whatsoever regarding how the buffer layer can be moved up and down by the said up-and-down moving unit, there is a problem in ensuring safety regarding the up-and-down movement of the buffer layer. Prior art literature

[0017] Patent Registration No. 10-0790557, Registration Date: December 24, 2007 The problem to be solved

[0018] Accordingly, the present invention has been devised to resolve the aforementioned problems, and aims to provide a buffer system capable of first-in, first-out, which can not only improve the working speed of the printed circuit board process but also safely raise and lower the buffer layer by configuring the buffer layer, which is installed in a processing line for printed circuit boards and can temporarily store printed circuit boards, to be able to be raised and lowered through a servo motor and an LM guide (Linear Motion Guide), thereby allowing the printed circuit boards that were previously introduced to be selected first.

[0019] Other objectives of the present invention will become clear as the technology progresses. means of solving the problem

[0021] The present invention, for achieving the above-mentioned purpose, is a buffer system capable of first-in, first-out, comprising: a buffer frame (110) having an entry opening (110a) formed on one side and an exit opening (110b) formed on the other side to temporarily store and retrieve a substrate (A), having an opening / closing door installed on the front and a control unit (111) installed on the back; a buffer unit (120) installed on one side inside the buffer frame (110) having a plurality of buffer layers (123) formed on the front to store substrates (A) entered through the entry opening (110a) layer by layer; and a buffer unit lifting unit (130) installed on the other side inside the buffer frame (110) to raise and lower the buffer unit (120) by driving in response to the control of the control unit (111). It is characterized by including a buffer layer rotation means (140) which is fixedly installed on the buffer frame (110) and positioned so as not to come into contact with the rear surface of the buffer section (120), and is driven in response to the control of the control section, so as to rotate the buffer layer (123) by magnetic force to allow the substrate (A) to enter and exit the buffer layer (123).

[0022] Additionally, on one side of the above-described buffer layer rotation means (140), a buffer layer rotation prevention means (150) is further provided to prevent the buffer layer (123) from being micro-rotated by the magnetic force of the buffer layer rotation means (140) by driving the buffer layer rotation means (140) in response to the control of the control unit (111) after the buffer layer (123) is raised, thereby separating the buffer layer rotation means (140) from the buffer unit (120).

[0023] In addition, the substrate entry / exit guide means (160) is further fixedly provided on the inner side of the entrance (110a) and exit (110b) of the above-mentioned buffer frame (110), so as to stably enter and exit the substrate (A) when the substrate (A) is entered into the buffer layer (123) of the buffer section (120) and when the substrate (A) seated on the buffer layer (123) is exited, by being driven simultaneously with the buffer layer rotation means (140) under the control of the control unit (111). Effects of the invention

[0025] As described above, according to the buffer system capable of first-in, first-out according to the present invention, by configuring a buffer layer that can temporarily store printed circuit boards installed in a processing line for printed circuit boards to be able to be raised and lowered through a servo motor and an LM guide (Linear Motion Guide), thereby enabling the first-in printed circuit boards to be removed, it is possible to improve the protection of printed circuit boards and the working speed, as well as safely raise and lower the buffer layer. Brief explanation of the drawing

[0027] FIG. 1 is a perspective view illustrating a buffer system capable of first-in, first-out according to the present invention. FIG. 2 is a perspective view illustrating a buffer section and a lifting section for a buffer section of a buffer system capable of first-in, first-out according to the present invention. FIG. 3 is a drawing showing a buffer section with a buffer layer excluded and a lifting section for the buffer section of a buffer system capable of first-in, first-out according to the present invention. FIG. 4 is a diagram illustrating a buffer layer of a buffer system capable of first-in, first-out according to the present invention. FIG. 5 is a rear perspective view illustrating a buffer section and a lifting section for a buffer section of a buffer system capable of first-in, first-out according to the present invention. FIG. 6 is a drawing illustrating a buffer layer rotation means of a buffer system capable of first-in, first-out according to the present invention. FIG. 7 is an enlarged view of a part of the buffer layer rotation means of a buffer system capable of first-in, first-out according to the present invention. FIG. 8 is a drawing showing the installation positions of the driving magnet part for buffer layer rotation and the driven magnet part for buffer layer rotation included in the buffer layer rotation means of a buffer system capable of first-in, first-out according to the present invention. FIG. 9 is a drawing illustrating a substrate entry / exit guiding means of a buffer system capable of first-in, first-out according to the present invention. Specific details for implementing the invention

[0028] Hereinafter, an exemplary embodiment of a buffer system capable of first-in, first-out according to the present invention will be described in detail.

[0029] First, it should be noted that in the drawings, identical components or parts are denoted by the same reference numerals whenever possible. In describing the present invention, specific descriptions of related known functions or configurations are omitted to avoid obscuring the essence of the invention.

[0030] As described above, the buffer system capable of first-in, first-out according to the present invention is configured to store substrates (printed circuit boards or glass substrates) by first-in in each of a plurality of buffer layers, and to be able to first-out the substrates stored by first-in.

[0031] That is, the buffer system (100) capable of first-in, first-out according to the present invention described above comprises: a buffer frame (110) having an entrance (110a) formed on one side and an exit (110b) formed on the other side to temporarily store and retrieve a substrate (A), having an opening / closing door (not shown) installed on the front and a control unit (111) installed on the back; a buffer unit (120) installed on one side inside the buffer frame (110) having a plurality of buffer layers (123) formed on the front to store substrates (A) that have entered through the entrance (110a) layer by layer; a buffer unit lifting unit (130) installed on the other side inside the buffer frame (110) to raise and lower the buffer unit (120) by driving in response to the control of the control unit (111); and the buffer unit fixedly installed on the buffer frame (110). It is configured to include a buffer layer rotation means (140) positioned so as not to contact the rear surface of the buffer section (120) and driven in response to the control of the control section, so as to rotate the buffer layer (123) by magnetic force to allow the substrate (A) to enter and exit the buffer layer (123).

[0032] Additionally, a buffer layer rotation prevention means (150) is further provided and configured to be fixedly installed on the aforementioned buffer frame (110) and positioned on one side of the buffer layer rotation means (140), so as to separate the buffer layer rotation means (140) from the buffer section (120) when driven in response to the control of the control section (111) after the buffer layer (123) is raised, thereby preventing the buffer layer (123) from being micro-rotated by the magnetic force of the buffer layer rotation means (140).

[0033] Additionally, a substrate entry / exit guide means (160) is further provided, which is fixedly installed inside the entrance (110a) and exit (110b) of the above-mentioned buffer frame (110) and is driven simultaneously with the buffer layer rotation means (140) under the control of the control unit (111) so as to stably enter and exit the substrate (A) when the substrate (A) is entered into the buffer layer (123) of the buffer unit (120) and when the substrate (A) placed on the buffer layer (123) is exited.

[0035] Hereinafter, a buffer system capable of first-in, first-out according to the present invention described above will be explained in more detail with reference to the attached drawings FIGS. 1 to 9.

[0036] First, the buffer frame (110) of the buffer system capable of first-in, first-out according to the present invention is formed as a rectangular frame composed of a plurality of vertical bars and a plurality of horizontal bars for fixing and connecting the vertical bars to each other, wherein an entry opening (110a) is formed on one side so that a substrate (A) can enter the buffer layer (123) of the buffer section (120), and an exit opening (110b) is formed on the other side so that the substrate (A) placed on the buffer layer (123) can exit.

[0037] In addition, the front of the above-mentioned buffer frame (110) is provided with an openable door so that a worker can directly discharge the substrate (A).

[0038] The above-described buffer section (120) is installed on one side of the interior of the buffer frame (110) and is provided with a plurality of buffer layers (123) formed therein so that substrates (A) entered through the entrance (110a) can be stored layer by layer.

[0039] That is, the above-described buffer section (120) is formed as a rectangular plate having LM rails (121) fixedly provided on both inner sides of the buffer frame (110) and LM blocks (122a) fixedly installed on both sides so as to be coupled to the LM rails (121) and capable of lifting and lowering, wherein a plurality of buffer layer forming holes (122b) are formed at regular intervals in the transverse and longitudinal directions on the front of the plate and penetrating to the rear, and a buffer lifting block (122) is provided with sensors (122c) between the longitudinal buffer layer forming holes (122b) to detect the presence or absence of a substrate (A), and each end of a buffer layer rotating bar (123b) equipped with buffer layer rollers (123a) installed at regular intervals on the outer surface is rotatably installed penetrating each buffer layer forming hole (122b) formed in the buffer lifting block (122) by interposing a bearing, and the other end It is composed of a plurality of buffer layers (123) formed as free ends and rotatably provided to correspond to the driving of the buffer layer rotation means (140).

[0040] The above-mentioned lifting unit (130) for the buffer section is installed on the other side of the interior of the buffer frame (110) and is configured to raise the buffer layer (123) of the buffer section (120) one layer at a time by driving it in response to the control of the control unit (111).

[0041] That is, the lifting unit (130) for the buffer unit described above is fixed to the upper inner side of the buffer frame (110) and is equipped with a lifting servo motor (132) installed in the power input section of a lifting power transmission unit (131) having a power input section and a power output section, so as to be driven in the forward and reverse directions in response to the control of the control unit (111); a lifting ball screw shaft (133) with one end installed in the power output section of the lifting power transmission unit (131) and configured to be rotatable in the forward and reverse directions in response to the driving of the lifting servo motor (132); and a lifting ball screw shaft (133) with one end fixed to the upper surface of the buffer lifting block (122) of the buffer unit (120), and the lifting ball screw shaft (133) is passed through the other end in a screw manner so as to be able to lift the buffer unit (120) in response to the driving of the lifting servo motor (132). It consists of a lifting ball screw nut housing (134) equipped with a ball screw nut part (134a).

[0042] In addition, a lifting protection plate (135) is further provided in front of the lifting ball screw shaft (133) above, with one end fixed to the lifting power transmission unit (131) via a briquette and the other end fixed to the lifting ball screw nut housing (134) to block foreign matter attached to the lifting ball screw shaft (133) from splashing toward the substrate (A) seated on the buffer layer (123) and thereby protecting the substrate.

[0043] The above-described buffer layer rotation means (140) is fixedly installed on the buffer frame (110) and positioned so as not to come into contact with the rear surface of the buffer lifting block (122) of the buffer section (120), and is configured to rotate the buffer layer (123) by magnetic force in response to the control of the control section (111) so as to allow the substrate (A) to enter and exit.

[0044] That is, the above-described buffer layer rotation means (140) is formed as a rectangular plate and is fixedly installed on the buffer frame (110) so as not to come into contact with the rear surface of the buffer lifting block (122) of the buffer part (120), and comprises a buffer layer rotation fixing part (141) having a plurality of rotation holes (drawing reference numeral omitted) formed at regular intervals in the transverse direction on the plate, and a buffer layer rotation shaft (142) having each other end protruding from the front surface of the buffer layer rotation fixing part (141) by installing one end of the rotation hole of the buffer layer rotation fixing part (141) so as to be rotatable by interposing a bearing, and a driving helical gear (143a) is fixedly installed on the outer circumference of each other end of the buffer layer rotation shaft (142), with the first end having direct contact to transmit power, and the remainder having a driving magnetic gear (Magnetic) to transmit power in a non-contact manner by magnetic force. A driving force transmission unit (143) for buffer layer rotation equipped with a gear (143b), a driving motor (144) for buffer layer rotation equipped with a driving shaft and fixedly installed via a fixing plate (144a) on the outermost side of the back surface of the fixed unit (141) for buffer layer rotation, wherein the driving shaft is connected to a shaft (142) for buffer layer rotation equipped with the driving helical gear (143a) via a coupling so as to be driven in response to power application, and a bracket (145a) fixed with bearings interposed on both sides of the front surface of the fixed unit (141) for buffer layer rotation, wherein a driven helical gear (145b) that meshes with the driving helical gear (143a) of the driving force transmission unit (143) for buffer layer rotation is installed on the outermost side, and on one side of the driven helical gear (145b) the A driven rotating bar (145) for buffer layer rotation is provided with multiple driven magnetic gears (145c) installed at regular intervals so as to be non-contacting with each driving magnetic gear (143b) and capable of transmitting rotational force by magnetic force, and each other end of the buffer layer rotation shaft (142) is inserted into one side and fixed.The buffer layer rotation drive magnet part (146) is provided with a drive magnet (NdFeB magnet) (146a) fixed to the other side, and the buffer layer rotation drive magnet part (147) is installed so as not to come into contact with the buffer layer rotation drive magnet part (146) by inserting each end of the buffer layer rotation bar (123b) of the buffer layer (123) into the inner side of one side and fixing it, and is provided with a drive magnet (NdFeB magnet) (147a) on the other side so as to receive rotational force from the magnetic force of the drive magnet (NdFeB magnet) (146a) and rotate the buffer layer rotation bar (123b).

[0045] The above-described buffer layer rotation prevention means (150) is positioned on one side of the buffer layer rotation means (140) by being fixedly installed on the buffer frame (110), and is configured to separate the buffer layer rotation means (140) from the buffer section (120) when driven in response to the control of the control unit after the buffer layer (123) is raised, thereby preventing the buffer layer rotation bar (123b) of the buffer layer (123) from micro-rotating due to the magnetic force of the buffer layer rotation means (140).

[0046] That is, the above-described buffer layer rotation prevention means (150) comprises a rotation prevention fixing plate (not shown) positioned on one side of the buffer layer rotation means (140) by being fixedly installed on the buffer frame (110), a rotation prevention LM rail (151) fixedly installed on both sides of the upper surface of the rotation prevention fixing plate, a rotation prevention guide block (152) having one end fixed to both sides of the rear surface of the buffer layer rotation fixing part (141) of the buffer layer rotation means (140) and the other end equipped with an LM block (152a) movable along the rotation prevention LM rail (151), and a rotation prevention guide block (152) fixedly installed on the upper surface of the rotation prevention fixing plate positioned between the rotation prevention LM rails (151), wherein the piston (153a) is fixed to the buffer layer rotation fixing part (141) and operates in response to the supply of compressed air, thereby the buffer layer rotation of the buffer layer rotation means (140). It consists of a rotation-prevention cylinder (153) provided to push or pull the fixed part (141).

[0047] The above-described substrate entry / exit guide means (160) is fixedly installed on the inside of the entry port (110a) and exit port (110b) of the buffer frame (110) and is configured to be driven simultaneously with the buffer layer rotation means (140) by the control of the control unit so as to stably enter and exit the substrate (A) when the substrate (A) is entered into the buffer layer (123) of the buffer section (120) and when the substrate (A) placed on the buffer layer (123) is exited.

[0048] That is, the above-described substrate entry / exit guide means (160) is installed such that one end and the other end are rotatably installed by interposing bearings on entry / exit fixing plates (161, 161') fixed on both inner sides of the entry port (110a) and exit port (110b) of the buffer frame (110), and the outer surface is provided with a plurality of entry / exit bearings at regular intervals, and each end is provided with an entry / exit gear (162a, 162a') and an entry / exit rotating bar (162, 162'), and the one end and the other end are provided with entry / exit power transmission gears (163a, 163a') so as to mesh with the entry / exit gears (162a, 162a') of the entry / exit rotating bar (162, 162'), and the entry / exit gear part (163b) is fixedly provided on the bar. It is composed of a power transmission bar (163) and an entry and exit drive motor (164) which is fixedly installed on the buffer frame (110) and driven in response to the control of the control unit (111), and has a drive gear (164a) on the entry and exit drive shaft so as to mesh with a power transmission gear unit (163b) fixed on the entry and exit power transmission bar (163).

[0050] When a substrate is to be temporarily stored while a series of processes are being carried out in a semiconductor process using the buffer system capable of first-in, first-out according to the present invention configured as described above, as shown in the attached drawings, FIG. 1 to FIG. 9, the substrate (A) is first entered into the buffer layer (123) formed on the uppermost layer of the buffer unit (120) through the entrance (110a) of the buffer frame (110) by driving the buffer layer rotation means (140) by the control of the control unit (111), and is stored.

[0051] That is, the drive motor (144) for buffer layer rotation is driven by the control of the above control unit (111), and the drive power transmission unit (143) for buffer layer rotation and the drive magnet unit (146) for buffer layer rotation are rotated by the driving of the drive motor (144) for buffer layer rotation.

[0052] The buffer layer rotation bar (123b) is rotated by the rotation of the driving magnet part (146) for the buffer layer rotation, and the driven magnet part (147) for the buffer layer rotation, which is spaced apart from the driving neodymium magnet (NdFeB magnet) (146a), rotates by the magnetic force of the driven neodymium magnet (NdFeB magnet) (147a).

[0053] As a result, the substrate enters and is stored in the buffer layer (123) formed on the uppermost layer of the buffer section (120) through the entry port (110a).

[0054] As described above, when the substrate (A) enters and is stored in the buffer layer (123) formed on the uppermost layer of the buffer section (120), the lifting servo motor (132) of the lifting section (130) for the buffer section is driven in the forward direction by the control of the control section.

[0055] The lifting ball screw shaft (133) rotates in the forward direction by driving the lifting servo motor (132), and as a result, the buffer lifting block (122) of the buffer section (120) rises along the LM rail (121).

[0056] As a result, the buffer layer (123) formed on the next layer after the top buffer layer (123) is located at the entrance (110a).

[0057] Afterwards, another substrate is stored in a buffer layer (123) formed on the next layer after the top buffer layer (123) by driving the buffer layer rotation drive motor (144) of the buffer layer rotation means (140) in the same way as storing a substrate in the top buffer layer (123).

[0058] By repeating the above-mentioned operation, the substrate (A) can be stored up to the buffer layer (123) of the buffer section (120) formed at the bottom layer.

[0059] Meanwhile, when attempting to retrieve a substrate (A) temporarily stored in each buffer layer (123) of the aforementioned buffer section (120), the lifting servo motor (132) of the lifting section (130) for the buffer section is first driven in the reverse direction by the control of the control section (111).

[0060] As a result, the buffer lifting block (122) of the buffer section (120) descends along the LM rail (121).

[0061] As described above, when the buffer lifting block (122) descends along the LM rail (121), the uppermost buffer layer (123) of the buffer section (120) descends to the same position as the exit (110b).

[0062] Subsequently, the buffer layer rotation bar (123b) of the uppermost buffer layer (123) rotates in response to the driving motor (144) for buffer layer rotation of the buffer layer rotation means (140) being driven by the control of the control unit (111).

[0063] As a result, the substrate (A) stored in the uppermost buffer layer (123) can be advanced through the exit port (110b).

[0064] As described above, the present invention can improve the work speed by enabling the selection of a pre-fed substrate.

[0065] The foregoing description is merely an illustrative explanation of the technical concept of the present invention, and those skilled in the art to which the present invention pertains will be able to make various modifications and variations within the scope of the essential characteristics of the present invention. Accordingly, the embodiments disclosed in the present invention are intended to explain, not limit, the technical concept of the present invention, and the scope of the technical concept of the present invention is not limited by such embodiments. The scope of protection of the present invention shall be interpreted by the claims below, and all technical concepts within an equivalent scope shall be interpreted as being included within the scope of rights of the present invention. Explanation of the symbols

[0067] A ; Substrate 100 ; First-in, First-out buffer system 110 ; Frame for buffer 120 ; Buffer section 130 ; Lifting unit for buffer section 140 ; ​​Buffer layer rotation means 150 ; Buffer layer rotation prevention means 160 ; Substrate entry / exit guide means

Claims

Claim 1 In a buffer system capable of first-in, first-out, a buffer frame (110) is provided with an entry opening (110a) formed on one side and an exit opening (110b) formed on the other side to temporarily store and retrieve a substrate (A), an opening / closing door installed on the front, and a control unit (111) installed on the back; a buffer section (120) is provided with a plurality of buffer layers (123) formed on the front so that substrates (A) entered through the entry opening (110a) can be stored layer by layer; a buffer section lifting unit (130) is provided with a buffer section (120) installed on the other side inside the buffer frame (110) to be raised and lowered by driving in response to the control of the control unit (111); and a buffer section is positioned so as not to come into contact with the rear of the buffer section (120) by being fixedly installed on the buffer frame (110) and responding to the control of the control unit A buffer system capable of first-in, first-out, and further comprising a buffer layer rotation means (140) configured to rotate the buffer layer (123) by magnetic force as it is driven, thereby allowing the substrate (A) to enter and exit the buffer layer (123), and further comprising a buffer layer rotation prevention means (150) on one side of the buffer layer rotation means (140) which is fixedly installed on the buffer frame (110) and separates the buffer layer rotation means (140) from the buffer unit (120) as it is driven in response to the control of the control unit (111) after the buffer layer (123) is raised, so as to prevent the buffer layer (123) from being micro-rotated by the magnetic force of the buffer layer rotation means (140). Claim 2 delete Claim 3 In a buffer system capable of first-in, first-out, a buffer frame (110) is provided with an entry opening (110a) formed on one side and an exit opening (110b) formed on the other side to temporarily store and retrieve a substrate (A), an opening / closing door installed on the front, and a control unit (111) installed on the back; a buffer section (120) is provided with a plurality of buffer layers (123) formed on the front so that substrates (A) entered through the entry opening (110a) can be stored layer by layer; a buffer section lifting unit (130) is provided with a buffer section (120) installed on the other side inside the buffer frame (110) to be raised and lowered by driving in response to the control of the control unit (111); and a buffer section is positioned so as not to come into contact with the rear of the buffer section (120) by being fixedly installed on the buffer frame (110) and responding to the control of the control unit A buffer system capable of first-in, first-out, and further characterized by including a buffer layer rotation means (140) configured to rotate the buffer layer (123) by magnetic force as it is driven to allow the substrate (A) to enter and exit the buffer layer (123), and further configured to fixably provide a substrate entry / exit guide means (160) that is driven simultaneously with the buffer layer rotation means (140) under the control of a control unit (111) so as to stably allow the substrate (A) to enter and exit the buffer layer (123) of the buffer unit (120) and the substrate (A) seated on the buffer layer (123) to exit the buffer layer (123). Claim 4 In claim 1 or 3, the buffer section (120) is formed as a rectangular plate having LM rails (121) fixedly provided on both inner sides of the buffer frame (110) and LM blocks (122a) fixedly installed on both sides so as to be coupled to the LM rails (121) and capable of lifting and lowering, wherein a plurality of buffer layer forming holes (122b) are formed at regular intervals in the transverse and longitudinal directions on the front of the plate and penetrating to the rear, and a buffer lifting block (122) is provided with a sensor (122c) between the longitudinal buffer layer forming holes (122b) to detect the presence or absence of a substrate (A), and each end of a buffer layer rotating bar (123b) equipped with buffer layer rollers (123a) installed at regular intervals on the outer surface is rotatably penetrated through the buffer layer forming holes (122b) of the buffer lifting block (122) by interposing a bearing. A buffer system capable of first-in, first-out, and is characterized by being composed of a plurality of buffer layers (123) that are installed, with one end formed as a free end and rotatably configured to correspond to the driving of the buffer layer rotation means (140). Claim 5 In a buffer system capable of first-in, first-out, a buffer frame (110) is provided with an entry opening (110a) formed on one side and an exit opening (110b) formed on the other side to temporarily store and retrieve a substrate (A), an opening / closing door installed on the front, and a control unit (111) installed on the back; a buffer section (120) is provided with a plurality of buffer layers (123) formed on the front so that substrates (A) entered through the entry opening (110a) can be stored layer by layer; a buffer section lifting unit (130) is provided with a buffer section (120) installed on the other side inside the buffer frame (110) to be raised and lowered by driving in response to the control of the control unit (111); and a buffer section is positioned so as not to come into contact with the rear of the buffer section (120) by being fixedly installed on the buffer frame (110) and responding to the control of the control unit The buffer layer rotation means (140) is provided to rotate the buffer layer (123) by magnetic force as it is driven, thereby allowing the substrate (A) to enter and exit the buffer layer (123); the lifting unit (130) for the buffer section is fixed to the upper inner side of the buffer frame (110) and is installed in the power input section of a lifting power transmission unit (131) having a power input section and a power output section, and is provided to be driven in the forward and reverse directions in response to the control of the control unit (111); a lifting servo motor (132) is provided to be driven in the forward and reverse directions in response to the control of the control unit (111); one end of a lifting ball screw shaft (133) is installed in the power output section of the lifting power transmission unit (131) and is provided to be rotatable in the forward and reverse directions in response to the driving of the lifting servo motor (132); and one end is fixed to the upper surface of the buffer lifting block (122) of the buffer section (120), and the other end is provided for the lifting A buffer system capable of first-in, first-out, comprising a lifting ball screw nut housing (134) equipped with a lifting ball screw nut part (134a) that allows the buffer part (120) to be lifted in response to the driving of the lifting servo motor (132) by passing the ball screw shaft (133) through in a screw manner. Claim 6 In claim 4, the buffer layer rotation means (140) comprises: a buffer layer rotation fixing part (141) formed as a rectangular plate and fixedly installed on the buffer frame (110) so as not to come into contact with the rear surface of the buffer lifting block (122) of the buffer part (120), wherein a plurality of rotation holes are formed at regular intervals in the transverse direction on the plate; a buffer layer rotation shaft (142) wherein each end of the rotation hole of the buffer layer rotation fixing part (141) is installed to be rotatable by means of a bearing, and each other end is provided protruding from the front surface of the buffer layer rotation fixing part (141); and a driving helical gear (143a) is fixedly installed on the outer circumference of each other end of the buffer layer rotation shaft (142), wherein a driving magnetic gear (143a) is installed to transmit power by direct contact on the outermost side, and the remainder is provided to transmit power in a non-contact manner by magnetic force. A driving force transmission unit (143) for buffer layer rotation equipped with a gear (143b), a driving motor (144) for buffer layer rotation equipped with a driving shaft and fixedly installed via a fixing plate (144a) on the outermost side of the back surface of the fixed unit (141) for buffer layer rotation, wherein the driving shaft is connected to a shaft (142) for buffer layer rotation equipped with the driving helical gear (143a) via a coupling so as to be driven in response to power application, and a bracket (145a) fixed with bearings interposed on both sides of the front surface of the fixed unit (141) for buffer layer rotation, wherein a driven helical gear (145b) that meshes with the driving helical gear (143a) of the driving force transmission unit (143) for buffer layer rotation is installed on the outermost side, and on one side of the driven helical gear (145b) the A driven rotating bar (145) for buffer layer rotation is provided with multiple driven magnetic gears (145c) installed at regular intervals so as to be non-contacting with each driving magnetic gear (143b) and capable of transmitting rotational force by magnetic force, and each other end of the buffer layer rotation shaft (142) is inserted into one side and fixed.A buffer system capable of first-in, first-out, and is characterized by comprising: a driving magnet part (146) for buffer layer rotation, wherein a driving neodymium magnet (NdFeB magnet) (146a) is fixedly provided on the other side; and a driving magnet part (147) for buffer layer rotation, wherein the driving magnet part (146) is installed so as not to come into contact with the driving magnet part (146) by inserting each end of the buffer layer rotation bar (123b) of the buffer layer into the inner side of one side and fixing it, and wherein the driving magnet (NdFeB magnet) (147a) is provided on the other side so as to receive rotational force from the magnetic force of the driving neodymium magnet (NdFeB magnet) (146a) and rotate the buffer layer rotation bar (123b). Claim 7 In claim 1, the buffer layer rotation prevention means (150) is characterized by being composed of: a rotation prevention fixing plate positioned on one side of the buffer layer rotation means (140) by being fixedly installed on the buffer frame (110); a rotation prevention LM rail (151) fixedly installed on both sides of the upper surface of the rotation prevention fixing plate; a rotation prevention guide block (152) having one end fixed to the buffer layer rotation means (140) and the other end equipped with an LM block (152a) movable along the rotation prevention LM rail (151); and a rotation prevention cylinder (153) fixedly installed on the upper surface of the rotation prevention fixing plate positioned between the rotation prevention LM rails (151), wherein the piston (153a) is fixed to the buffer layer rotation means (140) and is configured to push or pull the buffer layer rotation means (140) by operating in response to the supply or non-supply of compressed air. A buffer system capable of first-in, first-out. Claim 8 In paragraph 3, the above-mentioned substrate entry / exit guide means (160) is installed such that one end and the other end are rotatably installed by interposing bearings on entry / exit fixing plates (161, 161') fixed on both inner sides of the entry port (110a) and exit port (110b) of the buffer frame (110), wherein a plurality of entry / exit bearings are provided at regular intervals on the outer surface, and an entry / exit rotating bar (162, 162') is provided with an entry / exit gear (162a, 162a') at each end, and an entry / exit power transmission gear (163a, 163a') is provided at one end and the other end so as to be gear-meshed with the entry / exit gear (162a, 162a') of the entry / exit rotating bar (162, 162'), and a power transmission gear part (163b) is fixedly provided on the bar. A buffer system capable of first-in, first-out, and is characterized by being composed of a power transmission bar (163) and an entry and exit drive motor (164) which is fixedly installed on the buffer frame (110) and driven in response to the control of the control unit (111), and has a drive gear (164a) on the entry and exit drive shaft so as to mesh with a power transmission gear unit (163b) fixed on the entry and exit power transmission bar (163).

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