Quartz inclined tube forming device for semiconductor etching cover using donut-shaped quartz plate

Abstract

The present invention comprises: a donut-shaped base plate (20) having a fixing groove (22) for initially positioning a donut-shaped quartz plate (10) on the inner diameter side surface of the donut-shaped base plate (20), and support rod insertion holes (29) distributed on the base plate (20) outside the fixing groove (22) to vertically fix support rods (40) from the top; a concave portion (27) having an inclined surface (23) that becomes smaller in diameter as it goes down and is connected to the fixing groove (22) of the donut-shaped base plate (20), a concave surface (24) that extends below the inclined surface (23), and a concave groove (25) with the lower center of the concave surface (24) open; and a lower mold (30) having a support (28) that supports the lower edge of the base plate (20) at a height higher than the height of the concave portion (27). The device is a quartz inclined tube forming apparatus for a semiconductor etching cover using a donut-shaped quartz plate, comprising: an upper mold (50) having a rim portion (52) having a guide hole (51) that guides downward movement along a support rod (40); an inclined body (54) whose diameter decreases as it goes down from the bottom surface of the rim portion (52); and a convex portion (55) that extends below the inclined body (54) and forms a convex shape downward to form a center of gravity by being coaxial with a concave surface (24); and a support rod (40) having a fitting projection (42) formed with a diameter smaller than that of the support rod (40) that is fitted and fixed at the bottom of the support rod fitting hole (29) of the lower mold (30), and whose upper end is fitted into the guide hole (51) of the upper mold (50) to guide the downward movement of the upper mold (50) by the load when heated in a heating chamber inside a vacuum furnace, thereby guiding the flat donut-shaped quartz plate (10) to be formed into an inclined tube shape.

Description

Technology Field

[0001] The present invention relates to a quartz inclined tube forming apparatus for a semiconductor etching cover using a donut-shaped quartz plate. Background Technology

[0003] In general, the prior art disclosed in the applicant’s Korean Patent Registration No. 10-0337612 features quartz products that possess characteristics such as chemical stability, high heat resistance, high light transmittance, and electrical stability, and are widely used across various industries including electrical, electronic, information and communication, and automotive. Since quartz products are also used in semiconductor manufacturing, the Low Pressure Chemical Vapor Deposition (LP CVD) process—a semiconductor production facility used to deposit insulating or metal films onto semiconductor substrates through chemical reactions under low-temperature processes—is trending toward a batch method to an embedded method (MULTI-CHAMBER TYPE-Dome type) due to the increasing capacity and high integration of semiconductors. In this case, the bell used in the embedded method consists of a tubular tube section, a flange section forming the inlet of the tube section, and a dome section that blocks the top of the tube section.

[0004] The current method of manufacturing the dome of a bell involves cutting a flat quartz plate into a circular shape and then radially dividing the unit quartz plates into equal segments, each of which is then formed into a curved quartz plate. Subsequently, the sides of the formed curved quartz plates are welded together to complete the forming into a dome-shaped dome section. This is then welded to the tip of the tube section in the form of a dome section.

[0005] Another method for making bells for semiconductor manufacturing consists of a fitting jig identical to the inner shape of the bell, a rotating means for supporting and rotating the fitting jig, a tubular quartz tube fitted into the fitting jig, a burner for heating the top of the quartz tube, and a press tool for pressing the top of the quartz tube to form the upper dome shape of the fitting jig. However, this method cannot continuously form the dome portion into a uniform shape, so post-processing cannot be automated and must rely entirely on manual labor, resulting in low productivity and difficulties in quality control. Furthermore, the increase in welded surfaces due to the splitting process is a factor that increases the post-processing period.

[0006] In addition, a technique for creating a dome-shaped quartz dome by placing a disc-shaped quartz glass plate on a ring-shaped die having grooves, placing a protruding weight on top, and heat-treating it to the softening point is known in Japanese Patent Publication No. Hei 8-295522, but there is a problem in that the thickness of the quartz, etc. is not uniform because it simply involves placing a weight on top.

[0007] In addition, the semiconductor etching cover is used to collect semiconductor etching gas through a large-diameter pipe, pass it through an inclined pipe, and collect it in a small-diameter pipe and then safely discharge it through a duct not shown in the illustration. As shown in FIG. 1, this is formed as a single unit by welding together a central inclined pipe (1), a small-diameter pipe (2) above the inclined pipe, and a large-diameter pipe (3) below the inclined pipe (1). However, the inclined pipe (1) is made by cutting a quartz ingot containing a circular rod size into an inclined pipe shape using a lathe, and if this is commissioned to be manufactured in China in the form of contract manufacturing, it takes an average of 40 hours, which results in low economic efficiency and productivity.

[0008] An attempt to solve this problem through localization was made by the applicant to manufacture an inclined tube using upper and lower molds as shown in FIG. 6, and the method involves a donut-shaped base plate (20a) having support rod insertion holes (29a) on the rim for vertically fixing support rods (40), which will be shown later, to each be fixed from the top, while initially positioning a donut-shaped quartz plate (10), which will be shown later, on the inner diameter side surface of the donut-shaped base plate (20) with a concave groove in the center;

[0009] A mold (30a) having an inclined surface (23a) that is connected to the inner diameter of a donut-shaped base plate (20a) and has a diameter that decreases as it goes downward, having the same slope and slope length as an inclined tube (1), and a small diameter hole (25a) drilled at the bottom of the inclined surface (23a);

[0010] A teppo (52a) having a guide hole (51a) that guides descent along a support rod (40), and

[0011] An upper mold (50a) having a slanted body (54a) whose diameter decreases as it goes down from the bottom surface of the rim portion (52a), and an upwardly convex portion (55a) that passes through a small diameter hole (25a) below the slanted body (54a); and

[0012] The structure is configured to include a support rod (40) in which a fitting projection (42), which is to be illustrated, is fitted and fixed at the bottom of the support rod fitting hole (29a) of the lower mold (30a) with a diameter smaller than that of the support rod (40), and the upper end is fitted into the guide hole (51a) of the upper mold (50a) to guide the lowering of the upper mold (50a) by the load when heated in the heating chamber inside the vacuum furnace, thereby guiding the flat, donut-shaped quartz plate (10) to be formed into an inclined tube shape.

[0013] The bottom edge of the convex portion (55a) includes a curved portion (54b) that contacts the bottom edge of the inclined body (54a), a concave ring (54c) that is concavely inclined from the curved portion (54b) to the center, and a horizontal plate (54d) that protrudes downward to form the same horizontal plane as the curved portion (54b) at the inner diameter of the concave ring (54c).

[0014] When manufacturing using this, a donut-shaped quartz plate (10), which will be described later, is placed so as to overlap the inner diameter of a base plate (20a), the lower end of a support rod (40) is fixed to a fitting hole (29a), and the guide hole (51a) of an upper mold (50a) is connected to the upper end so that the lower end of the upper mold (50a) contacts the inner diameter of the curved part (54b) and the lower end of the inclined body (54a), and then the inclined tube is heated in a vacuum furnace to heat-form it.

[0015] However, this method has a structural problem in that the bottom surface of the horizontal plate (54d) shown in FIG. 7 forms the same horizontal plane as the small diameter hole (25a) shown in FIG. 6, and the horizontal plate (54d) has a smaller diameter than the small diameter hole (25a), making it difficult for the small diameter hole (25a) and the horizontal plate (54d) to descend in a horizontal state while forming a coaxial axis, thus making it difficult to manufacture an inclined pipe of the same thickness and shape. The problem to be solved

[0017] The present invention aims to solve this problem, and the objective of the present invention is to provide a quartz inclined tube molding apparatus for semiconductor etching covers using a donut-shaped quartz plate, which is configured to form a quartz inclined tube of a certain thickness and shape by comprising a lower mold having a concave portion in the shape of an inclined tube and an upper mold having a convex portion on the bottom surface for controlling the center of gravity when manufacturing a quartz inclined tube for semiconductor etching covers.

[0018] Another objective of the present invention is to provide a quartz inclined tube forming apparatus for a semiconductor etching cover using a donut-shaped quartz plate, wherein the concave portion of the lower mold is formed with a downwardly inclined surface, a concave surface at the bottom of the inclined surface, and a concave groove at the center of the bottom of the concave surface that cuts the concave surface, thereby guiding the convex portion of the upper mold to be positioned downward with the center of gravity in the concave surface and the concave groove, so that the upper mold descends from the correct position to form the inclined tube at a constant angle and inclination, thereby enabling the manufacture of a high-quality quartz inclined tube. means of solving the problem

[0021] The present invention for this purpose comprises a donut-shaped base plate having a fixing groove that is carved to a depth thinner than the thickness of the donut-shaped quartz plate on the inner diameter side surface of the donut-shaped base plate to initially position the quartz plate, and support rod insertion holes distributed on the base plate outside the fixing groove to vertically fix support rods from the top, respectively;

[0022] A concave portion having an inclined surface that decreases in diameter as it goes downward, connected to a fixing groove of a donut-shaped base plate, a concave surface extending below the inclined surface, and a concave groove with the lower center of the concave surface open; and

[0023] A mold having a support that supports the lower edge of the base plate at a height higher than the height of the concave portion;

[0024] A rim having a guide hole that guides descent along a support rod, and

[0025] An inclined body whose diameter decreases as it goes down from the bottom surface of the rim, and an upper mold having a downwardly convex portion that extends below the inclined body and forms a coaxial axis with the concave surface to stabilize the center of gravity; and

[0026] The present invention aims to provide a quartz inclined tube forming apparatus for a semiconductor etching cover using a donut-shaped quartz plate, comprising a support rod having a fitting projection formed with a diameter smaller than that of the support rod at the bottom of the support rod fitting hole of the lower mold, and the upper end fitted into the guide hole of the upper mold to guide the lowering of the upper mold by means of a load when heated in a heating chamber inside a vacuum furnace, thereby guiding the upper mold to maintain the thickness of the quartz plate in the lower mold so that a flat, donut-shaped quartz plate is formed into an inclined tube shape. Effects of the invention

[0028] As described above, the present invention aims to provide a semiconductor etching quartz inclined tube forming apparatus using a donut-shaped quartz plate, which forms the quartz inclined tube consistently and stably by configuring the lower mold having a concave portion in the shape of an inclined tube and the upper mold having a convex portion on the bottom surface for controlling the center of gravity when manufacturing a quartz inclined tube for a semiconductor etching cover.

[0029] The present invention forms a concave portion of the lower mold with a downwardly inclined surface, a concave surface below the inclined surface, and a concave groove formed by cutting the concave surface in the center below the concave surface. By guiding the convex portion of the upper mold to be positioned downward in the concave surface and the concave groove to maintain the center of gravity, the inclined tube is formed at a constant angle and inclination when the upper mold is lowered, thereby shortening the molding time, lowering manufacturing costs, and enabling the manufacture of high-quality quartz inclined tubes. Brief explanation of the drawing

[0031] FIG. 1 is a perspective view of a semiconductor etching gas cover in which the present invention is used. FIG. 2 is an exploded cross-sectional view of the present invention, FIG. 3 is an initial coupling state diagram of the present invention, FIG. 4 is a molding state diagram of the present invention, FIG. 5 is an initial combined state diagram showing another example of using the present invention in two layers, FIG. 6 is an exploded view of a key part of a conventional inclined tube molding mold, Figure 7 is a bottom perspective view of a conventional upper mold. Specific details for implementing the invention

[0032] Embodiments of the present invention will be described in detail below with reference to the drawings.

[0033] The present invention comprises a donut-shaped base plate (20) having a fixing groove (22) that is carved into the inner diameter side surface of the donut-shaped base plate (20) to a depth thinner than the thickness of the donut-shaped quartz plate (10) to initially position the quartz plate (10), and support rod insertion holes (29) distributed on the base plate (20) outside the fixing groove (22) to vertically fix support rods (40) from the top;

[0034] A concave portion (27) having an inclined surface (23) that becomes smaller in diameter as it goes downward, connected to a fixing groove (22) of a donut-shaped base plate (20), a concave surface (24) that extends below the inclined surface (23), and a concave groove (25) with the lower central part of the concave surface (24) open; and

[0035] A mold (30) having a support (28) that supports the lower edge of the base plate (20) at a height higher than the height of the concave portion (27);

[0036] A teppo (52) having a guide hole (51) that guides the descent along a support rod (40), and

[0037] An upper mold (50) having a slanted body (54) whose diameter decreases as it goes down from the bottom surface of the rim portion (52), and a convex portion (55) that extends below the slanted body (54) and forms a coaxial axis with the concave surface (24) to stabilize the center of gravity.

[0038] A support rod (40) is configured to include a support rod (40) that guides the upper mold (50) to maintain the thickness of the quartz plate (10) in the lower mold (30), wherein a support rod (40) is fixedly fitted at the bottom of the support rod fitting hole (29) of the lower mold (30) and the upper end is fitted into the guide hole (51) of the upper mold (50) and guides the upper mold (50) to descend due to the load when heated in the heating chamber inside the vacuum furnace, thereby guiding the upper mold (50) to maintain the thickness of the quartz plate (10) in the lower mold (30) so that the flat, donut-shaped quartz plate (10) is formed into an inclined tube shape.

[0039] The lower apex of the convex portion (55) of the upper mold (50) is configured to be above the horizontal plane of the edge of the concave groove (25) of the lower mold (30).

[0040] The above-mentioned slope length of the slope body (54) of the upper mold (50) is preferably configured to be equal to or greater than the width of the donut-shaped quartz plate (10).

[0041] In another embodiment of the present invention, as shown in FIG. 5, the upper end of the support rod (40') may be additionally connected to the support rod insertion hole (29) of the lower mold (30) below the support rod (40), and the lower end of the support rod (40') may be configured to support another lower mold (30), the middle end to support another upper mold (50), and the upper end to support the lower mold (30).

[0042] The present invention configured as described above is configured such that the chamber door having a heater inside the vacuum furnace shown in Fig. 5 of the applicant's domestic patent registration No. 10-0337612 is opened, and the lower mold is placed inside the chamber, and then a donut-shaped quartz plate (10) is placed in the fixing groove (22) of the lower mold (30) shown in Fig. 2, and the upper mold (50) is connected to the support rod (40) on the upper part of the support rod (40) with the lower end fixed in the support rod insertion hole (29).

[0043] Then, the convex portion (55) is brought into contact with the inner diameter side of the quartz plate (10) with the center of gravity well maintained by the load, the chamber door is closed, and the heater is heated in a vacuum state. The temperature of the heater is raised in increments of about 300°C from 1500°C to 1700°C, and heating is performed while supplying nitrogen gas if necessary. Since this heating method is a known technique, a detailed explanation of the heating is omitted. Through this heating, the convex portion (55) of the upper mold (50) pushes the inner diameter side of the quartz plate (10) downward with the center of gravity maintained, deforming it by its own weight, and the heated quartz plate (10) is formed into an inclined tube shape by the inclined body (54) and the inclined surface (23) between the upper and lower molds (50, 30).

[0044] In this case, the convex portion (55) of the upper mold (50) is integrally formed with the lower part of the inclined body (54), so that the load of the inclined body (54) is leveled by the convex portion (55), and the convex portion (55) is combined to center the shape and center of the concave surface (24) and the concave groove (25) of the lower mold (30), and the apex of the lower part of the convex portion (55) is positioned above the horizontal plane of the concave groove (25) to maintain the correct position with the concave portion (27), and when the donut-shaped quartz plate (10) is pressed between the inclined surface (23) and the inclined body (54) to guide it into an inclined tube, the gap between the inclined surface (23) and the inclined body (54) becomes constant, thereby stably performing the forming of an inclined tube with a constant thickness and angle of inclination between them.

[0045] Of course, after heat molding, nitrogen gas is supplied in reverse to lower the temperature of the chamber by a certain amount, then the door is opened to separate the upper mold (50) from the support rod (40) using a handle or handle jig not shown, and after separating each support rod (40), the inclined tube placed on the inclined surface (23) of the lower mold (30) is separated, and then a new quartz plate (10) is placed and heat molding is repeated in the reverse order as described above. This molding time takes about 12 hours, which is economical as it shortens the production time compared to the cutting process that takes 40 hours.

[0046] FIG. 5 is another embodiment of the present invention in which a support rod (40') is made approximately twice as long as the support rod (40), and the upper end of the support rod (40') is connected to the support rod insertion hole (29) of the lower mold (30) with a fitting projection (42'), and the lower end is connected to the support rod insertion hole (29) of another lower mold (30) with a fitting projection (42). The central part of the support rod (40') is supported so that it can be inserted into the guide hole (51) of another upper mold (50) to allow it to descend, and the upper mold (30) is additionally supported on the fitting projection (42') at the upper end of the support rod (40'). As shown in FIG. 2, the upper mold (50) descends by its own weight on the support rod (40) inserted into the upper part of the support rod insertion hole (29) of the lower mold (30), and the other upper mold (50) descends from the center of the support rod (40'), so that two sets are simultaneously The quartz plate (10) can be formed into an inclined tube (10'), making it economical. Since the forming process itself is the same as in FIG. 2 and FIG. 3, the description of the forming process is omitted. Explanation of the symbols

[0048] 10; Quartz plate 10'; Inclined tube 20; Base plate 22; Fixing groove 23; Inclined surface 24; Concave surface 25; Concave groove 27; Concave part 29; Support rod insertion hole 30; Lower mold 40, 40'; Support rod 42; Insertion projection 50; Upper mold 51; Guide hole 52; Edge 54; Inclined body 55; Convex part

Claims

Claim 1 A donut-shaped base plate (20) having a fixing groove (22) that is carved into the inner diameter side surface of the donut-shaped base plate (20) to a depth thinner than the thickness of the donut-shaped quartz plate (10) to initially position the quartz plate (10), and support rod insertion holes (29) distributed on the base plate (20) outside the fixing groove (22) to vertically fix support rods (40) from the top; a concave portion (27) having an inclined surface (23) that is connected to the fixing groove (22) of the donut-shaped base plate (20) and has a diameter that decreases as it goes downward, a concave surface (24) that extends below the inclined surface (23), and a concave groove (25) in which the lower center of the concave surface (24) is open; A lower mold (30) having a support (28) that supports the lower edge of the base plate (20) at a height higher than the height of the concave portion (27); a rim portion (52) having a guide hole (51) that guides downward along the support rod (40); an inclined body (54) whose diameter decreases as it goes down from the bottom of the rim portion (52); and an upper mold (50) having a convex portion (55) that extends below the inclined body (54) and forms a convex shape downward to balance the center of gravity by being coaxial with the concave surface (24). A semiconductor etching cover quartz inclined tube forming apparatus using a donut-shaped quartz plate, comprising a support rod (40) having a smaller diameter than the support rod (40) formed at the bottom of the support rod fitting (29) of the lower mold (30), and the upper end fitted into the guide hole (51) of the upper mold (50) to guide the upper mold (50) downward by the load when heated in the heating chamber inside the vacuum furnace, thereby guiding the upper mold (50) to maintain the thickness of the quartz plate (10) in the lower mold (30) so that the flat donut-shaped quartz plate (10) is formed into an inclined tube shape. Claim 2 A quartz inclined tube forming apparatus for a semiconductor etching cover using a donut-shaped quartz plate, characterized in that, in claim 1, the lower apex of the convex portion (55) of the upper mold (50) is configured to be positioned above the horizontal plane of the edge of the concave groove (25) of the lower mold (30) in order to lower the center of gravity. Claim 3 A quartz inclined tube forming apparatus for a semiconductor etching cover using a donut-shaped quartz plate, characterized in that, in claim 1, the inclined length of the inclined body (54) of the upper mold (50) is configured to be equal to or greater than the width of the donut-shaped quartz plate (10). Claim 4 A quartz inclined tube forming apparatus for a semiconductor etching cover using a donut-shaped quartz plate, characterized in that, in claim 1, another support rod (40') longer than the support rod (40) is additionally coupled to the support rod fitting hole (29) of the lower mold (30) below the support rod (40), another lower mold (30) is coupled to the lower end of the support rod (40'), another upper mold (50) is coupled to the upper fitting projection (42') above, and the support rod fitting hole (29) of the lower mold (30) below is coupled to the upper fitting projection (42') above.

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