Vaporizer clogging prevention device and its control method

Abstract

The present invention relates to a vaporizer blockage prevention device and a control method thereof, comprising: a vaporizer that receives a precursor in a liquid state, heats it with an internal first heater and a second heater to vaporize it, and then discharges the precursor gas; a heating block installed in a surface contact state on the outer surface of the vaporizer to transfer heat into the interior of the vaporizer; and a storage tank installed in a space different from the space where the vaporizer is installed and supplies a heat transfer fluid to the heating block. Therefore, by preventing the condensation of precursor gas when the heater inside the carburetor stops operating, it is possible to prevent blockage of the flow path caused by liquid precursors.

Description

Technology Field

[0001] The present invention relates to a carburetor clogging prevention device and a control method thereof, and more specifically, to a carburetor clogging prevention device and a control method thereof that prevents the condensation of a precursor when the heater operation is stopped, thereby preventing the phenomenon in which the internal flow path of the carburetor is clogged by a precursor in a liquid state. Background Technology

[0002] The semiconductor deposition process is achieved by vaporizing a liquid precursor through a vaporizer, supplying it to a process chamber, and depositing it onto the wafer surface using various methods (PVD, CVD, ALD, etc.).

[0003] The above vaporizer is equipped with an internal heater to heat and vaporize a precursor in a liquid state, and a flow control valve is installed in the path through which the precursor in a gaseous state flows to control the supply flow rate.

[0004] Meanwhile, since the space where the vaporizer is installed is subject to a constant risk of fire and explosion due to precursors, process gases, etc., the heater is installed in an interlocking manner to ensure it operates only under safe conditions.

[0005] However, when the heater power supply is cut off (including manual shutdown) because conditions are temporarily not met during the operation of the aforementioned vaporizer, the temperature inside the vaporizer drops, causing the vaporized precursor to condense again, which results in a blockage of the flow path through which the gaseous precursor flows. More precisely, there was a problem where a blockage occurred in the flow control valve installed in the flow path through which the gaseous precursor flows to control the flow rate.

[0006] Therefore, there was a problem in that the vaporizer could not be restored to a normal state (vaporizer damage) because not only could the precursor gas not be supplied to the process chamber, but the condensed precursor could not be re-vaporized since a separate heater was not installed in the part where the flow control valve was installed.

[0007] Prior art refers to technical information that the inventor possessed for the derivation of the present invention or acquired during the process of deriving the present invention, and it cannot necessarily be considered publicly known technology disclosed to the general public prior to the filing of the present invention. Prior art literature

[0008] Republic of Korea Published Patent No. 10-2005-0059505 (Published June 21, 2005) The problem to be solved

[0009] In resolving the aforementioned problems, the objective of the present invention is to provide a vaporizer blockage prevention device and a control method thereof that prevent the condensation of precursor gas when the heater inside the vaporizer stops operating, thereby preventing the blockage of the flow path caused by liquid precursors.

[0010] The problems that the present invention aims to solve are not limited to those mentioned above, and other problems not mentioned will be clearly understood by a person skilled in the art to which the present invention belongs from the description below. means of solving the problem

[0011] A vaporizer blockage prevention device according to an embodiment of the present invention comprises: a vaporizer that receives a precursor in a liquid state, heats it with an internal first heater and a second heater to vaporize it, and then discharges the precursor gas; a heating block installed in a surface contact state on the outer surface of the vaporizer to transfer heat into the interior of the vaporizer; and a storage tank installed in a space different from the space where the vaporizer is installed and supplies a heat transfer fluid to the heating block; wherein the heating block and the storage tank are connected by an inlet path and an outlet path, and a pump for circulating the heat transfer fluid, a flow sensor for measuring the circulation flow rate of the heat transfer fluid, and a valve for controlling the circulation flow rate of the heat transfer fluid are installed in the inlet path and the outlet path.

[0012] delete

[0013] In addition, the vaporizer blockage prevention device according to the present invention further comprises a temperature control unit connected to the pump, the flow sensor, and the valve, wherein the temperature control unit controls the operation of the pump and the valve and receives information on the circulation flow rate of the heat transfer fluid from the flow sensor.

[0014] In addition, the storage tank is equipped with a second temperature sensor for measuring the temperature of the internal heat transfer fluid and a third heater for heating the heat transfer fluid, and the temperature control unit operates the third heater to heat the heat transfer fluid when the temperature of the heat transfer fluid measured by the second temperature sensor is lower than or equal to the condensation temperature of the precursor supplied to the vaporizer, thereby maintaining the temperature of the heat transfer fluid at a value higher than the condensation temperature of the precursor.

[0015] In addition, the vaporizer blockage prevention device according to the present invention includes a vaporizer control unit that stops the operation of the first heater and the second heater by turning off an electronic contactor connecting the first heater and the second heater to a power source when a gas detection signal is input from a gas detection sensor installed around the vaporizer to detect leaked gas.

[0016] In addition, when a gas detection signal is generated from the gas detection sensor and the electronic contactor is turned off (including both automatic off by the vaporizer control unit and manual off by the user), the temperature control unit operates the pump to circulate the heat transfer fluid.

[0017] In addition, the temperature control unit constantly operates the pump and constantly controls the temperature of the heat transfer fluid using the second temperature sensor and the third heater.

[0018] In addition, the vaporizer clogging prevention device according to the present invention may have a thermal compound applied and / or filled in the gap between the contact surface of the vaporizer and the heating block.

[0019] Meanwhile, the control method for a vaporizer blockage prevention device according to the present invention comprises: a pump operation step in which a temperature control unit operates the pump to circulate a heat transfer fluid between the storage tank and the heating block; a heat transfer fluid temperature determination step performed after the pump operation step, wherein the temperature control unit determines whether the measured value of a second temperature sensor measuring the temperature of the heat transfer fluid inside the storage tank is below or below the condensation temperature of the precursor supplied to the vaporizer; and

[0020] Additionally, the method includes a heater operation control step performed after the heat transfer fluid temperature determination step, wherein the temperature control unit operates a third heater installed inside the storage tank if the measured value of the second temperature sensor is lower than or equal to the condensation temperature of the precursor supplied to the vaporizer, and stops the operation of the third heater if the measured value of the second temperature sensor is higher than the condensation temperature of the precursor supplied to the vaporizer.

[0021] In addition, the vaporizer blockage prevention control method according to the present invention may perform: a heater stop condition determination step, which is performed before the pump operation step, wherein the vaporizer control unit receives a gas detection signal from a gas detection sensor installed around the vaporizer to detect leaked gas, and determines that the stop condition of the first heater and the second heater is satisfied; and a heater stop step, which is performed after the heater stop condition determination step, wherein if the vaporizer control unit receives the gas detection signal from the gas detection sensor in the heater stop condition determination step and determines that the heater stop condition is satisfied, the electronic contactor connecting the first heater and the second heater to the power supply is controlled to an off state to stop the operation of the first heater and the second heater.

[0022] In addition, the pump operation step is characterized by determining that the heater stop condition is satisfied and operating the pump when the temperature control unit receives the gas detection signal of the gas detection sensor or the off signal of the electronic contactor directly from the gas detection sensor and the electronic contactor or receives it from the vaporizer control unit.

[0023] In addition, the condensation temperature of the precursor follows the vapor pressure curve of the precursor supplied to the vaporizer, and the data of the vapor pressure curve is pre-entered into the temperature control unit. Effects of the invention

[0024] As described above, the vaporizer blockage prevention device and the control method according to the present invention can prevent the condensation of precursor gas when the heater inside the vaporizer stops operating, thereby preventing the phenomenon of blockage of the flow path caused by liquid precursors.

[0025] The effects of the present invention are not limited to those mentioned above, and other unmentioned effects will be clearly understood by a person skilled in the art to which the present invention pertains from the description below. Brief explanation of the drawing

[0026] FIG. 1 is a configuration diagram of a vaporizer blockage prevention device according to an embodiment of the present invention. Figure 2 is an example of a precursor vapor pressure curve. FIG. 3 is a flowchart of a method for controlling a vaporizer blockage prevention device according to an embodiment of the present invention. Specific details for implementing the invention

[0027] In the present invention, the attached drawings may be illustrated with exaggerated expressions to distinguish it from the prior art, ensure clarity, and facilitate the understanding of the technology. Furthermore, the terms described below are defined considering their functions in the present invention; since these terms may vary depending on the intentions or conventions of the user or operator, their definitions should be based on the technical content throughout this specification. Meanwhile, the embodiments are merely exemplary details of the components presented in the claims of the present invention and do not limit the scope of the rights of the present invention; the scope of rights should be interpreted based on the technical concept throughout the specification of the present invention.

[0028] Throughout the specification, when a configuration is described as "including" a configuration, this means that, unless specifically stated otherwise, it does not exclude other configurations but may include additional configurations.

[0029] Furthermore, when it is said that one configuration is "connected," "connected," or "combined" with another configuration, this means that it is not only "directly connected," "directly connected," or "directly combined," but also that there may be cases where it is "connected with another configuration interposed," "connected with another configuration interposed," or "combined with another configuration interposed." On the other hand, when it is said that one configuration is "directly connected," "directly connected," or "directly combined" with another configuration, it should be understood that there is no other configuration in between.

[0030] In addition, when directional terms such as "front," "back," "up," "down," "left," "right," "first end," "other end," and "both ends" are used, they are used exemplarily in relation to the orientation of the disclosed drawings and should not be interpreted restrictively, and when terms such as "first" and "second" are used, they are terms used to distinguish each configuration and should not be interpreted restrictively.

[0031] In order to more clearly explain the features of the embodiments of the present invention, detailed descriptions of matters widely known to those skilled in the art to which the following embodiments pertain are omitted. Additionally, detailed descriptions of parts in the drawings that are unrelated to the description of the embodiments are omitted.

[0032] Hereinafter, embodiments of the present invention will be described in detail with reference to the attached drawings.

[0033] FIG. 1 is a configuration diagram of a vaporizer blockage prevention device according to an embodiment of the present invention, and FIG. 2 is an example diagram of a precursor vapor pressure curve.

[0034] Referring to FIGS. 1 and 2, a vaporizer blockage prevention device according to an embodiment of the present invention includes a vaporizer (100), a heating block (200), and a storage tank (300).

[0035] The above vaporizer (100) is a device that heats a liquid precursor to vaporize it and supplies it to a process chamber.

[0036] The above vaporizer (100) has a preheating section (110), a vaporization section (120), and a flow rate control section (130) formed sequentially in the direction of the precursor flow.

[0037] In the above preheating unit (110) and vaporization unit (120), a first heater (111) and a second heater (121) that generate heat by being equipped with an electric resistance heating wire are respectively installed. The first heater (111) of the above preheating unit (110) preheats a precursor in a liquid state at room temperature to a predetermined temperature to facilitate vaporization in the vaporization unit (120), and the second heater (121) of the above vaporization unit (120) heats the precursor in a liquid state above the corresponding boiling point according to the type of precursor being introduced to vaporize the precursor in a liquid state and turn it into a gas state.

[0038] The above flow control unit (130) is configured such that a flow control valve (131) is installed on the flow path through which a gaseous precursor flows, and a first pressure sensor (132) and a second pressure sensor (133) are installed at the front and rear of the flow control valve (131), respectively. A first temperature sensor (134) may be provided to determine the temperature of the precursor gas discharged from the vaporizer (100).

[0039] The measured values ​​of the first pressure sensor (132), the second pressure sensor (133), and the first temperature sensor (134) are transmitted to the vaporizer control unit (180).

[0040] The above vaporizer control unit (180) compares the measured values ​​of the first pressure sensor (132) and the second pressure sensor (133), and if a pressure difference greater than the set value occurs between the upstream and downstream ends of the flow control valve (131), it opens the flow path to allow the precursor gas to flow, and otherwise, it blocks the flow path, thereby allowing the precursor gas generated in the vaporization unit (120) to be smoothly supplied toward the process chamber.

[0041] Meanwhile, a gas detection sensor (160) is installed around the vaporizer (100), and the gas detection sensor (160) is connected to the vaporizer control unit (180). Here, the gas detection sensor (160) may be a smoke detector, a UV / IR sensor, a gas leak sensor, etc.

[0042] Therefore, the above vaporizer control unit (180) can determine whether precursor gas is leaking from the vaporizer (100) and whether other dangerous (flammable, explosive) components of gas are present around the vaporizer (100).

[0043] Accordingly, the vaporizer control unit (180) can prevent the risk of an accident in advance by cutting off the power supply to the first heater (111) and the second heater (121) of the preheating unit (110) and vaporization unit (120) for safety in the event of a gas leak.

[0044] The first heater (111) and the second heater (121) of the preheating unit (110) and vaporization unit (120) are connected to a power source through a magnetic contactor (MC) (170). The magnetic contactor (170) is connected to the vaporizer control unit (180) and can be turned on / off by the vaporizer control unit (180), and it is also possible for a user to manually turn it on / off. In addition, the vaporizer control unit (180) can detect the on / off status of the magnetic contactor (170) in real time.

[0045] Additionally, the vaporizer (100) is equipped with a liquid valve (140) that controls the flow of a precursor in a liquid state between the preheating section (110) and the vaporization section (120), and a shut-off valve (150) that blocks the flow of precursor gas in the discharge path connected to the downstream end of the flow control section (130). Although not shown in the drawing, the liquid valve (140) and the shut-off valve (150) may also be electronically controlled valves operated by the vaporizer control unit (180).

[0046] The heating block (200) is a heat source attached to the outer surface of the vaporizer (100) in a surface contact state. An embodiment in which the heating block (200) is installed on the bottom surface of the vaporizer (100) is shown in FIG. 1.

[0047] The heating block (200) is fixedly installed on the vaporizer (100) by various fastening means such as bolts.

[0048] The heating block (200) has an inlet passage (210) and an outlet passage (220) connected to each of its ends, and an internal passage (215) is formed inside the heating block (200) to connect the inlet passage (210) and the outlet passage (220) so that a heat transfer fluid can flow inside the heating block (200).

[0049] The heat transfer fluid flowing through the internal passage (215) transfers heat to the vaporizer (100) through the body of the heating block (200).

[0050] The above internal channel (215) may be in the form of a single straight line as shown in FIG. 1, but it is obvious that it may be in the form of a reciprocating channel in the vertical direction to increase the heat transfer area to the body of the heating block (200), or formed as a plurality of branched channels.

[0051] Additionally, the outer surface of the heating block (200), excluding the contact surface (heat transfer surface) with the vaporizer (100), may be wrapped with an insulating material (201). By minimizing heat loss through the surfaces other than the heat transfer surface through the insulating material (201), a larger amount of heat can be transferred from the heating block (200) to the vaporizer (100) through the heat transfer surface.

[0052] Additionally, a thermal compound (202) may be applied and / or filled between the contact surface of the heating block (200) and the vaporizer (100). In this way, the gap between the heating block (200) and the vaporizer (100) is filled by the thermal compound (202), thereby enabling smoother heat transfer from the heating block (200) to the vaporizer (100).

[0053] The above storage tank (300) is a tank for storing heat transfer fluid and is connected to the heating block (200) via the inlet passage (210) and the outlet passage (220). That is, the inlet passage (210) is connected to the outlet (301) of the storage tank (300), and the outlet passage (220) is connected to the inlet (302) of the storage tank (300). However, the above storage tank (300) is located in a space different from the space where the vaporizer (100) is installed (a place that does not share the risk of fire and explosion caused by leaked gas) and acts as a separate heat source that has no operational relationship with the heaters (111, 121) of the vaporizer (100).

[0054] A third heater (310) is provided inside the storage tank (300) to heat the temperature of the heat transfer fluid stored inside the storage tank (300) to a desired temperature. It is necessary to maintain the temperature of the heat transfer fluid at a value greater than the condensation temperature of the precursor supplied to the vaporizer (100).

[0055] For example, if the precursor material supplied to the vaporizer (100) is TEOS (Tetraethyl orthosilicate), and the pressure measured by the first pressure sensor (132) is 63 kPa (A), then the corresponding saturation temperature in the vapor pressure curve of TEOS in FIG. 2 is 150°C (B). Therefore, if the temperature is lower than this, it becomes a liquid, and if it is higher, it becomes a gas. Thus, by controlling the temperature of the heat transfer fluid to a value greater than 150°C, it is possible to prevent TEOS from condensing and becoming liquefied in the internal flow path of the vaporizer (100) (more precisely, the part where the flow control valve (131) is installed).

[0056] As described above, by maintaining the temperature of the heat transfer fluid at a value greater than the condensation temperature of the corresponding precursor according to the type of precursor supplied to the vaporizer (100), condensation of the precursor is prevented even when the first heater (111) and the second heater (121) are stopped, thereby preventing blockage of the flow path caused by the precursor in a liquid state.

[0057] Pumps (230), flow sensors (240), valves (250), etc. are installed in the inlet passage (210) and the outlet passage (220), and these can be connected to and operated by a temperature control unit (260) for controlling the temperature of the heat transfer fluid. In addition, a second temperature sensor (320) for measuring the temperature of the heat transfer fluid is provided on one side of the storage tank (300), and the second temperature sensor (320) transmits the measured value to the temperature control unit (260).

[0058] Accordingly, the heat transfer fluid can be forcibly circulated between the heating block (200) and the storage tank (300) using the pump (230), the circulation flow rate of the heat transfer fluid can be known using the flow sensor (240), and the circulation flow rate of the heat transfer fluid can be controlled by adjusting the opening of the valve (250).

[0059] Additionally, the temperature of the heat transfer fluid stored in the storage tank (300) is transmitted in real time to the temperature control unit (260) by the second temperature sensor (320), and when the temperature of the heat transfer fluid in the storage tank (300) drops below the condensation temperature of the precursor supplied to the vaporizer (100) (more precisely, meaning the saturation temperature at the pressure measured by the first pressure sensor (132)), the temperature control unit (260) operates the heater (310) to heat the heat transfer fluid, thereby controlling the temperature of the heat transfer fluid supplied to the heating block (200) so that it always maintains a value greater than the condensation temperature of the precursor supplied to the vaporizer (100).

[0060] The above temperature control unit (260) checks the internal temperature of the storage tank (300) in real time through the second temperature sensor (320), and if the measured temperature drops below the condensation temperature of the gaseous precursor, it activates the third heater (310) to maintain the internal temperature of the storage tank (300) at a constant temperature higher than the condensation temperature of the precursor.

[0061] In addition, the temperature control unit (260) can operate the pump (230) at all times to maintain the temperature inside the heating block (200) at a state higher than the condensation temperature of the precursor.

[0062] Additionally, the temperature control unit (260) can operate the pump (230) to circulate a heat transfer fluid to prevent precursor condensation only when the first heater (111) and the second heater (121) of the vaporizer (100) are stopped.

[0063] Meanwhile, the condensation temperature of the precursor supplied to the vaporizer (100) follows the vapor pressure curve of the said precursor, and the data of the said vapor pressure curve is, of course, pre-entered into the temperature control unit (260).

[0064] In addition, the vaporizer blockage prevention device according to the present invention has the advantage of being able to safely supply heat to the vaporizer (100) without the risk of fire and explosion even if there is a gas leak from the vaporizer (100), since the storage tank (300) is a separate indirect heat source installed in a space different from the vaporizer (100).

[0065] As described above, according to the vaporizer blockage prevention device of the present invention, a heating block (200) through which a heat transfer fluid circulates is installed in the vaporizer (100) to supply heat to the vaporizer (100), and the heat transfer fluid is maintained at a temperature higher than the condensation temperature of the precursor supplied to the vaporizer (100), thereby preventing the phenomenon in which the precursor in a liquid state passing through the flow path of the vaporizer (100) liquefies and blocks the flow path (especially the flow control valve (131)).

[0066] In addition, the storage tank (300) is a separate indirect heat source installed in a space different from the vaporizer (100) (a space that does not share the risk of accidents caused by leaked gas), and has the advantage of safely supplying heat to the vaporizer (100) even if there is a gas leak from the vaporizer (100), thereby preventing the condensation of the precursor.

[0067] The control method of the above-mentioned vaporizer blockage prevention device is described below.

[0068] FIG. 3 is a flowchart of a method for controlling a vaporizer blockage prevention device according to the present invention.

[0069] As shown in FIG. 3, the control method for a vaporizer blockage prevention device according to the present invention includes a pump operation step (S30), a heat transfer fluid temperature determination step (S40), and a heater operation control step (S50). Additionally, the control method for a vaporizer blockage prevention device according to the present invention may further perform a heater stop condition determination step (S10) and a heater stop step (S20) prior to the pump operation step (S30).

[0070] The above heater stop condition determination step (S10) is a step in which, when the gas detection sensor (160) detects gas around the vaporizer (100) or the electronic contactor (170) is manually turned off by the user while the vaporizer (100) is in operation, the vaporizer control unit (180) recognizes this and determines that the heater stop condition is satisfied.

[0071] As described above, the gas detection sensor (160) may utilize a smoke detector, a UV / IR sensor, a gas leak sensor, etc., and these may be applied individually or in combination. When the gas detection sensor (160) detects a gas that poses a risk of ignition and explosion around the vaporizer (100), it transmits a gas detection signal to the vaporizer control unit (180). Accordingly, the vaporizer control unit (180) determines that the heater stop condition is satisfied, which requires stopping the operation of the first heater (111) of the preheating unit (110) and the second heater (121) of the vaporization unit (120).

[0072] In addition, even if the user manually turns off the electronic contactor (170) for various other reasons, the corresponding signal is transmitted to the vaporizer control unit (180), and the vaporizer control unit (180) recognizes that the electronic contactor (170) is turned off.

[0073] The heater stop condition signal described above, that is, the gas detection information of the gas detection sensor (160) and the off information of the electronic contactor (170), can be transmitted from the vaporizer control unit (180) to the temperature control unit (260). Additionally, the heater stop condition signal can be directly transmitted from the gas detection sensor (160) and the electronic contactor (170) to the temperature control unit (260).

[0074] The heater stop step (S20) is performed after the heater stop condition determination step (S10). When the heater stop condition is determined by the gas detection signal in the heater stop condition determination step (S10), the vaporizer control unit (180) controls the electronic contactor (170) to the off state to cut off the power supply to the first heater (111) and the second heater (121), thereby stopping the operation of the first heater (111) and the second heater (121). This ensures safety against gas fire and explosion accidents.

[0075] Even when the electronic contactor (170) is manually turned off by the user, the operation of the first heater (111) and the second heater (121) is naturally stopped, and the vaporizer control unit (180) and the temperature control unit (260) recognize this state.

[0076] In this way, the first heater (111) and the second heater (121) inside the vaporizer (100) stop operating, so that the temperature of the precursor gas flowing through the internal flow path of the vaporizer (100) can be lowered. If time passes as is, the temperature of the precursor gas will drop below the condensation temperature, and eventually condensation will occur, and thus the flow path passing through the flow control valve (131) can be blocked by the liquid precursor.

[0077] The above pump operation step (S30) can be performed as the first step of the method for controlling a vaporizer blockage prevention device according to the present invention. That is, in a normal operation mode, the pump operation step (S30) can be performed without any separate conditions.

[0078] Meanwhile, the pump operation step (S30) may be performed conditionally (heater stop). That is, it may be performed after the heater stop condition determination step (S10). In the conditional execution mode, the pump operation step (S30) is a step in which the temperature control unit (260) determines that the heater stop condition is met and operates the pump (230) when it receives gas detection information from the gas detection sensor (160) or off information from the electronic contactor (170) from the vaporizer control unit (180), or receives a gas detection signal directly from the gas detection sensor (160) or receives an off signal directly from the electronic contactor (170).

[0079] Although FIG. 3 illustrates that the pump operation step (S30) is performed after the heater stop step (S20), it is not necessary for it to be performed after the heater stop step (S20) has ended. That is, the pump operation step (S30) can be performed independently by the temperature control unit (260) regardless of the operation of the heaters (first heater (111) and second heater (121)) of the vaporizer (100), and can be performed simultaneously with the heater stop step (S20).

[0080] When the pump (230) is operated by the above pump operation step (S30), the heat transfer fluid of the storage tank (300) is supplied into the interior of the heating block (200) through the inlet path (210), passes through the interior path (215) of the heating block (200), is discharged through the discharge path (220), and then circulates in a circulation path to be re-entered into the storage tank (300).

[0081] Accordingly, heat is transferred from the heat transfer fluid of the heating block (200) to the vaporizer (100) through the body of the heating block (200), thereby heating the liquid precursor inside the vaporizer (100) so that it can be maintained at a temperature above the condensation temperature.

[0082] The heat transfer fluid temperature determination step (S40) is a step performed after the pump operation step (S30), in which the temperature control unit (260) determines whether the temperature of the heat transfer fluid inside the storage tank (300) is below the measured value of the second temperature sensor (320), i.e., the current temperature of the heat transfer fluid inside the storage tank (300), or not. This follows the vapor pressure curve of the precursor supplied to the vaporizer, and the data of the vapor pressure curve is pre-entered into the temperature control unit (260). In other words, it is a step in which the temperature control unit (260) determines whether or not it is necessary to increase the temperature of the heat transfer fluid inside the storage tank (300).

[0083] The heater operation control step (S50) is a step in which the temperature control unit (260) turns on or stops the operation of the third heater (310) according to the result of the heat transfer fluid temperature determination step (S40).

[0084] The temperature control unit (260) operates the third heater (310) to heat the heat transfer fluid and raise the temperature to a temperature higher than the condensation temperature of the precursor when the temperature of the heat transfer fluid is lower than the condensation temperature of the precursor in the heat transfer fluid temperature determination step (S40).

[0085] On the other hand, the temperature control unit (260) prevents unnecessary power consumption by stopping the operation of the third heater (310) when the temperature of the heat transfer fluid is greater than the condensation temperature of the precursor in the heat transfer fluid temperature determination step (S40).

[0086] As described above, the temperature control unit (260) maintains the temperature of the heat transfer fluid at a temperature higher than the condensation temperature of the precursor by repeatedly operating and stopping the third heater (310) according to the temperature of the heat transfer fluid.

[0087] As described above, according to the method for controlling a vaporizer blockage prevention device according to the present invention, the operation of the pump (230) and the temperature control of the heat transfer fluid using the third heater (310) are performed in a normal mode, thereby maintaining the liquid precursor inside the vaporizer (100) at a condensation temperature or higher, so that the condensation of the precursor is prevented and the blockage of the flow path can be prevented.

[0088] In addition, according to the vaporizer blockage prevention control method of the present invention, when the stop condition of the heater (111, 121) of the vaporizer (100) is satisfied, the pump (230) is operated so that a heat transfer fluid is supplied to the heating block (200) to transfer heat into the vaporizer (100), and the temperature of the heat transfer fluid is controlled to a value greater than the condensation temperature of the precursor supplied to the vaporizer (100).

[0089] Therefore, even when the heater (111, 121) is stopped, the phenomenon of precursor condensation inside the vaporizer (100) is prevented, and thus the phenomenon of the flow path inside the vaporizer (100) being blocked by the liquid precursor is prevented.

[0090] As described above, according to the vaporizer blockage prevention device and control method of the present invention, condensation of precursor gas is prevented when the heater inside the vaporizer stops operating, thereby preventing blockage of the flow path caused by liquid precursor.

[0091] As described above, the present invention has been explained with reference to the embodiments illustrated in the drawings, but this is merely illustrative, and it should be understood that various modifications and equivalent alternative embodiments are possible based on the ordinary knowledge of the art to which the art belongs. Accordingly, the true technical scope of protection of the present invention is defined by the claims described below and should be determined based on the specific details of the invention described above. Industrial applicability

[0092] The present invention relates to a vaporizer clogging prevention device and a control method thereof, and is applicable in industrial fields using vaporizers that convert liquid substances into a gaseous state. Explanation of the symbols

[0093] 100: Carburetor 110: Preheating unit 111: First heater 120: Vaporizer 121: Second heater 130: Flow control unit 131: Flow control valve 132: First pressure sensor 133: Second pressure sensor 134: First temperature sensor 140: Liquid valve 150: Shut-off valve 160: Gas detection sensor 170: Electronic contactor 180: Carburetor control unit 200: Heating block 201: Insulation material 202: Thermal compound 210: Inflow Euro 215: Internal Euro 220: Discharge path 230: Pump 240: Flow sensor 250: Valve 260: Temperature control unit 300: Storage tank 310: 3rd heater 320: 2nd temperature sensor

Claims

Claim 1 A vaporizer that receives a precursor in a liquid state, heats it with an internal first heater and a second heater to vaporize it, and then discharges the precursor gas; a heating block installed in a surface contact state on the outer surface of the vaporizer to transfer heat into the interior of the vaporizer; and a storage tank installed in a space different from the space where the vaporizer is installed and supplies a heat transfer fluid to the heating block; wherein the heating block and the storage tank are connected by an inlet path and an outlet path, and the inlet path and the outlet path are equipped with a pump for circulating the heat transfer fluid, a flow sensor for measuring the circulation flow rate of the heat transfer fluid, and a valve for controlling the circulation flow rate of the heat transfer fluid. Claim 2 delete Claim 3 The vaporizer blockage prevention device according to claim 1 further comprises a temperature control unit connected to the pump, the flow sensor, and the valve, wherein the temperature control unit controls the operation of the pump and the valve and receives information on the circulation flow rate of the heat transfer fluid from the flow sensor. Claim 4 A vaporizer blockage prevention device according to claim 3, wherein the storage tank comprises a second temperature sensor for measuring the temperature of the internal heat transfer fluid and a third heater for heating the heat transfer fluid, and the temperature control unit operates the third heater to heat the heat transfer fluid when the temperature of the heat transfer fluid measured by the second temperature sensor is lower than or equal to the condensation temperature of the precursor supplied to the vaporizer, thereby maintaining the temperature of the heat transfer fluid at a value higher than the condensation temperature of the precursor. Claim 5 A vaporizer blockage prevention device according to claim 4, characterized in that the vaporizer blockage prevention device includes a vaporizer control unit that stops the operation of the first heater and the second heater by turning off an electronic contactor connecting the first heater and the second heater to a power source when a gas detection signal is input from a gas detection sensor installed around the vaporizer to detect leaked gas. Claim 6 A vaporizer blockage prevention device according to claim 5, characterized in that the temperature control unit circulates the heat transfer fluid by operating the pump when a gas detection signal is generated from the gas detection sensor and the electronic contactor is turned off (including both cases of automatic off by the vaporizer control unit and manual off by the user). Claim 7 A vaporizer blockage prevention device according to claim 4, wherein the temperature control unit continuously operates the pump and continuously performs temperature control of the heat transfer fluid using the second temperature sensor and the third heater. Claim 8 The vaporizer blockage prevention device according to claim 1, characterized in that a thermal compound is applied and / or filled in the gap between the contact surface of the vaporizer and the heating block. Claim 9 A method for controlling a vaporizer blockage prevention device according to claim 1, comprising: a pump operation step in which a temperature control unit operates the pump to circulate a heat transfer fluid between the storage tank and the heating block; a heat transfer fluid temperature determination step performed after the pump operation step, wherein the temperature control unit determines whether the measured value of a second temperature sensor measuring the temperature of the heat transfer fluid inside the storage tank is lower than or equal to the condensation temperature of the precursor supplied to the vaporizer; and a heater operation control step performed after the heat transfer fluid temperature determination step, wherein the temperature control unit operates a third heater installed inside the storage tank if the measured value of the second temperature sensor is lower than or equal to the condensation temperature of the precursor supplied to the vaporizer, and stops the operation of the third heater if the measured value of the second temperature sensor is higher than the condensation temperature of the precursor supplied to the vaporizer. Claim 10 The method of claim 9, wherein the vaporizer blockage prevention control method comprises: a heater stop condition determination step, wherein, prior to the execution of the pump operation step, the vaporizer control unit receives a gas detection signal from a gas detection sensor installed around the vaporizer to detect leaked gas, and determines that the stop condition of the first heater and the second heater is satisfied; and a heater stop step, wherein, after the heater stop condition determination step, the vaporizer control unit receives the gas detection signal from the gas detection sensor in the heater stop condition determination step and determines that the heater stop condition is satisfied, and controls an electronic contactor connecting the first heater and the second heater to a power source to an off state to stop the operation of the first heater and the second heater. Claim 11 A method for controlling a vaporizer blockage prevention device according to claim 10, wherein the pump operation step is characterized by determining that the heater stop condition is satisfied and operating the pump when the temperature control unit receives the gas detection signal of the gas detection sensor or the off signal of the electronic contactor directly from the gas detection sensor and the electronic contactor or receives it from the vaporizer control unit. Claim 12 A method for controlling a vaporizer blockage prevention device according to claim 9, wherein the condensation temperature of the precursor follows the vapor pressure curve of the precursor supplied to the vaporizer, and the data of the vapor pressure curve is pre-entered into the temperature control unit.

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