A graphene stacking method for membrane

Abstract

The present invention relates to a method for stacking graphene for membranes, and more specifically, to a method for stacking graphene for membranes that can form graphene of a certain thickness by stacking graphene of a fine thickness using a catalytic metal foil on which graphene is deposited to form stacked graphene used in a membrane, cutting the stacked graphene film on which graphene is stacked, and stacking the cut stacked graphene film again. A method for stacking graphene for a membrane, comprising: (a) a step of sequentially performing the steps of attaching a thermal separation tape to the graphene deposition surface of a catalyst metal foil on which graphene is deposited and removing the catalyst metal foil by etching up to n times, and stacking graphene on the thermal separation tape to form stacked graphene; (b) a step of forming a graphene transfer film by attaching the graphene stacked film to a base film and thermally separating the thermal separation tape to transfer the stacked graphene to the base film to form a graphene transfer film; (c) a transfer film cutting step of cutting the graphene transfer film to a predetermined size; and (d) a stacked graphene separation step of separating a portion of the graphene transfer film cut to a predetermined size by removing the base film by etching to separate only the stacked graphene. and (e) a graphene membrane formation step of forming a graphene membrane by attaching the separated stacked graphene to the stacked graphene surface of the cut graphene transfer film, on which the base film is not removed by etching; the present invention provides a method for stacking graphene for a membrane, characterized by comprising: (e) a graphene membrane formation step of attaching the separated stacked graphene to the stacked graphene surface of the cut graphene transfer film on which the base film is not removed by etching.

Description

Technology Field

[0001] The present invention relates to a method for stacking graphene for membranes, and more specifically, to a method for stacking graphene for membranes that can form graphene for membranes by stacking graphene of a fine thickness using a catalytic metal foil on which graphene is deposited, cutting the stacked graphene film on which graphene is stacked, and stacking the cut stacked graphene film again to form graphene of a certain thickness. Background Technology

[0002] Generally, graphene is a material in which carbon atoms are interconnected in a hexagonal shape to form a honeycomb-shaped two-dimensional planar structure. It is characterized by being extremely thin, transparent, and possessing very high electrical conductivity. With a thickness of 0.2 nm, graphene offers high transparency and can transmit 100 times more current than copper and 100 times faster than silicon at room temperature. Furthermore, graphene has thermal conductivity more than twice as high as that of diamond, which is known for having the highest thermal conductivity.

[0003] Graphene can be fabricated using Chemical Vapor Deposition (CVD), which mass-produces high-quality graphene by depositing process gas onto a catalytic metal foil supplied via a roll-to-roll method.

[0004] Graphene possesses mechanical strength more than 200 times greater than steel, yet it has excellent elasticity, maintaining its electrical conductivity even when stretched or folded. Due to these superior properties, it is a next-generation material applicable to flexible and transparent displays—which are gaining attention as future technologies—as well as wearable computers. Furthermore, there has recently been a growing number of attempts to utilize graphene’s excellent thermal and mechanical properties to develop high-sensitivity diaphragm devices using ultra-thin graphene membranes, and to use them as pellicles to protect photomasks used in semiconductor EUV lithographic apparatus. Photomasks have fine circuit patterns formed on them, and these patterns are formed onto silicon using lithographic equipment. However, if fine dust from atmospheric contamination adheres to the photomask, the dust particles are also formed on the silicon, leading to product defects. Attempts to use it as a membrane for a pellicle to prevent impurities from adhering to such photomasks are gradually increasing.

[0005] In order to use graphene in heaters, displays, or pellicles, a graphene membrane of a certain thickness must be formed by repeatedly stacking graphene deposited on a catalytic metal foil by chemical vapor deposition multiple times. Additionally, graphene is used in technology for detecting harmful substances in the air in real time; since graphene can be fabricated over a large area, it has a large contact surface area with the gas, which increases the gas detection sensitivity, making it suitable for use.

[0006] In order to use graphene in heaters, transparent electrodes, flexible displays, pellicles, or gas detection sensors, a graphene membrane of a certain thickness must be formed. Graphene membranes are used by stacking graphene layers of various thicknesses, ranging from 0.35 nm, which is the thickness of a single graphene layer, to 100 µm. In addition, the thickness needs to be controlled with high precision according to the thickness of graphene required by the device using the graphene membrane.

[0007] In a conventional wet method for stacking graphene, graphene deposited on a catalytic metal foil is coated with PMMA (Polymethyl Methacrylate), the catalytic metal foil is removed by etching, the PMMA film onto which graphene has been transferred is placed in a water bath, the graphene coated with the PMMA film in the water bath is attached to a substrate and dried, and the PMMA is dissolved and removed from the dried substrate using an organic solvent (acetone solution) to transfer the graphene to the substrate. Graphene is stacked on a substrate and a graphene membrane is formed by repeating this process several times.

[0008] In addition, the dry method for stacking graphene involves attaching a thermal separation film to a catalytic metal foil on which graphene has been deposited, removing the catalytic metal foil with an etching solution to create a thermal separation film with transferred graphene, attaching the thermal separation film with transferred graphene to a substrate, and applying heat to remove the thermal separation film from the substrate and transfer graphene to the substrate. This process is repeated to stack the graphene from the thermal separation film onto the substrate, thereby forming a graphene membrane of a desired thickness.

[0009] The above wet method requires repeating the processes of 1) coating, 2) etching, 3) substrate lamination, 4) drying, and 5) cleaning, which takes a long time and makes it difficult to laminate graphene over a large area. It also has problems such as poor film quality due to PMMA residue remaining, microbubbles being trapped between the films, and increased costs and environmental pollution due to the use of organic solvents.

[0010] In addition, the dry method requires the repeated processes of 1) attaching a thermal separation film, 2) etching, and 3) removing the thermal separation film. Therefore, since expensive thermal separation films are required every time graphene is laminated onto a substrate, not only is a significant cost incurred, but there was also a problem of damage to the laminated graphene film due to the repeated lamination process. The problem to be solved

[0011] To solve the above-mentioned problems, the present invention aims to provide a method for stacking graphene for a membrane that can form a graphene membrane of a certain thickness by repeatedly stacking thin film graphene to form a graphene membrane of a desired thickness, cutting the stacked graphene, and then stacking the cut stacked graphene again. means of solving the problem

[0012] To achieve the above objective, the present invention provides a method for stacking graphene for a membrane, comprising: (a) a step of sequentially performing the steps of attaching a thermal separation tape to the graphene deposition surface of a catalyst metal foil on which graphene is deposited and removing the catalyst metal foil by etching up to n times, and stacking graphene on the thermal separation tape to form stacked graphene; (b) a step of forming a graphene transfer film by attaching the graphene stacked film to a base film and thermally separating the thermal separation tape to transfer the stacked graphene to the base film to form a graphene transfer film; (c) a transfer film cutting step of cutting the graphene transfer film to a predetermined size; and (d) a stacked graphene separation step of separating a portion of the graphene transfer film cut to a predetermined size by removing the base film by etching to separate only the stacked graphene. and (e) a graphene membrane formation step of forming a graphene membrane by attaching the separated stacked graphene to the stacked graphene surface of the cut graphene transfer film, on which the base film is not removed by etching; the present invention provides a method for stacking graphene for a membrane, characterized by comprising: (e) a graphene membrane formation step of attaching the separated stacked graphene to the stacked graphene surface of the cut graphene transfer film on which the base film is not removed by etching.

[0013] In the present invention, the nth order is composed of 5 to 20 orders, and the thickness of the graphene membrane is 5 nm to 100 nm.

[0014] In the present invention, the base film is characterized by being composed of Cu or Ni.

[0015] In the present invention, step (b) further comprises a heat treatment step for removing residue of the thermal separation tape remaining on the thermal separation tape attachment surface of the graphene transfer film.

[0016] In the present invention, step (d) is characterized by comprising: (d-1) a step of removing the base film by etching from a portion of a graphene transfer film cut to a certain size and separating it into only stacked graphene; (d-2) a step of washing away the etching solution remaining on the separated stacked graphene; and (d-3) a step of drying the stacked graphene in a vacuum.

[0017] The present invention is characterized by further including (f) a graphene membrane deposition step for expanding the graphene crystal size of the graphene membrane or further depositing graphene on the graphene membrane. Effects of the invention

[0018] The present invention can stack graphene of a certain thickness that can be used as a graphene membrane for various purposes.

[0019] In addition, the present invention has the advantage of being able to complement graphene generated during the stacking process.

[0020] In addition, the present invention has the advantage of being able to form a graphene membrane of a desired thickness by controlling the stacking order.

[0021] In addition, the present invention has the advantage of enabling mass production when stacked in a roll-to-roll manner. Brief explanation of the drawing

[0022] FIG. 1 is a flowchart of a method for stacking graphene for a membrane according to the present invention. FIG. 2 is a configuration diagram of a graphene stacking apparatus used in the method of stacking graphene for a membrane according to the present invention. FIG. 3 is an enlarged view of a part of the configuration of the graphene stacking device of FIG. 2. Figure 4 is a cross-sectional view of a graphene-deposited film in which graphene is deposited on a catalytic metal foil. FIG. 5 is a configuration diagram of a transfer device for transferring stacked graphene according to the present invention. FIG. 6 is a cross-sectional view illustrating a graphene transfer film transferred from a graphene laminated film to a graphene transfer film using the transfer device of FIG. 5. FIG. 7 is a cross-sectional view illustrating the process of cutting a graphene transfer film transferred from the transfer device of FIG. 6 into n pieces, removing the base film from the cut graphene transfer film, and attaching stacked graphene to the graphene transfer film from which the base film has not been removed. Specific details for implementing the invention

[0023] Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings. However, this description is intended to be detailed enough for a person skilled in the art to easily practice the invention, and does not imply that the technical scope and concept of the present invention are limited thereby.

[0024] FIG. 1 is a flowchart of a method for stacking graphene for a membrane according to the present invention, FIG. 2 is a configuration diagram of a graphene stacking device used in the method for stacking graphene for a membrane according to the present invention, FIG. 3 is an enlarged view of a part of the configuration of the graphene stacking device of FIG. 2, FIG. 4 is a cross-sectional view of a graphene deposition film in which graphene is deposited on a catalyst metal foil, FIG. 5 is a configuration diagram of a transfer device for transferring stacked graphene according to the present invention, FIG. 6 is a cross-sectional view illustrating a transfer from a graphene stacked film to a graphene transfer film using the transfer device of FIG. 5, FIG. 7 is a cross-sectional view illustrating a process of cutting the graphene transfer film transferred from the transfer device of FIG. 6 into n pieces, removing the base film from the cut graphene transfer film, and attaching stacked graphene to the graphene transfer film from which the base film has not been removed.

[0025] FIG. 1 is a flowchart of a method for stacking graphene for a membrane according to the present invention. As illustrated in the drawing, the graphene stacking method according to the present invention comprises: (a) a step of forming a graphene stacked film (S1) in which a step of attaching a thermal separation tape to the graphene deposition surface of a catalyst metal foil on which graphene is deposited and removing the catalyst metal foil by etching is performed sequentially up to n times, and graphene is stacked on the thermal separation tape to form a stacked graphene; (b) a step of forming a graphene transfer film (S2) in which the graphene stacked film is attached to a base film and the thermal separation tape is thermally separated to transfer the stacked graphene to the base film to form a graphene transfer film; (c) a transfer film cutting step (S3) in which the graphene transfer film is cut to a predetermined size; (d) a step of separating a portion of the graphene transfer film cut to a predetermined size by removing the base film by etching to separate only the stacked graphene (S4); and (e) attaching the separated stacked graphene to the stacked graphene surface of the graphene transfer film from which the base film was not removed by etching to form a graphene The method comprises a stacking method for graphene for a membrane, characterized by a graphene membrane forming step (S5) for forming a membrane. Additionally, (f) a graphene membrane deposition step (S6) for expanding the graphene crystal size of the graphene membrane (122') or for further depositing graphene on the graphene membrane (122') may be additionally included.

[0026] A method for stacking graphene for membranes will be described in detail with reference to the drawings. Fig. 2 is a graphene stacking device (1) for membranes. A method for stacking graphene for membranes will be described in detail with reference to the graphene stacking device (1) of Fig. 2 and the transfer device (90) of Fig. 5.

[0027] First, a thermal separation tape (110) is attached to the graphene deposition surface of a catalyst metal foil (121) on which graphene (122) is deposited, and the catalyst metal foil (121) is removed by etching is removed sequentially up to n times, and the graphene (122) is laminated onto the thermal separation tape (110) to form laminated graphene (122). nA step (S1) for forming a graphene laminated film is performed. Graphene (122) is deposited on a catalytic metal foil (121) by chemical vapor deposition, and in the lamination method according to the present invention, a graphene deposition film (120) composed of a catalytic metal foil (121) and graphene (122) is used, as shown in FIG. 4. The graphene deposition film (120) is supplied in a state wound on a roll, and the graphene deposition film (120) is supplied through the graphene deposition film supply roller (12) in FIG. 3. The graphene deposition surface of the graphene deposition film (120) supplied from the graphene deposition film supply roller (12) is attached to the thermal separation tape (110) supplied from the thermal separation tape supply roller (11). The graphene deposition film (120) attached to the thermal separation tape (110) is continuously stacked while being rotated by the drive rollers (21, 23). The stacking process first involves attaching to the thermal separation tape (110), etching the catalyst metal foil in the etching section (30), and then transferring the graphene (122) to the thermal separation tape (110). The etching section (30) may consist of two etching sections (30) to completely remove the catalyst metal foil. After being transferred to the thermal separation tape (110), the etching solution is washed in the washing section (40). After the etching solution is washed, liquid components such as water remaining on the thermal separation tape and the graphene (122) are dried in the drying section (50). Since complete drying must be achieved, drying is performed in a vacuum to completely remove moisture from the surface of the graphene (122). This process is carried out up to n times to sequentially stack graphene (122). Since n times is a factor that determines the thickness of the graphene, it can be performed from 5 to 20 times. The graphene (122) stacked up to n times is stacked graphene (122 n ) forms stacked graphene (122 n) is transferred to a thermal separation tape (110) to form a graphene laminated film (100). The graphene laminated film (100), in which the stacking of graphene up to n times is completed, is cut by a cutter (27), and the cut graphene laminated film (100) is wound onto a winding roller (60). When the winding of the graphene laminated film (100) onto the winding roller (60) is completed, the winding roller (60) is collected from the graphene stacking device (1).

[0028] Next, the graphene laminated film (100) is attached to the base film (130) and the thermal separation tape (110) is thermally separated to form laminated graphene (122) on the base film (130). n A graphene transfer film formation step (S2) is performed to form a graphene transfer film (100') by transferring ). When a certain amount of heat is applied to the thermal separation tape (110) on the graphene stacked film (100), the stacked graphene (122 n Since it is separated from ), a thermal transfer step is performed to remove the thermal separation tape (110) by applying a certain amount of heat. In FIG. 6, the thermal separation tape (110) is removed from the graphene laminated film (100), and the laminated graphene (122) is transferred to the base film (130). n A thermal transfer device (90) for transferring ) is illustrated. While passing the graphene laminated film (100) and the base film (130) through heating rollers (92, 93), the thermal separation tape (110) and the laminated graphene (122 n ) are separated from each other, and stacked graphene (122 n ) is transferred to a base film (130) to form a graphene transfer film (100'). FIG. 6(a) shows stacked graphene (122 n ) is a graphene laminated film (100) before transfer, and Fig. 6(b) laminated graphene (122 n It is a graphene transfer film (100') after the transfer. As shown in FIG. 6, stacked graphene (122 n ) is transferred from the graphene laminated film (100) to the graphene transfer film (100') via thermal transfer. The base film may be a metal foil made of Cu or Ni. In addition, the laminated graphene (122) transferred to the base film (130)n A heat treatment step may be further included to remove residues of the thermal separation tape remaining on the upper surface of the graphene transfer film (100'). Organic material of the thermal separation tape may remain on the thermal separation tape attachment surface of the graphene transfer film (100'). Since this residue of the thermal separation tape is an organic material, it is desirable to remove it in advance because it may cause damage to the graphene when used as a graphene membrane. Accordingly, the graphene transfer film (100') is heat-treated at a temperature of 300 to 400°C to burn and remove the organic material remaining on the thermal separation tape attachment surface.

[0029] Next, a transfer film cutting step (S3) is performed to cut the graphene transfer film (100') into a predetermined size. The graphene transfer film (100') can be manufactured in the form of a roll, and once the manufacturing process of the graphene transfer film (100') is completed, it is cut into a predetermined size according to the frame of the membrane. The drawing in FIG. 7(a) illustrates the graphene transfer film (100') being cut into n pieces. As shown in the drawing, the graphene transfer film (100') is cut to form n cut graphene transfer films, such as the cut graphene transfer film (1001') or the cut graphene transfer film (100 n Constitutes ')

[0030] Next, a graphene transfer film (100) cut to a certain size n A portion of ') removes the base film (130) by etching to form stacked graphene (122 n It undergoes a stacked graphene separation step (S4) that separates only ). The graphene transfer film is cut into a certain size, and the cut graphene transfer film (100 n A) is formed, and the base film (130) is removed by etching from some of the cut graphene transfer films. The base film (130) is not removed from the remaining cut graphene transfer films. When the base film (130) is removed from the cut graphene transfer films, stacked graphene (122 nOnly ) remains. Specifically, the stacked graphene separation step is as follows: (d-1) remove the base film (130) by etching from a portion of the graphene transfer film cut to a certain size, and the stacked graphene (122 n A step of separating only ) (S41), and (d-2) separated stacked graphene (122 n A step (S42) of washing away the etching solution remaining on ) and (d-3) stacked graphene (122 n ) can be subdivided into a step (S43) of drying in a vacuum. The base film (130) is removed by etching to obtain stacked graphene (122 n Separated using only ) and separated stacked graphene (122 n ) is washed to remove the etching solution, and the washed stacked graphene (122 n ) is dried in a vacuum to remove all moisture remaining on the surface of the graphene.

[0031] Next, the separated stacked graphene (122) on the stacked graphene surface of the cut graphene transfer film from which the base film (130) was not removed by etching n A graphene membrane formation step (S5) is performed to form a graphene membrane (122') by attaching ). In FIG. 7(b), stacked graphene (122 n It illustrates the attachment of ) to a cut graphene transfer film. Stacked graphene (122 n Only the cut graphene transfer film is attached, and the graphene membrane (122') formed accordingly has twice the thickness of the stacked graphene. The base film (130) attached to the graphene membrane (122') is removed by etching when attached to the membrane frame (not shown). Accordingly, only the graphene membrane (122') remains on the frame, and the thickness of the graphene membrane (122') is 5 nm to 100 nm. FIG. 7(c) shows the graphene membrane (122') attached to the base film (130).

[0032] Next, a graphene membrane deposition step (S6) is performed to enlarge the graphene crystal size of the graphene membrane (122') or to deposit more graphene on the graphene membrane (122'). A graphene transfer film (100') is introduced into the graphene deposition device (1) to form stacked graphene (122 n ) is deposited. Graphene deposition is performed in the deposition chamber of a graphene deposition apparatus into which a deposition gas (CH4, C2H6, H2, etc.) is introduced, and the graphene deposition is stacked graphene (122 n This is intended to address defects or supplements. Since graphene is deposited again, the size of the graphene crystal is expanded, or more graphene is deposited on the graphene membrane (122'), thereby ensuring the stability of the graphene membrane. Once the deposition process is completed, the process of the graphene membrane is finished, and it can be used as a membrane such as a pellicle.

[0033] FIG. 2 is a schematic diagram of a graphene stacking device (1). As shown in the drawing, the graphene stacking device (1) comprises a supply roller section (10) consisting of a thermal separation tape supply roller (11) and a catalyst metal foil supply roller (12) on which graphene is stacked, a circulation section (20) for continuously circulating the thermal separation tape on which graphene is transferred and stacked a certain number of times, an etching section (30) for etching the catalyst metal foil during the circulation process, a washing section (40) for washing the graphene stacked film (100) etched in the etching section (30), a drying section (50) for drying the washed graphene stacked film (100), and a winding roller (60) for winding the graphene stacked film (100).

[0034] Referring to FIGS. 2 to 4, the operation process of the graphene stacking device (1) is examined. First, a thermal separation tape (110) is supplied from the thermal separation tape supply roller (11) to allow the thermal separation tape (110) to circulate. The circulation of the thermal separation tape (110) is continuously rotated by the primary driving roller (21: 21a, 21b), the driven roller (22), and the secondary driving roller (23: 23a, 23b). When the thermal separation tape (110) rotates, a graphene deposition film (120) is supplied to the primary driving roller (21) and attached to the thermal separation tape (110). The graphene deposition film (120) attached to the thermal separation tape (110) rotates together with the thermal separation tape (110), and since the graphene on the inner side of the catalyst metal foil is transferred to the thermal separation tape (110), the graphene on the outer side can be removed by a scraper (24). Additionally, a tension roller (25) may be further provided so that the thermal separation tape (110) can circulate while maintaining a constant tension. After the graphene deposition film (120) is attached to the thermal separation tape (110) and rotates, it is first fed into the etching section (30) to remove the catalyst metal foil (121), and cleaning is required because the thermal separation tape (110) is submerged in the etching solution in the etching section (30). Accordingly, washing water is sprayed from the washing unit (40) to wash the thermal separation tape (110), and the washed thermal separation tape (110) is dried with hot air in the drying unit (50). Additionally, drying in the drying unit (50) may be performed in a vacuum atmosphere to completely remove moisture. The dried thermal separation tape (110) continues to move by the secondary drive roller (23), and the sensor unit (26) senses the rotational speed of the target (112) to determine whether n-th stacking has occurred and transmits a signal to the controller (not shown). The controller, having received the signal from the sensor unit (26), drives the cutter (27) to cut the graphene stacked film (100), and the cut graphene stacked film (100) is wound onto the winding roller (60).

[0035] When the graphene laminated film (100) is wound onto the winding roller (60), the graphene laminated film (100) is fed into the heat transfer stage. FIG. 5 shows the stacked graphene (122) from the graphene laminated film (100) to the base film (130). n The step of thermal transfer is illustrated. The thermal transfer consists of a supply unit (70), a thermal transfer unit (90), and a winding unit (80). The supply unit (70) consists of a graphene laminated film supply roller (71) and a base film supply roller (72) through which the base film (130) is supplied. The thermal transfer unit (90) consists of a chamber (91), an inlet thermal transfer roller (92) and an outlet thermal transfer roller (93) mounted on the chamber (91). The winding unit (80) consists of a thermal separation tape winding roller (81) and laminated graphene (122 n It consists of a base film winding roller (82) on which the ) is transferred. A graphene laminated film (100) is supplied through a graphene laminated film supply roller (71), a base film (130) is supplied through a base film supply roller (72), and the laminated graphene (122) passes through the heat transfer rollers (92, 93) of the heat transfer unit (90). n ) is transferred to the base film (130) to form a graphene transfer film (100'). FIG. 6 illustrates the transfer from the thermal separation tape (110) to the base film (130).

[0036] It is obvious to those skilled in the art that the present invention is not limited to the above embodiments and can be implemented with various modifications and variations within the scope of the technical essence of the present invention. Explanation of the symbols

[0037] 1 : Graphene Lamination Device 10 : Supply Roller Section 11 : Thermal Separation Tape Supply Roller 12 : Graphene Deposited Film Supply Roller 20 : Circulation Section 21 : Primary Drive Roller 22 : Driven Roller 23 : Secondary Drive Roller 24 : Scraper 25 : Tension Roller 30 : Etching Section 40 : Cleaning Section 41 : Cleaning Chamber 42 : Spray Nozzle 50 : Drying Section 51 : Drying Chamber 52 : Hot Air Blower 60 : Winding Roller 70 : Supply Roller Section 71 : Graphene Lamination Film Supply Roller 72 : Base Film Supply Roller 80 : Winding Roller Section 81 : Thermal Separation Tape Winding Roller 82 : Graphene Transfer Film Winding Roller 90 : Thermal Transfer Device 91 : Chamber 92 : Input Thermal Transfer Roller 93 : Output Thermal Transfer Roller 100 : Graphene Lamination Film 100' : Graphene Transfer film 110 : Thermal separation tape 120 : Graphene deposited film 121 : Catalytic metal foil 122 : Graphene 122 n : Stacked Graphene 122' : Graphene Membrane 130 : Base Film

Claims

Claim 1 A method for stacking graphene for a membrane, comprising: (a) a step of forming a graphene stacked film by sequentially performing, up to n times, a step of attaching a thermal separation tape to the graphene deposition surface of a catalyst metal foil on which graphene is deposited using a repeatedly circulating graphene stacking device and removing the catalyst metal foil by etching, and stacking graphene onto the thermal separation tape to form stacked graphene; (b) a step of forming a graphene transfer film by attaching the graphene stacked film to a base film made of Cu or Ni and thermally separating the thermal separation tape to transfer the stacked graphene to the base film to form a graphene transfer film; (c) a transfer film cutting step of cutting the graphene transfer film to a predetermined size; (d) a step of separating a portion of the graphene transfer film cut to a predetermined size by removing the base film by etching to separate only the stacked graphene; (e) the separated stacked graphene on the stacked graphene surface of the cut graphene transfer film where the base film was not removed by etching. A method for stacking graphene for a membrane, comprising: a graphene membrane forming step for forming a graphene membrane by attachment; and (f) a graphene membrane deposition step for expanding the graphene crystal size of the graphene membrane or further depositing graphene on the graphene membrane; wherein the graphene stacking device comprises: a supply roller section consisting of a thermal separation tape supply roller and a catalyst metal foil supply roller on which graphene is stacked; a circulation section consisting of a driving roller and a driven roller for continuously circulating the thermal separation tape on which graphene is transferred and stacked a certain number of times; an etching section for etching the catalyst metal foil during the circulation process; a washing section for washing the etched thermal separation tape; a drying section for drying the washed thermal separation tape; and a winding roller for winding the thermal separation tape on which stacking is completed. Claim 2 A method for stacking graphene for a membrane according to claim 1, characterized in that the n-th order is composed of 5 to 20 orders, and the thickness of the graphene membrane is 5 nm to 100 nm. Claim 3 delete Claim 4 A method for stacking graphene for a membrane according to claim 1, wherein step (b) further includes a heat treatment step for removing residue of the thermal separation tape remaining on the thermal separation tape attachment surface of the graphene transfer film. Claim 5 A method for stacking graphene for a membrane according to claim 4, wherein step (d) comprises: (d-1) a step of removing the base film by etching from a portion of the graphene transfer film cut to a certain size and separating it into only stacked graphene; (d-2) a step of washing away the etching solution remaining on the separated stacked graphene; and (d-3) a step of drying the stacked graphene in a vacuum. Claim 6 delete

Images