Unit for transferring substrate and substrate treating apparatus with the same

Abstract

One aspect of the substrate transfer unit of the present invention for achieving the above objective comprises: a hand that supports a substrate and includes a first anti-detachment projection provided in front of a mounting surface on which the substrate is placed; a base part on which a pusher is installed to move the hand forward or backward; a pusher guide that guides the direction of movement of the hand, comprising a first part and a second part provided in a longitudinal line with respect to the first part; and a pressure sensor provided between the first part and the second part to detect pressure, wherein when pressure exceeding a set value is detected by the pressure sensor, the hand moves to the opposite side of the pusher guide to adjust the position of the substrate.

Description

Technology Field

[0001] The present invention relates to a substrate transfer unit and a substrate processing device including the same. Background Technology

[0002] Integrated circuit devices, such as semiconductor devices, can be obtained by performing processes such as thin-film processes, etching processes, cleaning processes, and drying processes, and between unit processes, a transfer process for transferring a substrate to be manufactured into an integrated circuit device may be performed. For the transfer process for transferring the substrate, a substrate transfer unit having various structures may be used. The problem to be solved

[0003] Meanwhile, if the substrate deviates from its proper position during the process of being placed on the substrate transfer unit, a compressive force is generated, raising concerns that the substrate may be damaged; therefore, improvement is required.

[0004] The problem that the present invention aims to solve is to provide a substrate transfer unit capable of safely transferring a substrate and a substrate processing device including the same.

[0005] The problems of the present invention are not limited to those mentioned above, and other problems not mentioned will be clearly understood by those skilled in the art from the description below. means of solving the problem

[0006] One aspect of the substrate transfer unit of the present invention for achieving the above objective comprises: a hand that supports a substrate and includes a first anti-detachment projection provided in front of a mounting surface on which the substrate is placed; a base part on which a pusher is installed to move the hand forward or backward; a pusher guide that guides the direction of movement of the hand, comprising a first part and a second part provided in a longitudinal line with respect to the first part; and a pressure sensor provided between the first part and the second part to detect pressure, wherein when pressure exceeding a set value is detected by the pressure sensor, the hand moves to the opposite side of the pusher guide to adjust the position of the substrate.

[0007] One aspect of the substrate processing device of the present invention for achieving the above other objectives comprises: an index module; a processing module in which the substrate is introduced from the index module and processed; and a return chamber for returning the substrate between the processing modules, wherein at least one of the index module or the return chamber comprises a substrate transfer unit, wherein the substrate transfer unit comprises: a hand that supports the substrate and includes a first anti-detachment projection provided in front of a mounting surface on which the substrate is placed; a base part on which a pusher is installed to move the hand forward or backward; a pusher guide provided with a first part and a second part arranged in a longitudinal line with the first part to guide the direction of movement of the hand; and a pressure sensor provided between the first part and the second part to detect pressure, wherein when pressure exceeding a set value is detected by the pressure sensor, the hand moves to the opposite side of the pusher guide to adjust the position of the substrate.

[0008] Another aspect of the substrate transfer unit of the present invention for achieving the above objective comprises: a hand that supports a substrate and includes a first anti-detachment projection provided at the front of a seating surface on which the substrate is placed and a second anti-detachment projection provided at the rear of the seating surface; a base part on which a pusher is installed to move the hand forward or backward; a pusher guide that guides the direction of movement of the hand and is provided with a first part and a second part provided in a longitudinal line with respect to the first part; a sensor part that detects the substrate and includes a first sensor provided on the inner side based on the circumference of the substrate at a fixed position on the base part and a plurality of second sensors provided in a line on the outer side based on the circumference of the substrate at a fixed position; and a pressure sensor provided between the first part and the second part to detect pressure. and includes a temperature sensor provided in the base portion and detecting the temperature of the substrate or the ambient temperature of the substrate, wherein if pressure is detected above a set value by the pressure sensor, the hand moves to the opposite side of the pusher guide to adjust the position of the substrate, or if the first sensor and the second sensor detect the substrate together, the hand moves toward the pusher guide to move the substrate toward the pusher guide, but moves to a range where the substrate is not detected by the second sensor.

[0009] Specific details of other embodiments are included in the detailed description and drawings. Brief explanation of the drawing

[0010] FIG. 1 is a drawing illustrating a substrate processing apparatus according to some embodiments of the present invention. FIG. 2 is a perspective view illustrating a substrate transfer unit according to some embodiments of the present invention. FIG. 3 is a plan view illustrating a robot of a substrate transfer unit according to a first embodiment of the present invention. Figure 4 is a drawing showing the substrate positioned in the II section of Figure 3. FIG. 5 is a plan view illustrating a state in which a substrate is moved from its fixed position to the pusher guide side in a robot of a substrate transfer unit according to the first embodiment of the present invention. FIG. 6 is a plan view illustrating a state in which a substrate is moved from its fixed position to the opposite side of the pusher guide in a robot of a substrate transfer unit according to the first embodiment of the present invention. Specific details for implementing the invention

[0011] Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings. The advantages and features of the present invention and the methods for achieving them will become clear by referring to the embodiments described below in detail together with the accompanying drawings. However, the present invention is not limited to the embodiments disclosed below but can be implemented in various different forms. These embodiments are provided merely to ensure that the disclosure of the present invention is complete and to fully inform those skilled in the art of the scope of the invention, and the present invention is defined only by the scope of the claims. Throughout the specification, the same reference numerals refer to the same components.

[0012] The terms used herein are for describing the embodiments and are not intended to limit the invention. In this specification, the singular form includes the plural form unless specifically stated otherwise in the text. As used herein, "comprises" and / or "comprising" do not exclude the presence or addition of one or more other components, steps, actions, and / or elements to the mentioned components, steps, actions, and / or elements.

[0013] FIG. 1 is a drawing illustrating a substrate processing apparatus according to some embodiments of the present invention.

[0014] Referring to FIG. 1, the substrate processing device (1) of the present embodiment may briefly include an index module (20), a treating module (30), and a return chamber (40).

[0015] The index module (20) can return the substrate from the container (10) (e.g., Front Open Unified Pod; FOUP) containing the substrate to the processing module (30) and receive the processed substrate back into the container (10).

[0016] For example, the index module (20) may include a load port (22) and an index robot (23). A container (10) containing a substrate may be placed in the load port (22).

[0017] The index robot (23) may be provided to be movable along a guide rail (24) provided in the Y-axis direction. The index robot (23) is named to distinguish it from the return robot (42RB) of the return chamber (40), but it should be noted that the index robot (23) and the return robot (42RB) may have the same operation and form, etc. Additionally, a mechanism of known technology may be applied.

[0018] The processing module (30) may include a buffer chamber (31), a wet processing chamber (33), and a supercritical chamber (34). However, this is merely an example and is not limited thereto.

[0019] The buffer chamber (31) may be provided between the index module (20) and the return chamber (40). However, it is not limited thereto. The buffer chamber (31) may store multiple substrates together. Substrates stored in the buffer chamber (31) may be brought in or taken out by the index robot (23) and the return robot (42RB).

[0020] The wet processing chamber (33) can process a liquid film on a substrate. For example, the wet processing chamber (33) can perform a cleaning process on the substrate to clean the patterned surface of the substrate. The processing liquid discharged from the wet processing chamber (33) may include chemicals, deionized water (DIW), and organic solvents (e.g., isopropyl alcohol (IPA)) as a cleaning liquid.

[0021] The supercritical chamber (34) may be provided adjacent to the wet processing chamber (33). The supercritical chamber (34) can process the substrate by supplying a supercritical fluid to the substrate. For example, the supercritical chamber (34) can dry the substrate by supplying a supercritical fluid to the substrate processed in the wet processing chamber (33). In other words, the supercritical chamber (34) can dry the organic solvent remaining on the substrate.

[0022] The return chamber (40) can return a substrate between the wet processing chamber (33) and the supercritical chamber (34). The return chamber (40) may be provided with its length direction parallel to the X-axis direction. A return robot (42RB) may be provided in the return chamber (40). A guide rail (42GR) may be provided within the return chamber (40) with its length direction parallel to the X-axis direction, and the return robot (42RB) may be provided to be movable on the guide rail (42GR).

[0023] In this embodiment, the index module (20) and the return chamber (40) may be provided with a substrate transfer unit (100). Below, it will be explained that the substrate transfer unit (100) is provided in the index module (20).

[0024] In other words, the robot (110) of the substrate transfer unit (100) can be provided as an index robot (23) or a return robot (42RB). Below, it will be explained that the robot (110) of the substrate transfer unit (100) is provided as an index robot (23).

[0025] The rail portion (120) of the substrate transfer unit (100) may be provided as a guide rail (24) provided in the index module (20) or as a guide rail (42GR) of the return chamber (40). Below, it will be explained that the rail portion (120) of the substrate transfer unit (100) is provided as a guide rail (24) provided in the index module (20).

[0026] FIG. 2 is a perspective view illustrating a substrate transfer unit according to some embodiments of the present invention.

[0027] Referring to FIG. 2, the substrate transfer unit (100) may be provided inside a housing (25) and may include a robot (110), a rail section (120), a vertical section (130), and a duct section (140).

[0028] The housing (25) can form the exterior of the index module (20) and can accommodate the substrate transfer unit (100). The housing (25) may have a box structure in which a receiving space is formed. The box structure may be formed by a combination of a frame and a plate, but is not limited thereto.

[0029] The housing (25) of the index module (20) may have an exhaust hole (not shown) formed therein so that internal air (which may be referred to as fluid and internal air of the index module (20) below) is discharged to the outside. The exhaust hole may be formed as a through structure on the bottom surface of the index module (20). An exhaust line and an exhaust unit such as a fan / pump may be installed in the exhaust hole to forcibly exhaust the internal air of the index module (20) to the outside. However, it is not limited thereto.

[0030] The robot (110) can transport the substrate. If the robot (110) is provided as an index robot (23), a door opener for opening and closing the door of the container (10) may be provided. The robot (110) can pick up and place the substrate.

[0031] The robot (110) is provided on a vertical section (130) that moves along a rail section (120), and can move in the Y-axis direction in the horizontal direction as the vertical section (130) moves. In addition, it is implemented to be able to move in the up and down direction on the vertical section (130), so that it can move in the up and down direction on the vertical section (130). However, it is not limited thereto.

[0032] For example, the robot (110) transports the substrate (W) and may include a hand (111) and a base part (115).

[0033] One or more hands (111) may be provided. For example, if multiple hands (111) are provided, the multiple hands (111) may be spaced apart from each other in the vertical direction. The hands (111) may be provided to enable movement in the X-axis direction (forward and backward movement) and rotation around the Z-axis direction. For example, the operation of the hands (111) may be implemented by a drive unit such as a motor and / or cylinder and a gear module.

[0034] The base portion (115) can support the hand (111). The base portion (115) may be provided as a block structure. The base portion (115) may be installed to be movable in the vertical portion (130) so as to allow the hand (111) to move along the Z-axis direction. Additionally, the base portion (115) may be provided with a driving device (not shown), such as a motor, to move along the rail portion (120). However, it is not limited thereto.

[0035] A robot (110) that supports the substrate will be described in detail later with reference to the drawings.

[0036] The rail section (120) may be formed as a rail structure to guide the sliding of the vertical section (130). The rail section (120) may have a length in the Y-axis direction.

[0037] The vertical section (130) includes a frame (131), a motor (133), and a column (135) to guide the vertical movement of the robot (110) and to move along the rail section (120).

[0038] A robot (110) may be movably provided on a frame (131) or column (135). For example, the frame (131) or column (135) may be provided with a rail structure identical or similar to the rail section (120) to guide the vertical movement of the robot (110). However, this is not limited thereto, and known technologies may be applied.

[0039] The frame (131) may have a square shape and may be slidably provided on the rail portion (120). For example, the frame (131) may be provided with a drive belt (not shown) and / or a gear module (e.g., a rack gear and a pinion gear, not shown).

[0040] The motor (133) is installed on the frame (131) and can move the frame (131) in the Y-axis direction by transmitting rotational force to the drive belt and / or gear module of the frame (131).

[0041] The column (135) may be provided on both sides in the Y-axis direction of the frame (131). A space may be formed inside the column (135). That is, a fluid passage may be formed in the column (135). A plurality of fans (not shown) for forming airflow may be provided inside the column (135), and a plurality of holes (135H) may be formed adjacent to the fans in the column (135). The plurality of holes (135H) may be spaced apart from each other in the vertical direction, and the air from the index module (20) may be introduced into the column (135) through the plurality of holes (135H). The introduction of the air from the index module (20) into the column (135) may be achieved by the airflow formed by the fan (137) of the vertical section (130). A downward airflow may be formed by the fan and exhausted to the outside through the exhaust unit.

[0042] The duct section (140) is connected to the vertical section (130) and can move together with the vertical section (130), and may have a tube structure extending in the X-axis direction in the horizontal direction. This is to ensure that the outlet of the duct section (140) is located in the exhaust hole of the housing (25).

[0043] The robot (110) of the substrate transfer unit (100) will be described in detail below with reference to the drawings.

[0044] FIG. 3 is a plan view illustrating a robot of a substrate transfer unit according to the first embodiment of the present invention, FIG. 4 is a drawing illustrating a substrate placed in a fixed position in cross-section II of FIG. 3, FIG. 5 is a plan view illustrating a state in which a substrate is moved away from the fixed position and to the pusher guide side in the robot of the substrate transfer unit according to the first embodiment of the present invention, and FIG. 6 is a plan view illustrating a state in which a substrate is moved away from the fixed position and to the opposite side of the pusher guide in the robot of the substrate transfer unit according to the first embodiment of the present invention.

[0045] Referring to FIGS. 3 to 6, the robot (110) includes a hand (111) and a base part (115), and may further include a sensor part (112), a pressure sensor (113), a temperature sensor (114) and a pusher guide (117).

[0046] The hand (111) may be provided with a shape in which one side is open and the center is open in the vertical direction, and may be provided to support the bottom surface of the substrate (W). That is, the upper surface of the hand (111) is provided as a seating surface on which the substrate (W) is placed, and may have a shape such as, for example, a 'V' or a 'U'. However, it is not limited thereto, and various variations are possible, such as being provided as a polygonal (e.g., square) plate.

[0047] The hand (111) may be provided with a first anti-detachment projection (111A) and a second anti-detachment projection (111B) on the mounting surface (upper surface) where the substrate (W) is mounted.

[0048] The first anti-detachment projection (111A) can prevent the substrate on the seating surface of the hand (111) from detaching from the hand (111) when the substrate is transported. To this end, the first anti-detachment projection (111A) can be installed in front of the seating surface of the hand (111) and can have a structure protruding upward.

[0049] The second anti-detachment projection (111B) can prevent the substrate (W) on the seating surface of the hand (111) from detaching from the hand (111) when the substrate is transported. To this end, the second anti-detachment projection (111B) can be installed at the rear of the seating surface of the hand (111).

[0050] In other words, the substrate (W) can be prevented from coming off by the first anti-detachment projection (111A) at the front and the second anti-detachment projection (111B) at the rear.

[0051] The hand (111) can be slid horizontally along the pusher guide (117). For the sliding motion, the direction of movement of the hand (111) can be guided by the pusher guide (117). The hand (111) can be slid by the operation of the pusher (116).

[0052] In this embodiment, the hand (111) can move toward the pusher guide (117) to move the substrate (W) toward the pusher guide (117) when the first sensor (112A) and the second sensor (112B) detect the substrate (W) together (see FIG. 6). At this time, the hand (111) can move to a range where the substrate (W) is not detected by the second sensor (112B) (see FIG. 4).

[0053] In addition, when pressure exceeding a set value is detected by the pressure sensor (113) (see FIG. 5), the hand (111) can move to the opposite side of the pusher guide (117) to adjust the position of the substrate (W), thereby preventing damage to the substrate (W) caused by pressure that may occur when the substrate (W) moves excessively toward the pusher guide (117).

[0054] That is, the hand (111) can operate so that the substrate (W) is placed in the correct position by preventing the substrate (W) from shifting to the front of the correct position by the determination of the sensor unit (112) and by preventing the substrate (W) from shifting to the rear of the correct position by the determination of the pressure sensor (113).

[0055] The sensor unit (112) can detect a substrate (W) positioned on the hand (111). The sensor unit (112) is provided in multiple units to detect whether the substrate (W) is positioned correctly on the seating surface of the hand (111), or whether it is misaligned or deviated from the correct position.

[0056] For example, the sensor unit (112) may include a first sensor (112A) and a second sensor (112B).

[0057] The first sensor (112A) can be provided on the base portion (115) on the inner side (to the right of 'A1' based on FIG. 4) based on the circumference of the substrate (W) in the correct position.

[0058] One or more second sensors (112B) may be provided on the outer side (left of 'A1' in FIG. 4) based on the circumference of the substrate (W) in the correct position. If multiple second sensors (112B) are provided, they may be arranged in a line in a direction perpendicular to the tangent of the circumference of the substrate (W) or in the length direction of the hand (111). However, they are not limited thereto.

[0059] The sensor unit (112) can detect the state in which the substrate (W) is placed and / or the position of the substrate (W) by using the first sensor (112A) and the second sensor (112B) to detect the area around the edge of the substrate (W) placed on the hand (111).

[0060] When the first sensor (112A) detects the substrate (W), it can be determined that the substrate (W) is placed on the hand (111). If the substrate (W) is incorrectly placed on the seating surface of the hand (111), the second sensor (112B) can detect the substrate (W) in addition to the first sensor (112A).

[0061] That is, if the second sensor (112B) detects the substrate (W) simultaneously with the first sensor (112A), it can be detected that the substrate (W) has deviated from its proper position. This is because the second sensor (112B) is located on the outer circumference of the substrate (W) in its proper position.

[0062] In other words, the first sensor (112A), located on the inner side of the circumference of the substrate (W), detects the substrate (W) when it is placed in the correct position, and the second sensor (112B), located on the outer side of the circumference of the substrate (W) in the correct position, cannot detect the substrate (W) placed in the correct position, but if the second sensor (112B) detects the substrate (W), it can be determined that the substrate (W) has deviated from the correct position.

[0063] For example, the first sensor (112A) and the second sensor (112B) of the sensor unit (112) may be provided as a reflective sensor device or a transmissive sensor device as a sensor device for detecting the presence of the substrate (W). However, they are not limited thereto.

[0064] For example, a reflective sensor device can detect the presence of a substrate (W) by projecting light onto the surface of a substrate (W) and detecting the reflected light reflected from the surface of the substrate (W). If the substrate (W) is present, the presence of the substrate (W) is detected by the light being reflected from the reflective surface of the substrate (W), and if the substrate (W) is not present, the light is not reflected, so the absence of the substrate (W) can be detected.

[0065] A transmissive sensor device may consist of a light-emitting part and a light-receiving part. The light-emitting part projects light toward the light-receiving part, and if a substrate (W) exists between the light-emitting part and the light-receiving part, the light does not reach the light-receiving part, thereby detecting the presence of the substrate (W).

[0066] Using these sensor units (112), the robot (110) can detect the presence and / or location of the substrate (W), and specify the location of the substrate (W) by means of the first sensor (112A) and the second sensor (112B) arranged in a row, thereby allowing the operation of the hand (111) to be finely controlled.

[0067] A pressure sensor (113) is provided between the first part (117A) and the second part (117B) to detect pressure.

[0068] A pressure sensor (113) may be provided to detect whether pressure is applied to a substrate (W) placed on the hand (111) in order to prevent damage to the substrate (W).

[0069] These pressure sensors (113) are provided in the pusher guide (117) to detect the pressure generated on the substrate (W) during the operation of the pusher (116), thereby allowing the operation of the hand (111) to be controlled so that the pressure does not exceed a preset pressure that is at risk of damage.

[0070] For example, if the edge of the substrate (W) is not placed in the correct position (see FIG. 4, see identification symbol 'A1') but is pushed (it may be moved by a distance of 'D1'), the pressure sensor (113) may be pressed. At this time, pressure may be detected by the pressure sensor (113).

[0071] A temperature sensor (114) may be provided in the base portion (115) and may detect the temperature of the substrate (W) or the ambient temperature of the substrate (W).

[0072] It may be provided to consider the compressive force applied to the substrate (W) (pressure generated on the aforementioned substrate (W)) in consideration of thermal expansion according to the temperature of the substrate (W).

[0073] For example, in a process using heat, the temperature sensor (114) can be used to detect the temperature of the substrate (W), and the operation of the hand (111) can be controlled so that it receives a smaller compressive force compared to the substrate (W) at room temperature.

[0074] The base portion (115) can support the hand (111). The hand (111) can be coupled to the base portion (115) so as to be movable in the forward and backward direction (see FIG. 1, X-axis direction). For example, a pusher (116) can be installed on the base portion (115).

[0075] The pusher (116) can move the hand (111) forward or backward. The pusher (116) may be provided to move linearly in the forward-backward direction (X-axis direction), which is the direction of movement of the hand (111), and may be provided as a cylinder, for example. However, it is not limited thereto.

[0076] The pusher guide (117) is configured to guide the movement direction of the hand (111), and may be provided with a first part (117A) and a second part (117B) that is arranged in a longitudinal line with the first part (117A).

[0077] For example, the first part (117A) may have a pair of bar shapes. A hand (111) is provided between the pair of bars to guide the direction of movement of the hand (111).

[0078] The second part (117B) may be provided at the end of the first part (117A). The second part (117B) may be coupled to the first part (117A) and may be provided so as to be movable toward the first part (117A) or have its shape deformed by applying pressure.

[0079] The second part (117B) may be provided with a pressure sensor (113) between it and the first part (117A), and may be configured in various structures in which pressure is transmitted to the pressure sensor (113). For example, the second part (117B) may have a structure in which it is connected to the end of the first part (117A) via an elastic part (e.g., a leaf spring, a coil spring, etc., not shown) so as to be elastically pressurized.

[0080] Although embodiments of the present invention have been described above with reference to the attached drawings, those skilled in the art will understand that the present invention may be implemented in other specific forms without changing its technical concept or essential features. Therefore, the embodiments described above should be understood as illustrative in all respects and not restrictive. Explanation of the symbols

[0081] 1: Substrate processing device 100: Substrate transfer unit

Claims

Claim 1 A substrate transfer unit comprising: a hand that supports a substrate and includes a first anti-detachment projection provided at the front of a seating surface on which the substrate is placed; a base portion on which a pusher is installed to move the hand forward or backward; a pusher guide provided with a first part and a second part arranged in a longitudinal line with respect to the first part to guide the direction of movement of the hand; a pressure sensor provided between the first part and the second part to detect pressure; and a sensor portion that detects the substrate and includes a first sensor provided on the base portion inwardly with respect to the circumference of the substrate in a fixed position, wherein when pressure exceeding a set value is detected by the pressure sensor, the hand moves to the opposite side of the pusher guide to adjust the position of the substrate, and the sensor portion further includes a plurality of second sensors provided in a row on the outer side with respect to the circumference of the substrate in a fixed position, wherein when the first sensor and the second sensor detect the substrate together, the hand moves toward the pusher guide to move the substrate toward the pusher guide. Claim 2 delete Claim 3 delete Claim 4 In claim 1, the hand is a substrate transfer unit that moves to a range where the substrate is not detected by the second sensor. Claim 5 The apparatus comprises an index module; a processing module in which a substrate is introduced from the index module and processed; and a return chamber for returning the substrate between the processing modules, wherein at least one of the index module or the return chamber includes a substrate transfer unit, wherein the substrate transfer unit includes a hand that supports the substrate and includes a first anti-detachment projection provided in front of a mounting surface on which the substrate is placed; a base part on which a pusher is installed to move the hand forward or backward; a pusher guide provided with a first part and a second part arranged in a longitudinal line with the first part to guide the direction of movement of the hand; and a pressure sensor provided between the first part and the second part to detect pressure. A substrate processing device comprising: a sensor unit that detects the substrate and includes a first sensor provided on the base unit inwardly based on the circumference of the substrate in a fixed position; when pressure exceeding a set value is detected by the pressure sensor, the hand moves to the opposite side of the pusher guide to adjust the position of the substrate; the sensor unit further includes a plurality of second sensors provided in a row on the outer side in relation to the circumference of the substrate in a fixed position, and when the first sensor and the second sensor detect the substrate together, the hand moves toward the pusher guide to move the substrate toward the pusher guide. Claim 6 delete Claim 7 delete Claim 8 In paragraph 5, the above hand is a substrate processing device that moves to a range where the substrate is not detected by the second sensor. Claim 9 In paragraph 5, the substrate transfer unit is a substrate processing device provided in the index module. Claim 10 A hand that supports a substrate and includes a first anti-detachment projection provided at the front of a mounting surface on which the substrate is placed and a second anti-detachment projection provided at the rear of the mounting surface; a base part on which a pusher is installed to move the hand forward or backward; a pusher guide provided with a first part and a second part arranged in a longitudinal line with respect to the first part, and guiding the direction of movement of the hand; a sensor part that detects the substrate and includes a first sensor provided on the inner side based on the circumference of the substrate at a fixed position on the base part and a plurality of second sensors provided in a line on the outer side based on the circumference of the substrate at a fixed position; and a pressure sensor provided between the first part and the second part to detect pressure. A substrate transfer unit comprising a temperature sensor provided in the base portion and detecting the temperature of the substrate or the ambient temperature of the substrate, wherein when pressure is detected above a set value by the pressure sensor, the hand moves to the opposite side of the pusher guide to adjust the position of the substrate, or when the first sensor and the second sensor detect the substrate together, the hand moves toward the pusher guide to move the substrate toward the pusher guide, but moves to a range where the substrate is not detected by the second sensor.

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