Method for matching relation between a plurality of shapes in shape array matching and apparatus for using the method

Abstract

A method for matching relationships between multiple shapes in shape array matching and an apparatus using such a method are disclosed. The shape array matching method may include the step of a shape array matching unit of a shape array matching apparatus performing a first matching based on distance relationships of elements on an array considering distance information between elements to determine a first candidate array, and the step of a shape array matching unit performing a second matching based on rotation relationships of elements on an array considering rotation angle information between elements to determine a second candidate array among the first candidate arrays.

Description

Technology Field

[0001] The present invention relates to a method for matching relationships between a plurality of shapes in shape array matching and an apparatus using such a method. Background Technology

[0002] Conventional pattern matching methods are performed by learning all elements within a learned area as a single pattern. Therefore, if issues such as unavoidable shifting or rotation of some elements constituting the pattern occur, it is difficult to obtain the intended results.

[0003] In other words, existing pattern matching methods struggle to achieve accurate pattern matching when there is an array of multiple objects and positional shifting or rotation occurs among the elements constituting the pattern. Furthermore, pattern matching methods cannot obtain information regarding ordered pairs or the relationships between arrays of multiple rectangles.

[0004] Due to these limitations, general matching algorithms cannot handle positional distortion of elements in an array caused by shaking of each element, or state changes caused by rotation of elements in an array of multiple rectangular sets, such as an array of devices on a semiconductor substrate.

[0005] Therefore, research is needed on matching algorithms capable of determining dependent relationships between all elements in an array and independent changes that may occur in each element. The problem to be solved

[0006] The present invention aims to solve all of the aforementioned problems.

[0007] In addition, the present invention aims to enable the determination of whether a match exists by considering the dependent relationships between all elements in an array and the independent relationships that may occur to each of all elements in the array.

[0008] In addition, the present invention aims to enable a response to issues that may occur in semiconductor processes, such as positional errors of some elements on a substrate and distortion caused by rotation. means of solving the problem

[0009] A representative configuration of the present invention for achieving the above objective is as follows.

[0010] According to one embodiment of the present invention, a shape array matching method may include the step of a shape array matching unit of a shape array matching device performing a first matching based on the distance relationship of elements on an array considering distance information between elements to determine a first candidate array, and the step of the shape array matching unit performing a second matching based on the rotation relationship of elements on an array considering rotation angle information between elements to determine a second candidate array among the first candidate arrays.

[0011] Meanwhile, the reference array determining unit of the shape array matching device can determine distance information between elements and rotation angle information between elements as dependent information between a plurality of elements existing on the reference array.

[0012] Additionally, the reference array determination unit determines, as independent information for each of the plurality of elements existing on the reference array, the maximum distance information between a reference element and each of the elements excluding the reference element among the plurality of elements as reference array feature information, and the distance information between elements includes information regarding the distance between the reference element and the elements excluding the reference element among the plurality of elements, and the rotation angle information between elements may include information regarding the angle between a rotation judgment line and a connection line.

[0013] According to another embodiment of the present invention, a shape array matching device for performing shape array matching includes a shape array matching unit, and the shape array matching unit may include the step of determining a first candidate array by performing a first matching based on the distance relationship of elements on an array considering distance information between elements, and determining a second candidate array among the first candidate arrays by performing a second matching based on the rotation relationship of elements on an array considering rotation angle information between elements.

[0014] Meanwhile, the reference array determining unit of the shape array matching device can determine distance information between elements and rotation angle information between elements as dependent information between a plurality of elements existing on the reference array.

[0015] Additionally, the reference array determination unit determines, as independent information for each of the plurality of elements existing on the reference array, the maximum distance information between a reference element and each of the elements excluding the reference element among the plurality of elements as reference array feature information, and the distance information between elements includes information regarding the distance between the reference element and the elements excluding the reference element among the plurality of elements, and the rotation angle information between elements may include information regarding the angle between a rotation judgment line and a connection line. Effects of the invention

[0016] According to the present invention, it is possible to determine whether a match exists by considering the dependent relationships between all elements in the array and the independent relationships that may occur to each of all elements in the array.

[0017] In addition, according to the present invention, it is possible to address issues that may occur in semiconductor processes, such as positional errors of some elements on a substrate and distortion caused by rotation. Brief explanation of the drawing

[0018] FIG. 1 is a conceptual diagram showing a shape array matching device that performs shape array matching according to an embodiment of the present invention. FIG. 2 is a conceptual diagram showing the operation of a reference array determination unit according to an embodiment of the present invention. FIG. 3 is a conceptual diagram showing the operation of a reference array determination unit according to an embodiment of the present invention. FIGS. 4 and FIGS. 5 are conceptual diagrams illustrating the operation of a target array determination unit according to an embodiment of the present invention. FIGS. 6 and 7 are conceptual diagrams illustrating the operation of a shape array matching unit according to an embodiment of the present invention. FIG. 8 is a conceptual diagram showing the operation of a shape array matching unit according to an embodiment of the present invention. FIG. 9 is a conceptual diagram showing the operation of fitting a final matching array and the final matching result according to an embodiment of the present invention. Specific details for implementing the invention

[0019] The following detailed description of the invention refers to the accompanying drawings, which illustrate specific embodiments in which the invention may be practiced. These embodiments are described in sufficient detail to enable those skilled in the art to practice the invention. It should be understood that various embodiments of the invention are different but need not be mutually exclusive. For example, specific shapes, structures, and characteristics described herein may be modified from one embodiment to another without departing from the spirit and scope of the invention. It should also be understood that the location or arrangement of individual components within each embodiment may be modified without departing from the spirit and scope of the invention. Accordingly, the following detailed description is not meant to be limiting, and the scope of the invention should be understood to encompass the scope claimed by the claims and all equivalents thereof. Similar reference numerals in the drawings indicate identical or similar components across various aspects.

[0020] Hereinafter, in order to enable a person skilled in the art to easily practice the present invention, various preferred embodiments of the present invention will be described in detail with reference to the attached drawings.

[0022] Conventional pattern matching technology makes it difficult to determine whether a match is valid when positional errors or distortions caused by rotation occur in some elements constituting the pattern. Positional errors and distortions caused by rotation of elements forming the array (i.e., positional errors and distortions caused by rotation of circuit components on the substrate) are issues that can occur in semiconductor processes, but they cannot be addressed by general pattern matching methods.

[0023] The shape array matching method according to an embodiment of the present invention can determine whether a reference array and a target array are matched by considering the dependent relationships between all elements on the array (or array) and the independent relationships that may occur to each of all elements on the array. That is, the determination of defects in circuit elements on a substrate that may occur in a semiconductor process, such as positional errors of some elements on the array or distortion caused by rotation, can be performed accurately.

[0024] Hereinafter, for the convenience of explanation, it is assumed in the present invention that the elements constituting the array are rectangles. However, elements of various shapes other than rectangles may also constitute the array, and such embodiments may also be included within the scope of the present invention.

[0026] FIG. 1 is a conceptual diagram showing a shape array matching device that performs shape array matching according to an embodiment of the present invention.

[0027] Figure 1 discloses a shape array matching device that performs matching between a reference array and a target array.

[0028] Referring to FIG. 1, the shape array matching device may include a reference array determining unit (100), a target array determining unit (110), a shape array matching unit (120), and a processor (130).

[0029] A reference array determination unit (100) can be implemented to determine the characteristics of a reference array. The reference array determination unit (100) can determine dependent information between multiple elements constituting the array and independent information for each of the multiple elements constituting the array. Specifically, the reference array determination unit (100) can determine 1) positional relationship between elements (distance information between centers of gravity), 2) positional relationship between elements (rotation information between elements), which are dependent information between elements, and 3) maximum distance information of each element based on a reference element, which are independent information of elements, as reference array characteristic information.

[0030] The target array determination unit (110) can be implemented to determine the target array.

[0031] The target array determination unit (110) can determine the target array through image preprocessing, which retains only meaningful objects and removes the rest from the target image that captures the object to be compared prior to matching with the reference array.

[0032] The shape array matching unit (120) can extract candidate arrays from the target array and determine the final matching array that is ultimately matched with the reference array. More specifically, the shape array matching unit (120) can determine the final matching array that is matched with the reference array on the target array through first-order matching based on the distance relationship of elements on the array, second-order matching based on the rotation relationship of elements on the array, and third-order matching based on the size of elements.

[0033] A processor (130) may be implemented to control the operation of a reference array determination unit (100), a target array determination unit (110), and a shape array matching unit (120).

[0035] FIG. 2 is a conceptual diagram showing the operation of a reference array determination unit according to an embodiment of the present invention.

[0036] In FIG. 2, a method for determining a reference array is disclosed in which a reference array determining unit determines a reference array.

[0037] Referring to FIG. 2, a method for determining a reference array (200) which is a criterion for matching arrays is disclosed.

[0038] The reference array determination unit can determine the reference array (200) based on distance information and rotation angle information between multiple elements included in the reference array (200) as dependent information, and size information of each of the multiple elements as independent information.

[0039] Among the multiple elements included in the reference array (200), the reference element (210) and the rotation reference element (230) can be determined.

[0040] The reference array determination unit can determine distance information between multiple elements and rotation angle information between multiple elements to determine the positional relationship between elements.

[0041] 1) Positional relationship between elements - distance information between the centers of gravity of each of the multiple elements (220)

[0042] For the center of gravity of each of the multiple elements, the distance between the reference element (210) and other elements on the array can be determined based on the reference element (210). That is, D, which is distance information for the reference element (210) and the nth element excluding the reference element (210). 0,n Information {D 0,1 , D 0,2 , ..., D 0,n This can be determined as distance information between the centers of gravity of each of the multiple elements.

[0043] D, which is the distance between all elements, such as the distance between the reference element (210) and the nth element, as well as the distance between the mth element and the nth element. m,n It is also possible to obtain it. However, there is no difference in matching accuracy compared to using only the information minimized as above, and considering the speed aspect, only information about the distance between the reference element (210) and the nth element can be used.

[0044] 2) Positional relationship between elements - Rotation angle information between multiple elements (240)

[0045] Angle information of a connecting line (260) connecting the center of gravity of the rotation reference element (230) and the remaining other elements on the array can be determined based on a rotation judgment line (250) connecting the center of gravity of the reference element (210) and the rotation reference element (230).

[0046] That is, A, which is angle information between the rotation judgment line (250) based on the reference element (210) and the rotation reference element (230), and the connection line (260) based on the rotation reference element (230) and the remaining nth element. 01,n Information {A 01,2 , A 01,3 , ..., A 01,n This can be determined as rotation angle information between multiple elements.

[0047] Likewise, A is the distance between all squares of the nth square, the mth square, and the lth square. mn,l second It can also be obtained as rotation angle information between multiple elements. However, regarding matching accuracy, A 01,n There is no difference from using only information, and considering the speed aspect, A 01,n Only information can be used.

[0048] If there are two elements constituting the array, the relationship between the three elements is omitted and only the relative angle difference between the two elements is used to specify the reference array (200).

[0049] In FIG. 2, only dependent characteristic information of the reference array (200) is determined through the positional relationship between elements. For independent characteristic information of each of the multiple elements on the array, the reference array determination unit can determine information about the size of each of the multiple elements included in the reference array (200).

[0051] FIG. 3 is a conceptual diagram showing the operation of a reference array determination unit according to an embodiment of the present invention.

[0052] FIG. 3 discloses a method in which a reference array determination unit determines a reference array. Size information of each of the plurality of elements included in the reference array can be determined as independent characteristic information of each of the plurality of elements.

[0053] Referring to FIG. 3, the reference array determination unit can determine the maximum distance between the reference element (300) and each element as independent characteristic information of each of the plurality of elements included in the array, and the size information of each of the plurality of elements can be determined based on the maximum distance between the reference element (300) and each element.

[0054] MD, which is information about the maximum distance between edges for the reference element (300) and the nth element 0,n This can be determined as size information for each of these multiple elements. MD 0,n is {MD 0,1, MD 0,2, ..., MD 0,n It can be.

[0055] The maximum distance between the reference element (300) and each element is also the MD, which is the maximum edge distance between the reference element (300) and all elements of the m-th element and the n-th element, excluding the n-th element. m,nThis could be decided. However, regarding accuracy, MD minimized as above 0,n There is no difference from using only information, and considering the speed aspect, MD 0,n Information can be used.

[0056] The reference array determination unit can determine 1) positional relationship between elements (distance information between centers of gravity), 2) positional relationship between elements (rotation angle information between elements), which are dependent information between elements, and 3) maximum distance information of each element based on a reference element (or element size information), which are independent information of the elements constituting the array, as reference array feature information.

[0057] Matching between the reference array and the target array can be performed based on the feature information of the reference array.

[0058] Reference array feature information may be an example where the elements constituting the array are rectangles. If the shape of the elements changes, such as to a circle or ellipse, it may be replaced with a centroid that fits the shape of the elements. Additionally, the maximum distance of each element relative to the reference element may be determined by treating it equally based on the minimum enclosing rectangle for the shape of the elements, or by defining a maximum distance that fits the shape.

[0060] FIGS. 4 and FIGS. 5 are conceptual diagrams illustrating the operation of a target array determination unit according to an embodiment of the present invention.

[0061] In FIGS. 4 and 5, the operation of the target array determination unit is disclosed. The image preprocessing for determining the target array disclosed below is one example, and the target array may be determined based on various other methods.

[0062] Referring to FIG. 4, the target array determination unit can perform image preprocessing to determine the target array by retaining only meaningful objects on the target image and removing the rest prior to matching with the reference array.

[0063] Image preprocessing can be changed depending on the state of the image. Methods for preserving meaningful objects in an image can be handled using various sequences and image processing algorithms.

[0064] 1) Convolution Gaussian kernel 5x5 and morphology median 5x5

[0065] Processing to correct unnecessarily outlier pixel values ​​can be performed using a Gaussian filter and a median filter.

[0066] 2) Divide Sobel filter

[0067] To extract boundaries, the absolute values ​​of the results of the Sobel filter X and Y are summed, and since the value in an 8-bit image can exceed 255, the sum can be divided by 8 to distinguish the boundary strength of the boundaries.

[0068] 3) Operation multiply

[0069] For the boundaries obtained through the Sobel filter, all pixel values ​​are multiplied by 2 to produce a sharper difference between noise and boundaries.

[0070] 4) Otsu threshold

[0071] With the intensity between noise and boundaries separated as much as possible, an appropriate threshold is found to separate them as objects, and through this, the objects and background within the image are binarized by finally processing them with the Otsu threshold to handle the absolute threshold.

[0072] For the image classified through image preprocessing based on the procedures of 1) to 4) above, the location and information of each object are obtained through connected pixels.

[0073] Referring to Fig. 5, an object can be obtained by connecting connected pixels based on blobs for an image obtained through an Otsu threshold, and the contour of the object can be obtained.

[0074] The convex hull of each object can be determined based on the contour of each object. The minimum enclosing rectangle can be determined based on the convex hull. By using the convex hull and aligning the i-th convex point and the i+1-th convex point to 0 degrees, a rectangle that minimizes the boundary rectangle can be obtained.

[0075] Additionally, the target array determination unit can determine the filtered elements as candidate elements through reference size filtering, which removes the corresponding image elements from the image when the size of the smallest element among the elements of the reference array is less than or equal to N% (where N = 50) based on the elements of the reference array, and determine the target array (500) containing the candidate elements.

[0076] At the bottom of Fig. 5, a target array (500) determined through the procedure described above in the target array determination unit is disclosed.

[0078] FIGS. 6 and 7 are conceptual diagrams illustrating the operation of a shape array matching unit according to an embodiment of the present invention.

[0079] In FIGS. 6 and 7, the shape array matching operation of the shape array matching unit is initiated.

[0080] Referring to FIG. 6, the shape array matching unit can perform matching between a reference array and a target array.

[0081] 1) Primary matching based on the distance relationship of elements on the array (600)

[0082] It is possible to search for whether there is a distance similar to the first distance between the centroids of the reference element (0) of the reference array and the next element (1) of the array order pair among the distances between the centroids of multiple candidate elements on the target array.

[0083] The criteria for similar distances can be determined by considering the preprocessing size error of elements resulting from image preprocessing performed to determine the target array, the actual size error of elements, and the positional error resulting from the displacement of elements. For example, generally, to automate the process, a search can be performed with an allowable size error of about 10–20% for each element size.

[0084] The above process is performed for each candidate element constituting the target array to search for whether there is a distance similar to the first distance between the reference element (0) of the reference array and the next element (1) of the array order pair among the distances between the centroids of multiple candidate elements on the target array.

[0085] If there is a distance similar to the first distance among the distances between the centroids of multiple candidate elements on the target array, the remaining M-2 candidate elements on the target array can be searched for whether there is a distance similar to the second distance between the centroid of the reference element (0) on the reference array and the element (2) following the element (1) of the array order pair.

[0086] That is, D, which is distance information between the reference element and the nth element on the reference array. 0,n Information {D 0,1 , D 0,2 , ..., D 0,n The nth distance based on} and among the candidate elements located on the target array, {D 0,1 , D 0,2 , ..., D 0,n An array with a distance similar to} can be determined as the first candidate array.

[0087] In the above manner, multiple candidate elements on a target array that satisfy the first to nth distances, which are the distances between a reference element on a reference array and an element of an array order pair, can be searched. Through this method, among the arrays of multiple candidate elements on the target array, a first candidate array similar to the distance between multiple elements on the reference array can be searched.

[0088] By exploring the distance relationships between elements in the array and considering the distance between each of the reference element and the N-1 elements excluding the reference element in the reference array, a primary candidate array similar to the reference array can be determined among the combinations of multiple candidate elements in the target array.

[0089] 2) Secondary matching based on rotation relationship of elements on the array (700)

[0090] A first-order candidate array obtained based on the distance relationship between elements in an array can include all elements included in the locus of a circle as long as the distance centered on the reference element is satisfied. Therefore, it is necessary to determine the rotation relationship between the elements constituting the reference array and the first-order candidate array.

[0091] For the primary candidate array obtained by considering the distance relationship between elements on the array, a search that additionally considers the rotation relationship can be performed.

[0092] By comparing the rotation angle between candidate elements on the first candidate array with the rotation angle between elements on the reference array, a second candidate array with high similarity to the rotation angle between elements on the reference array among at least one first candidate array can be determined.

[0093] Whether there exists an angle similar to the first angle formed by the reference element on the reference array and the element (1) and element (2) on the array order pair can be searched on at least one primary candidate array.

[0094] Next, whether there exists an angle similar to the second angle formed by the reference element on the reference array and the element (1) and element (3) on the array order pair can be searched on at least one primary candidate array.

[0095] In other words, A is the angle information between the rotation judgment line based on the reference element and the rotation reference element, and the connection line based on the rotation reference element and the remaining n-th element. 01,n Information {A 01,2 , A 01,3 , ..., A 01,n It can be determined whether an angle similar to} exists on the primary candidate array. Among the primary candidate arrays, within the allowable angle error, {A 01,2 , A 01,3 , ..., A 01,nA candidate array with an angle similar to} can be determined as a second candidate array.

[0096] The allowable angle error can be determined by considering the range change based on the size of each element on the reference array, the angle difference caused by the displacement of the element's position, etc. For example, to automate, the allowable angle error can be specified to be approximately 5 to 10 degrees.

[0097] If there are 2 elements constituting the reference array instead of 3 or more, the procedure for determining the rotation relationship of the elements on the array may not be performed.

[0099] FIG. 8 is a conceptual diagram showing the operation of a shape array matching unit according to an embodiment of the present invention.

[0100] In FIG. 8, the shape array matching operation of the shape array matching unit is initiated.

[0101] Referring to FIG. 8, a second candidate array can be determined after a first matching based on the distance relationship of elements on the array and a second matching based on the rotation relationship of elements on the array. After determining the second candidate array, a third matching procedure (800) based on the size of elements on the second candidate array can be performed.

[0102] It can be determined that the positional relationships between the elements constituting the reference array are similar in the second candidate array. However, the determination of whether the size of the elements constituting the reference array and the size of the candidate elements constituting the second candidate array are the same can be performed by first-order matching based on the distance relationship of the elements on the array and second-order matching based on the rotation relationship of the elements on the array.

[0103] Accordingly, a third matching procedure can be performed to compare the sizes of the elements. A first maximum distance between a reference element and a remaining element on a reference array can be extracted, and a first candidate maximum distance between candidate elements on at least one second candidate array can be extracted. The size of an element on the reference array and the size of a candidate element on the second candidate array can be compared through the similarity between the first maximum distance and the first candidate maximum distance. In this way, the nth maximum distance between a reference element and a remaining element on a reference array can be extracted, and the nth candidate maximum distance between candidate elements on at least one second candidate array can be extracted, thereby allowing for a comparison of the sizes of the elements.

[0104] The criteria for similar sizes can be determined by considering the preprocessed size error of each element due to image preprocessing, the actual size error of each element, and the positional error due to positional displacement of each element. Generally, for automation, the search can proceed with an allowable size error of about 10–20% for each element size.

[0105] Candidate elements in the second-order candidate array may be in the same state as the elements in the reference array, but in some cases, certain elements may be rotated. In such cases, the corresponding elements in the reference array can be rotated by the approximate amount of rotation of the elements in the second-order candidate array to handle the maximum distance between edges accordingly. The degree of rotation of the elements in the second-order candidate array can be obtained during the process of finding the minimum enclosing rectangle.

[0106] When processed as described above, valid matching is possible by reflecting not only the size of the reference array but also the distance between the edges of the elements due to their rotated state, thereby incorporating various rotations of each element.

[0107] A final matching array that is finally matched to the reference array can be determined through a third matching procedure (800) based on the size of the elements as described above.

[0108] For convenience of explanation, the first matching based on the distance relationship of elements in the array, the second matching based on the rotation relationship of elements in the array, and the third matching based on the size of elements (800) were explained assuming that the elements are squares. However, by utilizing the centroid of the elements and the defined maximum distance between elements, the method can be extended not only to cases where the elements are simply squares, but also to various other shapes.

[0110] FIG. 9 is a conceptual diagram showing the operation of fitting a final matching array and the final matching result according to an embodiment of the present invention.

[0111] Referring to the top of Fig. 9, the elements included in the final matching array may be a set of pixels. A fitting procedure may be performed for the set of pixels by considering the geometric characteristics of the elements. For example, an enclosing rectangle corresponding to the element, which is a set of pixels, may be estimated, and an outline may be estimated based on the boundaries of the pixels.

[0112] Referring to the bottom of Fig. 9, not only a final matching array that is very similar to the reference array in the image as shown in the left figure, but also a final matching array in which some of the elements are distorted as shown in the right figure can be matched by considering the elements for element rotation.

[0114] The embodiments according to the present invention described above may be implemented in the form of program instructions that can be executed through various computer components and recorded on a computer-readable recording medium. The computer-readable recording medium may include program instructions, data files, data structures, etc., either individually or in combination. The program instructions recorded on the computer-readable recording medium may be those specifically designed and configured for the present invention or those known and available to those skilled in the art of computer software. Examples of computer-readable recording media include magnetic media such as hard disks, floppy disks, and magnetic tapes; optical recording media such as CD-ROMs and DVDs; magneto-optical media such as floptical disks; and hardware devices specifically configured to store and execute program instructions, such as ROM, RAM, and flash memory. Examples of program instructions include machine code, such as that generated by a compiler, as well as high-level language code that can be executed by a computer using an interpreter, etc. Hardware devices may be modified into one or more software modules to perform processing according to the present invention, and vice versa.

[0115] Although the present invention has been described above with reference to specific details such as specific components, limited embodiments, and drawings, this is provided only to aid in a more comprehensive understanding of the invention, and the invention is not limited to the above embodiments, and a person skilled in the art to which the invention belongs can make various modifications and changes from this description.

[0116] Accordingly, the scope of the present invention should not be limited to the embodiments described above, and all scopes equivalent to or equivalently modified from the claims set forth below, as well as the claims set forth below, shall be considered to fall within the scope of the concept of the present invention.

Claims

Claim 1 A shape array matching method comprising: a step in which a shape array matching unit of a shape array matching device performs a first matching based on the distance relationship of elements on an array considering distance information between elements to determine a first candidate array; a step in which the shape array matching unit performs a second matching based on the rotation relationship of elements on an array considering rotation angle information between elements to determine a second candidate array among the first candidate arrays; and a step in which a reference array determining unit of the shape array matching device determines, as independent information of each of a plurality of elements existing on a reference array, maximum distance information between a reference element and each of the elements excluding the reference element among the plurality of elements as reference array feature information, wherein the distance information between elements includes information on the distance between the reference element and the elements excluding the reference element among the plurality of elements, and the rotation angle information between elements includes information on the angle between a rotation judgment line and a connection line. Claim 2 A shape array matching method according to claim 1, characterized in that the reference array determining unit determines distance information between elements and rotation angle information between elements as dependent information between a plurality of elements existing on the reference array. Claim 3 delete Claim 4 A shape array matching device for performing shape array matching comprises: a shape array matching unit that determines a first candidate array by performing a first matching based on the distance relationship of elements on an array considering distance information between elements, and determines a second candidate array among the first candidate arrays by performing a second matching based on the rotation relationship of elements on an array considering rotation angle information between elements; and a reference array determination unit that determines, as reference array feature information, maximum distance information between a reference element and each of the remaining elements excluding the reference element among the plurality of elements as independent information of each of the plurality of elements existing on a reference array; wherein the distance information between elements includes information on the distance between the reference element and the remaining elements excluding the reference element among the plurality of elements, and the rotation angle information between elements includes information on the angle between a rotation judgment line and a connection line. Claim 5 A shape array matching device according to claim 4, characterized in that the reference array determining unit determines distance information between elements and rotation angle information between elements as dependent information between a plurality of elements existing on the reference array. Claim 6 delete

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