suction pad

Abstract

The adsorption pad (2) adsorbing the glass plate (G) comprises a pad body (4) that forms an airtight space (S) between itself and the glass plate (G), and a first foam member (5) that is disposed within the airtight space (S) and contacts the glass plate (G). The pad body (4) comprises an exhaust port (6) for discharging gas within the airtight space (S), and a skirt portion (4) that contacts the glass plate (G) from the outside of the outer edge portion (9) of the first foam member (5). The skirt portion (4) is elastically deformable by contact with the glass plate (G) and can also be separated from the glass plate (G) by the restoring force of the elastic deformation.

Description

Technology Field

[0001] The present invention relates to an adsorption pad for adsorbing a plate material such as a glass plate. Background Technology

[0002] In the manufacturing process of a glass plate used as a substrate for flat panel displays such as liquid crystal displays, plasma displays, and organic EL displays, or for solar cells, there may be a process of moving the glass plate while adsorbing it with an adsorption pad.

[0003] As for the adsorption pad, a structure is generally used in which the conical skirt portion of the pad body is brought into contact with the surface of the glass plate, and the gas within the airtight space formed between the pad body and the glass plate is sucked in by a vacuum pump or the like to adsorb the glass plate.

[0004] However, if the glass plate becomes thin, when it is suctioned with a suction pad, the glass plate may bend in the direction of suction, which can cause improper bending, scratches, or breakage.

[0005] Thus, for example, FIG. 9 of Patent Document 1 discloses that a planar pad made of a porous body through which a negative pressure fluid can pass is placed within a sealed space, and that a workpiece is adsorbed through this pad. Prior art literature

[0006] Japanese Patent Publication No. 2012-110982 The problem to be solved

[0007] However, when the configuration of Fig. 9 of Patent Document 1 is applied to the adsorption of a glass plate, the skirt portion of the pad body comes into contact with the glass plate through a thin lip portion formed on the periphery edge of the pad. That is, since the skirt portion of the pad body does not come into direct contact with the glass plate, there is a risk that the adsorption force of the glass plate may be insufficient. Furthermore, Patent Document 1 states that if a thin lip portion is formed by compressing it with a press, the pores are crushed by the press, and thus the lip portion functions as a sealing portion that blocks the passage of fluid. In this case, as the rigidity of the lip portion increases due to the press, flexibility is compromised, so there is a risk of scratching the glass plate during adsorption.

[0008] In addition, Patent Document 1 discloses that when releasing the adsorption of the glass plate, the supply of negative pressure to the airtight space is stopped, but there is a problem that it takes time to separate the adsorption pad and the glass plate. Also, separating the adsorption pad and the glass plate by supplying a gas that pressurizes the airtight space is considered, but in this case, a separate facility for supplying the pressurizing gas is required, so new problems such as the facility becoming complex may arise.

[0009] In addition, the above-mentioned problem can similarly occur when using an adsorption pad on a plate material other than a glass plate.

[0010] The present invention aims to suppress bending of the plate while securing high adsorption force when adsorption is performed by an adsorption pad, and to quickly separate the plate when adsorption is released by the adsorption pad. means of solving the problem

[0011] The present invention, devised to solve the above problem, is an adsorption pad for adsorbing a plate, comprising a pad body that forms an airtight space between itself and the plate, and a first foam member disposed within the airtight space and in contact with the plate. The pad body comprises an exhaust port for discharging gas within the airtight space and a skirt portion that contacts the plate from the outside of the outer edge portion of the first foam member. The skirt portion is elastically deformable by contact with the plate and is also separable from the plate by the restoring force of the elastic deformation.

[0012] In this way, the bending of the plate can be reliably suppressed while maintaining appropriate cushioning properties through the first foam member. Additionally, since the skirt portion contacts the plate on the outer side of the outer edge of the first foam member, it is easy to ensure airtightness within the airtight space and improve the adsorption force. Furthermore, since the skirt portion can be separated from the plate by the restoring force of elastic deformation when the supply of negative pressure to the airtight space is stopped, the time required to separate the adsorption pad from the plate can be shortened. Moreover, since the restoring force of the elastic deformation of the skirt portion is utilized, equipment for supplying gas to pressurize the airtight space is not separately required.

[0013] In the above configuration, it is preferable that the outer edge portion of the first foam member is thinner than the inner center portion of the outer edge portion of the first foam member.

[0014] By doing this, the skirt portion and the plate material come into more secure contact on the outer side of the outer edge portion of the first foam member, so that adsorption errors of the plate material by the adsorption pad can be prevented.

[0015] In the above configuration, it is preferable that the outer edge portion of the first foam member gradually thins out from the inside toward the outside.

[0016] By doing so, elastic deformation of the skirt portion occurs smoothly during adsorption, thereby reducing deformation of the plate material in contact with the skirt portion. Additionally, since the restoration of the elastic deformation of the skirt portion also occurs smoothly, it becomes easier to separate the adsorbed plate material.

[0017] In the above configuration, it is preferable that the first foam member has an exhaust hole penetrating in the thickness direction from the exhaust port toward the plate.

[0018] In this way, negative pressure is applied directly to the plate through the exhaust hole, so the adsorption force of the plate is improved compared to the case where negative pressure is applied through the first foam member.

[0019] In the above configuration, it is preferable that the inner wall of the exhaust port is composed of a second foam member.

[0020] In this way, the area around the exhaust hole of the first foam member is supported by the second foam member rather than the pad body. Because of this, local deformation in the portion located around the exhaust hole within the plate can be relieved, and scratching or damage to the plate can be suppressed. Additionally, since the opening area of ​​the exhaust hole can be made smaller by a significant portion of the thickness of the second foam member, the occurrence of local deformation of the plate itself can also be suppressed.

[0021] In the above configuration, it is preferable that the inner diameter of the exhaust port be 30 mm or less.

[0022] By doing this, the opening area of ​​the exhaust port becomes sufficiently small, so local deformation of the plate material at the location corresponding to the exhaust port can be suppressed, and scratching or damage to the plate material can be further reduced.

[0023] In the above configuration, it is preferable that the plate material be a glass plate. Effects of the invention

[0024] According to the present invention, when adsorption is performed by an adsorption pad, high adsorption force can be secured while preventing bending of the plate. In addition, when adsorption is released by the adsorption pad, the plate can be quickly separated. Brief explanation of the drawing

[0025] FIG. 1 is a cross-sectional view showing an adsorption pad according to one embodiment of the present invention. FIG. 2 is a cross-sectional view showing the state in which a glass plate is adsorbed by an adsorption pad according to one embodiment of the present invention. Figure 3 is an enlarged view of the X region of Figure 2 and shows the state when the glass plate is adsorbed. Figure 4 is an enlarged view of the X region of Figure 2 and shows the state when the glass plate is separated. Specific details for implementing the invention

[0026] Hereinafter, embodiments of the present invention will be described with reference to the drawings. In addition, an adsorption device equipped with an adsorption pad according to one embodiment of the present invention is exemplified below.

[0027] As shown in FIGS. 1 to 4, the adsorption device (1) according to the present embodiment is equipped with an adsorption pad (2) and a vacuum pump (3). In addition, the present embodiment describes the case where the plate material to be adsorbed is a glass plate (G).

[0028] The adsorption pad (2) comprises a pad body (4) that forms an airtight space (S) between itself and a glass plate (G), and a first foam member (5) that is disposed within the airtight space (S) and comes into contact with the glass plate (G).

[0029] The pad body (4) is provided with an exhaust port (6) for discharging gas (e.g., air) within the airtight space (S) and a skirt portion (7) that contacts the glass plate (G) on the outer side in the diameter direction of the first foam member (5). The pad body (4) is composed of an elastic body, such as rubber, that does not allow gas within the airtight space (S) to pass through.

[0030] A vacuum pump (3) is connected to the exhaust port (6) through a pipe (8). By the suction operation of this vacuum pump (3), gas within the airtight space (S) is exhausted from the exhaust port (6), and negative pressure is applied to the airtight space (S).

[0031] The inner diameter (D) of the exhaust port (6) is preferably 30 mm or less, more preferably 25 mm or less, and most preferably 20 mm or less. By doing so, the exhaust port (6) becomes sufficiently small, thereby suppressing local deformation of the glass plate (G) in the suction direction at the part corresponding to the exhaust port (6). On the other hand, if the inner diameter (D) of the exhaust port (6) is excessively small, the time required to discharge gas within the airtight space (S) during the adsorption process described later and the time required to raise the air pressure of the airtight space (S) to a certain level during the separation process become longer, and there is a risk that responsiveness will decrease. For this reason, the inner diameter (D) of the exhaust port (6) is preferably 10 mm or more.

[0032] The skirt portion (7) can be elastically deformed by contact with the glass plate (G) (see FIG. 2 and FIG. 3), and can also be separated from the glass plate (G) by the restoring force of the elastic deformation (see FIG. 4). In this embodiment, the skirt portion (7) forms a conical shape and gradually becomes thinner from the inside to the outside. The leading edge (7a) of the thin-walled skirt portion (7) becomes the contact portion with the glass plate (G).

[0033] The first foam member (5) has a relatively thin outer edge portion (9) and a relatively thick center portion (10).

[0034] The outer edge portion (9) gradually decreases in thickness from the inside toward the outside. The center (10) is a plate-like body with approximately constant thickness. The glass plate (G) side surface of the outer edge portion (9) and the glass plate (G) side surface of the center (10) become contact surfaces (5a) that contact the glass plate (G).

[0035] In this embodiment, an exhaust hole (11) is formed in the center (10) that penetrates in the thickness direction from the exhaust port (6) toward the glass plate (G). Additionally, if the first foam member (5) has breathability, the exhaust hole (11) may be omitted, but it is preferable to form the exhaust hole (11) from the perspective of improving adsorption power. Also, in this embodiment, the inner diameter of the exhaust hole (11) is the same as the inner diameter of the exhaust port (6), but it may be larger or smaller than the inner diameter of the exhaust port (6).

[0036] The first foam member (5) is fixed to the inner wall of the pad body (4). Additionally, the method of fixing the first foam member (5) is not particularly limited, but for example, it is fixed to the inner wall of the pad body (4) with an adhesive.

[0037] In the pad body (4), the first foam member (5) is not fixed to the inner wall of the leading edge (7a) of the skirt portion (7). That is, when viewed from the glass plate (G) side, the leading edge (7a) of the skirt portion (7) protrudes outward in the diameter direction of the first foam member (5). The width (W) of the protrusion in the diameter direction of the leading edge (7a) of the skirt portion (7) is preferably 2 mm to 10 mm.

[0038] A through hole (12) penetrating in the thickness direction is formed in the center of the pad body (4), and a cylindrical second foam member (13) is disposed on the inner wall of the through hole (12). That is, the inner hole of the cylindrical second foam member (13) is configured to function as an exhaust port (6). By disposing of the second foam member (13) in this manner, it becomes easier to adjust the inner diameter of the exhaust port (6) according to the thickness of the glass plate (G). Additionally, the area around the exhaust hole (11) of the first foam member (5) is supported by the second foam member (13), which is prone to deformation, rather than by the pad body (4). Because of this, local deformation in the part of the glass plate (G) located around the exhaust hole (11) can be mitigated, and scratches or breakage of the glass plate (G) can be suppressed.

[0039] The second foam member (13) is inserted into the interior of the through hole (12) in a compressed state and is fixed to the inner wall of the through hole (12) using its restoring force. That is, the second foam member (13) is not adhesively fixed to the inner wall of the through hole (12). The insertion depth of the second foam member (13) is regulated by the first foam member (5). The method of fixing the second foam member (13) is not particularly limited, and, for example, it may be fixed to the perimeter wall of the exhaust port (6) with adhesive. In addition, the second foam member (13) may be omitted.

[0040] As for the first foam member (5) and the second foam member (13), a porous elastomer having an independent cell structure or a continuous cell structure may be used, for example, a polyurethane sponge. Additionally, the first foam member (5) and the second foam member (13) may be made of different materials with different foaming ratios, etc. In this case, the first foam member (5) may be high density (high hardness) and the second foam member (13) may be low density (low hardness). Of course, the first foam member (5) and the second foam member (13) may be made of the same material.

[0041] Next, an adsorption process for adsorbing a glass plate (G) and a separation process for separating it are described respectively by the adsorption device (1) having the above configuration.

[0042] As shown in FIG. 1, in the adsorption process, the leading edge (7a) of the skirt portion (7) of the adsorption pad (2) is brought into contact with the surface of the glass plate (G). In this state, the gas within the airtight space (S) of the adsorption pad (2) is vacuum-suctioned by the suction operation of the vacuum pump (3). When the air pressure in the airtight space (S) decreases, as shown in FIG. 2, the skirt portion (7) of the pad body (4) is strongly pressed against the surface (Ga) of the glass plate (G) while following the decrease in the volume of the airtight space (S), and the skirt portion (7) undergoes elastic deformation. Accordingly, the contact surface (5a) of the first foam member (5) within the airtight space (S) is also strongly pressed against the surface (Ga) of the glass plate (G), and the first foam member (5) undergoes compression deformation. At this time, as shown in the enlarged view in FIG. 3, the leading edge (7a) of the skirt portion (7) comes into contact with the surface (Ga) of the glass plate (G) and is deformed to bend along the surface (Ga) of the glass plate (G). Accordingly, the glass plate (G) is securely adsorbed to the adsorption pad (2) by negative pressure.

[0043] In this state, since a first foam member (5) having suitable cushioning properties is pressed against the surface (Ga) of the glass plate (G), bending of the glass plate (G) in the suction direction is suppressed. Therefore, it is difficult for bending caused by improper bending to occur in the glass plate (G), and defects or breakage of the glass plate (G) can be suppressed. In addition, since the skirt portion (7) is in direct contact with the glass plate (G) on the outer side in the diameter direction of the outer edge portion (9) of the first foam member (5), it is easy to secure airtightness within the airtight space (S) and improve the adsorption force.

[0044] In the separation process, the suction operation of the vacuum pump (3) is stopped, and the airtight space (S) is opened to the atmosphere. Accordingly, when the air pressure in the airtight space (S) rises to a certain level, as shown in the enlarged view of FIG. 4, the leading edge (7a) of the skirt portion (7) attempts to return to its original shape by the restoring force of elastic deformation. Due to the restoring deformation of the leading edge (7a) of the skirt portion (7), the glass plate (G) is pressed in a direction away from the suction pad (2). As a result, the glass plate (G) is quickly separated from the suction pad (2). This allows the time required to separate the suction pad and the glass plate to be shortened. In addition, since the restoring force of the elastic deformation of the skirt portion (7) is utilized, there is also the advantage that equipment for supplying gas to pressurize the airtight space (S) is not separately required.

[0045] In the adsorption process, the leading edge (7a) of the thin film, which is deformed to bend along the surface (Ga) of the glass plate (G), preferably has a thickness of, for example, 2 to 10 mm. In addition, the leading edge (7a) of the thin film preferably has a diameter width of, for example, 2 mm or more, more preferably a protruding width (W) or more, and even more preferably (W+5) mm or more. The upper limit is preferably, for example, (W+15) mm or less.

[0046] As described above, in the adsorption process, the curvature of the glass plate (G) in the suction direction is suppressed by the first foam member (5) having suitable cushioning properties. For this reason, it is desirable for the glass plate (G) to have flexibility. Since the effect of suppressing the curvature of the glass plate (G) becomes more pronounced depending on the thickness of the glass plate (G), it is desirable for the thickness of the glass plate (G) to be 0.5 mm or less, more desirable to be 0.4 mm or less, and even more desirable to be 0.3 mm or less. The lower limit is preferably 0.05 mm or more.

[0047] Although embodiments of the present invention have been described above, the present invention is, of course, not limited to these forms, and various forms are possible within the scope of the present invention.

[0048] The suction pad (2) is used, for example, when moving the glass plate (G) during the manufacturing process (mainly the processing process) of the glass plate (G). Specifically, it is used when moving the glass plate (G) after cutting it to a predetermined size, when taking out a glass plate for inspection from the conveying path of the glass plate (G), when stacking the glass plate (G) on a baling pallet, when taking the glass plate (G) off from the baling pallet, etc. In addition, the suction pad (2) may be used to suction and separate the glass plate (G) in a vertical position (for example, vertical position) and may be used to suction and separate the glass plate (G) in a horizontal position (for example, horizontal position).

[0049] In the above embodiment, the case where the restoring force of the elastic deformation of the skirt portion (7) is used when separating the glass plate (G) from the adsorption pad (2) has been described, but the restoring force of the elastic deformation of the skirt portion (7) and the supply of gas into the airtight space (S) may be used in combination during separation.

[0050] In the above embodiment, the case where the plate material is a glass plate (G) was described, but the plate material is not limited thereto. For example, the present invention can also be applied to plate materials such as metal plates, silicon plates (silicon wafers), resin plates, and laminates of glass plates and resin plates. From the perspective of obtaining the effect of suppressing the curvature of the glass plate (G), it is desirable for the plate material to have flexibility. Explanation of the symbols

[0051] 1: Suction device 2: Suction pad 3: Vacuum pump 4: Pad body 5: First foamed member 5a: Contact surface 6: Exhaust port 7: Skirt section 7a: Tip section 8: Piping 9: Outer edge 10: Center 11: Exhaust hole 12: Through hole 13: Second foamed member G: Glass plate Ga: Surface S: Sealed space

Claims

Claim 1 As an adsorption pad for adsorbing a plate, the pad body forms an airtight space between itself and the plate, and a first foam member disposed within the airtight space and in contact with the plate; the pad body has an exhaust port for discharging gas within the airtight space and a skirt portion that contacts the plate from the outside of the outer edge portion of the first foam member; the skirt portion and the first foam member are elastically deformable by contact with the plate and are also separable from the plate by the restoring force of the elastic deformation; the skirt portion is conical in shape with a thickness that gradually decreases from the inside to the outside; the outer edge portion of the first foam member is covered by the skirt portion and also has a thickness that gradually decreases from the inside to the outside; in a state where the plate is not adsorbed, the leading edge portion of the skirt portion protrudes from the outer edge portion of the first foam member toward the side opposite to the suction direction, and the outer edge portion of the first foam member is the outside of the first foam member A suction pad characterized by protruding to the opposite side of the suction direction, rather than the center of the inner side of the edge portion. Claim 2 An adsorption pad according to claim 1, wherein the first foam member has an exhaust hole penetrating in the thickness direction from the exhaust port toward the plate. Claim 3 An adsorption pad according to claim 2, characterized in that the inner wall of the exhaust port is composed of a second foam member. Claim 4 An adsorption pad according to any one of claims 1 to 3, characterized in that the inner diameter of the exhaust port is 30 mm or less. Claim 5 An adsorption pad characterized in that, in any one of claims 1 to 3, the plate material is a glass plate. Claim 6 delete Claim 7 delete

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